SH-110 Dry Scroll Vacuum Pump
Contents
1. Vacuum Technologies Vacuum Technologies SH 110 15 Br BEET EUM FIERA I TERI WAVTSITA TAGE L RKRN EE FEO E A AU FERIE TERCIO EU ll ERMER DI WF GWAR o TERE ELEM LE HERING AS o t2. Varian Technologies SH 110 15 Technical Information Em ng EEN ELS FERTIUTEANE FAN OILS B IEDF PHZ O
3. 20 C 60 C 4 F 48 140 F 0 95 SH 110 20 44 f AWIR ARITI EIR WAHR j EG BU TUER EH HIRD o TEIE BA F EKM PEIRE EEIE o TLE REAL RARAR AL URKIA DRE SH 110 Dry Scroll Vacuum Pump mo JE lt 5 C 40 C 41 F 104 F 0 95 hy SE Ui ba BE ES HY DEE B E SE TRI EFIE RIF KR RP IHE WEI TE HE EE 110V zt 220V
4. TYPE OF RETURN check appropriate box J Paid Exchange J Paid Repair J Warranty Exchange I Warranty Repair J Loaner Return O Credit O Shipping Error O Evaluation Return O Calibration O Other HEALTH and SAFETY CERTIFICATION VACUUM TECHNOLOGIES CANNOT ACCEPT ANY BIOLOGICAL HAZARDS RADIOACTIVE MATERIAL ORGANIC METALS OR MERCURY AT ITS FACILITY CHECK ONE OF THE FOLLOWING O I confirm that the above product s has have NOT pumped or been exposed to any toxic or dangerous materials in a quantity harmful for human contact I I declare that the above product s has have pumped or been exposed to the following toxic or dangerous materials in a quantity harmful for human contact Must be filled in PrintName se ep e d e Signature ed ernsten Date ee PLEASE FILL IN THE FAILURE REPORT SECTION ON THE NEXT PAGE Do not write below this line Notification RA t een Customer B Equipment iii August 2003 Page 1 of 2 VARIAN FAILURE REPORT Please describe in detail the nature of the malfunction to assist us in performing failure analysis Ar lt TURBO PUMPS AND TURBOCONTROLLERS Request for Return Health and Safety Certification X 9001 Claimed Defect Position Parameters J Does not start I Noise O Vertical Power Rotational Speed O Does not spin freely J Vibrations O Horizontal
5. HU Tp que AA 27 HRA ubebspylapobut gg SH 110 Dry Scroll Vacuum Pump Technical Information Model Table 1 Specifications SH 110 Dry Scroll Single Hermetic Vacuum Pump Interface dimensions See Figure 1 on page 16 Peak pumping speed 50 Hz 90 L m 5 4 m hr 3 3 cfm 60 Hz 110 L m 6 6 mhr 4 0 cfm See Figure 2 on page 16 for details Media No corrosive explosive or particulate forming gases Ultimate pressure 5 0 x 10 Torr 6 6 x 10 mbar Maximum inlet pressure 1 0 atmosphere 0 psig Maximum outlet pressure 1 5 atmosphere 7 5 psig Inlet connection NW25 Exhaust connection Female 1 4 National Pipe Thread NW16 adapter provided Gas ballast Female 1 8 National Pipe Thread 20 micron sintered plug provided Ambient operating temperature 5 C to 40 C 41 F to 104 F Storage temperature 20 C to 60 C 4 F to 140 F Motor rating 0 25 HP 0 19 kw Operating voltages 1 phase 50 60 Hz 100 115 200 230 VAC Run current See Table 3 on page 20 Motor thermal protection Automatic thermal protection Operating speed 60 Hz 1725 RPM 50 Hz 1425 RPM Cooling system Air cooled Weight Pump only 19 5 kg 43 Ibs Shipping weight 20 kg 44 Ibs Leak rate with exhaust sealed 1 x 107 sccs helium Noise Level per ISO 11201 56 dB A Vibration leve
6. 12 ae SA ACBL ALAC L CW SED HO ET O EEE MNB CHEF ER D DET BITTER EH FR RIL E Fo TITEL Q D LE EX PHB EBL OR BIEITTER LTS EV O Re BIEERBBIBERHI LER CIR FILE HEIT PEINTE RORE 6 BEKO RAV IAKA Di FEIZ 60 C FEZ TOSHAD D V E 7 O RFK ZLO AB EU MI CORB C DY HEL TS EAU DEOIR TELE RATS AIC KERRANG SP VERZE OBKIZRLA LO BRE D K SN SLEB bY ET ROT LIES BI ARDA E fiL C4 AU SH 110 Dry Scroll Vacuum Pump zl A Zl 4 HB uat tl m GES LEA aaa He Hosp HS SUP x SHE dep He AES SAE AUCH AERA ASS zeae HU AE 237 Ao MAR ABA BW Vacuum c Technologies7 4 3 7 AHS 9 z YA St Sn 20 C 60 C 4 F 140 F UT Vacuum Technologies BAYA ugs uz inq Re 5 o x xw ge Az SE PA AE AS ues AE FRE En LES BAA ZA FAA wes RE JA AN ua Fa dap opu AE AA SAUT ne T x d ae o re SS US BAAS BH 2 ES SHH110 dag AA 2 8 da BEI o Be sali 27 Et 29 pale BY je Aaa ae ii o PEE RSA PAN Bee ENT Dre TAAA AFAA O 9 35 8 49822 xets a Steud SH 110 BES Ea edo S SS P20kg c USES BAH ASA een MH A A AF AE LYH VS Ne az LE ERS Meere 7 S o 4 o x SLA cas 1 A 9 Technical Information amp
7. ogies dry scroll pumps do not contain fluid for the cleans ing of accumulated dust and debris Run the pump periodically at atmosphere for a minute or two to flush it out Until experience is gained on your specific process flush the pump regularly and adjust this schedule accord ing to your specific conditions Startup Procedure 1 Make sure that the pump is configured for the mains voltage to which the pump is connected NOTE The pump ON OFF switch is a rocker type switch that has symbols in accor dance with IEC Publication 417 to represent the ON and OFF positions Figure 5 shows a switch in the ON position ON 44 OFF Figure 5 ON OFF Power Switch 2 Switch the pump ON 3 The isolation valve will open automatically 10 seconds after starting the pump Shutdown Procedure To shutdown the pump 1 Switch the pump OFF The isolation valve will close very quickly to isolate the vacuum chamber from the pump 21 SH 110 Dry Scroll Vacuum Pump Troubleshooting Use the Troubleshooting chart in Table 5 to assist in defining a problem determining a possible cause and defining action steps to remedy the situation Table 5 Troubleshooting Chart Problem Possible Causes Corrective Actions Will not start One or both fuses blown Replace fuses Identify cause of overload Check the line voltage and the voltage configuration of the pump Motor thermal protector open Allo
8. Die Pumpe darf nicht in Umgebungen installiert und oder benutzt werden die ungesch tzt vor Witterungsbedin gungen Regen Frost Schnee Staub und aggressiven Gasen sind und in denen Explosions oder erh hte Brandgefahr besteht W hrend des Betriebs sollen die folgenden Umgebungs bedingungen gegeben sein 5 C bis 40 C Relative Feuchtigkeit 0 bis 95 niederschlagsfrei Temperatur ACHTUNG Stellen Sie sicher da die Betriebsspan nung mit der auf dem wei en Schild 110 oder 220 neben dem Einschalter On Off auf der R ckseite der Pumpe bereinstimmt Falls ein Wechsel der Spannung erforderlich wird nehmen Sie einen kleinen Schraubendreher m das Abdeckschild zu entfernen Drehen Sie nun den Spannungsselektor auf die gew nschte Spannung und schlie en das Abdeckschild Sie sehen jetzt auf einem wei en Hintergrund die von Ihnen gew hlte Spannung Schlie en Sie die Pumpe ber ein Netzkabel IEC 320 Typ f r mindestens 10 A an Gebrauch Vor der eigentlichen Inbetriebnahme der Pumpe ist es zur Erreichung des Grenzvakuums erforderlich die Pumpe ungef hr eine Stunde laufen zu lassen Die Einschaltung der Pumpe erfordert keine speziellen Schritte es ist lediglich der Schalter On Off zu bet tigen Das Einla ventil wird ca 10 sec Nach Einschalten der Pumpe ffnen GEFAHR Die Pumpe ist f r den Betrieb mit neu tralen und nicht korrosiven Fluiden konzipiert Der Einsatz mit potentiell explosion
