Turbomolecular Drag Pumps TMH 071 P TMU 071 P
Contents
1. Pin occupancy and remote plug functions Pin nr Input open low Input closed high on 24V pin 1 1 24 V 2 venting blocked see Section 3 5 venting released see Section 3 5 3 motor turbopump off motor turbopump on the turbopump is driven current flows through the motor coils 4 pumping station off pumping station on the turbopump is driven backing pump is started via the relay box 5 heating off heating on the heating is switched on once the rotation speed switchpoint is attained and off when the rotation speed switchpoint is unattained 5 reset by supplying a pulse T 2s with an amplitude of 24V a malfunction acknowledgement can be processed 6 standby off standby on pump is accelerated to 6696 of its nominal rotation speed 7 rotation speed setting mode off the rotation speed can be changed by feeding a PWM signal to this pin or via Serial Interface RS 485 see Section 4 7 Rotation Speed Setting Mode 8 Output low Output high rotation speed switchpoint not attained rotation speed switchpoint attained output can be loaded with 24 V 50 mA 9 Output low Output high Collective malfunction message malfunction free operations output can be loaded with 24 V 50 mA 10 Mass ground 11 Contact Output 1 Switchpoint attained contact 1 between pin 11 and pin 12 closed if the turbopump is above the switchpoint 12 Contact Output 1 Switchpoint attained 13 Cont2. 20610 50915 ul 9 qe1610J 2 VACUUM 21 E PFEIFFER 10 Spare Parts Pos Description Pieces Size Number Comments Ordering Quantity Spare parts TMH 071 P TMU 071 P Set of seals 1 PM 083 077 T 6 Rubber foot 4 P 3695 700 ZD 17 USIT ring 1 P 3529 133 A 90 Locking cover 1 PM 083 021 X 91 O ring 1 68 x3 P 4070 972 PV 92 Lubricant reservoir with 0 ring 93 1 PM 073 073 T Spare parts SSS FF 2 R 3 SS 5 di B 90 2222020 22 PFEIFFER VACUUM 11 Accessories Description Size Number Comments Order Quantity Operating Instructions Components for cooling Dirt trap R 3 8 P 4161 300 2R Recycled Water Cooling Unit TZK 400 230 V 50 Hz PM Z01 245 PM 800 369 BN Air cooling 24 VDC PM Z01 253 PM 800 543 BN Water cooling PM 016 000 T PM 800 546 BN Cooling unit for convection cooling PM 039 237 T Components for venting Venting Valve TVF 005 without current closed 24 VDC PM Z01 135 PM 800 507 BN Drying Unit TTV 001 PM Z00 121 PM 800 022 BN filled with zeolite Venting flange DN 10 ISO KF PM 033 737 T Components for heating Casing heating Water cooling required 230 V Schuko plug PM 041 900 T PM 800 542 BN 208 V UL plug PM 041 901 T PM 800 542 BN 115 V UL plug PM 041 902 T PM 800 542 BN Other accessor
3. Tradename Chemical name Danger class Precautions associated Action if spillage or human Product name Symbol with substance contact Manufacturer 1 2 3 4 5 5 Legally Binding Declaration hereby declare that the information supplied on this form is complete and accurate The despatch of equipment will be in accordance with the appropriate regulations covering Packaging Transportation and Labelling of Dangerous Substances Name of Organisation Address Post code Tel Fax Telex Name Job title Date Company stamp Legally binding signature 48 PFEIFFERE VACUUM VACUUM PFEIFFER Herstellererklarung Manufacturer s Declaration im Sinne folgender EU Richtlinien pursuant to the following EU directives Maschinen Machinery 98 37 EWG Anhang Annex ll B Elektromagnetische Vertraglichkeit Electromagnetic Compatibility 89 336 EWG Niederspannung Low Voltage 73 23 EWG Hiermit erkl ren wir da das unten aufgef hrte Produkt zum Einbau in eine Maschine bestimmt ist und da deren Inbetriebnahme so lange untersagt ist bis festgestellt wurde da das Endprodukt den Bestimmungen der EU Richtlinie 98 37 EWG entspricht Das unten aufgef hrte Produkt entspricht den Anforderungen der EU Richtlinien Maschinen 98 37EWG Elektromagnetische Vertraglichkeit 89 336 EWG und Niederspannung 73 23 EW
4. VENT C40 948 42a The maximum pressure at the venting valve is AUTION 2 1 5 bar absolute A Please refer to Operating Instructions PM 800 507 BN for details on Venting Valve TVF 005 3 6 Connecting The Casing Heating Unit The attainment of final pressures is accelerated when turbo pumps and vacuum chambers are baked out The heating duration is dependent on the degree of dirt and on the required final pressure level The heating duration should be at least 4 hours Where casing heating is involved the PLEASE NOTE turbopump must be water cooled High temperatures are generated when the tur WARNING bopump is baked out There is a danger of burns resulting from touching hot parts even after the casing heating has been switched off Ideally the heating sleeve and the pump casing should be insulated during installation Do not touch the heating sleeve and the pump casing during the baking out process Please refer to Operating Instructions PM 800 542 BN for details on the casing heating unit and its installation 3 7 Connecting The Sealing Gas Valve To protect the pump particularly where corrosive or dust pro ducing processes are involved it is necessary to use sealing gas Connection is made via the sealing gas valve please see Accessories Connecting the sealing
5. eere 23 Declaration of Contamination 24 Manufacturer s Declaration last page Please note Current operating instructions are available via www pfeiffer vacuum de under Infoservice 1 Safety Instructions t Read and follow all instructions in this manual t Inform yourself regarding Hazards which can be caused by the pump Hazards which can be caused by your system Hazards which can be caused by the media being pumped t Avoid exposing part of the body to vacuum t Observe the safety and accident prevention regulations t Regularly check that all accident prevention measures are being complied with t Do not operate the turbopump with open high vacuum flange t Do not carry out any unauthorised conversions or alterations to the turbopump with TC 600 t When returning the turbopump observe the shipping instructions t Use at least 4 bracket screws to connect the high vacuum flange ISO flange t The turbopump must be anchored in accordance with the installation instructions t Do not disconnect the plug between the TC 600 and accessory components during operations t Disconnect the voltage supply to the TC 600 before opening the turbopump t When working on the turbopump the high vacuum flange should only be opened once the rotor is at rest t When using sealing gas the pressure in the hose connec tion should be limited to 2 bar via th
