Installation and Operation Manual
Contents
1. pM DECEPTUM E 1 7 Contents Installation and Operation Manual X SL6800 PC October 2003 SL6800 Series Pressure Controllers PRELIMINARY THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual Section 1 Introduction X SL6800 PC October 2003 PRELIMINARY 16800 Series Pressure Controllers 1 1 Scope Thank you for purchasing a Brooks Instrument Model SL6810 SL6820 Pressure Controller This instruction manual is intended to provide the user with all the information necessary to install operate and maintain the Brooks Model SL6810 SL6820 Pressure Controller This manual is organized into sections Section 1 Introduction Section 2 Installation Section 3 Adjustment and Maintenance Section CE Certification It is recommended that this manual be read in its entirety before attempting to operate or repair the Model SL6810 SL6820 1 2 Description The Brooks Model SL6810 SL6820 Pressure Controller accurately measures and controls upstream or downstream pressures The heart of the system is a solid state pressure transducer which produces an electrical output proportional to pressure The electronics use this signal to operate the control valve and to provide an output signal Brooks SL6810 SL6820 is available with connection to DeviceNet a high speed up to 500k baud digital communication network Brooks DeviceNet device profile has been certified by the ODVATM Open2. dx Installation and Operation Manual X SL6800 PC October 2003 PRELIMINARY Brooks Delta Class SL6800 Series Metal Sealed Pressure Controllers Models SL6810D SL6820D Digital I O DeviceNet Pressure Controller Models SL6810A SL6820A Analog I O B Pressure Controllers Brooks Instrument E EMERSON www Brooksinstrument com Process Managernent Installation and Operation Manual X SL6800 PC October 2003 SL6800 Series Pressure Controllers PRELIMINARY Brooks Instrument designs manufactures and tests its products to meet many national and international standards Because these instruments are sophisticated technical products you must properly install use and maintain them to ensure they continue to operate within their normal specifications The following instructions must be adhered to and integrated into your safety program when installing using and maintaining Brooks Producis Read all instructions prior to installing operating and servicing the product If this instruction manual is not the correct manual please see back cover for local sales office contact information Save this instruction manual for future reference if you do not understand any of the instructions contact your Brooks Instrument representative for clarification Follow all warnings cautions and instructions marked on and supplied with the product inform and educate your personnel in the proper installation operation and mainten
3. 1 Connect the Pressure controller to the appropriate power supply as required for either Analog or DeviceNet 2 Apply power to the pressure controller 3 If possible keep both the inlet and outlet side of the pressure controller exposed to atmospheric pressure A gas source is not necessary at this time 4 Calculate the estimated output from the pressure controller as follows a Take the pressure value at atmosphere and divide it by the pressure controller s full scale calibration value Note the units of measure must be consistant b Multiply the resuit by the appropriate unit of measure that represents the pressure controller s 10096 full scale output c Compare the calculated result to the actual output of the pressure controller These two values should be within 5 of each other d If they are not within 5 the pressure controller is not measuring accurately e Contact Brooks Factory service for disposition Do not attempt to disassemble the sensor Example of calculations Analog Version a Pressure controller is calibrated to 1000 torr full scale A 5 volt output represents 1000 torr c When the pressure controller is open to atmosphere the actual output signal from the pressure controller is 3 78 Volts DC d The calculated analog output is 760 torr 1000 torr x 5 VDC 3 80 Vdc e The actual output of the pressure controller is within 5 of the calculated value gt Example of calculations D
4. Card edge connectors zijn standaard niet metallisch De gebruikte kabels moeten volledig afgeschermd zijn met een bedekkingsgraad van 100 om te voldoen aan de CE certificering Het scherm moet worden verbonden met aarde Voor pin configuraties a u b verwijzen wij naar het bijgesloten instruktie handboek Hoogachtend A4 Installation and Operation Manual Section A CE Certification X SL6800 PC October 2003 PRELIMINARY aL SL6800 Series Pressure Controllers Norsk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Vedr rende Vedlegg til h ndbok Referanse CE sertifisering av utstyr for massestr msm ling og regulering Dato Januar 2000 Til den det ang r Brooks Instrument elektrisk og elektronisk utstyr p f rt CE merket har gjennomg tt og best tt pr ver som beskrevet i EMC forskrift om elektromagnetisk immunitet direktiv 89 336 EEC For opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det m letekniske utstyret Utf relse av signalkabel og tilh rende plugger Brooks Instrument tilbyr levert med utstyret egnet kabel som meter de krav som stilles til CE sertifisering Dersom kunden selv velger kabel m kabel med fullstendig 100 skjerming av lederene benyttes D type og runde plugger og forbindelser m v re utf rt med kappe i metall og kabelnipler m v re utf rt i metall for jordet innfesting av skjermen Skjermen i kabelen m
5. a small amount of gas may be trapped between the downstream side of the pressure controller and the solenoid resulting in a surge upon opening of the solenoid valve This surge can be reduced in magnitude by locating the controler and solenoid valve close together 2 3 Section 2 Installation Installation and Operation Manual X SL6800 PC October 2003 SL6800 Series Pressure Controllers u PRELIMINARY 2 9 In Line Filter It is recommended that an in line filter such as the Brooks Model 5848 be installed upstream from the controller to prevent the possibility of any foreign material entering the meter The filter porosity should be approximately ten times smaller than the orifice used in the installation however it is recommended that the minimum porosity that does not restrict the flow rate being used The filtering element should be periodically replaced or cleaned 2 10 Electrical Interface Electrical Interface Analog Mode Standard inlet and outlet connections supplied on the Model SL6810 and Model SL6820 are 1 4 M VCR Prior to installation ensure all piping is clean and free from obstructions Install piping in such a manner that permits easy access to the instrument if removal becomes necessary To insure proper operation the Model SL6810 SL6820 must be connected per Figure 2 1 As a minimum the following connections must be made for new installations Pin Number Description 1 Command Common 20r4 S
