MPC Series Panel Mount Mass Flow Controller User's Manual
Contents
1. MPC Series Panel Mount Mass Flow Controller Communications Functions Manual No CP SP 1154E Those using the communications functions of the MPC series should read this manual This manual describes an outline of communications wiring communications procedures a list of MPC series communications data how to remedy trouble and communications specifications Organization of This User s Manual This manual is organized as follows Chapter 1 Chapter 2 Chapter 3 Chapter 4 Chapter 5 Chapter 6 Chapter 7 INTRODUCTION This chapter briefly describes this device its features and the model selection guide NAMES AND FUNCTIONS OF PARTS This chapter describes the Names and functions of parts on this device MOUNTING AND WIRING This chapter describes installation mounting wiring and initial settings on this device BASIC OPERATION This chapter describes the basic operations for using this device ADVANCED OPERATION This chapter describes how to set the functions and parameters on this device TROUBLESHOOTING This chapter describes how to investigate and remedy trouble that may occur during operation of this device SPECIFICATIONS This chapter describes the specifications and external dimensions of this device Contents SAFETY PRECAUTIONS The Role of This Manual Organization of This User s Manual Conventions Used in This Manual Chapter 1 INTRODUCTION B intro2. Multi SP setting mode number of SPs 2 to 4 according to function setup 4 Up to four SP values setting flowrate values can be switched by key operation and by external switch inputs Follow the procedure below to change the SP No and SP value 1 Press the DISP key gt gt The instantaneous flowrate value and SP value are displayed Same as the display at power supply ON 2 Keep the DISP key pressed for 1 second or more gt gt The SP No currently being selected setting flowrate No SP 0 to SP 3 is indicated on the upper display and the SP value is indicated on the lower display 3 Press the A key or V key to change the SP No 4 When the target value is displayed press the ENT key 5 Press the A key or V key to change the SP value gt gt The digit being changed blinks You can move to the digit to be changed by pressing the key 6 When the target value is displayed press the ENT key gt gt The SP value is fixed At this point the SP value and SP No are updated 4 3 Chapter 4 BASIC OPERATION 4 4 Note Direct setup function e The control can be executed using the SP value currently being changed indicated by blinking display when the Direct setup function is enabled is selected at direct setup function switching Z 2 in the function setup The ENT key does not need to be pressed to fix the SP value However to switch the display by pressing the DISP k
3. Panel mount mass fow controler o 31 Ise T ene L LEE E E 00 ieee ti S MERI 00200 04t200L mi standard i L l j of J i None With analog input output function imou 85 communication forte ith R 485 communication function P E without analog input output function fO Witoutoptonalfuncion Oo Without optional function Without optional function __ Inspection certificate provided L Complying with traceability certification 0 Productversion 1 L min standard indicates the volume flowrate per minute L min converted to 20 C and 101 325kPa 1 atmospheric pressure The reference temperature can also be changed to 0 C 25 C and 35 C 2 The nitrogen air is set as a factory setting The MPC can be used for argon and carbon dioxide gases by setup change 1 4 Chapter 2 NAMES AND FUNCTIONS OF PARTS Display r Upper display Displays the instantaneous flowrate value 7 segment display When the display is switched it also displays the integrated flowrate value upper 4 digits parameter setup item function setup item or alarm details MPC cp m Lower display Displays the set flowrate 7 segment display f T H When the display is switched it also displays the operation mode os BH H a integrated flowrate values lower 4 digits DISP key U
4. 2 1 Chapter 3 MOUNTING AND WIRING NWARNING Never allow gases that are within explosive limits to pass through this controller Doing so might result in explosion accidents Do not use this controller for gases other than standard compatible gas types nitrogen air argon and carbon dioxide NCAUTION Prevent foreign matter from entering the controller If the rust water droplet oil mist or dust in the piping flows into the controller measurement error might occur and result in damaging the controller If there is a possibility that are any foreign matter flows into the controller provide a filter or mist trap capable of eliminating more than 0 1u m foreign matter at the upstream and periodically inspect and replace the filter Use this controller within the operating differential pressure range Also do not apply pressure outside the pressure resistance range Doing so might damage this controller This controller is not provided with the capability of completely closing the valve If the valve must be completely closed provide a shutoff valve separately When an external valve is closed must make the valve standby by fully closing with either of the following methods Make the flowrate to zero e Set the operation mode to the fully closed mode If this valve is maintained in control mode despite of closing the external shutoff valve zero flowrate large excess flowrate will instantly flow when the external shut
5. Be sure to check that the wiring is correct before you turn the power ON Incorrect wiring might cause damage or malfunction Use Yamatake Corporation s SurgeNon if there is the risk of power surges caused by lightning Failure to do so might cause fire or faulty operation B Mounting 3 2 Avoid mounting this controller in the following locations Locations subject to high and low temperature and humidity Locations subject to sudden changes in temperature and condensation Locations subject to be filled with corrosive gases and flammable gases Locations whose atmospheres contain large amounts of dirt and dust salt conductive substances such as iron powder water droplets oil mist and organic solvents Locations directly subject to mechanical vibration or shock Locations subject to direct sunlight and rain Locations subject to splashing of oil or chemicals Locations close to sources of electrical noise Locations where strong magnetic or electrical fields are generated Joint connection Chapter 3 MOUNTING AND WIRING Connect the joint by holding the hexagonal section of the pipe connection port of the body with a spanner or wrench o Handling Precautions Do not hold the case of the controller with your hand when screwing the joint into the connection port Doing so might deform the body Screw the joint with an appropriate torque as recommended by the joint manufacturer Exceeding the torque limits will
6. Request for repair service Chapter 7 SPECIFICATIONS pe B Specifications Specifications are given on the next page 7 1 Chapter 7 SPECIFICATIONS Model No MPC9500 MPC0002 Valve type Proportional solenoid valve Standard full scale flowrate 0 500 L min standard 2 00 L min standard nitrogen conversionvalue 1 Standard compatible gas types Nitrogen air argon carbon dioxide CO3 Note The gas must be a dry gas not containing corrosive components chlorine sulfur acid The gas must also be a clean gas not containing dust or oil mist Control Control range 1 4 to 100 FS C 1 Within 1 0s typ to set point 2 FS 2 FS max at standard temperature and differential pressure Pressure influence 0 4 FSmax per 0 1MPa 0 7 FSmax Q flowrate 2 FSmax 1 2 FSmax Pressure Standard differential pressure 2 0 2MPa 290PSI Inlet pressure 0 2MPa 290PSI gauge outlet pressure 0 0MPa OPSI gauge Required differential pressure 3 0 05MPa 72 5PSI Operating differential pressure 0 3MPa 435PSI max range 4 0 5MPa 725P SII gauge Tempera Standard operating temperature 2 25 C 77 F ture Allowable operating temperature 10 to 50 C 14 to 122 F range 0 to 50 C 32 to 122 F when RS 485 communication Allowable storage temperature range 10 to 60 C 14 to 140 F Allowable operating humidity range 10 to 90 RH no condensation allowed Flowrate Setup method 1 Key operation 2 Exte
