Home

"取扱説明書"

1.
2. HRZ 3 2 3 3 1028 3 3 2 1 70
3. SMC SMC TEL 03 5207 8260 TEL 052 461 3400 TEL 06 6459 5160 Is 0120 837 838 9 00 17 00 URL http www smcworld com 1028 oN
4. e 8 8 1 1 P8 1 8 8 1 1 e
5. 3 1 1 P3 2 HRZ 3 1 2 3 1
6. 15 HRZ 1 10 1028 1 1 OFF O 2 RESET OFF 1 13 3
7. P1 7 1 7 1 15 1028 1 1 7 2 1 7 3 18 MSDS MSDS
8. 6 P6 4 ON 1 10 HRZ 1 5 1 9 1028 1 1 5 3 ON
9. 4h 2h 30min 20min 14min 10min 6min 4min 2min 1min 30s 205 105 58 25 18 0 55 0 25 0 15 0 055 0 025 0 015 100 130 200 HRZ HRZ001 L HRZ002 L HRZ004 L HRZ001 L1 HRZ002 L1 HRZ004 L1 HRZ001 L2 7002 2 HRZ004 L2 HRZ008 L2 HRZ001 H HRZ002 H HRZ004 H HRZ008 H HRZ001 H1 HRZ002 H1 HRZ004 H1 7008 1 HRZ002 W HRZ008 W HRZ002 W1 7008 1 300 400 500600700 1000 1500 2000 3 6 3000 4000 3 3 3 9 1028 3 HRZ008 L HRZ008 L1 HRZ010 WS HRZ010 W1S HRZ010 W2S mm 7 1 0 015 100 130 200 300 400 500 600700 1000 1500 2000 3000 4000 3 7 3 3 0 HRZ 3 10 1028
10. 1 3 1 HAZARDOUS VOLTAGE Contact may cause electric shock or burn Turn off amp lock out system before servicing 1 3 No 3
11. gt gt Bel B s p
12. 10 35 0 50 30 70 15 85 1000 im 32 HRZ 3 4
13. Galden Fluorinert 3M 4 20 5 20 6 7 8 25C 8 1 HRZ 8 8 1028 8 8 9 4 HRZ010 W1S
14. Galden Fluorinert 3M 20C 20 25C HRZ 8 1 8 1 1028 82 HRZ001 H HRZO02 H HRZ004 H HRZ008 H kW 1 0 20 C 2 0 20 C 40 20
15. 20C 20 25C HRZ 8 1 8 5 HRX OM I028 8 86 HRZ002 W1 HRZ008 Wf1 W 2 0 20 8 0 20C C 5 1 0 1 609 u HFC404A C
16. ON 1 11
17. 30 TEMP SP TEMP PV 30 TEMP PV 30 TEMP SP 30C OFFSET 1C 31C 1 kk 8 9 84 Z x 8 20 TEMP PV 30 30C MODE3 HRZ 1028 8 5 BAND READY TEMP SP BAND TEMP PV BAND 5 3 9 PS 4 3 11 PS5 4 Ti
18. 20 6 7 8 9 25C 8 1 1 HRZ 8 2 1028 83 HRZ002 W HRZ008 W 50Hz 6OHz kW 2 0 20 C 8 0 20 c 20 90 Galden HT135 Fluorinert 3283 20 40 Galden 200 Fluorinert FC 40 20 90 HFC404A CFC Free 50Hz 60Hz MPa 0 45 0 65 20L min L 15 L 16 Rc 3 4
19. 4 1 5 EMO 5 EMO 4 1 1 6 1 1 13 E TI E 4 2 8 8 1 1 P8 1 7 7 1 P7 1 HRZ 41 B 4 1 1028 4 4 3 8 1 1 P8 1
20. WRN 94 24 DILow LevelWRN DI 25 Pump Inverter Error FLT 8 25 Comm Error _ WRN 27 DNET Comm Error FLT 28 CPRSR INV Error FLT HRZ
21. r gt X x OO RN Q 6 5 1 H 1
22. OFF 8 13 ON Alarm1 Water Leak Detect FLT 01 Alarm2 Incorrect Phase Error FLT 02 Alarm3 RFGT High Press FLT 03 Alarm4 CPRSR Overheat FLT 04 Alarm5 Reservoir Low Level FLT 05 Alarm6 Reservoir Low Level WRN 06 Alarm7 Reservoir High Level WRN 07 Alarm8 Temp Fuse Cutout FLT 08 Alarm9 Reservoir High Temp FLT 09 Alarm10 10 Alarm11 Reservoir High Temp WRN 11 Alarm12 Return Low Flow FLT 12 Alarm13 Return Low Flow WRN 13 Alarm14 Heater Breaker Trip 14 Alarm15 Pump