取扱説明書
Contents
1. 3 10 452. 1 2 3 4
3. SEMI F1 ASTM E 498 ASTM E 499 2 JIS
4. V 100 F slpm T T V F A A9 A T
5. 3
6. 1 2 e INP OXP SiClk Os gt NsO 24 e SIP FCP SF6P
7. PG550 PG2400 PG11000 1 3 2
8. e 2
9. SiHsCl SiHzCl SiHCl SiCl 20 4 B D 15 psig 0 10MPaG
10. 22 SDS SDS SDS SDS
11. 4 C E 15 psig 0 10 MPaG 2 E 20 C 20 30 E 10
12. 6 1 21 2 4 20 3
13. 23 TLV PG550 1 200 42 4 f PG2400 5 000 176 6 f9 PG11000 22 000 776 8 f49 J
14. 1MPaG 2 2 xxP INP SIP FCP He H2 CH N2 CH4 CHbFy Ne CzHy CHF
15. PG11000 3 45 1 8 7 PG11000
16. 30 60 psig 0 21 0 41 MPaG 10 PG11000 10 11 125 13 5 6
17. 3 PG550 2 slpm 4 2 scfh 4 PG550 MAN 2 slpm 4 2 scfh 4 PG2400 VMM4 5 slpm 10 6 scfh 3 4 2 PG2400 VMM8 10 slpm 21 2 scfh 1 7 PG2400 MAN 10 slpm 21 2 scfh 7 1 46 PG11000 10 slpm 21 2 scfh 6 174e PG11000 MAN 10 slpm 21 2 scfh 7 1 46 1
18. J 1 J HCLP HBRP HCLP HBRP
19. 5 10 PG550 MAN PG2400 MAN PG11000 PG11000 MAN 1 3
20. 26 11
21. eg SD 1 29 7 754 mm 9 J 2 J PG550 1 4 75 slpm 2 65 scfm 3 00 76 mm 500 psig 3 45 MPaG 7 94 202 mm PG550 MAN 1 4 75 slpm 2 65 scfm 76 mm 500 psig 3 45 MPaG NH S7 7 94 202 mm PG2400 VMM4 1 4 300
22. PG550 PG2400 1 2 3 4 5 6 PG550 MAN PG2400 MAN PG11000 PG11000 MAN 1 2 3
23. SiH4 SisHe SiHsCHs SiH CHs s 10 CLXP HCLP HBRP SF6P 5 5 psig 0 03 MPaG 60 psig 0 41 MPaG MAWP
24. VCR 10
25. SDS SDS PG550 PG2400 1 1 PG11000
26. SDS 12 1 PG550 Gas Source PG550 MAN To Tool PG2400 Y PG2400 MAN PG11000 PG11000 MAN Gas Source To Tool Vahe Vale amp 1 UHP 3 Way Gaskleen Purifier Gaskleen Purifier PG550 PG2400
27. 20 8 12 9
28. 30 60 psig 0 21 0 41 MPaG 10 12 13 14 5 10 15 4
29. 4 5 6 4 7 8 9 10
30. INP SIP FCP CLIXP HCLP HBRP SF6P NHS3P GEH4P OXP INP SIP FCP GEH4P SF6P NH3P PG2400 PG11000 WARNING Possible Burn Hazard For Use With Substantially Oxy gen Free Process Gases Only s PG2400 PG11000
31. HCI HBr 1 He Nsz Ne Ar Kr Xe Hzs CH4 CzsH4 CzHe CsHe c CsHe CsHs C4Hio CHs zO CO CHsF CHsFz CHFs CF4 C2HzF4 CzHFs CzFe CsHF7 CsFs C4Fas
32. 40 CFR 261 C D SDS 27 163 1325 6 5 1 TEL 03 6901 5700 532 0003 3 5 36 TEL 06 6397 3719 862 0956 14 22 TEL 096 382 8420 1 2015