7. 3 8 Chapter 4 BASIC OPERATION 4 1 Switching Displays Each press of the DISP key switches the display as shown below The display shown below is an example Multi setting flowrate display 4 s DISP key 1 s or more Setting flowrate SP 1 7 No SP No ma a Instantaneous flowrate display Instantaneous flowrate Setting flowrate hail pgg DISP key or no key is pressed for 10 s or more Setting flowrate A_C SP value im Cag No key is pressed for 10 seconds or DISP key less than 1 s more Operation mode display 1 2 Instantaneous flowrate Operation mode Integrated Valve drive flowrate display 3 output display Integrated flowrate ji V ke Instantaneous E flowrate 8 s or more Valve drive output Integrated flowrate g g 5 B s o I am le E Lights DISP key Blinking DISP key 1 The operation mode display is not displayed when the 0 The operation mode selection by key oparation is disabled is selected at the operation mode selection 2 in function setup 2 If no key is pressed while the operation mode is displayed the display will automatically return to the instantaneous flowrate display after approximately 10 seconds 3 When the ENT key is pressed for 3 seconds or more while the integrated flowrate is displayed the integrated flowrate value is reset 4 The multi setting flowrate is
8. No CP SP 1153E MPC Series Panel Mount Mass Flow Controller User s Manual Installation and configuration 2 mm Cw 5 amp S SP2 SP3 e e v azbil Thank you for purchasing the MPC Series This manual contains information for ensuring correct use of the MPC Series It also provides necessary information for installation maintenance and trou bleshooting This manual should be read by those who design and maintain devices that use the MPC Series Be sure to keep this manual nearby for handy reference Yamatake Corporation RESTRICTIONS ON USE This product has been designed developed and manufactured for general purpose application in machinery and equipment Accordingly when used in applications outlined below special care should be taken to implement a fail safe and or redundant design concept as well as a periodic maintenance program e Safety devices for plant worker protection Start stop control devices for transportation and material handling machines Aeronautical aerospace machines Control devices for nuclear reactors Never use this product in applications where human safety may be put at risk NOTICE Be sure that the user receives this manual before the product is used Copying or duplicating this user s manual in part or in whole is forbid den The information and specifications in this manual are subject to change without notice Considerable effort h
9. Transmission speed 0 38400bps selection 19200bps 9600bps 4800bps 2400bps Communications 8 data bits even parity conditions selection 1 stop bit 8 data bits no parity 2 stop bits SP limit function SP limit function disabled Upper limit only Lower limit only Both upper and lower limit The upper and lower limit values of the flowrate setup range can be set to desired levels The upper and lower limits are set in parameter setup mode See page 5 7 for details 1 When 4 Switching of flowrate setup method is selected at the external switch input function assignment C7 iG orZ 6 the switching by external switch input takes precedence 2 These items can be set only on the models with analog input output function 3 These items can be set only on the models with RS 485 communication function 4 This function is invalid for the controller shipped befor Dec 2006 5 5 Chapter 5 ADVANCED OPERATION 5 2 Parameter Setup Setup method Follow the procedure below to set the parameters such as flowrate deviation alarm upper and lower limit flowrate and event output delay time 1 Press the DISP key to display the integrated flowrate gt gt L lamp lights 2 Keep the lt key pressed for 3 seconds We gt gt rA is indicated on the upper display Parameter setup mode 3 Press the A key or V key to select the target setup item and press the ENT key gt g
10. 0 5 FS max 0 2 FS max 0 2MPa 290PSI Inlet pressure 0 2MPa 290PSI gauge outlet pressure 0 0MPa OPSI gauge 0 1MPa 145PSI 0 15MPa 217 5PSI 0 3MPa 435PSI max 0 05 to 0 3MPa 72 5 to 435PSI 0 5MPa 725PSI gauge 25 C 77 F 10 to 50 C 14 to 122 F 0 to 50 C 32 to 122 F when RS 485 communication 10 to 60 C 14 to 140 F 10 to 90 RH no condensation allowed 1 Key operation 2 External setup voltage input only for the model with analog I O function 3 Loader communication 4 RS 485 communications only for the model RS 485 communications function Cry 0 to 5Vdc 1 to 5Vdc selectable by function setup Input impedance 1MQ 10 only for the model with analog I O function 7 segment LED 8 digits For the instantaneous flowrate display 4 digits and for the setting flowrate display 4 digits Co 1 2 FS 1 digit at standard temperature and differential pressure 0 0 to 9 999 999 9L 0 to 99 999 999L 0 1L 1 At each 50L count 1 At each 200L count 2 At each after 1 hour from the previous backup r 0 to full scale flowrate scaling available 0 to 5Vdc 1 to 5Vdc selectable by function setup Chapter 7 SPECIFICATIONS 7 3 Chapter 7 SPECIFICATIONS Model No MPC9500 MPC0002 Flowrate Max output voltage 7Vdc max maximum output when flowrate exceeds range output Accuracy 0 5 FS The input impedance of the connected device must be at least 100kQ Tot
11. Specifications are subject to change without notice Printed in Japan 1st Edition Issued in Feb 2004 W 2nd Edition Issued in Mar 2008 A
12. 200 240 e Ifthe outlet pressure is diffrent from the values graphed on the above calculate the flowrate using the appropriate formula below 1 When P2 P1 gt 0 53 Q C1 P1 P2 X P2 2 When P2 P1 x 0 53 Q C2 X P1 P1 Inlet absolute pressure kPa abs P2 Outlet absolute pressure kPa abs Absolute pressure gauge pressure 101 3kPa Q Flowrate L min standard C1 and C2 Constant values by model MPC 9500 C1 0 01054 C2 0 00526 MPC 0002 C1 0 05971 C2 0 02981 MPC 0005 C1 0 05971 C2 0 02981 MPC 0020 C1 0 16740 C2 0 08357 Example When using the MPC0020 with inlet pressure 120 kPa gauge and outlet pressure 0 kPa gauge P1 221 3 kPa abs P2 181 3 kPa abs P2 P1 0 819 Q 0 1674 X 4 221 3 181 3 X 181 3 14 3 L min Standard When used with the gases other than air convert the flowrate using the following formula Flowrate Flowrate in air specific gravity of gas to be controlled Example When using the MPC0020 with CO inlet pressure 100 kPa gauge and outlet pressure 0 kPa gauge 16 8 L min standard 4 1 53 13 6 L min standard Specific gravity standard compatible gas air is taken as 1 0 Argon 1 38 Carbon dioxide 1 53 Revision History Date mum c Yamatake Corporation Advanced Automation Company 1 12 2 Kawana Fujisawa Kanagawa 251 8522 Japan URL http www azbil com Printed on recycled paper 07 azbil
13. External switch input mo o0 6 External switch input 1 4 0 0 _6 External switch input 2 9 SIGNAL GND o Handling Precautions e When using a relay for external switch input always use a relay designed for micro current use with gold contacts Failure to do so cold cause faulty contact resulting tn malfunction e Analog input output only for the model with analog I O function Oto5Vor 7 Analog input 1 to 5V input 2 Analog output Oto5Vor 1 to 5V output q 9 SIGNAL GND 1 Handling Precautions Do not apply a negative voltage or a voltage exceeding 5V to the analog I O terminals Doing so might cause malfunction or eguipment failure 3 7 Chapter 3 MOUNTING AND WIRING RS 485 communication only for the model with RS 485 communication function DA 4 7 DA DB DB SG 49 SIGNAL GND Note For details on how to connect the RS 485 communications see MPC series Panel Mount Mass Flow Controller Communications Functions CP SP 1154E Wiring example I 24Vde Internal circuit POWER 24V POWER GND EV1 3 Event output 1 Event output 2 Eve Output common Analog setting voltage input DA AI DA AO DB 8 SIGNAL GND 9 Analog flowrate voltage output DB Analog input output common SG
