MS 155E User Manual M-850K086 / M-850K109 Hexapod 6
Contents
1. Parameters Sets measuring unit and measuring range for an F 361 OPM TAV A UuW UmW UdBm R0 R1 A Optical Power Meter specifier can be A1 or A2 if not specified OPM 1 will be addressed U Unit where Unit uW dBm or mW UuW Sets the measuring unit to uW 1E 6 watt UmW Sets the measuring unit to mW 1E 3 watt UdBm Sets the measuring unit to dBm dBm 10 log10 Power 1mW R Sensitivity where Sensitivity 0 or 1 RO Achieves high accuracy with low signals should be selected if the signal power is extremely low R1 Should be selected to enlarge the measurement range in order to measure higher power signals M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 48 System Commands WWwW pi ws Default values Background Piezo Nano Positioning PI The default value of R Sensitivity is set by the corresponding entry in the F 361 dat configuration file which is located in the HEXAPOD directory of the controller The factory default value for U is mW The F 361 has 9 power ranges and switches from one to another automatically when necessary The highest range and the lowest range however cannot both be made available at the same time RO enables measuring in the lowest power range and disables measuring in the highest power range R1 enables measuring in the highest power range and disables measuring in the lowest power range TAV Tell Analog Value Descriptio2. Positioning PI www pi ws M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 9 Quick Start Piezo Nano Positioning PI 2 2 Mounting The Hexapod may be mounted in any orientation but different load limits apply to loads not on the Z axis and to loads applied when the unit is switched off see Technical Data table p 59 Be sure not to exceed the load limits while installing your application The screw set 000013094 which comes with the M 850K086 M 850K109 can be used for mounting the Hexapod on a mounting surface When protection class IP64 is required prepare the Hexapod mechanics as described on p 13 before mounting WWW pi ws M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 10 Quick Start Piezo Nano Positioning PI 2 3 Connection and Startup CAUTION Do not interchange the C030B0003 and C030B0004 line driver boxes when connecting the system Strictly adhere to the connecting instructions given below and to the labeling of boxes and cables Incorrect connecting can cause damage to the equipment The splitter box which combines the three cables from the strut controllers A B and C into a ribbon cable order KO40B0068 with M 850K086 order K040B0069 with M 850K109 comes already installed on the Hexapod base plate Note that this box is not shown in the dimensional drawing on p 64 1 Connect Hexapod mechanics driver boxes splitter boxes and Hexapod controller using the
3. System Abort System abort ASCII character 27 aborts the system It can be used as an EMERGENCY STOP Motion of the platform stops immediately all servo registers are reset the servo loop is disabled The controller emits a continuous beep at 300 Hz For restart the controller must be manually reset or turned off power switch 27 ASCll character 27 none none NOTE To get the M 840 M 850 Control program on the host PC to send an ESC character press the red STOP button zl Pressing the ESC key will not send an ESC over the interface See also the STOP and 24 commands www pi ws M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 55 Operating Examples Piezo Nano Positioning PI 6 Operating Examples The following two examples show how to communicate with the Hexapod system using PASCAL In both cases a line scan with 10 steps is performed Version 1 waiting for movement ready answer procedure y_scan_m const check_str string 2 1 10 1 linefeed var ch char LE integer pos double str_pos string temp_str string begin pos 0 set position to zero for i 1 to 10 do begin pos pos 0 1 str pos 1 4 str_pos set_output MOV Y str_pos set_output MOV temp_str repeat if readinputbuf ch then temp_str temp_str ch until temp_str check_str end set_output MOV X0 YO ZO UO VO end www pi ws M 850K 086 M 850K109 Hexapod M
4. 5 V negative limit positive limit REFS Limit GND Encoder A ENCA Encoder A Encoder B ENCB Encoder B www pi ws M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 63 System Specifications 8 3 Dimensional Drawings Dimensions in mm decimal places separated by commas in drawings 8 3 1 Hexapod Mechanics 4x 06 SV 15 580 strut length at INI position 306 5mm Movable Platform Fig 14 M850B0101 M850B0111 Hexapod mechanics without the pre assembled splitter box WWW pi ws M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 64 System Specifications 8 3 2 Hexapod Controller Fig 15 Hexapod controller dimensions 8 3 3 Hexapod Line Driver Boxes 105 50 52 5 1 MDR 68 Connector 74 Cable Driver Box Fig 16 Dimensions of C030B0003 and C030B0004 line driver boxes C030B0004 has additional socket for Switchcraft power connector Www pi ws M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 65
5. Zp Up Vp Wp X Y Z U V W linear and rotary axes of the Hexapod p Parameter mm or deg After initialization the system position is X 0 Y 0 Z 0 U 0 V 0 W 0 The new command is RUN Y1 245678 X1 23 V0 56789 The new target position is X 1 23mm Y 1 2457mm Z 0mm U 0deg V 0 5679deg W 0deg After a new command MOV Z1 2 the new target position is X 1 23mm Y 1 2457mm Z 1 2mm U 0deg V 0 5679deg W 0deg The pivot point is set by the SPI command All rotation is done around a fixed XYZ coordinate system Rotation does not affect the orientation of the coordinate system none Parameter out of limits As long as a hexapod is in motion caused by a MOV command only the commands MOV STOP POS and TAV will be performed immediately Other commands will cause a delay until the MOV target position is reached before executing During MOV motions the strut velocities are limited by the velocity that is set by the VEL command Since the Hexapod s velocity has the same order of magnitude as the strut velocities Hexapod s velocity can be limited www pi ws M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 38 System Commands Piezo Nano Positioning PI NAV Set Number of Values for TAV To use this command an optical board optional must be installed Description Format Parameter Example Set number of readings of the analog signal to average in ord
6. 000100 5 420600 57 42001 28800 000000 7 000100 22 570000 63 58001 0 500000 000100 0 000000 0 00001 1 600000 7 000100 0 000000 41 01001 2 000000 7 000100 56 600000 50 00001 10 000000 7 000100 0 000000 0 00001 7 100000 6 000100 42 580000 42 58001 6 000100 4 430000 6 42001 6 000100 0 000000 0 00001 6 000106 42 580000 42 58001 6 000100 47 430000 6 42001 6 000100 0 000000 0 00001 0 000000 41 01001 50 000000 50 00001 0 000000 0 00001 0 000000 57 420000 57 42001 0 606000 22 570600 63 58001 0 000000 0 000000 0 00001 Manual Pad Controller Board AVAILABLE Fig 7 Firmware boot screen when manual pad controller board is installed 3 2 4 Installing Add On Cards in the Hexapod Controller A number of available options require installation of an associated add on card in the Hexapod controller To install such cards follow the steps below 1 Prior to opening the controller case disconnect the power cable Follow General Accident Prevention Rules Open the controller housing by removing the four Torx screws inside the handles at the back panel of the controller using the Torx driver TX8 3683 that comes with the system Lift the cover slightly and disconnect the ground cable Remove the cover Lift the lever to release the daughterboard retaining clamp Remove the clamping plate Remove the screw and cover bracket from a free ISA slot Carefully insert the new card into a free ISA
7. A vvvvvSP LF X vvvvvLF SP space LF line feed Troubleshooting Answer comes after motion complete The system reports the target position If a move is in progress that move is first completed POS can be evoked while Hexapod is in motion caused by a MOV command In ths case POS reports the target position an not the actual position www pi ws M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 40 System Commands Piezo Nano Positioning PI SCT MOV Command Configurations Description Format Example Default Response Troubleshooting Remarks In case Hexapod movements are controlled in a closed loop MOV commands should be sent periodically in order to avoid stutter effects in motion The cycle time of must set by the SCT command SCT Tp p is the cycle time ms SCT T29 T 0 none Parameter out of limits t lt 0 or t gt 10000 Using the MOV Command the Hexapod will reach the target position at the end of the given cycle time by changing velocity settings for each strut according to the target position distance It is recommended to set a cycle time using the SCT command exceeding the real average cycle time in order to prevent any stutter effects caused by time period jitter Set the cycle time to 0 s if no cycle time dependant velocity changes are desired As a consequence of this the Hexapod struts will move with a velocity that i
