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Digital Mass Flow Controller User's Manual

1. 6 Press the DISP key gt gt The mode returns to the instantaneous flow rate display mode The communications address is displayed only on models with the RS 485 com munications option o Handling Precautions e If you do not press any keys for one minute after entering the device information display mode the display automatically returns to the instan taneous flow rate display 5 15 Chapter 5 ADVANCED OPERATION E Device information display item No Display Description Setting Range and Description Related Remarks Item Function Setup 1 Gas type 0 Conversion factor for each gas type set by the user 9 Hydrogen 10 Helium Full scale 10 to 100 of standard range Unit L min standard flow rate Reference 0 to 35 Unit C temperature Communications O to 127 0 means communications address function disabled Only for models with RS 485 communications 5 16 Chapter 5 ADVANCED OPERATION 5 4 Flow Rate Range The flow rate range can be reduced to a level of 99 down to 10 of the standard range using the flow rate range setup e or 25 However the minimum control flow rate is the same as for the standard range As the range is reduced the setup and display resolution levels are improved as described in the table below Setup and display resolution levels after changing of range MQV9500 MQV0005 MQV0010 MQV0050 Full scale flow rate Resolution Full scale flow rate Resoluti
2. Analog output type 0 2 3 and range selec Event output 1 type assignment Event output 2 type assignment 1 to 5V instantaneous 0 Not used OFF at all times ON when the totalized Totalized pulse output ON when the flow rate is OK ON in control mode ON in fully open mode ON in control or fully ON in fully closed mode PV upper limit event PV lower limit event 1 0 to 5V instantaneous flow rate output The scale can also be changed to the desired flow rate range For details see 24 Optional flow rate output analog scaling function 0 to 20mA instantaneous flow rate output 4 to 20mA instantaneous flow rate output 0 to 5V setting flow rate output 1 to 5V setitng flow rate output 0 to 20mA setting flow rate output 4 to 20mA setting flow rate output The event output delay time is set in the parameter setup mode see page 5 11 Note however that delay cannot be set for totalizer pulse output 9 Events are output even in fully closed operation mode 10 Events are not output in fully closed operation mode 1 to 10 OFF at all times during power shutoff flow event occurs open mode 10 PV lower limit event 2 1 to 10 Inverse output of External 3 way switching function 5 4 Not used Switching of operating Switching of SP No Switching of totalizing Switching of analog I O Switching of operat
3. No CP SP 1205E CMQ V Series Digital Mass Flow Controller For Hydrogen and Helium Gases User s Manual Hydrogen and Helium Gases This manual contains information for ensuring correct use of the CMQ V Series It also provides necessary information for installation maintenance and troubleshooting This manual should be read by those who design and maintain devices that use the CMQ V Series Be sure to keep this manual nearby for handy reference Yamatake Corporation RESTRICTIONS ON USE This product has been designed developed and manufactured for general purpose application in machinery and equipment Accordingly when used in applications outlined below special care should be taken to implement a fail safe and or redundant design concept as well as a periodic maintenance program e Safety devices for plant worker protection e Start stop control devices for transportation and material handling machines e Aeronautical aerospace machines e Control devices for nuclear reactors Never use this product in applications where human safety may be put at risk NOTICE Be sure that the user receives this manual before the product is used Copying or duplicating this user s manual in part or in whole is forbid den The information and specifications in this manual are subject to change without notice Considerable effort has been made to ensure that this manual is free from inaccuracies and omissions
4. Slow start is used when the external contact input turns ON when slow start operation switching is selected at 4 to 12 Li If 0 is selected a conversion factor C F must be entered in parameter setup mode gt 5 2 parameter setup page 5 9 If 10 gas type changeover is selected for the external contact input function assignment Z i Z ii or 2 and if the relevant contact is ON the gas type is determined by the setting in 25 gas type selection 2 Set up the alarm current value in the parameter setup gt 5 2 Parameters page 5 11 SP value being changed flashing is used for control Chapter 5 ADVANCED OPERATION Display Item Item Description Setup Item and Factory Remarks Description Setting Control dead 0 Function disabled Valve operation stops while band setup 1 Function enabled the control flow rate is within the OK judgment range The OK judgment range can be set in the parameter setup mode gt 5 2 Parameters page 5 11 PV filter Without filter If the PV filter is used at a 2 or process for filtering 1 Two samplings moving 3 setting the operational of instantaneous flow average differential pressure must be lower rate Four samplings moving than the standard differential average pressure Eight samplings moving Do not change the setting while average control is in progress Flow rate range Standard range o The setup and display resolution se
5. gt e POWER 24V 2 Power supply 24Vdc POWER 24V 1 AC adapter input o Handling Precautions Do not input any signal to pin No 5 The power circuit is isolated from the input output circuit inside this device Even though the analog GND and digital GND are connected internally always carry out the grounding wiring individually When the AC adapter plug is inserted into the AC adapter power supply terminal the power supply changes from the DC power supply to the AC adapter The former AC adapter 81446682 001 15Vdc 350mA cannot be used with this CMQ V Chapter 3 MOUNTING AND WIRING 3 12 Connector terminal block Sometimes two or more connections must be made to the same pin during wiring In this case use a connector terminal block If you need a 20 core cable for the connectors on the device and connector terminal block contact Yamatake or your dealer Note e Recommended connector terminal block Manufacturer Toyo Giken Model PCN 1H 20 Mounting connector HIROSE ELECTRIC CO LTD HIF3BA 20PA 2 54DSA Compatible connector other side HIROSE ELECTRIC CO LTD HIF3BA 20D 2 54R o Handling Precautions e The specifications of the recommended connector terminal block are subject to change Contact the manufacturer beforehand for details This terminal block can be mounted directly on a DIN rail The following table shows the correspondence between connector pin Nos and terminal block N
6. 1 to 5V instantaneous flow rate output 1 to 5V instantaneous flow rate output 1 to 5V instantaneous flow rate output 2 0 to 20mA external reference input 0 to 20mA external reference input 4 to 20mA external reference input 0 to 20mA instantaneous flow rate output 0 to 20mA instantaneous flow rate output 0 to 20mA instantaneous flow rate output 0 to 5V internal reference input 0 to 5V external reference input 1 to 5V external reference input 0 to 5V setting flow rate output O to 5V setting flow rate output 1 to 5V setting flow rate output 5 0 to 5V internal reference input 0 to 5V external reference input 1 to 5V external reference input 1 to 5V setting flow rate output 1 to 5V setting flow rate output 1 to 5V setting flow rate output 0 to 20mA external reference input 0 to 20mA external reference input 4 to 20mA external reference input 0 to 20mA setting flow rate output 0 to 20mA setting flow rate output 0 to 20mA setting flow rate output 7 0 to 20mA external reference input 0 to 20mA external reference input 4 to 20mA external reference input 4 to 20mA setting flow rate output 4 to 20mA setting flow rate output 4 to 20mA setting flow rate output 1 3 0 to 20mA external reference input 0 to 20mA external reference input 4 to 20mA external reference input 4 to 20mA instantaneous flow rate output 4 to 20mA instantaneous flow rate output 4 to 20mA instantaneous flow rate output 4 5 10 Ch
7. Chapter 4 BASIC OPERATION E Flow rate setup by external 3 way switching input Advanced use When 2 Switching of SP No is assigned at external 3 way switching function goers 24 in the function setup three SP values 57 4 to 5 2 can be changed with the external 3 way switching input as described in the table below External 3 way switching Selected SP input state o Handling Precautions e When the SP No is switched by the external 3 way switching input you cannot switch the SP No using A or W keys though you can switch the SP value 4 8 Chapter 4 BASIC OPERATION E Analog flow rate setup The SP value flow set value can be changed by analog voltage by selecting analog setting as the flow rate setting method in function setup 3 For details on how to set up the function see Chapter 5 ADVANCED OPERATION The setup voltage current range can be selected in the input range selection for analog setup 5 in the function setup The selection of voltage input current input is linked automatically with the set tings for analog output type and range selection X 15 in the function setup For example when current output is selected as analog output type and range selection in amp amp the input type becomes current input type Then analog setup voltage current for SP value can be calculated by the equations below Function Input voltage current range Setup voltage current calculation setup 7 a
8. External contact input 2 8 0 5V voltage Application Reference voltage of flow rate setting voltage and 5V input of output external 3 way switching input Commu 1 MLP loader communications 5 nications 2 RS 485 communications 3 wire system 6 Transmission speed 2400 4800 9600 19200 38400 bps only 19200bps for loader communications Power 24Vde current consumption 300mA max Allowable power voltage range 21 6 to 26 4V ripple 5 max The power circuit is isolated from the input output circuit Material of gas contacting parts SUS316 Teflon Fluororubber 9 16 18UNF Re 1 4 1 4 Swagelok 1 4 VCR Horizontal Be sure that display surface does not face down Applicable standards EN61326 1997 A1 1998 A2 2001 A3 2003 7 2 Chapter 7 SPECIFICATIONS m MQV0050 0200 Valve type Model No MQV0050 MQV0200 Proportional solenoid valve Valve operation Normally closed when de energized N C Standard full Gas types Pressure Temperature Humidity External leaks Flow rate setup scale flow rate 1 50 0L min standard 200L min standard Hydrogen H2 Helium He Gas must be dry and not contain corrosive components chlorine sulfur acid The gas must also be clean not containing dust or oil mist 1 to 100 FS see Gas type and control range table page 7 8 Response Within 0 3s at setting 2 FS typ at standard differential Control starts from the fully closed
9. If you should find an error or omis sion please contact Yamatake Corporation In no event is Yamatake Corporation liable to anyone for any indirect special or consequential damages as a result of using this product 2006 Yamatake Corporation ALL RIGHTS RESERVED Micro Flow uF CMQ and SDC are trademarks of Yamatake Corporation IF SAFETY PRECAUTIONS J E About Icons The safety precautions described in this manual are indicated by various icons Please be sure you read and understand the icons and their meanings described below before reading the rest of the manual Safety precautions are intended to ensure the safe and correct use of this prod uct to prevent injury to the operator and others and to prevent damage to proper ty Be sure to observe these safety precautions A WAR N N G Warnings are indicated when mishandling this product might result in death or serious injury CAUTI O N Cautions are indicated when mishandling this product AN might result in minor injury to the user or only physical damage to the product E Examples wrongful operation or misuse of this product These icons graphically represent the actual danger The example on the left warns the user of the danger of electric shock Triangles warn the user of a possible danger that may be caused by White circles with a diagonal bar notify the user that specific actions are prohibited to prevent possible danger These ic
10. 90mm Py A EE OS Pr swageiok ever rT _ en Pat __ _ __ Ayarogen a Without optional functions 4 Without optional functions a Model with RS 485 communications CPL Without optional functions Gas contacting parts treated to be oil free Without optional functions With inspection certificate With traceability certificate 0 Product version MQV0500 1000 Standard Dis Material control flow rate range Connection 1 2 Swagelok 3 8 VCR 3 4 16UNF Without optional functions Without optional functions Model with RS 485 communications CPL Without optional functions Gas contacting parts treated to be oil free Without optional functions With inspection certificate With traceability certificate Product version lt a lo a D a N Notes 1 The unit L min standard indicates the volumetric flow rate per minute converted to 20 C 101 325kPa one atmosphere The reference temperature can also be changed to 0 C 25 C and 35 C 2 This device is set initially for hydrogen gas use at the factory It can be used for helium gas by changing the gas type setting 1 7 Chapter 1 INTRODUCTION E Basic operation and advanced operation 1 8 This device provides two kinds of operations basic operation and advanced operation Basic operation is the state of the device during normal use In basic operation the contents of the 7 segment display can be
11. C1 P1 P2 P2 2 When P2 P1 lt 0 53 Q C2 e P1 P1 Inlet absolute pressure kPa abs P2 Outlet absolute pressure kPa abs Absolute pressure gauge pressure 101 3kPa Q Flow rate L min standard C1 and C2 Constant values by model Hydrogen MQV9500 C1 0 01181 C2 0 00590 MQV0005 C1 0 1181 C2 0 0590 MQV0010 C1 0 1181 C2 0 0590 MQV0050 C1 1 181 C2 0 590 MQV0200 C1 2 091 C2 1 044 MQV0500 C1 8 365 C2 4 175 MQV1000 C1 8 365 C2 4 175 Helium MQV9500 C1 0 00838 C2 0 00418 MQV0005 C1 0 0838 C2 0 0418 MQV0010 C1 0 0838 C2 0 0418 MQV0050 C1 0 838 C2 0 418 MQV0200 C1 1 483 C2 0 740 MQV0500 C1 5 932 C2 2 961 MQV1000 C1 5 932 C2 2 961 Ex For the MQV0200 gas type is hydrogen inlet pressure is 100kPa gauge and outlet pressure is 80kPa gauge P1 201 3kPa abs P2 181 3kPa abs gt P2 P1 0 901 Q 2 091 X 201 3 181 3 X 181 3 126 L min standard E Optional parts sold separately Model No Cable with dedicated connector 81446681 001 20 wire flat cable 2m AWG 24 81446951 001 20 wire shielded cable 5m 7 0 2mm AC adapter 81446957 001 Output rating 24Vdc 650mA Operating temperature range 0 to 40 C Potentiometer for flow rate setting 81446683 002 5kQ with digital dial 10 turns Front cover for separate display 81446858 001 Mask 1 piece unit Plate 1 piece Mounting screws 2 pieces o Handling Precautions e The old type AC adapter 81446682 001
