631B High Temperature Pressure Transducer
Contents
1. een 10 Tabla 4 Definici n de los s mbolos hallados en la unidad 14 abled Interface Cables ul nannten nenn endeten een 22 Table 6 Pinout of the Interface Connector J1 oran nono nono conocio 34 Table 7 Highest Pressures Suggested for Proper Zero Adjustment 38 Table 8 Over Temperature Cutoff Value 41 Table 9 Conditions and resulting status LEDs and heater alarm relay output 41 vi Safety Information Safety Information Symbols Used in This Instruction Manual Definitions of WARNING CAUTION and NOTE messages used throughout the manual procedure practice condition or the like which if not correctly performed or adhered to could result in injury to personnel Warning Wi The WARNING sign denotes a hazard It calls attention to a Caution The CAUTION sign denotes a hazard It calls attention to an u operating procedure practice or the like which if not correctly performed or adhered to could result in damage to or destruction of all or part of the product Note The NOTE sign denotes important information It calls attention to a procedure practice condition or the like which is essential to highlight N Safety Information Symbols Found on the Unit The following table describes symbols that may be found on the unit Definition of Symbols Found on the Unit Off Supply IEC 417 No 5008 Alternatin2. P Pinout connector 33 43 Piping considerations 27 Port connections 26 27 Power supply current rating 23 48 wiring 23 34 Power supply wiring 34 R Relay heater fail 17 40 trip point 17 29 Returning the product 18 21 Index S Sensor 17 26 29 Sensor fittings 27 Setup 25 26 Signal conditioner 17 29 Standard sensor fittings 27 T Temperature coefficients 50 operating ambient 24 25 50 operating sensor 17 40 49 52 storage 24 50 Time response 50 Trip point relay system 17 29 43 direction 43 44 53 hysteresis 45 value 43 53 Troubleshooting 48 V Ventilation 24 25 50 Vibration 23 26 W Warm up 17 23 Z Zero adjustment coarse zero switch 37 39 zero pot 37 38 56
3. USE PROPER FITTINGS AND TIGHTENING PROCEDURES All instrument fittings must be consistent with instrument specifications and compatible with the intended use of the instrument Assemble and tighten fittings according to manufacturer s directions CHECK FOR LEAK TIGHT FITTINGS Before proceeding to instrument setup carefully check all plumbing connections to the instrument to ensure leak tight installation OPERATE AT SAFE INLET PRESSURES This unit should never be operated at pressures higher than the rated maximum pressure refer to the product specifications for the maximum allowable pressure INSTALL A SUITABLE BURST DISC When operating from a pressurized gas source a suitable burst disc should be installed in the vacuum system to prevent system explosion should the system pressure rise Safety Information KEEP THE UNIT FREE OF CONTAMINANTS Do not allow contaminants of any kind to enter the unit before or during use Contamination such as dust dirt lint glass chips and metal chips may permanently damage the unit USE CAUTION WHEN TOUCHING THE TRANSDUCER The transducer especially the bottom plate and tube becomes hot when the system is in operation Sicherheitshinweise f r den Druckme umformer Sicherheitshinweise f r den Druckme umformer In dieser Betriebsanleitung vorkommende Symbole Bedeutung der mit WARNUNG VORSICHT und HINWEIS gekennzeichneten Abs tze in dieser Betriebsanleitung Warnung y
4. Vorsicht Y Hinweis y Das Symbol WARNUNG weist auf eine Gefahr f r das Bedienpersonal hin Es macht auf einen Arbeitsablauf eine Arbeitsweise einen Zustand oder eine sonstige Gegebenheit aufmerksam deren unsachgem e Ausf hrung bzw ungen gende Ber cksichtigung zu Verletzungen f hren kann Das Symbol VORSICHT weist auf eine Gefahr f r das Ger t hin Es macht auf einen Bedienungsablauf eine Arbeitsweise oder eine sonstige Gegebenheit aufmerksam deren unsachgem e Ausf hrung bzw ungen gende Ber cksichtigung zu einer Besch digung oder Zerst rung des Ger tes oder von Teilen des Ger tes f hren kann Das Symbol HINWEIS macht auf wichtige Informationen bez glich eines Arbeitsablaufs einer Arbeitsweise eines Zustands oder einer sonstige Gegebenheit aufmerksam Sicherheitshinweise f r den Druckme umformer Erkl rung der am Ger t angebrachten Symbole Nachstehender Tabelle sind die Bedeutungen der Symbole zu entnehmen die am Ger t angebracht sein k nnen Ein Energie IEC 417 No 5007 MasseanschluB IEC 417 No 5020 Gleich oder Wechselstrom IEC 417 No 5033 a Warnung vor einer Gefahrenstelle Achtung Dokumen tation beachten ISO 3864 No B 3 1 Aus Energie IEC 417 No 5008 y Aquipotential anschlu IEC 417 No 5021 a Durchg ngige doppelte oder verst rkte Isolierung IEC 417 No 5172 a Warnung vor gef hrlicher elektrischer Spannung ISO 3864 No B 3 6
5. When purging be sure to isolate the sensor from the interconnecting piping Sensor Fittings The following additional fittings are available for the Type 631B transducer e 1 12 7 mm tubing e Swagelok 8 VCR female e NW 16 KF e 1 Tri Clover e 2 Tri Clover Special Note for Y 12 7 mm Tubing The standard tubing for the 631B transducer is straight Y 12 7 mm tubing The Type 631B transducer has only one pressure port Px To connect the 631B transducer to a Swagelok Ultra Torr compression fitting 1 Ensure the tubing is clean and free of axial scratches 2 Insert the tubing through the compression nut and O ring all the way to the shoulder 3 Tighten the nut 27 Chapter Two Installation This page intentionally left blank 28 Chapter Three Overview Chapter Three Overview Sensor The Type 631B transducer contains an absolute sensor that is referenced to high vacuum less than 10 Torr This pressure sensor utilizes a single sided dual electrode AC bridge circuit design In this design two capacitance electrodes are deposited upon a ceramic disk in a concentric bull s eye arrangement The disk is positioned close to an Inconel tensioned diaphragm to form two capacitors in an AC bridge circuit The other side of the diaphragm is exposed to the process gas The diaphragm deflects with changing pressure force per unit area independent of the composition of the measure
6. Bedeutung der am Ger t angebrachten Symbole SchutzleiteranschluB IEC 417 No 5019 ErdanschluB IEC 417 No 5017 Wechselstrom IEC 417 No 5032 Gleichstrom IEC 417 No 5031 IT Dreileiter Wechselstrom Drehstrom IEC 617 2 No 020206 H here Temperatur an leicht zug nglichen Teilen IEC 417 No 5041 Tabelle 2 Bedeutung der am Ger t angebrachten Symbole Sicherheitshinweise f r den Druckme umformer Sicherheitsvorschriften und Vorsichtsma nahmen Folgende allgemeine Sicherheitsvorschriften sind w hrend allen Betriebsphasen dieses Ger tes zu befolgen Eine Mi achtung der Sicherheitsvorschriften und sonstiger Warnhinweise in dieser Betriebsanleitung verletzt die f r dieses Ger t und seine Bedienung geltenden Sicherheitsstandards und kann die Schutzvorrichtungen an diesem Ger t wirkungslos machen MKS Instruments Inc haftet nicht f r Mi achtung dieser Sicherheitsvorschriften seitens des Kunden Niemals Teile austauschen oder nderungen am Ger t vornehmen Ersetzen Sie keine Teile mit baugleichen oder hnlichen Teilen und nehmen Sie keine eigenm chtigen nderungen am Ger t vor Schicken Sie das Ger t zwecks Wartung und Reparatur an den MKS Kalibrierungs und Kundendienst ein Nur so wird sichergestellt da alle Schutzvorrichtungen voll funktionsf hig bleiben Wartung nur durch qualifizierte Fachleute Das Auswechseln von Komponenten und das Vornehmen von internen Einstellungen darf nur von
7. General Information Chapter One General Information Introduction Note nl Some Baratron products may not be exported to many end user countries we without both US and local government export licenses under ECCN 2B230 The MKS Baratron Type 631B Absolute Pressure Transducer is part of the MKS family of general purpose pressure transducers designed to provide accurate reliable and repeatable pressure measurements from 1000 Torr down to 1 Torr Full Scale F S The 631B is temperature controlled to prevent contamination build up and this transducer is available in one of two operating temperatures 150 C and 200 C These instruments have a small footprint and have self contained signal conditioning electronics mounted directly above the sensor The precision pressure transducer operates on a variable capacitance technique and requires 15 VDC input to provide a 0 to 10 VDC output linear with pressure over the F S sensor range The 631B transducer is available with an optional trip point relay system The relay system provides two internally mounted trip point relays with user adjustable pressure conditions that will energize or de energize each relay The trip point relay system includes a status LED trip point value adjustment direction selection and signal access for each of the two trip points The 631B pressure transducer is comprised of a sensor and signal conditioner An MKS or compatible power supply is required to complet
