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Agilent B1500A ユーザ・ガイド

Contents

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4. wo 25 QUAJJZ 4 v FUE Z My Favorite
5. p 2 24 WARNING 3 4 Agilent B1500 3 zn EX Et e Plug BS 1363 A 250 V 10A e Cable 8120 1351 e Plug NEMA 5 15P 125 V 10A e Cable 8120 1378 Plug AS 3112 250 V 10A Cable 8120 1369 Plug NEMA 6 15P 250 V 6 A Cable 8120 0698
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7. Public 47 ow other users to access this workspace OK Prey lt Pkmi Foy YPERT sedime rhon pens ev dms enciesures hnrwn as werkspatas Since you wam TI with a distinctive name Please specify a mamme for the new Werke quac Allow other users to access this workspace Wa to iraa lt 4 6 Ag
8. 0V Agilent B1500 3 7 33 SMU 10 lt lt X 115 100 p 7 36
9. Failed ASU SMU CMU SCUU LED ON OFF 4 48 Agilent B1500 3 Switching Matrix Type GPIB Address Poll Start Self Test SWM IN Kelvin CMU Extended Configuration EasyEXPERT Configuration 7 Switching IMatrix Switching Matrix Agilent B2200A B2201A GPIB B2200A B2201A
10. A S 7 Test Result Import Agilent B1500 3 Export As Test Result Export As Compressed Test Result Export As CSV Export As XML Spread Sheet Export Using XSLT Auto Export Setting Edit Flag and Remarks Delete Agilent B1500 3 EasyEXPERT Test Result Export EasyEXPERT LET Compressed Test Result Export
11. Button 1 Button 4 Label Selected 1 0 Label 2 Selected
12. Output Sequence SEQUENTIAL Channel Setup Output Sequence SIMULTANEOUS Base Source origin I V t Sampling No of Samples Interval lt 2ms
13. System ground 4 A A 4 ieu pair ATP ZM IE Figure E 4 Multi frequency CMU Auto balanca bridg 7 22 Outer shield or Guard Hcur d CA L Hpot v Na x DUT iei e Lcur Ix Virtual ground METUS lx 2
14. Y 2 Y Yn 1 8 XX Y 2 Y Y 1 8 Agilent B1500 3 8 15 LmCO LmG LmGn WRAP ERQE Mens m 1 2 regression
15. 1 Short 7 10 Agilent B1500 3 I V Sweep Figure 7 6 SMU Pulsed on Primary Source Unit MAR1 Pulsed on Synchronous Source Unit WART Primary Primary Synchronous Synchronous Secondary Secondary Constant Constant Pulsed on Secondary Source Unit WAR2 Pulsed on Constant Source Unit Primary Primary Synchr onous Synchronous Secondary Secondary Constant Constant Figure 7 7 SMU hold time pulse period Burse width lt
16. SMU 1 10 001 2 ms 65 535 s 1 ms 0s 655 35 s 10 ms 100 us 100 us SMU
17. Agilent B1500 3 9 5 e RART ZH FAI AMBROS gt e MFCMU
18. 30 30 0 9 10 Agilent B1500 3 2 TV t 100 uA 10 pA
19. SMU Agilent 8121 1191 Conductive Layer Center Conductor Insulator clear Figure 3 13 Cover here using sleeve min 2 mm Center conductor for Force Sense signal d RRRS 2222 MURAT b bo lt 1 approx 10 to 15 mm Outer conductor Insulator c
20. Extended Setup Agilent B1500 3 Ext p 6 7 Close 4 25 EasyEXPERT Data Display Data Display Data Display Data Display zh e Data Display GUI e amp Display Setup e Graph Properties e List Display Properties sc Wet VE PU Fle Edt View Marke Cursor Line Window Help mi Hu HHHeg N 389 2
21. NOTE p 3 6 Agilent B1500 User NOTE Start EasyEXPERT All Programs gt Start EasyEXPERT Start EasyEXPERT Step 1 Agilent B1500A 1 Agilent B1500A AC 2 USB USB B1500A 3 Standby
22. T aH x S A Lo HIGH VOLTAGE SHOCK HAZARD The Agilent B1500 can force dangerous voltages 200 V for HPSMU and 100 V for MPSMU HRSMU at the force guard and sense terminals To prevent electric shock hazard the follow
23. Eo LCD B Advanced Setup p 5 25 i qu ASU SMU HRSMU SMU HPSMU 1 A 7 46 Agilent B1500 3
24. Agilent B1500A EasyEXPERT Microsoft Windows EasyEXPERT 10 SMU CMU
25. TGP Specify trigger output port for OSX OSX F TGP Incorrect polarity of search step value lt gt Number of search steps must be 1001 or less 1001 lstepl gt lstop startl 1001
26. ELI Bl 2 AW 4 FE HA
27. 4 X Y 4 4 A
28. 9 28 Agilent B1500 3 120008 121000 121001 121002 122000 122001 122002 122003 122004 122005 122006 2 KeywordPrefix A Keyword B Pause
29. Define Own Output Parameter Test Output Define OwnOutput Parameters X Y Graph List Display Parameters Define Analysis Analysis Parameter Definition p 6 9 Parameters
30. Agilent B1500 3 9 29 ST e 122007 122008 122009 122010 122011 122012 122013 122014 122015 123000 130001 9 30 ELI 4 dE ai es H ELT
31. Measure Advanced Options OPEN Reference 0 Short Correction Measure
32. e Auto Analysis p 6 21 e Display Data Setup p 6 25 Data Display Control p 6 24 V Sweep I V t Sampling C V Sweep msert Sweep p 5 3 I V t Sampling p 5 8 C V Sweep p 5 12 Switching Matrix Control p 5 16 Display Setup Assign to external variables External Variable Setup p 6 17 Insert My Favorite Preset Group
33. Page Setup Print Preview Print preview Figure 4 4 Agilent B1500 3 4 39 Edit View Help EasyEXPERT Preview Print Close Preview Window Figure 4 3 Print Preview Copy Copy Graph Copy List Copy Parameters X Y Graph Plot
34. cM Agilent B1500 3 2 49 20 7 ABS AVG CE9 COND DELTA 752 DIFF EXP INTEG LGT LOG MAVG SQRT MAX MIN q k g q POTERE ES 1 602177E 19 C k 1 380658E 23 se 8 854188E 12 m 103 u X u 105 n 109 p 107125 f 10705 a 10715 k 105 M
35. Assign Linear Values FROM TO Count 1 Count gt 1 N N 1 x Count 1 e Assign Linear Values FROM STEP N N 1 x Name Value Description Name Description Agilent B1500 3 6 19 ASSIGN COMMENT IF ELSE IF FOR Pro
36. CSV XML EME BMP GIF PNG Agilent EasyEXPERT Application Test CMOS BJT TFT 100 DUT DUT
37. EK 20 Agilent B1500 3 2 51 EasyEXPERT XML SS CSV DVD ROM CD ROM CD RW 7 GPIB USB USB 2 0 2 2 LAN 100BASE TX 10BASE T 1O GPIB Ext TRG In Out BNC I1O B1500A VXIplug amp play 05 Microso
38. Agilent B1500 Agilent B1500 Agilent Cli A RSI RSI VS TISO 9241 Buropean Community D
39. Z Nu scq ronde BUT cen D 24 36 B2200A B2201A 48 Agilent B1500 3 Export to Current My Favorite Group Apply Switch Setup Read Switch Setup Open All Preset List EasyEXPERT Switching Matrix Operation Panel My Favorite Setup
40. e GPIB TO p 6 26 Message p 6 31 Command Execution p 6 32 e Data Store Control p 6 35 6 12 Agilent B1500 3 Figure 6 4 gu Mcr A FA TOER Test Contents Inset
41. T n Figure 3 9 60O OI O O Interlock 5 O switch 4 3 Plug side view Wiring side view WARNING Interlock SMU Force Sense Guard 3 32 Agilent B1500 3 1 RHigure 3 11 Figure 3 12 2 LEBD Figure 3 10 3 Interlock 1 2 1 3
42. Bi U i ASU HRSMU 10 pA 1 pA 1pA 1pA
43. 115 100 100 96 7 34 Agilent B1500 3 NOTE SMU 10mA 1 mA
44. 3 6 Agilent B1500 3 B1500A 1 2 10 11 12 B1500A Standby B1500A Y Circuit Common Agilent 16444A 001 USB 16444A 002 USB B1500A USB B1S00A AC B1S00A Standby 2 p 9 1 Welcome to Microsoft Windows
45. p 9 14 1 6 B1500A Standby 2 B1500A USB 3 B1500A USB USB 4 5 Agilent Recovery System B1500A Standby Enter Agilent Technologies System Utilities Recovery Options Choose one of the following 1 Recover Factory Backup Image 2 Update System 3 Exit Enter a Choice B1500A 3 2 Enter a Choise 1 Enter C
46. 4 4 4 8 4 C Agilent B1500 3 113024 113031 114001 114002 114011 114021 114031 114032 114101 114102 2 me meg
47. Add Numeric Variable Add Vector Variable Add String Variable Add Module Variable Up Remove Z Down Name Value Description 6 18 Agilent B1500 3 Vector Variable String Variable Module Variable Name Count Description Local Variable Definition
48. Setup Name Device ID Count Date _ Default Format Setup Name Device ID Count Date e g Id Vd cmos1 1 1 22 2006 3 44 55 PM Custom Format File Name Format File Name Format Settngs Format Default Format 10 3 2 1111 0 Se
49. 4 Test Results Data Auto Export XML Style Sheet File Path Test Results Data Auto Export XML Style Sheet File Path 4 4 pj
50. Apply Functon Setup p 5 18 Data Display 10 4 26 Agilent B1500 E 3 Setup Name X Y Graph Plot Parameters List Display Figure 4 3 EasyEXPERT Data Display Data Display GUI
51. GPIB Configuration Switching Matrix GPIB EL Poll Outputs 4 C Outputs e cue NOIL M qu 1 2 ute d Close Ln Open 4 4 1 swmToModule 4
52. SMU p 2 24 2 5 12 3 Figure 7 16 Figure 7 16 Current Voltage 2 Compliance Compliance Output Voltage LA Output Current PANN Compliance ZZ ARRAS
53. 4 Agilent B1500 3 116001 116002 116003 117001 117002 117003 117004 117005 117006 117007 117008 117009 Desktop BasyEXPERT 4 B Desktop EasyBXPERT B1500 nm c ee p gpib gpib 4 gpib gpib0 17 4
54. DUT guard Low Lcur Lpot High Hcur Hpot E MEFCMU DUT error elements Phase Open
55. BEnable automatic data record to the internal storage device Test Results Data Properties Results gt Properties Delete Delete Agilent B1500 3 4 19 Data Display Window Order Minimized Data Displays Data Display Window Configuration EasyEXPERT Ze f 3 5 Data Display Manager
56. 0 s 7 44 Agilent B1500 3 SMU SMU SMU Advanced Setup p 5 25 Agilent B1500 3 7 45 NOTE SMU SMU SMU 1 MO
57. Ext Extended Setup Extended Setup p 4 25 TAF H Agilent B1500 3 6 7 n Test Output Test Output
58. Configuration p 4 47 Modules Calibration p 4 42 Configuration p 4 47 Main Frame 22 9 12 Suc p 9 12
59. Name Owner U Continue Agilent B1500 3 EasyEXPERT Workspace configurator EasyEXPERT GUI Test Result Editor Test Results Data Filter e Export Using XSLT e Test Results Data Auto Export e Test Results Data Properties e Data Display Manager e Data Display Properties e Repeat Measurement Setup Choose test categones from the left area Choose an ampicabon test object from the left area ye Count De 3 8 2006 6 42 43 PM 1 roo HAs Agilent B1500 3 4 9 File Data Display
60. LED Modules Module Slot Module Type Name Status Slot Module Type Name Status Pass Failed Recovered SCUU SCUU Notes
61. Data Display User Analysis Function 20 Name Unit Definition 5 18
62. I V Sweep VARI VARI VAR2 CONST C V Sweep I V t Sampling ih H c c c SMU 0V 0 1mA DC 0 V 0V Advanced Setup p 5 25 Bias hold after measurement e Output value after measurement
63. 2 MFCMU C2x C3x R L C p 3 55 R L C 1 m R Q L H C F C2H C2L C3H C3L 3 1 C2x C3x R L C 2 JEF C temp my_env_1 txt 3 54 Agilent B1500 3 Agilent B2200A B2201A lt MFCMU
64. Agilent Technologies Inc NOTE Agilent B1500 IEC 1010 1 INSTALLATION CATEGORIY II TINSTALLATION CATEGORIYI POLLUTION DEGREE 2 Agilent B1500 INDOOR USE Agilent B1500 LED IEC 825 1 1 Safety Class I AC International Electrotechnical Commission IEC
65. Force Sense Force Sense c Agilent B1500 3 3 17 Table 3 2 16442B gt 16442B B1500A dii did Agilent 16493 3m 1 5m Intlk Interlock Agilent 16493L GNDU 3m 1 5 m GNDU GNDU Agilent 16493K SMU1 SMU Force 3 m 1 5 m t 16442B 3 SMU SH Hen SMUA Sense SMUS SMU Force SMUG Sense Agilent 16494A 3 m 1 5 m SMU1 SMU Force SMU2 SMU Force SMU3 SMU Force SMUA SMU Force SMUS SMU Force SMU6 SMU Force Agilent N1300A CMU 3 m 1 5 m PGUI CMU Hcur Hpot PGU2 Lc
66. A 238 ERR 4 4 Pu UEM A A Agilent B1500 3 9 23 G a 112057 112058 113001 113002 113003 113011 113012 113013 113014 113015 113016 113021 113022 113023 9 24
67. Category 1 Test Name Icon Load Clear Description Numeric Name Default Description Add Delete Up Down Hax CAE Agilent B1500 3 Library E Properties Test Specification
68. 1 C mavg A B A B C A dis B max A A B 8 12 Agilent B1500 3 min A setDeviceld A sin A sqrt A storeAt A B C D string A TaT eg A B min A _A B A
69. 7 Guard E Outer conductor Center conductor gt Probing needle Coaxial cable Connector plate Contact pad Guard Guard Force Guard Circuit Common 7 3 46 Agilent B1500 3 DUT
70. 10 B1520A Multi Frequency CMU B1511A Medium Power SMU B1517A High Resolution SMU B1510A High Power SMU GNDU ADC HRSMU MFCMU HPSMU MPSMU GNDU ADC HRSMU 3 12 Agilent B1500 3 Table 3 1 HPSMU X 2 MPSMU X 2 MFCMU X 1 1 4 HPSMU Xx 2 5 6 MPSMU X 2 7 MFCMU 1 8 10 7 3
71. Device Parameters Definition p 6 5 Test Parameters Definition p 6 7 Min Numeric Max Numeric Digits Numeric Resolution Numeric Unit Numeric Typical Values Module Application Test Main Application Test
72. SetupFileConverter exe p 7 52 01 Maximum length for the file path is 256 characters 256 02 fopen failure Could not open source file fopen 03 Specify a proper source file The specified file is unsupported ZR 04 Specify a proper source file The specified file is corrupt S qVIEZTVEBuvceEd 05 fopen failure Could not open destination file fopen T 9 54 Agilent B1500 3
73. 1 s lt X X 110 100 m 20 V e
74. IO CSV XMLSS XML CSV XMLSS TO
75. Up Down Time Stamp Name Index Name 1 Agilent B1500 3 5 9 Sampling Parameter IV t Sampling IMeasurement Setup Linear Log Interval No of Samples Total Sampling Time Output Sequence Hold Time 5 10 LINEAR LOGIO LOG25 LOG50
76. Agilent 16493K 2 3 3 p 3 32 4 GNDU DUT p 3 35 SMU DUT p 3 36 MFCMU DUT p 3 42 DUT Table 3 6 mm mm 1 up de us di 2 d T 75145 qct 2 0113 p usns BNC mm mm 11 3 lt 12 8 4118 8 2 A 3 30 Agilent B1500 3
77. DUT ston Agilent B1500 3 3 43 CAUTION CAUTION 1 Stop 2 DUT Agilent 16442B 3 DUT 4 5 4 V
78. Agilent B2200A7B2201A GPIB Configuration p 4 47 EN Agilent B2200A B2201A Switching Matrix Operation Panel p 4 52 Single Repeat ID ID ID Rad ue 8 Ern EG 4 Agilent B1500 3 4 11 My Favorite Setup EasyEXPERT lt My Favorite
79. outer shield CMU Calibration p 4 44 Multi frequency CMU Outer shield Error elements gt Hcur z NV eet x Vx gt Pn 4 Ec a gt Hpot 7 ims 2 System ground v V V Kc CENE d high CMU return DUT Auto balance bridge Lpot 3 lt oer low Virtual ground gt jer we CUEDUT e MN v EUM MV Connection 4 terminal pairs 2 terminal Error correction internal external Open Short Load 7 24 Agilent B1500 3 Sweep Sweep Sweep VON ARM EU Sweep SMU MFCMU
80. to DUT Triaxial connector CAUTION GNDU Agilent 16493L GNDU GNDU GNDU 1 A Agilent B1500 3 3 35 WARNING CAUTION NOTE Figure 3 13 Insulator black for Guard signal SMU DUT SMU DUT Table 3 9 100V MPSMU HRSMU 200 V HPSMU Force Sense Guard
81. ADC ADC AUTO x REF f REF Agilent B1500A 17 1023 1 MANUAL 1 1023 1 PLC Mx128 1 1 100 1 Agilent B1500A X 1 128 AUTO N x REF ARG REF Agilent B1500A 1 1 127 6 MANUAL N x 80 usec 1 1 127 3 PLC N 1
82. RSI e A H
83. 2 BH s Agilent EasyEXPERT Agilent EasyEXPERT Y 101001 101002 101003 102001 102002 102003 102004 103001 103002 103003 103004 USB488 4 1 B USB488 4 USB488
84. TO 4 4 SDA SDA
85. Default e Default Use factory specified frequencies 1 2k 5k 10k 20k 50k 100k 200k 500k 1M 2M 5 MHz e Specifies by list 1 101 kHz 5 MHz Add Delete Agilent B1500 1 3 hk 4 45 NOTE Integration Time Reference Standard Values EasyEXPERT Calibration e Specifies by range LINEAR LOG 1 kHz
86. Single Stop Data Display Data Display NR 10 Single Stop Repeat Measurement Setup p 4 22 Data Display p 4 26 EasyEXPERT Data Display Calibration p 4 42
87. Device ID Remarks EasyEXPERT EasyEXPERT EasyEXPERT SMU Agilent B1500 3 4 13 Results EasyEXPERT
88. Figure 7 2 Single Sweep Double Sweep Linear Sweep d Log Sweep 7 4 Agilent B1500 3 I V Sweep GUI rV Sweep 9 5 3 1 Channel Setup SMU Function VARI SMU Mode V VPULSE I TIPULSE ISMU 2 Measurement Setup VAR1 Direction SINGLE x DOUBLE Linear Log LINEAR LOG 1 10 25 50 Start
89. Important Gb Valid Seki Questionable Flag Result Show Deleted Data p 4 14 Delete Delete b Flag Setup name Date Count 7 Count Device ID
90. DUT LV IY I Gx V ms y O G v DUT V V V 0 V UGTO6003 110x50 DUT I V VZ V Rx I DUT 1 MO SMU P d V A e V i Zn V V FT aid x 0 V UGTO06004 110x50 9 9 Agilent B1500 3 NOTE 2 DUT
91. B1S00A 5 1 1 B1500A Windows US B1500A Administrator B1500A Administrator Agilent B1500 User AgilentOnly
92. p 7 26 Bias Hold after Measurement ON OFF Output Value after Measurement START STOP SOURCE BASE Agilent B1500 3 5 25 Advanced Setup 5 26 Agilent B1500 3 Test Definition Test Definition e Test Specification e Test Output e Test Contents e Local Variable Definition e Program Component e Auto Analysis e Data Display Control e Display Data Setup e GPIBI O e Message Command Execution e Data Store Control 6 2 Agilent B1500 3 Figure 6 1
93. Yes Yes Yes Yes NOT Yes Yes No No A Yes Yes No No Yes Yes No No Yes Yes Yes No No Yes Yes Yes No No gt gt lt lt lt Yes Yes Yes No gt lt gt Yes Yes Yes No AND Yes Yes No No XOR Yes Yes No No OR Yes Yes No No a m Agilent B1500A EasyEXPERT built in function p 8 7 Agilent BI500A EasyEXPERT read out function p 8 15 user function amp analysis function J
94. Line Selection Block Selection D d END IE 1 0202 0000
95. Ebl MT IY 3 p 1 BRL C LH app giu mterval No of Samples Interval lt 2ms Interval x No of Samples 7 No of Samples Source
96. 0 65 535 s 100 us Agilent B1500 3 7 19 Table 7 2 NOTE C V Sweep f MFCMU Table 7 2 4 1 100 Q ELE Cp D 100 Q r Cp G Cs Rs 1 2 Cp G 5S Cp E D Cs F Rs Q ZZ 9 GPIB
97. Organize Preset Group p 4 57 8 Agilent B1500 3 4 55 Quick Test List EasyEXPERT Quick Test Select AII Unselect All Up Down Recall Rename Duplicate Delete 4 56 3 5 Setup Name T
98. Test Contents FHigure 6 2 Local Variables Program Component Application Test Classic Test My Favorite E My Favorite Setup Analysis Miscellaneous Test Specification Test Specification Test Output Test Contents FHigure 6 3 Test Contents Test Specification Test Output Variables Analysis parameters Variables Device parameters Test parameters Test C
99. Yes Tf L X Test Definition No Test Definition Help menu Agilent EasyEXPERT Help EasyEXPERT 6 4 Agilent B1500 3 Test Information Device Parameters Definition Test Specification Test Specification 6 1 30 1 30
100. e SMU Calibration e SMU Zero Cancel e CMU Calibration SMU Calibration SMU Name Name Full Range HRSMU ASU On Off Status Notes
101. 120002 Pause 120003 Detail 120004 ERROR ERROR 120005 IF FOR 120006 Cut Copy Paste Cut Copy Paste 120007
102. 8 2 Agilent B1500 3 NOTE Agilent B1500A EasyEXPERT variable analysis function AGLI Weg user fnnction Application Test test execution flow Classic Test Classic Test A Z a z _ 0 9 Application Local
103. Save Delete Save Delete Save EasyEXPERT 7 Delete Results gt Filter gt Show Deleted Data Flags 1 Important Valid H Questionable Remarks Remarks OK Test Result Editor QTL Pann Agilent B15
104. B1300A Agilent B1500A Wwe us Agilent B1500 Agilent B1500 Agilent EasyEXPERT Y C Program Files AgilentUB1500UDocuments e B1500 help chm Agilent B1500A User s Guide EasyEXPORT Help e B1500_Self Trng mht Agilent B1500A Self paced Training Manual NOTE Agilent B1500 7 C Program Files AgilentB 1500XEasyEXPERT WU tilitie
105. m 1 2 2 Y X Y a y1 y9 X X9 X Y a gt y41 yo log x log xo X Y a log y log yo x1 x9 X Y a log y log yo log x log xo cru a IAY mA 2 X0 Yo X11 2 2 74 v m 1 2 Yn 1 8 XX Yz a y1 yo x1 xo Yz a yi yo log x log xo X Yz a log y log yo x1 xo 8 16 Agilent B1500 3 oLmx L 7Y LmYn
