MP 74E User Manual V-106 Voice Coil Micropositioners
Contents
1. max scanning frequency Hz 0 20 40 60 80 100 Additional load g Fig 7 V 106 11S maximum operating frequency vs additional load WWW pi ws V 106 MP 74E Release 1 1 0 Page 11 Performance Piezo Nano Positioning PI For the V 106 14S the results are follows Amplitude 1mm Amplitude 5mm Amplitude 18mm Laan N Ir nt gt S gt o o D c c g Q v x is E 40 60 Additional load g The mass of the moving platform including part of the drive is 102 g for the V 106 11S and 171 g for the V 106 14S NOTE Voice coil drives only allow an average current of 0 42 A see appendix during long duration operation The maximum operating frequency for such operation is therefore only half the short term maximum WWW pi ws V 106 MP 74E Release 1 1 0 Page 12 Piezo Nano Positioning PI Technical Data 5 Technical Data 5 1 Specifications Models V 106 11S V 106 14S Units Tolerance Active axes 1 1 Motion and Positioning Travel range 6 20 mm Integrated sensor Linear Linear encoder encoder Sensor resolution 0 1 0 1 um Minimum incremental motion 0 2 0 2 um Typ A3 Backlash 0 2 0 2 Unidirectional repeatability 0 2 0 2 um Typ A4 Pitch 50 50 prad Typ Yaw 50 50 prad Typ Max velocity 240 270 mm s Ref switch repeatability 1 1 um Typ Mechanical Characteristics Moved mass 102 172 g Typ Load 36 81 N BI Push pull force 5 Sig N2. Except for the small hysteresis zone the reference signal is always low on the negative side Because of the hysteresis it is important to always approach the reference switch from the same side Pl s GCS General Command Set referencing commands will go past the reference point if necessary so as to approach it from the negative side See the controller User Manual and or associated software manuals for the commands which make use of the reference signal www pi ws V 106 MP 74E Release 1 1 0 Page 8 Piezo Nano Positioning PI Operational Considerations 3 4 Incremental Position Sensor V 106 stages are equipped with incremental position sensors called encoders These sensors provide highly accurate signals whenever the position changes by a known small amount By counting the encoder signals called counts the controller can keep track of the relative motion of the stage To discover the absolute position it is necessary to drive the stage to the reference switch Most controllers have commands to automate this procedure which is usually called referencing 3 5 Operation To operate the stage proceed as follows 1 Install the C 843 controller following the instructions in the controller manual 2 Install the host software in the host computer This procedure is described in the accompanying software manual 3 Connect the stage to the controller using the cable permanently attached to the stage 4 Command
3. Normal Load Capacity Centered vertical load horizontal installation B2 Max Push Pull Force Active and passive force limit in operating direction at center of stage Some stages may be able to generate higher forces at the cost of reduced lifetime 5 2 Controller Details Each stage in the motion system must be connected to a motion controller The controller is either preprogrammed for stand alone operation or networked with or installed in a PC i e controller setup and or operation are effectuated with software V 106 stages are usually operated with C 843 controllers but are compatible with other controllers designed to operate DC motors In general the full capabilities of the stage will not be available with any given controller NOTE Most standard controllers from PI use a DAT file which contains information on all PI standard micropositioners and installs automatically with the host software This file called pistages dat also includes an initial set of PID servo control parameters for each stage type In case your WWW pi ws V 106 MP 74E Release 1 1 0 Page 14 Technical Data Piezo Nano Positioning PI controller does not use pistages dat possible PID parameters are included in this manual 5 2 1 C 843 DC Motor Controller The C 843 21 2 axis and C 843 41 4 axis are the recommended controllers for the V 106 When used with PIMikroMove software appropriate starting settings are taken from the stages
