熊本大学学術リポジトリ Kumamoto University Repository System
Contents
1.2. B
3. 1 000m 20um 1 000m 2um
4. 2 5um 300m min S0nm Az 1
5. B
6. 104 2002 4 2004 10 6 3
7. B THi 22V 4A1 oc B Ti 6Al 4V 3 7 1
8. 100nm Az o B 5S0nm Az B 200nm Az 2 000m B 150nm Az
9. 5 3 r 8um
10. km
11. 2 6 200nm Az 3 gt 2 9s2DProfile 2DpProfiles 3 2D Profiles XX Ra l 96um Rz 6 45um _X X Ra 3 53um Rz 3 53um ET 3 4D Fm 1 35 3 3 i i 33 3 Y Y Ra 83 59nm RE 288 04nm YY Ra 50 86nm 157 32nm Y Profile Circular Ra l4 68nm Rz 33 63nm mT HM _ a di L a bb c 2 31
12. 1 1 1990 80nm S 10nm Az
13. 50mm 15 EL SUS316 a rs ih bh Ti 6A14V ceninieninir le a ii a Pa 5 7 ri 1 6 12 a B SUS316 V 0 150m min f 2um rev d 5Sum L 982m 100 6 6 4 cw B
14. 1 1 WYKO 2 31 2 3 2 r 2 5um 4 Sum 3 0um 2 29
15. 4 4 16 lt 1m min 2 100um 4 10 7 5um g 100um 2 5um 4 12 60m min d 5um d 1 000um 4 14 212m
16. 10nm Az 0 3nm 30 2
17. 2005 4 _ UEX
18. 1 1 3 1 100nm Az 50nm Az 100nm Rz2
19. 4 0 5um 2um Sum 10um 20um 5 5Suum 2 5um 7 0um Spum 0 5um 9 47 60m min 2um rev 7 550m 3 9117A1 5
20. 4 100nm Az Sum 300nm Az 3 B
21. 1 3 1 1 Spindle speed X axis stroke 150 mm Z axis stroke 100 mm axis 0 01 wm Positioning accuracy Z axis 0 01 wm Diameter of vacuum chuck omm 1 2 ULC 100A 1 10nm 1mm 50nm 90 ga
22. 100nm Az 4 lt 1m min 100nm 84nm 103 7 z
23. o B 52nm Rz 100nm Az 100um JIS IL WYKO 171nm Az r 98nm Rz cy
24. 7 550m Tool feed direction Tool feed direction cuin EE allowamee a or a Pa Em OE a A rm a rm mm Warked layer of befnre finish cut Ds Worked layer of fimished cut De Warked lawer Dn eh Tool feed direction Tool feed direction i Wonrked layer of before finish cut Doar Sh LF em yg 1 m layer of finished cut Dn Worked laver De b Worked laver of before Finish Cut Dr DSurface of before cutting Surface of preparation cutting Finished surface 3 6 45 3 20um
25. oc B 50mm 93 6 2 lt 6
26. g s Principal force N Thrust force N b 3 16 d 5um 1um V 60m min f 2um rev ds 2 Sum L 50m 53 3 Es A 3 1 h E a E p 3 1 2 5um 100nm Az 3 16 pl so EA 50nm
27. r lt 1m min 4 17 1um B
28. 5 6 1 2 7 0 4mm d sum 13 123um 63um 2 2
29. 100nm Az 2Lm rey 100nm Az d 1um 5 2
30. 1 o B 2 100nm Az 6 3 2 101 6
31. 2 2 ULC 100A 2 1 2 2 50mm 20mm B Ti 22V 4Al WC TiC Co TiC Ni
32. 4 3 2 4 9 lt 1m min 2 5um 2um rev B 212m 2 000m 10 000m 2 1 yr 4 9 a4 7 212m 60m min 100m 100nm
33. SSnm Az 9 2 2 3 5 Cutting direction a Cutting direction Chi E 8 De gE C
34. 200 o B Ji 6A1 4V 60nm Az 1um 100am Az
35. 7 212m Hr 450nm Rz 2 12 B 2 12 WYKO 2 13 2 13 WYKO 2 rr Cutting direction 1 RR ORI EOI FU A ma
36. 6 10 b 89mm A B Flank tace gt re i oe a b 6 9 oc B 0 150m min f 2um rev d 5um 982m a fc 32 Hm lc 160 nm f wy Contact length Final contact length Workpiece XX axis Contact length ic 120 pm A lt a Cutting tool Xu 1 Cutting tool 8 EAR 0 I We Position A x 01 Position B x 25 _ a r Omm b r 25mm 6 10 0 150m min f 2um rev d 5Sum 982m 99 6 A X Z 23 00 3 49
37. WYKO 3 Hrap 35 nm Az 108 Fill nll i 400 Qn a oo BOD D0 OO DO 11DO 1 b WYKO 3 Feed direction Rad ilnm fe 233 06nm Cutting direction Re l 02nm Rz 6 67nm aE aa 4 17 tC 1 Be eo am ER 1 130 MM 3 ed m FT 1 7 5 7nm Az 100nm c WYKO 2 Az Hr 23nm 4 17 B lt 1m min f 2um rev d lum 212m 7 4 Az
38. 100 1 000m 100nm ZAz 3 100um 100nm B d 2um 3 xp 100nm Rz
39. ry 15nm Az 59nm Zz 54 3 19 B 3 19 3
40. B 100nm Zz 2um 03 4 4 2 Te A ULC 100A 5se 5
41. WYKO 3 22 3 22 a 2 21 3 pj 120nm Az o B 3 spy 67nm ZAz 3 23 WYKO 3 23 99nm Az 2 22 a B rcap 72nm Rz 100nm Rz
42. 3 Sum 2 Sum um 120nm Az recap 80nm Rz d 2um rcup 5SOnm Rz r 100nm Rz d 2um 2 S8nm Az 2 r 155nm Rz 58nm Rz 5
43. 66 4 lt 1m min 60m min Principal foree N p LL FE ena 0 hieasurenent b _
44. 1 V V 100nm Az 1 4
45. 4 0 5um 2 r 78nm Rz 100nm z 5Sum 2 Sum 46 3 3 3 2 5um
46. 50nm Az 75 4 4 4 lt 1m min 1 B 2 84nm Az
47. Dl 39 3 3 2 PE 2 ULC 100A MO 3 1 3 1 ape 3 2 3 1 B co B 50mm 10mm TiCNO
48. 30 NC 10nm Az 7
49. 1 2 2 3 2 1 B 47 60m min 2um rev 2 5um
50. 2 29 82 5 8 a Maen 38 nm Az 5 8 b 150nm 5 5 7 21 000m 200nm Az 5 Feed direction gr 8 70mm Rz 38 08rm Cutting direction gi0 67Hm fe 2 70Lum BN es Cutting ed EE 7 te 30nm b Y Y Sum OFHC a X X 5 8 7 2 000m
51. 100nm Rz 4 Azu 8 R 7
52. 4 10 1 1m min 2
53. 100nm Az 5 18 16mm B nn 3 1I0 3 3 3 5 16 10um rev 60m min f 10um rev d lum 100m a Thrust fewrce N 43 dO 0 3 2 15 20 25 35 4 hleasurement CMe sEC UreMmMent Lime Ee a b 5 17 10um rev V 60m min f 10um rev d lum L 100m 100m 0 Um 1 21 000m n LEELENE Ns BLBE I EE mmm 1 ue ee ye 80nm 6 Hr 97nm Rz Hr 204nm Rz Hra 1Snm MP Hra 30nm re EF se mm am 10mm 1 5 18 B
54. r 200nm Rz 2 r 448nm Rz 218nm Rz 3 SSnm 129nm Az
55. 3 p 121nm Az 2 17 40nm Az 2 26 2 26 r 98nm Rz 40nm Az 2 26 100nm Az 43nm Az 2
56. 2 8 B 2 8 B ki 80 2R65 95D 80 2 8 B 60m min d 5um L 212m f 2um rev i Hag SHiTacr Rislirs MAVCO EO Nik Ps 1 KT SN 3 Sp 33 Surfaee Da AD 760 3 nm P V WYKO 2 9 WYKO 2 9 B V 60m min d 5um 212m f 2um rev 3
