【PDF】樫山工業製ドライ真空ポンプ
Contents
1. N2. 1 211 8502 370 TEL 044 435 5856 FAX 044 434 9091 1 1 TYK61 Kashiyama 01 2012 8 SDE90 SDE120
3. m u sDE90 120 e oe o SDE90 120 NeoDry U I LBit 08
4. SDE120 SDE603A AsH3 SiH4 PH CI2 NH3 B2H6 HF SDE P CVD SDE
5. 211 8502 370 TEL 044 435 5856 FAX 044 434 9091 C 1 TYK61 Kashiyama 01 2012 8 NW40 NW50 NWO NW100 NWO r NW40 1 3P 0 5P O a a N ATM 200 220V 50 60Hz 5kVA 5kVA 11 0kVA 16 6kVA 40kW 62kW g7 7 7 7 kW 11 5 kW 2 8kW 3 2kW 05MPa 4 8L min 530C Ro3 8 0 10 7MPa 1 4 NN LCD D Sub25P 1 SDE90 SDET 20 PBH e is n sos si EEEIEHEEET IE ESE CL HE TE CHH HiHi P HHIETHHIIE HiHi ITT WI LL Lim TT LTHII Furapsng pe ein H P is E P E EN TOOT ION TPO TOO TO MD Ii Pret mua Fa SDE303A SDE603A SDE1203B SDE2003B RN iss 100000 FH 10000 FH s III j Il oo L LLL HI TT I samui anl
6. SDE SDE90 X SDE120 TX SDE303A SDE603A SDE1203B TX SDE2003B SDE 1300L min 2000L min 5000L min 10000L min 20000L min 30000L min 6 SDE90 SDE120 SDE303A X 207C TX _ BX MU NeoDry MU MU100 MU303 MU603 MU1203B MU 1660L min 5000L min 10000L min 20000L
7. O _ o
8. 370 TEL 044 435 5856 FAX 044 434 9091
9. 170 x 8D 30 NF h a W EZE L 2000mm 50 1E NW40 690 50j_ 370 SIKB 2 2 p 55 NJ EMQ NH r N 4 N2 ka s r hg 323 i m a 5 I s r J asum TI A u Rc3 8 Ne _ 4 Rc3 8 SDE303A SDE603A _ 163 1 400 i NW40 r x lt 3 l EMNMO OPTION xy hy EE Ns u I I G Ns E La w N x _ K Fani 8 _ i mu FAN su S r l TE U 3 NW40 28 760 8 3 Ng 1 4 Rc3 B 6 12 211 8502 370 TEL 044 435 5856 FAX 044 434 9091 1 1
10. TYK61 Kashiyama 01 2012 8 spa amp 50 sa NW100 155 550 I 400 Dl NW40 170x80x30 N OPTION EV apay 8 OPTION 3 _ N 25 F v JL 2 1 w NS Ns 11 m 1 TT l Ej F j w NW40J 8 Re3 8 Nz Z 14 Rc3 8 SDE2003B 5 NW160 155 _ 195 W 650 17mx8nx30l 10 l Ng I Ne a J 13 u Th NW40 og N N2 t amp H1 8 1000 104 Pr PZ Rese s F gt gt 211 8502 370 TEL 044 435 5856 FAX 044 434 9091 umum C 1 s TYK
11. lt GS 1 TYK61 Kashiyama 01 2012 8 ELIT SDE MU NeoDry Ee 1 Pa http www toyokokagaku cojp SDE MU NeoDry NeoDry
12. 1 O TYK61 Kashiyama 01 2012 8 NW25 NW40 n 57725 100mm 50mm 475 2XM8 1 I I WI I IWWINDWNNIII 1 RIO 211 8502 370 TEL 044 435 5856 FAX 044 434 9091 GS TYK61 Kashiyama 01 2012 8 L min SDE90 1 300 3 200 000 SDE90X 1 300 3 400 000 SDE90 SDE120 2 000 3 400 000 SDE120TX 2 000 3 600 000 SDE120 20CUP SDE303A 5 000 4 600 000 SDE603A 10 000 5 000 000 SDE1203B 20 000 6 000 000 SDE1203TX 20 000 6 500 000 SDE1203B 20CUP SDE2003B 30 000 7 000 000 SR 19 100 000 SDE NW40 i IE CV2U 70 000 SDE NW40 MU100 MU100N 1 660 2 800 000 MU300 5 000 4 000 000 MU303 5 000 MU6
13. Yr ll Ep rei H La L T SEN m V _ a 37 l NW40 28 810 51 NNz 11 4 Re3 8 211 8502 370 TEL 044 435 5856 FAX 044 434 9091 N EE C 1 s TYK61 Kashiyama 01 2012 8 NeoDry15E LO 13293 l l l l l l l x LO x l l l l l l NeoDry30E LO CN2 CN1 F 100 200V 211 8502 370 TEL 044 435 5856 FAX 044 434 9091 C NeoDry36E 4L LO N 9 2 NeoDry60E
