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User Guide for QuickHnery (Ver. 1.0)

1. Y coordinate for node 1 See figure 1 for pictorial description for vertical orientation And see figure 2 for pictorial description for horizontal orientation x2 cord X coordinate for node 2 See figure 1 for pictorial description for vertical orientation And see figure 2 for pictorial description for horizontal orientation y2 cord Y coordinate for node 2 See figure 1 for pictorial description for vertical orientation And see figure 2 for pictorial description for horizontal orientation layer M 1 2 Layer of conductor w width Width of the conductor vih Orientation of the conductor v means vertical h means horizontal Comment Also anything starting with is treated as a comment line A typical input file example Ptestl al xl le 6 1 4 6 2 1 006 y2 24e 6 layer M6 w 0 6e 6 v 2 2 Instruction for running the program fext lt input file gt lt spice file name gt t tech_file Switch N number of conductor L K number of conductor optional R increse 3DK number of conductor optional R increase 3DL LWIN number of conductor optional R increase INV_K number of conductor optional R increase switch description L Full L extraction N K method next neighbor search for sorted dimension K method nearest neighbor search 3DK 3D K method nearest neig
2. 1 0 x2 11 6e 006 y2 90e 6 layer M6 w 1e 6 v Ptest12 a12 b12 x1 51 3e 6 0 x2 51 3e 6 y2 70e 6 layer M6 w le 6 in layer M7 horizontal orientation Ptest13 a13 b13 x1 0 yl 12e 6 2 200 6 y2 12e 6 layer M7 w le 6 h Ptest14 14 b14 x1 0 1 22 6 x2 200e 6 2 22 6 layer M7 w le 6 h COMMAND 3D full L method fext 3D_test txt 3D_test sp 3DL OUTPUT 3D full L method Ltest11 al1_mid b11 8 83634E 011 Ltest6 a6_mid b6 9 44010E 011 Ltestl al_mid b1 9 69712E 011 Ltest7 a7_mid b7 9 44010E 011 Ltest2 a2_mid b2 9 69712E 011 Ltest8 a8_mid b8 6 99231E 011 Ltest12 al2_mid b12 6 52341E 011 Ltest9 a9_mid b9 1 47566E 010 13 Ltest3 a3_mid b3 2 47340E 010 Ltest13 al3_mid b13 2 28163E 010 Ltest4 a4_mid b4 2 47340E 010 Ltest9 a9_mid b9 2 34012E 010 Ltest14 al4_mid b14 2 28163E 010 Ltest5 a5_mid b5 2 47340E 010 Ltest10 al0_mid b10 2 34012E 010 Ktest11_test6 1 1 1 Ltest6 4 15647E 001 Ktest11_test1 Ltest11 Ltest1 3 31378E 001 Ktest11_test7 Ltest11 Ltest7 2 88834E 001 Ktest11_test2 Ltest11 Ltest2 2 47400E 001 Ktest11_test8 Ltest11 Ltest8 2 06776E 001 Ktest11_test12 Ltest11 Ltest12 1 69941 001 Ktest6_test1 Ltest6 Ltest 4 91413E 001 Ktest6_test7 Ltest6 Ltest7 3 81159E 001 Ktest6_test2 Ltest6 Ltest2 3 08919E 001 Ktest6_test8 Ltest6 Ltest8 2 48781E 001 Ktest6_test12 Ltest6 Ltest12 1 93959E 001 Ktest1_test7 Ltest1 Ltest7 4 93054E 001 Ktest1_test2 Ltest1 Ltest2 3 71084E 001 Ktest1_test8 Ltest1 Ltest8 2 86868E 001 Ktest1l_test
3. Wtestl_test7 Ytestl Ytest7 2 826645E 001 Wtestl_test2 Ytestl Ytest2 8 819343E 002 Wtestl_test8 Ytestl Ytest8 4 668042E 002 Wtestl_test12 Ytestl Ytest12 3 545606E 002 Wtest7_test2 Ytest7 Ytest2 2 963210E 001 Wtest7_test8 Ytest7 Ytest8 9 717074E 002 Wtest7_test12 Ytest7 Ytest12 5 436836E 002 Wtest2_test8 Ytest2 Ytest8 2 941556E 001 Wtest2_test12 Ytest2 Ytest12 8 670772E 002 Wtest8_test12 Ytest8 Ytest12 2 244084E 001 Ytest9 a9_mid b9 3 803007E 010 Ytest3 a3_mid b3 9 168947E 009 Ytest13 al3_mid b13 9 634170E 009 Ytest4 a4_mid b4 9 370538E 009 Ytest9 a9_mid b9 9 337285E 009 Ytest14 al4_mid b14 8 923593E 009 Ytest5 a5_mid b5 7 550352E 009 Ytest10 al0_mid b10 6 884967E 009 Wtest9_test3 Ytest9 Ytest3 6 129623E 001 Wtest9_test13 Ytest9 Ytest13 4 426790E 001 Wtest9_test4 Ytest9 Ytest4 4 670804E 001 Wtest9_test9 Ytest9 Ytest9 1 