MicroNode I/O Ethernet DIDO User Manual
Contents
1. http 10 202 3 78 Gi Controller VO Blocks Figure 11 Device Web page Page 11 of 27 MKS Instruments CIT Products 2006 All rights reserved eemks MicroNode I O Ethernet DIDO User Manual Technology for Productivity e The Device page provides current status for the unit and provides basic control of the outputs through the UO block links control of the outputs is only allowed when the device is in diagnostic mode Once in production mode the outputs can no longer be controlled via the webpage sven Bra As Click on the underlined links to view the I O Figure 12 I O Links on Homepage e Selecting the underlined items in the I O blocks chart will launch secondary I O pages The following figure show the digital input statuses that are displayed after an underlined link is selected Block 0 Discrete Inputs Figure 13 Digital Input Web Page e The digital output webpage provides basic control of the output points if the unit is in diagnostics mode The pull down menu allows the user to select the digital output state There is also a Blinking Output pull down menu that allows the user to put an output into a blinking state Page 12 of 27 MKS Instruments CIT Products 2006 All rights reserved E smks MicroNode I O Ethernet DIDO User Manual Technology for Productivity me 13 v Figure 14 Digital Output Webpage e Click on the li2. 0 02 0 004 57 57 5 11747 5852 0 004 0 004 D 57 58 0 11748 5853 0 0 004 0 57 58 5 11749 5853 0 004 0 004 0 02 57 59 0 11750 5854 0 004 0 004 0 02 57 59 5 11751 5854 0 004 0 02 58 00 0 11752 5855 0 004 0 02 58 00 5 11753 5855 0 004 D 58 01 0 11754 5856 0 004 0 58 01 5 11755 5856 0 0 02 58 02 0 11756 5857 0 004 0 02 58 02 5 11757 5857 0 004 0 58 03 0 11758 5858 0 0 02 58 03 5 11759 5858 0 0 02 58 04 0 11760 5859 0 004 0 58 04 5 11761 5859 0 004 0 02 58 05 0 11762 5860 0 0 02 58 05 5 11763 5860 0 004 0 02 58 06 0 11764 5861 0 004 D Wat bi cpdata1 Ready Figure 24 Collection Plan Data 7 2 TOOLweb Tool Side Interface The tool side interface is relevant when a MicroNode is connected to a BlueBox ina semiconductor process tool APC and e diagnostic system The following messages are supported via the TOOLweb tool side Interface Table 9 TOOLweb Messages Supported ControlParameter SetRequest Response The names and units as exposed in the CapabilitesResponse are the same as defined in the channel configuration Reference the BlueBox Manual for additional details on interfacing with BlueBox Page 24 of 27 MKS Instruments CIT Products 2006 All rights reserved emks MicroNode I O Ethernet DIDO User Manual Note ug Microsoft Internet Explorer 5 0 1 or higher is required Microsoft Internet e Explorer versions less than 5 5 may not function as expect
3. O Ethernet DIDO User Manual R il 1 SSES For the purposes of this device a coil shall be synonymous with a Discrete Output As defined in the MODBUS Application Protocol Specification the device shall support reading one or more coils discrete outputs via the ReadCoils function WriteSingleCoil 0x05 Dee ee ee WriteMultipleCoils 0x0F De eee ee Se ee ReadHoldingRegisters 0x03 bens As defined in the MODBUS Application Protocol Specification the device shall support reading one or more registers via the ReadHoldingRegisters function WriteSingleRegister 0x06 Is defined to access the HoldingRegisters When accessing an IO point the following method is used Note the digital input address is the reference number of the digital input minus one DI address Reference of DI Number 1 For example for DI number 4 with a reference of 4 the DI address would be 3 Map this data in your Modbus TCP scanner d e Note ta For more details on Modbus see http www modbus org WATCHDOG TIMER The Modbus TCP Interface includes a watchdog timer to monitor and react in the event that communications are not maintained between the client and the server within a programmed amount of time If time between communications exceeds the timeout value programmed into the Watchdog Timeout Value Holding Register a timeout will occur and the Watchdog Timeout Counter register will increment 1 count for every timeout event that occu
