M-601GC 1CHコントローラ 取扱説明書
Contents
1. 4 FT 651 073 Vi 1 M 601GC ll 1 1 RRB 1 1 12 2MB60NNGIG NSR2RSPSHSRORRBRRRSBIRSSRRHSSSRRHSORSRRRBRSBISERZHBSIGEE 1 2 1 3 MM 601GC A 1 4 1 EC 921 0 PPP 1 4 9 1 4 2 SR ER 1 5 14 3 1 6 1 4 42. FT 651 073 ll 1 4 1 4 1 24VDC
3. e FT 651 073 1 2 1 2 1 MI Rk QrT Wl uy
4. EMC FT 651 073 125VAC 0 3A 30VDC 1A 24VDC 0 1A
5. FT 651 073 Vv 2 1 1 2 3
6. 125VAC 0 3A 30VDC 1A FT 651 073 24VDC 0 1A 3 4 3 4 REMOTE V 172 Log Pau 12 Pa P 10 2 V 12 P
7. ON OFF RS232C CE EMC M 601GC 24VDC 596 5x107 10 0 5 10 5V 50mV 2000 1 start bit 8 data bits No parity bit 1 stop bit No hardware handshake TDX RXD GND 3 9600 19200 38400 bps EN61010 1 EN61326 A 1 I FT 651 073 IT 2 I
8. FT 651 073 2 3 2 22 1 1 i te ed Prob gt 4 1 O i te 9 PcgD 4 amp w re ENTER CE PROG gt 2s 1 tr nN a A KS K NN A lt ID SN I U K 8 FN 1 1 H 1 L 5 IH 2 H 2 L 7 2 2 4 1 1 2 5 2 2 4 2 1 3
9. 3 PE GAUGE ON 100 240VAC AC FT 651 073 iv 20mm 50 C
10. 3 1 4 IP30 2 5mm 1 3 M 601GC M 601GC 103 0 a 8 O 8 NE M 601GC ES Co 4 3 5 O 4 106 3 2 5mm 1 4 1 4 1 LCD PROG 3 ENTER 4 4 5 FT 651 073 1 4 1 4 2 PROG 12 7 6 TEST GAUGE SP M 601GC
11. sp 1 2 7 ON 2 OFF EEPROM ADC SP 1 2 5 EEPROM ADC ALM OFF 9 5V 7 NG FIL LE 7 ALM OFF 9 5V DEGAS SP 1 2 n 9 DEGAS ON DEGAS ON 2 OFF ON DEGAS
12. FT 651 073 3 3 REMOTE OFF 24VDC GND 2006 EMC
13. lt 0 2V 0 1V 0 2V SP 1 2 or or 8 582V lt 9 5V 10 061V lt 10 3V 8 645V lt 9 5V 10 5V lt SP 1 2 Ur Ur 05V 2 199V 0 5V
14. FT 651 073 4 7 RS232C lt gt lt SP1 gt gt lt CR gt LF lt gt lt b bbE bb c ccE cc gt lt CR gt LF Parameter b Meaning x xxE xx Low Parameter c Meaning x xxE xx Hi 4 5 14 2 1 4 5 13 4 5 15 lt gt lt SPS gt lt CR gt LF lt gt lt b c gt lt CR gt LF Response b Meaning 0 1 OFF 1 1 ON Response c Meaning 0 2 OFF 1 2 ON 4 5 16 A D lt gt TAD gt lt CR gt LF lt gt lt bb bbb V cc cE 3 ohm gt lt CR gt LF mli mili 1 ld 00 0E 3ohm Response b Meaning xx xxx V Response c Meaning xx x E 3 ohm DD 4 5 17 lt gt TDD a gt lt CR gt LF lt gt lt OK gt lt CR gt LF mli mii
