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1. PRINTED WITH SOY INK2. EO RE ANEST IWATA URL nttp Www anest iwata cO jD E mail isSpinfo anest iwata cO jp 223 8501 3176 TEL 045 591 1112 FAX 045 593 1539 553 0001 6 6 4 TEL 06 6458 5971 FAX 06 6458 5978 AINES WATA 60L s 2 Le High Vacuum Pumpind System Pa 10 No baking 1 AC100V 200V WxLxH mm 235 x 436 x 474 Optional parts lsoration Valve etc TN RE NN N
3. 7y ANEST IVATA URL http www anest iwata co jp E mail lspinfo anest iwata co jp 223 8501 3176 TEL 045 591 1112 FAX 045 593 1539 553 0001 6 6 4 TEL 06 6458 5971 FAX 06 6458 5978 2010 08
4. ANEST IVATA 223 8501 3176 TEL 045 591 1112 FAX 045 593 1539 TEL 06 6458 5971 FAX 06 6458 5978 httDp Wwww anest iwata CO jD E Mail ISDinfo anest iwata CO jD S CAT No AP V 4 2010 8 3 0K 48 3 SP LR104996 CSA Canadian Standards Association CE ISP i 9 20 7 ROHS CA CE an F _ as WS CSAICE 8 No 2 Fixed scroll t as pocke
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6. Single Gauge Controller TMP Controller Scroll pump TMP Controller Single Gauge Controller Scroll pump VTC 150 MV1 2 VTO 300 1 2 5 C 30 C
7. 60Hz GVS 500B 7GVS 50Hz GVS 500B Rc 1 Rc 1 2 60Hz GVS 250 50Hz GVS 250 Pumping SDeed L min 5 5 5 103 104 Inlet Pressure PQ 1_ Z03 207 2 910 101 5 4102 5 GVS 250 Torr7 L ANEST IVATA URL http www anest iwata co jp E mai lspinfo anest iwata co jp 223 8501 3176 TEL 045 591 1112 _ FAX 045 593 1539 553 0001 6 6 4 IEL 06 6458 5971 FAX 06 6458 5978 oo ANEST TyioDry IWATA 1000
8. toDry SOYINK Models specifications and photos are subject to change without notice ANEST IWATA Corporation ANEST IVATA Te293 8501 3176 TELO120 917 144 PHS TEL 045 591 1112 FAX 045 5983 1539 3176 Shinyoshida cho Kohoku ku Yokohama Japan TEL 045 591 1112 FAX 045 593 1539 httD Www aneSst iwat CO jD E Mail ISDinfo anest iwata CO jD Printed in Japan CAT No AP V6 2011 3 2 MA 39 OW 100V lt GVS OOOB 500Pa GVS 500B 501B 50Pa GVS 250 ie 64dB A GVS 500B 501B 31dB A GVS 250
9. LS Communication Labo and Showroom VTU VTC ISP TMP VTC 220 BV YAIB 6 16 YAEG 16 6 VTU 080 LM VTU 080 LH VTC 220 BV VTC 300 EH L s 80 220 300 ISP 50 ISP 90 ISP 250C Pa 10 OMS dB A 58 59 60 60 V 100 115 200 230 DVSL DVSL 100C DVSL 500C 501C DVSL 1002C S Dry el 00C EE Dd 1C DVSL JO 1 L min 50 60Hz 100 120 430 520 845 1010 Pa S0 30 100 30 dB A 62 64 64 69 OR 20L
10. s se GVS 250 2 GVS 500B 501B 1 100 i GVS 250 GVS 500B GVS 501B a EE 209255 CH42M6 0 ms el mn 2 100 50 60H7 115 60W 200 60 60Hz 220 60Hz ro Rc 1 NW Rc 1 2 C 5 40 WxDxH mm 320 x 570 x 289 317 x 568 x 289 _ 100
11. NN te MS 72 dB A 77 dB A 65 kg GVS 500B 501B 423 505L min 50 60Hz 500Pa W 322mm x D 901mm x H 280mm Rc1 Rc1 2 2 TTFHHT FT FTHHHTT LE IEEIIHi L min 3 TT THLL TH HH TT TT EE HH HH THHL LMHL TH OO Pumping Speed os fp4 Inlet Pressure Pa 5 5 5 0 10 1 Torr 10 2
12. kW 0 1 AC100V 50 60Hz 115V 60Hz 8 10 m V Voltage AC200V 230V 50 60Hz 8 dB A 48 57 kg 12 1 Pa ms s NO 101 B 102 103 3 104 B 105 g day EE Inlet Pressure Pa p L min 4 nw a es 5 0 a S240 He j OFwSWCALCE
13. which contain chemicals solvents or particles ANEST IWATA will not perform maintenance work on any pumps which have been used for hazardous substances Do not disassemble reassemble or alter Dump and parts on user s side Be sure to read instruction manual and understand it fully before use When maintenance interval has been reached be sure to contact our distributor who sold it to you The guarantee period iS based on instruction manual Maintenance interval and the guarantee period are different Please contact Vacuum Pump Dept of ANEST IWATA Corporation before exporting pumps Shown on this catalog to out side of Japa
