OX400 低濃度ジルコニア式酸素濃度計 [スタイル：S2]
Contents
1.2. Media No IM 11M10B01 01 4th Edition Aug 2015 YK IM 11M10B01 01 4th Edition 2015 08 04 00 All Rights Reserved Copyright 2009 Yokogawa Electric Corporation lt gt ii
3. ERR ALM OFF SETE FARA KFT SE
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6. 50 M D PSE ES IM 11M10B01 01 4th Edition 2015 08 04 00 gt V
7. 1 O C 1 pa E O L L g c 0 7 4 IM 11M10B01 01 4th Edition 2015 08 04 00 7 5 lt 7 gt 7 8 C Retainer 3 C
8. Jy m ete res SN ron 2 ERR ee TAREN _ _ _ __ __ _ ___ TALL 7 v l t A O O O 1Pnt 50 25 50 07 50 25 EN EN EN gt ee seas wie PPM END rcAL 1Pnt 50 25 N OK v A 2 gt gt O O O O 2Pnt ENTI 70 00 PPM ENT 10 00 PPM ENT 90 25 PPM ENT 9018 PPM ENT CAL ZEro 10 24 2 SPAn 90 255 RID 4 ae aaa O 90 25 EN PPM ENI rcAL OK WA 5 oe
9. P Rc1 4 DE 1 4NPT Air N2 g6 OUT 08 N 4 1 IIM 11M10B01 01 4th Edition 2015 08 04 00 lt 4 gt 4 2 A 6 4 T ce v Ae Ol MS1 t ay Oe lhe allies O MS3 afe u z wo Er Rc1 4 mores 1 4NPT Ie MSH ek ES MSI2 MSI Q
10. O 60 RS232 0 MODE 2 SMoo ENT 30 69 30 30 MODE SMoo em OO aH LENT 30 Nm gt gt SMoo 2 SMoo SMoo 6 9 SMoo gt 6 1 9 MLS MS MODE 2 FFL AIL V MLS
11. 2 kPaG Air 200 25 mL min 200 mL min min Air 60 6 70 75 80 85 90 95 100 105 Air kPaG 6 19 IM 11M10B01 01 4th Edition 2015 08 04 00 lt 6 gt 6 16 6 5 MS
12. AI EEO TO MN Mc i Gi 30 kPaG ee ener P a 1 vol IM 11M10B01 01 4th Edition 2015 08 04 00 gt IV H2S SOx HC NH3 H Si Sn Cd Te As O
13. 3 MLS No 1 3 MLS 0 6 1 9 MLS 2 OX400 1 m 2 3 MLS CLOSE MSI1 MSICOM MSI2 MSICOM MS OFF OPEN OPEN 2 MS1 1 CLOSE OPEN GE MS2 2 OPEN CLOSE MS3 3 CLOSE CLOSE 6 20 3
14. RS232 38400 bps G 10 ppm 1000 ppm Air 2 1 Air 20 100 120 V AC 200 240 V AC 50 60 HZ 100 120VAC 10 50 60 HZ 200 240 VAC 10 50 60 HZ Max 200VA 100 120VAC Max 400VA 200 240VAC 213 W x 132 H x 375 Dmm 5kg RE Rc1 4 1 4NPT Rc1 4 1 4NPT M3 M3 D sub 9 3P 0 40 5 859 RH 5 50 C EMC CE n200 Bs EN 61010 1 CAN CSA C22 2 No 61010 1 04 UL Std No
15. gt TTI MODE LED S a Jeo T MODE 2 Naz ERR ALM LED 6 6 IM 11M10B01 01 4th Edition 2015 08 04 00 gt 6 3 o RE 2 a 10x10 Lt em mas Apes GE1 Auto Fee 1 010ppm 100ppm 1000ppm 1 om TA oO PA as SRE 1 ENT 70 00 10X10 me PPM 0 20ppm 0 200ppm 0 2000ppm 0 2 ae gt Ge gt 8 g gt a a 20 x10 2
16. 9 1 0 L min Air No 65 100 kPaG 10L min max 200 25 mL min O 50 C 0 300PaG 0 10 ppm O2 0 100 O2 0 01 ppm O2 4 ppm 0 10 ppm 0 100 ppm 0 1000 ppm 0 1 0 10 0 100 0 0 ppm 0 00 ppm 0 000 ppm 0 0 0 2 9 0 10 ppm 0 100 ppm 0 1000 ppm 0 1 0 10 0 1009 1 20 FS 0 1000 ppm 200 400 ppm 0 100 ppm