Breaker Trip FLT 15 Alarm16 CPRSR Breaker Trip FLT 16 Alarm17 Interlock Fuse Cutout FLT 17 Alarm18 DC Power Fuse Cutout WRN 18 Alarm19 FAN Motor Stop WRN 19 Alarm20 Internal Pump Time Out 20 Alarm21 Controller Error FLT 21 Alarm22 Memory Data Error FLT 22 Alarm23 Communication Error WRN 23 24 DI Low Level WRN 24 25 Pump Inverter Error FLT 25 26 Comm Error WRN 26 27 2 Comm Error FLT 27 Alarm28 3 CPRSR Inverter Error 28 OUT Alarm1 Water Leak Detect
23. 7 8 25 C 8 1 HRZ 8 6 1028 m 8 7 2 HRZ001 L2 HRZ002 L2 HRZ004 L2 HRZ008 L2 kW 1 0 20C 20 20C 40 2008 80 20 50Hz 60Hz 27 5 C 10 40 0 152 HFC134a CFC Free 50Hz 60Hz 0 25 0 38 20L min L 15 i L 16 Rc 3 4 C MPa 10 25 0 3 0 7 50Hz 60Hb Lmin 5 5 6 6 15 22 18 23 Rc 1 2 50 60 2 200 200 208 1096 A 30 380 08
24. 1 ml 11 2 1 1 HRX OM I028 1 1 2 1 2 1 3
25. Pump Up Mode Running Start CPRSR Down Mode Running Stop 30 Stopping Internal Pump 5 3 5 10 HRZ 1028 5 5 4 5 4 1 1 23 0C 34 1C 2915 1 5 16 25 0C 34 1C 1 SE 1 lt MENU gt 1 1 SETT ING 2 REMOTE LOCAL ON TS AI SEE 5 17
26. 8 8 4 P8 4 2 HRZ 5 3 5 3 1028 5 5 3 3 2 P V TEMP SP O FF SET O NN POWER 55 2 54 2 1 TEMPPv 2 TEMP SP 3 4 OFFSET 8 8 4 P8 4 5 3 4 3 FLOW PV 20 0LPM 1 FLOW SP 2 0 L PM 2 3 HRZ010 W S
27. OFF 1 14 4 1 15 1 2 RESET 27272 OFE O HRZ 1 5 1 11 1028 1 54 m 0 15 HRZ 1 49 1028 1
28. 2 M12 M8 x2 9 HRZ TK002 34 3 3 3 6 HRZ 1028 3 3 3 2 HRZ008 L 2008 11 7 2 24mm x gt 4 NR lt lt 3 3 M8 gt gt 35
29. 20 6 7 8 55222 9 259 C HRZ 8 1 8 9 1028 8 m 8 10 HRZ010 W2S KW 9 0 20C 10 60 c 0 1 2 HFC404A Free MPa 0 38 200 15 L 16 Rc 3 4 C MPa 10 30 0 35 0 7 9 I L min 15 15 Rc 1 2 3 50 60 2 AC200 200 208V
30. START STOP RESET A YV HRZ 5 1 5 1 1028 5 5 2 23 6 SP 23 lt lt READY gt gt BAND 1 4 FLOW PV 20 FLOW SP 20LPM C gt 3 g C 3 lt MENU gt TEMP PV 23 6 SEL 1 SETTING 2 SP 23 0 2 REMOTE LOCAL 4 0 5 3 INITIAL SET CODE 01 OFFSET MODE1 2 1 ea 2 lt M
31. 3 1 HRZ001 L HRZ001 L1 HRZ001 L2 HRZ002 L HRZ002 L1 HRZ002 L2 HRZ004 L HRZ001 H HRZ004 L1 HRZ001 H1 HRZ008 L2 HRZ008 L HRZ002 H HRZ004 L2 HRZ008 L1 HRZ002 H1 HRZ004 H HRZ004 H1 HRZ008 H HRZ008 H1 HRZ002 W HRZ002 W1 HRZ008 W HRZ008 W1 10AWG x4 10AWG x 4 4AWG x4 10AWG x 4 5 5 5 5 5 5 22 8 5 5 8 5 5 8 5 5 8 22 8 5 5 8 2 5N m 2 5N m 6N m 6N m 4 12 5N m 12 5N m 12 5N m 12 5N m 20A 30A 60A 30A 3 2 P1 D Sub 25 RS 485 P2 D Sub 9 33 HRZ 3 8 HRX OM I028
32. MSDS MSDS MSDS MSDS 18 MSDS HRZ 1 16 1028 2 2 2 1 1 HRZ001 L HRZ002 L HRZ004 L HRZ001 L1 HRZ002 L1 HRZ004 L1 HRZ001 L2 7002 2 HRZ004 L2 HRZ008 L2 HRZ001 H HRZ002 H HRZ004 H HRZ008 H HRZ001 H1 HRZ002 H1 HRZ004 H1 7008 1 HRZ002 W HRZ008 W HRZ002 W1 HRZ008 W1 HRZ010 WS HRZ010 W1S HRZ010 W2S EMO lt 3
