レーザによる超音波振動体の非接触駆動
Contents
1. 1 22. 2
3. 3 1 1 2 1
4. Q Y AG 1 3 2 3 Q YAG 4 3
5. 5 6 2 Q
6. 8 amp Gaussian a 2P t a x a Q T t 1 B exp az exp 2r a 16 100 Jackson Ti r t 1 2 odOJ Or TF O exp gw 2 1A S exp 8 12 B 9 exp 8 2 exp jot 2z z h 2 17 Ti r t 1 r Plw aexp a8 8 Om oo Co gt Bi SS 9 74jo k 1 0 1 2 fw 1 1 18 i C ki C A 6O B 9 A 24
7. 2 10 10 29 nm 30
8. pea77 of chopped Laser pending moment Fig 4 1 8 J Ne large stress small Fig 4 1 8 17 5 4 2 4 2 1 Fig 4 2 1 _
9. 5 4 Fig 2 2 3 WW 3 1 Fig 3 1 1 Fig 3 1 1 1 4 Fig 3 1 2 REF LOCK IN Fig 3 1 1 1 li 2 Q YAG 3 NANNY 3 2 4 Fig 3 1 2 3 2 Q YAG Q YAG Q
10. 1 0z s Fig 4 3 2 Voltage mV DO 1 0 1 2 0 Time ms Fig 4 3 2 21 Fig 4 3 2 Fig 4 3 3 o x19 0 2o00 oO 10B 1 OY 1 cog Freguency kHz Fig 4 3 3 4 3 3 Fig 4 3 5 Fig 4 3 3 2 9 91 7 kHz 93 7kHz 59 Fi
11. Fig 2 1 Q Rosencwaig Gersho RG
12. Fig 4 2 2 7 CC Pr 20 4 3 4 3 1 F1g 4 3 1 a a op pe 1 1 4 II le 2 eo 1 FREQUENCY k 200 Fig 4 3 1 4 3 2
13. Fig 4 1 6 15 4 O _ Displacement lt g A Efficiency SS Frequency 5 E 8 8 15s O hh S QO R O a CC O 1 0 2 0 3 0 Power of YAG laser W Fig 4 1 6 Fig 4 1 7 1 D 5 Ss OO gt D 9 n 5 LL 1 D 10 3B 4 Position mm Fig 4 1 7 16 4 1 3 Fig 4 1 5 position 30 4 5mm 6
14. 7 FE s dk 1 860700 3 3 1 3 2 oo oo eo 0 0 4 0 0 0 ee se Q YAG 4 1 4 1 1 4 1 2 4 1 3 4 2 4 2 1 4 2 2 4 2 3 4 3 4 2 1 4 2 2 4 2 3 5 5 1 24 5 2 2 7 6 6 1 ee ee ee 2 9 i 31 OO 3 2 32 NA ee 3 3 3 Ul 1 1 PT
15. ON OFF Q Q Fig 3 1 2 Q ON OFF Q 1 06m 7 RMS TEM 7W 9 Q 1 06m 40 0 01MHz 40
16. X Mr x t 6 x x exp jot 26 25 9 Mr u t 9 Y x t Da 27 0 dx dx g o p ij 0 09 b Kk2B2 kk18 1 0 09 lt lt 8 7 a Bi 0 gs0 0 b 0 0 7 0 0 A A 8 B 2 am QS x SO TIT S Pl a h dd 28 dx 0 P e h 1 g O Mi P o 4 A exp Ga 8 G 29 dx OO 0 26 Fig 5 2 29 x a 10 Y DISTRIBUTION Ne 2 io ET
17. 1 2 10 i 0 0 uu 9 O Sn 40 bb 80 100 Length Fig 4 1 3 3 d y dm m El v 8 wr 6 m v vV sinh kx sin kx c cosh kx cos kx 9 m cosh kx cos kx w sinh kx sin kx 10 Fig 4 1 4 v m ji GhearForce lt 20 40 60 8B 1 Length 1 F lexualMoGment 40 60 80 159 Length Fig 4 1 4 1 12 G heaFF orce 5 0 40 50 80 100 Length F lexualMoment 0 20 40 bg 8 100 Lenqth 2Z Fig 4 1 4
18. 2 13 ShearForce F lexualMoment 1 IN JI QA IN QR 1 40 5 80 1 Length 1 9 Q 4 60 80 100 Length Fig 4 1 4 3 14 4 1 2 Fig 4 1 1 3 5 mm 6 Fig 4 1 5 Hisn lacement 1 289 30 49 50 Pos it tion mm Fig 4 1 5
19. Parkus co h Nr 12 h dy T r t zdz 19 00 m 2 KV VW lt y akV Mr ph 20 RGM Eh ay A Ks 21 12 1 20 QO oa 9 W EI lty ak ldyMr DA 22 dx dx dt EhA J Bl yy A 23 22 B 9 M 12 h d6 Q x 9 TF 6 P e h A O P g h B O P B1h 26 5 24 2 oo YG 9 Mr u t W x Ya udu 1 y ak Sin a t T dr DL J 0 dx X2 25 Y Normal Mode 25
