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F40 User Manual

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1. Remarks Client software can add an event handler for this event in order to facilitate performing any necessary shut down actions This event is primarily used in order to permit client software to react to closing of the FlRemote user interface SystemAutoSave Public Property SystemAutoSave As Boolean Public Property SystemAutoSave ByVal systemGuid As Guid As Boolean systemGuid The GUID of a measurement system Remarks You can set or get the state of the AutoSave setting using this property Note that setting a new State for SystemAutoSave will not affect an on going monitor process but will take effect the next time a new set of data starts being collected Return to Index SystemAutoSaveBaseFileNameAndPath Public Property SystemAutoSaveBaseFileNameAndPath As String Public Property SystemAutoSaveBaseFileNameAndPath ByVal systemGuid As Guid As String systemGuid The GUID of a measurement system Remarks You can set or get the base filename and path for the AutoSave file using this property The full filename is generated by appending a date and time stamp to the base filename Note that setting a new filename will not affect an on going monitor process but will take effect the next time a new set of data starts being collected Return to Index SystemMeasure Public Function SystemMeasure As FIMeasResultValuesOnly Public Function SystemMeasure ByVal deleteAccu
2. Baseline Analyze Sn f HC Standard on Acrylic Trans m Edit Recipe Measurement 33 70 Wavelength nm Measured and calculated reflectance spectra when measuring the TS Hardcoat Trans If the calculated red and measured blue minima and maxima do not coincide then the measurement was not successful There are several possible causes of an unsuccessful measurement The most common for this type of measurement are described in Cases 1 2 and 3 in the Troubleshooting section Measuring Thickness and Refractive Index The following example describes the most common setup for refractive index and thickness measurement Example 1 Measuring Thickness and Optical Constants of a Film Example 1 Measuring Thickness and Optical Constants of a Film In this example we will demonstrate the measurement of Si3N4 on silicon This type of measurement has an extremely broad range of applications including the measurement of oxides polysilicon and optical coatings Step 1 Select the Film Recipe Select the film structure to be measured in this case Si3N4 on Si from the Recipe list box on the main screen If the structure to be measured does not exist a new structure must be defined See Editing Film Recipes for more details Step 2 Edit the Film Recipe To edit the film stack click the Edit Recipe button to open the dialog box Check to see that the film stack match
3. E a 2 8a u Saeas Deetean Copy Delete Selected Send Selected To Measure 1 Standard Windows menus including File Edit Setup Acquire and Help 2 These tabs are used to select between the Measure and History windows 3 Used to alternate between the Single Measurement and Measurement Trend tab Selecting the Measurement Trend tab will allow the user to see a plot of the measurement results versus measurement number FilMapper File Edit Setup Acquire Help SA EET ae WaferMap Measure History Measurement History ch annel Al Channels FILMETRICS Stats Layer 1 d nm TELHERENEIERIEE NIE Single Measurement 85 Measurement Trend Seer Puan layer Thies eas Layeridinm GOF Result Recipe Date Time Elapsed Time s UserID 62 99960 500nm TEOS on Si 1 9 2013 9 42 26 AM 2 63 501 99953 OK 500nm TEOS on Si 1 9 2013 9 42 28 AM 167 20 a 64 4998 99958 OK 500nm TEOS on Si 1 9 2013 9 42 29 AM 16841 6 65 500 4 99961 OK 500nm TEOS on Si 1 9 2013 9 42 30 AM 169 63 2 66 500 9 99970 OK 500nm TEOS on Si 1 9 2013 9 42 31 AM 170 83 u 67 sm3 99968 OK S00nmTEOSonSi 1 9 201394233 AM 172 06 Eo 68 501 7 99974 OK 500nm TEOS
4. Medium Air x 1 X Substrate Si SiO2 t Nominal A J J 10000 100 Range Meas t Refine via The Film Stack tab is used to define the film structure and desired measurement units as wellas the starting guesses and constraints for thickness n and k This is also where you determine your analysis method Grid FFT or None as well as any Nonuniformity that may be present in the sample The and above Composition Thickness and Nonuniformity can be used to expand or hide solving options Setting Up a Film Stack When measuring a layer the specifications thickness n and k ofthe known films including the incident medium and substrate must be entered into the proper fields in the Edit Recipe dialog box as well as initial guesses for the values to be measured The refractive index n and extinction coefficient k values for common materials can be selected from the drop down menus on the right hand side of the listed materials or by left clicking on the material and using the Search function Note that if a generic index is selected the software will instead prompt for a new index value If a material is being measured is not present in the material library there are three possible approaches to complete the recipe a Choose a material in the library that is similar b If the material is transparent an insulator select Enter Refractive Index Value
5. from the material list and enter a value for the refractive index n will automatically be varied by FlLMeasure to account for dispersion effects with the entered value being n at 632 8 nm c Create a new material file using the Edit gt Material Library dialog box Enter the refractive index values for n and k as a function of wavelength and save the files so that they may be selected as in the recipe See Creating and Editing n and k Files for more information Choosing the Films to be Measured To measure a film s thickness check the Meas box on the right hand side of the Thickness field under the Film Stack tab in the Edit Recipe dialog box When no boxes are checked the theoretical spectrum for the specified layer stack and thicknesses will be displayed As with most measurements the uncertainty of the measured data increases as the number of simultaneously measured values increases Thus it is best to provide as much information about the film structure as possible Constraints By setting constraints the user can limit the possible values of the measured film properties The constraints are set in conjunction with the values entered in the Range dialog box for Thickness For example if the initial guess of the measured thickness of a film is 100 nm and the thickness constraint is set at 50 FiLMeasure will only consider possible thicknesses in the range 50 nm to 150 nm The constraints for n and k are set using the n and k dialog
6. Edit Recipe gt Film Stack dialog box are far from the actual optical constants in the material Try selecting a different but similar material file if one is present for example switching from Acrylic to Acrylic 2 4 The film being measured has properties that are not taken into account by FlLMeasure Examples of these properties are graded interfaces and non uniform films You can enable solving for these conditions in the recipe Note Enabling Nonuniformity solving will increase solving time Case 5 Several different answers or one unreasonable answer are found when measuring thickness and optical constants even though a good match is found between the measured and calculated reflectance spectra This normally occurs when a large number of properties are being measured on a very thin film In general the thinner a film is the less unique information that can be obtained from it To understand this see Theory of Operation To solve the problem you can either A Decrease the number of variables solved for B Increase the amount of data provided to the solver analyzing reflectance and transmittance at the same time or using the multi spectral solver C Enable multiple Solver Cycles under the Edit Recipe gt Analysis Options gt Advanced dialog Advanced Features This section describes how to create and edit material files within Windows Excel Creating and Editing n and k Files Creating and Editing n and k Files Creatin
7. File Edit Setup Ar EIRE Acquire Help Cell Gap Cell Gap Calculated History rind Measurement Status 0 2691 um Measure Baseline Analyze Cell Gap B Edit Recipe jeasure ie u ae j if 10 a 7 F a A A i ff 8 ER ae J H S N ao ak AN AR De ENTE RER NN Fa a a 4 Br FA A N Pa 300 400 500 700 800 Wavelength nm Measurement 580 Example of a non ideal film spectrum with no oscillations at lower wavelengths that requires reduced wavelength range for accurate measurement B FilMeasure siea File Edit Setup Acquire Help CA EIRE Measure History ac FILMETRICS ne ind Cell Gap Calculated 7 r Measurement Status AN A In l IN F MS NF 1 3 1 4 um 6 1 Measure Baseline Analyze 5 Cell Gap a g Edit Recipe g4 E Measurement t Results 3 Air 13 1 ec 14 um Goodness of fit 0 9973 Y Measurement 590 760 Wavelength nm Example of a reduced wavelength range for measuring thickness of non ideal films Measuring thickness when the approximate thickness is not well known Unless otherwise specified FIL Measure will determine a film s thickness by finding the best answer within about 1000 A of the initial user supplied value If the approximate thickness of the film is not known to better than about 1000
8. If you are checking a UV light source put on the goggles that were supplied with the light source before checking Yes It appears the fiber may be broken Replacements can be purchased on our website_ www filmetrics com No Replace the lamp following the instructions here A spare lamp is included with most systems and additional lamps may be purchased on our website www filmetrics comNote users can confirm a halogen bad lamp by removing it and checking it for electrical continuity Step 4 Perform a new baseline paying particular attention to making sure that you are using the proper reference and that it is clean and right side up Step 5 Put a known good sample on the stage and perform a measurement If the measurement is still not correct go to Step 6 Step 6 Your lamp may be weak and needs to be replaced The best way to tell is to replace it with the instructions found here Aspare lamp is included with most systems and additional lamps may be purchased on our website www filmetrics com If you are still experiencing problems with a slow baseline after the proceeding steps please contact us using the methods described in the Contact Information section Slow Operation Troubleshooting Guide Follow the simple steps below to troubleshoot slow system operation Further assistance may be received by contacting us using the methods described in the Contact Information section Step 1 When did you experience the slow operation Dur
9. Sub BaselineSetRefMat ByVal measChannelOrSystemGuid As Guid ByVal theRefMat As String measChannelOrSystemGuid The GUID of the measurement channel for which the reference material should be assigned If multiple measurement channels exist the measChannelGuid must be specified theRefMat The reference material as it would normally appear in the list of reference materials shown in the Baseline dialog Remarks This method should be called prior to acquiring a reference spectrum Return to Index BaselineShowDialog Public Sub BaselineShowDialog ByRef dialogCanceled As Boolean dialogCanceled True if user has canceled the dialog Remarks Calling this method will cause the baseline dialog box to be displayed on the screen Return to Index GUIVisible Public Property GUIVisible As Boolean Remarks Setting this property to True will cause the FlRemote user interface to be displayed on the screen Note that this willnormally cause the user interface window to appear on top ofany other windows If you wish to keep another window on top of the FlRemote user interface window it may be necessary to call BringToFront on that other window If the FlRemote object is constructed with guiType set to None then an exception will be thrown if GUIVisible is set to True Return to Index HistoryDeleteAllResults Public Sub HistoryDeleteAllResults Remarks All measure
10. all have a unique type of n and k wavelength dependence Dozens of models for these different dependencies have been proposed and used over the years FiLMeasure uses a few of the most versatile and accepted models For insulators the Cauchy model is used for semiconductors either the Amorphous or Bridge Lorentzian model and for metals the Drude model There are also a number of special purpose models for specific applications These models and starting coefficients values are selected automatically when a material is chosen from the Material lists in the Edit Recipe dialog box Other models may also be specified by selecting them from the nk Model drop down menu under the Composition tab which is accessed by right clicking on the Meas checkbox when solving for optical constants is enabled Grid Search for Thickness There are a number of methods that FlLMeasure can use to determine thickness Each is a different trade off between speed accuracy and robustness i e the ability to find the best solution among many that are nearly as good Because thickness can vary over many orders of magnitude and many near solutions may exist it is often best to use a very robust method to get close to the best solution and then let a more accurate method take over One very robust method is the Grid method which can be activated by selecting the Grid option in the Refine via drop down menu The Grid method searches the entire allowed thickness range
11. also want to confirm that the correct model is selected Right click on the Meas button to access the nk model drop down list and select the Si3N4 model For more information on optical models see nk Model The substrate should be set to Si Underneath the Analysis Options tab set the Analysis Method to Exact with nothing else enabled Click OK to confirm the changes to the recipe Step 3 Take a Baseline Measurement Take a baseline measurement by first clicking on the Baseline button on the main screen A dialog box will appear to guide you through the process Follow the steps on screen and be sure to match the material selected with the reflectance standard that will be used For this example use the Si reflectance standard If you re having trouble focusing and your microscope has a field stop you can use this guide to help focus your system Step 4 Make the Measurement Make the measurement by placing your sample on the stage and then click on the Measure button FlLMeasure will then acquire the reflectance spectrum and calculate the corresponding thickness and optical constants If the measurement was successful the calculated reflectance the red line on the graph will coincide with the measured reflectance the blue line on the graph If the measured and calculated spectra do not fall on top of each other the resulting thickness n and k values are incorrect If the mismatch between measured data and calculation is only slight
12. as defined by the initial guess and the constraints to find the best initial thickness However on some very complex multilayer spectra it is possible for the Grid method to give the wrong answer In such cases it is best to use the Fourier Transform FFT method to determine initial thicknesses or to provide them manually Fourier Search for Thickness The FFT option in the Refine via drop down list is an alternative option to let FiL Measure choose an initial thickness for analysis The Fourier Transform method analyzes the oscillations present in the spectrum and determines the film thicknesses based on the periodicity of those oscillations It is generally somewhat less robust than the Grid method but is better at finding the correct thickness in cases where the shape of the initial theoretical spectrum is different than the measured data i e the reflectance spectrum is non ideal in some way or occasionally in cases where there is more than one film thickness is being measured Nonuniformity me a E Sh da wl Recipe Name SiO2 on Si g Author Last Modified 2 25 2013 11 22 04 AM Film Stack Analysis Options Alarms Acquisition Settings Units Angstroms A v Composition Thickness Nonuniformity t h E EF Layer Nominal A Range Meas Refine via A Meas x Medium Air 8 X 1 sio2 g 14 X Substrate Si x The Edit Recip
13. being solved for by clicking the checkbox under Meas The substrate should be set to Si Under the Analysis Options tab set the Analysis Method to Exact with nothing else enabled Once the changes have been made the recipe can be saved by clicking on the save icon i or confirm the changes without saving over the recipe by clicking the OK button Step 3 Take a Baseline Measurement Take a baseline measurement by first clicking on the Baseline button on the main screen A dialog box will appear to guide you through the process Follow the steps on screen and be sure to match the material selected with the reflectance standard that will be used If you re finding it difficult to focus the system see Focusing a Microscope Image on a Perfectly Flat Surface for help For this example use the reference square on the TS Focus SiO2 4 10000 as your Si reflectance standard Step 4 Make the Measurement Make the measurement by placing the TS Focus SiO2 4 10000 on the stage with the SiO2 square underneath the light path and then click on the Measure button FlLMeasure will then acquire the reflectance spectrum and calculate the corresponding thickness If the measurement was successful the minima and the maxima of the calculated reflectance the red line on the graph will coincide in wavelength with the minima and the maxima of the measured reflectance the blue line on the graph In most cases they will not overlap but will be separated in amplitu
14. boxes under Composition These boxes are only visible when the Thickness and Composition options are expanded You can select between constraining by a percent of the thickness guess or by a selected thickness by clicking on the or measurement unit above the constraints dialog box Constraining the measurement range can speed up analysis and can also help exclude non physical solutions Custom Units The Custom Unit function allows you to create your own custom unit for measurements if the metric you d like isn t already available in the drop down list E Edit Custom Units Name Custom Abbreviated Name Cstm Coefficient or ance The Edit Custom Units dialog box To determine the correct coefficient to use you must first know the relationship between your unit and nanometers For example if your units are mg ft2 and it s been determined that 1 mg ft2 works out to a film thickness of 150 nm then you would calculate your coefficient as follows where X is the coefficient nm 5 17 x X 150nm ft mg ft 150mm Xnm Inm X 150 Custom units can be saved as part of the Recipe file and only one custom unit can be saved per recipe nk Model When measuring the n and k of a film the general dependence of these values upon wavelength must be specified This dependence is determined by the type of material to be measured For example insulators semiconductors and metals
15. create modifications of the Software source code Licensed Revisions nor to disclose such Licensed Revisions to Licensor You acknowledge that by making Licensed Revisions the underlying Software may not be compatible with any future versions of the Software that Licensor might offer in Licensor s sole discretion and you agree to assume such risk Continuing for the term of this Agreement you hereby grant to Licensor and its affiliates a limited non transferable non exclusive worldwide fully paid up royalty free license with the right to sublicense to make use sell offer to sell import export and otherwise distribute such Licensed Revisions under any of your patents that if not authorized would be directly or indirectly infringed by the manufacture use sale offer to sell or other distribution of the Licensed Revisions You may not combine or distribute the Software or Licensed Revisions with Open Source Software as defined below or with software developed using Open Source Software e g tools in a manner that subjects the Software and Licensed Revisions or any portion thereof to any license obligations of such Open Source Software Open Source Software means any software licensed under terms requiring that other software combined or distributed with such software i be disclosed or distributed in source code form ii be licensed on terms inconsistent with the terms of this Agreement TERM This Agreement is effec
16. files the data should follow the format shown below where the wavelength values in units of nanometers are in the first column and the n or k values are in the second Note that the version number cell B1 refers to version of the file For this cell you can use 1 The material number cell B2 refers to what material category the file corresponds to The material categories and their corresponding numbers are metal 1 semiconductor 2 insulator 3 photoresist 4 and other 5 By putting the correct value for the material number the file will automatically be sorted into the correct category when selecting the material in the Edit Recipe window To save the file created by Microsoft Excel go to File gt Save As For Save as Type choose CSV Comma delimited csv For n files save the file as FILENAME nnn and for k files save the file as FILENAME kkk FILENAME represents the name you wish to call the file note that quotation marks must be used to enclose the filename in Excel to force the extension to nnn or kkk The file can then be saved to the desktop and Imported using the File gt Import gt Material File option A B 1 Version 1 2 Material 3 3 206 6 1 543 4 226 7 1 5228 5 248 3 1 5084 6 265 2 15 7 280 3 1 494 8 302 2 1 4872 9 330 3 1 4805 10 361 1 1 4751 For fitnk files The data should follow the format of shown below where the wavelength values in units of nanometers are in the fir
17. for which a spectrum should be analyzed and optionally added to history If multiple measurement channels exist the measChannelGuid must be specified formatSummaryAsRtf The measurement summary returned by the ResultsSummary property of the FiMeasResults object can be formatted as either plain text or as rtf Formatting the summary as rtf is advantageous if it will be displayed to the user because then the full set of information including bold font and colors will be included addToHistory Normally each analysis result is added to the collection of results displayed in the History area of FiLMeasure In some cases it may be advantageous to suppress the addition of a result to the History area One example where this may be needed is the case where you wish to analyze a spectrum with two different measurement recipes and then add only the best result to the History Remarks The most recently acquired spectrum can be analyzed by calling this function Return to Index AuthenticateRefBac Public Sub AuthenticateRefBac Public Sub AuthenticateRefBac ByVal measChannelOrSystemGuid As Guid measChannelOrSystemGuid The GUID of the measurement channel for which a baseline should be recovered If multiple measurement channels exist the measChannelGuid must be specified Remarks Calling this method is equivalent to clicking Baseline to display the Baseline dialog and then clicking Recover Last Baseline to re
