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Operating instructions PFG-RF

1. E LP 66 CHANGE REGULATION ssseeee emen 67 CHANGE LIMIT c ntn tne teet Dat 67 INTERNAL ACTUAL VALUES 68 ACTUAL VALUES ecco ktm teda 68 EXTERNAL OPERATION MODES 69 EXTERNAE ADDRESS iecit citt a bee emet idees 70 85 ADDRESS 70 PROFIBUS ADDRESS 71 EXTERNAL ACTUAL VALUES ssseeee eene 71 ACTUAL VALUES eene emm nennen nnne 71 EXTERNAL ENTER CODE lraichean t tenente rper eren meten reete 72 ENTER ena IMEEM LEE EUER 72 EXTERNAL SETPOINTS ssssesee emen 73 sse cq EE 73 EXTERNAL CONTROL ssesee mme nennen nnns 74 74 EXTERNAE REGULATION 75 REGULATION 75 IVA CHIRBOXC 76 MATCHBOX MENU C POSITIONS 77 G POSIMIONS 77 CHANGE C POSITIONS 77
2. 43 WIRING THE RF REFERENCE INPUT 46 MAKING THE ELECTRICAL CONNECTIONS 47 DISMANTLING PACKING 48 DISPOSAL EORUMDEM 48 OPERATION CONTROL 49 COMMISSIONING 49 GENERAL CONTROL 50 CONTIROLELEMENTS itt ette ot ene eate teen e e sre netus 50 DISPLAY ELEMENTS a ce Schein ie eta rte a Pared icr E ir seb eU sek Pec reis 51 PROTECTION SWITCHES FUSES isssssssse emm emen rne nnns 52 FUNCTION KEYS cess em 53 CONTROL PROGRAM sari ieee nec eL 54 RECOGNITION OF OPERATIONAL STATES 54 SWITCHING THE GENERATOR ON AND OFF 55 Operating instructions PFG RF Chapter Table of contents A 04 0059 00 BEN 001 19 TRUMPF Operating instructions PFG RF Chapter Table of contents A 04 0059 00 BEN 001 19 6 5 PFG RF SETTING GENERATOR AND OPERATION MODES 56 OPERATION MODE REALTIME 57 OPERATION MODE LOCAL esee nnn nne nnne hern sena a ne d 57 OPERATION MODE ssss
3. 16 DESCRIPTION OF THE ABBREVIATIONS 0c c0ccccecesceeueceuceeuecsaeseueeeuaeeenes 16 2 SAFETY seared 17 2 1 INTENDED USE 2222 17 FUNCTION AND OPERATION OF THE EQUIPMENT 17 THER DED 18 2 2 GENERAL WARNING NOTICES 19 DANGERS IN THE UNIT S OPERATIONAL PREMISES 19 DANGEROUS HIGH VOLTAGES sse HR eee nennen nennen nis 19 WARNING SIGNI sede eim Le RE A T ELA EE 20 DANGEROUS MATERIALS sssssssmm ene 20 2 3 PERFORMING WORK 20 QUALIFIED PERSONNEL eseemR Rn 20 2 4 DANGER AREAS MAINTENANCE AND REPAIR 21 DANGER AREAS MAINS SUPPLY SWITCHED OFF 21 2 5 SAFETY DEVIGES ve ee xv i vise 22 MONITORING AND PROTECTION DEVICES 22 2 6 MEASURES IN CASE OF EMERGENCY 24 3 DESCRIPTION TECHNOLOGY 25 3 1 CLASSIFICATION ACCORDING TO EN 55011 _ 25 3 2 COMPONENTS DEVICE OVERVIEW 26 3 3 MEGCHNOQLOGY dern eva ra E era 28 3 4
4. Command byte 2 commands Command bytes 3 4 nominal power value Command bytes 5 and 6 nominal voltage value 128 Command bytes 7 and 8 nominal position value tuning capacitor 129 Command bytes 9 and 10 nominal position value load capacitor 129 Overview PROFIBUS status bytes Status byte 1 generator status Status byte 1 error number Status bytes 3 and 4 actual power value Status bytes 5 and reflected power Status bytes 7 and 8 plasma voltage Status bytes 7 and 8 plasma voltage Status bytes 11 and 12 position value tuning capacitor 133 Status bytes 13 and 14 position value load capacitor 133 Page 11 rom TRUMPF PFG RF Operating instructions PFG RF Chapter Index of Tables Page 12 A 04 0059 00 BEN 001 19 TRUMPF nom 1 GENERAL INFORMATION Chapter Outline Who is this chapter This chapter is intended for all persons who install operate and main directed at tain RF Generator PFG RF on the basis of this operating manual Chapter contents This chapter contains the principal details of the product and the op erating manual 1 1 GENERAL DETAILS OF THE PRODUCT The present opera
5. 122 GENERAL nere e iL N LLLI er 122 DEFINITION OF THE OUTPUTS ON THE PROFIBUS 124 DEFINITION OF THE INPUTS ON THE PROFIBUS 128 FIBER OPTIC CABLE IN U2 FIBER OPTIC CABLE OUT U1 132 STRUCTURE OF THE FIBER OPTIC RING 132 Operating instructions PFG RF Chapter Table of contents A 04 0059 00 BEN 001 19 Operating instructions PFG RF Chapter Index of Figures A 04 0059 00 BEN 001 19 PFG RF INDEX OF FIGURES Fig 3 1 Front side using the PFG 1600 RF PFG 2500 RF as an example 26 Fig 3 2 Rear side using the example of PFG 1600 RF PFG 2500 RF Fig 3 3 Block diagram of generator Fig 3 4 Signal curve under power control Fig 3 5 Signal curve under voltage control Fig 5 1 Orientation during transport and storage Fig 6 1 Operation and display elements Fig 6 2 MIETEN E PT Fig 6 3 Protection switches and fuses Fig 6 4 Menu structure internal operation modes Fig 6 5 Menu structures external operation modes Fig 6 6 Menu structure Matchbox menu Fig 6 7 Switching to the matchbox menu Fig 6 8
6. MEANING State of the RF power Power is switched off Power is switched on Type of generator control Control via the operator panel Control via PROFIBUS not used NU not used PLASMA State of the RF space plasma chamber 0 No plasma ignited no UDC voltage present 1 Plasma has ignited SW_ STAT State of the RF selector switch RF selector switch not active Tab 8 26 Status byte 1 generator status Operating instructions PFG RF Chapter 8 Interfaces Page 1 30 A 04 0059 00 BEN 001 19 STATUS BYTE 1 GENERATOR STATUS RF selector switch is currently switching not used not used Status byte 2 error number Tab 8 27 Status byte 1 error number This byte shows the state of the generator If this byte equals O all bits LOW then the generator is operational If this byte is not equal to 0 then the generator has interrupted power operation if activated and reports this via the appropriate error number Status bytes 3 and 4 actual power value HIGH BYTE Bit4 Bit3 Tab 8 28 Status bytes 3 and 4 actual power value The actual power value AV Pj is transmitted as a 16 bit word The val ue is available to the user as a real power value as an integer number of watts The maximum value depends on the generator type Status bytes 5 and 6 reflected power STATUS BYTES 5 AND 6 REFLECTED PO
7. CONTROL REGULATION t lt RS 485 ADDRESS With this menu you can set the address of the generator on the RS 485 bus Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 TRUMPF Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 PFG RF PROFIBUS ADDRESS With this menu you can set the address of the generator on the PROFI BUS EXTERNAL ACTUAL VALUES F1 ACTUAL VALUES This menu displays the current values ACTUAL VALUES The value that has a star attached is the reference input for the regulation FWDP stands for direct power stands for reflected power 6 Page 71 PFG RF G TRUMPF EXTERNAL ENTER CODE F1 ACTUAL VALUES From this menu you can return from an external operating mode back to the LOCAL operating mode For this you must enter a code The code for returning to the LOCAL operation mode is 727 If a wrong code is entered then the generator remains in the respective external operation mode and the menu ENTER CODE remains on display Operating instructions PFG RF Chapter 6 Operation control Page 72 A 04 0059 00 BEN 001 19 PFG RF a C EXTERNAL SETPOINTS F1 ACTUAL VALUES This menu displays the nominal values SETPOINTS Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00
8. Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 TRUMPF Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 PFG RF Notice You can only switch to another matchbox when the RF power is switched off After switching the RF output cannot be activated for about 2 s PFG RF TRUMPF ADDITIONAL MENU The following image shows the menu structure of the additional menu ie New Setpoints New Setpoints POWER DC BIAS I EZ Sa uu TA er EN 1 2 Fig 6 8 Menu structure Additional menu The menu structure of the internal operation modes may be extended by an additional menu ADDITIONAL VALUES In the additional menu additional actual values of the generator are displayed This is of ad vantage for example during commissioning or when dealing with crit ical loads In the service menu see section Service menu one can specify whether the additional menu is displayed or not Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 PFG RF C ADDITIONAL MENU ADDITIONAL VALUES Q1 gt Jen SETPOINTS 4 New Setpoints _F2 New Setpoints P9 POWER DC BIAS F2 CONTROL Change F2 F1 REGULATION Change Change v REGULATION Limit ACTUAL ADDITIONAL ADDITIONAL VALUES VALUES 1 VAL
9. The chapter contains the principal details for the safe operation of the product INTENDED USE Danger The protection of operating personnel and the system is not guaran teed if the generator is not operated in accordance with its intended use The generator may only be operated by qualified personnel accordance with these operating instructions FUNCTION AND OPERATION OF THE EQUIPMENT The generator is an electrical device which converts mains alternating voltage into high frequency alternating voltage 17 PFG RF Typical applications intended use Unauthorized operating method Page 18 TRUMPF INTENDED USE The generator supplies a high frequency alternating voltage at its out put It is used to excite various plasma and thin layer processes such as e g magnetron sputtering sputter etching reactive ion etching CVD plasma processes BIAS applications The generator may only be used within the scope of its intended use Unauthorized use refers particularly to medical science purposes broadcasting purposes environments where a danger of explosion exists use as a mobile device If you would like to use the generator in other applications than plas ma and thin layer processes please ask H TTINGER in advance Operating instructions PFG RF Chapter 2 Safety A 04 0059 00 BEN 001 19 PFG RF m Sl 2 2 GENERAL WARNING NOTICES DANGERS IN THE UNIT S OPERATIONAL PREMI
10. gt amp 50 Ohm X4OUT j lt 43 56 MHz S Y P Netz Regelung berwachung Netzteil HF Teil Regelung u Netzteil Prozessorerweiterung Prozessor Board AD 37 Watchdog Schnittstelle 7 AID D A D D K Microcontroller RAM ROM 2 80C535 Speicher LWL U2 Sender Lichtwellenleiter Empf nger amp Verbindung U1 To Ano 4 RS232C 9 RS232C Schnittstelle AS RS 485 Anzeige Tastatur RS 485 16 6 Schnittstelle Schnittstelle Frontkarte Bedieneinheit HF Generator BLOCKCDR CDR Fig 3 3 Block diagram of generator Operating instructions PFG RF Chapter 3 Description technology 04 0059 00 BEN 001 19 Page 27 PFG RF 3 3 3 4 Page 28 TRUMPF TECHNOLOGY The H TTINGER RF generators of the PFG RF series are fully transistor ized and uC controlled RF generators that recommend themselves for their robustness reliability and easy maintenance The protection against mismatches and overload which is particularly important in plasma technology applications is given by overdimen sioning in conjunction with electronic monitoring and protection cir cuits The generator operated via a keypad with function keys and a double line LCD display All functions can be remote c
11. Apart from this the generator is op erated and configured via the control panel see REALTIME Operating instructions PFG RF 6 Chapter 6 Operation control A 04 0059 00 BEN 001 19 Page 57 PFG RF Page 58 TRUMPF OPERATION MODE REMOTE3 The operation mode is an external operation mode It is de signed for processes that are controlled by an external control system In this operation mode the entire generator is controlled externally via the A D interface X1 The operating personnel do not have access to the process from the control panel The Matchbox remains operable through the generator provided it is connected via the fiber optic ca ble In contrast to REMOTE1 an additional analog nominal value voltage can be supplied from the outside OPERATION MODE 4 The operation mode REMOTEA is an external operation mode It is de signed for processes that are controlled by an external control system Its purpose is to emulate the devices of the older TIS series Ensure that regulation lt POWER and limits 2 DCBIAS is set before switching In this operation mode the entire generator is controlled externally via the A D interface X1 Via the control panel the operation personnel can adjust the quantity that is currently not being regulated towards The Matchbox remains operable through the generator provided it is connected via the fiber optic cable OPERATION MODE RS 232 The RS 232 op
12. MATCHBOX MENU MB MODE 78 MB MODE H U ste 78 CHANGE otis tee eet Sl oeste tes 79 MATCHBOX MENU MB CHANNEL eH 80 MB CHANNEL 80 CHANGE MB CHANNEL sseR mee 80 ADDITIONAL MENU 52 5 respec ohana teats LAN SM edicere ice El 82 ADDITIONAL MENU ADDITIONAL VALUES 83 AC TUAE VADUES 83 ADDITIONAL VALUES 1 mme 84 ADDITIONAL VALUES 2 rni reiten oret desta maidens cri 84 ADDITIONAL VALUES ssesses RH 84 SERVICE MENU Seer ceteris nl cese c M ADM Md 85 SERVICE MENU SERVICE MODE 86 SERVICE MENU ADDITIONAL MENU 86 Page 7 PFG RF Page 8 6 6 7 2 7 3 7 4 7 5 8 1 8 2 8 3 8 4 8 5 8 6 8 7 8 8 8 9 TRUMPF TROUBLESHOOTING RECTIFICATION OF FAULTS 87 FAULT MESSAGES eda 87 MAINTENANCE 93 GENERAL MAINTENANCE NOTICES 93 TECHNICAL SUPPORT eee tete 93 SAFE MAINTENANCE _ nennen nennen nas 94 K
13. X3 The RS 232 C interface is a 9 pin Sub D socket with screw type lock ing Warning AN The plugs and cables connected to the interface must be shielded The shielding must be connected to the housing ground Use a suitable plug for this connection The serial connection of the generator to a host is illustrated in the fol lowing connection diagram GENERATOR HOST z B PC 1 1 1 2 Din RxD RxD 2 3 Dout TxD TxD 3 4 NC 4 5 5 6 NC 6 7 NC i 7 8 NC i 9 NC 9 HOST PC CDR Fig 8 10 Serial connection connection diagram RS 232 C interface X3 assignment Din data input Dout data output GND ground Tab 8 11 RS 232 C interface X3 assignment Operating instructions PFG RF Chapter 8 Interfaces Page 114 04 0059 00 BEN 001 19 ro PFG RF The connection assignments are in accordance with the RS 232 C stan dard The interface forms a point to point connection Data transmission takes place asynchronously at bit rate of 9600 baud x0 5 90 RS 232 C interface The serial data transmission of the entire H ttinger line of equipment X3 5 byte is based on a uniform communication block It consists of 5 bytes communication block 4 address byte fiber optic cable 1 function byte e 2 data bytes 1 check byte The exact arrangement of the communication block is given in the fol lowing table Operating instructions PFG RF Cha
14. 001 19 Page 23 PFG RF nom TRUMPF 2 6 MEASURES IN CASE OF EMERGENCY an emergency carry out the following steps in the given or der 1 Switch off the external mains separation device for the generator 2 Turn off the cooling water supply for the generator 3 Put out any fires with a suitable extinguisher Life Threatening Voltage AN Due to the high voltages present never extinguish the fire with water Operating instructions PFG RF Chapter 2 Safety Page 24 A 04 0059 00 BEN 001 19 PFG RF 3 DESCRIPTION TECHNOLOGY Chapter Outline Who is this chapter This chapter is intended for all persons who install operate and main directed at tain RF Generator PFG RF on the basis of this operating manual Chapter contents The chapter contains information about the functionality and techno logy of the RF Generator PFG RF their use fields of application and technical data 3 1 CLASSIFICATION ACCORDING TO EN 55011 The EN 55011 standard groups ISM devices industrial scientific and medical high frequency devices into various groups and classes The RF Generator PFG RF are devices of Group 2 Class A Group 2 includes all ISM devices where HF energy is purposely gener ated and or used as electromagnetic radiation for the treatment of material Devices of Class A are intended for operation in an industrial environ ment The electromagnetic compatibility in other environments resi dential ar