14. 3 PP Re ISP 50 ISP 1000 5 P TSE N 0 M FF 2 ss 1 0 as 1 BE 0 SR 0 50 60Hz 50 60 a 50 AEC PD 20 15 8 se
15. ROHS CSA CE sp IUU ce No 1 P250C 1 F sp 372 443 400 370 214 308 EZ 232 Air Flush 5 AirFlush Rc1 8 Inlet ME e IF S 0 ER a 7 Q Air Flush 2 180 a gt 2 i ISP 250C ISP 90 ISP 1000 I
16. ISP 50 100V ISP 50 SV1 200V ISP 50 SV2 1 8 000 amp 1 8 000 ed i VTU VTC EE NN 86 0 21 6407 22
17. NW25 ISP 250 ISP 500 35L NW40 NW 16 40 2 re L 100V 200V w i 5 DRY SCRKOLL VACUUIM PUMP DVSL series Air cooled SS DD y 0 single phase Pel _i L RoHS 8 three phase A C E DVSL T1O0C Inlet 1 J Air flush Inle1 NW25 Rc1 2 Hours meter Outleit NW25 Rc1 2 Air flush RC 1 8 DVSL 3 Introducing the HC model with increased durability in DVSL series lt lasts three times longer than the standard model tnanks to the specialized finishing which is applied to the sliding surface It is highly recommended
18. L lt WI NN I VIU 080 LH VTC b Ful range gauge Ful range gauge 350 a fwp lsolation Valve 2 amp VTC VTU lt TMP
19. Inlet i gt Orbiting scroll Inlet Sc Mf fe f No 4 AA NE lt 1 2 3 2 Position No 3 Position No 2 RC NCR No 1 No 2 No 3 No 4
20. 5 lt i 9 10 A A 10 SA 6 ISP 500C T V RSE 500 16 NW 25 40 T S gn gn lt i UtIeGt connection Cooling system a i c 5 40 NC 5 40 10 40 Ambient temperature Ambient temperature ISP 1000 ISP1000 TVA ISP 1000 THA
21. lt 4 ed moisture to remain In pump This remaining moisture Can cause s amp NINg moisture inside specifications Trade name Oil free Scroll Vacuum Pump Model Displacement L min 50 60Hz DVSL 100C 100 120 DVSL 500C 430 520 DVSL 501C DVSL 501C HC DVSL 1002C 845 1010 Ultimate pressure Pa 50 30 Motor power Voltage kW 50 60Hz Single phase 0 3 100 115 200 230 2 4 Three phase 200 208 230 380 400 415 460 200 220 Noise level dB A Single phase 62 at air flush65 64 at air flush69 64 at air flush69 69 at air flush74 kg Three phase 36 118 Water vapor Air flush g day 100 at air flush 5 at air flush 250 at air flush 10 at air flush 500 at air flush 20 at air flush Inlet connection NW25 with Rc 3 8 NW25 with Rc 1 2 Rc 1 Outlet connection Cooling system NW16 with Exhaust valve NW25 with Exhaust valve _ air cooled Ambient temperature 5 40 Back up materi
22. to end users who process water vapor frequently DVSL 501C Product dimensions are the same as the DVSL 501C Numbers and values are comparison to Our current products and reference onIy Results are varied depending upon application and condition of use DVSL 1002C Outlet Inlei Hours meiter 212 Pr Nw25 Rc172 Gor MMWE lt ANEST So A OO CE GREE fH LIL HI 3 TE aLT We OOO a CA EE MN DRY SCROLL VACUUM PUMP Excellence in continuous operation between atmosphere and vacuum and In displacing water vapor PylteEute a Fixed scroll 4 SN se Vacuum Chuck Roughing for TMP Gas pocket Inlet Vacuum Transport Deaerator a gt Vacuum Forming Gas Substitution ss Oute 1 Cryopump Regeneration Vacuum Drying Inta
23. SP 500C 60Hz 50Hz 2 60Hz 50Hz ISP 90 ISP 250C ISP 500C ISP 1000 1000 L min 1000 O00 Lmin 1000 Displacement 50 60Hz 907108 2507300 Bsplaoemt 50 60Hz SUEDD 1000 1200 5 pressure Pa 5 1 6 ga E 50Hz 60Hz 23 kW 0 15 0 4 3 1oo ll 100 a a RM 100 115 200 230 6 100 115 200 230 8 60He 8 Vol 2 3 0 200 208 230 380 415 460 WO 10 10 M8 200 208 230 380 415 460 10 10 52 58 E 60 67 E Noise level dB A 57 66 neh dB A 68 74 gL 6 SE 1 1 44 Weight a 23 10 1 5 100 101 5 102 5 103 5 104 105 Weight 38 56 101 5 100 5 101 5 102 5 103 5 104 105 Inlet Pressure Pa Inlet Pressure Pa Leak NO Pa m7S 1 10 5 IS Pa m Ss OS S 2 Na g day 0 g day 25 oN