8. Fast Scan Description Fast scan Executes a fast scan following a trajectory described by different parameters The voltage at the analog input specified by the parameter A is read gt 500 s during motion Pivot Point FSN Y2 6 D0 C0 R0 L0 5 A2 FSN V0 6 D0 C0 R0 L0 5 A2 Fig 9 Fast scan examples www pi ws M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 28 Piezo Nano Positioning PI System Commands CAUTION Scan command runout may cause damage to the attached application The trajectory specified by the X Y Z U V and W parameters is not followed as exactly as motion initiated with a MOV command but rather with a certain amount of wobble For large scanning ranges for example 1 mm this may result in an additional deviation of up to 2 6 um from the desired trajectory which if unexpected could damage the attached setup Default A 1 L 1 V D 1 R 0 C 0 xxFormat FSN X Y Z U V W L D R C A Parameters A specifier indicating which Optical Board or which Optical Power Meter F 361 analog input to use Can be A1 or A2 If omitted A1 is used If there is an F 361 Optical Power Meter OPM configuration file C HEXAPOD F 361 DAT the OPM will addressed and any optical boards present will not be accessible otherwise the specified optical board will be addressed L Threshold Level Level of analog input in volts for an
9. Reference alphabetical IDN Get Identity Number Description Format Parameters Response Reports the device identity number IDN none One line string terminated by line feed e g PHYSIK INSTRUMENTE Pl HEXAPOD 0 V5 1 3 061004 CST Get Stage name Description Format Examples Reports the name of the stage connected to the specified axes CST X Y Z U IV W A B X Y Z U V W linear and rotary axes of the Hexapod A B separate axes CST without any parameters corresponds exactly to CST X Y Z U V W if no separate axes are configured or CST XY ZU VW AB if separate axes are configured CST Response with no separate axes configured X HEXAPOD_AXIS_XSP LF Y HEXAPOD_AXIS_YSP LF Z HEXAPOD_AXIS_ZSP LE U HEXAPOD_AXIS_USP LE V HEXAPOD_AXIS_VSP LE W HEXAPOD_AXIS_W LF X HEXAPOD_AXIS_XSP LE Y HEXAPOD_AXIS_YSP LE Z HEXAPOD_AXIS_ZSP LE U HEXAPOD_AXIS_USP LE WWW pi ws M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 26 System Commands WWwW pi ws ERR Description Piezo Nano Positioning PI V HEXAPOD_AXIS_VSP LF W HEXAPOD_AXIS_WSP LF A M 505 6PDSP LF B M 505 6PD LF CST XA Response if no separate axes are configured X HEXAPOD_
10. Release 2 0 0 Page 42 Piezo Nano Positioning PI System Commands Response A 1 or 10 or 100 or 1000 Troubleshooting System is busy moving SPI Set Pivot Point Description Set Pivot Point with R S T in mm This command is only executed if angular positions are U V W 0 Format SPI Rp Sp Tp or SPI Xp Yp Zp Troubleshooting Platform tilted U V or W not all 0 All parameters p are given in mm The command will only be executed if the platform is not tilted i e U V W 0 After initialization the pivot point is set to RST 0 0 0 On the Hexapod this point is located at the center of the lower surface of the top plate The center of the mounting surface is located at XYZ 0 0 16 Note R S and T are alias names for X Y Z axes Example SPI R0 3 S22 T12 same as SPI X0 3 Y22 Z12 will set the pivot point to the position X 0 3 Y 22 Z 12 SPI Get Pivot Point Description Get Pivot Point Reports coordinates of pivot point as R S and T or X Y and Z Format SPI XYZ Response to SPI R vvvvvSP LF S vvvvvSP LF T vvvvvLF SP space LF line feed www pi ws M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 43 System Commands Response to SPI XYZ Piezo Nano Positioning PI X vvvvviSP LF Y vvvvviSP LF Z vvvvvLF SP space LF line feed Note R S an
11. ZS US VS 0 05 WS POSITION WHEN INVOKING FSN XS YS ZS US VS WS ii START OF SCAN XS YS ZS US VS 0 05 WS Fig 11 Before and after FSN Response Troubleshooting WWW pi wSs 1 The maximum voltage reached the threshold level 0 The maximum voltage did not reach the threshold level or an error occurred Since errors will also cause this response the ERR command should be issued to see what happened Parameter out of range M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 31 System Commands Parameter Charts Piezo Nano Positioning Start of Scan Position Table PI Position Para DO DO D1 D1 before meters Co C1 Co C1 evoking of FSN FSN XS X XS XS X 2 XS XS X 2 YS Y YS YS Y 2 YS YS Y 2 ZS Z ZS ZS Z 2 ZS ZS Z 2 US U US US U 2 US US U 2 VS V Vs VS V 2 VS VS V 2 WS W WS WS W 2 WS WS W 2 End of Scan Position Table Position Para DO DO D1 D1 before meters Co C1 Co C1 evoking of FSN FSN XS X XS X XS X 2 XS X XS X 2 YS Y YS Y YS Y 2 YS Y YS Y 2 ZS Z ZS Z ZS Z 2 ZS Z ZS Z 2 US U US U US U 2 US U US U 2 VS V VS V VS V 2 VS V VS V 2 WS W WS W WS W 2 WS W WS W 2 FSN Finished Position Table Position before RO R1 evoking FSN XS End of Scan Position XS YS End of Scan Position YS ZS End of Scan Position ZS US End of Scan Position US VS End
12. after it boots exit the Hexapod software you will now have a DOS prompt 3 Goto the HEXAPOD directory and using the EDIT command or alternatively the DOS Commander DC access the HEXBRATE DAT file That file must have the following structure PHYSIK INSTRUMENTE PI GmbH street address postal code and city Germany Baudrate 57600 Other RS 232 parameters are as follows 8 data bits 1 stop bit no parity 3 2 2 Communication Checks www pi ws If not already done so install the software on the host PC as described in the Quick Start Section on p 7 Connect the controller and the host PC via RS 232 null modem cable Switch on the controller start terminal program or the M8X0Control software on the host PC select the communication port and type Help RETURN The answer reports all commands that are currently available in your controller Next type in the Initialize command INI RETURN Watch the system it will move to the INI position Even if the system is close to the INI position a small movement of all struts can be observed Next type in the simplest move command MOV Z1 RETURN Watch the system It will lift the platform up 1 mm M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 19 System Description Piezo Nano Positioning PI 3 2 3 Manual Control Pad www pi ws The Manual Control Pad F 206 MC6 option is a useful addition for simplifying test and setup proce
13. completes Some versions of the Control software may not recognize these responses as valid and instead display an error message even though the command executes properly MOV Move Absolute Description Format Example Move Hexapod or separate axis Units for X Y Z mm U V W deg Units for A B depend on connected stage The values are interpreted as floating point format Note that the direction of the axis around which a V move is calculated depends on the U position the W axis direction depends on both U and V positions See Hexapod Coordinate System p 23 for details Internal accuracy for all transformations is 18 digits The controller checks if the programmed position and all positions of the trajectory are situated within the Hexapod s working space before it starts motion If only one of the six Hexapod coordinates is out of range the motion of the Hexapod will not be started It is sufficient to set new positions only for the axes to be moved MOV Xp Yp Zp Up Vp Wp Ap Bp X Y Z U V W linear and rotary axes of the Hexapod A B separate axes p Parameter mm or deg After initialization the system position is X 0 Y 0 Z 0 U 0 V 0 W 0 The new command is M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 35 System Commands Response Troubleshooting MOV Description Format Parameters Response Troubleshooting Remarks Piezo N