8. N 5033 a Precauci n Consulte los documentos adjuntos ISO 3864 N B 3 1 Equipo de clase Il trifasica IEC 617 2 N 020206 IEC 417 N 5172 a Precauci n Superficie caliente IEC 417 N 5041 Precauci n Riesgo de descarga el ctrica ISO 3864 N B 3 6 Tabla 4 Definici n de los simbolos hallados en la unidad Medidas de seguridad del transductor de presi n Procedimientos y precauciones de seguridad Las precauciones generales de seguridad descritas a continuaci n deben observarse durante todas las etapas de funcionamiento del instrumento La falta de cumplimiento de dichas precauciones o de las advertencias especificas a las que se hace referencia en el manual constituye una violaci n de las normas de seguridad establecidas para el uso previsto del instrumento y podria anular la protecci n proporcionada por el equipo Si el cliente no cumple dichas precauciones y advertencias MKS Instruments Inc no asume responsabilidad legal alguna NO UTILICE PIEZAS NO ORIGINALES O MODIFIQUE EL INSTRUMENTO No instale piezas que no sean originales ni modifique el instrumento sin autorizaci n Para asegurar el correcto funcionamiento de todos los dispositivos de seguridad envie el instrumento al Centro de servicio y calibraci n de MKS toda vez que sea necesario repararlo o efectuar tareas de mantenimiento LAS REPARACIONES DEBEN SER EFECTUADAS UNICAMENTE POR TECNICOS AUTORIZADOS Los operarios no deben intentar reempl
9. ON or OFF Pin 14 Closed 1 Power ON 2 Temp above upper limit of LED temperature window an T A i PP i Ge g Yellow Off Pin 13 Open 3 emp below overtemperature cuto Pin 14 Closed 4 Heater current ON l Power ON z da De energized 2 Temp above upper limit of LED temperature window l Vellow Red Pin 13 Closed 3 Temp below overtemperature cutoff i Pin 14 Open 4 Heater current OFF 1 Power ON De energized 2 Temp above overtemperature Yellow Red Pin 13 Closed 3 Heater current ON or OFF Pin 14 Open De energized 1 Power OFF Off Off Pin 13 Closed Pin 14 Open Table 9 Conditions and resulting status LEDs and heater alarm relay output 41 Chapter Four Operation This page intentionally left blank 42 Chapter Five Optional Relay System Chapter Five Optional Relay System General Information The 631B transducer provides the option for two internally mounted trip point relays with user adjustable pressure conditions that will energize each relay The trip point direction whether the relay energizes above or below the selected pressure condition is chosen using the appropriate model code when purchasing the 631B transducer refer to Appendix B Model Code Explanation page 51 A visual indication of the status of each trip point relay is provided by a dedicated LED that illuminates when the trip point relay is energized The relay becomes de energized and the LED turns off when the pressur
10. are sure the unit arrived safely If you find any damage notify your carrier and MKS immediately If it is necessary to return the unit to MKS obtain an RMA Number Return Material Authorization Number from the MKS Service Center before shipping Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers Caution Only qualified individuals should perform the installation and any u user adjustments They must comply with all the necessary ESD and handling precautions while installing and adjusting the instrument Proper handling is essential when working with all highly sensitive precision electronic instruments Unpacking Checklist Standard Equipment e Type 631B Unit e Type 631B Instruction Manual this book 21 Chapter Two Installation Optional Equipment e Interface cables refer to Interface Cables page 22 for details e Electrical Connector Accessories Kit 631B K1 contains a mating connector e MKS Type 146 Cluster Gauge Vacuum Measurement and Control System e All MKS automatic pressure controllers Type 651 1651 and others Note nil The 651 pressure controller must include the high power supply option gt 2 0 Amperes to work with a 631B transducer e Several MKS power supply readouts Interface Cables As of July 20 2009 all products shipped to the European Community must comply with the EMC Directive 2004 108 EC which covers radio frequency emissions and
11. or power supply readout Table 6 specifies the pinout of the Interface connector Note nil The state of the relay contacts at pins 13 14 are for an energized heater A alarm relay normal operation refer to Heater Status LEDs and Heater Alarm Relay page 40 for a description of relay functionality To use a 631B transducer with any non MKS power supplies or power supply readouts consult the manufacturers specifications for electrical and power considerations and Appendix A Product Specifications page 49 for electrical requirements of the 631B transducer Pinout of the Interface Connector J1 Assignment Without Relay System No Connection Trip Point B Relay N C Heater Alarm Relay Common Pressure Output Return Heater Alarm Relay Open when Heater Alarm Relay Open when energized energized Heater Alarm Relay Closed when Heater Alarm Relay Closed when energized energized Chassis Ground Chassis Ground 33 Chapter Three Overview Table 6 Pinout of the Interface Connector J1 Pressure Output The 631B transducer provides a 0 to 10 VDC output signal Overpressure Considerations As with any transducer the 631B transducer performs valid measurements up to the unit s Full Scale At pressures of roughly 10 over Full Scale a high 11 VDC output signal is produced to warn of invalid readings At pressures somewhat beyond this the diaphragm touches the fixed capacitor plate The capacitor plate serves as a
12. protective overpressure stop to prevent damage to the diaphragm up to 45 psia for an absolute transducer Labels Three labels appear on the 631B unit a wiring diagram label a Danger Hot label and a serial number label Wiring Diagram Label 1 TP A Relay NO B 15V Supply 11 Hir Alarm Relay Com 2 Pross Output Ts upply 12 Press Output Return a Protected under one o BARATRON U S Patent No 56251 58 11685 or Patents 3 e 3 TP A Relay Com 13 Hir Alarm Relay Open Energized mks CAPACITANCE MANOMETER 4 TP A Relay NC f om 14 Htr Alarm Relay Closed Energized Power Return 10 TP B Relay N C Chassis Ground Based on model ordered some pin Type 631 assignments signals may not apply Figure 5 Wiring Diagram Label The wiring diagram label shows how to connect a single or dual power supplies to the 631B unit Refer to Figure 5 Wiring Diagram Label page 34 for the location of the label on the 631B unit 34 Chapter Three Overview Caution Hot Label The Caution Hot label appears on lower portion of the unit since the surface may become hot to the touch during operation Take all necessary precautions to avoid touching the portion of the unit closest to the sensor port during operation Figure 6 The Caution Hot Label page 35 shows the location of the Caution Hot label Hot surface Do not touch 2004 HCS LLC www satetytabel com 05304 Reorder No H6043 22CHPL
13. two temperature sensors one dedicated to the heater control circuit and one dedicated to the over temperature protection The over temperature protection limit is used as one layer of protection by the heater alarm circuit refer to Table 8 Over Temperature Cutoff Value for the over temperature value for each of the operating temperatures If the transducer temperature reaches the over temperature cutoff the Htr Fail Status LED will glow red the heater alarm relay becomes de energized and the At Temp Status LED will glow yellow Note that once the temperature drops below the overtemperature cutoff the heater power will be activated the heater alarm relay energized the At Temp Status LED will continue to glow yellow and the Htr Fail Status LED will turn off Operating Temperature Over Temperature C Value C 40 Chapter Four Operation Table 8 Over Temperature Cutoff Value sia ii AtTem Htr Fail State of Heater Conditions Determining Status LEDs and p Relav Output Status Status Alarm Relay ESSE LED LED Contacts 1 PowerON Energized 2 Temp below lower limit of LED temperature window Yellow Off Pin 13 Open 3 Heater current ON Pin 14 Closed 1 Power ON De energized 2 Temp below lower limit of LED temperature window Yellow Red Pin 13 Closed 3 Heater current OFF Pin 14 Open 1 Power ON Energized 2 Temp within LED temperature window Green Off Pin 13 Open 3 Heater current
14. 00 Typically the ZERO potentiometer provides ample control under normal conditions However if the ZERO potentiometer fails to provide sufficient adjustment additional zero range capability is available with the COARSE ZERO switch located on the side of the unit refer to Figure 2 Top View of the Type 631B Transducer page 30 or Figure 3 Top View of the Type 631B Transducer With Optional Relay System page 31 for location of the ZERO potentiometer and coarse zero switch Refer to How To Adjust the Coarse Zero Switch page 39 for more information 38 Chapter Four Operation How To Adjust the Coarse Zero Switch Note n Use the COARSE ZERO switch only if the ZERO potentiometer fails to H provide sufficient adjustment To adjust the COARSE ZERO switch 1 Install the transducer in a system and connect a power supply readout 2 Power the transducer and allow it to warm up and stabilize Note n Allow 2 hours for units to warm up Ensure that the transducer is fully stabilized and the At Temp Status LED is glowing green before you adjust the zero 3 Pump the unit down to a pressure below its resolution For best results pump the transducer while it is warming up Refer to Table 7 page 38 for the highest recommended pressure levels for proper zero adjustment 4 Center the ZERO potentiometer located at the top of the transducer by adjusting the screw to leave an equal amount of adjustment both clockwise and counterclockwi