6. general conditions of sale and supply If repairs are necessary please send the pump together with a short damage description to your nearest Pfeiffer Vacuum Service Center Contact Addresses And Telephone Hotline Contact addresses and telephone numbers can be found on the back cover of these operating instructions PFEIFFER VACUUM 19 9 Technical Data Feature Unit TMH 071 P TMH 071 P TMU 071 P Connection nominal diameter Inlet DN 40 ISO KF DN 63 ISO K DN 63 CF F Outlet DN 16 ISO KF G 1 4 DN 16 ISO KF G 1 4 DN 16 ISO KF G 1 4 Venting connection G 1 8 G 1 8 G 1 8 Nominal rotation speed Hz 1 min 1500 90 000 1500 90 000 1500 90 000 Standby rotation speed Hz 1 min 1000 60 000 1000 60 000 1000 60 000 Start up time min 2 2 2 Noise level dB A 45 45 lt 45 Final pressure backing pump mbar lt 10 lt 10 lt 10 Maximum permissible rotor temperature C 90 90 90 Permissible heat radiation power W 4 4 4 Volume flow rate for Nitrogen l s 33 60 60 Helium He l s 38 55 55 Hydrogen l s 39 45 45 Compression ratio for Na gt 1011 gt 1011 gt 1011 He 1 107 1 107 1 107 Hy gt 105 gt 105 gt 105 Maximum fore vacuum pressure for mbar 18 18 18 He mbar 17 17 17 H5 mbar 8 8 8 Maximum gas throughput 1 With water cooling mbar 1 5 1 1 1 1 1 1 He mbar l s 2 5 2 5 2 5 With air cooling 2 mbar l s 0 45 0 45 0 45 Maximum gas throughput at in
7. 20 PFEIFFER VACUUM 6 At maximum gas throughput 7 Protection class 54 is afforded for the Electronic Drive Unit TC 600 by retro fitting a cover plate Accessory to the TC 600 9 1 Dimensions Diagram TMH 071 P TMU 071 P Buioo23 OSI 9 3 OSI OV NA 5 50 9 NG Vio 31 05191 og 4 49 IIBER NE 84 01
8. materials in accordance with the Code of Federal Regulations CFR 49 Part 173 240 Definition and Preparation We will carry out the decontamination and invoice this work to you if you have not attached this note This also applies where the operator does not have the facilities to carry out the decontamination work Units which are contaminated microbiologically explosively or radioactively cannot be accepted as a matter of principle Fill Out The Declaration Of Contamination n every case the Declaration of Contamination must be completed diligently and truthfully A copy of the completed declaration must accompany the unit any additional copies must be sentto your local Pfeiffer Vacuum Service Center Please get in touch with your local Pfeiffer Vacuum represen tatives if there are any questions regarding contamination Decontaminate units before returning or possible disposal Do not return any units which are microbiologically explosively or radioactively contaminated WARNING Returning Contaminated Units If contaminated have to be returned for maintenance repair the following instructions concerning shipping must be followed Neutralise the pump by flushing with nitrogen or dry air Seal all openings to the air Seal pump or unit in suitable protective foil Ship units only in appropriate transport containers Repair orders are carried out according to our PLEASE NOTE
9. Either air or water cooling is necessary for operating the pump Where operations with convection cooling are involved a cooling unit must be used please see 3 2 Installing The Pump Connecting The High Vacuum Side PLEASE NOTE The utmost cleanliness must be observed when fitting all high vacuum parts Unclean 9 components prolong the pumping time Using the splinter shield The use of a splinter shield in the high vacuum flange protects the turbopump against foreign bodies coming from the vacuum chamber but does reduce the volume flow rate of the pump by approximately 1596 For fitting splinter shields please refer to Fitting the splinter shield The high vacuum side can be flanged onto the the vacuum chamber directly or via a Pfeiffer Vacuum bellows or a vibra tion compensator see Accessories Connecting via a bellows If the high vacuum side is to be flanged via a bellows the tur bopump must be secured for example via the holes on the underside of the turbopump must be secured for example via the holes on the underside of the pump The fastening must be able to withstand the torque referred to in Section 3 1 Connecting via a Pfeiffer Vacuum vibration compensator Where a Pfeiffer Vacuum vibration compensator is in use a freely suspended turbopump can be flanged onto the vacuum chamber Additional fastening is unnecessary The maximum permissible temperatur
10. 91 The lubricant reservoir is brought into the correct axial position with the locking cover Screw the rubber feet 6 back in 8 Service Do Make Use Of Our Service Facilities In the event that repairs are necessary a number of options are available to you to ensure any system down time is kept to a minimum Have the pump repaired on the spot by our Pfeiffer Vacuum Service Engineers Return the pump to the manufacturer for repairs Replace the pump Local Pfeiffer Vacuum representatives can provide full details Please take into account that where Pfeiffer CAUTION Vacuum Service replacement service is involved the standard operating parameters are always preset If your application requires different parameters please modify accordingly BEEN The turbopump and the Electronic Drive Unit TC 600 form a single unit and must therefore be returned complete for repair purposes Before returning the unit it should be ensured that the power unit is not the cause of the malfunction checking the power unit Before Returning Dismantle all accessories When the unit is free of harmful substances please attach a clearly visible notice Free of harmful substances both on the unit and also on the delivery note and any accompanying letters Harmful substances are substances and preparations as defined in the current local dangerous substances regulations in the U S A as