106. DUT DUT DUT SMU DUT DUT SMU
107. 5 MHz 2 1001 Mode AUTO Mode PLC Mode A D AUTO PLC Factor Mode Factor p 7 19 6
108. Short Load lt Agilent B1500 3 7 23 Figure 7 13 C V Sweep WIA 4 3 MFCMU MFCMU H EYEL LC DUT DIE 2 3 Open Short Load
109. Windows XP Home edition X Professional Windows 2000 Professional SetupFileConverter exe fil file 4155 4156 CMES SetupFileConverter exe MOS1 MES SetupFileConverter exe MOS1 MES MOS2 MES MOS5 MES SetupFileConverter exe MES Agilent 4155 4156 Agilent B1500A EasyEXPERT HPSMU 4155 4156 C3 73 BISO0A EasyEXPERT 1
110. X Y Axis Title X X Y YY Y1 18 Line Style 1 2 Y1 YS Color and Color and Thickness Thickness Graph Properties p 4 38 GUI OK Preview Cancel Apply Preview Reset Agilent B1500 3 4 41 SMU Calibration Select All Unselect All Start Calibration Abort Full Range Calibration Enable Auto Calibration EasyEXPERT Calibration Calibration Calibration Calibration
111. Export Quick Test Preset Group Export Copy gt gt lt lt gt gt Preset Group Preset Group X lt lt Preset Group F Preset Group Agilent B1500 3 4 57 EasyEXPERT Organize Preset Group Close Organize Preset Gr
112. Stop iE Start Step No of Step Step No of Step Start Stop Step E Bit No of Step 2 1001 Step No of Step Start Stop 1 Compliance Pwr Comp Hold Start
113. 5 8 1 ADC Agilent B1500 3 Channel Definition Miscellaneous Variables I V t Sampling Channel Setup Unit SMU V Name I Name Mode V GRE I Emi COMMON 7 Add Delete
114. RT
115. Compressed EasyEXPERT CSV File Export CSV XML Style Sheet Export XML Export Using XSLT p 4 17 XSLT Test Results Data Auto Export p 4 18 2 Test Result Editor p 4 16
116. SMU FILTER OFF Filter ON mterval MECMU MFCMU Unbalance CMU Calibration p 4 44 Low Leur Lpot High Heur Hpot Agilent B1500 3 9 11 2
117. Search monitor channel must be set LGV LGI BGV BGI Agilent B1500 3 9 41 SET cid 273 274 275 276 277 278 279 280 281 282 283 9 42 Search and sync output modes must be the same Search sync source is overflow Search target must be compliance value or less Start and stop must be different Step must be output resolution or more
118. Period 5 Sms Ss 100 us Width qr e e x 0 5 ms 2s 100 us Base SMU Function Table 7 1 Function Function CONST Constants Source VARI VARI Start Stop Step VAR2 VAR2 Start Step No of Step VARI VARI Start Stop Step VAR Offset Ratio
119. SMU SMU I V SMU TV 4 p SMUTV 4 4 4 A B SEXE C 4 C Agilent B1500 3 B B
120. lt terminate value Sac 2 IE END IF dq IF IF expression END IF lt expression gt ELSE IF expression ELSE rg 8 20 Agilent B1500 3 LOOP 1
121. GPIB GPIB GPIB GPIB GPIB GPIB GPIB Uk ei GPIB lt mt ei Agilent IO Library 4 Agilen LT C t B1500 3 134002 134003 134004 134005 135001 140001 140002 140003 140004 140005 2
122. Ip Rpur rr Rpur r rs RDUT RDUT F2 8e I j s1 182 F2 9o OF a non Kelvin connection b Kelvin connection Force Sense Sense Sense Sense 10 O Force Sense Force FB Agilent B1500 3 3 49 NOTE RETE Agilent B2200A B2201A 1
123. Preset Group Export Organize Preset Group p 4 57 rw Agilent B1500 3 Save Recall Flag Setup Name Date Count Device ID Remarks Auto Export ON Auto Record OFF SMU Zero ON EasyEXPERT Delete All
124. Select Symbols String Module Resource TYpe Value 1 Symbol ON ON 1 1 ON Value Min Max Digits Resolution Value Symbol 1 1 Module SMU HPSMU HRSMU HRSMU ASU MPSMU MFCMU MFCMU SCUU SWMIN SWM AUX IN SWM SMU IN Agilent B1500 3 Test Parameters Definition Background Name Type Default Description Align Width Ext Add Delete U
125. Windows 1 2 9 Workspace Configurator Windows Control Panel Date Time Language and Regional Options Resional and Language Options a Regional Options E 1 Standards and formats Japanese 2 Location Japan b Advanced 1 Language for non Unicode programs Japanese 2 Default user account settings LET c Languages 1 Defa
126. Write String Read String HH Write String Read String ROUT SYMB CHAN 0 1 B2200A 1 e Write String Address String Terminator e Read String Address String Length To Read Length Actually Read Terminator Terminated Timeout 22 ROUT SYMB CHAN 0 1 LF EOI 22 ReturnedValue 10 Length1 LF EOI Term 1 00 s ReturnedValue ROUT SYMB CHAN 0 1 Length1 ReturnedValue Term Local Variables Definition 6 30 Agilent B1500 3 Message User Response Button 1 Button 2 Button 3 Button 4 Message Message
127. 1 Variable Inspector Variable Inspector p 6 16 Agilent B1500 3 6 15 Numeric Variable Vector Variable String Variable Module Variable Test Contents Variable Inspector Variable Inspector Test Contents mspect Add Numeric Variable
128. 4 NB dS a M DAR Detail 4 B Detail am
129. Data Display Base 4 Data Display 7 Data Display Base 4 Data Display 4 Agilent B1500 3 161001 171001 171002 171003 171004 200001 200002 201001 202001 300001 300002 300003 300004 300011 BH mde neg Test Definition 4
130. Setup Name 1 1 Setup Name plication Test Classic Test RR 255 Ag E dE
131. A SMU A E B LV 4 4 SMU CMU i 4 4 A CMU CMU
132. V VPULSE 1SMU TEE sg EL RX D mr d gt H H TW RD A Vi gt 8 KELET Agilent B1500 3 I V Sweep Figure 7 5 Output Voltage or Current Synchronous Source Stop Value Primary Source N Stop Value T Synchronous Source Start Value 2 Primary Source 1 Start Value gt ime SMU
133. 3 Sense 1 2 4 Force Sense DUT Sense Force Force bon i S robing needle ense f A WES Contact pad Connector plate Contact pad 3 48 Agilent B1500 3
134. 16495K ASU DUT 1 SMU Sense Table 3 9 4 4TP AH Force Return ASU 2 4TP DUTI low H H High CMU Return CMH CML CMU Return DUTI high Agilent B1500 3 Sense Low ASU 1 CMU 3 39 Figure 3 16 ETE fH BO EU SCUU Insulator Plate Triaxial connector Guard Force 1 or
135. 7 40 Agilent B1500 3 ADC NOTE SMU SMU SMU 1 AD ADC ADC High Speed ADC EIR WEF Y
136. AI Programs gt Accessories gt System Tools gt Backup DVD ROM CD ROM CD RW CD ROM CD RW B1500A B1500A C GL EasyEXPERT Y e DMAgilenEasyEXPERT CADocuments and Settings D 9 14 Agilent B1500 3 Agilent B1500A Agilent EasyEXPERT e Agilent FLEX
137. B 4 B ms GPIB 4 C Agilent B1500 3 9 15 SEC 103005 103006 103007 103008 104001 105001 105002 105003 105004 105005 105006 105008 105010 105011 105012 105013 105014 105015 9 16 GPIB 0 31 4 B GPIB QGPIB 4 B GPIB 4 p C GPIB 4 YRFVA B C ms A 1 S
138. Duplicate Preset Group Organize Preset Group Organize Preset Group p 4 57 Agilent B1500 3 4 53 EasyEXPERT Switching Matrix Operation Panel Duplicate KLET Delete Delete All Save Recall
139. ee Agilent 16442 Agilent B1500 Interlock Stop Measurement High Voltage 4 Es
140. Device ID Device ID Remark Remark Export Using XSLT Results gt Transport Data gt Export Using XSLT XML XML Browse Select XML Style Sheet File Agile
141. quality factor Q D 7 20 Agilent B1500 3 Figure 7 10 Figure 7 11 Z R IX Z 4 0 IZ z R 9X 0 tan Cg R Rs X 2nfL 1 _ II 0 R C V Sweep Imaginary part S current A V voltage V jX impedance Q resistance Q reactance Q phase degree or radian Real part series resistance Q frequency Hz inductance H quality factor dissipation factor GPIB Lp G Lp D 100 Q gt 100 Q Ls Rs c Y 1 64B IY 2 G B a
142. 4 16 Agilent B1500 3 Data records in Save group Data records in Delete group Flag Setup Name Date Count Device ID Remarks OK Cancel XML Style Sheet File Path EasyEXPERT Save Delete from to 7
143. Advanced Setup p 5 25 Agilent B1500 3 5 7 Setup Name Channel Setup Measurement Setup Function Setup Auto Analysis Setup Display Setup NOTE IV t Sampling I V t Sampling EasyEXPERT Classic Test YV tSampling V t Sampling TIV t Sampling p 7 12 My Favorite 1H Channel Setup
144. Search and sync channels must be different VN Search monitor mode must be compliance side LGrBGI LGV BGV Send WDCV to set CV sweep source CV WDCV DC Send PDCV to set CV pulse source C PDCV Send PWDCV to set CV pulse sweep source CV PWDCV Set linear sweep for MM20 CV MM20 PWDCV Nui Agilent B1500 3 284 290 301 303 304 305 307 310 311 312
145. Table 2 14 Agilent EasyEXPERT Table 7 2 EL Figure 7 10 7 ZZ real part Gmaginary part R XX 6
146. X Y Graph X Y Graph Plot Grid ON X Y Graph Plot List Display List Display Parameters Parameters Graph Color X Y Graph Plot Graph Trace Color Y1 Y8 Agilent B1500 3 4 21 Figure 4 1 Repeat Procedures EasyEXPERT Repeat Measurement Setup Repeat
147. Z Interlock 42 V Interlock LED 1 2 0 3 32 42 V 0V A B lt E
148. p 3 32 Interlock Agilent 16435A 1 Agilent 16493J 1 1 16493 EH LC B1500A Interlock 2 16435A BNC TGR RW BNC Agilent B1500 3 3 21 NOTE Figure 3 4 X8 ng En 16495K ASU Agilent E5288A ASU SMU HRSMU DUT HRSMU 1 pA AUX CMU
149. BRENA A A A A RAEE l pA 1 fA 0 1 fA 0 9 15E 5 0 9 12E 100 V 10pAC fA 04fAP 1fA 0 46 3E M VoxlE 7 0 46 15E 13 VoxlE 7 100 V 100pAC fA 10 5fAP 2fA 0 341E P4 Vox1E 16 0 3 3E 4 Vox1E 6 100 V nA 50 fA 10 fA 0 1433E P4 Vox1E D 0 1 2E P4 vox1E D 100V 10nA 500fA 10 fA 0 1433E f Vox1E 0 1 1E 24 vox1Eg I 100V 100nA 5pA 100 fA 0 0543E T VoxlE 3 0 05 2E lle Vox1E P 100 V pA 50 pA 1 pA 0 0543E P vox1E 7 0 0541E P vox1g 2 100 V 10uA 500pA 10pA 0 05 3E Vox1E 0 04 2E2 Vox1E 100 V l00uA 5nA 100 pA 0 035 15E amp Vox1E I9 0 03 3E2 Vox1E 0 100 V mA 50nA 1 nA 0 04 15E S4Vox1E 0 03 6E3 Vox1E 100V 10mA 500nA 10 nA 0 04445E74Vox1E 9 0 03 2E7 Vox1E 100V 100mA SnA 100 nA 0 045 15E Vox1E 7 0 0446E 8 Vox1E 7 8 a A Vo V b Agilent E5288A ASU HRSMU c HRSMU d 100 V Io 20 mA 40 V 20 mA Io 50 mA 20 V 50 mA Io Io Agilent B1500 3 2 31 HPSMU
150. 1 Zk SCUU y aj H SMU CMU IE Agilent B1500A 2 24 Agilent B1500 3 nv ttt EasyEXPERT IV CV 10 SMU MPSMU HPSMU HRSMU 1 kHz 5 MHz SMU AID
151. 4 5 6 7 c 10 Standby Wol rcu 5 Agilent B1500A CBUEZ 7 MISSE TUCISE T Agilent B1500A 7 48 Agilent B1500 3 Agilent B1500A Table 7
152. 4 B LINEAR LOG Auto Analysis Data Display A Agilent B1500 3 9 33 140006 140007 140008 140009 140010 140011 140012 140101 140102 141001 151001 151002 151003 9 34 SEC 4
153. SMU 1 C B1500A DUT Agilent B1500 3 9 7 2 SES o SMU DUT
154. Cannot perform self test or calibration E 42 V Send MM before measurement trigger MM Self test is not defined for this module Send WV or WI to set primary sweep source WSV WSI WNX WV WI LES H Agilent B1500 3 9 39 SET cd 221 222 223 224 225 226 227 228 230 9 40 Send PWV or PWI to s
155. Nn QUU T THH n mE A D AD ADC a 9 6 Agilent B1500 3 2 7 4 AO EasyEXPERT Configuration
156. X Y Graph Plot X Y1 Y8 Name Scale Min Max Add Delete Up Down List Display Farameters 20 Darameter Add Delete Up Down
157. 4 Read Switch Setup Normal 1 4 p TAZA PERA m 4 4 4 C jj 4
158. Run Abort Cancel Figure 4 1 Count status Start Iteration Repeat Measurement Setup Count 0 Start Procedure Iteration Procedure Ardquemernts E No Test Execution wd Browse Count Count 1 Iteration Procedure Arguments Automatically fill in Device ID No Cancel Final Procedure If Abort is clicked End status limit JW EXE Browse
159. FHigure 7 9 10 ms 5 ms V t Sampling N 3 Time Index 1 10 ms 10 5 x 1 1 0 ms Time Index 2 30 ms 10 5 x 2 1 3 ms Interval mew 4 LL LL 11 and Hold time Measurement time a b Time at Index 1 Time at Index 2 Time a b Time from the start of measurement to the start of integration 7 16 Agilent B1500 3 IV t Sampling Display Setup Function Setup SMU Range Setup Interval lt 2 ms
160. 7 54 Agilent B1500 3 EasyEXPERT EasyEXPERT Agilent B1500A Desktop EasyEXPERT 7 CD ROM Desktop EasyBXPERT GPIB EasyEXPERT Desktop EasyEXPERT Start EasyEXPERT Execution Mode Database Agilent B1500 3 7 55 EasyEXPERT Desktop EasyEXPERT Desktop EasyEXPERT Y B1500A B1500A e B1500A GPIB
161. Figure 7 20 Desktop EasyEXPERT f N i NN Clean Room Office NN Desktop EasyEXPERT Agilent B1500A Data server To control B1500A 1 via GPIB LAN To export test record To import export test setup via LAN LAN Desktop EasyEXPERT HUB Data server Print server Line Printer Note The B1500A cannot be controlled via LAN NOTE Desktop EasyEXPERT B1500A EasyEXPERT 7 56 Agilent B1500 3 EasyEXPERT Desktop EasyEXPERT e Imtel Celeron 2 GHz 512 MByte DDR266 XGA 1024x768 SXGA 1280x1024 C 1G 10G h 30G GPIB Agilent 8235
162. Cancel Select AII Unselect All Display Data Recall Filter Show Deleted Data Filter Expand Application Test Results Show All Append Data Transport Import 4 14 Data Display p 4 26 15 4 Save Delete Flag and Remarks p 4 15 Test Result Editor p 4 16 Test Results Data Filter p 4 16
163. Figure 3 7 SCUU GSWU SCUU Hc ToCMU Hp Force1 CMUH slot N Lc Lp Sense1 To SMU Forcel slot N 1 Sensel Sense ToSMU Force2 Force2 CMUL slot N 2 Sense2 3 26 Agilent B1500 3 SCUU GSWU SCUU B1500A 1 NOTE E B1500A N MFCMU N 1 N 2 2 SMU SCUU N 3 10 BNC GSWU GSWU Agilent N1301A 201 202 16495K SCUU GSWU 16495K SCUU Force1 CMUH Force2 CMUL 16495 DUT
164. Windows Windows Windows Windows Start EasyEXPERT EasyEXPERT Y B1500A TIER Start FasyFXPERT 1 4 Agilent B1500 3 2 Step 2 Agilent EasyEXPERT Y 1 1 Step 5 Step 5 Agilent B1500A F 2 2 Step 4 Step 4
165. 3 56 Agilent B1500 3 EasyEXPERT EasyEXPERT Agilent B1500A Agilent EasyEXPERT e Workspace Configurator e Application Test Data Display Preview Calibration e Configuration Switching Matrix Operation Panel e Quick Test e Organize Preset Group 4 2 Agilent B1500 3 NOTE EasyEXPERT E wm Workspace Configurator p 4 4 Application Test p 4 24 ELTI p 5 1 Quick Test p 4 55 p 4 9
166. LED NOTE B1500A 2 LCD 15 TFT XGA 1024 x 768 Windows Agilent EasyEXPERT Touch Panel Off 2 6 Agilent B1500 3 10 11 12 Touch Panel Off LED Stop High Voltage 42 V
167. RG 4 B TO Test Results Data Auto Export Folder Path nil Agilent B1500 3 9 25 114103 114104 114105 114106 114107 114151 114152 115001 115011 115021 115031 115031 9 26 SEC Test Results Data Auto Export Folder Path 4 Test Results Data Auto Export Test Results Data Auto Export
168. 2 BBM MBBR Operation Open Al Switch Setup 4 Close Range 2 Outputs 7 Open Output 4 Open Range 2 Outputs
169. GSWU CMU High Low CMU return SMU MECMU SCUU DUT MFCMU SMU Figure 7 14 4 Setup SCUU 4 4 SCUU MFCMU SMU SCUU LED IX KOK 2l SCUU SMU N 1 N 2 SMU CMU Internal Bias MFCMU DC CMU SMU Bias MFCMU DC SMU SCUU 4 DUT SMU 2
170. GPIB Agilent DC AgilentFLEX B1500A Agilent 4155 4156 E5260 E5270 Agilent B1500 3 2 3 Agilent B1500A GNDU 10 Agilent EasyEXPERT ET EasyEXPERT Microsoft Windows XP Professional GUI Agilent B1500A 15 LCD HDD DVD ROM CD ROM CD RW USB LAN GP ITB USB USB Agilent B1510A HPSMU
171. 1 k 2 k 5 k 10 k 20 k 50 k 100 k 200 k 500 k 1 M 2 M 5 MHz 4 05 05 7 50 Agilent B1500 3 o gt Agilent B1500A EasyEXPERT C Program Files Agilent B1500UBasyEXPERT Utilities e Prober Control SetupFileConverter exe e Sleep exe e XSLT Prober Control e Cascade Microtech Summit 12K S300 e 5055 MicroTec PA200 PA300 e Vector Semiconductor VX 2000 V X 3000 Agilent B1500A EasyEXPERT Repeat Measurement Setup
172. 16444A B1500 7 16444A 001 USB 16444A 002 USB 16444A 003 16493G YO 16493G 001 1 5m 16493G 002 3 0 m 16493J 16493J 001 1 5m 16493J 002 30m 16493J 003 50m 16493K B1500 B1500 16493K 001 1 5m 16493K 002 3 0m 16493L GNDU 16493L 001 1 5m 16493L 002 3 0m 16493L 003 5 0 m 16493M ASU D sub 16493M 001 1 5m 16493M 002 3 0m 16493N GNDU B2200 16493N 001 2 0m Agilent B1500 3 2 57 16494A 16494A 001 1 5m 16494A 002 30m 16494A 003 80cm 16494A 004 40cm 16494A 005 40m 16494B B1500 E5250 16494B 001 1 5m 16494B 002 3 0m 16494B 003 80cm 16495F 12x Triaxial Interlock GNDU 1649SF 001
173. 20 20 bmp gif Eu emf Y 8 4 VARI l
174. Standby 2 Sm SCUU Agilent B1500A EasyEXPERT SCUU SMU CMU B1500A SCUU SCUU GSWU p 3 25 Agilent B1500 3 9 3 NOTE 2 ASU Agilent B1500A EasyEXPERT ASU B1500A
175. ADC p 7 41 Unit Name ADC Add Delete IMode Factor Auto Zero 5 24 ADC SMU ADC ADC ADC ADC ADC PLC Table 7 4 N ADC ON OFF ADC p 7 41 Agilent B1500 3 Advanced Setup Advanced Setup V Sweep TV t Sampling Measuremen
176. Figure 7 15 2 Setup Setup 1 ASU DIEKE p 3 22 ASU ASU HRSMU ASU 1 2 HRSMU Force ASU HRSMU LET ASU LED SMU HRSMU Setup 1 AUX AUX Setup 2 ASU 2 DUT HRSMU 1
177. Sense1 Sense2 Figure 3 7 GSWU GSWU QA CMUH DUT Guard CMUL DUT Guard SCUU SCUU 3 28 Agilent B1500 3 Figure 3 8 Table 3 5 GNDU GNDU GNDU Agilent N1254A 100 GNDU Kelvin
178. Source output time Td Tsd Step delay time Tsd Td Tsd SO Delay time Td m 4 Measurement time Vstart Hold time EasyEXPERT s TE RE Agilent B1500 3 7 43 SMU Figure 7 19
179. B1500A 2 8 Agilent B1500 3 CAUTION WARNING NOTE A DEREN s Circuit Common Circuit Common di Agilent 5000 4206 42V Qircuit Common Circuit Common 3 SMU SMU 2
180. B2200A B2201A E p c IU lt 1 Agilent B2200A B2201A Input Output B2200A B2201A Apply Switch Setup gt Setup Name Clear AII Input Label ALL Output 4 52 S Js Configuration
181. Test Output E mx Test Output a rom Test Definition Test Specification Test name Variables Test description Analysis parameters Variables Test result display Device parameters X Y graph Test parameters Data list Entry fields Test Definition Parameter display Local variables Test execution flow Test setup Classic test Application test My Favorite setup Agilent B1500 3 v 6 3 Test Definition Test Definition File menu 2 Save EasyEXPERT Test Name Test Name Close
182. Add Vector Variable Add String Variable Add Module Variable Up Down Remove Variable Value Name Imdex1 2 1 Index2 2 2 Value Variable Value Variable Value 6 16 Agilent B1500 3 External variable Measurement data
183. MFCMU N OFF START STOP ZIE BASE SOURCE VAR2 CONST C V Sweep 7 26 Agilent B1500 3 NOTE vL TALES 1nA CA B 7g TH 100 nA 1nA ts Arc EY BY REWEL TZE F 1 Calibration 7 SMU Zero Cancel
184. 1 0 2 1 ms 0 GPIB Address Value Preamble Postamble Success Terminator Timeout GPIB 1 0
185. 4 Variable Inspector 1 Agilent B1500 3 130002 130003 130004 130005 131001 131002 131003 131004 131005 132001 2
186. CAUTION 120 ms 0 V e Agilent B1500A ades WARNING SMU Agilent B1500 3 7 47 delia E Standby EN 1 Windows Windows 2 3 Standby
187. Up Down Agilent B1500 3 6 25 Write String Write Value GPIB I O GPIB 0 GPIB GPIB Address GPIB String Terminator DEFAULT EOI CR LF BOI LFT BOI CR LF LF NONE GPIB Address GPIB Format Write Value Agilent T amp M Programmers Tool
188. Save Delete Important Vaiid 2 Questionable Delete Show Deleted Data p 4 14 4 15 Save Delete Flags Remarks OK EasyEXPERT Properties Test Results Data Properties p 4 19 Delete Test Result Editor Test Result Editor Results gt Edit gt Flag amp Remarks 2 9 Test Result Editor GUI