9. WR TENNE PIE ZELL KIERERLIMWEHTR HAE WEBNEWS PR ET RIRES TRE 10 A IEC 320 MAGA KE GUAL o On Off Ra ATI A 10 MARI THE PE TASS RTE Wo PE AER TE VE TEESE ICE RE MINE gt On Off FRERE FT AH 10 A ERRAR URS 3 O ARE ELLIE FT NIET EE DIGERIRE e TERE TF GRR FEELIN TA IEER O Mae THMERDENT DAFA BT RUNE DEA AER o O R RE ERTL m BEN RU TREE DUREREA BEALAHRTEBIIBER PEIRE DE PI RELL 60 C O AAGHES Hi BEMIR HIE RER TEPER TL CHL Bb BARGE FEELS GER TAZA BA HAA BMA ED FA BET DITER PEEL UE A PRS AIA THA REMI LEAL o 1 SH 110 Dry Scroll Vacuum Pump
10. Tables Table Title Page 1 Specifications 15 2 SH 110 Power Cord Selection 19 3 SH 110 Typical Run Currents 20 4 Typical SH 110 Maximum Starting Current and Duration 115 V 20 5 Troubleshooting Chart 22 6 Tip Seal Replacement Kit 23 7 Factory Service Options 23 SH 110 Dry Scroll Vacuum Pump This page intentionally left blank SH 110 Dry Scroll Vacuum Pump Instructions for Use General Information This equipment is designed for use by professionals The user should read this instruction manual and any other additional information supplied by Vacuum Technologies before operating the equipment Vacuum Technologies will not be held responsible for any events that occur due to non compliance with these instructions improper use by untrained persons non authorized interference with the equipment or any action contrary to that provided for by specific national standards The SH 110 is a hermetic dry scroll vacuum pump This pump is suitable for pumping air or inert gases The pump is not intended to pump corrosive explosive or particu late forming gases The following paragraphs contain all the information nec essary to guarantee the safety of the operator when using the equipment Detailed information is supplied in Technical Information on page 15 This manual uses the following standard safety protocol WAR
11. WARNING Do not insert a finger or any foreign object in the path of the fan serious personal injury may result or the pump may be damaged 2 Operate the pump at an ambient temperature of 5 C to 40 C 41 F to 104 F otherwise damage to the pump or shortened operating life may result 18 CAUTION Do not block the fan ducts Blocking these ducts can cause pump overheat ing A pump surface temperature in excess of 65 C 150 F is potentially damaging If such conditions are observed turn the pump off and allow it to cool Disassemble inspect for dam age and repair if necessary Electrical Connections The pump can be configured for low voltage 100 VAC to 115 VAC or for high voltage 200 VAC to 230 VAC The pump as delivered from the factory is configured for low voltage To change the pump voltage follow this pro cedure WARNING Risk of electric shock Disconnect the pump from electrical power mains before attempting to change the voltage configuration 1 Verify your electrical supply voltage 2 Usea small flat blade screwdriver to release the fuse holder from the power entry module 3 Carefully pop out the white plastic assembly and reinsert with the desired operating voltage showing outward 4 Reinsert the fuse holder into the power entry module SH 110 Dry Scroll Vacuum Pump Power Cord Several power cord options are available from your Vacuum Technologies dealer Descriptions of
12. ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche La pompa a secco Scroll SH 110 una pompa ermetica adatta a pompare aria or gas inerti Questa pompa non e adatta per pompare gas or particelle tossiche corrosive or esplosive Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Per informazioni dettagli ate vedere Technical Information a pagina 15 Questo manuale utilizza le seguenti convenzioni PERICOLO I messaggi di pericolo attirano l attenzi one dell operatore su una procedura o una pratica specifica che se non ese guita in modo corretto potrebbe provo care gravi lesioni personali ATTENZIONE messaggi di attenzione sono visualiz zati prima di procedure che se non osservate potrebbero causare danni all apparec chiatura NOTA Le note contengono informazioni importanti estrapolate dal testo Immagazzinamento Durante il trasporto e l immagazzinamento della pompa non devono essere superate le seguenti condizioni ambientali 20 C a 60 C 0 a 95 non condensante Temperatura Umidit relativa Preparazione Per L installazione La pompa viene fornita in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Il peso dell imballo comprensivo della pompa S
13. cone avg 8 oanannnnn anono ananannnnnnenenenn 9 SEE Sa 9 Ma AE n a A NA 9 DI MMC Pr 10 647 dues ea dit uaa vog S ee 10 BHESREISEIS ee ee DC RR i 10 FESTE ste ern mein 11 N a A KS 11 ac D 11 RS 12 5 MIRI ee UR 12 E le TN Aa na RE 12 13 a RE SIE PERCIO DE 13 CERCO ROERO OSO OU ARR Le 13 SERRE RARI PONTE 14 isti ae re 14 be ami Pise bili 14 Technical Information 15 Unpacking and Inspection 17 Installations ste ID 18 Safety oa sess Endet euh 18 Startup ze lee ar TE SE 18 Electrical Connections 22 22 18 Run C rr nts i lass au dos sa 20 Start Current 20 Mechanical Connections 21 Operation sisi ec da RENE AS 21 Cleaning the Pump 21 Startup Procedure 21 Shutdown Procedure 21 Troubleshooting 22 Maintenance 23 Kits and Service Options 23 Cleaning orse sala Bed 23 Tip Seal Replacement 23 Request for Return Health and Safety Certification List of Figures Figure Caption Page 1 Interface Drawing with Dimensions 16 2 Pumping Speed Curves 16 3 Outline Drawing and Principal Items 17 4 Grounding Plug and Outlet 20 5 ON OFF Power Switch 21 6 Exploded View of Pump Body 24 List of
14. dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Mexico Varian S A Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Russia Central coordination through Varian Inc via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 252 Fax 39 011 997 9 316 Taiwan Varian Technologies Asia Ltd 18F 13 No 79 Hsin Tai Wu Road Sec 1 Hsi Chih Taipei Hsien Taiwan R O C Tel 886 2 2698 9555 Fax 886 2 2698 9678 UK and Ireland Varian Ltd 28 Manor Road Walton On Thames Surrey KT 12 2QF England Tel 44 1932 89 8000 Fax 44 1932 22 8769 United States Varian Inc 121 Hartwell Avenue Lexington MA 02421 USA Tel 781 861 7200 Fax 781 860 5437 Other Countries Varian Inc Via F Ili Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 111 Fax 39 011 997 9 350 Customer Support and Service North America Tel 1 800 882 7426 toll free vtl technical support varianinc com Europe Tel 00 800 234 234 00 toll free vtl technical support varianinc com Japan Tel 81 3 5232 1253 dedicated line vtj technical support varianinc com Korea Tel 82 2 3452 2452 dedicated line vtk technical support varianinc com Taiwan Tel 0 800 051 342 toll free vtw technical support varianinc com Worldwide Web Site Catalog and On line Orders www varianinc com Repre