4. Connector type sub D15 m 5 Function n c input Motor internal use input 5V Encoder and logic supply GND GN output Encoder A inverted output Encoder B inverted input Motor GND internal use GND output Reference signal output Encoder A standard output Encoder B standard olo ajl eek ek en gt Lines 5 and 12 are reserved by the controller for negative end and positive end limit switch signals respectively Because the V 106 1xS have no limit switches both lines are grounded at the stage www pi ws V 106 MP 74E Release 1 1 0 Page 17 Piezo Nano Positioning PI Dimensions 7 Dimensions Dimensions in mm decimal places separated by commas in drawings 0 05 3 D11 38 5 ml I f ef i o Sg en ni z Si S i 1 J Fig 8 V 106 11S dimensions WWW pi ws V 106 MP 74E Release 1 1 0 Page 18 Piezo Nano Positioning PI Dimensions 11 6 6 0 05 3 114 Fig 9 V 106 14S dimensions SE S www pi ws V 106 MP 74E Release 1 1 0 Page 19
5. database file PIStages dat See the PIMikroMove manual for more details 5 2 2 C 862 Mercury DC Motor Controller The C 862 Mercury controller is a compact palm size single axis controller C 862s are daisy chain networkable and a multi axis system can be controlled from a single PC RS 232 interface Mercury controllers come with a choice of user interface software not all of which uses pistages dat If you use MMCRun the following values should be used for operating voice coil stages Mercury Starting Parameters for V 106 11S amp V 106 14S Parameter Recommended Minimum Maximum Value Value Value item 100 fao i OE term 220 SOC i O Velocity cts s 250 000 Jo 500 000 E T N I PI E I cts encoder counts Both V 106 11 and V 106 14 scanners can be operated with the same parameter settings The settings given are recommended values only and might not fit your specific application www pi ws V 106 MP 74E Release 1 1 0 Page 15 Piezo Nano Positioning PI Technical Data 5 2 3 Other Controllers If using a third party controller or a PI controller with software that does not have V 106 data in a stage database read the controller documentation carefully and compare with the V 106 specifications given in this manual Considerable experimentation may be necessary WWW pi ws V 106 MP 74E Release 1 1 0 Page 16 Piezo Nano Positioning PI Connector Pinouts 6 Connector Pinouts
6. the reference switch and incremental position encoder to ensure proper performance of the servo control system Based on their design and realization the V 106 stages are intended for single axis positioning adjusting and shifting of loads at various velocities To achieve the specified guiding accuracy the positioners have to be mounted on a flat surface to avoid torsion of the basic profile The positioners may only be used for applications suitably in accordance with the device specifications www pi ws V 106 MP 74E Release 1 1 0 Page 4 Piezo Nano Positioning PI Introduction Respect the safety instructions given in this User Manual The operator is responsible for the correct installation and operation of the V 106 The verification of the technical specifications by the manufacturer does not imply the validation of complete applications In fact the operator is responsible for the process validation and the appropriate releases V 106s meet the specifications of EN 61010 for safe operation under normal ambient conditions See the specifications table on p 13 for details 1 7 Unpacking 1 7 1 Contents of Delivery Unpack the V 106 stage with care Compare the contents against the items covered by the contract and against the packing list Inspect the contents for signs of damage If parts are missing or you notice signs of damage such as loose contacts or hairline cracks please contact PI immediately