14. ON Incorrect wiring might cause damage or malfunction e eo oo Use Yamatake Corporation s SurgeNon if there is the risk of power surges caused by lightning Failure to do so might cause fire or faulty operation iii The Role of This Manual In all 3 manuals have been prepared for the MPC Series Read the manual according to your specific requirements The following lists all the manuals that accompany the MPC Series and gives a brief outline of the manual If you do not have the required manual contact Yamatake Corporation or your dealer E LET eund ee B _ MPC Series Panel Mount Mass Flow Controller Manual No CP UM 5317E This manual is supplied with the product Personnel in charge of design and or manufacture of a system using this device must thoroughly read this manual This manual describes the safety precautions installation wiring and primary specifications For further information about operation refer to other manuals Installation MPC Series Panel Mount Mass Flow Controller Installation and configuration Manual No CP SP 1153E This manual This manual is optional Sold separately Personnel in charge of design manufacture operation and or maintenance of a system using this device must thoroughly read this manual This manual describes the installation wiring major functions and settings operating procedures troubleshooting and detailed specifications
15. cause damage the connection port Apply appropriate amount of sealant Do not coat the top most thread of the screw Remove any dirt or burrs from inside the joint Good example Bad example 3 3 Chapter 3 MOUNTING AND WIRING External dimensions unit mm CT CILLLID CIL GL Co ArT cS aoe C a Connector accessory Mounting bracket accessory Bi 61 Lae 448 Connection oader port 4 v jack 35 3 zm MPC T i V y n KY Er REB a T ret i A Gs Go NUT z 3 e E a ju E azbil D 1 iT D eo Connection 185 10 portIN Applicable panel plate thickness is 2 to 7mm Panel cutout unit mm Vertical gang mounting Eag Horizontal gang mounting 48 X N 3 Individual mounting 45 N Number of mounted units Chapter 3 MOUNTING AND WIRING Mounting on a panel The mounting panel should be used with a thickness of 2 to 7mm of steel Mounting bracket J Rx Mounting bracket X screws E Panel cutout C 1 Handling Precautions To fasten this controller onto the pan
16. placed vertically inlet port lower side outlet port upper side Approx 300g Mounting bracket 81446917 001 wiring connector EN61326 1997 Amendment A1 1998 A2 2001 2 The temperature and pressure at calibration 3 Differential pressure required for obtaining full scale flowrate 4 Operation is possible even under the required differential pressure However the controllable flowrate range will become small For details refer to gt E Relationship between flowrate when valve is fully open and differential pressure next page B Applicable only to the model with analog input output function 6 Aloader package exclusive for MPS series sold separately is required 7 Applicable only to the model with RS 485 communications function 7 5 Chapter 7 SPECIFICATIONS B Relationship between flowrate and differential pressure with valve fully opened in air Flowrate L min standard Flowrate L min standard a d EHTEHRHE UA 4 EH H H Vr tt EJ pL TEL T1 0 10 Diffrential pressure kPa MPC0020 1 AEN 50kPa gauge MPC9500 MPC0002 0005 pe 20 80 Diffrential pressure kPa LIU LI 30 120 150kPa gauge 50kPa gauge 8 50kPa gauge 4 0kPa gauge OkPa gauge A BEaS o 50kPa gauge 7 50kPa gauge AF gauge A Flowrate L min standard 40 50 60 0 20 40 60 80 100 120 Diffrential pressure kPa Four parameter show outlet pressure 160
17. range becomes the flowrate obtained by multiplying the full scale flowrate by the percentage in parentheses The factory setting and setting range vary according to the gas type Chapter 6 TROUBLESHOOTING E Alarm code display When a flowrate deviation alarm occurs or when an alarm occurs during controller self diagnostics the operating mode currently selected at Operation selection at oT 060 alarm occurrence 5 in the function setup is forcibly switched to Except Re The upper display alternately indicates the alarm codes shown in the table below and the regular display Alarm a Error Cause Countermeasure code Flowrate deviation lower Insufficient alarm judgment delay time Request for repair service limit alarm insufficient power voltage insufficient if there is no problem on the items inlet pressure excessive operating listed on the left temperature etc Flowrate deviation upper Insufficient alarm judgment delay time Request for repair service limit alarm valve trouble sensor trouble etc if there is no problem with the delay time Valve overheat prevention During the control or fully open mode When the gas is continuously limit is operated the gas is forcibly shut off by external shut off by external device set device for more than 5 minutes the set flowrate to zero or valve fully closed mode fue EUH EZ Sensor error Sensor trouble foreign object attached If sensor is not restored aft
18. Alarm output When the flowrate deviation alarm or self diagnostics occurs Flowrate upper lower limit output Output by comparison to the optional upper lower flowrate limit setting value Integration count up output When the integration setting flowrate is exceeded Integration pulse output Pulse can be output for each integration display unit OK output When the control flowrate is within the set point allowable range The operating mode can be identified and output externally as an event The output ON delay time can also be set However the delay cannot be set to integration pulse output In addition the output logic can be reversed at normal state ON at event occurrence OFF However the output is always OFF during power OFF e OK lamp light up output The OK lamp can be made to light when the control flowrate is within the setting value allowable range This function is very handy for verifying at a glance whether or not the new setting value is being followed properly when a setting value is changed The OK lamp output can also be used as an interlock signal for subsequent processes by assigning it to event output and loading it to a sequence program 1 2 Chapter 1 INTRODUCTION Automatic shut off function The valve can be shut off automatically under the following conditions 1 When the integration count value reaches the setting value 2 When one of the alarms including flowrate al
19. K lamp ENT key Handling Precautions indicate items that the user should pay attention to when handling the MPC Series Notes indicate useful information that the user might benefit by knowing This indicates the item or page that the user is requested to refer to The numbers with the parenthesis indicate steps in a sequence or indicate corresponding parts in an explanation This indicates the contents shown on the personal computer or unit as a result of operation or unit status after completion of operation This indicates 7 segment indication on the setup display This indicates an LED lamp on the setup display This indicates a key on the setup display vil Chapter 1 INTRODUCTION B introduction The MPC series high performance digital mass flow controller has been developed for the general industrial market featuring high speed and wide range flowrate control the following features are offered The MPC series integrates the advanced technologies of an ultra high speed response flow velocity sensor the uF Micro Flow sensor made using Yamatake proprietary technology an ultra compact proportional solenoid valve a new flow channel structure and advanced actuator control technology achieves the realization of the mass flow controller which can be mounted on the panel of the equipments This is a compact 48 X 48mm mask size and light weight approx 300g mass flow controller Easy operati
20. Precautions Do not apply a negative voltage or a large voltage exceeding 5V to the analog setting voltage input terminal Doing so might cause faulty operation or malfunction 4 5 Chapter 4 BASIC OPERATION 4 3 Selecting the Operating Mode When the DISP key is pressed for less than 1 second while the instantaneous flowrate is displayed same as the display at power supply ON the instantaneous flowrate indication on the upper display is not changed and the lower display shows the operating mode enabling the selection of operation mode Follow the procedure below to select the operation mode 1 Press the DISP key to display the operation mode 2 Press the A key or V key gt gt The display is changed as shown below Alkey Fua Fully open mode 8 Control mode ure Fully closed mode 3 Select the target operating mode gt gt Display blinks 4 Press the ENT key to fix the operating mode gt gt The operating mode is changed o Handling Precautions e When 0 The operating mode selection by key operation is disabled is selected at the operation mode selection tiz in the function setup the operating mode is not displayed even if the DISP key is pressed When the DISP key is pressed during the operation in step 3 the operating mode indicated by blinking display the operating mode selection is cancelled Note When the operating mode selection 5 6 or 8 is selected at
