PZ 70E User Manual E-610 LVPZT Controller / Amplifier
Contents
1. Wwww pi ws E 610 PZ 70E Release 6 1 1 Page 20 Electronics Piezo Nano Positioning PI G Electronics The basic circuit design of the amplifier and controller modules is shown in the drawings on the following pages Input signals at main connector pin 10c and the signal from the external DC offset potentiometer are combined in the preamplifier stage Depending on the model configuration the resultant signal will be used either as input for the amplifier or as input signal for the position servo control circuit 6 1 Block Diagram E 610 LO E 610 S0 www pi ws For more detailed information on the E 801 sensor processing submodules see the E 801 User manual For more detailed information on the E 802 servo control submodules see the E 802 User Manual E 610 PZ 70E Release 6 1 1 Page 21 Piezo Nano Positioning PI Electronics P406 Zero gt LVDT a F wi ee E 802 seryo C ontrol 7 oe pe EE z a i Notch Submedule H i i Sensor 5 Filter Ba TOF C R35 gt D yee fi ara de fault T varen 2e Sensor Excitation O Domis l ve i and F Target Value l c o Readout Su bmedule z gt i S 4 a 44nc22c Aago External Servo ON OFF pin 28a is only 30c i D effective if J1 J2 are properly set In older E a D F 802 versions 28a switches notch filter and Sarco Monker a e 3 i slew rate limiter as well as servo control Display g 24a__ F z2. 12 General DESCHOTON ccetesiscccivean chebick i 4 121 SeN COMO syrena eatin has eden dee eae an a 4 12 gt FNODIIGAUIONS sine havnt tanh a naan eaahe namie 4 123 Computer Control amp Hyperbit ee ceccccccscssssseeeeeeeeeeeaeeeees 5 13 Saey FOCAL O NS Scat cies tee ual rated eeon eae eau tect 5 Model Survey 7 PA Main Modules eera ER 7 22 included Connector SClar 8 Operating Modes 9 3 1 Manual Offset Operation nnnn0nnnonaannnnennnnnennnnnennnnnnnnnnnsnrrenenne 9 32 EXiGMmalODeratio Maa ee E EN pean enone eens 9 3 3 External Operation with DC Offset essssseesnneneeernrrreeernrenne 10 3 4 Open Loop Voltage Controlled Operation cccccccceeeeees 10 3 5 Closed Loop Position Controlled Operation c 0000 10 Installation and Operation 12 AA General INSIUCHONS srren a AAN 12 42 E 610 00 Amplifier Modules ccccccsssscccsseeeceseeeeseeeeeseaeees 13 43 E 610 Models with Servo Control ccccceccceesseeeeeeeeeeeeaeees 13 ASAl System SOU Ds c astentneastsrcntensts a cthoue aidalnoasiteticousaiesbastenicetans 14 432 User Electronics and Sensor Monitor Signal ccccccc 15 E 610 Calibration 16 5 1 Equipment Needed for Calibration ccccccesseeeeeeeneeeeeeeaees 16 52 hE PAalallONS an e E O E 16 53 LVDT Mechanical Zero Point Adjustment cccceeeeee eee 17 54 Electrical Zero Point Calibration cccccccsese
3. details In position controlled mode it is the output of the P proportional integrated controller that is used as input to the amplifier The piezo position is refined until the final position is reached In this controlled mode the PZT position is directly proportional to the module s input signal while the PZT supply voltage may not be The operating voltage for the PZT must remain in the range from 30 to 130 V If one of these limits is reached and the resulting expansion of the PZT does match that specified by the control signal a TTL signal overflow is output on pin 26a PI s standard calibration procedure assures that the PZT reaches its nominal expansion value when the control input signal is 10 V To enable closed loop mode do both of the following 1 Set jumpers J1 and J2 on the main board to positions 2 3 2 Connect pin 28a to pin 20a c Test GND If pin 28a is not connected then the unit works in voltage controlled open loop mode The notch filter and slew rate limiter are also active Disabling servo mode will not always deactivate them See the E 802 User Manual for details www pi ws E 610 PZ 70E Release 6 1 1 Page 11 Installation and Operation Piezo Nano Positioning PI 4 Installation and Operation 4 1 General Instructions www pi ws Read This Before Operation 4 E 610 modules are OEM amplifiers generating HIGH VOLTAGES for driving LVPZTs The output power may Cau
4. 610 L0 module taking into account some restrictions AGE CONFIGURATION FOR S 226 00 white strain yellow 2 x strain gage on PZT stack 2 x strain gage on PZT stack 2 x resistor in PZT housing 2 x resistor on controller board GE CONFIGURATION FOR SERIES 2 x strain gage on PZT stack 2 x resistor in PZT housing Fig 11 Strain gauge wiring variants Wwww pi ws E 610 PZ 70E Release 6 1 1 Page 34 Piezo Nano Positioning PI Appendix Piezoelectric Positioning Topics 10 Appendix Piezoelectric Positioning Topics 10 1 Lifetime of PICMA Actuators The following factors which can have an impact on the actuator lifetime must be taken into consideration Applied voltage temperature and relative humidity The effect of each individual factor on the lifetime can be read off the diagrams shown below The lifetime calculated in hours simply results as the product of all three values read off the diagrams The impact that the applied voltage has is particularly important With decreasing voltage the lifetime increases exponentially This must always be taken into consideration in an application The recommended maximum range of the control input voltage for E 610 therefore Is 2 to 12 V resulting in a piezo voltage range of 20 to 120 V A control input range of 3 to 13 V Is possible results in 30 to 130 V piezo voltage but will reduce the actuator lifetime accordingly Lifetime Factor Au BO Piezo Voltag
5. 72E Depending on the sensor type different sensor excitation methods are used LVDT require an AC supply and readout while SGS sensors can be excited with either AC or DC signals but with different performance In general strain gauges should be used with DC signals for best performance although in a few applications AC supplied strain gauges will perform with acceptable accuracy Using SGS sensors with an AC supply the impact of cable length arrangement and other properties can become a major source of limited sensor resolution Due to these reasons we recommend operating SGS sensors with DC voltages i e with the E 610 model equipped with the appropriate sensor submodule Wwww pi ws E 610 PZ 70E Release 6 1 1 Page 37