17. 9 7 2 IM 11M10B01 01 4th Edition 2015 08 04 00 lt 7 gt 7 5 7 3 2 1 a Fl 2 9 9 O O 3 mm ME MR 3mm 3 7 3 IM 11M10B01 01 4th Edition 2015 08 04 00 lt 7 gt 7 6
18. 0330 SENS tent 0000 ENT SEnS 1 1 4 a 16 16 16 0AC ENT 00Ab ENT AEOF ENT AEOE ENT FF7C ENT FF79 ENT g gt gt ZE1 ZE1 SP1 SP1 ZE4 ZE4 CON4 1000ppm 4 16 ACT7 AC75 tenn 7038 Q ewn 1021 Q TO OA N ENY Mi PM PPM __ rsEnSs SP4 SP4 CON4 CON4 CON4 6 8 SEnS IM 11M10B01 01 4th Edition 2015 08 04 00 lt 6 gt 6 8 6 1 8 SMoo Cele cease
19. 6 2 1 AAAAAAA 3 2 BBB ppm 3 CCCC 16 6 3 6 3 0001 Erl 0002 Err2 Err3 0008 Err4 0010 Er5 CPU O 0020 Em6 FAN IM 11M10B01 01 4th Edition 2015 08 04 00 lt 6 gt 6 14 1 0003 Err1 Err2 2 0017 Err1 Err2 Err3 Errs 4 MSB LSB 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 CPU Err6
20. GO C Y9011EV Le KLAR K9213FB SN All D NTH ee S K9643FB 5 IM 11M10B01 01 4th Edition 2015 08 04 00 8 1 R gt lt 8 f Ba 8 1 BRL IND A 2 OPES HEUPE GT LOM mB CD BUSCH GC OFLOP PLS 1 pA SAU SHS UP RERET LE UAB APPR 2S EHO NO AIO BPI UP DEEI FIL KONE BE HLP BADE WUR CG KET LH IS CECSY A f PD DED a Gay MVD PIB 6 SPD D5 GAM NW HARY wddoo07 008 HB VARy Gay GCE URBRIOV SHO f f BRD DERIGAM TV HREL qAL0 O 0Z OKC KA GEIMN BOK IY SELLY uvdS 0001 wdd 001 X wdd 0007 008 HEBLLV Ey Gis OE 6 2 Sy DES SG GAR MW PISCE HEY oO Tuvds w E RD BERG GARY MV HAZY O00L Wdd001 H V Toz EE 0 00L O0 SE 9 00 L wdd
21. E 5 IM 11M10B01 01 4th Edition 2015 08 04 00 Blank Page vii lt 2 B 0X400 gt S2 IM 11M10B01 01 4 CD CAA i O V 1 W E eeesessssescosesssscseorosessosossosessososeososesososeososeososesoseosososeososesssseseosessss 1 1 De O EE EEEE EAE IEEE AEAN 2 1 2 1 EP T A i DO 2 1 V E i P 2 3 2 3 FRIST a a eaccsesccsesccssceccsncssesseesessseccnncecesvessesncssesscsseonseesnesesnssseonessesnesss 2 3 2 4 HEAT cssssccsssccsnssccsnsscconsscconsseconsseconsseconssesonssesonesesonssesonesessnesesenesesanesessness 2 4 2 5 cccsecscssscccssscccssscccon
22. E ENT HEAt BIZ CAL 10 00 LED ppM ppm n pm 1 000 1 000 IM 11M10B01 01 4th Edition 2015 08 04 00 gt iii OX400 7 5 2 E 8 1 6
23. 8 1 IEC Relic A OX400 3 1 Hl rc e a ERT DT ld WS 3P OFF RNN oo A E Gee oe ee 1 5
24. OX400 M3 ON OFF O o P o co 4 20 mADC 2 3 o 0 1 0 5 0 10 V DC PUMP DO O gt OFF o gt gt 7 melee bse gt mA RC1 Oo anes pe sel J RC3 OO RCCOM O gt Ee D G 2 RS232 3 m CE 30 m
