油回転真空ポンプ - 株式会社ユーアイ
Contents
1. 14 RS12 1391 RAUS Z 1000 CERAUS Z 1000N CERAUS ZX 1000 CS 200 RS12 1197 SBH 2206 ULVAC RS12 1001 2Yy 0 mes ee MH60 0287 1985 SB 15 SH E C10 ULVAC MH90 5010CXW05 1990 53 350 SH 350L ULVAC RS12 1420 SH 350 T08 ULVAC MA01 1045 SH 450 C10 ULVAC MH61 0502 NH8978 SH 450 T10 ULVAC MA00 1036 XE08 1183 2001 SH 550 ULVAC XT07 0489BB SH 550 ULVAC a SH 5502. 0190 35413 FSCM 03522 0010 30583 0010 05256 0150 75202 0010 09490 0020 34131 RS09 1315 3103 THERMOCOUPLE DXZ 0190 35413 2013 11 05 3690 03269 0150 70018 0020 34726 0020 34727 3250 01007 8860 IrERMAUNE_ AMAT AMAT SU 1 WWW 5O 00v0v v 14ItIt RS09 1388 FACEPLATE TEOS DXZ DCVD o021 00042 WW 1hhw hb WOWOIOIOI I2v W W0 WQW 0600 01011 0600 01011 0190 09533 0190 09533 0190 09533 0190 09533 3310 01074 ARAN 0140 09551 0240 32135 0090 02980 0090 02980 0100 00084 0100 00084 0010 00084 0200 36629 0020 30570 0020 30570 RS09 1384 PLATE_ GAS DISTRIBUTION HEVEB150MM 0020 30570 0300 09055 0100 00165 0010 09019 BENKAN 3870 01455 3870 01455 Reggriesg MA PNEUBINSZWAYMNING 6700Z45 a oi00 00793 0200 09969 IAMAT WA lseo RS09 1337 20AV STEG _ 6 WW VS tn Qt 0 t t RS09 1361 74 w RUF7925 UP LRS09 1375 FGG7005M c 2
3. SiH4 PH3 B2H6 H2 CVD MAX1100 C RP H2 10SLM Co 10SLM 200mm x 600mm 4 CVD 13 56MHz 150W TEOS CVD 13 56MHz 300W TEOS CVD C2F6 ArO2 N2 MO CVD 950x_ 257 ALN gq 160 400 1000 C Fny2 Zn MO CVD 6inx1 400 900C
4. 6 3 2038 3 2039 3 2040 NG RT 5 ww 5 RT gt 45 PDR 090CLN ULVAC PDR 090CLN ULVAC 7 1 PDR 090CLN ULVAC S08 8029 pp I Asow S08 8030 a he GpP80 QDP80 46 1 814 R R RS12 1 RS12 1129 RS12 1 RS12 1 40 20 ERD5M NJ 40 20 ERD5M NJ 40 20 ERD5M NJ 40 20 ERD5M NJ 40 20 ERD5M NJ po Io 2 1284 42 DVS 321 RD90 2013 11 05 CVD 28000L m VG150 SiH4 PH3 B2H6 2 1800L m VG80 NW40 C60132
5. 3 21001 R RS12 1080 RS12 1196 S S S S S S RS10 2175 R 0 2682 RS13 1003 RS11 3014 S12 1419 RS12 RS12 1214 RS11 1194 RS12 1224 RS12 1233 RS13 2099 RS12 1428 RS05 2068 RS11 2397 RS11 3233 RS11 1191 RS09 2143 RS11 2512 RS11 2022 RS13 3016 2 2002 MBE RS EBA 2000 ULVAC SF02 0005 1 i MH62 5022 SE3403 10 2005 mm la mm mn 3 6 EBX 10C ME90 1073 SE59 1362 4 SE56 1351 3 MH89 7043 MH97 1045 mm w 3 1885 mm w m m x x No 1 a 1998 01 2013 11 05 p 1700x1500H 7 2 DPx2 RP
6. o 650W x 800 x CRYO RP p 650Wx800 EG CRYO RP W Solid 5 p 650Wx800H 2 DP RP 650Wx800H 2 DP RP CRYO RP EGL 35M 10kW CRYO RP 750Wx 750Dx900H 100 500x600H JPD 050C m oo 19833 ME58 0136 9 x 3 CP RP
7. a ler lol McP 1010E UVAC U_U WW 1hbs5 5 O5sss WIWtWtWtW W IMcP 1010E 2 10929 _ UVS WUU 55555 nt w gt qw IMcP 1010SX ULVAC _ 230 00U0VWV 1hbs 60 p IMcP 10108X lOLVAC _ 249 0 V V 6 1 WU l SW 5 5 1 1 WwWt PSH 306C PSH 306C PSH 306C PSH 306C PSH 306C PSH 306C PSH 306C PSH 306C PSH 306C PSH 306C PSH 306C PSH 306C PSH 306C PSH 306C PSH 306C PSH 306C PSH 306C PSH 306C PSH 306C PSH 306C RS12 1020 ion bombard power supply DCP 505 ULVAC IPSH 040 _ ULVAC IULVAC U406 024 IULVAC U406 038 IULVAC 410052 001 _ IULVAC U406 029 IULVAC U406 018 5 IULVAC U406 036
8. 2013 11 05 lt 253L m KF40 ULVAC VG 40 X Ar A 500L m VG 40 3 2195 D 650D MLVAG O04 0 Ce 3 ee ER 500L m VG 40 3 2194 D 650DK ULVAC A03B 03058 ME a 500L m VG 40 3 2196 D 650DK ULVAC A03A 00204 Ny oe 150L m p 28xe19 2 1063 PVD 180 ULVAC 1 73468 2002 3 2008 VD 301 ULVAC A63A 01655 500L m VG 40 TM 201 res 500L m KF40 3 1012 VD 301 ULVAG NB63A 52474 1 VG 40 500L m KF40 3 8001 1 VD 301 ULVAC NB63A 52475 VG 40 X Air Ar 1 J
9. RS07 3012 RS09 1498 RS09 1499 RS11 8018 RS08 2041 RS11 8060 RS09 1161 RS09 1162 RS09 1289 RS09 1160 RS07 2797 RS10 2721 RS09 2804 RS11 2286 RS11 8086 DC 2 D D D D D D D D D D D lpc RS10 8036 pc RS10 8035 Dc RS11 2029 C 3 C C C C C C C C C 2013 11 05 PCGO25A NVAG ME EE ETA EE pcR is02A uLVAG isso ETE pcR is02A uLVAC izzol miskw 5 0 0 MDLI001A 54el mmmosw 4567aE RG aiseweov MDL1501A 704315 704317 15kw Imlmlmlml 1 el Mm ow EE 2325 lkikosOh _ IKYOSAN 1998 01 Mastor15kw Slave 15kw 30kwH IKYOSAN WAO789 Mastor15kw Slave 15kw 30kw KYOSAN MAT267 WAG36 4 Wesorigto Eve 1930Ky HAR 1N100 LOL MATUSADA 52933 iky 100mA 100W HARTP100 LOL VATUSADA 52945 EA IPR 500 10LGB 2009 5kw 500V 10A ISTARBURST ULVAC li85079FZRP PAK20 18A
10. 24 2013 11 05 MAX Energy 200KeV RS07 2983 IMX 3500 ULVAC MI98 0001 4in 1 30 200KeV i EET SS me ET wwwwlswswl WW RS04 8081 IACCELUDECEL PS 0 UU Re04 9054 IARG FL PS esyewysgmevml limee loom gt Reo4 e052IGPU Box 0 os 1 1 Re04 9021 HV PS SZOLeOP5XGi222 GASSM ok RSor soa7 lvPS IESuuieopoqzzz laussnAv 80255 mgpxO Re0 8098HV P SDEG PS mem asSNedv ZN99993103 pe RS04 6023 HV P S XT P S amnA eLASShy reo ovests25 GOkVD RS04 6089 HV P S EXT P S oannn 6LASSM 5 NN2900392 RG 1 3925 BNG PS 5SyUl im 2GY255 RS04 6091 Q LENS PS PSZUL 15 2G1255 GASSwaw SNN2930099 Ip Re04 6026 2 pe29 GPUBOX Re04 6027 mto9 5osEpsuEr 100 1 1 Re04 6053 pey9 posEDisPLEY 6055 WmW CGCEOXCIEY7 FE EE EE Fi 0 49m2 35 40 80 C
11. RS11 1057 CRTM 7000 ULVAC 0977 EE RS13 2197 IC 5 INFICON L3XF42A02947 6 RS11 3132 Q MASS ST 200 ULVAG 2004 PVD Model 918 214 G1U RS12 1302 2 Transpector XPR 3 INFICON 70006605 SYSTEM Model XP31 201000000 Sensor No2172 RS11 1169 2 Transpector TT100 LOTT23B02800 CR RS11 1170 2 Transpector 2 70003237 CR RS11 2208 He 1 HELIOT 302s ULVAC 3198 11 imm pco56gW zara EE WW so TT RS11 1075 WM 1500 TOPCON 907