18. know that there is a finitely thick layer of acrylic so that it will accurately account for back reflections Click OK to confirm the changes to the recipe Step 3 Take a Baseline Measurement Take a baseline measurement by first clicking on the Baseline button on the main screen A dialog box will appear to guide you through the process Follow the steps on screen and be sure to match the material selected with the reflectance standard that will be used For this example use the BK7 reflectance standard If you re having trouble focusing and your microscope has a field stop you can use this guide to help focus your system Otherwise the edge of the BK7 or any surface scratches can be used to help focus the system Step 4 Make the Measurement Make the measurement by placing your sample on the stage and then click on the Measure button FILMeasure will then acquire the reflectance spectrum and calculate the corresponding thickness If the measurement was successful the minima and the maxima of the calculated reflectance the red line on the graph will coincide in wavelength with the minima and the maxima of the measured reflectance the blue line on the graph In most cases they will not overlap but will be separated in amplitude B FllMessure o a File Edit Setup Acquire Help EIEE Measure History Pe i FILMETRICS HardcoatStandard Calculated ff E AA 9 TV NAY y ALA Measure RAND is i ie wre Ur ZS Fn 7
19. structure must be defined See Editing Film Recipes for more details SAA Recipe Name VIS AR Thickness Standard 7 Author Last Modified 3 22 2013 10 02 26 AM Film Stack Analysis Options Alarms Acquisition Settings Units Nanometers nm v Composition Thickness NU z HE Layer Nominal nm Range Meas Refine via x Medium Air 1 SiO2 2 TiO2 AR2 3 SiO2 4 TiO2 AR2 x Substrate BK7 Step 2 Edit the film recipe To edit the film stack click the Edit Recipe button to open the dialog box Check to see that the film stack matches that of the actual sample If not different films can be selected using either the drop down menu next to the material or the Search function If there are fewer layers present in the recipe than there are in the film stack of your sample additional layers can be added with the buttons on the left hand side The X buttons can be used to remove additional layers if there are too many present This is also where you can enter a starting guess for thickness as well as the desired constraint range For this example we ll use 83 nm as the Nominal thickness for the first layer 100 nm for the second 30 nm for the third and 20 nm for the fourth When solving for multiple layers it is suggested to use smaller constraints 35 in this case to he
20. tab or by selecting Search from the material selection drop down list Note When clicking on a generic index file the software will instead provide you with a dialog to enter a new index value This feature allows the user to search for materials by using either the material name or a keyword for a certain class of materials The search function will also show a brief Description of the material selected as well as any Synonyms or Keywords related to the material file When files have a Synonym that means they are referencing the same material file under different names So for example if Silicon is selected the file that will be shown in the Film Stack is Si not Silicon as that is the file both names are referencing The Similar Materials box will list any materials that may have similar optical properties Analysis Options co TT Te oe ae Recipe Name Freestanding Cellulose Nitrate Author Last Modified 1 14 2013 11 18 57 AM 5 Alarms Acquisition Settings Data Selection Wavelength Range Displayed data Fixed range From 229 37 nm To 1700 nm Smoothing Optical thickness 350 um Source Data Analyze using if present All Transmittance 0 9 V Reflectance 0 7 7 Reflectance 70 Analysis Method FFT thickness only Spectrum matching Robust adaptive thickness only Exact Compensate for Unmod
21. than the software is set to Display the analyzed spectra can easily be retrieved from the History tab Acquire gt Batch gt Analyze All Spectra in Folder This option will analyze every spectrum in a folder with the currently selected recipe If there are more spectra to be analyzed than the software is set to Display the analyzed spectra can easily be retrieved from the History tab Help Menu User Manual Diagnostics Request Support About FiLMeasure Diagnostics The diagnostics window gives information regarding the data taken during the baseline Reference and background counts are shown this is useful to see how much signal the system is getting good signals typically are between 2500 3500 counts oo Lif Measurement Sub module Primary v Baseline Details Acquisition Settings Spectrometer Wavelengths Short Long Reena eee Recommended Reference Material Si Si Reference Peak Signal 3198 6 counts counts Spectrometer Wavelengths Short Seek Integration Time 3 61 ms 611 18 ms show Integration Cycles to Average 69 1 History History Spectrometer Details Background Peak Signal 1265 8 counts counts Short Long Show Serial none 2316510 1 Temperature 36 6 C N A C Sample Peak Signal 3197 6 counts Show Sample Spec Int Time 3 61 ms Help gt Diagnostics shows the user informa
22. the results reported will only be off by asmall amount If the measured and calculated spectra match but the results are implausible there may be a problem with the sample positioning and light collection Causes and corrective actions to improve the measurements are listed in Cases 4 and 5 in the Troubleshooting section HA Fil Measure File Edit Setup Acquire Help CA EIEE Measure History mind Measurement Status ae f 344 1 nm Sh oni Caled Measure f Baseline Analyze Si3N4 on Si E2 Reflectance Eatreope Measurement Results Si3N4 344 1 nm n 632 8 nm 1 7215 k 632 8 nm 0 0000 Goodness of fit 0 9924 Optical Constants n and k Measurement 116 700 800 900 1000 Wavelength nm Measured and calculated reflectance spectra when measuring the thickness n and k of Si3N4 on silicon Measurement Assumptions The following assumptions must be valid if accurate measurements are to be made with the F40 1 Every film present in the structure is specified in the Edit Recipe dialog box This includes every film present in the sample including so called adhesion films oxide films unless they are less than 20 A or greater than 500 microns thick and films on the bottom surface of the substrate if the substrate is transparent 2 If the film is nonuniform it has been accounted for in the recipe 3 The light source has been allowe
23. this case the system should be operation correctly If not please contact Filmetrics Unknown Device or similar The hardware appears to be operating properly but the drivers for the hardware are not installed If you have already power cycled and installed the most current Filmetrics software please contact Filmetrics for further assistance Neither of the above The hardware is not working properly Go to Step 7 Step 7 Try a new USB cable and plug it into a different USB port Does this fix the problem Yes Either the USB cable or port was bad No The USB controller inside the FiLMetrics box may be bad Please contact Filmetrics Accessing Device Manager in Windows 7 1 Click on the Start Orb 2 In the Star Search box type device manager Press enter 3 Select Device manager from the list 4 You should see a Filmetrics Measurement Instrument tab Expand the tab and the appropriate driver should be listed for the Filmetrics instrument Accessing Device Manager in Windows XP 1 Click Start 2 Click on Control Panel 3 In the Control Panel double click the Systems icon 4 In the Systems Properties window click on the Hardware tab 5 In the Hardware tab click the Device Manager button 6 You should see a Filmetrics Measurement Instrument tab Expand the tab and the appropriate driver should be listed for the Filmetrics instrument Error Message during Baseline Follow the steps below to troubleshoot error messages e
24. to display in percent or as a decimal value 100 1 amp o z f G 2 cc Y Show Gridlines Wavelength nm 380 1050 V Y axis as percent Graph Options can be accessed and edited by double clicking on the main graph window 8 Controls and settings for the camera are available here History Tab FILMETRICS brr ntn chrhonfben Single Measurement 85 Measurement Trend S02 501 2 nm Goodnass of ft 0 9997 Date Time Elapsed Time s UserID 800nm TEOS on Si 1 9 2013 9 42 26 AM I 500mm TEOS on Si 1 9 2013 9 42 28 AM 500nm TEOS on Si 1 9 2013 9 4229 AM S00nm TEOS on Si_ 1 9 2013 9 42 30 AM 500nm TEOS on Si 19201394231 AM S00nm TEOS on Si 1 3 2013 94233 AM 500nm TEOS on Si 1 9 2013 AEI AM 500nm TEOS on Si 1 9 2013 44235 AM 500nm TEOS on Si 1 9 2013 942 36 AM 500nm TEOS on Si 1 9 2013 9 4237 AM S00nm TEOS on Si 1 9 2013 94239 AM 500nm TEOS on Si 1 9 2013 94240 AM S00nm TEOS on Si 1 9 2013 94241 AM S00nm TEOS on Si 1 9 2013 94242 AM s00nm TEOS on Si 1 9 2013 9 42 43 AM 500nm TEOS on Si 1 9 2013 94244 AM 500nm TEOS on Si 1 9 2013 9 42 46 AM 500em TEOS on Si 1 9 2013 94247 AM 500nm TEOS on Si 1 9 2013 94248 AM 500nm TEOS on Si 1 9 2013 94249 AM 500nm TEOS on Si 1 9 2013 94250 AM nm TEOS on Si 1 9 2013 94252 AM 500nm TEOS on Si 1 9 2013 942 53 AM Retlectamce s a La a e s m n_ 7 2_ n 5 7 x
25. A then the Grid method or the Fourier Transform method of determining approximate thickness may be applied See Editing Film Structures for more details Measuring photosensitive films For layers such as unexposed photoresist that cannot be exposed to short wavelength light a filter may be inserted in the slot on the light source Note this filter may only be inserted on systems using the SS Microscope VISNIR 1 SS Microscope UV 1 or SS Microscope UVNIR 1 Troubleshooting For error messages or hardware problems encountered with your Filmetrics instrument please use the chart below to best diagnose your problem For help with modeling see Troubleshooting Thickness Modeling Question 1 Are you able to start FiL Measure without an error message No Continue to Question 2 Yes Continue to Question 1 1 Question 1 1 What sort of problem are you seeing 1 The lamp doesn t turn on or the fan isn t working properly See the Non Operating Box Lamp or Fan Troubleshooting Guide 2 get an error message when click on something Continue to Question 1 1 2 3 Measurement results are wrong or unstable after they had been good See the Measurement Results are Incorrect or Unstable Troubleshooting Guide 4 Measurement and or baseline takes longer than it used to See the Slow Operation Troubleshooting Guide Question 1 1 2 If you re still seeing an error after you ve power cycled and installed new software then select the de
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27. FFT mode The FFT mode tends to be more robust when measuring very thick films or thick multi layer stacks where the total thickness is greater than 5 microns To activate FFT mode select the select FFT thickness only button located on the Analysis Options gt Analysis Method tab in the Edit Recipe box A FilMeasure File Edit Setup Acquire Help z4u3 8 Measure History mind Measurement Status Measure Baseline Analyze Reflectance Hardcoat on Primer J Edit Recipe jeasureme 400 500 600 700 Wavelength nm I p HC on Primer Layer 2 2 180 um Total Thickness 6 946 um 0 6 HC on Primer Calculated Goodness of fit 0 8243 FFT Intensity Measurement 595 6 rs 8 9 10 5 Layer Thickness m The Measure Tab shows a split screen with the measured spectrum on the top graph and the FFT spectrum on the bottom graph In FFT mode instead of matching the measured reflectance spectrum with a calculated reflectance spectrum FlLMeasure identifies the peaks in the FFT Spectrum and uses them to compute the layer thicknesses The number of possible FFT peaks is n n 1 2 where n is the number of layers Thus for a two layer structure we expect to see three peaks in the FFT spectrum The image above shows the screen just after measurement of a two layer stack using FFT mode The upper graph shows a blue curve repr
28. In most cases they will not overlap but will be separated in amplitude E Fil Measure oles File Edit Setup Acquire Help Sa3 8a Measure History FILMETRICS THEE LULL ELLE EEE VISAR Standard Calculate 16 rs Pod Measure ul AH Baseline Analyze j Er Af ae VIS AR Thickness Standard E21 EA 12 l ZL Edit Recipe al Ya Me t Results f SiO im YA TiO2 AR2 103 8 nm m 10 t SiO2 30 73 n F TiO2 AR2 19 16 nm Goodness of fit 0 9936 a F 8 3 3 3 2 x 700 Wavelength nm Measured and calculated reflectance spectra when measuring the thickness of the VIS AR Reflectance Standard If the calculated red and measured blue minima and maxima do not coincide then the measurement was not successful There are several possible causes of an unsuccessful measurement The most common for this type of measurement are described in Cases 1 and 2 in the Troubleshooting section Example 3 Measuring Films on Transparent Substrates In this example we will demonstrate the measurement of a hardcoat on acrylic using the TS Hardcoat Trans thickness standard This type of measurement applies to a broad range of applications including packaging films and coatings on glass or polymeric substrates Step 1 Select the film recipe Select the film structure to be measured in this case HC Standard on Acrylic Trans from the Recipe li
29. Material Library Material Library The material library is used to display information about existing materials as well as create new ones Material files shipped with FILMeasure have the file extension fibnk and will only display limited information User created material files can be plotted on a graph or viewed in table form fe ne ee File Information Material Type Dielectric Photoresist Semiconductor 5 Metal Other Wavelength nm n k Model 435 8 1 4667 0 0000 Default Custom 632 8 1 4570 0 0000 Anew material may be entered into the material library manually if refractive index n and extinction coefficient k are known as a function of wavelength for the new material To create a new material file a Select Edit gt Material Library menu item The Edit Material dialog box will appear b Click New to create a new material c Select the type of material you are ready to create Dielectric Photoresist Semiconductor Metal or Other d Optimize the functionality of the file by entering index values over the entire wavelength spectrum of the system The wavelength unit is nanometers Enter index information every 20 to 50 nm depending on the complexity of the data In areas where n or k is quickly changing more densely spaced the points should be entered e Alternatively select the Model gt Custom radio button and clic
30. Measure gt Uninstall Step 6 Run the software installer and follow installer instructions Note you willneed administrative privileges to installthe software Step 7 Reconnect your Filmetrics system Note for Windows XP The New Hardware Found wizard may appear if your instrument has a USB connection You must click Next and complete the driver installation process This dialog box may appear multiple times depending on the system configuration Note for Windows 7 8 Vista An Information balloon may appear over the taskbar while drivers are being installed Please wait until the balloon indicates the drivers have been installed before starting FiLMeasure Step 8 Run the software to verify the installation was successful Non Operating Box Lamp Or Fan Follow the steps below to troubleshoot symptoms of a non operating spectrometer light source or fan These are usually caused by having too much or not enough light Further assistance may be received by contacting us using the methods described in the Contact Information section Step 1 Does the green LED on the right side of the front panel illuminate Yes Jump to Step 3 No Go to Step 2 Step 2 Is the power cord fully inserted into the back of the unit and a powered wall outlet If your unit has a rear power switch is it on Yes Go to Step 3 No Plug into a powered outlet or switch on the unit Step 3 Does the LED light on the light source switch illuminate when switche
31. Operations Manual for the FILMETRICS F40 Thin Film Analyzer Revision 7 4 0 0 Copyright 2013 by Filmetrics Inc All Rights Reserved Welcome What is the F40 used for The Filmetrics F40 is used to measure the thickness and optical constants n and k of transparent thin films The F40 attaches to a microscope s c mount fitting to provide a square measurement spot size as small as 1 micron Measured films must be optically smooth and within the thickness range set by the system configuration requirements specified in Performance Specifications Commonly measured films include semiconductor process films such as oxides nitrides resists and polysilicon optical coatings such as hardness and anti reflection coatings flat panel display films such as polyimides resist and cell gaps and the various coatings used in CD and DVD manufacture Films that cannot be measured include very rough films and opaque films Warning Accurate measurements require suitable recipe settings and a valid baseline Improper system setup or an aged lamp may also lead to errors It is the user s responsibility to ensure that this instrument is being used properly for its intended purpose Please contact Filmetrics for assistance with any questions Safety Maintenance and Care This symbol indicates information or instructions that must be read and carefully followed to prevent hazards injury to the operator or damage to the instrument This s
32. Replacement NOTE These instructions apply to VIS NIR and EXR systems only Please see the seperate users manual for the Deuterium amp Tungsten A A Warning Hazardous voltages are present within the unit Never attempt any maintenance without disconnecting the power cord Halogen light source on UV and UVX systems Step by step 1 Exit FILMeasure program and turn off your computer 2 Disconnect power cable from the back of the unit 3 Disconnect fiber optic cables from the front of the unit 4 Remove the two captive screws on the back panel opening the two halves of the enclosure Warning Caution avoid touching any interior components other than the lamp lamp base and housing 5 Pull the plunger behind the lamp all the way out 6 Slide the lamp out of it holder being careful not to touch the glass 7 Unplug the old bulb from the lamp power connector 8 Plug new lamp into the lamp power connector Do not test lamp with lid removed 9 Slide the new lamp into the holder being careful not to touch the glass 10 Gently release the plunger holding the bulb in it s proper place Do not test the bulb with the cover removed 11 Replace the cover and tighten the screws Software Automation Measurements can be automated and additional data analysis can be performed by user supplied software The mechanism by which this occurs is either by using the FlRemote class which is part of FlLMeasure ex
33. anced Analysis Options for FFT Analysis FFT Analysis Window When the FFT solver is selected the advanced options give you access to various settings to help optimize analysis performance When Optimize Position is selected the solver will check for the best possible GOF value in different areas across the spectrum in a wavelength range defined by the entered window size For example if a window size of 200 nm is selected the solver will look at six different 200 nm sections of the spectrum and then select the range the provides the best GOF If Optimize Size is selected the solver will instead begin with a minimum window size as defined by the user It will then start at the center of the analysis range and then extend equally in both directions six times to find the best GOF When Optimize Position and Size is selected the software does both functions resulting in measuring thirty one different combinations of location and analysis range Alarms eee u Ve Sh uda al Recipe Name SiO2 on Si E Author Last Modified 2 26 2013 2 13 10 PM Film Stack Analysis Options Alarms Acquisition Settings Minimum Valid GOF 9 v Activate alarms Thickness Limits A Layer Nominal Min Medium 1 sooo Substrate Minimum Valid GOF Constraining the Minimum Valid GOF will exclude measurements where the calculated GOF does not reach the specified limit A warn
34. and it and agree to be bound by its terms and conditions You further agree that it is the complete and exclusive statement of the agreement between us which supersedes any proposal or prior agreement oral or written and any other communications between us in relation to the subject matter of this Agreement This Agreement shall be modified only by a written instrument signed by a duly authorized representative of Licensor or from time to time Licensor may modify or change the terms and conditions of this Agreement and supersede the terms of any prior version of this Agreement in connection with any supplemental different or new terms that might apply to an update or upgrade ofthe Software made available by Licensor in Licensor s sole discretion Your continued use ofthe Software after you download and accept the new additional or changed terms applicable to such update or upgrade will indicate your agreement to the change to this Agreement You may not sell assign transfer delegate convey pledge encumber or otherwise dispose of by operation of law or otherwise the Software Licensed Revisions or this Agreement or any rights or obligations hereunder Licensor may assign this Agreement and any or all of its rights and duties under this Agreement without prior notice to you or your consent You hereby warrant and represent that you have obtained all authorization and other applicable consents required empowering you to enter into this Agreemen