15. M 60 3 A pg 730 gt 13Pa lt KO 0 730 FT 651 073 2 6 22 4 1 Prog 1 2 2 4 1 SP H SP L 1 2 1 H PROG 1 SP 1 2 5P 1H L PROG 1 SP 1 2 15 1L PROG 1 SP 1 2 EO PROG 1 SP 1 2 5P 1H 3 Cz PROG gt 2s e 1 OFF ON OFF ON 4 10
16. 100 240VAC AC OFF OFF REMOTE OFF 24VDC GND 2006G
17. COMM a 7 7 6 Volt Torr Pambar MEAS FIL DEGAS HV DSBL ZERO _ GAS LOCK ALM PROG 1 PROG 2 1 2 TEST GAUGE SP 1 2 1 2 ON COMM RS232C MEAS ON FIL DEGAS HV DSBL ZERO GAS 1 00 LOCK ALM Volt Torr Pa mbar FT 651 073 1 5 M 601GC 1 4 3 The power cord protective grounding conductor must be connected to ground No user serviceable parts inside 1 RS232C PC Refer servicing to qualified personel TWARNING 2 GAUGE
18. ud ON FT 651 073 5 1 SP 1 2 ErrhH SP 1 2 LM Hi Hi OFF 9 5V gt 9 5V gt 10 3V gt 9 5V Lo Lo OFF OFF 9 5V
19. 1 2 2 E Vy lt E Qr FT 651 073 1 3 1 3 1
20. Err Hi Err Lo Err 06 Err 07 Response c Meaning x xx xx E xx FT 651 073 4 3 4 5 3 4 5 4 4 5 5 FT 651 073 mli mi 0 10 9 99 lt gt lt GAS gt b bb gt lt CR gt LF lt gt lt OK gt lt CR gt LF mli nmi lt gt lt GAS gt lt gt CR gt LF lt gt lt c ce gt lt CR gt LF Response c Meaning 0 10 lt 9 99 mli mili lt gt lt DGT gt lt a gt CR gt LF lt gt lt OK gt lt CR gt LF Parameter a Meaning 2 3 mli mili lt gt lt DGT gt lt gt lt CR gt LF lt gt lt b gt lt CR gt LF Response b Meaning 2 3 2 3 DEGAS ON OFF mli mili lt gt lt DGS gt lt b gt lt CR gt LF lt gt lt OK gt lt CR gt LF Parameter b Meaning DEGAS OFF DEGAS ON mli mili lt gt lt DGS gt lt gt lt CR gt LF lt gt lt b gt lt CR gt LF Response b Meaning 0 DEGAS OFF 1
21. Cc9 4 FT 651 073 2 7 SR lt SP H gt SP L gt SP1H SP1L SP2H SP2L Pa 1 00E 5 5 00E 2 5 00E 2 Torr 750 SP H SP L 3 75E 4 3 75E 4 mbar 1000 5 00E 4 5 00E 4 Pa 1 00E 5 5 00E 8 5 00E 8 Torr 750 SP H SP L 3 75E 10 3 75E 10 mbar 1000 5 00E 10 5 00E 10 Pa 1 00E 5 1 00E 7 1 00E 7 0 a Torr 750 SP H SP L 7 50E 10 7 50E 10 mbar 1000 1 00E 9 1 00E 9 Pa FS x 133 33 FS x 133 33 FS x 133 33 1000 1000 Torr FS SP H SP L FS 1000 FS 1000 mbar FSx1 3333 FS x 1 3333 FS x 1 3333 1000 1000 1 L 1 H 1H FS