21. ROH 5 7 Chapter 5 ADVANCED OPERATION 3 4 15 6 T 8 g 10 11 This item can be set only when other than 0 Not used is selected at the flowrate alarm setup type 5 in the function setup This item can be set only when other than 0 Not used is selected at the event output type assignment 7 1 num gt and Z amp in the function setup DRE This item can be set only when 0 User setting is selected at gas type selection amp in the function setup This item can be set only when 8 Instantaneous PV upper limit event 9 Instantaneous PV lower limit ree event and 10 Instantaneous PV lower limit event 2 is selected for the t and 48 event output type assignment in the function setup aet This item can be set only when 1 Function enabled is selected for the ZZ analog optional scaling function in the function setup This item can be set only when 11 Integrated flowrate event is selected at the event output type assignment 741 and G amp in the function setup or when 1 Function enabled is selected at the valve automatic shut ci off function Z 3 This item can be set only when 1 Function enabled is selected at the PV forced zero function Z4 in the function setup This item can be set only if suitable limit type is selected for the 35 SP limit function in the function setup The factory setting and setting
22. al output accuracy Indication accuracy 0 5 FS Number of outputs 30Vdc 15mA max open collector non insulated output Integrated pulse output width 100ms 10 when the integrated pulse output is selected Integrated pulse rate 0 1L pulse External Number of inputs switch Circuit type Non voltage contact or open collector m nlo m o blo 5 E 9 E 9 5 5 a 89 a lt n Approx 0 5mA contact current Max 1 0V with open collector Max 50pA with open collector Communi 1 Loader communication 6 2 RS 485 communications 3 wire cation Transmission speed 2400 4800 9600 19200 38400bps Only 19200 bps for loader communication Power 24Vdc current consumption 300mA max supply 22 8 to 25 2Vdc ripple 5 max Brass Ni plated stainless steel Teflon Viton Mounting direction Display surface must be placed vertically inlet port lower side outlet port upper side Mounting bracket 81446917 001 wiring connector Applicable standard EN61326 1997 Amendment A1 1998 A2 2001 Nj gt o o o x Q Q O Q 1 L min standard indicates the volume flowrate per minute L min converted to 20 C and 101 325 kPa 1 atmospheric pressure The reference temperature can also be changed to 0 C 25 C and 35 C The controllable flowrate range varies according to the gas type Refer to the following table MPC9500 MPC0002 Control flowrate range Setting indication resolution Control flowrate r
23. ange Setting indication resolution L min standard L min standard L min standard L min standard 0 020 to 0 500 0 002 0 08 to 2 00 0 020 to 0 500 0 002 0 08 to 2 00 0 01 Carbon dioxide 0 012 to 0 300 0 001 0 040 to 1 200 0 005 o o A L min standard L min standard L min standard L min standard Nitrogen air 0 10t05 00 0 02 X 0410200 amp 01 Argon 0 10t0500 002 3 04t0200 3 01 J Carbon dioxide 0 06t03 00 001 0310160 amp 0341 7 4 Chapter 7 SPECIFICATIONS MPC0005 MPC0020 7Vdc max maximum output when flowrate exceeds range 0 5 FS The input impedance of the connected device must be at least 100kQ Total output accuracy Indication accuracy 0 5 FS 2 points 30Vdc 15mA max open collector non insulated output 100ms 10 when the integrated pulse output is selected 0 1L pulse 1L pulse 2 points Non voltage contact or open collector 2 0 0 5V Approx 0 5mA contact current Max 250Q Min 100kQ2 Max 1 0V with open collector Max 50pA with open collector 1 Loader communication 6 2 RS 485 communications 3 wire 7 2400 4800 9600 19200 38400bps only 19200 bps for loader communication 24Vdc current consumption 300mA max 22 8 to 25 2Vdc ripple 5 max Brass Ni plated stainless steel Teflon Viton Rc1 8 Display surface must be
24. arms occurs However the valve of this device does not have a capability of complete shut off When the complete shut off is required provide a separate shut off valve externally Automatic reset of integration count at start of control function Start of control and integration count reset can be carried out simultaneously by a single action key operation or external switching input Combining this function with the automatic shut off function described above is handy for shutting the valve off when a fixed number of integration values have been counted repeatedly Direct setup function This function allows users to easily change the flowrate setup This function is useful when you frequently change setting values for example when you adjust the preset flowrate during trial operation Loader communication function Connecting a loader cable sold separately to the loader jack at the rear side of this device enables direct communication with a personal computer in the form of one to one using the communication program made by user By using this loader communication various settings in the function setup and the flowrate setup can be configured from a personal computer and the control flowrate or alarm status can be read out with the personal computer Chapter 1 INTRODUCTION B Model selection guide Basic Control Dis Mate Connec Gas No Option Option Option Option Code Description Pie acea ee ee P a MPC
25. as been made to ensure that this manual is free from inaccuracies and omissions If you should find an error or omis sion please contact Yamatake Corporation In no event is Yamatake Corporation liable to anyone for any indirect special or consequential damages as a result of using this product 2004 Yamatake Corporation ALL RIGHTS RESERVED The pF logo is a trademark of Yamatake Corporation Micro Flow Sensor and MPC are trademarks of Yamatake Corporation N SAFETY PRECAUTIONS J B About Icons The safety precautions described in this manual are indicated by various icons Please be sure you read and understand the icons and their meanings described below before reading the rest of the manual Safety precautions are intended to ensure the safe and correct use of this prod uct to prevent injury to the operator and others and to prevent damage to proper ty Be sure to observe these safety precautions Warnings are indicated when mishandling this AN WAR N N G product might result in death or serious injury Cautions are indicated when mishandling this AN CAUTION product might result in minor injury to the user or only physical damage to the product B Examples AN Use caution when handling the product S The indicated action is prohibited Q Be sure to follow the indicated instructions WARNING Never allow gases that are within explosive limits to pass through this controller Do
26. ation mode display Instantaneous 88 flowrate Hh Jj b Operation mode gggg Integrated DISP key flowrate display Integrated flowrat huoc S or more Integrated flowrate a Lights posee lt key 3 s or more Parameter setup display Advanced BrFHS operation Mii aped Setting value H 88 Function setup display Y DISP key lt key 8 s or more Item Setting value GEBE BBRB lt key 8 s or more DISP key Multi setting flowrate display Setting flowrate No E f SP No D J eJ EYL B Setting flowrate SP value g ggg Valve drive output display Instantaneous 8g flowrate J g Valve drive output 588 E D CJ L Blinking DISP key 5 1 Chapter 5 ADVANCED OPERATION 5 1 Function Setup Follow the procedure below to set the functions such as event output type and external switch input assignments 5 2 1 Press the DISP key to display the integrated flowrate value gt gt L lamp lights 2 Keep the lt key pressed for 3 seconds or more n rin 1 gt gt 71 is indicated on the upper display Parameter setup mode 3 Keep the lt key pressed for 3 seconds or more gt gt The item No Z is indicated on the upper display and the function setup mode is entered 4 Press the A key or V key to select the target setup item No and then pr