15. 001 19 Page 87 G TRUMPF PFG RF Fault messages The following table provides an overview over the fault messages as well as information regarding cause and corrective measures DESCRIPTION OVERTEMPERATURE DETECTED The internal operational temperature has exceeded a critical limit The system can only be reset once the oper ational temperature in the generator has returned to normal values Ambient temperature too high Temperature in the generator too high REMEDY Provide better ventila tion conditions PREF OUT OF RANGE For about 30 seconds the reflected power was too high Missing RF connection generator matchbox system Insufficient matching by the matchbox to the system Check RF connection generator matchbox system Check the matching of the matchbox to the system CURRENT TOO HIGH For about 30 seconds the internal operational current has exceeded the critical limit Missing RF connection generator matchbox system Insufficient matching by the matchbox to the system Check RF connection generator matchbox system Check the matching of the matchbox to the system RF RELAY ERROR The relay that should switch the RF power output has not engaged after pressing the ON key or has not released after pressing the OFF key Faulty relay contact sticks Contact service POWERCOMBINER UNSYMMETRIC PFG 1600 5000 RF only Fail
16. 100 mA Tab 8 5 A D interface X1 Operating instructions PFG RF 8 Chapter 8 Interfaces A 04 0059 00 BEN 001 19 Page 1 05 fcu TRUMPF PFG RF AID interface X1 basic circuit Interlock 2 13 21 22 23 Interlock 3 131 4d 24 VDC 12 0 V GND RF inhibit in put not avail able on all generator types Gb GO 5 COM IN 7x Digital OUT CPU Analog 0 5 V 3x Analog 0 10 1 13 14 15 4x Analog OUT 0 10 16 17 18 19 Pin assignment see table 4 Analog ground 20 31 37 Fig 8 4 interface basic circuit 8 Operating instructions PFG RF Chapter 8 Interfaces Page 1 06 A 04 0059 00 BEN 001 19 PFG RF AID interface X1 d 29 0 0 Fig 8 5 interface X1 The A D interface is a 37 pin Sub D socket with screw type locking A plug with pins 8 and 26 bridged interlock1 is attached to the inter face Warning When wiring the interlock the bridge must be removed Warning The plugs and cables connected to the interface must be shielded Connect the shielding to GND ground Notice The term 100 96 of the measured quantity refers to the maximum value for the respective generator i e the maximum possible genera tor current maximum possible generator voltage or rated generator power The values can be found in the Technical Data xo gt g
17. 13 and STATUS BYTE 11 AND 12 ACTUAL POSITION VALUE TUNING ah CAPACITOR 14 actual position values tuning HIGH BYTE Capgeiton eae Bit7 Bit6 Bitb Bit4 Bit3 Bit2 Bit1 BitO capacitor i l i 215 214 213 212 211 210 29 28 LOW BYTE Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 BitO 27 26 2 24 23 22 21 20 HIGH BYTE Bit4 Bit3 Tab 8 33 Status bytes 13 and 14 position value load capacitor The two actual position values must match the preset nominal posi tions of the capacitors 2 digits Operating instructions PFG RF 8 Chapter 8 Interfaces A 04 0059 00 BEN 001 19 Page 1 33 PFG RF 8 10 Fiber optic cable In U2 Out 01 Page 134 TRUMPF FIBER OPTIC CABLE IN U2 FIBER OPTIC CABLE OUT U1 The fiber optic interface is used to connect the generator to the fiber optic ring o o Fig 8 12 Fiber optic cable In U2 Out U1 The fiber optic interfaces are of the Toshiba Toslink type STRUCTURE OF THE FIBER OPTIC RING The fiber optic ring is used to exchange measurement values and con trol signals between the RF generator the matchbox and additional components The RF generator coordinates the operation of the func tions Notice When constructing a fiber optic ring you must take care to first chain the RF selector switch and then the matchboxes into the fiber optic ring The speci
18. 45 470 3510 E mail info japan huettinger com Internet www huettinger com TRUMPF Korea Co Ltd 14th FI CBS 917 1 Mok dong Yangcheon gu Seoul 158 701 Korea Tel 82 2 67392500 82 2 67392525 E mail systemsales trumpf co kr Internet www trumpf co kr 23 07 2007 rega TRUMPF PFG RF 23 07 2007 Operating instructions PFG RF Item No A 04 0059 00 BEN 001 19 Operating instructions PFG RF Chapter Table of contents A 04 0059 00 BEN 001 19 PFG RF TABLE OF CONTENTS TABLE OF CONTENTS 5 INDEX OF FIGURES 9 INDEX OF TABLES 11 1 GENERAL INFORMATION 13 1 1 GENERAL DETAILS OF THE PRODUCT 13 1 2 WARRANTY eruat ax Ren XOU 13 1 3 STRUCTURE OF THE DOCUMENTATION 14 MEMMMMMNMMMNMMMMMMMMMNMNMMMNMMMMMMMMNEMEMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMM 14 STRUCTURE OF THE OPERATING MANUAL 14 STRUCTURE OF THE INDIVIDUAL PAGES 14 EXPLANATION OF PICTOGRAMS AND SYMBOLS 15 1 4 TECHNICAL EXPRESSIONS AND ABBREVIATIONS
19. BEN 001 19 PFG RF G TRUMPF EXTERNAL CONTROL F1 ACTUAL VALUES In this menu the operation mode CONTROL is displayed If the gen erator is in operation mode RS485 or PROFIBUS the address that it is set to on the bus is also displayed Operating instructions PFG RF Chapter 6 Operation control Page 74 A 04 0059 00 BEN 001 19 PFG RF a C EXTERNAL REGULATION F1 ACTUAL VALUES ATIC LIMIT DC BIAS POWER This menu displays the regulation mode REGULATION and the limit mode LIMIT Operating instructions PFG RF 6 Chapter 6 Operation control A 04 0059 00 BEN 001 19 Page 75 PFG RF G TRUMPF MACHTBOX MENU F1 C POSITIONS Change MB MODE F2 Change MB CHANNEL 2 Change Fig 6 6 Menu structure Matchbox menu In the matchbox menu current values and settings of the matchboxes can be displayed and edited With F3 you can switch between the menus of the internal or exter nal operating modes and the matchbox menu FA EIN SETPONTS EA New Setpoints 2 New Setpoints F zr 5 POWER pcaas C POSITIONS Change n ti CFOSITIONS F3 CONTROL Change F CONTROL F2 MB MODE Change F pon REGULATION Change Change Ir REGULATION LMT F2 MB CHANNEL Chant F gt MB CHANNEL ACTUAL tr VALUES Fig 6 7 Switching to the matchbox menu Operating instructions PFG RF C
20. Check the generator for corrosion y Check the cable terminals for color changes resulting from ther mal effects CLEANING Fine dust settles in the generator which can lead to arcing Check the entire generator particularly the cooling channel for dust deposits If dust has deposited in the generator Carefully remove the dust with a brush or vacuum cleaner CHECK VENTILATORS Check the fan for proper operation unusual running noises for ease of movement CHECKING OPERATING VALUES Together with the generator you received a test certificate in which the factory measured operation values are entered see appendix with test certificate Using these values check to see if any deviations from these values have occurred In order to check the operation values you will need 50 high frequency load resistor with a load capacity of at least the nominal output power of the generator Operating instructions PFG RF Chapter 7 Maintenance A 04 0059 00 BEN 001 19 TRUMPF Preparing for the check Carrying out the check Operating instructions PFG RF Chapter 7 Maintenance A 04 0059 00 BEN 001 19 S PFG RF You must first connect the water cooling for the 50 Q load resistor Proceed as follows y Connect the water intake of the 50 load resistor to the drain of the generator Connect the drain of the load resistor to the cooling system Connect the RF power output
21. FIELDS OF APPLICATION 28 I MC ies MEM 29 MODES OF REGULATION 30 REGULATION WITH RESPECT TO POWER 30 REGULATION WITH RESPECT TO VOLTAGE 30 EXAMPLE POWER REGULATION iisssssse emere rennen 31 EXAMPLE VOLTAGE REGULATION eene 32 3 0 TECHNICAL DATA atu ora ae ra o Eh 33 Page 5 PFG RF Page 6 4 1 4 2 5 2 5 3 5 4 5 5 5 6 6 1 6 2 6 3 6 4 TRUMPF VERSIONS ACCESSORIES 35 MODEL VARIATIONS 35 ACCESSORIES AND OPTIONS 36 ACCESSORIES E 36 T T 36 INSTALLATION 39 TRANSPORT STORAGE 39 GENERAL NOTICES _ 39 STORAGE 39 hase qi clo 39 PACKAGING MATERIAL 1 22 15 ettet 40 INSTALLATION AND ASSEMBLY 41 CONNECTION _ 42 42 CONNECTING THE SAFETY AND CONTROL CIRCUITS
22. In this menu the limit mode LIMIT can be changed PFG RF Page 68 TRUMPF INTERNAL ACTUAL VALUES PS F2 New Setpoints 2 New Setpoints P POWER DC BIAS i ECCE ae tq ET E o ACTUAL VALUES t 1 ACTUAL VALUES This menu displays the current values ACTUAL VALUES The value that has a star attached is the reference input for the regulation FWDP stands for direct power Pj stands for reflected power Pg Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 PFG RF C EXTERNAL OPERATION MODES The following images show the menu structure of the external opera tion modes ADDRESS F1 y ACTUAL VALUES a ACTUAL VALUES 1 ENTER CODE 1 SETPOINTS 1 e ENTER CODE REGULATION F1 CONTROL REGULATION F1 Fig 6 5 Menu structures external operation modes The left image shows the general menu structure REMOTE RS 232 The right image shows the menu structure of the operation modes RS485 and PROFIBUS The difference is the additional menu ADDRESS Operating instructions PFG RF 6 Chapter 6 Operation control A 04 0059 00 BEN 001 19 Page 69 PFG RF Page 70 TRUMPF EXTERNAL ADDRESS This menu appears only if one switches to the operation modes RS 485 and PROFIBUS ADDRESS ENTER CODE SETPOINTS 1
23. Menu structure Additional menu Fig 6 9 Menu structure Service menu Fig 6 10 Changing to the service menu sse itte trt tee nes Fig 8 1 Mains connection 2 Fig 8 2 RF output X4 RF input X5 Fig 8 3 RF power output PFG 1600 RF PFG 2500 RF PFG 5000 RF 103 Fig 8 4 A D interface X1 basic circuit 106 Fig 8 5 A D interface XI e e tit tette im nen sds Fig 8 6 Interlocks circuit diagram Fig 8 7 Signal curve RF inhibit input Fig 8 8 Signal shape RF inhibit input Fig 8 9 5 232 Interface Fig 8 10 Serial connection connection diagram 114 Fig 8 11 RS 485 interface 121 Fig 8 12 Fiber optic cable In U2 Out U1 134 Fig 8 13 Fiber optic cable In U2 Out U1 135 Page 9 rom TRUMPF PFG RF Operating instructions PFG RF Chapter Index of Figures Page 1 0 A 04 0059 00 BEN 001 19 PFG RF INDEX OF TABLES Tab 6 1 Tab 6 2 Tab 7 1 Tab 8 1 Tab 8 2 Tab 8 3 Tab 8 4 Tab 8 5 Tab 8 6 Tab 8 7 Tab 8 8 Tab 8 9 Tab 8 10 Tab 8 11 Tab 8 12 Tab 8 13 Tab 8 14 Tab 8 15 Tab 8 16 Tab 8 17 Tab 8 18 Tab 8 19 Tab 8 20 T
24. Up to 100 transactions can therefore be processed in one second Operating instructions PFG RF Chapter 8 Interfaces A 04 0059 00 BEN 001 19 PFG RF 8 8 RS 485 X6 The RS 485 C interface can be used to read and write all generator control and measurement signals Pata RS 485 INTERFACE X6 LOGIC Input voltage Din Din 5 Din Output voltage Dout Doutt g Dout TRANSMISSION SPEED Baud rate 9600 baud 0 5 Tab 8 13 RS 485 interface X6 RS 485 interface X6 terese oc 600306 Fig 8 11 5 485 interface X6 The RS 485 C interface is a 15 pin Sub D socket with screw type lock ing Warning AN The plugs and cables connected to the interface must be shielded The shielding must be connected to the housing ground Use a suitable plug for this connection Operating instructions PFG RF Chapter 8 Interfaces A 04 0059 00 BEN 001 19 Page 121 ro PFG RF RS 485 interface X3 assignment Synchronization of the data connection Page 122 TRUMPF PIN NO ASSIGNMENT Dout data output Din data input GND ground Dout inverted data output Din inverted data input Tab 8 14 RS 485 interface X3 assignment The connection assignments correspond to the RS 485 standard and ship as 4 wire interface 2 transmitting 2 receiving lines If a 2 wire connection is required this can be achieved e
25. emergency power off switch Install the emergency power off switch so that on actuation the generator is completely separated from mains The mains connection is made at the rear side of the device Life Threatening Voltage Before connecting to mains ensure that the separation device in the external unit is open and protected against switching on again The mains supply is connected to the RF generators of type PFG 300 RF using the supplied mains cable The mains connection of RF generators of type PFG 600 RF PFG 5000 RF is made for three phases using a strip ter minal Connect the individual wires to the strip terminal After all electrical connections have been made Check all plugs and cables for secure seating The generator is now ready to be switched on Operating instructions PFG RF Chapter 5 Installation A 04 0059 00 BEN 001 19 PFG RF 5 5 DISMANTLING PACKAGING Dismantling To dismantle the generator y Disconnect the generator from mains y Disconnect all remaining electrical connections in reverse order of that described in chapter 5 4 Connection Packaging To pack the generator If possible use original packaging 5 6 DISPOSAL Disposal The used power semiconductors and power resistors contain beryllium oxide and must thus be disposed of as hazardous waste The remaining components of the generators can be disposed of as electronic waste y Waste must be disposed o
26. of the generator to the load resis tor In order to carry out the check you must switch on the generator and set it to power operation Further information about this can be found in chapter 6 Operation control Switch on the generator Set the output power to 0 Watts Switch on the power operation Compare the currently set quiescent values with those given in the test certificate EF Now increase the nominal value in 25 steps and compare the respective values attained with the test certificate Faults can be detected earlier by logging and observing deviations from values in the test certificate The observations can also be of help if a repair is necessary Keep logs and observe the deviations from the values in the test certificate Deviations of 10 96 from the values given in the test certificate may be tolerated BUFFER BATTERY REPLACEMENT The buffer battery lithium cell is used for data storage when the de vice is switched off see Control program on page 54 If the battery is empty the generator starts with the default settings The battery is permanently soldered onto the processor circuit board We recommend to have the battery replaced by H TTINGER service personnel Page 97 PFG RF 7 5 Example Page 98 TRUMPF REPLACEMENT PARTS When ordering replacement parts the following information is neces Name type and serial number of the generator A