22. 4 5 12 lt gt lt PRD gt lt CR gt LF lt gt lt b c cc cc E cce gt lt CR gt LF 1 0 00E 00 2 3 6 X XXXX Response b Meaning 0 OK 1 2 3 Err 03 Err 04 4 5 6 Id Err id 7 Err Hi Err Lo Err 06 Err 07 Response c Meaning x xx xx E xx 4 5 13 1 lt gt lt SP1 gt b bbE b b c ccE clc gt lt CR gt LF lt gt lt OK gt lt CR gt LF Parameter b Meaning x xxE x x Low Parameter c Meaning x xxE x x Hi 1 SP H gt SP L
23. 1 M 360CP M 336MX M 350PG M 340DG 4 24VDC FT 651 073 1 1 1 2 FT 651 073 M 601GC M 601GC wm jm 2000m FE M 360CP SP M 336MX SP M 350PG SD SP M 340DG 0 02 FS 0 05 FS Slow t 750ms fc 0 2Hz Normal t 150ms fc 1Hz Fast t 20ms fc 8Hz Pa Torr mbar 1 2
24. OFF 3 2 2 5 gt 2s 2 5 3 re ENTER 5 4 2 M O G C 0 1 oO FT 651 073 2 2 2 2 1 a ON LCD b 2 SL FREE EEPROM c 2 on CRAP d
25. 1 6 2 uuu 2 1 2 a 2 1 2 NRNNSRANNSASNNI2AONNN2RRS3NNBIRNSMOANS 2 2 2 7 RMRR ON 2 3 2 22 9 RE 2 4 2028 SS 2 6 2 2 4 1 Prog 1 EE 2 7 2 2 5 2 Prog 2 2 15 22 6 Sb 2 20 3 KK 3 1 3 1 GAUGE 3 1 3 2 RS232C 3 2 3 84 REMOTE A LR Ni 14 A A iA 3 3 MS MNOONMOMN200OMSGe 3 5 95 3 5 RS29265 BIS 4 1 828260 4 1 4 20 4 1 3 RS EES 4 1 5oI 2 07SNISPPNRKB2P SPPEPRTIREPH FT 4 2 4 5 sakana sa ER 4 3 5 3 2NUNNAMNMHKRAUSMOUNMOAUNSRNGRUSNASNGOHUNGS0 4 3 5 UE ARNMM2NIINMRRRR233820088RHHH382RR2RM 4 3 4 5 3 Ek 4 4 4 4 4 5 5 DEGAS ON OFF 4 4 45 6 ER 4 5 1 PTC 4 5 FT 651 073 2 0222 Rf 4 5 539 RNN 4 6 4 5 10 FC
26. 1 ON 4 DC 24VDO 24VDC 900mA 5 DD DD DD 2 DEGAS ON OFF 6 No use 7 No use 8 GND 9 DC GND GND A ID ID ID 13 k 15k CC 18kQ 4 7kQ 7 5kQ FT 651 073 3 1 OFF 3 2 RS232CT HHHHHHHHHHH RS232C D sub9P T QO D sub9P
27. 2 16 2 2 54 RS232C 9600 19200 38400 9600bps PROG 2 SP 1 2 dbAud ie 9 PROG 2 SP 1 2 J50 1T PROG 2 SP 1 2 9600 19200 38400 L 9 um PROG 2 SP 1 2 dbHud 2 2 5 5 ON OFF OFF PL pmoo 2 9 sp 1 2 w oN oFF _1T sp 1 2 on 9 PROG 2 sp 1 2 SsPlol FT 651 073 2 2 5 6
28. 9600bps 19200bps 36800bps CR CR LF 2 8 1 4 2 lt STX gt lt COMMAND gt PARAMETER1 PARAMETER2 PARAMETERn lt EOM gt STX 0x24 COMMAND PARAMETER 4 5 EOM CR 0x0D 4 3 STX gt lt DATA gt lt EOM gt LF STX 0x24 DATA EOM CR 0x0D LF
29. lt gt lt BAU gt 2 gt lt CR gt LF lt gt lt b gt lt CR gt LF Response b Meaning 0 9600 bps 1 19200 bps 2 38400 bps 4 5 2 mli mi lt gt lt CON gt a gt lt CR gt LF lt gt lt b c cc cc E cec gt lt CR gt LF MH ETX 2 0 00E 00 3 3 6 X XXXX Parameter a Meaning 0 100ms 1 1 sec 2 1min Response b Meaning 0 OK Err 03 Err 04 Id Err id ol ID