4. STALLATION AND SETUP wiccccccccccs sane caseeadcecsssuecedanccadeceasandesaaccddecesaacdasnaecnddeensnantacaneaedeenananancnadedte 5 2 1 SHIPPING BOX CONTENTS issiontesonrsnedioneonienonnon ee ionin Eeno ESNEA AaS ENADE IAES ENAU irana EEAS 5 2 2 HARDWARE DESCRIDTION 5 2 3 INSTALLATION EE 5 2 4 AATELIN E E E E EE E E E E EE E E E EE E E EE 6 24 1 Power Supply W g ce eecececcesceseseeseseseeseseeseeecseesesseseeseescseeseescseeseescseeseescaenseeseseeseeseaeeaeeseeesenseneeaeets 7 242 MO E e EE 7 2 5 VONDESGRIPTION BEE 7 2 6 DIGITAL INPUT INTERFACE E SAMIEE edu i ne et eideler hon eerie EES 8 2 7 DIGITAL OUTPUT INTERFACE EXAMPLE erore seie reinar neea en ane o Eaa AEKA REE EE AREA AE aea EEEE 8 2 8 DIAGNOSTIC SERIAL PORT WEE 9 2 9 ETHERNET CONNECTOR eseu eege duc dein so Weare lain Zoe 9 2 10 STATUS LED EE 9 2 11 ROTARY Me TEE 10 GR al DI RE WE 11 4 NETWORK CONFIGURATION 0 ccccccceeecsecceeeeeeeeecceaeceeeeeeeseceacaeceeeeesesecacaeeeeeeeeeeseceaaeeeeeeeseneneanes 14 4 1 CONNECTING TO A COMPUTER VIA TCPYIP ccccccescssseseessessesseeecseceessecseeseceeseessecessaecaeseeeseesesaeeeeeaeenee 14 4 2 CONNECTING VIA A SERIAL TERMINAL SESSION cccccsccssessesseeecesecsesseeseesecaeeeeesaeceessecaeseeeseeeesaeeeeeaeenees 15 5 CONTROLWEB USER INTERFACE 17 6 MODBUS TCP INTERFACE cece eaaaeaeceeeeeeesecaaeaeceeeeesesecceaeeeeeeeseseeesenieeeeees 18 T TOOLEWEB INTERFACE GE 20 7 1 TOOLWEB USER INTERFACE 20 L od lame e
5. address configuration Error Alternating Green Amber Not Supported Not Supported Blinking Amber Unit Okay Diagnostic Mode Watchdog Inactive Standing by for Modbus master to connect Blinking Green Unit Okay Production Mode Watchdog Active Modbus master present and active 2 11 Rotary Switches The Ethernet MicroNode has three rotary switches on its front panel each switch represents a decimal digit 0 through 9 The switches serve two purposes 1 Determine the least significant byte of the IP address 2 Determine the operating mode ean 5 Switch Conditions Production 000 Eatied DHCP a 254 192 168 0 Switch Settings Diagnostic 300 Disable lee e 554 Disabled GE 168 0 Switch Settings 300 When the unit is in normal production mode the combinations of the rotary switches represent a decimal number between 000 to 254 When the number is between 001 to 254 this number is used to configure the last network segment of the static IP address with a factory set prefix 192 168 9 xxx or any other prefix that may be configured through the diagnostic serial port If the rotary switch combination is set to 000 the unit will obtain an IP address automatically using DHCP protocol To set the operating mode to diagnostics mode set the rotary switches to 300 or above In Diagnostic mode the watchdog is disabled and the user is allowed to change the value of the outputs via the Web based diagnostic pages Setting the switch
6. adhered to could result in injury to personnel Caution The CAUTION sign higlights information that is important to the safe operation of the BlueBox or to the integrity of your files ne Note The NOTE sign denotes important information It calls attention to a i procedure practice condition or the like which is essential to highlight On screen buttons or menu items appear in bold and italics Example Click OK to save the settings Keyboard keys appear in brackets Example ENTER and CTRL Pages with additional information about a specific topic are cross referenced within the text Example See page xxx Page 4 of 27 MKS Instruments CIT Products 2006 All rights reserved smks MicroNode I O Ethernet DIDO User Manual 2 Installation and Setup This section describes the digital MicroNode DIDO hardware setup and the Ethernet network interface I O connection examples are given in section 2 6 2 1 Shipping Box Contents e MicroNode product 2 2 Hardware Description VO 37 Pin DSUB See I O Table 110 mm when attached LAT TS E g bh Digital 1 0 MKS status ner iN Iferxe 00 CHLO Mounting Brackets Figure 1 MicroNode DIDO Front Panel 2 3 Installation Mount the unit on a horizontal or vertical surface in a suitable location and or enclosure for your application Provide sufficient clearance and airflow to maintain a 0 C to 55 C ambient operating temperature range Fasten t