6. blindagem ou bucha met lica em ambas as extremidades em 360 A blindagem deve terminar com a liga o massa Os conectores Card Edge n o s o em geral met licos e os cabos utilizados devem ter um isolamento com blindagem a 10096 nos termos da Certifica o CE A blindagem deve terminar com liga o massa Relativamente configura o da cavilha queiram consultar o Manual de Instrug es AS Section 4 CE Certification Installation and Operation Manual X SL6800 PC October 2003 SL6800 Series Pressure Controllers PRELIMINARY Suomi Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A sia Lis ys K ytt ohjeisiin Viite Massam r mittareiden CE sertifiointi P iv m r Tammikuu 2000 Brooksin CE merkill varustetut s hk iset laitteet ovat l p issyt EMC testit direktiivi 89 336 EEC Erityist huomiota on kuitenkin kiinnitett v signaalikaapelin valintaan Signaalikaapelin kaapelin l piviennin ja liittimen laatu Brooks toimittaa korkealaatuisia kaapeleita jotka t ytt v t CE sertifikaatin vaatimukset Hankkiessaan signaalikaapelin itse olisi hankittava 100 sti suojattu kaapeli D tai Circular tyyppisen liitimen tulisi olla varustettu metallisuojalla Mik li mahdollista tulisi k ytt metallisia kaapeliliittimi kiinnitettaessa suojaa Kaapelin suoja tulisi olla liitetty metallisuojaan tai liittimeen molemmissa p iss 360 n matkalta Suojan tulisi olla m
7. equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility EMC directive 89 336 EEC Special attention however is required when selecting the signal cable to be used with CE marked equipment Quality of the signal cable cable glands and connectors Brooks supplies high quality cable s which meets the specifications for CE certification If you provide your own signal cable you should use a cable which is overall completely screened with a 100 shield D or Circular type connectors used should be shielded with a metal shield If applicable metal cable glands must be used providing cable screen clamping The cable screen should be connected to the meta shell or gland and shielded at both ends over 360 Degrees The shield should be terminated to a earth ground Card Edge Connectors are standard non metallic The cables used must be screened with 100 shield to comply with CE certification The shield should be terminated to a earth ground For pin configuration Please refer to the enclosed Instruction Manual Espa ol Brooks instrument 407 West Vine St Hatfield PA 19440 U S A Asunto Addendum al Manual de Instrucciones Referencia Certificaci n CE de los Equipos de Caudal M sico Fecha Enero 2000 Los equipos de Brooks el ctricos electr nicos en relaci n con la marca CE han pasado satisfactoriamente las pruebas referentes a las regulaciones de Compatib
8. SL6800 Series Pressure Controllers PRELIMINARY 2 4 Return Shipment Prior to returning any instrument to the factory contact your nearest Brooks location for a Return Materials Authorization Number RMA This can be obtained from one of the following locations Brooks Instrument 407 W Vine Street P O Box 903 Hatfield PA19440USA Toll Free 888 554 FLOW 3569 Tel 215 362 3700 l Fax 215 362 3745 E mail BrooksAm EmersonProcess com http www brooksinstrument com Emerson Japan Ltd Brooks Instrument B V Emerson Process Management Groeneveldselaan 6 Brooks Division P O Box 56 1 4 4 Kitasuna Koto Ku 3900 AB Veenendaal Netherlands Tokyo 136 0073 Japan Tel 31 318 549 549 Tel 011 81 3 5633 7105 Fax 31 318 549 559 Fax 011 81 3 5633 7124 E mak BrooksEu EmersonProcess com E mait BrooksAs EmersonProcess com Any instrument returned to Brooks requires completion of Form RPRO03 1 Brooks instrument Decontamination Statement as well as a Material Safety Data Sheet MSDS for the fluid s used in the instrument This is required before any Brooks Personnel can begin processing Copies of the form can be obtained from any Brooks Instrument location listed above 2 5 Transit Precautions To safeguard against damage during transit transport the instrument to the installation site in the same container used for transportation from the factory if circumstances permit 2 6 Typical Configurations A pressure co
9. pressures and flows A System Checks The Model SL6810 SL6820 is generally used as a component in gas handling systems which can be quite complex This can make the task of isolating a malfunction in the system a difficult one An incorrectly diagnosed malfunction can cause many hours of unnecessary down time If possible make the following system checks before removing a suspected defective pressure controller for bench troubleshooting or return to the factory especially if the system is new 1 Verify a low resistance common connection and that the correct power supply voltage and signals are reaching and leaving the controller for Analog I O The Break out Board P N S 273 Z 649 AAA will make this job much easier 2 Verify that the process gas connections have been correctly terminated and leak checked 3 Ifthe pressure controller appears to be functioning but cannot achieve setpoint verify that sufficient inlet pressure and pressure drop are available at the controller to provide the required flow B Bench Testing A basic bench test can be performed to isolate the cause of a problem or to verify the proper operation of the pressure controller This method can be used if the full scale calibration pressure of the Pressure Controller is greater than 14 7 psia atmospheric Installation and Operation Manual Section 3 Adjustments and Maintenance X SL6800 PC October 2003 dd ed SL6800 Series Pressure Controllers
10. tilknyttes metallet i pluggen eller nippelen i begge ender over 360 tilkoblet elektrisk jord Kort kantkontakter er normalt utf rt i kunststoff De tilh rende flatkabler m v re utf rt med fullstendig 100 skjerming som kobles til elektrisk jord p riktig pinne i pluggen for m te CE sertifiseringskrav For tilkobling av medleverte plugger vennligst se h ndboken som h rer til utstyret Vennlig hilsen Portugu s Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Assunto Adenda ao Manual de Instru es Refer ncia Certifica o CE do Equipamento de Fluxo de Massa Data Janeiro de 2000 O equipamento el ctrico electr nico Brooks com a marca CE foitestado com xito nos termos do regulamento da Compatibilidade Electromagn tica directiva CEM 89 336 EEC Todavia ao seleccionar se o cabo de sinal a utilizar com equipamento contendo a marca CE ser necess rio ter uma aten o especial Qualidade do cabo de sinal buchas de cabo e conectores A Brooks fomece cabo s de qualidade superior que cumprem os requesitos da certificag o CE Se fornecerem o vosso pr prio cabo de sinal devem utilizar um cabo que na sua totalidade seja isolado com uma blindagem de 100 Os conectores tipo D ou Circulares devem ser blindados com uma blindagem met lica Se tal for necess rio deve utilizar se buchas met licas de cabo para o isolamento do aperto do cabo O isolamento do cabo deve ser ligado