15. 00 1000 mmHg Torr For other ranges consult factory Energized 1 Amp 24 VDC 15 VDC 5 1 0 Amp max Inconel and Incolov Some fitting options may be types 304 or 316 stainless steel 0 to 10 VDC corresponding to 0 to 100 F S for each trip point DPDT Contact 0 3 A 125 VAC 1 0 A 30 VDC UL1950 Basic Insulation 125 V 4 53kQ maximum source impedance 0 to 10 VDC into gt 10K ohm load 120 of F S or 45 psia whichever is greater 150 C 302 F 200 C 392 F Absolute pressure 7 33 cc 0 447 cu in 1 16 lbs 0 524 kg 3 Dimensions do not include the external connector and tubulation 49 Appendix A Product Specifications Performance Specifications Accuracy 150 C 200 C 0 5 of Reading CE Compliance Electromagnetic Compatibility EMC Directive 2004 108 EC Temperature Coefficients 150 C Units 200 C Units Zero 10 100 1000 mmHg 0 0040 F S C 0 0080 F S C Zero 1 mmHg 0 0080 F S C 0 0160 F S C Span 0 02 of Reading C 0 02 of Reading C Environmental Specifications Ambient Operating Temperature Range 150 C Units 10 to 50 C 50 to 122 F Minimum 50 ft min air flow is required if the ambient temperature is between 45 to 50 C 113 to 122 F 200 C Units 10 to 50 C 50 to 122 F Minimum 150 ft min air flow is required if the ambient temperature is between 40 to 50 C 104 to 122 F Stora
16. 5032 AS E 37 Courant continu et Courant alternatif alternatif Mat riel de classe Il triphas IEC 417 No 5033 a IEC 417 No 5172 a IEC 617 2 No 020206 A AA Attention se reporter Attention risque de Attention surface la documentation choc lectrique br lante ISO 3864 No B 3 1 ISO 3864 No B 3 6 IEC 417 No 5041 Tableau 3 D finition des symboles apparaissant sur l unit Informations relatives la s curit pour le transducteur de pression Mesures de s curit et pr cautions Prendre les pr cautions g n rales de s curit suivantes pendant toutes les phases d exploitation de cet appareil Le non respect des ces pr cautions ou des avertissements contenus dans ce manuel constitue une violation des normes de s curit relatives l utilisation de l appareil et peut diminuer la protection fournie par l appareil MKS Instruments Inc n assume aucune responsabilit concernant le non respect des consignes par les clients PAS DE SUBSTITUTION DE PI CES OU DE MODIFICATION DE L APPAREIL Ne pas installer des pi ces de substitution ou effectuer des modifications non autoris es sur l appareil Renvoyer l appareil un centre de service et de calibrage MKS pour tout d pannage ou r paration afin de garantir le l int grit des dispositifs de s curit DEPANNAGE UNIQUEMENT PAR DU PERSONNEL QUALIFIE Le personnel d exploitation ne doit pas essayer de remplacer des composants ou de faire des r glages in
17. 84 P1 Rev D SPECIAL NOTICE This warranty is void if the product is installed using single or double metal ferrule compression type vacuum fittings shown below These fittings are commonly tightened incorrectly causing damage to the pressure sensor Single Ferrule Double Ferrule 138084 P1 Rev D 4 13 MKS Baratron Type 631B High Temperature Pressure Transducer mks ui APACITANCE MANOMETER ee ology for Producti Copyright 2013 by MKS Instruments Inc All rights reserved No part of this work may be reproduced or transmitted in any form or by any means electronic or mechanical including photocopying and recording or by any information storage or retrieval system except as may be expressly permitted in writing by MKS Instruments Inc Printed in the United States of America Baratron is a registered trademark and Cluster Gauge is a trademark of MKS Instruments Inc Andover MA USA Swagelok VCR VCO and Ultra Torr are registered trademarks of Swagelok Company Solon OH USA Tri Clover is a registered trademark of Tri Clover Inc Kenosha WI USA Inconel and Incoloy are registered trademarks of Inco Alloys International Inc Huntington WV USA Protected by U S Patent Numbers 4785669 and 5625152 Foreign patents pending Some Baratron products may not be exported to many end user countries without both US and local government e
18. CHEITE DES CONNEXIONS V rifier attentivement toutes les connexions des composants pour le vide afin de garantir l tanch it de l installation EXPLOITATION AVEC DES PRESSIONS D ENTR E NON DANGEREUSES Ne jamais utiliser des pressions sup rieures la pression nominale maximum se reporter aux sp cifications de l unit pour la pression maximum admissible INSTALLATION D UN DISQUE D CHAPPEMENT ADAPT En cas d exploitation avec une source de gaz pressuris installer un disque d chappement adapt dans le syst me vide afin d viter une explosion du syst me en cas d augmentation de la pression MAINTIEN DE L UNIT L ABRI DES CONTAMINATIONS Ne pas laisser des produits contaminants p n trer dans l unit avant ou pendant l utilisation Des produits contaminants tels que des poussi res et des fragments de tissu de glace et de m tal peuvent endommager l unit d une mani re permanente ou contaminer le processus RESPECT DU TEMPS D CHAUFFEMENT APPROPRI POUR LES UNIT S TEMP RATURE CONTR L E Les unit s temp rature contr l e atteignent leurs sp cifications uniquement quand on leur laisse un temps suffisant pour atteindre d une mani re stable la temp rature d exploitation Ne pas remettre z ro ou calibrer l unit tant que l chauffement n est pas termin Medidas de seguridad del transductor de presi n Medidas de seguridad del transductor de presion Simbolos usados en este manual de
19. Figure 6 The Caution Hot Label Serial Number Label The serial number label contains the serial number and specific model code of your unit It also lists the input power and range individually The serial number label is affixed to the side of the unit opposite the wiring diagram label Serial Range 0 10 TORR sa eee utput 0 Model INN KM 631BXXXYZBC C Figure 7 The Serial Number Label 33 Chapter Three Overview This page intentionally left blank 36 Chapter Four Operation Chapter Four Operation How To Zero the Type 631 Transducer MKS pressure transducers are precision measuring instruments and will require initial and periodic zero adjustments Prior to initial operation and during periodic maintenance you must check the transducer zero to verify the proper output The zero can be set or reset by adjusting the ZERO potentiometer located on the top of the transducer refer to How To Adjust the Zero Potentiometer page 38 or at the front panel of any MKS Power Supply Readout being used If the ZERO potentiometer fails to provide sufficient adjustment the COARSE ZERO switch may be used refer to How To Adjust the Coarse Zero Switch page 39 To achieve the full dynamic range specified for the transducer the zero adjustment must be made at a pressure less than the transducer s resolution refer to Table 7 Highest Pressures Suggested for Proper Zero Adjustment Low range transducer
20. MKS Baratron Type 631B High Temperature Pressure Transducer Instruction Manual 2 Technology Drive 138084 P1 Andover MA USA 01810 REV D 04 13 Instruction Manual Main 978 645 5500 USA 800 227 8766 emks Technology for Productivity WARRANTY Type 631B Equipment MKS Instruments Inc MKS warrants that for two years from the date of shipment the equipment described above the equipment manufactured by MKS shall be free from defects in materials and workmanship and will correctly perform all date related operations including without limitation accepting data entry sequencing sorting comparing and reporting regardless of the date the operation is performed or the date involved in the operation provided that if the equipment exchanges data or is otherwise used with equipment software or other products of others such products of others themselves correctly perform all date related operations and store and transmit dates and date related data in a format compatible with MKS equipment THIS WARRANTY IS MKS SOLE WARRANTY CONCERNING DATE RELATED OPERATIONS For the period commencing with the date of shipment of this equipment and ending two years later MKS will at its option either repair or replace any part which is defective in materials or workmanship or with respect to the date related operations warranty without charge to the purchaser The foregoing shall constitute the exclusive and sole remedy of the pu