7. al outputs will support up to 200 mA load per channel Each output is thermally protected against short circuiting 500 mA typically and includes under voltage protection The output Fault State is accessible through software External Schottky diodes are provided for output transient protection and each I O point is protected with a self resetting poly fuse rated for 500 mA Outputs default to the OFF condition during power up and processor reset conditions The figure below shows the output circuitry 24V Output Driver DIO X 24_GND Figure 8 Output Circuit Page 8 of 27 MKS Instruments CIT Products 2006 All rights reserved emks MicroNode I O Ethernet DIDO User Manual Below is an example of how to interface with the digital outputs for both the sinking and sourcing hardware configurations The digital I O circuitry is powered from an external 24 volt power source via the I O connector 24VIN OCH MicroNode ER DIO1 CH O Figure 9 Sinking Output Figure 10 Sourcing Output 2 8 Diagnostic Serial Port The Ethernet MicroNode has an RS 232 serial diagnostics interface The serial port provides access to a proprietary command line interface with specific commands to display advanced or detailed status information and to control configuration parameters including those available via the Web interface Some are intended for advanced or factory use and are not normally exposed via the Web int
8. bus TCP Interface Use the Modbus mapping details provided through the web browser interface under the Configuration tab Modbus Data Mapping DataType Reference Quantity Description Input Reg 65001 4 Time 32 bit sec 32 bit usec BB Input Reg 65101 1 Temperature 1 100 C i116 Holding Reg 65101 1 watchdog Timeout millsec ui16 Holding Reg 65102 1 Watchdog Count counts uilig Input 1 Lisi Biocknnt con 1 36 block o 00 Figure 18 Modbus Data Mapping The address map for the Modbus registers is listed in the table below Table 7 Modbus Register Map Register Type Address Data Type Range Description Provides status of Block 0 and Block 1 Digital inputs 0 1 Controls Block 0 and Block 1 Digital Outputs Real Real Time Clock value Int 16 bit 1 100 Internal Device Temperature in Degrees Celsius Unsig 16 Bit Unsig 16 Bit ned Int 0 100 65535 ned Int 0 65535 Watchdog timeout value in Milliseconds Writing a value of 0 to the register disables the Watchdog Watchdog Timeout counter Writing to the register resets the counter ReadDiscretelInputs 0x02 Table 8 Modbus Commands As defined in the MODBUS Application Protocol Specification the device shall support reading one or more discrete inputs via the ReadDiscretelnputs function Page 18 of 27 MKS Instruments CIT Products 2006 All rights reserved mks MicroNode I
9. ed Nj Designated Controller 0 0 0 0 IP Address Your IP Address 10 112 0 103 1188 CONFIGURATION ACCESS DENIED Figure 19 Access Control Page 20 of 27 MKS Instruments CIT Products 2006 All rights reserved esmks MicroNode I O Ethernet DIDO User Manual Technology for Productivity 7 1 2 UO Bindings Select the I O points to be available for TOOLweb functions Each point is selected given a description and scaled to meaningful process units Up to 64 variables can be configured ToolWeb WO Binding Y Prohibited v ToolWeb Variables to I O Binding Figure 20 Collection Variables 7 1 3 Data Collection Plans A data collection plan selects the process variables of interest and the frequency of data collection Each collection plan can then be viewed using a Charting Applet or can be downloaded in CSV format to your local PC Page 21 of 27 MKS Instruments CIT Products 2006 All rights reserved esmks MicroNode I O Ethernet DIDO User Manual Technology for Productivity Data Collection Plans Figure 21 Collection Plan 7 1 4 Data Collection Plan Editing Create a collection plan and select the key process variables of interest Edit Collection Plan 0 500 0 Up time Figure 22 Edit Collection Plan 7 1 5 Charting Applet Once a data collection plan is configured you can view the data using a built in charting applet Page 22 of 27 MKS Instruments CIT Prod