189. 102 Incorrect numeric data syntax 103 Incorrect terminator position 104 Incorrect serial data syntax 120 Incorrect parameter value 121 Channel number must be 1 to 10 Agilent B1500 1 10 122 Number of channels must be corrected MM FL CN CL IN DZ RZ 123 Compliance must be set correctly 124 Incorrect range Value for this channel 9 36 Agilent B1500 3 125 126 130 150 151 152 153 160 161 2 mee meg Search goal value must be less than compliance value
190. 2 12 Agilent B1500 3 Figure 2 3 B1S10A HPSMU B1500A SMU HPSMU 200 V 1 A 20 W 2 V 1nA EIE Table 2 1 Table 2 4 FE LE 3 SEE T HPSMU Current mA Voltage V Agilent B1500 3 2 13 Table 2 1 Table 2 2 HPSMU 2V 0 lt IVI lt 2V 100 uV 1000 mA 20 V 0 lt IVI lt 20V 1 mV 1000 mA 40 V 0 lt lt 40V 2 mV 500 mA 100 V 0 lt IVI lt 100 V 5mV 125 mA 200 V 0 lt IVI lt 200 V 10 mV 50 mA HPSMU 1 nA 0 lt Ill 1 15 nA 50 fA 200 V 10 nA 0 lt I lt 11 5nA 500 fA 200 V 100 nA 0 lt lll 115nA 5pA 200 V 1 uA 0 lt Ill X 1 15 nA 50 pA 200 V 10 nA 0 lt lt 11 5 uA 500 pA 200 V 100 nA 0 lt M lt 115 pA 5nA 200 V 1 mA 0 lt I lt 1 15 mA 50 nA 200 V 10 mA 0 lt Ill 11 5 m
191. Agilent B1500A Agilent EasyEXPERT 10 Agilent B1500A 2 390 7 1 2 Agilent B1500 3 2 Agilent B1500A Stop 7 Touch Panel Off Standby B1500A
192. B2200A Femto Leakage Switch Mainframe B2201A 14ch Low Leakage Switch Mainframe No Switching Matrix B2200A B2201A GPIB 1 30 GPIB Address B2200A B2201A B1S00A pr E B2200A B2201A SWM IN1 SWM IN14 jC 1 14 MA Kelvin CMU SWM IN14 SW
193. 1 2 Enable Type 4 1 Axis Y1 YS First Point Second Point Normal line 2 e Gradient line 1 Tangent line e Regression line Agilent B1500 3 6 21 Marker Normal line Gradient line Auto Analysis Enable
194. Agilent B1500 3 4 43 EasyEXPERT Calibration CMU Calibration CMU Calibration ROCA LN MFCMU da LEF p 7 23 Measure Advanced Options Advanced Options for CMU Calibration p 4 45 7 E Open Correction
195. HR ASU 1 pA CE c RERI 10 nA H i Table 7 3 E m HEO Calibration zB LT Calibration Calibration p 4 42 Name Full Range Integration Time XV EMH E E 1 PLC power line cycle 100 PLC
196. ASU 5B ASU p 3222 ASU HRSMU ASU HRSMU ASU HRSMU GPIB Agilent B1500A EasyEXPERT Agilent B2200A B2201A GPIB 1 B1500A GPIB GPIB 2 B1500A p 3 11 3 B1500A USBO Agilent Connection Expert Instrument IO on this PC 0530
197. Notepad CSV Notepad Mader Cuser Une Windsw He NO v idm Tokai pub We Paste to WordPad View Mater Curr Une Window Hep Ed NC M an bee M tr rf TEE EB n 49 ev wo mv 9 ev qo wmv w ow IM ge gt P 7 mv HE 15 gt so sy sy gt Li i L 1 E 3 nS re lt kash 4 ane 12133313131 E mun TAN ECCE 35553353 z E mis emis E MAT Man lag d 4 30 Agilent B1500 3 View Marker EasyEXPERT Data Display X Y Graph X Y Graph Plot List Dis
198. 21 i ct a 1H 234 Command Windows EXE Filename Argument Write Type String Tist String Write String 20 ist Write List Values EXE List Format List List 1 LAF L A F I
199. SCUU B1500A GSWU SMU CMU SCUU TE SCUU 4 1 Force1 Sense1 Force2 Sense2 BNC 4 2 MFCMU SCUU 4 2 Force1 CMUH Sense1 Force2 CMUL Sense2 GSWU LED 3 SMU CMU GSWU SCUU 2 to Guard1 to Guard2 LED 1 2 42 Agilent B1500 3 ttl SCUU SMU lt 20fA lt 100 uV at 300 sec
200. Sense ASU DUT SMU 4 4TP High Low ASU CMU Return ASU 2 CMU Return 411 DUTI low 3 38 CMH CML CMU Return DUTI high Agilent B1500 3 Figure 3 15 ASU Guard CMH or Force lt Coaxial cable ASU 1 to DUT 1 or Sense DUT 1 high terminal CMU Return to DUT 2 or Guard DUT 1 low terminal CMU Return CML or Force ASU 2 Sense ASU ASU Guard 2
201. X Y Graph Agilent EasyEXPERT Help EasyEXPERT 4 32 Agilent B1500 3 EasyEXPERT Data Display Figure 4 7 Normal line Gradient line Tangent line Regression line 1 cursor marker 2 cursors gradient data curve measured data 1 1 2 2 N Normal 2 2 Gradient 1 Adjust Gradient Tangent
202. 4 54 Agilent B1500 3 My Favorite Setup Preset Group Setup Name EasyEXPERT Quick Test Quick Test My Favorite Setup Cancel Duplicate This Preset Group Duplicate Preset Group G x d Import Preset Group Preset Group Import Export Preset Group Preset Group Export Organize Preset Group Organize Preset Group
203. 17 100 1 N 7 42 Agilent B1500 3 SMU E mimm XXE 71 4717 TFA LA
204. ASU 3 24 Agilent B1500 3 NOTE Figure 3 6 SCUU GSWU Agilent N1301A 100 SMUCMU SCUU DUT CMU SMU SCUU MPSMU HRSMU Agilent N1301A 200 GSWU CMU high low SCUU SMU GSWU GSWU SCUU DUT SCUU 148 mm x 75 mm x70 mm 11 GSWU 33 2mm x 41 5 mm x 32 8 mm GSWU Shielding box is from CMU Guard GSWU 16495K DUT interface To B1500A SCUU e Agilent 16495 gt
205. Agilent B2200A B2201A Add Delete Up Down Operation Open All Switch Setup Close Range Open Output Open Range Open Input Table 5 1 Input B2200A B2201A Switch Setup Close Range Open Input 5 16 Agilent B1500 3 Table 5 1 Outputs Rule Switching Matrix Control B2200A B2201A Switch Setup Open Output 4 Close Range Open Range
206. HDD HDD ioc T B1500A HDD B1500A HDD Windows XP EasyEXPERT 9 12 Agilent B1500 3 NOTE 2 B1500A B1500A B1500A B1500A 006
207. X 2 a 2 b c Figure 3 2 d Figure 3 3 Agilent B1500 3 3 13 NOTE Figure 3 1 a b c Figure 3 1 8 a
208. Test Contents External Variable Setup Assign to external variable External Variable Setup Measurement data External Variable Setup Add
209. GNDU Table 3 5 Agilent N1254A 100 GNDU Kelyin Agilent N1254A 100 GNDU to Kelvin Adapter Triaxial male To GNDU connector To 16493K Kelvin triaxial cable Model No Option Item 16493K 001 1 5m 3 0 A 16493K 002 3m 2 6 A Agilent B1500 3 3 29 Agilent B1500A 1 Table 3 7 2 Table 3 6
210. Result String Length Actually Read Sring Value Read Value Result Value List Read List Result Values None Agilent B1500 3 6 33 Table 6 1 Command Execution E IR List Value EXE C Program Files Agilent B 1500 EasyEXPERT Utilities sleep exe Windows Command Execution Argument Comman
211. fj 0 655 35s 10 ms Delay MFCMU 0 655 35 s 0 1 ms Constant Unit SMU V Name IName Mode V I Eyi COMMON H Source Compliance Sweep status Agilent B1500 3 5 15 Setup Name Connection
212. 4 p 4 42V BASE ES ASU HRSMU A j 4 j 1A HPSMU TV 1 IV 1 IV 1 Vt 1 C V 1
213. DUT GaAs MESFET DUT DUT FET Test device Bub XX JL Ferrite beads To unit 9 8 Agilent B1500 3 DUT SMU DUT SMU
214. LED Measurement LED precor eger Agilent EasyEXPERT Agilent EasyEXPERT 7 DVD ROM CD ROM CD RW B1500A USB USB 2 USB USB OSD LCD Off IX LCD LED LCD 4 Auto
215. Search measurement was aborted Agilent B1500 3 9 45 SET id 640 650 655 656 657 660 661 662 663 670 9 46 Search hmits must be range 20000 or more 20000 Data format must be ASCII to get time data 4961 Cannot connect disconnect series resistor En ne Za D mc ob i Series resistor must be OFF for 1 A range 1A
216. Unit VARI SMU Name VARI Direction Linear Log LINEAR LOG10 LOG25 LOGS0 LOG 1 Start Stop Step No of Step Start Stop fi Step Compliance Pwr Comp W OFF Agilent B1500 3 5 5 VAR2 VAR1 Timing IV Sweep VAR2 Unit VAR2
217. ADC mV mV 405 V 25 uV 0 01 0 25 40 V 2mV 0 015 8 2 V 100 uV 0 01 0 7 100 V 5 mV 0 02 20 45 V 250 uV 0 01 2 4200 V 10 mV 0 035 40 20 V 1 mV 0 01 4 a mV 1 PLC 128 b MPSMU HRSMU c HPSMU Table 2 20 ADC A A A A l pA 0 1 fA 1 8 12E 9 10 nA 500pA 0 04 2E Vox1E 10 pA fA 0 5 15E Pe vox1E 7 100 pA SnA 0 03 2EY Vox1E 9 100 pA 5 fA 0 343E Vox1E 16 l mA 30nA 0 03 2E7 Vox1E nA 50fA 0 1 3E13 Vox1E 5 10mA 500nA 0 03 2E6 Vox1E 10nA 500fA 0 1 2E1 Vox1E 100mA 5pA 0 0442E Vox 1E 100 nA SpA 0 05 2E TrVoxlE D 1A9 50 pA 0 443E Vox1E 1 nA 50pA 0 05 2E 4 Vox1E a t A Vo V b Agilent E5288A
218. Data Display Acus 0 ICI TC Data Display Data Display E Enable Type 4 1 Axis Y1 Y8 T 1 2 First Point Second Point e Normal line 2
219. Regression 2 2 2 c Agilent B1500 3 4 33 Switch Display Mode Close All Displays Show X Y Graph Show List Display Show Parameters Auto Scale Zoom In Zoom Out Display Setup Choose Active Y axis Marker ON OFF Interpolation ON OFF Marker Skip EasyEXPERT Data Display Data Display 22 Overwrite Display Data p
220. WxREE REF Agilent B1500A W 0 10 0 1 1 1 W 1 Figure 7 19 1 Local mode 2 Remote mode Measurement wait time Source wait time MM Source wait time Measurement Delay time Measurement wait time Hold time Step delay time Time NOTE
221. 16442B ASU SCUU GSWU GNDU MFCMU SCUU SCUU CMU MFCMU B1500A MPSMU HRSMU 100 V HPSMU 200 V Force Sense Guard p 3 32 Interlock p 3 21 GNDU 4 2 A GNDU Agilent 16493L GNDU 16494A 1 A GNDU Agilent 16494A Guard Circuit Common
222. B 105051 4 B 105052 4 B 105053 CMU A 8 105054 4 p 105055 4 105056 4 BV CV 105057 A Hz CHz 105058 4 8g C 105059 4 pj mV CmV 9 18 Agilent B1500 3 105071 105072 105073 105074 105075 105076 105077 105078 105079 105080 105081 105801 105802 105803 105901 105902 2 mee neg IV t 4 p
223. LOOP END LOOP LOOP END LOOP EXIT LOOP END LOOP Vth gmMax Local Variables Definition BLOCK I Integration Time Setting IF IntegTime SHORT IntegMode MANUAL AdcFactor 8 ELSE IF IntegTime MEDIUM IntegMode PLC AdcFactor 1 ELSE IF IntegTime LONG IntegMode PLC AdcFactor 16 END IF pD x kxk xx V Sweep Vth gmmax Analysis Auto Analysis END BLOCK 1 2 END BLOCK 3 COMMENT 4 13 mtegTime 14 COMMENT 15 fTH Application Test Vth_gmmax
224. Ls 4 C X Y Graph
225. Agilent B1500 i Item Status Item A Status 2 d lt d Agilent B1500 3 4 47 Start Diagnosis Slot Configuration Select All Unselect All Start Self Test Recover Module Abort Status LED EasyEXPERT Configuration 7 4 gt F7
226. I V Sweep I V Sweep EasyEXPERT 7 Classic Test I V Sweep V Sweep YV Sweep p 7 3 My Favorite Channel Setup Channel Setup p 5 4 Measurement Setup Measurement Setup p 5 5 Function Setup Function Setup p 5 18 V Ys Auto Analysis Setup
227. RE SMU SMU 150 kHz 80 MHz C38 3 Vrms RE Agilent B1500 3 2 29 MPSMU HRSMU MPSMU HRSMU Table 2 15 Table 2 16 Re AOBAMBIEXUmisrUx 4 amp wwzcekdiozcnbESELC UU 1 pA 1 aA fKv p ea E E ADC t ADC ce ps RARBORECA LUET
228. Save Delete Save EasyEXPERT Delete Results gt Filter gt Show Deleted Data 1 Important Valid H e Questionable Remarks Test Result Editor Test Results Data Filter Results gt Filter gt Filter EasyEXPERT
229. LINEAR LOGI0 LOG25 LOG50 LOG100 LOG250 LOG3S00 LOG 1 LOG10 1 10 2 65 535 1 7ermg7 lt 2 0 01 NOTE Interval gt 0 1 0 02 x 1 1 100001 11 1 1 TV t Sampling Total Sampling Time Interval x No of Samples c SIMULTANEOUS
230. SMU 3 16 Agilent B1500 3 16442B 16442B NOTE 16442B Agilent 16442B 16442B 16442B 1 2 B1500A 16442B Table 3 2 Force DC Sense Force
231. WARNING SMU 2 10 Agilent B1500 3 Figure 2 1 WE Agilent B1500A GNDU B1510A HPSMU B1511A MPSMU B1517A HRSMU B1520A MFCMU Agilent EasyEXPERT EasyEXPERT P 4 1 QGPIB GNDU Agilent B1500A GNDU GNDU 0 V 4 2 A HPSMU SMU GNDU GNDU
232. 7 Agilent 82350 PCI GPIB Interface GPIBO OK y 8 Reboot Required Reboot Now B1500A 4 5 GPIB Address 21 System Controller 8 Agilent B1500 3 3 11 WARNING CAUTION Table 3 1 AX E Agilent B1500A
233. 0 0 1 A F Table 6 1 G 6 32 Agilent B1500 3 Read Type Command Execution Agilent T amp M Programmers Toolkit 0 5 E 1 3 1 10 2 10 2 x 3 16 3 4 String Value List None String Read String
234. PT Pulse width must be 0 5 ms or more 0 5 ms PT Program memory 1s full 2000 40000 ST Invalid input for a memory program ST END GPIB GET HP BASIC TRIGGER Maximum nesting level is eight 8 Data output buffer is full 34034 Search source channel must be set LSSV LSSI BSSV BSSI LSV LSI BSV BSI
235. b 9 a b c Agilent EasyEXPERT Agilent B1500A Screws Screws 3 14 Agilent B1500 3 Hx EL Figure 3 2 Dummy board Figure 3 3 Agilent B1500 3 3 15 NOTE WARNING WARNING CAUTION CAUTION
236. HRSMU ASU 1 pA 30 30 4 42 Agilent B1500 3 SMU Zero Cancel Full Range Integration Time Select All Unselect All Measure EasyEXPERT Calibration SMU Zero Cancel lt RESTI Name HA ed
237. 1 pA 0 lt IIl 1 15 pA 1 fA 100 V 10 pA 0 lt NM lt 11 5pA 5 fA 100 V 100 pA 0 lt M lt 115pA 5 fA 100 V 1 nA 0x Ill 1 15 nA 50 fA 100 V 10nA 0 lt NM lt 11 5nA 500 fA 100 V 100 nA 0 lt M lt 115nA 5 pA 100 V 1 uA 0 lt I lt 1 15 pA 50 pA 100 V 10 uA 0 lt M lt 11 5 uA 500 pA 100 V 100 nA 0 lt I lt 115 uA 5 nA 100 V 1 mA 0x Ill 1 15 mA 50nA 100 V 10 mA 0 lt IIl 11 5 mA 500 nA 100 V 100 mA 0 lt Ill 20mA S nA 100 V 20 mA IIl 50 mA S nA 40 V 50 mA lt IIl lt 100 mA S nA 20 V a E5288A ASU 2 20 Agilent B1500 3 Table 2 11 Table 2 12 HRSMU ADC ADC 0 5 V 0x IVI 0 55 V 25 uV 0 5 uV 2 0 lt IVI lt 22V 100 pV 2nV 5V 0 lt IVI lt 55V 250 uV 5 uV 20 V 0 lt IVI lt 22V 1 mV 20 nV 40 V 0 lt IVI 44 V 2mV 40 nV 100 V 0 lt IVI 100 V 5mV 100 pV HRSMU ADC ADC 1 pA 0 lt lll 1 15pA 100 aA 100 aA 10 pA 0x Ill 11 5pA 1 fA 1 fA 400 aA 100 pA Ox Ill 115 pA 5fA 2 fA 500 aA P 1 nA 0 lt lll 1 15n
238. Desktop EasyEXPERT B1500A EasyEXPERT Start EasyEXPERT B1500A Windows Desktop EasyEXPERT Agilent IO Control B1300A Desktop EasyEXPERT Desktop EasyEXPERT 1 Start Start EasyEXPERT Start EasyEXPERT Start EasyEXPERT 7 2 Start EasyEXPERT zh
239. 1 E Agilent B1500 3 108003 108004 108005 108006 108007 108008 108009 108010 109001 109002 109011 109012 2
240. 2 Agilent B1511A MPSMU 1 Agilent B1517A HRSMU 1 aA Agilent E5288A ASU e Agilent B1520A MFCMU 1 CMU SMU EE Agilent N1301A 200 GSWU Agilent N1301A 100 SCUU Agilent N1301A 100 SCUU SMU CMU DUT CMU SMU CMU 1 SMU 2 MPSMU HRSMU e Agilent N1301A 200 GSWU CMU high low DUT SCUU Agilent ES288A ASU
241. 3 Online Offline 4 GPIB B1500A GPIB m 7 58 Agilent B1500 3 EasyEXPERT EasyEXPERT EasyEXPERT EasyEXPERT Database p 7 60 1 Start Start EasyEXPERT Start EasyEXPERT Start EasyEXPERT 2 Start EasyEXPERT 7 Option gt Database Database 3 CAEasyEXPERTMatabase
242. FINALLY FINALLY T T Agilent B1500 3 8 19 COMMENT END ERROR FOR 275 ege 2451 AT R3 END FINALLY ERROR ade duoc au D a MEE lc c FOR variable initial value TO terminate value STEP step value NEXT variable lt variable gt initial value terminate value step value gt
243. Menu HDD HDD DVD ROM CD ROM CD RW LED B1500A Agilent B1500 3 2 7 Agilent B1500A 7 6 8 5 5 5 9 5 5 5 4 1 2 GNDU 0 V 2 3 Zero Check Agilent B1500A CAUTION Zero Check B1500A
244. T ABC DEF ABC n DEF n 1 602177x10 9 1 380658x10 e 8 854188x10 lt id q k IL Dx monomial operator binomial operator Table 8 1 Table 8 1 operand SMU HPSMU MPSMU HRSMU HRSMU ASU CMH CML Agilent B1500 3 8 5 WEE TEQUE ege Table 8 1
245. Tnterlock d SMU Agilent B1500 3 BE B1500A 47 63 Hz 90 264 V AC B13500A 900 VA 5 C 40 C 20 70 RH MELIO L 0 2 000 m 20 C 60 C 20 96 90 RH 40 C 0 4 600 m Agilent B1500 3 3 3
246. USBO B1500A USBO xXxXXX X XXXX X INSTR agb1500a UsbDevicel Agilent B1500 B1500A p 9 13 9 4 Agilent B1500 3 BH B1500A Force Sense NOTE B1500A Force Sense Force Sense
247. Y dj 2 4 34 Agilent B1500 3 EasyEXPERT Data Display Marker Maximum Marker Minimum H Marker Search Marker Cursor Direct lt Line 1 State 1 Normal Gradient Tangent Regression Line 2 State 2 Normal Gradient Tangent
248. 3 ZW Name e Scope Private Public Agilent B1500 3 4 7 Eas Wo yEXPERT rkspace Configurator Manage Workspaces Workspace Manager Workspace Manager Workspace Manager Delete Rename Duplicate Public Public Close Workspace Manager e Public Workspaces owned by other users Public V
249. B2200A B2201A B2200A B2201A B2200A B2201A Preset List Cancel Preset Group Add New Preset Group Rename This Preset Group Delete This Preset Group Duplicate This Preset Group Organize Preset Group Rename 3 Add Preset Group KLET Rename Preset Grounp
250. My Favorite Setup Classic Test Agilent 415SC 4156C My Favorite Setup I V C V Quick Test My Favorite Setup Agilent B1500 3 2 5 Agilent B1500A 5 6 7 2 8 9 3 10 1 Standby B1500A B1500A
251. X Y Graph Plot MARKER 5 9000000 C 1 82520000 XV 3 33249E 3 ON e List Display Y 7 Index V1 V2 I2 123 5 9 V C 1 8252 V XV 3 33249 mA SMU C T X 1 V MFCMU e U NULL D IV V 4 36 Agilent B1500 3 X Y Graph List Display Parameters Display Setup EasyEXPERT Data Display View gt Display Setup
252. 0 V E ASU control cable was connected disconnected ASU Agilent B1500 SCUU control cable was connected disconnected SMU CMU SCUU Agilent B1500 Agilent B1500 3 9 43 320 32 322 323 330 331 332 333 334 335 9 44 Excess current in CMU CMU OFF This command is not available for CMU SMU
253. Agilent B1500 3 9 31 ghe 132002 133001 133002 133003 133004 133005 133006 133007 133008 133009 133010 134001 9 32 qe Hye x GPIB GPIB GPIB GPIB GPIB GPIB GPIB GPIB
254. VAR2 Z CONST 4 E 1 Agilent B1500 3 VAR1 I V Sweep IMeasurement Setup AD VAR1
255. gt current e Range Changing Rule ZUP AND DOWN AHEAD tes C HF a ij 1 lt current2 uj 1 gt current ZIT currentl current rate 11 100 cg77e777 x rate 100 current2 gt x rate 1000 10 mA rate 900 current gt 9 mA current2 0 9 mA 7 36 Agilent B1500 3 SMU SMU SMU SMU SMU SMU
256. 16495K DUT ASU ASU Sense B1500A D sub ASU HRSMU ASU HRSMU Force ASU HRSMU ASU HRSMU ASU HRSMU O ASU CMU cur AUX In BNC BNC Agilent B1500 3 3 23 Figure 3 5 ASU ASU 1 Hc CMU cur AUX In To CMU Hp CMU pot
257. B1500A LCD Off LCD LED LED Auto Menu 4 Auto Menu Agilent B1500A Agilent EasyEXPERT Agilent EasyEXPERT Tes USB USB Agilent B1500 3 1 3 2 NOTE B1500A WENT P 1
258. Delete Up Down Scalar Parameters 1 Name Unit Description Add Delete Up Down Agilent B1500 3 6 9 Figure 6 2 1 T Test Contents Hest Contents Test Contents
259. SSP CMU CMU correction mode must be manual ADJ CMU ADJ CMU correction mode must be off CMU Invalid standard is specified as CMU correction Frequency index is not available for CMU correction AC Voltage is OmV 0 mV CMU correction is not complete Agilent B1500A
260. Agilent B1500 3 4 37 Effective Area Graph Color Graph Trace Color Display Number Format EasyEXPERT Data Display Graph Properties XX Y Graph Plot Propertes Edit gt Graph Properties X Y Graph Plot OK Grid ON X Y Graph X Y Graph Plot Y1 YS8 JLE L
261. B1500A p 1 1 Agilent EasyEXPERT p 3 9 Agilent B1500A GPIB GPIB p 3 10 B1500A EasyEXPERT GPIB p 3 11 l an 2 B1500A
262. N 1 700 701 702 703 704 705 1760 CPU failed NVRAM read write test CPU failed FPGA read write test CPU failed H RESOLN ADC end signal test CPU failed H RESOLN ADC start signal test CPU failed emergency status signal test CPU failed SRQ status signal test Agilent B1500 3 9 47 SES 706 707 708 709 710 711 712 713 714 715 720 721 722 723 724 725 740 935 N760 N761 N762 N763 N764 N765 N766 N767 N768 N769 9 48 CPU failed high voltage status signal test CPU failed low voltage status signal test CPU failed DAC settling status signal test CPU failed measure ready status signal test CPU failed set ready status signal test CPU failed measure end status signal test CPU failed measure trigger signal test CPU failed pulse trigger signal test CPU failed abort trigger signal test CPU failed DAC set trigger signal test H RESOLN ADC is not installed H RESOLN ADC failed ROM RAM test H RESOLN ADC failed B COM offset DAC test H RESOLN ADC failed sampling ADC test H RESOLN ADC