12. FS e Wide product line up There are two types of models those with integrated display and those with separate display On models with separate display the display unit can be detached to allow remote operation via the dedicated 2m cable 1 1 Chapter 1 INTRODUCTION E Functions 1 2 e User friendly Runs on a general purpose 24Vdc power supply and the CMQ V s internal power circuit and input output circuits are isolated When multiple CMQ V are driven through the analog inputs and outputs as with a PLC they can all use a common power supply even if the PLC s analog modules are not isolated by channel Therefore even without individual power supplies for each device problems with one circuit do not affect adjacent ones Also provided is a handy AC adapter sold separately for easy use in the laboratory e Display direction can be changed models with integrated display only The direction of the display can be rotated 180 to match the direction of the gas flow in case it was mounted the other way e Improved design separate display model A front cover sold separately hides the mounting screws of the separate display on the panel surface and improves the appearance e Various additional functions The functions listed below are all standard All CMQ V models have the functions described below For function setup see Chapter 5 ADVANCED OPERATION e Multi setup function setup 2 Quickly switch to on
13. Model No MQV0050 MQV0200 Flow rate Display method 7 segment LED 4 digits display See Gas type and control range table page 7 8 Indication accuracy at standard 1 2 FS 1digit 80 FS lt Q lt 100 FS temperature and differential 2 1 FS 1digit 40 FS lt Q lt 80 FS pressure Q flow rate 3 0 5 FS 1digit O FS lt Q lt 40 FS Totalizing Display range 0 to 99 999 999L 0 01 to 999 999 99m3 function Display resolution 1L 0 01m3 1 Every 500L 1 Every 2m3 timing 2 Every hour from the previous backup 3 At the time the RUN key is pressed Analog Output type Instantaneous flow rate PV output or setting flow rate SP output output switchable Totalized count backup 0 to full scale flow rate scale can be changed 0 to 5Vdc 1 to 5Vdc 0 to 20mA 4 to 20mA switchable 7Vdc max 28mA max max output when flow rate exceeds range Total output accuracy 0 3 FS Indication accuracy 0 3 FS External load resistance Voltage output type 250kQ min Current output type 300Q max Alarm Number of outputs event output Alarm output 1 Event output 2 Output rating 30Vdc 30mA max open collector non insulated output Totalized pulse output width 100ms 10 when pulse output is selected in the function setup Totalized pulse output rate 1L 1 pulse 0 01m3 1 pulse External Input type number of inputs External 3 way switching input OPEN GND 5V 1 switching External contact input 2 way switc
14. an explosion accidents When using this device for gases that contain hydrogen be sure to purge the device with an inert gas such as nitrogen or argon before use Use without purging may cause an explosion Prevent foreign matter from entering the device If rust water droplet oil mist or dust in the pipes enters the device measurement or control error or damage might occur If there is a possibility of foreign matter entering the device provide a filter strainer or mist trap capable of eliminating foreign matter 0 1 um or greater in diameter at the upstream Be sure to inspect and replace the filter at regular intervals This device is exclusively for hydrogen and helium gases It cannot be used for control or measurement of gases other than hydrogen helium and hydrogen helium mixtures excluding mixed gases within explosion limits Oxygen cannot be measured even if gas contacting sections of this device are oil inhibited This device is set initially for hydrogen gas use at the factory To use it for helium gas or mixed gases change the gas type setting The use of this device for helium or mixed gases without changing the gas type setting will result in a measurement error Use the device within the operating differential pressure range Also do not subject it to pressure beyond the rated pressure resistance range Doing so might damage it The valve on this device cannot completely shut a flow off If complete shutoff is requi
15. changed to show instantaneous flow rate flow set value totalized flow value or amperage to the valve in normal operation mode Also how to set the flow set value is described in the basic operation part Advanced operation is for selecting various functions or setting parameters of the device When the device is used with the factory settings no setup operation is needed However to change the gas type set a range set an external contact input set upper and lower alarm limits or set communication conditions for models with communication functions it is necessary to configure various settings using advanced operation The diagram below gives an outline of operation flow Basic and advanced operation are described in Chapters 4 and 5 respectively Basic operation Advanced operation NT Power ON DISP key Wkey ENT key Instantaneous 3s or more flow rate display DISP key Flow set value Parameter setup mode display Totalized flow display mode DISP key Valve amperage Chapter 2 NAMES AND FUNCTIONS OF PARTS Display OK lamp Lit when the deviation between the flow set value and instantaneous flow rate is in the allowable range Set the allowable range in the parameter setup For details on how to set parameters see page 5 11 ALM lamp 7 segment display Lit when an alarm occurs Displays the instantaneous flow rate EV1 lamp flow set value to
16. completely shut off e If complete shutoff is required provide a shutoff valve separately e Automatic reset of totalized flow at start of control function function setup 4 Start of control and reset of totalized flow count can be done simultaneously by a single action by key or external switching input Combining this function with the automatic shut off function described above is handy for shutting the valve off in cases where a fixed totalized flow amount is counted repeatedly e Analog scaling function setup lt 24 This function is used to optionally change the flow rate between 10 FS and 100 FS corresponding to 100 FS analog input output 5V or 20mA e Analog input flow set value range selection function setup 5 89 In analog setup the desired input range can be selected from those shown below either by key operation or by external 3 way switching input When doing so the voltage input and current input are selected automatically as they are linked with the settings of function setup amp analog output type selection For example when the voltage output 0 to 5V or to 5V is selected in amp the voltage input is selected automatically Likewise when the current output 0 to 20mA or 4 to 20mA output is selected the current input is selected automatically 1 Internal reference 0 to 5V input External reference 0 to 20mA input 2 External reference 0 to 5V input External reference 0 to 20mA
17. device with an operational differential pressure less than 100kPa Failure to do so may cause overshoot or hunting of the flow rate Chapter 5 ADVANCED OPERATION 5 2 Parameters This section describes parameter setup Setup method DISP key DISP key Basic operation Advanced operation i oa5 A S A cal Power ON DISP key Wkey ENT key ars 3s or more Instantaneous flow rate display Function setup mode DISP key key 3s or more Flow set value display bala Parameter setup mode Akey 3s or more Device information display mode Totalized flow display DISP key Valve amperage display Follow the procedure below to set constants such as flow rate deviation alarm upper and lower limit setting values and event output delay times 1 Press the DISP key several times to display the instantaneous flow rate gt gt The PV and L min lamps light 2 Hold down the lt key for three seconds or more gt gt Item No 4 3 is displayed on the 7 segment display and the mode changes to the parameter setup mode 3 Press the A or W key to select the desired setup item numbers and press the ENT key gt gt The current setting blinks on the 7 segment display 4 Press the A or W key to change the setting to the desired setting You can move to the digit to be changed by pressing the lt key 5 When you have finished changing the setting press the ENT key to enter the setting gt gt
18. for the operating differential pressure setup Match the temperature reference Change in 4 in the function setup Change the regulator pressure setting Ask for repair rate is that the sensor s zero point has deviated adjust the flow rate zero point as follows 1 Press the DISP key to display the instantaneous PV display The PV and L min lamps light 2 Set the operating mode to the fully closed mode or set the setting flow rate to zero and fully close the valve 3 Continue pressing the ENT key in this state 4 After about 10 seconds CAL is indicated on the display After about one sec ond release the ENT key ror 5 The display changes to FF Flow rate zero adjustment is completed Chapter 6 MAINTENANCE AND TROUBLESHOOTING o Handling Precautions Perform flow rate zero adjustment with the actual flow rate stabilized to zero after completely replacing the inside of the flow path with the gas to be controlled Note e Flow rate zero adjustment can be performed by external contact input by selecting flow rate zero adjustment for 4 to 2 in the function setup For details on how to set up functions See Chapter 5 ADVANCED OPER ATION 6 3 Chapter 7 SPECIFICATIONS mM MQV9500 0005 0010 lies Model No MQV9500 MQV0005 MQV0010 Valve type Proportional solenoid valve Normally closed when de energized N C Standard full scale flow rate 1 0 5 L min s
19. input 3 External reference to 5V input External reference 4 to 20mA input The internal reference 0 to 5V is used when the 5V output terminal voltage pin No 20 of this controller is used as the reference 1 5 Chapter 1 INTRODUCTION e Analog output type range selection function setup 8 7 04 Output can be set either to instantaneous flow rate PV or flow set value SP Furthermore a voltage current output range can be selected from 1 to 4 shown below by key operation Additionally 1 2 or 3 4 can be changed through the external 3 way switching input Combinations are switched because of linkage with the analog input range selection Instantaneous flow rate PV output Flow set value SP output 1 0 to SV output 1 0 to 5V output 2 1 to SV output 2 1 to 5V output 3 0 to 20mA output 3 0 to 20mA output 4 4 to 20mA output 4 4 to 20mA output 1 6 Chapter 1 INTRODUCTION E Model selection guide MQV9500 0005 0010 0050 0200 Standard is Material Connection Gas Pa ie Description control flow of gas type ed No rate range contacting TT _ _ __ __ Digital mass flow controller OMO V series PT _J0 004 osom standar J TT Y0 04 to 5 00L min standard 1 FF J _Jo to to 10 00L min standard Pf t0 50 0 min standard Pr fate 200 Uimin eana PTT TF J TFirtearated ispay ody engm oom FFF J _ Separate display body Tength
20. m s leaks Flow rate Setup method 1 Key operation 2 External analog input setup 3 MLP loader communications 4 RS 485 communications 3 wire system See Gas type and control range table page 7 8 External analog input Input range 0 to 5Vdc 1 to 5Vdc 0 to 20mA 4 to 20mA switchable Input impedance 1MQ 10 for voltage input 250Q 10 for current input 7 1 Chapter 7 SPECIFICATIONS iiem MESS MQV9500 MQVv0005 MQV0010 Flow rate Display method 7 segment LED 4 digits display See Gas type and control range table page 7 8 Indication accuracy at standard 1 t2 FS 1 digit 80 FS lt Q lt 100 FS temperature and differential 2 1 FS 1 digit 40 FS lt Q lt 80 FS pressure Q flow rate 3 0 5 FS 1 digit O FS lt Q lt 40 FS Totalizing Display range 0 00 to 999 999 99L 0 0 to 9 999 999 9L 0 0 to 99 999 999L Totalized count backup 1 Every 5L 1 Every 50L 1 Every 100L 3 At the time the RUN key is pressed Analog Instantaneous flow rate PV output or setting flow rate SP output output switchable Total output accuracy 0 3 FS Indication accuracy 0 3 FS output Totalized pulse output width 100ms 10 when pulse output is selected in the function setup Totalized pulse output rate 0 01L 1 pulse 0 1L 1 pulse 1L 1 pulse External External 3 way switching input OPEN GND 5V 1 switching External contact input 2 way switching 3 External 3 way switching input 2 5 0 5V
21. ramp control 0 Function disabled The SP change ramp level the function 1 SP ramp control 1 rate of change per second can In SP ramp up ramp 1 be set to a constant value for in SP ramp down ramp 2 control startup and setting flow SP ramp control 2 rate changed In external contact OFF Setting of ramps 1 and 2 is Analog scaling function Forced PV instantaneous flow rate zero function ramp 1 in external contact ON ramp 2 Function disabled Function enabled Function disabled Function enabled done in parameter setup mode gt Page 5 11 for details In case of SP ramp control 2 the operation is performed by ramp 2 when 12 is selected in either one of 48 to 2 external contact input function assignment and also when the target contact is ON but otherwise operation is performed by ramp 1 If 7 is selected anywhere in to 42 SP ramp control is perform ed only when the target contact is ON The flow rate at analog input output 100 5V can be optionally set The flow rate is set in parameter setup mode gt 5 2 Parameters page 5 11 Instantaneous flow rate is made zero forcibly after the flow rate is set to zero or the mode is changed to valve forced fully closed mode and delay time has elapsed Instantaneous flow rate variation in zero position caused by the inclination of pipe is neglected Delay time is set in parameter setup mode gt 5 2
22. same flow rate The valve amperage alarm func tion cannot be used unless the differential pressure is stable e Even under stable differential pressure conditions the relationship between the valve amperage and flow rate has hysteresis characteris tics amperage may vary even at the same flow rate When using the valve amperage alarm be sure to test sufficiently under operating conditions That way an appropriate alarm current setting can be determined Note Advanced operation e When 1 Only upper limit alarm used 2 Only lower limit alarm used or 3 Upper and lower limit alarm used is selected for valve amperage alarm type Z 2 in the function setup the valve amperage alarm will be activated if the valve current exceeds the upper limit set value or goes below the lower limit value The valve amperage upper and lower limits are set in the para meter setup mode For details on function setup and parameter setup see Chapter 5 ADVANCED OPERATION 4 3 Chapter 4 BASIC OPERATION 4 2 Setting the Flow Rate Set the flow rate as shown below Flow rate setup Single setup Key input or communications t Os Selection from function setup Digital setup Voltage setup Selection from function setup 85 and Z 95 External reference Current setup 0 to 20mA 4 to 20mA input Analog setup Factory setting Two kinds of setup methods that is digital and a