35. arameter is called the result is the same as calling the version with this parameter and setting its value to True Thus the only reason to call the second variant of the function is if the spectrum is being saved as a text format either txt or csv and the value of this parameter is set to False Return to Index SaveSpectrumToBuffer Public Sub SaveSpectrumToBuffer As Byte Remarks This function allows the caller to rapidly retrieve the complete set of data contained ina spectrum thereby avoiding the time that would be consumed if the spectrum were saved to a file This may be useful in cases where the caller wishes to rapidly acquire a number of spectra and store them up for later saving to file or analysis The contents of the buffer should be considered opaque Any changes to the data in the buffer may render the data unusable and or may not be compatible with future versions of FiLMeasure Return to Index SetAnalysisWavelengthRange Public Sub SetRecipeSetAnalysisWavelengthRange ByVal measChannelGuidmeasChannelOrSystemGuid AsGuid ByVal startWavelength_ nm As Single ByVal endWavelength_nm As Single Public Sub SetAnalysisWavelengthRange ByVal startWavelength_nm As Single ByVal endWavelength_nm As Single measChannelOrSystemGuid The GUID of the measurement channel or system If multiple measurement channels exist the measChannelOrSystemGuid must be specified since each measurement channel has i
36. are name should be returned Remarks The hardware name is composed of a system name string and a serial number string separated by acolon Example F20 09A006 Return to Index MeasChannelHWSerialNumber Public ReadOnly Property MeasChannelHWSerialNumber ByVal measChannelGuid As Guid As String Public ReadOnly Property MeasChannelHWSerialNumber ByVal measChannelGuid As Guid ByVal spectrometerIndex As Integer As String Public ReadOnly Property MeasChannelHWSerialNumber ByVal measChannelGuid As Guid ByVal subsystemIndex As Integer ByVal spectrometerIndex As Integer As String measChannelGuid The GUID of the measurement channel spectrometerlndex The spectrometer index to specify which of multiple spectrometers in the channel subsystemIndex The subsystem index to select among multiple subsystems in the channel Remarks Returns the controller hardware serial number of the specified spectrometer If the spectrometer or subsystem are not specified the default index 0 will be used If there are multiple subsystems a hyphen followed by the subsystem ID is appended to the hardware serial number Example for single subsystem 09A006 Example for multiple subsystem 09A007 1 Return to Index MeasChannelName Public ReadOnly Property MeasChannelName ByVal measChannelGuid As Guid As String measChannelGuid The GUID of the measurement channel for whi
37. array containing spectrum Data in this array must have been created by SaveSpectrumToBuffer method measChannelGuid The GUID of the measurement channel for a spectrum which is to be opened If multiple measurement channels exist the measChannelGuid must be specified Remarks See remarks after SaveSpectrumToBuffer Return to Index Recipelnfo Public ReadOnly Property RecipeInfo As FIRecipelInfo Public ReadOnly Property RecipelInfo measChannelOrSystemGuid As Guid As FIRecipelnfo measChannelGuid The GUID of the measurement channel associated with a measurement recipe If multiple measurement channels exist the measChannelOrSystemGuid must be specified Remarks The FlRecipelnfo object contains an assortment of information abou tthe recipe including information about the film stack if appropriate Return to Index SaveSpectrum Public Sub SaveSpectrum ByVal ilenameAndPath As String Public Sub SaveSpectrum ByVal filenameAndPath As String ByVal ifTextFormatWriteYDataAsPercent As Boolean filenameAndPath The full path and filename including extension of the spectrum The file format is determined by the extension Valid file extensions are the same as the extensions listed in the Save Spectrum dialog windows accessed via the File gt Save Measured Spectrum menu item in FiLMeasure iffextFormatWriteYDataAsPercent If this version of SaveSpectrum without this p
38. at allows the user to select which columns are shown in the history tab This dialog box can also be accessed by right clicking anywhere in the spectrum list under the history tab Click on Restore Defaults to remove all selections E Vieas Layerid GOF Result Recipe Date Time Elapsed Time s User ID Sample ID 000 0 DARE Data Recording Automatically append results to file Data File _ Save once per spectrum _ Confirm before saving Continuous Measure Measurement History Inclusion Prompt user to select History inclusion mode Add all measurements to History C Contact Probe Template Mode The Data Recording tab allows for automatic saving of all spectra and results to a central file The user can also select between having the software provide a prompt for which data to include in the history file when using Acquire gt Continuous Measure or to include all measurements to history Acquire Menu Acquire Acquire One Spectrum Acquire Continuously Measure Once Ctri E Measure Continuously Ctrl M Batch Acquire gt Acquire One Spectrum This function collects a single spectrum and displays it on the screen No analysis is performed until the recipe is changed or the Analyze button is clicked Acquire gt Acquire Continuously This feature collects real time data from the spectrometer It is useful when searching for a specific location to measure fo
39. c ReadOnly Property MeasSystemName ByVal systemGuid As Guid As String systemGuid The GUID of a measurement system Remarks The default system name is the empty string Return to Index NumberOfSystems Public ReadOnly Property NumberOfSystems As Integer Remarks Number of measurement systems that exist Return to Index SetRecipeModeToSpectrumAnalysis Public Sub SetRecipeModeToSpectrumAnalysis Public Sub SetRecipeModeToSpectrumAnalysis ByVal measChannelOrSystemGuid As Guid Public Sub SetRecipeModeToThickness Public Sub SetRecipeModeToThickness ByVal measChannelOrSystemGuid As Guid measChannelOrSystemGuid The GUID of one of the measurement channels in a muliple channel system or the GUID of the system If multiple measurement channels exist the measChannelGuid must be specified Remarks If Spectrum Analysis recipes are supported by the hardware or add on licenses then the Measure tab in the user interface will display a tab control that allows the user to switch modes The tab associated with the Spectrum Analysis recipe mode is labeled AR or Spectrum The other tab is labeled HC or Thickness or Thickness n k r Calling SetRecipeModeToSpectrumAnalysis or SetRecipeModeToThickness is the same as clicking on the Spectrum or Thickness tab in the user interface SetRecipeSpectrumAnalysis Public Sub SetRecipeSpectrumAnalysis ByVal rec
40. cel using the Trust Center The exact procedure varies depending on which version of Excel you are using To see the example source code click the Developer tab on the ribbon Then click Visual Basic and double click the ThisWorkbook object Reference for FiRemote Class Methods Properties and Events Public Sub AcquireSpectrum ByRef spectrumWavelengths As Single ByRef spectrumData As Single arguments Same as FlRemote Class Remarks See remarks for AcquireSpectrum in FlRemote Class Public Sub Measure ByVal formatSummaryAsRtf As Boolean ByRef measLayerThickness As Single ByRef measGOF As Single ByRef summary As String formatSummaryAsRtf The measurement summary can be formatted as either plain text or as rtf Formatting the summary as rtf is advantageous if it will be displayed to the user because then the full set of information including bold font and colors will be included measLayerThickness Array containing thickness of all layers Thickness of Layer 1 is in index 1 in the array measGOF Measured Goodness Of Fit parameter Summary Same as text which appears in Results area in Measure tab Remarks See remarks for Measure in FIRemote Class Public Sub SetRecipe recipeName As String Arguments and Remarks See documentation for SetRecipe in FlRemote Class FiRemote Class FlRemote is exposed as a public assembly and is accessible using the Microsoft NET progra
41. ch the channel name should be returned Remarks By default the channel name is the empty string Return to Index Measure Public Function Measure ByVal formatSummaryAsRtf As Booleanl As FIMeasResults Public Function Measure ByVal formatSummaryAsRtf As Booleanl ByVal addToHistory As Booleanl As FIMeasResults Public Function Measure ByVal measChannelGuid As Guid ByVal formatSummaryAsRtf As Booleanl As FIMeasResults Public Function Measure ByVal measChannelGuid As Guid ByVal formatSummaryAsRtf As Booleanl ByVal addToHistory As Booleanl As FIMeasResults measChannelGuid The GUID of the measurement channel for which a spectrum should be acquired and analyzed If multiple measurement channels exist the measChannelGuid must be specified formatSummaryAsRtf The measurement summary returned by the ResultsSummary property of the FiMeasResults object can be formatted as either plain text or as rtf Formatting the summary as rtf is advantageous if it will be displayed to the user because then the full set of information including bold font and colors will be included addToHistory Normally each analysis result is added to the collection of results displayed in the History area of FiLMeasure In some cases it may be advantageous to suppress the addition of a result to the History area One example
42. ck Use one of the Spectrum Matching solver methods Robust Exact to analyze very thin films 2 If the film is very rough non uniform in thickness over the measurement area or has a graded interface it may not support coherent optical interference and thus it may not be able to be measured Try moving to a different measurement spot for a better signal 3 An improper baseline measurement was taken for example a thickness standard is presented as a reflectance standard Re baseline the system while taking care to select the proper reflectance standard and reference file Case 2 The measured reflectance spectrum has periodic oscillations across the entire screen but its minima and maxima do not match up with the calculated reflectance The most common cause is that the initial thickness guess was considerably different than the actual film thickness and due to the constraints on possible thicknesses FlLMeasure was unable to find the correct answer To better understand this it helps to know that the number of oscillations on the screen is proportional to the film thickness For example if the measured spectrum has roughly twice the number of the oscillations that the calculated spectrum has then the measured film is roughly twice the thickness of the calculated thickness Using this information the initial thickness guess and the thickness constraints can be set more appropriately in the Edit Recipe dialog box Another possible cause i
43. cover an old baseline spectrum Note that there are many situations where an exception may be generated by calling this method See the example program for details Return to Index BaselineAcquireBackgroundAfterRef Public Sub BaselineAcquireBackgroundAfterRef Public Sub BaselineAcquireBackgroundAfterRef ByVal measChannelOrSystemGuid As Guid measChannelOrSystemGuid The GUID of the measurement channel for which a background should be acquired If multiple measurement channels exist the measChannelGuid must be specified Remarks This method provides a means to automate what is most commonly called step 3 of the Baseline procedure step 4 for F10 RT Reflection Only or Reflection and Transmittance step 2 for F10RT Transmittance Only As the name of this method implies you must have previously acquired a reference spectrum Return to Index BaselineAcquireReference Public Sub BaselineAcquireReference Public Sub BaselineAcquireReference ByVal measChannelOrSystemGuid As Guid measChannelOrSystemGuid The GUID of the measurement channel for which a reference should be acquired If multiple measurement channels exist the measChannelGuid must be specified Remarks This method provides a means to automate what is most commonly called step 2 of the Baseline procedure Calling BaselineAcquireReference may generate an exception There are a number of ru
44. cs Filmetrics Device By downloading installing copying or otherwise using the Software you expressly agree to be bound by all of the terms of this Agreement This Agreement is displayed for you to read prior to using the Software If you choose not to accept or do not agree with all of the provisions of this Agreement do not download install or use the Software but instead delete it and if applicable request from the authorized Filmetrics distributor from whom you purchased the Software a full refund of any fees you paid for the Software LICENSE This license agreement license permits you to use one copy of the Software on any single computer The Software is owned by Filmetrics and is protected by United States copyright law and international treaty provisions Therefore this software should be treated as any other copyrighted material except that you may either 1 make one copy of the Software for archival backup purposes or 2 copy the Software to a single hard disk in all cases solely for use with a Filmetrics Device If the Software is used on a networked computer system where more than one computer can access the Software provisions must be made to insure that the number of concurrently executing copies of the Software cannot exceed the number of licenses You may transfer the Software and all rights under this Agreement to another party together with a copy of this Agreement if the other party agrees to accept
45. d ByRef authenticationIsPossible As Boolean As Boolean Public Function BaselineExistsAndIsAuthenticated measChannelOrSystemGuid As Guid ByRef authenticationIsPossible As Boolean As Boolean authenticationlsPossible If baseline is not authenticated it is possible to authenticate it when authenticationIsPossible True Remarks In some cases it is desirable to check whether the baseline is already authenticated and ifnot whether it is possible to authenticate it The client software has the option of automatically authenticating the baseline ifthat is desirable Return to Index GeneralPurposelOlsSupported Public ReadOnly Property GeneralPurposelOIsSupported As Boolean Remarks Primary purpose of this property is to permit the example program to hide or show the General Purpose IO controls This property will be True for equipment that has the General Purpose IO hardware Return to Index GeneralPurposelOReadValue Public Function GeneralPurposelOReadValue As Byte Remarks Returns a single byte containing the current values of the general purpose IO logic input signals Bit value of 1 means that the input voltage is in the logic high state These input signals are only available on certain types of equipment Return to Index GeneralPurposelOSetValue Public Sub GeneralPurposelOSetValue newValue As Byte newValue New va
46. d on Yes go to Step 4 No Possible faulty switch or faulty indicator lamp contact Filmetrics Step 4 Is the cooling fan spinning Determine this by listening to the cooling fan which is located directly below the light source You ll need to get close to hear the fans on systems built after 2010 For F50 systems the chassis cooling fan is louder than the light source cooling fan You ll need to get close to the light source to hear the light source cooling fan Yes Go to Step 5 No The cooling fan needs replacement contact Filmetrics Note a bad cooling fan can draw enough power to prevent the light source and box from operating properly Step 5 Does the light source illuminate Yes Go to Step 6 No The lamp has burned out Please replace the lamp following the instructions here A spare lamp is included with most systems and additional lamps may be purchased on our website www filmetrics comNote users can confirm a halogen bad lamp by removing it and checking it for electrical continuity Step 6 The following steps are to troubleshoot a box that is not being detected by the FlLMetrics software This could be a software driver or rarely a hardware problem To see what hardware your computer is detecting look in the windows device manager instructions on howto access the Device Manager are included at the end of this document In the Device Manager which device do you see Filmetrics Measurement Instrument or similar In
47. d to warm up for at least 5 minutes if measuring thickness of films greater than 250nm or 15 minutes if measuring thickness of films less than 250nm refractive index or reflectance In addition the following assumptions are made if optical constants and or very thin films lt 500 A are to be measured 4 If any grading is present i e the refractive index and extinction coefficient are constant as a function of depth and constant over the entire spot being measured it has been accounted for in the recipe 5 The sample is flat The vacuum port may help in this case when samples are warped 6 No changes to the measurement system such as fibers being moved or light source have occurred since the acquisition of the most recent baseline 7 No significant changes in room temperature gt 5 degrees F have occurred since acquisition of the most recent baseline If any of the above assumptions are not true it may still be possible to make a measurement but accuracy may be degraded Hints for Improved Accuracy This section contains various tips to help improve accuracy in your measurements Roughness Restricting the wavelength range of the analyzed reflection spectra Measuring thickness when the approximate thickness is not well known Measuring photosensitive films Roughness Slight amounts of surface or interface roughness that may be present can decrease the GOF value of a measurement Entering a value or solvin
48. dard provided with the system This type of measurement applies to an extremely broad range of applications including hardcoats dielectrics and LCD cell gaps to name just a few Step 1 Select the Film Recipe Select the film structure to be measured in this case SiO2 on Si from the Recipe drop down list on the main screen If the structure to be measured does not exist a new structure must be defined See Editing Film Recipes for more details Step 2 Edit the Film Recipe To edit the film stack click the Edit Recipe button to open the dialog box Check to see that the film stack matches that of the actual sample If not different films can be selected using either the drop down menu next to the material or the Search function This is also where you can enter a starting guess for thickness as well as the desired constraint range SAlOA la Author Recipe Name SiO2 on Si Last Modified 3 21 2013 12 02 43 PM Film Stack Analysis Options Alarms Acquisition Settings Units Angstroms A Composition Thickness E H t Layer Nominal A Range Meas Refine via x Medium Air amp X 1 so g 10000 100 X Substrate Si 7 Example Edit Recipe gt Film Stack window For this example we ll use 10000 angstroms asthe Nominal thickness with a constraint range of 100 Make sure that the SiO2 layer thickness is
49. de File Edit Setup Acquire Help Eurem Measure History Sas FILMETRICS on Dont SiO2 on Si Calculated Sample io Sample ID Still Image Zoom g Center Settings Operator ID Measurement Status 10070 Objective 10X x Measure Baseline Analyze SiO2 on Si e Edit Recipe Measurement Results SiO2 10070 A Goodness of fit 0 9898 Reflectance 800 700 Wavelength nm Measurement 207 Measured and calculated reflectance spectra when measuring the thickness of SiO2 on silicon If the calculated red and measured blue minima and maxima do not coincide then the measurement was not successful There are several possible causes of an unsuccessful measurement The most common for this type of measurement are described in Cases 1 2 and 3 in the Troubleshooting section Example 2 Measuring Multi Layer Films This example demonstrates the measurement of multi layer films using the VIS AR reflectance standard This type of measurement has a broad range of other applications most commonly optical coatings SOI wafers and flat panel display process films Step 1 Select the Film Recipe Select the film structure to be measured in this case VIS AR Thickness Standard from the Recipe list box on the main screen If the structure to be measured does not exist a new
50. e gt Film Stack tab with the Nonuniformity option expanded Selecting this option enables modeling of thickness nonuniformity within the measurement spot An initial guess for Nonuniformity must first be made and then solving can be enabled or disabled by toggling the Meas box If solving is not enabled the software will assume the value provided for nonuniformity Note Solving for nonuniformity can greatly increase solving time Search Search by material name Material File Si Search by Keyword Description si Silicon is the second most common element on Earth It forms the basis of nearly allnon opticalsemiconductor devices Optically silicon is mostinteresting as a detector or reflector where its refractive index and extinction coefficient are of primary importance The refractive indices tabulated below apply whether the _ 111 or 100 crystal plane is exposed to the sample surface Dopant levels also have a very small effect on the index of refraction in the wavelength ranges considered here 200 to 2500nm Silicon forms a nearly ideal surface layer of SiO2 when exposed to oxidizing environments The native oxide layer that forms in typical ambients must often be taken into account when Matching Materials Synonyms Silicon Keywords Semiconductor Similar Materials The Search Materials dialog box is accessible by left clicking on a material name in the Edit Recipe gt Film Stack
51. e or by using the FiRemoteCOM dil Accessing the FlRemote class directly using a NET programming language such as Visual Basic NET or C offers the most flexibility but requires the user be familiar with the Microsoft NET software development environment Alternatively the FIRemoteCOM dll can be referenced from Microsoft Office programs and simple software procedures can be implemented there instead The FIRemoteCOM dll includes fewer methods Methods Property and Events New AcquireSpectrum ActivateChannelDisplayTab AnalyzeSpectrum AuthenticateRef Bac BaselineAcquireBackgroundAfterRef BaselineAcquireReference BaselineAcquireReferenceT BaselineAcquireReferenceUsingOldSampleReflectance BaselineAcquireSpectrumFromSample BaselineCommit BaselineSetRefMat BaselineShowDialog GUIVisible HistoryDeleteAllResults MeasChannelGuid MeasChannelGuids MeasChannelHWName MeasChannelHWSerialNumber MeasChannelName Measure NumberOfChannels NumberOfSpectrometers NumberOfSubSystems OpticsConfiguration OpenSpectrum OpenSpectrumFromBuffer Recipelnfo SaveSpectrum SaveSpectrumToBuffer SetAnalysisWavelengthRange SetMaterial SetN SetRecipe SetRoughness SetThickness SpectrometerDiagnostics Less Commonly Used Methods The following methods are only rarely used Methods which refer to a System are used with the F32 and F37 thin film monitoring systems Many methods accept either a measSystem or a measChannel guid However