11. CE Certification Installation and Operation Manual X SL6800 PC October 2003 SL6800 Series Pressure Controllers PRELIMINARY Italiano Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Oggetto Addendum al manuale di istruzioni _ i Riferimento Certificazione CE dei misuratori termici di portata in massa Data Gennaio 2000 Questa strumentazione elettrica ed elettronica prodotta da Brooks Instrument soggetta a marcatura CE ha superato con successo le prove richieste dalla direttiva per la Compatibilit Elettomagnetica Direttiva EMC 89 336 EEC E richiesta comunque una speciale attenzione nella scelta dei cavi di segnale da usarsi con la strumentazione soggetta a marchio CE Qualit dei cavi di segnale e dei relativi connettori Brooks fornisce cavi di elevata qualit che soddisfano le specifiche richieste dalla certificazione CE Se l utente intende usare propri cavi questi devono possedere una schermatura del 100 I connettori sia di tipo D che circolari devono possedere un guscio metallico Se esiste un passacavo esso deve essere metallico e fornito di fissaggio per lo schermo del cavo Lo schermo del cavo deve essere collegato al guscio metallico in modo da schermarlo a 360 e questo vale per entrambe le estemita Lo schermo deve essere collegato ad un terminale di terra I connettori Card Edge sono normalmente non metallici II cavo impiegato deve comunque avere una schermatura de 100 per
12. DeviceNet Vendors Association The process and command data may be wired either using traditional 5 voit analog connections or digital communications networks the measurement and control performance is the same The SL6810 SL6820 Series microprocessor uses a multi point calibration to deal with any residual integral sensor non linearity yielding a highly accurate process signal The SL6810 SL6820 Series family of products utilizes a modular system in both its mechanical and electrical construction This modularity allows for simplified customer ordering and factory configuration This flexibility yields products for pressure measurement and control using either traditional analog connections or leading edge network communication protocols Brooks SL6810 SL6820 Series of controllers can directly replace existing analog products with the advantage of improved digital accuracy Both analog and digital applications will demonstrate settling time and accuracy improvements Section 1 Introduction Installation and Operation Manual X SL6800 PC October 2003 SL6800 Series Pressure Controllers PRELIMINARY 1 3 Principle of Operation The pressure to be measured acts on a stainless steel diaphragm This pressure is transmitted to the actual sensing element a silicon chip refer to Figure 1 1 The chip consists of an anisotropically etched diaphragm with four piezo resistive resistors configured in a Wheatstone bridge etched int
13. N INPUT AMPLIFIER VALVE LOGIC COMMAND svoLr E Figure 1 3 Model SL6810 6820 System Block Diagram 13 Section 1 Introduction Installation and Operation Manual X SL6800 PC October 2003 SL6800 Series Pressure Controllers PRELIMINARY 1 4 VCR Connections 114 MVCA D CONNECTOR SEE DETAIL NORM OPEN VIV 3 70 63 5 NORM CLOSED VLV 8 32 UNC X 1 4 DEEP MOUNTING HOLE M4 0 7 X 1 4 DEEP MOUNTING HOLES B Downported D CONNECTOR BEE DETAIL 4 04 102 6 NORM OPEN VLV 3 70 93 9 NAM CLOSED VLV 01 1100 2028 37 7 2 03 1120 078 B 32 UNC X 1 4 DEEP MOUNTING HOL 16 17 4 0 4 3 30 7 8 CBORE X 0 024 0 61 DEEP M4 0 7 X 1 4 DEEP MOUNTING HOLES CB Figure 1 4 Mounting Dimensions for Models SL6810A and SL6820A Analog VO Controller 1 4 Installation and Operation Manual Section 1 Introduction X SL6800 PC October 2003 1 4 VCR Connections SPIN MALE MICRO DEVICENET can T THREAD SEE DETAIL a 1 4 MVCR G a BOUM T ESTEN Connection 8 32 UNC X 1 4 DEEP MOUNTING HOLE M4 0 7 EEP X 1 4 D MOUNTING HOLES 87 5 PIN MALE MICRO DEVICENET CONNECTOR M12 X 1 OUTSIDE THREAD SEE DETAIL 01 110 0 028 112 0 20 75 8 32 UNC X 1 4 DEEP MOUNTING HOLE i j pies ezo G22 55 4 PLCS BAG 17 4 0 4 3 30 7 6 CBORE X 0 024 0 61 DEEP M4 0 7 X 1 4 DEEP MOUNTING HOLES B Figure 1 5 Mounting Di
14. aadoitettu Card Edge Connector it ovat standarditoimituksina ei metallisia Kaapeleiden t ytyy olla 100 sesti suojattuja jotta ne olisivat CE sertifikaatin mukaisia Suoja on oltava maadoitettu Nastojen liitt minen katso liitteen oleva manuaali Yst v llisin terveisin Svensk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Addendum to the Instruction Manual Reference CE certification of Mass Flow Equipment Date January 2000 Brooks elektriska elektronik utrustning som r CE m rkt har testats och godk nts enligt g llande regler f r elektromagnetisk kompabilitet EMC direktiv 89 336 EEC Speciell h nsyn m ste emellertid tas vid val av signalkabel som ska anv ndas tillsammans med CE m rkt utrustning Kvalitet p signalkabel och anstutningskontakter Brooks levererar som standard kablar av h g kvalitet som motsvarar de krav som st lls for CE godk nnande Om man anv nder en annan signalkabel ska kabeln i sin helhet vara sk rmad till 100 D eller runda typer av anslutningskontakter ska vara sk rmade Kabelgenomf ringar ska vara av metall alternativt med metalliserad sk rmning Kabelns sk rm ska i bada ndar vara ansluten till kontakternas metallk por eller genomf ringar med 360 graders sk rmning Sk rmen ska avslutas med en jordf rbindelse Kortkontakter r som standard ej metalliserade kablar som anv nds m ste vara 100 skarmade f r att verensst
15. ance of the product install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes Connect all products to the proper electrical and pressure sources To ensure proper performance use qualified personnel to install operate update program and maintain the product When replacement parts are required ensure that qualified people use replacement parts specified by Brooks instrument Unauthorized parts and procedures can affect the product s performance and place the safe operation of your process at risk Look alike substitutions may esu in fire electrical hazards or improper operation Ensure that all equipment doors are closed and protective covers are in place except when maintenance is being performed by qualified persons to prevent electrical shock and personal injury A CAUTION This instrument contains electronic Companen that are susceptible to damage by static electricity Proper handling procedures must be observed during the removal installation or other handling of internal circuit boards or devices Handling Procedure 1 Power to unit must be removed 2 Personnel must be grounded via a wrist strap or other safe suitable means before any printed circuit card or other internal device is installed removed or adjusted 3 Printed circuit cards must be transported in a conductive bag or other conductive container Boards must no