21. ard as shown in Figure 1 to reduce the chance of contaminants entering the device and degrading its performance The sensor is zeroed at the factory in the vertical orientation shown in Figure 1 You should zero the unit again after installation following the steps in How To Zero the Type 631 Transducer page 37 If you anticipate vibration orient the plane of the diaphragm parallel with the major oscillating axis The edge of the diaphragm is indicated by the dashed line in Figure 1 Note nl If vibration causes the unit to be oriented such that the Px port is not D facing downward you must decide the best orientation for optimum performance Edge of the Sensor Diaphragm ue Figure 1 Recommended Orientation of the Type 631B Transducer Note nil Consult the MKS Applications group if your application requires a 3 1 Torr full scale transducer and you cannot position the 631B transducer vertically 26 Chapter Two Installation Piping Considerations and Port Connections General e Position a line tap above or to the side of the process line and position the sensor above the line tap This allows any liquids which may be present to drain into the process line e Install the interconnecting piping so that it slopes away from the sensor to the process line A slope of 1 inch per foot 8 centimeters per meter is adequate e Purge the interconnecting piping close to the process tap when needed to prevent sediment buildup
22. azar los componentes o realizar tareas de ajuste en el interior del instrumento Las tareas de mantenimiento o reparaci n deben ser realizadas unicamente por personal autorizado TENGA CUIDADO CUANDO TRABAJE CON MATERIALES TOXICOS Cuando se utilicen materiales t xicos es responsabilidad de los operarios tomar las medidas de seguridad correspondientes purgar totalmente el instrumento cuando sea necesario y comprobar que el material utilizado sea compatible con los materiales del instrumento e inclusive con todos los materiales de sellado PURGUE EL INSTRUMENTO Una vez instalada la unidad o antes de retirarla del sistema purgue completamente la unidad con gas limpio y seco para eliminar todo resto de la sustancia liquida empleada anteriormente USE PROCEDIMIENTOS ADECUADOS PARA REALIZAR LA PURGA El instrumento debe purgarse debajo de una campana de ventilaci n y deben utilizarse guantes protectores NO HAGA FUNCIONAR EL INSTRUMENTO EN AMBIENTES CON RIESGO DE EXPLOSION Para evitar que se produzcan explosiones no haga funcionar este instrumento en un ambiente con riesgo de explosiones excepto cuando el mismo haya sido certificado especificamente para tal uso 15 Medidas de seguridad del transductor de presi n USE ACCESORIOS ADECUADOS Y REALICE CORRECTAMENTE LOS PROCEDIMIENTOS DE AJUSTE Todos los accesorios del instrumento deben cumplir las especificaciones del mismo y ser compatibles con el uso que se debe dar al instrumen
23. ce sonen 47 Troubleshooting Eege ee ee EES ee e 48 High Low or Erratic Output or No Output at Al 48 Appendix A Product Specifications 49 INS 49 Performance Specifications iii 50 Table of Contents Environmental Specifications ss 50 Appendix B Model Code Explanation ss SI Model Code ii riti SI 55 Table of Contents List of Figures and Tables Figures Figure 1 Recommended Orientation of the Type 631B Transducer 26 Figure 2 Top View of the Type 631B Transducer Without Optional Relay System 30 Figure 3 Top View of the Type 631B Transducer With Optional Relay System 31 Figure 4 Dimensions of the Type 631B Transducer i 32 Figure 5 Witing Diagram Label iii nina 34 Figure 6 The Caution Hot Label vz sis Arai reina 35 Figure 7 The Serial Number Label ss 35 Figure 8 Location of the Trip Point Adjustment Pots and Trip Point Signal Output 44 Figure 9 LED and Relay State When Trip Point Direction Set Above Trip Point Value 45 Figure 10 LED and Relay State When Trip Point Direction Set Below Trip Point Value 45 Tables Table 1 Definition of Symbols Found on the Unit nennen 2 Tabelle 2 Bedeutung der am Ger t angebrachten Symbole 6 Tableau 3 D finition des symboles apparaissant sur l unit
24. d gas This deflection causes a capacitance change between the diaphragm and the adjacent electrode assembly When pressure is equal on both sides of the diaphragm the bridge is balanced As pressure deflects the diaphragm toward the electrode the center capacitance changes more than the outer capacitance causing the bridge to become unbalanced and an AC voltage to be generated Signal Conditioner The signal conditioner contains the state of the art low impedance balanced bridge circuitry self compensated for thermal stability with ambient temperature changes The output is linear with pressure and provides a 0 VDC output at Zero pressure and a 10 VDC output at sensor Full Scale Instrument Components and Dimensions The 631B transducer has two adjustments for zero a potentiometer and a coarse zero switch The location of both are the same for the 631B with and without the trip point relay system and are shown in Figure 2 Top View of the Type 631B Transducer Without Optional Relay System and Figure 3 Top View of the Type 631B Transducer With Optional Relay System pages 30 and 31 respectively The top of the 631B transducer without the optional relay system has two LEDs to indicate the status of the sensor heater At power up the At Temp Status LED will be yellow Once the sensor temperature reaches the normal operating temperature this LED will turn green The Htr Fail Status LED is off unless the heater unit fails Should t
25. e is specified in Appendix A Product Specifications page 49 45 Chapter Five Optional Relay System This page intentionally left blank 46 Chapter Six Maintenance and Troubleshooting Chapter Six Maintenance and Troubleshooting General Maintenance For best accuracy and repeatability MKS recommends that you e Zero the unit regularly Follow the procedure described in How To Zero the Type 631 Transducer page 37 on a regular basis e Schedule re calibration annually Follow an annual recalibration schedule if no other time interval has been specifically established e Periodically check for wear on the cables and inspect the enclosure for visible signs of damage 47 Chapter Six Maintenance and Troubleshooting Troubleshooting High Low or Erratic Output or No Output at All Check the Interconnecting Piping e Be sure there are no leaks or blockage in the interconnecting piping e Look for sediment in the sensor process connection s Remove the sediment by purging the connection s with a solvent appropriate for your process Caution Damage may occur to the sensor if the sediment is removed with a harsh solvent or by scraping Therefore e Do not scrape the inside of the process connection s e Only clean the process connection s with solvent appropriate for your process Check the Wiring e Ensure the voltage to the transducer is 4 15 VDC 4 5 1 0 Amps e Verify that the to
26. e returns to the selected trip point value plus hysteresis refer to Trip Point Direction page 44 for a description of how hysteresis affects the relay switching The interface connector houses the contact pins of both trip point relays to equip the user with remote indication of the relay status The three pins of each relay produce an open closed output for example if Trip Point A is energized pins 3 amp 4 will be an open circuit Refer to Table 6 Pinout of the Interface Connector J1 page 34 for the pinout of the Interface J1 Connector Trip Point Parameters Trip Point Values The trip point value is the pressure condition that each relay will become energized The trip point value of each relay can be adjusted individually using the trip point adjustment POT These POTs are located on the top of the 631B unit as shown on Figure 8 page 44 and labeled as Adj above the corresponding Trip Pt A and Trip Pt B label The trip point value can be monitored by measuring the voltage between the trip point signal of interest and the ground labeled as Trip Pt Signals and Gnd A pair of 0 080 inch test point jacks must be used in order to gain access to the trip point voltage signals The trip point signal voltage ranges from 0 to 10 V which corresponds to the pressure range of the unit from zero to full scale 43 Chapter Five Optional Relay System Trip Point Trip Point l Signal Ground Adjus
27. e the most sensitive Any vibration that does exist should be isolated from the unit with vibration isolation mounting and a bellows coupling e Warm up Time 2 hours 23 Chapter Two Installation Environmental Requirements Caution DO NOT use a thermal blanket on the 631B unit The 631B transducer is designed to maintain its specified operating temperature without external assistance e Operating ambient temperature 150 C units 10 to 50 C 50 to 122 F 200 C units 10 to 50 C 50 to 122 F Caution u Airflow of at least 50 ft min is REQUIRED for 150 C units if the ambient temperature is 45 to 50 C 113 to 122 F Airflow of at least 150 ft min is REQUIRED for 200 C units if the ambient temperature is 40 to 50 C 104 to 122 F eVentilation requirements include sufficient air circulation Caution All high temperature equipment requires sufficient air circulation to prevent heat buildup the high temperature 631B transducer is no exception If the 631B transducer is placed in an environment with still air or insufficient air circulation the temperature of the air surrounding the transducer will rise You must provide sufficient air circulation to prevent heat build up around the 631B transducer e Storage Humidity Range 25 to 95 relative humidity non condensing e Storage Temperature Range 20 to 80 C 4 to 176 F 24 Chapter Two Installation Setup General To obta