11. If the gas dependent maximum power is exceeded the rotation speed is reduced until equilibrium between the permissible power and gas friction is attained The power limitation serves to protect the pump against thermal over loading In order to avoid rotation speed fluctuations it is recommended to set in rotation speed setting mode the equilibrium frequency or a somewhat lower frequency PLEASENOTE There can be types of pump whereby there is no differentiation between the two gas modes settings Gas type characteristic line Power Run up D C Gas mode 0 B A Gas mode 1 Frequency fnom PFEIFFERE VACUUM 13 4 6 Shutting Down For Longer Periods If aggressive or hazardous gases are pumped there is a danger of personal injury resulting from coming into contact with process gases Before removing a turbopump from the system first WARNING Vent the turbopump with a neutral gas or dry air Ensure that there is no residual process gas in the system nor in the feeder lines If the turbopump is to be shut down for more than a year gt Remove turbopump from the system Change the lubricant reservoir see Section 7 1 Lubricant TL 011 should not be used when there have been no operations for 2 years PLEASE NOTE Close the high vacuum flange and evacuate the turbopump via the fore vacuum flange Vent turbopump via
12. Serial Interface RS 485 Corifie CHOIR ei es Connecting The RS 485 Connections Diagram aa 11 Operations Before Switching ON Switching ON seres Switching OFF And Venting sss 13 Operations With The DCU 001 DCU 100 13 Gas Type Dependent 5 13 Shutting Down For Longer Periods 14 Operations With The Remote Control Unit 14 Venting Release Optional Motor t re catis Pumping Station 15 Heating Reset 22 15 irn ote 15 Rotation Speed Setting Mode Via Input PWM essen 15 Switching Outputs sss 15 PFEIFFER VACUUM Page 5 Monitoring Operations 16 5 1 Operations Display Via 16 5 2 Turbopump Temperature Management 16 6 What To Do In Case Of Breakdowns 17 7 18 11 Replacing The Lubricant Reservoir 18 8 SOWICE siia nbi cain 19 9 Technical 20 9 1 Dimensions 22 21 10 Spare Par s atit 22 11 Accessories
13. rating plate Please use this list as an order form by taking a copy PFEIFFER VACUUM 23 Declaration of Contamination of Vacuum Equipment and Components The repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to accept any equipment without a declaration This declaration can only be completed and signed by authorised and qualified staff 1 Description of component Equipment type model Code No Serial No Invoice No Delivery Date 2 Reason for return 3 Equipment condition Has the equipment been used no O What type of pump oil was used yes I Is the equipment free from potentially harmful substances go to section 5 go to section 4 yes no 4 Process related contamination of equipment toxic corrosive yesO noo microbiological hazard yesO explosive yesO noo radioactive yesO no O other harmful substances yesO evidence of decontamination We will not accept delivery of any equipment that has been radioactively or microbiologically contaminated without written Please list all substances gases and by products which may have come into contact with the equipment
14. Betriebsanleitung Operating Instructions Turbomolecular Drag Pumps With Electronic Drive Unit TC 600 TMH 071 P TMU 071 P PM 0504 BE K 0601 PFEIFFER E VACUUM Index 1 1 1 2 2 1 22 3 1 32 33 3 4 3 5 3 6 3J 38 3 9 3 10 3 11 3 1 4 1 42 43 4 4 4 5 4 6 47 2 Safety Instructions 3 For Your Orientation Pictogram Definitions Understanding The Pumps TMH 071 P TMU 071 4 Main Features netten 4 Proper Use Improper Use Differences Between The Pump 4 Installation ierit 5 Preparations For 5 Installing The Pump Connecting The High Vacuum 1 5 Fitting The Splinter Shield 6 Connecting Fore Vacuum Side 6 Connecting The Cooling 7 Connecting The Venting 7 Connecting The Casing Heating 7 Connecting The Sealing Gas 7 Connecting The Electronic Drive Unit TC 600 8 Installing The Power Unit 8 Connecting The Remote Control Unit Connecting The
15. G We hereby certify that the product specified below is intended for installation in a machine which is forbidden to be put into operation until such time as it has been determined that the end product is in accordance with the provision of EU Directive 98 37 EEC The product specified below is in correspondence to the EU directives Machinery 98 37 EEC Electro magnetic Compatibility 89 336 EEC and EU Low Voltage 73 23 EEC Produkt Product TMH 071 P TMU 071 P Angewendete Richtlinien harmonisierte Normen und angewendete nationale Normen Guidelines harmonised standards national standards in which have been applied EN 292 1 EN 292 2 EN 294 EN 1012 2 EN 61010 Unterschrift Signature Pfeiffer Vacuum GmbH Berliner Str 43 KS 35614 Asslar Germany W Dondorf Gesch ftsf hrer Managing Director 1 2003 J Vacuum is nothing but everything to us Turbo Pumps Rotary Vane Vacuum Pumps Roots Pumps Dry Vacuum Pumps 9 0 Leak Test Units Valves Flanges Feedthroughs ji EQ Vacuum Measurement Gas Analysis System Technology Service NI O3 EE PFEIFFER VACUUM Pfeiffer Vacuum Technology AG Headquarters Germany Tel 49 0 64 41 8 02 0 Fax 49 0 64 41 8 02 2 02 info pfeiffer vacuum de www pfeiffer vacuum net
16. N 3 9 Installing The Power Unit Voltage may only be supplied with the Pfeiffer Vacuum power units Accessory The use of otherpower units requires the prior agreement of the manufacturer and equalization with the valid specification power unit specifications availa ble on request CAUTION Please refer to Operating Instructions PM 800 521 BN for details on Power Unit TPS 100 Connecting the TC 600 with Power Unit TPS 100 DCU 100 X1 Mains connection X2 Connection power unit X4 Connection TC 600 51 ON OFF switch 8 Electronic Drive Unit TC 600 8a Connecting cable TC 600 TPS DCU 8b Screw 8c Screw with tooth lock 3 pieces 8d Remote plug 105 Power unit S1 105 8d 8 PFEIFFER E VACUUM 3 10 Connecting The Remote Control Unit Remote control options for various functions are provided with Pin occupancy remote plug the connection REMOTE on the TC 600 via the 15 pole D Sub Connector Shielded cable must be used Shielding is on the plug side of the TC 600 connected to the TC casing The inputs 2 6 are activated by connecting them to the 24 V 15 on pin 1 active high please see 3 12 Connection Diagram Pin occupancy and remote plug functions please see following table CAUTION is started On delivery mating plug When connecting supply voltage the turbopump Pin 1 Pin 2 Pin 3 and Pin 4 are bridged in the