14. for running on a host PC see the appropriate software manuals for details regarding the use of this software Alternatively you can employ custom software With the direct input facilities of the host software you can enter the system commands described in this section 5 1 Command Structure Lowercase and uppercase letters are allowed The order of command parameters is not important All commands are transferred via the RS 232 For RS 232 communication parameters are 57600 baud no parity 8 data bits one stop bit A standard null modem cable is to be used to connect the host with the controller 5 1 1 Command End of Line Terminator All commands are transferred as strings with a LF ASCII character decimal 10 hex OA as terminator It may be possible to use a carriage return CR in addition to or instead of a line feed The command line terminators are not usually shown explicitly in this manual 5 1 2 Report Terminator Report messages responses are also terminated by line feeds If a report consists of more than one line all lines but the last have a single space 32 20h preceding the line feed This fact can be used to determine whether the controller has more data to send Response terminators are shown in this manual for some multi line responses only www pi ws M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 25 System Commands Piezo Nano Positioning PI 5 2 Command
15. of Scan Position VS WS End of Scan Position WS M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 32 System Commands Piezo Nano Positioning PI FSN Get Fast Scan Result Description Format Parameters Response HELP Description Format Parameters Response Get result of the FSN command The system reports the position of the highest input voltage and its value FSN none X 0 1001 SP space Y 1 002 SP LF LF line feed Z 0 01 SP LF LW shows the analog U 0 0 SP LF signal level at its l maximum For an optical V 1 1 SP LF board the unit is volts for 2 an OPM the response will WEN aE LE contain unit as set with LW 3 99 LF the TAV command The position is given in absolute coordinates i e not relative to the start position of the scan trajectory or the position when evoking FSN Lists all available commands HELP none Command List Troubleshooting RS 232 communication breakdown System is busy moving www pi ws M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 33 System Commands WWwW pi ws Piezo Nano Positioning PI INI Initialize Format INI A B Parameters none for Hexapod A for separate axis A B for separate axis B Response none Troubleshooting DC power failure System is busy moving In case INI is invoked without a
16. of the parameters X Y Z U V V W will set Hexapod velocity v velocity value for Hexapod in mm s for A B depending on stage parameters mm s or degrees s VEL 1 sets the velocity of the Hexapod to 1 mm s VEL X3 sets the velocity of the Hexapod to 3 mm s VEL W3 sets the velocity of the Hexapod to 3 mm s VEL A0 02 sets the velocity of the separate axis A to 0 02 mm s or deg s VEL X3 U3 sets the velocity of the Hexapod to 3 mm s VEL X1 U3 will cause an error message since velocity settings are inconsistent None Parameter out of limits Specified separate axis not configured or F 206 AC8 software option not installed WWwW pi ws M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 51 System Commands www pi ws Note VEL Description Format Example Note Parameter Response Troubleshooting Piezo Nano Positioning PI Specified separate axis unit size parameter incorrect Even though Hexapod axis designators can be specified the Hexapod velocity as a whole is set not the speeds in the specific directions Get Velocity Reports the current velocity setting rounded to 3 digits Hexapod mm s Axis mm s or deg s depending on stage parameter data VEL X Y ZI UJ VI WI AJIB X Y Z U V W for Hexapod A for separate axis A B for separate axis B VEL XUA Response X vvvvv SP LF U vvvvv SP LF A vvvvv LF V
17. optical board analog input or in the unit specified in the TAV command for an OPM D If DO is specified the scan direction will be inverted R If R1 is specified the position after finishing the command will be the same as the position before If RO is specified the Hexapod remains at its last scan www pi ws M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 29 System Commands Examples Piezo Nano Positioning PI position C Describes whether the scan is performed symmetrically or not C1 symmetry C0 no symmetry FSN YO 1 FSN X0 1 DO R1 FSN V0 1 C1 Fig 10 FSN par ameters Let XS YS ZS US VS and WS be the position when FSN is invoked The trajectory begins at XS YS ZS US VS WS and stops at XS YS 0 1 ZS US VS WS Since DO invert is specified this command corresponds exactly to the command FSN X 0 1 R1 Here the resulting trajectory begins at XS YS ZS US VS WS and stops at XS 0 1 YS ZS US VS WS Having finished scanning a move to the start position of XS YS ZS US VS WS will be executed Preparing to scan the Hexapod moves to the scan start position at XS YS ZS US VS 0 05 WS The scan stops at XS YS ZS US VS 0 05 WS The Hexapod remains at this position See figure below WWW pi ws M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 30 System Commands Piezo Nano Positioning PI END OF SCAN XS YS
18. pi ws M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 46 Piezo Nano Positioning PI System Commands SVO U0 Turns the servo loop off Response none Troubleshooting Wrong parameter Note The servo loop setting affects both Hexapod and separate motor and piezo axes Therefore the following commands are identical SVO1 SVO X1 SVO A1 SVO M1 SVO Get Servo State Description Reports the servo state of the Hexapod and axes A and B Format SVO P4 Y1 ZI UJ VIIWI KI LI MI AJ B Response if evoked without any parameters 0 for servo is off 1 for servo is on Example SVO XYUAB Response in case servo is on 1 SP LF Y 1 SP LF U 1SP LF SP LF LF www pi ws M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 47 System Commands WWwW pi ws Troubleshooting Piezo Nano Positioning PI SP space LF line feed Note axes X Y Z U V W A and B always have the same servo state System is moving TAV Settings for Tell Analog Value This command addresses F 361 Optical Power Meters OPM only and can not be used to address optical boards To use this command a F 361 configuration file with an entry for the specified OPM must be present in the C Hexapod directory of the controller and an F 361 must be properly connected and switched on See the F 361 User Manual for details Description Format
19. points all six actuators have to be moved in harmony based on complicated interpolations to guide the platform along the defined trajectory AII motion commands refer to a platform position defined by three linear and three rotational coordinate values The axes about which rotations are defined U V W are initially coincident with XYZ Their intersection the pivot point can however be shifted with a user command by any amount desired and can lie inside or outside the system workspace Moves which specify new X Y or Z translation parameters also shift the pivot point i e the pivot point moves with the platform Similarly a non zero rotation around X U move rotates the V and W rotation axes and a non zero rotation around Y V parameter rotates the W axis This means for example that a W move always rotates the platform about a line perpendicular to its plane To execute a move command the system first evaluates the target position specification then calculates how to get there from the current position in a smooth continuous vector motion then performs that motion See Hexapod Coordinate System p 23 for examples and illustrations 3 2 Hexapod Controller The Hexapod electronics consist of a PC based controller Software is provided to send ASCII commands to the controller from a not included host PC In addition the controller s ASCII command interface is fully described so as enable use of custom soft