263. es PEDS C Advanced Options n m TANEC ko Aim Lp Lc Advanced Options for CMU Calibration Advanced Options 227 OK Cancel 1
264. SMU 1 Figure 7 6 SMU SMU SMU Figure 7 7 GUI TV Sweep p 5 3 1 Channel Setup SMU Function VARI SMU Mode CV VPULSE I TIPULSE ISMU Agilent B1500 3 7 9 Table 7 1 IV Sweep 2 VAR1 3 Measurement Setup SMU Pulse
265. Interpolation ON OFF 2 Skip Go To Maximum Go To Minimum Agilent B1500 3 4 31 Cursor Line Window Help EasyEXPERT Data Display Direct Marker Cursor IN Go To 3 Cursor ON OFF Go to Marker Go to Direct Marker Cursor
266. C Program Files Agilent B 1500 EasyEXPERT Daemon StaDa emon exe config EasyEXPERT 7 EasyEXPERT SDA FLEX 4 B C Agilent B1500 3 9 35 SEC 300021 300031 SDA SDA 4A g C SDA SDA 4 B C Agilent FLEX Agilent FLEX 100 Undefined GPIB command
267. SMU 1 23 C 5 C 20 60 40 1 C MECMU 1 MECMU 1 MFCMU 1 PLC SMU ADC 1 PLC 1nA 1A 20 PLC 100 pA 5056 1pA 10 pA SMU ON 10 SMU 2 26 Agilent B1500 3 B1500A ttt 10 23 A gt JNA Bb Aus B1510A HPSMU 2 200 V 200 V 2 uV 10 fA JA 1A B1
268. e X Y Coordinate HB89o0 X Y EB X T XX XZ74 vREYZA WVvFICAZIUx3 e Data Condition Marker Gradient 6 22 Agilent B1500 3 Tangent line Regression line Auto Analysis First Point Marker First Point Second Point Y 7 t4 Elja 1 2 X Y Coordinate e Data Condition X Y X Y
269. 1 Enter B1300A Agilent B1500 3 9 13 NOTE 2 Windows CD ROM CD RW 1 EasyEXPERT 7 EasyEXPERT a EasyEXPERT File Exit b Start EasyEXPERT x
270. Data Display p 4 26 Configuration p 4 47 Caiibratton p 4 42 Agilent B2200A B2201A Switching Matrix Operation Panel p 4 52 3 amp p 6 1 FT 14 4ppeg7gce and Themes Display Display Properties Appearance Advanced 9 Advanced Appearance 7ez M
271. FJOH Agilent B1500 3 C V Sweep 4 DUT pFigure 7 12 Figure 7 13 MFCMU DUT DUT 4 4 DUT outer shield ASU GSWU CMU retum
272. Ri Agilent B1500 3 8 7 atan A atan2 A B avg A ceil A cond A B C D cos A A B atan A A B A B 0 0 A B X C atan2 A B A B C A B C A B avg A Ai B A B ceil A A B A B A B C D A lt B C A gt
273. p 7 27 Name Full Range HRSMU ASU On Off 1nA 1nA 100pA 100 pA MPSMU HPSMU 10pA 10 pA MPSMU HPSMU 1pA 1pA MPSMU HPSMU HRSMU HRSMU ASU 1 pA On Off 1 PLC SMU power line cycle 100 PLC 16 PLC SMU
274. ADC SMU AZD ADC 4 2 A ASU SMU AUX CMU SMU CMU SCUU GSWU MFCMU GPIB Agilent B1500 3 2 25 SMU MPSMU HRSMU HPSMU SMU MFCMU SCUU GSWU ASU Agilent EasyEXPERT EasyEXPERT 4 1 GPIB SMU Zero Check 9
275. e Agilent N1301A 201 202 GSWU GSWU e Agilent N1301A 102 SCUU SCUU e Agilent N1301A 110 SCUU BNC Agilent B1500 3 3 25 16495 _ 16495 DUT 4gs7e77 16495 Installation Guide GSWU 16495K 1649SK 1 GSWU DUT DUT interface Guard GSWU 2 2 B1500A
276. USB Agilent B1500 3 1 9 Step 7 1 Singe Data Display Ut cR Mu Cursor Unt Window Hep 1 10 Agilent B1500 3 7 p H Step8 Step 6 Step 7 B1500 Test Result Editor Test Result Editor GUI
277. 3 EasyEXPERT Stacking Data Display Overlaying Data Display 7 Data Display Data Display X Y Graph Apply same scale to all graph Data Display Properties Data Display Default Data Display Properties Data Display OK 1 Effective Area Data Display
278. Agilent B1500A ASU HRSMU B1500A ASU HRSMU ASU B1500A ASU HRSMU ASU D sub ASU ASU ASU HRSMU ASU p 4 0
279. HRSMU ASU p 4 50 ASU ASU HRSMU CMU pot Agilent 4284A 4 LCR BNC ASU CMU cur AUX in ASU HRSMU 7 32 Agilent B1500 3 SMU CC yr SMU SMU
280. Series resistor cannot be used with ASU ASU Sampling measurement Was aborted TV t 123 Negative hold time is only valid for I V t linear sampling with interval 2 ms 2 ms TV t Sampling interval for I V t log sampling must be 2 ms or longer V t 2 ms Number of samples does not have to exceed 100001 No of Samples 100001 Specified channel does not have ASU ASU Agilent B1500 3 671 680 681 682 683 684 685 mee neg SSP is not available for this channel SSP
281. Bias Hold after Measurement 4 B 4 SMU SMU Agilent B1500 3 9 19 G Ime 105903 106001 107001 107002 107003 107004 107005 107006 108001 108002 9 20 B1500 B E
282. SCUU 16495K SCUU SCUU Agilent N1301A 110 SCUU B1500A MFCMU N SMU 2 N 1 N 2 N 3 10 BNC GSWU GSWU Agilent N1301A 201 202 SCUU GSWU SCUU 16495K 1649SK SCUU Force1 CMUH Force2 CMUL 16495 DUT
283. aA 1pA DUT SMU AUX HRSMU 2 5 n 2 4 Agilent B1500 3 Agilent EasyEXPERT Agilent BasyEXPERT Agilent B1500A Windows XP EasyEXPERT GUI LCD EasyEXPERT Agilent B2200A B2201A
284. 2 Improper setting of CMU frequency and pulse width uu t Send WFC to set Cf sweep source Cf WFC Line power failure Excess voltage in MPSMU MPSMU OFF Ground unit abuse is detected Excess current in HPSMU HPSMU OFF Unsupported module Interlock open operation error Initialized
285. 3 1 Fe wi You have ased es instrument previously Do yos wam he Comtierge working on te previous setups amd data Ves want to continue working on the previous setups and iata No wast to start new session Note Even you start new session you can access setups amd data from previous sessions a Yes OK Step 5 b No Next Step 3 Agilent B1500 3 1 5 2 Step3 Fe t Agaent XPERT software manages setups and data in ee hosures hnown as s with a disti tive neme Please specify neme for the sew Workspace Alw other users to access this Worhbsqace Yuu can alvo rename a pewviceniy defines Workspace lt E Allow other lt fo access thh Worksgoace sees ec 1
286. DUT Figure 3 18 SCUU MFCMU MFCMU Agilent N1300A 001 002 CMU dr MFCMU Hcur gt to DUT 1 high terminal Insulator Plate to DUT 1 low terminal BNC connector Coaxial cable Hcur Hpot Lcur Lpot 7 DUT Hcur Hpot Lcur Lpot 7 50 Q Agilent 8120 0367 3 42 Agilent B1500 3 BE DUT Agilent 16442B DUT
287. Data Display 7 X Y Graph 2 18 Name Scale Min Max Add Delete Up Down 3 ELET Xhe Y1 J o 7 o 9 List Display Data Display List Display Parameters Data Display Parameters 20 Darmeter Add Delete
288. Device ID 1 A B setDeyiceTd A A B B 0 A B sin A A B A B A B sqrt A A B A B A B C D B C 1 A 5 5 D E E storeAt A 5 5 D A
289. Figure 2 1 GNDU Force Common Agilent B1500 3 2 11 NOTE Figure 2 2 SMU SMU DC SMU Figure 2 2 SMU g e Ej SE E e Ej SER E GPIB SMU CMM SMU Common SMU SMU SMU 7 37
290. Marker Agilent B1500 3 6 23 ui Data Display Control Data Display Control Enable Data Display Test Output p 6 8 6 24 Agilent B1500 3 X Y Graph List Display Parameters Display Data Setup Display Data Setup Data Display
291. p 7 37 Agilent B1500 3 7 35 SMU bic lt p Range Changing Rule SMU Range Setup p 5 23 Rate Range Changing Rule BY FULL RANGE gt X lt 10 X 115 100 e Range Changing Rule GO UP AHEAD 1
292. Agilent B1500 3 105021 105022 105023 105024 105025 105031 105032 105033 105034 105035 105036 105037 105041 105042 BH A BA CA 4 8BV CV A BV CV A 8gA CA 4 8BW CW 4 4 CV SMU pA CA V
293. Agilent B1500 User AgilentOnly Windows Windows Agilent B1500 Agilent B1500 3 NOTE Agilent Technologies X 4 D 2 4f E Agilent B1500 B1500A p 9 13 EasyEXPERT
294. Agilent B1500A e e 7 Agilent B1500A E EasyEXPERT EasyEXPERT 100 a EasyEXPERT DUT DUT II Agilent Technologies NM C Program Files Agilent
295. CD ROM 4 Start Start EasyEXPERT Start EasyEXPERT Start EasyEXPERT 7 Execution Mode 5 Online Offline 6 GPIB B1500A GPIB S zc R GPIB Desktop EasyEXPERT GPIB B1500A GPIB Execution Mode ZA p 7 60 1 Start Start EasyEXPERT Start EasyEXPERT Start EasyEXPERT 2 Start EasyEXPERT 7 Option gt Execution Mode Execution Mode
296. FHigure 3 15 Figure 3 17 A to PE Triaxial Common Coaxial cable DUT Triaxial connector connector Sense lt Plate NOTE Force Guard Agilent B1500 3 3 37 ASU lt Coaxial cable to DUT 1 or DUT 1 high terminal Guard Wire CMH or Force ASU Common 1 Sense CMU Return Guard CMU Return CML or Force ASU Common 2 Sense Guard ASU 2 mE d E to DUT 2 or DUT 1 low terminal 3 16495K 1 Table 3 9
297. Local Variables Definition Local Variable Definition p 6 18 Block Selection Line Selection Insert Delete Copy Cut Paste 3 Run Pause Abort Step Break Inspect Test Contents p 6 15 Test Contents voies ie He 3 Click available Select available element button Mo Parameter Settings Specify the line to insert element Define the setup necessary or edit for the highlighted element Agilent B1500 3 6 13 Edit Debug Block Seletion Line Selection Insert Delete Copy Cut Paste Test Contents Edit Block Selection Line Selection Insert Delete Copy Cut Paste Debug Run Abort Step Break Inspect
298. Primt Data Display Data Display 2 Overwrite Append Overwrite Display Data p 4 14 7 Data Display Append Display Data p 4 14 Data Display 4 28 Agilent B1500 3 Figure 4 4 Edit Print Preview IE lt lt rab On manm pet Orren Oris Dole 44 opened Data Cogiay sm prp Keep hipec Batia EasyEXPERT Data Display T amp sus A Copy Copy Graph Copy List Copy Parameters Graph Properties List Display Properties X Y Graph Plot BMP EMF
299. p 8 1 Add Delete Up Down Agilent B15 00 3 Apply Interpolation Mode Line 1 Line 2 Pope Auto Analysis Setup Auto Analysis Setup V Sweep I V t Sampling C V Sweep HO Auto Analysis Setup E d c oec on a dU cri gh 2 1 Line 1 Line 2 Marker H
300. List Display CSV Parameters CSV BMP EMF CSV CSV Graph Properties p 4 38 List Display Properties p 4 38 Figure 4 5 amp Data Display X Y Graph Plot Edit gt Copy IRL WordPad Paste Agilent B1500 3 4 29 Figure 4 5 Figure 4 6 EasyEXPERT Data Display Figure 4 6 Data Display List Display Edit Copy Notepad Paste
301. fi Agilent paa 2 xit E d Se V Agilent B1500 Y o
302. 3 2 43 DC SMU lt 100 SMU 100 pV 100 V DC 20 mV 30 mV 500 s 500 CMU 1300 SMU ir B1520A Be Ee A Zs IZxl Yox IZxl x 100 96 Zx O A 0 05 0 1 Zs 500 x 1 f mQ f MHz Yo 1 fx10nS 2 DUT 2 44 Agilent B1500
303. HRSMU DUT ASU DUT ASU 132 mm gt 88 5 mm x 50 mm ASU Shielding box CMU Return CMU Return DUT interface 16495K 16495K aaa aoad ALAL Prober To B1500A CMU Agilent 16495K Agilent 16493M ASU Agilent N1300A CMU Agilent 16008D E Agilent N1254A 108 BNC 16495K DUT 4Agilent 16495 Installation Guide 1649SK
304. Id Vg 16 COMMENT 17 Analysis Auto Analysis Agilent B1500 3 8 21 2 WRIT SQUE rege NandFlash IV Write IV Local Variables Definition BLOCK Integration Time Setting IF IntegTime SHORT IntegMode MANUAL AdcFactor 8 ELSE IF IntegTime MEDIUM IntegMode PLC AdcFactor 1 ELSE IF IntegTime LONG IntegMode PLC AdcFactor 16 END IF I V Sweep amp Analysis Initial Characteristics ForcePG2 Id Vg Initial ResetPG Auto Analysis 19 1 2 END BLOCK 3 COMMENT 4 13 fTH mtegTime 14 234 7 FfT COMMENT 15 fTH Application Test 2
305. Reboot Now B1500A Agilent B1500A EasyEXPERT GPIB B1500A 1 EasyEXPERT EasyEXPERT a EasyEXPERT File Exit b Start EasyEXPERT x 2 All Programs gt Agilent IO Libraries Suite gt Agilent Connection Expert Agilent Connection Expert 3 Instrument T O on this PC GPIBO Change Properties z Agilent 82350 PCI GPIB Interface GPIBO 4 GPIB Address 21 21 5 System Controller zh ES 6 Auto discover instruments connected to this interface zh
306. Select Library 6 Cancel 4 24 Agilent B1500 3 Setup Name Device Parameters Test Parameters Extended Setup Define New Test Open Definition of This Test Test Definition p 6 3 EasyEXPERT Application Test ues Test Definition 5600 Delete Definition of This Test Import Test Definition Export Test Definition
307. Agilent B2200A B2201A Agilent B2200A B2201A Agilent B1500A DUT B1S00A DUT Agilent EasyEXPERT p 3 51 1 0 5 pF 1 kHz 5 MHz
308. COMMON V Name IName CMU E Cp G Cp D Cs Rs Table 7 2 SINGLE Start DC 2 Measurement Setup M m Mode ir Direction Start Stop 25 SCUU 7 18 ZIE ZITO E H7 V OH SMU CMU 4 GUI C V SMU Mode I V Z 0 DOUBLE Stop CMU 1 mV 100 V 0H 25 V A 5 mV Agilent B1500 3 Step No of Step Frequency List F Name AC Level Mode Factor Hold Delay C V Sweep Step DC
309. DEFAULT EOI CR LF EOI LF EOI CR LF LF NONE AI DATY bo Pls 1 ms 0 Agilent B1500 3 6 27 GPIB IO Read List GPIB Address GPIB Values Delimiter 1 0 9 6 Length Actually Read Terminator DEFAULT EOI CR LFTEOI LEFT EOI CR LF LF NONE Timeout 23 s 1 ms 0 Read STB GPIB Address GPIB
310. 6 14 Agilent B1500 3 Figure 6 5 Run Pause Abort Step Break Inspect Test Contents Test Contents Test Contents Debugs Test Contents Run Test Contents Variable Inspector J Test Contents Toa panan Omm ri IE Mes Cope Ter some Dems tnt rete vom mtm a Local Variebias Defiti Rt 1 3 T Break point amp Paused A S Pause Pause Run Run
311. A 0 DA Overflow A 0 B 1gt A A B A B A 6 A 0 DA Overflow A 0 B log A A B A B Agilent B1500 3 8 11 mavg A B max A TaT vIe A QM EC B n n lt r ntr 1 rtn 1 r nx Nr 1 ntr E T ll 2r 1 IN N r lt n X rl Xn n A xj i A r B N A
312. No of Step Start Stop Step No of Step 2 1001 1 kHz 5 MHz 6 AC 10 mV 250 mV 1 mV Mode AUTO Factor Factor 1 1023 Mode PLC A D 1 50 Hz 20 ms 60 Hz 16 7 ms Factor Factor 1 100 Start 0 s 0 655 35 s 10 ms DC
313. 10 0 1 mVrms MFCMU OD e Agilent B1500 3 2 37 DC DC 0 25 1 mV 0 5 5 0 mV MFCMU MFCMU 1 5 m 3 m High Low DC DC 500 10 mA 100 Q 10 mA 300 Q 10 mA 1 kO 1 mA 3 KQ 1 mA 10 KQ 100 pA 30 KQ 100 pA 100 10 uA 300 kO 10 uA 50 Q e DC DC 0 2 10 mV MFCMU MFCMU 1 5 m 3 m Hgh Low DC 2 38 Agilen
314. Auto Analysis Setup p 5 19 Display Setup Display Setup p 5 22 Agilent B1500 3 5 3 Channel Definition Miscellaneous Variables I V Sweep Channel Setup m Unit V Name I Name Mode Function Add Delete Up Down Time Stamp Name Index Name SMU HZ E R V I H TE TE H VAR1 VARI VPULSE IPULSE
315. Id Vg Step 6 EasyEXPERT 100 Agilent Technologies 1 8 Agilent B1500 3 Step 6 mm nm Test Parameters 1 VgStart 0 V VgStep 0 2 V 2 VsubsStep 1 0 V
316. Local built in function read out function test parameter device parameter analysis parameter LTH E Local Test Definition 7 Test Contents Local Variable Definition Test Specification Agilent B1500 3 Test Output Figure 8 1 expression Figure 8 1 Monomia
317. e Gradient line 1 Tangent line e Regression line Agilent B1500 3 H Marker Normal line Gradient line Tangent line Auto Analysis Setup Enable Condition After 2 2 Condition DGM MAX DGM 0 01 x After IDGM MAX DGM
318. xl Guard Force Force Guard A Guard Force DUT Buffer Agilent B1500 3 3 47 RETE DUT Force Sense DUT 1 Force Guard 2
319. 4o o yii He Minimized Data Displays mlMES Tv Data Display Setup name Select All Restore Close i Data Display Keep Setup Tiling 4 20 Data Display Data Display Agilent B1500
320. C Program Files Agilent B1500 EasyEXPERT Utilities sleep exe sleep exe Test Definition Test Contents Local Variables Definition WAIT PassFail Return Value gt x CEFR List sleep exe ms 1x D f Value Value H 0 H sleep exe 1 sleep exe Test Definition Test Contents Miscellaneous 3 Command Execution Windows Command Execution Command Filename C Program Files Agilent B 1500 EasyEXPERT Utilities sleep exe Argument Write Type String x List Read Type
321. Open Input Agilent B1500 3 5 17 Apply User Function Analysis Function TA FON Function Setup nt A Function Setup V Sweep I V t Sampling C V Sweep Data Display Plot List Display Parameters Data Display 8 Data Display m Data Display Function Setup E Display Setup Graph X Parameters
322. 1 14 Agilent B1500 3 9 27 117010 B2200 4 B2200 7 5 3 EB 117011 EasyEXPERT 4 8 117012 120000 120001
323. Data Display Manage Data Display Data Display 3 OK Cancel Apply 4 Data Muri Setup name Up Down Select Al Minimize Close IR e UT TR BL US dei ALI
324. IV t4 No of Samples pj C IV t 4 p No of Samples 4 Vt Lin Log 4 B V t Base Hold Time 4 B LV Output Sequence 4 B IV t4 mterval 5 C IV t4 Hold Time C 4 TV tg Hold Time C D c 4 WV tg Hold Time C Advanced Setup Output Value after Measurement 4 B Advanced Setup
325. Interval x No of Samples Stop e Agilent B1500A Agilent B1500 3 7 17 C V Sweep WIA s C V Sweep i C V Sweep AC DC E m H ELET El C V Sweep 25 V SCUU MFCMU MFCMU DC SMU CMU SMU 1 100 V DC C V Sweep Sweep p 5 12 1 Channel Setup CMU V Name
326. SMU Name VAR2 Start Stop Start Step No of Step Step No of Step Compliance Pwr Comp WV OFF VAR1 VARU VAR Offset Ratio x VARI Unit VARI SMU Name VARI Offset Ratio Compliance Pwr Comp W OFF p 7 43
327. Sense1 Sense2 FRHigure 3 7 GSWU GSWU 2 CMUH DUT Guard CMUL DUT Guard SCUU IER SCUU Agilent B1500 3 3 27 SCUU GSWU 2 NOTE SCUU 1 10 SCUU Agilent N1301A 102 SCUU SCUU BNC
328. e U gt RRLCSIZSVN 1649SF G B2220A HEROS DUT IF 16494A B C 001 002 005 ser Compensation Data File Z B2200A B2201A Fog p 3 53 L E Extended Configuration Agilent B1500 3 4 51 Switch Setup EasyEXPERT 3 5 Switching Matrix Operation Panel Switching Matrix Operation Panel Switching Matrix Operation Panel Switching Matrix Agilent B2200A B2201A
329. lt 200 mQ gt 1015 Q e CMU 1 CMU 2 7 SMU 5 gt 10 kHz 10 gt 10 kHz 10 kHz Figure 2 6 500 2 CMU 5 SMU 7 CMU 10 SMU DC DC SMU Zero Check MFCMU CMUL nij DC CMU 01 25 1 mV CMU 100 pV m anb Agilent B1500
330. 3 C index AGILENT L C 8 10 Agilent B1500 3 integ A B isValid A lgt A log A A B n 1 a 0 n gt 1 a 1 n 2 Oty 96 5 i 2 an n A yi i A xi i B A B 1 C integ A B A B C A double NaN 1 0 B isValid A A B A 10
331. 42A 1uF lt 100 lt 1 05 lt 1 6A lt 0 7 O0 164 Is 2 0 A 035 Q 2 0 A Is lt 4 2 A Is GNDU 2 28 Agilent B1500 3 SMU 0 V 100 V MPSMU HRSMU 0 V x 200 V HPSMU 10fA 100 mA HRSMU ASU ft 100fA 100 mA HRSMU 1pA 100mA MPSMU 1pA 1A HPSMU RE SMU SMU 80 MHz 1 GHz 3 V m RF J arre ic
332. A B A A 1 1 B asin A A B A B A B 1 B A C at A B A B C A B C B C 1 B A n C A n 1 C up GS C n lt C lt n 1 nm C D at A B C A B C D
333. Condition After 2 2 Condition DGM MAX DGM 0 01 x After IDGM MAX DGM First Point Second Point 2 e X Y Coordinate X Y X Y e Data Condition Marker First Point 2
334. Force Sense 16442B 3 SMU HPSMU 2 1 2 1 4 2 1 6 3 1 8 4 QPIB Y MPSMU HRSMU 1 GPIB HRSMU HRSMU HPSMU MPSMU Agilent B1500A 1 4 HPSMU 5 6 HRSMU 7 8 MPSMU 9 MFCMU GPIB 1 3 9 6 CMU
335. Table 3 3 16495F 16495F 001 Triax f f x12 GNDU f f x1 Interlock f x1 16495F 002 Triax f x12 GNDU f x1 Interlock f x1 16495G 16495G 001 Triax f f x24 GNDU f f x1 Interlock f x1 16495G 002 Triax f x24 GNDU f x1 Interlock f x1 16495H 16495H 001 Triax f f x6 Coax f f x6 GNDU x1 Interlock f x1 16495H 002 Triax f x6 Coax f x6 GNDU f x1 Interlock f x1 16495J 16495J 001 Triax f f x8 Coax f f x4 GNDU f f x1 Interlock f x1 16495J 002 Triax f x8 Coax f x4 GNDU f x1 Interlock f x1 16495K 16495SK 001 Agilent B1500 3 Table 3 4 B1500A Agilent 16493 3m 1 5m Intlk Interlock Agilent 16493L GNDU 3m 1 5 m GNDU GNDU Agilent 16493K E 3m 1 5 Force 16495F 1 12 6 SMU 1649SH
336. 1 6 3 Sense 16495 1 8 4 Agilent 16494A 3 m 1 5 m SMU Force 16495H 1 6 16495 1 8 Agilent N1300A CMU 3m 1 5 m AUGE Hcur Hpot CMU 16495H 7 12 LcurLpot 16495J 9 12 a Agilent E5250A Agilent 4142B DC IX Agilent 16494B b 4 Hcur Hpot Lcur Lpot BNC 7 RZA RATZ Agilent 1250 2405 2 l x4