20. position 30 45mm 3 0 4 0mm fig 4 1 1 Fig 4 1 6 U P PE I 1I cc Ps 1 Ux Ps 7 P Pr cc 07 P cc P P Pi 5 Fig 4 1 7
21. 1 100kHz NEC Nd YAG power 20 40 650 8D 109 time ms x10 3 Fig 3 2 1 Response RE htt me em Sor ee ame tli omen QAN eh oO 0 5 1 9 1 5 2 2 59 3 0 Freguency kFHz 1 3 Fig 3 2 3 4 4 1 4 1 1 Fig 4 1 1 Fig 4 1 2 Aluminium tio Fig 4 1 1 fron 5 37001 kHz to 6 45999 200uS DATA fo 6 41527 ff 6 41125 f2 6 41997 kHz Yeo 144 997 uS Q 735 582 fr 86 41308 fe 6 42445 kHz C 2 1
22. 1 31 gt 1 PAS 4 2 A Rosencwaig A Gersho J Appl Phys 47 64 1976 3 W B Jackson App1 0pt 20 8 1981 4 Parkus 2 4 5 Karl F Graff Wave motion in elastic solid chapter 3 2 gt YA G 2 32 17 A 8 B 8 o A 8 1 g b 7 exp wh gt 7 ltb exp ih T 8 H S B 9 1 g b 7 exp gwh g 7 1 b exp B h T 9 H O H l g 1 b exp 8 ih 1 g 1 b exp 8ih gs b 7 p KoBo ki1Bi b k 28 27 zi 7 Bi 24 19 9 fi o e
23. 27 N const 33 D Hy euNr 96 9 9 9 M 2pA ba W Nr lt W A fn x W lt 0 34 9 X 8 dn 0 D 1 a Nr CB 2 2 p Ao a Be 932 Co EI pA4 2 Co 8 7 7 wa D 12EI h7 3E 1 1 Wa 1 p 2 E 7 03x10 Pa p 2 69 g cm v 0 34 ir 23 1 1078 XK h 1 0 mm s a fs fa 1 2h Nr 36 fs 46 41Nr Hz CT 28 6 6 1 1 2 3 4 5 6 7
24. POSTT TON Fig 5 2 5 2 Parkus OF O W EI lty a kV dyMr DA Nx 30 dx gt dx N D 1 a iNr D EA 1 y Nr mn T z dz 31 h NW Pa pA N 9 2 32 f g N D Hy eg 9 NA97 9X Wp 20Aws 2 00
25. Power of YAG Laser W RR CD _ Stress measured CUiculated Degree of Excitation es a 5 10 15 2 25 39 Position mm Fig 4 2 4 19 4 2 3 L 1 u Ci cos x L 11 4 B s du s Ao EA 12 dx 12 11 o Ci sin x L 13 Fig 4 2 3
26. 1 Fig 4 2 2 bb Fig 4 2 1 _ 3mO i ee DATA fo 84 4485 fi 84 4157 f2 84 4768 kHz Yao 2 67862 aS Q 1386 72 fr 84 4414 fe 84 5651 kHz C 1 335nF st fkHz tep8 011 aS Fig 4 2 2 1 18 4 2 2 Fig 4 2 3 Fig 4 2 4 2 x10 NN sf by Rg 7 A QO ws 9 Q 9 Q 8 gt 5 S oO 0 Q i GS Fig 4 2 3 8 ei 0 frequency 00 10 20 30 40
27. 9nF at jkHz ten6 006 G 400uS Fig 4 1 2 9 Y 89 yY Fi dx pA dx 1 dx Qt EE I A p 1 2 y Cisin kx Czcos kx Casinh Kx C4cosh kx 2 L 3 dy d y d y Y x o 0 9 0 0 0 IT 3 dx x 0 dx dx X 2 3 cos k1l cosh k1 1 4 4 kil 1 875 kzl 4 694 ksl1 7 855 5 _ 2 y cosh kx cos kx a sinh kx sin kx 6 cosh kl cos k1 2 0 sinh k1 sin k1 Fig 4 1 3 Displacement Displacement 8 re ss cm ep Length 6560 80 160 Length Fig 4 1 3
28. g 4 3 5 22 f f f 1 2 LaC f 1 27 La CaC4 C CO 2 14 f f f C C C 1 2 15 15 fi 91 7kHz S N Fig 4 3 5 23 5 1 Fig 5 1 Fig 5 1
29. xp ho 2 exp ho 2 h 2 Pl a h ZeXD Z dZ da 7 2 Mr 6 h Fs d8 jo 8r SE rT 8 P a h A 8 P Ai Dh B G P 6hb 8B 1 B 1 F x Jo 6 x y 7 dy B 2 B 3 F x Ox x y J 9 x y dy B 3 33 AN 2 o k L 2 2 1 2 SO ay Jx a x y dx Pr 1 ay K l L 1 2 F x 9x 2 2 FT 1 2 J 9 x B 4 PF x T PF 1 2 lt Js x 2 x sin x 0 9 x F x 6cos GX B 5 p 196 34
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