6. LVDT sensors adjust the sensor mechanical zero position LVDT core position For details see the section 5 3 on page 17 7 Set the module to voltage controlled servo OFF open loop J1 J2 in positions 1 2 8 Now exercise the PZT over the nominal expansion range by applying analog signals 0 10 V to pin 10c Then set the PZT to 0 with O V at 10c 9 Read the voltage at pin 22a sensor monitor Adjust the P406 zero potentiometer so that the reading is in the range of 0 to 1 V 1 V is recommended for increased actuator lifetime The zero point is now close enough to allow going into servo mode 10 Set the unit to servo ON 11 Again using the zero potentiometer adjust until the PZT monitor out or the PZT voltage itself is O V Because servo control is now active the sensor monitor signal will not change the servo controller will cause PZT actuator motion to maintain the position 5 5 Static Gain Adjustment www pi ws It should only be necessary to readjust the static gain if system components have been exchanged or altered Before doing so reading the detailed description of the sensor processing system is recommended E 801 Sensor Submodule User Manual The objective of static gain adjustment is to ensure that the PZT actuator expands to its nominal expansion when a control E 610 PZ 70E Release 6 1 1 Page 18 PI E 610 Calibration Piezo Nano Positioning signal input of 10 V is applied amplifier module DC
7. at 30 kHz BNC E 610 00 only Panel mount 2 conductor LEMO ERN 00 250 CTL included for user installation EURO board 160 x 100 x 35 6 mm 32 pin DIN 41612 D Eurocard connector 2 to 12 V is the recommended control input range resulting in 20 to 120 V piezo output voltage 3 to 13 V control input are possible and will result in 30 to 130 V output voltage but working with increased output voltage will decrease actuator lifetime See Lifetime of PICMA Actuators on p 35 for details Power Requirements 15W Max power consumption Operating voltage range 12 to 30 VDC max ripple 50 mV pp 15 V recommended Operating current 2 A max Front Panel LEDs Green Power on Yellow Overflow PZT out gt 130 V or lt 30 V E 610 PZ 70E Release 6 1 1 Page 26 Technical Data Amplitude peak peak Piezo Nano Positioning PI Frequency Hz Fig 8 E 610 open loop frequency response with various PZT loads Values shown are capacitance in uF 7 2 LVDT Sensor Processing E 610 L0O only Implemented on E 801 2x sensor processing submodule see E 801 User Manual for more details Sensor type sensor excitation Preamplifier gain Sensor monitor output Display output Sensor connector not on board LVDT Inductive probes 10 Vpp standard max 25 Vpp 20 to 20 000 Hz 50 mA 10 100 selectable 0 to 10 V for nominal expansion 0 to max 2 V adjustable Panel mount 4 conductor LEMO ERA 0
8. external operation the offset potentiometer should be deactivated jumper J3 and the target voltage or position is controlled by an external DC signal of 2 to 12 V Wwww pi ws E 610 PZ 70E Release 6 1 1 Page 9 Piezo Nano Positioning PI Operating Modes See Computer Control amp Hyperbit p 5 for information on PI support of external operation with a DAC card in a PC 3 3 External Operation with DCG Offset For external operation with offset the offset potentiometer or equivalent is activated and attached with jumper J3 in position 1 2 and an external DC signal is used on Control IN The position of the potentiometer wiper voltage is added to the analog control input signal The result must be in the 2 to 12 V range With for example an offset setting of 5 V the control input could range from 7 to 7 V 3 4 Qpen Loop Voltage Controlled Operation In open loop mode the position servo control circuit is bypassed and the system works like an amplifier In this mode the PZT drive voltage is proportional to the control signal input in combination with the DC offset potentiometer if installed and activated The sensor electronics works independently and outputs the current piezo position on sensor monitor even though that value is not used internally in open loop mode provided a sensor is connected to the appropriate main connector pins The PZT output voltage can be monitored either directly
9. in parallel with the PZT or on main connector pin 8a which carries a high impedance output of 1 100th the voltage of the PZT All modules have the analog input on pin 10c With DC offset at zero the nominal input voltage range is 2 to 12 V for a 20 to 120 V output voltage range lf the input signal available is bipolar set the external DC offset potentiometer or an equivalent divider to an appropriate setting When set for example to provide a 50 V output with 0 V input a control input in the 5 to 5 V range will cover an output range of 0 to 100 V 3 5 Closed Loop Position Gontrolled Operation All E 610 models except the E 610 00 have position sensor processing electronics for closed loop operation Closed loop Wwww pi ws E 610 PZ 70E Release 6 1 1 Page 10 Piezo Nano Positioning PI Operating Modes operation differs from open loop operation in that the analog control input plus any DC offset is interpreted as a target position rather than a target voltage Depending on the sensor type different sensor electronics are required LVDT sensors require AC excitation and the sensor processing add on board E 801 2x is installed Strain gauge sensors work preferably with DC signals and use the E 801 1x add on board instead Closed loop operation offers both drift free and hysteresis free positioning The servo control electronics is implemented on a plug in submodule the E 802 See the E 802 User Manual for
10. offset set to 0 The zero point must be appropriately set before the static gain adjustment can be performed This is an iterative process The static gain adjustment procedure is as follows location of adjustment elements on the submodules is described in the E 801 Sensor Submodule and the E 802 Servo Submodule User Manuals location of mainboard elements in Section 6 3 beginning on p 23 1 Before powering up the system make sure the PZT actuator is mounted in the same way and with the same load as during normal operations in the application 2 Mount an external gauge to measure the PZT displacement with PZT power amplifier powered down the external gauge should read Q if it does not note the offset and subtract it from subsequent readings 3 Setservo mode to SERVO OFF J1 and J2 in pos 1 2 4 Make sure the DC Offset potentiometer if installed and activated is still set to zero 5 Set control input to 0 V 6 Connect 15 V and GND to the E 610 module NOTE For starting the module a current of at least 1500 mA is required otherwise the internal oscillator will not start Only 400 mA are required after start up 7 Scan the control input voltage from 0 V to 10 V and read the PZT displacement using the external gauge With 10 V the external gauge should show the PZT at about nominal expansion Adjust with the sensor gain trim potentiometer see Fig 3 and component maps beginning on page 23 Sensor gain