337. 3 7 39 SMU SMU SMU 0 5 ms 2s 0 1 ms 5ms 5s 0 1 ms gt 2ms lt 100 ms gt 10 ms gt 100 ms 1nA zyu
338. ADC High Resolution ADC ADC RS ADC ip zx 5 i i E E M Agilent B1500 3 Table 7 4 ADC ADC ADC ON OFF 7 41 Table 7 4 SMU
339. B1500A 6 130 mm 3 70 mm 0 5 12 mm d CAUTION B1500A AC 3 AC
340. Current mA 100 bs MPSMU When power compliance is not set lt For the sweep 0 V to 20 V For the sweep 0 V to 40 V For the sweep 0 V to 100 V 100 Voltage V Voltage SMU 0V SMU Agilent B1500
341. HRSMU ASU ASU ASU ASU SMU AUX SMU ASU Force AUX HRSMU AUX In HRSMU ASU Force 4 50 Agilent B1500 3 Save as Hardware Profile CMU Compensation Close EasyEXPERT Configuration 7 Extended Configuration Configuration gt FY Switching Matrix T Extended Configuration Configuration Switching Matrix B2201A Save
342. MFCMU 4 4 Lcur Lpot Hpot Hcur Hcur Hpot DUT Lcur Lpot 4 Agilent B1500 3 2 9 MFCMU 1 SMU NET GPB 7 8 GPIB oem AC 10 LAN RJ45 11 USB USB 2
343. Status Byte Timeout ARATI ho 25sk0 AvM 1 ms 0 GP IB Control GPIB e Group Execution Trigger GPIB Address GPIB Timeout 231s 1 ms 0 e Device Clear GPIB Address GPIB Timeout 23 s 1 ms 0 6 28 Agilent B1500 3 1 GPIB I O 00 To Local GPIB Address GPIB Timeout
344. lt SMU
345. 0 s 0 655 35 s 10 ms Agilent B1500 3 7 5 IV Sweep Delay 0 65 535 s 100 us Output Voltage Th hola time or Current Td delay time A N Pumber of steps Stop Value T N Single Sweep 0 Em Start Value 1 lime Trigger Completion Th bold time Output Voltage Td delay time er Cen N number of steps Td Stop N EX NH1 Value T Double Sweep LThTTd s 45 0 1 Start Value i Time Trigger Completion VAR2 Start fi Ze H H VAR1 KA VAR2 VARI Start Stop fi VAR
346. 1 0 Label 2 Selected 1 0 Label Selected 1 0 Agilent B1500 3 6 31 ui E Command Execution Command Execution
347. 3 4 27 File NOTE EasyEXPERT 3 5 Data Display Switch to Append Overwrite Mode Update Test Result Delete Test Result Close This Display Close All Displays Save Image As Page Setup Print Preview Print Close Figure 4 3 BMP EMF GIF PNG Print preview Figure 4 4 Figure 4 3
348. Interlock SMU PRECAUTIONS POUR COMMOTION A HAUTE TENSION Une tension dangereuse max pour HPSMU 200 Vdc max pour MPSMU HRSMU 100 Vdc manant du dispositif Agilent B 1500 peut tre sortie aux bornes de force d appareil de protection ou de d tection Les pr cautions suivantes doivent tre obser es contre commotion lectrique accidentelle e Mettre la terre le dispositif Agilent B1500 au moyen du c ble d alimentation tripolair e Encasde hors service du dispositif d essai FIXTURE Agilent 16442 connecter les bornes de verrouillage Interlock de fa on ce que soit ouverte lorsque le couvercle de la boite de blindage est ouvert e Essayer p riodiquement le fonctionnement normal de verrouillage e Avant de toucher la partie connexion partir des bornes de force d appareil de protection et de d tection mettre hors tension le dispositif Agilent B1500 Et en cas de condensateurs connect s au circuit de mesure d charger ces condensateurs Lorsque l alimentation n est pas mise hors tension les 4 instructions suivantes doivent tre ex cut es e Finir la m sure en appuyant sur la touche Stop
349. Start Procedure 4 22 Agilent B1500 3 EasyEXPERT Iteration Procedure Final Procedure Arguments Automatically fill in Device ID 7 7 3 Procedure return condition Feyz AID device ID Device ID gevjce_ Start Iteration 7 Figure 4 2 Figure 4 2 EasyEXPERT Response input to EasyEXPERT XML format data Response lt Break gt status lt Break
350. ASU HRSMU c HRSMU d HPSMU 2 36 Agilent B1500 3 MFCMU 19 MFCMU Cp G Cp D Cp Q Cp Rs Cs Rs Cs D Cs Q Lp G Lp D Lp Q Lp Rs Ls Rs Ls D Ls Q R X G B Z 0 Y 0 Auto Fixed 4 4 BNC female 1 5 gt m 3 m BI500A 1 kHz 5 MHz E 1 mHz 0 008 96 10 mVrms 250 mVrms 1 mVrms 10 0 1 mVrms MFCMU 15 0 1 mVrms MFCMU 1 5 m 3 m 50 Q
351. Agilent 1250 0080 1 Hc Hp Lc Lp Agilent B2200 AUX Input 13 CMH MFCMU Hc Hp 14 CML MFCMU Lc Lp Agilent B2200 Agilent B2220A Agilent 16494A Agilent 16494B C Agilent 8121 1191 DUT HET Figure 3 19 Y Tn
352. B1500 Turn on again to detect search monitor channel SCUU B1500 Agilent B1500 3 603 610 620 621 622 630 631 632 2 me meg Sweep and pulse channels must be different MM5 Quasi pulse source channel must be set BDV TGP specified incorrect I O port TGP Ext Trig In Ext Trig Out Specify trigger input port for PAX WSX PAX WSX
353. B C D E A B string A A B Agilent B1500 3 8 13 substring A B C swmToModule A tan A value A A B C B 0 C B C G D D substring AGILENT 1 1 A B C D Agilent B2200 A B swmToModule A A 1 14 B A B t an A A B
354. ES 90SD2 AD es 9 9 UN AS ALIM AMA ELS EL de d 9 10 AME IEEE SA 9 10 9 10 WELEDA YZZ AEAEE EIE I sQQQ21221 2 E 9 11 MFEGMU 8 9 11 FSER SEA RAP a e a aaa a A 9 12 9 12 ASU HRSMU p TEAM 9 12 OT TT TT a MORET 9 12 B1500A 9 13 AA 9 14 SE TF TI ECE SR NN i 9 14 7 9 15 Agilent EasyEXPERT 5517 Verc oq bur CGU GOD 9 15 Agilent FLEX aS EL 9 36 oo evi EL Re 9 47 ECAR AS ZTA pucr aco Ca exe 9 54 Agilent B1500 3 Agilent B1500 3 2 Agilent B1500A Agilent B1500A USB USB
355. IMeasurement Setup V Name Model paral Name para2 Name Direction Start Stop Step No of Step Frequency List F Name AC Level Add Delete Up 5 14 MFCMU A D 1H F MFCMU MEFCMU DC DC MEFCMU 1 2 4 1 Cp G F S Cp D F Cs Rs F Z Th Q 1 C Z 2 G D R Th JW Start
356. Next How should dates and currency appear Ilive closest to this region Japan Itype mostly in this language Japanese e usethistype of keyboard US 16444A 001 USB US Next What time zone are you in Osaka Sapporo Tokyo Next The End User License Agreement Yes I accept Next Help protect your PC Not right now Next o What s your computer s name Next What s your Administrator password Next Agilent B1500 3 3 7 NOTE RETE 14 Checking your internet connectivity Skip 15 Thank you Finish Windows
357. ui OPEN Reference Capacitance Conductance 0 e SHORT Reference Inductance Resistance 0 LOAD Reference Inductance Resistance 4 46 Agilent B1500 3 Model Identification Line Frequency EasyEXPERT Rev Firmware Rev Main Frame Diagnosis Select All Unselect All EasyEXPERT Configuration 7 Configuration Configuration 7 Config 3 Main Frame Modules Switching Matrix Event Log ASU Main Frame Main Frame E Gm FB ID B1500A 50 Hz 60 Hz EasyEXPERT
358. HPSMU ADC Table 2 17 ADC Table 2 18 2 V Ic x 20 W 20 V Ic x 20 W 40 V Ic x 40 W 100 V Ic x 100 W 200 V Ic x 200 W a Ic P Vcs 20V 10 x 20 W 20V Vcx 40V Io x 40W 40 V lt Vc 100 V Io x 100 W 100 V lt Vc lt 200 V Io x 200 W 2 32 a Vc b Io Agilent B1500 3 Table 2 17 HPSMU mV mV 2 V 100 uV 2yV 0 018 0 4 0 01 0 14 1A 20 V 1 mV 20 uV 0 018 3 0 009 0 9 1A 40
359. MPRA H NR CM E Agilent Technologies B1500 Agilent B1500 Agilent B1500 Agilent B1500 EasyEXPERT
360. My Favorite Setup Cancel Preset Group Add New Preset Group Rename This Preset Group Duplicate This Preset Group Delete This Preset Group Import Preset Group Export This Preset Group Organize Preset Group Rename Duplicate Delete 4 12 7 Add Preset Group Rename Preset Group Duplicate Preset Group Preset Group Import d
361. SMU Range Setup SMU Range Setup YV Sweep TV t Sampling Measurement Setup Ei r Range SMU p 7 33 Unit SMU Name Mode Range Range Change Rule and Rate p 7 30 Nb Range Change Rule BY FULL RANGE GO UP AHEAD
362. V A 0 to 100 V HRSMU MPSMU 200 V HPSMU 0 to 40 1 A HRSMU MPSMU 1 A HPSMU Base Output Sequence SIMULTANEOUS SEQUENTIAL A V 0 to 40 1 A HRSMU MPSMU 1 A HPSMU 0 to 100 V HRSMU MPSMU 200 V HPSMU LET n hui j ip IET SMU Range Setup p 5 23 n AID ADC and Integration Time Setup p 5 22 Advanced Setup p 525 Agilent B1500 3 5 11 Setup Name Channel Setup Measurement Setup Function Setup Auto Analysis Setup Display Setup NOTE C V Sweep C V
363. 16495H Triax BNC B1500A X Table 3 4 DUT p 3 30 NOTE Force DC Sense Force Force Sense Force Sense
364. 231s 1 ms 0 Local LockOut GPIB Address GPIB Timeout AR DATY po Bls 1 ms 0 Agilent B2200A GPIB 22 Write Value ROUT SYMB CHAN 0 1 Gate B2200A 1 Gate e Write Value Address 22 Format ROUT SYMB CHAN 0 1 2 Value1 0 Value2 1 Value3 Gate Value4 Terminator LF EOI LIC 0 Uk 2k 3 Format 7 Value1 Value2 Value3 Value4 Agilent B1500 3 6 29 2 GPIB I O 1
365. 9 17 G a 105043 A 8 6 105044 4 8 C 105045 A B C 105046 ADC B C 105047 ADC A D C 105048 ADC 8 6 105049 ADC A C 105050 ADC 4
366. A B A A 0 B value A A B 8 14 Agilent B1500 3 NOTE MI MX MY oMYn CX CY CYn WREOGSGE esq 1 A A QLIX 1 8 1 1 2 X Y
367. Hold B 0 655 35s 10 ms Delay 0 65 535 s 0 1 ms 5 6 Agilent B1500 3 Constant SMU Pulse Sweep status Range ADC Integ Advanced I V Sweep Unit SMU V Name I Name Mode V VPULSE IPULSE Source Compliance SMU
368. Pulse base and peak must be same polarity PI PWI Start and stop must be same polarity WV W WSV WSI WNX 0 Command input buffer is full Agilent B1500 25 This command is not allowed to this channel Cannot use failed module RCV No module for the specified channel
369. SMU p 7 40 Unit SMU Period 5 ms 5s 0 1 ms Width 0 5 ms 2 s 0 1 ms Base Period Width Period gt Width 2 ms lt 100 ms e Period gt Width 10 ms gt 100 ms SMU Range Setup p 5 23 AD ADC and Integration Time Setup 7 p 5 22
370. Table 3 7 Agilent 1232 1419C 6 3101 0302 3101 3241 1450 0641 LED Vr 2 1 V Ip 10 mA 8150 5680 GNDU DUT 1250 2457 BRE 8121 1189 8150 2639 SMU DUT 1250 2457 8121 1191 MFCMU DUT 1250 0118 BNC 72 8120 0367 500 8150 0447 Agilent B1500 3 3 31 A ERE FIF Agilent B1500A Interlock Figure 3 9 Interlock
371. variable definition variable lt definition gt BLOCK END BLOCK BLOCK END BLOCK e ON ERROR ON ERROR END BLOCK FINALLY ON ERROR FINALLY FINALLY FINALLY END BLOCK BLOCK END BLOCK S FINALLY ERROR ON ERROR
372. 3 Figure 2 6 SMU lt 10 kHz Signal level output V Setting value V x a 1 02 1 0 98 0 96 0 94 0 92 0 9 0 88 0 86 0 84 0 82 0 8 1000 10000 Frequency Hz Agilent B1500 3 100000 2 45 ASU NOTE NOTE ASU AUX 100 V AUX AJj AUX 100 V AUX 42V AUX N NEI 0 5 A AUX Force ASU 3 dB lt 30 MHz AUX ASU HRSMU ASU HRSMU ASU HRSMU ASU ASU SMU 2 46 Agilent B1500
373. 4 B 4 B A 4 4 File Name Format 0 Setup Name 1 Date Time stamp 2 Count 3 Device ID File Name Format
374. Agilent B1500 3 3 51 RETE Agilent B2200A B2201A T Figure 3 19 CI C2H C2L C3H C3L CxH MFCMU Hc Hp CxL Lc Lp Agilent B2220A C3x C3x C2x C3x 621 63 p 3 53 lt
375. GPIB Agilent B1500A GPIB 17 GPIB 1 EasyEXPERT EasyEXPERT a EasyEXPERT File Exit b Start EasyEXPERT x 2 All Programs gt Agilent IO Libraries Suite gt Agilent Connection Expert Agilent Connection Expert 7 3 Instrument T O on this PC GPIBO Change Properties z Agilent 82350 PCI GPIB Interface GPIBO 4 GPIB Address 3 10 Agilent B1500 3 NOTE 5 Auto discover instruments connected to this interface 6 Agilent 82350 PCI GPIB Interface GPIBO OK LS 7 Reboot Required
376. 0 30 gt Database Database EasyEXPERT C MEasyEXPERTMatabase BEasyEXPERT 7 60 Agilent B1500 3 Agilent BIS00A EasyEXPERT Classic Test user function analysis function Application Test test execution flow
377. A B A B A B f1oor A A B A B A Function Setup Display Setup B getNumericData A 1 B A Function Setup Display Setup B getVectorData A A B A B 0
378. Agilent EasyEXPERT GUI GUI Agilent B1500 Agilent B1500 NOTE KIY lt vA MERAT 2 Agilent Technologies thttp www home agilent com Select a Country or Area Asia Pacific Japan No Submit gt
379. Agilent EasyEXPERT Agilent B1500A GPIB B1500A EasyEXPERT GPIB Agilent B1500A HPSMU 200 V MPSMU HRSMU 100 V Force Guard Sense 1 2 3 B1500A 16442A A O3 e BRUT 75 SEC Interlock Force Guard X Sense B1500A a stop b High Voltage 4 c
380. E SMU 10 it SMU 11258 VAR2 VAR gt Ta 1 1 1001 0 655 35 s 10 ms 0 65 535 s 100 us 2 48 Agilent B1500 3
381. Internal variable is not allowed Lz Rz ACH VAR VAR Channel output switch must be ON ON Compliance must be set Interlock circuit must be closed 42 V 0V Cannot enable channel 5 ON cm tL Cannot disable channel OFF OFF 42 V CL
382. Ni Figure 3 19 Agilent B1500A MFCMU Perform open calibration at this plane Short calibration is optional Agilent 16494F or 16048D E C2H C3H for CMH path C2L C3L for CML path Low High Agilent B2220A C2H C2L fixed Case 1 Probe card interface to o j CMH 1559 n Agilent 16494A C C1 fixed Probe card etc C3H C3L need update 5 E m E Case 2 Connector plate olllalllallla GA PESO oOOXAUUUEURUT lo0co9090909 Agilent B2200A with B2210A or Agilent 16494A B C1 fixed NN Agilent B2201A with B2211A L gt Extended triaxial B2210A outputs or cables B2211A outputs with connector plate C2H C2L need update o00 o00 Extended coaxial cables and positioners C3H C3L need update 3 52 Agilent B1500 3 NOTE Agilent B2200A B22014 1
383. gt amp gt B1500A Agilent B1500A mr 9 2 Agilent B1500 3 NOTE Agilent B1500A p 9 15 SCUU ASU GPIB Windows p 3 6 Agilent EasyEXPERT B1500A p 9 13 B1500A
384. 1 0 655 35 10 Interval lt 2 Io Timel Source 90 3 Ufb 0 1 0 1 B 3 Y f Agilent B1500 3 Constants Range ADC Integ Advanced Base Hold Time Unit V Name I Name Mode Base Source Compliance 4 I V t Sampling Base Source 0 655 35 10 SMU HH V
385. 16 PLC 3577 gt Measure as E Pen A D FH Agilent B1500 3 AU 4 AE 1 2c DH Name 7 27 Table 7 3 1nA 10 pA H
386. Agilent B1500 3 SMUCMU F echo RS NSOUDS Cuts bi ctl s tees obse 7 29 ES ASU 7 31 SMU 7 33 ndi ls PAE A 7 33 EN MEE NIRE PIE 7 34 5 55 7 7 7 35 7 35 I RR EE SO TE RT eod 7 35 7 36 SMU 7947 B UC S 7 37 MEPECEHAMBL eee o I 7 31 LN 4794 2 EE EE RN RE itt 7 38 pud d Ecc IE EIN 7 39 SM 7 40 S2P2S 40 SMU AAEE E 7 41 TEES m orb nnm e MIS tees M ra E a Liu LE 7 41 LET 7 43 gt SE S OD EAE nete oed tede ee EE 7 43 do Pau eue beoe Cd rel e teta 7 44 E E AE 7 45 SM DD 7 46 b ac BEBE cec Ls e b EN OE ERRORS S 7 41 HEIZSUS 5 PB en rud CECI CE CRUS 7 48 TIRHIRAES Men t te de fe C o tB dnte edere qoid eru fe Deed ee 7 49 uc MURUS Eu EU E 7 51 Prober Control xi Ies eb UE NEN 7 51 SetupFileConverterexe ue Ree RR eR e Rege 7 52 Agilent B1500 3 sleepiexe sci ode CREE CES p n des Res 7 53 NSD 7 54 DURO FZ EasyEXPERT ceci oce Po e eoe Vx ECCO 7 55 D
387. Incorrect ST execution ST END ST ST END Incorrect END execution ST END END Agilent B1500 3 9 37 lt gt 102 170 171 200 201 202 203 204 9 38 Incorrect command for program memory Incorrect usage of internal variable HC p Cu ED pr 0 99 Iz REM VAR
388. Public Allow other users to access this workspace A 3 2 gt Public Allow other users to access this workspace x 3 OK Sitep 5 Prev 1 6 Agilent B1500 3 Step 4 Me Semiconductor Device Analyzer with Faeyt XPERT Software Piease choose Ihe target Workspace below abono i a re a eed vun pereda Tt iechodes test setups test M C a starting a session in rise errem pg i Gem 3 Open and wse public Workspace that has been previously pullished Create a
389. m 1 2 am m 1 2 Agilent B1500 3 8 17 Y Yn WEAR Sess 1 2 Y 2 Y Y yi tA X y57y1 06 Y Y 101 Ym m Y m 1 2 Qm Z4 v m 1 2 1 2 Yn 1 8 Yn y4 04 x 1271 04 0 pum Yn Y 10Yn Ym m Yn m 1 2 i m 1
390. 5 20 Agilent B1500 3 Auto Analysis Setup Regression line First Point Second Point 2 X Y Coordinate H R50 X Y X Y e Data Condition Marker Agilent B1500 3 5 21 Display Setup Display Setup V Sweep I V t Sampling C V Sweep Display Setup Test Definition 7 Define own Output Parameters X Y Graph Data Display
391. B2200A B2201A No Compensation Select gt B2200A E En DH T User Compensation Data File 7 Agilent B2200A B2201A e NoCompensaton B H p 3 50 e Select B2200A B2201A Agilent 16495F G Agilent B2220A DUT I F Cable B2200A H EP
392. SCUU ASU SMU M MU MU MU SMU EasyEXPERT S SMU S S Agilent B1500 3 Figure 7 1 I V Sweep I V Sweep TV Sweep VARI VARI VAR2 nt VAR1 Mu qd Ex VAR _ VART i VV
393. UP AND DOWN AHEAD BY FULL RANGE EE GO UP AHEAD UP AND DOWN AHBAD Rate 11 100 x Rate 100 x Rate 1000 UP AND DOWN AHEAD Up Down Agilent B1500 3 5 23 A D Converter Integration Time ADC and Integration Time Setup ADC and Integration Time Setup YV Sweep TV t Sampling Measurement Setup ADC Integ A D ADC
394. Advanced Options SHORT Reference 0 4 44 Agilent B1500 3 Load Correction Phase Compensation Frequency EasyEXPERT Calibration Measure LOAD Reference Measure
395. Delete Up Down e Vdata VDATA 1 Local Variables Definition VDATA 2 Assign to external variable 3 External Variable Setup Add tds 4 External Variable C VDATA 5 Measurement data Vdata 6 Cose Agilent B1500 3 6 17 Numeric Variable Local Variable Definition Local Variable Definition Local Variables Definition
396. Help Application Test Classic Test EasyEXPERT GUI EasyEXPERT 4 Import Test Setup Export Test Setup Close Workspace Workspace configurator H Exit EasyEXPERT 3 Show Data Display Data Display p 4 26 Manage Data Display Data Display Data Display Manager p 4 20 Default Data Display Properties Data Display Data Display Properties p
397. QS Data Display 10 2 Save Image As Print wo uw LE view Mamer Liae imaw lipide Tat Aau th M E uE I3 mam Print x D 3 DataCsspry Onty 5 Data to print ra sF s Mi opened Dac Duplay Staing 3 Adjest To Nermal Sus Co PSP m Bt To Pape lt Keep Aspect fo m ee bmp emf gif or png format Agilent B1500
398. 16495F 002 16495G 24x Triaxial Interlock GNDU 16495G 001 16495G 002 16495H 6xTrixial 6x Coaxial Interlock GNDU 16495H 0001 16495H 002 16495 8xTriaial 4x Coaxial Interlock GNDU 16495J 001 A AAA 16495J 002 16495K 1649SK 001 2 58 Agilent B1500 3 WARNING N xS m Agilent B1500A Agilent B2200A B2201A c p 3 6
399. 4 20 Data Display Properties 4 21 Repeat Measurement Setup 4 22 Application Test s eod p be gp I e ERE Es 4 24 Data Display ZA 4b Isis pon Diebus e bb 4 26 Data Display 741 FIO GUI 4 27 ZN D P E E DEI 4 34 DA SUPE C c HP DL 4 36 Display Set p vote EBRBIREA ER ER LU 4 37 Graph Properties aorin SE 4 38 List Display Properties 4 38 Agilent B1500 3 Preyrew oT RW 4 39 Preview RT DO GUI o ie eem eee EV tunes 4 39 Preview Set ngs ie stereo tsbuptriteetreyeR p eng rbbrqpxceenge 4 41 Calibration 4 42 SMU Calibration on SE RE 4 42 SMU Zefo Cancel in i EE EE EE 4 43 CMU Calibration o ER PEU RED bx EE 4 44 Configuration 4 47 Main Frame neea UR P E AA RUE 4 47 Modules 4 48 Switching Matrix esrb HERPES ERU HERR ER 4 49 Event Eog uisa DA 4 50 ASU 2 LL E u ee a e eee tt set met eo te 4 50 Extended Configuration 4 51 Switching Matrix Operation Panel 4 52 Quick Test oor RR Te ehe REPLIES 4 55 Organize Preset GrouD 4 57 INV SWEEP AS Ve HEP SS 5 3 Channel Setup teet eR