7. 1 7 2 Transport Lock Before operation the transport lock must be removed see Fig 2 below Save the transport lock hardware and all packaging materials in case the stage needs to be transported again cai quam gine Fig 2 Removing transport lock WWW pi ws V 106 MP 74E Release 1 1 0 Page 5 Installation Piezo Nano Positioning PI e Installation 2 1 Mechanical Mounting To avoid exceeding the load limits the stage is usually mounted horizontally with the application attached using the threaded mounting holes in the top platform CAUTION Overlength mounting screws will interfere with motion and may cause permanent damage It is possible to operate the V 106 without the baseplate and or the top platform if desired A Torx 8 driver is required to remove the attachment screws 4 each The screws which attach the baseplate to the body are accessible through clearance holes in the attached top platform when it is properly positioned Tighten screws alternately to avoid stress and deformations Operation with the top platform removed reduces the moved mass and thus increases the available acceleration and bandwidth Be sure to prevent contamination of or damage to the delicate drive mechanism Fig 3 V 106 11S with top and bottom plates removed each held by four screws Two sets of matching holes are circled 2 2 Host PC and Controller WWW pi ws Voice Coil Micropositi
8. B2 Push pull force with C 843 2 3 1 5 N B2 Lateral force 18 40 N Max Drive properties Drive type Voice coil Voice coil Continuous average current 0 42 0 42 A nominal Peak current 1 8 1 8 A max 3s Average force 2 0 8 N nominal Coil resistance 10 10 typ Coil inductance 100 100 uH typ Force constant 2 88 1 92 N A Voltage generation constant 36 1 24 Vs m Miscelaneous www pi ws V 106 MP 74E Release 1 1 0 Page 13 Piezo Nano Positioning PI Technical Data Operating temperature range 0 to 55 0 to 55 C Body material Aluminum Aluminum Mass without cable 800 1000 g 5 Cable length 300 300 mm 10 mm Connector Sub D 15m Sub D 15m Recommended C 843 C 843 controller driver with C 843 x1 controller limited by controller s encoder counting rate V 106 11S and V 106 14S are equipped with 5 MHz AB quadrature encoders The C 843 x1 provides a maximum of 8 V and 0 8 A per channel and therefore limits the push pull force NOTES A3 Design Resolution The theoretical minimum movement that can be made based on the selection of the mechanical drive components Design resolution is usually better than the practical position resolution minimum incremental motion A4 Minimum Incremental Motion The minimum motion that can be repeatedly executed for a given input which is sometimes referred to as practical or operational resolution Design resolution and practical resolution have to be distinguished B1 Max
9. Piezo Nano Positioning PI MP 74E User Manual V 1 OG Voice Coil Micropositioners Release 1 1 0 Date 2006 12 04 This document describes the following product s E V 106 11S Voice Coil Micropositioners 6 mm Travel Range E V 106 14S Voice Coil Micropositioners 20 mm Travel Range Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the NanoWorld www pi ws info pi ws www pi ws I Declaration of Conformity according to ISO IEC Guide 22 and EN 45014 Manufacturer Physik Instrumente PI GmbH amp Co KG C Manufacturer s Auf der R merstrasse 1 Address D 76228 Karlsruhe Germany The manufacturer hereby declares that the product Product Name Voice Coil Micropositioner Model Numbers V 106 11S V 106 14S Product Options all conforms to the following EMC Standards and normative documents Electromagnetic Emission EN 61000 6 3 EN 55011 Electromagnetic Immunity EN 61000 6 1 Safety Low Voltage Directive EN 61010 1 Safety of Machinery EN 12100 November 14 2006 Karlsruhe Germany Li ne Dr Karl Spanner President Physik Instrumente Pl GmbH amp Co KG is the owner of the following company names and trademarks PI Mercury Quickscan The following designations are protected company names or registered trademarks of thir
10. a few test moves to make sure everything is working properly WWW pi ws V 106 MP 74E Release 1 1 0 Page 9 Performance Piezo Nano Positioning PI Performance www pi ws Velocity v mm s Current I mA Drive Characteristics V 106 11S R a N 8 x a a p N a Velocity v mm s Current mA 8 a e N a o o o n 1 0 1 5 2 0 Force F N V 106 14S 2 8 a 8 i my a 125 100 75 50 25 Force F N Fig 5 V 106 11S and V 106 4S drive characteristics In practice the max velocity of the stage is limited by the encoder sampling to 270 mm s V 106 MP 74E Release 1 1 0 Page 10 Performance Piezo Nano Positioning PI 4 2 Maximum Velocity vs Load Measured over a 5 mm 18 mm step with additional loads of 0 g 36 g V 106 11S only 90 g and 350 g V 106 14S only The acceleration was chosen so as to keep the tracking error less than approx 25 um V 106 14S V 106 11S o E E E ta 2 D gt Fad c E 100 150 200 250 300 350 Additinal load g Fig 6 Maximum velocity vs additional load 4 3 Maximum Operating Frequency vs Load Measured over total scanning ranges of 1 mm 5 mm and 18 mm V 106 14S only with additional loads of 0 g 36 g V 106 11S only and 90 g V 106 11S Amplitude 1mm Amplitude 5mm