715084E 001 Wtest9_testl4 Ytest9 Ytest14 9 070907E 002 Wtest9_test10 Ytest9 Ytest10 5 376574E 002 Wtest3_test13 Ytest3 Ytest13 8 955547E 002 Wtest3_test4 Ytest3 Ytest4 1 745948E 001 Wtest3_test9 Ytest3 Ytest9 6 234923E 002 Wtest3_testl4 Ytest3 14 1 740182E 002 Wtest3_test5 Ytest3 Ytest5 1 882169 002 Wtest3_test10 Ytest3 Ytest10 1 206630E 002 Wtest13_test4 Ytest13 Ytest4 2 924767E 002 Wtest13_test9 Ytest13 Ytest9 2 226256E 002 Wtest13_testl4 Ytest13 Ytest14 7 261615E 002 16 Wtest13_test5 Ytestl3 Ytest5 1 934131E 002 Wtest13_testl10 Ytest13 Ytest10 2 361437E 002 Wtest4_test9 Ytest4 Yte
4. al1l_mid 1 29310E 000 Rtest6 a6 a6_mid 3 16042E 000 Rtestl al al_mid 5 00400E 000 Rtest7 a7 a7_mid 3 16042E 000 Rtest2 a2 a2_mid 5 00400E 000 Rtest8 a8 a8_mid 2 4581 1E 000 Rtest12 a12 al2_mid 1 00575E 000 Rtest9 a9 a9_mid 2 39464E 001 Rtest3 a3 a3_mid 1 11200E 001 Rtest13 13 al3_mid 2 87356E 000 Rtest4 a4 a4_mid 1 11200E 001 Rtest9 a9 a9_mid 3 83142E 000 Rtest14 14 al4_mid 2 87356E 000 Rtest5 a5 a5_mid 1 11200E 001 COMMAND 3D K method with 2 neighbor search fext 3D_test txt 3D_test sp 3DK 2 to attach technology file use t lt file name gt fext 3D_test txt 3D_test sp t tech txt 3DK 2 to increase search range by a extension factor of 50 to R 0 5 fext 3D_test txt 3D_test sp t tech txt 3DK 2 R 0 5 OUPUT 3D K method with 2 neighbor search Ytest 1 al1_mid b11 1 435304E 010 Ytest6 a6_mid b6 1 594788E 010 Ytest al_mid b1 1 637523E 010 Ytest7 a7_mid b7 1 703440E 010 Ytest2 a2_mid b2 1 598372E 010 Ytest8 a8_mid b8 1 978590E 010 Ytest12 al2_mid b12 1 804725E 010 15 Wtest11_test6 Ytest11 Ytest6 2 807786E 001 Wtest11_testl Ytest11 Ytestl 9 994011 002 Wtest11_test7 Ytest11 Ytest7 6 486580E 002 Wtest11_test2 Ytest11 Ytest2 4 944108E 002 Wtestl1_test12 Ytest11 Ytest12 4 894918E 002 Wtest6_testl Ytest6 Ytest 3 124134E 001 Wtest6_test7 Ytest6 Ytest7 1 013220 001 Wtest6_test2 Ytest6 Ytest2 5 036202E 002 Wtest6_test8 Ytest6 Ytest8 3 916992E 002 Wtest6_test12 Ytest6 Ytest12 3 430985E 002
5. d 4 947e 7 v V12 t 2 0e 7 w 1 2e 7 1 2 7 r 2 6 d 4 947e 7 2 t 3 6e 7 w 2 25e 7 d 4 996e 7 h V23 t 2 10e 7 w 1 2e 7 l 1 2e 7 r 2 6 d 4 947e 7 t 3 6e 7 w 3 80e 7 d 4 996e 7 v V34 t 2 10e 7 w l 6e 7 l 1 2e 7 r 2 5 d 4 947e 7 1 5 70 7 w 3 80e 7 d 4 996e 7 h V45 t 4 60e 7 w 2 0e 7 1 2 0 7 r 1 6 d 4 947e 7 5 t 9 0e 7 w 5 63e 7 d 5 8e 7 v V56 1 5 30 7 w 2 4e 7 2 4 7 r 1 2 d 4 947e 7 6 t 1 2e 6 w 6 0e 7 d 5 8e 7 v 67 1 5 305 7 w 3 6e 7 3 7 0 6 d 4 947e 7 7 t 1 2e 6 w 6 0e 7 d 5 8e 7 v 1 8 90 5 w 3 0e 6 1 3 0e 6 0 06 d 5 8e 7 8 t 8 90e 5 w 3 0e 6 d 4 990e 7 h 2 L This is to extract the full L self and mutual inductance Example fall L method fext test txt output sp L if using technology file fext test txt output sp t tech txt L 3 K This is to use K method to extraction via windowing The number next to K is the number of neighbors to be chosen in the search window Example using K method with 3 neighbor search fext test txt output sp K 3 using K method with 2 neighbor search and also with 50 extension search range fext test txt output sp K 2 0 5 using K method with 2 neighbor search and with 50 extension search range and also using technology file tech txt fext test txt output sp t tech txt K 2 R 0 5 4 3DK This is for multilayer conductor system It extracts K method for multiple layers The number next