15. emballage jusqu au moment de sa mise en fonction afin d viter toute pollution due la poussi re SH 110 Dry Scroll Vacuum Pump Installation Ne pas installer et ou utiliser la pompe dans des milieux expos s aux agents atmosph riques pluie gel neige des poussi res des gaz agressifs ainsi que dans des milieux explosifs ou fort risque lev d incendie Pendant le fonctionnement il est n cessaire de respecter les conditions environnementales suivantes 5 C 40 C 0 95 non condensante Temp rature Humidit relative ATTENTION S assurer que la tension fournie par votre g n rateur corresponde celle indiqu e sur l tiquette blanche 110 ou 220 adjacente au bouton On Off au r tro de la pompe Pour changer la tension de travail utilisez un petit tourne vis pour retirer la protection de l tiquette du module de tension Positionner l tiquette blanche en face de la tension d sir e et remettre la protection Connecter la pompe au g n rateur de tension par le biais d un cordon d alimentation IEC 320 d une capacit mini male de 10 amperes Utilisation Avant la mise en service de la pompe il est n cessaire pour atteindre le vide maximum que la pompe tourne environ une heure avec l entr e herm tiquement ferm e Il n y a pas d instructions sp ciales pour d marrer la pompe la mise en marche se fait l aide du commu tateur On Off La valve d entr e s ouv
16. eter dan Describe failure Describe failure Customer application August 2003 Customer application Page2 of2 R EG I S T E R E D Canada Central coordination through Varian Inc 121 Hartwell Avenue Lexington MA 02421 USA Tel 781 861 7200 Fax 781 860 5437 Toll Free 800 882 7426 China Varian Technologies Beijing Room 1201 Jinyu Mansion No 129A Xuanwumen Xidajie Xicheng District Beijing 1000031 P R China Tel 86 10 6608 1031 Fax 86 10 6608 1541 France and Benelux Varian s a 7 avenue des Tropiques Z A de Courtaboeuf B P 12 Les Ulis cedex Orsay 91941 France Tel 33 1 69 86 38 13 Fax 33 1 69 28 23 08 Germany and Austria Varian Deutschland GmbH Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 6151 703 353 Fax 49 6151 703 302 India Varian India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Inc Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 111 Fax 39 011 997 9 350 12 04 Sales and Service Offices Japan Varian Inc Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1263 Korea Varian Technologies Korea Ltd Shinsa 2nd Building 2F 966 5 Daechi
17. high level for your application If your pump exhibits humming or grinding noises from the bear ings a major overhaul should be done by Vacuum Technologies or an authorized rebuild center Advance exchange pumps are available to minimize downtime The parts needed for tip seal replacement on the SH 110 are available in the kit described in Table 6 This kit con tains seals and O rings and can be obtained from your Vacuum Technologies dealer Table 6 Tip Seal Replacement Kit Contents Part Description Number SHO110TS Replacement Tip Seals and O rings for SH 110 pumps Replacement Tip Seal Set Factory Service Vacuum Technologies offers rebuilding service at our fac tory or you can obtain advance exchange of complete SH 110 pumps The service plans available and their ordering numbers are given in Table 7 Table 7 Factory Service Options Model Number EXSHO1101 UNIV Factory Service Plans Advance Exchange SH 110 Pump Service Rebuild SH 110 RPSHO1101 UNIV Cleaning Exterior The exterior surfaces of the SH 110 may be cleaned with alcohol or mild detergents only Interior Run the pump periodically at atmosphere for a minute or two to flush it out For more information see Cleaning the Pump on page 21 Tip Seal Replacement The parts and tools required to replace tip seals are listed below Q Tip Seal Replacement Kit P N SHO110TS Q 4 and 8 mm Allen wrenches Q 14
18. operation and mainte nance must be well trained and aware of the accident prevention rules WARNING Q Death may result from contact with high voltages Always take extreme care and observe the accident prevention regulations in force Q When machine is powered up be careful of moving parts and high voltages Q f you have to perform maintenance on the pump after a considerable time in operation allow it to cool as the tem perature of the outer surface may be in excess of 60 C Q Always disconnect your power supply to the pump before beginning maintenance work NOTE Before returning the pump to the factory for repair the Health and Safety sheet attached to this instruction manual must be completed and sent to the local sales office A copy of the sheet must be inserted in the pump package before shipping If a pump is to be discarded it must be disposed of in accordance with specific national standards SH 110 Dry Scroll Vacuum Pump Istruzioni Per L uso Informazioni Generali Questa apparecchiatura e destinata ad uso professionale L utilizzatore deve leggere attentamente il presente man uale di istruzioni ed ogni altra informazione addizionale fornita dalla Vacuum Technologies prima dell utilizzo dell apparecchiatura La Vacuum Technologies si ritiene sollevata da eventuali responsabilit dovute all inosser vanza totale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato
19. paration il est indis pensable de remplir et d adresser au bureau local de vente la fiche S curit et Sant jointe la pr sente notice d instructions Une copie de celle ci devra tre mise dans l emballage de la pompe avant exp dition En cas de mise au rebut de la pompe proc der son limination conform ment aux r glementations nation ales en la matiere SH 110 Dry Scroll Vacuum Pump Gebrauchsanleitung Allgemeine Hinweise Dieses Ger t ist f r den professionellen Gebrauch bestimmt Vor dem Gebrauch soll der Benutzer dieses Handbuch sowie alle weiteren von Vacuum Technologies mitgelieferten Zusatzinformationen genau lesen Bei voll st ndiger bzw teilweiser Nichtbeachtung der enthaltenen Hinweise unsachgem em Gebrauch durch unges chultes Personal nicht autorisierten Eingriffen und Benut zung unter Mi achtung der nationalen Bestimmungen bernimmt Firma Vacuum Technologies keinerlei Haf tung Die Pumpe SH 110 ist eine hermetisch dichte trocken laufende Vakuumpumpe Scrollpumpe Diese Vorvakuumpumpe eignet sich f r das Pumpen von Luft oder inerten Gasen Die Pumpe ist nicht zum Abpumpen von toxischen korrosiven oder explosiven Gasen geeignet Ferner sind Partikel zu vermeiden In den folgenden Abschnitten sind alle erforderlichen Informationen f r die Sicherheit des Bedieners bei der Verwendung des Ger ts aufgef hrt N here Einzelheiten sind den Technical Information auf Seite