17. Remote plug High vacuum flange Fore vacuum flange Venting Valve Rubber feet Electronic Drive Unit TC 600 Cooling Enhanced convection cooling with cooling unit accessory air cooling accessory or water cooling accessory Integrated protective measures against excess temperatures The Electronic Drive Unit TC 600 reduces the rotor rotation speed Bearings High vacuum side Wear free permanent magnetic bearing Fore vacuum side Oil circulatory lubricated ball bearing with ceramic balls Proper Use 4 Turbomolecular Pumps 071 P TMU 071 P may only be used for the purpose of generating vacuum The turbopumps may only be used to pump those media against which they are chemically resistant For other media the operator is required to qualify the pumps for the processes involved PFEIFFER amp VACUUM Ifthe process produces dust the maintenance intervals must be specified accordingly and sealing gas must be used The turbopump must be connected to a backing pump accordance with Section 3 3 Only Pfeiffer Vacuum power units may be used to operate the TC 600 The use of other power units requires the prior agreement of the manufacturer and equalization with the valid specification The pumps may only be operated providing the ambient conditions in compliance with Protection Type IP 30 are observed Improper Use The following is regarded inter alia as impro
18. T 0030 BN for details on the relay box backing pump and its installation 3 4 Connecting The Cooling Unit Turbopumps TMH 071 P TMU 071 P can optionally be provided with enhanced convection cooling air cooling or water cooling The turbopumps must be operated with air or water cooling where the fore vacuum pressure is increased 0 1 mbar and or operations with gas loads Use and installation For water cooling please refer to Operating Instructions PM 800 546 BN For air cooling please refer to Operating Instructions PM 800 543 BN Permissible installation positions for the cooling unit where convection cooling is involved please see Section 9 1 Dimensions Diagram 3 5 Connecting The Venting Valve The Venting Valve TVF 005 provides automatic venting in the event of a power failure and switching off Fitting the venting valve Unscrew the venting screw from the venting connection of the turbopump Screw in venting valve 42 with seal USIT ring on hexago nal SW 14 Electrical connection Plug control lead 42a into the connection VENT of the TC 600 8 on the turbopump The venting mode of the venting valve is selected via the DCU or Serial Interface RS 485 Connecting the venting valve 8 Electronic Drive Unit TC 600 42 Venting valve TVF 005 42a Control lead venting valve TC 600 42b Plug 42b ISSSCRESESE 42
19. act Output 2 Collective malfunction message contact 1 between pin 13 and pin 14 open in the event of a collective malfunction 14 Contact Output 2 Collective malfunction message 15 Analog output rotation speed proportional output voltage 0 10 VDC 0 100 fend load R 2 10 KQ 1 The following technical data is applicable for the contacts U max 50 VDC Imax 1A PFEIFFER VACUUM 9 3 11 Connecting The Serial Interface RS 485 An external operating component DCU 001 DCU 100 or an external computer can be connected via the connection RS 485 on the TC 600 with the use of a shielded 8 pole modular connecting cable contained with the delivery Connecting the Serial Interface RS 485 External computer or DCU 100 with power unit RS 485 or DCU 001 without power unit The serial interface is galvanically and safely separated from the maximum supply voltage from the TC 600 Connection Designation Value Serial interface type RS 485 Baud rate 9600 Baud Data file word length 8 bit Parity no parity Start bits 1 Stop bits 1 2 The electrical connections in the TC 600 are optically decoupled RS 485 Pin Occupancy 1 not connected 2 24 V output loadable with 210 mA 3 not connected 4 not connected 1 8 5 RS 485 D DO RI 6 View from 7 RS 485 D DO RI the plug side 8 not connected of the TC 600 PLEASENOTE It
20. ct TC 600 Reduction in the voltage in the cable Check power unit feeder line Check voltage on the power unit 24 V DC at connection X2 Supply correct operations voltage Connect pins 1 3 and 1 4 on the remote plug Check plug contacts on the power unit Inform Pfeiffer Vacuum Service of need for repair Use suitable cable Pump doesn t attain nominal rotation speed within the set run up time Pump cuts out during operations Pump doesn t attain final pressure Fore vacuum pressure too high Leak or too much gas Rotor sluggish caused by defective bearing TC run up time too short Thermal overloading caused by Water flow insufficient nsufficient air supply Fore vacuum pressure too high Ambienttemperature too high Pump dirty Leak in vacuum chamber Check backing pump function Check seals Seek leak and repair Reduce supply of process gas Check bearing noises Inform Pfeiffer Vacuum Service Set longer start up time with the DCU or PC Ensure free flow Ensure adequate air supply Reduce fore vacuum pressure Reduce ambient temperature Bake out pump If seriously contaminated Request Pfeiffer Vacuum Service to clean Seek leak starting with vacuum chamber lines or pump Repair leak Unusual operating noises Bearing damaged Inform Pfeiffer Vacuum Service of need for repair Rotor damaged nform Pfeiffer Vacuum Service of need for repair Splinter shield if fitted Check
21. e at the CAUTION vibration compensator is 100 A PFEIFFER VACUUM 5 Directly flanging the pump The turbopump can be flanged onto the vacuum chamber vertically 09 up to an angle of 90 maximum The fore vacuum flange must always point downwards CAUTION Permissible installation positions for the turbopump 11 Vacuum chamber CAUTION The maximum loading capacity of the high vacu um flange is 200 N equivalent to 20 kg Assymetric loading on the high vacuum flange must be avoided With horizontal pump installation and oil sealed backing pumps e g rotary vane pumps the fore vacuum flange of the turbopump must be aligned vertically downwards maximum deviation 20 otherwise the turbopump could become dirty Installation position with oil sealed backing pump CAUSION forces from the piping system must be allowed to act on the pump where turbopumps are anchored Suspend or support all pipes to the pump 6 PFEIFFER VACUUM Fitting The Splinter Shield Insert the splinter shield in the high vacuum flange in such a way that the corrugation of the strainer points outwards DN 63 Bend the clamping lugs slightly outwards so that subsequently the splinter shield is seated firmly in the high vacuum flange to avoid noise Insert the splinter shield in the high vacuum