6. range fext test txt output sp 3DL 2 0 5 using 3D L method with 2 neighbor search and with 50 extension search range and also using technology file fext test txt output sp t tech txt 3DL 2 R 0 5 7 LWIN This is the full L extraction that employs the same windowing algorithm as K method using L windowing method with 3 neighbor search fext test txt output sp LWIN 3 using L windowing method with 2 neighbor search and also with 50 extension search range fext test txt output sp LWIN 2 0 5 using L windowing method with 2 neighbor search with 50 extension search range and also using technology file tech txt fext test txt output sp t tech txt LWIN 2 R 0 5 8 INVK This is essential K method but instead of outputting it as K self and mutual inductance value we re invert the matrix first to get the full L matrix value Example using inverse K method with 3 neighbor search fext test txt output sp K 3 using inverse K method with 2 neighbor search also with 50 extension search range fext test txt output sp 2 0 5 using inverse K method with 2 neighbor search and with 50 extension search range and also using technology file tech txt fext test txt output sp t tech txt INVK 2 R 0 5 9 Extension factor Example 2 0 5 In order to fully capture the inverse inductance effect we have included an extension factor in win
7. to is the number of neighbors to be chosen in the search window using K method with neighbor search Example using 3D K method with 3 neighbor search in each layer we assume a virtual aggressor in different layer fext test txt output sp 3 3 using 3D K method with 2 neighbor search and also with 50 extension search range fext test txt output sp 3DK 2 0 5 using 3D K method with 2 neighbor search and with 50 extension search range and also using technology file fext test txt output sp t tech txt 3DK 2 R 0 5 5 N This is a method to do K method extraction without using windowing This method only picks out the nearby neighbor by the sorted dimension without using any windowing In fact this is just an experimental method that to confirmed the stability of using windowing Example using next neighbor search in sorted dimension with 2 neighbor search fext test txt ouput sp 2 using next neighbor search in sorted dimension with 2 neighbor search and also using technology file tech txt fext test txt output sp t tech txt N 2 6 3DL This is to extract the full L self and mutual inductance for multi layer conductor system Example using 3D L method with 3 neighbor search in each layer we assume a virtual aggressor in different layer fext test txt output sp 3DL using 3D L method with 2 neighbor search and also with 50 extension search
8. 12 Ltest1 Ltest12 2 13589E 001 Ktest7_test2 Ltest7 Ltest2 4 91413E 001 Ktest7_test8 Ltest7 Ltest8 3 54241 001 Ktest7_test12 Ltest7 Ltest12 2 47012E 001 Ktest2_test8 Ltest2 Ltest8 4 56125E 001 Ktest2_test12 Ltest2 Ltest12 2 80251E 001 Ktest8_test12 Ltest8 Ltest12 3 43454E 001 Ktest9_test3 Ltest9 Ltest3 7 31015E 001 Ktest9_test13 Ltest9 Ltest13 7 29721E 001 Ktest9_test4 Ltest9 Ltest4 7 31015E 001 Ktest9_test9 Ltest9 Ltest9 6 18851E 001 Ktest9_test14 Ltest9 Ltest14 5 65441E 001 Ktest9_test5 Ltest9 Ltest5 5 03308E 001 Ktest9_test10 Ltest9 Ltest10 4 56571E 001 Ktest3_test13 Ltest3 Ltest13 4 83308E 001 Ktest3_test4 Ltest3 Ltest4 4 42950E 001 Ktest3_test9 Ltest3 Ltest9 3 90725E 001 Ktest3_test14 Ltest3 Ltest14 3 70570E 001 Ktest3_test5 Ltest3 Ltest5 3 38549E 001 Ktest3_test10 Ltest3 Ltest10 3 14452 001 Ktest13_test4 Ltest13 Ltest4 5 64794E 001 Ktest13_test9 Ltest13 Ltest9 4 99941 001 Ktest13_test14 Ltest13 Ltest14 4 79997E 001 Ktest13_test5 Ltest13 Ltest5 4 11035 001 Ktest13_test10 Ltest13 Ltest10 3 76764E 001 14 Ktest4_test9 Ltest4 Ltest9 5 56028E 001 Ktest4_test14 Ltest4 Ltest14 4 83308E 001 Ktest4_test5 Ltest4 Ltest5 4 42950E 001 Ktest4_test10 Ltest4 Ltest10 3 90725E 001 Ktest9_test14 Ltest9 Ltest14 6 33316E 001 Ktest9_test5 Ltest9 Ltest5 5 61137E 001 Ktest9_test10 Ltest9 Ltest10 4 68085E 001 Ktest14_test5 Ltest14 Ltest5 5 64794E 001 Ktest14_test10 Ltest14 Ltest10 4 99941 001 Ktest5_test10 Ltest5 Ltest10 5 56028E 001 Rtest11 all