27. the RF power is continuous from 0 5 10090 in steps of 1 W 10 W for PFG 5000 RF by varying the control voltage of a ring mixer in the quartz oscillator The generators have a 2 channel regulation For this 2 values are spec ified a nominal value and a value to be limited The regulator regulates towards the nominal value specified However if the limited value has reached its limit the regulation switches and keeps the value at the limit As soon as the value moves back below its limit the regulation switches back and regulates towards the specified nominal value With such a 2 channel regulation dangerous operational states can be largely avoided However the user is expected to input a limit in addi tion to the nominal value If the nominal value is a power then the limit is always a voltage and vice versa depending on the type of regulation When the RF power is switched on the plasma in the system has not yet ignited Hence no DC BIAS voltage Upc is present i e Upc 0 With immediate regulation towards Upc the generator would be driv en towards the upper limit of its power rating and would remain there until the plasma has ignited and thus creates a DC BIAS voltage Only then the regulator could give the appropriate control signal for the ad justment of the RF power which generates the desired DC BIAS volt age Such a behavior of the generator is however undesired in the case of most plasma processes It may ev
28. working with high voltage systems as well as local and working regulations Operating instructions PFG RF Chapter 7 Maintenance A 04 0059 00 BEN 001 19 PFG RF a C 7 3 MAINTENANCE INTERVALS Regular maintenance Regularly inspect the generator so that it can operate for extended pe insures error free riods of time and without failures Further details are given in chapter operation 7 4 Maintenance work The maintenance intervals are dependent on the average operating time and the corresponding environmental conditions The given maintenance intervals are valid for single shift operation 40 hour weeks in a dry and low dust environment MAINTENANCE MONTHS 12 MONTHS 4 YEARS INTERVALS 500 HOURS 2000 HOURS General visual inspection Cleaning Check fan Checking operat ing values Replace buffer bat tery Tab 7 1 Maintenance intervals Always choose an The maintenance work given in the table should be carried out if either earlier point in time of the two values months or operation hours is exceeded i e after 3 months if after these 3 months less than 500 operation hours have ac cumulated or after 10 weeks if after these 10 weeks the generator has already operated 500 hours Operating instructions PFG RF Chapter 7 Maintenance A 04 0059 00 BEN 001 19 Page 95 PFG RF 7 4 Tools needed Ea 7 96 TRUMPF MAINTENANCE WORK VISUAL INSPECTION
29. 00 BEN 001 19 5 BYTE COMMUNICATION BLOCK Limit 1 POWER 2 DC BIAS 3 DELTA P 4 RF PEAK NV RFPEAK Nominal value of RF peak voltage if the fiber optic cable bus is not used the setting must be in O 1000 960 AV RFPEAK Actual value of RF peak voltage if the fiber optic cable bus is not used the setting is in O 1000 960 For errors error number otherwise zero P 50H RESET Delete error message AUTOMATIC MATCHBOX COMMANDS ASCII HEX COMMAND MEANING E NV CT Set position tuning capacitor 0 1000 969 Set position load capacitor 0 1000 960 BRPOS Plasma on position tuning capac itor 0 1000 969 CL BRPOS Plasma on position load capaci tor 0 1000 960 MB MODE Matchbox mode 1 MANUAL 2 AUTOMATIC 3 REMOTE 4 FREEZE 5 DCAUTO Actual position tuning capacitor 0 1000 969 Actual position load capacitor 0 1000 960 Delete error message Tab 8 12 5 byte communication block RS 232 C Operating instructions PFG RF Chapter 8 Interfaces A 04 0059 00 BEN 001 19 Page 117 cum TRUMPF 5 BYTE COMMUNICATION BLOCK A address bits fiber optic cable W wait bit F function bits D data bits P check bits For the generators 00 is always entered for the address byte fiber optic cable The function byte consists of 1 wait
30. DC BIAS voltage or the RF PEAK voltage is shown Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 TRUMPF Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 PFG RF NEW SETPOINTS POWER SETPOINTS New Setpoints gt pC gis In this menu you can edit the setpoint for the direct power Pj POWER NEW SETPOINTS DC BIAS SETPOINTS F2 New Setpoints F2 POWER gt New Setpoints DC BIAS In this menu you can edit the setpoint for the DC BIAS voltage Upc DC BIAS If the fiber optic bus is not connected the setting must be specified as O 100 0 96 PFG RF G TRUMPF INTERNAL CONTROL Q1 gt Jen SETPOINTS New Setpoints New Setpoints POWER DC BIAS F2 CONTROL Change F2 F1 REGULATION Change Change resumen REGULATION Limit ACTUAL VALUES t The operation modes CONTROL are described at the start of this chapter You can set the following operation modes REALTIME LOCAL REMOTE1 REMOTE2 REMOTE3 REMOTEA e RS232 RS485 PROFIBUS optional instead of RS232 RS485 Operating instructions PFG RF Chapter 6 Operation control Page 64 04 0059 00 BEN 001 19 TRUMPF Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 PFG RF CONTROL F2 CON
31. F 2 3 Page 20 TRUMPF WARNING SIGN Secure the provided metal sign with the four 9 symbols near the inductor coil Warning If the generator is used outside the scope of the specifications see sec tion Technical Data in chapter 3 Description Technology the safety of the generator can no longer be guaranteed DANGEROUS MATERIALS Danger The following dangerous materials and fuels are used in the generators which could be released in the event of destruction of structural com ponents e Beryllium oxide in the RF transistors and in the RF power resistors PERFORMING WORK QUALIFIED PERSONNEL Warning All work on the generator must only be carried out by persons with the proper training and professional experience Also required is the abili ty based on knowledge of the relevant application to evaluate and carry out the necessary work and recognize the possible dangers Operating instructions PFG RF Chapter 2 Safety A 04 0059 00 BEN 001 19 PFG RF Sl 2 4 DANGER AREAS MAINTENANCE AND REPAIR DANGER AREAS MAINS SUPPLY SWITCHED OFF Life Threatening Voltage AN Even with the main switch Q1 switched off the following parts still car ry mains voltage e mains connection e wiring up to the main switch Q1 Separate the generator from mains order to make these com ponents voltage free disconnect Life Threatening Voltage N Even if the device is disconnected there may als
32. F1 EXIT F2 CHANGE F2 ENTER F3 F4 RESET Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 PFG RF FUNCTION KEYS Depending on the type of operation the function keys are assigned differently The individual assignments are explained in detail in the fol lowing The respective current assignment of the function keys is shown on the LCD display Seteoints Fz enter The display above shows that the current assignment of the function key F1 is NEXT and that of the function key F2 is CHANGE Also the nominal value for the direct power PI has a star It can be changed us ing the rotary button or the incremental keys With F1 NEXT you move from one main menu to the next With F1 EXIT you move from one submenu back to the associated main menu In case you have unintentionally changed a value and have not yet pressed F2 ENTER you can exit the submenu with F1 EXIT without saving the change With F2 CHANGE you move from a main menu into the associated submenu In the main menus the generator settings are displayed the submenus let you can change the settings with this function key With F2 ENTER you confirm the values set in the submenus and move to the next submenu With F3 you change between the generator menus and the matchbox menus In case you have changed a value and have not yet pressed F2 ENTER you can exit the respective menu with F3 without saving the
33. G 5000 RF Operating instructions PFG RF Chapter 8 Interfaces A 04 0059 00 BEN 001 19 PFG RF MAINS CONNECTION X2 The mains supply is connected to the RF generators of type PFG 300 RF using the supplied mains cable inlet connector for non heating appli ances The mains connection of RF generators of type PFG 600 RF PFG 5000 RF is made for three phases using a strip ter minal Fig 8 1 Mains connection X2 Page 101 PFG RF 8 3 RF output X4 RF input X5 Feeding of the generator Feeding by master oscillator RF input X5 Page 102 TRUMPF RF OUTPUT X4 RF INPUT X5 Fig 8 2 output RF input X5 The RF input interface X5 is a reference input It is fed either by the generator itself or by an external master oscillator If the RF input X5 is fed by the generator and thus no external master oscillator is connected the RF input X5 must be connected to the RF output X4 using a short BNC cable When the generator is shipped the two interfaces are already connected to each other If a master oscillator is connected to the RF input X5 the RF output X4 must be equipped with a 50 Q terminating resistor Frequency 13 56 MHz Power min 20 mW max 200mW RF input 50 Q coaxial BNC Tab 8 2 RF input X5 Operating instructions PFG RF Chapter 8 Interfaces A 04 0059 00 BEN 001 19 8 4 RF power output Output data Operati
34. MENU SERVICE MODE c Fz CHANGE SERVICE OFF In this menu you can switch on the SERVICE MODE In the SERVICE MODE the nominal value is no longer set by the controller but via the potentiometer R335 on the oscillator and regulator board This setting is meant to be active during service only and must thus always be switched to OFF SERVICE MENU ADDITIONAL MENU MODE F440 c ADD MEHUS OFF In this menu you can switch on the ADDITIONAL MENU MODE In the ADDITIONAL MENU MODE the menu structure of the internal opera tion modes is extended by the additional menu In the additional menu additional actual values of the generator are displayed Operating instructions PFG RF Chapter 6 Operation control Page 86 A 04 0059 00 BEN 001 19 PFG RF C 6 6 TROUBLESHOOTING RECTIFICATION OF FAULTS FAULT MESSAGES As soon as a fault is detected the power operation is switched off im mediately and safely if the operational state is ON Subsequently an appropriate error message appears on the LCD display The lighting of the LCD display flashes The device is secured against the reenergizing until the fault is rectified and the message is deleted by pressing F4 RE SET or via the RESET command Notice When operated via the A D interface X1 a pending fault can only be deleted if the POWER ON signal is reset first Operating instructions PFG RF 6 Chapter 6 Operation control A 04 0059 00 BEN
35. N 001 19 7 ie e d COMMAND BYTES 7 AND 8 NOMINAL POSITION VALUE TUN ING CAPACITOR and 10 nominal position value HIGH BYTE tuning capacitor load capacitor Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 BitO 215 214 213 212 211 210 29 28 Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 BitO 27 20 25 24 23 22 21 20 HIGH BYTE Bit4 Bit3 Tab 8 24 Command bytes 9 and 10 nominal position value load capacitor The two nominal position values have a value range from 0 to 1000 which equals a positioning in 0 1 of the total capacitor capacity Af ter the adjustment time these values are in line with the actual posi tions in question Operating instructions PFG RF 8 Chapter 8 Interfaces A 04 0059 00 BEN 001 19 Page 1 29 ar TRUMPF PFG RF DEFINITION OF THE INPUTS ON THE PROFIBUS The status bytes with the actual values that are sent from the RF gen erator to the PROFIBUS are listed in Tab 8 25 on page 130 Status bytes MEANING Byte 1 Generator status Byte 2 Error number ERROR Byte 344 AV P Byte 5 6 AV Byte 7 8 Upc BIAS Byte 94 10 Byte 11 12 Tune position tuning capacitor Byte 124 13 Load position load capacitor Tab 8 25 Overview PROFIBUS status bytes Status byte 1 generator status STATUS BYTE 1 GENERATOR STATUS NU
36. NOW THE DANGER AREAS isssssee eene ener rsen nn 94 REMOVING RESIDUAL VOLTAGES csseee mene rennen nena 94 MAINTENANCE INTERVALS 95 MAINTENANCE WORK 96 VISUATNSPEGTIONILs 96 CLEANING det eaten pe 96 CHECK VENTILATORS debet 96 CHECKING OPERATING VALUES 96 BUFFER BATTERY REPLACEMENT ccsee Hee eee nee rene nennen 97 REPLACEMENT PARTS eese eene nnne 98 INTERFACES ER MEER 99 OVERVIEW OF THE INTERFACES 99 MAINS CONNECTION X2 101 RF OUTPUT RF INPUT X5 102 RF POWER OUTPUT Pouf 103 MATCHBOX ELE 104 A D INTERFACE X1 105 ANALOG PARI aaa teva IG ure Ger Po ub PPP ORG Ew 108 DIGMAL PART 109 AR O OKS 111 RS232 X3 112 185 SETTE E 119 PROFIBUS INTERFACE
37. SES When operated as intended there is no danger to persons resulting from the emission of high frequency fields Design measures ensure compliance with the EC directives including the EMC directive imple menting the emission limits according to EN 55011 During certain service work however higher field strengths than nor mal may occur Similarly in the case of malfunction high frequency fields with amplitudes in excess of the above limits may occur Only in these cases there may be a hazard to persons with active or passive health aids pacemakers implants To eliminate dangers to these persons at all times the following notice is to be observed Danger High frequency Alternating electromagnetic fields can have an unwanted damaging effect on active and passive health aids pacemakers implants Per sons with active and passive health aids must not be present in the area affected by the unit Affix the adhesive signs No entry for persons with pacemakers at all entrances to the room the unit operates in The signs are shipped with the unit DANGEROUS HIGH VOLTAGES Life Threatening Voltage AN The generator converts low frequency mains electricity into high fre quency electrical energy High voltages encountered here are definitely life threatening Never open the generator while it is connected to mains Operating instructions PFG RF Chapter 2 Safety A 04 0059 00 BEN 001 19 Page 1 9 PFG R
38. TROL Change CONTROL In this menu the operation mode CONTROL is displayed CHANGE CONTROL CONTROL In this menu the operation mode CONTROL can be changed PFG RF G TRUMPF INTERNAL REGULATION Q1 gt 1 Jen SETPOINTS New Setpoints New Setpoints POWER DC BIAS CONTROL Change CONTROL F2 F1 REGULATION Change Change resumen les REGULATION Limit ACTUAL VALUES tJ In this menu you can change the regulation mode REGULATION and the limit mode LIMIT REGULATION REGULATION Change F1 Change REGULATION gt LIMIT REGULATION POWER This menu displays the regulation mode REGULATION and the limit mode LIMIT Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 TRUMPF Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 PFG RF CHANGE REGULATION REGULATION la Change LIMIT In this menu the regulation mode REGULATION can be changed Notice Depending on the setpoint specified one of the internal regulators may intervene if the regulation mode is changed during operation and limit the output power In this case the setpoint that is not required and that acts as limit must be increased CHANGE LIMIT REGULATION un Change REGULATION LIMIT DDC Blaz