57. 2 33 SEM 2 31 c 3um 2 33 6um d sum 2 33 54 2 2 33 SEM 2 gy Diameter of particle 2 34
58. 3 3 b Meg 194nm Zz 172nm Az 120nm Az 20nm 3 4 2 0 5um 2um Sum B Sum eg 3 4 a 0 5um 3 2 3 4 b
59. SEM 2 um 288nm Az 157nm Rz 2 nm 6nm Az 6nm z
60. C D 32um A D D Xp Zp 0 00 0 000 160um oo Ele Meek ele hG EER ein 6 6 6 7 WYKO o B 6 12 SUS316
61. 2 7 b 40um 100nm Rz a EN Tu ONAN 200m 8 CIITANIT 100nm Rz 8 ENUM ON ex s cg Ll DT RE Hr 1 i
62. 4 1 Machine tool Ultra precision Lathe ULC 100A Toshiba Machine CO LID 8 Cutting tool Coated cemented carbide tool Nose radius 0 4 mm 1 6kHz Rake angle 0 deg 1 SkHz Relief angle 7 deg Workpiece material PB titanium alloy Ti 22V 4AI P A Cutting fluid Water immiscible type cutting fluid Type Y 0 016mm g Cutting conditions Cutting speed lt 1 15 60 110 m min 0 012mm g Depth of cut d 5 100 500 1 000 um Feed rate f 2 um rev 64 4 3 4 3 1 3 lt 1m min 60 m min B 4 3 a lt 1m min
63. b lt 1m min 212m Vb 5Sum 4 000m 7um 10 000m Vb 9um tm Ab 4um 10000m 4 10 um m 60m min lt 1m min gt 4 212m Pb 12um Kb 1 X10 um m lt 1m min 2 5 3 000m 16um 7 7 j 200nm Az s
64. 2 29 WYKO r 10nm Rz Snm 0 1um 2 29 ay Y Y WYKO 2 29 b Y Y X X
65. B 2 35 2 35 a 1um 2 35s b 10pum 5 Hm RLL I CT MNT RR TA WIMAXRXAXNAXARAXXAXRIRNRKINXRARXWAAMIAYAAIRILNI UAMRMAARAAIXXAWRAWRXYAI TIILIIMANMMAMNALIAEIMIIMIMRISWITTW OOO OO A CC A CO MCI MI WN RM MR RNR MMM RRM MM TI PT err 3 um IA IA IL AA IMA RERIRMNWNINEN WW NINEIMATAMMALMRLNAMNINMHMELMMNHMMWMNWWIHLMUAMINUIUIMUEE MM TINNIININIIIWIIINNMIRNEINMNI
66. 2 3 6 3 2 6 3 a X Z 6 3 b 3 C DNC 6 4 X 100um 6 4 Aspheric polynomial equation 6 5 2
67. 60m min 100um B WYKO 4 4 4 4 a WYKO 3 Hrip 112nm Az 100um 3 4 4 a raspy 164nm Rz 50nm Rz 3 WYKO 4 Fa 1 HF So E 1 Mb Hi ri 1 EEE i A I 1 1 1 1 Crystal grain FE Culting dire
68. 59 3 3 4 B o B 1 B 0 5Sum d 5Sum 2 78nm Az 2 100nm Zz 2 Sum
69. 20umX20um 2um 5 f 2um rev 20um rev AFM 3D image y Rz i 39 8 mlF V Ra 10 1 mm 5 11 2um rev AFM 60m min f 2um rev d lum 100m 175 Cutting tool Single erystal dhamnnd toal S 150 Warkpiece material B titanium alloy CulLmg speed 537 66 m min i 125 Feed rate f 2 30 pmirev ee Denth nf cut d 1 pm 100 Hr op Feed direction 75 8 50 Cn 23 0 Feed rate f pum rev 5 12 B 2 r 40nm Rz 10nm Rz2 WYKO 3
70. 2 3 B 100nm Az 5um 1
71. 4 B 5 d 1um 90 5 1 C 1998 Vol 64 No 627 pp 332 2
72. 1 0 2 6 130um 200um 2 4 2 5 10um Hrcuy 101nm Rz 12nm 2 6 2 7 Pi ees 2 7 a
73. 1um d 1um 50um rev 7 6 000m 100nm Az 13 000m 200nm z 10um rev 20 000m 50nm Az 2pm rev 33nm Az Hra 4nm Ra 3
74. ULC 100A 5 1 5 1 16mm 10mm B 100mm Diamond tnnl Tool feed djrection 5 1 Vacuum 20mm geass 4 2 Hr 200nm Rz y 4 Dynamometer 5 2 10 N
75. 2 36 2 0um 3 9 2 2pm rev rw f 8R 7 1nm Az
76. 7 2 500m 200nm Az 20 7 4 1 B 2007 2 2007 2007 pp 69 3 2004 2004 pp 931
77. i 8 ds 20um b 2 10um 3 2 20um 10um Y 60m min f 2um rev d Sum 550m d 20um 4d 10um eg Mg 6X mw Nialiwtiee dt a Ts Nun S31 nm re 5 I Th mE km Pe 5 TA rm iP i Hh hd PS iy OU Ht Sm wa he samelng Taimm me Pa kp RmOnmiPrV 205 2 1 a mm 150 000 160 0 160 0 0 000 1200 120 0 DD 50 000 oo 400 400 1 1E EMD TE oo 2 1 lm Gn ul so O00 1500 mao TB lil OO 1000 1 DD 7 a WYKO 3 ILS 2D Profiles CCL 2D Profiles _ X Profiles Ra 38 33nm Rz I94linm X Profiles Ra 31 12nm Rz l71 76nm tO sm Y Profiles Ra 25 40nm Rz 123 8In b WYKO 2 3 3 d 20um 10um WYKO 60m min f 2um rev d 5um L 550m 42 3 100um 3 3 a 270 200um 3 rjp 288nm Rz
78. SEM 2 23 b Flank face Lio0um CONN OU a b 2 23 B V 60m min f 2um rev d 5Sum L 212m Cutting direction a rt a a i EEE EE 3 3 Ei FE EE i OOumy 8 FE 3 a x200 2 24 B 60m min f 2um rev 5uum 212m ag 31 urnce rie 1 ll am Et 3 IN a Rar3D 120 TinmiP V 205 2 1 150 000 160 0 _ 50000 120 0 0 0 50 000 40 0 150 000 0 0 00 500 1000 1500 2000 276 2 2 25 B 60m min f 2um rev 5um 212m 7 2
79. 6 8 270um 2 7 355Sm 95nm Az 940m 97 6 91nm Az g 15nm ra 10nm 2 1 000m
80. 2000 Vol 66 No 9 pp 1456 3 J Schmttz E Brinksmeier E Bischoff Sub surface deformation in vibration cutting of cupper Precision Engineerring 2001 Vol 25 No 3 pp 218 4 Daniel Grimme Werner Preuss Ekkard Brinksmeier Machining of hard coatings in optical qualoty Proceeding of American Society of Precision Engineering 2003 2003 Vol 19 C 1998 Vol 64 No 624 pp 407 6 1987 No 1 pp 31 7 Ekkard Brinksmeier Ralf GI8be Precision machining of steel with ultrasonically chilled diamond tools Proceeding of American Society of Precision Engineering 2002 2002 Vol 17 pp 275 8 4 2001 Vol 67 No 11 pp 1871 9 1991 Vol 57 No 11
81. 3 6 4 2 Dps 4 Da 3 6 b
82. 1 2002 Vol 68 No 7 pp 928 2 2004 pp 219 3 2005 2005 pp 801 4 2004 pp 45 CNC SPCNC 6 Shigehiko SAKAMOTO Heiji YASUI Akira SHINOZAKI Manufacturing of the Aspheric Stanless Steel Die by Ultra Precision Turning Using Coated Cemented Carbide tool Proc of Sth euspen International Conference Montpelhier France 2005 pp 603 7 2004