27. d COR other than flowrate setting are locked All settings locked Operating mode selection by key operation is disabled Operating mode selection by key operation is enabled Digital setup set by key operation or RS 485 communications Analog setup set by external analog voltage input Number of SPs 1 37 2 only Number of SPs 2 52 8 SP 0 Number of SPs 3 5 SP 80t0 5 ope 2 Number of SPs 4 5 5 to ope 3 0 to 5V input 1 to 5V input 0 to 5V output 1 to 5V output Not used OFF at all times ON when alarm occurred Integration pulse output On when PV is in flowrate OK judgement range ON in control mode ON in fully open mode ON in control mode or fully open mode ON in fully closed mode Instantaneous PV upper limit event Instantaneous PV lower limit event 1 10 Instantaneous PV lower limit event 2 11 Integrated flowrate event 1 to 11 Reverse output of 1 to 11 At no events ON At event occurred OFF The key lock can be canceled even while it is enabled iat is indicated on the display during the key locked setting The operating mode fully closed control fully open by key operation is selectable See 4 3 Selecting the Operating Mode page 4 6 Flowrate OK judgment range upper lower limit event flowrate integrated event flowrate and event output delay time are set in the para
28. displayed only when the multi setting 1 to 3 is selected at flowrate setup number selection 4 in function setup For details on function setup method refer to gt Chapter 5 ADVANCED OPERATION 5b fno key is pressed while the multi setting flowrate is displayed the display will automatically return to the instantaneous flowrate display after approximately 10 seconds instantaneous flowrate display setting flowrate display When the power is turned ON the instantaneous flowrate value is indicated on the upper display and the setting flowrate value is indicated on the lower display The number of effective digits which are displayed differs according to the flowrate range The operating mode is also indicated on the upper display when the operating mode is changed For details refer to CF 4 3 Selecting the Operating Mode page 4 6 4 1 Chapter 4 BASIC OPERATION 4 2 Operating mode display instantaneous flowrate display When the DISP key is pressed for less than 1 second while the instantaneous flowrate is displayed the upper display maintains the instantaneous flowrate and the lower display indicates the operation mode The table below shows the display contents to each operation mode For the operating mode selection method refer to gt 4 3 Selecting the Operation Mode page 4 6 If no key is pressed while the operation mode is displayed the display will automatically return to the insta
29. ds 6 1 Chapter 6 TROUBLESHOOTING B Other troubles Error Cause Countermeasure Flowrate display does not become zero even in spite of an actual zero flowrate Display does not become OFF even if the valve is fully closed Flowrate does not stabilize Poor accuracy Zero point shift due to the influence of pressure Gas type setup is incorrect Condensation on sensor Foreign object attached to sensor Operation differential pressure range is exceeded Large inlet pressure fluctuations Regulator interference Large pressure loss between regulator and this device Large fluctuation in inlet pressure according to flowrate Temperature reference does not match the reference flowmeter Regulator is vibrating slightly Foreign object attached to sensor Adjust the inlet pressure setting function setup Z amp with the actual inlet pressure used or use the PV forced zero function function setup 24 Adjust the gas type setting function setup amp with the actual gas used Insert a mist trap upstream Request for repair service Reduce the inlet pressure Install a regulator upstream Change the regulator pressure setting or apply the PV filter function setup Z3 Change the pipe bigger diameter Adjust the temperature reference It can be changed in the function setup 5 Change the regulator pressure setting
30. duction oorr rrr RR Rh mRh RR ET hm tnm 1 1 NH F nctioliSs 9 perorUV ex NODE E EE EE Sm cel AE T ere 1 1 B Model selection guide eee III 1 4 Chapter 2 NAMES AND FUNCTIONS OF PARTS Chapter 3 MOUNTING AND WIRING B Mounting e III III hh 3 2 B Wiring xL ERE RS E RI baddest REEERIEEE ELSE 3 6 Chapter 4 BASIC OPERATION 4 1 Switching Displays ee III Ime 4 1 4 2 Setting the Flowrate eem 4 3 B Procedure for changing flowrate in digital setting 4 3 B Procedure for changing flowrate in analog setting a model with analog input output function eene 4 5 4 3 Selecting the Operating Mode sssssssssssesesesessssseeeeesessese 4 6 Chapter 5 ADVANCED OPERATION 5 1 Function Setup ee eee cece cece cece cece cence ence enhn 5 2 M Function setup item list eee 5 3 5 2 Parameter Setup cece cece cece reece cere teen eee e ene nnn nnn 5 6 Chapter 6 TROUBLESHOOTING B Alarm code display cece eee e reer III 6 1 BH Other troubl6S e x y norce nieni RT E RR FIR RARIOR SURE aes 6 2 Chapter 7 SPECIFICATIONS B Specifications eee III 7 1 B Relationship between flowrate and differential pressure with valve fully opend in air een RBRRReee 7 6 vi Conventions Used in This Manual The following conventions are used in this manual CJ Handling Precautions gt gt O
31. el tighten a mounting bracket screws and turn one more half turn when there is no play between the bracket and panel Excessively tightening the screws might deform the controller case Piping connection When this controller is mounted on a panel use piping which does not give a stress to the controller case during and after the piping work Connect the piping so that the gas flows in the direction from IN to OUT as indicated on the body After connecting piping check for any gas leaks o Handling Precautions When metal piping is directly connected to the piping connection port this controller cannot be mounted on a panel Doing so will deform or damage the case When leak check is performed using leak check liquid ensure to avoid spillage or contact of liquid on to the case electrical wires and connectors Doing so might cause malfunction or faulty operation 3 5 Chapter 3 MOUNTING AND WIRING B Wiring NCAUTION Be sure to turn the power supply source OFF before wiring connection Doing so might cause faulty operation The power supply circuit of this controller and the I O circuit are not isolated each other Therefore ensure that the power supply of this controller is isolated from the power supply for external devices insulate the power supply If a common power supply is used for the controller and the external devices it might cause malfunction or faulty operation Be sure to check that the wirin
32. er to sensor or entering of hydrogen or turning the power OFF then helium gas request for repair service I O correction data error Data corrupted due to electrical noise Request for repair service Sensor calibration data error Data corrupted due to electrical noise Request for repair service User setup data error Power shutoff during writing of data Set data again Handling Precautions The alarm code is displayed only during the instantaneous flowrate operating mode and integrated flowrate are displayed e Fit Valve overheat prevention limit is operated only for the MPC0020 In this case in spite of the selection at amp in the function setup the valve drive current is forcibly limited If this state is continued for 30 minutes or longer the valve becomes fully closed f AZ sensor error occurs the flowrate value will become indefinite Therefore the control flowrate becomes indefinite even if 0 Control continued alarm ignored is selected at amp in the function setup e When 1 Move to fully closed or 2 Move to fully open is selected at Z amp in the function setup the alarm display and the operating mode at alarm occurrence can be maintained even after the cause of alarm is removed When canceling the alarm make the alarm reset operation Canceling the alarm Keep the ENT key pressed while the instantaneous flowrate is displayed The alarm can be cancelled after 3 secon