11. point calibration has the goal of making the point of zero expansion coincide with the point of zero control input voltage There might be some small deviation of the electrical zero point caused by thermal drift or changes in mechanical loading Let the system warm up for several minutes before setting the zero point If the electrical zero point is adjusted properly the full output voltage range of the amplifier can be used and only a small offset is required to get a zero reading This prevents overflow conditions from arising due to improper match of actual and desired expansion windows The adjustment procedure is as follows see section On Board Components on p 23 for location of adjustment elements 1 Before powering up the system make sure the PZT actuator is mounted in the same way and with the same load as during normal operations in the application E 610 PZ 70E Release 6 1 1 Page 17 E 610 Calibration Piezo Nano Positioning PI 2 Make sure that jumper J4 is correctly set 1 2 for SGS 2 3 for LVDT 3 Make sure the control input is O V 4 lf there is a DC Offset potentiometer installed and activated make sure it is in the O V position usually full counterclockwise 5 Connect 15 V and GND to the E 610 module Note that for starting the module a current of at least 1500 mA is required otherwise the internal oscillator will not start Only 400 mA are required after start up 6 Ifyou use your own
12. servo systems as well as motion control concepts piezoelectric drives and applicable safety procedures The manual describes the physical specifications and dimensions of the E 610 LVPZT Controller Amplifier as well as the installation procedures which are required to put the associated motion system into operation This document is available as PDF file Updated releases are available via FTP or email contact your Physik Instrumente sales engineer or write info pi ws Conventions The notes and symbols used in this manual have the following meanings Indicates the presence of high voltage gt 50 V Calls attention to b a procedure practice or condition which if not correctly performed or adhered to could result in injury or death CAUTION Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in damage to equipment NOTE Provides additional information or application hints Related Documents The hardware components which might be delivered with E 610 LVPZT Controller Amplifiers are described in their own manuals Updated releases are available via FTP or email contact your Physik Instrumente sales engineer or write info pi ws E 801 User Manual PZ117E E 802 User Manual PZ150E The E 610 version with capacitive sensor processing is described in its own manual PZ 72E Contents Introduction 3 tE a 1101 8 i USE ere eer a Oe E en nn 3
13. strain gauge sensors SGS The E 610 C0 the capacitive sensor version is described ina separate manual E 610 PZ 70E Release 6 1 1 Page 7 Piezo Nano Positioning PI Model Survey 2 2 Included Gonnector Set Included with the E 610 module is a connector set designed to facilitate operating it in a user provided housing This set includes the following items m Solderable socket matching the 32 pin main connector designed for installation completely inside the user housing Because the connector standard includes types with more pins the 32 pins used are all carry even number designations and are in rows a and c m Panel mount coaxial socket Lemo ERN 00 250 CTL designed for bringing the PZT drive voltage lines on the 32 pin main connector outside the user housing and interfacing with PI actuators and stages m 4 conductor panel mount socket Lemo ERA 0S 304 CLL designed for bringing the sensor excitation and readout lines on the main connector outside the user housing and interfacing with PI actuators and stages not included with amplifier only version E 610 00 i G Fig 1 Included connectors See LEMO Pin Assignments p 32 for pinouts www pi ws E 610 PZ 70E Release 6 1 1 Page 8 Piezo Nano Positioning PI Operating Modes Operating Modes All units can be operated as simple power amplifiers i e in voltage controlled mode where the PZT output voltage depends dire
14. 2a amp c oo O The DC offset pot may be missing deactivate with X4 or the Control In signal shorted but not both E 610 PZ 70E Release 6 1 1 Page 30 Piezo Nano Positioning PI Pin Assignments 9 2 32 Pin Main Gonnector Because the DIN 41612 connector standard includes types with more pins the 32 pins of the D version all carry even number designations and are in rows a and c PZT output LEMO a 2 c PZT output center PZT GND LEMO a 4 c PZT GND shield nc a 6 c re Monitor PZT out a 8 c Internal use 100 1 Internal use a 10 c Amplifier input 10 kOhm pot 10 V a 12 c Pot wiper 10 kOhm pot GND amp a 14 c Pot10kOhm GND amp test test GND GND VCC supply a 16 c VCC supply VCC supply a 18 c VCC supply connect to 20c for minimum noise TestGND a 20 c Test GND Sensor monitor a 22 c Sensor monitor GND Test GND Display sensor a 24 c Sensor excitation see wiring adjust diagram 4 line LEMO pin 1 Overflow TTL a 26 c Sensor readout signal see wiring diagram connect to 4 line LEMO pin 2 Servo OFF ON select a 28 c Sensor readout signal see wiring diagram LEMO pin 3 Internal use a 30 c Sensor excitation GND see wiring diagram LEMO pin 4 Protective GND a 32 c_ Protective GND Separate panel mount LEMO socket s are included which can be used to bring the stage actuator connection line outside the user housing and interface to PI actuators stages See Sec
15. 610 00 www pi ws E 610 PZ 70E Release 6 1 1 Page 23 Electronics Positioning pP I Piezo Nano 6 3 2 Component Locations for E 610 LO J4 e90 321 P406 os O O Uf J J2 J3 10 O OC 2 sh We E 802 55 Servo Control SubmModule ooo 0o00 POLLO PS Pa P P3 Pa P1 2000 Q O O O oll o 00o OOO00 OOCO00 O0o00 E 801 20 Submodule for LVDT Processing Fig 6 E 610 L0 layout older equipment may have other submodule versions see the submodule User Manuals for details 6 3 3 Component Locations for E 610 S0O J4 Q Ye OO gi oeg 321 7 P406 E 802 55 Servo Control Subomodule COO009 00000 JOULU PSI P4 P6 P3 pa Pi eee
16. Hazard Electronic components are sensitive to electrostatic electricity Take appropriate electrostatic protection measures when removing modules Equipment Damage Most piezo stages that can be connected to this controller can be damaged or destroyed by uncontrolled oscillation near the mechanical resonant frequency If you observe resonance while configuring your system switch off power to the actuators concerned immediately and check the settings and servo control parameters Wwww pi ws E 610 PZ 70E Release 6 1 1 Page 6 Model Survey Piezo Nano Positioning PI e Model Survey 2 1 Main Module www pi ws E 610 amplifier controllers are designed as EURO board plug in modules which can be installed in a desktop chassis as well as in a 19 rack mount chassis The following different models are available E 610 00 E 610 L0 E 610 S0 Single board LVPZ amplifier module for OEM applications with integrated DC DC power supply This module consists of a mainboard with amplifier power supply and heat sink Single board LVPZT controller module for OEM applications consisting of an amplifier a sensor supply AC excitation and processing circuit including preamplifier demodulator different filters and a proportional integral P I controller for open loop closed loop operation This module is mainly used with LVDT sensors Same main board as E 610 L0 but with a sensor excitation and processing submodule for