9. User Guide for QuickHnery SPICE RL compatible and INDUCTWISE RL RK compatible Ver 1 0 Clement Luk Tsung Hao Chen and Charlie Chung Ping Chen VLSI EDA Group http vlsi ece wisc edu Electrical and Computer Engineering University of Wisconsin Madison Aug 15 2002 Contents 1 Introduction 1 1 Abstract 2 1 2 Product features 2 2 How to use this program 2 1 Input File Format 4 2 2 Instruction for running the program 5 2 3 Output file format 10 2 4 A small 2D example 12 2 5 A small 3D example 13 3 References 18 1 Introduction 1 1 Abstract As semi conductor industries embark to the giga hertz era correct modeling and simulation of digital circuit that incorporate inductance becomes indispensable issue Simple RC extraction and simulation can no longer cope with the ever increasing operating frequencies With the introduction of more metal layers lowered operating voltage thinner and longer interconnect wires for global signals and clock distribution seem to even aggravate the inductance effect Inductance effect impacts various aspects in digital design in terms of propagation delay degradation of signal integrity due to undershoots overshoots and oscillations and increasing power gird noise and worsening signal cross talk However due to the long range effect of inductance simulating the dense partial inductance matrix is difficult and impractical when applying simulation to entire chip A recent proposed cir
10. cuit element K 1 which defined as inverse of partial inductance matrix L has properties reminiscent of capacitance extraction such as locality and stability Based on K method matrix sparsification technique we developed a robust efficient and accurate extraction tool that could directly extract multi conductors system into K circuit compliance circuit simulation tool QuickHenry and can be simulated by INDUCTWISE 2 The experimental results show that circuit extracted under K method that simulate using INDUCTWISE has over 146X speedup compared to Tanner SPICE with less than 0 1 error 1 2 Product Features This tool is used for efficiently extract on chip inductance for VLSI application With the continuous shrinking feature size of transistor efficient extraction for power grid simulation signal integrity verification for global interconnect and clock becomes an imperative mission for today s VLSI design Full L extraction Full SPICE compatible self inductance and mutual inductance value that could be simulated in either INDUCTWISE or any other commercial SPICE simulator Novel technique K inverse inductance method Using the recently proposed K inverse inductance a k a reluctance method this tool could extract self and mutual reluctance extraction via windowing This method could significantly sparsify the reluctance matrix but still capturing the inductance effect More experimental result could be found in 2 experime