20. the avail able power cords and their ordering numbers are given in Table 2 NOTE For high voltage operation the pump must be connected to the power supply using a high voltage IEC 320 type power cord of at least 10 A capacity Table 2 SH 110 Power Cord Selection Power Cord Specification Order 10 A 220 230 VAC 2 5 m 656494220 Country Europe Denmark 10 A 220 230 VAC 2 5 m 656494225 Switzerland 10 A 230 VAC 2 5 m UK Ireland 13 A 230 VAC 2 5 m India 10 A 220 250 VAC 2 5 m 656494245 Israel 10A 230 VAC 2 5 m 656494230 Japan 12A 100 VAC 2 3 m 656494240 656458203 656494235 656494250 North 15A 125 VAC 2 0 m America 10 A 230 VAC 2 5 m 656494255 Grounding Instructions This product should be grounded In the event of an elec trical short circuit grounding reduces the risk of electric shock by providing an escape wire for the electric cur rent This pump is equipped with a power cord that has a grounding wire with an appropriate grounding plug The plug must be inserted into an outlet that is properly installed and grounded in accordance with all local codes and ordinances DANGER WARNING Improper installation of the grounding plug can result in a risk of electrical shock For United States and Canadian instal lations When this product is configured for use on a nominal 120 V circuit it must be used with a grounding plug that looks like
21. the new main O ring onto the Frame item 10 Make sure the area where the O ring sits is clean 23 SH 110 Dry Scroll Vacuum Pump Carefully replace the Scroll Housing making sure to line up the Locating Pins Be sure that the Tip Seal has not fallen out of its groove Reinstall 4 M5 bolts item 4 Torque the 4 M5 bolts to 4 N m 40 in Ibs 9 Place the front cowling in place and replace the M8 bolts 10 Reinstall the exhaust valve 11 Reconnect the pump to the electrical power mains Figure 6 Exploded View of Pump Body LZ O i 1 Front Cowling Bolts M8 3 3 Front Cowling 5 Scroll Housing 7 Main O ring Parker No 2 168 9 Orbiting Scroll To test the pump 1 24 Run the pump for about 5 seconds Verify that the front fan is running If you hear loud noises or observe labored operation this indicates that the Tip Seal or main O ring are possibly out of place Disassemble and repair as necessary The pump is now ready to return to service NOTE Newly installed Tip Seals may require several hours of run time to seat prop erly and enable the pump to meet speed and base pressure specifications 2 4 6 8 1 0 Exhaust Adapter NW1 6 Frame Bolts M5 4 Tip Seals Locating Pins 2 Frame X 9001 REGISTER ED A Request for Return VARIAN Health and Safety Certification 1 Return authorization numbers RA will not be issued for any product u
22. the plug illustrated in Figure 4 Q If repair or replacement of the cord or plug is necessary connect the grounding wire to the grounding terminal only Q The grounding wire is insulated and its outer surface is green It may or may not have yellow stripes Q When this product is configured for use on a nominal 220 V circuit it must be used with a factory supplied cord and plug that permits connection to the proper electric circuit See Electrical Connections on page 18 for proper rating and type of cord set Check with a qualified electrician or serviceman if the grounding instructions are not completely understood or if you are in doubt as to whether the product is properly grounded Do not modify the plug provided if it does not fit the outlet have the proper outlet installed by a qualified electrician Connect the product only to an outlet that has the same configuration as the plug Do not use an adapter with this product SH 110 Dry Scroll Vacuum Pump Grounded Outlet Box Grounding Pin 11 Extension Cords If you must use an extension cord with this product Q For this product Vacuum Technologies recommends using only extension cords with a minimum of 16 gage Grounded wire and a maximum length of 25 feet 7 6 m Outlet Figure4 Grounding Plug and Outlet WARNING If the product must be reconnected Q Use only a 3 wire extension cord that will accept the plug Q M
23. 15 zu entneh men In dieser Gebrauchsanleitung werden Sicherheitshin weise folgenderma en hervorgehoben Die Gefahrenhinweise richten die Aufmerksamkeit des Bedieners auf eine spezielle Prozedur oder Praktik die bei unkorrekter Ausf hrung schwere Per sonensch den zur Folge haben k nnte GEFAHR Die Warnhinweise vor bestimmten Prozeduren machen den Bediener darauf aufmerksam da bei Nichtein haltung Sch den am Ger t entstehen k nnen ACHTUNG ANMERKUNG Die Anmerkungen enthalten wichtige Informationen die aus dem Text her vorgehoben werden Lagerung W hrend des Transports und der Lagerung der Pumpe sol len die folgenden Umgebungsbedingungen gegeben sein 20 C bis 60 C Relative Feuchtigkeit 0 bis 95 niederschlagsfrei Temperatur Vor Der Installation Die Pumpe wird in einer speziellen Schutzverpackung geliefert Eventuelle Transportsch den sind der zust ndi gen rtlichen Verkaufsstelle zu melden Das Verpackungsgewicht betr gt einschlie lich der Pumpe SH 110 ungef hr 20 kg GEFAHR Beim Auspacken ist darauf zu achten da die Pumpe nicht fallengelassen oder St en oder Vibrationen aus gesetzt wird ANMERKUNG Die Pumpe kann wenn sie einfach der Atmosph re ausgesetzt ist nicht besch digt werden Sie sollte jedoch bis zur Installation an der Anlage geschlos sen bleiben um Verunreinigungen durch Staub zu vermeiden SH 110 Dry Scroll Vacuum Pump Installation
24. 34 272 7971 Ems abe PEF w 2144 HAS EE A AS ABUT ax WAVE BH G27 FE A O Al ZFS Ala E oo YE Eq 7 E _ ss DES do Vue ATUS 2 JEJU PFE PER equa HEUT RO Be ret T Bald Ar FL 43290 AAS BEI ENTE Po Fe 49 esu 9 MAE abe AE PEA BE ELE YO HE F2 488 JEAN HUY mi HI manc dojo Y ER ARE Al gg 13 SH 110 Dry Scroll Vacuum Pump i QUIA IE H4 Had aA F E 3A ua sz He SAIS 0 HZS as AY 48 37 PAS 73 220 Hip AS qu 4 8 LE 5 C 40 C 41 F 104 F A FE 95 B 2 55 APE FRY ol AL YE 75 ON OFF 913 EAA gH TY AA Ala 98110 E5 220 2 3 a oF FA AY ARo 28 pae a eggs he rj ao HEAL 34 Wo GT A DE EASES PANE 299 Er FETE pa 3 PFAND 23 10A 7849 IEC 320 BA AU SES ASF A ESF AA TEJA AAHAS Di ofo H ox H ge o or El ulo M re H o rlo zo of ry o m ol ur MU O A I li x tun Z ra n ol K o ol Eo ni nx ue ro xo in 10 4 off Au N E a EN o m DI L ug ZS qi mE 365 ur L rir ox H 9 amp M 14 A TA HF BE AE YA aaa apo AFSL bd AAL 243 OLAS oY 7440 FPSS QE FE a GHA Ago EJA YL ME 4 ERE RIA FE FA feu GZ HA LEZ 60 C 0 87 E WAR JTE FAAP FAS Sla ge a PIE LAS DAT peus Va SEALE AA Bay APPAR Biok BUG S esu o FIA PIRE EI HEN
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26. Current Inlet Pressure O Does not reach full speed O Leak O Upside down Temp 1 Foreline Pressure O Mechanical Contact O Overtemperature O Other Temp 2 Purge flow O Cooling defective FViGlogging toot air Operation Time Describe Failure Turbocontroller Error Message ION PUMPS CONTROLLERS VALVES COMPONENTS J Bad feedthrough I Vacuum leak O Error code on display 9 Poor vacuum O Other 9 High voltage problem O Main seal leak O Solenoid failure J Damaged sealing area O Bellows leak O Damaged flange Other 0d Describe failure Describe failure Customer application Customer application LEAK DETECTORS O Cannot calibrate O Vacuum system unstable O Failed to start O No zero high background O Cannot reach test mode O Other INSTRUMENTS O Gauge tube not working I Communication failure O Error code on display 9 Display problem 9 Degas not working Mother siate alia Describe failure Describe failure Customer application Customer application ALL OTHER VARIAN INC DIFFUSION PUMPS I Pump doesn t start I Doesn t reach vacuum I Pump seized Overtemperature I Noisy pump describe O Other Heater failure 9 Doesn t reach vacuum J Vacuum leak J Electrical problem J Cooling coil damage FOET
