油回転真空ポンプ - 株式会社ユーアイ
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1. 38 lt gt 6 2014 4 5 WLK23A16Z 958518K W2790xD2110xH2200 _ a EE EE INKON 0 5 WW 5 WW WWW gt vbhbhb kb WW INKON 1h vb WW WW INKON NIKON W1900 D820 H1540 W1740 D720 H650 910 1250 2300 W910xD1250xH2300 0 650 1450 2600 sD ee 6 6 DR II PC 0707467 IMMR 101 O708575 MR IRKE 5500A VW ORION 601003 IRKE 5500A VW ORION 602031 A RON mr ISCS 3WAT 7 9904132 2004 a TOO IPURIC MX LS MLD2173321 20042. G TRAN BPR2 ULVAC 04284 7 30M G TRAN_BPR2 ULVAC 04285 30OM G TRAN BPR2 ULVAC 04286 3OM 55u5oo 1 1 t t l G TRAN_BPR2 ULVAC 04287 30M _ RS07 2783 G TRANISP ULVAC 381 SPie18 RS07 2791 E5 G TRAN ISP ULVAC 00265 SP1g 18 7 2 RS07 2792 G TRANISP ULVAC O0270 _ RS11 2529 IGTRAN sPi gt ULVAC 1846 SPie18 RS11 2303 PG 6200 ULVAC 21310212188 ULVAC MCH MLX ULVAC O13769017382 ULVAC MCH MLX gt ULVAC 283704191737 ULVAC MCH MLX ULVAC 21280212185 ULVAC MCH MLX gt ULVAC 28311418377 ULVAC MCH M
3. lt gt 2014 4 5 RS12 1304 2 ULVAC MA03 1008 2004 RE92 1023 MH58 0012 1983 MV02 5006 0 a MV03 1022 2005 MV99 1003 MV97 1003 OO EVP 16956 1987 EVP 35058 2000 RS12 2047 ULVAC RS10 2784 ULVAG RS11 2399 ULVAC RS13 2097 ULVAC RS12 1208 9 m m m mm 1 mm 1 1 cm a PR o dere 3 Ss RS12 1312 ULVAC RS09 2186 no 1 DEA 506 ANELVA EVP 26588 RS10 2789 DEM 451 ANELVA RS11 2028 L 210H WS ANELVA RS12 1311 DES 320E Co ny2
4. 37 2014 4 5 gt RS13 3013 0A _ 2 RS12 1357 0A l jUcHI 1200Wx650Dx1800H 0 0 RS12 1361 ti UGH q20owxe5opx1800D YE IiOCHI 200wx650px1800D 0 IiucHT 20owxe50px18000 RS12 1364 Qq200Wx650Dx18000 4 Ar100sccm S N 26F0276 CF4 RS12 1033 ee 4 5 je FC 770AC Aere 2001 50sccm S N 26F0358 Sicl4 20sccm S N 26F0278 02 50sccm S N 26F0275 C780G C780c C780G hh EC 400MK3 UL STEC 4357120100 PAC D2 oo EC 4400M STEC 3424592121 CH410sccm VCR _ EC 4400M MK3 IAr 200scem VCR RS11 2177 2 SEC 4400M MK3 STEC 291502488 2001
5. MCH 4500 2014 4 5 Rso8 8030 A30W EBARA C61435 3000L min NW50 eS 3000L min NW50 RIE merree A30W EBARA CA0200 2000 OF4 02 A eS 3000L min NW50 RIE 7 A30W EBARA C40290 2000 CF4 O2 Ar 3000L min NW50 RIE A30W EBARA C70771 2000 CEASA 3000L min NW50 RIE ez a 2099 CF4 02 Ar 3000L min NW50 RIE 1300L min 2 7Pa NW50 RD90 1 0210673 2002 1300L min
6. 32 2014 4 5 Rso9 1098 O040 06421 IAMAT_ WW WV WW WWwtwtw k bV Rso9 1099 E O040 06421 IAMAT_ WU WU SW 5 1 t o 0nw 6 mMWM tl M RS09 1100 lo040 06421 IAMAT_U WW WV WU WW WWtwtw bhK b EE EE uu tl tV 44 bwWw bl Rso9 1t98 7 Rso9 1271 RSs09 1089 7Ht2 KOCVD MA Rso9 1109 MAT Rso9 1110 A Rso9 1111 MAT Rso9 1112 A Rso9 1113 MAT Rso9 1114 A Rso9 1115 AMAT Rso9 1116 AMAT RS09 1117 AMAT RS09 1118 AMAT RS09 1119 AMAT RS09 1120 AMAT RS09 1121 AMAT Rso9 1122 A RSO9 1123 MAT Rso9 1124 A RSso9 1125
7. Hi PP CICICIC NIMIMIS PP MM VUGP 40 VLH 2 VLH 2 VLHC 3 VUH 251C VUH 251C UH 251C UH 651 ULH 40 ULH 65C ULH 150CM lt T P 01 P 01 P 8R PA 50KF PA 50KF U06AW U06AW U 1 U 1 U 1 U06SW R U3 4S U3 4S U3 4S U PP PP U I U PP PP DP ccsls U1_1 2 U1_1 2 U1_1 2 U1_1 2 U1_1 2 U1_1 2 U1S U 1 lt lt lt 1 n U 1 U U1SW U1SW U1SW U1SW U1SW UU UT U U LITITILITII U 1 o U 1 o U 1 ee To U 1 o U Ul UU LLIELIL I U 1 U2S U 1 Le U 1 U2S ULVAC P400182 ULVAC 2002 ULVAC H150178 NN ULVAC 2002 ULVAC 831734 ULVAC 000004 ULVAC 068772 ULVAC 068771 U06SW R ULVAC o70277 ULVAC 070276 Ul ULVAC 010427 ULVAC 017451 ULVAC 021755 ULVAC 021311
8. 27 lt gt 2014 4 5 RS13 3016 IVEP 1000 ULVAC MFO6 1008 RS13 2205 RS13 1038 0A ee RS12 1214 0A RS11 1194 RS12 1224 RS12 1233 RS12 1428 RS13 2099 RS05 2068 RS13 2203 CRTM 6000 U 12HSI P C30MT PMB 003C D 950DK EBS 10A ULVAC XJ9 70010A 1999 W x4 x6 p 600W x 800H EGL 35M 10kw p 650W x 800H EGK 3 5kW Solid RYO RP 2006 29 AUTO MANUAL
9. 12 2014 4 5 lt gt APC 253A 11792 IMKS _ SCV 316L 10K RS11 2157 3 8 STD NC CTz sep 12146 JA14 STOP VALVE N2 MAX500L min STOP VALVE N2 MAX500L min eg TOKYO KEISO TOKYO KEISO 88 STD ON 1021001 100003 22 7 1021002 150006 9 A 249751 zi LL 7 2 653B 8 200J 2 000601724 5 12 4t 84 4 ww RS09 2648 i liCF070 IPM 5 VAT FABRNO641PM 16PM 0002 153 IPM 5 VAT FABRNO641PM 16PM 0002 160 S11 2460
10. 28 EX 550 C10 ULVAC MH96 1051 1996 U ee EX 550 D10 B IULVAC MH90 1086 U RS11 2397 E i ee ULVAC MH96 1010 1997 MC 500 960021 1996 RS13 8023 0A RS11 2022 5 6 6 C X X X E c10 C16 ct6 RS13 3129 0A SEC 16C 99 4030 50 50 50 06 RS13 2200 RS13 1035 0A SGC 22SA RF 00 4561 I SGC 22WA RF 95 4293 1996 lt DP LN2 CRYO RP 4 JEOL TI Au Pt Ta Cu RP 2 EGK 3M X Y DP RF A EGL 35 UVAG 2014 4 5 p 650Wx800H CRYO RP
11. 16 lt gt RS11 2208 He 27 722 HELIOT 302s ULVAC _ 3198 0415 5 RS13 2253 0A He 2 HELIOT702W1 B75SPIULVAC HELIOT702W1 B75SPIULVAC 0421 2004 HELHOT702W1 B75SPIULVAC 0424 2005 17 2014 4 5 2014 5 200V 100V 2014 5 200V 100V 2014 5 200V 100V 2014 5 200V 100V 2014 5 200V 100V 2014 5 200V 100V 2014 5 200V 100V 2014 5
12. 18 Rh RS13 1044 0AI RF RFS 02CA 3 1046 0AI RF RFS 02CA 3 1049 0AI RF RFS 02CA 3 1050 0A RFS 02CA 3 1101 0A RFS 02CA 3 1102 0A RFS 02CA 3 1103 0A RFS 02CA RFS 005 0 8085 0A RFS 05C E RFS 05C RFS 1205S RFS 1305A RS RS RS RS09 130 RS11 8119 a f 3 2060 RF w w Cy mw mw Pp RF 3 2062 RF RF a MI 3 206 1 3 2063 5 n amp amp 2 2 RF 3 ww gt 3 2066 3 2068 RF RFS 1305A 3 2069 RFS 1305A 3 2108 RFS 1305A a a a a a il 2 p Pp se Pp 3 2109 RF RFS 1305A RS13 2110 RF RFS 1305A RS13 2243 0AIRF RFS 1305A RS13 2244 0AIRF RFS 1305A RFS 10C RFS 10C RF RFS 1310A lt gt ULVAC 595179 me ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC
13. VG250 NW40 RS13 2181 TG1810VM wae leo 1292 5 VG100 NW25 RS13 2186 2 TG200 G200 966 TC 200 IO CVD RS13 2188 0A TG200 G200 1127 VG100 NW25 7 CZM045 5S955OUOUOUU 0 1 11 i ITMP 1003LM sr ie MP 1003LM MZM092 2006 MP 1003LM FZM214 liCF EF1003M S N ZGA109 MP 1003LM IDZM031 MP 1003LM IMZM457 ICF E 1003M S N GZS160
14. 2014 4 5 lt RS10 8092 0A W IGLD 100 _ ULVAC 72971 GLD 100 IULVAC 72975 RS13 8075 0AI GVD 200A _ ULVAC 82954 V WW UUU WW 5 2 4 t t D 330DK IULVAC A01A 00379 253L fm D 330DK IULVAC AO1A 00558 253L m oo IULVAC A01A 00729 253L fm ULVAC AO1A 00903 253L m oo IULVAC AO1A 01740 253L fm oo ULVAC A03A 00403 507L m IULVAC A03A 00538 507L m IULVAC A03A 01292 507L m S ULVAC A03A 01347 507L m ULVAC A03A 01518 507L m IULVAC A03A 01582 507L m IULVAC A03A 01647 IULVAC 1 21161 760L m 3 J J D 330DK D 330DK D 330DK D 650DK D 650DK D 650DK D 650DK D 650DK D 650DK D 650DK D 950D w w w
15. 2014 4 5 lt _AMAT_ENDURA gt RSO9 1350 ZZ 0 ETE AMJ ME EN ESE EE rm Rsoe is44 BLDGTO BLpGTransr NAMAT 1 Reoe is9 CHA A Reoe is10 oHB A Rsoe is27 CRYOPuMPGABLE hwr ht WW 1 Reoe iszs CRYOPUMPCABLE AA nsoe isso CRYoPuMPGABLE warm hhtWUWU Rsiz 2091 Enawa s2 22B0X 7 MAwAT lt Cx QM Retz 2077 Heareer ASSY ooiooi465 AMAT nsoe iss4 Hose Pushrtsk578 80PS NMwAT o Reoe isss Hose Pushrtsk578 300PS AMAT hh Rsoe isz esesuewep x anep eewswm MAwAT Reoe iszs IoNGAUGE CABLE wm htWU lk Rsoe isz4 IONGAUGE CABEE MA 1lh m sse iszs oNGAUeE CABEE NMwarm nso isze IoNGAUGE CABEE AMAT ssee_ss4 MAGNET
16. 10 lt ULVAC RD 2014 4 5 RS07 2852 27X nt l 2in WULVAC 0550 llIhwhbs bb bWWIWIWItItItI IBM 70x430 _ ULVAC VAP 200 IL ULVAC JIS 8in VAP 200 I ULVAC JIS 8in VAP 200 IL ULVAC JIS mn RS11 1017 VAP 200 HI ULVAC JIS 8in VAP 200 I ULVAC MNO3 0347 8 _ JIS 8in RS12 1433 VAP 200 ULVAC MNO3 0347 3 JIS 8m2 RS12 1434 2 VAP 200T ULVAC MNO3 0347 4 JIS in RS12 1435 VAP 200 ULVAC MNO3 0347 5 JIS in22 06 RS12 14
17. RS11 1201 1M9062 1994 le 4in 3 RF 5 ny2 2 ce a RY NN S11 RS11 1184 4 SPC 530H ANELVA IEVP 13998 1 1983 5in x15in 3 DC RF DP 2004 1 mae 4 1 a _ULVAC_ Ceraus gt lt RS09 1483 RYB RB _ IULVAC 6 DU WW WWt5 b 0 4W W W 8 RS09 1500 w pp 6 lt ULVACO 5 5 HB 1 b nf 60600 060 60 Rso9 1501 9 ULVAC 0 1 5 5 0 0 v 9v9It2 gt t t t t RS09 1504 SG610095 ULVAC G6100S IULVAC IULVAC GS IG IULVAC GS IG GS IG GS IG GS IG
18. 5 6 5 6 7 8 9 Co Co Co Co 2014 4 5 ULVAGC ULVAG ULVAGC ULVAGC ULVAGC ULVAC ULVAG ULVAG Pe ULVAG ULVAGC ULVAG ULVAC 28000L m VG150 CVD SiH4 PH3 B2H6 22 28000L m VG150 CVD SiH4 PH3 B2H6 2 28000L m VG150 CVD SiH4 PH3 B2H6 2 28000L m VG150 CVD SiH4 PH3 B2H6 2 28000L m VG150 CVD
19. p 650Wx800H CRYO RP EGL 35M x2 Au Sr rt o 650W x 800H i RP 10 p 750Wx900H p 750Wx900H EGL 406M CRYO RP EL e 900x1125H SUS 7 EB JEOL JEBG 102UHO 15 JST 10F 10Kw RP VS 2401 PMB PMB 006CM DP SFD 22B PFO 550 RF 3Kw SOCS 1a CRTM 6000 900mm DP SFD 22 RP VS 2401 MBP PMB 006CM JEBG 102UHO 12 3Kw 6000 MFC SEC 400MK3 Ar 100sccm JST 10F RF
20. pd Pd Prd id pd pd pd rd pd pd rl glglglglglglslININS IN IN RS13 1012 VD 301 VD 301 ULVAC NB63A 52474 ea 500L m KF40 VG 40 ET Pe oe os MMAR ET Pe ero lee Ee RS13 8122 0A RS10 8095 0A RS13 8123 0Al Ten ae EEE er mR VS 2401 oe ano Ne oe bore ixtcig RR i 500L m VG 40 500L m VG 40 13401 m VG50 VG40 SCV 3030 1340L m VG 50 VG 40 ULVAG 4000L m VG80 VG50 2 ULVAC A36A 05463 4000L m VG80 VG50 NR TCO ITO 4000L m VG80 VG50 ULVAC A36A 03250 MM 3 gt 240m3 h 8Pa Foic i4f SV 300 Leybold NSS59 2010 AC200V 200kg 2 GBPS
21. 0 6 2 2 4 0 2 au SM 3 5 TC200 A058678 47 n RS11 2246 TCP380 PFEIFFER S N 7007900 M N PMCO1490 RS 3 6 RS RS RS p ppppppppppp p p p RS10 2660 EID1303M I 2 5 5 56S 6 RS 0 RS RS RS RS13 219 2014 4 5 lt RS12 1284 2 DVS 321 563532 12382 3hr RS08 8032 DA 241S MYy2 00153 240L min Ode 16 xlde 12 RS11 2527 DVSL 500B 7 M 7
22. 2014 5 200V 100V 2014 5 200V 100V 2014 5 200V 100V 2014 4 5 lt gt 43 5 5S 0 q qq ris 87222 S _ _ 2013 4 NR 0 2 8427 il ky Smif200mm9 0 079b m 72 RS12 1396 WM 300FOUP ITOPCON 00350074 RS13 8018 0A
23. 5inx18inx3 2 2 DC TMP RP Fny2 o 12in 1 SP RF 3kWx1 TMP DRP 6in 25 2014 4 5 lt gt 100 3 DC RP AC100V 50 60Hz 1KVA RS13 8022 0A E 102 6127 03 80mm RP 501 min RS12 2033 0A ECR 300E ANELVA EVP 19881 Multi Chamber RS11 1185 3 ENDURA AMAT 3843 E No 6520 p 8in Etchx1 SPx3
24. 240m3 h 8Pa Feiz i4e Leybold NSS58 2010 AC200V 200kg 2 G BPS RS10 8089 0A 2063 ALCATEL 284112 2010C1 334781 VD 301 VD 301 VG 40 VD 301 L m VG 40 VD 301 VG 40 VD 301 EC 803 EC 803 VS 2401 4000L m VG80 VG50 VS 2401 TCO ITO VS 2401 SV 300 lt gt RS11 1259 7 4 PKS 016 4 RS12 1064 ITYPEEFOU ULVAC 2002 6 6 6 1 RS12 1065 ITYPE EFOU ULVAC 2002 100V 200W 4P RS12 1066 TYPE EFOU ULVAC 2002 100V 200W 4P
25. RS13 8037 0A 7 RS13 8035 0A RS13 8036 0A ULVAC 9107058 1700L S ULVAC 9109079 1700L S _ oo ULVAC _ 9109080 1700L S oo 1 RS13 8099 0A 2 U8H ULVAC 0101098D RBH 8 ULVAC 0512140D U8H U ULVAC 703506 U8H U ULVAC 9012074 B ep jp U10PU ULVAC 9803129 AMOS CNSNK U10PU ULVAC 9306800 2300L S U10PU ULVAC 9403834 2300L S U10PU ULVAC 0509538 2300L S RS11 RS12 1174 0AI RS12 1175 0AI RS12 1176 0AI RS12 1177 0AI RS13 8105 0A II lg amp ale EE IE 1700L S VG200 H2VP RS10 8097 0A 5 7 U10PU ULVAC 9308806 2300L S SCV 3030 RS10 8098 0A 2 U10PU ULVAC 9305795 _ 2300L S