16. cations Pressure Ranges 7 25 psia to 290 psia full scale Metal Seals Flow Rates 0 30 000 sccm Nitrogen Equivalent Standard pressure and temperature in accordance with SEMI Semiconductor Equipment and Materials Institute standard 32 F 0 C and 101 kPa 760 Torr Other reference conditions available upon request Accuracy 0 5 F S including linearity and hysteresis for precision control Repeatability 0 1 full scale Control Range 20 1 Zero Stability 0 01 full scale per 30 days Ambient Temperature Limits Operating 0 C to 60 C 32 F to 140 F Non operating 25 C to 100 C 13 F to 212 F Temperature Sensitivity 0 1 of F S per C Maximum Transducer Pressure 21 75 psia for 0 14 5 psia range 108 5 psia for 14 5 72 5 psia range 435 psia for 72 5 290 psia range Maximum Design Pressure 1 450 psig Pressure Equipment Directive PED 97 23 EC Equipment falls under Sound Engineering Practice SEP Maximum Fluid Operating Temperature 0 C to 65 C 32 F to 149 F Leak Integrity Inboard to Outboard 1x10 10 atm scc sec Helium max 1 8 Installation and Operation Manual Section 1 Introduction X SL6800 PC October 2003 NE PRELIMINARY LLL SL6800 Series Pressure Controllers 1 5 Controller Specifications Digital software Can store 10 selectable P and settings Input Output Offset 0 2 full scale voltage Proportional Gain User adjustable via Service port or ove
17. ced during the warranty period shall be in warranty for the remainder of the original warranty period or ninety 90 days whichever is longer This limited warranty is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller BROOKS LOCAL AND WORLDWIDE SUPPORT Brooks Instrument provides sales and service facilities around the world ensuring quick delivery from local stock timely repairs and local based sales and service facilities Our dedicated flow experts provide consultation and support assuring successful applications of the Brooks flow measurement and control products Calibration facilities are available in local sales and service offices The primary standard calibration equipment to calibrate our flow products is certified by our local Weights and Measures Authorities and traceable to the relevant international standards START UP SERVICE AND IN SITU CALIBRATION Brooks Instrument can provide start up service prior to operation when required For some process applications where ISO 9001 Quality Certification is important it is mandatory to verify and or re calibrate the products periodically In many cases this service can be provided under in situ conditions and the results will be traceable to the relevant international quality standards CUSTOMER SEMINARS AND TRAINING Brooks Instrument can provide customer seminars and dedicated training to engineers end users and main
18. ding the set point will not be returned on the current loop 2 5 Section 2 Installation Installation and Operation Manual X SL6800 PC October 2003 SL6800 Series Pressure Controllers PRELIMINARY THIS PAGE WAS INTENTIONALLY LEFT BLANK 26 Installation and Operation Manual Section 3 Adjustments and Maintenance X SL6800 PC October 2003 AR E OOOO SL6800 Series Pressure Controllers 3 1 hdd Band and SIREN 4 Time consent Adjustment The Model SL6810 SL6820 Pressure Controller has TS and pre control action The reset or integral contro is combined with the proportional control actions commonly referred to as PI control Both proportional band and integration time are user adjustable by using special commands over a DeviceNet connection or using Brooks Service Software The dynamic behavior of the control system is influenced by flow range pressure range fluid type orifice size and system volume Therefore the pressure controller may need adjustment in the field to achieve the best dynamic response The factory settings usually result in stable control For most systems the dynamic response is adequate with the factory settings Improved response can be had by final tuning the P and I software parameters in the intended application by the user The tuning of the P and I constants does not affect the calibration of the instrument Definitions Both proportional and integral control actions are defined with respect
19. eet viss eoo ire ansa naga dug kou E US YR oe TEN revne ban SEIE Vona miii riria ideni 2 2 2 7 Gas Process Connections co cecicesersevesvavasvcadsecseenvsenndodvennisveochanesberessveveseeveaceshegsedesescnnoatedenreetyensstecee 2 2 2 8 installation Procedures irse iine riae otra rena ee Shen Yun Vy Na n YS YR S ESRAR SR RARE enda CA FRAU KRA ARR rer ERR ETUR 2 3 2 9 Arline Null T T ete 2 4 2 10 Electrical Interlaced GAGA 2 4 2 11 Remote Setpoint Command Input Analog Mode eese eene eene nennen 2 5 Adjustments and Maintenance Section 3 3 1 Proportional Band and Integration Time Constant Adjustment ss 3 1 3 2 Basic Troubleshooting AAA ip iere Yo VEN e Se UA npstedentinvdeaepsnsweasantativevarnnrass 3 2 Certification Appendix A 1 Appendix A CE Certification of Mass Flow Equipment sr A 1 FIGURES Figure Page Number Number 1 1 Model SL6810 SL6820 Pressure Transducer rn rrarnvvnverernvrrransevenepnnsevannnnsannnrannennreevennsevnsrenvnrer 1 2 1 2 Model SL6810 SL6820 Silicon Chip Configuration sense 1 3 1 3 Model SL6810 SL6820 System Block Diagramme 1 3 1 4 Mounting Dimensions for Models SL6810A and SL6820A Analog I O Controller er 1 4 1 5 Mounting Dimensions for Models SL6810D and SL6820D Digital 1 0 DeviceNet Controller 1 5 1 6 Model SL6810 SL6820 Controller Upstream sense 1 6 1 7 Model SL6810 SL6820 Controller Downstream ss TEE 1 6 1 8 Typical Application of Upstream Controller
20. ent 407 West Vine St Hatfield PA 19440 USA D pa Hpoodi n oro Eyyeipi ro O yydv Txerik Ilozoroinay CE rov Opy vov M tpyons Hapoxiis Matas Hucpounvia lavov prog 1996 amp upigg kar Kopiou l a pyava nAexzpix nAekrpovik ms Brooks ta oroia p povv to ofa CE xovv ZOTUXOG tAeyy0ti m pquva pe TOVE xavovicpo s mg HAekrpo Mayvntwic Suvu ar rmtag EMC vnpextifa 89 336 EEC Inno rjnore xpeisLexat edu zpocoxr Kata trjv em oy Tov kaAwdtou pera pop s ou ka TO oxoio kado sponser va eee HE pyava nou Papay 0 opa Tou T TOV Kakvdiov mi OG TOV GTUTLOO TTV KAL TOV ouv onov 1 Brooks kata xav va xpounBeder vni sii Rc KoMb ra ta onoia rAnpo v TIG Podwurypap g ya motoztoinon CE i v n emoy tov xaAm iou ONUUTOR yiver axd sag npener va XPNOIHOTOMGETE AG TO OzO O va p pet E WMTEPIK rAnpec maypa KOL va rap xe Bopam on 00 A G vSesuar T TOV D KuxAicol ov koAw iov zxp nxet va 6opaxitjovrat pe roku Gopan E v eivar epapy cipo ap xrel va xPTOWOoxo10bvTa ueroAXikoi tuztio8AixtEG kaAmdSinv zov va uOErouv anpodtktn o vSeonc tov TA Yuaros tov Aw iov o nAtyna tov KaAwdiov ap rel va guv berar oto KETOAMK zepiBAnpa fn otov vvurio8AUrr Kat va 6opaxiterai xai ota 600 xpa Kara 360 noipec I 6wp xion np nel va karaAr yet GE KaNOIO AKPOSEKTN yeiwans 1a mv i ra n tov axpoderr v Maparxodo pe avapepbzite oro someto yxepi ro Odnyi v Section 4