23. setup 37 This function is used to change the flow rate display unit to L min or mL min of the MQV9500 0005 When multiple devices are used side by side this function can make the flow rate display units uniform PV display decimal point change function setup 34 This function is used to shift the decimal point position of the instantaneous flow rate display one digit left or right When multiple devices are used side by side the number of digits after the decimal point of the flow rate display can be made uniform Chapter 1 INTRODUCTION e Valve forcibly open or close function setup 2 84 to 1 12 This function is used to forcibly open or close the valve fully by key operation external contact input or external 3 way switching input e Automatic shut off function setup 3 1 15 The valve can be shut off automatically under the following conditions 1 When the totalized flow count reaches the preset value 2 When one of the alarms including flow rate alarms is triggered e ALM alarm lamp ON output valve shut off function setup 5 0 4 22 The alarm output can be set for high and low deviations in the flow set value and instantaneous flow rate Additionally an alarm judgment delay time can also be set If a flow rate alarm occurs or if an alarm occurs during self diagnosis of this controller the valve can be forced fully closed or opened xandling Precautions e The valve on this device cannot
24. 0500 1000 Model No MQV0500 MQV1000 Valve type Proportional solenoid valve Valve operation Normally closed when de energized N C Standard full scale flow rate 1 500 L min standard 1000 L min standard Gas types Hydrogen H2 Helium He Gas must be dry and not contain corrosive components chlorine sulfur acid The gas must also be clean not containing dust or oil mist Control Range 1 to 100 FS see table Gas type and control range page 7 8 Response Within 0 7s at setting 2 FS typ at standard differential Control starts from the fully closed status or the setting is changed pressure during control Accuracy 1 t2 FS 80 FS lt Q lt 100 FS at standard temperature 2 1 FS O FS lt Q lt 80 FS and differential pressure Q flow rate Repeatability 1 1 0 FS 80 FS lt Q lt 100 FS Q flow rate 2 0 5 FS O FS lt Q lt 80 FS Temperature characteristics 0 06 FS max per 1 C Pressure characteristics 0 2 FS max per 100kPa Pressure Standard differential pressure 200kPa Inlet pressure 200kPa gauge outlet pressure OkPa 2_ gauge Required differential pressure Hydrogen 40kPa Hydrogen 150kPa 3 Helium 80kPa Helium 250kPa Operating differential pressure 300kPa max 1 300kPa max T operating temperature 10 C lt T lt 60 C 10 C lt T lt 40 C 4 2 180kPa max 40 C lt T lt 60 C Conditions power supply voltage 24 0V range 7 P
25. 1 2 material SUS316 Rc 1 2 connection type 150 1 2 Swagelok connection type 3 8 VCR pipe couple made by Swagelok 2 SS 8 VCR 1 8STSC11 or equivalent 150 3 8 VCR connection type Chapter 7 SPECIFICATIONS e Separate display unit Unit mm P 105 16 93 g pi e aa ann m eo h h oS e m Controller 3 8 Dp re EREE o SE T DAQDDBE D aa YAMATAKE IR o 5S 2 o amp wo x Ao ad 88 gt Mounting panel cutout dimensions recommended 100 02 3 Cable for connecting display to body Unit mm HIROSE ELECTRIC CO LTD HIF3BA 16D 2 54R Red y l Pa 2000min a Oki Electric Cable Company Limited FLEX S16 7 0 127 2651P Color pin No 1 red pin Nos 5 10 and 15 green others gray 7 16 Chapter 7 SPECIFICATIONS Front cover for separate display unit 81446858 001 Maske Unit mm Material PC ABS Color Dark gray 112 L 83 Material SPCC t1 Color Black e 109 6 g M4 cross recessed head machine screws T for mounting 2 7 5mm long Cable with dedicated connector e 20 wire flat cable 81446681 001 Housing Unit mm HIROSE ELECTRIC CO LTD HIF3BA 20D 2 54C as 2000 min a End section oe End section Pin arrangemen
26. 15Vdc 350mA cannot be used for this device Chapter 7 SPECIFICATIONS E External dimensions Models with integrated display MQV9500B 0005B 0010B 0050B 0100B 22 Jack for loader 44 a 47 8 y_ C 55 0 a 2 9 16 18UNF 7 12 Go KAA ER Digital Unit mm so fg al Ala ot ees Fw ontroller awo aaga O umn CMQ V PZPR Rc 1 4 pipe coupling 2 137 Rc 1 4 connection type HEX9 16 Pipe coupling made by Swagelok 2 SS 400 1 6ST Applicable pipe outside diameter 1 4 141 4 material SUS316 1 4 Swagelok connection type SS 4 VCR 1 00032SC11 137 8 1 4 VCR connection type Models with integrated display MQV0500J 1000J ar m aa Digital ETRE eee Cae YAMATAKE Jack for loader 44 5 9 Jack for AC adapter OJ N 25 aie 50 esa Tor re a Chapter 7 SPECIFICATIONS MQV0050 MQV0200 ie mavo es ee ry 27 05 150 M4 screw 4 depth 5 min ce Yamatake Corporation 110 05 AT ee ee gt 11 5 05 2 3 4 16UNF 150 Rc 1 2 connection type Rc 1 2 pipe coupling 2 Pipe coupling made by Swagelok 2 SS 810 1 8S
27. 5 S RENE aan scsi EAA EN AA 2 1 SP lampene a NE RE 2 1 SP limit fonction C35 1 3 5 7 SP lower limit SLOW rate csssssnsiiisinossiiiims 5 13 SP ramp control function C27 wees 1 2 5 6 SP ramp control slope 1 eeceeeesscseeeesssseseesssseseneese 5 12 SP ramp control SlOpe 2osririiniisismiesarinsis 5 12 SP upper limit flow rate oc ceeeessssssssesssseenesseennnseene 5 13 SWaSeClOK esanera 1 6 3 1 Temperature reference standard setup C19 5 6 Totalized OW 2 1 Totalized flow display ccccceessscccsssssssesssseesnsseee 4 1 4 2 Totalized flow event setting first 4 digits 5 13 Totalized flow event setting last 4 digits 5 13 Totalized flow reset at start of control enable disable Cli eenean aaea 5 5 Transfer speed selection C31 5 7 UNF connect On 3 23 acksiasivcmncanenannisnnotnas 3 3 User settings data error 6 1 User set gas type conversion factor 1 5 12 Val Ve amperage 4 3 Valve amperage alarm setup C20 onesie 5 6 Valve amperage display csccsssensi 1 4 1 8 4 1 Valve amperage lower limit alarm 5 12 6 1 Valve amperage upper limit alarm 5 12 6 1 Valve automatic shut off when totalized flow event occurs enable disable C13 5 5 Valve overheating prevention limit ee 6 1 Valve forced open closed cccssccsssssessssiersssinnssesnssssine 1 5 VER CONNECHON jie sec ce a 1 7 3 1 WAIN 8c s
28. At this point the setting is updated 6 If you want to set up other items return to step 3 and repeat the procedure Otherwise proceed to step 7 7 Press the DISP key gt gt The mode return to the instantaneous flow rate mode from the parameter setup mode o Handling Precautions e If you do not press any keys for one minute after entering the parameter setup mode the display automatically returns to the regular instanta neous flow rate display e f you press the DISP key without pressing the ENT key after carrying out step 4 the setting remains at the previous value without being updated Chapter 5 ADVANCED OPERATION Parameter setup item list Display Description Factory Setting Setting Range Related Func Remarks tion Setup Ae Flow rate OK 2 FS 0 5 to 100 FS 1 judgment range 0 02 14 0 005 to 1 00 14 Flow rate OK 1 FS 0 5 to 100 FS 1 judgment hysteresis 0 01 14 0 005 to 1 00 14 Fi i7 Flow rate deviation 10 FS 0 5 to 100 FS 2 3 upper limit alarm 0 10 14 0 005 to 1 00 14 FOR HS Flow rate deviation 2 FS 0 5 to 100 FS 22 2 3 jupper limit alarm 0 02 14 0 005 to 1 00 14 hysteresis he Flow rate deviation 10 FS 0 5 to 100 FS 2 3 jlower limit alarm 0 10 14 0 005 to 1 00 14 2 FS 0 5 to 100 FS 0 02 14 0 005 to 1 00 14 Flow rate deviation alarm valve amperage alarm judgment delay 0 0 to 999 9s se es Ha ipee ee User set gas t
29. F 7 1 Analog output selection is set at voltage output G6 0 1 4 or 5 0 to 5V internal reference input 0 to 5V external reference input 1 to 5V external reference input 2 Analog output selection 0 ie 2 is set at current output 85 2 3 6 or 7 0 to 20mA external reference input 0 to 20mA external reference input 4 to 20mA external reference input The key lock can be cancelled even while it is enabled When an attempt is made to change a key locked setting Lat is indicated on the display Determines whether or not the operating mode is changed fully closed control fully open by the RUN key Additionally the operat ing mode at power ON can be selected For how to select the operating mode gt 4 3 Selecting the Operating Mode page 4 10 How to switch the SP number using external contact input and external 3 way switching input gt Multi setup page 4 5 Internal reference 0 to 5V input is the setting to use the 5V reference voltage from this device when inputting a voltage with the optional potentiometer variable change resistor with dial Using this method no external power supply for setup is needed The voltage input current input is automatically selected as it is linked with the set value of 6 gt Table in Note 2 page 5 9 Chapter 5 ADVANCED OPERATION Display Item Item Description Setup Item and Factory Remarks Description Setting
30. For the MQV0500 1000 be sure to use as wide a pipe as possible to reduce the pressure drop caused by the piping If the pressure drop due to the piping is too large the gas supply pressure to this device operating differential pressure might fluctuate greatly with the flow rate causing unstable control iii CAUTION When making the pipe connections hold the hexagonal part of the connector section and turn the pipe to tighten After connecting check that there are no gas leaks If using Re connections take care not to coat with too much sealant Foreign matter or burrs in the pipes may also cause measurement errors Do not apply a negative voltage or a voltage exceeding 5V to the external setup voltage input terminal Doing so might cause malfunction or equipment failure When using a relay for external contact input and or external 3 way switching input always use a relay designed for micro current use with gold contacts Failure to do so could cause faulty contact resulting in malfunction If there is a risk of a power surge caused by lightning use Yamatake Corporation s SurgeNon to prevent possible fire or equipment failure Gas type switching by external contact input flow rate switching and analog input output voltage range switching by external 3 way input switching should be done only after setting the operation mode to fully closed Switching while controlling could cause large fluctuatio
31. Mounting Installation locations Avoid mounting the device in the following locations e Locations subject to high and low temperature and humidity e Locations whose atmospheres contain large amounts of dirt and dust salt conductive substances such as iron powder water droplet oil mist or organic solvents e Locations subject to direct sunlight and rain e Locations directly subject to mechanical vibration or shock e Locations close to sources of electrical noise e Locations where strong magnetic or electrical fields are generated o Handling Precautions e The valve of this device cannot completely shut a flow off If complete shutoff is required provide a shutoff valve separately Changing the display direction models with integrated display only The display can be turned 180 in case the controller has been mounted with the display upside down e Procedure 1 Turn the power OFF 2 Remove the four screws holding the display 3 Lift up the display from the body and turn it 180 counterclockwise y 4 Flat screws 4 for i ky holding the display UA 4 Put the display back on the body and fasten with the four screws taken off in step 2 5 To return the display to its original position on the body turn it 180 clockwise o Handling Precautions e Before changing the display direction be sure to turn the power OFF e Prevent foreign objects from falling inside the body when the display is ta
32. P value return to their previous values without saving of new values e When the SP value is updated in step 3 for single setup or in step 4 for multi setup the display automatically returns to the instantaneous flow rate display after approximately 2s have elapsed Chapter 4 BASIC OPERATION E Flow rate setup by external contact input Advanced use When assigning 3 Switching of SP No at external contact input function assign cr ment 1 to in the function setup up to eight SP values can be changed by means of external contact ON and OFF combinations o Handling Precautions e When changing the SP number by external contact input the A and v keys cannot be used but the SP value can be changed Oot T 1 When the number of preset SP values is set to 5 to 8 in function setup 74 Assign 3 Switching of SP No to all of amp 1 to in the function setup inputs 013 input 2 012 _ _ inputit Selected SP_ Exerna o ON ON ses _ on ore oni e on on oni set Ot T 2 When the number of SP values is set to 3 or 4 in function setup 24 Assign 3 Switching of SP No to two of amp to 2 in the function setup Eea rO Ls 3 When the number of SP values is set to 2 in function setup 24 Assign 3 Switching of SP No to one of X 4 to X Z in the function setup input 4 to 3 DH to DI3 Selected SP contact input state PON Pt 4 7
33. Parameters page 5 11 Communications 0 Communications address setting function disabled 1 to 127 Communications address Transfer speed 38400bps selection 19200bps 9600bps 4800bps 2400bps Data format selec 8 data bits even parity tion 1 stop bit 8 data bits no parity 2 stop bits SP limit function SP limit function The upper and lower limit values disabled of the flow rate setup range can Only upper limit enabled be set to desired levels Only lower limit enabled Upper and lower limits are set Upper and lower limits in parameter setup mode enabled gt 5 2 Parameters page 5 11 5 8 Chapter 5 ADVANCED OPERATION Display Item Item Description Setup Item and Factory Remarks Description Setting Operating 0 Low differential pressure 1 When the setting corresponds to differential pressure 50 50kPa the actual operating differential setting for control 1 Standard differential pressure control can be optimization pressure 200 100kPa optimized 2 High differential pressure When 0 is set the control rr 2a ani Notes 5 i 2 300 0 100kPa response speed becomes fast When 2 is set the control response speed becomes slow Flow rate display Flow rate is displayed in unit selection the standard flow rate unit Flow rate is displayed in L min at all times Flow rate is displayed in mL min at all times When the flow rate range or gas t
34. T Applicable pipe outside diameter 1 2 material SUS316 150 1 2 Swagelok connection type 3 8 VCR pipe coupling made by Swagelok 2 SS 8 VCR 1 8STSC11 or equivalent 150 3 8 VCR connection type Chapter 7 SPECIFICATIONS Model with separate display MQV9500C 0005C 0010C 0050C 0200C e Body Unit mm 22 Bp Jack for ae loader lo n 2 9 16 18UNF 11 05 M4 screw 2 depth 5 min 9 16 18UNF connection type Rc 1 4 pipe coupling 2 137 Rc 1 4 connection type Pipe coupling made by Swagelok 2 SS 400 1 6ST Applicable pipe outside diameter 1 4 material SUS316 SS 4 VCR 1 00032SC11 137 8 1 4 VCR connection type 7 14 Chapter 7 SPECIFICATIONS Model with separate display MQV0500K 1000K e Body Unit mm moset m ne re ha ts MQV0050 DAC oma Jack for loader h4 Jack for AC adapter 2 3 4 16UNF gt 3 fi 5 A 25 3 05 110 05 3 gt i 150 2 it M4 screw 4 depth 5 min Yamatake Corporation 150 Rc 1 2 pipe coupling 2 Pipe coupling made by Swagelok 2 SS 810 1 8ST Applicable pipe outside diameter