10. ed due to limitations of the browser Page 25 of 27 MKS Instruments CIT Products 2006 All rights reserved smks MicroNode I O Ethernet DIDO User Manual 8 Appendix A Specifications Physical Specifications Criteria Specifications Dimensions 80mm 3 1496 Height X 120mm 4 7244 Width X 34mm 1 339 Depth IO Connector 37 pin male D sub Ethernet Connector 100 BaseT RJ45 with EMI filter LED indicators RS 232 Connector 38 400 bps TXD RXD DB9 connector Weight 200 g 0 44 Ib Environmental Specifications Criteria Specifications Operating 0 to 55 C Temperature Storage 40 to 85 C Humidity 5 to 95 non condensing Functional Specifications Criteria Specifications BUS Interface Ethernet Modbus TCP Front Panel 16 Digital I O points Network Status Module Indicators Status Rotary Switches IP address operating mode Power Specifications Criteria Specifications Input Powered from I O connector 24VDC 120 mA min Isolation DC DC Isolation Input Output Specifications Criteria Specifications Number of Digital UO 16 points input or output Digital Input Current sinking Active Low 1 5 mA min Current sourcing Active High 1 5 mA min Digital Output Current sinking Active low 200 mA max channel Current sourcing Active high 200 mA max channel Current max 800 mA for DIO 0 7 and DIO 8 15 Page 26 of 27 MKS Instruments CIT Products 2006 All rights reserved emks M
11. ene 20 Le Ee e EE 21 7 1 3 Data Collection Plans 21 7 1 4 Data Collection Plan Edtiog 22 7 1 5 Charting Annet 22 7 1 6 Download Data to Local PC 23 7 2 TOOLWEB TOOL SIDE INTERFACE 24 8 APPENDIX A SPECIFICATIONS ugesiedelt geesde SEENEN RENE 26 WARRANT EE 27 Page 3 of 27 MKS Instruments CIT Products 2006 All rights reserved Hu MicroNode I O Ethernet DIDO User Manual 1 General Information The MicroNode I O product line provides high density compact and economical I O solutions for popular Fieldbus Networks The MicroNode DIDO provides 16 digital input output points to an Ethernet network Additional data monitoring is available through a standard web browser and the TOOLweb tool side Interface XML over HTTP The MicroNode package provides flexible side or foot mounting and easy access to I O through a standard 37 pin D Sub connector Below are the orderable part numbers for all Ethernet DIDO MicroNode configurations Table 1 Orderable Part Numbers AS00270 01 MicroNode I O Ethernet MB DIDO sink side AS00239 01 MicroNode I O Ethernet MB DIDO sink front AS00271 01 MicroNode I O Ethernet MB DIDO source side AS00249 01 MicroNode I O Ethernet MB DIDO source front 1 1 Conventions used in this User Manual to a procedure practice condition or the like which if not correctly H Warning The WARNING sign denotes a hazard to personnel It calls attention performed or
12. erface The command line interface supports the help command which displays a brief summary of all commands The commands are self explanatory to anyone sufficiently familiar with the controller theory of operation and the technologies involved The diagnostics serial port is also be used to display all legally required Copyright messages current version information and hardware configuration information during the unit s power up sequence Table 3 Diagnostic Serial Port Connector Pin out Female DB 9 RS232 Function TXD RXD SGND 2 9 Ethernet Connector The standard 100 10 BaseT Ethernet Port uses a standard shielded RJ45 connector Indicators for the Ethernet port are located on the front panel 2 10 Status LED s There is one LED for the unit status and one for the network status located on the front panel Indicators for the Ethernet port are also located on the front panel The table below shows the meaning of different LED states Page 9 of 27 MKS Instruments CIT Products 2006 All rights reserved mks MicroNode I O Ethernet DIDO User Manual Table 4 Modbus LED Status Conditions LED Color Status LED Network LED Off No power No Power Solid Red Not Supported No Network Response Disconnected Solid Amber Booting Network Initializing configuring DHCP Alternating Red Green Watchdog failure outputs off Network Configuration Error Alternating Red Amber _ I O failure Null network IP