11. ables 1 3 Safety Precautions Read this before operating the voice coil micropositioner CAUTION Be aware that overlength mounting screws will interfere with motion and may cause permanent damage CAUTION Be aware that the stage could start an unexpected move when first connected to the motor controller 1 4 Features m Fast Scanning and Positioning m Speed up to 270 mm s m Travel Ranges of 20 mm and 6 mm m Resolution to 0 1 um m Scanning Frequency to 34 Hz m Crossed Roller Bearings for Highest Reliability m Compatible with PI C 843 PCI Bus PC Board Controller WWW pi ws V 106 MP 74E Release 1 1 0 Page 3 Piezo Nano Positioning PI Introduction 1 5 Model Survey m V 106 11S 120 x 120 mm footprint 80 x 70 mm without baseplate with travel range of yyy m V 106 14S 120 x 120 mm footprint 80 x 127 mm without baseplate with travel range of 20 mm Fig 1 V 106 11S left and V 106 14S right The recommended controller the C 843 PCI card is available in 2 and 4 axis versions and must be ordered separately Earlier V 106 versions V 106 1S and V 106 2S as well as the V 820 20 controller board are no longer available and are not covered in this manual 1 6 Prescribed Use Correct operation of the V 106 positioners is only possible in combination with a suitable controller driver ordered separately and software The controlling device must be able to read out and process the signals from
12. ce eecececeeeeeeeeeeeeeeeeeeeeeeeeees 9 35 Operation ara 9 Performance 10 41 Drive CharacteriStiCS 10 4 1 1 Maximum Velocity vs Load i 11 4 12 Maximum Operating Frequency vs Load 11 Technical Data 13 51 Specifications rail lalla 13 52 Controller DetailS 14 52 1 C 862 Mercury DC Motor Controller esenee 15 522 Other Controllers 16 Connector Pinouts 17 Dimensions 18 Introduction 1 Piezo Nano Positioning PI Introduction QuickScan Mmicropositioning stages of the V 106 series are designed for high dynamics precision scanning and positioning applications like those in biotechnology and fiber optics They are based on zero friction voice coil drives linear motors which combined with high precision linear encoders offer a minimal step size of 0 2 um High accuracy voice coil linear drives work on the same principle as electromagnetic loudspeakers However for precision positioning applications they must provide much higher forces and have high stability to hold a position without jitter They must also be designed for closed loop operation to allow for precise positioning V 106 micropositioning stages achieve significantly higher dynamics than leadscrew based units The specially designed voice coil drive system makes possible scanning frequencies of some tens of hertz With an applied load of 90
13. d parties Windows LabView Copyright 1999 2006 by Physik Instrumente Pl GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual enjoy copyright protection With regard thereto Physik Instrumente PI GmbH amp Co KG reserves all rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source First printing 2006 12 04 Document Number MP 74E Release 1 1 0 V 106_User_MP74E110 doc Subject to change without notice This manual is superseded by any new release The newest release is available for download at www pi ws About this Document Users of this Manual This manual is designed to help the reader to install and operate the V 106 Voice Coil Micropositioners lt assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The manual describes the physical specifications and dimensions of the V 106 Voice Coil Micropositioners as well as the software and hardware installation procedures which are required to put the associated motion system into operation This document is available as PDF file on the product CD Current releases can be downloaded from the PI Website as PDF files www pi ws obtained from your Physik Instrumente sales engineer or from info pi ws Conventions The notes and symbols used in this manual have the following meanings WARNING Cal