12. J J J J 100 2 12 AC Dual 4in x 1 DC x 1 2 5kW CRYO RP gt MKS 2 Ar O2 2004 ny2 4 x3 RF DC XY 2010 3in x3 DCx1 RFx1 500W TMP RP 6in Xx 3 DCx1 RFx1 500W CRYO RP 6in x 3 DC 4KW x 1 RF 2KW x2 500W Cr T 2
13. 1 2013 11 05 1100L S VG150 VG40 200V 2 1247 PKGOOA AO UL 2000 1200W Ar Air 965 u 1100L S VG150 VG40 200V A UK Ar Air as 1100L S VG150 VG40 200V 2 1249 Ar Air 2 8 1100L S VG150 VG40 200V 2 1250 Ar Air Es 1100L S VG150 VG40 200V 2 1251 i Ar Air _ re 1100L S VG150 VG40 200V 2 1252 Ar Air 5 5 1
14. EB S13 2060 R es ee li Reg RFS 1205S S11 8119 RF RFS 1305A FS 1305A FS 1305A FS 1305A FS 1305A FS 1305A FS 1305A FS 1305A FS 1305A FS 1305A FS 1305A FS 1305A FS 1305A mw Pp 8 mw mw FS 1310A RFS 1310A Mill JST 10F JEOL BS101108 74AE 2003 RS11 8047 EGG 10G ULVAC 19952050 i Be 2005 107016 107015 202065 205001 203038 204019 204018 203037 203043 204021 203004 203041 207050 207051 207052 207053 202007 02006 12 RS10 2209 EB HPS i000G _ IOLVACO WU5U5U5U05 10 0 5050 O D phS 2 w ww 2 owl RS11 8048 EB lips ieooF lulvAc lo02001 55 RS11 8009 EB HPS 1600F ULVAC 2o020014 RS11 8010 EB HPS 1600F ULVAC 20020012 hd i EE ET EE 7 RS11 8050 EB HPS 1600F ULVAC 20020010 4 9
15. JST 10F 2 2 EBG 203UB4H 4 F EBG HV025GO2 EBG LV025G01 3m i i i i i i i 5 SIE 2268 RF SP RKC KYOSAN WB3563 RSTi dhS6 RF RfS05G ve IO5004 5OOW RA AA ERA RS11 ST20 RF Resmi205S VAG soow ey uvae 9 500W 13 56MHz M BOX MBX 1305A 20m 500W 13 56MHz M BOX MBX 1305A 20m 500W 13 56MHz M BOX MBX 1305A 20m 500W 13 56MHz M BOX MBX 1305A 20m 500W 13 56MHz M BOX MBX 1305A 20m 500W 13 56MHz M BOX MBX 1305A 20m 500W 13 56MHz M BOX MBX 1305A 20m 500W 13 56MHz M BOX MBX 1305A 20m 500W 13 56MHz M BOX MBX 1305A 20m 500W 13 56MHz M BOX MBX 1305A 20m 500W 13 56MHz 500W 13 56MHz M BOX MBX 1305A 16m 500W 13 56MHz M BOX MBX 1305A 16m 500W 13 56MHz M B
16. 4 Io Go RS12 2072 SUS RS12 1386 VPE 4F SEE II FA 1 Qa m m 4 w mm a m F ed ml a 9 2013 11 05 ICP Antenna 1kW 13 56MHz ULVAC MA03 1008 2004 TMP DRP APC VE0232 001A a 150mm ESC 1983 CF4 C3F8 SF6 He Ar 02 500W 13 56MHz RIE p 200mm ULVAC ULVAC ULVAC 2 ANELVA SAMCO ANELVA 500W 13 5 o 200mm a Co
17. 20 TE ET CET FE 0010 20441 ReO9 1050 PCB ASSEMBLY DIGITAL IO war RS09 1051 PGB ASSEMBLY plerrAL IO Awar Reo9 1052 PCB ASSEMBLY DIGITAL IO war RS09 1053 PCB ASSEMBLY plerrAL IO Awar Re09 1054 PCB ASSEMBLY DIGAL 170 AWAT Re06 1079 PB ASSEMBLY ENGGDER WTEREAGE AMAT RS09 1059 PCB ASSEMBLY TGGAUGE MONTOR AMAT Re06 060 Pog ASSEMBLY rCGAuGE MoNmoR AwAr Reoe ioe1 PB ASSYALMUX war Reoe o7e PGB ASSY SBC VO BREAROUT MAT Reo 1055 PCB ASSYANALOG INPUT IAwAr Reoe io56 PGB ASSYANALOG INPUT war RS09 1217 RS09 1268 POWER STANDARD ELEGTRONtGS NG 1 RS09 1105 IPRCO aar Do24 DC12 DC15 DC5V 783 Reoe to3 pvpFf emos oooso4 wrt 1l Reo ios lpvpF5 eas osom wm 1 A kar Re0e 034 PVDF 2 5020760 MA LohbNb bUWUW1 1 RS09 1035 PVDF 1 gt oo64 aA ReGe 050 EpuoERBoX _ 1 lm 1 Re06 1102 RF MATCHPHASEIV 2655500 kw ES ES S00 RE
18. s ET CE TT TT ET 2 S10 2602 FHT 75S ULVAC MF99 1131 MAX1800 C RP PMB c to C 2 2 2056 RTA 6000 2010 800 C MAX 1000 100in 2 02 N2 ys oz Rsto 1044 1044 ys leem BH ar More 16 EE CRYO Pu S12 1409 JETFIRST100 JIPelec CC02911 MAX 700C 2 02 N2 Ls lt W RS12 1316 ATH js ceoet 5V RS12 1315 3 gcssoeod RSl2 1339 2 th 35Omm 200G pGe2YD LRsizass9K RS12 1320 IF 2000 kovoj B Al mseee czoG SH2S0398 RS07 2920 UV ILS 165 24 Mu WW UV
19. SNR D 5 0 2018 A36A 00854 4000L m VG80 VG50 IVS 2401 luLVAc A36A 03120 4000L m VG8O VG50 0 2061 0 2065 0 2092 A VS 2 VS 2 VS 2 ULVAG A36A 03123 4000L m VG8O VG50 VS 2 ULVAG A36A 02373 4000L m VG8O VG50 VS 2 VS 2 VS 2 S 2 40 40 40 40 4000L m VG80 VG50 40 40 40 Pi NO 0 2159 a 1 3031 Pli 4000L m VG80 VG50 TCO ITO 4000L m VG50 TCO ITO 4000L m VG50 TCO ITO 4000L m VG50 TCO ITO 4000L m VG50 TCO ITO 4000L m VG50 TCO ITO 4000L m VG50 TCO
20. Multi Chamber 4T1E1H 8in Etch ICP HEAT Infrared Lamp SP1 Ta SP2 Ta SP3 FeO SP4 Si TMP CryoTrap Multi Chamber 1E2T e 6in Etch ICP SP Ti TiN x2 LTS Hot Plate GPCS 300GT TMP I CryoTrap Cu ny2 UP e 4in 4 SP RF 1kwx2 Etch 500W TMP DRP 150mm y 12in SP RF 3kwx1 TMP DRP e 6in ny2 G BOX Multi Chamber 1E2T 6in Etch 2 SP1 Metal SP2 Metal nfrared Lamp x2 CRYO RP 6in x2 UP S 300GT S 300GT
21. 3 SPH 2019F sps 03 503 ULVAG EE CC EE ME EE ioA ks lmws A ke hme seAme s ame WW WW 1 l lbOo0 AT_MXxi0 Kswssl lawe wvac ls luyAc mi len len lem PF ME WE ET EE PF 7 ME EE IEHA C7 SYSTEM I F_BOX SYSTEM I F BOX 16 AMAT _ENDURA AL RS09 1518 Ti RS09 1557 RS11 2494 RS12 2077 Hearter ASSY 0 2013 11
22. 3 2013 3 2014 3 2015 3 2016 ll 3 2017 ll 4000L m VG50 TCO ITO ll 3 2018 ll 3 2019 3 2020 2 1441 1 ll Eii RS 2 122 1 Pi NO J Eli ll RS09 1573 TMX 2 ULVAC EE EE 0 9W RS12 1064 ITyPE EFoU ULVAC 2002 RS12 1066 lrTypEErou ULVAG RS12 1067 lrvpEEFou ULVAC RS12 1065 ITYPE EFoU ULVAG FE 100V 200W 4P E 100V 200W 4P E 100V 200W 4P