22. e overpressure valve c f a heater is in use temperatures of up to 120 C can be present in the area of the high vacuum flange Take care to avoid burns t During operations temperatures of up to 65 C can arise in the lower part of the turbopump Take care to avoid burns t Keep leads and cables well away from hot surfaces 70 C t Operate the turbopump with TC 600 only in conjunction with the relevant power unit accessory t The unit has been accredited protection class IP 30 When the unit is operated in environments which require other protection classes the necessary measures must be taken Protection class IP 54 is afforded by retro fitting a cover plate Accessory to the TC 600 t The mains connection must be subject to a safe connection to the PE protection class 1 t f the turbopump and the TC 600 are operated independently of each other only permissible with the agreement of the manufacturer the turbopump must be connected to the PE t The turbopump and the TC 600 must only be disconnected from each other when the turbopump is completely at rest and the TC 600 has been disconnected from the power supply The cause of any operating voltage leakage to earth red LED flashes must be eliminated to avoid the danger of an electric shock Modifications reserved 1 1 For Your rientation Instruction in the text Working instruction here you have to do something Symbols used The follow
23. ed at least once a year Where extreme operating conditions or unclean processes are involved the replacement interval should be checked with your Pfeiffer Vacuum Service Center Switch off the turbopump vent to atmospheric pressure see Section 4 3 and allow to cool as necessary f necessary remove the turbopump from the system Unscrew rubber feet 6 from the underside of the pump Remove the locking cover 90 on the underside of the pump with adjustable pin type face wrench E order number N 5709 103 take care with the O ring 91 ever out the lubricant reservoir 92 with the help of two screwdrivers Lubricant reservoir can contain toxic substances from the medium pumped Lubricant must be disposed of in accordance with the respective regulations Safety instructions data sheet for the lubricant on request WARNING 18 PFEIFFERE VACUUM Remove locking cover and extract lubricant reservoir 6 Rubber feet 4x 90 Locking cover 91 O ring 92 Lubricant reservoir 93 O ring E Adjustable pin type face wrench 5 40 942 4 lean off any dirt on the pump and locking cover with a clean fluff free cloth Insert new lubricant reservoir 92 up to the O ring 93 in the pump The lubricant reservoir 92 is already filled with CAUTION lubricant TL 011 do not add additional lubricant Screw in locking cover 90 with O ring
24. flange while pressing the clamping lugs slightly inwards Press the outer ring of the splinter shield up to the limit stop point in the high vacuum flange DN 40 Insert the splinter shield up to the limit stop point in the high vacuum flange bend not the clamping lugs outwards Inserting the splinter shield 12 Splinter shield 12a Clamping lug 12 3 3 Connecting The Fore Vacuum Side Backing pump Vacuum pressure lt 10 mbar with enhanced convection cooling 0 1 mbar Recommendation Oil Free Diaphragm Pump or Rotary Vane Vacuum Pumps from the Pfeiffer Vacuum range note installation position turbopump see Section 3 2 Connecting the backing pump All connections of the fore vacuum line with the usual small flange components or hose screw connections Be sure to conduct away the exhaust gases pum from the backing pump Do not reduce the free cross section of the fore vacuum flange with following components WARNING The exhausted process gases and vapours can represent a health hazard and can also be envi ronmentally damaging Comply with all the gas manufacture s safety instructions With rigid pipe connections fit a bellows in the connecting line to reduce vibration The electrical connection of the backing pump is made via a relay box whose control line is connected to FV PUMP on the TC 600 Please refer to Operating Instructions P
25. front panel of the TC 600 The following operations modes are displayed LED Cause green red Glows Power unit OK Function pumping stati on ON carried out Flashes short Power unit OK 1 12s active Pumping station OFF Blinks Mains power supply failure 1 2s active Glows Collective malfunction for example run up time error over temperature turbopump or TC 600 Switching output 2 active low Blinks Warning 1 2s active e g supply voltage short circuit to earth mains power failure Differentiated malfunction and warning signals PLEASE NOTE are only possible with the use of the DCU 16 PFEIFFERE VACUUM 5 2 Turbopump Temperature Management Where impermissible motor temperatures are involved or the temperature of the casing is too high the motor current is reduced This can lead to dipping below the set rotation speed switch point and results in the turbomolecular pump being switched off LED on the TC 600 glows red Collective malfunction 6 What Do In Case Of Breakdowns Problem Possible Causes Remedy Pump doesn t start Power supply interrupted Checkfuse in the power pack unit None of the integrated LEDs Check plug contacts on the mains glow on the TC 600 power unit Incorrect operations voltage supplied Pins 1 3 and 1 4 on the remote plug not connected No supply of operations voltage Defe
26. gas valve 9 Locking screw sealing gas connection 15 Dichtung 66 Sperrgasventil 66a Dichtung Please refer to Operating Instructions PM 800 229 BN for details on installing the sealing gas valve and adjusting the sealing gas flow PFEIFFER VACUUM 7 38 Connecting The Electronic Drive Unit TC 600 The turbopump and the Electronic Drive Unit TC 600 are connected and together form a single unit Connecting cable 8a has to be ordered separately see Accessories PLEASE NOTE Unscrew screw with tooth lock 8c from the TC 600 above the connection X4 Plug the plug X4 on connecting cable 8a into the connec tion X4 on the TC 600 and screw in screw 8b Secure plug X4 on the TC 600 with a screw and tooth lock 8c Connect plug X2 on connecting cable 8a with power unit TPS 100 DCU 100 Accessories on connection X2 Using screws and toothlock 8c two pieces included with the cable consigment secure plug X2 to power unit 105 Once operations voltage has been supplied the TC 600 performs a self test on the supply voltage The supply voltage for Turbomolecular Pumps TMH 071 P TMU 071 P is 24 VDC 5 accordance with EN 60 742 CAUTION If the turbopump is being operated with the Operations And Display Unit DCU 001 100 remote plug 8d should be disconnected Connection should be carried out in accor dance with Operating Instructions PM 800 477 B
