ウエハーチェックバルブ (手動用) 取扱説明書
Contents
1. 5N m2. 1 1
3. 3 9 4 80mm 100mm 125mm 150mm 200mm 250mm 300mm LJ 0 NN 3 NN N QA No No 4 9 5 80 200mm 250 300mm R 1KI ml 5 9 6
4. 2 3 NQ CI
5. 3 4 5 6
6. rf re oe ie 2 2 RR 3 2 TE TI 113 0 A 9
7. 5 4 80 150mm M6 200 300mm M8 4 1 6 2 1 hi EN 9 9 9 10 6
8. Nrm kgf cm 30 0 40 0 55 0 60 0 8 9 OM 0 ee M8 S5 S6 M6 M8 gt 1 2 3 80 200mm 6 3 8 250 300mm 6 3 8Tf 4 5
9. 0 8 O 0 10 9 OM http Www asahi yukizai CO jD 2014 4
10. 1 0 2 0
11. gt kPa lgf cm 4 PSI FE FE sm 3 21 0 210 0 3 0 0 7 7 0 0 1 21 0 210 0 3 0 0 07 10 7 0 01 kPa lgf cm PSI mE 100 300 7 0 70 0 1 0 0 7 7 0 0 1 7 0 70 0 1 0 0 07 0 7 0 01 lt gt kPa lgf cm PSI sm 3 21 0 210 0 3 0 1 4 14 0 0 2 21 0 210 0 3 0 0 07 0 7 0 01 kPa lgf cm PSI ME FE 100 300 7 0 70 0 1 0 1 4 14 0 0 2 7 0 70 0 1 0 0 07 0 7 0 01 6 9 7 0 U 0
12. 9 OM _ 1 1 2 mm 2 3 3 RM 4 5 5 6 5 6 8 8 9 9 10 9 11 ee 9 SWMV JU UL gt
13. 7 AO 5 ES a 1 2 1 Se MM A mm N ll Re AA 8 ON 1 7 W e 7 ct SI RD 2 NR 1 7 9 x II SN N NN ee lt a 1 N uu 80 10mm 08mm N
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