27. H 110 di circa 20 kg PERICOLO Durante l operazione di disimballaggio prestare particolare attenzione a non lasciar cadere la pompa e a non sot toporla ad urti o vibrazioni NOTA La pompa non pu essere danneggiata rimanendo semplicemente esposta all atmosfera Si consiglia comunque di mantenerla chiusa fino al momento dell installazione sul sistema onde evitare eventuale inquinamento da polvere SH 110 Dry Scroll Vacuum Pump Installazione Non installare e o utilizzare la pompa in ambienti esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o con elevato rischio di incendio Durante il funzionamento e necessario che siano rispet tate le seguenti condizioni ambientali 5 C a 40 C 0 a 95 non condensante Temperatura Umidit relativa ATTENZIONE Verificate che la tensione di rete corri sponda ai valori indicati sulla etichetta bianca 110 or 220 adiacente all inter ruttore On Off sul retro della pompa Se il cambiamento di tensione richiesto utilizzate un piccolo cacciavite per togliere la linguetta bianca dal modulo di potenza Posizionate la linguetta bianca in corrispondenza al voltaggio di rete e riinstallate il tutto Collegare la pompa alla rete utilizzando un cavo da 10 A con presa IEC 320 Uso Prima di mettere la pompa in servizio effettivo e necessa rio per il raggiungimento del vuoto limite scaldare la pompa per circa 60 min
28. NING The warning messages are for attracting the attention of the operator to a partic ular procedure or practice which if not followed correctly could lead to serious injury CAUTION The caution messages are displayed before procedures which if not fol lowed could cause damage to the equipment NOTE The notes contain important informa tion taken from the text Storage When transporting and storing the pump the following environmental requirements should not be exceeded 20 C to 60 C 4 F to 140 F 0 to 95 non condensing Temperature Relative humidity Preparation for Installation The pump is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office Total weight of the packing SH 110 pump included is approximately 20 kg 44 Ibs WARNING When unpacking the pump be sure not to drop itand avoid any kind of sudden impact or shock vibration to it NOTE Normal exposure to the environment cannot damage the pump Neverthe less it is advisable to keep the pump inlet closed until the pump is installed in the system SH 110 Dry Scroll Vacuum Pump Installation Do not install or use the pump in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk If placing the SH 110 pump inside an enclosure provide am
29. S Aol SH 110 Vacuum Pump to which this declaration relates is in conformity with the following standard s or other normative documents auf das sich diese Erkl rung bezieht mit der den flogenden Norm en oder Richtlinie n bereinstimmt auquel se r f re cette d claration est conforme la auz norme s ou au x document s normatif s al que se refiere esta declaraci n es conforme a la s norma s u otro s documento s normativo s waamaar deze verklaring verwijst aan de volende norm en of richtlijn en beantwoodt a cui se rifersce questa dichiarazione conforme alla e sequente l norma o documento l normativo i 0 AAS MA ape Yo ESI 7c HS EAS SPATE AS ad 98 37 EC Machine Directive EN 61010 1 EN 60204 1 Safety of Machinery Electrical Equipment of Machine EN 292 1 EN 292 2 EN 1012 2 89 336 EC and 91 263 EC EMC Directive EN55022 EN61000 4 3 EN61000 4 4 EN61000 4 2 EN61000 4 6 A ALA EN61000 4 5 EN61000 3 2 EN61000 3 3 Frederick C Campbell EN61000 4 11 Operations Manager Vacuum Technologies Varian Inc Lexington Massachusetts USA March 2001 SH 110 Dry Scroll Vacuum Pump Warranty Products manufactured by Seller are warranted against def
30. SH 110 Dry Scroll Vacuum Pump Manual No 699904311 Revision A July 2005 NOTICE This document contains references to Varian Please note that Varian Inc is now part of Agilent Technologies For more information go to www agilent com chem GE Agilent Technologies CE INSTRUCTION MANUAL MANUALE DI ISTRUZIONI NOTICE DE MODE D EMPLOI BEDIENUNGSHANDBUCH f TA LED HOT E SH 110 Dry Scroll Vacuum Pump Slo Blo and Littelfuse are registered trademarks of Littelfuse Inc Copyright 2005 Vacuum Technologies Declaration of Conformity Konformit tserkl rung Declaration de Conformite gt Declaraci n de Conformidad AP Verklaring de Overeenstemming Dichiarazione di Conformit VA R I A N 3r del C 3 We Wir Varian Inc Nous Vacuum Technologies Nosotros 121 Hartwell Avenue Wij Lexington MA 02421 3133 USA Noi tdt declare under our sole responsibility that the product erkl ren in alleniniger Verantwortung daf dieses Produkt d clarons sous notre seule responsabilit que le produit declaramos bajo nuestra sola responsabilidad que el producto verklaren onder onze verantwoordelijkheid dat het product dichiariamo sotto nostra unica responsabilit che il prodotto SA
31. T ARRIVER EME FT dd DE gt RERUM CAEZUGJWZZEBPIH zOZe 2834 2ZXJ B DEZ At TIEF PRESA KED OER ENABLE RESA COEF Tr 20 C 60 C 4 F 140 F 0 95 SH 110 gt 20 kg RTE IAMS OBIE LIED E BIERDEFZENDLIILTSTEE by ER MI ORE OR CUIR FILET 5 E EILEV ETA VERE NET RY KF AICRET SFE CREF ORS A THU CBS EEE LET SH 110 Dry Scroll Vacuum Pump 5 C 40 C
32. ake sure your extension cord is in good condition Q Be sure the extension cord is rated high enough to carry the current your product will draw An under sized cord will cause a drop in line voltage resulting in loss of power and overheating for use on a different type of electric cir cuit the connector should be replaced by qualified service personnel Run Currents Typical run currents listed in Table 3 are approximately constant from minimum to maximum intake pressure Table 3 SH 110 Typical Run Currents Frequency Low Voltage Range High Voltage Range 60 Hz 50 Hz 90 V 4 4 4 1 100 V 4 2 4 1 115V 126 V 4 0 3 7 4 2 4 2 180 V 200 V 230 V 252 V 2 2 2 1 2 1 2 0 1 9 2 1 2 1 2 1 Start Current Table 4 lists the typical SH 110 maximum starting current and duration Table 4 Typical SH 110 Maximum Starting Current and Duration 115 V 50Hz 60 Hz Current A Time ms Current A Time ms 24 20 250 26 250 SH 110 Dry Scroll Vacuum Pump Mechanical Connections Isolation Valve The SH 110 has an integral automatic isolation valve An internal timer opens the valve 10 seconds after the pump is switched ON If power is lost or the pump is switched OFF the isolation valve will immediately close Pump Inlet Use NW25 or larger clean vacuum hardware with as short a length as practical between t