39. TRUMPF rea PFG RF Operating instructions PFG RF RF Generators e Notice This operating manual is required for the safe operation of the RF Ge nerator PFG RF Therefore you should keep the operating manual clo se to the unit Operating instructions PFG RF 23 07 2007 Item No A 04 0059 00 BEN 001 19 PFG RF KE Bj Who are these This manual is intended for all persons who are working with and on operating instructions the RF Generator PFG RF and especially for the operating personnel for Copyright The RF Generator PFG RF and this manual are protected by copyright Any reproduction of these devices will be prosecuted This document was produced by the Technical Documentation De partment of H TTINGER Elektronik GmbH Co KG All rights reserved by H TTINGER Elektronik GmbH Co KG in par ticular the rights of reproduction and distribution as well as translation including issues relating to copyright claims No part of this documen tation may be reproduced or processed duplicated or distributed through the use of electronic systems in any way without the prior written permission from H TTINGER Elektronik GmbH Co KG Sub ject to errors and technical changes O H TTINGER Elektronik GmbH Co KG H ttinger Elektronik GmbH Co KG assumes no responsibility for any possible errors in this documentation Liability is excluded for damages either direct or consequential which occur in association with
40. UES 2 In the additional menu additional values ADDITIONAL VALUES are displayed The additional menu varies according to the generator type Thus the following elaborations are to be seen as examples only ACTUAL VALUES ACTUAL F2 ADDITIONAL F2 ADDITIONAL VALUES C P VALUES 1 gt VALUES 2 F In addition to the actual values the menu ACTUAL VALUES also dis plays the overall running time of the generator RF ON Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 PFG RF TRUMPF ADDITIONAL VALUES 1 mena E2 dune ACTUAL ADDITIONAL ADDITIONAL VALUES gt vaLues1 va uES2 This menu displays the current actual values of the generator ADDITIONAL VALUES 2 ACTUAL F2 ADDITIONAL F2 ADDITIONAL VALUES VALUES 1 gt VALUES 2 F1 l FR This menu displays current actual values of the generator 11 13 and 16 18 are the currents of the individual final stages Since a differ ent number of final stages are present depending on the generator type the number of currents displayed varies ADDITIONAL VALUES 3 ACTUAL F2 ADDITIONAL F2 ADDITIONAL VALUES gt VALUES 1 gt VALUES 2 F1 l pag kh UDC pl 0 08 WRF Bu This menu displays current actual values of the generator This menu i
41. WER AV Pg HIGH BYTE Bit4 Bit3 212 211 Tab 8 29 Status bytes 5 and 6 reflected power Operating instructions PFG RF 8 Chapter 8 Interfaces 04 0059 00 BEN 001 19 Page 1 31 PFG RF Status bytes 7 and 8 plasma voltage Upc Status bytes 9 and 10 RF Voltage Page 132 TRUMPF STATUS BYTES 5 AND 6 REFLECTED POWER AV Pg Tab 8 29 Status bytes 5 and 6 reflected power This value shows the current reflected power AV PR It is an indicator for the quality of the match The maximum value depends on the pow er class of the generator and can reach up to 20 96 of the possible di rect power P Example 1000 RF 0 2 1000 W 200 W STATUS BYTES 7 AND 8 PLASMA VOLTAGE Upc HIGH BYTE Bit4 Bit3 Tab 8 30 Status bytes 7 and 8 plasma voltage The voltage range Upc is defined from 0 V to 2040 V If the generator is operated without the fiber optic bus then the value must be speci fied as O 1000 o HIGH BYTE Bit4 Bit3 Tab 8 31 Status bytes 7 and 8 plasma voltage The voltage range is defined from 0 V to 2040 V If the gener ator is operated without the fiber optic bus then the value must be specified as O 1000 Operating instructions PFG RF Chapter 8 Interfaces A 04 0059 00 BEN 001 19 Status bytes 11 and 12 status bytes
42. ab 8 21 Tab 8 22 Tab 8 23 Tab 8 24 Tab 8 25 Tab 8 26 Tab 8 27 Tab 8 28 Tab 8 29 Tab 8 30 Tab 8 31 Tab 8 32 Tab 8 33 Operating instructions PFG RF Chapter Index of Tables A 04 0059 00 BEN 001 19 Operation modes Faultimessages Leine eet Maintenance intervals Interface designations RFanput X5b iet tree RF power output type 5 a A D interface 1 ote abc e ee aa A D interface X1 assignment of analog 108 A D interface X1 assignment of digital part 109 Setting Regulation mode Specification RF inhibit input 5 232 interface cotton Pere e ER LER CRUS RS 232 C interface X3 assignment 5 byte communication block RS 232 C 116 RS 485 interface X6 121 RS 485 interface X3 assignment 122 7 byte communication block RS 485 123 Profibus interface X3 assignment 124 Lengths of the PROFIBUS input and output buffers 125 Overview of the PROFIBUS command bytes Command byte 1 process number
43. aintain RF Generator directed at PFG RF on the basis of this operating manual Chapter contents The chapter contains advice regarding the regular maintenance and care of the RF Generator PFG RF 7 1 GENERAL MAINTENANCE NOTICES In this chapter you will find maintenance notices which describe the maintenance work necessary in order to maintain the normal opera tion of the generator All additional maintenance work beyond that described in these oper ating instructions is reserved for specially trained personnel and H T TINGER service personnel TECHNICAL SUPPORT Service personnel from H TTINGER can be reached via the H TTINGER central office Operating instructions PFG RF Chapter 7 Maintenance A 04 0059 00 BEN 001 19 Page 93 PFG RF 7 2 Page 94 TRUMPF SAFE MAINTENANCE For your own safety you must observe the safety notices and measures described here at all times during maintenance KNOW THE DANGER AREAS Life threatening voltages Voltages present in the generator are life threatening Make sure that you know the danger areas For this purpose carefully read chapter 2 4 Danger areas maintenance and re pair of this manual before you commence maintenance work REMOVING RESIDUAL VOLTAGES Some parts of the generators retain voltage even after switching off the main switch Disconnect the generator before beginning maintenance work Observe both the appropriate fundamental rules concerning
44. arge steps By briefly pressing the two incremental keys the adjustable values can be increased incremental key or decreased decremental key In general a more precise setting of numerical values can be achieved by using the incremental keys instead of the rotary button If the incremental keys are held pressed down the speed with which the values change increases The function keys are used to move between and within the menus as well as to select parameters Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 PFG RF C Fig 6 2 Main switch The main switch Q1 is located on the back it switches the generator on DisPLAY ELEMENTS The illuminated two line LCD display is used for the display of the ac tual values set values and error messages They are displayed in the form of menus Values that may be edited are preceded by a star 20 Operating instructions PFG RF 6 Chapter 6 Operation control A 04 0059 00 BEN 001 19 Page 51 PFG RF S E PROTECTION SWITCHES FUSES Fig 6 3 Protection switches and fuses The protection switches and fuses are located at the rear side The main switch Q1 is designed as circuit breaker The fuses F1 and F2 are thermal fuses The PFG 300 RF only features thermal fuses F1 and F2 Operating instructions PFG RF Chapter 6 Operation control Page 52 A 04 0059 00 BEN 001 19 TRUMPF F1 NEXT
45. ating instructions PFG RF Chapter 5 Installation A 04 0059 00 BEN 001 19 WIRING THE RF REFERENCE INPUT The RF input interface X5 is an RF reference input When operating a generator the RF reference input is fed by the generator itself individ ual operation If several generators are to be operated synchronously synchronous operation an external master oscillator common excit er must be connected here During individual operation the RF input X5 is fed directly from the generator the RF input X5 must be connected to the RF output X4 When the generator is shipped the two interfaces are already con nected to each other Connect the RF input X5 to the RF output X4 via a short cable In synchronous operation the RF input X5 is fed by a master oscilla tor Connect the master oscillator to the RF input X5 via a short cable y Install a terminating resistor of 50 W at the RF output X4 Page 45 PFG RF RF power output Pout Emergency power off switch Connecting the power supply unit PFG 600 RF PFG 5000 RF PFG 300 RF Checking electrical connections Page 46 TRUMPF MAKING THE ELECTRICAL CONNECTIONS The RF power output Pout is designed as follows Coaxial socket N PFG 300 RF PFG 1000 RF Coaxial socket 7 16 1600 5000 Connect the generator to the matchbox via the coaxial cable If you connect an
46. bit and 7 function bits The wait bit indicates whether a write or read command is at hand Each byte 8 bits is completed with one start bit and one stop bit 1 start bit 8 bits 1 stop bit ACK Acknowl function Correct Reception ASCII 06h NAK Not Ackn function Incorrect Reception ASCII 15h see table 8 8 Setting Regulation mode on page 110 The error numbers are listed in section chapter 6 6 Troubleshooting rectification of faults 8 12 5 byte communication block RS 232 C Operating instructions PFG RF Chapter 8 Interfaces Page 1 18 A 04 0059 00 BEN 001 19 ro PFG RF Transmission 1 The host always sends a complete communication block 5 protocol description bytes long Address identification is in general set to 0 for generators 2 The contacted device accepts the communication block and calculates a new checksum from the first 4 bytes If the calculated checksum does not correspond to the one re ceived a transmission error has occurred In this case the device responds with an answer block 5 bytes long in which the second character is a NAK This way the host can detect the transmission error and in general repeat transmission of the communication block 3 checksums usually correspond The device now checks the wait bit For write commands wait bit 0 no numeri cal value is expected back In these cases a simple acknowl edgment suffices the device sends an an
47. ce Refer to chapter 8 Interfaces OPERATION MODE PROFIBUS The operation mode PROFIBUS is an external operation mode It is de signed for processes that are controlled by an external control system The operating personnel do not have access to the process from the control panel The generator is designed as a DP slave In the operation mode RS PROFIBUS all important control and mea surement signals of the generator and the Matchbox can be trans ferred via the interface Refer to chapter 8 Interfaces MATCHBOX MODE AUTOMATIC As soon as the matchbox recognizes from the development of a DC BIAS voltage that the plasma has ignited or as soon as it measures an RF PEAK voltage the capacitors are automatically adjusted to reach an optimum The position of the capacitors is assumed to be optimal if the reflected power is equal to zero or at a minimum MATCHBOX MODE DCAUTO As soon as the matchbox recognizes from the development of a DC BIAS voltage that the plasma has ignited the capacitors are automati cally adjusted to reach an optimum The position of the capacitors is assumed to be optimal if the reflected power is equal to zero or at a minimum PFG RF Page 60 TRUMPF MATCHBOX MODE MANUAL The capacitors move to the manually set nominal position Positions between 0 and 1000 corresponding to the minimum and maximum setting of the capacitors may be set in steps of 1 MATCHBOX MODE REMOTE Using the r
48. change With F4 RESET you acknowledge error messages PFG RF TRUMPF CONTROL PROGRAM Control program The generator is controlled by an internal program the control pro gram The control program is permanently stored in an EPROM mem ory module Settings are retained Following the self test the generator takes over all settings that were in use when the device was last switched off With the generator switched on settings can be changed using the control panel or via the interfaces When the generator is switched off the current settings are stored in a battery buffered RAM 6 3 RECOGNITION OF OPERATIONAL STATES The operating state is indicated by the lighting up of the green ON but ton on the control panel Operating state ON The generator is in power operation if the green ON button is lit Operating state OFF The generator is not in power operation if the green ON button is not lit Operating instructions PFG RF Chapter 6 Operation control Page 54 04 0059 00 BEN 001 19 PFG RF a C 6 4 SWITCHING THE GENERATOR ON AND OFF The generator is switched on via the main switch Q1 at the rear De pending on the operation mode power operation is switched on and off using the control elements on the front panel or via an interface n the operation modes REALTIME and LOCAL the power operation is switched on via the green ON button and switched off via the red OFF button n the operatio
49. ctrical equip ment These personnel must be accustomed with and abide by the rel evant safety regulations of the installation area for the erection of electrical equipment Observe the safety information in chapter 2 Safety Operating instructions PFG RF 2E Chapter 5 Installation A 04 0059 00 BEN 001 19 Page 41 PFG RF Integrating into a system controller Page 42 A TRUMPF CONNECTING THE SAFETY AND CONTROL CIRCUITS The following interfaces are used for integrating into a system control ler e A D interface X1 RS 232 C interface X3 RS 485 interface X6 e Fiber optic cable U1 U2 e Profibus interface optional The interfaces are located at the rear side of the device As required one or more interfaces can be wired Warning The plugs and cables connected to the interface must be shielded Connect the shielding to the housing Notice Detailed information on interface assignments and on integrating the generator into a process computer controlled environment is provided in chapter 8 Interfaces Operating instructions PFG RF Chapter 5 Installation A 04 0059 00 BEN 001 19 AID interface X1 RS 232 C interface X3 RS 485 interface X6 Fiber optic cable U1 U2 Operating instructions PFG RF Chapter 5 Installation A 04 0059 00 BEN 001 19 PFG RF The A D interface is a 37 pin SUB D socket If you want to connect the A D interface Connect the signa
50. e activate member Reestablish connec tion Check whether all con tacts in the loop of the safety circuit at Interlock1 are closed INTERLOCK2 IS OPEN A device internal inter lock is interrupted RF SWITCH IS ACTIVE The RF output is currently being switched There was an attempt to switch on power al though the channel switching has not been completed Wait for 2 seconds and then switch on again MATCHBOX ERROR Tab 6 2 Fault messages Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 General error in the matchbox TRUMPF DESCRIPTION MATCHBOX WATCHDOG Watchdog of the matchbox caused a hardware reset REMEDY SLAVE ERROR Error only in the case of matchbox with two processor controls There has been an error in the slave control ler Check whether servo units are blocked or heavy going NO REACTION ON C TUNE Tuning servo is blocked or heavy going Contact service NO REACTION ON C LOAD SWITCH FAILURE There has been a general error in the RF selector switch Load servo is blocked or heavy going various reasons Contact service Contact service RF SWITCH RESET The switch control has been reset by the internal Watch dog Fault Error in program execu tion Check RF connections RF CHANNEL NOT SWITCHED The desired channel has not been switched Missing acknowledg me