83. 5 lt 3 0um 2 x 92nm Rz 3um 2um EIGAMLR 205420 3 16 i i 5um 2um 15 7 50m 3 16 dr Sum 0 8N 1 5N
84. 100nm Az 98 6 6 3 2 6 9 C B2 EE Rakc face i i SEM 6 9 a4 o B 8um 6 9 b SEM Vo 26um 17sum 6 4 123 um 50 um 6 10
85. T ShFFire mt ID TO rm Fi L MCE Hh hE ce HH I HI Ys Some 18 etre SEE DMA ra 8428nm PV A NII 125000 TTT TN aN 50000 NU 0 000 I ER IL TDAIIUDN NIRE Pe o wa A AN EL 00 500 1000 150 0 200 0 276 2 Hr a b WYKO3 Feed direction Ag 10 3Snm Rz 58 80nm Cutting direction Ra 2 8Inm Riz l4 7Inm 1 ii TA 50 tm 150 Ei FE c WYKO 2 g 2um B V 60m min f 2um rev d 2um L 550m 3 18 f 8 V 60m min f 2um rev d 2um 550m 50um 3 19
86. 300nm Az 100m 6 X Z 2
87. 0 1um rev 9nm Ra 0 02um rev Snm Az 1 2 3 3 4 6
88. 2 36 1 E 2 36 22 1 mj nm miz 300nm Az 36 2 2 4 4 1 B
89. 7 100m 6 000m 5 3 a 7 100m 50um B 5 3 b 6 000m 100m 100um 7 100m 5 4 WYKO 5 4 b 5 a 9 BU 3 100m 0 7 6 000m 5 3
90. 3 rp 99nm Az 96nm z 100nm Az 3 12 c 49 3 2D Profiles Feed direction Ra 3 02nm fs 68 Tnm Feed direction tua Tr 2D Profiles 2D Profiles Ra 9 09nm Re 57 93nm Feed direction Ra l8 lnm fe 107 69nim 1 30 0 1HO 150 nT 3150 ET 139 39 3 Fe 0 109 1 a 330 1 Cutting direction Ra 3 06nm Rz 20 1llnm Cutting direction Ra 4 09nm Rz 20 89nm Cuttingdirection Ra lS 14nm 52 01nm 190 r toe oo a ds 1 5um b 7 2um c ds 2 5um 3 12 d 1 5 2 2 5um B 2 WYKO V 60m min fr 2um rev d 1 5 2 5um 550m Cutting direction i Cutting direction Cutting direction a 9 0um b d 0 5um c ds lum 3 13 d 0 0 5 1um B V 60m min f 2um rev ds 0 1 0um 550m
91. 5 12 100m nw 2um rev AFM 10uum rev 4 5 2 Hr 5Onm Rz mm a b WYKO 3 Feed direction Aoik90m R 2527nm Cutting direction Ag247nm Re ll 49nm 3 15um rev lp 1 c WYKO 2 Erkoj Wi hi rm Ascsipas RN si SS ama or Ra i MI oa eo uiting directinn UE Rb
92. 5 15 d 5Sum 5 15 2 0N 2 5N 5 15 2 1um 0 6N 0 8N d 5um Sum 1um 30 5 Cuthng tool Singlc crystal dhamond tool 3 Workpiece material titanium alloy Cutting speed 37 66 m min Hr or BO Feed rate f 10 pim rev 4 Deplh ofeut de 1 pm a GU 4 eo er Hr op Feed direchon 3 0 20 Thenoretical value Hrih 3 13nm 0 5 000 10 000 13 000 20 000 Cutting length m 5 14
93. aT AS 2D Profiles Feed direction Ra 35 80nm R17l llnm Feeddirection Ra T7 Rinm 31 84nm 1 99 JWA 1903 2D Profiles KC D 5 1 13 300 330 Cutting direction fa l Cutting direction Ra 5 97nm Ra 34 d44nm 109 to 5 lm Fi li El i 1 III a JIS I b c B 2 22 WYKO2 60m min f 2um rev d 5Sum 212m 2 22 b 2 52nm Az rceup 34nm Rz 52nm Az 2 19
94. ULC 100A 1 2 1 1 X Z 10nm X Z 2 3 1982 CNC
95. 100nm Rz B d 2um 3 Hrp 96nm Az 2 20 2 21 eo B o B 5 o B d 2um 3 21 Pe 0 CH i Co Pa ER EDGE PE EE ri a Ee at 3 hi Cutting direction ae
96. B 2 60m min f 2um rev d 5um 212m rm Ee A Flank ee RN SO SN bn On 6 a b 2 15 B V 60m min f 2um rev d 5Sum L 212m 2 16 B
97. NN 8R X103 nm a i I 100 RN Theoretical val 50um rev 9 Hrin 78 13nm r 4mm E 0 0 MT s 000 10 000 15 000 20 000 6 000m 320 5 5 B 100nm Az 50um rev ru 78 nm Az 6 000m 15 000m 150nm Rz 21 000m 200nm Az
98. 100nm Rz 7 2 6 11 1 1 _ 1994 pp 233 2 2004 pp 330 3 1989 Vol 30 No 2 pp 1 4 _ 2006 DD 2 3 5
99. 7 212m SEM WYKO JIS B 0601 2001 Az 3 rsp Rz Rz rcup Rz ya mm 2 1 Machine tool U1tra precision Lathe ULC 100A Joshiba Machine CO LID Cutting tool Single crystal diamond tool Cermet tool Cemented carbide tool Coated cemented carbide tool Workpiece material Pure titanium JIS class I B ttanium alloy 11 22V 4A1 a B titanium alloy Ti 6Al 4V Cutting fluid Water immiscible type cutting fluid Type Y Cutting conditions Cutting speed V 47 60 m min Depth of cut d 5 um Feed rate f 2um rev Cutting length 212 m 16
100. mr 2 18 B 2 60m min 2uum rev d 5um L 212m a b 2 19 B 60m min f 2um rev d Sum 212m 24 2 2 3 2 2 20 130nm Az o B Cuttingdirection F 1 i i E ET ba P 2 20
101. TiCNO 4 10mm 0 7Mpa 40ml 2 Fluid noz 2 1 Diamond tnal Tool holder Magnetic disk plate Tool feed direction Oil scattering preventien case 500mm 2 3
102. 2 3 14 b 2 r 100nm Rz 1um 2 74nm Az 3 13 b d 0um 73nm Az d 0 5um d 1um rcup 30nm Rz 3 0um 2 0um
103. 60m min f 2um rev d 5um 212m 2 A 2D Profiles mW AWT WW UY 5 1 1 sn 4 Cutting direction Ra 33 39nm Rz 234 20nm i002 250 mi 1003 503 2 10 B 2 VF 60m min d 5Sum 212m f 2um rev ha ca ta ion SS Om RN NAM directio b 2 11 B SEM 2 11 a 2 Sum 7 5um 2 11 b
104. 1 3 50nm gai obscene
105. 5 5 1 2 200nm Az 100nm amp z 5 800
106. 81 5 6 S0um rev 100m 6 000m 100m 5 6 ay 18um 6 000m 27 um B 57 5 Tnol wear b 6 000m a 100m 5 6
107. 100nm Az B 150nm Az Es 2 2 15 B SEM 2 15 a MM 2 15 a 1 J 2D Profiles FCS direction Ra 34 38nm Rz 218 43nim 5 100 150 ma 350 Cutting direction Ra 31 75nm Rz 157 8Snm 100 2 15 b 2 14
108. 2 20 a V 60m min f 2um rev d Sum L 212m S Eee ee a Ro Fu0 gmit EE B 0 Sc oo 00 1000 1900 ONO 2792 oo 500 1000 En 200 0 0 a JIS II b c B 2 20 b o B 2 21 WYKO 60m min f 2um rev 5LLm 212m o B 1um 2 20
109. 60m min f 2um rev d 5um L 212m 2 5 2 4 WYKO 2 5 276umX 205um 3 rsp 286nm Rz z 31nm 2 6 WYKO 3 2 6 2 4 r 197nm Rz Hra 29nm ks 100nm Az
