クリーン機器・装置
Contents
1. a 1 1 1 1 1 1 12 2 3 Y Y Om I 0 IN2. tage FFU RoHS CE 11Smm 10dB a iz b I HEPA 4 40mm i F Cube 115mm i RoHs a 349 6 F Cube _O HEPA 7 40mm
3. TEL 03 5435 7265 FAX 03 5435 7435 TEL 042 585 6163 FAX 042 585 6154
4. PT i 1 5 RS485 _ E Site F Planet F Planet Ethernet Web n Ethernet FRN FRN gt VAVAVAVAVAVAW
5. hn Da 500 610 610 5 610 1220 DC 1 200V 3 200V CE 15 1 12 2 F Stage61 F Stage122 CE 0 5 0 35 0 5 0 35 0 37 0 3 gt E Stase40 FFU F Cube FFU 150mm 6 H150mm AT lt eA F Cubc24 5 gt gt 1 100V 6 240 350 450 500 610 610 x 1220 1 100V 50 60Hz ULPA 0 1 m 99 999 3 min SUS
6. 0 10 0 20 0 um 7 EPS NT OO lt i 0 01C 0 5 C
7. e Front runners CR FFU
8. EVV aaa 2 kW AVAVAVAVAVAVAVAVAT VAVAVAVAVAVAVAVAVA VaAVAW A TAWAVAW FRN a Site F Planet 30 a 28 18 5 M OO
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