20. x y 0 Self locking load capacity when powered 2000 2000 N down or servo off horizontal mount Z direction Self locking horizontal mount V tilt 15 1100 1100 N CoG x y 0 Z lt 75mm Self locking horizontal mount V tilt 40 600 600 N CoG x y 0 Z lt 75 mm Operating temp Range 20 to 30 20 to 30 C Weight 35 35 kg The travel ranges of the individual coordinates X Y Z U V W are interdependent The data in this table show maximum travel where at least one strut is totally extended If motion from a particular starting point or in more than one axis is desired the available travel may be less 6 axis move WWW pi ws M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 59 Piezo Nano Positioning PI System Specifications 8 2 Connectors and Pinouts 8 2 1 Hexapod Mechanics The following sockets are located on the three strut controller boxes which are mounted on the Hexapod mechanics base plate m Motor Control Lines DB25 connectors The splitter box which combines the three motor control lines from the strut controllers A B and C into a ribbon cable order K040B0068 with M 850K086 K040B0069 with M 850K109 comes already installed on the Hexapod base plate Note that this box is not shown in the dimensional drawing on p 64 m Power Connectors LEMO 2 pol Motor power for all 6 Hexapod motors 24 V DC is provided from the Hexapod controller via the M850B0123 splitter
21. 0K109 Hexapod MS 155E Release 2 0 0 Page 53 System Commands WWwW pi ws Piezo Nano Positioning PI 5 Query Motion Status Description Format Parameters Response Polls the motion status immediately 5 ASCII character 5 none 0 motion complete system ready for new command 1 Platform is moving 2 Separate axis A is moving 4 Separate axis B is moving 6 Separate axes A and B are moving 6 Position Change Description Format Parameters Response Asks if position has changed since last POS query 6 ASCII character 6 none 1 Position has changed 0 No position change NOTE The M 840 M 850 Control program for the host PC does not support this Command 24 Description STOP Motion Similar to STOP command Stops motion of axes A and B also Motion caused by the MOV command can be stopped by pressing Ctrl X on the controller keyboard Motion initiated by the FSN command can M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 54 System Commands Format Parameters Response Remarks 27 ESC Description Format Parameters Response Piezo Nano Positioning PI only be stopped with the 27 ESC command see below 24 ASCII character 24 none none If motion is actually stopped sets error code to 10 After 24 or STOP an INI move is required before POS gives reliable values and other move commands are allowable
22. 6 M 850K109 Hexapod MS 155E Release 2 0 0 Page 3 Piezo Nano Positioning PI Introduction m 000013094 screw set for mounting m 000012852 000012853 O ring seals for protection class IP 64 m MS 155 User Manual this document The M 850K0109 Hexapod includes m M850B0111 Hexapod mechanics m M850B0115 cable set for Hexapod consisting of 1 x F 206 033 68 pol 3 m 1 x K040B0071 MDR68 MDR68 1 1 35 m 1 x KO60B0026 Switchcraft 4 pol 35 m 1 x KO60B0024 DSub 3W3 1 1 35 m 3 x KO60B0027 Lemo Lemo 2 pol 10 m 1 x KO40B0069 MDR68 3 x DB25 10 m with splitter box 3 x K040B0070 DB25f DB25m 1 1 0 5 m 1 x C030B0003 Hexapod line driver box controller side 1 x C030B0004 Hexapod line driver box mechanics side 1 x M850B0123 splitter box m M 850 502 M 850 Hexapod motor controller mg M 890 HS software CD for M 850 und M 840 m 3763 line cord m 4296 US keyboard m F 206 MC6 manual pad with interface board m 000013094 screw set for mounting m 000012852 000012853 O ring seals for protection class IP 64 m MS 155 User Manual this document 1 1 Safety Precautions I m Do not hold the Hexapod on the struts www pi ws M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 4 Introduction www pi ws Piezo Nano Positioning PI CAUTION Do not interchange the C030B0003 and C030B0004 line driver boxes when connecting the system Strictly adhere to the connecting instructions given in this documentation and any acc
23. AXIS_XSP LF A NOSTAGE LF Response if axis A is configured for M 505 6PD X HEXAPOD_AXIS_XSP LF A M 505 6PD LF Get Error Get Error code Error codes almost always and in most circumstances refer to the previously received command some innocuous commands like VER do not always set the code to 0 Note that the ERR command itself never fails and sets the error code to 0 No error Parameter syntax error Unknown command INI required before move at this time SGA parameter out of range Motion range exceeded Velocity range exceeded o ON O Q N gt O Attempt to set pivot point while U V or W not all equal to 0 Last command was S TOP INI required before next move or before valid position data can be obtained 11 SST parameter out of range 13 NAV parameter out of range 15 Invalid axis identifier M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 27 System Commands Format Parameters Response Trouble shooting 17 23 46 47 48 53 54 200 201 ERR none Piezo Nano Positioning PI Command parameter out of range Invalid Axis F 361 Optical Power Meter missing F 361 cannot be initialized is not initialized F 361 communications error MOV command motion in progress Unknown parameter No stage configured File with stage axis parameters not found Error number System is busy moving FSN
24. EL Response vvvvv LF Even though Hexapod axis designators can be specified and reported the Hexapod velocity setting as a whole is given not the speeds of the specific directions The A and B velocities do however refer to the individual separate axes Optional for Hexapod A for separate axis A B for separate axis B Value if the velocity setting currently in effect System is busy moving M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 52 System Commands WWwW pi ws Piezo Nano Positioning PI VER Get Version Description Format Parameters Response Troubleshooting Get firmware version The system reports the firmware version of the controller VER none Firmware version System is busy moving VMO Virtual Move Description Format Parameters Response Troubleshooting Virtual Move The system reports whether or not the target position is reachable from the current Hexapod position The command can be used to check the working space To do so move the Hexapod to the INI position before evoking VMO No motion occurs The current target position is not changed VMO Xp Yp Zp Up Vp Wp Identical to MOV command except that no motion occurs Axis parameters 0 indicates target position can be reached 1 indicates target position is outside the working space Answer comes after any current move completes M 850K086 M 85
25. Piezo Nano Positioning PI MS 155E User Manual M 850K086 M 850K109 Hexapod 6 Axis Positioning System Release 2 0 0 Date 2006 02 08 This document describes the following product m M 850K086 Hexapod Positioning System Z axis travel range 5 mm m M 850K109 Hexapod Positioning System Z axis travel range 25 mm Physik Instrumente PI GmbH amp Co KG Auf der Romerstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the NanoWorld www pi ws info pi ws www pi ws I Physik Instrumente PI GmbH amp Co KG is the owner of the following company names and trademarks PI The following designations are protected company names or registered trademarks of third parties Windows LabView Copyright 1999 2006 by Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The texts photographs and drawings in this manual enjoy copyright protection With regard thereto Physik Instrumente PI GmbH amp Co KG reserves all rights Use of said texts photographs and drawings is permitted only in parts and only upon citation of the source First printing 2006 02 08 Document Number MS 155E Release 2 0 0 M 850K086_K109_User_MS155E200 doc Subject to change without notice About this Document Users of this Manual This manual is designed to help the reader to install and operate the M 850K086 M 850K109 Hexapod 6 Axis Positioning System It assumes that the reader has a fundame
26. S 155E Release 2 0 0 Page 56 10 steps loop increment position make a string send CMD to the controller request for move complete loop waiting for 1 until move complete WO Operating Examples www pi ws Piezo Nano Positioning PI Version 2 polling until movement ready procedure y_scan_5 const check_str string 2 0 10 0 Linefeed var ch char i integer pos double str_pos string temp_str string begin pos 0 set position to zero for i 1 to 10 do 10 steps loop begin pos post 0 1 increment the position str pos 1 4 str_pos make a string set_output MOV send CMD to the Y str_pos controller repeat loop until move complete temp_str ch sendcharrs232 5 send an ascii 5 repeat loop for RS232 until LF end if readinputbuf ch then temp_str temp_str ch until ch 10 until linefeed LF until temp_str comes check_str until move complete end set_output MOV X0 YO ZO UO VO WO M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 57 Piezo Nano Positioning PI Troubleshooting 7 Troubleshooting No Communication via RS 232 Check the configuration of the COM port Is it set to 57 6 k baud 8 data bits 1 stop bit no parity on both sides Connect a keyboard and a monitor to the Hexapod controller and watch the boot procedure During the firmware startup process the communication settings appear on th