33. areillage Les d tails sont fournis en page 15 dans le paragraphe Technical Information Cette notice utilise les signes conventionnels suivants DANGER Les messages de danger attirent l atten tion de l op rateur sur une proc dure ou une manceuvre sp ciale dont la mauvaise ex cution risque de provo quer de graves l sions au personnel ATTENTION Les messages d attention apparaissent avant certaines proc dures dont le non respect peut endommager s rieuse ment l appareillage NOTENT Les notes contiennent des renseigne ments importants extrapol s du texte Emmagasinage Pendant le transport et l emmagasinage de la pompe il faut veiller respecter les conditions environnementales suivantes 20 C 60 C 0 95 non condensante Temp rature Humidit relative Pr paration Pour L installation La pompe est fournie dans un emballage de protection sp cial si l on constate des marques de dommages pou vant s tre produits pendant le transport contacter auss it t le bureau de vente local Le poids total de l emballage et de la pompe SH 110 est d environ 20 kg DANGER Pendant l op ration d ouverture de l emballage veiller tout particuli re ment ne pas laisser tomber la pompe et ne lui faire subir aucun choc ni aucune vibration NOTENT La pompe ne peut tre endommag e en restant simplement expos e l atmo sph re Il est de toute facon conseill de la garder dans son
34. ects in materials and workmanship for twelve 12 months from date of shipment thereof to Customer and Seller s liability under valid warranty claims is limited at the option of Seller to repair to replace or refund of an equitable portion of the purchase price of the Product Items expendable in normal use are not covered by this warranty All warranty replacement or repair of parts shall be limited to equipment malfunctions which in the sole opinion of Seller are due or traceable to defects in origi nal materials or workmanship All obligations of Seller under this warranty shall cease in the event of abuse accident alteration misuse or neglect of the equipment In warranty repaired or replaced parts are warranted only for the remaining unexpired portion of the original war ranty period applicable to the repaired or replaced parts After expiration of the applicable warranty period Cus tomer shall be charged at the then current prices for parts labor and transportation Reasonable care must be used to avoid hazards Seller expressly disclaims responsibility for loss or damage caused by use of its Products other than in accordance with proper operating procedures Except as stated herein Seller makes no warranty expressed or implied either in fact or by operation of law statutory or otherwise and except as stated herein Seller shall have no liability under any warranty expressed or implied either in fact or by operatio
35. en the box and remove the upper foam block Carefully lift the SH 110 out of the box Save the carton and all packing materials Inspect the pump for damage If there is shipping damage contact the freight carrier and your local Vacuum Technologies sales office immediately SH 110 Dry Scroll Vacuum Pump Installation Safety Do not remove or modify any safety or insulating equip ment from the pump To do so may create a serious safety hazard and may void the warranty WARNING Q This pump is capable of pumping air and inert gases only It is not designed to pump explosive flammable corro sive or particulate forming gases They can cause bodily injury explosion or fire Q Install in an area that is not exposed to rain steam or excessive humidity They can cause electric shock short circuits and severe bodily injury Before reconfiguring the pump voltage or inspecting or servicing the pump be sure the electrical supply is disconnected Q The gas ballast must be sealed when ever pumping any gas not intended to be vented to the atmosphere CAUTION Although the pump can pump trace particulates normally found in the atmosphere it is not designed to process solids chemicals powders solvents condensates or other particu lates They can damage the equipment degrade its performance or shorten its useful life Startup 1 Check that the inlet screen is installed before begin ning operation
36. he pump and vacuum chamber Insert a bellows between the pump and vacuum chamber to provide both vibration isolation and strain relief Pump Exhaust A female 1 4 National Pipe Thread exhaust fitting is located radially near the front of the pump Additionally an NW16 male adapter with 1 4 National Pipe Thread is provided To avoid overheating the pump do not restrict the exhaust flow with long lengths of small diameter tub ing Use as short as practical lengths of NW16 or larger diameter hardware Gas Ballast The pump incorporates an automatic gas ballast to pre vent water and other condensates from accumulating within the pump The standard configuration has a solid plug installed in the 1 8 National Pipe Thread gas ballast port item 6 on Figure 3 on page 17 This configuration can be used for relatively dry applications A sintered fil ter plug is also supplied with the pump The filter plug can be installed in the gas ballast port and will allow enough atmospheric air to enter the pump to purge con densates while not affecting pump ultimate pressure or pumping speed For applications where the ingress of atmospheric air is undesirable dry nitrogen at a flow rate of approximately 2 L m can be bled into the gas ballast port WARNING The gas ballast must be sealed when ever pumping any gas not intended to be vented to atmosphere Operation Cleaning the Pump Unlike conventional oil sealed pumps Vacuum Technol
37. l at inlet per ISO 10816 1 Class 1B 1 5 mm s Fuse type M5 x 20 mm 10 A Slo Blo Littelfuse Model H215010 or equivalent Hour meter Integral Hour Meter provided displays running time to closest 1 hour Conformance standards Conforms to SEMI 2 2000 and applicable CSA CUS and CE standards SH 110 Dry Scroll Vacuum Pump 16 Pumpig speed min 120 00 5 43 Figure 1 Interface Drawing with Dimensions SH 110 PUMPING SPEED AIR TEST PERFORMED IAW ISO 1607 1 1993 E 110 00 100 00 90 00 80 00 70 00 60 00 50 00 40 00 30 00 20 00 10 00 0 00 1 E 02 1 E 01 1 E 00 1 E 01 1 E 02 1 E 03 Presure Torr 50Hz 115VAC 60Hz 115VAC Figure2 Pumping Speed Curves LT 74 2 2 92 o inlet t SH 110 Dry Scroll Vacuum Pump Figure 3 Outline Drawing and Principal Items NN See SS 10 11 12 13 14 15 Front Cowling Screws M8 3 Front Cowling Inlet NW25 Inlet Screen Exhaust Adapter NW16 Gas Ballast Port 1 8 National Pipe Thread Frame Base Mounting Slots 4 for 1 4 or M6 Hardware Rear Cowling Rear Cowling Screws M5 3 On Off Switch Fuse Holder and Voltage Changeover Tab Power Connection IEC 320 Hour Meter Unpacking and Inspection 1 Orient the shipping container with This End Up on top Op