52. e ordnungsgem ss vermessene Stromsversorgung an Verwende nur ein dreiadriges Kabel wie es auch mit dem Ger t ausgeliefert wird Montare solo con misura normata Adoperando solo 3 cavi elettrici cosicome e fornita la Macchina Software Overview The way that light reflects off a thin film is determined by the characteristics of the film such as its thickness optical constants and roughness The F40 is able to determine thin film characteristics by first carefully measuring the amount of light reflected from the thin film over a range of wavelengths i e by measuring the reflectance spectrum and then analyzing this data by comparing it to a series of calculated reflectance spectra Most of the features of the FlLMeasure software that runs the F40 can be divided into reflectance acquisition and reflectance analysis functions The following pages outline the main features of the FlLMeasure software The basic steps for any F40 measurement are selecting and editing the film structure taking a baseline measurement and then making and evaluating the measurement The details of each of these steps are explained below followed by descriptions of other FliL Measure functions Measure Tab So FILMETRICS 348 8 nm 1 Standard Windows menus including File Edit Setup Acquire and Help 2 These tabs are used to select between the Measure and History windows 3 Displays the thickness of the film being solved for as wel
53. e user to name the objective and to enter a nominal numerical aperture NA in the Nominal NA box The NA of the objective can be found printed on the microscope objective Once entered selecting Calibrate will guide the user through the calibration process From here the user should follow the on screen instructions If the user prefers to not go through the calibration routine the user can also enter the nominal NAin the Nominal NA box select Use Nominal NA and press OK Choosing this method however will yield thickness values with a greater percent error than calibrating the objective through software Objective Details Name 10X Use nominal NA Nominal NA 0 25 Immersion lens Medium index 1 Calibrate Cancel The Objective Details dialog box Taking a Baseline The baseline measurement allows the FlLMeasure software to take into account the response inherent to the reflectance measurement hardware It does this by first measuring the sample reflectance then a reflectance standard and finally by taking a dark reading The light source should be allowed to stabilize at least five minutes before the baseline is taken When measuring films less than 1000 A thick the baseline should be periodically re taken every 20 30 minutes For thicker films a new baseline can be taken less often Baseline measurements may be started two ways 1 Select the Baseline button which will guide the user through t
54. e using the method An exception will be thrown if the layer number or roughness are out of bounds Return to Index SpectrometerDiagnostics Public ReadOnly Property SpectrometerDiagnostics AsFISpecDiagnosticsInfo Public ReadOnly Property SpectrometerDiagnostics ByVal measChannelGuid AsGuid As FISpecDiagnosticsInfo Public ReadOnly Property SpectrometerDiagnostics ByVal measChannelGuid As Guid ByVal subsystemIndex As Integer As FISpecDiagnosticsInfo measChannelGuid The GUID of the measurement channel subsystemIndex The subsystem index to select among multiple subsystems in the channel Remarks Returns an array of objects containing information about the spectrometers Information includes integration time peak raw signal intensities of reference and background spectra etc Return to Index ActivateMonitorDisplayTab Public Sub ActivateMonitorDisplayTab Public Sub ActivateMonitorDisplayTab ByVal measSystemGuid As Guid measSystemGuid The GUID of the measurement System If multiple measurement channels exist the measChannelGuid must be specified since each measurement channel has its own active recipe Remarks This function is provided to permit synchronization of the FlLMeasure user interface with the user interface of a client program Return to Index BaselineExistsAndlsAuthenticated Public Function BaselineExistsAndIsAuthenticate
55. e values Number of Spectra This sets the maximum number of spectra displayed simultaneously on the main FlLMeasure screen If the maximum number of spectra is reduced to fewer than the number already on the screen the most recently selected spectra will remain Spectra Transformation On spectra where reflectance and transmittance information is present you can have the software display them as separate spectra none added together sum or the absorptance 1 R T Graph Options The background of the graph can be set to white or black using this option as well as allowing the software to auto position the legend box to avoid or minimize overlap with the displayed spectra Measurement Results Significant Digits The user can select the number of significant figures from 1to 7 that the results are displayed in For example with the units set to Angstroms if a result of 7213 A will be displayed for 4 significant digits it will be displayed as 7210 A for 3 significant digits Displayed Controls These checkboxes are used to determine which controls are listed on the right hand side of the FlLMeasure window Access Control The software for the instrument incorporates password protection to limit access to the measurement software and settings When the software is initially installed the access control is turned off The software will automatically boot up with Engineer level access that enables access to all features ofthe program except tu
56. easure gt Continuous Measure command from the Acquire Menu By default this is set to 0 Understand and Evaluating Measurement Results This section covers information on the Display of Measured Spectra and a more in depth look atthe Goodness Of Fit value Display of Measured Data Once film stack and measurement information have been entered and a baseline has been taken measurements may be made by clicking on the Measure button After measurement the measured and calculated reflectance spectra are displayed on the graph The thicknesses of the films are listed in the results box If any of the thickness values were measured they are displayed in bold numbers The quality and accuracy of the result is determined by how well the measured spectrum matches with the calculated spectrum In general thickness information is determined by the number of oscillations and index information is determined by the amplitude of the oscillations In the case of the Robust adaptive thickness only solver and Exact Spectrum Matching solver a good result is one where the minima and maxima of the measured and calculated spectrum align For the FFT thickness only solver this is when the measured intensity peaks overlap See the Goodness of Fit and Troubleshooting Thickness Modeling sections for more information Goodness of Fit The accuracy of a calculation fit and thus the reliability of the measurement can be judged by the match between the meas
57. econd or two but in some circumstances the solving time can be increased 5 10x for each additional parameter Solving for nonuniformity or adding it to increase accuracy of other parameters can be especially time consuming Step 10 If you are solving for more than one thick layer i e gt 10 um you can speed up the solving process by reducing the thickness constraint range which can be safely reduced even more by using an accurate nominal thickness guess or by switching from using the Grid solver to the FFT solver in the recipe If you are still experiencing problems with a slow measurement after the proceeding steps please contact us using the methods described in the Contact Information section Error Messages Miscellaneous Troubleshooting Guide This guide provides extended information on error messages a user may encounter on rare occasion while using our software Further assistance may be received by contacting us using the methods described in the Contact Information section Error during spectrum analysis unable to analyze spectrum This error is generally caused by a problem with the recipe constraints Try adjusting the solver wavelength range thickness constraint range or starting thickness value Also make certain that the starting thickness values have been entered using the correct units of measure specified for the recipe Spectrum saturated This error indicates that the sample measured is more reflective than the s
58. ectly or indirectly into any country prohibited by the Act and the regulations thereunder or will be used for any purpose prohibited by the same DISCLAIMER OF WARRANTIES EXCEPT TO THE EXTENT OF ANY LIMITED WARRANTY PROVIDED BY THE SELLER THE SOFTWARE IS FURNISHED AS IS AND TO THE MAXIMUM EXTENT PERMITTED BY APPLICABLE LAW LICENSOR MAKES NO WARRANTY EXPRESS IMPLIED OR STATUTORY INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE TITLE OR NON INFRINGEMENT OF ANY THIRD PARTY PATENTS COPYRIGHTS TRADE SECRETS OR OTHER INTELLECTUAL PROPERTY RIGHTS LICENSOR DOES NOT WARRANT THAT THE SOFTWARE IS FREE FROM BUGS VIRUSES ERRORS OR OTHER PROGRAM LIMITATIONS YOU AGREE TO USE YOUR INDEPENDENT JUDGMENT IN DEVELOPING YOUR PRODUCTS YOU ACKNOWLEDGE AND AGREE THAT LICENSOR IS UNDER NO OBLIGATION TO INSTALL MAINTAIN OR SUPPORT THE SOFTWARE OR PROVIDE UPGRADES OR NEW RELEASES THEREOF SHOULD LICENSOR PROVIDE ANY ASSISTANCE LICENSOR MAKES NO WARRANTIES WITH RESPECT TO ANY SUCH ASSISTANCE YOU ASSUME THE ENTIRE RISK ARISING OUT OF THE USE OR PERFORMANCE OF THE SOFTWARE AND ANY SYSTEMS OR PRODUCTS YOU DESIGN USING THE SOFTWARE EXCLUSION OF DAMAGES TO THE MAXIMUM EXTENT PERMITTED BY LAW IN NO EVENT SHALL LICENSOR OR ITS EMPLOYEES OFFICERS DIRECTORS AGENTS AFFILIATES OR ANY APPLICABLE LICENSOR TOGETHER THE REPRESENTATIVES BE LIABLE FOR ANY SPECIAL INDIRECT INCIDENTAL PUNITIVE OR CONSEQUENTIAL DAMAGES IN
59. einstallation Guide Follow the steps below to reinstall FlLMeasure Further assistance may be received by contacting us using the methods described in the Contact Information section Warning Upgrading software versions may result in slightly different lt 1 measurement results due to continual improvement of our solving algorithms and material files Step 1 Shut down FilMeasure it s OK in the rare case that you can t Step 2 Unplug all electrical connectors from the back of your Filmetrics system Step 3 Are you installing this software on a computer which already has FlLMeasure installed Yes Go to Step 4 Yes Jump to Step 6 Step 4 Make a backup copy of your recipe and material files FiLMeasure versions 1 thru 4 Backup the directory C Program Files FILMeasure FiLMeasure versions 5 and up On Windows XP Backup the directory C Documents and Settings All Users Application Data Filmetrics Note The application Data folder may be hidden by default On Windows 7 8 Vista Backup the directory C Program Data Filmetrics Note The Program Data folder may be hidden by default Step 5 Uninstall the current version of software On windows XP Click Start gt Control Panel gt Add or Remove Programs gt FiLMeasure gt Uninstall On Windows 7 Vista Click the Start orb gt Control Panel gt Programs and Features gt FlLMeasure gt Uninstall On Windows 8 Control Panel gt More settings gt Programs and Features gt FlL
60. eled backside reflections Tilted sample Lost light Lock together layers with identical E Thickness Composition Correct setting of the following options will help ensure accurate measurements Many of the options are set automatically when film information is supplied in the Edit Recipe dialog box and all of them can be saved so that subsequent measurements can be made as quickly and easily as possible If Robust Adaptive Thickness Only or FFT Thickness Only is checked only the Data Selection settings will be accessible Data Selection Wavelength Range This sets the wavelength range that is to be analyzed It may be set as either the entire range displayed on the graph or a fixed range as defined by the user Wavelength range may also be changed by clicking and dragging the ends of the gray bar near the bottom of the graph area in the main FlLMeasure window Moving the bar will cause the software to reanalyze the data in the newly selected wavelength range Smoothing This function performs wavelength dependent boxcar averaging on the measured spectra This can improve signal to noise levels and can filter out oscillations that correspond to optical thicknesses defined as thickness refractive index equal or greater than the specified value This value should be lowered to increase smoothing and raised to decrease smoothing To eliminate smoothing a very high value for example 1000 um s
61. es that of the actual sample If not different films can be selected using either the drop down menu next to the material or the Search function This is also where you can enter a starting guess for thickness as well as the desired constraint range ogc ene m HE zu Author Recipe Name Si3N4 on Si ee p Last Modified 3 26 2013 8 57 15 AM Film Stack Analysis Options Alarms Acquisition Settings Units Nanometers nm v Composition Thickness NU H E mH Layer tn k Meas Grading Meas Nominal nm Range Meas Refine via X Medium Air x a 1 siana E 5 5a 0 E 300 25 W Noe X Substrate Si 7 ial on cone ao Example Edit Recipe gt Film Stack window for measuring the thickness n and k of films on an opaque substrate For this example we ll use 300 nanometers nm as the Nominal thickness with a constraint range of 25 None should be selected underneath the Refine via drop down list Make sure that the Si3N4 layer thickness is being solved for by clicking the checkbox under Meas We will also have to enable optical constants solving under the Composition options These options should be visible by default but if they are not they can be accessed by clicking on the underneath Composition in the Film Stack tab Left click on the Meas button to enable optical constants solving and set the constraints for both n and k at 5 We ll
62. esenting the reflectance spectrum of the sample The lower graph shows a blue and red FFT spectrum The blue FFT spectrum is computed from the measured reflectance The red FFT spectrum is computed from the theoretical reflectance spectrum of a layer stack with the measured layer thicknesses The small side lobes visible on either side of the two tall peaks are artifacts of the FFT process and can generally be ignored The only time the side lobes will cause a problem is if a weak peak from a multi layer sample is very close to a much stronger peak If this case occurs FlLMeasure may lock onto one of the side lobes by mistake and it may not be possible to measure the layer thickness associated with the weak peak Reducing the Constraint and or increasing the guess for the thickness for the layer with the weak peak may be helpful in getting FlLMeasure to lock onto the weak peak If the peak is too weak to reliably measure it is best to change the layer structure definition so that the layer corresponding to the weak peak is eliminated Along with the measured layer thicknesses the Results text box displays important information about the measurement This important information includes the Goodness Of Fit GOF and a description of which peaks were used to determine the measured layer thicknesses In the figure above layer 1 thickness is determined based on the position of the peak located at 4 780 microns and layer 2 thickness is determined using the peak co
63. figSystemTypes Get Set Public Property OpticsConfiguration ByVal measChannelGuid As Guid As OpticsConfigSystemTypes Get Set E measChannelGuid The GUID of the measurement channel for which the OpticsConfiguration is to be get set If multiple measurement channels exist the measChannelGuid must be specified Remarks If the OpticsConfigSystemTypes is not be compatible with the hardware an exception will be thrown Return to Index OpenSpectrum Public Sub OpenSpectrum ByVal filenameAndPath As String Public Sub OpenSpectrum ByVal lenameAndPath As String ByVal measChannelGuid As Guid H Ju filenameAndPath The full path and filename including extension of the spectrum If the file cannot be opened an exception will be thrown measChannelGuid The GUID of the measurement channel for a spectrum is to be opened If multiple measurement channels exist the measChannelGuid must be specified Remarks Unlike the behavior when a spectrum is opened in FiLMeasure the software will not automatically analyze the spectrum after opening it If analysis of the spectrum is desired then the Analyze function must be called Return to Index OpenSpectrumFromBuffer Public Sub OpenSpectrumFromBuffer ByVal theBuffer As Byte Public Sub OpenSpectrumFromBuffer ByVal theBuffer As Byte ByVal measChannelGuid As Guid theBuffer Byte
64. form the baseline procedure or re acquire the reflectance standard and background scans Spectrometer Type EXR and UVX systems have two spectrometers VIS UV and NIR Here the user can choose to use only one or both spectrometers Optics Configuration Optics Configuration p Standard Stage Contact Probe ta Reflectance Transmittance AutoBaseline a Microscope Objective Contact Stage Reflectance Transmittance A Microscope name AutoBaseline Show More Options The Optics Configuration dialog box is accessible through the Acquisition Settings tab under the Edit Recipe window It is important to make sure that you remember to select the proper configuration for your measurements in order to obtain the best possible results Not all options are available with all systems Advanced Acquisition Settings in Advanced Acquisition Settings v Store Baseline settings in Recipe Optics Configuration ReflectanceAndTransmittanceAutoRef Baseline Name Reflectance Standard Si Continuous Measure Settings Continuous Measure sampling interval 0 seconds Cancel Store Baseline settings in Recipe This option allows the user to save the selected Optics Configuration Baseline Name and Reflectance Standard used with each individual recipe Continuous Measure Settings This option allows the user to set an interval in seconds between measurements when using the M
65. g for roughness can partially account for this roughness so that a better GOF may be achieved Generally roughness is only present when the sample surface looks hazy at the measurement spot The fact that haze can be seen means that there is scattered light A perfectly smooth surface will scatter no light and thus the measured spot will not be visible Usually roughness less than 2 5 nm will not be visible while roughness greater than about 25 nm will be extremely hazy FiLMeasure assumes a Gaussian distribution of the surface height irregularities about the mean and it assumes that the roughness is small compared to the wavelength FlLMeasure reports the rms roughness value Restricting the wavelength range of the analyzed reflectance spectrum Occasionally spectra from measured films are adversely affected by factors such as absorbing dyes birefringence or nonuniformity all of which are difficult to model properly It is often still possible to make accurate thickness measurements of these films by analyzing only unaffected portions of the spectra The portion of the spectrum that is used to calculate film properties is determined by in the recipe underneath the Analysis Options tab You can also adjust the wavelength analysis range in the main FlLMeasure window using the gray bar at the bottom of the graph Click and drag either end of the bar to a new position on the x axis to adjust the analysis range B FllMeasure
66. g new n and k files New n and k files can be created by going to Edit gt Material Library Clicking the New button will allow the user to define a new material file Once clicked while the Default Model is selected the user can manually enter wavelength versus n or wavelength versus k values The user can also select Custom Model While this is selected clicking on the Model button allows the user to create n and k files using predefined mathematical models Once completed clicking Save As will save the new file as a custom material for later use Creating n and k files from a calculated spectrum Files for n and k can be created directly from a calculated spectrum where n and k are measured Once a spectrum is analyzed go to File gt Save Measured n and k This will save your n and k files as a custom material which can be loaded into the user recipe Editing n and k files Existing material files can be edited by going to Edit gt Material Library There the user can load a material file by clicking Open Values can then be changed manually Clicking Save will save over the original file for later use Use Save As to save the edited file under a new name Converting Microsoft Excel files into FiLMeasure n and k files For wavelength versus n or wavelength versus k data saved in Excel xls format the data can be directly saved as material files that can be read by FlLMeasure For nnn and kkk files For both n and k
67. he baseline procedure or 2 Select Set Up gt Standard Background from the menu bar for manual access to the baseline functions The following instructions assume the user has already focused the system and clicked the Baseline button For instructions on focusing on featureless surfaces see Focusing on a Perfectly Flat Surface The first step of the baseline measurement is to acquire a spectrum of the sample This is done by placing the sample on the stage underneath the light path This step is used by the software to help determine the needed integration times and cycles to best measure the sample The next step is to take a spectrum of a reflectance standard This done by placing a reflectance standard of similar reflectance to the test sample on the sample stage The reflectance standard that is used should be selected from the Reflectance Standard list For reflectance standards not in the list reflectance versus wavelength values may be entered into a comma delimited text file with the extension rrr stored in the material subfolder The method the background measurement is taken is dependent on the optical set up After acquiring a baseline the instrument is ready to begin making measurements To verify that the system is working properly select Acquire One Spectrum from the Acquire menu with the reflectance standard in place You should see the reflectance spectrum of the reflectance standard Fast Fourier Transform Mode