11. dow searching What 0 5 means is that it extends the current conductor by 50 so as to capture those that still fall within the extended window From the experiment we found out that this using the extension factor could significantly improve the accuracy of K method In figure 3 the extension factor is indicated as xL g xk a Co Figure 3 2 3 Output file format Generally it is the exact format as in the any commercial available SPICE format Self inductance Ltest9 a9_mid b9 1 27261E 011 Note All self inductance begins with keyword L inductor name a_9_ mid one end of the node b9 another end of the node 1 27261E O11 inductance value Mutual inductance Ktest0O_test9 LtestO Ltest9 1 90628E 001 mutual inductance between LtestO and Ltest9 Note All mutual inductance begins with keyword Self reluctance YtestO a0_mid b0 1 734504E 010 10 Note All self reluctance begins with keyword Y Mutual reluctance Wtest0_test YtestO Ytest1 4 267909E 001 mutual reluctance between YtestO and Ytest1 Note All mutual reluctance begins with keyword W Instruction for inductance extraction Format fext lt input file gt lt spice file name gt t tech_file Switch Switch N number of conductor L K number of conductor optional R increase 3DK number of conducto
12. hbor search 3DL 3D L extraction LWIN Full extraction using windowing algorithm INV_K Use K method nearest neighbor search then re inverse it to get L value R percentage to increase for search e g 0 5 50 There are four different methods for running the program 1 t technology_file If technology file presents the extractor will use the width specified by the technology file User can override the value by explicitly specifies the width in the input file For example Ptestl al bl 1 1 6 1 4 6 2 1 006 y2 24e 6 layer M6 w 0 6e 6 v Beside width if technology file is given the extractor will use the following value 1 Conductivity for a particular layer 2 Thickness for a particular layer 3 VIA height use only in 3D extraction Example assume the technology file is called tech txt assume we use full L method fext test txt output sp t tech txt L If technology file is not given the extractor will use the following value as specified by the default technology file that can be downloaded from the web site M SublPolyll 8 Metal Layer V 00 67 Via between two layers Thickness Width Length oT Resistance 0 Conductivity MSub t 1 96e 7 w 7 7e 8 d 1 0e 4 v V00 t 3 90e 7 w 7 7e 8 7 7 8 r 2 6 d 4 947e 7 MPoly t 1 12e 7 w 7 7e 8 d 3 80e 7 h 0 t 1 03e 7 w 1 2e 7 l 1 2e 7 r 2 6 d 4 947e 7 t 2 80e 7 w le 6
13. l_mid 9 72082E 001 COMMAND using the K method with 2 neighbor for windowing fext testing txt testing sp K 2 OUTPUT using the K method with 2 neighbor for windowing This is the spice file YtestO a0_mid b0 1 332139E 010 Ytestl al_mid b1 3 961306E 010 WtestO_test1 YtestO Ytest1 5 291818E 001 Rtest0O a0 0 2 39464E 000 Rtestl al al_mid 9 72082E 001 12 2 5 A 3D small example INPUT FILE A 3D EXAMPLE WITH 6 layers of metal in layer M2 vertical orientation Ptestl al 1 25 006 1 0 2 25 006 y2 90e 6 layer M2 w le 6 v Ptest2 a2 b2 1 35 006 y1 0 x2 35e 006 y2 90e 6 layer M2 w 1e 6 v in layer M3 horizontal orientation Ptest3 b3 1 0 1 5 6 2 200 6 2 5 6 layer M3 1 6 h Ptest4 a4 b4 1 0 yl 15e 6 2 200 6 2 15 6 layer M3 1 6 h Ptest5 a5 b5 1 0 1 25 6 2 200 6 2 25 6 layer M3 1 6 h layer M4 vertical orientation Ptest6 b6 1 20 006 y1 0 x2 20e 006 y2 90e 6 layer M4 w 1e 6 v Ptest7 a7 b7 x1 30e 006 1 0 2 30 006 y2 90e 6 layer M4 w 1e 6 v Ptest8 a8 b8 x1 40e 6 1 0 x2 40e 6 2 70 6 layer M4 w le 6 in layer 5 horizontal orientation Ptest9 a9 b9 1 0 1 10 6 2 200 6 2 10 6 layer M5 w 16e 6 h Ptest9 a9 b9 1 0 1 20 6 2 200 6 2 20 6 layer M5 w 1e 6 h Ptest10 a10 b10 1 0 1 30 6 x2 200e 6 2 30 6 layer M5 w 1e 6 h in layer M6 vertical orientation Ptest11 11 611 1 11 006
