Operating Instructions for the e
Contents
1. Removing Samples Press Seal and Vent then follow the opening procedure described in the loading samples section Shutting Down 1 Turn on the e gun middle button Turn up the current very slowly Keep the pressure always below 1x1 0 mbar by returning the current back toward the minimum Turn up current till an appropriate evaporation rate is attained 0 1 0 5 nm s Adjustments to the sweeping unit can be made to vary beam look at bright spot on the target Press RUN on the Film Thickness Monitor to reset the thickness meter and open the shutter Close the shutter once the appropriate thickness has been deposited and press Run on the Film Thickness Monitor Turn down the current very slowly watch the crucible change colour it should take 3 5mins Switch off the gun Switch off the sweeping unit Wait 2 mins for the gun to cool down Switch off the power You can now change the target and repeat the process for another metal if not Turn off fuse switches and mains switch on the wall After you have finished with the e Beam make sure the chamber is sealed and the chamber is pumped down for at least 5 mins Press Seal before Stop Press Stop Wait 30 mins for diffusion pump to cool until machine says Stand By Turn off water but not the machine2. e by 1 Press RETURN until you reach the main menu 2 Select Editors and press ENTER 3 Select Edit Material and press CHANGE inteviemetsics 4 Select the material number you require and press ENTER Renttce Vado Hater iain e Tie To check and edit material parameters 1 Do the material selection steps above then r f iF 2 Select Edit Material and press ENTER B 6 E 3 Set Density Acoustic Impedance and Tooling factor To prepare the monitor for an evaporation 1 Return to main menu 2 Select Monitor Mode and press enter This shows all info pressing run will reset the thickness meter 3 Turn the dial on the front of the unit to select the appropriate metal Film Deposition 1 Wait approximately 2 hours till the system maintains pressure of about 2x10 mbar 2 Select the material you wish to use 3 Switch on high power switch by machine 4 Switch fuse switches on box at the back of machine LEDs should light 5 Lights should come on on the e beam panel 6 Ensure control bottom button is set to local and the current is on min 7 Turn on power top button MEE EDWARDS 8 Check the setup of the sweeping unit a Sine Wave b Freq 5 c Amplitude X and Y according to material deposition parameters in the table placed on the wall next to e beam 9 Turn the sweeping unit on 12 13 14 20 21
3. ion pump pumping Valve 4 is a chamber venting valve a EDWARDS a ee T E a numm at oy A y POLOEN _e a pm 1 2 e Starting up Note e Do not switch off the Evaporator at the main switch or at the plug e Do not turn off the water until the evaporator is in Standby mode Main switch 1 Turn on the water supply check that the main water tap in a dark room is on 2 Press Start the system will now warm up the diffusion pump 3 Wait 20 30mins till system shows Sealed 4 You can now press Vent to load your samples Loading Samples 1 When the chamber is fully vented the lid will lift slightly open the lid and fix it with the key 2 Remove thermocouple 3 Lift out tray and load samples 4 Replace tray and attach thermocouple 5 Remove key and close the lid 6 Hold lid shut and press Process once pressure starts to drop let go of lid leave for pressure to drop to at least to 6 x 10 mbar Tray Thermocouple Heating Substrate 1 left grey button turns the heating control unit on 2 press to change temperature setting 3 right grey button turns heating lamp on 4 NEVER leave the machine unattended when heating is on Using the Film Thickness Monitor e Ask for assistance if a crystal frequency is gt 200 kHz e Find material deposition parameters in the table placed on the wall next to e beam Select the material number you wish to us
4. only You can use this equipment without supervision if you are a Qualified Operator have the C status in the table on the Operating Instructions for the e Beam Evaporator clean room entrance door only Training is required before using the e beam coater To obtain training Important Notes This is not a comprehensive guide for use of e beam machine This is a short reminder notice for references make arrangements with someone of qualified operator to observe and practice operating the machine under direct supervision After an initial training period of several times and when the qualified operator decides the individual is prepared make an arrangement with the clean room manager for final check out No one is allowed to use the equipment without direct supervision until after final check out Schematic layout of the e beam coater vacuum system Main valves condition in each Status Status Sealed Warm up Cool Down Roughing Fine Pump Standby Vent 1 Open Open Open Close Open Close Open 2 Close Close Close Open Close Close Close Valve 3 Close Close Close Close Open Close Close Standby Close Close Close Close Close Close Open Bell Jar for sample Diffusion Pump Roughing Valve 1 is a Foreline valve Penn Valve 2 is the roughing valve ee gauge Valve 3 is a high vacuum valve between the chamber Fine l and the diffus
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