25. Ps Am BOTIA AME KV thease tra o mHE a e e E ere ET
26. General Specification E A Nia Ig fe AN
27. ad Err im ALM CLOSE mA 4mA mA 4mA AN 3 OFF FAIL CLOSE DO OPEN IM 11M10B01 01 4th Edition 2015 08 04 00 lt 7 7 2 1 ALM OX400 7 1 ALM 30 1 gt 7 2 ERR ALM ALM 7 1 LF 15 30 Air 10mV 30 mV 30 mV
28. 2 IM 11M10B01 01 4th Edition 2015 08 04 00 lt 5 gt 5 2 AP WY SETTING ENTER ENT PUMP SW POWER SW H ON POWER SW ON 7 52 A A N n 0 B b O a 1 C P P 2 D d Q q 3 J E E R r 4 J F F S 5 5 5 G Lo T 6 5 H H U HU 7 V H 8 A J J W 2 g K X L L Y y M A Z 2 5 2
29. ON OFF IM 11M10B01 01 4th Edition 2015 08 04 00 Blank Page lt 2 4 gt 2 1 2 2 1
30. rEV VITA eee a 2 VITA PrEV 1 i vita vi TA o oO ENT 797 oppw mm non for ENT THold VITA PrEV VITA non 6 4 HOLD HoLd IM 11M10B01 01 4th Edition 2015 08 04 00 lt 6 gt 6 5 6 1 4 nAMU MODE 2 PIPL A V nAMU ENT 4 20 mA DC NAMUR non Er HI Er Lo 3 65 NAMUR HI 21 0 mA Lo 3 6 mA FAIL CLOSE rEV VITA eo 2 1 Er Lo
31. 100 mm 1 L Er 3 1 IM 11M10B01 01 4th Edition 2015 08 04 00 lt 3 E gt 3 3 3 2 2 1 2 ei 100 mm 3 DP a CR HEIR LT EEU 260 mm i 238 i 10 20 20 330 193 ot b e a AAA _ ARIE Hil EP 25 i 100
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33. Air i y Air AIR ENT 20 78 ENT 20 60 gt OPPM gt OPPM ENI TCAL CAL AIR OK A EAA 10ppm 10ppm 1000ppm 1000ppm Yy O O O O EN A LL ENDI 10 38 PPM ENT 10 21 PPM ENT 0989 PPM ENT 1001 PPM ENT CAL 10 00 10 38 10ppm 1000 989 1000ppm v ta 1Pn Ai Air EEFT a o i i 20 60 20 95 O PPM ENT O PPM END 20 60 OPPM END CAL AIR AIR OK GE 7 2 6 14 CAL IM 11M10B01 01 4th Edition 2015 08 04 00 lt 6 gt 6 13 6 3 OX400 RS 232
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35. 1000ppm gt O gt FS 8 O FS 120 2 20 FS 1 10 ppm 1 ppm 3 ppm 2 2 100 ppm 20 ppm 40 ppm 2 lt 1000ppm gt 800ppm 100 0 2 2000ppm 3 1 LYST 0 6 0 8 2 4 100 20 69 909 2 3 1 1Pnt 1 1 O gt
36. 6 1 12 3 GEL CAL Air SEt C 2 SMoo 1 60 k 0 SMoo 6 1 8 MLS 1 3 MLS 6 1 9 0 6 1 IM 11M10B01 01 4th Edition 2015 08 04 00 lt 6 gt 6 2 6 1 ON POWER HEAt
37. 2 R K9643KH Rc1 4 T K9643KJ 1 4NPT A IM 11M10B01 01 4th Edition 2015 08 14 00 lt 2 gt 2 4 24 OX400 IM 11M10B01 01 01E K9643KC K9643KH Rc1 4 K9643KJ 1 4NPT Kit 15 Kit 5 O K9643KA Rc1 4 K9643KB 1 4NPT C Y9011EV 1 1 K9643ZE 1 1 10
38. 5 2 1 6 7 HEAt SEnS 6 1 7 AN IM 11M10B01 01 4th Edition 2015 08 04 00 7 4 lt 7 gt 7 7 TERZ 1 IVA OZR A OX400