51. e made can be found in the following table Operation modes Operation mode Setting through Internal REALTIME Control panel LOCAL Control panel External REMOTE1 Analog digital interface mode REMOTE2 A D interface control panel REMOTE3 Analog digital interface REMOTE4 A D interface TIS emulation RS 232 RS 232 C interface RS 485 RS 485 interface PROFIBUS External profibus interface The generator is operated in the operation modes REALTIME and LOCAL through the control panel and in other operation modes via the inter faces Tab 6 1 Operation modes The different operation modes are described in the following sections In the following the menus of the internal and external operation modes are explained The overview figure at the top of each page il lustrates the arrangement of the current shaded menu group in the menu structure the arrows indicate the direction of movement within the menu The functions that can be selected in the individual menus and their parameter settings are described in chapter 3 3 Technology Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 PFG RF C OPERATION MODE REALTIME The operation mode REALTIME is an internal operation mode It is suitable for locally controlled processes The operating personnel can intervene directly in the process during operation and thus react imme diately to vari
52. e stop bit 1 start bit 8 bits 1 stop bit Tab 8 15 7 communication block RS 485 8 9 PROFIBUS INTERFACE GENERAL Profibus interface connection to the Profibus takes place via a 9 pin SUB D socket assignment The pins are assigned as follows PIN NO ASSIGNIMENT Din out positive data line GND ground Dinout negative data line Tab 8 16 Profibus interface X3 assignment Intelligent slave The Profibus interface is configured for an intelligent slave The sizes of the input and output buffers are listed in Tab 8 17 on page 125 Operating instructions PFG RF Chapter 8 Interfaces Page 124 A 04 0059 00 BEN 001 19 TYPE NUMBER CODING digital inputs 2 2 1 byte 011h analog inputs 6 6 2 bytes length D Buffer Byte 14 digital outputs 2 2 1 byte analog outputs 4 4 2 bytes length D OUT Buffer 10 bytes Tab 8 17 Lengths of the PROFIBUS input and output buffers The read data as well as the write data are divided into digital 1 byte and analog 2 byte data words The digital words are either bit sorted every bit has a certain meaning or are to be evaluated as an 8 bit number e g error status The analog words are to be in terpreted as 16 bit values which are divided into a high byte and a low byte 9 Notice When writing the data remember that all values are always transmit ted A transmission containin
53. eas may not be guaranteed due to the conductor bound interference factors that occur Operating instructions PFG RF Chapter 3 Description technology A 04 0059 00 BEN 001 19 Page 25 f PFG RF 3 2 Page 26 COMPONENTS DEVICE OVERVIEW Fig 3 1 Front side using the 1600 2500 RF as an example The following controls are located on the front of the controller LCD display LCD ON button AFF button 0 Rotary button D Incremental keys incremental key decremental key Function keys F1 F4 Fig 3 2 Rear side using the example of PFG 1600 RF 2500 The following operating elements interfaces and connections are lo cated at the rear Main switch Q1 A D interface X1 Operating instructions PFG RF Chapter 3 Description technology A 04 0059 00 BEN 001 19 PFG RF ro Mains connection with protective cover X2 RS 232 C interface X3 RFoutput X4 RFinput X5 RF power output Pour RS 485 interface X6 Fiber optic cable IN U2 fiber optic cable OUT U1 Earth connection GND e Fuses F1 F2 Cooling water connection inflow W1 outflow W2 The interface equipment of your generator is stated in the document Technical Specification Block diagram XS IN Vorverst rker Hochpassfilter Endstufe Tiefpassfilter Reflektometer Master HF Leistungs Oszillator N OUT ausgang gt gt
54. ement of the communication block is given in the fol lowing table The description of the command block function byte can be found in the description of the RS 232 interface 7 BYTE COMMUNICATION BLOCK ADDRESS BYTE RECEIVE R ADDRESS BYTE TRANS MITTER ADDRESS FUNCTION BYTE DATA BYTES BYTE FOC HIGH BYTE LOW BYTE EEEE EEEE SSSS SSSS LLLL LLLL WFFF FFFF DDDD DDDD DDDD DDDD PPPP PPPP HEX COM MAND MEANING The meanings of the function bytes and the data bytes are described in Tab 8 12 5 byte communi cation block RS 232 C Tab 8 15 7 communication block RS 485 Operating instructions PFG RF Chapter 8 Interfaces A 04 0059 00 BEN 001 19 Page 123 cum TRUMPF 7 BYTE COMMUNICATION BLOCK E address bits RS 485 receiver S address bits RS 485 transmitter L address bits fiber optic cable W wait bit F function bits D data bits P check bits The addresses of the participants in the RS 485 ring are entered as address byte RS 485 For the generators 00 is always entered for the address byte fiber optic cable The function byte consists of 1 wait bit and 7 function bits The wait bit indicates whether a write or read command is at hand The data bytes consist of 1 high byte and 1 low byte The check byte is an exclusive OR operation of the previous 6 bytes Each byte 8 bits is completed with one start bit and on
55. emote function the operation mode of the matchbox can be switched to external In this case the generator only has read ac cess All other functions are supplied to the matchbox via its external SUB D connection MATCHBOX MODE FREEZE With this mode the variable capacitors of the matchbox can be imme diately stopped frozen in their current position Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 TRUMPF PFG RF INTERNAL OPERATION MODES The following image shows the menu structure of the internal opera tion modes Q1 gen SETPOINTS _F4 New Setpoints 4 New Setpoints POWER DC BIAS 2 CONTROL Change 2 F4 REGULATION Change Change REGULATION Limit ACTUAL VALUES t Fig 6 4 Menu structure internal operation modes INTERNAL SETPOINTS In this menu you can set the nominal values SETPOINTS Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 G TRUMPF PFG RF Ie SETPOINTS 4 New Setpoints _F2 New Setpoints pen POWER DC BIAS Ru E EE pese a a E e ACTUAL VALUES 4 F1 SETPOINTS F2 SETPOINTS New Setpoints New Setpoints gt POWER gt DC BIAS In this menu the nominal values SETPOINTS are displayed Depend ing on the type of regulation and limit that have been set either the
56. en be detrimental to the product if an excessive RF power is present at the electrodes for a brief period When the power is switched on the regulator thus regulates first with respect to the forward power in each operation mode such that the generator is only driven up to the limit Pj max that is preset there Reg ulation is directed towards this power until such time as the plasma ig nites e f the plasma thus created only requires a lower RF power than the specified limit P max regulation switches over to DC BIAS regulation and the RF power is limited to a smaller value such that the speci fied nominal value for Upc can be maintained However if the plasma requires a higher RF power than the preset nominal value for the limit P this nominal value must be corrected upwards until a change to DC BIAS regulation is made Page 29 PFG RF Modes of regulation POWER regulation DELTA P regulation DC BIAS regulation ER Page 30 TRUMPF In each case the circuit selects the smaller of the two signals as the control quantity MODES OF REGULATION The generators are equipped with the following modes of regulation POWER regulation DELTA P regulation DC BIAS regulation RF PEAK regulation In the case of POWER and DELTA P the regulator regulates towards a power in the case of DC BIAS and RF PEAK it regulates towards a voltage The regulation modes are described in the following section
57. eration mode is an external operation mode It is de signed for processes that are controlled by an external control system The operating personnel do not have access to the process from the control panel In this operation mode the generator is controlled via the RS 232 C in terface The internal generator settings are taken over when the oper ation mode is changed to RS 232 settings can be changed via the RS 232 C interface during operation In the operation mode RS 232 all control and measurement signals of the generator and the Matchbox can be transferred via the RS 232 C interface Refer to chapter 8 Interfaces Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 TRUMPF Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 PFG RF OPERATION MODE RS 485 The operation mode RS 485 is an external operation mode It is de signed for processes that are controlled by an external control system The operating personnel do not have access to the process from the control panel In this operation mode the generator is controlled via the RS 485 in terface The internal generator settings are taken over when the oper ating mode is changed to RS 485 settings can be changed via the RS 485 interface during operation In the operation mode RS 485 all control and measurement signals of the generator and the Matchbox can be transferred via the RS 485 C interfa
58. evice triggers at the Interlock only the power re lay is switched off The generator still carries voltage In order to switch off external devices by the generator two floating interlock outputs Interlock 2 Interlock 3 are available to you Interlock 2 is designed as a normally closed contact and is switched via the power relay When the generator outputs power this contact is open When the generator does not output power this contact is closed Interlock 2 is only present for the generators PFG 1600 5000 RF Interlock 3 is designed as a normally open contact and is switched via the power relay When the generator outputs power this contact is closed When the generator does not output power this contact is open Operating instructions PFG RF Chapter 2 Safety A 04 0059 00 BEN 001 19 TRUMPF PFG RF System protection For the protection of the generator and other connected devices the generator switches off the output power immediately in case of excess temperature open Interlock1 circuit The generator switches the output power off with delay in case of per sistent overcurrent of the final stage mismatch gt 20 96 P max overvoltage at the final stages Ups 110 V defective final stage operating current gt 20 300 gt 8 A and Pp gt 50 Pj See also chapter 6 6 Troubleshooting rectification of faults Operating instructions PFG RF Chapter 2 Safety A 04 0059 00 BEN
59. f in accordance with the relevant waste disposal regulations Operating instructions PFG RF Chapter 5 Installation 04 0059 00 BEN 001 19 Page 47 TRUMPF PFG RF Operating instructions PFG RF Chapter 5 Installation Page 48 A 04 0059 00 BEN 001 19 PFG RF 6 OPERATION CONTROL Chapter Outline Who is this chapter This chapter is intended for all persons who operate RF Generator PFG directed at RF on the basis of this operating manual Chapter contents The chapter contains a description of the modes and states of opera tion as well as operating instructions for RF Generator PFG RF 6 1 COMMISSIONING The generators do not need a special commissioning procedure They can be switched on immediately after installation Operating instructions PFG RF 6 Chapter 6 Operation control A 04 0059 00 BEN 001 19 Page 49 TRUMPF PFG RF 6 2 Page 50 GENERAL CONTROL CONTROL ELEMENTS LCD TTE IT ERES m mm 4 m OFF but ON Control Incremen Function ton button knob tal keys buttons Fig 6 1 Operation and display elements The power operation is switched on by pressing the green ON button 1 By pressing the red OFF button O the power operation is switched off The rotary button permits the modification of numeric values e g 52 Rotating the button clockwise increases the value rotating the button anti clockwise decreases the value in l
60. fication of the fiber optic addresses varies according to the se quence in the fiber optic ring The following figure provides an exam ple for the construction of a fiber optic ring Operating instructions PFG RF Chapter 8 Interfaces A 04 0059 00 BEN 001 19 PFG RF Fiber optic cable Energy flow Fig 8 13 Fiber optic cable U2 Out 01 Operating instructions PFG RF 8 Chapter 8 Interfaces A 04 0059 00 BEN 001 19 Page 1 35 TRUMPF PFG RF 8 Operating instructions PFG RF Chapter 8 Interfaces Page 1 36 A 04 0059 00 BEN 001 19
61. g for example only changed values is not possible Settings on the master The settings are contained GSD file included in the delivery Adjustment of the activity monitoring of the participant s watch dog The PNO Ident number is 0726 No member specific parameter bytes are used The settings for the configuration telegram must be carried out as described in Tab 8 17 on page 125 Synchronous and freeze operation are not provided Generator with If a generator with matchbox is controlled the following has to be tak matchbox en into account The process number CHANNEL command byte1 must be set to at least 1 even if no matchbox is connected Aslong as the reset bit command byte2 bit2 is set no changes are accepted via the PROFIBUS Before an error can be reset the RF ON bit command byte 2 must be set to 0 2power off Before the generator can be connected to the PROFIBUS the gen erator must be set to a free PROFIBUS address Operating instructions PFG RF Chapter 8 Interfaces A 04 0059 00 BEN 001 19 Page 1 25 PFG RF Command byte 1 process number CHANNEL Page 126 TRUMPF DEFINITION OF THE OUTPUTS ON THE PROFIBUS The command bytes with the nominal values that are sent from the PROFIBUS to the RF generator are listed in Tab 8 18 on page 126 COMMAND BYTES MEANING Byte 1 Process number CHANNEL Byte 2 Commands Byte 3 4 Nominal powe
62. g to the rel evant regulations of the delivery area Operating instructions PFG RF 2E Chapter 5 Installation A 04 0059 00 BEN 001 19 Page 39 PFG RF 5 3 Page 40 TRUMPF INSTALLATION AND ASSEMBLY The generator is designed as a 19 rack module 300 RF 19 rack module Warning During the installation of the generator into a cabinet the air vents on the side must be kept free from obstruction There must be sufficient distance to the rear cabinet wall to permit the heated air to escape through the rear air vents The incoming air temperature must not be above 35 C y Ensure that the air vents remain free of obstruction Keep a distance of 10 cm to the rear cabinet wall When installing several generators in one switching cabinet Ensure if necessary through additional ventilation measures that each generator has an unobstructed air flow with an incom ing air temperature of no more than 35 Prevent heated air from being sucked in again Operating instructions PFG RF Chapter 5 Installation A 04 0059 00 BEN 001 19 PFG RF 5 4 CONNECTION SAFETY Life Threatening Voltage AN The generators are connected to 230 V 3x208 V or 3x400 V Improper installation of the generators can be life threatening due to electrical voltages Qualified personnel The electrical connection of the generators must only be carried out by personnel who are qualified and trained for work with ele