23. SiH4 PH3 B2H6 28000L m VG150 CVD SiH4 PH3 B2H6 28000L m VG150 CVD SiH4 PH3 B2H6 28000L m VG150 CVD SiH4 PH3 B2H6 28000L m VG150 CVD SiH4 PH3 B2H6 92 28000L m VG150 CVD SiH4 PH3 B2H6 28000L m VG150 CVD SiH4 PH3 B2H6 gt NW40 NW40 NW40 NW40 NW40 NW40 NW40 NW40 NW40 NW40 NW40 NW40 NW40 NW40 NW40 NW40 NW40
24. 28000L m VG150 CVD SiH4 PH3 B2H6 gt 28000L m VG150 CVD SiH4 H2 CH4 CO2 PH3 B2H6 H2 Gel H4 H2 PH3 H2 28000L m VG150 CVD 23 Ge SiH4 H2 CH4 CO2 PH3 B2H6 H2 H4 H2 PH3 H2 CVD G HHo SiH4 H2 CH4 CO2 PH3 H4 H2 PH3 H2 CVD SiH4 H2 CH4 CO2 PH3 GeH4 H2 PH3 H2 CVD SiH4 H2 CH4 CO2 PH3 GeH4 H2 PH3 H2 CVD SiH4 H2 CH4 CO2 PH3 eH4 H2 PH3 H2 VD SiH4 H2 CH4 CO2 PH3 GeH4 H2 PH3 H2 1800L m VG80 NW40 1800L m VG80 NW40 B2H6 H2 B2H6 H2 B2H6 H2 B2H6 H2 G C
25. 1 1186 2 Bn Hn 1185 1 1201 2 1 1184 2 1228 RS09 1008 3 1006 RS09 1024 2 2027 2 1380 14 RS09 1500 R09 1501 S10 8053 8 2 1 2 1 2 1 2 1 2 1 2 1 1 1 2013 11 05 SIV 850 ULVAC MA03 1012 SIV 850 ULVAC MA06 1006 SRH 420 ULVAC MA04 3429 SV 9040 T14 MA00 1013 850x900 3 DC CRYO RP 850 x 900 3 RF CRYO RP 9 4 2C1E3T E p 8in SP1 Metal SP2 Metal SP3 Etch RIE
26. I 1 1 1 1 1 1 oo oo mimi ra aa mim NT Um uu ug o o o o HI TNI 1 fT IT ITHIIHEIHIIIEIIIIIIIIIIIIIIIIIIIHIII 0 ww Ll i 1 2325 G TRAN BPR2 G TRAN BPR2 G TRAN BPR2 G TRAN BPR2 G TRAN BPR2 G TRAN BPR2 G TRAN BPR2 G TRAN BRP2 G TRAN BRP2 G TRAN BRP2 G TRAN BRP2 G TRAN BRP2 EM301 M 301 8CH M 301 8CH M 301 8CH M 301 8CH P 1SRY GP 1SRY GP 1SRY mlm ulululul clalal olelel mleoloel MR nlm G TRAN SP1 PG 6200 PG 6200 PG 6200 PG 6200 PG 6200 PG 6200 PG 6200 PG 6200 PG 6200 PG 6200 PG 6200 PG 6200 PG 6200 PG 6200 PG 6200 PG 6200 PG 6200 PG 6200 PG 6200 PG 6200 PG 6200 a as gt 18 z z lt cc 2013 11 05 INPUT DC24V OUTPUT DC 0 10V INPUT DC24V OUTPUT DC 0 10V E INPUT DC24V OUTPUT DC 0 10V 2004 luLVAc _ lise0 _ SW INPUTDC24V OUTPUT DC 0 10V INPUT DC24V OUTPUT DC 0 10V uuVAG h5e24 RR Purpozy ourpurpoo lt toV ac sale
27. CUP DE B y 004101 0041011 003101 004101 7E326119423 17E284119423 7E038119423 7E038119423 0190 09663 AMAT AMAT 5 Wh0505 hbhb5 5 b WW WW WW RS09 1334 lpgw patBM kPoylAISIN _ WW 1 1hbvs hbsb WI I J 0 RS09 1335 lpgw P1DBM K4Po IAISIN _ 1 nt Q 0W W W W t t RS09 1338 227n _ li159B 00020RU S IMKS _ 6 6 SS 1 n tn Qn U RS09 1339 227H lsEc 4400M STEG _ RS09 1340 227n lsEc 4400M STEC _ 6 60 8 RS09 1341 227H lsEc 4400M STEG _ 6 s RS09 1342 227n lsEc 4400M STEC _ 6 6060 0 0 ks RS09 1343 227H lsEc 4400M STEG _ 6 9 6 RS13 2002 227h SEC 400MK3 STEc IAr soscoM 7 RS13 2003 22 lpPAoc sE lsTEc _ 6 RS0
28. VAP 250 VAP 250 RS12 1074 287 02 B1 VLH 2 VLH 2 VUH 251C VUH 251C VUH 251C VUH 651 VULH 40 ULVAG 2002 w ULVAG 2002 ULVAC ULVAC ULVAC 2002 ICF 070 2002 2002 ULVAC zz 8 RS09 1149 APCN 253A 11792 IMKRS RS10 8026 2 1 7 20044 CE24 1001 0006 VAT A 249751 2 7 7 RS11 2216 n 7 PM 5 VAT FABRNO641PM 16PM 0002 153 RS11 2217 PM 5 VAT FABRNO641PM 16PM 0002 160 RS11 2220 n 7 PM 5 VAT FABRNO641PM
29. 2 5inx18inx3 DC TMP RP 2006 2006 2004 ULVAC ENDURA AMAT 3843 E No 6520 1M9062 py2 L 350S GC ANELVA EVP 30577 1996 5 Do3 RF2 gt 99 SPC 530H ANELVA EVP 13998 1 1983 5inx15in 3 DC RF DP 2 2004 pson 540H Multi Chamber o 8in Etchx1 SPx3 1994 le 4n 3 RF HSR 512A TMP PR 1990 NF 02 4191 2003 3 4in 5in x 7in MgCa 3 DC RF
30. 2 Sm 8029 p i UTMF500 ASYST A06260950 EE EE luy urf26zw asvsT sozo0000l59 IKEYTRAN ULVAG Riie62 71701 ZMGZTBS6A KEYTRAN42EC72 lag7 jsrsoks mH5074 ocissc 0 0 I ULVAC ULVAC MLX 3000 MES ES ZX 1000 ULSTA 2400 ULVAC WD05 1001 EV 94 SMO32400 SME 200 RS08 8038 R S RS04 8076 RS04 8077 RS08 8028 MAGG brooks 0 8028 2 liAG7 lbrooks 9911 10601 2 EA i EE FE TE EC SPR 301 sis01Ys994301 RS10 2672 SPR 801 X0980 X0538Y3742701B 1 ss H Rspcaa7slz29 nn Rel0 2671 0 EE UE EE RD MG HR Re04 080 MG CH kt lt 1 1 Re04 8012 2 COT CET ET 7 lt 1 1 1 hb FE Re04 e09
31. FTL 3302W MgO 3 CH 150 FTL 3302W MgO CH 150 TI 3302W E FTI 3302W MgO ECH 150 UFC 203 NW40 F MgO CH 150 S N 13882198 ICP 3O6 NW 40 MNPMPO5697 S N 14072840 _ CF 306 NW 40 M N PMP03697 1084A 1997 UTM 50 VULP 65 VG150 NW25 TC 400 IO CVD TG 1300 S N A143387 04 VG100 NW25 CVD S440 485 1265 2004 G200
32. LVAC 018390116199 ULVAC MCH MLX LVAC l28400419176 ULVAC MCH MLX O 0 pi n NN co lo lo lt O 10 2013 11 05 RS11 3073 G TRAN BMR2 ULVAC 15001 RS11 3074 G TRAN BMR2 ULVAC 15497 RS11 3075 G TRAN BMR2 ULVAC 15498 RS1 3076 G TRAN BMR2 ULVAC 15004 TEE G TRAN BMR2 ULVAC
33. ITO 3 2011 Pi 4000L m VG80 VG50 ze we A36A 03136 2004 TM 4F sz lewe A36A 03103 ULVAC A36A 03102 VS 240 A36A 05463 VS 240 A36A 04748 VS 240 A36A 03105 VS 240 A36A 03834 VS 240 A36A 03250 VS 240 ULVAC A36A 03249 4000L m VG50 VS 240 ULVAC A36A 04751 TGO ITO a 4000L m VG50 VS 240 ULVAC A36A 04866 E2M80 EDWARDS 06771404 EE 10DUvWW WW Wt8R WnW 5W5W50 W 0 240m3 h 8Pa SV 300 Leybold NSS59 20t0f 200kg 127G BPSD 1 E53 2 1442 SV 300 Leybold NSS58 E MS RS04 8052 2010C1 334781 720L min 6 7x10 2 Pa RS11 1250 DW 720 1108091 2011 IVG 40A 1day RS11 1259 4 ITM 2 ULVAc 2009 PKS 016 2 4 3 2012
34. B2H6 H2 3000L min CF4 O02 Ar 3000L min CF4 02 Ar 3000L min CF4 O2 Ar 3000L min CF4 02 Ar 1300L min 2 7Pa NW50 2013 11 05 IXYZ2 ULVAC CR RS09 2124 DP40 EH250 EDWARDS 5274AZ7270FF 4 n RS11 2264 QDP 40 EH 250 EDWARDS PDP40 01701176 2004 EH 250 006814350 RS11 2265 QDP 40 EH 250 EDWARDS
