ガスクリーン・ピューリファイヤー 取扱説明書
Contents
1. 163 1325 6 5 1 TEL 03 6901 5700 532 0003 3 5 36 TEL 06 632. 2 IV
3. 1 C 34
4. 8 4 1
5. 12 305mm 2
6. a
7. 4 3 A
8. f Ns A He Ne KO Xe Hg SiH4 14 CF4 116 C2Fe 218 CsFg CH4 CzHe CsHg CHs sO HCD HBr Cl AsH3 PHs GeH4 Oz N2O
9. 24 0 85 ft3 II 50 1 76 ft3 IEL 100 3 53 ft ST 100 3 53 ft3 310 10 9 ft3 3
10. 1MPa ROT rT apopwad 1000 psi0 69 MPaG Samn am Ne 1 0 84 21 mm 3 31 84 mm 14 II 1 36 35 mm 3 31 84 mm 14 TIEL 1 36 35 mm 4 50 114 mm 14 ST 1 25 32 mm 5 00 127 mm 14 2 50 64 mm 8 20 208 mm
11. 3 40CFR 261C D
12. 5 10 F a b c d e f
13. 4 B D gt 15 psig 0 10 MPg 2 D MV CzH4 CsHe SiH4 SisHe SiHsCHs SiH CH3 3 GeH4 SFe 20
14. TN V A 100 5 3 Pe a
15. 4 B 10 2 3 5 4
16. A 1 V 1 4 EMEA A B C D E II 100 100 V 100 1 1 MV 2 0
17. 3 A B C 6 0 5 1 0 slpm 14 17ie 34 1 1 2 1 scfh VCR TI 0 5 3 0 slpm 14 gt 1 1 2 1scfh VCR 4 2 I EL 0 5 6 0 slpm 14 gt 1 1 12 7 scfh VCR 4 2 ST 0 5 3 0 slpm 14 1 1 6 4 scfh VCR 4 2 1 0 10 slpm 14 54
18. 4 INP OXP 2 SiClk Oz COz NsO SIP FCP NHsP SFeP 2
19. 1 2 TLV 11
20. 3 4 3 12psig 0 83MPag 2 7psia 186 OSHA TWA OSHA TWA OSHA TLV NIOSH IDLH MSDS TWA TLV NIOSH IDLH
21. MSDS 13 US Pall Corporation Waste Technology Service Inc 716 754 5400 10 1 2 12
22. 45 30 60psig 0 21 0 41MPa 1 7
23. 3 4 14 5 6
24. 1 10 2 3 MSDS MSDS MDSD
25. SiH4 SisHe SiHsCHs SiH CHs s 10 CLXP HCLP HBRP 2 5 12 5 5 5psig 0 03MPa 60psig 0 41MPa MAWP
26. 1 A 3 5 10 55
27. VCR 8 1 2 9
28. 4 A D II Hz 0 5slpm 1 06scfh 1009 10 IL 02 NzO NHs CO5 4 A D
29. HCI HBr 1 He Nz Ne Ar Kr Xe Hz CH4 CsHa c CsHe CsHs CaHio CHs zO CO COS CHsF CHzFz CHFs CF4 CzHzF4 C2HFs CzFe CsHF7 CsFg C4Fa
30. 2
31. 4 B D HCI II 30psig 0 21MPa HCI 2 1 0slpm 2 12 scfh 100 50 3 HCL
32. II O2 0 5slpm 1 06scfh 100 10 4 lt a HCL HBr CCl BCls Cb SiHsCI SiHzClz SiHCls SiCM 100 15psig 0 10MPgj 2
33. 5 0 18 9 24 085 072 008 10 spm 2 12 scf 04spm085sc 9 5 0 18 9 50 76 150 005 30spm 6 36 scf 10spm 12sc 9 9 0 32 f 90 618 ft 27 0 10 f 5 0 slpm 10 6 scf 10spm 12scf RS 9 032 9 90 G8 8 27 010 8 50spm 106 scf 10spm 12sc 64 626 640 26 192 068 10spm 21 2 scf 10spm 12sc 7 4 HCLP HBHRP HCLP HBRP
34. 2 4 C E SiH4 II 0 25slpm 0 53scfn 10 60 0 5slpm 1 06scfh 100 3 IV
35. 2 1 21 2 scfh VCR 4 3 3
36. gt 1 MSDS 1
37. 2 100 Flpm T T V F 2 3 A A A9 6 EN T
38. MSDS 6 4 5 20 7
39. CO2 SiHzC SIHCl3 SICL BC RA SFa NH
40. 4 VCR VCR Swagelok 6 2 INP SIP He H2 Ng CH9 Ne C2H4 0 C2Hs Kr CH SiCl CaHio c CaHe CHskO 34 103kPa 5 15psig Si SHy SH9 SiHsCH3
41. 5slpm 1 06scfh 100 1 0 slpm 2 12scfh SiHzCle 100 50 0 HI SiHsCI SiHzCl SiHCs SiCk 209 2
42. 97 3719 862 0956 14 22 TEL 096 382 8420 04 2014
43. IP FCP CLXP HCLP HBRP SF6P NH3P GEH4P OXP INP SIP FCP GEH4P SF6P NHSP MSDS 12 2 1 UHP POU Q A UHP UHP
44. P HBRP overheated when black F B B D 10 SiHzClz II SiHzClz 10 2 SiHzClz 109 0
45. PFIM501e 1 1 2 3 4 5 6 7 8 9 10 Filtration Separation Solution su 1
46. SH CHsk Csh COS 2 xxP FCP CHsF CHzF2 CHF3 CF4 C2HzF4 C2HFs C2Fe CsHF7 CsFg CO CaF GEH4P GeH SF6P SF NH3P NH CLXP HCLP OXP BCls HCU CDA Cb SiHsCI SiHaCb SiHCb SiCI O2 CCl O2 OXP COJ SiHsCI N2O SiLkCM NP GHC fp SC HB CDA INP S
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