21. eviceNet Version a Pressure controller is calibrated to 1000 torr full scale 100 output equals 1000 torr c When the pressure controller is open to atmosphere the actual output signal from the pressure controller is 78 760 torr 1 atmosphere d The calculated analog output is 760 torr 1000 torr x 100 76 e The actual output of the pressure controller is within 5 of the calculated value If the pressure controller output is within limits the problem is in the control valve or the system itself Please contact Brooks Instrument for further recommendations C Disassembly It is not practical to disassemble the controller in the field The spacing between the valve and the orifice is critical and could change when disassembled and reassembled New screws and metal seals must be used for all pressure boundary components 3 3 Section 3 Adjustments and Maintenance SL6800 Series Pressure Controllers THIS PAGE WAS INTENTIONALLY Installation and Operation Manual X SL6800 PC October 2003 PRELIMINARY LEFT BLANK 3 4 Installation and Operation Manual Section A CE Certification X SL6800 PC October 2003 PRELMINARY SL6800 Series Pressure Controllers Dansk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Emne Till g til instruktions manual Reference CE m rkning af Masse Flow udstyr Dato Januar 2000 Brooks Instrument har gennemf rt CE m rkning af elektronisk udstyr med s
22. ignal Output 5 15 Vdc Supply 6 15 Vdc Not internally Connected 8 Command Input 9 Supply Voltage Common 10 Voltage Signal Common 13 15 Vde Supply Current I O Note The Command Return is internally connected to Signal Return and Supply Voltage Common Voltage Setpoint Input Power Supply 15 Vdc Voltage Output Receiver Signal Output TT I Voltage Signal Setpoint and J Output Notes 1 The commons for the setpoint input and signal output are not isolated from power supply common 2 Tie cable shields should connect to ground at one end only MFC only Figure 2 1 Common Electrical Connections Analog O 24 Installation and Operation Manual Section 2 Installation X SL6800 PC October 2003 PRELIMINARY ll SL6800 Series Pressure Controllers Electrical Interface DeviceNet Mode Electrical interface in DeviceNet mode is covered in the DeviceNet Supplemental Manual for Brooks Instrument Delta Class MFC s MFM s X DeltaDeviceNet 2 11 Remote Setpoint Command Input Analog Mode If the pressure controller will be commanded by an external voltage or current signal the command potentiometer is not used The command hookup is as follows a Voltage Signal Connect the external command signal to Terminal 8 and the external command return to Terminal 1 Refer to Figure 2 1 b Note The command return is internally connected to signal return and power supply common Current supplied by the device provi
23. ilidad Electro magn tica EMC directiva 89 336 EEC Sin embargo se requiere una atenci n especial en el momento de seleccionar el cable de sefial cuando se va a utilizar un equipo con marca CE Calidad del cable de se al prensaestopas y conectores Brooks suministra cable s de alta calidad que cumple las especificaciones de la certificaci n CE Si usted adquiere su propio cable de se al deber a usar un cable que est completamente protegido en su conjunto con un apantallamiento del 100 Cuando utilice conectores del tipo D Circular deber an estar protegidos con una pantalla met lica Cuando sea posible se deber n utilizar prensaestopas met licos provistos de abrazadera para la pantalla del cable La pantalla del cable deber ser conectada al casquillo met lico prensa y protegida en ambos extremos completamente en los 360 Grados B La pantalla deber conectarse a tierra Los conectores estandar de tipo tarjeta Card Edge no son met licos los cables utilizados deber n ser protegidos con un apantallamiento del 10096 para cumplir con la certificaci n CE La pantalla deber conectarse a tierra Para ver la configuraci n de los pines Por favor consultar Manual de Instrucciones adjunto A 2 Installation and Operation Manual Section A CE Certification X SL6800 PC October 2003 TN EVENT 2 SL6800 Series Pressure Controllers Francais Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Suje
24. mensions for Models SL6810D and SL6820D Digital VO DeviceNet Controller Section 1 Introduction Installation and Operation Manual X SL6800 PC October 2003 SL6800 Series Pressure Controllers PRELIMINARY When the pressure controller is used in the downstream pressure regulation mode as shown in Figure 1 7 the pressure in the process vessel will be constant independent of upstream variation provided the upstream pressure does not fall below the downstream setting Pressure measurement and control takes place at the inlet side of the pressure vessel The most common application of the pressure controller is in conjunction with a mass flow controller refer to Figure 1 8 Mass flow controllers accurately measure and control the required quantity of process gas flows In this figure the mass flow controllers will supply the desired quantity and mixture of process gas while the pressure controller will maintain the desired reactor pressure by varying the gas outflow This system allows the process reactants to be varied while maintaining a constant reaction pressure The Model SL6810 SL6820 Pressure Controller has proportional and integral control action The reset or integral control is combined with the proportional control action normally referred to as P I control Both proportional band and integration time are customer adjustable with a Brooks service tool Note The Controller Mode and valve type are determined at the time of o
25. mma med CE certifieringen Sk rmen ska avslutas med en jordf rbindelse F r elektrisk anslutning till kontaktstiften h nvisas till medf ljande instruktionsmanual A 6 Installation and Operation Manual X SL6800 PC October 2003 SL6800 Series Pressure Controll rs THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X SL6800 PC October 2003 SL6800 Series Pressure Controllers LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve 12 months from the date of initial installation or eighteen 18 months from the date of shipment by Seller Products purchased by Seller from a third party for resale to Buyer Resale Products shall carry only the warranty extended by the original manufacturer Alt replacements or repairs necessitated by inadequate preventive maintenance or by normal wear and usage or by fault of Buyer or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions or by abuse accident alteration misuse improper installation modification repair storage or handling or any other cause not the fault of Seller are not covered by this limited warranty and shall be at Buyer s expense Goods repaired and parts repla