110. 2 4 9 2 Profiles WM direction Ra 28 77nm Rs 196 60nm Cutting direction Ra ll 89nm Rz 100 68nm 100 2 6 B 2 V 60m min f 2um rev g SLm 212m b 2 7 b 2 7 B 212m 60m min f 2um rev g 5um 212m NN 2 B 140um
111. 200um 2 129nm Az ra 23nm 100nm Az 100nm 2 2 16 B 60m min f 2um rev d 5um 212m Mnde PSI 5 gi 16 60 nm ie EN TE Rannig 3 6 nn Suriace Dala Ri T6425 nm PF Y 00 500 100 0 150 0 200 0 276 2 2 17 B 60m min f 2um rev d 5um 212m Az reap 102nm Az ra 21nm 2 19 B
112. Wacuum Chuck Tool feed direction A 3 3 1 Machine tool Ultra precision Lathe ULC 100A Toshiba Machine CO LTD Cutting tool Coated cemented carbide tool Nose radius 0 4 mm Rake angle 0 deg Relief angle 7 deg Workpiece material B titanium alloy Ti 22V 4Al Cutting fluid Water immiscible type cutting fluid Iype Y Cutting conditions Cutting speed V 47 60 m min Cutting length 550m Preparation Cutting Depth of cut de 0 5 20 um Feed rate ff 2 um rev Finish Cutting Depth of cut dr 5 um Feed rate f 2 um rev 3 2 Machine tool Ultra precision Lathe ULC 100A Toshiba Machine CO LID Cutting tool Coated cemented carbide tool Commercial tool Formed tool Nose Iadius 0 4 mm Rake angle 0 deg Relief angle 7 deg Workpiece material Pure titanium JIS class I P titanium alloy 1i 22V 4Al a B titanium alloy Ti 6Al 4V Cutting fluid Water immiscible type cutting fluid Type Y Cutting conditions Cutting speed V 47 60 m min Cutting length L 550 m Depth of cut d
113. 2um 2um rev 2hm 3 2 30 SEM 2 30 a 2 30 b 2 300c
114. 200nm Az 20 000m p 35Sum 1um gt 5 3 2 5 9 2um rev 20um rev 2um rev 5 9 a B 20um rev 5 10 WYKO 2um rev 5 10 a 3 rap 33nm Rz 20um rev 5 10 a 3
115. co B 2 3 23 b 2 r 35nm Rz 2 22 b oi rccap 26nm Rz 2 35nm Rz 2um 40nm Az B 3 24
116. 2 21 b o B meqrs4 f 2Hm rev 3 p 97nm Az AN Roughnesis _ A TN 2um rev 2 34 2um 10nm 2 34 300nm Az
117. Y 60m min f 50um rev d lum d 1um 50um rev 100m 6 000m 21 000m 3 NN 5 21 000m 100m 6 000m 21 000m 200nm Az 50um rev 40 tum 89 5 5 4
118. DVD DVD GR SS 630nm 405nm 40nm DVD DVD DV
119. E 105
120. lt 1m min r 100nm Rz 4 000m 200nm Az 10 000m 60m min 6 d 500um 100nm Az 15m minm 110m min 6 d 100um 2 Sum
121. S1m 6 1 z z r COSD 6 2 6 5 x z 6 1 6 2 x 2 96 6 3 6 3 1 66 oc B 20mm 5mm r 355m 940m 355m 6 6 a 940m 6 60b E WYKO
122. UPC 2007 6 1994 No 2 pp 720 7 1996 No 968 2 pp 193 8 ASPO1 2005 9 DVD ASP E NACHI Business machining news 2005 Vol 7 B2 pp 2 10 ASPO1A NACHI Business machining news 2007 Vol 12 B3 pp 2 11 AMG62P NACHI Business machining news 2007 Vol 13 B1 pp 1 12 15 2003 pp 1 1 1 8 13
123. p 49nm Az 2 5 13 c 25nm Az Hrceup 11nm Az 5 14 10um rev 21 000m 2 Hr 50nm Rz 10um rev 21 000m Rf 2 1um B
124. 100nm Az a 2 2 3 3 2 23 SEM 7 9 2 19 2 23
125. 1 oc B 90nm Zz 320nm Az
126. 34 DA CR nS 37 38 a 00 0 39 3 2 kha 40 33 oki 6 i its 42 3 3 1 uuu 42 3 3 2 i 47 3 3 3 ii 57 SA Nl 60 61 4 63 2 JUNE NKK KEO 64 4 3 oe 65 4 3 1 65 4 3 2 68 4 3 3 72 2 76 PP 77 5 RE NC 78 5 2
127. 5 1 500rpm Machine tool Ultra precision Lathe ULC 100A Toshiba Machine CO LTD d lum 1 Cutting tool Single crystal diamond tool Nose radius 4 mm 2um rev 50um rev Rake angle 0 deg Relief angle 7 deg Workpiece material B titanium alloy Ti 22V 4Al Cutting fluid Water immiscible type cutting fluid Type Y 10um rev Cutting conditions Cutting speed 47 60 m min chuck Workpiece a Mr 1 LC 3 3 kW Thrust force rincipal force hs 5 2 50um rev Depth of cut d 1 um 21 000m Feed rate 2 50 uum rev Cutting length 0 21 000 m 5 ss 5 3 5 3 1 5 3 g 1um 50um rev B
128. 2 000m 7 3 200m 1 000nm Rz 7 2 4 1 5 1 150nm Az DVD 1 5
129. 100nm 10 000m 100nm 2 60m min 100m B 4 10 lt 1m min 60m min ES 8S 8 47 60m min lt 1m mmn 5 Cutting tool Caated cemented carbidc tool 300 Workpiece material B titanium alloy Feed rate f 2 um rev 400 Depth ofcut d 5 pm Cutting speed V lt 1 47 60 m min 300 Cutting length 3 000 m 10 000 m 200 Surface roughness Hr Rz nm 0 2 000 4 000 6 000 8 000 10 000 Cut
130. SEM 2 19 a TiCNO B 2 2 19 b B a 1 2 Cutting direction Az21 4inm Re 101 62nm r 129nm Rz WW A Feed dEGHtGn Az 22 68nm Rz 129 34nm
131. 2um 50nm 2 r 171nm Rz 99nm Rz 6 oc B 2 2um 60 3 3Snm Zz 1 2002 Vol 68 No 7 pp 928 2 Ti 2002 2002 pp 7 3 3 2002
132. 4 6 15m min 100nm Az lt 1m min 15m min 4 6 b rcup 33nm Rz r 86nm Rz 4 4 110m min 4 5 600nm Az 4 7 lt 1m min 60m min Fn 60m min Ft 0 8N Fn 1 0N lt 1m min Ft 0 3N Fn 0 4N 60m min lum lt 1m min 0 5um
133. B 10um rev 2 Sum 2 1um 4 FF 3 3 B 1 8 q 0 2 i0 hlensurement me et hensturement ime SeC a Thrust lnrce N 3 id 10 heasurement Me CE Measurement ne SeC b 5 15 B V 60m min f 50um rev d lum 100m 100nm Az
134. B F 60m min d 5Sum 212m hE 2 12 f 2um rev ee 1 a TY ni san PTHee DO per 3612G nm P V ll 100 000 180 0 DD 80 0 10U 000 0 0 200 000 50 0 HO 390 908 2 2 13 B 60m min d 5um 212m 7 0 f 2um rev 3 rp 361nm Rz ra 33nm 2 14 2 13 200um 2 r 218nm Rz z 34nm 100nm Az Hrcup 158nm Rz ra 32nm 2 12