26. 6in3 DCS 0402x3 UI RK92 1009 1993 uu UI CRYO U 12HSP V30V D 950D GI TL3 GLTL3RY GP 1SRY MFC Ar 1 4in 8 3 6 ES Ka SH 550 D10 SIH 3030 ES a RS13 2207 0A RS13 2208 0AI SME SMR 2110E ue CS 200 ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ME 20 ME 20 ULVAC 904 OLDM OLDM T14 ULVAC ULVAC 2014 4 5
27. lt gt RS05 2604 Ho RmfO656OHHRORZE EE RS13 1113 0A Z1000 ULVAC ME97 1038 umFso00 ASYST A062609501 luTV UTV F2620W ASYST 502000000159 RS10 8031 KEYTRAN ULVAG R11862 717 01 JzMGz TB38A KEYTRAN 42EX 172 IMag7 brooks HH135074 001 1984 07 Mag7 lbrooks 9911 10602 ozotssso Ryo ULVAC ZX 1000 lt 9 5 RS09 2670 KEYTRAN ULVAC MAG6 MAG7 lbrooks 9911 10601 003 1e00 1H 3 Forrest me ULSTA 2400 ULVAC Wpos5 1001 i SMD 2400 7 ULVAC MLLX 3000 6 CET 22 RS11 2496 I ULVAC 1994 4 UT0100 MECS 3X0409A01 3 OO O
28. 30 lt 200KeV CS rsto amos 2806 oyoie 01298 ee ee 0 lt gt ER RS04 8081 ACCEL DECEL P S MDL 2 10 52609 72 Re04 6015 AIACCEL DEGEL P S IMpL20 51876 RS9C g IARoFL PS ae Hi0999 2 RSo e062 ICPU BOX FC 98530 INEC S59oi95 0 01 1 OZ HV PS he 180KV Rsor eoe7 HVP S euuimsxizzslauswwwrag 860256 i90K RS04 8022 HV P S DEC P S meweewwveol eeeeevsesl de RS04 8088 HVP S DEO P S cececreoco leussnyae S N99993103 bk RS04 8023 HV P S EXT PZS iain leusowwwvae yeaoopramg RS04 8089 HV P S EXT P S av aon S N2900352 GOKOo 1 RS04 8025 QLENS P S jeSwu is 2Gi25sleusswwym oz fkVv 054 RS04 8091 Q LENS PS ESUL 15 2G1255 eusswwamg S7N2930059 vx 0 gt 1 eorrtoze 3 7n629 CpuBOX WW Re04 027 ne29 5OSE DNSPLEY gt RS04 8093 ney9 5osE pisPLEY 60055 h Reoe sos4 0 RS04 8071 19
29. 9 4 2C1E3T MA04 3429 2004 op 8in SP1 Metal SP2 Metal SP3 Etch RIE ee em 4 y x 4 x 2 x1 150 mm 2 200mm TMP DRY P2P4P5o 300 x 3 P3 300 x 1 Pt DC 4KW 6KW RF 2KW 4 4 x6 x1 150 mm 200mm TMP DRY P2 P6e 300 x 5 P7o 300 x 1 Cu 2010 200q x 1 x 1 x5 x 5
30. nsoe is14 IKT MANTENANGEESC 0240 32135 IAMAT p RSoe i357 MooRgmweE NoopeAssY 0ASS 0090 02980 AMAT_ RS09 1358 IMoroRgmweEENoopgRAssr cass 0090 02980 AMAT 1 RS09 1321 lpcmAssycApAcmyE swsoRAwEl9100 00084 IAMAT 1 1 1 Reoe isz PcgAssYcApcmyE swsoRAwl9100 00084 IAMAT 1 1 RS09 1353 lcmAssycApacmyE SENSORAWP 0010 00084 AMAT_ UW1 0 RSoe isgi ecoyswe es wereg 0200 36629 AMAT 1 1 nsoe isez pare ewsssrmesromewes sow 0020 30570 AMAT U 0 RS09 1383 Pare cwsosrmevnorewes saw 0020 30570 AMAT 1 1 Reoe i364 are wsosmevnoNrewes soww 0020 30570 AMATO 1 0 1 Rsoe is3 PROMKITASSY 9509O55 IAMAT nsoe isee SERALsipE BoApASSY looooi65 IAwAT p 0 od Rsoe is27 THROTTLEVALVEASSY ETOH 001009019 AMAT Rsce i320 VAuuMVALVE lBENKAN IAwAT lt vu RSoe is6s IauyepNeuis06pPoRTKarEz 3870 01455 NG_ 1 Rsce isee aepeuisooppomrKauez 13870 01455 ING RSoe is60 IMauwePNEuguWsz WAY WWNiNo 1 1387001245 KD
31. PRC 012A ULVAC A69A 01745 2004 EPR UMWAe A68A 01022 2004 16700L m VG100 5 16700 00 we Ul 1 3130 PRC 012A ULVAC A68A 00960 2004 1 8069 7 PRC 012A ULVAC A69A 02252 16700L m VG100 3 3083 PRC 012A ULVAC A69A 02711 16700 VG 100 3 3084 PRC 012A ULVAC A69A 02714 16700 VG 100 3 3085 IPRC 012A IULVAC A69A 02718 16700 VG 100 3 3086 PRC 012A ULVAC A69A 02723 16700 VG 100 1 2064 PRC 012AS ULVAC 16700L m VG100 _ RS11 2065 PRC 012AS ULVAC 16700L m VG100 S 33300L m VG200 RS12 1430
32. RS12 1067 ITYPE EFOU ULVAC 2002 100V 200W 4P 2014 4 5 lt 1100L S VG150 VG40 RS12 1247 ULK 06A ULVAC A43A 01500 2000 200V 1200W Ar Air 1100L S VG150 RS12 1248 ULK 06A ULVAC A43A 01965 2000 200V 1200W Ar Air 1100L S VG150 VG40 RS12 1249 ULK 06A ULVAC A43A 01508 2000 200V 1200W Ar Air 1100L S VG150
33. XT07 0489BB 2008 lp 6in x3 DCx1 RFx1 500W CRYO RP 1990 lp 8in x3 DCx1 RFx1 500W CRYO RP MH63 5263 Ul 8in x3 MH63 5260 UI MA03 1012 2006 UI UI I DCx1 2 850 x 900 3 DC CRYO RP 2 850 x 900 3 RF CRYO RP 500W DP RP MH63 0222 MA06 1006 2006 MA08 3625 P2 P6 RF 5KW P7 DC 4KW X P3 5in x 20in 3 2 DC ME58 0161 6 8 0V6V I l UP
34. Zn MO CVD RS12 2005 CVD SR 6420 43006001 C 2006 qp 6inx1 400 900 30 2014 4 5 lt 4A747 Centura gt RS09 1267 15V PWR_SUPPLY CEN END IREVE AMAT RS09 1041 200V DEGAS DRIVER 0010 20697 AMAT Rs09 1091 200V PVDDRIVER __ IAMAT_U 1 hb U UU WU l WWW5 w1wt w M MM Rs09 1067 45 6 ROBOT IAMAT_U 1 UM W 5 U WU l 5 560 6Qv vwsw wWwWwWwtw w _ _9 Rs09 1194 5 M3 RS09 1213 5 5 wide 0 RS09 1170 AI O MAwoempuroumorlAMAT RS09 1250 AVUO RSo9 1251 AI O Rs09 1253 AVO RS09 1257 AI O
35. IULVAC 4047 ULVAC 9174 ULVAC 11840 1999 Pa 33621 WP 4m A2 GP 1SRY S S N 94DD0163 39399 WP 01 15m GP 1SRY C S N 99E211921 60891 1999 WP 01 10m GP 1SRY C S N 99E211909 UI MA 1996 WP 01 10m GP 1SRY C S N 99H220929 Ul 60393 1999 WP 01 10m GP 1SRY C S N 99H220909 Ul 1999 WP 01 10m GP 1SRY C S N 99H220923 Ul 60389 1999 WPB 10 10m GP 1SRY C S N 99H220907 WPB 10 10m
36. VLP U14S ULVAC 174281 2000 JIS 14in R R R U10S ULVAC 102579 2000 JIS 10in R R lt _ L VULP 25 VULP 25F L VULP 25CM ULVAGC RS09 8069 0A VULP 25F IULVAC P250774 op L RS11 1216 ULP 25F ULVAC P252851 op ULP 25F ULVAC P252855 op RS13 8056 0A L ULP 40CM ULVAC P402399 RS13 8057 0A 2 IVULP 40CM ULVAC IP402402 RS13 8058 0A ULP 40CM ULVAC P402403 il RS09 8072 0A IVULP 65CM RS09 8073 0A L ULP 65F RS09 8074 0A L ULP 65F ULP 100CM ULP 150F ULVAC ULP 200CM ULVAC P200075 95 lhso 02 5 11WwWwWwW WW L ULP 250CM IULVAC P250086