68. hin FlLMeasure Users can also view which licenses are currently active on their system and enable or disable them under the Licenses tab General Settings Data Recording General Settings General Settings Data Recording Licenses W Save Screen Include Menu Bar E Spectra on Graph Confirm before delete V Printing Active Curve only V History Confirm before delete E Prompt for Baseline reminder Baseline Reminder Interval 0 540 1 Hours Selected Camera Camera S N 2218496a v Reflectance Standard Signal Thresholds Warn ifless than 50 of highest recorded intensity Warn if greater than 150 ofprevious measurement Display disconnect OK reminder at shutdown Restore Default Settings The General Settings tab is used to enable disable and modify various options in the software Baseline Reminder allows the user to set an interval at which the system will alert them to re baseline the system It is set at one hour by default The Selected Camera pull down menu allows the user to enable the Sample Cam or choose between different cameras if there is more than one attached to the system The Reference Signal Thresholds options are used by the software during the Baseline process If during the Acquire Reference step of the Baseline the intensity of the reflectance standard goes above or below the percentages listed an error message will appear The Edit Columns button open a dialog box th
69. hould be entered Source Data If more than one data set is present this option tells the software whether to analyze the 0 degree reflectance data transmittance data 70 degree reflectance data or some combination of the three Note While every Filmetrics system is capable of opening and analyzing spectra with 70 degree reflectance data only the F10 RTA is capable of collecting this data Enable FFT Thickness Only The FFT thickness only solver is one of three analysis methods available in the FiL Measure software This solver best suited for films greater than 250 nm thick as well as multi layered films It is also an effective option when the index of refraction of the film isn t well known While this feature is selected there will be fewer options under the Analysis Options tab You cannot solve for index roughness or nonuniformity with the FFT thickness only solver enabled More information on the solver can be found here Enable Robust Adaptive Thickness Only The Robust adaptive thickness only solver is the second of three analysis methods available within FiLMeasure It is best suited for measuring the thickness of single layer films greater than 150 nm thick This method can oftentimes successfully measure films when the data is affected by non ideal properties such as thickness nonuniformity grading and birefringence Much like the FFT thickness only solver enabling Robust adaptive thickness only will li
70. iber at the far end near where the sample is placed The light can be seen by placing paper e g business card near the sample location do not look directly into the fiber if you are using a UV source If plenty of light is seen next check the return fiber by removing it from the spectrometer input and connecting it to the light source removing the other fiber first of course You should see light at the far end as before but it may be 3 4 times smaller and dimmer Did you see light at the sample end using both fibers in the light source Yes The fiber appears to be good Replace the fibers securely in their original positions there will be a white band on the light source fiber if the two ends are different and go to Step 4 No The fiber optic may be broken Replacements can be purchased on our website www filmetrics com Step 4 Does your system have multiple spectrometers i e EXR or UVX Yes Check the Acquisition Settings tab under Edit Recipe to make sure that your fiber optic configuration matches the enabled spectrometers Do this by making sure that each enabled spectrometer has a fiber attached to it or disable a spectrometer that is not being used No If you are still experience problems please contact us using the Contact Information section Step 5 Was the correct reference selected from the drop down list Yes Go to Step 6 No Re baseline using the correct reference Step 6 Has the light source lamp recently bee
71. inate system is selected Reflectance Color L 57 11 a 17 8 b 5 59 When a Color Space is selected the color of the spectrum and the coordinates appear on the main FiLMeasure window Color Measurement Settings Observer When a specific color space is chosen for display this option allows the user to choose between the CIE 1931 2 degree observer and the CIE 1964 10 degree observer Note that this variable is associated with the CIE eye response convention see for example http en wikipedia org wiki CIE_1931_color space and is unrelated to the illumination or collection angle of the measurement Color Measurement Settings Illuminant This setting refers to the standard illuminant being used by the software to help determine the results of the color analysis Color Measurement Settings Fixed Luminance The user can fix the luminance of the displayed color Since antireflective coatings for example are inherently transmitting the spectra has very little luminance and the coating color may appear black on screen Fixing the luminance does not affect the color space coordinate results Reflectance Color Reflectance Color 115711 L 157 11 a 178 a 178 b 5 59 b 5 59 Reflectance Color 5211 a 178 b 5 59 Spectrum colors of the same spectrum with fixed luminance of 10 40 and 70 respectively Note that fixing the luminance to view the color does not affect the color space coordinat
72. ines both the mechanical attachment and the focal plane dimensions The CCD camera mounts on the F40 adapter in order to see the measurement location on the sample The figure below shows a side view of a C mount with the most important dimensions The focal distance can be found by focusing the microscope on an object as confirmed by looking through the eyepieces and then using a business card or other piece of paper to locate the focus position above the flange Sometimes a lever or rod must be pulled or turned to direct light up through the C mount Note that a less common mount is the CS mount which is the same as the C mount except the focal distance is 12 5mm The F40 is not compatible with the CS mount ee ee ee ene nner Focal Plane 1 32 1 Diameter 17 5mm 32 threads per inch A powerful light source is required typically at least 100 watts Usually microscope light sources will filter out wavelengths above 700 nm by use of an in line heat filter or a dichroic reflector integrated with an EKE lamp this is done primarily to keep from heating the sample If light above 700 nm is desired the in line filter must be removed or in the case of a dichroic reflector the EKE lamp can be replaced with an aluminum reflector a supplier can be recommended by Filmetrics Some care must be taken in this event because some fiber optic bundles use epoxy and can be susceptible to overheating Performance Specifications Measurement S
73. ing a baseline Go to Step 2 When I click Measure Jump to Step 7 Step 2 Slow baselines are generally caused by a low light level which can have several causes Does the light source illuminate be sure it is switched on and that the shutter is open on UV systems Yes Go to Step 3 No Check the Non Operating Box Light or Fan Troubleshooting Guide Step 3 Check to see if there is a broken or misconnected fiber With the light source on confirm that the illumination fiber is screwed into the light source securely and that plenty of light is exiting the fiber at the far end near where the sample is placed The light can be seen by placing paper e g business card near the sample location do not look directly into the fiber if you are using a UV source If plenty of light is seen next check the return fiber by removing it from the spectrometer input and connecting it to the light source removing the other fiber first of course You should see light at the far end as before but it may be 3 4 times smaller and dimmer Did you see light at the sample end using both fibers in the light source Yes The fiber appears to be good Replace the fibers securely into their original positions on the spectrometer box and light source there will be a white band on the light source fiber if the two ends are different and go to Step 4 No The fiber optic may be broken Replacements can be purchased on our website www filmetrics com Step 4 Doe
74. ing or Invalid result will appear if the GOF constraint is not met Specify Oto have all solutions reported Activate Alarms When Activate Alarms is selected an alarm will trigger if the measured thickness of the sample is outside the specified Thickness Limits Thickness Limits Setting the minimum and maximum allowable thickness limits will trigger an alarm if the measured thickness is outside the limits when Activate Alarms is selected Acquisition Settings Ram Jol Eee Aa a ol Recipe Name SiO2 on Si Author Last Modified 1 10 2013 4 04 43 PM Film Stack Analysis Options Alarms Measurement Timing Spectrometer Type Use recommended sampling time Recommended sampling time 21 ms Any spectrometer a B a Shortwavelength Spec 1 only Use maximum sampling time Maximum sampling time 40 ms Long wavelength Spec 2 only _ Extended wavelength range both specs Use manually set parameters Short Long Integration time ms 40 40 Integration cycles l1 1 This menu lets the user control Measurement Timing Spectrometer Type on EXR and UVX systems Optics Configuration and Advanced Acquisition Settings Measurement Timing Use Recommended Sampling Time Selecting this option uses the sampling time that has been automatically calculated by the software during the baseline procedure The displayed value is the total sam
75. ipeName As String Public Sub SetRecipeSpectrumAnalysis ByVal measChannelOrSystemGuid As Guid ByVal recipeName As String Public Sub SetRecipeThickness Public Sub SetRecipeThickness ByVal measChannelOrSystemGuid As Guid ByVal recipeName As String measChannelOrSystemGuid The GUID of one of the measurement channels in a multiple channel system or the GUID of the system If multiple measurement channels exist the measChannelGuid must be specified recipeName The recipe name to be selected must exist in the list of recipes Note that you can select recipes contained in subfolders by specifying the relative path using the backslash character to separate folder names as is conventional in path naming Remarks Same as SetRecipeModeToSpectrumAnalysis or SetRecipeModeToThickness but caller specifies name of recipe to load during recipe mode switch ShutdownRequestedHandler Public Delegate SubShutdownRequestedHandler ByVal e As Windows Forms FormClosingEventArgs Public Event ShutdownRequested As ShutdownRequestedHandler e The standard argument type for a form about to close Remarks The client software can prohibit closing of the software by setting e Cancel to True Alternatively the client software may wish to perform certain actions prior to allowing the FlRemote class to shut down Return to Index ShuttingDown Public Event ShuttingDown
76. k the Details button A Custom Model Information dialog box will appear Select the appropriate model Enter in the known coefficients and click OK Cauchy coefficients are displayed in microns If they are entered in A FlLMeasure will automatically detect this and convert them to microns f Click the save button to save the material You will be asked for a file name and you may select one of two file types fitnk Compatible with FliLMeasure 5 and beyond nnn Creates a nnn file and if there is k in the material a kkk file to contain material data For files with both n and k the two files must have the same filename xmaterial nnn and xmaterial kkk for example in order for FiL Measure to properly indentify them Compatible with FiLMeasure 7 and earlier Setup Menu Setup Acquire Help 4 Reference Background Display Raw Signal Ctrl R Access Control Options This menu contains the settings for manually obtaining the Standard Background information Display options and the Raw Signal dialog This is also where user access can be set through the Access Control option as well as modifying some system Options Standard Background This control is used when manually taking and enabling disabling Reflectance Standard and Background compensation Standard Background Standard Background V Use Standard V Subtract Background Cancel Apply Take Standard This butto
77. l as whether a sample is good or bad based on the settings in the Alarms tab 4 Allows the user to Measure a sample Baseline the system or Analyze an open spectrum 5 Users may select saved recipes from the drop down list or open the Edit Recipe dialog box 6 This box provides more details about the calculated thickness as well as any additional parameters that were solved for including Roughness n and k and Nonuniformity as well as the Goodness of Fit GOF 7 Graphical display for spectra A click of the right mouse button while the cursor is within the graphical display opens the below menu for easy reading of cursor values in the main FlLMeasure window The keyboard up down and right left arrows move the marker to a desired location Track Value at Fixed Wavelength gt Delete Tracking at Fixed Wavelength gt Track Value at Moving Cursor gt Delete Tracking at Moving Cursor gt Marker Style b The graph limits can be changed by double clicking on the graph display The text boxes along the bottom of the graph control the wavelength range in nanometers displayed on the screen The two on the left represent the Reflectance range with the max being set in the upper box and the min being set in the lower The boxes on the right are for Transmittance Check the Auto checkbox to activate y axis autoscaling The lower value is always 0 for autoscaling the maximum y axis upper limit is 5000 The axes can be set
78. les required for successful execution of this method Unless the acquisition timing mode in the recipe is set to Manual you must first call BaselineAcquireSpectrumFromSample Alternatively you could call the variant of this method which accepts a user supplied reflectance value if you know the sample reflectivity and wish to skip step 1 Return to Index BaselineAcquireReferenceT Public Sub BaselineAcquireReferenceT Public Sub BaselineAcquireReferenceT ByVal measChannelOrSystemGuid As Guid measChannelOrSystemGuid The GUID of the measurement channel for which a Transmittance reference should be acquired If multiple measurement channels exist the measChannelGuid must be specified Remarks This method should only be called for the F10 RT It provides a means to automate step 3 of the Baseline procedure for Reflectance Only or Reflectance and Transmittance modes or step 1 of the Baseline procedure for Transmittance Only mode No sample should be positioned on stage when called Return to Index BaselineAcquireReferenceUsingOldSampleReflectance Public Sub BaselineAcquireReferenceUsingOldSampleReflectance Public Sub BaselineAcquireReferenceUsingOldSampleReflectance ByVal measChannelOrSystemGuid As Guid measChannelOrSystemGuid The GUID of the measurement channel for which a reference should be acquired If multiple measurement cha
79. lic Event SystemMeasurementCompleted As SystemMeasurementCompletedEventHandler systemGuid The GUID of a measurement system Remarks This event is raised upon completion of a SystemMeasure task and after each measurement during a SystemMonitor process You should avoid performing lengthy operations such as writing data to a file in the handler for this event because the monitor process will be halted until the handler function exits If execution of a lengthy operation is needed you should invoke a different thread to perform the operation If the event is raised as a result of completing a System Measure task then you will need to exercise care to avoid creating a threading deadlock A deadlock will occur if you invoke the thread which called SystemMeasure in the handler for this event because that thread will not return from SystemMeasure until all the event handlers have finished executing See the FiRemoteTest example program to see one way to avoid the deadlock problem Return to Index End User Software License Important Read carefully This Agreement Agreement is a legal agreement between you both you individually and your company entity and Filmetrics Inc Licensor or Filmetrics The FiL Measure software the Software subject to this Agreement and any accompanying documentation is for your use solely and exclusively with a device manufactured by or for Filmetri
80. lp improve solver speed and accuracy Make sure that the layer thicknesses are being solved for by clicking the checkboxes under Meas The substrate should be set to BK7 Underneath the Analysis Options tab set the Analysis Method to Exact with nothing else enabled Once the changes have been made the recipe can be saved by clicking on the save icon idl or confirm the changes without saving over the recipe by clicking the OK button Step 3 Take a Baseline Measurement Take a baseline measurement by first clicking on the Baseline button on the main screen A dialog box will appear to guide you through the process Follow the steps on screen and be sure to match the material selected with the reflectance standard that will be used For this example use the BK7 reflectance standard If you are having trouble focusing and your microscope has a field stop you can use this _ guide to help focus your system Otherwise the edge of the BK7 or any surface scratches can be used to help focus the system Step 4 Make the Measurement Make the measurement by placing your sample on the stage and then click on the Measure button FILMeasure will then acquire the reflectance spectrum and calculate the corresponding thickness If the measurement was successful the minima and the maxima of the calculated reflectance the red line on the graph will coincide in wavelength with the minima and the maxima of the measured reflectance the blue line on the graph
81. lues for the output bits Remarks Sets the output state of the general purpose IO logic output signals Setting a bit to 1 will set the corresponding output to the logic high state These output signals are only available on certain types of equipment Return to Index MeasSystemGuid Public ReadOnly Property MeasSystemGuid ByVal measSystemIndex As Integer As Guid measSystemIndex The zero based index of the system Remarks Returns the GUID ofthe specified system Note this can be used to obtain the GUID used by all methods requiring ameasSystem GUID Also note that the relationship between measSystemIndex and MeasSystemGuid is not static Future versions of FlLMeasure will dynamically reorder this list in response to an equipment connect disconnect event You should not rely on the order of the systems in the list when attempting to perform a command on a certain system Return to Index MeasSystemGuids Public ReadOnly Property MeasSystemGuids As Collection Of Guid Remarks Returns a collection of GUIDs containing one item for each measurement system that exists Return to Index MeasSystemHWName Public ReadOnly Property MeasSystemHWName ByVal systemGuid As Guid As String systemGuid The GUID of a measurement system Remarks The hardware name is composed of a system name string and a serial number string separated by acolon Example F37 09A006 Return to Index MeasSystemName Publi
82. ment results in the History tab are deleted If the FIRemote object has no user interface guiType None in New then there is no measurement history and this function has no effect Return to Index MeasChannelGuid Public ReadOnly Property MeasChannelGuid ByVal measChannelIndex As Integer As Guid Public ReadOnly Property MeasChannelGuid ByVal measSystemGuid As Guid ByVal measChannelIndex As Integer As Guid measSystemGuid The GUID of a measurement system measChannellndex The zero based index of the measurement channel Remarks Returns the GUID of the specified channel Note this can be used to obtain the GUID used by all methods requiring a measChannelGUID Also note that the relationship between measChannellndex and MeasChannelGuid is not static Future versions of FlLMeasure will dynamically reorder this list in response to an equipment connect disconnect event You should not rely on the order of the channels in the list when attempting to perform a command on a certain channel Return to Index MeasChannelGuids Public ReadOnly Property MeasChannelGuids As Collection Of Guid Remarks Returns a collection of GUID for each measurement channel that exists Return to Index MeasChannelHWName Public ReadOnly Property MeasChannelHWName ByVal measChannelGuid As Guid As String measChannelGuid The GUID of the measurement channel for which the channel hardw
83. mit the options available in the Analysis Options tab You also cannot solve for roughness nonuniformity or index with the Robust adaptive thickness only solver enabled Exact Spectrum Matching The Exact Spectrum Matching is the third of three analysis methods available in FILMeasure This solver can be used to measure thickness thickness nonuniformity and roughness of single and multilayer films and can additionally solve for index Unmodeled Backside Reflections When measuring films in transparent substrates reflectance off of the backside of the substrate may occur Selecting Compensate for Unmodeled backside reflections allows the software to shift the intensity of the reflectance curve to account for the additional light This feature should not be used when measuring very thin films lt 100 nm Tilted Sample Lost Light Samples with non coplanar surfaces scatter some of the light away from the collection optics This option automatically compensates for the light lost due to nonplanarity Lock Identical Layers Samples comprised of repeating layers can be more accurately measured by activating this option By activating these options all properties of any layers that initially have the same material or thickness are locked together Analysis Options Advanced r Advanced Analysis Options Convergence Criteria GOF greater than 0 999 Maximum iterations 670 V User specified solver cycles Maximum sol