135. 50nm Rz 6 50mm o B 91nm Az 16nm A B c B 100nm Az
136. HU om Fe a JIS I b 6 3 21 d 2um V 60m min fs 2um rev d 2um 550m ME RN Surfarw thaisticn ainmm mm roe I prin 66 Rt rem iPcW1 1pono0 100 000 50 00Q0 OG 000 a0 Full in gn no 10 a JIS I b a B 3 22 WYKO V 60m min fs 2um rev ds 2um L 550m qi2D Profiles Feed direction Ra s 960nm Hs i5 260nm 1 a JIS I 3 23 WYKO2 V 60m min f 2um rev d 2um L 550m b c B i 3 3 21 ay 2 200a 3 21 b o B
137. 100nm Az 4 0 5um rcup 47nm Rz d 2um rea 53nm Rz Sum Hreu 53nm Rz 2 0 5um 78nm Az 2um 84nm Rz dp Sum 89nm Az 3 6 44 3
138. jp 761nm Az ra 37nm 2 10 20um 2 448nm Zz 2 39nm 30 um 7 co 234nm Az Hra 33nm 2 11 a B
139. Hi OO 1500 on Fi b WYKO 3 Feed direCtion Re l3 83nm Rr hR Rlnm Cutting direction 9 R1nm Re i7 A7Tnm 1 Im 1 1 nN a i i VL A 1 c WYKO 2 4 13 9 100um lt 1m min f 2um rev d 5um 212m Cutting tool Coated cemented carbide tool Workpiece material B titanium alloy Feed rate 2 pm rev Cutting speed F lt 1 m min Cutting length L 212m 400 600 Depth of cutgd wm 4 14 B Surface roughness Hr ffz nm 100 800 2 500um r 110nm Rz d 1 000um 7 200nm Az 2 1 000um Z 5uum 30nm 80nm g 1 000um 100nm g 500um d 500um gt
140. Cutting 3 a Feed direction 3 Feed direction E On 2um rev NR NE a Small pile up pp DD 9 2 ar Np 2236 2 36 2 2 36
141. Turming direction of spindle ULC 100A 42 ET 6 1 6 1 mm I Feed direction Cutting tool EE RC 5 CR Eg a L as i a 1 me oi Eo 0 ii i ma 6 1 0mm 10mm co B 50mm 0 157m min
142. a lt 1m min 4 7 2um rev d 5um 212m 4 8 B f 2um rev d 5Sum L 212m 4 8 SEM 4um 4 7 7um 3um 97 4 7 4 8
143. r 1um Btitanium alloy Tr22V4AD Experimental conditions Upper surface f 10pmifrev d 2 um F 0 79 m min L 220m 1 111IHI Side surface 5S Hmnmwrev 2 Hm 79 m min 1 570 m 3 20 d 2um B 3 20 2 2um 50mm 6 3 3 3 3
144. Sum 150nm Az d 2 5Sum 4um 130nm Az 2um 100nm Az Az 99nm Az 100nm 58 0um Rr 125nm Rz 3um rep 70nm Rz 3 20 B 3 Cutting speed 47 60m min Feed rate f 2um rev Length of cut 550m Workpiece material Pure titanium 2 3 4 5 Depth of finish cut 7 um 3 24
145. rap 100nm Rz 2 5 i SE a f 2um rev _ f 20um rev 5 9 2um rev 20um rev V 60m min d lum 212m Trier Eg hm WE lh lie Pil Et 1 Faint umfpr ua ErIDU ON PT 110 0 1 COT ln 0 00O GO OO Ba 1 0 000 30 m09 BOD 39 DOO 30 00Q 4DO D 00 BOJDOQ 30 D llnrla il 1 rl li1 ah0 Am 0 in Ei jt 200 4 OD BO DD 1 a WYKO 3 4 79s DProfiley VAAL 2D Profiles Feed directinm Ra 59nm Re 9 59nm Feed d ipectione Ff Rer ll 47Tnm R70Gnm TA op ww w Ar 10E 1081 39 4 1300 30 140 i MM 0 1 WI Cutling direction JO0 87nm 3 27nm Cutting direction Rd R30 3 b WYKO 2 5 10 WYKO V 60m
146. 9 1um 10um rev WYKO 5 16 5 Hr fay iets i Pa pa 2 dt ee CY FE a a WT LV V i Winee i 10a EE 3 nn M 10000 EAR DO 23200 4QO BOO BOO OO Ee b WYKO 3 16 a 10um 5 16 b 3 rcsp 49nm Rz 3 gt 100nm Az 5 17 0 5N 5 15 50um rev
147. ES 4 1 4 1 B mm Omm 10mm Pg Fluid supply nozzle B 4 1 TiCNO lt 1m min 15m min 60m min g 110m min d 5Sum 100um 500um 1 000um 4 1 a Vacuum chuck Feed direction Re rn Workpiece cs Feed fnree Dynamonmieter Hiolder Thrust force Principal force 2um rev 4 2 10 000m 4 2 3
148. WYKO 2 21 2 21 a 3 Hrsp 255nm Rz aw B 3 rsp 95Snm Rz 3 100nm z 2 22 WYKO 2 22 a 5oooo OD 1 gt Hr 171nm Az B 7 5 100nm Az c B 2 2
149. 2 2 5um 100nm Rz 1 Sum 2um 3 12 a b rcup 21nm Rz 3 12 Cc g 2 5um 108nm Az d 1 5um 2um 69nm z 58nm Az 3 13 0 Sum 1um 3 10 b 2 2um 3 3 EMEVKO er ki 13 0402 eve ei 1 Wh 0 Nie Te He mm Ye YA Tim Fe gr
150. 2004 pp 429 102 7 7 7 1 100nm Az 2
151. 2 16 B 100um B gt 5 WYKO 2 17 2 17 WYKO WYKO WYKO 3 Hrgp 164nm Rz z 17nm 4 2 18 2 17 2 18
152. 50mm TiCNO 4 100nm Az
153. 6 000m 15nm 5 4 100m rcup 19nm Rz 6 000m rcag 57nm R2z 100m 6 000m 38nm 5 3 40nm 5 5 B Cutting tool Smgle crystal diamond tool 2 eed rate f m rev 4 200 oN a wn 0
154. V 60m min f 50um rev d lum er 2 20 f Cuttmg tool Single crystal diamond tanl Warkniece material B titanmum alloy 10 Cutting speed 37 66 m mim Feed rate f 350 Hm rev Dcplh of cul d 1 hm 20 000 10 000 15 000 Length of cut L m 0 5 000 5 7 B 50um rev 7 100m 20um 7 21 000m 35um 2 d sum 1um 5 8 7 100m
155. 3 9 10 um 3 13 a 3 15 3 15 d 3um 2 Cutting speed 47 60m min Surface roughness Hr Rz nm Hr 122nm Feed rate 2Lum rey Az d 2 5um 20 5 titanium alloy 0 d 2um 0 1 3 4 2 Depth of finish cut d um r 100nm Rz 3 15 B
156. Liisa 79 5 3 i 80 5 3 1 80 5 3 2 84 SA i ii 90 Mc Ni fie 91 6 OL Nd cic i 93 02 NE 77 94 569 NO N KN A f EEE ff 97 6 3 1 97 6 3 2 99 1 ci cc i SM cc Gi 102 7 EE 103 1 Hr Hra Hr cut 3p Hr tool Twe Vr Work piece diameter Depth of cut Principal cutting fo
157. 0 2m 1 3m 90nm Az _ 20nm 110 100
158. 200 SOum rev 5 13 B 7 80nm Az yh wi VV 60m min f 10um rev d lum L 212m 50um rev 5 13 10um rev 100m WYKO 5 13 a 10um 5 13 b 3
