マニュアル MAG500/MPG500
Contents
1. 7Y av 22 Js ROS m4 PINFICON IE CF yp AF2 AF 2 2K A2. 7 www inficon com A O
3. 8 6 2 1 e AF 2 s e PINFICON 4 5 3 QO 1 2 5818
4. gt QO 10 v 6 2 gt INFICON 1 1 mm ADJ ATM 100000 Pa 5 6 AS HV 100000 Pa p lt 10 Pa 2 lt ADJ gt 1 HV 5 1x10 Pa
5. QD QO ISP CF B11 14 2014 02 y TNFICON 2014 02 I gt MPG50x 6 1 MAG50x
6. INFICON 9 211 098 DN 25 ISO KF 10 351 550 11 11 1 MAG50x MPG50x
7. 2014 02 1 4 e e e MPG50x 2 N2 MAG MPG MAG No 1x10 1 Pa MPG No 1x10 10000 Pa 10000 100000 Pa Ne MAG 1x10 1 Pa MPG 1x10 10000 Pa 1x10 1 Pa 1x10
8. D Sub MAG50x 1 4 4 MPG50x 39812 1x10 Pa 1Pa ON 1 Pa 4 5 dry air O CO N e MAG50x gt B 9 e MPG50x gt B 10 5M mp mg
9. 1 10 Pa 1x10 Pa LED lt ST gt lt HV ST gt ok RAR ok EEPROM 21 4 3 MAG50x 1 Pa 2 FCC MAG50x 7 8
10. MPG50x 22 A 16 2014 02 Q
11. 2014 02 2 3 MPG50x 10000 1 Pa air p mbar 102 i 8 HHe Ne Air 6 H NM 4 oO A CO 10 mbar CO 1 ig Arl 6 4 Freon 12 Kr 2 LAH Xe 10 8 6 4 2 10 8 6 4 gt 2 10 2 LA 103 2 4 6810 2 4 6810 2 4 68109 2 4 6810 2 4 6810 Per mbar 10 10 Pa air p mbar 107 8 6 4 2 10 10 mbar 102 8 6 4 2 Ar 10 Z Air 4 N O 2 CO 104 8 6 He 4 2 105 8 6 4 2 10 8 10 2 4 68052 4 68102 4681052 4 6810 2 4 68107 par mbar 3 10 Pa 10 Pa Pet
12. 3 2 I gt 10 SELV LPS 2 gt EMC 9 2014 02 11 e E e e
13. Gemini MAG500 MAG504 Gemini MPG500 MPG504 2 1 x 1 x1 x 1 INFICON 1 1 1 I gt
14. 10 1 351 551 2014 02 11 2 MAG50x MPG50x INFICON 11 3 3 MPG500 as 3MB0 0x6 351 555 xxxx 1DN25 ISO KF 351 206 0X7 8 3MBO 0x7 pn 40 ISO KF 351 518 XXXX S 9MB0 0x8 DN 40 CF R 351 536 11 3 3MB0 0xQ DN 40 CF F 351 542 XXXX 11 3 4 MPG504 2 ae DN 25 ISO KF 351 507 SMB3 0x7 DNAD ISO KF 351 519 B XXXX 11 3 1 MAG500 Ox8 9MB3 0x8 DN 40 CF R 351 543 0xQ a id SMBS OK DN 40 CF F 351 531 3MA0 OX ON eslsoike 351 500 XXXX 8 3MA0 0x7 oN 40 ISO KF 351 512 XXXX DN 40 CF R 351 536 SMAU U ONAT CRE 351 524 XXXX 11 3 2 MAG504 AO IMAT OR
15. ES 2 GND cn 3 4 14 5 30 V dc D Sub 9 5 6 7 8 9 4 1 MAG LED lt ST gt lt HV ST gt ok RAR ok EEPROM gt B20 12 2014 02 4 2 MPG INFICON 10 2
16. 56818 QO KS 1 4 40 0 gt 40 Q MPG50x 142 1078Q gt gt 1078O 20 C 20 C MPG50x 5 lt lt 2014 02 17 5218 OR lt 1x1010 Pa m s 6 2 2 5817 OQ 622 QO s