33. ess the ENT key gt gt The current setting value being indicated on the display blinks 5 Press the A key or V key to display the target setting value and then press the ENT key gt gt The setting value is stored If other items are required to set up return to the step 4 and repeat the procedure Otherwise proceed to the step 6 6 Press the DISP key gt gt The mode is returned to the instantaneous flowrate display Handling Precautions f any operation is not performed for one minute after entering the function setup mode the display automatically returns to the regular display instantaneous flowrate display e fthe DISP key is pressed while the operation in step 5 is performed indicated by blinking display the setting value remains at the previous value without being updated E Function setup item list Chapter 5 ADVANCED OPERATION Display Item Item Description Setup Item and Factory Remarks Description Setting Operating mode selection selection by key dandis Instantaneous flow rate setup method instantaneous SP setup method selec tion Number of instanta neous flowrate setups selection number of SPs selection Input voltage range selection at analog setting Analog SP input range selection Flowrate analog output voltage range selection PV analog output range selection Event output 1 type assignment Event output 2 type assignment Unlocke
34. ey press the ENT key to fix the SP value and switch the display This function is useful when changing the SP value frequently or little by little The factory setting is set to Direct setup function is enabled For the function setup method refer to gt Chapter 5 ADVANCED OPERATION As shown in the following table up to 4 SP values can be switched according to the ON OFF state of the external switch inputs when the 3 Switching of SP No is assigned at the external switch input function assignments and tin the function setup If the number of SPs is two set either one of 4 or to 3 Switching of SP No However in this case the SP No cannot be updated using the A key or V key Only the SP value can be updated External switch input state Input 1 DH T input 2 DI2 SP to be selected o Handling Precautions e fthe DISP key is pressed during the operation on the previous page while the set point is blinking the SP No and SP value cannot be stored and are returned to the previous value When 1 Analog setting is selected at the flowrate setup method selection 23 in the function setup and the operation is carried out using the SP value according to the analog setting voltage the operation to change the SP value and SP No using the A key or V key cannot be accepted If no key is pressed for 10 seconds or more after performing the operation while the mult
35. g is correct before you turn the power ON Incorrect wiring might cause damage or malfunction 3 6 Connector specifications Part No MCVW1 5 9 STF 3 5 Phoenix Contact Mfg Wire type Either of single core wire or stranded wire applicable Compatible cable 0 08 to 1 5mm AWG 28 to 16 Appropriate length of stripped wire 7mm Compatible screw driver Tip size 2 5 x 0 4mm a flat head driver Connector signal names 3 poweReavj Powereavd 1 2 POWER GND Powersupply ground Open collector non insulated output Event output 2 External switch input 1 Switching input OPEN GND External switch input 2 1 AI 1 Analog setting voltage input 1 For the model with analog I O function 2 DA 2 RS 485 communications DA 0 to 5V or 1 to 5V EN EE Ea 2 For the model with RS 485 communication 2 DB 2 RS 485 communications DB function Signal ground is connected with power supply ground inside this device e Wiring Chapter 3 MOUNTING AND WIRING Power supply 24Vdc POWER 24V POWER GND Event output Load 3 Event output 1 Load 4 Event output 2 3 X 8 SIGNAL GND Ed Handling Precautions Be sure that the event output does not exceed the specified output rating of this controller When driving a relay use the relay with a built in diode for coil surge absorption Doing so might cause faulty operation
36. i setting flowrate is displayed on the previous page the display will automatically return to the instantaneous flowrate display Chapter 4 BASIC OPERATION B Procedure for changing flowrate in analog setting a model with analog input output function To change the SP value setting flowrate value using an external setting voltage Analog setting is selected at the flowrate setup method selection 3 in the function setup For the function setup method refer to gt Chapter 5 ADVANCED OPERATION The setting voltage range can be selected at the analog input voltage range selection 725 in the function setup The analog setting voltage value to the SP value can be calculated from the calculation formulas in the following table Voltage range Setting voltage formulas 0 Otosv Setting voltage V Setting flowrate Full scale flowrate X 5 00 i Setting voltage V Setting flowrate Full scale flowrate X 4 00 1 00 Note e When the 1 Function enabled is selected at the analog optional scaling function 2 in the function setup the full scale flowrate at analog setting can be optionally changed In this case the full scale flowrate of analog flowrate output voltage PV output voltage is also changed as same as input voltage The scaling flowrate is set in the parameter setup mode For the function setup and parameter setup method refer to gt Chapter 5 ADVANCED OPERATION o Handling
37. ing mode Contact ON control mode Contact OFF fully closed mode Function disabled Function enabled When the integrated count value reaches the integrated event setting value the valve is fully closed When control is resumed from the fully closed mode the integrated value is automatically reset Function disabled Function enabled Set the alarm flowrate in the parameter setup mode See page 5 7 Not used Only upper limit alarm used Only lower limit alarm used Upper lower limit alarm used Control continued alarm ignored Move to fully closed Move to fully open Slow start disabled to 8 Slow start enabled Alarm output turns ON even if 0 is selected Slow start is enabled when the external contact input turns ON in case of slow start operation switching is selected at Mand f Ur Conversion factor for each gas type set by the user Air nitrogen Argon Carbon dioxide CO If the flowrate range changes due to a change in the gas type the flowrate OK range and flowrate alarm range in the parameter setup must be changed When 0 is selected set the conversion factor in the parameter setup mode Referenced to 20 C 1 atmosphere Referenced to 0 C 1 atmosphere Referenced to 25 C 1 atmosphere Referenced to 35 C 1 atmosphere Chapter 5 ADVANCED OPERATION Display Item Item Description Setup Item and Factory Remar
38. ing so might result in explosion accidents Do not use this controller for gases other than standard compatible gas types nitrogen air argon and carbon dioxide 2M Do not use this controller for medical instruments NCAUTION Prevent foreign matter from entering the controller If the rust water droplet oil mist or dust in the piping flows into the controller measurement error might occur and result in damaging the controller If there is a possibility that are any foreign matter flows into the controller provide a filter or mist trap capable of eliminating more than 0 1p m foreign matter at the upstream and periodically inspect and replace the filter Use this controller within the operating differential pressure range Also do not apply pressure outside the pressure resistance range Doing so might damage this controller This controller is not provided with the capability of completely closing the valve If the valve must be completely closed provide a shutoff valve separately When an external valve is closed must make the valve standby by fully closing with either of the following methods Make the flowrate to zero Set the operation mode to the fully closed mode If this valve is maintained in control mode despite of closing the external shutoff valve zero flowrate large excess flowrate will instantly flow when the external shutoff valve is opened In the case of the MPC0020 if the external
39. ks Description Setting Inlet pressure 0to 0 1MPa The accuracy drift caused by the adjustment 0 05 to 0 15MPa influence of pressure can be 0 15 to 0 25MPa compensated by adjusting the inlet 0 25 to 0 35MPa pressure setting to the actual inlet 0 35 to 0 45MPa pressure 0 45 to 0 5MPa Function disabled Function enabled N Instantaneous flowrate can be controlled by instantaneous SP being change blinking If the PV filter is used in a 2 or 3 setting the operation differential pressure must be lower than the standard differential pressure Do not change the setting under the control Instantaneous flowrate direct setup function switching PV filter Without filter Sampling 2 times moving average Sampling 4 times moving average Sampling 8 times moving average oj akoONM O Analog optional Function disabled scaling function Function enabled The flowrate at analog input output 100 5V can be optionally set The flowrate is set in parameter setup mode See page 5 7 for details PV forced zero Function disabled function Function enabled When the setting flowrate is zero or when the valve fully closed mode is entered the PV is forcibly made to zero after delay time The shifting of PV by influence of pressure can be cancelled The delay time is set in the parameter setup mode Station address 0 Communications setting function disabled 1 to 127 Station address