17. MA Actuators cccccsseeeeeesseeeeeeeeeees 10 2 Sensors for Low Voltage PZT Translators 008 Piezo Nano Positioning PI Introduction 1 Introduction 1 1 Prescribed Use Based on their design and realization the E 610 LVPZT Controller Amplifiers are intended to drive capacitive loads in the present case piezoceramic actuators The E 610 must not be used for applications other than stated in this manual especially not for driving ohmic resistive or inductive loads E 610s with servo controllers can be operated in closed loop mode using the proper position sensors Appropriate sensors are provided by PI and integrated in the mechanics according to the mechanics product specifications Other sensors may be used as position sensors only with permission of PI Observe the safety precautions given in this User Manual E 610s conform to Measurement Category CAT I and may not be used for Measurement Categories Il Ill or IV Other use of the device i e operation other than instructed in this Manual may affect the safeguards provided E 610s meet the following minimum specifications for operation m Indoor use only Altitude up to 2000 m m Ambient temperature from 5 C to 40 C m Relative humidity up to 80 for temperatures up to 31 C decreasing linearly to 50 relative humidity at 40 C m Line voltage fluctuations of up to 10 of the line voltage m Transient overvoltages as t
18. Overflow o2 L Cortroller out Power Supply HO oe g J2 1 4 J 1 Power Amp 2a amp e ob Pr t r j l Ex Ga KL Ref 10 V e 96a NE IOK i pg 1 PZT DC OFfs et N lage Monitor TEE Pieced 100 1 4a amp c a ma 2c Preamplifier Wake Ha amp e Control input is 10c E 8c 2V AN E Rate Fig 4 E 610 L0 E 610 S0 Note that the control input on pin 10c can be 3 to 13 V which will result in 30 to 130 V output voltage but working with increased output voltage will decrease actuator lifetime See Lifetime of PICMA Actuators on p 35 for details www pi ws E 610 PZ 70E Release 6 1 1 Page 22 Electronics Piezo Nano Positioning PI 6 2 Front Panel The green LED indicates that the module is powered up and in operation The yellow LED lights when an overflow condition occurs i e an attempt to drive the PZT voltage under 30 or over 130 V 6 3 On Board Components 6 3 1 Component Locations for E 6 10 00 il X pee oe if 8 3 P406 P EI EE E E ee EC erm et eer E eae Seer ee 60000 aO000 looaaq UNUSEd socket for servo control submodule 56466 oe eee 3q NS A evaluation suomoduyle S2289 a n S U Fig 5 Component Locations for E
19. PZ 70E User Manual Piezo Nano Positioning PI E 6 1 Lvpzt controller Amplifier Release 6 1 1 Date 2010 02 16 Moving the NanoWorld www pi ws This document describes the following product s E E 610 L0 LVPZT Controller OEM for Inductive Sensors E E 610 S0 LVPZT Controller OEM for Strain Gauge Sensors E E 610 00 LVPZT Amplifier OEM Single channel The E 610 C0 with capacitive sensor electronics is described in its own manual Physik Instrumente PI GmbH amp Co KG Auf der Romerstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 info pi ws www pi ws Declaration of Conformity according to ISO IEC Guide 22 and EN 45014 Physik Instrumente PI GmbH amp Co KG C Manufacturer s Auf der Romerstrasse 1 Address D 76228 Karlsruhe Germany The manufacturer hereby declares that the product Product Name Low Voltage Piezo Amplifier Controller Module Model Numbers E 610 Product Options all conforms to the following EMC Standards and normative documents Electromagnetic Emission EN 61000 6 3 EN 55011 Electromagnetic Immunity EN 61000 6 1 Safety Low Voltage Directive EN 61010 1 Electrical equipment which is intended to be integrated in other electrical equipment only conforms to the cited EMC Standards and normative documents if the user ensures a compliant connection when implementing the total system Possible necessary measur
20. S 304 CLL included for user installation www pi ws E 610 PZ 70E Release 6 1 1 Page 27 Piezo Nano Positioning PI Technical Data 7 2 SGS Sensor Processing E 610 S0O only Implemented on E 801 1x sensor processing submodule see E 801 User Manual for more details Sensor type Strain gauge SGS Sensor excitation 5 VDC adjustable Low pass cut off frequency 300 Hz Selectable 1 kHz 3 kHz Sensor monitor output 0 to 10 V for nominal expansion Display output 0 to max 2 V adjustable Sensor connector not on Panel mount 4 conductor LEMO ERA 0S 304 CLL board included for user installation Wwww pi ws E 610 PZ 70E Release 6 1 1 Page 28 Piezo Nano Positioning PI Dimensions eoe Dimensions 4x M25x6 1807046 4x M25x6 1507045 34 167 4 160 153 67 5 55 88 9 3 907 Fig 9 E 610 00 E 610 S0 and E 610 L0 dimensions in millimeters Wwww pi ws E 610 PZ 70E Release 6 1 1 Page 29 Pin Assignments Piezo Nano Positioning PI 9 Pin Assignments 9 1 System Connection Summary www pi ws For operation at least the following elements must be connected Main Lemo Only for Connector Connector if used ie a 12 30 VDC 18a amp c PZT out 2 a amp c PZT GND 4a amp c 24c 30c GND pin 1 pin 4 closed loop 26c 28c pin 2 pin 3 closed loop Controlin 10e E O DC offset pot 12a 12c amp 14ac 2 E GND 22c 20a amp c 14a amp c Protective GND 3
21. c field then passes through the two secondary windings and induces a voltage in each If the core is moved from the central position one secondary winding receives more magnetic flux than the other thus the induced voltages are different and proportional to the movement LVDT transducers normally operate at 3 to 5 Vrms and at frequencies between 1 and 20 kHz and have a typical current consumption between 10 and 50 mA The output signal from an LVDT can be expressed as a sensitivity in mV output voltage per volts of the supply voltage and per millimeter displacement Typical LVDT output sensitivity is in the range of about 100 to 250 mV V mm E 610 PZ 70E Release 6 1 1 Page 32 Pin Assignments Piezo Nano Positioning PI depending on the type LVDTs have to be used in conjunction with E 610 L0 modules O _ O Q c cC O O O LU Schirm shield rot red a braun brown FFA 0S 304 wei white 6 O o schwarz black d o gelb yellow i 6 orange o Ansicht L tseite Solder side view blau blue gelb yellow Fig 10 Linear Variable Differential Transformer Type SMI and M6DlI 9 4 2 SGS Sensor Description and Wiring www pi ws SGS sensor excitation and signal processing is implemented on an E 801 submodule Consult the E 801 User Manual for details and information on the various E 801 versions in use Strain gauge sensors can be used to measure the expansion of piezo