159. 3 2 29 c gt X X 2 Liooumy a 2 28 a b WYKO3 TATE 2D Profiles Ra 0 7lum zi 2 99LLm I To 30 40 s0 YY Ra 2 13nm Rz 5 42nm c WYKO2 2 29 OFHC r 10nm 30 2 FW EE Cutting edge Cms ce L100um oeim a b 3 Cutting cpe 2 Rakc Ss 8C SCuune edge Cuting Ri SS Rake face Wa Flank fcel m ce Ne 1
160. 200nm Az 120nm ZAz Sum 110nm Zz 5S0nm Az 80nm Rz 60nm Az a J Cn 125 Cutting speed V 47 60m min Feed rate f 2um rev Depth of cut d Sum Length of cut L 550m Workpiece material B titanium alloy 100 Surface roughness Hr nm Rz 0 5 10 15 20 Depth of preparation cut d um 7 a RO 3 7 3 7 reap 100nm Rz
161. d 2um 0 2N 0 7N d 2um 3 17 A B 3 17 3 17 b ge 3 17 c s g gm
162. d Sum 1 2um rev 2um revy 7 1 000m 6 1 Machine tool Ultra precision Lathe ULC 100A Toshiba Machine CO LTD Cutting tool Coated cemented carbide tool Nose radius 0 4 mm Rake angle 0 deg Relief angle 7 deg Workpiece material oO P ttanium alloy Ti 6AL4V Cutting fluid Water immiscible type cutting fluid Type Y Cutting conditions Cutting speed V 0 157 m min Depth of cut d 5 um Feed rate 2 um rev Cutting length L 982 m i 6 2 94 6 2 50mm oc B 6 2 Cutting tool 3 3 2 3 a PSP Ea 3 5mm a XZ 2 b XZC 3 R 89mm ET 6 3 gt
163. Hr 100nm Rz 60m min 100nm Az 4km Sum 1um 10um rev 100nm amp z 50nm Az 10um rev 20 000m
164. 3D Surface roughness Hr 3D mm Rz EE 2D Surface roughmess Hr nm i Workpiece material B titanium alloy Cuttimg fluid Water immiscible type Feed rate 3 pum rev Depth of cut d 5 pm Cutting speed V 47 60 m min Cutting length 313 m BGlnm Surface roughness Hr nm Rez Diamond tool Cemented carbide Cermet tool Coated cemented tool carbide toal 2 27 B 4 2 28 NEW D 2 28 2 79
165. 4 0um Sum 0 5um 9 ao gt mo Oi TT s 3 a di 3um b ds 4um c ds Sum 3 8 d 3 4 5um B V 60m min f 2um rev d 3 5um 550m 3 8 d 3um 4um Sum 3 8 B 100um 3 8 b c 3 9 3 8 WYKO WYKO 3 3 9 a 7 3um 7p 206nm Az 3 9 d 4um rp
166. 100nm Az ZH 2 2 3 4 2 27 B 100nm Az 200nm z 210nm Az 100nm Az Hr 129nm Rz
167. 4 9 b c 2 000m 10 000m 7 212m B 2 000m maa 4 or IROJDLO Cutting direction 1ERO ED D Wh 500 ll WYKO 3 Feed direction Rg 12 09nm Rz 83 6Inm Cutfing direction Ag 6 14nm Re 30 06nm 00 to Eo Re Eg SE EE lll 38 re Nitatistir stor De RD Cem dV 100 000 230000 20 000 DO s Cutting direction TE DO oo 10OD 1500 2000 373 WYKO 3 me Cutting direction Ra 9 7lnm fc 46 20nm a Feed direclion Ra l3 5Rnm Rz 98 91nm b EL 2000m TI EN LA rm TFT 3 TH mm EP 00 000 iri i Cutting direction Ft oo oo 10q0 1500 2000 WYKO 3 1 direction Ra 16 41nm Re 111 68nm Feed direction Rea i6 95nm R26G 48nm m0 WYKO 2 c L 10 000m 4 9 V lt lm min f 2um rev 5u
168. B 2 49 21 Profiles Feed direction Ra l3 35Snm Rz 97 85Snm Li 0 E B 2 24 a 0 50 190 150 200 250 B Cutting direction Ag 12 27nm Rz 42 83nm rm d 5Sum 100 2 24 a 2 16 5 a 2 24 b p 28 B 2 WYKO 2 25 WYKO
169. r 100nm Rz 3 4 Sum B d 1 5um 2um 2 5um 48 3 9 a EE a ds 1 5um b ds 2um c ds 2 5um 3 10 d 1 5 2 2 5um B V 60m min fi 2um rev d 1 5 2 5um L 550m HY I a ou eee OM rjDj lt 990mm PV aa fe Gi 95 Rm PV ee AE DM ri 148 4 AP V 12 000 2052 TI tsoo 180 0 169 0 160 0 C D Ei 120n i 120 0 120 0 5 Ell 50 000 BD Ltt D0 Em En DD 125 000 125 000 nn oo BOO 1000 15 2000 275 3 00 BOO 1000 1500 2m0n 276 3 OO BOO 1000 1500 2000 23783 a ds 1 5um b 2 2uum c dsi 2 5um
170. 2 1 2002 Vol 68 No 7 pp 928 2 1 1996 No 9 pp 9 3 2005 Vol 72 No 4 pp 539 4 Pkkard Brinksmeier Ralf Gl be Precision machining of steel with ultrasonically chilled diamond tools Proceeding of American Society of Precision Engineering 2002 2002 Vol 17 pp 275 5 2004 2004 pp 429 6 Shigehiko SAKAMOTO Heiji YASUI Akira SHINOZAKI Takafumi SHINGAI Tatsuya FURUNO Development of Precision Coated Cemented CarbideTools for Ultra Precision Cutting of Titanium andTitantum Alloys
171. Hroap 237nm Rz 2 3 3 b Hreuy 120nm Rz 3 1 8 3 J Cutting direction 7 1 ei a d 0 5um b ds 2um d 5um 3 4 0 5uum 2um 5um V 60m min f 2um rev ds 5Sum L 550m MV YO Wwewl rite Staitetier A i TP ym rp hl fF ode rarmm ee Da gary HG ht Y for ME Ti Same TT DS a act Cita it 1S3 52 rm TP Sire 3 3 ae naganm Fhe Da a i 19098 mt xW1 4 150 0OO En 00 0 0 ag 00 500 1090 1500 200 0 276 3 oo 500 000 1500 2000 327 2 00 500 1000 1500 2000 3276 3 a WYKO 3 AI 2D Profiles X Profiles R13 360nm Rz i77 89nm a eX Profiles Ra 16 54nm Rz83 50nm Lo Er i ll Fi E nl Er m Y Profiles Ra l6 30nm Rz 53 1Bnm mm Profiles Ra 10 06nm Rz 52 78mm b WYKO 2 3 5 9 0 5um 2um 5um WYKO V 60m min f 2um rev d Sum L 550m 3 3
172. 6 7 6 6 200 270um WYKO 7 35Sm 3 Hrsp 179nm Az 6 Culling irectinn b 940m a 355m 6 6 o B V 0 150m min FE RN L 982m wi In0 000 35 i TIT 100 000 180 0 1 8 NN W NN hl i 2 i 1 0 ty 1 tt PE il Lh AL Sm a 355m b 940m 6 7 o B WYKO 3 0 150m min f 2um rev d 5Sum 982m EC Fced direction Ra ld4 02nm ES 23nm Feed direction Ra l3 32nm Raz 90 tHnm Ti pg a 355m b 940m 6 8 o B VF 0 150m min f 2um rev d 5um 982m Hra 16nm 940m 7p 166nm Az Hra 17nm
173. _50um a a 5 2 30 SEM Y Y 20um 10um 2um 5 4nm Az Snm Az 10nm