37. RS13 8010 0Al 7 0 14048 JUE44 _ VAT _ WW WW 5 5 WW 5 55 WW4W4tM b RS10 8024 RS10 8025 RS09 8009 0A RS09 8010 0A RS09 8011 0A R licro70 3 304 24VF 8G_ NUPRO F 2 2 FABRNO641PM 16PM 0002 220 IVAT _ 1025322R1HU1 59 9591lh vs II vs bkms sis 656A100IKKVVNIMKS 017067580 0176697531 a 1 800 345 1967 9928670041 Zi 1 800 345 1967 9928670044 2Zi L 26328 KA11 00dVAT o158 KF25 L Air NormalClose 26328 KA11 00dVAT _ o241 KF25 L Air NomalClosee 26328 KA11 00dVAT _ 0247 KF25 L Air NormalClose RS09 8012 0A L RS09 8013 0A L RS09 8014 0A L RS09 8015 0A RS10 2762 L L L L L RS09 8020 0A L RS09 8021 0A RS09 8023 0A RS11 2163 L RS11 2164 L RS11 2165 L RS11 2166 L L RS11 2082 L
38. rE SF Rs11 1219 TDU 08F ULVAG 1997 S 1 S S10 ULVAG EE R 8 TDU 08F ULVAC 1997 R 29 2014 4 5 lt gt OPM2001CN C 9802050 1998 CtoCn Fpy2 OPM2001CN C 9401250 1994 C to C Fny2 P 1000 10271 2000 2 nl Cto Cn ny2 RS11 1026 TCA3822 T 9608455 1996 c to CH ny2 RS12 2079 UNA 2000 ULVAC XS06 4604 1992 2 600 1000W 2450MHz 50MHz 200W 13 56MHz to C
39. Rsoe is4e BASERF o23431 MAMATUTO WW Reoe 1349 houseosemwwressr pxigaoxmevz 3690 03269 AMAT_ 1 1 RSoe is4 er2ssrmweooenrurrtgxs4os 9150 70018 AMAT 1 1 nsoe issi cAP BEARNG 5X2 o02034726 IAwAT Reoe is5z GLAMP ACME LEAD SCREW 9020 34727 IAMAT RSoe 1330 mmoeowzrwwssrweeswmeoee 350 01007 AMAT 1 1 1 Reoe S1 amaseowssrwwssrweeswmeoee 350 01007 AMAT_ OO nsoe is7e coAALRESISTOR lse60 jiERMAuNEl RS09 1386 lgLETRoSTAnc GHuGK oyER IAMAT AMAT nsoe isem FEAELATE_TEoS pXz peyp 0021 00042 Rsoe is44 FAN_MUFEN Ti5GGEM 9600101 IAMAT lt Reoe i345 IFAN_MUFEIN 115GGEM 96001011 AMAT 10 1 VM1 01 nsoe is4e GATE O00 ZASLTVALV 019009533 IAMAT nsce is47 GATE 50002ASLTVALV ot9 9933 AwAT nsoe iss4 GATE50002ASLTVACV 019009533 IAMAT nsoe isss GATE50002ASLTVALV ot9 9939 AwAT RSoe is5 exueeswsageessror4 verEM 3310 1074 VARAN OO nsoe ise hmwessassywoupep poweneomp 9140 99551 AwAT
40. 2 PRC 012A ULVAC A69A 01732 16700L m VG100 _ RS10 2117 PRC 012A ULVAC A69A 01172 16700L m VG100 0 2118 PRC 012A ULVAC A69A 01173 ES ma ID NAR Tc 16700L m VG100 2 20 PRC 012A ULVAC A69A 01177 a DS 16700L m VG100 2 21 PRC 012A ULVAC A69A 01171 RS 2 16700L m VG100 2 0 2123 PRC 012A ULVAC IA69A 01750 a 0 2128 PRC 012A ULVAC A69A 01749 _ 16700L m VG100 0 2616 PRC 012A ULVAC A69A 00815 16700L m VG100 1 3125 PRC 012A ULVAC A69A 01774 2004 OO NS eS 16700L m 00 27 RC 012A ULVAC A69A 01775 2004 Rn 5 5 16700L m 00 yr a UI 28
41. X3 MH89 7043 EBX 2000C ULVAC CP RP Au 0 500x600H Ul ME 1984 EGL 206M CRTM 9000 CRYO RP EBX 8C ULVAC EBX 8C ULVAC EBX 8C EBX 8C ED 60000 D14 ULVAC 500 x600H 100 A EGL 35M CRYO RP 2 O2 i 1 500x600H 150 ME 9 X 3 CP RP MH59 0112 p 1000x1000L 10 14 DP RP 3 JPD 075C LR90 UTM 3302FH CRTM 9000 MH96 5015 MA06 3266
42. 2014 4 5 ULVAC 2603 ULVAC ULVAC 2927 ULVAC 00398 RS GP 2ARY IULVAC _ O00142 _ 5 5 bl RS GP 2ARY IULVAC _ 000171 G TRAN_BPR2 GTRAN_BPR2 G TRAN_BPR2 ULVAC 15810 INPUTDC24V OUTPUTDCO lt 10V G TRAN_BPR2 ULVAC 15811 INPUTDG24V OUTPUTDCO lt 10V G TRAN_BPR2 ULVAC 15812 INPUTDC24V OUTPUTDCO lt 10V G TRAN_BPR2 ULVAC 15819 INPUTDG24V OUTPUTDCO lt 10V G TRAN_ BPR2 ULVAC 15820 INPUTDC24V OUTPUTDCO lt 10V _ G TRAN_BPR2 ULVAC 3363 SENSOR CABLE35m _ G TRAN_BPR2 ULVAC 3364 SENSORCABLE40m 6 G TRAN BPR2 ULVAC 3365 SENSOR CABLE40m G TRAN_ BPR2 ULVAC 3366 7 SENSORCABLE40m GTRAN_BPR2 RS11 3082 G TRAN_ BPR2 RS11 3088 G TRAN_ BPR2 RS11 3089 G TRAN BPR2 GTRAN_BPR2 RS11 3093 G TRAN BPR2 RS11 3095
43. 16250 JA28 VAT VF300 16250 JA28 VAT VF300 16250 JA28 VAT VF300 16250 JA28 VAT VF300 48240 CE01 VAT _ _ CR ICF152 48244 CE01 VAT _ _ CR ICF203 64246 CE52 F64 a 0101 90562 0002 64246 JE52 0101 VAT F64 108661711 2 F64 105808 2 NC TE EE NW40 2 24128 KA21 NW25 2 VAT ICF253 1ICF356 64250 CE52 11011VAT 4250 CE52 2202 lvAT lsow Do 0 0 0t 5t 0 6 1ICF356 2 SropyVAtvyE ace s
44. 2 ULVAC 2 0 4 C30VR ULVAC 2 C30VR ULVAC ULVAG 3 3078 C30VR XC1359G RS11 8135 0A 5 8089 0A 2 2 1172 RS12 1173 RS12 1174 0A 2 RS12 1175 0A 2 1 RS12 1176 0A 2 RS12 1177 0A 2 RS11 8035 RS07 2659 RS07 2682 RS08 2099 RS08 2699 RS09 1023 RS09 2785 4 1O1O1O ww w ww 6 Eolael og lt lt nD ULVAC 2 2 C30VR ULVAC C30VR ULVAC 2 C30VR ULVAC ULVAC 2 2 ULVAC
45. FTI 3302W 1m MgO ECH 150 VG350 FTI 3302W 1m MgO ECH 150 VG350 FTI 3302W 1m MgO ECH 150 VG350 FTI 3302W 1m MgO ECH 150 VG350 FTI 3302W 1m MgO ECH 150 VG350 FTI 3302W 1m Mg0O ECH 150 X VG350 FTI 3302W 1m Mg0O ECH 150 CVD SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 20m CVD
46. POW IN MBX 8m VDC MBX VDC IN VDC 12m AC100 MBX 3 m 50cm 5KW 13 56MHz MBX 50EA 1 CONT RFP CONT RFS 4m CONT MBX CONT AMC 8m POW OUT AMC POW IN MBX 12m VPP IN VPP AD A DD MBX 8m VDC IN VDC MBX 8m x2 3m 1m RF Power Control Monitor VDC 8m MBX 8m 8m CONT 4m ULVAC 210006 _ 20kW 13 56MHz 8m RFS 27200L ULVAC 208005 20kW 27 12MHz 8m 3 2154 3 2153 3 2151 3 2152 hgn gh RFS 27400F ULVAC 210001 40KW27 12MHz 8m RFS 27400F ULVAC 210002 40KW27 12MHz 8m MCP 1010E ULVAC 1032 AMC 1AR IULVAC 395008 1 2290 ULVAC 92005 RS AMC5A IULVAC 388033 _ VDC VDC5A S N 395040 1 1 2289 o ln 1 Go a IRFS 1330L RFS 13200F IRFS 27200L IRFS 27400F IRFS 27400F IMCP 1010E IAMC 1AR_ AMC 1AR IAMC5A _ V
47. ESM 1 ULVAC 1024 2024 2 tt IDAKTAK3030 ULVAC lt EB gt HPS 1600F ULVAC 20020014 HPS 1600F ULVAC 20020012 a RS11 8048 EB HPS 1600F ULVAC 20020011 7 BOX RS11 8049 EB HPS 1600F ULVAC 20020013 025G01 JST 10F EBG 203UB4H 4 RS12 1122 JEOL Bs101108 74AEZ372 2003 EBG HV025GO2 EBG 3m RS10 8060 0AIE SG 004S ULVAC lt991214551h5 595h59 9b95 9 Q Q Q __ _ yvqy 5 RS10 8061 0A SG 004S ULVAC 19912146