17. e s MPG50x lt 1x10 Pa HV 1x10 Pa 15 1 Pa 10000 Pa 1 Pa lt ADJ gt FI gt O 0
18. 2 2 3 1 1 TEL 045 471 3328 TEL 045 471 3326 FAX 045 471 3327 FAX 045 471 3327 Document tina83e1 a 2014 02
19. DANGER EN61010 s CF e KF 10 2014 02 Q
20. 10 kO 16 V MPG50x MAG MPG500 MAG MPG504 3MAx 0xx 0x0x DN 25 ISO KF DN 40 ISO KF DN 40 CF F DN 40 CF R 1 4435 1 4435 W AlzOs 1 4435 Ni 1 4301 1 4016 1 4310 10 bar lt 55 gt 13 bar 5 C 55 C 120 C MPG lt 150 C A 40 C 70 C 1x10 1 Pa lt 70 1x10 1 Pa lt 95 6000m IP 40 DN 25 ISO KF lt 280 g DN 40 ISO KF lt 320 g DN 40 CF F CF R lt 570g
21. 8 gt 11 0 V de lt 5 0 V dc N SELV LPS 2 14 5 30 V dc lt 1 Vpp S2W lt 1 AT 4 5 kV 3 3 kV lt 500 pA 100 pA 3Mxx xxx 000x 3Mxx xxx 010x FCC D Sub FCC FCC 68 8 D Sub 9 8 9 lt 50 m 0 14 mm X45 3 2014 02
22. e PINFICON 5 DANGER A Q
23. MPG50x 10 Pa 1 Pa MPG50x 1x10 Pa 10 Pa gt 16 p lt 1x10 Pa
24. N 18 2014 02 3 4 MPG50x lt ADJ gt ATM HV 16 MAG50x 1x1019 Pa m3 s 6 3 5 INFICON 2014 02 19 INFICON LEA Vg NOE IQHLZN N17 GR HKOUAS H 9 D D Pd 0LXG bY Pt gt 11H 41S WF 00X0 XXX XYINE A 90 gt HL gt DIVAN LABES NOX0 XXX XVINE A 6 0 gt G27 7ICLEERS Odd 0 cE W E Te
25. 22 10 22 11 22 11 1 MAG50x MPG50x 22 11 2 MAG50x MPG50x 23 11 3 23 11 3 1 MAG500 23 11 3 2 MAG504 23 11 3 3 MPG500 23 11 3 4 _ MPG504 23 EC 24 BXY 2014 02 3 INFICON INFICON AG LI 9496 Balzers Model PN SN witPs ff fet 2014 02 INFICON PN MAG50x MPG50x 3Mxx xxx 0x0x Measurement range Receptacle lonization chamber Measurement system N gt 1 5 8 5V P gt 1 398 8 598 V Q gt 0 667 10 V 0 gt FCC 8 pin 0 D Sub 9 pin 6 DN 25 ISO KF 7 DN
26. 4 6 1x103 1Pa lt 1 1x10 1x10 Pa lt 20 5x10 1x10 Pa lt 2 lt 5x107Pa lt 20 2014 02 13 MPG50x 0 V IE 3 x 107 Pa I gt lt 1 4 7
27. 100000 Pa 30 30 50 5 5 MAG gt B9 MPG gt B10 0 10 5 V 3MAx xxx 0xON 3MAx xxx 0x0Q 3MBx xxx 0x0P 3MAx xxx 0xON 3MAx xxx 0x0Q 3MBx xxx 0x0P 3MAx xxx 0xON 3MAx xxx 0x0Q 3MBx xxx 0x0P 1 5 8 5 V dc 0 667 10 V dc 1 398 8 6 V dc 1 V decade 1 33 V decade 0 6 V decade 14 5 30 V 0 5 V 40 3 V 9 5 10 5 V p gt 10 Pa p 10 Pa 2 x 4 7O 10 kO lt 100 ms 1 S 3MAx xxx 0xO0N 3MAx xxx 0x0Q 3MBx xxx 0x0P PINFICON 100 kO 85 kO Shey 100 mA 14 5 30 V dc 0 V dc 7 F lt 2 5 V de AEETI gt 4 0 V de