22. ctly on input control voltage and DC offset potentiometer setting This is also known as open loop or servo off operation Units with servo controller i e all except E 610 00 can also be operated in position controlled mode In position controlled mode the control input plus DC offset is interpreted as a target position and the signal from the position sensor is used as input to a servo control feedback loop Position controlled closed loop mode permits elimination of drift and hysteresis In both open and closed loop modes the units can be operated manually or via an external analog control input voltage or by a combination of the two NOTE Actuator Lifetime The sum of input control voltage and DC offset potentiometer setting should not exceed the 2 to 12 V range In open loop operation 2 to 12 V control input will result in 20 to 120 V piezo output voltage 3 to 13 V control input are possible and will result in 30 to 130 V output voltage but working with increased output voltage will decrease actuator lifetime See Lifetime of PICMA Actuators on p 35 for details 3 1 Manual Offset Operation In manual operation the target voltage or position is controlled manually with an external 10 kQ DC offset potentiometer not included This potentiometer must be connected to pins 12a 10 V 14a GND and the wiper to pin 12c and it must be activated with jumper J3 in position 1 2 3 2 External Operation For
23. e W Fig 12 Interdependency between the mean MTTF of a PICMA actuator and the value of the voltage applied Wwww pi ws E 610 PZ 70E Release 6 1 1 Page 35 Piezo Nano Positioning PI Appendix Piezoelectric Positioning Topics Temperature C Fig 13 Interdependency between the mean MTTF of a PICMA actuator and the ambient temperature 40 60 Rel Humidity Fig 14 Interdependency between the mean MTTF of a PICMA actuator and the relative humidity Example The simple formula MT TF Ay Ar Af provides a quick estimate of the reliability in hours In concrete terms The values for 75 RH Ar 14 100 VDC Ay 75 and 45 C A7 100 result in an approximate MTTF of 105 000 h i e more than 11 years see markings on the diagrams Read the Tutorial Piezoelectrics in Positioning in the PI Catalog for detailed information www pi ws E 610 PZ 70E Release 6 1 1 Page 36 Piezo Nano Positioning PI Appendix Piezoelectric Positioning Topics 10 2 Sensors for Low Voltage PZT Translators Low voltage piezoelectric translators are available with integrated position sensors Most of the piezo driven stages and tip tilt mirror systems are also equipped with internal sensors Three main classes of sensors are used strain gauge sensors SGS linear variable differential transformers LVDT and Capacitive sensors E 610 C0 version for capacitive sensors is described in User Manual PZ
24. eeeeeeeeseeeeeeaeeees 17 55 Static Gain AdjuStME N aienea N 18 56 Dynami Calbralo N essorer r i e 20 Electronics 21 6 1 Block Diagram E 610 L0 E 610 S0 cece eeeeeeeeeeeeee 21 02 FON PANG eona E E 23 10 Contents 6 3 On Board COMPONE NMS sisiran ao E 63 1 Component Locations for E 610 00 ccecceeeseeeeeeees 63 2 Component Locations for E 610 LO ceeeeeeeees 63 3 Component Locations for E 610 S0 cccccceseseeeeeees 634 Adjustment Element cccccccsseeceeceseeesseeeeeseeeeessees 64 SUBMOGUI6 Sicctisoeutaveusndacastasesicicnlcomesedcutes e 64 1 E 802 Position Servo Control Boards ccceceeeees 642 Sensor Excitation and Evaluation c cccsceccececeeeess Technical Data 7 1 Board and Amplifier Section all models 0 72 LVDT Sensor Processing E 610 L0 only c000 73 SGS Sensor Processing E 610 S0 onlly cccceeeee Dimensions Pin Assignments 9 1 System Connection SUMMALY ccccceceseeeeeeseeeeeeeenees 92 22 PN Main Connectoren a nanan 93 LEMO Pin Assignments sacisnncatsececee ses eoriuisht ec eee ce alma 94 Sensor Wiring Information ccccceecccesseeeeesseeeeeeseeees 941 LVDT Sensor Description WiIring cccccccceeeeeeeeeeeees 942 SGS Sensor Description and WIring cccccceesseeeeees Appendix Piezoelectric Positioning Topics 10 1 Lifetime of PIC
25. es YAN o O O O Q O E C ooo 0000 KO j 00000 CO008 32 E 801 10 Submodule for Strain Gauge Processing Fig 7 E 610 S0 layout older equipment may have other submodule versions see the submodule User Manuals for details www pi ws E 610 PZ 70E Release 6 1 1 Page 24 Electronics Piezo Nano Positioning PI 6 3 4 Adjustment Elements J1 amp J2 1 2 both bypass E 802 servo control slew rate limiter and notch filter completely 2 3 both use E 802 J3 1 2 external potentiometer activated 2 3 external potentiometer deactivated J4 1 2 DC sensor excitation SGS sensors only 2 3 AC sensor excitation required for LVDTs 6 4 Submodules Servo control and LVDT SGS sensor evaluation and excitation functions are implemented in plug in submodules E 801 submodules interface to these sensors while E 802 modules perform servo control It should not be necessary to remove or replace the submodules but if you ever do so note that the submodule component sides face each other as shown above 6 4 1 E 802 Position Servo Control Boards The E 802 submodule processes the control signal for the amplifier driving the piezoelectric translators Slew rate limitation notch filter and servo control loop are all implemented on the E 802 The servo loop logic compares the control voltage input target and the sensor signal actual position to generate the amplifier control signal using an analog pr
26. es are installation of the component ina suitable shielded enclosure and usage of suitable connectors sopemer2005 LC feae Karlsruhe Germany Dr Karl Spanner President Physik Instrumente PI GmbH amp Co KG is the owner of the following company names and trademarks PI PIC PICMA PILine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation The following designations are protected company names or registered trademarks of third parties Microsoft Windows LabView The products described in this document are in part protected by the following patents Hyperbit U S Patent 6 950 050 Copyright 1999 2010 by Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual enjoy copyright protection With regard thereto Physik Instrumente PI GmbH amp Co KG reserves all rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source First printing 2010 02 16 Document Number PZ 70E Eco Bro Release 6 1 1 E 610 User _PZ70E611 doc Subject to change without notice This manual is superseded by any new release The newest release is available for download at www pi ws http www pi ws About this Document Users of this Manual This manual is designed to help the reader to install and operate the E 610 LVPZT Controller Amplifier It assumes that the reader has a fundamental understanding of basic