30. CC ON ON ON OFF OFF 14777 UN ON OFF PROG 1 SP 1 2 PROG 1 SP 1 on 2 1L 9 ON OFF PROG 1 SP 1 2 BuUrsP 4 M Cs PROG gt 2s ec9 1 e9 FT 651 073 22 5 2 Prog 2 cue rod gt Prob 9 gt xe WD M 5 CS PROG gt 2s 1 i 2 2 5 1
31. ON OFF OFF GFARCE L PROG 2 SP 1 2 1JT PROG 2 SP 1 2 on PROG 2 SP 1 2 PROG 2 SP 1 2 GFARCE FT 651 073 w oN OFF on 2 SEt oFF 2 2 5 7 RS232C RS232C CR CR LF CR 123eLC 9 9 PROG 2 SP 1 2 6 TT 4 w ON OFF SP 1 2 9 CR CR LF L 6 9 sp 1 2 1232C Lo PROG 4 1 diGt FT 651 073 2 19 gt
32. 2 2 4 3 ON 3 OFF OFF 0 5Pa 2 2 4 6 9 DSBL OFF OFF PROG 1 SP 1 2 boE 5 PROG 1 SP 1 2 PROG 1 SP 1 2 Dn rg fi m2 DEGAS ON nn 2 OFF J amp DEGAS ON OFF M CD PROG gt 2s 1 9 FT 651 073 10 2 2 4 4 OFF
33. 0 774V 0 5V lt 1 8V lt 0 5V FT 651 073 SP 1 2 Err do ALM SP 1 2 nobfub DD Id OFF 9 5V OFF 10V FT 651 073 5 3
34. 3 3 4 4 1 ON 24VDC 5 1 6 1 ON NO 1 7 1 Common 8 1 OFF N C 125VAC 0 3A max 30VDC 1A 9 DC 24VDC MAX100mA 10 DC GND 300mA 11 2 ON 24VDC 12 2 13 2 ON N 0 2 14 2 Common 15 2 OFF N C 125VAC 0 3A max 30VDC 1A DC
35. 9 5V 0 5V 10V 5 3 5 REMOTE 1 2 ON DEGAS ON OFF FT 651 073 RS232C 4 RS232C M 601GC RS232C RS232C lt gt 4 1 RS232C
36. 4 5 4 DGS DEGAS ON OFF 4 5 5 ERR 4 5 6 FLT 4 5 7 FSR 4 5 8 LOC 4 5 9 OFS 4 5 10 VER 4 5 11 PRD 4 5 12 SP1 1 4 5 13 SP2 2 4 5 14 SPS 4 5 15 TAD A D 4 5 16 TDI 4 5 17 TEE EEPROM 4 5 18 TID 4 5 19 TIO I O 4 5 20 TKY 4 5 21 TRS RS232C 4 5 22 UNI 4 5 23 CPF 4 5 24 FT 651 073 4 2 RS232C 4 5 4 5 1 lt gt lt BAU gt a gt lt CR gt LF Parameter a Meaning 0 9600 bps 1 19200 bps 2 38400 bps
37. CR LF FT 651 073 4 1 RS232C lt DATA gt OK _ lt OK gt lt gt 5 ON lt ERR 00001 gt lt ERR_00010 gt lt ERR_00100 gt lt ERR_01000 gt lt ERR_10000 _ 4 4 BAU 4 5 1 CON 4 5 2 GAS 4 5 3 DGT
38. PROG 2 5P iL PROG PROG 1 i5y a 25P 2 H 2 35P2H 335 gt je I5PEH 2 L 45PaL 5 3 Fe O15P IH FT 651 073 gt 2 8 OL cl 2 2 4 2 0 10 9 99 1 00 PROG 1 SP 1 2 PROG 1 SP 1 2 1 D PROG 1 4 2 amp 10 MA UM 0 RS 1 00 GAS 9 PROG gt 2s e 1 amp FT 651 073 29