27. ies Connecting cable TC 600 TPS DCU 3m PM 051 103 T Other lengths on request power unit TPS 100 for fitting to walls or standard runners PM 041 827 T PM 800 521 BN TPS 100 19 insert unit PM 041 828 T PM 800 521 BN DCU 100 19 insert unit with Operating and Display Control Unit DCU PM C01 694 PM 800 477 BN Mains cable Schuko plug 230 V P 4564 309 ZA UL plug 208 V P 4564 309 ZF UL plug 115V P 4564 309 ZE Operating and Display Control Unit DCU 001 PM 041 816 T PM 800 477 BN Relay box backing pump 90 265 V 5 A PM 041 937 AT PT 0030 BN 90 265 V 20 A PM 041 938 T PT 0030 BN PWM adapter box PM 051 028 U PM 800 563 BN Level Converter RS 232 485 PM 051 054 X PM 800 549 BN Cover plate for TC 600 IP 54 PM 051 327 T PT 0024 BN Profibus DP gateway TIC 250 PM 051 257 T PM 800 599 BN Vibration compensator TMH DN 63 ISO K PM 006 800 X TMH DN 40 ISO KF PM 006 799 X TMU DN 63 CF F PM 006 801 X Splinter shield DN 40 ISO KF PM 006 375 X DN 63 ISO K PM 006 376 X Protective grill DN 63 ISO K PM 006 597 R Sealing ring TMH DN 63 ISO K PF 303 106 T seal 10 pieces DN 63 CF PF 501 406 T Set of screws TMU DN 63 CF PF 505 002 T Sealing gas valve PM Z01 142 PM 800 229 BN Hose nipple for the sealing gas valve DN 16 ISO KF 10 PF 144 020 When ordering accessories and spare parts please be sure to state the full part number When ordering spare parts please state additionally the unit type and unit number see
28. ing symbols are used throughout in all illustrations D High vacuum flange Fore vacuum flange e Venting connection e Cooling water connection Air cooling Electric connection Sealing gas connection Abbreviations used DCU Display and operating unit TC drive unit turbopump TPS Power unit Position numbers The same pump and accessory parts have the same position numbers in all illustrations 1 2 Pictogram Definitions Warning danger of burns from touching hot parts WARNING WARNING Warning danger of personal injury Caution danger of damage the pump or to CAUTION the system WARNING Warning danger of injury from rotating parts e PLEASE NOTE Please note attention to particulary important information 9 on the product handling the product or to particular part of the documentation PFEIFFER VACUUM 3 2 Understanding The Pumps TMH 071 P TMU 071 P 2 1 Main Features Turbopumps TMH 071 P TMU 071 P with the TC 600 form a complete unit Voltage is supplied by the power unit see Accessories PLEASE NOTE On delivery the pumps have been set up for operations in remote mode Remote plug 8d should therefore be disconnected if operations with the DCU are required Turbomolecular Drag Pump TMH 071 P TMU 071 P coc d
29. ion gt Ir RS 485 DO RI I y EN nc FEE 24 VDC max 50 mA J mi Venting release C miI Motor turbopump 1 ane lt S contact current max Heating Reset REMOTE m Standby UNE E S PWM ON touch relation 25 75 a 9 Switching output 1 24 VDC max 50 mA p Switching output 2 24 VDC max 50 mA qt GND 12 Contact output 1 switching point Ed un Contact output 2 collective malfunction lt Analog output 0 10 VDC 0 100 fend R 10 ky 1 m Relay box 1 2 Mains input heating 115 208 230 VAC HEAT TMS lt 2 5 SS SS SS Se TA Bm T Mr L HEATING lem po TTL ________ 13 VENTING VALVE VENT IER TEE ams ps X TVF005 15 MN MEME GE m Relay box Mains input pumping station 115 208 230 VAC PE FV PUMP m 5 Connection pumping station Pumping station imax 16A Mains input power unit 90 132 185 265 VAC TPS XXX DCU XXX PFEIFFER VACUUM 11 4 Operations 4 1 Before Switching Sections 4 1 to 4 3 refer only to operating the pump in its condition on delivery without the DCU operating unit The bridges venting release motor TMP ON and pumping station ON are fitted in the re
30. is possible to connect an RS 232 e g PC via a level converter please see Accessories 10 PFEIFFERE vacuum Connecting The RS 485 Connection to a fixed bus system Connect all units with D pin 5 RS 485 and D pin 7 RS 485 to the bus The bus must be closed at both ends The connections should be made in accordance with the specification of the Serial Interface RS 485 2 1 2 All units connected to the bus must have differing serial interface addresses parameter 797 The group address of the TC 600 is 960 Only SELV may be connected to the Serial Interface RS 485 A All switched on remote functions have priority over the serial interface functions Please refer to Operating Instructions PM 800 488 BN for detailed operating 9 procedures electrical data respect of PLEASE NOTE the Serial Interface RS 485 Profibus DP Gateway TIC 250 is available accessory for connecting an Electronic Drive Unit TC 600 to a Profibus DP Please refer to the respective Operating Instructins PM 800 599 BN for detailed information on the operation of the TIC 250 3 12 Connections Diagram TC 600 2 3 m 24 VDC max 200 mA supply voltage DCU EN nc TA RS 485 T2 im RS 485 DO RI 18x ER GND mass connect
31. mote control plug Turbopump rotors rotate at high speed When the high vacuum flange is open there is a danger of injury and of damage to the pump caused by objects falling into the pump Therefore never operate the pump with open high vacuum flange WARNING Gi With water cooling Open cooling water supply and check flow Plug connecting cable 8a Accessory into the TC 600 and connect with Power Unit TPS 100 on X2 please see Section 3 8 Please note The following pre settings have been programmed Running up time 8 min Rotation speed switchpoint 80 Automatic venting 50 These settings can only be altered via Serial Interface RS 485 DCU or PCJ please refer to the respective operating instructions 12 PFEIFFER VACUUM 42 Switching ON Switch on the turbopump with switch S1 on the power unit With air cooling the cooling fan is also switched on via Electronic Drive Unit TC 600 Once the self test has been successfully completed on the TC 600 duration approximately 10 seconds both the turbopump and the backing pump if connected begin operating Rear panel TPS 100 51 ON OFF switch X1 Mains connection S1 X2 Connection TC 600 F1 Fuse F2 Fuse F1 X1 F2 X2 WARNING Take care when pumping hazardous gases and observe the safety precautions of the gas manufacturer 4 3 Switching OFF And Venting Before coming to rest after