27. ge actuators and controllers if you have more than one It should not be necessary to recalibrate the system unless hardware changes are made It may be necessary to adjust the zero point if operating conditions such as load or temperature change greatly For details see section E 610 Calibration beginning on page 16 Wwww pi ws E 610 PZ 70E Release 6 1 1 Page 13 Installation and Operation Piezo Nano Positioning PI 4 3 1 System Setup www pi ws The first step in installation is to connect the actuator and sensor Sensors are connected to pins 24c 26c 28c 30c for details see the sensor wiring section beginning on page 32 You can use the included 4 conductor panel mount Lemo socket for interfacing to a matching connector on the mechanics see p 32 for details Also connect the control input signal and or offset potentiometer if any as well as any monitoring instruments you want to use The second step is to select the operating mode either voltage controlled open loop or position controlled closed loop Connect pin 28a on the main connector to pin 14ac GND to enable closed loop servo ON mode or leave pin 28a open for open loop servo OFF mode Note that with the E 802 55 model servo control submodules the notch filter and slew rate limiter stay on in open loop unless the submodule is jumpered out of the circuit see block diagrams p 21 ff See the E 802 User Manual for details Operating the m
28. is now close enough to allow switching servo ON 8 Setservo ON Wwww pi ws E 610 PZ 70E Release 6 1 1 Page 19 PI E 610 Calibration Piezo Nano Positioning 9 Adjust the sensor monitor signal to exactly 10 000 V using the gain adjustment potentiometer on the E 802 servo submodule different versions of this submodule exist see the E 802 User Manual for gain adjustment on your unit 10 Adjust the PZT position to the nominal expansion value using the sensor gain adjustment Now because servo ON the sensor monitor value will not change 11 Repeat the last two steps until you get stable readings If the Gain settings have been changed the zero point adjustment starting with section 5 4 should be repeated and then the static gain rechecked Sensor gain adjustment Fig 3 Sensor gain on E 801 sensor excitation and readout submodule Most versions in circulation have the sensor gain adjustment as shown See the E 801 User manual for more details 5 6 Dynamic Calibration Dynamic performance of the PZT system is determined by the maximum output current of the amplifier and by the mechanical properties of the PZT mechanics like moving mass damping and resonant frequencies Dynamic calibration optimizes step response and suppresses resonance overshoot and oscillation Those servo loop notch filter and slew rate limitation setting procedures are all described in detail in the E 802 Servo Control Submodule User Manual
29. n are also available and are described in a separate manual As an alternative an externally processed sensor signal can be used The analog input signal control signal can either drive the power amplifier input directly or be fed through a slew rate limiter and notch filter and or a servo control circuit first The maximum output voltage ranges from 30 to 130 V so as to support the full extension capability of PI low voltage translators 1 2 2 Applications E 610 modules can be used for static and dynamic applications High output stability and low noise assures stable E 610 C0 is described in a separate user manual PZ 72E www pi ws E 610 PZ 70E Release 6 1 1 Page 4 Piezo Nano Positioning PI Introduction micropositioning Because LVPZT translators have high capacitances the amplifiers are designed to supply appropriate high peak currents for dynamic applications Excellent linearity and stability allows the use of E 610 modules in precision measurement and control systems Small size and compact design combined with excellent specifications make the E 610 series controller a preferred module for OEM users Although the modules were designed to drive PZT positioning elements they can also be used to drive other systems which require controlled operating voltages 1 2 3 Computer Control amp Hyperbit Computer control of an E 610 can be realized using a DAC board in a PC to generate the analog inpu
30. nd a precision voltmeter Access to adjustment elements on the submodules while the system is in operation is necessary so an extension connector may be required 5 2 Preparations www pi ws Mount the PZT actuator in the same way and with the same load as during normal operations in the application In multi axis systems make sure the PZTs are always connected to the same controller modules E 610 PZ 70E Release 6 1 1 Page 16 E 610 Calibration Piezo Nano Positioning PI 5 3 LVDT Mechanical Zero Point Adjustment LVDT sensors have a mechanical zero point adjustment SGS sensors are permanently affixed and cannot be shifted mechanically Models connected to LVDT sensors also may need to have the mechanical zero point of the sensor adjusted LVDT sensor readout is based on differential measurement of the inductive excitation of two secondary coils with a common moving ferrite core The first step of the alignment procedure is to balance the bridge by moving the ferrite core probe to the zero position To verify the balance of the bridge display the sinusoidal voltages on connector X18 pin 9 main connector pin 26c and pin 4 main connector 28c on a 2 channel oscilloscope If the bridge is balanced properly both sine curves have the same amplitude and phase If there is any deviation move the LVDT mechanically until both curves become identical 5 4 Electrical Zero Point Calibration www pi ws Electrical zero
31. odules you should consider the following items Depending on the sensor type E 610 model type appropriate sensor processing is provided DC for SGS AC for LVDT E 610 L0 Supports LVDT sensor Sensor processing is implemented on the E 801 submodule which is described in detail in a separate User Manual On the E 801 AC signals from the sensor are amplified in a dual stage preamplifier settable between medium and high gain to optimize piezo performance An analog output signal is available at the output of the demodulator which is directly proportional to the piezo expansion This signal can be fine tuned as to amplitude and Zero point with trim pots See the E 801 User Manual for details E 610 S0 Supports SGS sensor Sensor processing is implemented on the E 801 submodule which is described in detail in a separate User Manual One the E 801 DC signals are amplified in a preamplifier stage which outputs an analog signal directly proportional to the PZT expansion Again gain and zero point can be adjusted with trim pots E 610 PZ 70E Release 6 1 1 Page 14 Installation and Operation Piezo Nano Positioning PI With 0 DC offset and servo control ON an analog input signal of 10 V should cause the PZT to expand to its nominal value At zero input the sensor monitor voltage at main connector 22a should also measure zero If not perform the Electrical Zero Point Calibration described on p 17 to correct it At the n