35. ae 5 5 External contact INp tssessssssssennenss 3 9 4 7 External referenCe nenni cccsscsnsiancenaaniaaenncnacnd 4 9 PLOW ATOW ectecssnccsshectensatesiciectistes can sachet dinar oleate 3 6 Flow rate alarm type setup C15 sisirin 5 5 Flow rate deviation alarm valve amperage alarm judgement delay icc cnciesssc tsa desicalintaasaieceanes 5 12 Flow rate deviation lower limit alarm 5 12 6 1 Flow rate deviation lower limit alarm hysteresis 5 12 Flow rate deviation upper limit alarm 5 12 6 1 Flow rate deviation upper limit alarm hysteresis 5 12 Flow rate display units Changing ween 1 4 Flow rate display units selection C37 5 9 Flow rate OK judgment hysteresis 5 12 Flow rate OK judgment range 5 12 Flow rate range setup 1 5 7 Flow rate range Setup 2 ecisrssscccmmisiiiiasuiia 5 7 Flow rate range changing u s 5 17 Flow rate range reducing ssisrsisisirrr 5 17 Flow Tate SetU noeneen 4 4 Index 1 Flow rate setup method SP setup method selection EOS rnana ES 5 3 Flow rate setup digital 0 ceeessseceesssseeeeesesee 4 5 Flow rate totalization 2 cee cceesssseseesssssesessssseenenssseee 1 3 Flow rate zero adjustment 0 cceeeessseeteeesseeee 6 2 Flow set value flow rate set POINT 2 1 Forced PV zero function C29 5 7 ROME COV CF nisin aean n 1 1 3 6 Full scale flow rate ccssssssssssessssssssssnnssssunsssssessesnssee 5 17 Fully closed MOE ss jrcccssssnicsacincqar
36. akes it possible to suppress effects of slight pressure fluctuations Control dead band setup prevention of valve operation function setup This function is used to stop the valve from driving as long as the control flow rate is within the OK range Additionally the OK range width of dead band can be set to the desired level Valve amperage display function setup 22 The electric current supplied to the valve can be displayed in units of 0 0 to 100 0 Additionally use of the valve amperage alarm detection function makes it possible to detect an inlet pressure change or clogging of the piping at the outlet Ma Mi al Gas type external switching function setup X 6 to 1 02 1 5 Two preset types of gases including one with a user determined gas type 5 conversion factor can be switched by external contact input Control flow rate range external switching function setup to 2 2 I o cial C g5 LCI LTE Two preset control flow ranges can be switched by external contact input PV forced zero function setup 2 This function forcibly sets the detected instantaneous flow rate to 0 zero after the delay time elapses when the flow rate setpoint has been set to 0 zero or the valve mode has been changed to fully closed This function makes it possible to ignore the deviation of the instantaneous flow rate zero point caused by inclination of the piping or the like Flow rate display unit change function
37. apter 5 ADVANCED OPERATION 3 When 4 Switching of analog I O voltage range is selected for external 3 way switching function assignment 24 in the function setup external 3 way switching input takes precedence over others Additionally the analog input and output ranges change as shown in the table below according to the input status and the setting status of 5 Settings in External 3 way switching input state one OPEN OV 5V 0 to 5V internal reference input 0 to 5V external reference input 1 to 5V internal reference input 1 to 5V instantaneous flow rate output 0 to 20mA external reference input 0 to 20mA external reference input 4 to 20mA external reference input 4 to 20mA instantaneous flow rate output 0 to 5V internal reference input 0 to 5V external reference input 1 to 5V internal reference input 0 to 5V setting flow rate output 0 to 5V setting flow rate output 1 to 5V setting flow rate output 6 0 to 20mA external reference input 0 to 20mA external reference input 4 to 20mA external reference input 0 to 20mA setting flow rate output 0 to 20mA setting flow rate output 4 to 20mA setting flow rate output 4 This setting can be made only for models with RS 485 communications 5 This function can be set only on the MQV9500 and MQVO005 YQ Handling Precautions e When the operational differential pressure setting 3 amp is changed to 0 Low differential pressure 50 50kPa always use the
38. ate range setting eee 1 2 Control Mode iicaicasssroaucinmcnnatoaiiannnanne 4 10 Control rape siseasi ni 7 8 Data format selection C32 5 8 Device information display ModE 5 1 5 15 Differential pressure LOW o cecsssccsssssssiesssssssiessssesssnnsseeeee 1 1 Differential pressure maximum operating 7 7 Digital SOUP sascdcdiassstioscisscouli e E 4 4 Direct setup function for set point eee 1 2 4 5 DISP KEYone onenn en eE OER eE sors 2 1 Display Gite tion ssrrecracsosaniins eonna 3 2 Display TESLU ON i sssscsnssanucinin aaunrunnnaiests 5 17 Display unit Separate eects 1 1 3 5 ENT KEY ssssscnsesssncsiescosedsisiannshstssneniagsecbguscedbsecespiesgsbeateeedipectediastes 2 1 EV Llam Dnie aa NE 2 1 EV Zla EA 2 1 Event lati p rescon a 1 3 Event output 1 delays cceceessssseeesssesenesseseenee 5 12 Event output 2 delay eccceceesccceeessssseesssssstneesssssenenset 5 12 Event output 1 type assignment C07 WWW 5 4 Event output upper lower limit setup 5 12 Event output 2 type assignment C08 0 5 4 Event output 2 upper lower limit setup 5 12 External 3 way switching function C09 5 4 External 3 way switching input 3 10 4 8 External contact input function 2 way switching ClO iss sstcisiesccianimniarhallnaesmaiamiananuaentemvace 5 5 External contact 2 input function 2 way switching Cee een itn nachna AEA 5 5 C12 esacsessanas nana e chee ieai
39. dc 0 to 20mA 4 to 20mA switchable 7Vdc max 28mA max max output when flow rate exceeds range Total output accuracy 0 3 FS Indication accuracy 0 3 FS lication Voltage output type 250kQ min Current output type 300Q max Alarm Alarm output 1 Event output 2 event 30Vdc 30mA max open collector non insulated output output 100ms 10 when pulse output is selected in the function setup 0 01m2 1 pulse 0 1m 1 pulse External External 3 way switching input OPEN GND 5V 1 switching External contact input 2 way switching 3 input Non voltage contact or open collector External 3 way switching input 2 5 0 5V External contact input 2 8 0 5V Approx 0 5mA current flowing to contact 1 0V max open collector type 50uA max open collector type Reference Output rating 5 0Vdc 5 5mA max voltage Reference voltage of flow rate setting voltage and 5V input of output external 3 way switching input Commu 1 MLP loader communications nications 2 RS 485 communications 3 wire system 2400 4800 9600 19200 38400 bps only 19200bps for loader communications Rating 24Vdc current consumption 400mA max Allowable power voltage 21 6 to 26 4Vdc ripple 5 max 1 21 6 to 26 4Vdc range T operating temperature 10 C lt T lt 60 C 10 C lt T lt 40 C 2 23 5 to 26 4Vdc 40 C lt T lt 60 C ripple 5 max The power circuit is isolated from the input output circuit SUS316 Teflon F
40. e kPa 7 9 Chapter 7 SPECIFICATIONS E Relationship between differential pressure and flow rate For Helium MQV9500 Flow rate L min standard 0 0 10 20 30 40 50 60 Differential pressure kPa MQV0050 0 i Te G 50 40 30 20 10 Flow rate L min standard 0 5 10 15 20 25 30 Differential pressure kPa MQV0500 MQV0005 Flow rate L min standard 0 0 10 20 30 40 50 60 Differential pressure kPa MQV0200 Flow rate L min standard 0 0 40 80 120 160 200 Differential pressure kPa MQV1000 1000 800 600 Flow rate L min standard 0 20 40 60 80 100 120 Differential pressure kPa Flow rate L min standard 0 80 180 240 320 Differential pressure kPa Flow rate L min standard Condition the valve is fully open in air MQV0010 12 0 40 80 120 160 200 Differential pressure kPa Outlet pressure condition 1 150kPa gauge 2 50kPa gauge 3 OkPa gauge 4 50kPa gauge Chapter 7 SPECIFICATIONS o Handling Precautions e If the outlet pressure is different from the values graphed on the previous page calculate the flow rate using the appropriate equation below 1 When P2 P1 gt 0 53 Q
41. e Yamatake Corporation s SurgeNon to prevent possible fire or equipment failure Gas type switching by external contact input flow rate switching and analog input output voltage range switching by external 3 way input switching should be done only after setting the operation mode to fully closed Switching while controlling could cause large fluctuations Be sure to check that the wiring is correct before turning the power on Incorrect wiring could cause damage or malfunction Connector pin layout Connector model No device side HIF3BA 20PA 2 54DS 20 19 Manufacturer HIROSE ELECTRIC CO LTD 2 1 View from connector insertion side Table of compatible connectors all made by HIROSE ELECTRIC CO LTD Connector type Compatible connector Compatible contact Compatible wire model No model No Contact crimp type HIF3BA 20D 2 54C HIF3 2226SCC AWG 22 to 26 single wire allowed Cable clamp type HIF3BA 20D 2 54R AWG 28 flat cable only 3 7 Chapter 3 MOUNTING AND WIRING Connector signal names 20 flow rate setpoint SP output 4 to 20mA output 17 FLOW SP INPUT Setpoint flow rate SP voltage 0 to 5V 1 to 5V 0 to 20mA input 4 to 20mA input 16 MODE INPUT External 3 way switching 3 stage switching input input OPEN GND 5V OPENGND 12 Open collector non insulated output i 10 DB RS 485 communications DB Do not connect on models without 7 the communications function Connect two wires each in pa
42. e is installed on the vertical or Install in horizontal piping or use the Flow rate display does not become zero even with an actual zero flow rate Display is not sFF even if the valve is fully closed Flow rate does not stabilize Poor accuracy inclined piping Condensation on sensor Zero point of sensor has deviated Foreign object on sensor Operating differential pressure range is exceeded Inlet pressure fluctuates greatly Regulator interference Large pressure loss in piping inlet pressure fluctuates greatly according to flow rate Check valve vibration Operating differential pressure setting function setup 35 does not match the actual operating differential pressure Temperature reference does not match the reference flow meter Regulator is vibrating slightly Foreign object stuck on sensor Flow rate zero adjustment If a cause of the flow rate does not becoming zero in spite of an actual zero flow 6 2 forced PV zero function function setup 24 Insert a mist trap upstream Adjust the flow rate zero Ask for repair Lower the primary pressure Insert a regulator upstream Change the regulator pressure setting or apply the instantaneous PV filter function setup 23 Use larger diameter pipe Change the check valve to one having a low cracking pressure Adjust the operating differential pressure setting to the actual operating differential pressure or set 2
43. e of eight preset flow set value by key operation or external input If Switching of SP No is set to external 3 way switching input up to three set values can be switched Gas type switching function setup 8 26 The gas type to be used can be selected from the standard compatible gases by key operation Additionally two kinds of gas type settings can be changed by external contact input Gas type setup function setup The user can set gas type conversion factors for gases other than the standard compatible gases and for mixed gases Control flow rate range setting function setup 24 25 The control flow range can be changed to the desired range 10 to 100 of the flow range at factory setting in units of 1 FS The setup and display resolution levels can be improved by reducing the control flow range Additionally two kinds of control flow ranges can be switched through external contact input Direct setup function setup 2 6 When changing the flow set value by key input the controlled flow rate can follow the set value while changes are being made the flow set value can be changed quickly This function is useful when the user frequently changes set value for example when adjusting the flow set value during a trial run Chapter 1 INTRODUCTION e SP ramp control function setup lt 7 This function is used to set the set value change ramp amount the rate of change per second to a c
44. e s parts MOUNTING AND WIRING This chapter describes installation mounting wiring and initial settings of this device BASIC OPERATION This chapter gives the basis of how to operate this device ADVANCED OPERATION This chapter describes how to set functions parameters device information display and flow rate range TROUBLESHOOTING This chapter describes how to investigate and remedy trouble that may occur during operation of this device SPECIFICATIONS This chapter describes the device s specifications and external dimensions vi Conventions Used in This Manual The following conventions are used in this manual B Handling Precautions gt gt Handling Precautions indicate items that the user should pay attention to when using a CMQ V Series device Notes indicate information that might benefit the user Numbers within parentheses indicate steps in a sequence or parts of an explanation This font indicates 7 segment indication on the display Indicates the result of an operation or the state of the device after operation Indicates an item or page that the user is requested to refer to vii Contents SAFETY PRECAUTIONS The Role of This Manual Organization of the User s Manual Conventions Used in This Manual Chapter 1 Chapter 2 Chapter 3 Chapter 4 4 1 4 2 Chapter 5 5 1 5 2 5 3 5 4 Chapter 6 INTRODUCTION BUR OCU CHI OM i s i ie sia ie ose jo cee rece rie
45. eceeesssceeeesssseeessssetnenee 4 10 Operating mode selection ussmssissinsssssisiss 4 10 Parameters mienas aa eiai 5 11 Parameter setup mode wn ceeesceeessssseeeessseeeteesssseeneesseeee 5 1 PUP UM eee A E tetas 3 6 POLEMHOMEER ssc cisasieiaidnsdudiennaianiaavatiten 3 9 7 18 Pressure regulator cis siscccaisntaaninahntiiaaensenedecd 6 2 PV sss Fees pets ees ea ete 2 1 PV display decimal point change function C38 1 4 5 9 PY filter C23 J x etic Maa cctecnaectn satiate 1 4 5 7 PV forced Zero f nch Nescsresssicsimesiossusni 1 4 PV forced zero function delay ccccessesssenesseieeseen 5 13 PV Dam panne ceecssssssssesssssssseesssssstnsnsnssecceeesessnunnesseeeeeeeesinnnnssseeeeeecteet 2 1 Re COMMECEION sereeinane ninnu nR 3 6 Reference temperature 11111111sis1rtrtrrrststreririrrsrstrerert 5 16 Resetting the totalized flOW 11i1sisisisiiesrerisisiinn 4 2 RUN ROY odonenennpa aa EERE 2 1 RUN key operation and operation mode selection when power turned ON C02 w eccscccessesssssssssssesessssseeeeeeseee 5 3 Sensor calibration data error 6 1 NENSOM ETO serso nna 6 1 Set point direct setup enable disable C21 5 5 Set point voltage current calculation 4 9 Set points single multiple setup C04 5 3 Shutoff complete eeccessssesssssesssssnsssesunsessnsseeunsseesnesees 3 2 Sigle SP MOM sa cscescsszscnscssasserspssensecteeteiasnerastascteessnca 4 4 4 5 Slow start function C17 sisisi 1 3 5