33. 122 12 E 1 2 HRZ 1028 1 HRZ 1 2 6 RB DLC 1 3 1028 1 1 3
34. 8 4 Tanasia 8 4 2 8 4 aN CDS aa ss 8 4 8 4 DO ban N SD um 8 4 ghi E 8 4 8 4 OO 8 4 820 Ch 8 4 unu aa hiya NR 8 4 02 90 55 8 4 8 5 BAND READY 020 00 u u uuu 8 4 HRZ 3 HRX OM I028 8 6 7 2 u uuu u u 8 4 8 4 8 4 8 72 Kusayu 8 4 am 8 4 HRZ 4 1028 1 1 1 1
35. e e 3 3 1 2 28 30 1 2 28 30 3 4 28 30 3 4 28 30 Rc3 8 Rc3 8 Rc3 8 3 3 HRZ 3 14 1028 3 3 11 3 12 3 4 1 4 2 Y
36. 8 9 25C 81 HRZ 8 10 1028 8 1 2 8 11 P1 D sub25P DC24V DC 21 6 26 4 5mA TYP 4 7kO DC24V DC 21 6 26 4 80mA 0 1mA
37. w 72 732 1 7L 73 HRZ 73 7 5 1028 2 3 7 4 7 4 36 36 36 36
38. 5 4 541 1 23 0 C 34 1 C 5 4 542 2 DIO REMOTE LOCAL 5 4 543 03 N A ALARM1 5 4 6 Fd n 6 4 Si a a 6 4 622 uuu uuu 6 4 Es 7 4 7 4 7 4 7 4 asa ASS 7 4 utani 7 4 731 kk 7 4 7229 7 4 aun sauna 7 4 nuna anu 8 4 arah um au Sawa 8 4 8 psl
39. 5 73 HRZ 7 4 1028 7 7 7 3 2 lt
40. SER REMOTE TEMP SP 5 3 9 lt SN Pop PA S P READY TIME 60s 2 7 NNER f MODE 1 60 OW SLPM FLOW UNIT LPM 5 TUN T SLAVE 2 O IPA S EQ OUT ALARM1 RE ADV 5 41 HRZ 5 3 5 7 1028 5 5 10 1 TEMPBAND 10 5 09 5 TEMP SP BAND TEMP READY gt 2 N 3 OFFSET 20 06 20 0 22 4
41. 1028 3 2 2 3 2 800mm 800mm lt gt 800 800mm RB 32 3 3 HRZ 3 2 3 5 1028 3 3 3 HRZ008 L HRZ008 L1 HRZ TK002
42. ON OFF 1 Alarm10 ON 2 Alarm24 26 27 3 Alarm25 28 HRZ010 W S ON Pl HRZ 8 1 8 13 HRX OM I028 8 8 2 8 2 1 1 HRZ001 H HRZ001 H1 HRZ002 H HRZ002 H1 870 d h 380 1 FE N 8 1 8 2 2 2 HRZ001 L HRZ002 L HRZ004 L HRZ008 L2 HRZ001 L1 HRZ002 L1 HRZ004 L1 HRZ008 H HRZ001 L2 7002 2 HRZ004 L2 7008 1 HRZ002 W HRZ004 H HRZ008 W HRZ002 W1 HRZ004 H1 7008 1 HRZ010 WS HRZ010 W1S HRZ010 W2S 870 4 380 Bm d q ME I 2 F 4 f 1 9 9224 1 690 6 5 8 2
43. 5 5 3 13 P5 4 EMO OFF HRZ 45 IF 2 4 5 1028 4 4 5 fE IF 22 HRZ 4 6 1028 5 5 5 1 RUN ALARM REMOTE STARTSTOP ALARM RESETC gt SEL ENT 5 1
44. 3 1 16 HAZ 1 14 1028 1 17
45. I DVU C 2 ra RUN 0 1 0 HRZ00 L2 0 5 2 0 HRZ00 L2 2 72 7 2 HRZ 1028 7 2 2 3
46. ALARM ENT_ 4 gt STARTSTOPC RESETC z Y HRZ 61 6 1 1028 6 62 4 01 20 22 24 25 E 21 28 4 E 4 23 26 27 E mi 24 26 27 25 28 HRZ010 W S E RESET
47. 30C TEMP SP TEMP PV 31 mmp 1 TEMP 31C TEMP SP 30C OFFSET 1 30 8 7 MODE1 84 77 8 19 HRZ 1028 m MODE2 OFFSET 1C TEMP PV OFFSET Qr TEMP PV 29 TEMP SP 30C OFFSET 8 8 m MODE3 TEMP PV 29 29C MODE2 29 OFFSET 1 31C TEMP SP OFFSET
48. e HRZ008 L HRZ008 L1 8 8 M12 4 8 8 6 P8 21 331 8 8 2 P8 4 3 3 2 1 HRZ001 L HRZ002 L HRZ004 L HRZ001 L1 HRZ002 L1 HRZ004 L1 HRZ001 L2 7002 12 HRZ004 L2 HRZ008 L2 HRZ001 H HRZ002 H HRZ004 H HRZ008 H HRZ001 H1 7002 1 HRZ004 H1 HRZ008 H1 HRZ002 W HRZ008 W HRZ002 W1 HRZ008 Wf1 HRZ010 WS HRZ010 W1S HRZ010 W2S 1 2 2 3 13mm