13. es to a value of 300 configures the IP address using DHCP and setting the switches above 300 configures the unit to a static IP address For example A switch setting of 330 means that the diagnostic mode is set and the IP address is statically configured to 192 168 9 30 Page 10 of 27 MKS Instruments CIT Products 2006 All rights reserved esmks MicroNode I O Ethernet DIDO User Manual Technology for Productivity d t3 Note Rotary switches settings above 554 are reserved and should not be used 3 Quick Start Set the IP address switches on the front of the unit to 3 1 0 The unit is now in Diagnostic mode with a static IP address The units IP address will be 192 168 0 10 Power the unit by supplying 24 volts to the I O connector See section 2 4 2 for wiring information Attach a network crossover cable between the MicroNode and your PC or use a HUB to build a small network Modify your PC network TCP IP settings using the computer s Connection Properties menu to match the following PC IP Address 192 168 0 1 PC Netmask 255 255 255 0 Open a web browser window and enter http 192 168 0 10 in the address line There is a slight delay as the unit transfers content to your local browser The main Device page is displayed If you are unable to load the page check the units switch settings and ensure the IP address of the PC is 192 168 0 1 Also check the Ethernet cable connections to your PC and to the MicroNode
14. esmks Technology for Productivity MicroNode I O Ethernet DIDO User Manual Ki Copyright Preface This manual and the software described in it are copyrighted with all rights reserved Under the copyright laws this manual and software may not be copied in whole or part without the prior written consent of MKS Instruments The same proprietary and copyright notices must be affixed to any permitted copies as were affixed to the original This exception does not allow copies to be made for others whether or not sold but all of the materials purchased may be sold given or loaned to another person Under the law copying includes translating into another language or format MKS Instruments CIT Products Group 2006 70 Rio Robles Drive San Jose CA 95134 About this manual This manual is designed to serve as a guideline for the installation setup operation and basic maintenance of the MicroNode device The information contained within this manual including product specifications is subject to change without notice Please observe all safety precautions and use appropriate procedures when handling the MicroNode product and its related software Page 2 of 27 MKS Instruments CIT Products 2006 All rights reserved MicroNode I O Ethernet DIDO User Manual Table of Contents 1 GENERAL INFORMATION jiseviitceniaccesestindens nnana a a a a aaa 4 1 1 CONVENTIONS USED IN THIS USER MANUALE 4 2 IN
15. h an Ethernet switch or hub 2 Change your PC network TCP IP settings so that PC resides on same sub network as the MicroNode Use the following TCP IP settings if you have not changed the MicroNode IP address from its factory default IP Address 192 168 0 1 Subnet Mask 255 255 255 0 Default Gateway none 3 Open your PC web browser Netscape Internet Explorer or equivalent Enter the IP address in the web browser s address line http 192 168 0 X The main page for the MicroNode will open Page 14 of 27 MKS Instruments CIT Products 2006 All rights reserved smks MicroNode I O Ethernet DIDO User Manual 4 2 Connecting via a Serial Terminal Session Connect your computer to the diagnostics port DB9 using a standard null modem cable Using a terminal program such as Microsoft HyperTerminal or Tera Term Pro you can now communicate via the diagnostics port of the unit The serial connection parameters are listed in the following table Table 6 Serial Connection Parameters _Parameter _ Value _ 38400 Parity None Flow Control None Once connected the IP address can be changed by typing the menu command and pressing m within 3 seconds The current IP address of the unit can be view by just typing menu E test HyperTerminal Joes File Edit View Call Transfer Help DG e SZ 2s ee Starting MicroNode I 0 Terminal baud rate 38400 FEC routable IP addr 10 202 3 78 FEC rou