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40. 2 3 0x400 0 00 0 0 IM 11M10B01 01 4th Edition 2015 08 14 00 lt 2 gt 2 7 mm TH Rc1 4 A HfL eg P La 1 4NPT T AH fin 35 3 MS E ead e PE VA e 5 26 g8 213 10 20 350 19 3 4 HABE MIM MM fo 4 S 2 TERR aa 1 4NPT Rc1 4
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42. hei MLS3 IM 11M10B01 01 4th Edition 2015 08 04 00 lt 6 gt 6 17 6 6 621 0 1 9 0 9 8 0 9 4 3 gt 2 gt 1 gt 70 00 Jor fao e 10 00 one ooo ern PPM lt PPM lt PPM lt lt lt lt lt MODE LED O o amp Ox 10 00 2 100 0 2 Z11000 100 PPM PPM PPM lt q ZEro lt 7Ero lt 7Ero gt om 10 00 pee paa 10ppm 4 gt lt ENT 6 21 IM 11M10B01 01 4th Edition 2015 08 04 00 B
43. Ig 3 3 4 3 dobiera e WARNING AVERTISSEMENT FAN EY Os 67 1 6 6 IM 11M10B01 01 4th Edition 2015 08 04 00 lt 7 gt 7 4 7 8 9
44. 100 mm 2 4 0Xx400 0 A0 O0 0 IM 11M10B01 01 4th Edition 2015 08 14 00 2 gt 2 8 MERZIA A mm K9643KH Rc14 200 K9643KJ 1 4NPT 29 5 2 M5 Rc1 4 or 14NPT 10 79 K9643KJ 110 09 so 157 130 2 06 57 A i Rc1 4 or 14NPT ECE BASIN eg i TOE n 47 T i200 x p 2 5 2 6 P Rc1 4 1 4NPT Air No A P 06 hepa os OUT g8
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53. 1 9 Fi BED HTH ETT ViTa 0100ppm 2 orn PPM TENT renG J ARS MAn MAn vita 0 100ppm o 1000 eppM MAn 2 MANUAL Vita 0 10ppm 100ppm 1000ppm 1 10 100 6 7 000 Be AQ eas lea UE om Low MAn He 6 6 Vy A Vita 70 00 opm n ak gt lt lt gt gt OPPM _ 633 50 90ppm WE C UATE HLow HLow MANUAL 20 RS CIAT Fee IO Low eee val Free le ENT 22 20 rm ET ENT 2 0 erm ENT Free High Al BAD ali SMENA High fR 2 ene 90 00 tent 90 00 a ENTI imG g
54. 20 20 mA 4 mA 0 V 1 2 200 25 mL min 200 mL min 3 6 1 1 rnG i 2 rnG ENT 3 1 AUto Auto 0 10 ppm 0 100 ppm 0 1000 ppm 0 19 0 10 0 100 10X10 1
55. 1 FS FS 10 ppm 100 ppm 1000 ppm 1 vol 10 vol 100 vol 02 2 FS 0 100 ppm 3 FS 90 10 0 1vol 30 0 1vol 2 FS S2 100 120VAC 200 240VAC Rc 1 4 1 4 NPT 1 PSE 2m UL CSA 2m VDE 2 5m GB 2 5 m BS 2m SAA 2 5 m P MS A 2 1 3 M D M D PSE
56. MS 1 SE zons 4 3 MS1 MS2 MS3 1 1 MSCOM MSI1 MSI2 MSICOM IIM 11M10B01 01 4th Edition 2015 08 04 00 lt 4 gt 4 4 4 2 2 4 1 M3 4 1 4 20 mA 0 1 0 5 0 10 VDC M3 PUMPOFF ON OFF M3 30m 1 ERR M3 DO ALM7 M3 RR a ol j TAERE EORR 30 m
57. VItA VITA o ENT OPPM ro VITA VITA ENT Er HU Spon CENT nAMU vita f VITA Er Lo VITA 6 5 nAMU IM 11M10B01 01 4th Edition 2015 08 04 00 lt 6 gt 6 6 615 ALM MODE 2 ALM ENT oFF ALL ALLHI IALLLo 4 100 DO CLOSE 6 6 666 2 rEV N Lo Vita VITA caL oFF tent EN d gt TALM Vita ALM ot v fa vita gt