48. 2014 4 5 P U2S ULVAC O21695 JIS 2in LP U2S ULVAC 020626 2000 JIS 2in L U6S ULVAC 068673 2000 JIS 6in U6S ULVAC 068671 2000 JIS 6in ULVAC 068672 2000 JIS 6in R S S lt lt lt lt 1 Ul UU UU UT lll 4 gt U 2 512 12 L ULVAC 068674 2000 JIS 6in IULVAC 067358 2000 JIS 6in U6S IULVAC 067357 2000 JIS 6n L U6S IULVAC _ 067359 2000 JIS 6in S12 S12 S12 ST 1 lt T U I L U 1 lt lt lt lt UlU UU UT 1 1 1 1 L L U10S ULVAC 102581 2000 JIS 10in U14S VLP U14S ULVAC 147231 2000 JIS 14in L VLP U14S RS12 1260
49. NT NT EE N x oo NT NT MP 1003LM EE 1 EL 1003M S N CZS 038 RS13 1122 0A TMP 1003LM BM03 TMP CONT ICF 253 RS11 8124 MP 1003LM INZM230 Rs09 1474 MP 202LM aoi TMP 303LM BLO1 eeeao TMP 303LM BL02 TMP CONT 2 O rng MP 403LM FZL182 O rng _ RS11 2253 PU1501PC PFEIFFER S N 13882198 CF 306 NW 40 M N PMP03697 ICF152 NW25 Cu ICF152 NW25 Cu VG100 NW25
50. PMB 024C ULVAC A19A 00535 a RS12 1223 EH500 EDWARDS 006700640 ps 1 1 1 1 pp 1 1 2014 4 5 lt ULVAC gt RS04 8067 25 a IOmx2 IOULVAC_ 5 5 22909 1 1 tntnte RS13 8042 0A 2 C1O0 ULVAC CB1416 62 t Q X wvovooo lt RS13 8043 0A 2 C1O0 ULVAC cB1439 06060505 4 W W VWK K RS13 8044 0A 2 5
51. 200V 100V 2014 5 200V 100V 2014 5 200V 100V 2014 5 200V 100V 2014 5 200V 100V 2014 5 200V 100V 2014 5 200V 100V 2014 5 200V 100V 2014 5 200V 100V 2014 5 200V 100V 2014 5 200V 100V 2014 5 200V 100V 2014 5 200V 100V
52. IAMepA usF15 1 IAwepA US hm IL6AB ls ET CE CE EE DE IE FT gm tt TE a PE TE CO YT CE EE EE FE EE lpxcui2M UM aaa ME i EE 31 2014 4 5 RS09 1169 IMODULEMFEG _ wmmswewemvep IAMAT_ Rs09 1218 O DBody Rso9 1275 0 DBody Rs09 1276 0 DBody Rso9 1219 0o DLid H 0 1 Hathbhs hb RIOI5IWII1IItI5I5s5s tst bb W W W t4t4 JIM RS09 1273 0 DLid Wo oo HKhb 560 5 51 b WOW W4 4t M Rso9 1274 0 DLid H 0 2Hhb5 hb bh WI1IIhb5bhw5WWIWIWIWMWMWM WM 2 4 RS09 1039 PC1 MATCH ASSY
53. W255 IXLG25 SMC INW2W 2 2 24 4t t IM IXLG25 SMC INW25W WU WW ss b gt vv bbbhwk IXLG 25 ISMC _ Hbpu5 5 110 055 WI WM IXLG25 M9NC SMC INW25 IXLG63 M9NC SMC _ INW6S U_UUWUWU U U 2 2 2 2 2 01 l 8 IXLe 80 lsMo _ Hu WW 5 u u bh KAuARELNT R I WW 10836 CE01 00dVAT 0692 UCFi114 7 11210 0159 HVA 95 01971 ICF070 11220 0150X HVA 01 17156 iGFO70 14036 CE44 AAC1 VAT F14 109375 3 _______ 7 ICF114 14046 CE34 0005 VAT _ F14 96835 3 7 ICF253 14048 CE34 0005 VAT F14 104723 2 _____ 7 ICF306 16250 JA28 VAT VF300 _ 16250 JA28 vaT VF300 16250 JA28 VAT VF300
54. EI 303M N CZR 71 TMP CONT EL 303M S N CZR 76 Rs11 2254 PU1501PC PFEIFFER S N 14072840 IiCF 306 NW 40 M N PMP03697 VG150 NW25 Lc SA S440 485 TC 400 IO CVD RS09 1583 TURBOVAC361C 5 EI 1003M S N CZS 009 R 1119 0A TMP 1003LM T8SN UCIIBM05 0301919 TMP CONT VG 200 EL 1003M S N DZS 141 R 21 0A TMP 1003LM T8SN UCI BM04 0301918 TMP CON VG 200 2 3 3 3 3 2 EL 1003M S N CZS 139 0 0A TMP 1003LM T8SN
55. ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC 60390 1999 a C Pa Torr WPB 4m 7 10m A27 4 A47 7 A 7 7 4A47 7 __ A47 7 4 A47 8059 A47 7 2583 4 9 A47 7 _ 2586 2 4 A47 7 1 _ ULVAC 43500 ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC 2584 8000 8027 2582 4570 2563 o 4568 2585 4569 8141 2583 7999 8058 7998 2806 14
56. C1O ULVAG ICM1024UU WW WIWtWt RS13 8040 0A 5 C15R ULVAC IpE1237 0 ULVAC RS13 8115 0A 2 ULVAC RS13 8038 0A 2 ULVAC RS13 8039 0A ULVAC XC1312G EE 3 3065 Ni 39963hr 40016hr 40054hr 31938hr 40045hr 36037hr 31921r 31931hr 36839hr 38911hr 38906hr 36040hr 36034hr 38863hr 2 RS13 3058 ULVAC ULVAC
57. G TRAN_BMR2 1ULVAC 10207 G 6200 1G 6200 1 6 M PDR CJ1C BCHMKS 000759408 2014 4 5 lt gt G TRAN _BMR2 ULVAC 15004 _ G TRAN _BMR2 ULVAC 15005 2008 2008 2008 2008 2008 2008 3215 101052 2005 014120116347 ULVAC MCH MLX ULVAC ULVAC IULVAC _ 0267 ULVAC MCH MLX IMKS O00206023 Verl2015X IMKS 000065664 _ 1Pa IMKS O2199111A li27AA 00001BToerr IMKS 001240829J IMKS 001240830J d9 tt ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC IMKS 2008 IMKS 2008 IMKS 2008
58. ICP Antenna 1kW 13 56MHz TMP DRP APC p 150mm ESC CF4 C3F8 SF6 He Ar O2 RE 500W 13 56MHz p 200mm RE 500W 13 56MHz o 200mm RE 500W 13 56MHz DP PMB RP p 200mm 4 CtoCH ny2 ISM Antenna 1kW 13 56MHz BIAS 300W 12 5MHz TMP DRP APC p 50mm ESC CF4 CI2 SF6 He Ar O2 ny2 NLD Deep Etch Antenna 1kW Bias 500W 13 56MHz TMP DRP APC p 150mm C4F6 CH2F2 02 Antenna 2kW Bias 1kW 13 56MHz TMP DRP APC o 100mm C4F6 CH2F2 O ny2 NLD Deep Etch Antenna 2kW Bias 1kW 13 56MHz TMP DRP APC p 150mm C4F6 CH2F2 02 C to C
59. 3000L m VG80 VD SiH4 PH3 B2H 3000L m VG80 ULVAC A85A 00031 VD SiH4 PH3 B2H ULVAC A85A 00023 3000L m VG80 ks a UI RS13 260A 3000L m VG80 NW40 ez wl LR 180 ULVAC A85A 00908 2008 CVD OH 28000L m VG150 RS13 2033 LR 1800 ULVAC NK03 2923 2 CVD SiH4 PH3 B2H6 28000L m VG150 RS13 2034 LR 1800 ULVAC NK03 2991 1 CVD SiH4 PH3 B2H6 2 RS13 210 RS13 210 RS13 212 RS13 212 RS13 212 RS13 212 RS13 212
60. ULVAC ULVAC MCH MLX ULVAC 018370116197 ULVAC MCH MLX gt 2 ULVAC ULVAC MCH MLX ULVAC 018070116199 ULVAC MCH MLX gt ULVAC O18090116191 ULVAC MCH MLX gt IULVAC 018100116192 ULVAC MCH MLX ULVAC O18120116194 ULVAC MCH MLX IULVAC 018390116199 ULVAC MCHMLX IULVAC 28400419176 ULVAC MCH MLX 15 resms RS10 2219 VIVI EE RS11 8076
61. y2 UNA 2000N ULVAC RE93 1003 2 600 1000W 2450MHz 50MHz 200W 13 56MHz tf ET err Ct 29 lt C VD gt CtoC CVD RS13 2010 0AICVD CME 200J ULVAC MA07 5012 0 X H2 SiH4 N2 B2H6 PH3 CO2 7 Si 2 ny24x2 2 224x2 CVD RS12 1145 CVD CPD 1210 ULVAC e 200 SiH4 O2 N2 CVD 3 DWNT 3 MAX1100C RS10 2769 CVD ULVAS MBOSS7002 2003 RP H2 10SLM Co 10SLM 200mm x 600mm ny2 MO CVD RS12 2004 CVD HR 4421 IHN136 716 2002 950x oe 257 ALN 160 400 10007C EE UI UI TEOS CVD RS11 1200 CVD PD 240 SAMCO 1996 13 56MHz 300W UI J