400. A B n A B A a A5 A B5 B n 1 A s Apa1 Ag IBS B 1 lt n lt N A a An Ay 1 By By 1 n N SS Ai n A n A B n B N il MS 1 C diff A B A B C Agilent B1500 3 8 9 dim1Size A dim2Size A exp A floor A getNumericData A getVectorData A index A B A B dimlSize A A B A B dim2Size A A B A e 4 B B exp A
401. 3 nm ttt Agilent EasyEXPERT Generic Struct
402. 3 22 Agilent B1500 3 ASU B1500A NOTE AUX 1 ASU ASU Agilent NI254A 108 16493M D sub N1300A CMU 16048D E BNC 16495K ASU ASU D sub D sub ASU Force ASU CMU cur AUX In Figure 3 5 MEFCMU N1300A CMU e Agilent 4284A LCR Agilent 16048D E lt CMU cur AUX In BNC CMU pot BNC T pom
403. 42 V lt 0 SFP SPI DUT DUT 3 44 Agilent B1500 3 BE SMU 20
404. Desktop EasyEXPERT Agilent B1500 3 7 59 File Option Start EasyEXPERT Online Offline Folder Path EasyEXPERT Start EasyEXPERT Start EasyEXPERT 7 Exit Start EasyEXPERT Execution Mode Execution Mode Database Database Desktop EasyEXPERT Execution Mode Execution Mode GPIB Interface Name GPIB gpibO gpib100 GPIB Address B1500A GPIB
405. EF a apes 2 11 GNDU RU aT 2 11 1V TEE ESA Ee ie Iri E EA AA 2 12 B1510A HPSMU oona aaa 2 13 BIST A MPSMEL La ooon cb CU eb BETON d 2 16 BISITACHBSNMU dp baise Sota dnce rate ie ett esu 2 19 B1520A MFCMU 2 22 ERI 2 24 nulo 2 24 PALETTE EA RR RR RR 2 26 Agilent EasyEXPERT 2 48 Blk ertet cce nud tette LR M E L E L Ed 2 54 020 2 55 A TTE PERENNE a AN 3 2 a aaa aa a a e 3 3 PAE E MN 3 3 3 3 Agilent B1500 3 BEI OB SEDES Los cL cis s beet vite 3 3 SS 3 4 3 4 WIABROREITEGEBH Re hcm er quies 3 6 lle 3 6 DAE v RD e LAITI odit eda lese vare RUE RICE CRUS AS 3 7 34 dpa Mee ERE ENDE IET 3 9 GPIB da datu Ed Ge REGE Edad Gi 3 10 NE SR SE 3 11 EVa uut LLLI ER 3 12 3 13 TEOE RH tut set NG 3 13 ETATE ha gant ibouste tacto Quite uaa be oboe ncs ente 3 16 TOIDH TOI eis Lou Eu oh AE aos rcu tef id aei edo C Cdp dors 3 17 TE A E OE EE 3 19
406. Plug CEE 7 Standard Sheet VII 250 V 10 A Cable 8120 1689 Plug SEV Type 12 250 V 10 A Cable 8120 2104 Plug SR 107 2 D 250V 10A e Cable 8120 2956 Plug IEC 83 B1 250 V 10A Cable 8120 4211 Plug JIS C 8303 125 V 12A Cable 8120 4753 Plug Argentine Resolution 63 Annex IV 250 V 10A e Cable 8120 6870 Plug CEI 23 16 250 V 10A Cable 8120 6978 Plug GB 1002 250 V 10A Cable 8120 8376 Agilent B1500 3 3 5 mm B1500A 1 B1500A p 3 6 2 B1500A AC p 3 7 3 B1S00A p 3 3
407. USB USB 12 Ext Trig BNC 13 Digital I O DSUB25 14 Interlock B1500A SMU 42 V Imnterlock 16442B P 3 32
408. e Vergewissern Sie sich dab die Hochspannungswarnlampe erloschen ist e Offnen Sie den Deckel der MeBfassung Agilent 16442 die Verriegelungsklemme Interlock ffnen e Entladen Sie alle an SMUs angeschlossenen Kondensatoren falls vorhanden Informieren Sie Personen in unmittelbarer Nahe der Gerate Agilent B1500 ber die Gef hrlichkeit der bestehenden Hochspannung und sichern Sie den Zugang zum Pr fplatz zum Schutz Dritter Agilent B1500 Microsoft Windows um Professional EasyEXPERT 1 Agilent B1500 Agilent EasyEXPERT Windows XP WC Agilent B1500 Windows it SB Agilent EasyEXPBRT Windows Agilent Technologies 258 E Windows XP
409. 11 5 mA 500 nA 100 V 100 mA 0x IIl 20 mA S pA 100 V 20 mA lt IIl lt 50 mA S nA 40 V 50 mA lt IIl 100 mA S nA 20 V Agilent B1500 3 2 17 Table 2 7 MPSMU ADC ADC 0 5 V 0 lt IVI lt 0 55 V 25 uV 0 5 uV 2V 0x IVI lt 22V 100 uV 2 uV 5V 0 lt IVI lt 5 5 V 250 uV 5 uV 20 V 0 lt IVI lt 22V 1 mV 20 uV 40 V 0 lt IVI 44 V 2mV 40 uV 100 V 0x IVI 100 V 5mV 100 uV Table 2 8 MPSMU l ADC ADC 1 nA 0 lt IIl 1 15 nA 50 fA 10 fA 10 nA 0x IIl 11 5 nA 500 fA 10 fA 100 nA 0 lt Ill 115nA 5pA 100 fA 1 uA 0 lt Ill 1 15 nA 50pA 1 pA 10 nA 0 lt I lt 11 5 uA 500 pA 10 pA 100 pA 0 lt M lt 115 pA 5nA 100 pA 1 mA 0 lt NM lt 1 15 mA 50nA 1 nA 10 mA 0 lt Ill 11 5 mA 500 nA 10 nA 100 mA 0 lt IIl 100 mA 5 uA 100 nA a 2 18 Agilent B1500 3 Figure
410. 4 DUT Heur Hpot Leur Lpot DUT Hcur Hpot Lcur Lpot Figure 3 18 3 20 Agilent B1500 3 B1500A 42 V A Interlock 42 V 16442B 1 16493 Interlock 16495F G H BNC 1
411. CMU NI NI Agilent B1500 3 9 21 109021 109022 109031 109032 110001 111001 111002 111003 111004 111005 111006 111007 111008 111011 111012 111013 111014 111015 111021 111022 112001 112002 9 22 CMU CMU CMU CMU A 4 4 A 8
412. Figure 3 9 4 Interlock 4 5 W 4 6 C LED Figure 3 9 Agilent B1500A Interlock 42 V 42 V 42 LED Figure 3 10 LED Agilent 1450 0641 6 k gt gt Units mm 00 189 epouy Agilent B1500 3 3 33 Figure 3 11 Figure 3 12 Agilent 3101 0302 N A Y S y y e o 6 35 59 4 S X PE E 3 1 S Y EF el gt gm 9 gt NC gt 3 d NO T Y CO COM Y ad ls 222 i l 27 8 Low Units mm 37 8 Agilent 3101 3241 A 10 2 4 3 Y 27 5 10 9
413. OFF Agilent B1500 3 205 206 210 211 212 213 214 217 220 mee meg DZ must be sent before RZ pg Epi RZ DZ 0V H Do not specify the channel recovered by RZ DZ RZ eq TM RZ RZ Ext trigger could not start measurement TM1 must be sent to use GET GPIB GET HP BASIC TRIGGER TM1 Compliance must be set correctly DV DI PV PI PWV PWI TDV TDI LSV LSI LSSV LSSI BSV BSI BSSV BSSI
414. Stop Step OSC 250 mV 1 mV 10 mV Agilent B1500 3 C V Sweep Down Integration Time MEFCMU A D Mode A D AUTO PLC Factor Mode Factor p 7 19 Timing p 7 43 Hold
415. Add Delete Up Down Time Stamp Name Index Name Agilent B1500 MFCMU SMU MFCMU SMU SMU SMU V 1 COMMON 7 1 3 5 13 C V Signal Source C V Sweep
416. Afia OVI CIERRE O TWO db 2 fus mEZx3ELEX3d alli ZH WARNING CAUTION GI EF gt IA a 2 S
417. B1500 BNC 16442B 16442B 010 1 5m 4 16442B 011 3 0m 4 16442B 800 16442B 801 0 1 inch 10 16442B 802 0 075 inch 10 16442B 803 0 05 inch 10 16442B 810 10 16442B 811 6 16442B 812 6 16442B 813 6 16442B 814 6 16442B 821 TO 4 16442B 822 DIP 18 16442B 823 28 DP 16442B 890 2 56 Agilent B1500 3
418. CMU SMU This command is not available for SMU CMU SMU CMU Use SSP instead of CN for SCUU modules SMU CMU SCUU CN SSP Turn on again to detect source channel SCUU B1500 Turn on again to detect synchronous channel SCUU B1500 Turn on again to detect measurement channel SCUU B1500 Turn on again to detect search source SCUU B1500 Turn on again to detect search sync source SCUU
419. F G S Cp F D Cp F Q Cp F Rp Q p 2 X RI rh F Rs O p A2 Dp lg amp F Cs F D Q Lp G S Lp H D Lp 0 Lp H Rp Q Ls H Rs Q Ls D Ls Q Agilent B1500 3 2 23 Agilent B1500A
420. Force Sense CMU AUX Force Sense 4 LCR ASU 2 ASU CMU pot CMU cur Hpot Hcur ASU CMU pot CMU cur Lpot Lcur 4 2 ASU CMU Return 4 DUT p 7 22 Figure 7 13 p 7 24 Agilent B1500 3 7 31 ASU Figure 7 15 ASU Setup 1 AUX Off SMU input to ASU output Force From SMU Setup 2 AUX On CMU AUX input to ASU output CMU cur AUX In Circuit common C CMU Return NOTE ASU ASU Agilent B1500A ASU
421. HRSMU gt 1 5 7 X 3 5 HRSMU 6 7 MPSMU Xx 2 8 MECMU X 1 1 phe 10 Table 3 1 UE 1 4 2 8 Figure 3 1 b 1 1
422. Rcgc LAN Base TOT 5 Iden 1 Agilent B1500 3 1 p 7 16 7 13 IV t Sampling I V t Sampling GUI I V t Sampling p 5 8 1 Channel Setup 1 SMU SMU Mode V 2 Measurement Setup Linear Log Interval No of Samples Total Sampling Time Output Sequence 7 14 Sampling Parameter SMU KM
423. a 1 b B F A E L B D A C L Figure 3 20 C2H C2L C3H C3L GUARD C GROUND E GROUND F GUARD D Insulator FORCE or SENSE A PM FORCE or SENSE B Agilent B1500 3 3 55 Bx EL NW c Uu PN RATTIA Agilent B1500A ES Agilent B1500A
424. 2 MECMU 3 Table 3 11 Figure 3 20 MFCMU 4 Figure 3 19 C3H MFCMU R L C 5 CaL MFCMU R L C ft 6 a C2H MFCMU R L C b C2L MFCMU R L C Table 3 11 R L C R 1 kHz 1 MHz A B L SERIES 5 C PARALLEL A C
425. 4 A 5 B A 4 4 4 4 4 4 Jus 4 d 4 0 Agilent B1500 3 112003 112004 112005 112006 112007 112008 112011 112012 112021 112022 112051 112052 112053 112054 112055 112056
426. 68 nS 100 pF lt 63 uS 0 10 620 nS 1 nF lt 628 uS 0 10 96 7 100 kHz 10 pF lt 628 nS 0 18 96 11 nS 100 pF lt 6 nS 0 11 66 nS 1 nF lt 63 uS 0 10 619 nS 10 nF lt 628 uS 0 10 7 nuS 10 kHz 100 pF lt 628 nS 0 18 96 11 nS 1 nF lt 6 nS 0 11 66 nS 10 nF lt 63 uS 0 10 619 nS 100 nF lt 628 uS 0 10 96 7 nuS 1 kHz 100 pF 63 nS 0 92 6nS 1 nF lt 628 nS 0 18 96 11 nS 10 nF lt 6 nS 0 11 66 nS 100 nF lt 63 uS 0 10 619 nS D lt 0 1 30 mVrms 0m Agilent B1500 3 2 41 SCUU GSWU SCUU SMU CMU GSWU Fe SCUU 2 SMU CMU uo MPSMU HRSMU SCUU SMU DC
427. BMP EMF List Display CSV Parameters CSV BMP EMF CSV CSV X Y Graph List Displays Parameters Preview Settings X Y Graph Plot List Display Parameters Preview Settings p 4 41 Agilent EasyEXPERT Help EasyEXPERT 4 40 Agilent B1500 3 EasyEXPERT Preview Preview Settings Preview Settings GUI General Graph Title
428. Classic Test Measurement Setup Sweep xxxx status 7 e Sweep CONTINUE AT ANY status Sweep STOP AT ANY ABNORMAL status TV Sweep C V Sweep Sweep AIL Ed s Agilent B1500 3 7 25 2 ccu uu s
429. Compliance Agilent B1500 3 7 37 SMU SMU Figure 7 17 Figure 7 17 For voltage sweep For current sweep Current Voltage 1 Specified power compliance 1 Specified power compliance Specified current compliance value lt Specified voltage compliance value Actual current compliance Actual voltage com
430. IX X Yz a log y log yo log x log xo Y 3 a mA 2 X0 gt Y0 gt X1 gt Y1 2 X Y m 1 2 OXF Y X m X m 1 2 Y X 0 Y ELET 2 Y m Y m 1 2 Y K 0 Y n 8 m Y 2 1 2 X X 71 85 04 CI X XX 10X Ym m Y
431. Regression Cursor to Marker Adjust Gradient Gradient Show Graph Legend Show Line X Y Information Agilent B1500 3 4 35 EasyEXPERT Data Display Data Display
432. SMU 011778 Direction Single Double VAR1 VAR1 SMU 2 Offset Ratio Compliance Pwr Comp 7 8 IPULSE KI Ixidin9 n Hifi o u EX a Ratio Offset Ratio Offset o CHE SMU Function VARI SMU Function VAR Mode VARI VARI VAR1 3 Measurement Setup VAR1 GUI YV Sweep Channel Setup
433. V Sweep V t Sampling C V Sweep Switching Matrix Control e Function Setup e Auto Analysis Setup Display Setup e SMU Range Setup ADC and Integration Time Setup e Advanced Setup I V Sweep rV Sweep p 5 3 C V Sweep C V Sweep p 5 12 Agilent B2200A B2201A Switching Matrix Control p 5 16 p 4 9 Data Display p 4 26 Configurattion p 4 47 Z Caiibrahon p 4 42 5 2 Agilent B1500 3 Setup Name Channel Setup Measurement Setup Function Setup Auto Analysis Setup Display Setup
434. X Y Graph List Display Display Setup p 5 22 Parameters y 6 8 Agilent B1500 3 Test Output Analysis Parameter Definition Define Analysis Parameters o Analysis Parameter Definiion Close ia Vector Parameters 1 Name Unit Description Add
435. 109 G 109 T 10325 P 1055 e 24 7 2 50 Agilent B1500 3
436. 4 HH 1 4 4 2 1 H nnde 4 1 E 4 4 4 Detail
437. 4 14 7 Data Display Append Display Data p 4 14 Data Display X Y Graph Plot List Display Parameters mu EH Display Setup p 4 37
438. 4 21 3 About This Instrument Configuration About This Test Agilent EasyEXPERT Help EasyEXPERT EasyEXPERT Application Test p 4 24 EasyEXPERT F 5 1 4 10 Agilent B1500 3 Quick Test Single j Append Repeat E ex Data Display Calibration H E UL ET 2 Aa Switching Matrix Count Device ID E EasyEXPERT EasyEXPERT O Quick Test p 4 55
439. CD ROM Table 2 25 Agilent B1500A 2 54 Agilent B1500 3 Table 2 25 B1500A B1500A 050 50 Hz B1500A 060 60 Hz B1500A A6J ANSI Z540 B1500A UK6 B1500A ABA 1 B1500A ABJ 1 B1510A HPSMU B1511A MPSMU B1517A HRSMU B1520A MFCMU B1540A Agilent EasyEXPERT B1540A 001 EasyEX
440. Compensation data file for B2210A Probecard I F 3m triax cable MB Mother Board MH Matrix Path High ML Matrix Path Low C1 Agilent Triax Cable C2H Probe card I F or User Triax cable High C2L Probe card I F or User Triax cable Low C3H Probe card or User Coax cable High C3L Probe card or User Coax cable Low format version 1 0 B2210A PCIF R Ohm L H CIF MB 0 000000e 00 5 250000e 08 2 940000e6 11 MH 2 430000e 00 6 310000e 07 1 930000e 10 ML 2 490000e 00 5 970000e 07 1 920000e 10 CL 6 300000e 01 1 250000e 06 1 600000e 10 C2H 2 988000e 01 2 090000e 07 7 000000e 11 C2L 2 988000e 01 5 090000e 07 7 000000e 11 C3H 0 000000e 00 8 000000e 08 1 500000e 13 C3L 0 000000e 00 8 000000e 08 1 500000e 13 15 B2210A B2211A 16 DUT Agilent B2220A PCIF CABLE C2H C3L Table 3 10 Agilent
441. Force CMU AUX To DUT Force Force Sense From SMU CMU Return AUX Common T CMU cur AUX In CMU Return AUX Common Lp CMU pot Force CMU AUX To DUT Force Force Sense ISMU D sub From SMU 4TP MECMU 4284A 4 4TP Figure 3 5 1 2 ASU2 t 2 MFCMU N1300A CMU 4284A 16048D E 4 Hp ASU 1 CMU pot Ho CMU cur AUX In 5 Lp ASU 2 CMU pot CMU cur AUX In 6 ASU ASU 1 CMU Return ASU 2 CMU Return M n gt d nili NOTE ASU
442. MA Amr S 1o ND SS a E 3 21 IRID E oe E E P AA AA E AA 3 22 SCUU GSWU OBSBE e e hr tua 3 25 GNDU T 2041 10 PME 3 29 xv 20 3 30 eR 3 32 GNDU 25b DUI lt 3 35 SMU DUT 3 36 MFCMU 2 5 DUT 3 42 pue pol D 3 43 TUA IS a aseo EI s AA 3 44 3 46 Agilent B2200A B2201A Agilent B1500 3 TES AZF ANHE teen RC es 3 53 RAT M A a LL A E seh factis Ri hib eo Macon rdi o eras Ert 3 56 va a I NER 3 56 R MI RM 3 56 pe MUR Rr etpM rp tI e nom 3 56 4 EasyEXPERT Workspace Configurator 4 4 Ue 2 S Loss c e Sous he RE 4 4 vive Qr 4 5 vi M tbs 4 7 34 e Au A UE O 4 9 KAS MO GUL 4 2 eb pU REL a eee s 4 10 Test Result Editor x Doe nr ED e a E E PAID 4 16 Test Results Data Filter 4 16 Export Using SS 4 17 Test Results Data Auto Export 4 18 Test Results Data Properties 4 19 Data Display Manager
443. NEN HASCE SAROTT 0 5 V Ic x 20 W 2V Ic x 20 W 5V Ic x 20 W 20 V Ic x 20 W 40V Ic x 40 W 100 V Ic x 100 W a Ic Ve lt 20V Io x20 W 20 V Vc 40V Io x 40 W 40 V Vc 100 V Io x 100 W 2 30 a Vc b Io Agilent B1500 3 Table 2 15 MPSMU HRSMU x mV mV 0 5 V 25 uV 0 5 pV 0 018 0 15 0 01 0 12 100 mA 2 V 100 uV 2 uV 0 018 0 4 0 01 0 14 100 mA 5 V 250 uV 5 uV 0 018 0 75 0 009 0 25 100 mA 20 V 1 mV 20 uV 0 018 3 0 009 0 9 100 mA 40 V 2mV 40 uV 0 018 6 0 01 1 b 100 V 5mV 100 uV 0 018 15 0 012 2 5 a mV b 100 mA Vo lt 20 V 50 mA 20 V lt Vo lt 40 V 20 mA 40 V lt Vo Vo Table 2 16 MPSMU HRSMU
444. Repeat Measurement Setup p 4 22 ProberContrrol readme mht 7 ProberControlxxxxdoc pdf 7 xxxx cascade suss vector Fa Agilent B1500 3 7 51 lt d ac mte SetupFileConverter exe Agilent 4155 4156 E MES Agilent BISDDA EasyEXPERT E XTS XTS file
445. SEQUENCE p 7 17 Agilent B1500 3 NOTE Interval 2 IV t Sampling Hold Time Source 1 fb 0 655 35 10 x U fb Interval 2 IHold Timel Source 90 0 1 0 1 Base Hold Time Base Source T fb 0 655 35 10 Measurement Setup Constants SMU Base Source V A 0 to 100 V HRSMU MPSMU 200 V HPSMU 0 to 40 1 A HRSMU MPSMU 1 A HPSMU Base Output Sequence SIMULTANEOUS SEQUENTIAL Compliance A 0 to 40 1
446. Switching Matrix Control Switching Matrix Control EasyEXPERT 7 Classic Test L Switching Matrix Control Switching Matrix Control Agilent B2200A B2201A Singe d Configuration 7 Switching Matrix Agilent B2200A B2201A GPIB Switching Matrix p 4 49 AE My Favorite
447. VN Measurement Setup Hi m Channel Setup p 5 9 Measurement Setup p 5 10 Function Setup Auto Analysis Setup Mit Function Setup p 5 18 Auto Analysis Setup p 5 19 Display Setup Display Setup p 5 22 VN Interval 2 3 AD 1 Interval ADC
448. VSU VMU 4 MPSMU PGU 4155 4156 B1500A EasyEXPBRT 7 52 Agilent B1500 3 sleep exe 1 cocoa Do ur m 9A pu Agilent EasyEXPERT 1
449. 1 rms ON 0 03 1 ON 250 mV 70 mV 0 2 V us SMU 0 5 50 us 0 5 100 us 0 32 7 ms 100 ps ADC Table 2 19 ADC Table 2 20 p 6 1 pA 1 aA E o na T E lt ZIET WER XIRVUCT c x Agilent B1500 3 2 35 Table 2 19
450. 1000 pF 16494A B C 16494A B C p 3 51 3 50 Agilent B1500 3 Agilent B2200A B2201A Figure 3 19 MEFCMU 1 kHz 5 MHz Cp G Agilent B2200 Agilent 16494F CMU Agilent 16048D E MFCMU B2200 pou eiua KR LUE Hc Hp Lc Lp BNC T Agilent 1250 2405 2 e Agilent B2200 MFCMU BNC
451. 2 5 NOTE B1S17A HRSMU B1500A SMU HRSMU 100 V 100 mA 2 W 0 5 V 10 pA ES288A ASU 1 pA Table 2 5 Table 2 8 HRSMU Current mA Voltage V ASU HRSMU ASU HRSMU ASU HRSMU Agilent B1500 3 2 19 Table 2 9 HRSMU 0 5 V 0 lt IVI 0 5 V 25 nV 100 mA 2N 0x VI lt 2V 100 uV 100 mA SV 0 lt VI lt 5V 250 uV 100 mA 20 V 0 lt IVI lt 20 V 1 mV 100 mA 40 V 0 lt IVI lt 20 V 2mV 100 mA 20 IVI lt 40 V 2mV 50 mA 100 V 0 lt IVI lt 20 V 5mV 100 mA 20 IVI lt 40 V 5mV 50 mA 40 IVI lt 100 V 5mV 20 mA Table 2 10 HRSMU
452. 4 X Y Figure 4 7 Line 1 ON OFF 1 Line 2 ON OFF 2 Line Mode Normal Gradient Tangent Regression Adjust Gradient Gradient 3 Tiling Data Display V Stacking Data Display 7 Overlaying Data Display 7 Data Display Data Display
453. 8 23 8 24 Agilent B1500 3 2 2 Agilent B1500A B1500A e Agilent Technologies http www home agilent com Home gt gt gt
454. A HRSMU MPSMU 1 A HPSMU 0 to 100 V HRSMU MPSMU 200 V HPSMU 4M Interval ADC AD ADC Agilent B1500 3 7 15 Figure 7 9 IV t Sampling Chann
455. B D A B E cond A B C D A B C D E A B C D E A B cos A A B A B 8 8 Agilent B1500 3 delta A diff A B Wu 9X edge A n 1 D Aq1 A4 2 1 lt n lt N AN AN1 n N n An n N 1 C V Sweep B delta A
456. B1500 EasyEXPERT Utilities 4155 4156 sleep exe 7 nil 2 2 Agilent B1500 3 Agilent B1500A DC AC Agilent B1500A Microsoft Windows LCD Agilent B1500A X DC DC AC 1
457. B2200A B2201A VXIplug amp play driver B2200A B2201A Agilent B1500 3 3 53 Table 3 10 RETE Agilent B2200A B2201A C2H Agilent B2220A C2L 1 R L C Figure 3 19 C2x R L C C3H C3L R L C C3x R L C Agilent B2220A H
458. BT tan B 2nfC 1 _IBI T 1 G Rp 0 IYIZ Y G B f C 0 D Rp Real part admitance S conductance S susceptance S jB phase degree or radian IYI frequency Hz capacitance F quality factor dissipation factor parallel resistance Q Imaginary part Y Figure 7 11 Z Y G B IY Agilent B1500 3 7 21 Figure 7 12 C V Sweep WIA WERL DUT MFCMU 7 12 Hcur Hpot Lpot Lcur high high low low 4 4
459. CMH to GSWU Guard Force 2 or CML to GSWU Common Guard Sense 2 to DUT 2 or DUT 1 low terminal lt Coaxial cable Wire SCUU DUT SCUU GSWU 16495K SMU E H Table 3 9 MFCMU Sense High Low CMH CML DUT GSWU 3 40 Agilent B1500 3 Figure 3 17 SCUU Guard Force 1 or CMH Insulator Sense 1 Plate Guard Force 2 or CML Sense 2 Triaxia
460. ForcePG2 Agilent B1500A Agilent 81110A Output 2 16 Application Test Id Vg_Initial Id Vg 17 Application Test 2 ResetPG Agilent 81110A 18 Analysis Auto Analysis 8 22 Agilent B1500 3 19 VthInitial getNumericData VthBefore VgateList getVectorData Vgate IdInitialList getVectorData Idrain De x Force Pulse xxx ForcePGl ResetPG I V Sweep amp Analysis after Write ForcePG2 Id Vg Written ResetPG Auto Analysis VthWritten getNumericData VthAfter IdWrittenList getVectorData Idrain END BLOCK 19 2117 H Id Vg Initial 774 b O Function Setup X Display Setup VthBefore Vgate Idrain Vthnitial Pe gt
461. Step No of Step Step No of Step 1 128 Compliance SMU Pwr Comp SMU Figure 7 4 Stop value Primary Sweep Source 0 Start value Stop value Secondary Sweep Source 0 Start value Step value gt Time 1 A Sweep Start Completion Agilent B1500 3 7 7 IV Sweep E Linear Log 5 3 1 Kig DESETE gt