28. e the pressure to electronic output conversion A power supply readout can also be used to provide a direct pressure display the necessary Y type cables are available from MKS The 631B transducer measures absolute pressure so only the measurement port has a connector During production the reference port Pr is pumped down to a pressure less than 10 Torr and outgassed thoroughly A chemical getter is added to maintain the low pressure and the port is permanently sealed Temperature control of the transducer minimizes the effects of ambient or process temperature variations typically encountered in process line environments The sensor temperature is continually monitored two status LEDs provide visual indication of the unit s temperature control status The LED labeled Htr Fail Status is normally off Ifthe sensor heater fails the LED becomes red and the associated relay becomes de energized The LED labeled At Temp Status is yellow while the unit heats up and green when the unit is at the correct temperature The unit requires a warm up time of two hours before any pressure data should be taken Using the latest single sided dual electrode Inconel sensor design coupled with low impedance fixed frequency bridge signal conditioner these instruments are capable of withstanding high overpressure conditions 45 psia The high overpressure limit coupled with the high temperature operation ensures maximum zero stability T
29. g current IEC 417 No 5032 Both direct and Three phase alternating current alternating current IEC 417 No 5033 a IEC 617 2 No 020206 Caution refer to accompanying Caution risk of documents electric shock Caution hot surface ISO 3864 No B 3 1 ISO 3864 No B 3 6 IEC 417 No 5041 Table 1 Definition of Symbols Found on the Unit Safety Information Safety Procedures and Precautions The following general safety precautions must be observed during all phases of operation of this instrument Failure to comply with these precautions or with specific warnings elsewhere in this manual violates safety standards of intended use of the instrument and may impair the protection provided by the equipment MKS Instruments Inc assumes no liability for the customers failure to comply with these requirements DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained SERVICE BY QUALIFIED PERSONNEL ONLY Operating personnel must not remove instrument covers Component replacement and internal adjustments must be made by qualified service personnel only DO NOT OPERATE IN EXPLOSIVE ATMOSPHERES To avoid explosion do not operate this product in an explosive atmosphere unless it has been specifically certified for such operation
30. ge Humidity Range 25 to 95 Relative Humidity non condensing Storage Temperature Range 20 to 80 C Due to continuing research and development activities these product specifications are subject to change without notice 4 Includes non linearity hysteresis and non repeatability 50 Appendix B Model Code Explanation Appendix B Model Code Explanation Model Code The options of your transducer are identified in the model code when you order the unit The model code is identified as follows 631BWWXYZTUV where 631B WW X Y Z T UV Type Number Full Scale Range Engineering Units Fittings Accuracy Temperature Trip Points Type Number 631B This designates the model number of the instrument Full Scale Range WW The full scale range is indicated by a two digit code Ordering Code 01 2 02 10 11 30 31 100 12 1 000 13 Note ua Consult the factory for higher Full Scale ranges U Engineering Units X Your fitting choice is designated by a single letter code Ordering Code SI Appendix B Model Code Explanation Torr mm Hg T KiloPascal K Pascal L Mbar M Fittings Y Your fitting choice is designated by a single letter code Ordering Code Y diameter tube Swagelok 8 VCR female NW 16 KF 14 Tri Clover 2 Tri Clover GE Op S Accuracy Z The standard accuracy 0 5 of Reading is specified by a letter F in this field Temperature T The operating tem
31. he 631B transducer diaphragm design results in extremely low hysteresis and the ability to specify a 0 50 accuracy as a percentage of Reading 1 U S Patent No 5625152 2 U S Patent No 4785669 17 Chapter One General Information instead of as a percentage of Full Scale Since the accuracy is based on a percentage of Reading the transducer can be used over a wide dynamic measuring range without the need for re ranging thus providing accurate process monitoring in a wide variety of operating conditions This product can be used for pressure and vacuum measurements with a wide variety of process gases including but not limited to toxic pyrophoric and oxidizing materials such as silane SiH dichlorosilane C1 H2Si trichlorosilane CI HSi anhydrous ammonia NH ozone 03 and de ionized water vapor DIW However it is not recommended for use with corrosive or explosive gases so please contact the MKS Applications group or your local MKS Account Manager if you plan to use the product with such gases This product contains electronic components made with non toxic metals and the packaging materials are recyclable plastics However at the end of life of the product decommissioning must be performed in accordance with your local environmental regulations in consideration of the chemicals and gases that this product has been exposed to How This Manual is Organized This manual is designed to provide instructions on how
32. he heater unit fail Htr Fail Status LED will illuminate red and the At Temp Status LED will turn yellow A heater alarm relay will become de energized and change state providing a remote indication of a heater circuit failure using dedicated pins in the interface connector Refer to Figure 2 Top View of the Type 631B Transducer Without Optional Relay System page 30 to identify the location of the At Temp Status and Htr Fail Status LEDs Refer to Heater Status LEDs and Heater Alarm Relay page 40 for a detailed discussion of the operation of the heating system LEDs and relays 29 Chapter Three Overview Zero Pot Htr Fail At Temp Status Status 000000 o o0o00000 Htr Fail Status LED At Temp gt Status LED Interface Connector Figure 2 Top View of the Type 631B Transducer Without Optional Relay System The transducer with the optional trip point relay system has the same functionality as the transducer without the relay system described above The relay system brings an additional two LEDs two adjustment POTs and three test plugs to the top of the transducer Refer to Figure 3 Top View of the Type 631B Transducer With Optional Relay System below showing the location of the trip point relay system components The trip point status LEDs glow green when the corresponding relay is energized and are off when the corresponding relay is de energized depending on the relationship bet
33. iare 21 Interface Cables ie un en erkennen ie ges 22 Cable to Connect to the Power Supply nn nn 23 Product Location and Requirement essen nn 23 Environmental Requirements 4 24 EDU ere a geed eet eer 25 C R ALES Ans a pe Dei ie AA ia msi 25 Environmental Considerations iii 25 111 Table of Contents SENSOR een EE Eer Eer 26 Piping Considerations and Port Connections 27 General alia aa 27 Sensor WA a 27 Chapter Three Overview Lira dE ARTE NEEN EEN 29 SENSOLL e A i ii 29 enee ue TEE 29 Instrument Components and Dimensions i 29 Interface EE 33 Pressure BL E 34 Ovetpressure Considerations isteria iii 34 Labels nenne anne lano 34 Wiring Diagram Label 34 Caution Hot Label p ou 35 SerialNumber Label ilo aa are it 35 Chapter Four Operatiohi iiara nile iaia e bread 37 How To Zero the Type 631 Transducer en nenne 37 How To Adjust the Zero Potentiometer i 38 How To Adjust the Coarse Zero Switch 39 Heater Status LEDs and Heater Alarm Relay 40 Over Temperature Protection nn nne nenne 40 Chapter Five Optional Relay SystemM nn sne nn 43 General Informations sains inner waste a ata RER nr E 43 Trip Point Parameters nn sn nennen 43 Trip Point Values ua A ii di 43 Trip Point Direction une aa 44 Chapter Six Maintenance and Troubleshooting iii 47 General Maintenan
