NC015A・NC015B 取扱説明書
Contents
1. jf ppm 0 01 0 02 0 1 0 2 0 5 3 6 0 5 1 2 2 5 10 15 20 2 50 12. E QZQNE PRODUCTS 2 E 1 2 3 4 6 Ri 7 1 NC015A 2 NC015B QZONE PRODUCTS EOP P64 001 7 001 02 VM i y i a 4 a ol 0 4 N y A EOP P64 001 7 001 02 M n Pan NCO15A Rc1 4 NCO15B Rc1 100kPa 25 5 C 1 0 0 NC015A 2 L min 100 000 volppm NC015B 20 L min
3. 215 0033 2 3 12 TEL 044 981 0560 FAX 044 981 0561 E mail ej ozone ejk co jp 17541 0046 3 2 13 5 TEL 06 6231 3528 FAX 06 6231 2929 E mail ozon osaka ejk co jp 7215 0033 2 3 12 TEL 044 981 0560 FAX 044 981 0561 E mail ejozndsn1 ejk co jp
4. 3 5 0 C 50 000volppm Be 100KPa
5. 59 8 P 40 0 1 ppm 1992 0 1 ppm TWA ACGIH 1992 1993 E J QZQNE PRODUCTS 1 EOP P64 001 7 001 02 CVD SiH4 S izHe S izC ls TEOS AsHs PHs BzHe CVD
6. 4 5 6 7 8 QZONE PRODUCTS 5 EOP P64 001 7 001 02 8 610 6 B N_M8x25 6140 PCD 120 LU rf 9 CO ne 7 Ao Sie Ol Beek oh ee CN sips IN Se ee VA 89 xt2 oO amp F 1 a ST st pa I QQ 2 Rc1 4 4 PF at E SUS Hie 1 NC015A E CONE PRODUCTS oe E EOP P64 001 7 001 02 eset IN os ae SE SRUN M8x25 Fy x OJ BCD 120 co ues CO CN Be Gt ee x tS Jp PSOIXE2A 69 Ez CN NE Sr Co ae xB SUS iE QZONE PRODUCTS 2 NC015B EOP P64 001 7 001 02 E J QZQNE PRODUCTS 8
7. 50 000 volppm 0 1 volppm N ox 1 0 volppm pee 50 000volppm 50 000ppm Nox 1 NCO15A NCO15B kPa 100 C lt 60 300 C at50000ppmoO s AR SUS304 2 2 mm 989 1 L286 o89 1 L292 kPa lt 0 1 L 1 0 p 1 5kg L Rc1 4 Rc1 E J QZONE PRODUCTS 4 EOP P64 001 7 001 02 2 6 E J mm 3 09 x2
8. 0 6 0L Mn Mn O 60 70 CuO 15 25 Nio 5 15 1 7 U 2 SUS PTFE R1 4 NCO15A R1 NC015B SUS PTFE R1 4 NCO15A R1 NC015B fF 1 Oo we 50000volppm N oX E 1volppm 1 2 3
9. EOP P64 001 7 001 02 E0 HO522 NCO15A NCO15B 2011 20 E J QZQNE PRODUCTS EOP P64 001 7 001 02 2 3 1 2
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