462. Sweep SMU SMU Agilent B1500 3 7 3 IV Sweep ali Xu EE VAR1 Direction LinearLog Figure 7 2 Direction Single Double e LinearLog Linear Log
463. Table 2 21 Eposc Zosc I r1 n ud Eposc Zosc 112 125 lt Vosc lt 250 0 03x 250 Vosc 1 5x 250 Vosc 1 64 Vosc 125 0 03x 125 Vosc 1 5x 125 Vosc 1 32 lt Vosc lt 64 0 03x 64 Vosc 1 5x 64 Vosc 1 Vosc lt 32 0 03x 32 Vosc 1 5x 64 Vosc 1 Vosc mV Table 2 22 EpL Yor ZsL Ep Yor nS 751 md 0 02 3xf 100 750xf 100 3m 0 02 5xf 100 1500xf 100 5 0 f MHz Table 2 23 Yosc Yo Ep 75 f Hz Yosc nS Yo nS Ep 75 mQ Ik lt f 200k lx 125 Vosc 0 5 1 5 0 095 5 0 200k lt f lt 1M 2x 125 Vosc 0 5 3 0 0 095 5 0 IM fx 2M 2x 125 Vosc 0 5 3 0 0 28 5 0 2M f 20x 125 Vosc 0 5 30 0 0 28 5 0 Vosc mV 2 40 Agilent B1500 3 Table 2 24 quoe 5 MHz 10 pF lt 31 uS 0 32 990 nS 100 pF lt 314 uS 0 29 9nS 1 nF lt 3 mS 0 32 99 uS 1 MHz 10 pF lt 6 nuS 0 11
464. Test Definition Test Definition Test Definition Library Define New Test Open Definition of Tus Test Figure 6 1 Test Definition 3 Test Specification Test Specification Test Contents Test Contents be R Test Contents My Favorite
465. VgateList IdInitialList ASSIGN 22 COMMENT 23 Application Test ForcePGl NAND 24 Application Test ResetPG 25 COMMENT 26 Application Test ForcePG2 27 Application Test 2 Id Vg_Written Id Vg 28 Application Test 2 ResetPG 29 Analysis Auto Analysis 30 31 Id Vg Written Function Setup Display Setup o or CFR VthAfter Idrain VthWritten IdWrittenList ASSIGN 32 Agilent B1500 3
466. gt step value of Pulse sweep source Sweep Source base vale r output value of Pulse constant source Constant Source base value Agilent B1500 3 7 11 Figure 7 8 Voltage or current IV t Sampling I V t Sampling I V t Sampling WET 7 E nterval a TV t Sampling SMU 2 i SMU I V t Sampling EMEZ LB LX Figure 7 8 Output Sequence SEQUENTIAL Base Starts sampling Channel 1 output Time Hold time a Time Hold time Interval b E E Source value Voltage or current Source value 7 Base value 4 Time 0 origin Hold Base hold time Interval wmm Veasurement t
467. lt Target gt device_id lt Target gt lt Response gt status 0 or 1 break device id Device ID Example Response lt Break gt 0 lt Break gt Target gt waf1a 3 1 lt Target gt lt Response gt Repeat Stop Condition e Counter Reaching to limit mit Count gt limit Figure 4 1 e Procedure return condition Start Iteration MM Figure 4 2 EasyEXPERT E status 0 LET status 0 1 device_id Device ID Agilent B1500 3 4 23 Category i test n
468. sew Workspace wWerkspace Nane C Aw users to access this Workspace Open an existien Workspace Your Werkspaces Name Scope analyzer Private Public Workspaces owned by other users Name Owner Demo Workspace Public V 1 Public Workspaces owned by other users 2 Demo Workspace 3 Continue amp Agilent B1500 3 1 7 NOTE Step 5 2 le p gt si os i eror TOI Choose test categories from the left area i gt i Hl E Choose an spp caton test object from the left area E m e Peset Count Devi ID Date Remarks idvggm 3 8 2006 6 42 43PM 1 1 Category Library CMOS 2 Library
469. test J failed N_LPF1 f3 test MU failed N_LPF1 f4 test J failed N_LPF1 f5 test E c c SCUU failed EEPROM test SCUU failed output relay test SCUU failed control test Agilent B1500 3 9 51 N876 SCUU failed CG2 test N877 SCUU failed LRL test N880 CMU failed Hcur AC and VRD Fm test N881 CMU failed SA RA 32mV test N882 CMU failed SA RA 64mV test N883 CMU failed SA RA 125mV test N884 CMU failed SA RA 250mV test N885 CMU failed ExR test N886 CMU failed Bias chg test N887 CMU failed R LPF2 R HPF vs test N888 CMU failed VRD IF test N889 CMU failed IRM local Odeg test N890 CMU failed IRM local 90deg test N891 CMU failed S LPFI f1 120kHz test N892 CMU failed S LPFI f2 500kHz test N893 CMU failed S_LPF1 f3 2MHz test N894 CMU failed S_LPF1 1 SMHz test N895 CMU failed TRD MODEM test N896 CMU failed VG local 90deg test N897 CMU failed VG local Odeg test N898 CMU failed NAA test N899 CMU failed NAS X1 4 test N900 CMU failed NAS X1 8 test N901 CMU failed N_LPF2 f2 500KHz test N902 CMU failed N_LPF2 13 SMHz test N903 CMU failed MODEM PSD test N904 CMU failed PSD 0deg test N905 CMU failed PSD 90deg test 9 52 Agilent B1500 3 N906 N907 N908 N909 N910 N911 N912 N913 N914 N915 N916 N9
470. verifier que l indicateur Measurement n est pas allum e S assurer que soit allum l indicateur d alarme de la haute tension e Ouvrir le convercle de la bo te de blindage Ouvrir les bornes de verrouillage e En cas de condensateurs connect s SMU d charger les condensateurs Alerter d autres personnes autour de vous contre le danger de haute tension Achtung Gef hrliche Spannung Von den Ger ten Agilent B1500 k nnen Spannungen an den Anschl ssen Force Guard und Sense von bis zu 200 V ausgehen Um elektrischem Schlag vorzubeu gen ist bei der Ben tzung der Gerate Agilent B1500 folgendes zu beachten e Brden Sie das Kabinett falls verwendet sowie die Ger te Agilent B1500 mittels dreiadriger Netzleitungen e Wenn die Meffassung Agilent 16442 zwar angeschlossen jedoch nicht verwendet wird schlie en Sie die Verriegelungsklemme Interlock so an da bei ge ffnetem Deckel die Stromzuf hrung zu Agilent 16442 auf jeden Fall unterbrochen wird e Vergewissern Sie sich regelm ig da die Verriegelungsfunktion korrekt arbeitet Schalten Sie die Gerate Agilent B1500 aus und entladen Sie alle Kapazitaten bevor Sie die Anschl sse Force Guard und Sense ber hren Falls Sie die Gerate Agilent B1500 nicht ausschalten f hren Sie unabhangig von den Ger teeinstellungen folgende Schritt durch e Beenden Sie die gegenw rtige Messung durch Dr cken der Stop Taste die Measurement Leuchtdiode erlischt
471. 00 3 1 11 Step 9 Graph Plot View Marker Cursor Line List Display FX File Ed View nem Tm Help mg tuaaxsi pnauidHHem E no lr Setup Name Vgate V 200 m div List Displa Eee viel ee En a Man el Master 731A 394 fAfum il 139 fA 15 3 fA um ix Step 10 Agilent B1500A 1 Standby Windows DK T L Agilent B1500A 1 12 Agilent B1500 3 NOTE NOTE
472. 0B GPIB Windows XP Professional SP2 ee e Microsoft NET Framework Version 1 1 e Microsoft NET Framework 1 1 Service Pack 1 e Agilent IO Library Suite 14 0 Agilent T amp M 11 Agilent IO Library Suite 14 0 Agilent B1500 3 7 57 EasyEXPERT Desktop EasyEXPERT Execution Mode p 7 60 Database p 7 60 1 Desktop EasyEXPERT Y CD ROM CD ROM 2 C EasyEXPERT database EasyEXPERT 3
473. 0V 1A Max 1 2 3 Selected Force Sense Force Sense Force Sense Guard Guard Guard Guard Guard C Guard Drain Gate Substrate Source 2 DUT Agilent B1500 3 3 45 WARNING CAUTION Rx TEL Portam uu 1 Force 2
474. 17 N918 N919 N920 N921 N922 N923 N924 N925 N926 N927 N928 N929 N930 N931 N932 N933 amp amp amp amp amp amp amp SGG orm eom cC c c CG E sz c U 5 5 e m a U e g t S e m e B 29098299292929292929292292292292982 G G CMU failed Rr Rf 100ohm test failed Rr Rf 1kohm test failed Rr Rf 10kohm test failed Rr Rf 100kohm test failed TRD IVAmp test failed N_HPF1 N_LPF1 IOKHZz test failed N_HPF1 N_LPF1 200kHz test failed N HPFI N LPF1 1MHz test failed N HPFI N LPF1 2MHz test failed N HPFI N LPF1 SMHz test failed NAI test failed NA2 test failed NA3 test failed IV saturation detector test failed normal status test failed normal status test failed IV saturation status test failed IV saturation status test failed unbalance detector test failed normal status test failed normal status test failed unbalance status test failed unbalance status test failed over current detector test failed normal status test failed normal status test failed over current status test failed over current status test Agilent B1500 3 9 53
475. 2 8 18 Agilent B1500 3 Local Variable Definition ASSIGN BLOCK Application Test test execution flow Test Definition Test Contents Program Component Program Component p 6 20 Application Test Local Variable Definition p 6 18 p 8 3 Application Test
476. 2 33 SMU 100 100 1 lt 100 mA 1 5 Q 100 mA I 0 2 Q HPSMU 0 3 0 MPSMU HRSMU gt 101 0 gt 10130 1nA 1 pA 10 nA 12 100 nA 2 5 96 1pA 2 10 nA 1000 pF 100 nA 10 mA 10 nF 100 mA 100 uF 900 pF HPSMU MPSMU HRSMU 660 pF HRSMU ASU 5000 pF HPSMU MPSMU HRSMU 3500 pF HRSMU ASU 2 34 Agilent B1500 3 1 mV HPSMU 3 mV MPSMU HRSMU 4 2 mV HRSMU ASU Iout 100 pA ON 0 01 96 rms 0
477. 3 2 3 Switch off Switthon 2 0 1 15 9 Y 3 4 Units mm 3 34 Agilent B1500 3 GNDU DUT GNDU GNDU Table 3 8 1H DUT Table 3 8 k 7 7 Agilent 8121 1189 DUT Sense Force DUT Coaxial cable Triaxial connector 1 Sense Force AWG 22 BUE 7 4 Y Agilent 8150 2639 DUT Force Sense Force DUT GNDU
478. 5 SMU ASU SMU ASU 1 pa AD D ADC ADC ADC Os 0s 0 001 s ZXJV A 0 01 s Agilent B1500 3 7 49 MFCMU SCUU Cp G
479. 5 B1S11A MPSMU B1500A SMU MPSMU 100 V 100 mA 2 W 0 5 V 1nA Table 2 5 Table 2 8 Figure 2 4 MPSMU Current mA Voltage V 20 40 20 T00 50 100 2 16 Agilent B1500 3 Table 2 5 Table 2 6 MPSMU 0 5 V 0 lt IVI lt 0 5 V 25 nV 100 mA 2 0x IVIx 2V 100 uV 100 mA 5V 0 lt IVIs 5V 250 uV 100 mA 20 V 0x IVI 20V 1 mV 100 mA 40 V 0x IVI 20V 2mV 100 mA 20 lt IVI lt 40 V 2mV 50 mA 100 V 0x IVI lt 20V 5mV 100 mA 20 lt IVI lt 40 V 5mV 50 mA 40 lt IVI lt 100 V 5mV 20 mA MPSMU 1nA 0 lt Ill 1 15 nA 50 fA 100 V 10nA 0 lt IIl 11 5nA 500 fA 100 V 100 nA 0 lt Ill 115nA 5pA 100 V 1 uA 0x Ix 1 15 pA 50 pA 100 V 10 uA 0x Ill 11 5 nA 500 pA 100 V 100 uA 0x IIl 115 nA 5nA 100 V 1 mA 0x Ill 1 15 mA 50 nA 100 V 10 mA 0 lt Ill
480. 511A MPSMU 1 100 V 100 V 0 5 uV 10 fA 100 mA 100 mA B1517A HRSMU 1 100 V 100 V 0 5 uV 1 fA 100 mA 100 mA E5288A ASU z 100V 100 0 5 uy 0 1 fA 100 mA 100 mA B1520A MFCMU 1 1 kHz 5 MHz 0 035 fFrms a E5288A ASU B1517A SMU HRSMU b 1 MHz 250 mVac 1 PLC HRSMU 42V Agilent B1500 3 500 us 2s 5ms 5s lt 100 ms gt 100 ms 100 us DUT 10 pF 82 W HE PSMU 4 MPSMU 10 MFCMU 1 gt 2 ms gt 10 ms 2 27 GNDU B1500A 0 V 100 pV
481. A 50 fA 10 fA 10 nA 0x lll 11 5nA 500 fA 10 fA 100 nA 0 lt Ill 115nA 5pA 100 fA 1 nA 0 lt I lt 1 15 pA 50 pA 1pA 10 uA 0x I lt 11 5 pA 500 pA 10 pA 100 pA 0x I lt 115 nA 5nA 100 pA 1 mA 0 lt lll 1 15 mA 50 nA 1 nA 10 mA 0 lt lll 11 5 mA 500 nA 10 nA 100 mA 0 lt IIl 100 mA 5 nA 100 nA a b ES288A Agilent B1500 3 ASU sspe 2 21 Table 2 13 B1520A MFCMU B1500A MFCMU MECMU Cp G Table 2 14 GPIB Agilent EasyEXPERT Cp G Cp D Cs Rs Z 0 AC 1 kHz 5 MHz 1 mHz 1 kHz 10 mHz 10 kH
482. A 500 nA 200 V 100 mA 0 lt IIl 50 mA 5 nA 200 V 50 mA lt IIl lt 115 mA 5 nA 100 V 1A 0 lt I lt 50mA 50 uA 200 V 50 mA lt IIl lt 125 mA 50 uA 100 V 125 mA lt IIl 500 mA 50 uA 40 V 500 mA IIl lt 1A 50 uA 20 V 2 14 Agilent B1500 3 Table 2 3 Table 2 4 HPSMU ADC ADC 2 0 lt IVI lt 22V 100 uV 2nV 20 V 0x lt 22V 1 mV 20 uV 40 V 0x IVI 44 V 2mV 40 uV 100 V 0x IVI 110 V 5mV 100 uV 200 V 0 lt IVI lt 200V 10 mV 200 uV HPSMU ADC ADC 1 nA 0 lt I lt 1 15nA 50 fA 10 fA 10 nA 0 lt I lt 11 5nA 500 fA 10 fA 100 nA 0 lt NM lt 115nA 5 pA 100 fA 1 uA 0 lt lt 1 15 uA 50 pA 1 pA 10 nA 0 lt M lt 11 5 pA 500 pA 10 pA 100 uA 0 lt M lt 115 pA 5 nA 100 pA 1 mA 0 lt Ill 1 15 mA 50 nA 1 nA 10 mA 0 lt Ill 11 5 mA 500 nA 10 nA 100 mA 0 lt IIl 115 mA 5 uA 100 nA 1A 0 lt Ix 1A 50 uA 1 pA a 2 Agilent B1500 3 2 1
483. Agilent B1500A t Agilent Technologies Notices Agilent Technologies 2005 2006 No part of this manual may be reproduced in any form or by any means including elec tronic storage and retrieval or translation into a foreign language without prior agree ment and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number B1500 97002 Edition Edition 1 July 2005 Edition 2 December 2005 Edition 3 April 2006 Agilent Technologies Inc 395 Page Mill Road Palo Alto CA 94303 USA Warranty The material contained in this docu ment is provided as is and is sub jectto being changed without notice in future editions Further to the max imum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability and fitness for a par ticular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connec tion with the furnishing use or per formance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty t
484. ELE LEE REL veto ep bes 5 4 Measurement Setup eie ve eb 5 5 UV tSamplng o ose Re SEU 5 8 Channel Setup 29i 224 ERN eno 5 9 Measurement Setup os os wees ni ssi 5 10 GN SW66D Leste rs Peces MER Ue RV ES ERU s RS 5 12 Channel Setup SR LIE edite ERE 5 13 Measurement Setup e ERR ERE ER NT mere 5 14 Agilent B1500 3 Switching Matrix Control 5 16 Function Setup eL ERE LEUR ER EUER ES 5 18 Auto Analysis Setup reset eer eere epe E e Re eee 5 19 Display Setup iici enuia eene e REL 5 22 SMU Range Setup 5 23 ADC and Integration Time Setup 5 24 Advanced Setup 5 25 Test Definition 6 3 Test Specification ereere ue AER RNC CHR de E aee e II Eee 6 5 Test Output i oue e ADR ER EDUC DE aur de 6 8 Analysis Parameter Definition 6 9 Test Contents inne co Ub OE VERAESEE LEN P SET Pet esed enis 6 10 Test Contents DEF 6 11 Test Contents OT ANA EN seeded t e e ten 6 15 Variable Inspector see ey eseeea eene ee v s 6 16 External Variable Setup eee RR 6 17 Local Variable Definition 6 18 Program Component 6 20 Auto AaI
485. First Point Second Point 2 e X Y Coordinate X Y X Y e Data Condition Marker First Point 2 e X Y Coordinate X Y X Y e Data Condition Marker Gradient 7 First Point Marker
486. Force2 Sense2 I MFCMU CMU Hish Low Forcel Force2 Sense1 Sense2 1 CMU return GSWU CMU return DUT DUT Figure 7 13 p 7 24 GSWU 1 2 GSWU SCUU 2 CMU High Low DUT CMU return Agilent B1500 3 7 29 SMU CMU SCUU Figure 7 14 SCUU Setup 1 CMH Force1 Sense1 SMU slot N 1 Setup 4 CMH Force1 CMUH slot N CML Force2 Sense2 Open CML Force2 CMUL slot N Sense1 Se
487. I CMU Calibration p 4 44 n 5 12 1H DS Hby Ty Channel Setup p 5 13 Measurement Setup p 5 14 Function Setup p 5 18 Auto Analysis Setup p 5 19 Display Setup p 5 22 4 Agilent B1500 3 Channel Definition Miscellaneous Variables C V Sweep Channel Setup Unit V Name I Name Mode
488. LOGI00 LOG250 x LOG500 LOG 1 LOG10 1 10 2 65 535 1 7erg7 lt 2 0 01 p 8 NOTE Interval 2 0 1 0 02 x 1 1 100001 11 1 B 1 I V t Sampling Total Sampling Time gt Interval x No of Samples SIMULTANEOUS X SEQUENCE P 7 17 Source
489. M IN13 CMU1 MF pel MFCMU B2200A B2201A Input 13 14 Agilent B2200A B2201A p 3 50 Extended Configuration p 4 51 Agilent B1500 3 4 49 Date Time Message ID Process User Host Refresh Slot Module Type Name ASU Serial Number ASU I O Path EasyEXPERT Configuration 7 4 F7 Event Log ID Windows Agilent B1500 ASU ASU ASU PR HRSMU B1500A ASU WI
490. MS MM4 PWV PWI MM5 WV WI Sweep measurement was aborted 48eIEEBEXT HdSU awZoa4ywAckoc d8ul Pulse period is not set for pulse measurements Pulse source must be set MM3 PV PI Agilent B1500 3 231 238 239 253 254 255 260 270 271 2 mee meg Compliance must be set correctly PV PL PWV PW Too large pulse width max 2 s 2 s
491. PERT ES288A ASU E5288A 001 ASU D sub 1 5 m ES288A 002 ASU D sub 3 m N1253A Digital JO N1253A 100 Digital 10 T N1253A 200 Digital O BNC N1254A N12544 100 GNDU N1254A 107 Triax m Triax f N1254A 108 ASU Agilent B1500 3 2 55 N1300A CMU N1300A 001 1 5 m N1300A 002 30m N1301A CMU N1301A 100 SMU CMU SCUU N1301A 102 SCUU 3 0 m N1301A 110 SCUU N1301A 200 GSWU N1301A 201 GSWU 1 5 m N1301A 202 GSWU 3 0 m 16435A
492. R Function Setup p 5 18 ESESIC EHIEOM FIN SEM q k e UL MART 7 8 6 Agilent B1500 3 abs A acos A asin A at A B at A B C Agilent BIS00A EasyEXPERT A B abs A A B A B A A 1 1 B acos A A B
493. R ASU HR MP HP 100 pA 1 pA HR ASU HR 10 pA 400 fA HR ASU HR 1 pA 100 fA HR ASU 7 28 Agilent B1500 3 SMU CMU SCUU SMU CMU SCUU SMU CMU MFCMU Agilent B1500A MFCMU B N 3 10 SMU N 1 N 2 SCUU GSWU p 3 25 SCUU SCUU SMU HPSMU
494. SMU failed oscillation detector test SMU failed I bias test SMU failed common mode rejection test SMU failed high voltage detector test SMU failed zero voltage detector test SMU failed V hold test SMU failed V switch test MU failed NULL DC offset adjustment MU failed NULL DC offset measurement MU failed VRD DC offset adjustment MU failed VRD heterodyne offset adjustment MU failed NULL gain phase adjustment CMU failed MODEM offset adjustment CY Cx Q 0O o0 Agilent B1500 3 9 49 SEC N806 N807 N808 N809 N810 N811 N812 N813 N814 N820 N830 N831 N832 N833 N834 N835 N836 N837 N838 N839 N840 N841 N842 N843 N844 N845 N846 N847 9 50 c J failed relative Z adjustment MU failed Vch full scale measurement U failed nominal gain measurement c J failed extent range X3 adjustment c J failed range resistor 50ohm adjustment J failed range resistor Ikohm adjustment c J failed range resistor 10kohm adjustment c J failed range resistor 100kohm adjustment c J failed relative Z calculation ci J failed correction 2998292922929 E MU failed configuration test SCUU failed SCUU configuration test SCUU failed SMU configuration test SCUU failed CMU configuration test MU failed digi
495. Step VAR2 VAR2H H7J33 Stop GUI YV Sweep p 5 3 Agilent B1500 3 I V Sweep 1 Channel Setup SMU Function VAR1 SMU Function VAR2 SMU Mode CV VPULSE I IPULSE ISMU 2 VAR1 3 Measurement Setup VAR2 o o Start Stop 9 Start
496. String x Value List None Write List Values WAIT Format Read Value Result PassFail Value ReturnValue Agilent B1500 3 7 53 XSLT XSLT Bxport Using XSLT 2 4 17 CSV XSl Export As CSV e tab sV xsl 1 e xmlss xsl XML Spread Sheet 7 Export As XML Spread Sheet
497. Sweep EasyEXPERT 7 Ju gt Classic Test C V Sweep C V Sweep C V Sweep p 7 18 E My Favorite Channel Setup Measurement Setup Function Setup Auto Analysis Setup Mit Display Setup Error Correction GU
498. V 2 mV 40 uV 0 018 6 0 01 1 500 mA 100 V 5 mV 100 nV 0 018 15 0 012 2 5 125 mA 200 V 10 mV 200 uV 0 018 30 0 014 2 8 50 mA a mV Table 2 18 HPSMU A A A A 1 nA 50 fA 10 fA 0 1 3E B VoxlE D 0 1 3E Pe voxig P 200V 10nA 500fA 10 fA 0 1 3E 7c Vox1E s 0 1425E Pe voxiE 200V 100nA 5pA 100 fA 0 0543E l4 Vox1E 3 0 05 25E 2 VoxlE 13 200 V luA 50pA 1pA 0 05 3ET O Vox1E 0 05 1E Vox1E1 200V 10uA 500pA 10 pA 0 053E Vox1E 0 04 2E Vox1E 200V l00uA SnA 100pA 0 035 15E VoxlET0 0 03 3E Voxl1E 10 200V 1mA 30nA 1nA 0 04 15E8 Vox1E 0 03 6E Vox1E 200V 10mA 500nA 10 nA 0 04 15E 7 Vox1E 0 03 2E7 Vox1E 200V 100mA SpA 100nA 0 045 15E6 Vox1E7 0 04 6E Vox1E A 50 nA nA 0 4 3E Vox1E 0 44 1 SE 4 Vox1E 9 a A Vo V b 200 V Io 50 mA 100 V 50 mA lt 10 lt 125 mA 40 V 125 mA lt Io 500 mA 20 V 500 mA lt Io Io Agilent B1500 3