24. aa I J 7 A 5 4 1 M 6 1 WW 1 2 nle UtIG Exhaust valve 2 2 1 Air flush Cooling fan 1 De A OtOr Fan Cover 2 Cooling fan 2 ol Crank shaft 2 Fixed scroll FS2 Orbiting scroll OS 1 Fixed scroll FS1 EE Hours Meter ISP ISP 50 CSA CE RoHS N
25. al Fluorine rubber Silicon rubber Fluorine rubber Silicon rubber L min Pumping Speed I yN HE ws ss 3 tH 7 1 M A 1 N WT 4 gt 8 NN 1 1 NZ IT N Ss NN 1 gt N LIL EE a Inlet Pressure DVSL 501C HC DVSL 501C Pumping speed of DVSL 501C HC is the same as the Pa services 1 8 000 amp 1 8 000 A
26. ee S Li I Ss ud Ns jl NN TN 7 7 7 ts A MNs VTC 070 BV1 2 VTC 50 MV1 2 VTC 220 BV1 2 VTC 300 EH1 2 6 VTC 070 BV1 2 VTC 150 MV1 2 VTC 220 BV1 2 VTC 300 EH1 2 ISP 250C SV Foreline pump Scroll TG70F PT150 TG220F STP 301 Turbo molecular pump TMP Pa 10 No baking Ultimate pressure 8 Single phase 100 115 200 230 NAS WxlxH mm 350 x 490 x 833 350 x490 x 897 350x490x918 417x599 x 810 VTU 080 LH ISP 90 Optional parts Chamber Full range gauge Isoration Valve etc Please ask the detalled specifications for three phase motor and chambers etc Price is depend on customer speclfication VIU 060 CF63 Inlet TMP TMP Controller ed a E iy
27. fter Sales amp Maintenance Services Yokohama Service Center We ANEST IWATA Corporation put emphasis on before amp after sales services in consideration that vacuum At Yokohama Service Center maintenance and repair work of our pumps are Operated over long time of more than 8 000 hours a year vacuum pumps maintenance training and vacuum Seminars are In order to run vacuum pumps for such long time and safely please conduct regular maintenance by always available maintenance standards of every year Or 8 000 hours Service Network HH h TEL 86 0 21 6407 9713 MALAYSIA Shanghai Service Center AUSTRALIA Maintenance and repair work for Chinese market are available Address ANEST IWATA SHANGHAI Corporation TEL 86 0 21 6407 9713 SN A A Precaution on Usage a This vacuum pump is suitable for use on Clean processes only Do not use explosive flammable toxic or corrosive substances and substances
28. ke cycle completed Position No 1 Leak Test Vacuum Packing No 4 No 3 DVSL Structure a 3 Position No 3 2 Position No 2 Principle of compression No 1 No 2 No 3 No 4 As the orbiting Scroll orbits as shown in the illustration from No 1 position to No 4 position crescent shaped gas pockets are gradually reduced At the last stage compressed gaS IS exhausted through the center Dort Fixed Scroll Air Fiusn CS NE GEES sp O Ultimate the pump Air Flush operation dose not only pump remaining
29. n A Precaution on installation Danger of explosion and fire Install in an area which is not exposed to explosives flammable gas or other related things Pumps Shown in this catalog do not have breaker for avoiding motor burnout by installing Avoid motor burnout using breaker Electric Source COrd is not included in the pump Use electric Source cord which is instructed by instruction manual a mo This vacuum pump requires regular maintenance as described in the instruction manual Install the pump where there is enough ventilation and maintenance available FSC
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