14. ntal result section 3 Dimensional K method For a multi layer conductor system coupling across different layer is also a concern for the correct modeling for the system This method is to taken care of coupling across different layer by assuming a virtual aggressor exists in the layer to be extracted 2 How to run the program 2 1 Input File Format We have employed a very easy to understand format to clearly describe the geometry width layer information and orientation The general format is as follow P name node1 node2 x1 cord y1 cord x2 cord y2 cord layer M 1 2 w width vih P name All conductor starts with P and follow by the name node 1 Name of starting side of the conductor node 2 Name of ending side of the conductor x1 cord X coordinate for node 1 For vertical v orientation this is the mid point of the conductor This number should be the same as the x2 for vertical v orientation This means that for vertical orientation x1 and x2 describe the spatial location and y1 and y2 describe the length See figure 1 for pictorial description for vertical orientation For horizontal h orientation it is the starting point and x2 is the ending point of the width See figure 2 for pictorial description for horizontal orientation y2 1 y2 width x2 1 2 1 width gt Figure 1 v cruca vuentation Figure 2 Horizontal orientation y1 cord
15. r optional R increase 3DL LWIN number of conductor optional R increase INV_K number of conductor optional R increase switch description L Full L extraction N K method next neighbor search for sorted dimension K K method nearest neighbor search 3DK 3D K method nearest neighbor search 3DL 3D L extraction LWIN Full extraction using windowing algorithm INV_K Use K method nearest neighbor search then re inverse it to get L value R percentage to increase for search e g 0 5 50 Example 1 To extract full L self and mutual inductance fext p500_test txt p500_test sp L 2 To extract K method self and mutual reluctance with 2 neighbor fext p500_test txt p500_test sp K 2 3 To extract K method self and mutual reluctance with 2 neighbors and with extension factor 50 estimated time 6 secs 11 fext p500_test txt p500_test sp K 2 R 0 5 2 4 A 2D small example INPUT FILE A SMALL EXAMPLE WITH 2 CONDUCTORS Ptest12 a12 b12 x1 11 6e 006 y1 0 x2 11 6e 006 y2 90e 6 layer M6 w 0 6e 6 Ptest40 a40 b40 x1 51 3e 6 0 2 51 3 6 2 70 6 layer M6 w 0 6e 6 COMMAND using the full L method fext testing txt testing sp L OUTPUT using the full L method the spice file LtestO a0_mid b0 1 04265E 010 Ltest1 al_mid b1 3 50630E 011 KtestO_testl Ltest0 Ltest1 5 29182E 001 RtestO a0 a0_mid 2 39464E 000 Rtestl al a
16. st9 1 235583E 001 Wtest4_testl4 Ytest4 Ytest14 1 868394 002 Wtest4_test5 Ytest4 Ytest5 5 165075E 002 Wtest4_test10 Ytest4 Ytest10 2 052873E 002 Wtest9_testl4 Ytest9 Ytest14 3 144460E 001 Wtest9_test5 Ytest9 Ytest5 1 975728E 001 Wtest9_testl10 Ytest9 Ytest10 6 493982E 002 Wtest14_testS Ytest14 Ytest5 2 077313E 001 Wtest14_testl10 Ytest14 Ytest10 1 593550 001 Wtest5_testl0 Ytest5 Ytest10 3 175773E 001 Rtest11 all al1l_mid 1 29310E 000 Rtest6 a6 a6_mid 3 16042E 000 Rtest al al_mid 5 00400E 000 Rtest7 a7 a7_mid 3 16042E 000 Rtest2 a2 a2_mid 5 00400E 000 Rtest8 a8 a8_mid 2 4581 1E 000 Rtest12 a12 al2_mid 1 00575E 000 Rtest9 a9 a9_mid 2 39464E 001 Rtest3 a3 a3_mid 1 11200E 001 Rtest13 13 al3_mid 2 87356E 000 Rtest4 a4 a4_mid 1 11200E 001 Rtest9 a9 a9_mid 3 83142E 000 Rtest14 14 al4_mid 2 87356E 000 Rtest5 a5 a5_mid 1 11200E 001 Rtest10 a10 10 3 83142E 000 17 3 References 1 Hao Ji Anirudh Devgan and Wayne Dai Ksim A stable and efficient RKC simulator for capturing on chip inductance effect 2 Tsung Hao Chen Clement Luk and Charlie Chung Ping Chen INDUCTWISE Inductance wise interconnect Simulator and Extractor 18

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