26. nd spezielle Anforderungen zu beachten Qualit t der Verbindungskabel AnschluGstecker und der Kabeldurchf hrungen Die hochwertigen Qualit tskabel von Brooks entsprechen der Spezifikation der CE Zertifizierung Bei Verwendung eigener Verbindungskabel soliten Sie darauf achten da eine 100 igenSchirmababdeckung des Kabels gew hrleistet ist D oder Rund Verbindungsstecker sollten eine Abschirmung aus Metall besitzen Wenn m glich soliten Kabeldurchf hrungen mit AnschluBm glichkeiten f r die Kabelabschrimung verwendet werden Die Abschirmung des Kabels ist auf beiden Seiten des Steckers oder der Kabeldurchf hrungen ber den vollen Umfang von 360 anzuschlie en Die Abschirmung ist mit dem Erdpotential zu verbinden Platinen Steckverbindunger sind standardm ige keine metallgeschirmten Verbindungen Um die Anforderungen der CE Zertifizierung zu erf llen sind Kabel mit einer 100 igen Schirmababdeckung zu verwenden Die Abschirmung ist mit dem Erdpotentiat zu verbinden Die Belegung der AnschluBpins k nnen Sie dem beigelegten Bedienungshandbuch entnehmen Section 4 CE Certification Installation and Operation Manual X SL6800 PC October 2003 SL6800 Series Pressure Controllers E PRELIMINARY English Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Addendum to the Instruction Manual Reference CE certification of Mass Flow Equipment Date January 2000 The Brooks electric electronic
27. ntroller system can be built in upstream or downstream control configurations refer to Figures 1 5 and 1 6 When the controller is placed downstream upstream pressure controller of the pressure vessel the flow is usually determined by the MFC s in the line upstream of the vessel With the pressure controller upstreamof the vessel downstream pressure controller the most likely application is controlling a subatmospheric pressure in the vessel The inlet of the pressure controller can be at atmospheric gas pressure or at vapor pressure of a liquid source The flow in this situation is usually determined by the characteristics of a vacuum pump 2 7 Gas Process Connections Standard inlet and outlet connections supplied on the Model SL6810 and Model SL6820 are 1 4 M VCR Prior to installation ensure all piping is clean and free from obstructions Install piping in such a manner that permits easy access to the instrument if removal becomes necessary 2 2 Installation and Operation Manual Section 2 Installation X SL6800 PC SL6800 Series Pressure Controllers 2 8 Installation Procedures Do not operate this instrument in excess of the specifications listed in section 1 Failure to heed this warning can result in serious personal injury and or damage to the equipment _ __ACAUTION When installing the instrument insure that no foreign materials enter the inlet or outlet of the meter Do not remove the pro
28. o its surface refer to Figure 1 2 The mechanical deformation of this diaphragm results in an imbalance of the resistors which is proportional to pressure An amplifier provides output to the control circuit as well as the electrical output signal In addition to the pressure transducer the Model SL6810 SL6820 has an integral control valve and control circuitry A difference between the pressure and set point signals will cause the electronics to modulate the control valve to maintain the desired pressure A system block diagram is shown in Figure 1 3 The integration of pressure transducer control electronics and control valve into one unit results in a compact size The mounting dimensions are comparable to a mass flow controller Refer to Figures 1 4 and 1 5 The upstream pressure regulation mode is shown in Figure 1 6 places the pressure controller at the outlet of the pressure vessel The pressure in the process upstream of the controller will be constant independent of downstream variation Pressure measurement and control takes place at the outlet side of the pressure vessel y Pressure N Figure 1 1 Model SL6810 SL6820 Pressure Transducer Installation and Operation Manual Section 1 introduction X SL6800 PC October 2003 PRELIMINARY SL6800 Series Pressure Controllers Figure 1 2 Model SL6810 SL6820 Silicon Chip Configuration REMOTE TRANSDUCER PRESSURE INPUT i TRANSDUCER COMMAND COMPARISO
29. ons rapid control can be achieved with out a steady state offset Typically there is a slight decrease in system stability due to the presence of the integral mode The dynamic response of the system is better than the response would be with integral alone Because the two controller modes are interactive the P I controller is somewhat more difficult to tune 3 1 Section 3 Adjustments and Maintenance Installation and Operation Manual X SL6800 PC October 2003 SL6800 Series Pressure Controllers i PRELIMINARY 3 2 Basic Troubleshooting Tuning the P I control Using the Brooks Service tool read the current values of P and I It is highly recommended that the P and I val es be recorded before adjustment This will allow easy retum to the factory settings The Brooks Service tool is covered in another document Increasing the P parameter will increase the proportional band thus increasing the system response time If the proportional band is top high the system may overshoot the command or oscillate Increasing the Integral parameter will increase the integration time making the system respond slower but more stable Most applications require fast response time This can be achieved by using a low Integral number and a high Proportional number P and 1 should be adjusted so the controller reaches setpoint in the minimum time without overshoot or oscillation Check the adjustment in the system over the expected range of
30. ooks Instrument 407 W Vine Street P O Box 903 Hatfield PA 19440USA Toll Free 888 554 FLOW 3569 Tel 215 362 3700 Fax 215 362 3745 E mait BrooksAm EmersonProcess com http www brooksinstrument com Emerson Japan Ltd Brooks Instrument B V Emerson Process Management Groeneveldselaan 6 Brooks Division P O Box 56 1 4 4 Kitasuna Koto Ku 3900AB Veenendaal Netherlands Tokyo 136 0073 Japan Tel 31 318 549 549 Tel 011 81 3 5633 7105 Fax 31 318 549 559 Fax 011 81 3 5633 7124 E mait BrooksEu G EmersonProcess com E mail BrooksAs EmersonProcess com Remove the envelope containing the packing list Carefully remove the instrument from the packing case Make sure spare parts are not discarded with the packing materials Inspect for damaged or missing parts 2 3 Recommended Storage Practice I intermediate or long term storage of equipment is required it is recommended that the equipment be stored in accordance with the following a Within the original shipping container b Stored in a sheltered area preferably a warm dry heated warehouse c Ambient temperature of 70 F 21 C nominal 109 F 43 C maximum 45 F 7 C minimum d Relative humidity 45 nominal 60 maximum 2596 minimum Upon removal from storage a visual inspection should be conducted to verify the condition of equipment is as received 2 1 Section 2 Installation Installation and Operation Manual X SL6800 PC October 2003