35. 2013 11 05 RS09 1267 15V PWR SUPPLY CEN END REVE _ IAMAT_ U_U VU 6 WV 5 tn Q Q WW RS09 1041 200V DEGAS DRVER ooo 20697 IAMAT _ 0 6 6 0 0 0 4wv V W wWKWQ K RS09 1091 200V PVYDDRIVER _ Rs09 1067 45 6 ROBOT RS09 1194 5 M5 RS09 1213 5 1 Wide RS09 1170 AO IAwatoe mwpurzourPoTIAMAT _ WW 1hbv lhbshbb WWvWvWv vtIWI I IM 48 Rs09 1250 AUO RS09 1251 A O Rs09 1253IAUO RS09 1257 A O Rs09 1260 AO P 5000 AMAT EE 5 0l gt 0 RS09 1048 ANALOG OUTPUT BOARD _ MAT RS09 1049 ANALOG OUTPUT BOARD MAT U_U 10505 I 1 RS09 1070 ASSY RF MATCHETCH MAT RS09 1082 AssY sronAe euEv wAFER oASsErE HNpLR IAMAT U_U U lb vs WIWIWIWIWIWI t I I A Rs09 1095 ATP100 _ 6 6 J JMUMMALH WU WW WW lbhbhbhbhbwbsb b WW RS09 1066 lgAsEpou sEALNG RNG LAMP MoputE AMAT U_U U WU 1b st u i WIW W t I M RS09 1086 BASEDOUBLE SEALING RING LAMP MopULE 0 IAMAT
36. MSI 110 LRS13 3020 ni i DCM60 74240RTED 78130CWC UPS7 5KVA UPS1 2KVA Ms PC 55 5 S5S SS 28wq wt W 1 EEE 26 WIE EA ETE TT CUT I I CE LR es
37. XLG25 M9NC 1641431 000012 2004 CR ra KEY OTIQOIQO A 450700 A 450700 EE 1IlhU5h5 vststb WW CR CR S IB6CS SCC STD kiTz scT STOP VALVE 9 RS11 3083 RS11 3090 RS11 3112 RS11 3113 RS11 3114 RS11 3115 RS11 3116 RS11 3117 RS08 2158 RS08 2 RS08 2 RS08 2161 1 3081 1 3082 1 3088 1 3089 1 3091 1 3092 1 3093 1 3095 1 3096 1 3097 1 3098 ow nn I 1 1 w DD 1 1 olo ml n an 1 1 1 1 1 1 1 1 1 1 1 IIGS 1GIS 1
38. As P 4 4 NT2BIS 18 EGK 3C EGK 3C EGL 35 Lis Lis CRTS 12 CRTS 12 CRTS 12 CRTS 12 CRTS 12 TDU 08F RS 1 1221 TDU 08F TDU 08F ULVAC ULVAC ULVAC l579883 l579882 134 134Ver204 Zk S11 1026 roAsoe 2 1308 UV RS11 2405 UNA 2000N ULVAC RE93 1003 gE 0 2204 OPM2001CN S10 2205 e 5 VAC XS06 4604 1992 C 9802050 1998 Too Too 1999 2013 11 05 RS09 1309EB8 leelL 35 ULVAC_ 5 5 G D D lotvAc _ list0024 luLVAC _ lig310262 WS SS 5 5 51 tn wQ Q ULVAC i7710097 luLyVAc _ lise 96ver2041 5 5 555
39. 20054 RS09 1394 1998 20084 JK121026 129 RS12 1368 JFD 310 2 2 92072 2 1389 2 UN sawvo 2002 SEMIL TOOL ETS 7 7 7 3 RS 2002 2013 11 05 EE l EE 2 EE Rs13 3019 2 ETMW 100 89 H9906 0444 SS 515 t t55 2006 RS11 1036 2 SS W60A AR 55700 6949 RS09 1406 ERGOLUX RS12 1322 ls 3oooHd TAcH RS09 1401 WL 300 Mac Mic AT RS12 1348 NkoN 1 _ WVWS5SSSS AVT 45NC EE EE ET EE TT EE ET CTT
40. 500x600H Au m oo 1984 ME58 5039 ME58 5058 MH59 0112 MH96 5015 MH96 1051 MH97 5026 MH90 1086 MH97 5033 MH96 1010 1997 SOLCIET ULVAC MF95 5002 Ne VTR 350 ULVAC oeewwokoed mm oo EBX 8C ULVAC ED 60000 D14 ULVAC m m x x ao ow a ow 3 9 Cc et cc ey 5 lt lt 1998 mm 1 ow S NP wm ULVAC m x a m 60021 1996 SEC 06D SGC 8M TL 1989 VEP 1000 ULVAC MF06 1008 MBE49 RIBER F1R06003 EGL 206M CRTM 9000 500 x 600H x 500 600H 100 A EGL 35M p 1000x1000L 10 DP RP e 650Wx800H
41. MBX 13100L 65 MBX 13100L 66 MBX 1330L 67 MBX 1310L RS13 2168 MBX 1310L VAC VAC luLVAc 2o9009 luLVAc _ 2o9o08 luLVAC _ 2o907 luLVAc _ 2o8021 luLVAC 208022 _ luLVAG _ zioo06 luLVAC 208005 uvac 2iooo01 luLVAc _ 2to002 140021 F R C 107014 107015 ww 201006 302007 207005 306030 ULvVAC 89029 IULVAC lse004 LVAC MBX 1310 ICP1000 ULVAc 304002 uvac lstooo1 wvac lsto002 luLvac lstoo6 luLVAC_ lso8001 _ loLvAc _ lsoao24 uvac lso8o029 loLVAG _ lso9107 wvac lso9000 luLvAc _ lso909 13 2013 11 05 1KW 13 56MHz M BOX MBX 1310A 20m 1KW 13 56MHz 5KW 13 56MHz MBX 50EA 1 CONT RFP CONT RFS 4m CONT MBX CONT AMC 8m POW OUT AMC POW IN MBX 12m VPP IN VPP MBX 8m VDC IN VDC MBX 8m x2 3m 1m Power Control Monitor 8m CONT 4m VDC 8m MBX 8m 1KW 13 56MHz M BOX MBX 1310A 16m 1KW 13 56
42. luLVAc i35 135Vver204 luLVAc i37137Ver204 MS 922292Vag 1997 c to CH ny2 600 1000W 2450MHz 50MHz 200W 13 56MHz c to C ny2 600 1000W 2450MHz 50MHz 200W 13 56MHz to C y2 1994 reeowss 9608455 UV 300 U3991801 Co to C y2 Cr C mr 1278 CVD CGC 200C ULVAC MA10 3524 2010 RS10 2769 CVD DWNT ULVAC MB03 7002 RS09 1003 CVD PD 20N SAMCO RS11 1200 CVD PD 240 SAMCO RS12 2004 CVD HR 4421 HN136 716 2002 RS12 2005 CVD SR 6420 43006001 C 2006 19 RS12 1145 CVD CPD 1210 ULVAC a e 200 SiH4 02 N2 ny2 CVD CVD 2003 1996
43. 2 2 e 200mm 45GHz 1 kW WFX0013 p 150mm RIE e 4 2 IC 1987 a 200W 13 56MHz ny2 RIE 2000 orn O2 CF4 Ar CHF3 C4F8 SF8 1 R Px2 TMPx1 SAMCO 1993 RIE SUS kA a ULVAC 2001 NE 5500 2 TA01140075 2001 NE 5500 RIE EVP 16956 EVP 35058 E9302147
44. VAP 300WT IULVAC O00184 VULH 40 ULVAGC iH402495 IULVAC lS 8n7 IULVAC JIS 8in7 IULVAC JIS 8in IULVAC JIS in IULVAC IMNO3 0347 8 JIS en IULVAC MNO3 0347 3 JIS 8in IULVAC MNO3 0347 4 JIS 8in 2 IULVAC MNO3 0347 5 JIS 8in IULVAC O00102 JIS 10n lbLVAG oO0095 2 IULVAC O00103 JIS 10n 2 IULVAC 2002 2002 7 VAP 200 VAP 200 VAP 200 VAP 200 VAP 200 I I I I I VAP 200 I I I I I I VAP 200 RS12 1435 VAP 200 VAP 250 RS12 1437
45. EGL 35M x2 FRP 14 Au Sn FRP e 650W x 800H DP LN2 RP p 750Wx900H 10 CRYO RP p 750Wx900H EGL 406M CRYO RP EL TMP RP 4 JEOL TI Au Pt Ta Cu 2 EGK 3M DP RF 3 X Y MBE
