母ーLK R@M
Contents
1. YAMAOKA DESIGNING N2. AUTO 3 20 6 OR 9216 KN
3. 2008 12 U TEL 06 6998 2351 FAX 06 6997 3045 101 0052 1 6 4 9 IS 0 14001 IS0 9001 2 ei 2 4 TEL 09 epB6 556 FAX 8 2556782 VAMAOKA http wwwv silkroom co jp info silkroom co jp ISO 14001 IS0 9001 T570 8585 7 30 DAFA S 5 3 3
4. AUTO HMLOW 2 IIW i 2 AUTO ci 3 ST FG 11 000 11 550 ST MG 31
5. i SECC SECC 1 DOP DOP 50 80 98 a DOP 1 1 0 8 1 1 1 1000 0 02 29 DOP 9 6
6. 1 1000mm rk 0 01 3 EE
7. 1 St 25 GR 0 01 2 gt 2 2 0 01 OR 3 4 LL ita se HS ET AA THEA F 4 3 rr FF 3 a gt 4 4 1
8. oILK ROM ST 103AMGS1 7C mm 59760H2 gowinsw eswioow 20m min 15m min 9896 DOP 0 8m LOW ST 073AMGS 1 9C mm ON OFF H LOW AUTO OFF 1 AUTO ON 3 HLLOW 1 32 em 80 SECC
9. OE a 2 GS O85 S60 98 a 30 35 20 30 DOP 1 LOW 76 8 1 5 98 2 100 0 8 98 NASA Contamination Control Hand Book
10. 000 32 550 ST 103AMGS127C 560 000 588 000 ST 073AMGS129C 560 000 588 000 ST 103AFGS127C 540 000 567 000 ST 073AFGS129C 540 000 567 000 ST 053AMGS127C ST 053AFGS127C 560 000 588 000 540 000 567 000
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