46. ensor failure excessive flow rate Sensor safety circuit excessive operating activated temperature etc Calibration data error Data corrupted due to Ask for repair electrical noise Sensor calibration data error Data corrupted due to Ask for repair electrical noise User setting data error Power shut off during user Set data again setup data writing o Handling Precautions e The alarm code is displayed only when the instantaneous flow rate or totalized flow is displayed e FT Sensor error 3 to prevent valve overheating operates only on the MQV0500 and MQV1000 At this time the current to the valve is forcibly limited regard less of the selection of 5 in the function setup e Ifa sensor error ALG or ALE occurs the flow rate measurement value will become indefinite Therefore the control flow rate becomes indefi nite even if 0 1 1 Control continued was selected for in the function setup E an Chapter 6 MAINTENANCE AND TROUBLESHOOTING e When 2 2 Forced fully closed or 3 3 Forced fully open is select ed for amp in the function setup the alarm display and operating mode at alarm occurrence are retained To reset the alarm perform the alarm reset operation Alarm reset operation When the ENT key is kept pressed continuously while the instantaneous flow rate is being displayed the alarm is reset after 3 seconds have elapsed E Troubleshooting guide The devic
47. ere are no gas leaks If using Re connections take care not to coat with too much sealant Foreign matter or burrs in the pipes may also cause measurement errors o Handling Precautions e Make sure that the gas flows into the device in the direction indicated by the FLOW arrow on the body Otherwise the flow rate cannot be controlled correctly e Do not touch the pipe sections of a controller treated to be oil free with your bare hands Doing so will degrade the oil free treatment Do not hold the top part of the body with your hand when connecting piping Doing so might deform the case Fasten and connect pipes to the body using a wrench spanner or similar tool on the hexagonal sections of the joints Coating sealant Rc connection o Handling Precautions Coat with an appropriate amount of sealant Do not coat the top two threads Remove any dirt or burrs from inside the pipes Right Wrong J Sealant 3 6 Chapter 3 MOUNTING AND WIRING E Wiring A CAUTION Do not apply a negative voltage or a voltage exceeding 5V to the external setup voltage input terminal Doing so might cause malfunction or equipment failure When using a relay for external contact input and or external 3 way switching input always use a relay designed for micro current use with gold contacts Failure to do so could cause faulty contact resulting in malfunction If there is a risk of a power surge caused by lightning us
48. es in the panel according to the panel cutout dimensions Panel cutout dimensions 100 50 gt M4 2 2 Mount the display and secure it by tightening the screws 3 4 Chapter 3 MOUNTING AND WIRING Installing the front cover for the separate display unit For models with a separate display a front cover decorative frame can be mounted Use of this cover makes it possible to hide the mounting screws improving the appearance Items needed for installation e Front cover 81446858 001 1 set e Phillips screwdriver Panel Separate display unit lt Mounting screws cross recessed head machine screws Note e The front cover set includes one mask one plate and two mounting screws Procedure 1 As shown in the figure put the plate over the display panel and then secure it to the display by tightening the screws 2 Fit the mask onto the display to mount it 3 5 Chapter 3 MOUNTING AND WIRING E Piping A CAUTION For the MQV0500 1000 be sure to use as wide a pipe as possible to reduce the pressure drop caused by the piping If the pressure drop due to the piping is too large the gas supply pressure to this device operating differential pressure might fluctuate greatly with the flow rate causing unstable control When making the pipe connections hold the hexagonal part of the connector section and turn the pipe to tighten After connecting check that th
49. essing the ENT key after carrying out the operation in step 4 the setting remains at the previous value with out being updated E Function setup items Chapter 5 ADVANCED OPERATION The following table shows the function setup items Display Item Item Description Setup Item and Factory Remarks Description Setting n RUN key operation and operation mode selection when power turned ON Flow rate setup method SP setup method selection Number of flow set value number of SPs selection Input range selection of analog setup analog SP input range selection 0 1 Key lock disabled Settings other than flow rate setting SP are key locked All settings are key locked RUN key disabled Operation starts in the control mode when the power is turned ON RUN key enabled 1 Operation is started up in the operating mode used before power shut down when the power is turned ON RUN key enabled 2 Operation is started up in the fully closed mode when the power is turn ed ON Digital setup set by key operation or communications Analog setup set by external analog input voltage Number of SPs 1 57 only Number of SPs 2 55 5 SF i Number of SPs 3 5F 5 to SF 2 Number of SPs 4 SF i to SF 3 Number of SPs 5 SF 8 to 5 4 Number of SPs 6 5F 0 to SF 5 Number of SPs 7 SF i to 5F 5 Number of SPs 8 5F G to S
50. ey gt gt The digit currently being changed blinks while the SP value is being changed 4 When you have reached the target value press the ENT key to enter the new SP value gt gt The SP value and SP No are updated and the SP value of the selected SP No is new the active SP 4 5 Chapter 4 BASIC OPERATION 4 6 Note Advanced use direct setup function Control can be executed using an SP No or SP value currently being changed indicated by blinking display when the direct setup function is enabled for the instantaneous flow rate direct setup function ON OFF 2 in the function setup In this case the ENT key need not be pressed to enter the SP value o Handling Precautions e When switching the display by pressing the DISP key first press the ENT key to enter the SP value For details on how to set up functions see Chapter 5 ADVANCED OPERATION o Handling Precautions Common to single setup and multi setup e When 1 Analog setup is selected as the flow rate setup method X 3 in the function setup and the SP value is controlled by external voltage input the SP value and SP No cannot be changed with the A or V key e If no operation is made for approximately 10s after the operation stat ed in 1 has been performed the display automatically returns to the instantaneous flow rate display elf the DISP key is pressed during the operations in steps 2 and 3 setting is blinking the SP No and S
51. he product tells how to install wire and incorporate the product into instrumentation and describes its operation inspection and maintenance troubleshooting and hardware specifications MLP100 Loader Package for CMQ V Series Digital Mass Flow Controller Manual No CP SP 1216E This manual is supplied with the MLP100 Loader Package The manual describes the software used to make various settings for CMQ V Series using a personal computer Personnel in charge of design or set ting of a system using CMQ V Series must thoroughly read this manual The manual describes installation of the software into a personal computer operation of the personal computer various functions and setup proce dures CMQ V Series Digital Mass Flow Controller Communications Manual No CP SP 1197E Those using the communications functions of the CMQ V Series should read this manual The manual gives an overview of communications and describes transmis sion protocols CMQ V Series communications data troubleshooting and communications specifications Organization of the User s Manual This manual is organized as follows Chapier 1 Chapter 2 Chapier 3 Chapter 4 Chapier 5 Chapter 6 Chapter 7 INTRODUCTION This chapter briefly describes this device and its features and gives a model selection guide NAMES AND FUNCTIONS OF PARTS This chapter describes the names and functions of this devic
52. hing 3 Non voltage contact or open collector input Required circuit type Contact OFF terminal voltage External 3 way switching input 2 5 0 5V External contact input 2 8 0 5V Contact ON terminal current Approx 0 5mA current flowing to contact Allowable ON contact resistance 250Q max Allowable OFF contact resistance 100kQ min Allowable ON residual voltage 1 0V max open collector type 50uA max open collector type 5 0Vdc 5 5mA max Reference voltage of flow rate setting voltage and 5V input of external 3 way switching input Allowable OFF leakage current Reference Output rating voltage output 1 MLP loader communications 2 RS 485 communications 3 wire system Transmission speed 2400 4800 9600 19200 38400 bps only 19200bps for loader communications Commu nications Rating 24Vde current consumption 300mA max 21 6 to 26 4V ripple 5 max Isolation The power circuit is isolated from the input output circuit Material of gas contacting parts SUS316 Teflon Fluororubber Connection method 9 16 18UNF Re 1 4 1 4 Swagelok 1 4 VCR Horizontal Be sure that display surface does not face down gt gt 1O O g B8 2 I1sis ack e x ols 8 alo S S oOlS azlo fo lt lo 9 5 clal2 5 8 9 Allowable power voltage range Mounting orientation Mass Approx 1 2kg Applicable standards EN61326 1997 A1 1998 A2 2001 A3 2003 7 4 Chapter 7 SPECIFICATIONS MQV
53. ic ainth E E EE 3 9 Index 3 Revision History Printed Manual Number Edition Revised cl a E date CPSP 1205E fist Editon azbil Yamatake Corporation Advanced Automation Company 1 12 2 Kawana Fujisawa Kanagawa 251 8522 Japan URL http www azbil com Printed on recycled paper 07 Specifications are subject to change without notice Printed in Japan 1st Edition Issued in Dec 2006 U
54. ies high performance digital mass flow controllers with advanced functions have been developed for the general industrial application They feature flow rate control with high speed and wide rangeability CMQ V controllers integrate three component technologies the ultra quick response UF Micro Flow thermal flow sensor made with proprietary Yamatake technology a proportional solenoid valve and advanced actuator control technology Integrating these technologies has achieved a high speed control with low differential pressure Front cover for separate display sold separately Potentiometer sold separately S for setting flow rate Cable with dedicated p For details see page 7 18 connector sold separately Z Controller e g SDC25 26 24Vdc power supply e g WN790A AC adapter sold separately w RS 485 device for models supporting Wed optional RS 485 i communications function Device Configuration E Features e High speed controllability Fast response of 300ms or less 700ms for the MQV0500 1000 Response time is the time required for the controlled flow rate to reach 2 of the set value starting from the fully closed state or from when the set value is changed during control e Low differential pressure operation CMQ V controllers can operate at a low differential pressure of 50kPa or less e Wide control range Wide control range of 1 to 100
55. ing above 1 to 10 Normal operation ON Event occurrence OFF External inputs OPEN GND 5V are switched as shown below For details on wiring see page 3 10 mode 1 operation Control fully closed fully open SP 0 SP 1 SP 2 Continue count reset count stop count See the table in note 3 0 to 5V 0 to 5V 1 to 5V Fully closed control fully open voltage range simultaneous external switching of 5 and Them ana A re a mode 2 Chapter 5 ADVANCED OPERATION Display Item Item Description Setup Item and Factory Remarks Description Setting External contact 1 Not used For details on how to switch input function Reset totalized flow count three or more SP Nos see the assignment Stop totalizing flow description of the multi setup 2 way switching count page 4 5 External contact 2 3 Switching of SP No The 43 analog digital input function Switching of instantaneous setting is shown when the assignment flow rate setup method contact is ON 2 way switching Valve forced fully closed Slow start ON must be When the totalized flow count reaches the totalized flow event setting the valve is closed fully This totalized flow event preset value can be set in the parameter setup mode gt 5 2 Parameters page 5 11 When control is resumed from the fully closed operating mode the totalized flow count is auto matically reset Automatic valve Function disabled shu
56. inhibited This device is set initially for hydrogen gas use at the factory To use it for helium gas or mixed gases change the gas type setting The use of this device for helium or mixed gases without changing the gas type setting will result in a measurement error Prevent foreign matter from entering the device If rust water droplet oil mist or dust in the pipes enters the device measurement or control error or damage might occur If there is a possibility of foreign matter entering the device provide a filter strainer or mist trap capable of eliminating foreign matter 0 1 ym or greater in diameter at the upstream Be sure to inspect and replace the filter at regular intervals Use the device within the operating differential pressure range Also do not subject it to pressure beyond the rated pressure resistance range Doing so might damage it CAUTION The valve on this device cannot completely shut a flow off If complete shutoff is required provide a shutoff valve separately When the external valve is closed it is necessary also to fully close the valve of the device using either of the following methods e Set the flow rate setpoint to zero e Make the valve operation mode to fully closed If this valve remains in normal control status when the external shutoff valve is closed zero flow rate there will be an excessively large flow as soon as the external shutoff valve is opened This excess
57. is set in the parameter setup mode For details on how to set up functions see Chapter 5 ADVANCED OPER ATION 4 9 Chapter 4 BASIC OPERATION 4 3 Selecting the Operating Mode E Operating mode selection Three kinds of valve operating modes are provided control mode fully closed mode and fully open mode The factory setting is the control mode The operating mode can be forcibly changed to fully closed mode valve is fully closed or fully open mode valve is fully open As shown in the diagram below the mode is changed alternately between the con trol mode and fully closed mode every time the RUN key is pressed Additionally to change the mode from the control mode to the fully open mode keep the RUN key pressed for 2 seconds or longer Control mode RUN key Fully closed mode RUN key 2s or more RUN key 2s or more RUN key Fully open mode E Operating mode display The operating mode is shown on the 7 segment display during instantaneous flow rate display Additionally the OK lamp blinks in the fully open mode Operation mode 7 segment display OK lamp Remarks Out er arr is always displayed after checking that Fully closed mode OFF the flow rate is zero 0 Control mode on Out or lit ov is displayed for approximately 1 second when the mode changes to the control mode Fully open mode Fu is displayed for approximately 1 second when the mode transits to the fully open