32. nput PWM The supply of pulse width modulated signals PWM with a ground frequency of 100 Hz 20 with an amplitude of maximum 24 V and a key ratio of 25 75 enables the rotation speed to be set in the range 20 100 of the nominal rotation speed A 20 100 na 33V min 13V max 7V min 33V 25 75 PWM T pwm 10ms 122095 fpwm 7100Hz 1 20 If no signal is present the pump accelerates to its final rotation speed A PWM adapter box for rotation speed setting operations for the turbopump is available as an option please see Accessories Switching Outputs Switching outputs 1 and 2 can be loaded with a maximum 24 V 50 mA per output The following functions are assigned to the switching outputs Switching output 1 Active high when the rotation speed switchpoint is attained The switchpoint for the turbopump is set at 8096 of the nominal rotation speed It can be used for example for a message pump ready to operate Switching output 2 Active low with a malfunction collective malfunction message The connection of a relay is made between pin 10 mass and the respective switching output pin 8 or pin 9 see Section 3 12 Connections Diagram PFEIFFER VACUUM 15 5 Monitoring Operations 5 1 Operations Display Via LED Certain operations modes of the turbopump and the TC 600 can be ascertained via the two integrated LEDs located on the
33. per The pumping of explosive or corrosive gases Operating the pumps in areas where there is a danger of explosion The pumping of gases and vapours which attack the mate rials of the pumps The pumping of corrosive gases without sealing gas The pumping of condensating vapours Operations involving impermissibly high levels of gas loads Operations with improper gas modes Operations involving too high levels of heat radiation power see Section 9 Technical Data Operations without the use of cooling equipment Operating the pump in environments which require a pro tection class superior to IP 30 The use of other power units or accessories which are not named in this manual or which have not been agreed by the manufacturer The connection to power units with earthing of a direct voltage pole Improper use will cause all claims for liability and guarantees to be forfeited 2 2 Differences Between The Pump Types Feature TMH 071 P TMU 071 P High vacuum flange ISO KF ISO K CF F High vacuum seal Elastomer Metal Attainable final lt 1 1077 mbar 5 1071 mbar pressure without baking out with baking out Abbreviations on the type of the pump Suffix P Purge gas connection for the prevention of the ingress of aggressive gases into the motor and bearing arena 3 Installation 3 1 Preparations For Installation Do not carry out any
34. r to Section 2 1 should be disconnected PLEASE NOTE 4 5 Gas Type Dependent Operations Water cooling is required if the pumps are to be CAUTION operated with gas load A Where high level gas loads and rotation speeds are involved the resulting friction subjects the rotor to the effect of great heat To avoid over heating a power rotation speed characteristic line is implemented in the TC 600 this ensures that where maximum gas loads are involved the pump will operate at any rotation speed without the danger of damage arising The maximum power is dependent on the type of gas Two characteristic lines are available for any type of gas in order to fully exploit the power potential of the pump Gas Mode 0 for gases with molecular mass gt 40 as for example Argon Gas Mode 1 for all lighter gases Works setting Gas Mode 0 Set the applicable gas mode on the TC 600 via the DCU please refer to Operating Instructions Pumping operations with The DCU PM 800 547 BN A WARNING Pumping gases with molecular mass 2 40 with the incorrect gas mode can cause damage to N the pump For the vertex ofthe power characteristic line please refer to Section 9 Technical Data Maximum power is applied when the pump starts in order to limit the time required Once the set rotation speed is attained switching to the selected power characteristic line is automatic
35. seat of splinter shield not seated firmly see Section 3 2 Red LED on the TC 600 glows Collective malfunction Reset via mains OFF ON or remote pin 5 Different malfunction display with the DCU possible 1 Red LED on the TC 600 flashes Warning through Mains power failure Supply voltage short circuitto earth Wrong setting for nominal rotation speed Parameter 777 Different warning message with the DCU possible 1 Check power unit voltage Check power unit mains connection Check powver unit voltage for short circuit to earth Enter 1500 Hz for parameter 777 see operating instruction PM 0547 BN Pumping Operations With DCU If there is no DCU HPU available contact Pfeiffer Vacuum Service 1 Without a DCU inform Pfeiffer Vacuum Service to check the cause of trouble PFEIFFER VACUUM 17 7 Maintenance Vo liability for personal injury nor material damage will be accepted for damages and operational interruptions which have been caused by improper maintenance in addition all guarantees become invalid PLEASE NOTE Youcan change the lubricant reservoir yourself please see Section 7 1 Please contact your local Pfeiffer Vacuum service for all other maintenance and service work CAUTION Apply no mechanical stress to the TC 600 7 1 Replacing The Lubricant Reservoir The lubricant reservoir should be replac