39. EE 4 6 4 5 11 KONN 4 7 4512 UI RMSDSRIOSESuS5RRk 4 7 58 EM NNRINNIRSNNIRSNIRS2SN 4 7 4 5 14 2 1 LILILIELLL 4 8 4 5 15 4 8 45 16 A D SSS 4 8 ET AFL SE 4 8 4 5 18 EEPROM 4 9 4 5 19 uuu uu oohGthanSGtnnnRanaSAcatnanma5anasatmAnmatna5asataasAsaanasatatoanasstsanasateaanassanerasessanaananesarmaniaannansa 4 9 NID OOFR AR CC TT 4 9 45243 08k S22 4 10 522NRS2326 4 10 0 4 10 4 5 24 lt th 4 11 5 1 FT 651 073 M 601GC 1 M 601GC M 601GC M 601GC 1 1 M 601GC 24V M 601GC 1
40. 2243 1 4 _1 c 2244 1 5 gg Gs 2 2 45 1 6 ON g 4 b 2246 1 7 9 5 p 2 2 4 7 a FT 651 073 2 4 2 2 es Prob Probe gt gt gt 2 1 3 LT 2 6 ld bE 0 2 2 5 1 3 2 2 MO SN Fast Normal c F LE Slow 3 ow 2 3 0 Pa Torrmbar Mm 2 2 5 3 2 4 PROG 2 SP 2 RS232C 5 g 2254 3 9600 19200 38400bps 2 5 ON OFF ME 1 2 spror os 2 6 0 1 2 5FACE 2 2 5 6 1 2 7 RS232C 6 CCO RS232C ee CR
41. M CS PROG gt 2s 1 m9 2 2 6 1 TEST SP 1 2 Fno r 0 TEST SP 1 2 n 2 2 6 2 DD TEsT SP 1 2 a Fi JC LL FT 651 073 2 20 Aa 2 2 6 3 3 HgCo Le 357 Se 3g 2 2 6 4 FT 651 073 21 2 2 6 5 EEPROM TEST SP 2 TEST SP 1 2 PR5S TEST sP Fr TEST SP 1 2 KS EEP 2 2 6 6 5 dRL SP 1 TEST 2 Vol Volt OK SP 1 2 1 TEST SP 5 oAC FT 651 073 2 22 EEPROM 4
42. ON FT 651 073 4 9 RS232C 4 5 21 lt gt lt TKY gt lt CR gt LF lt gt lt aaaa gt lt CR gt LF Parameter a Meaning X PROG 0 OFF 1 ON X ENTER 0 OFF 1 ON kX 0 OFF 1 ON kX 0 OFF 1 ON 4 5 22 RS232C lt gt lt TRS gt lt CR gt LF lt gt lt OK gt lt CR gt LF mli mi 1 ETX H03 4 5 23 lt gt lt UND lt a gt lt CR gt LF lt gt lt OK gt lt CR gt LF Parameter a Meaning 0 Pa 1 Torr 2 mbar lt gt UNI gt lt gt lt CR gt LF lt gt lt b gt lt CR gt LF Response b Meaning 0 Pa 1 Torr 2 mbar FT 651 073 4 10 RS232C RS232C 4 5 24 lt gt lt CPF gt a gt lt CR gt LF lt gt lt OK gt lt CR gt LF Parameter a Meaning 0 OFF 1 ON lt gt lt CPF gt gt lt CR gt LF lt gt lt b gt lt CR gt LF Response b Me