38. mm crescent wrench Q Razor blade or side cutting pliers Q Compressed air optional WARNING If dangerous gases were being pumped flush the pump with air or inert gas for at least 10 minutes prior to disassembly Figure 6 on page24 shows the various components involved in a tip seal replacement procedure Refer to Figure 6 as you follow the procedure To remove the worn tip seals 1 Disconnect the pump from electrical power 2 Remove 3 M8 socket head bolts item 1 3 Usinga crescent wrench remove the exhaust adapter item 2 4 Remove the front cowling and hang out of the way item 3 Do not unplug 5 Remove 4 M5 bolts item 4 6 Remove the scroll housing axially off the frame item 5 7 Remove and discard the worn tip seals item 6 and the main O ring item 7 8 If compressed air is available blow any remaining seal debris off the scroll parts If seal debris is attached to the sides use a razor or Exacto knife to scrape the debris off To install the new seals and O rings 1 Unpack the Tip Seal 2 Install the closed loop portion of the Tip Seal onto the Orbiting Scroll item 9 3 Sequentially insert the seal from center to the outer edge of the scroll wall 4 Cutthe Tip Seal about 1 8 3 mm from the groove end 5 Usethe remaining Tip Seal material to fill the seal groove on the Scroll Housing and again trim the excess Tip Seal so that a gap of about 1 8 3 mm remains 6 Place
39. n of law statutory or otherwise Statements made by any per son including representatives of Seller which are incon sistent or in conflict with the terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of Seller Warranty Replacement and Adjustment All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto and must be received within the applicable warranty period by Seller or its authorized representative Such claims should include the Product serial number the date of shipment and a full description of the circumstances giving rise to the claim Before any Products are returned for repair and or adjustment written authorization from Seller or its authorized representative for the return and instructions as to how and where these Products should be returned must be obtained Any Product returned to Seller for examination shall be prepaid via the means of transporta tion indicated as acceptable by Seller Seller reserves the right to reject any warranty claim not promptly reported and any warranty claim on any item that has been altered or has been returned by non acceptable means of trans portation When any Product is returned for examination and inspection or for any other reason Customer shall be responsible for all damage resulting from improper pack ing or handling and for loss in transit notwithstanding any defect or non co
40. nformity in the Product In all cases Seller has the sole responsibility for determining the cause and nature of failure and Seller s determination with regard thereto shall be final If it is found that Seller s Product has been returned with out cause and is still serviceable Customer will be noti fied and the Product returned at the Customer s expense in addition a charge for testing and examination may be made on Products so returned 3 1 00 SH 110 Dry Scroll Vacuum Pump Contents Declaration of Conformity Warranty 2 0 eis iv Warranty Replacement and Adjustment iv Instructions for Use 1 General Information 1 SIOLa Be Ann armen SI ia 1 installation sea te cu ra 2 US Sr RR NE 2 Maintenance 2 Istruzioni Per L uso 3 Informazioni Generali 3 Immagazzinamento 3 Installazione a en i e a e ara 4 SO 4 Manutenzione 4 Instructions D utilisation 5 Indications G n rales 5 Emmagasinage spal erm u Rd 5 Installation LO 6 V lisations a ou etel eR da EEE ETE 6 Maintenance ROI Eur RES ves 6 Gebrauchsanleitung 7 Allgemeine Hinweise ess 7 Lagerung hs uut e d rer 7 Installation eres ERAN E 8 Gebrauchn edet ma opes SA rn 8 WaLrtting i iu a re or
41. ntil this Certificate is completed and returned to a Varian Inc Customer Service Representative 2 Pack goods appropriately and drain all oil from rotary vane and diffusion pumps for exchanges please use the packing material from the replacement unit making sure shipment documentation and package label clearly shows assigned Return Authorization Number RA VVT cannot accept any return without such reference 3 Return product s to the nearest location North and South America Europe and Middle East Asia and ROW Varian Inc Varian S p A Varian Vacuum Technologies Vacuum Technologies Via F Ili Varian 54 Local Office 121 Hartwell Ave 10040 Leini TO ITALY Lexington MA 02421 Fax 39 011 997 9350 Fax 781 860 9252 For a complete list of phone fax numbers see www varianinc com vacuum 4 If a product is received at Varian Inc in a contaminated condition the customer is held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Varian Inc employees occurring as a result of exposure to toxic or hazardous materials present in the product CUSTOMER INFORMATION Company name Contact person Ship method Shipping Collect sess POE aee a laete Europe only VAT Reg Number USA only DTaxable ONon taxable Customer ship to Customer bill to PRODUCT IDENTIFICATION Product Description Varian Inc Part Number Varian Inc Serial Number
42. ple room to supply ambient air to both the front and rear air intakes of the pump During operation the following environmental conditions must be respected 5 C to 40 C 41 F to 104 F 0 to 95 non condensing Temperature Relative humidity CAUTION Be certain that your electrical mains power voltage corresponds to that indi cated on the white tab 110 or 220 adjacent to the On Off switch on the rear of the pump If voltage changeover is required use a small screwdriver to remove the tab holder from the power module Position the white tab so that the correct voltage faces out and reinstall the tab holder Connect the pump to the power supply using an IEC 320 style power cord of at least 10 A capacity Use In order to reach maximum vacuum the pump must be left running for about an hour with the inlet sealed There are no special instructions for starting the pump it need only be switched on using the On Off switch The inlet valve will open 10 seconds after the pump is started WARNING The pump is designed for operation with neutral or noncorrosive fluids It is absolutely forbidden to use it with potentially explosive or inflammable substances There are no special instructions for stopping the pump it need only be disconnected from the electric power source by the On Off switch The inlet valve will close immediately after the pump is stopped Maintenance Personnel responsible for pump