499. VS1S 6 21 Data Display Control redes ERR ORE FRAU De RR 6 24 Display Data Setup eese tapes Res pr ai 6 25 GPIBT O ec RAM IWEPe E Ru EE 6 26 Mes8age 2 2402 b MS Lt EX 6 31 Agilent B1500 3 Command Execution ce Re eee e En 6 32 Data Store ControL EL LE SR C bm eme es 6 35 IN Sweep AE Lace cce iua tetas pua ea nad ea e e a uda 7 3 et 7 3 Ip CERERI 7 4 e ae PEE 7 4 BAT AMA E ee a aen a IEEE CARS 7 6 ce A NEY 7 8 2590 de e e de Et b EB dat 7 9 7 12 7 12 DE ATARI EAA A E EUMD 7 12 PIES NAA A EE EU 7 14 SA D tk ar EET PARAR 7 16 7 17 AS 7 17 Se M SAP SB UOS TE tc S D RR ERA 7 17 CA S Weep IAE cott cep E 7 18 DEAA RR 7 18 neca S E 7 18 ibas or o ar 7 20 4 DUT 7 22 HET ADEC OAT eR reete 7 23 Sweep F ILE BO euei i niaii Miedo eed niii 7 25 EE TE GEUD E Puerto SS 7 7 25 2 2 7 26 sss RR 7 27
500. X Y Graph Plot Yl Y8 Name Scale Min Max Add Delete Up Down List Display Data Display TList Display Parameters Parameters 2 20 Darameter Add Delete Up Down 5 22 Agilent B1500 3
501. able Initial Value FOR NEXT Terminate Value FOR NEXT Step Value 6 20 Agilent B1500 3 Auto Analysis Auto Analysis 2 4 E 2 1 Line 1 Line 2 Marker Interpolation Mode Line 1 Line 2
502. ame Library EasyEXPERT Application Test Application Test Fhe Cute im m H L Lj 7 l py 3 T p Toute Ca oa iD nemas og NO CAO Eoia Miam Rr dris 1H Library Category Categories Select
503. cte B HB FE B m 1 Application Test Analysis Classic Test Miscellaneous My Favorite Setup Program Component p 6 20 Agilent B1500 3 6 11 Application Test Analysis Classic Test My Favorite Setup Miscellaneous TOU FAMERS Test Contents Insert Application Test p 4 24 Numeric Module String fg VAR Assign to external variables Bxtenal Variable Setup 0 6 17
504. d Filename C Program Files Agilent B 1500 EasyEXPERT Utilities sleep exe Write Type String List Read Type String Value List None Write List Values Format WAIT Read Value Result PassFail Value ReturnValue sleep exe 1 WAIT EXE ReturnValue EXE 7 PassFail EXE 7 Local Variables Definition F F F C lt c N n D 4d 10 P p E e R r F f X x 16 G g 6 34 Agilent B1500 3 Data St
505. el Setup Time Stamp Name 7 Time Time Hold Time Interval x Index 1 N Q Time Channel Setup Time Stamp Name Index Channel Setup Index Name 2147483647 Interval Measurement Setup Hold Time Measurement Setup N 1 Interval a 1 A D Interval Interval Interval
506. enu Font Size 14 Agilent B1500 3 4 3 EasyEXPERT Workspace Configurator Workspace Configurator Agilent B1500A Workspace configurator Agilent EasyEXPERT 1 2 EasyEXPBRT Choose test categones from the left area lt Choose an spolicabon test object from the left area Oste Cowm jOevceiD Remarks idvggm 3 8 2006 6 42 43 PM 1 gt g
507. erms in the sep arate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accor dance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcon tract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer soft ware as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclo sure of Software is subject to Agilent Tech nologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data According to ISO IEC Guide 22 and CEN CENELEC EN 45014 3 Ngil nt Technologies DECLARATION OF CONFORMITY C Manufacturer s Name Agilent Technologies International sarl Manufacturer s Address Rue de la Gare 29 Supplier s Address CH 1110 Morges Switzerland Declares under sole responsibility that the
508. esktop EasyEXPERT 7 56 TN 7 57 2 a p EE 7 58 Set ecu e OPIBUS IE T Le cei cb et ede e bs 7 58 EasyEXPERT LL 7 59 IS 7 59 Desktop EasyEXPERT 7 59 Start EasyEXPERT 7 60 Execution Mode 7 60 Database dw ZA 7 60 8 EN 8 3 8 4 2 8 7 RR NR 8 15 S BBC CER t E us 8 15 7 MEC 8 15 Ed aM 8 16 2 sese 8 17 PA DANS AS ES Beaune Oe Et tes et 8 19 9 BU EESOSR s cette dete ot odes cha pe Ee CREER SG 9 3 CO ME NODI I EE 9 3 SCUU 2 9 3 ASU ak SLAP WR Leo har ctis 9 4 Agilent B1500 3 Jie idc 7 batear 9 4 RR 9 5 022 M ae A LO RR RR ERUNT 9 6 TOT ECT ETT T EET ET TS 9 6 PER A7 9 7 9 8 oot scura PE REO REP ES 9 8
509. et pulse sweep source WSV WSI PWV PWI Send PV or PI to set pulse source PV x PI Compliance must be set correctly WV WI WSV WSI WNX BDV Sweep and sync output modes must be the same Send WSV WSI or WNX to get sync sweep data WSV WSI WNX FMT gt Set linear sweep for MM4 or M
510. failed integrating ADC test H RESOLN ADC failed bus function test GNDU failed calibration CMU FPGA version mismatch SMU failed function test SMU failed VF VM function test SMU failed IF IM function test SMU failed loop status test SMU failed temperature sensor test SMU failed CMR amplifier calibration SMU failed CMR amplifier adjustment SMU failed CMR 100 V range full output test SMU failed VF VM calibration SMU failed VM offset calibration Agilent B1500 3 N770 N771 N772 N773 N774 N775 N776 N777 N778 N779 N780 N781 N782 N783 N784 N785 N786 N787 N789 N790 N791 N792 N800 N801 N802 N803 N804 N805 U failed VM gain calibration MU failed VF offset calibration z gt J failed VF gain calibration c J failed VF gain calibration at 20 V range U failed VF filter offset calibration U failed H SPEED ADC self calibration U failed H SPEED ADC VM offset calibration U failed H SPEED ADC VM gain calibration U failed IF IM calibration e s S m S c J failed calibration bus test Sz c J failed IM offset calibration J failed IM gain calibration MU failed IF offset calibration SMU failed IF gain calibration SMU failed IDAC filter offset calibration
511. ft Windows 95 NT 2000 XP Professional 2 52 Agilent B1500 3 5 C 40 C 20 C 60 C 20 70 RH 20 90 RH 40 C 0 2 000 m 0 4 600 m 90 264 V 47 63 Hz VA 900 VA EMC IEC 61326 1 A1 EN 61326 1 A1 AS NZS 2064 1 CSA C22 2 No 1010 1 1992 IEC 61010 1 2001 EN 61010 1 2001 UL 61010B 1 CE CSA NRTL C C Tick B1500A 420 mm W x 330 mm H x 575 mm D N1301A 100 SMU CMU 148 mm W x 75 mm H x 70 mm D N1301A 200 33 2 mm W x 41 5 mm H x 32 8 mm D IL lim un B1500A 20 kg B1510A 2 0 kg B1S11A 1 0 kg B1517A 1 2 kg E1520A 1 5 kg E5288A 0 5 kg N1301A 100 0 8 kg N1301A 200 0 1 kg Agilent B1500 3 2 53 Agilent B1500A e
512. gram Component Program Component p 8 19 ASSIGN COMMENT e JF ELSE IF FOR Variable Expression IF ELSEITF FEOR NEXT Vari
513. ilent B1500 3 EasyEXPERT Workspace Configurator 2 Me Semiconductor Device Analyzer with Favyt XPERT Software Piease choose the target Workspace below A Workspace is an lt of data amd applicaten tests It lnchudes test setups test results graphical piots aed user customized application tests You have twee options when L Create Workspace irom scratch 2 Open use an existing Workspace that you previously crested Gem 3 Open and wse a public Workspace that has been previously puliished Create a mew Workspace Werkspsce Nane Allow otfuer users to access this Workspace Open an existien Workspace Your Workspaces Name Scope analyzer Private e Create a new Workspace Workspace Name 7 Public 47 ow other users to access this workspace Open an existing Workspace e Your workspaces
514. ime Measurement time Channel 2 output gt Time Time a b 1 A D 7 12 Agilent B1500 3 NOTE Output Sequence SEQUENTIAL IV t Sampling Source Base Starts sampling Output Sequence SIMULTANEOUS Base Starts sampling Base SIMULTANEOUS 4H 7I x VC SEQUENTIAL 0 7 11 gt AA E Base Hold Time Source c Hold Time
515. ing safety precautions must be observed during the use of the Agilent B1500 Use a three conductor AC power cable to connect cabinet if used and Agilent B1500 to an electric ground safety ground If you do not use Agilent 16442 Test Fixture make sure to connect the Interlock terminal to a switch that turns off when the shielding box access door is opened Confirm periodically that interlock function works normally Before touching the connections of the force guard and sense terminals turn the Agilent B1500 off and discharge any capacitors whenever possible If you do not turn the Agilent B1500 off complete all of the following items regardless of any Agilent B1500 settings Terminate measurement by pressing Stop key confim that the Measurement status indicator is not lit Confirm that the High Voltage indicator is not lit Open the shielding box access door open the Interlock terminal Discharge any capacitors if the capacitance is connected to an SMU Warn workers in the vicinity of the Agilent B1500 about dangerous conditions Agilent B1500 HPSMU Vdc 3 Agilent B1500 KA 200 Vdc MPSMU HRSMU 100
516. isplay Screen imum Agilent e o E ORO e RSI RSI RSI
517. ist Display Properties List Display Properties Edit gt List Display Properties List Display OK Data Status Physical Unit e Engineering Format with Unit Prefix SI 1 2345 mA e Scientific Notation E 3 1 23456789012345E 003 A 4 38 Agilent B1500 3 Setup Name X Y Graph Plot Parameters List Di
518. kit Valuel Value2 Value3 Value4 Terminator DEFAULT EOI CR LF EOI LF EOI CR LF LF NONE 6 26 Agilent B1500 3 Read String Read Value GPIB I O GPIB Address String Length To Read Length Actually Read Terminator Terminated Timeout GPIB Length To Read Length To Read DEFAULT EOI CR LF EOI LF EOI CR LF LF NONE
519. l Expression Operator Expression Binomial Operator Literal Constant Variable Built in Function Read Out Function User Function Analysis Function 8 4 Agilent B1500 3 NOTE literal Wi Dd d E S d s D 0 9 diD 0 E BE e S si y z a f p n u m k M G C y 107 z 101 a 1018 f 1015 p 10712 n 10 10 m 10 k 105 M 106 G 10
520. l connector to GSWU to DUT 1 or DUT 1 high terminal to GSWU to DUT 2 or DUT 1 low terminal Coaxial cable SCUU DUT iU SCUU GSWU 16495K SMU Table 3 9 Sense MECMU Sense Force High W b Low H CMH CML DUT GSWU Agilent B1500 3 3 41 Figure 3 18 MFCMU DUT MFCMU
521. lear Conductive layer black 3 36 Agilent B1500 3 Table 3 9 SMU Agilent 8121 1191 DUT ASU SCUU FHigure 3 14 Figure 3 16 Sense Force DUT 1 5 m 3 Agilent 8121 1191 Force ASU SCUU
522. lementary Information This DoC applies to above listed products placed on the EU market after Jun 14 2005 Ke 7l Date Toshiyuki Kawaji QA Manager Agilent Technologies lxi WEEE Directive 2002 96 EC marking requirements WEEE Directive Annex I Monitoring and Control instrumentation www agilent com environmen product Microsoft Windows Visual Basic Microsoft Corporation EasyEXPERT Agilent Technologies
523. nse2 Open Force S Force1 Hcur e O CMUH SMU in slot N 1 Sense KO Sensel i CMU Return Hpot e to GSWU through DUT interface MFCMU in slot N Setup 2 CMH Force1 Sense1 Open Lcur gt N CMUL CML Force2 Sense2 SMU slot N 2 CMU Return me 0 me SMU in slot N 2 Sense Sense2 Setup 3 CMH Force1 Sense1 SMU slot N 1 CML Force2 Sense2 SMU slot N 2 mr Force1 SMU in slot N 1 Sense 5 Sensel me gt Y Force2 SMU in slot N 2 Sees Sense2 NOTE SCUU GSWU SCUU GSWU Agilent B1500A 7 30 Agilent B1500 3 ASU ASU ASU SMU HRSMU Agilent B1500A ASU 1pA AUX DUT HRSMU
524. nt B1500 3 Output XML File Path OK Cancel Destination for Export File Name EasyEXPERT Browse gt gt Select Output XML File A Test Results Data Auto Export Results gt Transport Data gt Auto Export Setting H Enable automatic data export to the specified storage device Browse Browse For Folder
525. o Agilent B1500 3 EasyEXPERT Organize Preset Group Organize Preset Group Switching Matrix Operation Panel Quick Test Organize Preset Group Preset Group List Add Add Preset Group Rename Rename Preset Group Duplicate Duplicate Preset Group Delete Import Quick Test Preset Group Import
526. ontents Local variables Miscellaneous Application Test My Favorite setup 6 10 Agilent B1500 3 TES wo Program Component Test Contents Test Contents Test Contents Te Figure 6 4 1 2 4 Local Variables Definition FHigure 6 3 BLOCK END BLOCK o0e9HM eA Program Component A Che Tert Ma
527. ore Control Data Store Control Enable Creating Test Result Record Test Output p 6 8 Agilent B1500 3 6 35 TTZU4 itaA Em Data Store Control 6 36 Agilent B1500 3 ERER a BH Agilent B1500A EasyEXPERT EasyEXPERT 7 2 TV Sweep I V t Sampling WIA C V Sweep Sweep SMU CMU
528. oup Preset Group Preset Group Setup Name Select All Unselect All Rename Duplicate Delete 4 58 Agilent B1500 3 Agilent EasyEXPERT
529. p Down Test Specification 27 Test Parameters Load Clear Numeric Module String Test Parameters XX X X X Y 0 0 Test Parameters
530. plays List Display Parameters Parameters Graph Legend ON OFF NTT Line Information ON OFF X Y TW Open Preview Window Preview p 4 39 Preview Settings p 4 41 Auto Scale Zoom In Zoom Out Cancel Scaling Choose Active Y Axis Y Display Setup Display Setup p 4 37 6 Marker ON OFF
531. pliance Voltage Current SMU MPSMU HRSMU mW 2W HPSMU 1mW 20 W NaN a EE 7 38 Agilent B1500 3 SMU Figure 7 18 When power compliance is set Current mA 100 50r 20 20 NOTE SMU SMU Figure 7 18 MPSMU
532. product as originally delivered Product Name Semiconductor Device Analyzer High Power Source Monitor Unit Module Medium Power Source Monitor Unit Module High Resolution Source Monitor Unit Module Multi Frequency Capacitance Measurement Unit Module Model Number Agilent B1500A Agilent B1510A Agilent B1511A Agilent B1517A Agilent B1520A Product Options This declaration covers all options of the above product s complies with the essential requirements of the following applicable European Directives and carries the CE marking accordingly Low Voltage Directive 73 23 EEC amended by 93 68 EEC EMC Directive 89 336 EEC amended by 93 68 EEC and conforms with the following product standards EMC Standard Limit IEC 61326 2002 EN 61326 02 CISPR 11 1999 A2 EN 55011 1998 A1 Group 1 Class A IEC 61000 4 2 2001 EN 61000 4 2 1995 A1 A2 4 kV CD 8 kV AD IEC 61000 4 3 2002 EN 61000 4 3 1996 A1 A2 3 V m 80 1000 MHz IEC 61000 4 4 1995 A1 A2 EN 61000 4 4 1995 A1 0 5 kV signal lines 1 kV power lines IEC 61000 4 5 2001 EN 61000 4 5 1995 A1 0 5 kV line line 1 kV line ground IEC 61000 4 6 2001 EN 61000 4 6 1996 A1 3 V 0 15 80 MHz IEC 61000 4 11 2001 EN 61000 4 11 1994 A1 1 cycle 100 Canada ICES 001 1998 Australia New Zealand AS NZS 2064 1 The product was tested in a typical configuration with Agilent Technologies test systems Safety IEC 61010 1 2001 EN 61010 1 2001 Canada CSA C22 2 No 1010 1 1992 NRTL C Supp
533. s ProberControl 7 Windows readme V e SetupFileConverter exe Agilent 4155 4156 7 F7 v7 CMES Agilent BI500A EasyEXPERT XTS Windows e Sleep exe XSLT XSLT Agilent Technologies PU RWC 2 3 Agilent EasyEXPERT 2 5 DA cmt 2 6 RE SC 0 e es 2 8
534. splay File EasyEXPERT Preview Preview Preview Preview Settings Data Display View gt Open Preview Window Preview Settings X Y Preview Data Display Preview GUI e Preview Settings Preview GUI Preview GUI ET
535. t B1500 3 19 1001 MFCMU MFCMU 1 5 3 m Zx Dx D E Ep Zg IZxl Yo x IZxl x 100 96 Ep EpL Eposc Ep Yo YoL Yosc Yo S Zs Za Zosc Zs Q Table 2 21 Table 2 22 vv Table 2 24 Z E 6 E 100 CORE Dx lt 0 E 90 Dx gt 0 1 Ex 1 Dx 2 D Dx lt 0 1 E 100 0 1 lt Dx lt 1 Ex 1 Dx 100 GORE Dx lt 0 E Dx 96 Dx gt 0 1 Ex l Dx 7 Dx 96 Agilent B1500 3 2 39
536. t Setup Hi f Advanced Channel Settings Unit SMU Name Series R NONE 1MOHM SMU p 7 46 SMU Filter SMU ON OFF SMU p 7 45 Wait Time Control p 7 44 Output Wait Measurement Wait Factor 0 7 10 0 1 p 7 44 N c After Measurement Settings
537. tal function test MU failed CPLD test MU failed FPGA test U failed EEPROM test U failed PLL1 PLL2 test U failed PLL DET low state test U failed PLL DET high state test U failed PLL1 lock test U failed PLL2 lock test U failed PLL2 lock test U failed Hcur DC and VRD ADC test MU failed DC offset test J failed DC bias OV test CMU failed DC bias 25V test eS eS 0 Q 0 OQ Q Q O Q O O0 A ci Agilent B1500 3 N848 N849 N850 N851 N852 N853 N854 N855 N856 N857 N858 N859 N860 N861 N862 N863 N864 N865 N866 N867 N868 N869 N870 N871 N872 N873 N874 N875 C CY OQ O Or CO O Q Q Q OO 6 O OG c J failed DC bias 25V test MU failed PLLO test J failed PLLO lock test U failed PLLO lock test U failed DDS test U failed DDS1 test U failed DDS2 test S m i E c c J failed VRD normalizer test c J failed RAT test ci J failed RA2 test z c J failed ExR test U failed R LPF2 f1 test MU failed MODEM DAC test U failed N II DAC test U failed N QI DAC test U failed N IQ DAC test MU failed N 00 DAC test U failed TRD normalizer test U failed NAI test U failed NA2 test U failed NA3 test MU failed N_LPF1 12
538. tup Name 13 Date mm_dd_yyyy hh mm ss AM PM 4 18 Agilent B1500 3 File Type XML Style Sheet File Path Extension of Output File Data Storage OK Cancel Test Result List View Non preserved data Close EasyEXPERT 2 Count 3 ID Device ID EasyEXPERT Compressed Test Result Compressed EasyEXPERT Test Result CSV CSV XML Spread Sheet XML Using XSLT XSLT XML Style Sheet File Path XML Browse Select XML Style Sheet File xml txt csy xls
539. ur Lpot a 4 16442B Hcur Hpot Leur Lpot 16442B BNC Z Agilent 1250 2405 2 4 Hcur Hpot Lcur Lpot 16442B PGU1 PGU2 VSU1 VSU2 VMU1 VMU2 Hecur Hpot Lcur Lpot 3 18 Agilent B1500 3 001 Table 3 3 Interlock 1 002 1 Agilent 16495 Installation Guide
540. ure CMOS Bipolar Memory Mixed Signal Device Analog RF Optical TFT Discrete Reliability Nanotechnology Agilent B1500A BasyEXPERT VARI VAR Agilent B1500 3 2 47 C V SMU E CONST VARI DC VAR2 128 VARI VARI FE Hx gt 1 VAR a x VARI b E E EEZ CONST E k E ag pm FAJE E FB I b
541. ut 2 Text Services and Input Languages Add Agilent B1500 3 NOTE Bx EL Ke 3 Add Input Language Input Language Japanese OK 4 Text Services and Input Languages OK 5 used in menus and dialogs English 4 Resional and Language Options OK 5 Windows Resional and Language Options Languages 7 Language used in menus and dialogs English EasyBXPERT Windows
542. uy Zen Asa boot OFT j Ads Rosst ON 4 4 Agilent B1500 3 EasyEXPERT Workspace Configurator 1 Vou have esed instrument previousiy Do yos wam to Comtim working on Pw previous setups and data Ves want to continue working on the previous setups and data No 1 wast to start new session Note Iven if you start new session you can i access setups amd data from previous session KA Yes I want to continue working on the previous setups and data OK Agilent B1500 3 EasyEXPERT Workspace Configurator No lwant to start a new session OK Next Next
543. z 0 1 Hz 100 kHz 1 Hz 1 MHz 5 MHz AC 10 mVrms 250 mVrms 1 mV DC 0 lt DC lt 25 V 1 mV 25 V lt DC lt 100 V 5 mV 25 V SMU CMU SCUU Table 2 13 lt 200kHz 509 100 Q 300 Q 1 KQO 3 KQO 10 KO 30 KQ 100 kO 300 kQ lt 2 MHz 50 Q 100 Q 300 Q 1 KO 3 KQ 10 KO 30 kQ lt 5 MHz 50 Q 100 Q 300 Q 1 KO 3 KQ 2 22 Agilent B1500 3 Table 2 14 1 2 R X Q G S B S Z Q 0 Z Q 0 Y S 0 Y S 9 Cp

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