27. The following documentation provided on this CD is relevant for the M 850K086 M 850K109 Hexapods m Hexapod Control software GUI for Microsoft Windows platforms m LabVIEW drivers support the PI General Command Set based on ASCII communication m Hexapod DLL Windows DLL Library m COM module for Microsoft Windows platforms with COM support installed WWW pi ws M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 6 Quick Start Piezo Nano Positioning PI r Quick Start CAUTION Never hold the Hexapod on the struts 2 1 Unpacking The Hexapod mechanics and the controller are each shipped in separate special cardboard boxes with form fit styrofoam inserts The size and elasticity of the packaging has been calculated to prevent damage to the equipment during shipping It is important to preserve these materials in case you ever need to return the units to PI for servicing The figures below show the individual parts of the transportation package starting from the outer cardboard box in the order of the unpacking steps Note that the Hexapod is shrink wrapped in antistatic foil together with desiccant bags not shown Preserve these materials too and use them again whenever repacking the Hexapod WWW pi ws M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 7 Quick Start Piezo Nano Positioning PI www pi ws M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 8 Quick Start Piezo Nano
28. ange The operation of the optical reference switch is not affected by rotation around the actuator axis i e it works independent of the angular position of the strut end joints and hence independent of the lengths of the other struts Upon power up of the Hexapod controller an initialization routine must be first performed during which each linear actuator is commanded to the absolute center of its travel range All positioning commands are referenced to this center position Two limit switches are present to cut motor current and protect the unit from mechanical damage in case of a controller malfunction or software problems The Hexapod base plate contains all electrical connectors cable grooves and the strut controllers All of the six linear actuators have a DC motor driven backlash free spindle combined with a backlash free gearhead Each actuator can be controlled individually in length over the range of 5 mm M 850K086 25 mm M 850K109 Each set of lengths for the six linear actuators defines a one position location and orientation of the platform in six degrees of freedom It is not possible to cause excessive mechanical stress by driving the struts to some random position M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 16 Piezo Nano Positioning PI System Description 3 1 2 Six Axis Motion Synchronization Even when the electronics drives the platform along orthogonal axes and around fixed pivot
29. ano Positioning PI MOV Y1 245678 X1 23 V0 56789 The new target position is X 1 23mm Y 1 2457mm Z 0mm U 0deg V 0 5679deg W 0deg After a new command MOV Z1 2 the new target position is X 1 23mm Y 1 2457mm Z 1 2mm U 0deg V 0 5679deg W 0deg The pivot point is set by the SPI command All rotation is done around axes through the pivot point See Section 4 Hexapod Coordinate System for details none Parameter out of limits Motion Complete Motion complete The system reports 1 Since commands are called one after another from the FIFO buffer the system will not send 1 while a MOV command is running MOV none 1 if motion complete System is busy moving MOV is not suitable to be used within sequences of MOV commands If a MOV is called while a MOV command is running the system will await standstill before sending 1 WWwW pi ws M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 36 Piezo Nano Positioning PI System Commands MOV Move To Absolute Position Description This command is very similar to the MOV command While performing a MOV command movement a new target position can be set by a subsequent MOV command In this case new target positions will be programmed immediately All motions will change in a smooth manner according to the acceleration limitations settings in the C842data dat configurations file entry To avoid s
30. box WWW pi ws M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 60 System Specifications Piezo Nano Positioning PI 8 2 2 Controller 5 ta C B55 60 Manual Control Pad Fig 12 Controller rear panel connections and diskette drive www pi ws M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 61 System Specifications Connectors from top to bottom left to right m Line power and fuse carrier 100 240 V 50 60 Hz Fig 13 Push tab down and pull out carrier to access fuses m Power sockets for Hexapod mechanics 4 pin socket 12 V used to supply the C030B0004 Hexapod line driver box Pins Function 1 GND 2 12V 3 amp 4 unused 3 pin socket 24 V used to supply the Hexapod mechanics Pins Function 1 GND 2 24 V m DBO unused Www pi ws M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 62 System Specifications m Connection for optional external VGA monitor standard pinout m Unused m RS 232 DB 9m COMI for connection to host PC standard pinout m Connection for optional external keyboard standard AT type keyboard pinout m Optional GPIB IEEE 488 interface connection not used with M 850K086 and M 850K109 m Connection for manual control pad m Eight motor control connectors one for each strut and two for optional axes A and B Pinout is as follows Function 12V Motor Motor Power GND MAGN SIGN output
31. cables supplied like shown in Fig 1 for M 850K086 in Fig 2 for M 850K109 Make sure that e the 6 headed cable F 206 033 has each connector plugged into the correspondingly numbered socket of the controller e the K040B0070 cables on the Hexapod mechanics connect strut controller A with splitter box socket A strut controller B with socket B and strut controller C with socket C e the labeled side of the power cables KO60B0028 for M 850K086 KO60B0027 for M 850K109 connects to the M850B0123 splitter box WWwW pi ws M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 11 PI Piezo Nano Positioning Quick Start e90080r0x scans _ xogJanijds uzg wg puny azoa podex H I Wor wor i wot 47008090 x i DIL Auq 89008070 i wis S 1 a WE WII WET puree podexsy 00080 09 xoq J AUP dull podexsy A EZLOBOSEN sj zan s xoquaniids aweipapids y suoni f00080 09 xoq ws JOAUP QUI eea WE fia i 420080903 podex H BONI 19 O UO9 podex9H wise wee 92008090 28M0d AZI Z009090M Jamod AVZ Pro l JOUIGeD 1 lo uoo xoq J AUD ull 43 0 UO podex H Auq Z10805 a i ws n I wiz 6 008000 r s i 57003090 xoqi nids I i ESE n j u swemapids JBUIGES JB OIJUOD Fig 2 System overview M 850K109 Fig 1 System o
32. d T are alias names for X Y Z axes Troubleshooting System is busy moving SST Set Step Size Description Format Example Response Troubleshooting Set step size for manual position control pad Units for X Y Z mm U V W deg The values are interpreted as floating point format It is sufficient to set new values only for the axes to be changed Range X Y Z 0 0001 0 5 mm U V W 0 0001 0 5 deg SST Xp Yp Zp Up Vp Wp X Y Z U V W linear and rotary axes p Parameter mm or deg defaults are all 0 01 SST Y0 002 U0 05 Sets the step size for axis Y to 2 um and for U to 50 mdeg none Parameter out of limits WWwW pi ws M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 44 System Commands WWwW pi ws Piezo Nano Positioning PI SST Get Step Size Description Format Response Troubleshooting Get step size setting being used for manual position control pad SST X vvvvvSP LF Y vvvvvSP LF Z vvvvvSP LF U vvvvvSP LF V vvvvvSP LF W vvvvvLF SP space LF line feed Parameter out of limits STOP Stop Motion Description This command aborts the current move of the Hexapod platform Because of timing constraints with a move in progress this command may not be recognized at typing speed With the Control software the blue STOP button Bi n