49. POWER 6 6 2 Pe 4 5 3 13 INEORMATTION gt Mode St OD CPRSR Running 5 15 POWER ON 5 13 Initialize Mode RESERVOIR ON Initialize Mode CONTROL VALVE ON
50. 50 60Hz 20 20 25C 8 1 f HRZ 8 4 1028
51. HRZ 73 7 3 1028 7 3 1 e e 1 2 Rc3 8 10 TF 7 1 4
52. kW 10 0 20 CB 20 90 c 0 1 2 ee T L U a ULJkisik60 gt HFC404A CFC Free MPa 0 40 20L min L 15 L 16 Rc 3 4 CIMPa 10 30 0 3 0 7 9 L min 15 15 Rc 1 2 3 50 60Hz 200 200 208 10 A 30 7 mm W380 0870 x H950 kg 165 RS 485 Dsub 9pin Dsub 25pin 1 25C 7 7 2 3 4 20C 5
53. 15 Pump Breaker Trip FLT 3 16 CPRSR Breaker Trip FLT Interlock Fuse Cutout Z I 18 DC Power Fuse Cutout WRN 19 FAN Moto WRN 5 Internal Pump Time 20 WRN lt 21 Controller Error FLT 22 i Memory Data Error 4 22 FLT 7
54. 74 HRZ 7 6 1028 8 8 1 1 8 1 HRZ001 L HRZ002 L HRZ004 L HRZ008 L kW 11 0 120 140 80 10C 50 2 60 2 20 40 c 0 1 2 Galden 135 Fluorinert M 3283 HFC404A CFC Free i 0 65 0 95 50Hz 60Hz MPa 0 45 0 65 20L min 30Lmin L 15 22 79 L 16 17 Rc 3 4 10 25 0 3 0 7 i i 50Hz 60Hz L min 5 5 6 6 15 22 18 23 Rc 1 2 50 60Hz AC200 200 208V 10 A 30 60 _W415 xD1080 mm 380 x 0870 x 950 3331028 kg 175 275 RS 485 Dsub 9pin Dsub 25pin 1 259 ELI 50 60Hz 2 3 4 5 6 7 8 9
55. HIGH LOW HRZ 43 4 3 1028 4 4 4 441 ON 1 OFF ON 2 ON
56. 8 8 1 1 P8 4 4 5 4 5 1 START STOP RUN 1 5 5 3 13 P5 4 4 5 2 START STOP RUNI 30 1 RUN
57. 9 25 HRZ 8 1 8 7 HRX OM I028 8 8 8 2010 5 kW 10 0 20 C 20 90 0 1 Galden HT135 3 Fluorinert FC 3283 3 20 40 C 200 Fluorinert M FC 40 20 90 HFC404A CFC Free MPa 0 72 20L min L 15 16 3 4 10 30 0 3 0 7 9 50Hz 60Hz L min 15 15 1 2 3 50 60Hz 200 200 208 10 A 30 7 mm W380 x D870 x H950 kg 165 RS 485 Dsub 9pin Dsub 25pin 1 25 C E 2
58. 154 P1 12 2 20kg 1 5 xf HRZ 1 8 1028 1 1 5 2
59. 1 H 2 E 1 1 1 5 J 6
60. AC48V DC24V Alarm AC DC 500mA AC48V DC24V EMO AC DC 800mA INT DC24V lt 24COM N Warning Fault Remote Event Alarm EMO HRZ 8 1 7 8 11 1028 5 485 8 12 RS 485 P2 D sub9P EIA RS485 Modicon Modbus sp 5 se 81 8 12 HRZ 1028 813 1 1539 PS 4
61. a 3 3 3 3 3 4 32 2 EK 3 5 23 4 P Et 3 6 HRZ 1 HRX OM I028 3 91 Sas gua au gu 3 6 220 be usu aa u S 3 6 252 3 7 3 34 aaa nuansa aaa nataka pis kala 3 8 385 Es BOE E a 3 11 336 BE3RE K UDERKB0S kk 3 14 JES 4 1 ukunta n ns anasu ana 4 1 4 1 4 120 4 1 413 4 1 414 4 1 415 EMO i 4 1 4 1 4 2
62. Z Fuse Cutout cas ss ss 08 FLT 7 og Heservoir High Temp FLT 11 Heservoir High Temp WRN 62 6 2 HRZ 1028 6 6 1 2 2 6L min 12 Return Low Flow FLT 13 Return Low Flow WRN 14 Heater Breaker Trip FLT
63. 16 161 EMO 21 EMO EMO EMO IEMO 1 12 27 7 21 SY 18 8 1 2 P8 4 EMO EMO