46. 2004 4 RS07 2852 4 27X 12m VA BV A 4AW LS ULVAC 2002 70 x 430 LVAC WW 05050W hb5 W W W W 24242424242424 t VLP U3 4S IULVAC 800456 JIS 3422 RS11 2156 IVLP U3 4S IULVAC 800361 JIS 3742 RS12 1295 L VP U3 4S 2000 VLP 01 IULVAC 2002 JIS in RS12 1078 L lvp oi IULVAC 2002 RS12 1108 IVuP uiS IULVAC 1989 VLP U1S RS12 1274 Vp U1122S 2000 RS09 2648 VLP U2 RS11 3142 VLP U2 RS 2 1273 VLP U2S ULVAC JIS in uLVAG ozseo 2004 ULVAC 020626 2000 JIS 2in VLP U6S VLP U6S VLP U6S L VLP U6S VLP U6S L VLP U6S VLP U6S VLP U6S VLP U06AW VLP U06AW VLP U06SW B VLP U06SW B VLP U10S VLP U10S VLP U14S VLP U14S L VLP U14S 2000
47. loo40 06421 IAMAT RS09 1197 RS09 1198 RS09 1271 RS09 1089 7mt2 2kCCVD RS09 1109 RS09 1 RS09 1 RS09 1 RS09 1 RS09 1 RS09 1 RS09 1 RS09 1 RS09 1 RS09 1 RS09 1 RS09 1 RS09 1 RS09 1 RS09 1 RS09 1 RS09 1 RS09 1 RS09 1 ho wlnm SID IISJIIS EE EE WW W t t t I EE EE WItItIt t IN EE EE GE EE PE RS09 1 EE EE RS09 1131 EE EE RS09 1132 RS09 1133 RS09 1134 RS09 1137 z22 RS09 1138 22m RS09 1139 22 RS09 1140 r22m RS09 1141 22 RS09 1142 22m RS09 1143 22 A RS09 1144 v22 RS09 1145 z22 RS09 1146 22m RS09 1096 t A RS09 1092 t g NA AT RS09 1221 B0X 2 RS09 1247 J M925 2 EE EE I RS09 1235 RS09 1238 Fmy222 p92 RS09 1108 RS09 1087 RS09 1201 RS09 1326 THROTTLE VALVE ASSY ETCH 010 09019 RS09 1104 010 20000 22
48. oo NN ww NK03 2991 3 NK03 2991 4 6000L m VG80 NW40 HR60 PRC 003A 3000L m VG80 22 3000L m VG80 SiH4 PH3 B2H6 3000L m VG80 SiH4 PH3 B2H6 29 3000L m VG80 SiH4 PH3 B2H6 22 3000L m VG80 SiH4 PH3 B2H6 22 3000L m VG80 SiH4 PH3 B2H6 22 3000L m VG80 SiH4 PH3 B2H6 22 3000L m VG80 SiH4 PH3 B2H6 22 3000L m VG80 SiH4 PH3 B2H6 29 3000L m VG80 CVD 3000L m VG80 CVD
49. wr UTM 2300FWB 2300F0453 no SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 Fo ww i UTM 2300FWB 2300F0449 20m CVD SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 20m CVD SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 20m CVD SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 20m UTM 2300FWB 2300F0451 Db wr UTM 2300FWB 2300F0450 ow ww UTM 2300FWB 2300F0455 o SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 NN J UTM 2300FWB 2300F0428 20m CVD SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 20m UTM 2300FWB 2300F0447 no H4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 oo ww UTM 2300FWB 3 2022 4 M 2300FWD1B 3 2023 4 A UTM 2300FWD1B
50. VG80 16700L VG100 PMB 012CM ULVAG A17A 01174 1 PMB 012CM ULVAG 16700L m VG100 A19A 00535 a lPRe 012A ULVAC S10 2 RC 012A ULVAG IA69A 01742 RS10 2 8 RC 012A ULVAC IAe9A 01732 RS10 2 RC 012A ULVAC IA69A 01172 2 MS mew we hewmm 16700L m VG100 2 0 a ER ue eeo 16700m VG100 9 ue assa o ee VG100 RS10 2 a RC 012A ue ewo 7 16700L m VG100 32 50 so 16700L m VG100 9 RS10 2 RC 012A ULVAG A69A 01186 RS10 2 8 RC 012A ULVAC A69A 01748 16700L m VG100 0 2 8 RC 012A ULVAC A69A 01749 16700L m VG100 RS10 RC 012A ULVAC A69A 00815 16700L m VG100 16700L m VG100 Ot a u RS11 3 RC 012A ULVAC A69A 0 EE VAC u 16700L m VG100 RS11 3126 RC 012A ue Mew 01736 2004 6 A 16700L m VG100
51. 2 1288 3 2049 3 2050 3 2052 3 2053 3 2054 3 2055 3 2056 04 05 06 25 1 26 27 28 No 29 3 2033 NO 3 2034 3 2036 NO 3 2041 3 2042 3 2043 3 2044 NO 3 2045 3 2046 NO 2 3 2047 3 2048 3 2037 gt NO SU SU el bo ba TH SL SA SA SI SI SU SS SI SL SN NO 2013 11 05 RS11 1256 ER 150 ULVAC A96A 00016 2500L m NW50 NW40 LR 180 ULVAC A85A 00657 i LR 180 ULVAC LR 180 ULVAC A85A 00485 LR 180 ULVAC A85A 00100 R 180 ULVAC A85A 00021 L LR 180 oo oo NN NM NN 1 4 Eee El Er Em Fe Eee1 Er Emel R 1800 ULVAC
52. 3000L m VG80 CVD 3000L m VG80 CVD SiH4 PH3 B2H6 3000L m VG80 SiH4 PH3 B2H6 22 3000L m VG80 SiH4 PH3 B2H6 22 3000L m VG80 SiH4 PH3 B2H6 22 3000L m VG80 SiH4 PH3 B2H6 29 28000L m VG150 CVD SiH4 PH3 B2H6 92 28000L m VG150 CVD SiH4 PH3 B2H6 28000L m VG150 CVD SiH4 PH3 B2H6 gt 28000L m VG150 CVD SiH4 PH3 B2H6 92 28000L m VG150 CVD SiH4 PH3 B2H6 2 28000L m VG150 CVD
53. UFC 054 LG MBS TVLP U1S RS10 8057 1 ULVAC 9803129 a RS08 2698 ULVAC RS10 2231 U 12HSP ULVAC 0007333 0009377 2003 2300L S VG250 2 KO 17000L S VG550 X2 U 22H OLVAC i7O0OLS VGs50 Rei 2502 5 26H luLVACG ooLs ivesso cs0zR IAGeIGSEG cs0zR uvAe lesi7 tt0 1 1 0 W 0 Rso4 s067 5 4 liowx2 RS11 8035 7 ONY uvAc E082 1 j1 l RS1i 2546 125 0 TT i rd RS11 8108 2 RS 0 CT 00006582 VU 55U 5 5 1 t t Q WW RS11 8109 EE lemt loto3267 5U5U 55555 gt 5 WW RS1i 8110 227 RS 10 cmt looo5588 RS11 2238 25 4 CRYO T8c HELIX S N9912441 SANRFB220LG 5 NETWORK K TERMINALIHELIX_ S N95H9703096 2 ONBOA
54. UV 1IF Aa 24A1643 2003 _ a sae Pb mm mm LRS11 2027 MS 1 1MO10002412 2010 15 RS12 2087 2 MPA 600Super CANON UM031046 EE RS10 2788 427 PLA 501 CANON 91092827 sl RS12 1307 aw eNupo mAn ULTRATECH UD101403099 1997 e 4 w 5 6 8 2 12 UV g RS11 1245 TFE ELS7500 22 H35 019 25 Wa RS13 3022 9 ITEX 2186 2 l5ite95 RS12 1310 2E 5 WW WWW RS12 1388 2 gt
55. 3000L min NW50 29 C61435 gs 3000L min NW50 sa EE EE WI IRN75878 04 2 3 VS 5 5 t k 2 IRN7587804 IRP75728 1 3 IRP75728 2 3 RL5390 041 3 SS5 515 t O gt 6q amp Ne 1300L min 2 7Pa NW50 0210673 2002 ng 01B0410 _ 1000 min VG40 NW40 _ 1000 mn VG40 WW40 _ 1000 min VG40 NW40 1000 mn VG40 WW40 _ 1000 mn VG40 WW40 _ 1000 min VG40 NW40 12382 3hr 563532 KF25 KF16 73266 2407mn 0dg 16xidp 12 72315 240LZmm 0dp 16xidei2 acer ma oe 00153 240L min Odp16xidw12 28000L m VG150 CVD SiH4 PH3 B2H6