58. ive flow rate could activate the AL83 alarm operated by the sensor safety circuit If the sensor safety circuit is activated flow rate measurement and flow control are not possible until the power is turned off and back on again For the MQV0500 1000 if the external shutoff valve is closed continuously for 5 minutes or more in control mode or with the valve forced fully open the valve overheating limit AL71 will be activated and the current to the valve will be forcibly limited Before connecting pipes with Swagelok or VCR connections check the precautions in the instruction provided by the connecting joint manufacturer When separately purchasing a connecting joint use the following made by Swagelok Co Ltd 1 4 Swagelok SS 400 1 6STSC11 1 2 Swagelok SS 810 1 8STSC11 1 4 VCR SS 4 VCR 1 00032SC11 3 8 VCR SS 8 VCR 1 8STSC11 or equivalent The device is a precision instrument Do not drop it or subject it to impact or it might be damaged When installing joints UNF connections secure the lower part of the body in a vise or the like gripped between rags to protect the finished surfaces and turn the joint to tighten The device may be damaged if the lower body is not secured Mount securely in order to prevent vibration Otherwise equipment failure could result Mount the device horizontally Do not mount it with the display facing down Doing so might cause measurement error or equipment failure
59. ized flow event ae to 9999 Flow rate totalization setting first 4 digits 1 3 PV forced zero func Si 0 to 999 9s tion delay izi SP upper limit flow rate 100 FS 0 to 100 FS Unit oe standard 13 1 00 14 0 0 to 1 00 14 SP lower limit flow rate 0 FS 0 to 100 FS 0 0 14 0 0 to 1 00 14 Notes 1 Operation during Ne of flow rate OK amp I amp wy lt ON OK i OFF ON ALM SP OFF BO Da mL PV mw we mm TO ee ee 3 Only items corresponding to the alarm type selected in flow rate alarm setup 45 in the function setup can be set 4 These alarms can be set when 1 to 3 is set for flow rate alarm setup type 5 and valve amperage alarm setup type Z lt 2 in the function setup 5 This cannot be set when 0 Not used OFF all times has been selected for amp 7V and Z 48 event output type assignment in the function setup 6 This can be set Only when 0 Conversion factor for each gas type set by the user has been selected for the 4 or 2 amp gas type selection 1 or 2 in the function setup 7 This can be set only if a suitable alarm type is selected in the 24 valve amperage alarm setup in the function setup 5 13 Chapter 5 ADVANCED OPERATION 5 14 8 9 10 11 12 13 14 This can be set only when 8 to 10 PV upper lower limit event 1 2 has been selected for the a m m C uand 24 event output ty
60. ken off Failure to do so might cause trouble or malfunction e Do not remove the connectors used inside the device 3 2 Chapter 3 MOUNTING AND WIRING Installing joints UNF connections A CAUTION When installing joints UNF connections secure the lower part of the body in a vise or the like gripped between rags to protect the finished surfaces and turn the joint to tighten The device may be damaged if the lower body is not secured When using a standard type UNF connection install the joint first except when the pipe is directly connected Connector latches o Handling Precautions e Do not hold the top part of the body with your hand Doing so might deform the case Wrong e Take special care not to damage the connector latches 3 3 Chapter 3 MOUNTING AND WIRING Installation procedure A CAUTION Q Mount securely in order to prevent vibration Otherwise equipment failure could result o Mount the device horizontally Do not mount it with the display facing down Doing so might cause measurement error or equipment failure e MQV9500 0005 0010 0050 0200 Install the device with two M4 screws using the mounting holes on the base of the device e MQV0500 1000 Install the device with four M4 screws using the mounting holes on the base of the device 04 5 27 110 Installing the separate display unit For models with a separate display 1 Make mounting hol
61. lay intended for micro current use with gold contacts Failure to do so could cause faulty contact resulting in malfunction oV Operation of external 3 way switching input Input state of pin No 16 OPEN GND 5V Assigned function Switching of operating mode 1 Fully closed Fully open Switching of operating mode 2 Fully closed Fully open Switching of totalizing Continue counting Reset Stop counting operation Switching of analog Internal External External I O voltage range reference reference reference 0 to 5V or 0 to 5V or 1 to 5V or external 0 to 20mA 4 to 20mA reference 0 to 20mA 0 to 5V 0 to 20mA 0 to 5V 0 to 20mA1 to 5V 4 to 20mA Internal reference refers to the use of the 5Vdc reference voltage pin No 20 on this device and is used when the setting value is set by an externally connected potentiometer Note e For details on how to assign external 3 way switching input functions see Chapter 5 ADVANCED OPERATION Example of wiring Chapter 3 MOUNTING AND WIRING 1 4 sy 1 Instantaneous flowrate output Internal circuit _ i 5V 5mA max 20 FLOW OUT 19 A GND 18 Potentiometer FLOW SP INPUT 17 5kQ 5V ov o MODE INPUT 16 OPEN DIS Event output 2 Event output 1 Alarm output Output common DB lt DA lt SG Input output circuit POWER GND 4 Power circuit POWER GND 3
62. luororubber 3 4 16UNF Rc 1 2 1 2 Swagelok 3 8 VCR Horizontal Be sure that display surface does not face down Approx 3 5kg EN61326 1 1997 A1 1998 A2 2001 A3 2003 7 6 Notes 1 9 2 4 D 6 we Chapter 7 SPECIFICATIONS The notations L min standard refer to volumetric flow rate per minute after conversion to 20 C 1 atmosphere The reference temperature can also be changed to 0 C 25 C or 35 C in the 4 flow rate display unit selection For details about the controllable range for each gas type see the section on Gas type and control range page 7 8 This item shows the temperature and pressure during calibration Differential pressure required for obtaining full scale flow rate Outlet pressure 0 0kPa gauge Operation is possible even below the required differential pressure but the controllable flow rate range becomes narrower See Relationship between differential pressure and flow rate page 7 9 The MLP100A100 loader package sold separately is needed Only models with RS 485 communications option The maximum operating differential pressure of the MQV1000 may also vary depending on the power voltage For details see the graph below Relationship between power voltage and maximum operating differential pressure in MQV1000 MQV1000 25 C 40 C 60 C 180 differential pressure kPa N S o Maximum
63. mae Internal reference 0 to 5V Setup voltage V Setting flow rate Full scale flow rate x External reference 0 to 20mA Reference output voltage Setup current mA Setting flow rate Full scale flow rate x 20 External reference 0 to 5V Setup voltage V Setting flow rate Full scale flow rate x 5 External reference 0 to 20mA Setup current mA Setting flow rate Full scale flow rate x 20 External reference 1 to 5V Setup voltage V Setting flow rate Full scale flow rate x 4 1 External reference 4 to 20mA Setup current mA Setting flow rate Full scale flow rate x 16 4 Internal reference 0 to 5V input means that the 5V reference voltage input of connector pin No 20 of this controller is used and a voltage is input with the optional potentiometer variable resistor with dial In this case no external power supply for setup is needed The reference voltage 5V is not accurate so to actually measure and calculate the reference voltage output from this controller use a voltage tester for the setup voltage calculation Note Advanced use When 1 Function enabled is selected for analog scaling function 24 in the function setup the full scale flow rate can be changed to a desired level during analog setup In this case the full scale flow rate of the analog flow rate output voltage current PV output voltage current is also changed as it is linked with the above flow rate The scaling flow rate
64. medy Flow rate deviation lower limit alarm Insufficient alarm judgment delay power voltage inlet pressure excessive inlet pressure operating tempera ture etc If items under causes do not help ask for repair Flow rate deviation upper limit alarm Insufficient alarm judgment delay valve trouble sensor trouble etc Ask for repair if the delay is not a problem Valve amperage lower limit alarm Insufficient alarm judgment delay alarm setting current value too high excessive inlet pressure etc Set parameter setup again Valve amperage upper limit alarm Insufficient alarm judgment delay alarm setting current value too low insufficient power voltage insufficient inlet pressure etc Set parameter setup again Valve overheat prevention The gas is forcibly closed out limit operation side for 5 minutes or longer in the control or fully open mode Sensor error 1 Heater voltage error Sensor trouble foreign object on sensor condensation on sensor influx of hydrogen or helium gas etc Sensor error 2 If you close the gas continuously from the outside set the setting flow rate to zero 0 or put the valve in the fully closed mode Remove the probable causes If the device does not return to normal operation even after the power has been shutdown for a while ask for repair Sensor trouble foreign object Measured flow rate signal on sensor back current etc error S
65. mode o Handling Precautions e When 0 RUN key disabled is selected for tiz2 RUN key operation and operating mode selection when power turned ON in the function setup the operating mode is not changed even though the RUN key is pressed e When operating mode change 5 6 or 8 is selected for external con tact input function assignment Z to X Z in the function setup changes by external contact take precedence over RUN key operation In the same manner when operating mode change 1 or 5 is selected for external 3 way switching function 7 4 in the function setup the external 3 way switching input takes precedence over the RUN key oper ation 4 10 Chapter 4 BASIC OPERATION e The fully open mode cannot directly be changed to the control mode To make the change press the RUN key to change the fully open mode to the fully closed mode After that press the RUN key again to change the fully closed mode to the control mode Note Advanced use Selecting the operating mode through external input e When operating mode change 5 6 or 8 is selected for external contact input function assignment 4 to 2 in the function setup the operating mode can be changed through external contact input e When operating mode change 1 or 5 is selected for external 3 way switching input function assignment 4 in the function setup the operat ing mode can be changed through the external 3 way switching i
66. n alarm occurs the alarm code and the PV are displayed alter nately Indicating the flow set value SP display If DISP key is pressed while the instantaneous flow rate is displayed the PV lamp goes out the SP lamp lights and the flow set value SP is indicated on the display o Handling Precautions e If the SP value is not changed for about 10 seconds while the flow set value is displayed the instantaneous flow rate is redisplayed automatically For details on how to change the flow rate see section 4 2 Setting the Flow Rate page 4 4 Ci e When multiple setpoints 2 to 8 SPs have been selected in 2 4 in the function setup when switching by external input the flow set value SP value is displayed for about one second and then the display switches to the SP No 4 1 Chapter 4 BASIC OPERATION 4 2 Indicating the totalized flow When the DISP key is pressed while the flow set value SP is displayed the SP and L min lamps go out the L lamp lights up and the totalized flow value is indicated on the display When the totalized flow value is 10 000 or higher the number is displayed in two parts the last four digits followed by the first four digits When the value is the last four digits the decimal point on the display is lit up For example when the totalized flow value is 123 456L 2455 is displayed Press the DISP key to display 2 To alternately display the first and last four digits press
67. nalog setup are provided to set the flow rate Additionally the digital setup further provides two kinds of setup methods single setup and multi setup In single setup the flow rate is set through key input or communications In multi setup the flow rate is set through the key input communications external contact input or external 3 way switching input One flow set value can be set in the single setup while up to eight flow set values can be set in the multi setup In the analog setup the flow rate is set through the external voltage current input The factory setting is digital setup Either digital setup or analog setup is selected as the flow rate setup method 7 3 in the function setup 0 Digital setup flow rate is set through the key input or communication 1 Analog setup flow rate is set through the external analog voltage current For further detailed setup make selections in 2 4 to 6 in the function setup For details on function setup see Chapter 5 ADVANCED OPERATION o Handling Precautions 4 4 e Setup by communications is available only for models with RS 485 com munications Chapter 4 BASIC OPERATION E Digital flow rate setup Up to eight SP values can be set on this device The operating procedure may vary depending on the number of SP values to be set Single setup number of SPs in function setup 14 is 0 Follow the procedure below to change the SP value 1 Press the DISP key g
68. ndard Hydrogen 4 to 500 7010 1000 a to 500 woo s MQV0010 Control flow rate range L min standard 0 10 to 10 00 0 10 to 10 00 Setup display resolution L min standard Chapter 7 SPECIFICATIONS E Relationship between differential pressure and flow rate For Hydrogen Condition the valve is fully open in air MQV9500 MQV0005 MQV0010 pe m To 3 1 y Jo D 4 __ 50 a _10 S 5 5 Ez 5 40 g8 G s S s N N N E 3 0 E6 E i 5 S o o 2 0 o 4 T T T 3 10 3 2 Ww Ww Ww 2 0 5 10 15 20 25 30 0 5 10 15 20 25 30 0 20 40 60 80 100 120 Differential pressure kPa Differential pressure kPa Differential pressure kPa MQV0050 MQV0200 Outlet pressure condition 60 240 1 150kPa gauge 1 2 3 a 2 2 50kPa gauge 50 200 3 3 OkPa gauge 4 4 50kPa gauge g g S 40 S 160 4 i i g n N 30 120 E E a a 20 o 80 s g 3 10 40 Ww re 0 0 0 5 10 15 20 25 30 0 20 40 60 80 100 Differential pressure kPa Differential pressure kPa MQV0500 MQV1000 600 o 1 2 3 10 50 g g 8 400 s i i g an n 300 rf E E a 200 s s 3 100 E re re 0 0 10 20 30 40 50 60 Differential pressure kPa Differential pressur
69. nmnmnnmamamened 4 10 Fully Opeth MOE sisi sssissncissscrtecssascnstecrnssnrtecenannsccontese 4 10 Function set p Iems sisissisiisaiiinnsnnini 5 3 Function setup Mode ecceccesscseeesssssssessssseessessssseneesssees 5 1 GIS YPE imene E E N AE E 5 16 Gas type external switching u 1 4 Gas type selection 1 C 8 srasismisiesnisasnia 5 6 Gas type selection 2 C26 eccrine 5 7 Gas type SCCUP iiinn 1 2 Gas type SWitChi mg ersinnen 1 2 High speed controllability 20 0 0 eects 1 1 Input range selection analog input for SP range COS peer eee ere EEE 5 3 Installation Locations cceeeesscseessssseiessssseeeesssssennessseee 3 2 Instantaneous flow rate 2 1 Instantaneous flow rate Gisplay cesses 4 1 Instantaneous flow rate OUtPUC eee 3 11 Internal reference 0 to SV input eee 4 9 Jack for AC adapter eecccecesssscseessssssseesssssennssssesteesst 2 2 Key loek COU anaa teasers uA 5 3 LAE EE T AAA AT A 2 1 Key sscsctetaceacescaneecioecentasmnaananeannaee 2 1 KV We ee 2 1 MiSt fa is sc seednc atstns inaenea 6 2 Model selection guide oc eecsssssssscessssssssseessssnnnnnessseeeeeeeen 1 7 Mullti setupp function u s v v 19111191111111110111 1 2 4 4 4 5 Qil free teat nt a sesoresnanen enuei 1 6 OK Latin Pecresenaonanna e ei aa 1 4 Operating differential pressure setting for control optimization C36 oaeeeeeeeessccceessssssesssesemenssnssseceeessetnunnsssseeeeeete 5 9 Index 2 Operating mode display 0 eec