84. mming environment The best way to learn how to use the FlRemote class is to look at the example program and source code which are automatically installed as part of the FiLMeasure software Assuming that the FlLMeasure program is installed in the default location the example software can be found in C Program Files Filmetrics FlLMeasure SourceCode FlRemoteTest Additionally an executable FlRemoteTest exe is located in the FlLMeasure folder All of the available commands can be tested using FlRemoteTest exe In order to set up a development environment for running and debugging code the file system must be set up so that the FiLMeasure exe is located in the same folder as the client program that is being developed Since FiLMeasure expects to find its dependent files in the same directory as the executable this means that the entire contents of the FiLMeasure folder must be copied to the build output folder For example if the software development environment output folder is located in C SourceCode TestSIn TestPrj bin Debug then all the files and subfolders from C Program Files Filmetrics FlLMeasure must be copied to C SourceCode TestSIn TestPrj bin Debug Some of the methods listed in the following reference a SystemGuid In the terminology used in this document a Measurement System is an object comprising one or more measurement channels but with operations that can be performed simultaneously on all the channels in the system The S
85. mulatedDataBeforeMeasure As Boolean As FIMeasResultValuesOnly Public Function SystemMeasure ByVal systemGuid As Guid As FIMeasResultValuesOnly Public Function SystemMeasure ByVal systemGuid As Guid ByVal deleteAccumulatedDataBeforeMeasure As Boolean As FIMeasResultValuesOnly deleteAccumulatedDataBeforeMeasure There is no analog for this parameter in the user interface Setting this parameter to True causes any existing accumulated data points to be deleted before the measurement is performed systemGuid The GUID of a measurement system Remarks Acquire and measure on all channels in a system Measurement is performed simultaneously on all channels Measured results are contained in an FiMeasResultValuesOnly object Return to Index SystemStartMonitoring Public Sub SystemStartMonitoring Public Sub SystemStartMonitoring ByVal systemGuid As Guid systemGuid The GUID of a measurement system Remarks This function starts a monitoring process Return to Index SystemStopMonitoring Public Sub SystemStopMonitoring Public Sub SystemStopMonitoring ByVal systemGuid As Guid Remarks This function stops a monitoring process Return to Index SystemMeasurementCompletedEventHandler Public Delegate Sub SystemMeasurementCompletedEventHandler ByVal systemGuid As Guid ByVal theResults As FIMeasResultValuesOnly Pub
86. n allows the reflectance standard portion ofthe baseline measurement to be taken without having to re take the background measurement Take Background This button allows the background portion ofthe baseline measurement to be taken without having to re take the reference measurement Use Standard This checkbox allows the reflectance standard portion ofthe baseline correction to be enabled or disabled This box is only available ifa baseline has already been completed Subtract Background This checkbox allows the background subtraction portion of the baseline correction to be enabled or disabled This box is only available if a baseline has already been completed Display Color Measurement Settings Number of Spectra Displayed Controls Color Space Observer Maximum number of spectra to CIE L a b display in the graph 1 10 Sample info 2degrees CIE L u v Measurement status m 10de gress Spectra Transformation CIE L C H V Recipe None CIEXYZ llluminant Reflectance color Graph Options None White background Black background Transmittance color Always show CIE XYZ C Auto position legends Measurement results Measurement Results V Fix luminance of color swatch at 10 100 30 Significant digits Color Measurement Settings Color Space The color of a spectrum can be displayed and quantified on the main screen if a color space coord
87. n changed Yes This error is an expected response no further action required No Go to Step 7 Step 7 Has the optical configuration been altered i e switching from standard spot size to small spot optics or a contact probe Yes This error is an expected response no further action required No If you are still experiencing problems please contact us using the Contact Information section Measurement Results are Incorrect or Unstable Follow the steps below to troubleshoot when measurement results are incorrect or unstable after the results had been good for some time Additional help troubleshooting general measurement issues may be found in the Troubleshooting Thickness Modeling section Further assistance may be received by contacting us using the methods described in the Contact Information section Step 1 First confirm that you have selected the correct recipe for the sample that you are measuring i e the same recipe that previously was giving good measurements Note that this troubleshooting guide does not cover instances where recipe parameters have been changed Step 2 Confirm that the light source is turned on and that the fibers are securely tightened into the light source and the spectrometer input Place a piece of paper at the sample measurement location and confirm that you can see a light beam Can the light beam be seen Yes Jump to Step 4 No Go to Step 3 Step 3 Is there light coming out of the light source
88. n order to aid in the testing and debugging process However there are some applications where it is useful to be able to show and hide the user interface while the software is running This is accomplished with the GUIVisible Property The constructor warns if the startup recipe has problems loading and a default recipe is loaded instead Return to Index AcquireSpectrum Public Sub AcquireSpectrum ByRef spectrumWavelengths As Single ByRef spectrumData As Single Public Sub AcquireSpectrum ByRef spectrumWavelengths As Single ByRef spectrumData As Single ByVal flushPipeline As Boolean Public Sub AcquireSpectrum ByRef spectrumWavelengths As Single ByRef spectrumData As Single ByRef secondarySpecWavelengths As Single ByRef secondarySpecData As Single ByRef primarySpecIsReflectance As Boolean Public Sub AcquireSpectrum ByRef spectrumWavelengths As Single ByRef spectrumData As Single ByVal secondarySpecWavelengths As Single ByRef secondarySpecData As Single ByVal flushPipeline As Boolean ByRef primarySpecIsReflectance As Boolean Public Sub AcquireSpectrum ByVal measChannelGuid As Guid ByRef spectrumWavelengths As Single ByRef spectrumData As Single Public Sub AcquireSpectrum ByVal measChannelGuid As Guid ByRef spectrumWavelengths As Single ByRef spectrumData As Single ByVal flushPipeline As Boolean Public Sub AcquireSpectrum ByVal measChannelGuid As Guid ByRef primarySpecI
89. n reflectance vs wavelength due to the sample under test are of interest Therefore FiL Measure must perform a calibration to determine the spectral response of the system This is done by making a measurement of a reflectance standard that has known reflectance characteristics Note that it is not necessary for the reflectance standard to be the same as the substrate upon which films to be measured reside The only purpose served by the reflectance standard is to permit calibration of the optical system For example it is possible to use a Si wafer as the reflectance standard and then measure films on GaAs InP glass plastic etc After the reference measurement is made a dark reading is taken A non zero dark level is due to current leakage inherent to photodiodes which causes each photodiode in the array to slowly charge up even when no light enters the spectrometer Thus in order to make an accurate measurement of the light entering the spectrometer it is necessary to subtract this dark current contribution This is the purpose of the background reading which measures the magnitude of the dark current for a given integration time When a dark measurement is made a spectrum is measured that represents the signal generated by the spectrometer when a sample of zero reflectance is measured To simulate a sample with zero reflectance during a dark measurement a specularly reflecting sample can be held at an angle with the light s
90. n the light source and the microscope column 3 Focus the image by adjusting the distance from the sample to the objective 4 Once you have obtained a focused image slowly close the field diaphragm the one furthest away from the light source until it becomes visible in the image This diaphragm should be in focus simultaneously with the sample image 5 Optional Adjust the position of the field diaphragm using the two adjustment screws so that the diaphragm is centered in the image 6 Open the diaphragm but leave the edge in view Now you can move to a perfectly specular sample location say a Si wafer and focus on the field diaphragm knowing that when the field diaphragm is in focus so is the Si wafer sample When focused you can open up the diaphragm out of the field of view to collect maximum light dat drt drt bret Figure 1 From left to right Closing the field diaphragm on a focused image centering the field diaphragm using adjustment screws and focusing on a Si wafer using the field diaphragm as a reference point Measuring Thickness Examples that describe the most common measurement setups are described in this section Example 1 Measuring Single Layer Films Example 2 Measuring Multi Layer Films Example 3 Measuring Films on Transparent Substrates Example 1 Measuring Single Layer Films In this example we will demonstrate the measurement of SiO2 on Silicon using the TS Focus Si02 4 10000 thickness stan
91. ncountered while taking a baseline These are usually caused by having too much or not enough light Further assistance may be received by contacting us using the methods described in the Contact Information section Step 1 Which error message are you seeing while taking a baseline Received light signal is too bright If you are manually setting the integration time see Measurement Timing then you need to reduce the integration time Otherwise you can reduce the light source intensity by using a flattening or neutral density filter Optical filters can be purchased on our website www filmetrics com Baseline Failure Reference and background spectra are almost the same This error is often caused by using the reference sample during the background step or vice versa and is easily corrected by taking retaking the baseline while providing the proper material for the proper step If this is not the case go to Step 2 Spectrometer peak intensity is x of previous reference intensity This error is often caused by using the incorrect reference sample and is easily corrected If this is not the case jump to Step 5 Step 2 Does the light source illuminate Yes Go to Step 3 No Check the Non Operating Box Lamp Or Fan Troubleshooting Guide Step 3 Check to see if there is a broken or misconnected fiber With the light source on confirm that the illumination fiber is screwed into the light source securely and that plenty of light is exiting the f
92. nd new data is acquired If set to False data currently being acquired is returned when acquisition is finished primarySpeclsReflectance Indicates whether the primary spectrum data is Reflectance or Transmittance Remarks It is important that you catch exceptions which may occur as a result of calling this method See the example program for details Return to Index ActivateChannelDisplayTab Public Sub ActivateChannelDisplayTab ByVal measChannelGuid As Guid measChannelGuid The GUID of the measurement channel of the corresponding Measurement Tab to be selected Remarks After execution the active tab in the FlLMeasure GUI will be the specified Measurement Tab This method should only be executed if multiple measurement channels exist Return to Index AnalyzeSpectrum Public Function AnalyzeSpectrum ByVal formatSummaryAsRtf As Boolean As FIMeasResults Public Function AnalyzeSpectrum ByVal formatSummaryAsRtf As Boolean ByVal addToHistory As Boolean As FIMeasResults Public Function AnalyzeSpectrum ByVal measChannelGuid As Guid ByVal formatSummaryAsRtf As Boolean As FIMeasResults Public Function AnalyzeSpectrum ByVal measChannelGuid As Guid ByVal formatSummaryAsRtf As Boolean ByVal addToHistory As Boolean As FIMeasResults measChannelGuid The GUID of the measurement channel
93. nits 6 This is where the materials and parameters to be solved are defined Editing Film Recipes The description of the nominal film structure as well as the measurement parameters is specified in the Edit Recipe dialog box Hundreds of different film structures and their measurement specifications may be saved The Edit Recipe dialog box is accessed with the Edit Recipe button on the Measure Tab The Edit Recipe dialog box lists an initial guess at the specifications of the film structure to be measured These specifications include the number of films in the structure the specifications of individual films thickness and index and the film parameters to be measured Adding Changing or Deleting a Structure When the Edit Recipe dialog box is opened it shows the stored specifications of the structure selected from the Recipe list along with any changes made since the recipe was loaded Changes to the structure selected can be permanently stored by making the desired changes and then clicking on Save New structures may be added to the Recipe list by clicking on Save As Similarly a structure may be deleted removed from the Recipe list by clicking on the Delete button Film Stack nen a So e SAA fl 9 Recipe Name SiO2 on Si Analysis Options Alarms Acquisition Settings Author Last Modified 3 21 2013 12 02 43 PM Film Stack Composition NU t Thickness Layer X
94. nnels exist the measChannelGuid must be specified Remarks This method provides a means to automate steps 1 and 2 of the Baseline procedure by assuming that the sample reflectance is unchanged from what it was the last time a baseline procedure was performed Note that an exception may be thrown in some situations including the case where no prior baseline spectrum exists Return to Index BaselineAcquireSpectrumFromSample Public Sub BaselineAcquireSpectrumFromSample Public Sub BaselineAcquireSpectrumFromSample ByVal measChannelOrSystemGuid As Guid measChannelOrSystemGuid The GUID of the measurement channel for which a sample spectrum should be acquired If multiple measurement channels exist the measChannelGuid must be specified Remarks This method provides a means to automate what is most commonly called step 1 of the Baseline procedure Return to Index BaselineCommit Public Sub BaselineCommit Public Sub BaselineCommit ByVal measChannelOrSystemGuid As Guid measChannelOrSystemGuid The GUID of the measurement channel for which a new baseline should be commited If multiple measurement channels exist the measChannelGuid must be specified Remarks Call this method to finalize the baseline procedure and commit the acquired spectra for use as a new baseline measurement Return to Index BaselineSetRefMat Public Sub BaselineSetRefMat ByVal theRefMat As String Public
95. on Si 1 9 2013 9 42 34 AM 173 26 5 69 502 99969 OK 500nm TEOS on Si 1 9 2013 9 42 35 AM 17447 4 70 501 5 99967 OK 500nm TEOS on Si 1 9 2013 9 42 36 AM 175 69 4 71 501 99972 OK 500nm TEOS on Si 1 9 2013 9 42 37 AM 176 90 1 72 5003 99970 OK _ 500nm TEOS on Si 1 9 2013 9 4239 AM 178 12 a E 73 499 3 99969 OK 500nm TEOS on Si 1 9 2013 9 42 40 AM 179 30 2 5 wahre PEE A 74 4994 99971 OK 500nm TEOS on Si 1 9 2013 9 42 41 AM 18053 3 3 BOAN ttiie sate eel te te nette 73 4969 99961 OK 500nm TEOS on Si 1 9 2013 9 42 42 AM 181 63 42 E ey s e 76 4973 99963 OK 500nm TEOS on Si 1 9 2013 9 42 43 AM 182 74 1 7 499 99970 OK _ 500nm TEOS on Si 1 9 2013 9 42 44 AM 183 97 1 amp 78 500 2 99968 OK 500nm TEOS on Si 1 9 2013 9 42 46 AM 185 18 44 79 501 99977 OK 500nm TEOS on Si 1 9 2013 9 42 47 AM 186 38 0 80 5004 99965 OK 500nm TEOS on Si 1 9 2013 9 42 48 AM 187 60 6 a 499 7 99973 OK 500nm TEOS on Si 1 9 2013 9 42 49 AM 188 80 0 82 500 8 99973 oK 500nm TEOS on Si 1 9 2013 9 42 50 AM 190 01 OF 83 4994 99967 OK 500nm TEOS on Si 1 9 20139 4252AM 19111 a 84 500 1 99969 OK 500nm TEOS on Si 1 13 9 42 53 AM 192 35 1 85 500nm TEOS on S 5 93 55 lt m r All Measurements Saveas Deleteat coy Delete Selected Send Selected To Measure When the Measurement Trend tab is selected in the History window the right side of the screens graphs the results 4 Sho
96. ontaminate the sensitive optical surfaces on the instrument Before performing any service on the instrument ensure that the main power is disconnected Cleanroom or low lint wipes should be used to wipe down the system A mixture of Isopropyl Alcohol IPA and De ionized Water DI H2O at 70 DI H20 30 IPA is to be used for cleaning Undiluted IPA may be used if the 70 30 DI and IPA mixture is not available but extra care must be taken Avoid using stronger solvents such as acetone as these may compromise the surface finish Avoid excessive pressure on any surface when cleaning Excessive force may bend a component which would damage the system or cause the system to be out of alignment Start with the top of the system and work down Use slow motions in a straight line from the back to the front of the surface being cleaned Change the cleaning wipe periodically to avoid re depositing material back onto the surface being cleaned Allow all cleaned surfaces to dry completely before restoring power to the system CE Mandated Warnings A A Please read the following instructions carefully to prevent potential shock or fire hazards This manual should be retained for future use A A Bitte lesen Sie die nachstehende Anleitung sorgfaltig durch um Stromschlag und Feuergefahr zu vermeiden Diese Betriebsanleitung sollte f r sp teren Gebrauch sorgf ltig aufbewahrt werden A A Preghiamo dileggere accuratamente le sequenti Inst
97. or system If multiple measurement channels exist the measChannelOrSystemGuid must be specified since each measurement channel has its own active recipe layerNumber The layer number for which to set the refractive index refractivelndex New refractive index value for layer Remarks You can alter the material of a layer in the current recipe using the method An exception will be thrown if the layer number or refractive index are out of bounds Return to Index SetRecipe Public Sub SetRecipe ByVal measChannelOrSystemGuid As Guid ByVal recipeName As String Public Sub SetRecipe ByVal recipeName As String measChannelOrSystemGuid The GUID of the measurement channel or system If multiple measurement channels exist the measChannelOrSystemGuid must be specified since each measurement channel has its own active recipe recipeName The recipe name to be selected must exist in the list of recipes Note that you can select recipes contained in subfolders by specifying the relative path using the backslash character to separate folder names as is conventional in path naming Remarks The current spectrum will not be automatically reanalyzed when a new recipe is selected To reanalyze the spectrum you must call AnalyzeSpectrum Return to Index SetRoughness Public Sub SetRoughness ByVal measChannelOrSystemGuid As Guid ByVal layerNumber As Integer ByVal roughness nm As Single Public S
98. or transmitting light through the sample and then analyzing this light over a range of wavelengths Because of its wave like properties light reflected from the top and bottom interfaces of a thin film can be in phase so that reflections add or out of phase so that reflections subtract Whether the reflections are in or out of phase or somewhere in between depends on the wavelength of the light as well as the thickness and properties of the film e g reflections are in phase when A 2 n d i where A is the wavelength n is the refractive index d is the film thickness and jis an integer The result is characteristic intensity oscillations in the reflectance spectrum see Figure below In general the thicker the film the more oscillations there are in a given wavelength range 0 5 Reflections In Phase Wy Wy N Reflections Outof Phase 400 500 600 700 800 VWavelength nm Example of reflectance spectrum with oscillations The amplitude of the oscillations is determined by the refractive index and extinction coefficient of the films and substrate Therefore by analyzing the period and amplitude of these oscillations our instruments can determine thickness of multiple thin films Thickness Measurement Details Optical thin film thickness measurements require the successful completion of two tasks acquisition and then analysis of an accurate reflectance spectrum To determine film thickness FlLMeasure calculates a reflec
99. ource turned on or in many cases the light source may simply be turned off momentarily during the dark measurement Due to drift in the light source and temperature of the spectrometer electronics it is a good idea to take a baseline periodically How to Contact Us We welcome suggestions from our users on ways to improve our software and hardware Please send us any suggestions you may have for improvements in the help file or new features you would like to see in the software We may be reached by phone at 1 858 573 9300 by fax at 1 858 573 9400 by the Contact Us Now form on our website or by e mail at support filmetrics com Appendices This section contains information on various topics as listed below Microscope Requirements Performance Specifications How to Replace the Light Bulb Automation and Data Software License Agreement Microscope Requirements A microscope must have the following characteristics for proper F40 operation e Metallurgical microscope design illumination delivered through the objective lens e Trinocular head with C mount adapter if Olympus a BX mount works too e No heat filter anywhere in the illumination path if light is desired above 700nm The F40 attaches to the microscope by threading onto a C mount A C mount is a standardized format and is by far the most common type of trinocular attachment found on microscopes It is often used to attach video cameras The C mount specification def
100. pecs F40 F40 NIR F40 EXR F40 UV F40 UVX 950 1700 400 1700 200 1100 Wavelength Range 400 850 nm 200 1700 nm nm nm nm Accuracy Greater of 0 4 or 2nm 3nm 2nm inm inm Precision 0 1 nm 0 2 nm 0 1 nm 0 1 nm 0 1 nm Stability3 0 07 nm 0 12 nm 0 07 nm 0 07 nm 0 07 nm 20nm 20 40nm 40 20nm 40 Thickness Range with 5x Objective1 um um um a 20nm 15 40nm 30 20nm 30 Thickness Range with 10x Objective um um um BR 20nm 15 40nm 30 20nm 30 Thickness Range with 15x Objective 4nm 20 um 4nm 40 um um um um Thickness Range with 50x Objective 20nm 2 um 40nm 4um 20 nm 4 um MOREEN 20 nm 1 5 Thickness Range with 100x Objective i 40 nm 3 um 20 nm 3 um Thickness Req d to Measurenandk 100nm 500 nm 100 nm 50 nm 50 nm Standard 500 um Aper Optional 250 um Aper Optional 100 um Aper Spot Size ture ture ture 5x Objective 100 um 50 um 20 um 10x Objective 50 um 25 um 10 um 15x Objective 33 um 17 um 7 um 50x Objective 10 um 5 um 2 um 100x Objective 5 um 2 5 um 1um System Requirements PC Windows XP SP2 Windows 8 64 bit Mac OS X Lion Mountain Lion running Parallels Processor Clock Speed 1 4 GHz min Interface USB 2 0 Material and microscope dependent l Using 5x objective 2 10 of 100 measurements of 1 um SiO_ on Si Value is average of 10 over 20 days 3 20 of daily average of 100 measurements of 1 um SiO on Si measured over 20 days Specifications subject to change without notice Light Bulb