33. 3 4 3 12 psig 0 83 MPaG 2 7 psia 186 millibar OSHA TWA OSHA TWA OSHA Ceiling OSHA Peak Concen tration TLV NIOSH IDLH SDS 25 TWA Time Weighted Average TLV Threshold Limit Value NIOSH National Institute for Occupational Safety amp Health IDLH Immediately Dangerous to Life and Health concentration 30
34. IV 2 3 14
35. SiH4 PG550 SiH4 10 2 SiH4 10 0 5 slpm 1 1 scfn 72 1 0 slpm 2 1 scfh SiH4 100 18 IV
36. 3 5 10 5 Ez
37. PG11000 5
38. 4 1 2 7 1 2
39. 4 A D PG2400 H 5 0 slpm 10 6 scfh 100 100 IH Oz NiO NH3 COs SO 4 A D
40. PG550 CO 2 0 slpm 4 2 scfh 100 60 HC HBr CCl BCk Ck SiHsC SiHzCk SiHCl SiCl 100 15 psig 0 10 MPaG 2 4
41. T V A 100 F 4 A B C D E 1 MV I IT MV I 100 100 100 I PG550 120 180 36 10slpm 1 0slpm 06 4 24f9 6 36ft9 27ft3 1 2 scfh 2 1 scfh 0 02 PG2400 500 750 150 25 slpm 2 5 slpm 25 17 66 f 26 48 ft3 5 30 ft3 53 0 scfh 5 3 0 09 PG11000 2200 3300 660 50 slpm 15 0 slpm 1 77 719 116 5 ft3 23 30 ft3 105 9 scfh 10 6 scfh 0 39 NN
42. B D HCI PG2400 30 psig 0 21 MPaG HCI 2 5 0 slpm 10 6 scfh 100 150 HCLP HBRP
43. SiHzClz 100 33 IV CsH4 CsHe COS SiH4 SizHe SiHsCHs SiH CHs s GeH4 NHs SFe BzHe IV 20 2
44. 1 8 2 10 10 1
45. 2 D B 200 300 D 10 SiHzCll PG550 SiHsCl 10 2 SiHzClz 109 1 0 slpm 2 1 scfh 3 5 slpm 10 6 scfh
46. slpm 10 6 scfm 4 00 102 mm 500 psig 3 45 MPaG 17 3 439 mm PG2400 VMM8 12 500 slpm 17 6 scfm 4 00 102 mm 1500 psig 3 45 MPaG 17 3 439 mm PG2400 MAN 1 2 500 slpm 17 6 scfm A 102 mm 300 psig 2 07 MPaG 17 3 439 mm PG11000 1 2 1000 slpm 35 3 scfm 0 152 mm 250 psig 1 72 MPaG 29 7 754 mm PG11000 MAN 1 2 1000 slpm 35 3 scfm 6 00 152 mm 250 psig 1 72 MPaG 20 25 VCR VCR MAN PG11000
47. 3 AO CzH CF4 KO CaH CsHzF Xe CsHs C2HFs SiCl CaHig CzFg c CsHs C3HF7 CHszO CsFg CO CaFs SiH SiHsCH3 SiH CH39 GEH4P SF6P NHSP GeHy SF NHs CLXP HCLP OXP BCl HC CDA CM SiHsCl SiHzCb 09 SiHsC SiHCl SiCI CO2 SiHkCM O2 NO SiHCM OXP INP SICl HBRP CDAP HBr CDA 1
48. MEBULKGASIJPf PG550 PG550 PG2400 PG2400 PG11000 PG11000 PG550 0 4 um 3 nm GLP9xxP FVMM4 PG2400 0 4 um 3 nm GLP24xxP F VMM4 PG2400 0 4 hm 3 nm GLP24xxP F VMM8 GASKLEEN PG11000 PURIFIER 0 4 um No GLP110xxPVFM8 F 3nm MAN
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