43. re 10 secondes apr s la mise en marche de la pompe DANGER La pompe a t con ue pour fonction ner avec des fluides neutres ou non corrosifs L emploi de substances poten tiellement explosives inflammables ou v n neuses est strictement interdit L arr t de la pompe ne requiert aucune manceuvre parti culi re il faut seulement la d connecter de l alimentation lectrique gr ce au bouton On Off NOTENT La valve d entr e se ferme imm diate ment l arr t de la pompe Maintenance Le personnel charg de la conduite et de la maintenance de la pompe doit avoir recu la formation n cessaire et poss der une connaissance approfondie des normes de pr vention des accidents du travail DANGER Q Les hautes tensions peuvent entra ner la mort par contact Veiller toujours op rer avec le maximum de prudence et dans le respect des normes de pr vention des accidents du travail en vigueur Q Lorsque la machine est sous alimen tation faire attention la pr sence d organes en mouvement et de haute tension Q En cas de n cessit de proc der des op rations de maintenance de la pompe au terme d une p riode de fonc tionnement il est indispensable de la laisser refroidir car sa temp rature ext rieure peut tre sup rieure 60 C Q Avant toute op ration de mainte nance il est imp ratif de toujours couper l alimentation de la pompe NOTENT Avant de retourner une pompe au con structeur pour r
44. s oder feuergef hrlichen oder giftigen Substanzen ist streng verboten Das Ausschalten der Pumpe erfordert keine speziellen Schritte sie braucht nur durch Bet tigung des Schalters On Off abgeschaltet werden ANMERKUNG Das Einla ventil schlie t unverz glich nach Abschalten der Pumpe Wartung Das f r den Betrieb und die Wartung zust ndige Personal soll geschult sein und ber eine solide Kenntnis der Unfallschutzvorschriften verf gen GEFAHR O Hochspannungen k nnen bei Kon takt t dliche Folgen haben Es ist stets mit gr ter Vorsicht und gem der gel tenden Unfallschutzvorschriften vor zugehen Bei eingeschaltetem Ger t ist auf Bewegungs und Hochspannungsteile zu achten Q Falls die Pumpe im Anschlu an den Betrieb gewartet werden soll ist abzu warten bis sie abgek hlt ist da ihre Oberfl che eine Temperatur von 60 C berschreiten kann O Vor Wartungsarbeiten ist die Pumpe stets energiefrei zu schalten ANMERKUNG Bevor dem Hersteller eine Pumpe zur Reparatur zur ckgesandt wird ist das Formular Sicherheit und Gesundheit in der Anlage zum vorliegenden Hand buch auszuf llen und der lokalen Verkaufsstelle zuzustellen Eine Kopie des Formulars ist der Pumpenverpack ung vor dem Versand beizulegen Bei eventueller Verschrottung einer Pumpe ist diese entsprechend der einschl gigen nationalen Vorschriften zu entsorgen SH 110 Dry Scroll Vacuum Pump FE
45. sentatives in most countries ap ni VARIAN CE
46. truttore una pompa per riparazioni indispensabile compilare e far pervenire al locale uffi cio vendite la scheda Sicurezza e Salute allegata al presente manuale di istruzioni Copia della stessa deve essere inserita nell imballo della pompa prima della spedizione Qualora una pompa dovesse essere rottamata procedere alla sua eliminazione nel rispetto delle normative nazion ali specifiche SH 110 Dry Scroll Vacuum Pump Instructions D utilisation Indications G n rales Cet appareillage a t concu en vue d une utilisation pro fessionnelle Il est conseill l utilisateur de lire attentive ment cette notice d instructions ainsi que toute autre indication fournie par Vacuum Technologies avant d uti liser l appareil Vacuum Technologies d cline par con s quent toute responsabilit en cas de non respect total ou partiel des instructions fournies d utilisation incor recte de la part d un personnel non form d op rations non autoris es ou d un emploi contraire aux r glementa tions nationales sp cifiques La pompe SH 110 est une pompe vide s che et herm tique Cette pompe convient pour le pompage de l air ou de gaz inertes Elle n a pas t con ue pour le pompage de gaz toxiques corrosifs explosifs ou susceptibles de g n rer des particules Les paragraphes suivants fournissent toutes les indications n cessaires pour garantir la s curit de l op rateur pen dant l utilisation de l app
47. uti lasciandola lavorare con la flangia di ingresso chiusa Non ci sono particolari istruzioni per far partire la pompa basta accenderla utilizzando l interruttore On Off La valvola di ingresso si apre 10 secondi dopo la partenza della pompa PERICOLO La pompa progettata per operare con fluidi neutri o non corrosivi E assoluta mente vietato l impiego con sostanze potenzialmente esplosive infiammabili o velenose Lo spegnimento della pompa non richiede particolari manovre amp sufficiente scollegarla dall alimentazione elettrica agendo sull apposito interruttore NOTA La valvola di ingresso si chiude imme diatamente quando si spegne la pompa Manutenzione Il personale addetto alla condotta ed alla manutenzione della pompa deve essere ben addestrato e deve avere una approfondita conoscenza delle norme antinfortunistiche PERICOLO Q Le alte tensioni possono causare morte al contatto Operare sempre con la massima cautela e secondo le norme antinfortunistiche in vigore Q Quando la macchina alimentata prestare attenzione per la presenza di parti in movimento e di alta tensione Q Nel caso si debba procedere ad oper azioni di manutenzione della pompa al termine di un periodo di esercizio necessario lasciarla raffreddare poich la temperatura esterna pu superare i 60 C Q Escludere sempre l alimentazione della pompa prima di compiere oper azioni di manutenzione NOTA Prima di rispedire al cos
48. w motor to cool Identify cause of overload Excessive voltage drop Check size and length of cable Defective motor Inspect Contact Vacuum Technologies Poor ultimate System leak Locate and repair leak Pisos Water in pump Flush pump with air or dry nitrogen Gas ballast plugged Replace breather vent Contact Vacuum Technologies Solvent in pump Flush pump with air or dry nitrogen Install trap or filter Seals worn out Rebuild pump Poor conductance to pump Replumb with shorter and or larger diameter tubing Hammering noise Pump overheated Check ventilation to pump Check ambient temperature Debris in pump Check intake screen Flush pump Disassemble pump and inspect Pump runs Motor thermal protector is Allow the motor to cool intermittently cycling open and closed Identify the cause of the overload The SH 110 is equipped with an auto reset thermal motor protector This protector will automatically shut down the pump when it detects an overload condition and will automatically restart the pump when the motor has cooled to within an acceptable temperature range 22 SH 110 Dry Scroll Vacuum Pump Maintenance Kits and Service Options Vacuum Technologies pumps will provide many years of trouble free service if the maintenance procedures and intervals are observed Cleaning and tip seal replacement are recommended when pump base pressure has risen to an unacceptably
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