研究開発用エキシマ紫外光照射装置 Excimer VUV
Contents
1. U UT U U 98 U U U 0 D 0 D 0 D UD D 0 D D D U D UD 0 D 0 U DUD D 10 D 0 0 0 D D D 0 D 0 D 0 D 0 0 U HREH EHS ERS YHS H EH HHT e e C DEE NAERU U U D U D DUU ON OFF O D 0 UD 0 0 0 LD 0 0 U U U U U U L U U L U U U D U U 0 0 D 0 U U L U U UU U L gt D UD D 0 UD DTD D D D D 2L min O O 0 3Mpa D O Oo 100V 220V 50 60Hz 450VAI XH UD U DU D D D D D D D D D 400 D D D D LD D D D D D D D D D D D D D 0 D D D 0 EE ABUN O CA AE LA O A GN LU U U UD 0 U U 0 U 0 0 UD 0 0 D 0 U U U U 0 0 D UD U U U UD U U 00 UD 0 U U 0 U 0 U UD 00 D 0 U 0 U We can design lamp quantity effective length VUV chamber work stage gas etc demand on customer de U U U D 0000 U Safety Precautions U UD DD D 0 D D D D DD DD D D D D D D D D D D D D D D D D U In order to use this product properly be sure to read the operation manual before use U U DU00000000 U 00 D D D D 0 0 0 0 00 U HUUUUO 000000 htto www mdexcimer com e mail into mdexcimer com 2000 2010 6 TEL 045 592 9252 045 590 5898 FAX 045 592 9255 D Excimer inc 0000000001000 0000000000000 D COM inc nnn Hmm nm 0000000000000000 Gegen MI ONE CO OO O 22400299 000000000 3633 TEL 045 592 9252 045 590 5898 UUUUOUUUNUUOUUO 3 6 33 MINAMIYAMADA TSUZUKI KU YOKOHAMA FAX 045 592 9255 j d A KANAGAWA JAPAN P C 224 0029 K eri G OO 150 010 ROOM 421 LIFE COMBI B D 61 4 TEL 82 2 761 1224 FAX 82 2 761 1225 N YOIDO DONG YEOUNGDEUNGPO KU SEOUL KO2. REA 00 HH H Hm 753 99 4010 PC 201102 TEL 86 21 5414 4149 FAX 86 21 5414 4150
3. http www mdexcimer com M D Excimer Inc LLL T TT TT TT TT TT TT TT TT TT TT TT TT TT Excimer VUV Irradiation System for R amp D Bonn 0000 140mw cp 000 172nm 0 D 000 0 0 lEI Mp CE 6OmW chi S I BRID 838 ea 7 0 Ga Um Wm Jam Wm wel mmm End 152mm 6inch t 18mm O0 140mw c0o 00 ID 0 D D DD DD U UU 00 UD DD D D D UD U 00 0 OY 150 2mm U 19mm 0 0000 0 5mm sec 45mm sec 600 W x 516 D x 348 H mm 0000 613mm O O 654mm UU CDAD D D D D 6mm U IN 20 HH 2L ming 0 00 0 3Mpaq 0 gt 1 49 00000000 IN OUT H 0000000010 0 060 f AC100V 50 60Hz 1kVA U U U U U U N2 U U U U LU U U U U U U U U U U U UD U U U 0 U 0 U U U U U U U U U LU U U U U U 0 U 0 U UU UD U UD U 0 U U UD U U 0 U pine U U D 0 DU D 0 0 0 0 0 0 D 0 0 0 DD 00 N2 CDAQUQUOL External Electrode LU U U U 0 U 0 UD U U U 0 UD U UD U U U U UD U UD 00 LU D I The structure of lamp can irradiate direct VUV light with out quartz 7 erin ST window The loss of the optical transmission and the reflection is little f and efficiency is high The structure becomes simple and it is possible to A low cost miniaturize it d EH RF Power Supply LU U U U U U 0 U 0 L N2 CDA Q 172nm 0 0 O T 222nm X Option 165 191 253 308nm 172nm U O O 140mw c 0 11 UU 7U0mW c 222nm 6OmW c J THUOUUUO OUUUUO 200mm 330mm 400mm 500mm 750mm 2500mm Il TOOUUL 6 8 12inch 50mm 0 0 X000000 LU U l 1 U U
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