62. JIS JIS JIS JIS JIS JIS JIS JIS JIS 1in JIS 1in JIS 1in JIS 1in JIS 1in JIS 1in JIS in JIS 1in JIS 2in JIS 2in JIS 2in JIS 2in JIS 2in JIS 2in JIS 2in JIS 2in JIS 2in JIS 2in JIS 2in JIS 2in JIS 2in JIS 2in JIS 2in JIS 2in JIS 2in JIS 2in in in in in in 1 2in
63. RS11 2084 L 7 RS09 8016 0A oo oo oo 1 2 oo 8 oo ow RS11 2229 RS11 2223 RS11 2224 RS11 2077 RS11 2078 26328 KA11 00dVAT 0250 KF25 L AirNormalClose _ 26328 KA11 00dVAT 0251 KF25 L Air NormalClose _ 26328 KA11 00dVAT 0252 KF25 L Air NormalClose _ 26328 KA11 00dVAT 0253 KF25 L Air NormalClose _ 26132 KA2 NW16 2 ey 2 NE n7n Series 24 KF 2IVAT zrewme 0101 1 1 1 Series 24 KF 2VAT FG lseres 26 KF1 VAT Feel lseses 2e kEtvAT F2680049894 lseres 26 KF AVAT jaeees72 seres 26 KF 41VAT F2600317201 939 IXLc 40 X559 sSMGC IXLG25 sMC 7 Wo XLG25 SMC
64. SOCS 1o CRTM SEC 400MK3 O2 100sccm EGO 40M ULVAGC EB EGK 3C ULVAC 183100264 EB EGK 3C ULVAC 183100262 RS11 8164 EB EGL 35 ULVAC 177100197 ULVAC 579883 4 2 M N 3151900 005A AE ULVAC 579882 _ M N 3151900 005A AE EGC 10G ULVAC 19952050 RS11 2466 IMF98 1018 1998 suu 1 1 16 1 t RS11 8028 CRTS 12NS ULVAC 2005 5 1 1 16 tw W RS11 8029 CRTS 12NS ULVAC 2005 uup 5 1 15156 t nt Q0 RS11 8070 CRTS 12NS ULVAC 2005 5 1 1 1 q qq RS11 8071 CRTS 12NS ULVAC 2005 5 6 6 11166 5 56566 R RS11 8072 CRTS 12NS ULVAC 2007 5 1 1 tew TDU 08F
65. Ar200sccm VCR RS11 2180 0A 2 SEC 4400M MKISTEC 291502486 5 RS11 2182 RS11 1166 2 SEC E440J STEC 3430014434 CoiOscem VCR RS11 1167 2 SEC E440J STEC 3463572997 H210secm VCR 1 1 RS09 2672 SEC F740MCA1ISTEC 2451023 Ar 2SLM VCR Fujikin Valve 3HS 01 STEC 4168320104 2 ISTEC 4168320105 2001 1 uu WW WWW WW ISTEC 4168320143 2001 5 ee mm IW3000 CKD 1808 U 1 WU5UU 5 w wWwWnt 5bO5 5 WW RS12 1370 dhbhbwbzbzb z bh8 ISIWOIWIWIWs II II16lhPh h WntWt t t RS12 1371 up p opO WW 1dlhwhws5svswswIohhhw5 b 3S3 3S 11F I1 1 15I IO5wI II 1 1 OC WWmWmWmWKWKWK Km RS12 1372 11 RS11 2118 ISQ SMC alo wc SS uv gt w
66. IMKS 2008 IMKS 2008 IMKS 016293672 IMKS O16293679 IMKS 016293683 IMKS O16293684 IMKS 016293833 IMKS 000094997 1 5 5 55 5 5 tw b 6 0W gt CMX 1110 CELERITY lt gt IMDC 260 MAXTEKINCI121 ICRTM 7000 ULVAC 0934 0 5WI WW4W4 t t 6 RS11 1057 CRTM 7000 ULVAC O977 3 N NR B NNS NB K Fz FL gt RS13 1030 0A HORIBA OL PS01 1A amp SMPA7 5 2100C ITranspector 2 lLoTr23Bo2800 WVW9W95 59W95 1212424tM WW W 2 ITranspector 2 70003237 Transpector 2 911 242 G1U H100MN TRANSPECTOR_XPR XPR TR 10 INFICON H8TR15B0O _
67. TMP RP _ gt UV UV 1F 24A1643 2003 ems ee wmwslwmmwl RS11 2027 1M010002412 2010 15 36 lt gt RS12 2087 MPA 600Super CANON UM031046 2004 uu WW RS10 2788 PLA 501 CANON 91092827 EE 0 RS11 1245 TFE ELS7500EX H85 019 I 2014 4 5 mms mm mwlmmmslmmwl EVG520 EVG S040002 616540 E SPP600S 7039 _ 1999 0 I RS12 1392 9 EVG301 IEVG S050012 2005 0w bb WW lhNliaaa ea Rs13 3130 0A WM 1700 ToPcoN 20701
68. UCI IBM02 0109836 TMP CNOT VG 200 S13 1119 3 1121 RS13 1120 RS13 1125 0A EL 1003M CZS 007 RS09 1487 E 1003M 5 5 U WW5W5 5 222424t5 I 50 RS10 8007 RS10 8009 GS10 8010 RS10 8007 0A 2 E 1003M IKZS059 _ U 5 RS10 8009 0A EF 1003M GZS129 5 5 06 1 6td2M9 RS10 8010 0A 2 E 1003M IDZS047 _ 5 RS11 8131 E202M IAH60 5swswsws hbkwb bh WW IE 303LM CZR 70 RS11 8127 EI 303M FzR138 5 bu 55TIIBIBIBWBWumumW 90090 6 0 1 1 1 1 813 1 812 1 812 1 813 1 813 3 219 3 219 RS1i 8132 2 LKB254 _ 2 5 gs
69. ULVAC _ O21702 IULVAC 518203 ULVAC 518215 IULVAC 518244 ULVAC 518246 ULVAC 518249 IULVAC 510332 ULVAC 022462 IULVAC 1989 ULVAC o170001 ULVAC _ o170009 ULVAC o170004 luLVAC _ o170019 ULVAC o170094 IULVAC O27242 IULVAC O28933 IULVAC O28935 IULVAC O28942 ULVAC O28959 IULVAC O28995 029006 IULVAC O29022 IULVAC O29065 IULVAC O21586 ULVAC O21537 IULVAC O21544 ULVAC _ O21551 IULVAC O21552 ULVAC 221041 IULVAC O21752 ULVAC O21759 11 IULVAC 2002 ICF 070 UFC203 150FH OK JIS 1in JIS 1in JIS 6in JIS 6in JIS 6in JIS 6in JIS JIS JIS JIS
70. ITM 2300FWD1WULVAC 3 2023 UTM 2300FWD1WULVAC 2300F0455 CVD SiH4 H2 CH4 CO2 PH3 B2H H4 H2 PH3 H2 2300F0428 20m CVD SiH4 H2 CH4 CO2 PH3 B2H GeH4 H2 PH3 H2 20m 2300F0447 CVD SiH4 H2 CH4 CO2 PH3 B2H H4 H2 PH3 H2 20m 2300F0448 CVD SiH4 PH3 B2H6 FTI 2300W 20m CVD SiH4 PH3 B2H6 FT 2300W 20m CVD SiH4 PH3 B2H6 FT 2300W 20m CVD SiH4 PH3 B2H6 FT 2300W 20m 2300F0206 2300F0205 2300F0222 3 2024 UTM 2300FWD1HULVAC 3 2025 UTM 2300FWD1WULVAC CVD SiH4 PH3 B2H6 a TM 3 2026 DIM22900EWDINULVAG FT
71. L L L L L L L 2 1077 2 1078 RS09 8077 0A RS09 8026 0A RS09 8027 0A 1 2153 1 2154 1 2073 1 2074 1 2155 1 2156 2 1295 RS09 8028 0A RS09 8029 0A RS09 8030 0A RS09 8032 0A RS09 8033 0A RS09 8038 0A L RS09 8041 0A L RS09 8042 0A L RS09 8043 0A L RS09 8044 0A L RS09 8046 0A L RS12 1107 0A L RS12 1108 L RS12 1275 L RS09 8047 0A L RS09 8048 0A L RS09 8049 0A L RS09 8050 0A L RS09 8051 0A L RS09 8052 0A L RS09 8053 0A L RS09 8054 0A L RS09 8055 0A L RS09 8056 0A L RS09 8057 0A L RS09 8058 0A L RS09 8059 0A RS09 8060 0A L RS11 3142 L RS09 8061 0A L RS09 8062 0A L RS09 8063 0A L RS09 8064 0A L RS09 8065 0A L RS09 8066 0A L RS12 1103 0A L RS12 1104 0A L RS12 1105 0A L
72. RS09 1242 y ss fesrmsereglh u uswu ddhuhuhu hf 14 gt R 155655 00 0 RS09 1246 z Rso9 1200 Asey RWEEIR2 OMDAGS9 Reo 1zg6 257X leweenreweegg RS09 1237 2 lemwweemmrsmrAcepl uswsu uhwmhwhwhwhthtlfh bz IZ gt W gt W gt WvWv WI Rss izsg AR meme meme RS09 1080 X 17 ppp H AMAT RSO9 1093 MA RS09 1482 UDK514VN ULVAGC WUWU5UU5 1W5WWWWwW OjI1IWW WItvbv 0 w w w RS09 1485 UDK514VN ULVAGC Rso9 1094 nk A LRso9 1081 N975 MA U_U WW WU U WWW 1lwvWwWwWwv vt t II WW WW WV V W W 24 lt
