高精度破面観察手法の開発と特性化への応用 - 酒井・泉研究室
Contents
1. 00000 0 0 00 00 0000 00 00000 W h x b x 8 00000 000 000 000 00000 al 00000 00000 21 00000000 0000 60000 l E 400000000 MATHEMATICA ver3 0 Wolfram Research 1 00000 0000 0000 III 00 000 70000 0 00 Hurst O L L 200 00000 W j a gt IW h G a l 8 0 O L 00000 000 0 00 6 00 60 00 0 00 0 00 0 00 0 00 0 00 00 0 006 0000 OOOD 0 00 00 6 006 00 6 006 0000 02361 L 00006 006 000 00 00 6 0 0 6 00 6 006 006 006 006 006 0000 UU Hut 1 OOOO LD 4112. Elionix 0 ERA 88000 0 000000000000 25 6316000000000 000 500000000000 000 50 0 0 00 0 00 00000 2560 00000 00000 000 00000 000 3000000000 1200x900 000000000 00000 00 00000 00000 0000 TID I IB IBU TD 00000 5 0000 000 0 00 00 51 53 7 00000 0000 6000000000 130x90 0 0O 00 U 0000 00006 000 245 SUN Woksain 00000 0 0000 00 00 0 00 0000 00 0000 0 00 0 0 0000 0000 000 600 410 50000000 400000 60000 40000 BIB L 00 0000 00006 00000 060 0000 5 000 00000 0060 0000 00000 EUR HUH E 0 00 800 90000000 0 0000 Line 21 30 00000000 SEM 00 L 00000 0000 00 0 00 00 0 0 00 0 0 7000000000000 IR U E E 0 e
3. 2 64 0000 00 000 00000 position of point measured by integration of secondary electron intensity 000000000 0600 0000 60 00000 III L 00000 000 0 00 000 000 00000 00 00 0 000 0006 10 0000 94 0000000000000 1000 h x Z h Ax 4 0000 00000 00000 060 6000 00000 1 000000 00000 006 00000 00 00000 600 h x h x x h x h h 5 wrw 0000 6000000 b a 14b 6 00 20 0 0 0 00 0 0 0 0 0 0 0 00 0 0 2 7 80 0000000000 wO O ll 0000000 0000004000090
4. Hurt III III L 0820 00 OO 0 760 070 0 9 850 061 000000000 200 0000000000000 2200 00000 Hurt 0 760 0 000 Hurt 160 1 00000 006 00 0000 000 00000 0 00000 0000 0000 0 00 0000 0 00 0 0000 0 00 00 00000 0 00000 00 00 000 00 0 0 00 00 0000 0 000 0 R 0000 0000 0 00 0000 00000 06 000 00000 s0 0 l 00000 00 0000 0 000 00 00 0 0 00 0000 0000 0 0 00 0000 000 L 0000 0000 00000 00000 00000 00000 006 00000 00000 00 00 00 0 00 00 00000 000 0006 00000 00 0000 00 000 000 0 0000 0 00 0000 0 00 0 000 00000 0000 00 00 0 0 0000 00000 00 000 0 0 0000 0 00 0 000 00 00000 00 0000 000 000
5. 0000 0 00 0 000 0 0 00000 0 00 000 0 0 00 0 0 0 0 00 0000 0 00 00 00000 000 00000 l DUJUDDUUDDUUDDUUDDUUDUDUUDUUDDUUDDUUDDUUDDUUUDUUDDUUDU H H 00000000 0000000000000 000000000 1981 0000000000000000000 20000 129 99 198 33 413 517 634 754 855 948 1059 1147 1247 1980 0 0 30 141 40000 000 0 000 60 0 l 5 Tadao Suganuma J Electron Microscope 34 4 328 337 1985 00000000 986 2125 2132 0000 01993 40 73 8 0 21 6 282 1983 000 0000000000 01991 707 722 10 Schmittbuhl J Vilotte S Roux Phys Rev E 51 1995 131 147 997 197 222 0 0 0 L 12 500 1176 1180 2001 13 Delaplace J Schmittbuhl Maloy Phys Rev 60 1999 1337 1343 09 000000000000000000 995 0 00000000 a5 00000000000 000000 01984 308 312 01000000 16 17 0 00000 0000 000000 00000000600 7