174. 4 13 lt 1m min 2 100um 212m WYKO 2 100um 2 5um 20 4 13 b WYKO 3 Hrap 129nm Rz 2 4 13 c 7 Suum 89nm Az 7coy 38nm Az 4 14 lt 1 m min 7 500um d Sum 80nm Rz 1 Cutting direction 7
175. 5 4 15 lt 1m min 212m 2 5um 100um 4 Cutting tool Coated cemented carbide tool Workpiece material B titanium alloy Feed rate f 2 Lm rev Cutting speed lt 1 m min 3 8 Cutting length L 212 m 0 0 200 400 600 800 1000 Depth of
176. 2000 2005 50 250um V 1 1 1 1 1970 1976 50nm 1978
177. 0 5 um Feed rate f 2 um rev 41 3 3 3 _ 3 3 1 B d 20um 10um d Sum 3 2 20um 3 2 4 d 10um 3 2 b 3 3 3 2 WYKO i 1 li
178. Depth of cut d 5 dr Hr 117nm Rz 100nm 0 itlenetl 212 m 4 4 b Surface roughness Hr Rsz h3 LY a a ye 0 20 40 60 80 100 9 Hreun 30nm Rz Cutting speed m min 35nm Rz r 84nm Rz Feed direction Agi3 30nm Rz 86 13nm Cutting direction Ra s 36nm Rs 33 28nm 100nm Rz 4 5 B We A i 4 4 5 a b B 4 6 7 Sum 212m WYKO 60m min f 2um rev d 5um 212m
179. Lire Pr lt 1m min ur 10 000m Pb i 9um 60m min ii 1 800m Vbisre 14um Hrir 100nm Az lt 1m min u 4 000m bre 7um 60m min u 200m Vb ire 10um Pb Pb j 200um 60m min Pb j 7 4 4 3 3
180. 1 4 9 1 1 2
181. 2 2 3 2 3 1 2 4 mm B II A 2 4 a i 1 3 coumsl POND HS DINE a x200 b x5 2 4 B Cutting direction rr 0 V 60m min f 2um rev d 5um L 212m os uo a KO Eg SEE 1 Dry a mu Surface Dala per3D 388 97 mn P V i 200 000 B 100um ee 2 4 b a I 9 4 0 mu 3 276 2 2 5 B
182. 207nm Rz 3 9 4 5um py 226nm Az 3 9 b B 4 3um eap 81nm Rz d 4um Hreu 129nm Rz 7 Sum Hrceup 129nm Rz d 3um 100nm Az d 4 Sum 100nm Rz 3 9 b 3 9 b 47 3 2 3uum 2 4um d 5um CWC Mg EN Steve Sartarica MEVKO Mae PAN RTR EAT Ii 3 miPrWl rk Li mm 1 mnt Fa 95JDO En tt 13 0 120 0 on 80
183. a Surface of preparation Cut ms mmm Crystal graim Crystal grain A B 0 lt 3 17 9 B 2 2um WYKO 3 18 3 18 a 3 18 a WYKO 3 py 84nm Az 3 18 c
184. c 2um do Sum 3 4 a 2 0 5um 3 5 0 5um 2um Sum WYKO 3 5 a 3 0 5um rp 127nm Rz 2pm Gp 156nm z dp Sum Hregp 151nm Rz 3 5 b
185. c L 4 000m 7 4 000m 18 gs 7um _ 7 10 000m 5 4 11 lt 1m min f 2um rev d 5um Cultimg tool Canaled cemenmied carbidc tool Warkpicce material B titanium allay Feed ate f 3 pmirev Depth ofcul d 5 hm Cuiting speed Fe 1 47 60 m min Cutting length 1 3 000 m 10 000 m 9um 3 1 9d ED gt gt 8 HE RE 4 12 4 12 lt 1m min 60m min
186. pp 204 4 Shigehiko Sakamoto Heiji Yasui Ultra precision cutting of titanium alloy with the formed coated cemented carbide tool Proceeding of the euspen international topical conference 2003 Vol 2 pp 257 1997 pp 83 6 1994 No 2 pp 33 7 1997 pp 37 8 946 1987 No 870 7 pp 27 9 1999 No 2 pp 33 10 1 2000 Vol 66 No 2 pp 224 11 J Schmutz EE Brinksmeier E Bischoff Sub surface deformation
187. 0 El sp n0Q 40n 400 CD 0 A a A 4 r lil LE 0 oO OOD OD DD Fu oo m0 OO 1500 mon FL WI 5 1000 1500 oO a WYKO 3 2D Proiiles EE Li ii isis Lt Feed direction Ra 19 69nm 133 98nm Ei 0 0 196 150 re 389 Cutting direction Ra 15 94nm Rs 81 35nm na b WYKO 2 3 9 d 3 4 5um B WYKO V 60m min f 2um rev ds 3 5um 550m 4 3um 134nm z d 4um 154nm Az 4 Sum r 155nm Rz d 3um 2
188. 100m 6 000m 60m min f 50um rev d 1lum 100m FM YO a TT hhode Fd 3m EE or MR Ya re Sita Utd pk 1a0 Ss em OV i Wi XI ue 1 110 8 IO0noo 1 0000 20p00 gn es OE Fi 8 1 OO a WYKO 3 CAT AF 2D Profiles Feed dtreciion Rea 7T nm 98 72nmi wyko 2 100m 6 000m WYKO 60m min f 50um rev d lum 5 4 5 4 a 3 100m 80 rap 141nm Rz 6 000m p 163nm Az 3 p 100nm Az 7 100m 6 000m 3 5 4 b 2 5 4 b r 100m 6 000m 79nm Az 94nm Az
189. 2002 14 Shamoto Eiji Moriwaki Toshimichi Ultra precision diamond cutting of hardened steel by applying elliptical vibration cutting Ann CIRP 1999 Vol 48 No 1 pp 441 15 Ekkard Brinksmeier Ralf Glabe Basis studies on the wear behaviour of modified and coated diamond tools for precision machining of ferrous Fat Initiatives of precision engineering at the beginning of a millennium 10 ICPE 2001 pp 174 16 C 1998 Vol 64 No 8 pp 3191 17 Shamoto Eiji Moriwaki Toshimichi Study on elliptical vibration cutting Ann CIRP 1994 Vol 43 No 1 pp 35 1 18 2005 Vol 72 No 4 pp 539 19 1 _ C 1993 Vol 59 No 1 pp 284 20 6Al 4V 2004 Vol 71 No 3 pp 438
190. 2329mmUPrV1 45 3nntPrVi Pr Tt XK Te hmple uriace Dt PorPM TE ren LT 3 TE 1295 009 180 0 169 0 50000 1 20 0 a 1209 5nooo BOO 400 4 0 0 EE Qn pol OO Boo IOOQ 1500 000 3762 00 500 1000 1500 2000 32753 OO 500 1000 1500 2000 3763 a WYKO 3 2D Profiles DATA ED Profiles Feed direction Ra l8 90nm Rr 91 Nnm Feed ion gr16 75mm z 99 66nm Me Ro 19 30mm 7 31mm i 80 6 Cuting dection Ra 7 29nm Rs 72 60nm Cuting direction Ra 2 58nm Rs 14 60am 100 503 HH i jill b WYKO 2 3 14 9 0 0 5 1um B WYKO VK 60m min f 2um rev 0 1um 550m 0um 3 13 a WYKO 3 14 3 7sp 140nm z d 2 5um
191. 3 11 d 1 5 2 2 5um B 3 WYKO 60m min fi 2um rev ds 1 5 2 5um L 550m 3 10 3 10 c 9 2 5um 4d 2 5um WYKO 3 11 2 2 5um 3 Hrcsp 149nm Rz 100nm Az 4 1 5um 2um WYKO
