取扱説明書 微少流量計 ニコーフローR
Contents
1.2. 2 4 m E CU A 7 2 Se Tp uU L C F e
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7. 24 CPF Yx 4 2 5 5 1 f ZE f 2 19V 24V kN 6 3 0V 1 810 0 8 17 _8 6 ee 2 1 lt mua 1 3 dU _ 18 No 5 2
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11. 3 4 5 4 2 2 1 l gt 150 2
12. TEL 0773 42 3933 623 0041 30 Te1 0773 42 31510 Fax 0773 42 3155 223 0052 6 2 21 045 545 5326 Fax 045 545 6935 7465 0025 5 405 052 709 5064 Fax 059 709 5065 7578 0965 1 6 4 Tel 06 6745 83610 06 6745 8391 BR 5 SE 7623 0041 30 8 0773 43 15910 Fax 0773 43 1595 H 7812 0897 1 6 46 092 411 1724 Fax 092 411 9883 8 30 17 00 12 00 12 45
13. AN E 1 1 2 2 1
14. 2 7 2 8 25C 65 10 60C 5 80 R H R 70 5 J 2 92
15. Vasa L C lt 7 S lt UA 5 5 CO 9 2 sa 1 x x 5 SIG 12 24V DC12 24V 2 F DC12 24V 5 5 1 2 NITTO SEIKO SW DS 1 MADE IN JAPAN SW DS1 3 D S 1 DS n 5 4 6 6 1 6 1 1 AN
16. 2 8 3 1 3 1 1 1748 19 1728 19 1 2B 15 3 4B 20 S 52 4 100mPa s 100mPa s sg mPars 100mPa s 8 100 ames W 5 lt 40 i Rg 1 0MPa 10MO 21 0MPa RM 10MO a RS 0 7 RF a 172 15A FF LS LS SCS14 S2 1 0MPa 505316
17. VV PVC SCS14 SUS316 PVC MPa 120 ass 52 10MO 21 0 120 x W 03 7 GBT 1 0 120 0 3 3 1 2 m z p C CC C Fi 54 H L 0 5V F 2 3kQ 71000 H 2 OFF 1 L 23 ON 1 2 2 1 MM ET Em 1 2 LS S2 5C gt 120 C 10MO S2 5 60 1 3 1 3 LS 52 0 75 L h 1 OMO 3 15 3 15 3 15 1 15 0 5 15 10LM 12 100 12 100 8 100 2 100 10LG 40
18. 3 3 tt lt 1 LS 2 LS 1 OMPa 3 S2 1 OMPa 4 VV 5 9 WW 6 20PO 7 D 20PO 8 4
19. AN 6 3 6 3 1 40 609 6 6 3 2 1 2 A 2225 6 1 7 7 1 3 1 1 1 1
20. O Sa NNN s sss 61 RFP 6 2 tt 6 3 tt ao 2 eC 1 1 1 2 1 3 ag a s P gt s s p aya Sigue Sh ar S y 88 E 11 9 3 5 4 6 1 6 1 6 1 6 1 6 1 6 1 6 1 6 1 1 1 1 1 1 2 1 3 1
21. w MNV14104 13 10 Wasa C l uwa 2 1 2 2 RC A CR 2 3 ee 2 4 z ua w Jasna W Wa a w w WL sa ap w sia a Wu a w W Nuda W 2 5 0 6 2 6 5 aaa aa anda TO 2 7 2 8 a a 3 1 mak p kau a a 9 3 s Cum wam Sum QB Da h w US us bus QS WU 3 1 2 sah a us ma hua k S as yc wui ib a qa al 3 1 3 3 2
22. 25 4 2 3 1 2 4 2 4 AN 1 2 3
23. DC 12V 24V 2 3 DC12 24V W 3 5ms HH L 0 5V DC12 lt 24V W 3 5ms H L 0 5V 1 2 8 AM HKD 4 2 7 3 8 29 ae 8 4 k a 5 9 5
24. LA e 4 2 5 2 2 2 6 254 AN 2
25. 7 600 307 600 20 600 107 600 1 5 L h 20 200 15 200 10200 40 60 25 K 2 1847722 3 1 4 0 040 0 035 0 030 0 025 100 mPa s 50 mPa s 0 020 0 015 0 010 0 000 20 40 60 80 1 MPa 10 mPa s 0 3 2 3 2 18 I w x A __ 50h LA 600 2 001 80 LS S2 60 40C 1 0MPa 2 0MPa 3 0MPa 1 S2 2 83 8 3 3 1 L 5 A p 6 60C A 8 0 2
26. LS 1 0MPa K 5 nes 163 164 170 178 8 0 60C A 8 0 60 60 170 80 _ 3 4 3 S 2 1 0MPa A 5 nts OLO 5 10 6 9 5 29 60 il 8 ii 202 37 _ 6 12 89 14 7 ze2 36 _ 8 0 C 60C H 8 0 3 5 4 V V L A D T 132 m 0 55 70 6 L 40615 it5 Ira 0 0 15 1 5 95 70 16 4 05 24 _ 5 5 21 0 V V 6 2 0 P O 2148 220 0 5 7 20PO 8 7 8 1 0MPa m F L H d _ FC200 SUS304 SCS14 SUS316 PVC PE 26 20 170 9 _80 _ 1 0MPa Rc1 2 PVC PE 83 8 4 51 4 1
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