63. ght chapters which contain all necessary information for the operation of the system Chapter 1 STRUCTURE OF THE DOCUMENT Chapter 2 SAFETY e Chapter 3 DESCRIPTION TECHNOLOGY Chapter 4 VERSIONS ACCESSORIES Chapter 5 INSTALLATION Chapter 6 OPERATION CONTROL Chapter 7 MAINTENANCE Chapter 8 INTERFACES STRUCTURE OF THE INDIVIDUAL PAGES A product symbol is located at the top outside corner of the page so that it is straight forward to recognize the product to which the oper ating manual applies The footer contains information about the actual chapter chapter number and name Operating instructions PFG RF Chapter 1 General Information A 04 0059 00 BEN 001 19 0D Operating instructions PFG RF Chapter 1 General Information A 04 0059 00 BEN 001 19 PFG RF e document name The current chapter is indicated by a pictograph above the page num ber which contains the chapter number and corresponding symbol EXPLANATION OF PICTOGRAMS AND SYMBOLS Danger This sign warns of possible personal injury Serious and even fatal inju ries could result if this sign is not heeded Life Threatening Voltage This sign warns of danger from electrical voltage If not heeded elec trical shocks and their known even fatal consequences could result Warning This sign warns of dangers for the product Damage and even com plete destruction of the product and ad
64. hapter 6 Operation control A 04 0059 00 BEN 001 19 PFG RF a C MATCHBOX MENU C POSITIONS F1 C POSITIONS Change F2 Change MB CHANNEL F2 Change t C POSITIONS F2 C POSITIONS Change This menu displays the matchbox mode and the target positions of the capacitors CHANGE C POSITIONS C POSITIONS hange POSITIONS i C TUHESE Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 PFG RF Page 78 TRUMPF In this menu you can edit the target positions of the capacitors To do this the reflected power PR REFP is displayed which permits easy set ting of the minimum reflected power PR in the MANUAL matchbox mode Use F2 CHANGE to switch between the two capacitors MATCHBOX MENU MB MODE F1 F2 C POSITIONS Change F2 g CHANNEL F2 MB MODE Change it amp MODE AUTOMATIC FZ CHANGE This menu displays the matchbox mode MATCHBOX MODE Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 TRUMPF Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 PFG RF CHANGE MB MODE MB MODE Jn In this menu you can set the matchbox mode The follow
65. hase shifter The master oscillator with phase shifter permits the simultaneous RF operation of several generators RF selector switch The RF selector switch permits the use of a single generator for var ious process stations RS 232 RS 485 interface The PFG 300 5000 RF generators contain both interfaces Profibus data interface The PFG 300 RF PFG 5000 RF generators can also be fitted with a PROFIBUS interface instead of the RS232 and RS485 serial inter faces RF INHIBIT INPUT keying input PFG 1600 PFG 5000 are by default equipped with an RF inhibit input at the A D interface PFG 600 and PFG 1000 are optionally equipped with an RF inhibit input via a SUB MINUX socket For the PFG 1000 the RF inhibit input is optionally wired via the A D interface Operating instructions PFG RF Chapter 4 Variants Accessories A 04 0059 00 BEN 001 19 PFG RF 5 INSTALLATION Chapter Outline Who is this chapter This chapter is intended for all persons who install RF Generator PFG directed at RF on the basis of this operating manual Chapter contents The chapter contains advice regarding the correct mechanical and electrical installation of the RF Generator PFG RF 5 1 TRANSPORT STORAGE GENERAL NOTICES After receiving the generator Check the generator immediately upon delivery for complete ness in accordance with the delivery note and also for visible damages incurred during transport o
66. he analog ground GND Operating instructions PFG RF Chapter 8 Interfaces A 04 0059 00 BEN 001 19 Page 108 PFG RF DIGITAL PART AID interface X1 assignment of digital part DESIGNATION MEANING POWER ON Power on E1 Switching the regulation E2 Switching the limit RESET Delete error message RF INHIBIT Keying input not available on all genera tor types Reference potential of inputs Outputs 12 STANDBY Readiness for operation 30 POWER ON Message Power on 28 EXTERN External operating mode 10 Fault Accumulated error mes sages 11 Error message Reflected po 29 Error message Operating current 27 COM OUT Reference potential for out puts Interlock inp 8 Interlock1 24 V in Interlock1 26 Interlock1 24 V out Interlock outputs 3 Interlock2 Interlock2 21 Interlock2 break contact 22 Interlock3 Interlock3 23 Interlock3 make contact Tab 8 7 A D interface assignment of digital part Operating instructions PFG RF 8 Chapter 8 Interfaces A 04 0059 00 BEN 001 19 Page 1 09 PFG RF Setting Regulation mode Page 110 TRUMPF Reserved area Reserved Tab 8 7 A D interface assignment of digital part The digital inputs except for interlock1 are floating This is achieved via optical couplers and is designed for an external control voltage of 24 VDC T
67. he common reference potential of the inputs is pin 5 COM IN The outputs except for interlock2 and interlock3 are designed as NPN transistors with tapped emitters 24 V positive logic The common reference potential of the outputs is pin 27 COM OUT For permitted loads on the interface see Tab 8 5 on page 105 The selection of the regulation mode via the A D interface X1 is lim ited The selection can only take place in combination with the menu or with a serial interface Depending on whether the regulation mode was preset to power or voltage via the menu or via a serial interface the final regulation mode can be selected via Input E1 Input E2 is used to set which vari able is selected as the limit The options for the selection are shown in the following table REGULATION MODE Setting Regulation mode E1 Limit E2 OV 24V OV 24V P POWER DELTA P U DC 5 RF PEAK P AP P power regulation mode preset either via the menu REGU LATE POWER or DELTA P or via RS232 or RS485 REGULATE 1 U voltage regulation mode preset either via menu REGULATE DC BIAS or RF PEAK or via RS232 or RS485 REGULATE 2 Tab 8 8 Setting Regulation mode Operating instructions PFG RF Chapter 8 Interfaces A 04 0059 00 BEN 001 19 Interlocks Interlock 1 input Interlock 2 message output Interlock 3 message output Operating instruc
68. ification Operating instructions PFG RF p Chapter 3 Description technology A 04 0059 00 BEN 001 19 Page 33 rom TRUMPF PFG RF Operating instructions PFG RF Chapter 3 Description technology Page 34 04 0059 00 BEN 001 19 PFG RF 4 VARIANTS ACCESSORIES Chapter Outline Who is this chapter This chapter is intended for all persons who install and operate special directed at variants of the basic model of the RF Generator PFG RF or accessories for them Chapter contents The chapter contains information about the functionality and technol ogy of model variants and accessories of the RF Generator PFG RF their use fields of application and technical data 4 1 MODEL VARIATIONS Different output The generators can be supplied with the following output powers powers e 300W 600W e 1000W 1600W e 2500W e 5000W Identical functions These generators only differ in the dimensioning of the power units as well as the dimensions for installation Functions construction and operation of the generators are identical Operating instructions PFG RF 4 Chapter 4 Variants Accessories A 04 0059 00 BEN 001 19 Page 35 PFG RF TRUMPF 4 2 ACCESSORIES AND OPTIONS ACCESSORIES The following accessories are required for the generators Necessary accessories PFM series matchbox coaxial cable OPTIONS The generators are available with the following options Page 36 Master oscillator with p
69. ing modes are available MANUAL AUTOMATIC DCAUTO REMOTE FREEZE When switching from MANUAL to AUTOMATIC or DCAUTO note the following The current set positions are saved internally as so called Plasma on positions These positions are assumed as soon as the matchbox has recognized that RF power is being supplied AUTOMAT gt 5V or UDC gt 5V or that the plasma has ignited DCAU TO UDC 5V If another position is now set manually in the automatic mode via the menu CHANGE C POSITIONS the servos are not moved while the plasma is on However the user can set a position at which the plasma is certain to ignite ignition position In case the plasma extinguishes e g at RF output off this ignition position is immediately assumed In the REMOTE operation mode the matchbox is not controlled via the generator but via the 25 pin SUB D connector of the matchbox In the FREEZE operation mode the current actual positions of the vari able capacitors in the matchbox cannot be changed PFG RF TRUMPF MATCHBOX MENU CHANNEL F1 C POSITIONS Change F2 Change MB CHANNEL F2 Change MB CHANNEL F2 MB CHANNEL Change This menu shows which of the matchboxes CHANNEL is currently ac tive CHANGE MB CHANNEL MB CHANNEL cS E B CHANNEL In this menu a Matchbox CHANNEL can be selected
70. joining parts can result if this sign is not heeded Warning Electromagnetic fields This symbol warns of electromagnetic fields Danger High frequency These signs warn of danger from high frequency radiation Persons with pacemakers or implants may not enter areas where this sign is posted as pacemaker operation can be disturbed by the presence of high frequency radiation and implats can heat up Notice This sign draws attention to important information Symbol of work step instructions This symbol calls your attention to tasks which are to be carried out 15 PFG RF 1 4 AV NV Page 16 TRUMPF TECHNICAL EXPRESSIONS AND ABBREVIA TIONS DESCRIPTION OF THE ABBREVIATIONS Actual value Nominal value Forward power incident power Reflected power Operating voltage of the power output amplifier DC BIAS voltage Drain source voltage RF peak voltage Operating current Pre amplifier current Position of the capacitor C Tune Position of the capacitor C Load Duty cycle Operating instructions PFG RF Chapter 1 General Information 04 0059 00 BEN 001 19 PFG RF N SAFETY Who is this chapter directed at Chapter contents Generator Operating instructions PFG RF Chapter 2 Safety A 04 0059 00 BEN 001 19 Chapter Outline This chapter is intended for all persons who install operate and main tain RF Generator PFG RF on the basis of this operating manual
71. ls which you will use to the interface The RS 232 interface is a 9 pin SUB D socket If you want to connect the RS 232 interface Connect the interface see chapter 8 7 RS 232 X3 The RS 485 interface is a 15 pin SUB D socket If you want to connect the RS 485 interface Connect the interface see chapter 8 8 RS 485 X6 The fiber optic interfaces are used for the connection to the fiber optic ring To connect the generator to the fiber optic ring Connect the fiber optic cables Page 43 ro TRUMPF PFG RF Connecting the interlocks Page 44 A The next step is to connect the interlocks The interlocks are connected to pin 8 and pin 26 of the A D interface X1 More detailed information about the interlocks can be found in chap ter 2 5 Safety devices Warning Interlock1 is to be wired with potential free contacts No external volt ages may be connected If you do not want to wire Interlock1 Use the supplied 37 pin plug Pins 8 26 of this plug are bridged by the factory If you would like to wire Interlock1 Remove the bridge between pin 8 and pin 26 from the plug sup plied with the A D interface X1 Connect one or more safety switch es break contact potential free in series between pin 8 and pin 26 Operating instructions PFG RF Chapter 5 Installation A 04 0059 00 BEN 001 19 PFG RF Individual operation Synchronous operation Oper
72. matic motors move according to Z or f signals PFM FREEZE Freeze mode motors remain at their current actual position Normal operation Freeze motors at the actual positions Tab 8 20 Command byte 2 commands Operating instructions PFG RF 8 Chapter 8 Interfaces A 04 0059 00 BEN 001 19 Page 127 ro PFG RF Command bytes 3 4 nominal power value Command bytes 5 and 6 nominal voltage value Page 128 TRUMPF COMMAND BYTES 3 AND 4 NOMINAL POWER VALUE HIGH BYTE Bit7 Bit6 Bit4 Bit3 Bit2 Bit BitO 27 20 25 24 23 22 21 20 Tab 8 21 Command bytes 3 4 nominal power value The nominal power value is transmitted as a 16 bit word The value is preset as a real power value in integer watt steps e g 1650 for 1650 watts direct power Up to PFG 2500 RF the specification is made in steps of 1 watt For the PFG 5000 RF the power specification must be in steps of 10 watts e g 200 must be preset for 2000W The maximum value depends on the generator type Other values are not accepted by the generator software COMMAND BYTES 5 AND 6 NOMINAL VOLTAGE VALUE HIGH BYTE Bit4 Bit3 212 211 Tab 8 22 Command bytes 5 and 6 nominal voltage value The nominal voltage value is a 16 bit word The voltage range is de fined from OV to 2040V Operating instructions PFG RF Chapter 8 Interfaces A 04 0059 00 BE
73. n modes REMOTE1 REMOTE2 REMOTE3 REMOTEA RS 232 RS 485 and PROFIBUS the power operation is switched on and off via the interfaces Warning AN After the generator has been switched on the settings which were set prior to the last time the generator was switched off are taken over Switching on mains Switch on the main switch Q1 After switch on the built in microprocessor is initialized lasting ap prox 2 seconds During this time the installed software version of the generator is displayed Switching on the The power operation can now be switched on power operation Press the ON key or apply 24 V to pin 25 X1 The ON button will light up The generator now creates an output power according to the settings which were current when the device was last switched off Switching off power Press the OFF key or apply 0 to pin 25 X1 operation Power operation is now switched off Switching off mains Switch off the main switch Q1 The generator is switched off Operating instructions PFG RF 6 Chapter 6 Operation control A 04 0059 00 BEN 001 19 Page 55 TRUMPF PFG RF 6 5 SETTING GENERATOR AND OPERATION MODES The generators can be operated in various modes This allows the gen erator to be operated in different ways For example the generator can be controlled either via the control panel or via remote control An overview of the operation modes and the way in which the settings ar
