仕様書
Contents
1. 2 3 1 32. 4 1 3
3. 5 1 1 1 SMU 10ch Se 1 2 100V 100V 100mA 100mA 0 5 V 1fA SMU 4ch 1 3 1 4 PC 1 5 1 6 1 7 1 8 1 9
4. 3 100V 15A 4 W 1300mm H 2000mm 2500 mm 450mm 600mm 400mm 5
5. 1 10 2 2 1 0 5 V 2 2 500g sec 2 8 100 sec 2 4 2 5 2 6 2 7 2 8 Timing On the Fly NBTT 2 9 100zF 2 10 QSCV Quasi static CV 2 11 QSCV 1 1 5 514 2
6. 24 11 1 MEMS Micro Electo mechanical Systems
7. j 1 IEy2 3 a v j
8. 2 SS 1 3 3 1 4 1 5 1
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