40. meter setup mode See 5 2 Parameter setup page 5 7 for the details Note the delay time cannot be set to integration pulse output 9 Events are outputted even in fully closed operation mode 10 Events are not outputted in fully closed operation mode 1 to 11 Always OFF during power supply OFF 5 3 Chapter 5 ADVANCED OPERATION Display Item External switch input 1 function assignment External switch input 2 function assignment Valve automatic shut off when the integration event occurred Resetting the integrated value at start of control Flowrate alarm setup type Operation selection at alarm occurrence Slow start setup Gas type selection Flowrate display 5 4 0 1 equivalent to approx 1 to 6 seconds settling time 0 Item Description Setup Item and Factory Remarks Description Setting To select an SP No of 3 or more setting assign 3 both the 1 and Z f The Z3 analog digital setting is reversed when the contact is ON Slow start ON must be selected in 1 5 6 8 When the valve fully closed input and the valve fully open input are put in at the same time by two contact the both inputs are disabled Not used Reset integration Stop integration count operation Switching of SP No Switching of flowrate setup T method Valve fully closed Valve fully open Switching of slow start operation Switching of operat
41. ntaneous flowrate display after approximately 10 seconds Fully closed mode Contro mode o Fully open mode FU Integrated flowrate display When the DISP key is pressed while the operation mode is displayed the L lamp lights and the integrated flowrate value is indicated on the upper display and lower display For instance if the integrated flowrate is 1 234 567 8L the 1234 is indicated on the upper display and the 567 8 is indicated on the lower display Integrated flowrate reset operation Keep the ENT key pressed for 3 seconds or more while the integrated flowrate is displayed Valve drive output display instantaneous flowrate display When the V key is pressed for 3 seconds or more while the integrated flowrate is displayed the valve drive output value indication range 0 0 to 100 0 is indicated on the lower display The instantaneous flowrate is indicated on the upper display In order to distinguish from other indication the decimal point indication blinks while the valve drive output is displayed Multi setting flowrate display only when the multi setting is enabled When the DISP key is pressed for one second or more while the instantaneous flowrate display the setting flowrate number SP No currently being selected is indicated on the upper display and the setting flowrate value SP value is indicated on the lower display If no key is pressed for 10 seconds or more
42. ntrol is started or when the flowrate setting value is changed can be suppressed The control speed can be changed in eight stages within the range from about to 6 seconds 1 1 Chapter 1 INTRODUCTION Flowrate integration function The fowrate can be integrated up to eight digits 99 999 999 count The display is switched in four digits at a time MPC9500 0 01L in unit MPC0002 0005 0 1L in unit MPCO0020 1L in unit The count can be reset by key operation or external switching input Integration start stop reset can be remote controlled by external switching input After a reset by key operation the integration calculation is started automatically However if a reset contact ON is carried out by external switching input integration is resumed by the contact turning OFF Valve drive output display The valve drive output value can be displayed in the unit of 0 0 to 100 096 The increase or decrease of supply pressure and the choking of piping can be detected Alarm display output shut off The flowrate deviation alarm can be output by detecting the deviation between setting flowrate and control flowrate The alarm judgment delay time can also be set When a flowrate alarm occurs or an alarm occurs during controller self diagnostics the event signal is output the valve can be forcibly fully closed or fully opened at your choise also Event lamp light up output Two of the following event types can be output
43. off valve is opened In the case of the MPCO020 the external shutoff valve is closed for more than 5 minutes under control mode or valve forced fully open the valve over heat limit Z1 operated and the valve driving current is forcibly limited If this status exists for more than 30 minutes the valve is forced to full close condition When this controller is mounted on a panel use piping which does not give stress to the controller case during and after the piping work If a metal piping is directly connected to the pipe connection port of this controller the case might be deformed or damaged Do not allow lead clippings chips or water to enter this controller case Failure to do so might cause malfunction or faulty operation The part between the power supply circuit of this controller and the 1 O circuit is not isolated Therefore ensure that the power supply of this controller is isolated from the power supply for external devices insulate the power supply If a common power supply is used for the controller and the external devices it might cause malfunction or faulty operation Chapter 3 MOUNTING AND WIRING NCAUTION For the model with analog I O function do not apply a negative voltage or large voltage more than 5V to the analog setting input terminal Doing so might cause malfunction or faulty operation This device is a precision instrument Do not drop it nor subject it to shock Doing so might damage the device
44. on and easy mounting can be realized in good harmony when replacing from a float type flow meter In addition the automatic control of mass flow rate and remote flow setting change can be performed There is almost no influence of temperature and pressure fluctuations by integrating a uF sensor A wide variety of functions are provided as a standard function to respond to the various needs of the users In case of a float type flow meter the pressure and temperature compensation is inevitable In addition if the design conditions gas specific gravity secondary back pressure etc are different from the conditions for use the reading value is required to convert by a specific calculation formula However these inconvenient operation is no more required with the mass flow control B Functions Multi setup function Up to four preset flowrate settings can be instantaneously switched to by key operation or external switching input Gas type switching function The gas type to be used can be selected from the standard compatible gases by key operation Gas type setting function The user can set any gas type conversion factors to accommodate the gases other than standard compatible gases or mixed gases Valve forced open close function selecting the operation mode The valve can be forcibly fully opened or fully closed by key operation or external switching input Slow start function Sudden changes in the control flowrate when co
45. rnal setup voltage input only for the setup model with analog I O function 3 Loader communication 4 RS 485 communications only for the model RS 485 communications function Setup input voltage range 0 to 5Vdc 1 to 5Vdc selectable by function setup Input impedance 1MQ 10 only for the model with analog I O function Flowrate Display method 7 segment LED 8 digits display For the instantaneous flowrate display 4 digits and for the setting flowrate display 4 digits Indication accuracy 2 FS 1 digit at standard temperature and differential pressure Integra 0 00 to 999 999 99L 0 0 to 9 999 999 9L function Data backup timing 1 At each 5L count 1 At each 20L count 2 At each after 1 hour from the previous backup Flowrate 0 to full scale flowrate scaling available output Standard output voltage range 0 to 5Vdc 1 to 5Vdc selectable by function setup 7 2 MPC0005 MPC0020 Proportional solenoid valve Normally closed when de energized N C 5 00 L min standard 20 0 L min standard Nitrogen air argon carbon dioxide CO3 Note The gas must be a dry gas not containing corrosive components chlorine sulfur acid The gas must also be a clean gas not containing dust or oil mist 2 to 100 FS 1 Within 1 0s typ to set point 2 FS 2 FS max at standard temperature and differential pressure 1 FS max Within 0 1 FS C 0 056 FS F 0 2 FS max 0 2 FS max 0 3 FS max 0 2 FS max