32. ominal PZT expansion pin 22a should measure around 10 V In cases where the piezo drives a mechanical system up to its mechanical resonance the additional induced phase shift could result in unstable operation if the feedback loop were closed To suppress such critical resonance an optional notch filter can be activated on the main board By default it is bridged by zero ohm resistor R35 Most dynamic applications require the power amplifier to deliver a short peak current higher than the average value Because of the limited power of the transistors this peak is limited to about 5 ms in length After this time the current decreases to the average value There may be cases where the control signal calls for an even higher peak current but the required current cannot be supplied To avoid such non linearities a slew rate limitation is added to the control circuit This feature guarantees wide signal bandwidth without overdriving the power amplifier There are additional potentiometers for optimizing closed loop operation See the E 610 Calibration Section for details 4 3 2 User Electronics and Sensor Monitor Signal www pi ws If you are connecting your own electronics to the sensor monitor signal main connector p 32 make sure it has sufficient input capacitance to eliminate high frequency interference User Electronics Sensor Monitor Output lt may be necessary to add a 4 7 nF ceramic NPO or COC
33. oportional integral P I algorithm For calibration procedures see Section 5 and the E 802 Servo Control Submodule User Manual 6 4 2 Sensor Excitation and Evaluation www pi ws On all but the amplifier only version an E 801 submodule provides sensor excitation and readout E 801 1x submodules provide DC sensor excitation and can be used with strain gauge sensors SGS only E 801 2x submodules provide AC sensor excitation and are primarily for LVDT sensors although they can be used with SGS sensors if necessary Should you ever need to make any adjustments on the sensor submodules refer to the E 801 User manual for more details E 610 PZ 70E Release 6 1 1 Page 25 Technical Data PI Piezo Nano Positioning 47 Technical Data 7 1 Board and Amplifier Section Call models www pi ws Channels Output voltage range Peak output current Max average output current Max average output power Control input voltage range Voltage gain Input impedance DC offset adjustment range Bandwidth Ripple of Uout Input connector PZT output connector not on board Dimensions Main connector Single channel 30 to 130 V 140 mA 5 ms max 60 mA 6 W with forced air cooling gt 10 m3 h 2 to 12 V shiftable with DC offset 104 1 gt 100 kQ 100 volts wide adds 0 to 10 V to Control In See frequency response curves Figure below 20 mVpp at low frequencies 40 mVpp spikes
34. se serious injuries When working with these devices or using PZT products from other manufacturers we strongly advise you to follow the General Accident Prevention Regulations All work done with and on the modules described here requires adequate knowledge and training in handling High Voltages Be sure to connect pin 32a c to a Protective Ground CAUTION Equipment Damage Most piezo stages that can be connected to this controller can be damaged or destroyed by uncontrolled oscillation near the mechanical resonant frequency If you observe resonance while configuring your system switch off power to the actuators concerned immediately and check the settings and servo control parameters Connector descriptions and pinouts are given at the end of this manual All inputs and outputs are available on the main connector p 31 On the main board of the E 610 modules a DC DC converter is installed with a 12 to 30 VDC input voltage range The converter generates 37 and 137 V for the power amplifier and 15 V for the sensor and servo controller if present NOTE When powering up the module the DC DC converter needs a peak current of about 1 5 A to start oscillating The power supply should have a buffer capacitor or the E 610 PZ 70E Release 6 1 1 Page 12 Piezo Nano Positioning PI Installation and Operation external power supply should be able to supply the 1 5 A for at least 1 second The inputs and ou
35. t signal PI offers a LabVIEW driver set which can be used with certain D A boards This driver set is compatible with the PI General Command Set GCS LabVIEW driver set available for all newer controllers from PI The Analog Controller LabVIEW Driver E 500 ACD is free of charge but requires the LabVIEW environment from National Instruments for operation In addition Pl s patented Hyperbit technology for providing position resolution higher than that of the D A board is available for purchase as an option E 500 HCD The PI Analog Controller and Hyperbit drivers support all D A converter boards from National Instruments that are compatible with DAQmx8 3 LabVIEW compatibility is given from version 7 1 upwards Instructions for downloading the Analog Controller drivers is given in a Technical Note 1 3 Safety Precautions Read This Before Operation E 610 modules are OEM amplifiers generating HIGH VOLTAGES for driving LVPZTs The output power may Cause serious injuries When working with these devices or using PZT products from other manufacturers we strongly advise you to follow the General Accident Prevention Regulations Wwww pi ws E 610 PZ 70E Release 6 1 1 Page 5 Piezo Nano Positioning PI Introduction All work done with and on the modules described here requires adequate knowledge and training in handling High Voltages Be sure to connect pin 32a c to a Protective Ground CAUTION Electrostatic