31. r DeviceNet interface Integration Time User adjustable via Service port or over DeviceNet interface Control Action Upstream or downstream pressure control Materials of Construction 316L Vacuum Arc Remelt VAR 316L and high alloy ferritic stainless steel External internal seals nickel Valve seat 316L stainless steel internal wetted Surface Finish 32 Ra Electrical Connections Analog I O option 15 pin male Digital VO DeviceNet option 5 pin Micro Connector male Power Supply Voltage Analog option 15 Vdc 5 traditional 15 Vdc pin is ignored Digital VO DeviceNet option 11 25 Vdc nominal 24 Vdc Power Requirements Analog VO option with valve 3 6 Watts Typical 4 0 Watts Max Digital O DeviceNet option w valve 6 9 Watts Typical 7 6 Watts Max Class Hl Equipment The dc Mains input shall be supplied from a SELV Separated Extra Low Voltage source Output Signals Pressure Output Analog I O option only 0 5 Vdc into 2 K ohm minimum load Output will indicate process variable up to 6 Vdc 120 F S 5 Volt Reference Output 5 Volts 0 2 min Load 1 K ohms Pressure Setpoint Signals Command Setpoint Input Analog YO option only 0 5 Vdc Input will accept signals to 5 5 Vdc 11096 F S Input resistance 825 K ohm nominal Section 1 Introduction Installation and Operation Manual X SL6800 PC October 2003 SL6800 Series Pressure Controllers PRELIMINARY Process Connections Standard inte
32. rder Mechanical parts must be changed to convert modes or valve types Vessel Pressure Controller Figure 1 6 Model SL6820 Controller Upstream Pressure Controller Vessel Figure 1 7 Model SL6810 Controller Downstream 1 6 Installation and Operation Manual Section 1 Introduction X SL6800 PC October 2003 PRELIMINARY _SL6800 Series Pressure Controllers Upstream Controller Mode The controller is set to maintain the upstream process pressure constant independent of downstream pressure or flow variations ref Fig 1 6 This is factory configured Downstream Controller Mode The controller is set to maintain the downstream process pressure constant independent of upstream pressure or flow variations This is factory configured Normally Open Normally Closed Control Valve Both Normally Open N O and Normally Closed N C configurations are available Normally Closed is the standard valve type The Normally Open valve may be specified when Safety Operation or Process considerations warrant this type of valve Voltage Inputs Outputs are factory configured and available on the analog version of the device This must be specified when ordered H I Mass Flow Controllers n Model SL6820 Reactor BF Figure 1 8 Typical Application of Upstream Controller Section 1 Introduction Installation and Operation Manual X SL6800 PC October 2003 SL6800 Series Pressure Controllers PRELIMINARY 1 4 Specifi
33. soddisfare la certificazione CE Lo schermo deve essere collegato ad un terminale di terra Per il corretto cablaggio dei terminali occorre fare riferimento agli schemi del manuale di istruzioni dello strumento Nederlands Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Onderwerp Addendum voor Instructie Handboek Referentie CE certificering voor Mass Flow Meters amp Controllers Datum Januari 2000 Dames en heren Alle CE gemarkeerde elektrische en elektronische produkten van Brooks Instrument zijn met succes getest en voldoen aan de wetgeving voor Electro Magnetische Compatibiliteit EMC wetgeving volgens 89 336 EEC Speciale aandacht is echter vereist wanneer de signaalkabel gekozen wordt voor gebruk met CE gemarkeerde produkten Kwaliteit van de signaalkabel en kabelaansluitingen Brooks levert standaard kabeis met een hoge kwaliteit welke voldoen aan de specificaties voor CE certificering Indien men voorziet in een eigen signaalkabel moet er gebruik gemaakt worden van een kabel die volledig is afgeschermd met een bedekkingsgraad van 100 D of ronde kabelconnectoren moeten afgeschermd zijn met een metalen connector kap Indien kabelwartels worden toegepast moeten metalen kabelwartels worden gebruikt die het mogelijk maken het kabelscherm in te klemmen Het kabelscherm moet aan beide zijden over 360 met de metalen connectorkap of warlel verbonden worden Het scherm moet worden verbonden met aarde
34. t Annexe au Manuel d Instructions R f rence Certification CE des D bitm tres Massiques Effet Thermique Date Janvier 2000 Messieurs Les quipements Brooks lectriques lectroniques portant le label CE ont t test s avec succ s selon les r gles de la Compatibilit Electromagn tique directive CEM 89 336 EEC Cependant la plus grande attention doit tre apport e en ce qui concerne la s lection du c ble utilis pour v hiculer le signal d un appareil portant le label CE Qualit du c ble des presse toupes et des connecteurs Brooks fournit des c bles de haute qualit r pondant aux sp cifications de la certification CE Si vous approvisionnez vous m me ce c ble vous devez utiliser un c ble blind 100 Les connecteurs D ou de type circulaire doivent tre reli s la terre Si des presse toupes sont n cessaires ceux ci doivent tre m talliques avec mise la terre Le blindage doit tre raccord aux connecteurs m talliques ou aux presse toupes sur le pourtour complet du c ble et chacune de ses extr mit s Tous les blindages doivent tre reli s la terre Les connecteurs de type card edge sont non m talliques Les c bles utilis s doivent tre blind s 100 pour satisfaire la r glementation CE Tous les blindages doivent tre reli s la terre Se r f rer au manuel d instruction pour le raccordement des contacts Greek Brooks Instrum
35. t and outlet connections supplied on the Model SL6810 and Model SL6820 are 1 4 M VCR Optional C Seal Downport semi spec 2787 1 4 99 Optional CS Seal Downport semi spec 2787 5 4 99 Environmental Conditions Installation Category I Pollution Degree 2 Humidity 50 8096 Relative Humidity Meter Altitude 6562 feet 2 000 meters For Indoor Use ONLY Mains supply voltage fluctuations not to exceed 10 of the nominal voltage Valve Override Signal Analog I O option only IF Left floating unconnected or grounded instrument controls valve to setpoint IF Connected to signal at or above 10 0 Volts vaive is forced open IF Connected to signal at or below 0 0 Volts valve is forced closed Installation and Operation Manual Section 2 Installation X SL6800 PC October 2003 PREHMINARY 616800 Series Pressure Controllers 2 1 General This section contains the procedures for the receipt and installation of the instrument Do not attempt to start the system until the instrument has been permanently installed It is extremely important that the start up procedures be followed in the exact sequence presented 2 2 Receipt of Equipment When the instrument is received the outside packing case should be checked for damage incurred during shipment If the packing case is damaged the local carrier should be notified at once regarding his liability A report should be submitted to your nearest Product Service Department Br