64. J POWER ON 56 3 E 5 5 3 1 FLOW 2 FLOW SP 1 5 3 HRZ 5 4 1028 5 5 3 5 4 PE V 23 PE MIP T S P 23 076 lt lt FR E A D y gt TEMP BAND O POWER t 5 7 4 gt 5 6 4 1 TEMP PV 2 5 BAND READY 4 TEMP BAND 1 TEMP READY gt gt BAND 8 8 5 BAND READY P8 4 5 3 6
65. 4 HRZ 3 3 3 7 1028 3 3 3 4 e e dv d1 40V 200 sec
66. 4 2 aqa a baha 4 3 4 4 4 4 haqa aha yuk 4 4 Qin amy EE EE 4 4 IE in au Saa api akuy 4 4 4 4 EE 4 4 ele bp k sasa 5 4 aN 5 4 5 4 5 3 5 4 Qa hata a huta aha 2 5 4 Sum ana Tautan ua Au u Qa T 5 4 5 4 5 4 5 4 2 5 4 5 4 538 5 4 539 4 l 3 J LEER 5 4 2 HRZ 1028 u su Saga D u Gua 5 4 89 unas aaa aaa u 5 4 Su au huahua 5 4 5 1 5 4 54
67. 3 OUT ENT SEL SEL 1 Z SEL 1 HRZ 5 4 5 15 1028 5 5 4 HRZ 5 16 1028 6 6 6 1 ALARM 8 8 1 2 P8 4 01
68. 5 3 11 lt gt t CDS P ONM D TO ON 1 D T CONTROL OFF 2 AUTO OFF 3 t TEMP READY OFF 4 5 13 5 12 1 CUSTOMDIO ON OFF 2 DI CONTROL ON OFF ON MNO NRNE ON BAND READY 1 OFF L SS HRZ 5 3 5 9 1028 5 5 3 12 01 Detect 5 14
69. SEL 1 5 1 5 4 1 2 3 4 5 4 5 4 5 4 1 2 5 4 TEMP SP 5 4 5 4 1 2 3 4 5 4 1 2 5 4 1 2 5 4 5 4
70. 1 1 5 3 P1 10 3 7 3 3 1 1 7 3 1 P7 4 2 7 3 2 P7 4 3
71. 5 4 2 Z 5 2 HRZ 5 3 5 3 1 Thermo Chiller HKRZ 81 Rev 0 5 3 1028 5 POWER 20 1 5 2 1 2 5 3 2 1 TEMP 2 6 FLOW 20 PRESS 0 95MPa 54 1 OO t sssi 53 1 eq 2 FLOW 2 3 PRESS
72. 3 1 3 5 3 9 4 TEMP PV MODE1 TEMP SP OFFSET TEMP PV TEMP SP 20 OFFSET 2C PV MODE2 BX E 22C 22 TEMP SP TEMP PV TEMP SP 20 C OFFSET 2C PV MODE3 TEMP SP OFFSET TEMP PV
73. 82 HRZ 8 14 1028 8 8 2 3 3 HRZ008 L HRZ008 L1 1080 2 I i 3 m 415 83 HRZ 8 2 777 8 15 1028 8 83 8 3 1 1 2 Rc1 2 83 275 8 8 16 HRZ001 H HRZ002 H HRZ001 H1 HRZ002 H1 HRZ002 W 7008 HRZ010 WS 27 E 7 4 HRZ004 H HRZ008 H HRZ004 H1 7008 1 HRZ002 W1 HRZ008 W1 HRZ010 W1S HRZ010 W2S HRZ010 W S 4 9 8 1 4 DS Rc3 8 Rc3 8 84
74. 6 1 1 2 25 4 7 2 Water Leak Detect FLT 02 Incorrect Phase Error FLT os High Press FLT CPRSR Overheat FLT Reservoir Low Level 05 Reservoir Low Level x 2 06 WRN ir Hi 07 eservoir High Level 1277520
75. ON BAND READY TIME BAND TEMP SP TEMP PV TIME TEMP READY 8 10 BAND READY TEMP SP 20C BAND 2C READY TIME 60 TEMP PV 18 60 TEMP READY 60 TEMP PV 20 2 0C 53 5 PS 4 OFF BAND RBADY HRZ 8 5 BAND READY 89 8 21 TEMP READY 1028 86 8 6 1 1 HRZ001 L HRZ002 L HRZ004 L HRZ001 L1 HRZ002 L1 HRZ004 L1 HRZ001 L2 _ HRZ002 L2 HRZ004 L2 2008 12 HRZ001 H HRZ002 H HRZ004 H HRZ008 H HRZ001 H1 HRZ002 H1 HRZ004 H1 7008 1 HRZ002 W HRZ008 W HRZ002 W1 HRZ008 W1 HRZ010 WS HRZ010 W1S HRZ010 W2S 2 HRZ TK002