58. 6 7 ALL 66 rEV VITA 2 VITA 10ppm v 1 i 10 00 ENT allt X 7000 SiN a LC Rm SU oo EK 7000 enr 1000 1000 o gt opp ENT orn ENT sEtC 6 7 SEt C 6 1 7 SEnS MODE 2 PIPL A V SEnS ENT 5 ZE1 SP1 ZE4 SP4 CON4 6 8 66
59. A OX400 1 4NPT T Air N 66 68 Nia mm 08 6 Air N2 pm Ia 1 4NPT Se Hu 6 18 619 Air 65 100 kPaG Air
60. CMPL 1 4 74 2 O 3 5 7 4 8mm 9g 5 O 6 6 0 2 g 7 O IN
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62. 0 0 ppm 0 00 ppm 0 000 ppm 0 0 0 2 9 0 20 ppm 0 200 ppm 0 2000 ppm 0 2 0 20 20X 10 2 2 MAn MANUAL 0 10 ppm 0 100 ppm 0 1000 ppm 0 1 0 10 0 100 6 3 FrEE Fr HI Fr Lo 1 MANUAL 20 FS MANUAL 0 10 ppm 2 4 ppm MANUAL 0 100 ppm 60 80 ppm A C 7
63. Rc1 4 or 1 4NPT Oy pwr OSVR K9643KJ 110 98 so 157 130 2 06 57 i Rc1 4 or 1 4NPT BUTT to OT 1 47 i g G 200 d 3 3 N T 50 500 ppm 500 mL min H 25 IM 11M10B01 01 4th Edition 2015 08 04 00 4 4 1 lt 4 gt 4 1 ae Ace
64. MS 1 AFA MSICOM IM 11M10B01 01 4th Edition 2015 08 14 00 Blank Page 4th Edition 2015 08 14 00 3 1 3 gt 3 1 ax a OX400 oak EewOR Ess Co o eo E REL SAOVEWCTA 0 40 C ME LU MBPT EEH TEU gt ar fe 30 kPaG SOBNAS
65. O co P Rez se SF 6 A 4 2 IM 11M10B01 01 4th Edition 2015 08 04 00 4 2 4 2 1 lt 4 gt Nia mid 3P ES 3P Ae 4 S A OFF
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68. 20 40 ppm 2 4 20mADC 5500 0 1 0 5 0 10VDC 1 10 kO 3 1 3 1 A ON OFF IM 11M10B01 01 4th Edition 2015 08 14 00 lt 2 gt 2 2 2A30VDC 2A240VAC 100V 120VAC 60W 480VA 30VDC 264 VAC 100V 132 VAC 2ADC AC CPU FAN
69. LED MODELED MODE ERR ALMLED ERR ALM ERR TALM ERR 4 HEAt 200 25 mL min 200 mL min MODE
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72. 6 13 REV rEV IM 11M10B01 01 4th Edition 2015 08 04 00 lt 6 gt 6 11 6 2 CAL ERR MODE MODE 2 ICAL O MODE OX400 4 1 ALL 10 ppm 1000 ppm Air 3 0 10 ppm 100 O2 O 8 ppm lt 10 ppm AAS 20 ppm 800 ppm lt 1000 ppm AAS 2000 ppm Air O2 20 6 AFDAT OWA ET AN 2 2 2Pnt 2
73. MS2 MS3 MSCOM CLOSE 1 OPEN 0 6 5 4 3 MS2 MSCOM MS3 MSCOM 0 0O MS1 ON 1 1 0 O MS2 ON 2 0 1 O MS3 ON 3 0 0O MSI1 MSI2 MSICOM CLOSE 1 OPEN 0 4 4 SISO MS NSICOM 1 MS1 1 MS2 2 MS3 3 1 1 AK OFF FAIL CLOSE DO OPEN T M3 P
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75. P 7 5 7 3 2 P IB IM 11M10B01 01 4th Edition 2015 08 14 00 aT Blank Page
76. User s Manual OX400 S2 IM 11M10B01 01 vigilantplant YOKOGAWA IM 11M10B01 01 4 gt i