192. 4 2005 2005 pp 1145 2006 2006 DD 239 6 Heiji Yasui Akira Shinozaki An Inyestigation on Chip Formation in Ultra precision Cutting of Titanium Alloy with Coated Cemented Carbide Tool at Low Cutting Speed Proceeding of 7 euspen international conference 2007 Bremen 2007 Vol 2 pp 201 7 1 1996 Vol 62 No 8 pp 1127 8 Heiji Yasui Akira Shinozaki Akira Toyama Shigehiko Sakamoto and Yusuke Kajiwara Effect of Low Cutting Speed on Ultra Precis1lon Cutting of Titanium Alloy with Coated Cemented Carbide Tool Proceeding of American Society of Precision Engineering 2006 2006 Vol 41 pp 563 9 2006 2006 pp 237
193. in Vibration cutting of cupper 2039 Engineerring 2001 Vol 25 No 3 pp 218 12 2005 Vol 72 No 4 pp 539 13 10 2 1986 No 10 pp 34 61 3 14 2003 pp 99 15 Shigehiko SAKAMOTO Heiji YASUI Akira SHINOZAKI Influence of Cutting on Surface Roughness of Ultra Precision Face Turned Titanium Alloys Proc of 4 euspen International Conference Glasgow England 2004 pp 185 16 2003 2003
194. min d lum 212ml 5 10 b 2pm rev r 20nm Rz ra 3 6nm Ra 20um rev 5 10 b 20um 71nm Rz 2 2um rev 54 77cop 5nm Az 20um rev 16nm Az 5 4 b 2 71nm Az 20uum rev 100nm Az 5 11 2um rev AFM 10 b WYKO 0 4um 2um rev
195. pp 1983 10 2005 Vol 72 No 4 pp 339 11 2005 2005 pp 1145 12 2002 Vol 68 No 7 pp 928 13 1996 pp 193 14 2003 2005 pp 31 91 5 15 2006 V
196. pp 260 17 2004 2004 pp 931 62 4 4 4 1 2 200nm Az 2 000m 100nm Az 7 500m
197. 21 1997 Vol 41 No 7 pp 248 22 2002 Vol 69 No 6 pp 301 23 2005 24 2002 Vol 68 No 7 pp 928 25 2003 Vol 69 No 3 pp 402 26 2006 2 2 2 1
198. 6 4 6 6
199. D V V 1
200. HHHHHHHHHHL Kumamoto University Repository System de InHHhnHhhHHHHHHUHhH AutTor S em lssuedate 2007o929 NN 0 Kumamoto University 2007 9 1 1 1 ee 1 1 2 rastaatrsrereseerereeeeeen 5 13 Ri i 10 12 2 DE Cc cc ii 14 22 MT i cais 15 2 i i iiii 17 2 3 1 17 2 3 2 25 28 3 At 27 2 3 4 29 2 3 5
201. IRNMNINKRENMIANNAMYENSR NAIKINIATYLRAALMNIINAWNNMANMNNMINKMLINIANIMNANNMI KUNIUNANLENIMINMIRLMNAMMARAMNRMNHNLNNALNRNIMWNRINIENINI NNNLTWANAWNINMIANMWNMNMINNLNNMANANNIINNNILNNMMMAMN MINIAALIRIMMANMMNMMNABEMRMIMUHANALALULAMANRMALKARRKWMAANN WM IIIIIMN RNNN CM ARR MM LANIMMNNINRMMRMMNMS1 EL IIENIULERIIAMRIAMAERNTLT LM yyy KN am Depth of cut PVD coated layer a b 2 35 V 60m min f 2um rev d lum 212m 35 2 lt Cutting direction lt Cutting direction E4 6 Rake face Rake face 2 36 Chip SN 8 Roundness of Pile up Roundness of cuttimg edge cutting edge Seciion of C Hne Section of CD Te
202. Proc of American Society for Precision Engineering 19 Annual Meeting 2004 pp 634 7 2004 2004 pp 931 8 2004 pp 318 38 3 3 3 1 0 B 100nm Az
203. ction Cutting direction gt b V Pm min f 2um rev d 5um 212m _ lt 1m min 4 3 lt 1m min 60m min A OW Er ME VY KO rule TR on TE un EE QO 500 on 150G 3000 375 3 a WYKO 3 A 2D Profiles AA IE 2D Profiles 13 09mm ER nm direction Ra l3 lnm E102 4m IN Fi sD 4D 5 199 C ttng Ri Az 6 14nm E30 06nm uting direction Ra ll IGnm fz 65 GHnm DD Wo OOD 150D on Fri MM Me J ww b WYKO 2 4 4 WYKO f 2um rev d 5um L 212m 4 4 b 2 WYKO Hrceup 66nm Rz 5 4 0nm Rz 00 oo Cutting tool Coated cemented carbidetaol et Workpiece material B titanium alloy 00 Feed rate f 2 um rev
204. cutg um 4 15 B Flank face wear Ps num m J00 E OU EE 500 Cutting tnol Coated cemented carbide taol FI Warkpiece mallerial B itamium alloy Feed Tale f 2 pm rev 300 Depth of cut d 5 100 pm Cutting speed lt 1 mimin 8 00 _ Culimglemgth 0 10 000 ul mn 100 3 NM HI FI OM 1 O00 Cutting length LL m 4 16 d 5um 100um B Sum 9um d 500um 1 000um 1 000um 500uum 100nm Az 1 000um 200nm Az
205. m 68 4 10 000m 3 7 212m spy 112nm Az 2 000m rap 156nm Rz 10 000m Hrap 292nm Rz 10 000m 2 212m 84nm z 2 000m r 99nm Rz 7 10 000m r 216nm Rz 10 000m WYKO 2 etniciots KS 212m rcup 30nm Rz 2 000m reo 46nm Az 10 000m rep 112nm Rz
206. ol 72 No 12 pp 1305 16 Shigehiko SAKAMOTO Akira SHINOZAKI Heiji YASUI Possibility of Ultra Precision Cutting of Titanium Alloy with Diamond Tool Proc of American Society for Precision Engineering 20 Annual Meeting 2005 pp 427 92 6 6 6 1 100nm Az
207. rce Thrust cutting force Feed rate Surface roughness in cutting direction Arithmetical mean surface roughness Surface roughness in cutting direction 3 3D surface roughness Surface roughness of cutting edge in radial direction Increase rate of flank face wear Cutting length Spindle speed Chip thickness Critical cutting allowance Cutting Speed Flank face wear I um um rev nm Rz nm Rz nm Rz nm Rz nm gt um m rpm um Um m min LT11 1 gt 1 1 1 1940
208. ting length L m 4 10 ih L 2 000m Hr 300nm RNN 0 3 000m r 800nm Rz 4 000m 100nm Zz 69 4 10 000m 200nm Rz Ss NSNN 2 NN SN SA a a 4 11 rank mc NG NN lt 1m min L 212m 25Hm NNN Feed direction S 4 000m 10 000m a WCuuns edsc ge NN 212m 4 11 b Sum mnieNN 8 nx _ 2SBm NR A 1 r 100nm Rz
209. utting tool a d ut roundness a x Flank tace A Workpiece EF __ Workpiece 2 2 32 2 32 2 32 um 2 32 a nm 2 32 b km 0
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