76. 62 6 3 1028 6 62 HRZ 6 4 1028 7 1 7 1 pH 25 C 6 5 8 2 6 8 25C ws cm 1 500 100 800 0 5 300 mgCI L 200 50 mgSO 200 50 pH4 8 mgCaCOzL 100 50 mgCaCOs L 200 70 mgCaCO3 L 150 50 mgSiO2 L 50 30 mgFe L 1 0 0 3 mgCu L 0 3 0 1
77. 100 Rc3 4 3 Rc1 2 4 Y Rc1 2 HRZ 3 3 3 15 1028 3 3 3 HRZ 3 16 HRX OM I028 4 4 4 1 411 132 P3 3 4 1 2 4 1 3 4 1 4
78. 9 8 4 1 4 3 1 m 60 Pump Breaker Trip FLT
79. 1 3 A Y 3 OUT 4 ENTj 5 4 5 14 lt gt 1 2 REMOTE LOCAL N IST 5 8 1 SINITTIAL SET 5 0 O FF MODE 1 HIGH TEMP 6 0 C 5 29 1 lt LN T PPA Db SE 4 1 lt N Z YYYY YY Y 5 50 3 OUT DNS LA SE SLAVE ADRS 1495 N A 5 31 3 N A HRZ 5 A Y ALARM1 ENT OUT 1028 5 lt INITIAL SET gt SLAVE 5 1 gt 5 32 3 ALARM1 31442E ADRSAAA24H lt ALARMI T YYY YYYYYY 5 33
80. 20 H 1 5 5 3 13 P5 4 Thermo Chiller 2 00 0 00000 Rev 0 SMC g lt gt CPRSR Down Mode Running Stop TEMP P 216 FLOW 20 1LPM PRESS 0 95MPa R 4 2 ON OFF 9 EMO 4 4 4 4 HRZ 1028 4 4 4 2 gt 5 54 PS 4
81. 1028 3 5 Pi P2 P1 D sub 25P P2 D sub 9P D sub RS 485 3 9 3 1 P3 8 3 3 HRZ 3 12 1028 3
82. 1 2 A Y 1 1 SETTING ENT TEMP SP 2 3 FLOW SP 20LPM 5 18 ENT 3 ENT mamapas TEMP SP TEMP SP 2 FLOW SP 20LPM 5 19 5 4 5 11 HRZ 1028 5 4 a Y P SETT ING gt 9C 34 1 SP A 1 FLOW SP W 1 5 20 ENT SEL SEL
83. 7 P3 8 3 1 8 M8 11 12 13 13mm 12 SN m lt 310 3 1 P3 8 0 70 7 7 3 3 3 13 HRZ 1028 3 336
84. 43 HRZ 4 2 1028 4 4 2 4 1 HIGH LOW 7 3 1 P7 4 HIGH LOW 18 8 1 1 P8 4
85. HOT AND COLD SURFACE INSIDE Cover panel should be opened by only service personnel 15 No 5 1 3 2025 HRZ 1 4 1028 1 1 32 f e e m 1 3 5 1 5 HRZ 1028 1 HOT AND COLD SURFACE INSIDE Cover panel should opened by only service NO 5 18 13 7 HRZ 1 6 1028 1 14 SERIAL
86. HRZ 1 1
87. Rc3 8 HRZ 1028 8 8 3 2 2 HRZ001 L HRZ002 L HRZ004 L HRZ008 L HRZ001 L1 HRZ002 L1 HRZ004 L1 HRZ008 L1 HRZ001 L2 7002 2 HRZ004 L2 HRZ008 L2 HRZ00 L2 n 2 297 2 L Rc3 4 27 Rc3 4 Rc3 8 Rc3 8 HRZ 8 5 Rc3 8 8 3 2 8 8 17 1028 8 8 4
88. lt gt 1 f l am 2 1 3 1 PN POP T AD 3 lt 4 sag lt gt t 1 1 4 MAINTENANCE 4 5 5 i 5 8 57 1 SETTING ENT 2 REMOTE LOCAL ENT 3 INITIAL SET ENT 1 4 MAINTENANCE ENT 1 5 OPTION ENT 1 HRZ 5 3 5 5 1028 5 5 3 7 lt gt TEMP SP 285 FLOW SP 201 2 1 TEMP SP t POWER ON 59 E SER REMOTE 5 8 HRZ
89. m EMO 1 16 EMO HRZ 1 6 1 13 HRX OM I028 1 m EMO EMO EMO 1 2 EMO 1 17 EMO EMO EMO
90. 1 5 344 C ENT 7 TEM E P S P 34 1 34 1C FLOW SP 20LPM 5 21 SEL 1 FLOW SP HRZ010 W S 5 4 HRZ 5 12 HRX OM I028 5 5 42 2 DIO REMOTE LOCAL Em t p 5 22 DIO REMOTE LOCAL 7 SEL 1 lt MENU gt 1 1 SETTING 2 REMOTEZLOCAL 523 1 A YW 2 lt REMOI EK 4 4A14 gt REMOTE LOCAL ENT MODE DIO REMOTE m 5
91. MODEL NO SERIAL NO MODEL NO GSMC THERMOCHILLER MAKER 4 14 1 Sotokanda Chiyoda ku 101 0021 Japan SERIAL NO MODEL NO 1 9 HRZ 14 1 7 1028 1 1 5 1 5 1 9