33. dures It consists of an interface board C 855 60 that installs in the Hexapod controller and a control pad with six digital potentiometer knobs The control pad allows manual control in all 6 degrees of freedom with a variable step size Firmware versions newer than hex0030 exe support this option Fig 6 Six axis manual position control pad and interface board for the Hexapod system 4 Verify that jumpers JP1 and JP2 on the C 855 60 manual pad control interface board are both open base address 0340 hex 5 Installthe interface board in the Hexapod controller see Section 3 2 4 below 6 Connect the cable of the manual control pad to the newly installed control board f Switch on the controller firmware versions newer than hex0030 exe required The manual pad should be recognized automatically The step size to use for each axis can be set using the SST command p 44 Troubleshooting If the controller does not have a built in display connect a standard VGA monitor to it Switch on the controller and observe the controller boot process on the monitor The firmware detects the board automatically and a green colored Manual control board available message appears If no such board is installed a red colored message M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 20 System Description Piezo Nano Positioning PI reading Manual control board not available can be seen 40 900000
34. e screen All commands sent via RS 232 can be seen in the firmware status line The data file hexbrate dat which is located in the C Hexapod directory must have the following content PHYSIK INSTRUMENTE PI GmbH street address postal code city Germany Baudrate 57600 and must not contain a line with GPIB4 Is the right cable being used Use a null modem cable If no communication can be established interface settings on the host PC should be checked Try disabling the infrared port if any and make sure the serial port is enabled www pi ws M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 58 Piezo Nano Positioning PI System Specifications 8 System Specifications 8 1 Technical Data Models M 850K086 M 850K109 Units Travel X 8 39 mm Travel Y 8 44 mm Travel Z 5 25 mm Travel U V 1 4 7 Travel W 1 8 9 Actuator stroke Ls 5 25 mm Actuator design resolution 0 0025 0 0025 um Min Incremental Motion X Y 10 10 um Min Incremental Motion Z 1 1 um Min Incremental Motion U V W 10 10 prad Repeatability X Y 2 2 um Repeatability Z 1 1 um Repeatability U V W 10 10 urad Velocity X Y Z typ 0 1 0 1 mm s Velocity U V W typ 1 1 mrad s Velocity X Y Z max 0 5 0 5 mm s Velocity U V W max 5 5 mrad s Actuator Stiffness gt 15 gt 15 N um Load capacity horizontal mount 2000 2000 N Z direction Load capacity all orientations 1100 1100 N CoG
35. er i 17 321 RS 232 Serial Interface u u 18 322 Communication Checks 19 323 Manual Control Pad 20 324 Installing Add On Cards in the Hexapod Controller 21 Hexapod Coordinate System System Commands 5 1 Command Structure 25 5 11 Command End of Line Terminator nenne 25 5 12 Report Terminator 25 5 2 Command Reference alphabetical 26 Operating Examples Troubleshooting System Specifications 81 Technical Data a 59 82 Connectors and Pinouts 60 821 Hexapod Mechanics 60 822 5 Controller gt an i fienile zaia 61 83 Dimensional DraWings 64 831 Hexapod Mechanics 64 M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 1 www pi ws Contents 832 Hexapod Controller 833 Hexapod Line Driver Boxes rrn M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 2 Piezo Nano Positioning PI Introduction 1 Introduction NOTE M 850K086 and M 850K109 differ from the standard M 850 Hexapod only in the mechanics part and the cabling Any references to the M 850 in documentation a
36. er to determine its level Subsequent TAV commands will reply with the average of the specified number of readings Range 1 to 10000 Default N 1 A1 NAV N A N Number of readings A Optical board specifier can be A1 or A2 if not specified board 1 is read NAV 10 A2 The next TAV A2 command will reply with the average of 10 readings of the analog input of optical board 2 NAV Get Number of Values for TAV To use this command an optical board optional must be installed Description Format Parameter Response Troubleshooting Reports the programmed number of readings of the analog signal to be averaged when a value is required NAV A A Optical board specifier can be A1 or A2 if not specified board 1 is read N 1 to 10000 System is busy moving www pi ws M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 39 Piezo Nano Positioning PI System Commands POS Get Position Description Get Position of the Hexapod or the separate axes No response during motion Format POS X Y Z U V W A B X Y Z U V W linear and rotary axes of the Hexapod A B separate axes POS without any parameters corresponds exactly to POS XY ZU V W Examples POS Response X vvvvvSP LF Y vvvvvSP LF Z vvvvvSP LF U vvvvvSP LF V vvvvvSP LF W vvvvv LF POS A X Response
37. figuration menus it is labeled menu enter Inconsistent baud rate settings at F 361 and in the F 361 DAT configuration file F 361 connected to configured for incorrect serial port With optical board F 361 DAT file exists in controller C HEXAPOD directory thus deactivating access to any optical boards Rename this file VEL Set Velocity Description Set Velocity The allowed range is 0 004 1 2 mm s The velocity setting is the speed to which the platform will be accelerated during subsequent moves If the move includes a rotary component the speed set is that of the upper joint which must execute the largest displacement This definition ensures that the maximum www pi ws M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 50 System Commands Format Alternative Format Parameters Example Response Troubleshooting Piezo Nano Positioning PI expansion contraction velocity of any strut is not exceeded as no joint can move faster than its strut expands contracts Note that a different velocity is used for the platform motion in response to an INI command The allowable velocity settings for A and B depends on stages configured VEL Xv Yv Zv Uv Vv Wv Av Bv X Y Z U V W linear and rotary axes of the Hexapod A B separate axes v velocity setting mm s or for axes A or B units as defined for stage VEL v Without any axis descriptor for Hexapod use of any
38. n Format Parameter Response Tell analog value Reports the level of the analog signal at the specified device in floating point with 12 bit resolution With an OPM the value reported will include the units of measure which can be specified in a TAV command Value of 10000 indicates invalid reading With an optical board value is in volts unit not included in response in a 0 10 V range TAV A U R A Device number up to 2 optical boards or 2 optical power meters can be connected but not one of each can be A1 or A2 if not specified device 1 is addressed U Unit OPM only R Sensitivity OPM only If TAV is invoked with an U parameter no analog value will be returned but the M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 49 Piezo Nano Positioning PI System Commands measuring unit will be returned instead U uW or U dBm or U mW UuW measuring unit is uW 1E 6 Watt UmW measuring unit is mW 1E 3 Watt UdBm measuring unit is dBm dBm 10 log10 Power 1mW If TAV is invoked with a R parameter no analog value will be returned but the measuring range will be shown instead R 0 or R 1 Troubleshooting Attempt to address device A1 when device A2 is desired or vice versa With F 361 OPM F 361 device is not powered up Connect the power supply and turn on the F 361 device by pressing the power on button Since this button is also used to access con
39. n Class IP 64 WWwW pi ws Protection class IP64 requires the following The threaded plug see Fig 3 must remain in the air inlet the Hexapod comes with the threaded plug inserted The O ring seals must be inserted in the appropriate slots on the bottom side of the Hexapod base plate M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 13 Quick Start Piezo Nano Positioning PI The O ring seals are not installed at delivery For the slot locations see the dimensional drawing on p 64 Use the inner and the outer slot but not the center slot which is required for ventilation When protection class IP64 is not required the O ring seals and the threaded plug are not necessary Threaded plug Fig 3 Air inlet in the Hexapod base plate shown with threaded plug inserted WWW pi ws M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 14 Piezo Nano Positioning PI System Description 3 System Description M 850K086 M 850K109 Hexapod systems consist of the Hexapod mechanics a movable platform supported by six linear actuators the control electronics a few connecting cables and two line drivers see p 3 for a component list Motion in all six degrees of freedom can be accomplished using the DC motor driven linear actuators which extend contract the struts of the Hexapod platform The Hexapod is controlled by a PC based 6 axis DC motor controller the Hexapod controller with its two installed m
