MB576-2936 高純度オゾンガス発生装置 明電ピュアオゾンジェネレータ
Contents
1. TEL O3 6420 7610 FAX 03 5745 3058 Dry Ozone Reforming 4 1 MM I Ed 2 me 9 I NH E f d mpower for new days RN MB576 2936J 2014 10 2014 10ME 1 25V 1L lemark of American Soybean Assosiation Pr2. UItra Dry Cleaning Dry 0zone Heforming 5687558 3 oo gt Ns lt 03 CaHa si02 J RE UV CVD UV _ 300C bn TEOS HMDS TMS 3 se Sea ee aa so TICLLLLMNN PL UL B mm
3. 8 SEMI S2 UL NFPA CE 140kg 4N 99 99 0 5 0 9MPa G 3 5L min 4N 99 99 0 5 0 9MPa G NDE 0ISI20SMEa 10 0L min 0 6 0 5MPa G 10 20L min 15 28C 2000 W mml 760 D mm WEIGHT kg 840 S00
4. JEIDEN es Ena HHFF Fe Ez SN 1 WW RC Ultra Dry Cleaning NN 5 MEIDEN 141 6029 2 1 1 ThinkPark Tower www meidensha cO jD
5. 100 G00 300C 6 2 2 WM 0 0 cc ZU FR 15 000 15 000 2 100 100 Sccm 0 100 100 9 de EE SAE SEMI S2 UL NFPA CE O O O 1 0C 1 5 5 100 800GAL 4 5
6. a LU LU MEIDEN lt U LU 2 ME FPD FPC N 0 0 f A py4 CVD 0 _UV CVD EUVL a a TAN A MBE LTR EZ RD
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