92. OFF MODE1 MODE2 8 8 4 P8 4 MODE3 5 HIGH TEMP 20 0 20 45 HRZ L2 10 452 20 20 939 HRZ WO 20 93 Reservoir High Temp WRN 6 LOW FLOW 0 15 40 4 10 6 0 0 8 40 LPM 0 2 1 10 6 GPM HRZ010 W S Return Low WRN 0LPM 1 141 15LPM 1 8LPM HRZ010 W S 7 FLOW UNIT LPM GPM 8 PRESS UNIT MPa PSI 9 SLAVEADRS 1 16CH 10 OUT ALARM1 25 8 8 1 3 P8 4 EVENT
93. 8 22 5 9 25 HRZ 8 1 fr 8 3 HRX OM I028 8 84 HRZ001 L1 HRZ002 L1 HRZ004 L1 HRZ008 L1 i i i o 50Hz 60Hz kW 1 0 10C 2 0 10C 4 0 10C 8 0 10C 20 40 1 0 1 2 60 HFC404A CFC Free 50Hz 60Hz MPa 0 25 0 40 20L min x L x 15 22 L 16 Rc 3 4 10 25 0 3 0 7 50Hz60Hz L min 5 5 6 6 15 22 18 23 Rc 1 2 3 50 60Hz 200 200 208 1096 A 30 60 I W415 x D1080 507 mm W380 x 0870 x 950 kg 170 175 275 RS 485 Dsub 9pin Dsub 25pin 25 C
94. LH 20 0 gt 40 0 2000 12 10 09 40 09 200 0 20 0 90 0 HRZ WO 20 0 lt 90 0 2 FLOW SP 10 401 HRZ010 W S 5 3 5 6 1 SER REMOTE 15 3 8 P 5 4 HRZ 1028 5 5 3 8 REMOTE LOCAL gt MODE LOCAL 5 10 5 9 TEMP SP EOGAL SP TEMP 1 DIO REMOTE TEMP SP
95. e HRZ TK002 M12 4 Y 5 4 14 _160_ 8 11 8 6 720 Ft 8 22 HRZ 1028 8 8 6 2 2 HRZ008 L HRZ008 L1 e M8 8 9 1157 176 375 8 12 HRZ 86 7272 Rt
96. 10 A 30 7 mm 380 0870 950 kg 165 RS 485 Dsub 9pin Dsub 25pin 1 25C 50 60Hz 2 JRA GL 02 1994 7 1 4 20 5 20 6 7
97. OFFSET TEMP SP 20 C OFFSET 2C TEMP PV OFF OFFSET 20C 224 224 20 TEMP SP 84 77 8 18 HRZ 1028 841 30 1 C 29 MODE1 3 TEMP PV 30C TEMP SP 30 29C 8 6 m MODE1 OFFSET 1 31C TEMP SP OFFSET 31 1
98. 8 1 2 8 11 11 E OUT READY AUTO PURGE P8 4 8 5 3 5 8 1 5 3 11 P5 4 TEMP BAND READY TIME 8 8 5 BAND READY P8 4 2 TEMP SP OFFSET 5 8 P5 4 TEMP SP HRZ 1028 5 5 3 10 lt gt T z T VOA TD ME OPEN gt POWER 512 5 11 1 OPEN CLOSE DI
99. mgNH47L 1 0 0 1 mgCIL 0 3 0 3 mgCOzL 4 0 4 0 5 JRA GL 02 1994 HRZ 71 7 1 HRX OM I028 7 7 2 e e 7 2 1 7 2 RA
100. 1028 3 3 1 1 e 3 1 3 1 22 HRZ 3 2 1028 3 3 1 2 2
101. 2 1 1 2 HRZ 21 201 2 1 1028 2 2 2 HRZ008 L HRZ008 L1 EMO 2 2 2 9 4 22 2 HRZ 2 1028 3 ji 2 Ex es
102. 24 DIO REMOTE 3 YV LOCAL lt REMOITE A QCAL gt MODE L 5 25 LOCAL 4 ENT lt REMOTE LOCAL gt 5 525 5 26 ENT SEL SEL 1 5 SEL 1 HRZ 5 4 5 13 1028 5 5 43 3 NI A ALARM1 POWER R 5 27 N A ALARM1 1 SEL 1 2 A YW 3 INITIAL SET ENT
103. C 8 0 20 C 50Hz 60H2z i i T C 20 90 e 0 152 Galden 200 Fluorinert V FC 40 HFC404A CFC Free 0 40 0 60 201 0 45 0 65 201 12 15 0 15 16 Rc 3 4 lt C MPa 10 25 0 3 0 7 L min 3 4 5 6 9 10 13 14 Ro 1 2 3 50 60 2 200 200 208 1096 A 20 30 7 mm W380 0870 x H860 W380 x 0870 x H950 145 170 RS 485 Dsub 9pin Dsub 25pin 1 259 50 60Hz 2 Galden Fluorinert M 4 20C 5