40. nd software should be taken as applying to the M 850K086 M 850K109 Hexapods M 850K086 and M 850K109 differ from each other only in the travel range and in the length of the connecting cables The Hexapod mechanics provides servo controlled motion in 3 translation axes and 3 rotational axes The Z axis travel range is up to 5 mm for the M 850K086 and up to 25 mm for the M 850K109 depending on the positions of the other axis see Technical Data p 59 for detailed specifications Repeatability for a six axis move is 1 um in Z 2 um in X and Y and 10 urad for rotations The load capacity in case of horizontal mount is 2000 N in Z direction Optionally the Hexapod mechanics can be adapted for protection class IP 64 see p 13 for details The M 850K086 Hexapod includes m M850B0101 Hexapod mechanics m M850B0114 cable set for Hexapod consisting of 1 x F 206 033 68 pol 3 m 1 x K040B0057 MDR68 MDR68 1 1 21 m 1 x K060B0019 Switchcraft 4 pol 21 m 1 x KO60B0025 DSub 3W3 1 1 21 m 3 x KO60B0028 Lemo Lemo 2 pol 6 m 1 x K040B0068 MDR68 3 x DB25 5 5 m with splitter box 3 x K040B0070 DB25f DB25m 1 1 0 5 m 1 x C030B0003 Hexapod line driver box controller side 1 x C030B0004 Hexapod line driver box mechanics side 1 x M850B0123 splitter box m M 850 502 M 850 Hexapod motor controller m M 890 HS software CD for M 850 und M 840 m 3763 line cord m 4296 US keyboard m F 206 MC6 manual pad with interface board WWwW pi ws M 850K08
41. ntal understanding of basic servo systems as well as motion control concepts and applicable safety procedures The manual describes the physical specifications and dimensions of the M 850K086 M 850K109 Hexapod 6 Axis Positioning System as well as the installation procedures which are required to put the associated motion system into operation Conventions The notes and symbols used in this manual have the following meanings CAUTION Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in damage to equipment NOTE Provides additional information or application hints Related Documents The software tools which are delivered with the M 850K086 M 850K109 Hexapod 6 Axis Positioning System are described in their own manuals Updated releases are available via FTP or email contact your Physik Instrumente sales engineer or write info pi ws www pi ws Contents Introduction 1 1 Safety Precautions Ea 12 Software Overview Quick Start 21 Un packitiqu tus uu ua u Zaa su ianya E TRA SINES 22 MOUntIngisg sy n Su cdedeit trate a a 10 23 Connection and Startup 11 24 Protection Class IP 64 13 System Description 31 Hexapod Mechanics 16 a kt Design salina 16 312 Six Axis Motion Synchronization i 17 32 Hexapod Controll
42. ny parameters the Hexapod goes to its reference point at a safe speed The initialization is carried out in four steps 1 All struts start toward their reference positions midpoint reference switches at the same time at the same velocity Note that the platform trajectory in X Y Z U V W coordinates can be quite complicated 2 The platform is then raised slightly so that the reference switches can all be re approached from the same side 3 The struts are then contracted one by one to the reference point 4 The platform position is readjusted slightly usually upwards All motion parameters except the pivot point velocity and manual pad step size are reset To stop motion during an INI command send an ASCII 24 to the controller with the M 840 M 850 Control software on the host computer this can be done by pressing the ESC key INI with A or B parameters will move separate axes to their reference positions To initialize separate axes INI must have been invoked without parameters before Each time INI is invoked without parameters separate axis initializations must be performed again before those axes are used M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 34 System Commands WWwW pi ws Piezo Nano Positioning PI MAR Move and Respond Identical to the MOV command see below except that two separate one line responses are given one when the motion actually begins and one when the motion
43. ompanying Technical Notes and to the labeling of the boxes and cables Incorrect connecting can cause damage to the equipment CAUTION Scan command runout may cause damage to the attached application The trajectory specified by the X Y Z U V and W parameters to the FSC and FSN scan commands is not followed as exactly as motion initiated with a MOV command but rather with a certain amount of wobble For large scanning ranges for example 1 mm this may result in an additional deviation of up to 2 6 um from the desired trajectory which if unexpected could damage the attached setup CAUTION Note that with the servo control loop OFF set with the SVO command the hexapod position is fixed by friction only As a consequence of this load capacity may sink dramatically Hexapods can get damaged and sink down in this case M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 5 Piezo Nano Positioning PI Introduction 1 2 Software Overview NOTE Any references to the M 8x0 or F 206 in documentation or software should be taken as applying to the M 850K086 M 850K109 Hexapods This manual contains a listing of the commands which are used with the Hexapod Controller It supersedes the standard M 840 M 850 User Manual MS 54E which is on the software CD A detailed description of the software to be run on your host PC is to be found in separate manuals which are included on the M 840 M 850 software CD
44. onsideration It can be defined with the linear coordinates R S T and stays relative to the platform Any rotations U V and W moves are referenced to the new pivot point The final position after a move with rotation components is calculated by considering the UVW position components in the order U then V then W This is done without regard to whether these values were explicitly given in the current command or the result of previous commands The evaluation of position specifications is illustrated below To facilitate easy visualization a T shaped top plate as with F 206 for example has been used in place of the round M 850K086 M 850K109 platform www pi ws M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 23 Piezo Nano Positioning PI Hexapod Coordinate System Top plate of the M 850K086 M 850K109 is NO marked with the Hexapod coordinates m i sata clutter El Platform at a position x y z and U 10 Platform at INI position LI Platform at INI position E Platform position of x y z U 10 and E Platform position of x y z 10 U 10 V 10 and W 10 Fig 8 Platform positions illustrated with F 206 top plate XYZ axes shown displaced to reduce clutter pivot point set to upper left corner of platform www pi ws M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 24 Piezo Nano Positioning PI System Commands 5 System Commands The Hexapod system comes with control software
45. otion control boards The controllers operating software accepts motion commands via a serial RS 232 communication link from a host PC not included All positioning commands are given in Cartesian coordinates and transformed by the controller to the Hexapod actuator axis specific positions and velocities before execution Fig 4 M 850K086 Hexapod mechanics WWW pi ws M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 15 System Description Piezo Nano Positioning PI 3 1 Hexapod Mechanics The six variable length DC motor controlled linear actuator legs struts steer the Hexapod platform to the commanded positions with micrometer accuracy The six linear actuators are mounted between the base plate and the platform The advantages of the Hexapod design are low weight compact structure high stiffness six dimensional motion and high resolution 3 1 1 Design www pi ws All components are designed as short as possible and are mounted free of backlash in axial orientation This design gives the mechanical system exceptional stiffness and offers excellent positioning repeatability The joints at the strut ends are designed for extra high stiffness in the radial direction They are designed as functional modules and can be manufactured tested and replaced separately The materials and lubricants used are chosen to assure long term operation in the specified operational environment and temperature r