56. RP 2 9 Qulee 6in x3 DCx1 RFx1 500W CRYO RP 8in Xx 3 DCx1 RFx1 500W CRYO RP 8in Xx 3 DCx1 500W DP RP ny2 5in x20in 3 DC ULVAC MH63 0222 2 2UP 15 1 1022 2 1 1021 12 3 1002
57. Reztse2 te 0 TO CCE Rss69 lt fees EE EE FE TTT DE CEC EE tee 0 lmsztselttet 0 ep Reoe i06 smckm 5 leczoo heew 1 11 Reoe i029 smcyhm 2 gt leooo hs 1 FE TEE TET cm ta So CY RST 2177 3 SEG 4QOMARK2 STEG 21502469 wm Rei ii68 lt 2 sec 440OM sTEC 8424592t21 omeisewvom gt 0 RST 2086 lt SEO 44OOMKG SMG oo oocoy zara C2 10scom VGH Swageok Venkan Vane RS1i 2087 lt SEC 440OMKG SMG ceoecow woxem Ay500soom VGR Swageck VerkanVave RST1 2092 lt 2 SEC 4400MK3 STEG 845808281 SOOcom Voh SvagaokKtsvahs RS1i 209 2 SEC 440OMKG STEG 3422562475 i000scem VOR Swageek Kte vave RS11 2095 2 SEC 4400MK3 STEC 5493429474 02 5scom VOR SagekKesVave RST 2178 2 SEo 440OMKG sTEG 291502487 200ccom VGR Swageek Venkan Vave Rei 2179 SEG 44OOMKG STEC 291502492 G25econ VOR SarackVekanVahe Re1i 2182 lt SE
58. 2300F0448 20m SiH4 PH3 B2H6 2300F0206 20m SiH4 PH3 B2H6 2300F0205 FTL2300W 20m CVD SiH4 PH3 B2H6 2300F0222 FT 2300W 20m 1 3036 4 PA UTM 3302FH D1A CVD SiH4 PH3 B2H6 2300F0219 FTL2300W 20m SiH4 PH3 B2H6 2300F0220 20m CVD SiH4 PH3 B2H6 2300F0221 FTL2300W 20m CVD SiH4 PH3 B2H6 2300F0207 FT 2300W 20m CVD SiH4 PH3 B2H6 DOS FTI 2300W 20m CVD lt FTI 2300WD3 TMP 20m 2300F0412 CVD FTI 2300WD3 TMP 20m 2300F0413 CVD lt FTI 2300WD3 TMP 20m 2300F0396 SiH4 PH
59. IULVAC U406 021 IULVAC U406 017 IULVAC U406 037 IULVAC U406 014 IULVAC U406 027 _ IULVAC U406 026 _ IULVAC U406 025 _ IULVAC U406 099 IULVAC U406 050 _ IULVAC U406 056 IULVAC U406 058 _ 5 IULVAC U406 077 IULVAC U406 069 _ IULVAC U406 071 RS09 2665 PSH 072SP RS09 2666 PSH 072SP RS11 8082 11304810901 002 KW
60. IULVAC o13769017382 ULVAC MCH MLX IULVAC 283704191737 OLVAC MCH MLX IULVAC _ 21280212185 ULVAC MCH MLX IULVAC 28311418377 OLVAC MCH MLX luLVAC _ li813o116195 ULVAC MCH MLX 2 IULVAC 21270212184 OLVAC MCH MLX latvac CMAG Mch MDo IULVAC ULVAC MCH MLX LVAC 018140116196 ULVAC MCH MLX LVAC 018110116193 ULVAC MCHMLX LVAC 018080116190 ULVAC MCH MLX IULVAC ULVAC MCH MLX LVAC 018370116197 ULVAC MCH MLX IULVAC ULVAC MCH MLX LVAC 018070116199 ULVAC MCH MLX LVAC 018090116191 ULVAC MCHMLX LVAC 018100116192 ULVAC MCH MLX LVAC 018120116194 ULVAC MCH MLX
61. NM 500W 13 56M DP PMB RP w 200mm 2 4 ctoC ny2 Antenna 1kW 13 56MHz BIAS 300W 12 5MHz 150mm ESC MV02 5006 0 TMP DRP APC CF4 CI2 SF6 He Ar 02 C to C ny2 ISM Antenna 1kW 13 56MHz BIAS 300W 12 5MHz TMP DRP APC 150mm ny NLD Deep Etch Antenna 1kW Bias 500W 13 56MHz 2005 150mm TMP DRP APC C4F6 CH2F2 O2 c to CH ny2 NLD Deep Etch Antenna 2kW Bias 1kW 13 56MHz TMP DRP APC p 100mm C4F6 CH2F2 O MA10 1020 CF4 CI2 SF6 He Ar O2 MV03 1022 ny2 NLD Deep Etch Antenna 2kW Bias 1kW 13 56MHz TMP DRP APC 150mm C4F6 CH2F2 O2 MV97 1003
62. 05 ENDURA5500TO AMJ AMAT AMAT IAMAT AMAT IAMAT AMAT IAMAT IAMAT 010 01465 AMAT IAMAT IAMAT IAMAT AMAT IAMAT AMAT IAMAT AMAT MAT AMAT IAMAT AMAT MAT AMAT MAT AMAT IAMAT AMAT IAMAT AMAT IAMAT AMAT IAMAT AMAT IAMAT AMAT IAMAT AMAT AMAT AMAT IAMAT IAMAT AMAT MAMAT IAMAT MAMAT AMAT MAMAT AMAT AMAT _ 4 ULVAC 1994 RS09 1538 WSHR INSULATOR LIFTER TE ES EE RS09 1561 422 RS11 2495 I 4 ULVAC 17994 RS07 2971 ULVAC EE EE o5 w WWWWWWWW 17
63. 4 FE fe 1 FF FF ge i RN 4 Fa I Fe 3 FR RS FE lt lt lt a 4 UTM 3302FH D1A UTM 3302FH D1A UTM 3302FH D1A UTM 3302FH D1A TMP 1003LM MP 1003LM URBOVAC361C ge S440VW YY 1 oo oo 3 1 P 1003LM MP 1003LM MP 1003LM oo oo 89 7 G200 81 G1810VM MP 403LM P 403LM 82 P280 83 P280 84 P280LC P 1003LM M 2013 11 05
64. O20 T3007 mb e25AiTBF S MKS 000065664 gt 1Pa AEA UE TT EE 5 PT GEE CC CE EE FE 04 IPpR C 1C _ MkS ooo759409 WW 05 py lgpRetc MS 0 0 1 lt RS08 8015 IPDR CJ1C BCD MKS 0012408289 RS08 8016 nv lgpR ctc Bcp wks looiz4oe9J RS08 8017 gt PDR CJ1C BCD MKS 9012408309 275 ls5cp2sINJ wkS oieze3679 gt 651CD2S1INJ MKS O16293683 CD 52O lsscp2siNJ uks oezes6844 7 0 010 78 gt 651cD2SiN MkS oie293639 7 lgpR ciccCBep Mks 0097 TE EE CY ER lt TT ME EE CD 1 U nm mlm Io SR Lj RE RS11 2012 MDC 260 MAXTEKJINC 121
65. ULVAC RD RS07 2659 ULVAG 0003095D 750L S VG150 RS07 2682 ULVAC 9612407D 750L S VG150 RS08 2099 ULVAC 750L S VG150 RS08 2699 luU 6H luULvac 750L S VG150 2 7 RS09 1023 ULVAC 750LS VG150 RS09 2785 ULVAC 9801623D 750LZS VG150 hg ok 750L S VG150 LVAC RS11 2519 ULVAC 750L S VG150 ULVAG 0512140D 1700L S VG200 MBS 1700L S VG200 RA MS06 Ee H2VP 9 ULVAC 307293 1700L S VG200 RS04 8062 ULVAG 012074 1700L S VG200 H2VP gt 9 9 3 1700L S H2VP RS10 2657 22414 UEVAS 9402211D Ne RS11 8042 ULVAC 0602173D 1700L S VG200 RS07 2727 ULVAC 2300L S VG250 H2VP RS09 1005 ULVAG 2300L S VG250 MBS LG 9 7028 2300L S VG250 RS11 2379 1 ULVAC 9609102 I AM