104. 1 1 1 1 1 2 U u u u 1 2 ky 4k i i 1 2 1 2 2 FE Page UP So ass ua S Sua Sala 1 2 1 3 SS aN s SS 1 4 1324 asna aaa mn Q SAT aasma aksa man a 1 4 132 kk 1 5 T 1 7 1 8 15345 522 SIN 1 8 152 3 ER 1 9 1 10 1 12 6 1 13 1 6 1 1 13 1 15 1 7 1 1 15 1 16 1 78 4 1 ID aus D aa sQ uhu a inu Da hata ata 1 16 1 8 MSDS es 1 16 25 Lu ED a uuu A 2 1 SS 2 1 2 2 2 2 2 SE 3 1 3 1 22 b SR 2 3 2 3 12
105. 3 3 3 5 OFF P1 10 1 OFF 2 OFF 3 2 4 2 OFF J 3 8 OFF OFF OFF HRZ 3 3 3 11
106. 70 950 kg 170 RS 485 Dsub 9pin Dsub 25pin 1 25C 50 60Hz 2 JRA GL 02 1994 7 1 4 20C 5 20 6 7 8 227 5
107. 85 HRZ001 H1 HRZ002 H1 HRZ004 H1 2008 1 kw 110 20C 20 20 40 20 80 20 C 50Hz 60Hz Ba c 20 90 25 0 12 60 HFC404A CFC Free 50Hz 60Hz MPa 0 25 0 35 20L min 0 25 0 40 201 L 12 15 15 16 Rc 3 4 10 225 0 3 0 7 50Hz 60Hz L min 3 4 5 6 9 10 13 14 Rc 1 2 3 50 60Hz 200 200 208 10 A 20 30 7 mm W380 0870 x H860 W380 0870 x 950 kg 145 170 RS 485 Dsub 9pin Dsub 25pin 1 25 C 50 60Hz 2
108. C MPa 1025 0 3 0 7 9 50Hz 60Hz L min 6 7 13 14 Rc 1 2 3 50 60Hz 200 200 208 10 30 380 0870 950 kg 170 RS 485 Dsub 9pin Dsub 25pin 1 25 50 60Hz 3 2 Galden Fluorinert 3M 4 20C 5 20 6 7
109. ENU gt TEMP PV 4 MAINTENANCE FLOW PV 5 RESS 1 C_SEL_ 2 C ENT ENT ENT ENT C ENT lt 1 gt EMOTE LOCAL gt lt SET gt lt gt Thbermo Chiller TEMP SP 23 0 MODE LOCAL lt 1 VALE UST 1R Z FLOW SP 20LPM AND 1 0 CUS V 0 READY TIME 605 D1 CONTROL OFF SMC Co OFFSET 0 5C AUTO PURGE OFF 1 1 lt INITIAL SET gt 1 lt VALVE OPEN gt lt OPTION gt POWER ON OFFSET MODE 1 A TEMP READY OFF HIGH TEMP VALVE LOW FLOW 5LPM C 2 lt SET gt 4 FLOW UNIT LPM lt INFORMATION gt PRESS UNIT MP a CPRSR Down Mode SLAVE ASRS 12 Running Stop C 3 INITIAL SET gt OUT ALARMI TEMP READY 4 5 2 2 2
110. FC Free 50Hz 60Hz MPa 0 25 0 40 20L min 2 L 15 16 Rc 3 4 10 25 0 3 0 7 50Hz 60Hz L min 5 7 13 14 Rc 1 2 3 50 60Hz 200 200 208 1096 A 30 7 mm 380 0870 x H950 8 x kg 170 RS 485 Dsub 9pin Dsub 25pin 1 25 C 50 60Hz 2 3 4 20C 5 20 6
111. HRX OM I028 J 2004 10 J 2010 9 2001 HRZ002 L HRZ004 L HRZ008 L HRZ001 L1 HRZ002 L1 HRZ004 L1 HRZ008 L1 HRZ001 L2 HRZ002 L2 HRZ004 L2 HRZ008 L2 2001 2002 2004 2008 2001 1 2002 1 2004 1 2008 1 HRZ002 W HRZ008 W HRZ002 W1 2008 1 HRZ010 WS HRZ010 W1S HRZ010 W2S 2010 SMC CORPORATION All Rights Reserved SMC HRZ
112. t E 8 23 1028 8 8 7 8 14 2004 108 CE 2006 95 2006 42 EC SEMATECH S2 93 S8 95 SEMI S2 0703 S8 0701 F47 0200 UL E229305 UL1995 8 7 HRZ 8 24 8 1028 f 2 8 25 8 8 4 amp LI Y Z 2 02390 4 7 HRZ 6

"取扱説明書"

Contents

Download Pdf Manuals

Related Search

Related Contents

&quot;取扱説明書&quot;

Contents

Download Pdf Manuals

Related Search

Related Contents

"取扱説明書"