46. ow sends 24 instead of STOP LF If motion is actually stopped the error code will be set to 10 and an INI move will be required before POS gives relieable values and other motion commands are allowed To stop all motion including motion of separate axes 24 has to be sent Motion initiated by the FSN command can only be stopped with the 27 ESC command see below Motion initiated by the MOV command can be stopped by pressing Ctrl X on M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 45 Piezo Nano Positioning PI System Commands the controller keyboard Format STOP Parameters none Troubleshooting Communication breakdown SVO Set Servo on or off CAUTION Note that with the servo control loop OFF the Hexapod position is fixed by friction only As a consequence of this load capacity may sink dramatically Hexapods can get damaged and sink down in this case Description Set servo loop of the Hexapod ON or OFF Note that with the servo control loop OFF no positioning of the Hexapod or axes A and B is possible The SVO command always affects both the Hexapod and the separate axes A and B To move the Hexapod again the servo loop must be turned on again The INI command automatically turns servo on Format SVO N Or SVO XN YN ZN UN VN WN KN LM MN AN BN Parameters N 0 for servo off N 1 for servo on Example SVO 1 Turns the servo loop on www
47. s limited by the VEL command only As a consequence of this the target position might be reached before the cycle time has ended Though an appropriate velocity is calculated for each MOV command the real Hexapod velocity cannot fall below a minimum value and the strut velocities will not exceed the velocity set by the VEL command www pi ws M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 41 System Commands WWwW pi ws Piezo Nano Positioning PI SCT Get MOV Command Configurations Description Format Response SGA Set gain Get cycle time of the MOV movement SCT Response T vvvvvSP LF To use this command an optical board optional must be installed Description Format Parameters Example Response Troubleshooting Set gain of the optical amplifier SGA N A N Gain value can be 1 10 100 or 1000 A Optical board specifier optional can be A1 or A2 if not specified board 1 is read Default N 100 A1 SGA 10 A2 Sets the gain of optical board 2 to a value of 10 None System is busy moving SGA Get Gain Value To use this command an optical board optional must be installed Description Format Parameters Get optical gain value Reports the gain setting of the optical amplifier SGA A A Optical board specifier can be A1 or A2 if not specified board 1 is read M 850K 086 M 850K109 Hexapod MS 155E
48. slot and fasten it with the screw www pi ws M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 21 Piezo Nano Positioning PI System Description CAUTION Be gentle when inserting the card use of excessive force can cause hairline cracks 7 Replace the clamping plate and relatch using the lever 8 Make sure that no internal header connectors have been dislodged 9 Connect the ground cable to the controller cover slide the cover carefully into position then insert and tighten the screws www pi ws M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 22 Hexapod Coordinate System Piezo Nano Positioning PI A Hexapod Coordinate System All move commands and coordinate transformations are based on the following axis definitions m The Hexapod struts are mounted on the base plate at 6 joints B1 to B6 arranged in a circle m The opposing three joint pairs A1 to A6 are connected to the platform located on a circle m The origin of the fixed coordinate system XYZ is located in the center of the upper six joints A1 A6 It is considered the center of the Hexapod after initialization All translations XYZ moves are performed on an interpolated straight line path That means all struts start and stop their moves at the same time and their velocities are calculated accordingly For pure translations the orientation of the platform stays unchanged For rotations the current pivot point is taken into c
49. tops in movement between subsequent MOV commands MOV commands should be sent periodically The cycle time must be set using the SCT command The MOV command will not refresh the real actual position that is displayed on the controller s monitor No movement bar or any other feedback will be seen on the controller s monitor Movements caused by the MOV command cannot be stopped CAUTION The trajectory is executed along a trajectory described by the parameters X Y Z U V W The motion does not follow this trajectory exactly There is a wobbly motion occurring instead For large scanning trajectories for example 1 mm this may result in a deviation of gt 2 5 um from the desired trajectory which could damage the attached setup Moves Hexapod but NOT separate axis Units for X Y Z mm U V W deg The values are interpreted as floating point format Sequence of rotation is U gt V gt W Internal accuracy for all transformations is 18 digits The controller checks if the programmed www pi ws M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 37 System Commands Format Example Response Troubleshooting Remarks Piezo Nano Positioning PI position can be reached before it starts motion If only one of the six Hexapod coordinates is out of range the motion of the Hexapod will not be started It is sufficient to set new positions only for the axes to be moved MOV Xp Yp
50. verview M 850K086 M 850K086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 12 www pi ws Quick Start Piezo Nano Positioning PI 2 Verify that the mechanics is not at the end of a travel range or in contact with any object that might hinder movement 3 Connect Hexapod controller to host PC NOTE On the Hexapod controller side you will be using RS 232 port COM1 On the host PC side either COM1 or COM2 can be used 4 Power up host PC and Hexapod controller See Troubleshooting p 58 if you suspect that the controller is not booting properly 5 Install the host software on the host PC The software package supports a common installation procedure A setup program guides you through all installation steps using interactive dialogs This program setup icon is located in the root directory of the M 840 M 850 software CD that comes with the system After running the program the M 840 M 850 host software is fully installed 6 Start the Hexapod host software on the host PC Make sure the software is set to use the port selected in step 3 Make sure the baud rate setting is the same at the controller and the host PC the controller firmware defaults to 57 6 kBaud 7 Thefirstcommand entered in the command window must be INI No other motion commands will be accepted until INI is executed 8 If there are any problems with communication please read the Troubleshooting section p 58 2 4 Protectio
51. ware if desired The Hexapod controller is connected to the mechanics as shown in Fig 1 on p 12 Data transfer between the Hexapod controller and the host PC is based on an RS 232 data link with user settable baud rate This technique allows data transmission over large distances if required WWW pi ws M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 17 Piezo Nano Positioning PI System Description For testing purposes a keyboard and a VGA monitor can be connected to the controller and commands entered there directly After starting the system all activity direct or via the host will be displayed on the monitor connected to the controller f Sh Fig 5 Hexapod controller connections All operating commands to be performed by the controller can be sent via the communications interface Some configuration changes must be made at the controller itself either with a keyboard and monitor or via the controller diskette drive 3 2 1 RS 232 Serial Interface The RS 232 port data rate can be changed by changing the value in line 5 of the hexbrate dat data file The factory default setting is 57600 baud To edit the hexbrate dat ASCII file in the controller file system proceed as follows 1 Connecta standard PC keyboard and VGA monitor WWW pi ws M 850K 086 M 850K109 Hexapod MS 155E Release 2 0 0 Page 18 System Description Piezo Nano Positioning PI 2 Power up the Hexapod controller and
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