43. Parameter a Meaning 0 OFF 1 ON FT 651 073 4 8 lt gt lt TDD gt lt CR gt LF lt gt lt a gt lt CR gt LF Parameter a 0 1 Meaning OFF ON 4 5 18 EEPROM lt gt lt TEE gt lt CR gt LF lt gt lt aaaa gt lt CR gt LF Parameter a Meaning PASS OK ERR_ NG 4 5 19 lt gt TID gt lt CR gt LF lt gt lt bbbbb gt lt CR gt LF Parameter b Meaning PIR__ CCPIR C ION CAP__ NoGAU 4 5 20 1 O _ lt gt lt TIO gt b gt lt CR gt LF lt gt lt OK gt lt CR gt LF Parameter b Meaning 0 1 1 2 OFF 2 1 2 ON lt gt lt TIO gt lt gt lt CR gt LF lt gt lt b gt lt CR gt LF Parameter b Meaning 0 1 1 2 OFF 2 1 2
44. 2digit 3digit 2digit PROG 2 SP 1 2 Ld U E km L PROG 2 SP 1 2 2 gd 7 Lj 1 amp w amp 2digit 3digit 3d 5 id bE LL 2digit 3digit lt 4 V4 5 FT 651 073 15 2 2 5 2 Fast Normal Slow Normal EF PROG 2 PROG 2 2 2 5 3 9 5 5 Lo 9 4 Pa Torr mbar Pa PROG 2 PROG 2 FT 651 073 p PA5SC Pa Torr mbar e
45. CR LF Re 3 i te 5 3 1 a Pno 226 1 3 2 ID 9 ee ID ADC 1 cg Li 8 3 3 5 2263 ADC 2 3 4 a ee LCD p 1 2 2 6 4 3 5 EEROM NN EEPROM p 2 2 6 5 3 6 OH 5 oRAEC 2 2 6 6 3 7 I O Car Lio 2 2 67 ON OFF 3 8 5 TE BE 3 9 RS232C a PC RS232C oF FT 651 073 2 5 2 2 3 1 eis M 6m 2
46. gt E E E A ft 1 1 1
47. OFF ON PROG 1 SP 1 2 L oFs5 Ll 9 PROG 1 SP 1 2 oFrF PROG 1 SP 1 2 PROG 1 SP 1 on ZERO p n PROG 1 SP 1 2 2 cz9 PROG 1 SP 1 2 PROG 1 FE 1 2 4 5 co Vz PROG gt 2s 9 0 2V FT 651 073 ec9 1 e 2 2 4 5 133E 3 13 3E 3 1 33E 3 266 133 66 6 33 3 26 6 13 3 133E 3 PROG 1 SP 1 2 amp tr Ll Wt 133E 32 gt 13 3E 3 gt 1 33E 3 gt 266 gt 133 gt 66 6 gt PROG 1 SP 1 2 33 3 26 6 1
48. 6 9 RS232C RS232C TL COMM TEST SP 1 2 COM a 3 S _ ASCII M 601GC TEST SP 1 2 JL FT 651 073 2 24 3 3 1 GAUGE D sub9P D sub9P D sub9P D sub9P M 340DG M 601GC QO a ct M 350PG SD SP UE 7 7 1 ON M 336MX 7 7 4 OOO 3 gt M 340DG 3 3 M 336MX SP sa ls zoc 4 90 OO 1 0 fe uy OO OO PC 3 DEGAS ON M 336MX SO MD 1 MAX10V 2 No use 3
49. TIO OD M 601GC RS232C RS232C HH D sub9P PC FT 651 073 3 2 HHH HH HH 2 RXD HHHHH 3 TXD HHHH 5 GND GND V M RS232CH HHHHHHH 4HIRS22CHHHH HHHHHHHHH 3 3 REMOTE M 601GC D sub15P REMOTE a ee 24VDC 24VDC PS2911 0V 1 FS 2 1 2 ON N 0 O O 6 1 ON NO spz 9 2 Common 1 Common IO ERT OFF N C 1 OFF N C 125VAC 0 3A 30VDC 1A 1 2 GND
50. 2 2 5 6 EEPROM EEPROM 0 1V 10 0V 4 Aa 2 2 6 7 IO J RE 4 1 122 ON OFF 1L 5 on D5 oFF TT ig Tesr Tesr RE 5 g 52 0n Jl 4 1 MV ON OFF JL 2 2 68 CE TEsT FT 651 073 2 23 2 2