70. nnettiin eo sai svevncs Sale as eeaie ee essa were E aa 1 1 E POAT ROS nosece cee gs etic aid A eiseaceish E an ackieve EE E E R 1 1 E Functions essrisessi rs r o oe ese od 8 EENE ENA re Fo Nie EEE aS Bare REINS GeaE SNe a 1 2 M Model selection guide eee cece reece cece eee e eee e ee eeceeees 1 7 E Basic operation and advanced operation eeeeee eee e ees 1 8 NAMES AND FUNCTIONS OF PARTS MOUNTING AND WIRING E MOUunting eee eee eee c cece cece cece eee n nce e tenn cence ne cesecnnees 3 2 E PIPING ecciesie ieee sca nann n EE E E REEE E SE 3 6 E WING 22 sesc cstee we eceews i EE E E EEEE ses 3 7 BASIC OPERATION Switching Displays sssssssssseessssssesssseeecssssssseeeeesesseseee 4 1 M Basic operation sssessseeseseseesecereesecsecercosecereeseeee 4 1 Setting the Flow Rate ssssssssssessssesssssersseessseeeseseesseeees 4 4 HM Digital flow rate setup s ssesessesesecseresecsecesecseeesecseeee 4 5 E Flow rate setup by external contact input essssesesessesesssss 4 7 E Flow rate setup by external 3 way switching input ssssssesssees 4 8 M Analog flow rate setup ssssesesecsereecoseseseserseseerereseees 4 9 Selecting the Operating Mode sssssssesesessssesesesesrssssseerese 4 10 M Operating mode selection ssssssessssesessssssesessesesee 4 10 HM Operating mode display esssssssssesesesesssseseeeeessseses 4 10 ADVANCED OPERATION E Setup mode tra
71. nput For details on how to set up functions see Chapter 5 ADVANCED OPERATION Chapter 5 ADVANCED OPERATION The advanced operation provides three kinds of modes Function setup mode Parameter setup mode and Controller information display mode E Setup mode transition operation Normally when the power is turned ON the instantaneous flow rate is displayed in the basic operation mode When keys are operated as described in the diagram below during instantaneous flow rate display the operation changes to the specified mode When the operating mode changes to Function setup mode or Parameter setup mode the specified setup can be changed In the Device information display mode you can check the statuses of major setup items gas type full scale flow rate reference temperature and communica tions address Basic operation Advanced operation Doo ES A Power ON DISP key wkey ENT key Instantaneous flow rate display osor more 5 2 page sails key 3s or more Flow set value display 5 11 page ARENY i a A key 3s or more Totalized flow display 5 15 page DISP key Valve amperage display 5 1 Chapter 5 ADVANCED OPERATION 5 1 Functions This section describes how to set up functions 5 2 Setup method DISP key DISP key Basic operation Advanced operation a a 2 2 a a Power ON DISP key Wkey ENT key a 3s or more Function setup mode key 3s or m
72. ns Be sure to check that the wiring is correct before turning the power on Incorrect wiring could cause damage or malfunction OO 6060 0 6 When discarding the device dispose of it as industrial waste following local regulations The Role of This Manual In all four manuals have been prepared for the CMQ V Series Read the manual according to your specific require ments The following lists all the manuals that accompany the CMQ V Series and gives a brief outline of the manual If you do not have the required manual contact Yamatake Corporation or your dealer CMQ V Series Digital Mass Flow Controller Manual No CP SP 1204E First time users of the CMQ V Series and those in charge of maintenance or hardware design for incorporating a CMQ V Series controller in instru mentation should read this manual This manual outlines the product tells how to install wire and incorporate the product into instrumentation and describes its operation inspection and maintenance troubleshooting and hardware specifications CMQ V Series Digital Mass Flow Controller for Hydrogen and Helium Gases Manual No CP SP 1205E This manual First time users of the CMQ V Series for hydrogen and helium gases and those in charge of maintenance or hardware design for incorporating a CMQ V Series controller For hydrogen and helium gases in instru menta tion should read this manual This manual outlines t
73. nsition operation s ss ssssssesesssssssesseseeseso 5 1 FUNCTIONS ecserin nn r aE E EE E E E 5 2 M Function setup items sessessesesecescesserrccseceeceseoseresees 5 3 Parameters mersine ane E e toes cee siaeslin tin Gene Gwe an pee sees eons 5 11 Device Information Display scseee cece e cece eee eee erence ences 5 15 E Setup method esssssesessssocossesosssesosessesoosesoccsseos 5 15 E Device information display item essessesssesseessecrereseese 5 16 Flow Rate Range eesessesesesereeseceecesecsecereoseceeeoeecceceeeee 5 17 TROUBLESHOOTING M Alarm code display esssesesesreseserreseseeroseserceseesecereee 6 1 HM Troubleshooting Quide cece eee e cece cece cece eee eee eeeees 6 2 viii Chapter 7 SPECIFICATIONS Index MQV9500 O005 0010 1 cece ccc tcc ea eee eee n eee eee eeenes 7 1 MQVO050 0200 ii ccc idee sc meranen nrnna ease dee od cbse te ele cea die a 7 3 MQV0500 1000 iesciicsseveiers can aaea E EREE ee 7 5 Gas type and control range eee cece cece eee c nee e cece cneeeenees 7 8 Relationship between differential pressure and flow rate for hydrogen 7 9 Relationship between differential pressure and flow rate for helium 7 10 Optional parts Sold separately cece cece eee e cece eee eeee 7 11 External GIMENSIONS ccc cece ccc c cece cece cece cee ceeeeeceeseece 7 12 Chapter1 INTRODUCTION E Introduction CMQ V Ser
74. nt restarts automatically after it has been reset On the other hand when resetting with the external contact input by contact ON the count restarts when the contact is turned OFF fap Two of the event types listed below can be selected Output ON delay time can also be set but delay cannot be set for totalizer pulse output Integrated flow event output when the integrated flow event setting is exceeded Totalized pulse output pulse can be output for each totalizing flow display unit OK output the control flow rate is within the set value allowable range Flow rate upper or lower limit output output in comparison with optional upper or lower limit flow rate set value Output mode The four modes control fully open control or fully open fully closed can be identified and output Chapter 1 INTRODUCTION 1 4 OK lamp ON output function setup 87 8 The OK lamp can be set to light when the control flow rate is within the set value allowable range This function is very handy for verifying at a glance whether or not there is a proper response to a new set value after its value is changed OK lamp output can also be used as an interlock signal for subsequent processes by assigning it to event output and including it in a sequence program PV filter function setup 23 This function is used to average the instantaneous flow rate control flow rate detected value Use of this function m
75. on Full scale flow rate Resolution Full scale flow rate Resolution L min L min L min L min L min L min L min L min 0 500 to 0 302 0 002 5 00 to 3 02 gt saoes02 02 Fosoote0 121 0001 s0121 o0 owi oi 30 0 to 10 0 0 1 0 300 to 0 100 0 001 3 00 to 1 00 3 00 to 1 00 Note The display unit of the flow rate shown in for the MQV9500 is mL min MQV0200 MQV0500 MQV1000 Full scale flow rate Resolution Full scale flow rate Resolution Full scale flow rate Resolution L min L min L min L min L min L min C swwse 2 gt zoo a soot 1 _ o Handling Precautions e Even after flow rate range is changed the accuracy specifications are the same as for the standard range The full scale designated by FS shows the numeric value of the standard range e Even though the flow rate range is changed the minimum control flow rate is the same as for the standard range 5 17 Chapter 6 TROUBLESHOOTING E Alarm code display When a flow rate deviation alarm occurs or when an alarm occurs during self diagnostics the device forcibly switches to the operating mode currently selected for Operation selection at alarm occurrence amp in the function setup Additionally the alarm code and normal display are alternately shown at the upper 4 digit portion of the 7 segment display Alarm Code Problem Causes Re
76. onanienieit 7 11 Advanced Operation ccccsccccessssssssssssnssssseseesssinennen 1 8 5 1 Alarm Codeine ni 6 1 Alarm judgment delay issicnscsiisiinsusimi 1 5 Alarm occurrence setup of control operation ClOn E 5 6 Alarm TESE T ssnanennenene naeun A 6 2 ALM alarm Larmp oeeccccccccessssssssssssesesesnssseceeessessnunnsnnseeeeeesen 1 5 Analog TO reinn innaniia iai 3 9 Analog input flow set value range selection 1 5 Analog output type and range selection C06 1 6 5 3 Analog scaling function C26 uu 1 5 4 9 5 7 Analog SEMP o n esesceeeeesssseeeessssseessssssstunsssstestnessstesnesessetes 1 5 4 4 Automatic reset of totalized flow at start of control PUIG Holzes enana E 1 5 5 5 Automatic shut off s s1ssiiisirirtrsrsrsrsrsererersrsrsrsererersrrsrsee 1 5 Basic operation s ssssrsisisirerirrsiisrssrerersrersrserererersrsrsere 1 8 4 1 Calibration data corruption Of u 6 1 Coating SealATit sennecesa 3 6 Communications address eeesseceesssseeesssssesesssssesneeet 5 16 Communications address setting C30 5 8 Compatible connectors electrical 3 7 Connector for separate display 0 0 0 0 2 2 Connector pin Layout ccsceescccessssseieesssssesessssseeeessseee 3 7 Connector pin signal names 00 eect eesti 3 8 Connector terminal DIOCK sssssscsinsisiisssess 3 12 Control dead band setup C22 1 4 5 5 Control flow rate range external switching 1 4 Control flow r
77. ons graphically represent the actual prohibited action The example on the left notifies the user that disassembly is prohibited Filled in black circles instruct the user to carry out a specific obligatory action to prevent possible danger These icons graphically represent the actual action to be carried out The example on the left instructs the user to remove the plug from the outlet WARNING Never allow gases that are within explosion limits in particular mixed gases within explosion limits that contain hydrogen to pass through this device Doing so might result in an explosion accidents When using this device for gases that contain hydrogen be sure to purge the device with an inert gas such as nitrogen or argon before use Use without purging may cause an explosion A CAUTION If the device is used for burner air fuel ratio control take the necessary countermeasures with the equipment to prevent the occurrence of backfire and to avoid any influence to the device even if backfire occurs Pressure increase or fire in the pipes caused by the backfire of the burner could damage the controller This device is exclusively for hydrogen and helium gases It cannot be used for control or measurement of gases other than hydrogen helium and hydrogen helium mixtures excluding mixed gases within explosion limits Oxygen cannot be measured even if gas contacting sections of this device are oil
78. onstant value for the start of control and for set value changes With this function the set value change ramp amount can be set more precisely than with the slow start function Two different types of ramps can be set and there are the following 2 control modes e SP ramp control 1 In SP ramp up Slope 1 In SP ramp down Slope 2 e SP ramp control 2 In external contact OFF Slope 1 In external contact ON Slope 2 e SP limit function setup 35 The lower and upper limits of the set value range can be set to desired levels This prevents mistaken high low settings e Slow start function setup 7 Sudden changes in the controlled flow rate when control is started or when the set value is changed can be suppressed The control speed can be changed in eight stages within a range of about 1 to 6 seconds e Flow rate totalization function setup a4 1 42 e Event lamp lighting output function setup 27 2 MQV9500 in 0 01L units MQVO0005 in 0 1L units MQV0010 0050 in IL units MQV0200 0500 in 0 01m3 units MQV1000 in 0 1m3 units Integrated flow count can be up to eight digits long to 99 999 999 for each unit Display alternates between first and last 4 digits The count can be reset by key operation or external contact input Use of external contact input makes it possible to remotely operate the start temporary stop and reset of totalization When resetting the integrated count by key operation the cou
79. operating 160 140 21 0 220 230 240 250 260 270 Power voltage V o Handling Precautions e f this device is operated with a differential pressure exceeding the maxi mum operating differential pressure shown in the graph above the volt age to the valve becomes insufficient and the target flow rate cannot be obtained Additionally even if the voltage does not become insufficient flow rate hunting may occur if the operating differential pressure exceeds 300kPa Always operate this device with a differential pressure less than 300kPa 7 7 Chapter 7 SPECIFICATIONS HM Gas type and control range The controllable flow rate range may vary depending on the type of gas For details see the tables below Model No MQV9500 MQV0005 Control Setup display Control Setup display flow rate range resolution flow rate range resolution L min standard L min standard L min standard L min standard Hydrogen 0 004 to 0 500 0 002 0 04 to 5 00 0 004 to 0 500 0 002 0 04 to 5 00 Model No MQV0050 MQV0200 Control Setup display Control Setup display flow rate range resolution flow rate range resolution L min standard L min standard L min standard L min standard Hydrogen 0 4 to 500 2 to 200 0 4 to 500 2 to 200 Model No MQV0500 MQV1000 Control Setup display Control Setup display flow rate range resolution flow rate range resolution L min standard L min standard L min standard L min sta
80. ore yi Parameter setup mode key 3s or more Akey y Device information display mode Instantaneous flow rate display DISP key Flow set value display Totalized flow display DISP key Valve amperage display Follow the procedure below to set functions such as event output type and external contact input assignments 1 Press the DISP key several times to display the instantaneous flow rate gt gt The PV and L min lamps light 2 Hold down the w and the ENT keys for three seconds or more gt gt Item is displayed on the 7 segment display and mode changes to the func tion setup mode 3 Press the A or w key to select the desired setup item number and then press the ENT key gt gt The current setting value blinks on the 7 segment display 4 Press the A or W key to select the desired setting 5 When you have selected the desired setting press the ENT key to enter the set ting gt gt The setting value is updated At this point the setting value is saved 6 If you want to set up other items return to step 3 and repeat the procedure Otherwise proceed to step 7 7 Press the DISP key gt gt The function setup mode changes to the instantaneous flow rate display o Handling Precautions e If you do not press any keys for one minute after entering the function setup mode the display automatically returns to the instantaneous flow rate display e f you press the DISP key without pr