16. he unit to the mounting surface using four screws not provided the 4mm wide mounting holes Page 5 of 27 MKS Instruments CIT Products 2006 All rights reserved smks MicroNode I O Ethernet DIDO User Manual 110 mm when attached Mounting Brackets Figure 2 MicroNode Mounting Holes g Height of 34mm not including 37 pin D Sub connector li Note ALL DIMENSIONS ARE METRIC 2 4 Wiring The MicroNode requires two connections one to the Ethernet network and one to a 37 pin D Sub connector Ethernet and I O cables are available from a variety of industrial sources See table below for orderable I O mating connectors Table 2 I O Mating Connector Description MFG Part Number 37 pin D Sub Receptacle solder cup 523 L77 DC37S 37 pin D Sub Metal Hood 523 17E 1727 2 Warnin Follow all applicable electrical codes in your area when mounting and g wiring any electrical device Page 6 of 27 MKS Instruments CIT Products 2006 All rights reserved Ki MicroNode I O Ethernet DIDO User Manual 2 4 1 Power Supply Wiring Connect an external 18 30 VDC power supply to the appropriate pins of the I O connector The connector should be wired according to the connector pin out in Section 2 4 2 2 4 2 UO Wiring The MicroNode provides access to the I O via a male 37 pin D Sub connector The pin out is shown in the following table aa no ee sae eee Sg oofeoofeoof soo sgoag Lk D Dot D Do
17. icroNode I O Ethernet DIDO User Manual WARRANTY MKS Instruments Inc MKS warrants that for one year from the date of shipment the equipment described above the equipment manufactured by MKS shall be free from defects in materials and workmanship and will correctly perform all date related operations including without limitation accepting data entry sequencing sorting comparing and reporting regardless of the date the operation is performed or the date involved in the operation provided that if the equipment exchanges data or is otherwise used with equipment software or other products of others such products of others themselves correctly perform all date related operations and store and transmit dates and date related data in a format compatible with MKS equipment THIS WARRANTY IS MKS SOLE WARRANTY CONCERNING DATE RELATED OPERATIONS For the period commencing with the date of shipment of this equipment and ending one year later MKS will at its option either repair or replace any part which is defective in materials or workmanship or with respect to the date related operations warranty without charge to the purchaser The foregoing shall constitute the exclusive and sole remedy of the purchaser for any breach by MKS of this warranty The purchaser before returning any equipment covered by this warranty which is asserted to be defective by the purchaser shall make specific written arrangements with respect to the
18. nk for the digital output page Change the state of one of the outputs by selecting an option from the pull down menu If the output does not come on check the status and network LEDs on the front of the unit The module LED should be blinking amber and the network LED should be blinking green If the states are different reference the LED status table in section 2 10 Also check the 24V power connection Page 13 of 27 MKS Instruments CIT Products 2006 All rights reserved Hu MicroNode I O Ethernet DIDO User Manual 4 Network Configuration The MicroNode network settings configure the 100 10 BaseT Ethernet port The following are factory default Ethernet settings Parameter geing IP Address 192 168 0 X ubnet Mask 255 255 255 0 Default Gateway Note ug Reading or changing the network settings of an unknown unit is achieved by i connecting via a serial terminal session See section 4 2 4 1 Connecting to a computer via TCP IP The Ethernet MicroNode is configured and controlled via its Ethernet port The following steps show how to configure a Windows PC for first time communication with a unit 1 Connect the MicroNode to your PC by using an Ethernet crossover cable for direct point to point connection or connect through an Ethernet switch or hub g Some 10 100MB Ethernet interfaces may not detect the MicroNode when using Note fo an Ethernet crossover cable If you experience problems connect throug