74. ng instructions PFG RF Chapter 8 Interfaces A 04 0059 00 BEN 001 19 RF POWER OUTPUT RF POWER OUTPUT Version Tab 8 3 power output type Notice PFG 300 RF PFG 600 RF PFG 1000 RF 50 coaxial type N PFG RF PFG 1600 RF PFG 2500 RF PFG 5000 RF 50 coaxial type 7 16 The RF power output is named differently depending on the generator type e g A2 X5 or A10 X4 For this reason the neutral designation Pour 6 used for the RF power output in these operating instructions Page 103 r TRUMPF PFG RF MATCHBOX Recommended matchbox Generator Recommended matchbox PFG 300 RF 1500 A PFG 600 RF 1500 A PFG 1000 RF PFM 1500 A PFM 3000 A PFG 1600 RF PFM 3000 A PFG 2500 RF PFM 3000 A PFM 3000 Ahc PFG 5000 RF PFM 3000 Ahc PFM 6000 A PFM 10000 A Tab 8 4 Matchboxes Operating instructions PFG RF Chapter 8 Interfaces Page 104 A 04 0059 00 BEN 001 19 PFG RF 8 5 A D INTERFACE X1 This interface can be used to remotely control the basic functions of the generator Data AID INTERFACE X1 Analog inputs Input voltage Input resistance min Analog outputs Output resistance of the sources Rj max Admissible output current 5 mA short circuit proof lA max Digital inputs digital outpu Ext control voltage 24V DC Input current l max 15 mA Output current IA max
75. nput Signal at the pulse input OV Nominal value RF output signal OW Fig 8 7 X Signal curve RF inhibit input The display of the P and is an approximate mean value display i e not a peak value display Example At a nominal value amplitude maximum of 600 W and a duty cycle of approx 5096 the display shows approx 250 300 W for Pj Fig 8 8 Signal shape RF inhibit input PR behavior slight overshoot in the us range regulation towards the mean value but no switch off at TV lt 80 96 Operating instructions PFG RF Chapter 8 Interfaces A 04 0059 00 BEN 001 19 8 6 8 7 Data Operating instructions PFG RF Chapter 8 Interfaces A 04 0059 00 BEN 001 19 PFG RF RF INHIBIT INPUT SUB MINUX PFG 600 and PFG 1000 are optionally equipped with an RF inhibit input via a SUB MINUX socket The function corresponds to the RF inhibit input via the A D interface See RF inhibit input on page 111 RS 232 C X3 The RS 232 C interface can be used to read and write all generator control and measurement signals RS 232 C INTERFACE X3 LOGIC Input voltage Din 0 3V 4 15V 1 3V 15V Output voltage Dout 0 9V 1 9V TRANSMISSION SPEED Baud rate 9600 baud 0 5 Tab 8 10 RS 232 C interface X3 Page 113 PFG RF cus TRUMPF RS 232 C interface X3 aw 29 90 o0 Fig 8 9 RS 232 C interface
76. nt between switch control and RF selector switch Faulty switching output of the controller Check connection all connections present TOO MANY MEMBERS During initialization too many members were detected Fault messages The maximum number of members permitted has been exceeded Remove members from the ring Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 TRUMPF DESCRIPTION During initialization too many matchboxes were detected TOO MANY MATCHBOXES There are more than 10 matchboxes connect ed via the fiber optic cable ring REMEDY e Remove matchbox TOO MANY SWITCHES During initialization too many switches were detected There are more than 3 RF switching control lers on the fiber optic cable ring Remove RF switching controller Tab 6 2 TOO MANY CHANNELS During initialization the maximum number of RF switching outputs has been exceeded Fault messages The installed RF switch es and matchboxes were connected to each other in the wrong order Reinstall fiber optic ca ble connections Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 TRUMPF PFG RF Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 PFG RF 7 MAINTENANCE Chapter Outline Who is this chapter This chapter is intended for all persons who m
77. o be residual DC volt ages that in the case of a fault may be of the same magnitude as their operating values This may be the case Atthe operating power supply 46 V a residual voltage of 60 V may be present for 5 s Operating instructions PFG RF Chapter 2 Safety A 04 0059 00 BEN 001 19 Page 21 PFG RF 2 5 Personal protection in the case of induction Interlock input Interlock 1 Interlock outputs Interlock 2 Interlock 3 EN Page 22 TRUMPF SAFETY DEVICES MONITORING AND PROTECTION DEVICES Notice You as the operator are responsible for the safe operation of the gen erator It is your responsibility to become accustomed with the appli cable legal regulations and to apply them For induction applications the coil must be protected from physical contact as dangerous RF voltage is present during generator opera tion An interlock input Interlock 1 is available to externally switch off the output power of the generator Interlock 1 switches the power relay off It must be wired without po tential via the A D interface The output voltage is switched off when the external safety switch connected to Interlock 1 is opened Several safety switches may be connected in series to replace a single switch Attention The Interlock does not guarantee personal safety and therefore can not be used as an emergency power off switch Life Threatening Voltage When a protection d
78. o select the DC BIAS regulation The RF PEAK regulation regulates the RF peak voltage which is created across the plasma or AP can be chosen as a limit when regulating with respect to volt age EXAMPLE POWER REGULATION This example shows the switch on process when regulating with re spect to a power regulation modes POWER or DELTA P ON OFF AV P ow AV Upc 0v AV PR Ow Fig 3 4 Signal curve under power control The power operation is switched on ON The power increases in a linear manner tis assumed that the plasma is not ignited immediately and thus the RF system is not matched The reflected power PR thus increases rapidly Page 31 PFG RF rom TRUMPF Time 2 The reflected power PR reaches the preset limit and curbs the for ward power The regulation now keeps each of the powers P and Pg constant until the plasma is ignited Time 3 The plasma is ignited and DC BIAS voltage is present PR goes almost to zero and the preset nominal power value is at tained Time 4 The DC 5 voltage usually increases slightly The reflected power PR decreases due an improved match by the matching network Time 5 The DC BIAS voltage reaches its limit The regulation now keeps the DC BIAS voltage constant at the set value e n case that the DC BIAS voltage falls below the preset limit again the power regulator takes over regula
79. ontrolled via interfaces A D interface serial interfaces RS232 C and RS485 fiber optic cable interface optional Profibus interface Therefore the generator can very easily be integrated into a process computer controlled system The generator requires a matching network in order to be operated The generator may be used in synchronous operation mode several synchronous generators For synchronous operation mode a master oscillator is required Furthermore one generator may supply different process stations via an RF selector switch The communication with the other H TTINGER components match ing network RF selector switch is accomplished via an optical fiber ring bus This prevents interference on the communication channel caused by EMC refer also to chapter 4 Variants Accessories FIELDS OF APPLICATION The generators may be used for all PVD and CVD processes as well as for ion etching processes in the area of plasma and thin layer technol ogy Advantages result in particular during sputtering in reactive mode and when creating insulating layers Operating instructions PFG RF Chapter 3 Description technology A 04 0059 00 BEN 001 19 TRUMPF 3 5 Setting the RF power 2 channel regulation Example regulation DC BIAS Switching on the power Plasma ignites Operating instructions PFG RF Chapter 3 Description technology A 04 0059 00 BEN 001 19 PFG RF CONTROL The adjustment of
80. ous process conditions In this operation mode the generator is operated by use of the control panel All generator values and settings output power limits etc can be viewed and edited both in the display menu and in the submenus intended for this purpose OPERATION MODE LOCAL The operation mode LOCAL is an internal operation mode It is de signed for processes that are not connected to external control sys tems but rather are to be controlled directly from the generator In this operation mode the generator is operated by use of the control panel The settings of the generator are made via the operating panel in the submenus intended for it This prevents accidental changes to the settings during the process OPERATION MODE The operation mode is an external operation mode It is de signed for processes that are controlled by an external control system In this operation mode the entire generator is controlled externally via the A D interface X1 The operating personnel do not have access to the process from the control panel The Matchbox remains operable through the generator provided it is connected via the fiber optic ca ble OPERATION MODE REMOTE2 The operation mode REMOTE2 is an external operation mode It is de signed for processes that are controlled by an external control system In this operation mode the output power can only be switched on and off via the A D interface X1
81. pter 8 Interfaces A 04 0059 00 BEN 001 19 Page 1 1 5 r TRUMPF PFG RF 5 BYTE COMMUNICATION BLOCK ADDRESS FUNCTION BYTE DATA BYTES BYTE HIGH BYTE LOW BYTE AAAA WFFF FFFF DDDD DDDD DDDD DDDD AAAA GENERATOR COMMANDS ASCII HEX COMMAND MEANING A 41H NV PI set Nominal value of direct power W for the PFG 5000 RF set in steps of 10 watts otherwise set in steps of C1H 1 watt Nominal value of DC BIAS voltage V if the fiber optic cable bus is not used the setting must be made in 0 1000 969 CHANNEL Selection of the matchbox that is to be supplied with RF power REGULATE Regulation mode 1 POWER 2 DC BIAS 3 DELTA P 4 RF PEAK N CONTROL Operating mode 1 LOCAL 2 REALTIME CEH query 3 RS232 4 REMOTE1 5 REMOTE2 6 RS485 7 PROFIBUS 8 REMOTE3 9 REMOTEA O AFH Operating set Operating state state O OFF power operation off 1 ON power operation on CFH query D1H AV P query Actual value of direct power W for the PFG 5000 RF display is in steps of 10 watts otherwise dis play is in steps of 1 watt D2H AV UDC query Actual value of DC BIAS voltage V if the fiber optic cable bus is not used the voltage is displayed in 0 1000 969 D4H AV PR query Actual value reflected power W Tab 8 12 5 byte communication block RS 232 C Operating instructions PFG RF Chapter 8 Interfaces A 04 0059
82. r value Byte 5 6 Nominal voltage value Byte 748 Tune position Byte 9 10 Load position Tab 8 18 Overview of the PROFIBUS command bytes COMMAND BYTE 1 process number CHANNEL Tab 8 19 Command byte 1 process number This byte tells the generator or the RF selector switch which process CHANNEL is to be addressed If this number does not match the cur rent process the system switches to the new process provided that the RF output of the generator is not activated Otherwise no action takes place The maximum number that can be entered here is 10 pro vided that this is permitted by the installed system In the generator the transmitted value is checked for plausibility See also Generator with matchbox Operating instructions PFG RF Chapter 8 Interfaces A 04 0059 00 BEN 001 19 ro PFG RF Command byte 2 commands COMMAND BYTE 2 COMMANDS MEANING Switch contactor on and off Switch contactor off Switch contactor on Reserved for oscillator enable Enable oscillator Disable oscillator Delete pending errors no action Delete pending errors Power regulation mode Power regulation towards POWER Regulation towards P DELTA P Voltage regulation mode UDC regulation DC BIAS peak regulation RF PEAK not used PFM CTRL Matchbox mode 0 Manual go to nominal position values 1 Auto
83. rder to retain the right of recourse report any damages curred during transport immediately in writing to the forward ing agent the insurance company and H TTINGER The device should always be protected against physical impact Always transport it in its original packaging Operating instructions PFG RF Chapter 5 Installation A 04 0059 00 BEN 001 19 Page 37 d PFG RF cus TRUMPF ORIENTATION DURING TRANSPORT AND STORAGE Warning AN RF Generator PFG RF may only be transported and stored in a horizon tal position see fig 5 1 If transported and stored in a different position components may fall from their receptacles and cause damage Fig 5 1 Orientation during transport and storage Storage conditions If you do not install the generator immediately after delivery store it in its original packaging under environmental conditions specified in the Technical Specifications document Operating instructions PFG RF Chapter 5 Installation Page 38 A 04 0059 00 BEN 001 19 PFG RF 5 2 UNPACKING Carefully unpack the generator y Remove the plastic cover PACKAGING MATERIAL Disposal If the packaging will not be kept for possible transport at a later time it should be disposed of properly The following materials are used for packaging and for the protection of the equipment Corrugated cardboard Neopolen 1710 e Ethafoam 400 All packaging materials must be disposed of accordin
84. s REGULATION WITH RESPECT TO POWER Notice If no voltage limitation is used the limits Upc or RFpga must be set to the maximum value The POWER regulation is the generator s default regulation In this case the forward power P of the generator is regulated The currently preset nominal power value is used as the guiding quantity DELTA P regulation regulates the output power The aim of this regu lation is to keep the power in the system i e in the plasma chamber constant The power delivered by the generator is the sum of the cur rently preset nominal power value and the current reflected power If e g the nominal power value is 500 W and the reflected power is 100 W the generator has to deliver 600 W For the regulation with respect to power Upc or may be chosen as a limit The limit has to be set e g to a voltage that must not be exceeded in the process REGULATION WITH RESPECT TO VOLTAGE The DC BIAS regulation regulates the DC BIAS voltage Upc process voltage which is created across the plasma Operating instructions PFG RF Chapter 3 Description technology A 04 0059 00 BEN 001 19 TRUMPF RF PEAK regulation Time 1 Operating instructions PFG RF Chapter 3 Description technology A 04 0059 00 BEN 001 19 PFG RF Notice Please notice that certain processes create a DC BIAS voltage which is very low or even too low to be measurable In these cases it is not sen sible t