77. 2 5 mm 260 10 20 20 330 238 gt GAG SAARE 1 o Qe On Off N 101 6 132 240 1 225 1 Fo o Lo Ss mem p 1 2 100 mm 3 2 mm 2 1 0x400 0 00 0 0 P IM 11M10B01 01 4th Edition 2015 08 14 00 2 5 gt 2 260 238 19 3 ey SEL 0F 9 LOL oy
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79. 61010 1 EMC EN 61326 1 Class A Table 2 for use in industrial locations 1 EN 61326 2 3 EN 61000 3 2 EN 61000 3 3 1 Influence of immunity environment Criteria A 20 of F S IM 11M10B01 01 4th Edition 2015 08 14 00 2 2 2 3 A 1 2 CE 2 gt 2 3 30 m RS232 3 m 2000m EC61010 EC61010 Il GE 2 Il 2
80. FAN 6 16 0017 4 DDDD 16 64 6 4 ALM1 ALM2 ALM3 ALM4 ALM5 ALM6 ALM7 ALM8 1 00C0 ALM7 ALM8 MSB LSB 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 ALM1 ALM2 ALM3 ALM4 ALM5 ALM6 ALM7 ALM8 6 17 00CO IM 11M10B01 01 4th Edition 2015 08 04 00 lt 6 gt 6 15 6 4
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83. hee ENT en TENTI CoEF ey 6 11 CoEF 6 1 11 CEL r MODE 2 CELr ENT O 1050 oVER AN i Air 6 12 rEV VITA op a 2 VITA 56 1 0 C an e ENO i ARs VITA CELr 6 12 CEL r IM 11M10B01 01 4th Edition 2015 08 04 00 lt 6 gt 6 10 6 1 12 REV rEV MODE 2 4 rEV ENTI 6 13 rEV VITA ooe a 2 vita vita aa 1 8 rev END oM ENT EV EV Vita
84. lt 1 gt 1 1 1 OX400 0 10 pom 0 100 vol O2 1 3
85. parts YA int Jef 8 internal WARNING n AVERT I SSEMENT 4 Heater r i 6 4 internal ltem Part No Qty Description 1 K9643KA Aspirator Assembly Rc1 4 K9643WK 1 Aspirator G7010XA 1 Bushing 2 K9643KB Aspirator Assembly 1 4NPT K9643WK 1 Aspirator G7010XA 1 Bushing G9612CK 1 Connector 3 K9643KC Panel Mounting Hardware Assembly K9643GM 1 Frame left side K9643GN 1 Frame right side Y9514EU 4 Screw 4 Heater Assembly 5 K9643KG 1 Sensor Assembly with O ring 6 K9643WR 1 O ring 7 A1113EF 1 Fuse 250V T3 15A 8 Line Filter K9643FB 1 Filter K9213FB 1 Plate Y9011EV 1 Snap Ring Retainer K9643ZE 1 Snap Ring Plier Tool to remove snap ring Do not exchange these parts Call service personnel YOKOGAWA amp Copyright Mar 2010 YK 1st Edition Oct 2010 YK CMPL 11M10B01 02E 2nd Edition Apr 2011 YK Yokogawa Electric Corporation Activated Carbon Filter Option code A ES Cotton filter Feltfilter 3 Activated Carbon Filter Element Kit 15 times replacement Item Part No Qty Description 1 K9643KH 1 Filter Assembly Rc1 4 K9643KJ 1 Filter Assembly 1 4NPT 2 K9643KK 1 3 K9643KL 1 Filter Kit 5 times replacement CMPL 11M10B01 02E 2nd Edition Apr 2011 YK 0X400 IM 11M10B01 01 2015 8 4 2011 5 3 hk
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