73. 1 2in 1 2in 1 2in 1 2in 1 2in RS11 2152 VAP 300WII ULVAC 000184 EE UVAC 2002 IDLVAC 200 UVAC 2002 IULVAC 2005 hleFooo 1 IULVAC 2005 lcFooo 1 HU ULVAC 2002 ULVAC 2002 ULVAC _ H650189 luFc114 IULVAC 000002 ULVAC 800456 JIS 3 4in ULVAC 800361 JIS 3 4in ULVAC _ 800111 2000 ULVAC 021700 JIS 2in
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75. MDL 1OOIA ULVAC C582925 10 MDL 1001A L 1001A L 1001A L 1001A L 1001A ULVAC C609102 1o L 1001A ULVAC C609108 10 L 1001A L 1001A ULVAC C611703 1o 1001A ULVAC C612995 1o L 1001A ULVAC C612996 10 RS09 1498 DC DCR 1502A ULVAC 19922009 15 RS09 1499 DC DCR 1502A ULVAC 19922010 1skw RSO8 2041 IDC MDL 15 ULVAC 145679F RC 15kw 55 5 5 5 55 5 1 666 RS10 2721 DC Pakzo 18APAKi0 70 KIKUSUIF_ 2 5 WW 5 5 5 51 t X gt w WW WwtWQ RS10 8035 IDC RS13 1028 0AIDC HPK 03Z KYOSAN WA2434 Ar DC HPK 10Z KYOSAN WA4264 3kw Ar DC HPK 10Z KYOSAN WA4265 2 2 RS11 2286 DC HPK 15ZI KYOSAN WA0789 Ar RS1i 8086 DC RSO9 2804 DC HPK 15ZI 1997 RSO9 1162 ID MDLLO _ IAE _ DC MDX L6 IAE 1 12kw IMDX L6 AE 02 03 Spare leV AE C614572 12kw 05 06 ln nibn nibnl
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110. A Reoe is45 IMFCARIOOseem MAT th WW Rece is4e IMFCARIOOseem hwr lt WW 1 Rsoe is4i IMFCN2200seem STEC NMwATm Rsce is7 Nalow Loadlock LA MAT hb 1 Rsoe iss Nalow Loadlock LEB MAwam th WNW 1 Rsce_isso lpvpHPUFT wm 1 RG levpHPuFT wm Reoe iste aoeesrewveso 72 eowr MA 51000 0 Rsoe is0 wor rn DO 2 eowro9 MAwAT Reoe iszi vores vO OO MA ht0 h hn nsoe i4 shad A nsoe_ists TT CN FT ME FE nso ise shieaUgpr MAT 1 Reoe is39 SPACERINSULATORHFTER AMAT nsoe is49 SPLTRBOX EDX NMwam psisz lsputee A Rsoe isze SYSCONT BULKHEAD CABE MAMATOUITL WW 1hUhkthb lhbh KR Rsoe is47 VAT rCHKt AT WW Rsoe ise VAT rCHKt MIwm ssce ise VAT roHKt hwar Rso
111. DCt VDC5A S N 397001 RS13 1060 0A 2 AMGC 6D ULVAC 395004 _ VDC5A S N 395001 3 1061 0A VDC VDC5A S N 396035 3 1081 0A AMC 6D ULVAC 395041 VDC5A S N 395025 3 1109 0A 2 AMC 6D ULVAC 398082 Voa 29 3 1110 0A 2 AMC 6D ULVAC 392008 oo 3 1111 0A 2 AMC 6D ULVAC 392009 0 8068 0A 2 AMC6D ULVAC 392018 0 8069 0A 2 AMC6D ULVAC 394000 6151 0 0 wl 0 8070 0A 2 AMC6D ULVAC 395101 RS10 8071 0A 2 AMC6D ULVAC 397124 ULVAC IMBX 05EA2 ULVAC 395079 IMBX 05EA2 ULVAC 3980399 oo6o6 6 6
112. E5 Go a En 28000L m VG150 CVD 22 SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 2 Go 4 kn CVD SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 CVD SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 CVD SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 CVD SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 CVD SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 ULVAC A128A 10236 rsto iioo oofeoo sook ULVAC ES10 348 SR a Feee 88 Ni NE CE CC ER LE i EEE EEE EE CE I Oh SenAIGDC90 EBWARDS CSC RS08 8029 IA3OW EBARA C60132 3000L min NW50 32
113. FE EE EE EE EE CR RE neet CE EE EE EE SE EE EE CEE ee SE EE EE EE EE RR AMAT IO AMAT bb IO AMAT 0 W 0 0 0 0 0 DO lema_ ro soxlAMAT 1 01 W 010 po ks jewe 1l 1 IDRVER BOX hswewesswewggh lt lpy Pamp hsw _ Pua Seus 13 Al 20328 IAMAT 1 ua Seures 13JMW 1 oot 21206 IAMAT 1 1 1 0 0 NAT AN PAC 97 AMAT 1 exrskweprgpmmeortEpRVE IMAT HG GONT seemswsmfwwssmmwsl INTERFACE lgwwemswemweemslAMAT INTERLOGK mwseesmsrswlAwAT INTERLOCK lewwwe mmwoslAMAT INTERLoGK swesmwmwsslAMAT BORE swwammmmmlAMAT lt SO mAMAT 1 0 U 0 0 0 0 0 IAwepA us ES hwm IAwepA US hw 1 IAwepA usFf5 mw 1 7_
114. H3 B2H6 3000L m VG80 NW40 VD SiH4 PH3 B2H6 ei 3000L m VG80 NW40 VD SiH4 PH3 B2H6 22 AN 3000L m VG80 NW40 CVD SiH4 PH3 B2H6 22 3000L m VG80 NW40 CVD 3000L m VG80 NW40 CVD 3000L m VG80 VD SiH4 PH3 B2H 3000L m VG80 VD SiH4 PH3 B2H 22 es 4 Co Co 3000L m VG80 VD SiH4 PH3 B2H 22 MM
115. IULVAC _ 397035 poo9o9 4 IULVAC 395075 9 6V6 8 006 6q0 060 IULVAC _ 395068 _ IULVAC 395030 RS13 1106 RS13 1107 RS13 1108 S a mm NN 3 m mm IULVAC 395073 IULVAC 394017 MBX 05EA5 ULVAC 8 6 1 minwlnwlnw nin olelelelels alalalala mmImlmlmlm gt lmlmlemlmlm 20 2014 4 5 RS10 8075 0A IMBX IOEA ULVAC 393007 _ V V5V5 5
116. LVAC O811539 4100L S __ RS13 3055 221 2 U12H SP ULVAC O811540 4100L S RS13 3056 221 2 U12H SP ULVAC O811542 4100L S R 4 4 4 4 4 4 4 4 4 4 ReTg 3045 251 2 ui2hSP uLVAC O609090 4100S 4 4 4 4 4 4 4 4 U12HSP U12HSP ULVAC 2003 4100L S UVG300 2 i i bi bd pid pd pid po a pig a rid Dei ri Peri Dri pri Pid rd Pid pi 4100L S 7 No U22H ULVAC 17000L S VG550 ULVAC 17000L S VG550 7 ULVAC O706582 6SN ULVAC 0103767 U8SN ULVAC 0005540 lt gt ES PE EE EE EE S N9912441 S NRFB220LG 17 CRYO T8C HELIX RS11 2240 2 avewcx mwwvlHELX TT i RS11 2237 257 HELX mM RS1 2235 25 2 IONBOADiOF HEUX SZNKo7e8662
117. LX gt EB 1813 0116195 ULVAC MCH MLX RS13 2284 0A E RS11 1063 IE RS a SS 1 0 WP 01 15m WP 4m 10m OK 1 O WP 01 4m gt gt RS RS11 3112 IE RS11 3113 IE RS11 3114 IE RS11 3116 IE RS11 3117 IE RS08 2158 IE RSo8 2159 IE ULVAC ULVAC 21270212184 ULVAC MCH MLX ULVAC ULVAC MCH MLX ULVAC MCH MLX PG 6200 ULVAC PG 6200 ULVAC _ 018140116196 ULVAC MCH MLX gt 2 RS11 2318 RS11 2313 Rstt 2314 IE RS1i 2315 IE RS1i 2316 RS11 2319 RS11 2320 IE ULVAC O18110116193 ULVAC MCH MLX ULVAC 018080116190 ULVAC MCH MLX