66. heurpozwy ourpurpoocioV uuvAG i5e20 Purpozy ourpurpoo lt loV IULVAC 3363 _ _ SENSOR CABLE 35m IULVAC 3364 SENSOR CABLE 40m IULVAC 3365 SENSOR CABLE 40m IULVAC 3366 _ 7 SENSOR CABLE 40m 2004 INPUT DC24V OUTPUT DC 0 10V 5802 INPUT DC24V OUTPUT DC 0 10V 5795 E INPUT DC24V OUTPUT DC 0 10V 5796 2004 EF INPUT DC24V OUTPUT DC 0 10V 5798 2004 INPUT DC24V OUTPUT DC 0 10V 5488 2004 EF INPUT DC24V OUTPUT DC 0 10V 5047 INPUT DC24V OUTPUT DC 0 10V 5814 2004 INPUT DC24V OUTPUT DC 0 10V 5815 F INPUT DC24V OUTPUT DC 0 10V 5816 EF INPUT DC24V OUTPUT DC 0 10V 5817 F INPUT DC24V OUTPUT DC 0 10V 5822 INPUT DC24V OUTPUT DC 0 10V 5823 F INPUT DC24V OUTPUT DC 0 10V 5048 EF INPUT DC24V OUTPUT DC 0 10V 5045 20043 F INPUT DC24V OUTPUT DC 0 10V 5290 2004 EF INPUT DC24V OUTPUT DC 0 10V 5291 20043 F INPUT DC24V OUTPUT DC 0 10V 5805 EF INPUT DC24V OUTPUT DC 0 10V 5806 20043 F INPUT DC24V OUTPUT DC 0 10V 5807 EF INPUT DC24V OUTPUT DC 0 10V 5808 F INPUT DC24V OUTPUT DC 0
67. i5005 RS 1 8032 lBMR2 IULVAC 15069 gt BMR2 IULVAC _ 10207 GEM IlULVAC _ li861 GLM2 IULVAC 22946 1G 6200 IULVAC _ 014120116347 ULVAC MCH MLX 1G 6200 IULVAC 013900115378 ULVAC MCH MLX2J 2 _ 1G 6200 IULVAC O13910115379 ULVAC MCH MLX gt RS RS RS S RS 1G 6200 IULVAC 013880115376 OLVAC MCH MLX IG 6200 IULVAC 15630123381 ULVAC MCHMLX 1G 6200 IULVAC 15650123381 OLVAC MCH MLX IG 6200 IULVAC 15660123381 ULVAC MCH MLX gt 1G 6200 IOLVAC _ O267 IULVAC MCH MLX 1 2335 IiG 6200 ULVAC 014100116345 ULVAc MCH MLX CT CE ST 810 8044 80680JOAANV IMKS O00206029
68. 10V 5041 EF INPUT DC24V OUTPUT DC 0 10V 5809 20043 E INPUT DC24V OUTPUT DC 0 10V 2004 INPUT DC24V OUTPUT DC 0 10V lOLVAC _ 04284 Z 30M IOULVAC _ O4285 3ow ULVAC lo4286 lsow ve lows7 hwgm lt utVAG oz4022164 uvac orMDG ULVAC lo06760116373 ULVAC MCH MLX 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 Ud m 25m 30m 35m max MAX8 MAX8 MAX8 SETPOINT 2 SETPOINT 2 SETPOINT 2 SETPOINT 2 Cx 35m 30m 25m 25m 25m 25 30m 25m 30m H7301 2780 8C155635 8D160136 9H220928 on EE FF cn IM 3 382 265 270 i uk U U U U U U U U U U U LVAC LVAC LVAC LVAC LVAC LVAC LVAC LVAC LVAC LVAC LVAC IULvVAC _ luLVAC _ lOLVAC _ 131 0212188 M
69. JIS 6in 2000 JIS 6in 2000 JIS 6in IULVAC 068772 JIS 6n2 IULVAC O68771 JIS 6m7 IULVAC 070277 ls 6m7 IULVAC 070276 JIS 6n22 2000 JIS 14in 2000 JIS 14in VLP U14S RS12 1261 lvP Ui4S 2000 JIS 14in VLP U14S VULP 100 1997 VULP 150F IULVAC 6 6 VULP 25 TT SZ 1 VULP 40 1997 L VAP 300W I IULVAC 000186 RS11 2148 L VAP 300WT IULVAC O00183 L VAP 300WIH IULVAC ooo188 RS11 2150 L VAP 300WT IULVAC O00189 L VAP 300W I IULVAC lo00185 RS11 2152 L
70. ME PS lt 1 j 1 Rei 2117 2 EE EE CTT 1 CIS TET EP FE FE EE TE EET ET CE FE DE S06 0800 ee 00007489 WW S030 0000 ONMU U 0 1F vv Reo4 e053lyyay fpseots NEC TTT TY 1 Reoe054lnyay fseois fee issseewe 1 lt lt 27 i RS12 1094 WLK23A16Z 958518K 1994 2 2 koN RS11 3162 RKS 400V A _ ORiON 250311 EE cH 5500Ws 29 RS10 2799 csrsoowm _ jp lseozoo2 RS10 2800 csisoowRcB p gt gt lseoso2n RS10 2802 wwmior jp lo7oss s RS10 2803 wwmtor jp lo7o7466 RS13
71. wm 2 SM78250082 SM 09010 2 1412 RS12 1323 L 200N NIKON 2011 RS09 1400 WL 300 Mac Mic AT RS12 1374 FTIR IRP restige 21 2004 Rs12 i404lETHR Neasdoo memo arzodooss Re12 1387 NM0402 RS12 1384 HB RS09 1307 IE gt 26487 62522 EE PA RS09 1398 TS3700 897834 RS09 1399 TS3700 907929 2 2067 4 Ws 8800 2012 RS12 RS12 1408 ITea120 2 zrooeao9 _ RS12 1410 RS12 S13 4 M 002 2003 2 2062
72. 09 1165 DC24 DC12 DC15 DC5V Power sranoarp srscrromcs mo RS09 1224 RS09 1225 RS09 1227 RS09 1228 RS09 1229 RS09 1230 RS09 1231 RS09 1252 RS09 1254 RS09 1258 RS09 1261 RS09 1171 DI O IpeTAL 1 0 BoARDIAMAT RS09 1172 DVO lperTALI OBOARD RS09 1173 DI O DiGITAL LO BOARD RS09 1174 DVO lpeALroBoARDIAMAT _ 6 6 6 4 4 wW V K RS09 1473 K 380 02 ULVAC tl105 5 55W0WwWItIt t k 0 w RS09 1166 DRVER BOX _ lcHtcHz pRvER H t 6060 twW 0 RS09 1220lDry Pomp A390W _ 0 Hb0 Whbhbhb bs s IWW 1IWwWwvWvW9W W W W WI I2I2I2 242424 t Q W RS09 1044 Dura Source 13 Al _ 0o10 20328 IAMAT RS09 1043 Dura Source 13 JMW 1 0010 21206 IAMAT _ 1 15 lbhbhbhwsws5s bb bWWIWI IM RS09 1135IFAN _ 6 6 Sxx AMAT 1 0 0ntt amp 6060 0 0 0 w wWQ Q VK Q 6 RS09 1106 D299 857 IAMAT _ WW tw wt w RS09 1075 HEATSINKMODIFIED THROTTLEDRIVE AMAT _U UW WW 1b 5 hb z WIW W I RS09 1167 IIG CONT ecw
73. 100L S VG150 VG40 200V 2 1253 Ar Air cas 1100L S VG150 VG40 200V 2 1254 Ar Air AS 1100L S VG150 VG40 200V 2 1255 Ar Ar 1100L S VG150 VG40 200V Ar Air AC BN 3000L S VG 250 VG 80 200V 2 1245 UNG AD Ar Air 5 4900L S VG350 VG80 200V 2 1241 ULVAC A45A 00451 2000 Ar Air RS13 2004 CDP 3700 ANELVA 1539 _ SPC 530H 2 1256 V ww RS11 1004 PMB 006C ULVAG A14A 02055 8300L m
74. 16PM 0002 220 RS11 2259 PM 5_ VAT 2004 641PM 16BC 0003 1029 RS11 2460 n 27 M5 VAT 02532 R _ 1 4 4t W WW RS10 8024 L 1 800 345 1967 MKS 9928670041 2i 7 RS10 8025 L 1 800 345 1967 MKS 9928670044 Zi 44 RS10 2762 KA21 VAT 2000 26132 KA21 NW40 2 24128 KA21 NW25 2 26124 KA21 NW16 2 RS11 2163 XLG25 SMC INW25 55 5 5 RS11 2164 XLG25 SMC 57 INW25 5 5 56566 RS11 2165 XLG25 SMC INW25 5 55 1 1 RS11 2158 IIB6CS SCC STD KITZ SCT STOP VALVE RS11 2077 lecs scc srpdqz SCTIKITS SCT STOP VALVE RS11 2078 7cs scc srpez scTIKITS SCT STOP VALVE RS11 2171 XLH40 SMC zl INW4O0 RS11 2172 7 XLH4O0 SMC pz IN