36. tion 9 3 for details 1 Not applicable for E 610 00 amplifier only versions Wwww pi ws E 610 PZ 70E Release 6 1 1 Page 31 Pin Assignments Piezo Nano Positioning PI 9 3 LEMO Pin Assignments If desired the included panel mount LEMO socket s can be used to interface to plug s on the stage or actuator If used they should be wired as indicated below Use coaxial shielded cable and keep runs as short as possible Coaxial LEMO Connector ERN 00 250 CTL For PZT output drive voltage Center from main connector pin 2 a or c Shield from main connector pin 4aorc 4 conductor LEMO ERA 0S 304 CLL For SGS or LVDT sensor connection not with E 610 00 pin1 from main connector pin 24c sensor excitation pin2 from main connector pin 26c sensor signal pin3 from main connector pin 28c sensor signal pin4 from main connector pin 30c sensor excitation GND shield from main connector pin 22c 9 4 Sensor Wiring information 9 4 1 LVDT Sensor Description Wiring www pi ws LVDT sensor excitation and signal processing is implemented on an E 801 submodule Consult the E 801 User Manual for details and information on the various E 801 versions in use Sensors working on the principle of LVDTs have usually a bobbin with a primary winding two secondary windings and a moving core If an AC current is applied to the primary winding it produces a magnetic field which is concentrated by the soft iron or ferrite core The magneti
37. tputs of the DC DC converter are not connected internally Using a unipolar power supply we recommend connecting the negative supply at pin 18a c with the Test GND at pin 20a c This provides a defined GND level and helps to minimize noise 4 2 E 610 00 Amplifier Modules Make sure jumpers J1 and J2 on the main module are set to position 1 2 to disable the servo control elements which are not present on this version Optionally connect an external 10 k ohm potentiometer to 12a 12c and GND and make sure it is activated J3 in position 1 2 see block diagram in Section 6 Supply the board with the DC power in the 12 to 30 V range at pins 16a c and 18a c The green power on LED on the base board should light up Check the LVPZT output voltage between pin 2a c and 4a c main connector without an LVPZT connected If you have connected the optional external potentiometer to offset the control input range then this can be used to check the output voltage Varying the offset from 0 to 10 V should make the output vary from 0 to 100 V If no external potentiometer is connected drive the analog input pin 10c with a control voltage in the range of 2 to 12 V The corresponding output should be 20 to 120 V 4 3 E 610 Models with Servo Control NOTE Calibration If your unit is delivered with the PZT actuator that it is to drive it will have been configured and calibrated with that actuator at the factory Be careful not to interchan
38. translators In most of the standard products two strain gauges are attached on opposite sides of the ceramic stack Together with two bridge completion resistors the strain gauges are wired in diagonal positions to form a Wheatstone bridge The bridge is balanced if all four elements have the same resistance Small tolerances can be compensated in the electronics The resistance of the strain gauges depends on the expansion of the piezo elements The measuring bridge outputs a signal of about 1 mV V at full expansion The bridge completion E 610 PZ 70E Release 6 1 1 Page 33 Piezo Nano Positioning PI Pin Assignments resistors are mounted inside the LVPZT casing to minimize cable influence and temperature sensitivity Only in some very small elements where no space is available are the resistors placed on the controller board see jumper J401 All LVPZTs having 60 um expansion or more two strain gauges and resistors are connected in series to measure with higher accuracy Some special strain gauges with four active elements two Poisson gauges are available on request Correct wiring of the strain gauges can be tested easily by measuring the total bridge resistance at the LEMO connector between pin 1 4 supply and pin 2 3 outputs The value should be about 700 ohm for smaller LVPZTs and about 1400 ohm for the larger ones Strain Gauge sensors should be used with the Module E 610 S0 but can also be operated with E
39. type to the input connector Use shielded cable if possible otherwise make sure the lead pair is tightly twisted Fig 2 Electronics on Sensor Monitor line with required input capacitance E 610 PZ 70E Release 6 1 1 Page 15 E 610 Calibration Piezo Nano Positioning PI 5 E 610 Calibration All piezo positioning systems with a PZT translator are delivered with performance test documents to verify the system performance The servo controller is calibrated prior to shipment in our labs Normally there is no need for the customer to perform a full calibration Only if the PZT the sensor extension cable or the mechanical setup is changed may new calibration be necessary The system is ready for operation upon delivery PZTs and their assigned controllers are matched and should be considered as a unit The serial numbers of the PZTs installed are marked on the individual modules Some calibration steps however must be performed in any case either to compensate different loading and mounting details or to tune dynamic behavior for stable operation NOTE For some calibration steps the heat sink cover plate has to be removed to make certain test points or components on the add on modules available 5 1 Equipment Needed for Calibration Zero point adjustment requires a voltmeter Static displacement calibration requires an external expansion gauge with appropriate resolution e g 0 01 um for a P 841 30 actuator a
40. ypical for public power supply Note The nominal level of the transient overvoltage is the standing surge voltage according to the overvoltage category II IEC 60364 4 443 m Degree of pollution 2 Any more stringent specifications in the Technical Data table are of course also met www pi ws E 610 PZ 70E Release 6 1 1 Page 3 Piezo Nano Positioning PI Introduction 1 2 General Description E 610 00 amplifiers and E 610 x0 amplifier controller modules are designed to drive and to control low voltage piezoelectric translators LVPZTs The E 610 00 is a single channel amplifier with an average output power of 6 watts The design is based on a controllable DC DC converter optimized for driving capacitive loads E 610 L0 and E 610 S0 are single channel amplifiers and position controllers LVPZT controller All modules can be operated from a single DC voltage from 12 to 30 V 1 2 1 Servo Control Position feedback is the most effective way to suppress hysteresis and creeping effects the piezo translators can then be controlled with an accuracy that is determined by the accuracy of the sensor used Each module type supports a different type of position control sensor m Strain gauge sensors SGS attached to the PZT stack or lever element m Inductive sensors either half bridge sensors IHB or linear variable differential transformers LVDT Capacitive sensor versions offering the finest possible resolutio
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