14. r j l jll C j j jiji C j li IL HHH EH Et B _ III Ir SDE303 Z L L SDE803 SDE90 SDE603A SDE1203 s l 0 1 1 10 100 1000 10000 100000 211 8502 370 TEL 044 435 5856 FAX 044 434 9091 TYK61 Kashiyama 01 2012 8 NW25 NW40 N O 95 EE EE Rc1 4 0 5MPa 2 3L min 5 30 C 5 25 C Re3 8 0 1 0 7MPa EC o ssuwlociosm cesuw E 14 _ LCD D Sub15P MU100 10000 lI m lt z gi E TEEEHEIF E EEEHHE E EEHETIE S ETEEEHEFSSETEEFHE Cn jJ OP T EP PT ESI oI III Ll Ll Ll HEEHTRIECEEHHH EFHHIEEFHHIE8EFHII HIHI TLTHIL TL TH 1 0E 00 1 0E 01 1 0E 02 1 0E 03 1 0E 04 1 0E 05 Inlet Pressure Pa MU303 MU603 MU1203 100000 10000 E 1000 Purnping Speed L min 1 0E 01 10000 1000 100 Pumping Speed L min mima 1 0E 01 1 0E 00 1 0E 01 1 0E 02 In
15. TEL 044 435 5856 FAX 044 434 9091 3 TYK61 Kashiyama 01 2012 8 MU303 MU603 5 D _ 163 _ a 89 105 hi40 lef 415 380 J 7 SE WD NWui IIx8lx30 205 95 H Nam DN A gih WU Ng b 1 no IOPTION N Ft 6 Rc3 8 2 L a uy H MF lt lt m a sl lt Ng HE NW 28 L 660 A 61 1 6 288 2 F L b N Rc3 8 t Jp 2 1 Ju Z i MU303 NW50 MLI603 NW80 MU1203 50 1635 NW100 105 215 490 NW40 IB f a N S Nz LN Nz 1 OPTION T iki a Re3 8 s 6 8 E i sls t J j
16. 01 1 0Ex 01 LE LE LOEsQ1 LE LOE 03 LE L0E 05 E h Pal NeoDry36E NeoDry6OE 20SLM L mml MORE L euini E Pa E 2 Pal 211 8502 370 TEL 044 435 5856 FAX 044 434 9091 G f TYK61 Kashiyama 01 2012 8 ELIT 3 4 SDE MU 1 NeoDry 3 1 2
17. min 4 MU100 MU303 MU100 NeoDry NeoDry15E NeoDry 30E NeoDry 36E NeoDry60E NeoDry 250L min 500L min 600L min 1000L min 4 1Pa 3
18. 03 10 000 4 800 000 MU1203 20 000 NeoDry15E 250 680 000 NeoDry30E 500 950 000 NeoDry36E 600 1 060 000 NeoDry60E 1 000 1 400 000 SR 28 2 40 000 MU NeoDry NW25 22 000 NeoDry N2 10 000 NeoDry 2012 8 370 TEL 044 435 5856 FAX 044 434 9091 211 8502
19. 61 Kashiyama 01 2012 8 MU100 MU100N T mL BB 26 1 2 30 99 CN 2 99 eni NGF A 5 g LED 8 waming LED B CH 3 Alarm LED 3 450 2 252 sy as _ N anak kU Rol 4 Rc1 4 40x 4 49 24 4 NW25 MU300 Ich 5 i E 112 j amp amp w CN2 FT NW50 ME x 199 NE LED LEDS CN3 l T T 1 F L Q T Ng Co FI Fen B k Il i nk zl I 4 w k slk ikakEl Fez B B N28E4gS H J JE iS Est 1 i f I e e E B 5 MB ki amp il IL l 1 san E q f JL 4 x 4 T NW25 zahg PIE 2 40 x 4 211 8502 370
20. let Pressure Pa 1 0E 03 1 0E 04 1 0E 05 E TIE DD lOE 01 1 0E 02 LDE 5 Inlet Pressure Pa 1L0E 04 211 8502 370 TEL 044 435 5856 FAX 044 434 9091 GS 1 TYK61 Kashiyama 01 2012 8 NW25 1Pa ATM FE JR EE 100 115V 200 240V 50 60Hz 200 240V AB III HII g IIIIIIIIIIIIII 15 C 30 C _ 3 LN 23kg 25kg 54kg 56kg Es D Sub15P RS 3 N2 3 z s s 12 E GE8061E3 Z R UE RJHES lt SE 22 gy amp UEL SUV NeoDry15E 30E 36E 200 III NeoDry15E NeoDry30E 14SLM wj z gt Z F t l MZ VSZF3EBB aS wj Z Z F 3 FR W EFL L ein MO IEPE L an 108
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