まえがき
Contents
1. s 1 2 b 1 20 1 5 2 4 2 b2. 2 200 230 V 10 40 V 3 X
3. a b 2 04 2 2x10 m2 V s 5 c 1 3 d 3 1 3 4 2 7 i kk 2 2 2 0 1 8 1 6 1 4 1 2 1 0 0 8 0 6 0 4 x10 m V s 1 3 13 B9929 2006 5 4 5 4 1
4. OH 17 B9929 2006 HO H O O CHO CO HO OH HO
5. 16 B9929 2006 3 1
6. 1 000 2 300 1 21 B9929 2006 2 1 1 5 2 BOX 2 1 2 1 IN 1 IN OUT 5 2 2 2 2 2 1
7. 2 14 B9929 2006 2 Charged Plate Monitor CPM CPM CPM 1 CPM
8. dn dt 9 7 Bn Z FTO 4 1 4m jm s 4m m s m s NSR Ne 4 1 6x10 m s 2 0 15 0 x10 m s 1 4 1 4 2 19 B9929 2006 ey el 62 tatiana 4 2
9. b 5 2 3 e c HEPA ULPA JIS B9920 5 d e
10. um a K m7 V s 1 1 BEC 0 0 K 1 1 m m V m m s b hm7 V s 1 2
11. c d e f m g 3
12. 30 3 4 2 1 5 4 2 0 10 4 2 3 5 4 3 10 4 2 4 5 4 4 10 4 2 5 6 5 4 1 7 a
13. gw 8 w y XX 4
14. 2 2 2 2 2 3 1 000 2 300 2 2 4 2 3 2 3 1 3 22 B9929 2006 3 2 3 2
15. CPM 2 CPM 2 1 Charged Plate 9 FF 2 1 CPM exp Ky
16. lt gt 1998 18 B9929 2006 4 1 10x10 m2 V s 0 002 pm 1 0x10 m2 V s 0 002 nm
17. b c 0 5m 5 d um 2 a EA Le6x10 9 7 A V m s 16x10 3 0 FYTTE 7 3 C F s e m gt 7 TT TT 2 R mm Ai
18. 5 4 s 4 2 3 3 JJSA1431 JISB8330 JISB9908 JISB9922 JIS B 9927 JIST8202 JISZ8122 TSO IEC Guide 1995 Guide to the expression of Uncertainty in measurement TEC 61340 S 1 Electrostatcs Part 3 1 Protection of electronic devices from electrostatics phenomena General requlrements
19. 1 3 8 B9929 2006 1 2 m m 3 hPa 4 1 2 3 4 m s 5 X10 mV 3 1
20. CPM TEC 61340 S 1 15 pF 20 pF 2 pF 5 10 3 a 1 000 V 100 V b 15 B9929 2006 CPM
21. f 5 2 4 5 2 3 a 1 5 5 5 B9929 2006 1 5 35 40 80 1 013 25 hPa 5 10 V
22. 4 3 9 B9929 2066 1 1 2
23. 5 Q B9929 2006 28 4 1 4 2 ao S 0 oo 4 iri H H H 1 H H 5 1 oo 5 2 mmmeneennonnenrennenrervensenrevnenrerrenservevveesereemsesreew 6 1 lt lt oe 2 ememeoomomoomoemoeoe 3 lt mm 4 5 oo JIS B 9929 2006
24. m s 5 5 1 s 1 1 a 1 4 nm 20 4 ROD 1 3 B9929 2006 b
25. s 2 4 2 4 2 1 s 4 1 1 3 7 4 2 2 Reynolds 2 300 s 4 2 3 10 1 4 2 4
26. 0 6 1 sm 5 1 2 a b 1 c 5 s 1 3 1 a
27. m s 4W 47 m m3 NM 1 jm mW 1 4m WM 2 jm mW 2 m3 2 s 2 5 3 5 2 6 6 6 a b c d e 8 h 7 B9929 2006
28. um z 1 g 4 2 r 1 ont 2 wh 100 700 gt ow 20 B9929 2006 5 1 s1 a
29. Standard for measuring methods of airborne ion density 1 1 2 JISB9920 3 a b
30. b c 8 a b ec d 1 4 2 1 000 V 100 V
31. 1 W m 5 1 3 6 1 1 7 N ELL ee 6 16x1019 7 2 A V AR Q ms 1 6x10 nf I CV W 1 RU 7 T et 1 6x10 tj C F 7 s 5 6 B9929 2006 c NM
32. 10 2 11 B9929 2006 4 2 5 10 2 4 2 6 3s 2 5 4 2 7 5 3 0 1 X10 m V s S s 1 1 1 5 2
33. z m 9 V s Vm yms h 2 B9929 2006 4 4 1 s 1 1 10lx106 m 102x107 mi 2 10
34. 0 002 pm 2 a m7s b m s c 2 Zm s 3
35. a 1 2 b A 7 7 e C 7 C Co PTT 1 4 d C A RR LTD 1 5 e NSR ve R 5 12 B9929 2006 A C 7 C 1 2 5 3
36. 7 7m 7m 4 B9929 2006 s 1 4 5 1 5 6 5 2 5 2 1 1 1 5 2 2 a
37. um s 1 3 1 1 5 2 RS RO RRR 8 1 6x10 R A V R 0 m s 1 6 x 10 CQ 9 ED RE RR 9 16x10 DP 2 C F d Cm 1 3 1 10 SM NN SN eee earee 0 Ni Nos N2 Ws 2 1 7s 2 1 m s 2
38. 4 TT 1 2 4 m m 6 m V ms 3 1 1 10 B9929 2006 1 1 4 4 1 4 1 1 4 1 2 1 1 1 1 40 80 XX lol325hpa 5 10 V 4 1 3
39. b 9 9 8 1 000 2 300
40. 2x106 m 107x107 mi 3 10 x109 m 104x106 mi 4 104x106 m 103x106 m 5 10 x106 m 106x106 m 6 10 x10 mi 4 2 5 2 1 10 x107 mi s 10 x107 ms 2 102x106 m3 s 103x106 m s 3 10 x10 ms 10 x107 7 m s 4 10 x10 ms 107x107 7 m 5 103x108 m3 g 107x107 7 m s 6 10 x10 ms
41. B9929 2006 12 1 GACA SA JACA No 39 JIS B9929 1 2 3 4
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