取扱説明書 ED-OG-R8
Contents
1.2. 2 3 N
3. i me POWER 10 1 80 200 S 1 1L min 0 6L min 2 1 1 0 2MPa 0 3MPa 3
4. 0 1MPa 0 6L min 70 0 15MPa 0493 72 6161 E MAIL mail ecodesign labo jp be 0ZONE ON 5 RESET SWITCH
5. FTW TWT1 FOTO rrrrrmrrrrrn TL ELH Tt FLI 10000
6. A 40C
7. 4 0 1MPa 5 0 1MPa 2 3 4 3 1L min 11 3 1 11 POWER 3 6 300 5 4 1 8 CONTROL 9 00 3
8. 19 PFA 20 1 3 5 2 4 6mm or 1 4 1 1 4 1 8 lt 1 4 4 AC100V
9. 14 4 3 i TT y 18 OD 1 4 or 6mm 1mm 20 OD 1 4 or 6mm 1mm 17 18 PFA
10. 80 200 S 0 1MPa 0 15MPa 0 1MPa
11. 1 0 1 ED 0G R8 ED 0G R8 25g hr 1g m3
12. 2 2 ON 6 0 4 1 KN 13 1 2 6
13. ED U0G RO aa P P1 1 P13 P14 P17 1
14. e 2 2 02 0 0 02 03 M 1 3 COOLING TER COOLITHG WATER
15. ON 15 0 COOLING WATER TRANCE FORMER DISCHARGE 0ZONE
16. 9 0 999 1009 FULL PUSH FULL CONIROL ELECIORIC POWER CONTROLLER FULL CONTROL ELECIORIC POWER CONIROLLER FULL CONTROL ELECIORIC POWER CONIROLLER 2 12 ON ON 4 0 2 0Z0NE 4 g m3 Li 12 1 12 ON 3 OFF 5
17. ms WTGEN iHS BS IgE iHS a ba REGULAT OE Ei ED 0G R8 0 300g m3 1g m3 25g hr 200g m3 500W x 500H x 400D AC100V 50 60Hz 0 1MPaG ns PRESSHHE GAUGE IgME ENEFHTIF IHS PFI OZONE HHS ONITOR FLOW METER as a 3 a Ga Es eas a GR GAT Lo RATE FEilLHTIF 1 4 0 EE SUS304 5 4 PRESSURE 6 0ZONEGAS GAUGE 5 AMME TER MONITOR RE OZONE GAS MONITOR AMMETER PRESSURE GAUGE LT RESET ELECTORIC POWER CONTROLLER SW ICH 3 FLOW RATE i 8 CONTROL MODE ALARM ALARM ALARM REGULATOR ee TOM SWITOH o
18. g m3 ED NARA TNR SE 3 1 2 14 7 3 300 4 0 14 4
19. LET INLET 18 0ZONE GAS 20 COOLING WATER OUTLET OUTLET 0 rd 1 21 10cm 2
20. O o RED RED RED 9 POMWER 9 SN CONTROLER POWER ON OZONE _ 10 ALRAM ORENGE UE AMP FLOW RATE REGULATOR 11 MAIN LAMP 12 MAIN 13 HOUR I REGULAIOR SWITCH METER 14 ADJUSTER 8 9 15 TERMINAL BLOCK OF ALARM QO QO QO 21 HANDLE 17 0XYGEN GAS 19 COOLING WATER 16 CONNECTOR jN
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