14. grams the scan frequency still is 20 Hz over a travel range of 1 mm The excellent dynamic characteristics are advantageous not only for scanning applications positioning tasks see them as short settling times like 75 ms for 5 mm with a 90 gram load 1 1 WWwW pi ws Direct Drive and Direct Metrology Precise Motion The design of the V 106 is based on three key precision components m A frictionless voice coil linear motor drive m Anon contacting direct motion metrology linear encoder for sub micron repeatability m Precision cross roller bearings for ultra straight and smooth motion Unlike leadscrew driven translation stages the voice coil linear motor in the V 106 is quiet frictionless and not subject to wear and tear In addition it provides higher dynamics speed acceleration and responsiveness step and settle For highly repeatable motion a non contacting optical linear encoder with 0 1 um resolution is mounted inside the stage and feeds position information back to the motion controller V 106 MP 74E Release 1 1 0 Page 2 Piezo Nano Positioning PI Introduction 1 2 Convenient Control V 106 voice coil stages can be controlled by the C 843 digital contoller in PCI plug in board format C 843 controllers are equipped with on board linear servo amplifiers for precise control of up to four axes This lowers system costs and simplifies setup by eliminating additional external amplifiers and c
15. ls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death CAUTION Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in damage to equipment NOTE Provides additional information or application hints Related Documents The motion controller and the software tools which might be delivered with V 106 Voice Coil Micropositioners are described in their own manuals All documents are available as PDF files on the Motion CD or special product CD Updated releases are available from the PI Website as PDF files www pi ws from your Physik Instrumente sales engineer or from info pi ws Contents Introduction 2 1 1 Direct Drive and Direct Metrology Precise Motion 2 1 2 Convenient Control 3 13 Safety Precautions ica ones ess ae 3 E SFO ATU OS E E veesansutt vatsieansideaste terni 3 15 Model Suey msie iene nate 4 1 6 Prescribed Use 4 V7 Unpackiigi serali aaa 5 1 7 1 Contents of Delivery 5 1 2 Transport LOCK moe e o e a e ai 5 Installation 6 2 1 Mechanical Moufntingi rni le aaa 6 22 Host PC and Controller 6 Operational Considerations 8 3 1 Direction of Motion 8 32 Limit SWitCheS ceecceeeccceececeeeeceeeeceeeeeceeeesateesaueeeeaeeeeaes 8 33 Reference Switch 8 34 Incremental Position Sensor
16. onerss can be connected to current C 843 2 and 4 axis controllers C 843 21 C 843 41 These controllers are PCl bus add on PC boards and must be installed inside the host PC See the C 843 User Manual for V 106 MP 74E Release 1 1 0 Page 6 Piezo Nano Positioning PI Installation instructions explaining the installation of the controller its software and drivers The controller User Manual also provides an overview of the software interfaces provided for operators and programmers each of which is then described in detail in its own software manual With proper configuration other positioning devices may be operated on other axes of the same controller at the same time WWW pi ws V 106 MP 74E Release 1 1 0 Page 7 Piezo Nano Positioning PI Operational Considerations 3 Operational Considerations 3 1 Direction of Motion The low end of the travel range is the end that is approached with negative relative moves It is shown in Fig 4 and is the same for both standard versions Fig 4 V 106 at low end of travel range 3 2 Limit Switches V 106 11S and V 106 14S stages do not have limit switches The limit switch lines are tied to ground 3 3 Reference Switch All versions are equipped with a direction sensing Hall effect reference switch This switch provides a TTL signal which is high when the platform is on the positive side of the reference point which is close to the center of the travel range
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