101. pectrometer was expecting Reflectance data may not be accurate as a result Take a new baseline to fix this problem Troubleshooting Thickness Modeling In all cases it has been assumed that the user has read the Measurement Assumptions section and that each criterion has been met Case 1 No oscillations or portions of oscillations are present in the measured reflectance spectrum Case 2 The measured reflectance spectrum has periodic oscillations across the entire screen but its minima and maxima do not match up with the calculated reflectance Case 3 Two or more different but nearly the same thickness readings are obtainable from the same measurement location Case 4 Poor matches between the measured and calculated reflectance spectra when measuring thickness and optical constants Case 5 Several different answers or one unreasonable answer are found when measuring thickness and optical constants even though a good match is found between the measured and calculated reflectance spectra Case 1 No oscillations or portions of oscillations are present in the measured reflectance spectrum There can be several possible causes 1 The film may just be very thin lt 200 A thus presenting no discernible oscillations or only one identifiable minima or maxima The FFT solver will not be able to accurately analyze films without at least one discernible full oscillation in general meaning a film less than 0 2 microns thi
102. pling time and not necessarily the integration time To see the integration time and number of integration cycles go to the Help gt Diagnostics menu Use Maximum Sampling Time Users can set a maximum sampling time by selecting this option By increasing sampling time the user may see a decrease in signal noise but at the trade off of a longer acquisition time Use Manually Set Parameters Users can set the integration time per acquisition cycle and set a number of integration cycles over which to average When using this option the total sampling time is equal to the integration time multiplied by the number of integration cycles To set the integration time manually set the sample on the stage and select Setup gt Raw Signal If the proper integration time is unknown an initial value of 40ms is a good starting guess The vertical scale of the spectrum extends from zero to 4095 Thus a good working level is when the peak height of the sample being measured or the reflectance standard whichever is greater is 3000 3500 counts Note if the reference measurement saturates Detector Saturation error then spurious final measurements will result If the maximum signal is too low increase the integration time Too large an integration time will result in excessive dark current so it is sometimes necessary to accept a smaller signal level to limit the dark current Note If the integration time is changed it will be necessary to per
103. r example locating a more uniform area of the sample or one that exhibits interference fringes Acquire gt Measure Once This feature collects a spectrum analyzes it and displays it on the screen This is the same as pressing the Measure Button For systems with the Sample Cam this saves an image to the spectrum file created Acquire gt Measure Continuously This feature collects real time spectrum data and analyzes it similar to repeatedly pressing the Measure button Ameasurement interval time can be set in the recipe using the Advanced options underneath the Acquisition Settings tab Batch Acquire The Batch functions allow you to act on groups of spectra rather than each individual spectrum Acquire Measure Analyze Spectra Analyze All Spectra In Folder Acquire gt Batch gt Acquire This option allows you to acquire a pre selected number of spectra You can also choose to save the batched spectra as they are acquired r Batch Process spectra to acquire 5 _ Save spectra to disk Browse Save base filename Team Acquire gt Batch gt Measure This option allows you to acquire and analyze a pre selected number of spectra You can also choose to save the batched spectra as they are acquired Acquire gt Batch gt Analyze Spectra This option allows the user to select multiple spectra for analysis by the current recipe If there are more spectra to be analyzed
104. ral reflectance data For systems using the F40 internal light source light is supplied by a tungsten halogen bulb that generates light from approximately 375 nm to 3000 nm This light is delivered to and collected from the sample through a fiber optic cable bundle and a lens The intensity of the reflected light is measured at different wavelengths with a spectrometer The F40 spectrometer uses a diffraction grating to disperse the light and a linear photodiode array to measure the light at the different wavelengths After a user selectable integration time the accumulated charge in each photodiode is read by the computer Because a longer integration time results in a larger charge it is the integration time that determines the sensitivity of the spectrometer Adjustment of the integration time is used to obtain the proper signal level Too short of an integration time results in a weak noisy signal while too long of an integration time results in a saturated signal The Baseline Measurement The baseline measurement allows the FiLMeasure software to take into account the response inherent to the reflectance measurement hardware It does this by measuring a reflectance standard and by taking a dark reading In any optical system there are many components whose characteristics vary with wavelength e g the output of the light source and the sensitivity of the spectrometer However when reflectance measurements are made only variations i
105. rning on and off access control and adding and deleting users Access Control Access Level Engineer UserID Password Turning on access control requires Supervisor level access The software is delivered with one user a supervisor in the list of authorized users as shown below UserID filmsuper Password filmetricsfff To turn on access control log in as filmsuper using the password shown above The Activate Access Control checkbox should now be enabled By placing a check mark in the Activate Access Control checkbox access control will be active User ID and Password are case sensitive To add an operator level user select operator from the Access Level list box type a user name and type an initial password for that user Then click the Add User button To add an engineer or a supervisor user follow the same procedure but pick the appropriate access level from the list box before pressing the Add User button To delete a user enter the UserID and press the Delete User button Operator and Engineer level users can change their passwords when they are logged in by entering their password into the password box and pressing the change button Supervisor level users can change their password or the password of any other user by selecting the appropriate access level entering the appropriate UserlD and the new password and pressing Add User If the program finds that a user already exists it will delete the old en
106. rresponding to layers 1 2 7 011 microns Notice that the thickness of layer 2 is not exactly equal to 7 011 4 780 2 231 microns FlLMeasure computes a thickness for layer 2 of 2 113 microns because it precisely accounts for the fact that layer 2 has a different refractive index than layer 1 Discussion of GOF A perfect match between measured and theoretical FFT spectra will result in a GOF of 1 To ensure accurate results the user may set a minimum acceptable GOF value by entering a number between O and 1 into GOF Error on the Alarms settings in Edit Recipe A warning message will be displayed after each measurement where the GOF falls below the user specified GOF Error If the GOF is less than 1 there are several possible causes as follows a Nonuniformity Any variation of layer thickness within the measurement spot will result in a reduction in the FFT peak heights In order to permit easy visual interpretation of the FFT results FlLMeasure always scales the amplitude of the red curve so that it matches the blue curve However if the scaling factor is not 1 0 FiL Measure reports a reduced GOF even if the red curve appears to exactly match the blue curve on the screen b Incorrect Structure Definition If the refractive index of one or more layers in the structure is different from what is described in the layer structure then the FFT peak amplitudes in the blue curve will not match the peak heights in the red curve The software
107. ruzioni per evitare Prossiomi Incendi e Correnti A A Shock Hazard Do Not Enter Achtung Hochspannung Nicht Ber hren Attenzione Corrent Forte Prego non toccare IN The front panel s switch is not the power disconnect device The power cord should be removed after use Der Kippschalter an der Vorderseite unterbricht nicht die Stromzuf hrung Das Stromkabel sollte nach Gebrauch aus dem Ger t herausgezogen werden L interutore nella parete frontale non blocca le Corrente La Corrente viene A Never expose the unit to water or liquids Avoid direct sun Bringe das Ger t nicht mit Wasser oder einer anderen Fl ssigkeiten in Ber hrung Vermeide direkte Sonneneinstrahlung Evitare contatto con acqua oppure liquidi Infiammabili al Macchineggio Auche entrate di Sole gt Do not insert any objects into the unit Keinen Gegenstand in das Ger t einbringen Do non inseriamo any obietta into gli unita Non mettere ogetti dentro la Macchina gt Do not use near open flame or heat Das Ger t nicht in der N he einer offenen Flamme oder Hitze benutzen Non mettere la Macchina vicino a fuochi oppure Riscaldamenti gt The unit should never be enclosed or blocked Das Ger t darf nicht eingeschlossen oder blockiert werden La Macchina non chinderla per nessun motivo gt Connect unit only to a properly measured supply Use only the three wire cord which is provided with the unit Schlie en Sie das Ger t nur an ein
108. s In each example it is assumed that the hardware has been set up as described in the Quick Start Guide and that you have first read through the Software Overview section to familiarize yourself with the basic controls The Measurement Assumptions Hints for Improved Accuracy and Troubleshooting sections describe techniques that should be followed for the most accurate measurements Focusing a Microscope Image on a Perfectly Flat Surface In many cases samples will have visible features that allow users to focus a microscope image However for perfectly specular mirror like samples focusing the microscope may be difficult In these cases the K hler illumination technique which almost all reflected light microscopes use can be helpful in obtaining a focused image despite a lack of visual reference points on the sample In a K hler illuminated microscope there are three additional focal points in the light path One in particular the field diaphragm can be used to focus the microscope Focusing the image using the field diaphragm field stop To focus using the field diaphragm also called field stop and abbreviated F S follow the steps listed below 1 Start with a sample that has visible features that allow you to focus by eye the Filmetrics Focus Reference Wafer works well if you have one 2 Turn on the microscope s light source and open both the field diaphragm and aperture diaphragm These two diaphragms are located betwee
109. s found in Case 3 incorrect dispersion Case 3 Two or more different but nearly the same thickness readings are obtainable from the same measurement location When this occurs usually the measured and calculated spectra match somewhat but not very well across the entire spectra i e the measured and calculated spectra match exactly only over a small wavelength range and then gradually walk off one another outside this wavelength range When thickness is the only value being measured this is normally caused by the refractive index of the measured layer not matching that used by FlLMeasure especially when the film is greater than one micron thick Unless more accurate index values can be obtained the best way to solve this problem is to restrict the wavelength range used in the analysis Case 4 Poor matches between the measured and calculated reflectance spectra when measuring thickness and optical constants There can be many causes of this problem including those listed in Case 1 and Case 2 above Most commonly when a poor fit between the spectra occurs it is because 1 The components of the film structure are not all included in the Edit Recipe gt Film Stack dialog box Adjust the recipe accordingly and reanalyze the spectrum 2 Very inaccurate initial guesses for the film thickness es have been listed Try a new nominal starting guess or expand the thickness constraint range 3 The optical constants listed in the
110. s will be constructed at startup If gui Type is set to None then the startup process is accelerated and memory usage is minimized However the user interface cannot be displayed at a later time if it is not constructed during the startup process If guiType is set to Standard then the normal graphical user interface is constructed during the startup process guiStartupState Determines whether or not the FlRemote user interface is displayed at startup Note that this argument has no effect if guiType None If guiStartupState is set to Hidden then the user interface will not be visible on screen at the completion of the startup process If the user interface was constructed at startup it can be displayed at a later time by setting GUIVisible True guiWindowStartupState If guiStartupState is set to Shown then the FlRemote User interface window will appear on the screen at the completion of the startup process Note that this argument has no effect if guiType None The state of the window is controlled by guiWindowStartupState You can set the state to Maximized Normal orMinimized theConstructorWarning Returned value of type ConstructorWarning None or StartupRecipeLoadFailure warning Message Returned warning message string Empty if None Remarks You can suppress the display of the FlRemote user interface by setting guiType appropriately Typically you would show the user interface during software development i
111. s your system have multiple spectrometers i e EXR or UVX Yes Check the Acquisition Settings tab under Edit Recipe to make sure that your fiber optic configuration matches the enabled spectrometers Do this by making sure that each enabled spectrometer has a fiber attached to it or disable a spectrometer that is not being used No Go to Step 5 Step 5 It may be that your lamp is old and needs to be replaced The best way to tell is to replace it with the instructions found here A spare lamp is included with most systems and additional lamps may be purchased on our website www filmetrics com _ If you are still experiencing problems with a slow baseline after the proceeding steps please contact us using the methods described in the Contact Information section Step 7 Unless the slow operation during measurement is a new problem please confirm that your computer meets the minimum system requirements as listed here If it doesn t please upgrade your computer Otherwise go to Step 8 Step 8 A measurement that takes a long time generally means that there is a large amount of processing being required to find a solution and this is usually cause by a non optimal recipe setting Please first confirm that you have selected the correct recipe for the film stack you are measuring Step 9 Open the recipe and make sure that you are not solving for too many parameters Solving for one or two thicknesses or a thickness and index should only take a s
112. sReflectance As BooleanByRef spectrumWavelengths As Single ByRef spectrumData As Single Public Sub AcquireSpectrum ByVal measChannelGuid As Guid ByRef spectrumWavelengths As Single ByRef spectrumData As Single ByVal flushPipeline As Boolean ByRef primarySpecIsReflectance As Boolean measChannelGuid The GUID of the measurement channel for which a spectrum should be acquired If multiple measurement channels exist the measChannelGuid must be specified spectrum Wavelengths Array to contain wavelengths of measured spectum data points spectrumData Measured reflectance or transmittance data points secondarySpecWavelengths For systems that can simultaneously acquire reflectance and transmittance such as the F10 RT array to contain wavelengths of measured secondary spectum data points For all other systems the returned argument is Nothing secondarySpecData For systems that can simultaneously acquire reflectance and transmittance such as the F10 RT array to contain the measured secondary spectum data points For all other systems the returned argument is Nothing flushPipeline If set to True default any data currently being acquired is ignored a
113. scription which most closely describes your error 1 The error occurs during the baseline See the Error Message During Baseline Troubleshooting Guide 2 Some other error See the Error Messages Miscellaneous Troubleshooting Guide Question 2 Are you able to launch FiLMeasure but it shows an error Yes Continue to Question 2 1 No Then you need to install the software that come with your new system or you can request new software See the Software Reinstallation Guide Question 2 1 Does the error message start with No Filmetrics instruments detected Yes See the Non Operating Box Lamp or Fan Guide No See the Error Messages Miscellaneous Troubleshooting Guide Power Cycling Over the years we ve found that about a third of support issues can be resolved by simply power cycling the Filmetrics system and computer Follow the simple steps below to power cycle your instrument Further assistance may be received by contacting us using the methods described in the Contact Information section Step 1 Shut down FilMeasure it s OK in the rare case that you can t Step 2 Unplug all electrical connectors from the back of your Filmetrics box Step 3 Restart your computer giving it time to load all drivers Step 4 Reconnect the electrical connections to your Filmetrics box Make sure that the power cord is getting power and that any switch near the power connector is turned on Step 5 Restart FiLMeasure Software R
114. some methods are relevant only to a single channel If you supply a measSystem guid as the argument for one of these methods an exception will be thrown ActivateMonitorDisplayTab BaselineExistsAndIsAuthenticated GeneralPurposelOlsSupported GeneralPurposelOReadValue GeneralPurposelOSetValue MeasSystemGuid MeasSystemGuids MeasSystemHWName MeasSystemName NumberOfSystems SetRecipeModeToSpectrumAnalysis SetRecipeSpectrumAnalysis ShutdownRequestedHandler ShuttingDown SystemAutoSave SystemAutoSaveBaseFileNameAndPath SystemMeasure SystemStartMonitoring SystemStopMonitoring SystemMeasurementCompletedEventHandler FIRemoteCOM dll The dll is automatically included whenever FlLMeasure or FILMapper is installed Since the dll references the corresponding exe file it is located inside the FlLMeasure or FlLMapper folder in the Program Files or Program Files x86 on 64 bit systems path The best way to learn howto use the dll is to examine the example Excel workbook that is included with the software The workbook has the same name as the dll but has the extension xlsm and is located in the same folder as the dll When you open the xlsm file for the first time you will see a warning banner as shown below You must click the Enable Content button in order to allow the code associated with the buttons on the worksheets to run If you do not see the security warning when you open the spreadsheet then you may need to modify settings in Ex
115. st box on the main screen If the structure to be measured does not exist a new structure must be defined See Editing Film Recipes for more information Step 2 Edit the film recipe Kae LT aa Sala wl Author Filmetrics Inc Recipe Name HC Standard on Acrylic Trans gt e AAEN Film Stack Analysis Options Alarms Acquisition Settings Composition Thickness NU E t f Layer Nominal um Range Meas Refine via X Medium Air amp X 1 HC Standard 2 x 2 Acrylic 2 x Substrate Air E eee Example Edit Recipe gt Film Stack window for measuring the thickness of a film on a transparent substrate To edit the film stack click the Edit Recipe button to open the dialog box Check to see that the film stack matches that of the actual sample If not different films can be selected using either the drop down menu next to the material or the Search function This is also where you can enter a starting guess for thickness as well as the desired constraint range For this example set the Nominal thickness at 6 microns with a constraint range of 75 Make sure that the HC Standard 2 layer thickness is being solved for by clicking the checkbox under Meas The second layer should be Acrylic 2 with a thickness of 2000 um or 2 mm with Air as the substrate Do not enable solving for the Acrylic 2 layer This lets the software
116. st column index of refraction n in the second and extinction coefficient k in the third The first few columns of the file should be identical to the figure below the only exception being cell B3 which should contain a number describing the material category The material categories and their corresponding numbers are metal 1 semiconductor 2 insulator 3 photoresist 4 and other 5 To save the file created by Microsoft Excel go to File gt Save As For Save as Type choose CSV Comma delimited csv Save the file as FILENAME fitnk FILENAME represents the name you wish to call the file note that quotation marks must be used to enclose the filename in Excel to force the extension to fitnk The file can then be saved to the desktop and Imported using the File gt Import gt Material File option 2 Compat Version 3 Material 4 File Information 5 Wavelength nm n vo so 206 6 226 7 248 3 265 2 280 3 302 2 330 3 361 1 1 543 1 5228 1 5084 1 5 1 494 1 4872 1 4805 1 4751 8150 5 8I10 0 8 Theory of Operation This section describes how the instruments work and includes the theory the measurements are based on specifics about the hardware and more detail about the baseline measurement Measurement Theory Thickness Measurement Details Hardware Operation The Baseline Measurement Measurement Theory Our instruments measure thin film characteristics by either reflecting