46. sed when switchin value drive output parameter setup values DISP key When Swicang cm function setup values the details of display pon 902929 9 O Operation lamp L Indicates that the integrated flowrate is v Sa bes 4 4 az bill Flashes when an integration event occurs 7 OK Lights when the control flowrate is within the setting value allowable range lt V A keys Flashes when the operating mode is valve Used when incrementing decrementing fully open l the digit or moving to a desired digit SP1 to SP3 The lamp corresponding to the SP No which is used at multi setup is lit EV1 EV2 Lights when the event output is ON ENT key Used when setting the SP value and storing the value It also can be used for the integrated flowrate resetting and alarm resetting Note The definition of the terms used in this manual is as follows SP Set Point Set flowrate value PV Process Variable Instantaneous flowrate value control flowrate Operation mode 3 mode of valve fully closed valve control valve fully open Rear view Loader jack Connects to a personal computer by using a dedicated loader cable sold separately Pipe connection outlet port This is the out flow side port Connector Pipe connection inlet port This is the in flow side port 68 29S pe Zl QSee2oo2eaQ
47. shutoff valve is closed for more than 5 minutes under control mode or valve forced fully open the valve over heat limit AL7 operated and the valve driving current is forcibly limited If this status exists for more than 30 minutes the valve is forced to full close condition When this controller is mounted on a panel use piping which does not give stress to the controller case during and after the piping work If a metal piping is directly connected to the pipe connection port of this controller the case might be deformed or damaged NCAUTION The power supply circuit of this controller and the I O circuit are not isolated each other Therefore ensure that the power supply of this controller is isolated from the power supply for external devices insulate the power supply If a common power supply is used for the controller and the external devices it might cause malfunction or faulty operation Do not allow lead clippings chips or water to enter this controller case Failure to do so might cause malfunction or faulty operation For the model with analog I O function do not apply a negative voltage or large voltage more than 5V to the analog setting input terminal Doing so might cause malfunction or faulty operation This device is a precision instrument Do not drop it nor subject it to shock Doing so might damage the device Be sure to check that the wiring is correct before you turn the power
48. t The setting value currently being indicated on the lower display blinks 4 Press the A key or V key to select the target setting value You can move to the digit to be changed by pressing the key 5 When the target setting value is displayed press the ENT key to fix the setting value gt gt The setting value is stored If other items are required to set up return to the step 3 and repeat the procedure Otherwise proceed to the step 6 6 Press the DISP key gt gt The mode is returned to the instantaneous flowrate display 1 Handling Precautions 5 6 f you do nothing for one minute after entering the parameter setup mode the display automatically returns to the regular instantaneous PV display f you press the DISP key without pressing the ENT key after carrying out the operation in step 5 the setting remains at the previous value without being updated Chapter 5 ADVANCED OPERATION Parameter setup item list o Display Description Factory Setting Range Referential Remarks Setting function setup Flowrate OK 2 FS 0 5 to 100 FS judgment range 11 11 Flowrate OK judgment hysteresis D upper limit alarm Flowrate deviation upper limit alarm hysteresis Hi Flowrate deviation 1 FS 0 5 to 100 FS 11 11 10 FS 0 5 to 100 FS 11 2 FS 0 5 to 100 FS 11 a Flowrate deviation 1026 FS 0 5 to 100 FS 2 3 lower limi
49. t alarm 11 11 Flowrate deviation lower limit alarm hysteresis Flowrate deviation alarm judgment delay time Event output 1 delay time Event output 2 delay time F User setup conversion factor Event output 1 upper lower limit flowrate setup Event output 2 upper lower limit flowrate setup Analog optional scaling Integrated event flowrate lower 4 digits Integrated event flowrate upper 4 digits PV forced zero function 0 5 to 100 FS 1 0 to 999 9s 0 0 to 999 9s 0 0 to 999 9s 1 000 0 100 to 9 999 0 FS 0 to 100 FS 11 0 FS 0 to 100 FS 11 100 FS 10 to 100 FS 11 0 to 9999 Ed 0 to 9999 0 0 to 999 9s SP upper limit 100 FS 10 to 100 FS flowrate 11 11 SP lower limit flowrate 0 FS 10 to 100 FS 11 1 Operation during judgment of flowrate OK GHIS SP I ON OK OFF tf __ Br hd Gens BAIS PV Unit L min standard Even if the delay time is set it is disabled during selection of integration pulse output Unit L min standard The flowrate of analog input output 100 5V is set Unit L min standard Unit L min standard When the upper limit flowrate is set lower than the lower limit flowrate the upper limit flowrate is prioritized than the lower 2 Operation during judgment of flowrate deviation upper and lower limit alarms ON ALM les Jf OFF 1 A La
50. the external switch input function assignment amp amp and in the function setup the operating mode selection valve fully closed fully open by the ON OFF operation of external switch inputs can be performed For the function setup method refer to gt Chapter 5 ADVANCED OPERATION When each operation mode is entered ever while the instantaneous flowrate is displayed the operation mode is indicated on the upper display as shown below The OK lamp blinks in fully open mode Table of operation mode displays while the instantaneous flowrate is displayed Fully closed mode Off 57 7 is displayed at all times after flowrate zero is confirmed Control mode On or Off 5 1 is displayed for 1 second when the control mode is entered Fully open mode Blinking Fu is displayed for 1 second when the fully open mode is entered 4 6 Chapter 5 ADVANCED OPERATION When the following operation is performed while the integrated flowrate is displayed the parameter setup mode and function setup mode are entered and each setting value can be changed Power ON Instantaneous owrate display 7 DISP key 1 s or more Instantaneous J j 88 Basic flowrate CELO C DISP key or no key is pressed for Ae 10 s or more operation Setting flowrate gp B No key i d ford O onconde or DISP key less than 1 s more Oper
51. while the multi setting flowrate is displayed the display will automatically return to the instantaneous flowrate display Chapter 4 BASIC OPERATION 4 2 Setting the Flowrate B Procedure for changing flowrate in digital setting Single SP setting mode number of SPs 1 according to function setup Z Follow the procedure below to change the SP value setting flowrate 1 Press the DISP key gt gt The instantaneous flowrate value and SP value are displayed Same as the display at power supply ON 2 Press the A key or V key gt gt The digit currently being changed blinks You can move to the digit to be changed by pressing the key 3 When the target value is displayed press the ENT key gt gt The SP value is fixed At this point the SP value is updated Note Direct setup function e The control can be executed using the SP value currently being changed indicated by blinking display when the Direct setup function is enabled is selected at direct setup function switching 2 in the function setup The ENT key does not need to be pressed to fix the SP value However to switch the display by pressing the DISP key press the ENT key to fix the SP value and switch the display This function is useful when changing the SP value little by little The factory setting is set to Direct setup function is enabled For the function setup method refer to gt Chapter 5 ADVANCED OPERATION
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