36. t be removed from protective enclosure until immediately before installation Removed boards must immediately be placed in protective container for transport storage or return to factory Comments This instrument is not unique in its content of ESD electrostatic discharge sensitive components Most modem electronic designs contain components that utilize metal oxide technology NMOS CMOS etc Experience has proven that even small amounts of static electricity can damage or destroy these devices Damaged components even though they appear to function properiy exhibit early failure Installation and Operation Manual Contents X SL6800 PC October 2003 PRELIMINARY SL6800 Series Pressure Controllers Paragraph Page Number Number Introduction Section 1 1 1 Scope Lament NE gsc del 1 2 Description ete eees EE T KE ea 1 1 1 3 Principle Of Operation narren sen ii nette 1 2 1 4 Specifications EIE UE 1 8 1 5 Controller Specifications EEE TG 1 9 Installation Section 2 24H A isess rkerededuniissensebinses rr ride ltr bnkern uber vececkievip ORT E E E NRO Ner DNE ridnN 2 1 2 2 Rec iptof EqUIDITielt iieri e kalk E Doni RS 2 1 2 3 Recommended Storage Practice m ssssessserosrersrsrorerensrserernnrenererenvossss ss rn 4 EE nod sehen nennen 2 1 2 4 Return Shipment EEE NK SENSE LET EE LED D 2 2 2 5 Transit PrecBUllOnB unir A eure een nn 2 2 2 6 Typical Configuraltion
37. tective end caps until time of installation CAUTION Any Brooks Instrument pressure controller with a 15 pin D Connector PC Board bearing the CE Mark must use a 100 shielded cable and metal shell mating connectors The shield is tied over 360 degrees to the shell at both ends This is mandatory to be in compliance with the EMC Directive 989 336 EEC Installation Procedures a The Model SL6810 SL6820 should be located in a clean dry atmosphere relatively free from shock and vibration Leave sufficient room for access to the electrical components c Install in such a manner that permits easy removal if the instrument requires cleaning d The Model SL6810 SL6820 pressure controller may be installed in any position Note The control valve in the Model SL6810 51 6820 provides precision control and is not designed for positive shut off If positive shut off is required it is recommended that a separate shut off valve be installed In line When used with a reactive sometimes toxic gas contamination or corrosion may occur as a result of plumbing leaks or improper purging Plumbing should be checked carefully for leaks and the controller purged with dry nitrogen before use See Brooks Technical Bulletin 1 086 for further information ACAUTION Since the Control Valve is not a positive shut off a seperate solenoid valve may have been installed for that purpose It should be noted that
38. tenance persons Please contact your nearest sales representative for more details HELP DESK In case you need technical assistance Americas 8 1 888 554 FLOW Europe D 31 318 549265 Asia TR 011 81 3 5633 7105 Due to Brooks instrument s commitment to continuous improvement of our products all specifications are subject to change without notice TRADEMARKS ISO 9001 BIOOKS sis Brooks Instrument Div Emerson Electric Co QUALITY SYSTEM DeviceNet creano cai otis raaceseesnas Open DeviceNEt Vendors Association inc Certificate of Conformity EMERSON zei cien nr A EA rue earn EE Emerson Electric Co A A Open DeviceNEt Vendors Association inc MOD na scu SE Cajon Co Emerson Process Management Emerson Process Management Emerson Japan Lid Brooks Instrument Brooks instrument B V Emerson Process Management 407 West Vine Street Groeneveldselaan 6 Brooks Instrument P 0 Box 903 P O Box 56 1 44 Kitasuna Koto Ku amp Hatfield PA 18440 0903 USA 3900AB Veenendaal Netherlands Tokyo 136 0073 Japan s T 215 362 3700 131 318 549 549 T011 81 3 5633 7105 F 215 362 3745 F31 318 549 559 F011 81 3 5633 7124 ES ee ade en A ae SERA E Mail Nr E M ER S O N Copyright 2003 Brooks Instrument Division Emerson Electric Co All rights reserved Printed in U S A Process Ma nagement
39. to a step response error signal The error signal is the difference between the actual pressure and the setpoint Since no control system is instantaneous an error signal will be present while the controller is attempting to reach setpoint The SL6810 and SL6820 employ digital P I controls There are no potentiometers to adjust these values Proportional Control Proportional control is a basic continuous control mode in which the controller output is proportional to the error input signal to the controller It provides very rapid response and is relatively stable Used alone proportional control has one disadvantage at steady state it exhibits an offset That is there is a difference between the desired value or setpoint and the actual value of the controlled variable An integral action added to the proportional mode eliminates offset Proportional control is sometimes called proportional gain The gain of the controller is high when the error is large and low when the error is small Integral Control Integral or reset action is an integration of the input error signal over time This means that with integral action the value of the manipulated variable changes at a rate proportional to the error With integral action present there can be no offset at steady state since the manipulated variable will continue to change as long as an error is present Characteristics of PI Control By using both proportional and integral control acti
40. ucces i henhold til regulativet om elektrisk st j EMC direktivet 89 336 EEC Der skal dog g res opm rksom p benyttelsen af signalkabler i forbindelse med CE m rkede udstyr Kvaliteten af signal kabler og stik Brooks lever kabler af h j kvalitet der im dekommer specifikationerne til CE m rkning Hvis der anvendes andre kabel typer skal der benyttes et sk rmet kabel med he sk rm med 100 d kning Forbindelses stikket type D eller cirkulaere skal v re sk rmet med metalhus og eventuelle PG forskruninger skal enten v re af metal eller metal sk rmet Sk rmen skal forbindes i begge ender til stikkets metalhus eller PG forskruningen og have forbindelse over 360 grader Sk rmen ber v re forbundet til jord Card Edge stik er standard ikke af metal der skal derfor ligeledes benyttes et sk rmet kabel med hel sk rm med 100 d kning Sk rmen b r v re forbundet til jord Forbindelse af stikket venligst referer til vedlagte instruktions manual Med venlig hilsen Deutsch Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Nachtrag zur Bedienungsanleitung Referenz CE Zertifizierung f r Massedurchflu ger te Datum Januar 2000 Nach sierden Tests enstprechend den Vorschiften der net Vertr glichkeit EMC Richtlinie 89 336 EEC erhalten die Brooks Ger te elektrische elektronische Komponenten das CE Zeichen Bei der Auswahl der Verbindungskabel f r CE zertifizierte Ger te si
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