28. 16 V 3 2 1 FCC 68 8 INFICON oy A 8 S lt lt E RATAR 1 12 es 0821T 47 3 47 5 1 9 10k ae 44 Hot 27 i gs e O 1 14 5 30 V dc 2 GND 3 4 5 6 7 8 MAG 7 BIE MPG PINFICON 3 2 2 D Sub 9 INFICON ot 4 7 393 100nF 00n i E O 1
29. e 22 O Qe RET 3 1 gt B22 N OR WB lt 1x10 Pa m s PINFICON 3 5 N J 3 6 2 3 17 5 lt CAL gt 5
30. Kx HAE Air No Oo CO Xe 0 4 Kr 0 5 Ar 0 8 H2 2 4 Ne 4 1 He 5 9 oO pu INFICON E 4 E 3 1 DANGER A 100000 Pa SA DANGER A 250000 Pa ZA KF O
31. PINFICON 60 79 LT l Te DN 25ISO KF DN 40 ISO KF DN 40 CF F 4 2 1 1 5 8 5 V 3MAx xxx 0xON p 1E 00 1E 01 1E 02 1E 03 1E 04 1E 05 1E 06 1E 07 1E 08 1E 09 1E 10 0 0 0 5 1 0 1 5 2 0 2 5 3 0 3 5 4 0 4 5 5 0 5 5 6 0 6 5 7 0 7 5 8 0 8 5 9 0 9 5 10 0 V p 1009 U c logiop 1x10 mbar lt p lt 1x10 mbar 7 5x10 Torr lt p lt 7 5 x10 Torr 1x10 Pa lt p lt 1Pa mbar Pa Torr 10 5 E c co 2014 02 0 667 10 V 3MAx xxx 0x0Q p 1E 00 1E 01 re 1E 02 R mbar 1E 03 torr 1E 04 1E 05 1E 06 H 1E 07 1E 08 1E 09 1E 10 0 0 0 511 0 1 5 20 25 3 0 35 4 0 45 5 0 5 5 6 0 65 7 0 7 5 8 0 8 5 9 0 9 5 10 0 10 5 0 667 V 00 75 U p 1 U c 1 33 logp 1x10 mbar lt p lt 1x10 mbar 7 5x10 Torr lt p lt 7 5 x10 Torr 1x10 Pa lt p lt 1 Pa mbar Pa Torr 12 66 10 12 826 C p U c 1 398 8 6 V 3MBx xxx 0x0P p 1E 04 1E 02 1E 00 1E 02 1E 04 1E 06 1E 08 1E 09 0 0 3 5 45 5 5 6 5 75 8 5 95
32. 10 5 V 0 5 2 5 1 217 1 397 1 667U 01 667U d p 1 U c 06logp 1x10 mbar lt p lt 1000 mbar 7 5x10 Torr lt p lt 750 Torr 1x10 Pa lt p lt 1x10 Pa mbar Pa Torr c 6 798 5 598 6 873 d 11 33 9 333 11 46 p U c d 2 2 INFICON MAG50x air p mbar 4 Air O 2 CO Xe Kr Ar N H NepHe BOOS mw Y Sn FORD N ROBB N ooo N 1 107 2 461062 461052 46 1042 461032 46 10 Peg mbar 10 Pa 10 Pa Der Kx K Air N2 O2 CO 1 0 xe 0 4 Kr 0 5 Ar 0 8 H2 2 4 Ne 4 1 He 5 9 LS 4
33. 40 ISO KF 8 DN 40 CF R Q gt DN 40 CF F 0 High current 1 Low current 0 Stainless steel 0 Standard 3 gt Ceramic coated A gt Inverted Magnetron B Inverted Magnetron Pirani PN MAG50x DN 25 ISO KF MPG50x DN 25 ISO KF 2014 02 Gemini MAG500 MAG504 Gemini MAG500 MAG504 1x107 1 Pa PN 3MAx xxx 0x0Q INFICON VGC40x Gemini MPG500 MPG504 Gemini MPG500 MPG504 1x107 100000 Pa INFICON VGC40x