34. immunity tests MKS products that meet these requirements are identified by application of the CE Mark MKS offers the following interface cables to connect the 631B unit to your system Interface Cables Cable Number Number of Power Supplies xx designates the length of the cable in feet Table 5 Interface Cables 22 Chapter Two Installation Cable to Connect to the Power Supply The 631B transducer is powered by one 15 Volt power supply for both the electronics and heater The cable connection to the 631B transducer via the Interface connector is shown in Figure 2 Top View of the Type 631B Transducer page 30 Refer to Table 6 Pinout of the Interface Connector J1 page 34 for the complete list of pin assignments for the Interface connector Product Location and Requirements e Voltage 15 VDC 45 e Current 1 0 Amp maximum for the heater and electronics e Overpressure limits 45 psia or 120 of sensor Full Scale whichever is greater e Mount the Type 631B transducer components correctly refer to Figure 1 Recommended Orientation of the Type 631B Transducer page 26 for the recommended orientation of the sensor e Maintain a solid system ground for proper operation and safety to personnel e Isolate the unit from vibration Keep the unit free from vibration The diaphragm may be susceptible to resonance when there is not enough gas present to dampen the effects of vibration The 1 Torr Full Scale units ar
35. in maximum accuracy from your Type 631B transducer be sure the interconnecting piping and the transducer components themselves are properly installed Some general guidelines are e Mount the transducer such that vibration shock and temperature fluctuations are minimized and that the product s inlet always points downward or horizontally e Minimize interconnecting piping e Ensure adequate room to maintain environmental requirements and safety considerations and to provide easy access for calibration Environmental Considerations The 631B high temperature transducer is designed to operate at its specified operating temperature To meet this high operating temperature you must follow these guidelines e DONOT use a thermal blanket on the 631B transducer The addition of a thermal blanket will cause the electronics to overheat e Provide adequate air circulation Sufficient air circulation is necessary to prevent heat buildup within the transducer ambient temperature is 45 to 50 C 113 to 122 F Airflow of at least 150 ft min is REQUIRED for 200 C units if the ambient temperature is 40 to 50 C 104 to 122 F Warning WY Airflow of at least 50 ft min is REQUIRED for 150 C units if the 25 Chapter Two Installation Sensor The 631B transducer can be installed in any orientation as long as the inlet tube is not facing upwards However for best results it is recommended that the Px port of the unit face downw
36. indungen auf Undichtigkeiten pr fen berpr fen Sie sorgf ltig alle Verbindungen der Vakuumkomponenten auf undichte Stellen Ger t nur unter zul ssigen Anschlu dr cken betreiben Betreiben Sie das Ger t niemals unter Dr cken die den maximal zul ssigen Druck siehe Produktspezifikationen bersteigen Geeignete Berstscheibe installieren Wenn mit einer unter Druck stehenden Gasquelle gearbeitet wird sollte eine geeignete Berstscheibe in das Vakuumsystem installiert werden um eine Explosionsgefahr aufgrund von steigendem Systemdruck zu vermeiden Verunreinigungen im Ger t vermeiden Stellen Sie sicher da Verunreinigungen jeglicher Art weder vor dem Einsatz noch w hrend des Betriebs in das Instrumenteninnere gelangen k nnen Staub und Schmutzpartikel Glassplitter oder Metallsp ne k nnen das Ger t dauerhaft besch digen oder Proze und Me werte verf lschen Bei Ger ten mit Temperaturkontrolle korrekte Anw rmzeit einhalten Temperaturkontrollierte Ger te arbeiten nur dann gem ihrer Spezifikation wenn gen gend Zeit zum Erreichen und Stabilisieren der Betriebstemperatur einger umt wird Kalibrierungen und Nulleinstellungen sollten daher nur nach Abschlu des Anw rmvorgangs durchgef hrt werden Informations relatives la s curit pour le transducteur de pression Informations relatives la s curit pour le transducteur de pression Symboles utilis s dans ce manuel d utilisation D fi
37. instrucciones Definiciones de los mensajes de advertencia precauci n y de las notas usados en el manual Advertencia y Precauci n u Nota El simbolo de advertencia indica la posibilidad de que se produzcan danos personales Pone de relieve un procedimiento pr ctica estado etc que en caso de no realizarse u observarse correctamente puede causar danos personales El simbolo de precauci n indica la posibilidad de producir dafios al equipo Pone de relieve un procedimiento operativo pr ctica estado etc que en caso de no realizarse u observarse correctamente puede causar da os o la destrucci n total o parcial del equipo El s mbolo de notas indica informaci n de importancia Este s mbolo pone de relieve un procedimiento pr ctica o condici n cuyo conocimiento es esencial destacar 13 Medidas de seguridad del transductor de presi n Simbolos hallados en la unidad La tabla siguiente contiene los simbolos que puede hallar en la unidad Definici n de los simbolos hallados en la unidad Apagado alimentaci n el ctrica IEC 417 N 5008 Protecci n a tierra Encendido IEC 417 N 5019 alimentaci n el ctrica IEC 417 N 5007 le b Corriente alterna IEC 417 N 5032 Puesta a tierra IEC 417 N 5017 Corriente continua Equipotencialidad IEC 417 N 5031 Caja o chasis IEC 417 N 5021 IEC 417 N 5020 FU BI 3 Corriente alterna Corriente continua y alterna IEC 417
38. l of our regional MKS Calibration and Service Centers listed on the back cover In addition MKS accepts the instruments of other manufacturers for recalibration using the Primary and Transfer Standard calibration equipment located at all of our regional service centers Should any difficulties arise in the use of your Type 631B instrument or to obtain information about companion products MKS offers contact any authorized MKS Calibration and Service Center If it is necessary to return the instrument to MKS please obtain an RMA Number Return Material Authorization Number from the MKS Calibration and Service Center before shipping The RMA Number expedites handling and ensures proper servicing of your instrument Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers Warning AII returns to MKS Instruments must be free of harmful corrosive radioactive or toxic materials 19 Chapter One General Information This page intentionally left blank 20 Chapter Two Installation Chapter Two Installation How To Unpack the Type 631B Unit MKS has carefully packed the Type 631B unit so that it will reach you in perfect operating order Upon receiving the unit however you should check for defects cracks broken connectors etc to be certain that damage has not occurred during shipment Note nil Do not discard any packing materials until you have completed your 5 inspection and
39. larm relay will be energized to indicate that the heater is working During the warm up period the Htr Fail Status LED will be off and the At Temp Status LED will glow yellow When the actual temperature of the sensor is within the LED temperature window 631B heater is in control and the At Temp Status LED will glow green The heater alarm relay will continue to be energized and the Htr Fail Status LED will continue to be off Note that the LED temperature window is approximately within 8 of the operating temperature 150 C or 200 C and is used for a gross indication the sensor is within acceptable limits The actual operating temperature of the sensor is maintained within a significantly tighter range If the heater control circuitry fails in a no current failure mode the sensor will begin to cool At this time the Htr Fail Status LED will glow red and the heater alarm relay will be de energized When the sensor temperature falls below the lower limit of the operating temperature LED window the At Temp Status LED will glow yellow If the heater control circuit fails in a always On mode the sensor will overheat The At Temp Status LED will glow yellow when the sensor temperature reaches the upper limit of the LED temperature window the Htr Fail Status LED will continue to be off and the heater alarm relay will continue to be energized Over Temperature Protection The heater implements
40. nitions des indications AVERTISSEMENT ATTENTION et REMARQUE utilis es dans ce manuel Avertissement y Attention Y Remarque y L indication AVERTISSEMENT signale un danger pour le personnel Elle attire l attention sur une proc dure une pratique une condition ou toute autre situation pr sentant un risque d accident pour le personnel en cas d ex cution incorrecte ou de non respect des consignes L indication ATTENTION signale un danger pour l appareil Elle attire l attention sur une proc dure d exploitation une pratique ou toute autre situation pr sentant un risque d endommagement ou de destruction d une partie ou de la totalit de l appareil en cas d ex cution incorrecte ou de non respect des consignes L indication REMARQUE signale une information importante Elle attire l attention sur une proc dure une pratique une condition ou toute autre situation pr sentant un int r t particulier Informations relatives la s curit pour le transducteur de pression Symboles apparaissant sur l unit Le tableau suivant d crit les symboles pouvant appara tre sur l unit D finition des symboles apparaissant sur l unit Marche Terre de protection sous tension Arr t hors tension Terre masse masse IEC 417 No 5007 IEC 417 No 5008 IEC 417 No 5017 IEC 417 No 5019 J A Masse Equipotentialit Courant continu Courant alternatif IEC 417 No 5020 IEC 417 No 5021 IEC 417 No 5031 IEC 417 No