117. t Rights and obligations under this Agreement which by their nature should survive will remain in effect after termination or expiration ofthis Agreement
118. tance spectrum that matches as closely as possible the measured spectrum FlLMeasure begins with an initial guess for what the reflectance spectrum should look like theoretically based on the user s input of a film structure for the sample Then FlLMeasure varies the parameters it is solving for until the calculated reflectance spectrum matches the measured data Mathematically this procedure is complicated by the fact that as the thickness of the films in the calculation is varied there can be many near matches Therefore an approach that simply homes in on a solution by finding successively better approximations will not work unless the starting guess for optical thickness is within approximately 1000 if the actual thickness FliLMeasure avoids homing in on a false solution by searching the entire acceptable thickness range to determine the thickness that gives the best possible match between the measured and calculated spectra The thickness range searched is determined by the initial guess for thickness together with the thickness constraint Since the time to find a solution is proportional to the range of thicknesses being searched it is beneficial to provide an initial guess for the thickness of the films to be measured F40 Hardware Operation The F40 performs two distinct functions data acquisition and data analysis Data analysis specifics are discussed in Software Overview In this section we describe how the F40 acquires accurate spect
119. the terms and conditions of this Agreement If you transfer the Software you must at the same time either transfer all copies including any prior versions in any form to the same party or destroy any copies not transferred RESTRICTIONS You may not use disclose distribute copy modify rent lease loan resell network or transfer the Software or any copy modification or merged portion thereof in whole or in part to any third party except as expressly specified in this Agreement You agree to provide reasonable security precautions to prevent unauthorized access to or use of the Software as proscribed herein You agree not to decompile reverse engineer disassemble or otherwise reduce the Software to a human perceivable form and you agree not to permit any person or entity to do so You shall not remove alter cover or obscure any confidentiality trade secret proprietary or copyright notices trademarks proprietary patent or other identifying marks or designs from any component of the Software and you shall reproduce and include in all copies of the Software the copyright notice s and proprietary legend s of Filmetrics and its licensors as they appear in the Software SOURCE CODE If source code to the Software was supplied to you then you may modify and use that source code in place of the executable version of the Software but no further rights to distribution or use are granted You acknowledge that you have no obligation to
120. tion is stored in this file spe This file can be opened in all versions of FiLMeasure csv This is acomma delimited file that can be opened directly in Excel txt This is a tab delimited file and can be opened with a text editor Save Screen to File Measure Tab only This command takes a screenshot of the FiLMeasure window Save n and K to files Measure Tab only This command is used to save the calculated n and k data to its own material file for use in the Edit Recipe gt Material list boxes All data is saved along with the corresponding wavelength data in comma delimited format Note This option is only present when optical constants are being solved for Export Recipe Recipes can be exported for use on other computers running FlLMeasure The exported file will also automatically include any material files required by the recipe To duplicate an analysis all that is needed is the exported recipe and the spectrum being analyzed Export Recipe for FiLMeasure 4 This command will convert a recipe for use with FlLMeasure 4 This will not include material files or recipe features only available in FILMeasure 7 Export Systeminfo File For certain upgrade purchases that can be done through software the user will be required to send the Systeminfo file to Filmetrics which can be exported using this command Edit Menu Edit Setup Acquire Help Material Library This menu allows access to the
121. tion regarding the data taken during the baseline routine Help gt About FiLMeasure Information about the hardware and software versions and the system serial number can be found here Please have this information available when calling Filmetrics for technical assistance FiLMeasure Version 7 1 8 Revision 1 Copyright 2013 Filmetrics Inc All rights reserved USB Int Version 1 0 37 0 Solver Version 6 8 9 FMimage Version 1 0 0 4 3560 Dunhill Street 100 San Diego CA 92121 858 573 9300 www Filmetrics com Hardware Information Software Registration see User Name Communication High Speed USB2 0 Company Name Mode FWRev 1 17 System S N none Register Software Help gt About FiLMeasure window Calibrating the Objective Since optics vary from microscope to microscope the objective lenses must be calibrated for optimal measurement performance For each objective lens that does not already have a calibration file select Add Edit Delete from the Objective Name pull down menu on the main screen of FiLMeasure u Add Edit Delete Objective Objective Name 10X Existing Objective Delete Edit Create New Objective Insert new objective before after currently selected objective Add The Add Edit Delete Objective Menu Box Here the user can delete or edit recalibrate the selected objective or add a new one Selecting Add will prompt th
122. tions available through the standard Windows File Menus File Menu Edit Menu Setup Menu Acquire Menu Help Menu File Menu Edit Setup Acquire Help Open Spectrum Ctrl O Open History Import Save Measured Spectrum Save Screen to File Export Page Setup Print Exit Open Spectrum Measure Tab only This command is used to open stored reflectance spectra which are then displayed and can be analyzed for film properties Open History Previously saved history data containing measurements and statistics can be loaded with this command Import Recipe To import recipes that were previously exported or created with an older version of FiLMeasure use this command Import Material Custom materials either created by the user or provided by Filmetrics can be imported using this command Import License When the user purchases an upgrade for the system Filmetrics will send a license file to the user The license must be imported into the software before upgrades are effective Save Measured Spectrum Measure Tab only This command is used to save spectra for export or later analysis All data is saved along with the corresponding wavelength data in comma delimited format Files can be saved in four different formats fmspe This file can only be opened in FiLMeasure 5 0 or greater and is the preferred way to save spectra Additional information from data acquisi
123. tive until terminated You may terminate it at any time by destroying the Software together with all copies modifications and merged portions in any form This Agreement will immediately and automatically terminate without notice if you fail to comply with any term or condition of this Agreement You agree upon termination to cease using and promptly destroy the Software and Licensed Revisions together with all copies in any form GOVERNMENT LICENSEE If you are acquiring the Software on behalf of any unit or agency of the United States Government the following provisions apply The Government acknowledges the licensor s representation that the Software and its documentation were developed at private expense and no part of them is in the public domain The Software is a commercial item as that term is defined at 48 C F R 2 101 OCT 1995 consisting of commercial computer software and commercial computer software documentation as such terms are used in 48 C F R 12 212 SEPT 1995 All U S Government licensees and end users acquire the Software with only those rights set forth herein EXPORT LAW ASSURANCES You acknowledge and agree that the Software is subject to restrictions and controls imposed by the United States Export Administration Act the Act and the regulations thereunder You agree and certify that neither the Software nor any direct product thereof is being or will be acquired shipped transferred or re exported dir
124. try for that user and create a newentry We recommend that you create a new supervisor level user and delete the filmsuper user for maximum security If all supervisor level users forget their passwords it will be necessary to re install the software and add all the users again Raw Signal Active Spectrometer Short Wavelength Spec 1 Only Long Wavelength Spec 2 Only Extended Range Both Specs Integration Time Short Long 40 ms 40 ms Apply Update Recipe Graph Limits 4372 32 0 one 1050 Raw Signal The Raw Signal dialog box allows the user to plot the raw no baseline corrections applied spectrometer signal on the main graph No spectral smoothing is applied and there are no saturation warnings This is useful when setting integration times manually Active Spectrometer For systems with multiple spectrometers EXR and UVX these radio buttons allow you to select between collecting data from the short wavelength long wavelength or both spectrometers Integration Time This sets the integration time ofthe spectrometer Clicking Update Recipe transfers the listed integration time to the current recipe Start Stop This button starts stops the acquisition of the spectrometer signal Graph Limits This allows the user to either manually set or autoscale the graph limits Options The Options menu allows the user to enable disable or modify several different settings wit
125. ts own active recipe startWavelength_nm Starting wavelength for spectrum analysis endWavelength_nm Ending wavelength for spectrum analysis Remarks Setting the wavelength range will also switch the recipe into using a specified wavelength range instead of using the entire wavelength range visible on the spectrum graph Return to Index SetMaterial Public Sub SetMaterial ByVal measChannelOrSystemGuid AsGuid ByVal layerNumber As Integer ByVal materialName As String Public Sub SetMaterial ByVal layerNumber As Integer ByVal materialName As String measChannelOrSystemGuid The GUID of the measurement channel or system If multiple measurement channels exist the measChannelOrSystemGuid must be specified since each measurement channel has its own active recipe layerNumber The layer number for which to modify the material materialName String containing name of the material Remarks You can alter the material of a layer in the current recipe using the method An exception will be thrown if the layer number is out of bounds or the material does not exist Return to Index SetN Public Sub SetN ByVal measChannelOrSystemGuid AsGuid ByVal layerNumber As Integer ByVal refractivelndex As Single Public Sub SetN ByVal layerNumber As Integer ByVal refractivelndex As Single measChannelOrSystemGuid The GUID of the measurement channel
126. ub SetRoughness ByVal layerNumber As Integer ByVal roughness nm As Single measChannelOrSystemGuid The GUID of the measurement channel or system If multiple measurement channels exist the measChannelOrSystemGuid must be specified since each measurement channel has its own active recipe layerNumber The layer number for which to modify the roughness roughness_nm Roughness value which will appear in the Layers tab of the recipe for the specified layer Units are nanometers Remarks You can alter the roughness of a layer in the current recipe using the method An exception will be thrown if the layer number or roughness are out of bounds Return to Index SetThickness Public Sub SetThickness ByVal measChannelOrSystemGuid As Guid ByVal layerNumber As Integer ByVal thickness _nm As Single Public Sub SetThickness ByVal layerNumber As Integer ByVal thickness nm As Single measChannelOrSystemGuid The GUID of the measurement channel or system If multiple measurement channels exist the measChannelOrSystemGuid must be specified since each measurement channel has its own active recipe layerNumber The layer number for which to modify the thickness thickness_nm Thickness value which will appear in the Layers tab of the recipe for the specified layer Units are nanometers Remarks You can alter the thickness of a layer in the current recip
127. ured and calculated spectra which is quantified by the GOF value GOF is a number between 0 and 1 A perfect match between measured and theoretical spectra will result in a GOF of 1 To ensure accurate results the user may set a minimum acceptable GOF value by entering a number between 0 and 1 into GOF Error on the Alarms Tab in the Edit Recipe dialog box Awarning message will be displayed after each measurement where the GOF falls below the user specified GOF Error If the GOF is less than 1 there are several possible causes as follows a Nonuniformity Any variation of layer thickness or presence of roughness within the measurement spot will result in a reduction in reflectance In severe cases the interference peaks may disappear entirely b Incorrect Structure Definition If the refractive index of one or more layers in the structure is different from what is described in the layer structure than there will be some mismatch between the blue curve and the red curve c Graded Interfaces The amplitude of the peaks in the spectrum depends on both the size of the change in refractive index at each interface in the layer structure and the sharpness of the interface For example in many hardcoat samples there is some degree of layer intermixing at the interface leading to a weaker than expected reflectance at that interface In severe cases the peaks may disappear entirely Window Menu Items This section describes the various func
128. ver cycles 35 Wavelength for n and k display 632 8 nm N Advanced Analysis Options for Spectrum Matching Convergence Criteria This sets the minimum GOF between the measured and calculated spectra that is attained before the measurement routines consider the solution final In most cases a value of 0 999 is sufficient For cases where the desired GOF is not attainable the value in the Maximum Iterations field limits the number of iterations performed by the analysis routine Solver Cycles This option will enable multiple solver cycles with the number of cycles being defined by the number entered in the text box When using this option the software will run through the model for a solution once and then try again starting from the solution previously found This can help find the best solution amongst a number of near best solutions which can be the case when solving for a large number of parameters several thicknesses and or refractive index A greater number of cycles will lead to a longer solving time however Display Details This feature controls the wavelength at which n and k are displayed in the Measurement Details portion of the main screen These values are only displayed if solving for n or k is selected in the Film Stack tab Gi SS Advanced Analysis Options Ex FFT Analysis Window No optimization Optimize Position Window Size Optimize Size Window Min Size Optimize Position and Size Adv
129. where this may be needed is the case where you wish to analyze a spectrum with two different measurement recipes and then add only the best result to the History Remarks Calling this function is equivalent to clicking the Measure button in FiLMeasure Note that if the Measure button is disabled when you call this function an exception will be thrown Return to Index NumberOfChannels Public ReadOnly Property NumberOfChannels As Integer Remarks Number of measurement channels that exist Return to Index NumberOfSpectrometers Public ReadOnly Property NumberOfSpectrometers ByVal measChannelGuid As Guid As Integer Public ReadOnly Property NumberOfSpectrometers ByVal measChannelGuid As Guid ByVal subsystemIndex As Integer As Integer measChannelGuid The GUID of the measurement channel subsystemIndex Thesubsystem index to specify which of multiple subsystems in the channel Remarks The number of spectrometers in the specified subsystem If subsystemIndex is not provided the default index 0 will be used Return to Index NumberOfSubSystems Public ReadOnly Property NumberOfSubSystems ByVal measChannelGuid As Guid As Integer measChannelGuid The GUID of the measurement channel Remarks The number of subsystems that compose the specified measurement channel Return to Index OpticsConfiguration Public Property OpticsConfiguration As OpticsCon
130. will attempt to scale the red curve but if there is more than one FFT peak present the scaling will only result in one correct peak height If you wish to view the impact of changing the refractive index of one or more layers simply change the refractive index in the Edit Recipe dialog box and click Analyze ReAnalyze If there is only a single layer you will notice that the GOF will change but the red curve should not change much If there are multiple layers in the structure you will notice that the relative peak heights in the red curve will change when you click Analyze c Graded Interfaces The amplitude of the peaks in the FFT spectrum depends on both the difference in refractive index at each interface in the layer structure and the sharpness of the interface In many common samples you will find that there is some degree of layer intermixing at the interface leading to a weaker than expected reflectance at that interface The FFT peak s associated with the intermixed interface will suffer a reduced amplitude and in severe cases the peaks may disappear entirely Making Measurements Accurate measurements with the F40 rely on using the proper measurement setup The basic steps for any F40 measurement are 1 Selecting and editing the type of film to be measured 2 Taking a Baseline measurement 3 Clicking on the Measure button to acquire and analyze the measured spectrum Each example below will take you through this sequence of step
131. ws the measurement results for the selected spectrum must be in Single Measurement mode 5 Displays the selected spectrum in Single Measurement mode 6 Displays statistics for allmeasurements included in the history file 7 This list contains all spectra currently included in the history file Right clicking anywhere is this box will allow the user to open the Edit Columns control panel Edit Recipe Window The Edit Recipe window is used to define the film stack and to set analysis and acquisition parameters Author Last Modified 2 19 2013 11 58 11 AM Composition Thickness Layer Nominal A Range Meas Refine via X Medium Air o 1 sio2 amp B X Substrate Si 1 These buttons allow you to in order from left to right i Open a saved recipe ii Start a new recipe ii Save the current settings iv Save the current settings as new recipe v Delete the current recipe 2 Opens a drop down list for quick access to saved recipes 3 Author as defined by user login name and recipe modification date is indicated here 4 Allows the user to select between the Film Stack Analysis Options Alarms and Acquisition Settings tabs 5 The desired thickness units are chosen here The choices include angstroms A 10e10 m nanometers nm 10e m kilo angstroms kA 10e m microns um 10e m microinches mils millimeters mm 10e 3 m and Custom U
132. ymbol indicates a potential shock hazard Areas marked with this symbol should be serviced by a trained service technician This symbol indicates that the product conforms to the WEEE Waste in Electrical and Electronic Equipment Directive 2002 96 EC This symbol indicates that the product meets the applicable EU safety health and environmental protection directive requirements FILMETRICS an Missvestccstcastcese www filmetrics com Model S N This label indicates the Model Number and Serial Number of the instrument This information may be necessary when contacting Filmetrics for assistance Disclaimer Use of this instrument in a manner inconsistent with the information and directions included in this manual may impair the protections designed into the product resulting in danger to the operator or damage to the instrument Installation Location When deciding on a location for the instrument ensure that the instrument in installed in a well ventilated location Enclosing the unit or blocking the vent holes may impair the performance of the instrument of damage the internal components Cleaning The need for periodic cleaning of the system is based on the cleanliness of the environment in which the system is installed Only the external surfaces are to be cleaned Cleaning and maintenance of all internal components is to be performed by a trained service technician Do not use aerosol or spray cleaners as they may c
133. ystemGuid is used to distinguish between multiple simultaneously connected measurement systems Examples of measurement systems with multiple measurement channels include the F32 and F37 Documentation for methods applying only to such measurement systems can be found in the Less Commonly Used Methods section In addition some methods will accept either a SystemGuid or a ChannelGuid Such methods thus will execute an operation either on a single channel or simultaneously on all channels of a system Note that the FIMeasResults object which is returned by the Measure and AnalyzeSpectrum methods has a large number of member functions and properties Since the names are all self explanatory we have not attempted to list all of the members here The reader should use the Object Browser which is built into Microsoft Visual Studio in order to discover the available properties and methods New Public Sub New ByVal showFILMeasureGUI As Boolean deprecated Public Sub New ByVal showFILMeasureGUI As Boolean ByRef theConstructorWarning As ConstructorWarning ByRef warningMessage As String deprecated Public Sub New ByVal guiType AsGraphicalUserInterfaceType ByVal guiStartupState AsGraphicallserInterfaceStartupState ByVal guiWindowStartupState AsFormWindowState ByRef theConstructorWarning AsConstructorWarning ByRef warningMessage As String guiType Determines if the FlRemote user interface and associated object

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