51. 232C M 601GC GAUGE ON 100 240VAC AC 3 PE GAUGE ON FT 651 073 1 100 240VAC
52. 26 6Pa 3 266Pa 8 13 3Pa 4 133Pa FT 651 073 4 5 lt gt lt FSR gt lt gt lt CR gt LF lt gt lt c gt lt CR gt LF Response c Meaning Response c Meaning 0 133E 3Pa 5 66 6Pa 1 13 3E 3Pa 6 33 3Pa 2 1 33E 3Pa 7 26 6Pa 3 266Pa 8 13 3Pa 4 133Pa 4 5 9 lt gt lt LOC gt a gt lt CR gt LF lt gt lt OK gt lt CR gt LF Parameter a Meaning 0 LOCK OFF 1 LOCK ON lt gt lt LOC gt lt gt lt CR gt LF lt gt lt b gt lt CR gt LF Response b Meaning 0 LOCK OFF 1 LOCK ON 4 5 10 lt gt lt OFS gt b gt lt CR gt LF lt gt lt OK gt lt CR gt LF Parameter b Meaning 0 OFF 1 ON lt gt lt OFS gt lt gt lt CR gt LF lt gt lt b gt lt CR gt LF Response b Meaning 0 OFF 1 ON FT 651 073 4 6 RS232C RS232C 4 5 11 lt gt lt VER gt lt CR gt LF lt gt lt a a aa gt CR gt LF mli mi Response a Meaning 1 x xx 1ch
53. 3 3 PROG 1 SP 2 amp tr 4 m3 M 8 Cs PROG gt 2s 1 FT 651 073 12 2 2 4 6 ON OFF ON PROG 1 SP 1 2 So5bL 1L 9 PROG 1 SP 1 2 TT ON OFF PROG 1 SP 1 2 PROG 1 ON OFF SP 1 2 55 HV DSBL ON HV DSBL 1 M CS PROG gt 2s ON FT 651 073 eo9 1 e 2 2 4 7
54. 3 REMOTE 4 ON OFF 5 AC 100 240VAC 6 7 POWER LED ON 1 4 4 105 91 4 69 20mm 50 C FT 651 073 16 2 2 1 RS232C QO c N_ mn me 1 Nori W RS232G 6 7 RS
55. DEGAS ON RS232C RS232C 4 5 6 1 lt gt lt ERR gt lt CR gt LF lt gt lt ERR_aaaaa gt lt CR gt LF Parameter ar ja ae l 00000 00001 00010 00100 01000 10000 4 5 7 lt gt lt FLT gt a gt lt CR gt LF lt gt lt OK gt lt CR gt LF Parameter a Meaning 0 SLOW 1 NORMAL L__ _ 2 5151 FAST lt gt lt FLT gt gt lt CR gt LF lt gt lt b gt lt CR gt LF Response b Meaning 0 SLOW 1 NORMAL 2 FAST 4 5 8 lt gt lt FSR gt b gt lt CR gt LF lt gt lt OK gt lt CR gt LF Parameter b Meaning Parameter b Meaning 0 133E 3Pa 5 66 6Pa 1 13 3E 3Pa 6 33 3Pa 2 1 33E 3Pa 7
56. FT 651 073 M 601GC 1CHHIHHHHL HHHHH 2007 02 21 2006 11 21 2006 10 06 Copyright 2006 by Canon ANELVA Technix Corporation All Rights Reserved 1 1 1 3 3 1
57. aning 0 OFF 1 ON 1 ON FT 651 073 4 11 5 sp 1 2 EPROM Fr EEPROM ID 2 OFF CPU ADC SP 1 2 OFF 0 5V i A ADC a OFF 05V
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