36. switching off the turbopump must be vented in order to prevent contamination Close the fore vacuum Switch off the turbopump with switch S1 on the power unit Venting There are three possibilities to vent turbopump Manual venting Open the venting screw on delivery screwed in on the venting connection about one turn Venting with the Venting Valve TVF 005 accessories Venting release via the remote control please see Section 4 7 or via the serial interface which is selectable via DCU or interface see Operating Instructions Pumping Operations With The DCU PM 800 547 BN Venting in two stages when the vacuum chamber should be vented as quickly as possible First stage venting with a pressure increase rate of 15 mbar s for 20 seconds Second stage venting with an optionally large venting valve The valve cross section for a venting rate of 15 mbar s must be compatible with the size of the vacuum chamber Where small vacuum chambers are involved the Pfeiffer Vacuum Venting Valve TVF 005 can be used for first stage venting Shut off water supply if installed 4 4 Operations With The DCU 001 DCU 100 Operations with the DCU 001 or DCU 100 should be carried out in accordance with the relevant Operating Instructions PM 800 477 BN DCU description and PM 800 547 BN operating the pump with the DCU Where operations with the DCU are involved the remote plug 8d on the TC 600 please refe
37. take pressure of 0 1 mbar 3 With water cooling 1 5 2 2 22 2 2 mbar l s 2 6 2 6 2 6 H2 mbar 1 5 2 2 2 Vertex power characteristics line A W Hz 80 1500 80 1500 80 1500 B W Hz 80 1500 80 1500 80 1500 C W Hz 60 1500 60 1500 60 1500 D W Hz 80 1300 80 1300 80 1300 Final pressure 5 With rotary vane pumps mbar lt 1 107 1 107 5 10 10 With diaphragm pumps mbar 1 107 1 107 1 1078 Lubricant 011 011 011 Maximum cooling water consumption with water at 15 C 6 l h 100 100 100 Cooling water temperature C 5 25 5 25 5 25 Permissible ambient temperature with air cooling C 0 35 0 35 0 35 Heating power consumption W 32 32 32 Weight kg 2 8 2 8 3 5 Permissible magnetic field mT 3 3 3 Operating voltage VDC 24 5 24 5 24 5 Duration max current consumption A 4 1 4 6 4 1 4 6 4 1 4 6 Duration 9 max power W 100 110 100 110 100 110 Fuse internal T8A 250 T8A 250 T8A 250 Protection class IP 30 IP 30 IP 30 Relative humidity 5 85 non condensing 5 85 non condensing 5 85 non condensing 1 Until frequency fall off higher gas throughputs with reduced rotation speed 2 Until ambient temperature 30 C 3 Rotation speed of pump may drop below the nominal rotation speed 4 For gas characteristic lines please refer to Section 4 5 5 In accordance with German Industrial Standard 28428 the final pressure which is attained in a measuring dome 48 hours after baking out
38. the venting connection with nitrogen or dry air Close fore vacuum and venting connection by blank flan ging Place the pump vertically on its rubber feet n rooms with moist or aggressive atmospheres the turbopump must be air sealed in a plastic bag together with a bag of dessicant e g silicagel If the pump has been shut down for 3 years the bearing must be changed please contact Pfeiffer Vacuum Service PLEASE NOTE 14 PFEIFFERE VACUUM 4 7 Operations With The Remote Control Unit Remote control operations can be performed via the connection with the designation REMOTE on the TC 600 For pin occupancy and remote plug functions please refer to the table in Section 3 10 Inputs 2 6 are activated if they are connected with the 24 V on pin 1 active high please see Section 3 12 Connections Diagram On delivery there is a bridge between Pin 1 Pin 2 Pin 3 and Pin 4 on the TC 600 mating plug Once operating voltage has been supplied and on successful completion of the self test on the TC 600 the turbopump and any possible connected backing pump is started CAUTION Venting Release Optional Automatic venting Venting Switch off Mains power failure 1 frequency the pumping station 750 Hz venting valve opens venting valve opens correspond to 50 for 150 msat4s for 150 ms at4s ofthe final rotation intervals intervals speed lt 500 H
39. unauthorised conversions or alterations to the turbopump The operator must ensure that the TC 600 is inte grated into an emergency safety circuit The supply voltage of the TC 600 must be interrupted when releasing the emergency safety condition For special requirements please contact Pfeiffer Vacuum WARNING The maximum permissible rotor temperature of the pump is 80 C If the vacuum chamber or parts in the vacuum chamber are heated must be fitted if necessary suitable shielding in the vacuum chamber before the turbopump constructional suggestions available on request The temperature of the high vacuum flange may not exeed 120 C Only remove the blank flange from the high and fore vacu um side immediately before connection On Turbopumps TMH 071 P TMU 071 P the lubricant reser voir is already fitted and filled Where magnetic fields of 3 mT are involved suitable shielding must be provided available on request fthe pump is baked out the heating sleeve and the body of the pump must be insulated to prevent burns from accidental contact Inthe event of a sudden standstill of the rotor torques of up to 330 Nm can arise and these must be taken up by the turbopump and frame Pumps must be anchored as follows 150 flange with 4 bracket screws or CFflange with the complete set of M8 screws or Underside of the pump with 4 screws M5 screws quality 8 8
40. z venting valve opens venting valve opens as for 3600 s works setting long as sufficient energy is generated by the turbopump 1 When mains power is restored the venting procedure is interrupted Venting blocked Venting does not take place Other venting modes Other venting modes can be selected via the DCU Motor Turbopump When the pumping station is switched on and once the self test has been successfully completed duration approximate ly 10 seconds the turbopump is set in operation During operations the turbopump can be switched on and off while the pumping station is switched on Thereby the turbopump will not be vented Pumping Station Any connected pumping station components are started up e g backing pump venting valve air cooling and with simul taneous activation of the input motor turbopump the turbopump is set in operation once the self test has been successfully completed duration approximately 10 seconds Heating Reset Heating optional Once the rotation speed switchpoint is attained the heating unit is switched on when the rotation speed switchpoint is fallen below the heating unit is switched off Reset The heating input has two functions please see Section 3 10 point 5 Reset Standby The pump can be operated optionally at 6696 of its nominal rotation speed standby ON or at its nominal rotation speed standby OFF Rotation Speed Setting Mode Via I
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