75. 2085 RKE 5500A VW ORION SO1003 RS13 2096 5 RKE 5500A VW ORION 602031 S S S S S R R RS RS S S S RS12 1048 PURIC MX II LS MLD2173321 2004 01 2013 11 05 RS12 1407 SLP 22CD ED0033 mp pp RS12 1046 2 910 1250 2300 1994 24 2 RS12 1350 U_U 5 VVU 5 RS12 1351 0 ON WW 5UU WU SW5SVW5S5S5S5W5 W wWwWwWwW W W NIKoN Wat 5 55 OOIOIOIjI ItItItItWtW NKoN 5 WU WU WW5S5S 5 51 nt wt IAqNq EE EE WI NKoON 5 55 5UU1 WU SS 5 6 RS12 1324 cstooox cseoooxl 28
76. 3 B2H6 3301F0201 20m CVD SiH4 PH3 B2H6 0 FTLF3301W 20m CVD SiH4 PH3 B2H6 FTF3301W 20m FTLF3302W MgO ECH 150 FTI 3302W MgO ECH 150 FTL 3302W MgO ECH 150 FTL 3302W MgO ECH 150 FTI 3302W MgO ECH 150 3301F0274 3302H0282 UTM 3302FH D1A 3302H0284 1 3038 4 UTM 3302FH D1A 3302H0285 UTM 3302FH D1A 3302H0326 UTM 3302FH D1A 3302H0268 a et 3 om ms VY ee eS ee es CS
77. 50005 LE CC a S12 1422 WM 1500 TOPCON 01250019 1997 S12 1423 WM 1500 TOPCON 90670026 1997 2 S12 1424 WM 1500 TOPCON 00370032 1997 0 S12 1140 WM 1700 TOPCON 91197011 S12 1087 WM 2500 TOPCON 00110021 S12 1088 WM 2500 TOPCON 00110022 WM 300FoUP_ TopCON 00350074 DEKTAK3 Veeco OS 67624 uP LRS12 1340 IDAKTAK3030 ULVAC gt 2001 2001 20 2013 11 05 13 4 6 8 13 4 6 8 13 4 6 8 4 Smif200mm 0 079u m
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82. D10 ULVAC MH63 5263 SIH 4545 ULVAC ME95 1095 1996 ULVAC ME00 7820 ULVAC ME00 7818 ULVAC ME02 8012 ME00 5001 AO SE00 5001 1 ULVAC MA07 3717 ULVAC ME93 5021 1994 E J J 2002 ULVAC ME00 1006 2000 E CS 200 ULVAC MA07 1009 IBS 6000 ULVAC MB04 1020 2004 MLX 3000N ULVAC ME00 5016 1 2013 11 05 Multi Chamber 1E2T w 6in Etch 2 SP1 Ti Tin SP2 Ti Tin E Infrared Lamp GPCS 300GT MCP1123F TMP CryoTrap Mult Chamber 2T p 6in SP1 Metal SP2 Metal mfrared Lamp GPCS 300GT TMP I CryoTrap Multi Chamber 2T 6in SP1 Metal SP2 infrared Lamp TMP CryoTrap Multi Chamber 1E1T e 6in Etch ICP SP nfrared Lamp TMP I CryoTrap Multi Chamber 1E3T 6in Etch ICP SP1 3 Metal Infrared Lamp GPCS 300GT TMP I CryoTrap
83. ET5RVEASSY A Reoe 252 7 yaz722 COTTE EE ME ET Reoe 253 my2ey2RBD meweexsmeersghuhtU W01l o ET ZT EE PEE FE FE EEE EEE CYST FE FE FE EEE EE CY FE FE FE 9 EEE rT CE CE EE EE TET TY CE CE EE FE TE a YT EE C7 FE FE II TE a TEE EE EE CE EE FE EE ZETT CTT EE ME FE EE PZ FE FE EE EE S08226 EE CE EE EE TET UT CE CE FE EE 82 sy EA OE CE FE EE EE Reoe 1256 ET TTT RE ME 1 Reoe i237 Fn lewwmmmwmemeegk EE Reoe i259 Fn ammmeD lt Reoe i240 TE TTT EE ME FE EET TE EE FE CT 1 _ FE 21 2013 11 05 RS09 1093 UDK514VN ULVAC tl1005 5 55WIWwOWM WW W 4 UDK514VN LVAC Rs09 1094 Injky RS09 1081 n9 975 0040 06421 AMAT _ 1llhWhWWwWwWwWwWwWwWwW0 M MkM 0040 06421 IAMAT RS09 1100lE 9
84. MATOHPHASEN 020A MA olh 1 ReOe 049 RF POWER SURGE GPS too3 MA 1 LRse 259lsec CE CE DE EE ReOe Ti0l SB BOARD lssss NE TE ET EE EE Reoe teslse vave yA Res ioeels vaveAse T Re06 1025 soLD STATE POWER GENERATORIGEM 12A 210451 EN tt RS09 1026 soLD STATE POWER GENERATOR IoEw 12A 2104 51lEM Re06 1027 SGLD STATE POWER GENERATOR IGEM 12A 21041 51 EN 1 Reoe 268ISpBede 1 0W 1 1 DE EE EE ET CE CE EE EE EET Er FC FC EE DE RS09 1032 IPVD 0010 20764 RS09 1033 PVD 0010 20764 2013 11 05 RS09 1073 SUSCEPTOR HEFT AMAT RS09 1077 SUscEPToR LIFT AMAT RS09 1241 TC GAUGE TcGAUGEBD RS09 1046 VME STEPPER CONTROLLERI _ AMAT RS09 1047 VME STEPPER CONTROLLERI AMAT RS09 1057 VME STEPPER CONTROLLERI AMAT Rs09 1281 STDE S0058 vw STEPPER CONTROLLERT MAT 1 Roe i74 WAFER uFT 0 0 wm 1 SWART Reoe ios3 xss ANP omveRrEsrEp RE A 1l Roe os4 ssiwe omveRsrEp eeerp MA lh Reoe ioss WMAGN
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86. OX MBX 1305A 16m 500W 13 56MHz M BOX MBX 1305A 16m 1KW 13 56MHz M BOX MBX 1310A 20m 1KW 13 56MHz M BOX MBX 1310A 20m mm cs J J pp MI o a oo FS 1310L RFS 1310L RFS 1330L RFS 13100L RFS 13100L RFS 13200F RFS 27200L RFS 27400F FS 27400F 21 2 A 1 1 1 eae MINIMNIMIMIMIM on lo on w 1 an o mn a RS07 3026 RS07 2652 RFX 3000 RS09 1042 RF 1 2266 RI 1 2267 IR FS 1350U RS09 1152 R RS11 2291 VDC VDC 1A RS11 2292 VDC VDC 1A RS11 2287 RFP 1A RFP 1A PHS 2C SK1 MBX 50A Rs10 2607 4 RS RS MBX 27400F RS 61 MBX 27400F 62 MBX 27200L 63 MBX 13200F 64
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88. W25 G200 1715 G1810 1292 NW40 ZL026 ZL182 222 IZM092 ZM214 8 S ww eR A058678 47 Tc200 A099089 34 ITc200 AO58678 58 lE 202N AH6O _ lE 303M FzR144 lE 303M FZR138 lE 303M FzRt18 lE 303M FzRO44 EFD303M LKB254 IE D1303M RS11 8173 4
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90. w4O0 RS11 2173 XLH40 SMC Jz INW4O0 LRS11 2174 7 XLH4O0 SMC pz INw4O0 _ UVSV6565656565 L ReT 2072 iv limswsomroomrlyAT ladsozo RS11 2070 7 lie250 JA28 000170005IVAT lA 450700 RS11 2069 lie250 JA28 000170007IVAT lA 450700 RS11 2071 RS11 1160 ky 49240 cEO1 000270015IVAT A 719540 _ RS11 1158 2 4e244 cgoi 000220021IVAT A 719540 RS06 2823 le4048 JE28 0006 IVAT _ RS11 2229 2 64246 CE52 0101 VAT Fe4 905620002 64 10866 1 1 ll F RS11 2223 64250 CE52 1101 VAT _ F64 105808 1 RS11 2224 64250 CE52 2202 VAT _ Fe4 105808 2 RS11 8017 lasz JEs2 ANZhPMsIVAT RS11 2258 84021 R1 IVAT ILos Nr 299 2004 RS07 2931 IVAT Son 666 2013 11 05
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