19. responsibility for shipping the equipment and handling any other incidental charges with the MKS sales representative or distributor from which the equipment was purchased or in the case of a direct purchase from MKS with the MKS CIT home office in San Jose CA This warranty does not apply to any equipment which has not been installed and used in accordance with the specifications recommended by MKS for the proper and normal use of the equipment MKS shall not be liable under any circumstances for indirect special consequential or incidental damages in connection with or arising out of the sale performance or use of the equipment covered by this warranty THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES EXPRESSED OR IMPLIED INCLUDING THE IMPLIED WARRANTY OF MERCHANTABILITY AND THE IMPLIED WARRANTY OF FITNESS FOR A PARTICULAR PURPOSE AND ANY WARRANTY AGAINST INFRINGEMENT OF ANY PATENT Page 27 of 27 MKS Instruments CIT Products 2006 All rights reserved
20. rs In the event that a timeout occurs the Status LED will alternate between red amber and green Once a timeout occurs all outputs are disabled The Watchdog Timeout value can be set from 100 ms to 65535 ms and can be disabled by writing a value of 0 to the register The Watchdog Timeout Counter increments on each timeout event and is cleared by writing any value to the register ug To ensure that the Watchdog Counter register is cleared the register Note i should be written to during initialization Page 19 of 27 MKS Instruments CIT Products 2006 All rights reserved emks MicroNode I O Ethernet DIDO User Manual 7 TOOLweb Interface TOOLweb is a system wide program for enabling and gathering real time data from multiple elements of a process and providing this data to factory based modules for analysis FDC and APC The Ethernet MicroNode uses TOOLweb functionality for the following e Web based tools for data analysis and debug directly from the I O module e Real time data acquisition using XML over HTTP 7 1 TOOLweb User Interface TOOLweb functions are accessed and configured through the web browser interface Users must determine the Key Process Variables Once these variables are named and scaled they are available for data collection and analysis 7 1 1 Control Access Create the allowed permissions to process data ToolWeb Write Access Control Access Control Any Controller Allow
21. t D Dot D Do tr D D f D PA 234567 8 9 10 11 12 13 14 15 16 17 18 LIA EE 2232425282728 2 W 31 32 3 4 3B lt A o E aa eee sass ggas kkaes NN N N N CN Figure 3 MicroNode DIDO Connector Pin out 2 5 UO Description There are multiple control and data monitoring interfaces for the unit e Modbus TCP Ethernet control e Web browser manual control e Web browser configuration and graphical data monitoring e XML streaming data acquisition using TOOLweb protocol Page 7 of 27 MKS Instruments CIT Products 2006 All rights reserved Ki MicroNode I O Ethernet DIDO User Manual 2 6 Digital Input Interface Example Units are purchased with either sinking active low or sourcing active high I O Each input circuit includes an indicator LED in series with the detection opto coupler The opto coupler isolates the processor from the inputs The inputs require 1 5 mA in order to turn on DIO X DIO X Figure 4 Digital Sinking Input active low Figure 5 Digital Sourcing Input active high Below is an example of how to use the digital input interface for both the sinking and sourcing hardware configurations The digital I O circuitry is powered from an external 24 volt power source via the I O connector 24V IN UC MicroNode 3 Q DIO1 O O 24V GND MicroNode DIO1 Figure 6 Sinking Input Figure 7 Sourcing Input 2 7 Digital Output Interface Example The individu