34. 6 INFICON Cold Cathode Gauge Gemini MAG500 MAG504 Cold Cathode Pirani Gauge Gemini MPG500 MPG504 2014 02 1 INFICON 4 5 6 6 6 1 6 1 1 6 1 2 6 1 3 6 1 4 7 2 7 2 1 2 2 MAG50x 9 2 3 MPG50x 10 3 10 3 1 10 3 2 11 3 2 1 FCC 68 8 12 3 2 2 D Sub 9 12 4 12 4 1 MAG 12 4 2 MPG 13 4 3 MAG50x 13 4 4 MPG50x 13 4 5 13 4 6 13 4 7 14 5 14 6 16 6 1 16 6 2 16 6 2 1 17 6 2 2 18 6 2 3 18 2 2014 02 INFICON 6 3 19 7 22 8 22 9
35. E nN 25 ISO KF 351 501 XXXX SMA3 0x7 oN 40 ISO KF 351 513 B XXXX 9MAS 0x8 DN 40 CF R 351 537 MA ND GPF 351 525 XXXX 2014 02 23 INFICON EC C 2004 108 EC 2011 65 EU Cold Cathode amp Cold Cathode Pirani Gauge Gemini MAG500 MAG504 Gemini MPG500 MPG504 Standards Harmonized and international national standards and specifications e EN 61000 6 2 2005 EMC generic immunity standard e EN 61000 6 3 2007 EMC generic emission standard e EN 61326 1 2006 EMC requirements for electrical equipment for measurement control and laboratory use Manufacturer Signatures INFICON AG Alte LandstraBe 6 LI 9496 Balzers 29 November 2013 29 November 2013 Ja hath Dr Urs Walchli Markus Truniger Managing Director Product Manager 24 2014 02 INFICON 2014 02 25 INFICON 26 2014 02 INFICON 2014 02 27 INFICON http www inficon jp 222 0033 2 2 8 5 222 0033
36. Ha CHECREE 65 ED ed 0L FH VRY CHIPS C 010917 SG BY 0 CET E D ee 54 gt LAB AP TNO AH G EZER Y MCd1 47LYinms Fe hSe Ge FD CLEE 00X0 XXX XYINE A 7 0 PA gt a al NOXO XXX XYINE A 2 L gt 1C 0 cE Yas HAH 84 g8L E E ARY HLZ RTTA 4E ETTEI SCI LUD BGR S 0 D D 2 MA GSS IPH gt LUV SMS VI HE 0 cE cE AO G Ree lt 1S AH gt lt S gt X0S9VIWN KWX MHUX 3 Y 6 LY ga agl Re 2014 02 20 INFICON SLE Ie rt gt 08 VHE OVE GRHORAC SA St YES DEES SHD Bd 0LxG by 1 PHALLA g ALII KANAEKS aIL kE T NOHd33 0 cE KASRA 81L 1S 5122 C XR VERRY CIT ACA EENET 0 cE Deere ZAG6 HR GHBCHSE QL 6 HALIME C XR 2H AH APICES YC4o FORAO CA 0 c hae AOS ARUHE RE 44 9 G42 ed 0l FH A gt MEERE mi CHOPS HENGEN N11 71 FES 0 BET E LVS A C8 GHBOLCHSE 84 SL VIF gt 4E ATTI C VNLUYFS BH CaS 0 D E D E MG SS VI VIR HD LYUY ZHE AIPA E 0 c cE AO CCC HSS lt 1S AH gt lt S gt x0SDdW FT AK MHCUIYS 1L GLX qa aql ald 21 2014 02 A
37. lt gt 1 2 i Skilled personnel 1 3 e MPG50x DA e e
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