6. 0 1 Em 29 10 Secondary Electron H m Proposed Method AA 1 aa E C C 555 Stereo Matching i PAE 16 L 7 Vq 80 J N N 5 V i i i i i i i i aa kasa 49 755 1 14 23 11 7 120 m Je Aa AS 0 80 k 0 60 377 120 76 181 13 d Secondary Electron P ed Method I Mat g Fig 9 Measured Profile Height of Line 3 in Fig 3 um cross sectional line 0 60 377 120 76 19113 3 4mm Fig 8 The lower figure is measured profile height of Line 2 The upper figure is the part of Line 2 from 40u m to 120 u m calculated by different methods charpy Observation region crack propagation mm mm Fig 11 The picture of fracture surface Cha 1 of M 2 4 f l f mal 0 5 1 1 5 2 2 5 12 The distribution of local Hurst exponent 1900000000000000000000000000000 100000000 Hurt JII 2200000 00000 00000 Hurst
7. 65000000 400000000000 7 JUD L TTi liina Fig 1 Illustration of calculation for 3 dimensional 9 0 profile Point j 15 not only the position of 3 reconstructed point by stereo matching but also the H G J 1 meshxtan J 1 H G 1 j meshx G 1 j H G 1 j meshx tan 1 1 00 00 00000 00 0000 00000 0 00 00 00000 00000 00000 0000 00000 00 00 0 00 00 0 000 000 0 0 00000 LI 412 000000000000000000008 00000 0 00000 00 0 00 0000 0 00 00 0000 0 0000 0000 00 00000 00 0000 0 00 00 00 00 00 0000 0 0000 DO 0 0 00A 0000000000000000000000000000000000000000 4 2o00 1 0 00 20000 20000000000000 CYBERNETCS OU O Image Pro PLUS ver 3 0 for Windows 5
8. 00000 000 Sef Similadd 000000000 0000 000 00 0000 00000 0 0000 0 0 00000 0 0000 00 0 00 HII Hurst III L 21 00000 000 0006 2411 0 0 000000000000000000000000000000000 9 UL 1 0000 HBHP 0 0000 0 0 0 00000 00 0 0 0 00000 0 0 006 0 1 61 3 3171
9. 9 200000000 07 20962 10000 6 2 H i j H 4 0 1 1 1 mesh 400000000000 amp 1 1000000 6 000000000 00000 40000000000 000 1 41 1 6 0000000000000000000000600 0000000060 00000 00 000 0000 0 0000 0000 00 00000 00000 00000 4 000 000 HE HO L sa l S ALS 8 1 i j 1 1 tan 0 1 1 H 40 1 meshxtan 0 1 1 1 1 1 6 1
10. E E O0 800000000 800 Smoothing 00 00 0000 0 0000 00000 0 00000 00000 9000 0 0 00 000 00 00 0000 00000 0 000 00 0000 00000 0 00 0000 0 0000 0000 0 000 0 00000 00 000 000 0 0 0000 Source Image Oblique Image Fig 3 SEM image of fracture surface on Charpy specimen of SM400B Size 1200x 900 Fig 4 Surface profile measured by integrating secondary electron Fig 6 Reconstructed fracture surface profile by proposed method signals 120 Secondary Electron es Proposed Method 2 o Stereo Matching 0 0 60 377 120 76 181 13 Fig 5 Reconstructed fracture surface profile with stereo matching Fig 7 Profile height of Line 1 in Fig 3 measured by different methods 412 0000000000000000 00 0 0000 OOOOOCOOOOCOCOOOOCOCOOOOCOO 000000 1 oooi 0 100000000 0 L6mml 0 JII III L
11. iB 000 000 00 0 00 000 0000000000 0000 000000 1 0000 000 00 0000 00 00000 00000 0 0 00000 0 000 0 00 0 00 0000 000 00 00000 0000 0 00000 0 0 00000 0 0000 00 000 0000 00000 60000 00 00000 0 0 00000 0 0000 00 000 0000 00000 0000 00000 00000 0 0 00000 0 0000 00 000 III SIMI IL ii 0000 000 00 0000 00000 0 00000 0 0 00000 0 0000 00 000 0000 00000 0000 000 0 00000 0 0 0 00000 0 0 000 00 0000 00000 0000 00000 0 00000 0 0 00000 0 0000 00 0 00 0000 000 000 0000 00 00000 0 00000 0 0 00000 0 0000 00 0 00 0000 00000 60000 00 00000 0 00000 0 00 0 0 000 0 0 000 0000 00000 0 00000 0 00000 0000 0 0 0 000 00 0 0000 00 0 00 0000 000 00 00000 00000 00000 0 0 00000 0 0000 00 0 00 000000000000000 00 Bo lt Counting
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