22. table IP mask 255 259 255 0 FEC local IP address disabled FEC MAC address 00 0B 17 10 04 11 Syslog Console Verbosity 7 Product Part Number AS 024901 Serial Number 125272 ToolWeb Control Access NONE Temperature Limit C 60 Rotary switch IP address base 10 202 3 1 Shell P E j gt Connected 0 02 04 ANSIW 38400 8 N 1 Figure 15 Serial Diagnostics Menu Command The serial interface provides diagnostics for the device The help command can be used to display all commands available through the serial interface Page 15 of 27 MKS Instruments CIT Products 2006 All rights reserved smks j Jr MicroNode I O Ethernet DIDO User Manual Technology for Productivity E test HyperTerminal Loe File Edit View Call Transfer Help DS ez 25 ee qu query CPU use E cp clear use values log display system call log stacks display task stack use reset Reset the board and CPU arp display ARP table dhcp display DHCP status nbufs display network buffer status nbufl display network buffer location netstat display network interface status route display routing table socks display list of socket s status add Add network interface del Delete network interface ird lt addr gt lt reg gt read bytes from I2C device irw lt addr gt lt reg gt lt val gt write 1 byte to DC device sntpc print SNTP client statistics date print current date ht
23. tps display HTTP sessions httpd enables HTTP debug messages httpu disables HTTP debug messages menu display the boot menu bye exit monitor resume application Shel 1l gt ba H op Gi Connected 0 03 07 ANSIW 38400 8 N 1 SCROLL APS NUM 3 S Figure 16 Serial Diagnostics Help Command Page 16 of 27 MKS Instruments CIT Products 2006 All rights reserved eemks MicroNode I O Ethernet DIDO User Manual Technology for Productivity 5 CONTROLweb User Interface The user interface is web based You can access it by simply browsing to the IP address of the CONTROLweb node ug Microsoft Internet Explorer versions older than 5 5 may not function as Note expected due to limitations of the browser The main page of the CONTROLweb unit shows a top view of the module This is referenced as the Device tab Controller VO Blocks Figure 17 Device Homepage Dynamic diagnostic details available from this page are e Unit data model number serial number and software version Operational Mode Operation statistics Ethernet load Modbus details By selecting I O of interest from the main page a pop up will appear for each section of I O e Inputs can be read Dynamic e Outputs can be set manually if the unit is in diagnostics mode Page 17 of 27 MKS Instruments CIT Products 2006 All rights reserved MicroNode I O Ethernet DIDO User Manual smks 6 Mod
24. ucts 2006 All rights reserved smks j Arnd MicroNode I O Ethernet DIDO User Manual Technology for Productivity Plot Collection Plan Default_CP E SIS pr e AM 17 eE Default CP on ToolWweb I Checkall v3 0 SE SLOTO DO 1 SERRE EERE 2102 0539 M F Manual scale r foo bon e ji Last data 5 12 2006 15 07 14 727 Copyright C 1995 2003 MKS Instruments CIT Products Figure 23 Charting Applet 7 1 6 Download Data to Local PC Collection plan data can also be downloaded in CSV format Page 23 of 27 MKS Instruments CIT Products 2006 All rights reserved MicroNode I O Ethernet DIDO User Manual EI Microsoft Excel cpdata 1 121 pe Edit View Insert Format Tools Data Window Help Adobe PDF 4 41 ti 4 100 ei Time Seq VIDO VID_200 VID_201 VID_202 VID_211 VID 212 VID 213 VID 211 VID 222 VID 223 VID 224 VID_225 VID_226 VID_227 VID_228 VID 229 57 51 0 11734 5846 0 0 0 02 D 0 004 4 88E 05 0 0 0 009 0 0 004 57 51 5 11735 5846 0 0 0 D 0 0 004 0 0 004 57 52 0 11736 5847 0 004 0 0 02 0 004 0 DU 0 009 57 52 5 11737 5847 D 0 004 0 0 004 0 004 57 53 0 11738 5848 D D 0 0 004 57 53 5 11739 5848 D 0 004 0 02 D 7 54 0 11740 5849 0 004 0 004 0 02 H 0 004 57 54 5 11741 5849 0 009 0 004 D 0 57 55 0 11742 5850 0 004 0 004 0 02 0 004 57 55 5 11743 5850 0 004 0 004 0 0 57 56 0 11744 5851 0 0 004 0 02 0 004 57 56 5 11745 5851 D 0 0 02 i 0 004 57 57 0 11746 5852 0 004 0 004
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