41. p point hysteresis is preset as 0 3 of FS 0 030 Volts and its purpose to prevent undesired bouncing in the electro mechanical relay 44 Chapter Five Optional Relay System IF Initial Pressure gt Trip Point Value LED ON Relay Energized LED OFF Relay De Energized TRIP POINT VALUE 0 030 Volts TRIP POINT HYSTERESIS IF Initial Pressure lt Trip Point Value Final Pressure Figure 9 LED and Relay State When Trip Point Direction Set Above Trip Point Value If the preset direction for Trip Point B is below the trip point is energized as the pressure falls below the specified trip point level The trip point is not de energized until the pressure rises above the value defined by the hysteresis as shown in Figure 10 Figure 10 also depicts the relay being energized when the initial pressure condition applied to the unit is below the trip point value IF Initial Pressure gt Trip Point Value Final Pressure TRIP POINT HYSTERESIS 0 030 Volts TRIP POINT VALUE LED ON Relay Energized LED OFF IF Initial Pressure lt Trip Point Value Relay De Energized Figure 10 LED and Relay State When Trip Point Direction Set Below Trip Point Value Note that regardless of trip point direction the time response of the 631B transducer will have a minor affect of the time between 1 a change in the pressure condition necessary to cause a change in the relay state and 2 the relay actually changing state The time respons
42. perature of the transducer is specified by a single letter Ordering Code 150 C H 200 C P Trip Points UV The optional relay system is specified by a two letter code When ordering without the relay system this portion of the model code is omitted Trip Point Direction Trip Point Value l i i Ordering Code Trip Point A Trip Point B Trip Point A Trip Point B Above Above 5 Volts 5 Volts AA Above Below 5 Volts 5 Volts AB Below Below 5 Volts 5 Volts BB Below Above 5 Volts 5 Volts BA Above Below 5 Volts 9 5 Volts 02 52 Appendix B Model Code Explanation Below Below 5 Volts 9 5 Volts 03 53 Appendix B Model Code Explanation This page intentionally left blank 54 Index A Accuracy 17 50 52 Air flow 24 25 50 Alarm heater 40 C Cables 17 22 23 CE compliance 50 Connectors 30 31 33 Customer support 18 D Dimensions 32 49 E Environmental 24 25 50 F Fittings 27 49 52 Full scale range 17 49 51 G Grounding 23 H Heater fail relay 40 41 49 Humidity storage 24 50 I Input power 17 23 48 49 Interface cables 17 22 55 Index L Labels 34 35 hot 35 serial number 35 wiring diamgram 34 M Maintenance 47 Manual organization 18 Model code 51 Mounting 25 26 O Output signal 17 29 34 49 Overpressure 17 23 34 49 Overtemperature 40 41
43. qualifizierten Fachleuten durchgef hrt werden niemals vom Bedienpersonal Vorsicht beim Arbeiten mit gef hrlichen Stoffen Wenn gef hrliche Stoffe verwendet werden mu der Bediener die entsprechenden Sicherheitsvorschriften genauestens einhalten das Ger t falls erforderlich vollst ndig sp len sowie sicherstellen da der Gefahrstoff die am Ger t verwendeten Materialien insbesondere Dichtungen nicht angreift Sp len des Ger tes mit Gas Nach dem Installieren oder vor dem Ausbau aus einem System mu das Ger t unter Einsatz eines reinen Trockengases vollst ndig gesp lt werden um alle R ckst nde des Vorg ngermediums zu entfernen Anweisungen zum Sp len des Ger tes Das Ger t darf nur unter einer Ablufthaube gesp lt werden Schutzhandschuhe sind zu tragen Ger t nicht zusammen mit explosiven Stoffen Gasen oder D mpfen benutzen Um der Gefahr einer Explosion vorzubeugen darf dieses Ger t niemals zusammen mit oder in der N he von explosiven Stoffen aller Art eingesetzt werden sofern es nicht ausdr cklich f r diesen Zweck zugelassen ist Sicherheitshinweise f r den Druckme umformer Anweisungen zum Installieren der Armaturen Alle Anschlu st cke und Armaturenteile m ssen mit der Ger tespezifikation bereinstimmen und mit dem geplanten Einsatz des Ger tes kompatibel sein Der Einbau insbesondere das Anziehen und Abdichten mu gem den Anweisungen des Herstellers vorgenommen werden Verb
44. rchaser for any breach by MKS of this warranty The purchaser before returning any equipment covered by this warranty which is asserted to be defective by the purchaser shall make specific written arrange ments with respect to the responsibility for shipping the equipment and handling any other incidental charges with the MKS sales representative or distributor from which the equipment was purchased or in the case of a direct purchase from MKS with the MKS home office in Andover Massachusetts USA This warranty does not apply to any equipment which has not been installed and used in accordance with the specifications recommended by MKS for the proper and normal use of the equipment MKS shall not be liable under any circumstances for indirect special consequential or incidental damages in connection with or arising out of the sale performance or use of the equipment covered by this warranty MKS recommends that all MKS pressure and flow products be calibrated periodically typically every 6 to 12 months to ensure accurate readings When a product is returned to MKS for this periodic re calibration it is considered normal preventative maintenance not covered by any warranty THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES EXPRESSED OR IMPLIED INCLUDING THE IMPLIED WARRANTY OF MERCHANTABILITY AND THE IMPLIED WARRANTY OF FITNESS FOR A PARTICULAR PURPOSE AND ANY WARRANTY AGAINST INFRINGEMENT OF ANY PATENT 4 13 1380
45. s should be pumped for at least one hour after exposure to air to remove any moisture and to allow the pressure to stabilize Zeroing a transducer above its stated minimum resolution creates a zero offset relative to true absolute pressure All subsequent readings are then linear and accurate relative to the offset value Note n If available pressures are not sufficiently low to set the transducer zero d you may use a vacuum leak detector with sufficient vacuum pumping to achieve proper zeroing pressures In this case mount the transducer on the leak detector in the same plane of orientation as it will be during actual use 37 Chapter Four Operation How To Adjust the Zero Potentiometer To adjust the ZERO potentiometer 1 Install the transducer in a system and connect a power supply readout 2 Power the transducer and allow it to warm up and stabilize Note n Allow 2 hours for units to warm up Ensure that the transducer is fully d stabilized before you adjust the zero 3 Pump the unit down to a pressure below its resolution For best results pump the transducer while it is warming up Refer to Table 7 for the highest recommended pressure levels for proper zero adjustment Zeroing Pressure for 631 Transducer Sensor Full Scale Torr Pressure for Zeroing Torr Table 7 Highest Pressures Suggested for Proper Zero Adjustment 4 Adjust the ZERO potentiometer with a small screwdriver until the readout displays zero 0 0
46. se 5 Remove the plug that covers the COARSE ZERO switch Refer Figure 4 Dimensions of the Type 631B Transducer page 32 6 Turn the COARSE ZERO switch to a position that produces the output signal closest to 0 000 Volts 7 Adjust the ZERO potentiometer to bring the output to exactly 0 Volts Refer to How To Adjust the Zero Potentiometer page 38 for more information 8 Cover the COARSE ZERO switch with the plug removed in step 5 39 Chapter Four Operation Heater Status LEDs and Heater Alarm Relay The 631B transducer is designed to function at its specified operating temperature by maintaining the sensor temperature within a tight range of the operating temperature There are two status LEDs Htr Fail Status and At Temp Status that provide a visual indication of the heater condition Since the operating temperature of the sensor is critical the 631B unit contains a heater alarm relay that monitors the performance of the sensor heater In addition the Interface J1 connector contains the heater alarm relay contact pins Refer Table 6 Pinout of the Interface Connector J1 page 34 for the pinout of the Interface J1 connector and refer to Table 9 page 41 for a summary of the conditions determining the heater status LEDs and heater alarm relay output When power is applied to the unit the heater receives full power and the temperature of the sensor rises toward the nominal operating temperature The heater a