85. s displayed only for generators from PFG 1600 RF onwards Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 TRUMPF Calling the service menu Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 PFG RF SERVICE MENU r aim SERVICE MODE ADDITIONAL MENU MODE Fig 6 9 Menu structure Service menu The service menu is used for service purposes during commis sioning of a generator In the service menu additional functions may be called The menu cannot be accessed during normal operation When calling functions the following must be taken into account The generator must be in one of the internal operation modes RE ALTIME or REMOTE The power operation must be switched off The service menu can only be called via the SETPOINTS menu FS aly FA n p SETPOINTS New Setpoints New Setpoints SERVICE POWER DC BIAS MODE F Ir CONTROL Change ADDITIONAL CONTROL MENU MODE Ir F F2 F1 REGULATION Change Change REGULATION LMT Ir ACTUAL VALUES tL Fig 6 10 Changing to the service menu The service menu is called as follows Switch the RF power off Change to an internal operation mode to the menu SET POINTS Simultaneously press the function key F4 and the decrement key and keep them pressed for about 3 seconds Subsequently the service menu appears TRUMPF PFG RF SERVICE
86. ssembly group of the component Component designation Part No For PFG 5000 RF A46 0320 No 1 12345 1 piece uC card A20 40 1211 Operating instructions PFG RF Chapter 7 Maintenance A 04 0059 00 BEN 001 19 PFG RF 8 INTERFACES Chapter Outline Who is this chapter This chapter is intended for all persons who operate RF Generator PFG directed at RF on the basis of this operating manual Chapter contents This chapter contains detail information about the interfaces of the RF Generator PFG RF 8 1 OVERVIEW OF INTERFACES The generator is equipped with the following interfaces Mains connection X2 RF output X4 RF input X5 RF power output A D interface X1 RF inhibit input RS 232 C X3 RS 485 X6 PROFIBUS interface Fiber optic cable IN U1 fiber optic cable OUT U2 In the following table you can find a detailed assignment of the inter face designations of the individual types of generators Operating instructions PFG RF Chapter 8 Interfaces 04 0059 00 BEN 001 19 Page 99 TRUMPF PFG RF Interface designations RS 232C X3 PFG 300 RF PFG 600 RF PFG 1000 RF PFG 1600 RF PFG 2500 RF PFG 5000 RF Tab 8 1 Interface designations The interfaces are described in the following sections Operating instructions PFG RF Chapter 8 Interfaces Page 1 00 A 04 0059 00 BEN 001 19 8 2 PFG 300 RF PFG 600 RF PF
87. ssssse eee 57 OPERATION MODE REMOTE2 57 OPERATION MODE REMOTES sssssse eene 58 OPERATION MODE REMOTEA 58 OPERATION MODE 2 3 2 5 cueste coetus sese tacet eene ee e UC DIE Er EDED 58 OPERATION MODE RS 485 59 OPERATION MODE PROFIBUS 59 MATCHBOX MODE AUTOMATIC 59 MATCHBOX MODE DCAUTO 59 MATCHBOX MODE MANUAL 60 MATCHBOX MODE REMOTE sssssen eH emen 60 MATCHBOX MODE FREEZE 60 INTERNAL OPERATION MODES ener nennen nis 61 INTERNAL SETPOINTS Partes cue zn n pae eee ameet 61 Sade gt 62 NEW SETPOINTS POWER _ 63 NEW SETPOINTS DC BIAS emm 63 INTERNAL CONTROL seseee e mmn nnis 64 CONTROL seat 65 CHANGE CONTROL sesse emere nennen 65 INTERNAL REGULATION ssese Hmm nennen 66 REGULATION
88. swer block 5 bytes long in which the second character is an This way the host can recognize that the control command has been correctly received and that the transmission is at this point complete For read commands wait bit 1 on the other hand a numerical value is expected back In these cases the device returns an answer block which contains neither nor but the function byte with wait bit 0 and the requested numerical value The host can accept the value and the transmission is complete All numerical values are sent in the form of a 16 bit binary number without sign Default nominal value HOST gt 00h 41h FFh BEh DEVICE example Set nominal value for direct power to 255 W DEVICE gt OOR OGh O6h gt HOST Acknowledge Operating instructions PFG RF Chapter 8 Interfaces A 04 0059 00 BEN 001 19 Page 1 1 9 ro PFG RF Calculation of the checksum RS 232 interface capacity Page 120 TRUMPF The checksum is made up of XOR links of the 4 bytes of the commu nication block Address byte XOR function byte XOR data byte 1 XOR data byte 2 check byte Example XOR 41H XOR XOR FFH BEH The pure transmission time per communication block 5 bytes is at a transmission rate of 9600 baud approximately 5 ms As two commu nication blocks are transmitted per transaction the total time is ap proximately 10 ms
89. t If a voltage higher than 10 V is placed on pins 13 14 15 this is also interpreted as 100 Operating instructions PFG RF Chapter 8 Interfaces A 04 0059 00 BEN 001 19 Page 107 TRUMPF PFG RF ANALOG PART A pin with analog ground negative polarity is assigned to each pin as signed to an analog signal If a ribbon cable is used these pins are lo cated directly side by side in order to minimize possible external interference pickup The analog signals are scaled to a level of O 10 V Measurands and signals behave proportionally a voltage of 10 V corresponds to 100 96 of the measurand AID interface X1 assignment of analog part DESIGNATION MEANING Upc Actual value DC BIAS voltage AV Upc NV Pj NV Upc Upc Nominal value of direct power DC BIAS voltage NV Upc NV Upc Nominal value DC BIAS voltage in REMOTE3 only Outputs 17 AVI 35 AVI Actual value of operating current 18 AV PR AV Pg Actual value of reflected power AV P Actual value of direct power AV Upc AV Upc Actual value DC BIAS voltage Supply area 1 24VDC Control voltage 24 V 2 GND Ground 0 V 20 GND Ground 0 V Tab 8 6 A D interface X1 assignment of analog part The pins 2 20 31 to 37 are connected internally and form t
90. ter before every transmission The synchronization sequence consists of at least four bytes with value FFH The data stream then appears as follows on the bus line FFH FFH FFH 7 byte communica 7 byte response Pause tion block host generator Operating instructions PFG RF Chapter 8 Interfaces A 04 0059 00 BEN 001 19 RS 485 interface X6 7 byte communication block ro PFG RF A pause of at least 50ms must be maintained between such a data ex change and the subsequent transmission as this time is needed before the generator releases the bus again If no synchronization is per formed by the master there is no response to the protocol The serial data transmission via the RS 485 interface is based on a uni form communication block It consists of 7 bytes 1 address byte RS 485 receiver e 1 address byte RS 485 transmitter 1 address byte fiber optic cable e 1 function byte e 2 data bytes 1 check byte The exact structure of the data format 7 bytes has to be observed as the synchronization of the data exchange is accomplished exclusively via the number of bytes received transmitted This applies in particular to the connection of the generator with devices that do not use the H ttinger format To interconnect different devices on a bus the use of an interface with a standardized protocol layer is recommended e g Profibus The exact arrang
91. the de livery or use of this documentation as permitted by law This manual contains the most precise description of the product pos sible However this does not guarantee particular features or applica tion results We are always grateful for criticism or hints regarding imperfections and suggestions for possible improvements Unless otherwise stated the relevant State of Engineering is that at the time of combined delivery of the product and the manual by H TTING ER Elektronik GmbH amp Co KG The product is subject to technical changes without prior notice Previous manuals are no longer valid Do you have any questions Or problems with installation and opera tion Call us We will be glad to help you 23 07 2007 Operating instructions PFG RF Item No A 04 0059 00 BEN 001 19 TRUMPF Operating instructions PFG RF Item No A 04 0059 00 BEN 001 19 PFG RF H TTINGER Elektronik GmbH Co KG B tzinger Stra e 80 79111 Freiburg Germany Tel 49 0 7 61 89 71 0 Fax 49 0 7 61 89 71 1150 E mail info de huettinger com Internet www huettinger com HUETTINGER Electronic Inc 111 Hyde Road Farmington CT 06032 USA Tel 1 860 255 6555 Fax 1 860 255 6423 E mail info us huettinger com techsupport huettinger com Internet www huettinger com HUETTINGER Electronic K K Shin yokohama tobu AK bldg 7F 3 23 3 Shin yokohama Kohoku ku Yokohama shi Kanagawa ken 222 0033 Japan Tel 81 45 470 3761 Fax 81
92. ting manual applies to the following units RF Generator PFG RF Manufacturer H TTINGER Elektronik GmbH Co KG Botzinger Str 80 D 79111 Freiburg Tel 49 7 61 89 71 0 Fax 49 7 61 89 71 1150 E mail info de huettinger com Internet http www huettinger com 1 2 WARRANTY The duration of the warranty is specified in the order confirmation and in the general terms and conditions of sale and delivery of H TTINGER Elektronik GmbH Co KG Damage caused by improper use or unauthorized modification of the device does not constitute grounds for a warranty claim Operating instructions PFG RF Chapter 1 General Information A 04 0059 00 BEN 001 19 Page 1 3 PFG RF 1 3 Header Footer 14 TRUMPF STRUCTURE OF THE DOCUMENTATION GENERAL There are two types of accompanying documents for H ttinger prod ucts Operating manual Theoperating manual provides all necessary details for the installation operation and maintenance of the respective systems Technical documents regarding the unit The technical documents regarding the unit provide detailed plans drawings and lists for the unit This information is not meant for op erating personnel Service maintenance and repair guided by these documents must be carried out by specially trained skilled personnel only This document is the operating manual STRUCTURE OF THE OPERATING MANUAL The present operating manual consists of ei
93. tion again EXAMPLE VOLTAGE REGULATION This example illustrates the switch on sequence when regulating with respect to voltage regulation modes DC BIAS or RF PEAK ON OFF Ii iIiIi i P Limiti i ow AV Ow Fig 3 5 Signal curve under voltage control p Operating instructions PFG RF Chapter 3 Description technology Page 32 04 0059 00 BEN 001 19 PFG RF a ro Time 1 The power operation is switched on Forward and reflective powers increase in a linear manner until the limit Pp is reached Time 2 e The reflected power Pg reaches its limit and thus limits P Time 3 e The plasma is ignited continues to increase Time 4 The DC BIAS voltage has reached its nominal value n the case that the DC BIAS voltage already increases above its nominal value due the plasma ignition P will not continue to in crease Rather it will decrease to an appropriate power value im mediately after Time 3 Time 5 Fault in the sputtering system The DC BIAS voltage decreases e increases immediately at most up to the limit Pj However in the example shown the increased power is not suffi Cient to regulate the voltage to the nominal value again Only at Time 6 the voltage regulation reverts back to its default state 3 6 TECHNICAL DATA Detailed information can be found in the documents Technical specifications Cooling water spec
94. tions PFG RF Chapter 8 Interfaces A 04 0059 00 BEN 001 19 PFG RF INTERLOCKS The generator is equipped with 3 interlock connections 24 V X1 Befehl Leistung EIN 26 Interlock 1 8 Leistung EIN 3 Interlock 2 21 22 Interlock 3 23 INTERLOC CDR Fig 8 6 circuit diagram Connection of an external safety switch for interrupting power opera tion Interlock1 is to be wired with potential free contacts No external voltages may be connected Interlock 1 must be closed to be able to operate the generator Floating contact of the power on relay for locking external circuits In power operation this contact is open Floating contact of the power on relay for locking external circuits In power operation this contact is closed RF INHIBIT INPUT The INHIBIT signal is a keying signal With low level open input power is delivered with high level no power is delivered The amplitude of the output signal is not impaired by the amplitude of the keying signal 8 111 ro PFG RF Specification RF inhibit input Signal shape Signal shape at fmod 5 kHz TV 50 Page 112 TRUMPF RF inhibit input Max pulse frequency fmod 5000 Hz tmin 200 ps Rise time of the RF signal tise 35 us Fall time of the RF signal tri 35 us Input voltage U 24 V A D interface 5 V SUB MINUX socket Tab 8 9 Specification RF inhibit i
95. ure of a power out put amplifier Error at the power combiner Contact service Tab 6 2 UDS VOLTAGE TOO HIGH The drain source voltage at the power output amplifier transistors was higher than 110V Fault messages various reasons Contact service Operating instructions PFG RF Chapter 6 Operation control A 04 0059 00 BEN 001 19 TRUMPF DESCRIPTION CURRENT AND PR TOO HIGH If the current of a power output amplifier has exceeded the critical value of 20A and at the same time PR gt 50 PI then power is switched off after about 5 seconds Missing RF connection generator matchbox System Insufficient matching by the matchbox to the system REMEDY e Check RF connection generator matchbox System Check the matching of the matchbox to the system WATCH DOG ERROR DETECTED The microcontroller has been reset Warning This error must never oc cur during normal opera tion of the generator Faulty program execu tion or faults Contact service RAM ERROR DETECTED Empty battery Error in internal memo ry Contact service to re place battery Check all values of the main menu and if nec essary reenter them NO COMMUNICATION ON FIBER OPTIC CABLE The fiber optic cable connec tion has been interrupted INTERLOCK1 IS OPEN Failure of a member Removal of the fiber optic cable during op eration Interlock1 interrupted R
96. xternally in the plug by connecting pins X4 2 to X4 4 non inverting line and pins X4 9 to X4 11 inverting line The same may be accomplished internally by set ting the bridges W5 and W6 of the interface card C40 1377 appro priately In order to do this however the unit must be opened In this case the respective pins in the plug need not be connected Note that an inverting and a non inverting signal are each used in the plug The interface forms a point to point connection The connection con sists of 2 transmitting lines 2 receiving lines signal ground and shield The data transfer takes place half duplex asynchronously with a bit rate of 9600 baud x0 596 Each command request by the Master e g PC is followed by a response from the Slave generator This re sponse must be waited for Between a response and a new command request there must be wait time of at least 50 ms If this time is not allowed to pass before the next request is made a framing error warning message is output by the generator The actual data exchange is performed with a protocol similar to the one used for an 5232 connection The problem here however is the synchronization of the data stream in all connected generators as the protocol itself does not contain any intrinsic control bytes data are transmitted in a pure binary form For this reason if the RS 485 inter face is used a synchronization sequence must be output by the host compu

Operating instructions PFG-RF

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