118. MBX 1310A 1KW 13 56MHz M BOX MBX 1310A 1KW 13 56MHz M BOX MBX 1310A RI RI DS DS DS 1KW 13 56MHz M BOX MBX o 0A 3 1KW 13 56MHz UI 008 M BOX MBX 1310A 16m 2 2008 1KW 13 56MHz 3 2249 0A RF a a a a a a n ns n n S es Pp Pp Pp p p 3 2250 0A RF 1 ULVAC 3 2252 0AIRF RFS 1310A ULVAC M BOX MBX 1310A 16m RS13 2158 ULVAC 209009 1KW 13 56MHz 8m 1KW 27 12MHz RS06 2704 RF RFS 2712K ULVAC 306001 I a 2kW 13 56MHz RS13 2157 RF RFS 1330L ULVAC 209017 3KW13 56MHz 8m a 3kW 13 56MHz RS07 3026 RF RFS 30CB ULVAC 6 5KW 13 56MHz MBX 1350U AC POW RFS POW IN AMC 4m AMC AMC RS12 8048 RF RFS 1350U ULVAC 207004 306030 AMC RFS 4m CONT MBX CONT AMC 8m POW OUT AMO ed
119. RS13 8028 0AI LR60 ULVAC A80A 00100 1030L m VG50 NW40 1800L m VG80 NW40 R 150 ULVAC A96A 00016 _ 2500L m NW5O NW40 3000L m VG80 NW40 2 MENARGS TIAA 22 ea pe 3000L m VG80 NW40 3 2049 ULVAC A85A 00032 CVD SiH4 PH3 B2H6 S R 3000L m VG80 NW40 R S Co S S S CVD SiH4 PH3 B2H6 22 S S S S CVD SiH4 PH3 B2H6 Co Co Co 3000L m VG80 NW40 VD SiH4 PH3 B2H6 3000L m VG80 NW40 EE EN ULVAC A85A 00025 ULVAC A85A 00362 ULVAC A85A 00022 3000L m VG80 NW40 VD SiH4 P
120. SRY A GP 1SRY A GP 1SRY A GP 1SRY A DV 6200 ULVAC 006740115388 _ ULVAcC MCH MLX PH8601 2CH 35m 30m 25m 25m 25m 25m 25m 30m 35m 30m 25m 30m PH8602 2CH 35m 30m 25m 25m 25m 25m 25m 30m 35m 30m 25m 30m 2008 2CH 35m 30m 25m 25m 25m 25m 25m 30m 35m 30m 25m 30m 12CH 35m 30m 25m 25m 25m 25m 25m 30m 35m 30m 25m 30m NAS 2008 ULVAC PH1508 MAX8 ULVAC PH1509 MAX8 ULVAC PH7302 MAX8 ULVAC PH7301 IMAX 0 IULVAC 4049 1 0 1 0 IULVAC 4048 1 0 07
121. SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 CVD SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 UFC 203 NW40 RS13 2225 0A 2 TF3301W DP3 ULVAC 3301F 0373 2008 1 ER MA Ne a 2014 4 5 lt gt lt Re ICF152 II rp 3 RS11 1202 STP 300 1084A 1997 AC Power
122. SiH4 PH3 B2H6 2 28000L m VG CVD SiH4 PH3 28000L m VG CVD SiH4 PH3 28000L m VG CVD SiH4 PH3 28000L m VG150 CVD SiH4 PH3 B2H6 2 28000L m VG150 CVD SiH4 PH3 B2H6 22 28000L m VG CVD SiH4 PH3 28000L m VG CVD SiH4 PH3 28000L m VG150 CVD SiH4 PH3 B2H6 2 28000L m VG150 CVD 22 SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2
123. Siz_aze DY2576 Los EEE TE EE 2247186 RS04 8037 0A 2 476829 SS 7602 20Mhz IWATSU 52277869 Su WV WW 5 5 5 5 5 5 5 5 1 t I I8I 80 5 W0 2 FIB RS04 8097 0A SS 7602 20MhzJWATSU 522778722 mE 1994 TS3700 897834 SE TS3700 907939 TG8120 ZT006809 NAFS3070P 17591007 2007 7089 2007 DCM60 1 4 RE TOF SIMS TFS 7 1997 2014 1 EE EE
124. T _ 6 1 1 tn Q ll1 ljhhwWwv RS09 1058 VME STEPPER CONTROLLERI IAMAT _ 6 1 1 t Q Q ww 6 RSo9 1074 IWAFER UFT 6 AMAT WW 11bszs w WwvwvOvI M 2 RS09 1076 IWAFER LIFT _ 6 6 l AMAT U_U WU hb5W5W 1 bzhd v r qrqpep pBp 0 0 RS09 1083 yssYiAwp pRVeRTEsTep mpoeo 909 IAMAT _U 11hbs x WvWv bkt RS09 1084 Assy iAwp pRveRTEsTEp Reo1999909 IAMAT _U WW 11hbh5W5W1hbhzh WW W WwWw RS09 1085 IWMAGNETDRIVEASSY IAMAT _U 9 9 1l1Ihb vhf RS09 1232 sownowawurrmegl n RS09 1206 RS09 1233 BD RS09 1202 174 OU lO D RS09 1193 RS09 1195 yk RS09 1210 RS09 1192 IO D RS09 1204 lv AT IVAT _ RS09 1278 Rs09 1283 RS09 1255 2
125. UTM 2300FW D 2300F 0359 CVD 2008 SiH4 H2 CH4 CO2 PH3 B2H GeH4 H2 PH3 H2 3 2227 0A UTM 2300FW D 20m 2300F 0360 CVD 2008 SiH4 H2 CH4 CO2 PH3 B2H H4 H2 PH3 H2 3 2228 0A UTM 2300FW D 2300F 0370 0 CVD SiH4 H2 CH4 CO2 PH3 B2H H4 H2 PH3 H2 Ul 3 2008 3 2229 0Al UTM 2300FW D UTM 2300FWB UTM 2300FWB UTM 2300FWB 2300F 0368 CVD 2300F0453 SSM OS PH3 B2H GeH4 H2 PH3 H2 CVD 2300F0449 NN Ct CO2 PH3 B2H H4 H2 PH3 H2 CVD 2300F0451 2 0 PH3 B2H H4 H2 PH3 H2 CVD 2300F0450 0 NN 2 PH3 B2H GeH4 H2 PH3 H2 CVD SiH4 H2 CH4 CO2 PH3 B2H H4 H2 PH3 H2 20m ULVAC ULVAC U 3 2022
126. V IAMAT U_U 1 hhbUW9 599 uhh bh 5v5vw WI MtBbkM RS09 1543 cabie Asey sorcs waer end round 2 vovovo0V IAMAT _U 1 hhUbUW dhhb bh hh5I5v WvIW1W1 20 9O 20 2t4t4t t IM 862 R RS09 1263 Centura 5 up bb b b 6 lt RSO9 1264 Centura 4 RS09 1265 Centura 4 RS09 1223 Centura2 gt RS09 1065 CHOPPER DRIVER IAMAT U_U WVU_U 5UVU 55S5S S S S S5S555 5555Q8Q6Q86Q6 RS09 1286 Cntura Bufferlid RS09 1284 Cntura 2 LRs09 1211 GRE LRs09 1212 CR RS09 1071 CVD RF MATCH AMAT WU1 WSU l WS 1 t Q RS09 1072 ICVD RF MATCH_ SS IAMAT U_U l WU WS5U U UVS5S5 5 5 tnwQ Q0 0 V RSo9 io98 DCPOWERSUPLY MA po EZGRERe GR F _ poR F _ EE EE EE IpoRF CE CE EE EE eT SE EE EE FE EE ee SE CE EE
127. e ists WdsChamber war Rsoe ise WSHRINSULATORUFTER NAMATUIU1OU 1 1 110 WW10 Rsoe is37 WsHR INSULATORUFTER NMwAT Reoe is3m WSHRINSULATORUFTER ee nsoe ise EzZby9 8510 Gemgresssee NMwAT RSne 155e 2 TT 1 ETT SOe Tpao Inf gt 2 EE TT DE FE Roe is17 A MAT RS09 1518 2 Ti AMAT 101 RS08 1562 TMP Mer ee RS09 1558 77 22 SSSSEL SS SS RSoe iss7 AX hw lt gt RS09 1262 0A EE RS11 2495 p42 tm FULVAC 1994 Rs07 2971 _ lH 18 ULVAC LRS13 8017 0A 72 ULVAC IMB61 1020 2N MPS 254 2
128. oo mmz sr KITS SCT gt STOPVALVE XLH40 lsMC liwao LH40 lsMC 7 liwo 1 LH40 Me wet 13 lt gt 2014 4 5 DV 6200 ULVAC 07240212184 ULVAC MCH MLX DV 6200 ULVAC 006760116373 ULVAC MCH MLX EM301 EM301 EM 301 EM 301 M 301 _8CH M 301 8CH RS13 2278 0AIE RS RS13 8081 0AIE RS13 8082 0AIE Rs13 8084 0AIE Rs13 8086 0AIE 8 8 RS13 8095 0AIE M 301 _8CH P 1000 GP 1000 GP 1000 GP 1000 GP 1000 GP 1000 GP 1000 GP 1000 GP 1000 GP 1S GP 1SRY P 1SRY A GP 1SRY A GP 1SRY A GP 1SRY A GP 1SRY A GP 1SRY A GP 1SRY A GP 1SRY A GP 1SRY A GP 1SRY A GP 1SRY A GP 1SRY A GP 1SRY A GP 1SRY A GP 1SRY A GP 1SRY A GP 1
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