47. tal current being drawn by the manometer is within the specifications of the power supply e Check the signal terminals for the correct polarity e Measure the loop impedance e Look for shorts multiple grounds and defective wire insulation If the solutions presented in this chapter fail to resolve the problem return the transducer to MKS for servicing When returning the instrument to MKS please obtain an RMA Number Return Material Authorization Number from the MKS Calibration and Service Center before shipping The RMA Number expedites handling and ensures proper servicing of your instrument Refer to the inside of the back cover of this instruction manual for a complete list of MKS Calibration and Service centers corrosive radioactive or toxic materials Warning WY All returns to MKS Instruments must be free of harmful 48 Appendix A Product Specifications Appendix A Product Specifications Physical Specifications Dimensions 150 C and 200 C Full Scale Ranges Heater Unit Relay Initial State during operation Contact Rating Input Required Dual power supply Material Exposed to Gases Px port Number of Decades Covered Optional Trip Point Relay Setting Output Optional Trip Point Relay Specifications 3 15 diameter 4 55 length maximum 8 00 cm diameter 11 55 cm length 14 12 7 mm tubulation Swagelok 8 VCR female NW 16 KF 1 Tri Clover 2 Tri Clover 1 2 10 30 1
48. ternes Tout d pannage doit tre uniquement effectu par du personnel qualifi PRECAUTION EN CAS D UTILISATION AVEC DES PRODUITS DANGEREUX Si des produits dangereux sont utilis s l utilisateur est responsable de la prise des mesures de pr caution appropri es de la purge complete de l appareil quand cela est n cessaire et de la garantie que les produits utilis s sont compatibles avec les composants de cet appareil y compris les mat riaux d tanch it PURGE DE L APPAREIL Apr s l installation de l unit ou avant son enl vement d un syst me purger l unit compl tement avec un gaz propre et sec afin d liminer toute trace du produit de flux utilis pr c demment UTILISATION DES PROC DURES APPROPRI ES POUR LA PURGE Cet appareil doit tre purg sous une hotte de ventilation et il faut porter des gants de protection PAS D EXPLOITATION DANS UN ENVIRONNEMENT EXPLOSIF Pour viter toute explosion ne pas utiliser cet appareil dans un environnement explosif sauf en cas d homologation sp cifique pour une telle exploitation UTILISATION D QUIPEMENTS APPROPRI S ET PROC DURES DE SERRAGE Tous les quipements de l appareil doivent tre coh rents avec ses sp cifications et compatibles avec l utilisation pr vue de l appareil Assembler et serrer les quipements conform ment aux directives du fabricant 11 Informations relatives la s curit pour le transducteur de pression V RIFICATION DE L ETAN
49. tment POTs Adj Status Trip Pt B Adj Status Trip Pt A Htr Fail At Temp Status Status OO al Reese Je SS Access to Trip Point Voltage Signals Figure 8 Location of the Trip Point Adjustment Pots and Trip Point Signal Output Note MA The trip point adjustment voltage ranges from 0 to 10 Volts corresponding to the pressure range of the unit zero to full scale Trip Point Direction The trip point direction defines the direction of pressure change that will energize the electromechanical trip points The direction of each relav svstem is preset during manufacturing to energize the relav A when the pressure rises above the trip point value or B when the pressure drops below the trip point value Each relav functions independentiv so each of the two relavs can be set to trip in the same or in opposite directions The customer can choose the direction of each trip point relav using the appropriate model code see Appendix B Model Code Explanation page 51 If the preset direction for Trip Point A is above the trip point is energized as the pressure rises above the specified trip point value The trip point is not de energized until the pressure falls below the value defined by the hysteresis as shown in Figure 9 page 45 Figure 9 also depicts the relay being energized when the initial pressure condition applied to the unit is above the trip point value The tri
50. to Arme y ajuste los accesorios de acuerdo con las instrucciones del fabricante COMPRUEBE QUE LAS CONEXIONES SEAN A PRUEBA DE FUGAS Inspeccione cuidadosamente las conexiones de los componentes de vacio para comprobar que hayan sido instalados a prueba de fugas HAGA FUNCIONAR EL INSTRUMENTO CON PRESIONES DE ENTRADA SEGURAS No haga funcionar nunca el instrumento con presiones superiores a la maxima presi n nominal en las especificaciones del instrumento hallara la presi n maxima permitida INSTALE UNA CAPSULA DE SEGURIDAD ADECUADA Cuando el instrumento funcione con una fuente de gas presurizado instale una capsula de seguridad adecuada en el sistema de vacio para evitar que se produzcan explosiones cuando suba la presi n del sistema MANTENGA LA UNIDAD LIBRE DE CONTAMINANTES No permita el ingreso de contaminantes en la unidad antes o durante su uso Los productos contaminantes tales como polvo suciedad pelusa lascas de vidrio o virutas de metal pueden dafiar irreparablemente la unidad o contaminar el proceso CALIENTE ADECUADAMENTE LAS UNIDADES CONTROLADAS POR MEDIO DE TEMPERATURA Las unidades controladas por medio de temperatura funcionaran de acuerdo con las especificaciones solo cuando se las caliente durante el tiempo suficiente para permitir que lleguen y se estabilicen a la temperatura de operaci n indicada No calibre la unidad y no la ponga en cero hasta que finalice el procedimiento de calentamiento Chapter One
51. to set up install and operate a Type 631B unit Before installing your Type 631B unit in a system and or operating it carefully read and familiarize yourself with all precautionary notes in the Safety Messages and Procedures section at the front of this manual In addition observe and obey all WARNING and CAUTION notes provided throughout the manual Chapter One General Information this chapter introduces the product and describes the organization of the manual Chapter Two Installation explains the environmental requirements and describes how to mount the instrument in your system Chapter Three Overview gives a brief description of the instrument and its functionality Chapter Four Operation describes how to use the 631B unit and explains all the functions and features Chapter Five Optional Trip Point Relay System discusses the optional relay system and its parameters including measuring and adjusting the trip point values and specifying the trip point direction Chapter Six Maintenance and Troubleshooting provides a few maintenance recommendations and a brief troubleshooting section The Type 631B transducer is highly reliable and requires little maintenance Appendix A Product Specifications lists the specifications of the instrument Appendix B Model Code Explanation describes the model code Chapter One General Information Customer Support Standard maintenance and repair services are available at al
52. ween the pressure output and the trip point value Refer to Chapter Five Optional Relay System page 43 for a complete description of the relay system 30 Chapter Three Overview Relay system described in Zero Pot Chapter Five Coarse Zero Switch l Htr Fail Status Status A Signals fi 00000000 4 Htr Fail Status LED At Temp B Status LED Interface Connector Figure 3 Top View of the Type 631B Transducer With Optional Relay System 31 Chapter Three Overview 3 15 23 16 4 Coarse Zero Switch gt ohmios SURE Technology for Productivity TYPE 63B 9 115 5 Ax CAUTION Hot surface Do not touch 1 13 28 6 Figure 4 Dimensions of the Type 631B Transducer Note nil All dimensions are nominal and are listed in inches with millimeters referenced in parentheses 32 Chapter Three Overview Interface Connector The Interface connector J1 is a 15 pin male type D subminiature connector Refer to Figure 2 Top View of the Type 631B Transducer page 30 for the location of the Interface connector for the 631B without the optional relay system Refer to Figure 3 Top View of the Type 631B Transducer With Optional Relay System page 31 for the location of the Interface connector for the 631B without the optional relay system It contains the pins to connect the 631B unit to a power supply
53. xport licenses under ECCN 2B230 Table of Contents Table of Contents Safety Information ft hahaha la Ro Rara 1 Symbols Used in This Instruction Manual 1 Symbols Found on the Unit ss 2 Safety Procedures and Precautions oran nonnnranncon ccoo nano nncnnaos 3 Sicherheitshinweise f r den DruckmeBumformer onen 5 In dieser Betriebsanleitung vorkommende Symbole 5 Erkl rung der am Ger t angebrachten Symbole ccoo 6 Sicherheitsvorschriften und Vorsichtsmafinahmen 7 Informations relatives la s curit pour le transducteur de pression in 9 Symboles utilis s dans ce manuel d utilisation i 9 Symboles apparaissant sur l unit ss 10 Mesures de s curit et pr cautions ss 11 Medidas de seguridad del transductor de presi n nn 13 S mbolos usados en este manual de instrucciones nn noncnnnccn conos 13 S mbolos hallados en la unidad 14 Procedimientos y precauciones de seguridad i 15 Chapter One General Information sise 17 Introduction orti ali lai iena 17 How This Manual is Organized essen een ennn 18 Customer SUP GEET 19 Chapter Two Installation atea alano leali dE REES legali 21 How To Unpack the Type 631B Un 21 Unpacking Checklist c
Download Pdf Manuals
Related Search