81. os Cable with connector on both ends Connector terminal Chapter 4 BASIC OPERATION 4 1 Switching Displays E Basic operation Basic operation is used to change the display to instantaneous flow rate PV flow set value SP totalized flow value or valve amperage Normally when the power is turned ON the instantaneous flow rate is displayed in basic operation mode When this is the case operating the DISP key changes the contents of the 7 segment display as described below Power ON Instantaneous flow rate display PV and L min lamps lit DISP key Flow set value display SP and L min lamps lit DISP key Totalized flow display L lamp lit DISP key Valve amperage display SP PV L and L min lamps go out DISP key o Handling Precautions e f there is no operator input for approximately 10 seconds while the flow set value is being displayed the display automatically reverts to the instantaneous flow rate display e The L lamp is labeled m8 on the MQV0200 0500 1000 Indicating instantaneous flow rate PV display When the power is turned ON the PV and L min lamps light and the instantaneous flow rate is indicated on the display o Handling Precautions e When the operating mode is set to fully closed and the flow rate is zero and when the operating mode is switched to the control mode or fully open mode the operating mode aF F an Fiiz is displayed for about one second e When a
82. p ramp 1 is selected when the contact is OFF Ramp 2 is selected when the contact is ON 13 All alarm detections are cancelled while the contact ON is being continued a 5 5 Chapter 5 ADVANCED OPERATION Display Item Item Description Setup Item and Description Operation selection 0 Control continued and at alarm occurrence alarm output OFF any time alarm ignored Control continued and alarm output ON Forced fully closed and alarm output ON Forced fully open and alarm output ON Control continued and alarm output ON 2 Forced fully closed and alarm output ON 3 Forced fully open and alarm output ON 0 Slow start disabled 1 to 8 Slow start enabled equivalent to approx 1 to 6 seconds settling time Slow start setup Conversion factor for each gas type set by user 9 Hydrogen 10 Helium Gas type selection 1 0 Temperature at 0 20 C 1 atmosphere reference conditions 1 0 C 1 atmosphere 2 25 C 1 atmosphere 3 35 C 1 atmosphere Valve amperage alarm setup 0 Valve amperage alarm disabled 1 Only upper limit alarm enabled 2 Only lower limit alarm enabled 3 Upper lower limit alarm enabled Direct setup 0 Function disabled function ON OFF 1 Function enabled 5 6 Factory Setting 1 Alarm code displays even if 0 is selected 1 to 3 Output logic 1 to 3 is inverted ON at all times However they are turned OFF at all times during power shutoff
83. pe assignment in the function setup This can be set only when 1 and 2 SP ramp control has been selected for the 7 SP ramp control function in the function setup at et This can be set only when 1 Function enabled has been selected for the 24 analog optional scaling function in the function setup This can be set only when 11 Cumulative flow event has been selected as event output type in L iior 8 in the function setup or when 1 Function enabled has been selected for the automatic valve shut off function upon occurrence of the cumulative flow event 3 This can be set only when 1 Function enabled has been selected for the 24 forced PV zero function in the function setup This can be set only if suitable limit type is selected for the 35 SP limit function in the function setup The initial value and setting range are the full scale value multiplied by the ratio in parentheses The setting range differs according to model number and gas type o Handling Precautions e The valve amperage changes greatly according to the differential pres sure even if the flow rate is the same For this reason the valve amper age alarm function cannot be used under unstable differential pressure conditions e Even under stable differential pressure conditions hysteresis character istics electric current to the valve differs even if the flow rate is the same are applied to the relationship between the valve am
84. perage and the flow rate So to use the valve amperage alarm function first sufficiently test under operating conditions to check the valve amperage range and then determine the alarm amperage setting Chapter 5 ADVANCED OPERATION 5 3 Device Information Display This section describes device information display Basic operation Advanced operation TT Power ON DISP key Wkey ENT key 3s or more Instantaneous flow rate display 4 H DISP key 4 key 3s or more DISP key DISP key i 4 key 3s or more i i Totalized flow display Device information display mode DISP key Valve amperage display E Setup method Four items of those set on the device that is gas type full scale flow rate refer ence temperature and communications address are displayed sequentially 1 Press the DISP key several times to display the instantaneous flow rate gt gt The instantaneous flow rate is displayed and the PV and L min lamps light 2 Hold down the A key for three seconds or more gt gt The 3S is displayed on the 7 segment display and the mode changes to the device information display mode 3 Release the A key once 4 Press the A or W key to select the desired setting gt gt When releasing the key the display item and currently set value are alternately displayed automatically 5 If you want to set up other items return to step 3 and repeat the procedure Otherwise proceed to step 6
85. rallel 3 to the power supply to reduce 2 voltage drop caused by wiring 19 18 Wiring e Power supply POWER GND POWER GND 2 POWER 24V Oo POWER 24V 24Vdc e RS 485 communications for models with optional RS 485 only DB lt 8 DB DA lt _____ _ 7 DA SsG lt __ _4 or D GND 3 8 Chapter 3 MOUNTING AND WIRING e Alarm output event output Load D EV2 OUT Load Q Ev1 OUT Load ALM OUT or D GND o Handling Precautions e Take special care that the event and alarm outputs do not exceed the output rating of the device Additionally when driving a relay use an appropriate coil surge absorption diode built in relay Failure to do so might cause the device to malfunction e External contact input s o _ D13 DI2 DI 9 or D GND o Handling Precautions e When switching by relay contact use an appropriate relay intended for micro current use with gold contacts Failure to do so could cause faulty contact resulting in malfunction e Analog I O Flow out 0 to 5V 1 to 5V 0 to 20mA 4 to 20ma OVPU A GND FLOW SP INPUT 0 to 5V 1 to 5V Oto 20mA 4to20ma MPU e When using potentiometer 0 to 5V 5V A GND 0V FLOW SP INPUT 3 9 Chapter 3 MOUNTING AND WIRING 3 10 e External 3 way switching input 5V A GND 0V 5V a MODE INPUT OPEN o Handling Precautions e When switching by relay use an appropriate re
86. red provide a shutoff valve separately When the external valve is closed it is necessary also to fully close the valve of the device using either of the following methods e Set the flow rate setpoint to zero e Make the valve operation mode to fully closed If this valve remains in normal control status when the external shutoff valve is closed zero flow rate there will be an excessively large flow as soon as the external shutoff valve is opened This excessive flow rate could activate the AL83 alarm operated by the sensor safety circuit If the sensor safety circuit is activated flow rate measurement and flow control are not possible until the power is turned off and back on again For the MQV0500 1000 if the external shutoff valve is closed continuously for 5 minutes or more in control mode or with the valve forced fully open the valve overheating limit AL71 will be activated and the current to the valve will be forcibly limited Before connecting pipes with Swagelok or VCR connections check the precautions in the instruction provided by the connecting joint manufacturer When purchasing a connecting joint use the following made by Swagelok Co Ltd 1 4 Swagelok SS 400 1 6STSC11 1 2 Swagelok SS 810 1 8STSC11 1 4 VCR SS 4 VCR 1 00032SC11 3 8 VCR SS 8 VCR 1 8STSC 11 or equivalent The device is a precision instrument Do not drop it or subject it to impact or it might be damaged Chapter 3 MOUNTING AND WIRING E
87. ressure resistance 1MPa gauge allowable inlet pressure Allowable operating 10 to 60 C temperature range Allowable storage 20 to 70 C temperature range Humidity Allowable operating humidity 10 to 90 RH condensation not allowed range Helium leak rate Within 1 x 108 Pa m s leaks Flow rate Setup method 1 Key operation 2 External analog input setup 3 MLP loader communications 4 RS 485 communications 3 wire system Setup resolution See Gas type and control range table page 7 8 External analog input Input range 0 to 5Vdc 1 to 5Vdc 0 to 20mA 4 to 20mA switchable Input impedance 1MQ 10 for voltage input 250Q 10 for current input 7 5 Chapter 7 SPECIFICATIONS ie Model No MQV0500 MQV1000 Flow rate Display method 7 segment LED 4 digits display See Gas type and control range table page 7 8 Indication accuracy at standard 1 t2 FS 1 digit 80 FS lt Q lt 100 FS temperature and differential 2 1 FS 1 digit O FS lt Q lt 80 FS pressure Q flow rate Totalizing Display range 0 01 to 999 999 99ms 0 1 to 9 999 999 9m3 function Display resolution Totalized count backup 1 Every 5m 1 Every 10m8 timing 2 Every hour from the previous backup 3 At the time the Run key is pressed Analog Instantaneous flow rate PV output or setting flow rate SP output output switchable 0 to full scale flow rate scale can be changed 0 to 5Vdc 1 to 5V
88. status or the setting is changed pressure during control Accuracy 1 t2 FS 80 FS lt Q lt 100 FS at standard temperature 2 1 FS 40 FS lt Q lt 80 FS and differential pressure 3 0 5 FS O FS lt Q lt 40 FS Q flow rate Repeatability 1 0 5 FS 40 FS lt Q lt 100 FS Q flow rate 2 0 25 FS O FS lt Q lt 40 FS Temperature characteristics 0 06 FS max per 1 C Pressure characteristics 0 2 FS max per 100kPa Standard differential pressure 200kPa Inlet pressure 200kPa gauge outlet pressure OkPa gauge Required differential pressure Hydrogen 20kPa Hydrogen 100kPa 3 Helium 40kPa Helium 180kPa Operating differential 300kPa max pressure range 4 Pressure resistance 1MPa gauge allowable inlet pressure Standard operating 23 C temperature 2 Allowable operating 10 to 60 C temperature range Allowable storage 20 to 70 C temperature range Allowable operating humidity 10 to 90 RH condensation not allowed range Helium leak rate Within 1 x 108 Pa m s Setup method 1 Key operation 2 External analog input 3 MLP loader communications 4 RS 485 communications 3 wire system Setup resolution See Gas type and control range table page 7 8 External analog input Input range 0 to 5Vdc 1 to 5Vdc 0 to 20mA 4 to 20mA switchable Input impedance 1MQ 10 for voltage input 250Q 10 for current input 7 3 Chapter 7 SPECIFICATIONS tein
89. t gt The SP flow rate setpoint is shown on the 7 segment display 2 Change the SP value by pressing the A or W keys You can move to the digit to be changed by pressing the lt key gt gt The digit currently being changed starts blinking 3 When you have reached the target value press the ENT key gt gt The SP value is set and saved Note Advanced use direct setup function Control can be executed using an SP value currently being changed indicated by blinking display when the direct setup function is enabled for the instanta neous flow rate direct setup function ON OFF 2 in the function setup In this case the ENT key need not be pressed to enter the SP value o Handling Precautions e When switching the display by pressing the DISP key first press the ENT key to enter the SP value and switch the display For details on how to set up functions see Chapter 5 ADVANCED OPERATION Multi setup number of SPs in function setup 4 is 1 to 7 In multi setup up to eight SP values can be switched by key operation and by external contact input Follow the procedure below to change the SP No and SP value 1 Press the DISP key gt gt The display switches to SP No 5 to 57 7 after about one second 2 Press the A or W keys to change the SP No and press the ENT key gt gt The SP No is entered 3 Change the SP value by pressing the A or W keys You can move to the digit to be changed by pressing the lt k
90. t Oki Electric Cable Company Limited FLEX S20 7 0 2 AWG 24 20 min lt gt Color pin No 1 red pin Nos 5 10 and 15 green others gray A e gt u Contact HIROSE ELECTRIC CO LTD HIF3 2226SCC 20 P ces compatible lead AWG 22 to 26 7 2 oa e e 20 wire shielded cable 81446951 001 we Ground terminal Ground wire Pressure connection type special hood Pressure connection socket contact Pressure connection female connector Heat shrinkable tube Cable 20 wire conductor structure 7 0 2mm2 coated wire diameter 1 06 oo00000000 o000000000 j HIF3 20CV 20 5000 min 7 17 Chapter 7 SPECIFICATIONS Potentiometer for flow rate setting 81446683 002 e Digital dial e Potentiometer Unit mm 16 5 1 Hexagonal nut M9 2 10 Internally toothed washer f ih part oO Y l Ko 7 E o F sjo g 2 Go 2 lt 8 o LOCK 5 HE i 10 5 2 Mounting screw 14 2 Mounting hole dimensions M3xP0 5 gt 5 3 3hol 15 2 oe poshes 26 1 gt 10 3 Thole AC adapter 81446957 001 Unit mm 81446957001 Yaratake Corporation 7 18 Index T segment display sssini 2 1 AC adape seost 7 11 7 18 INCCOSSOLIGS scscectscssssssssasteazsvssectavtestnscststnsobbecsssasterbdissis
91. t off when the Function enabled totalized flow event occurs On off of totalized Function disabled flow reset function Function enabled at start of control Set the alarm flow rate in the parameter setup mode gt 5 2 Parameters page 5 11 Flow rate alarm Function disabled setup type Only upper limit alarm used Only lower limit alarm used Upper lower limit alarm used E External contact 3 Valve forced fully open Da selected inf 7 Slow start input function Switching of slow start when the contact is ON assignment operation or switching of Similarly in case of SP ramp 2 way switching instantaneous SP ramp control SP ramp control 1 or 2 control operation must be selected in 2 lt 7 Switching of operating Ramp control when the mode contact is ON control by contact ON 6 8 If the forced fully closed forced fully closed by and fully open are input contact OFF from two sources at the same 9 Flow rate zero adjust time both inputs become ment invalid 10 Switching of gas type Set the operation mode to full setup close or set the flow rate to zero 11 Switching of flow rate range and perform the contact ON 12 Switching of SP ramp operation for a minimum of 13 Alarm reset 10 seconds See page 6 2 for the details C 8 becomes active by contact OFF and f 25 becomes active by contact ON 24 becomes active by contact OFF and 25 becomes active by contact ON 12 Parameter setu
92. talized flow amperage Lit when event 1 output is ON to the valve and the operating mode EV2 lamp It also displays parameter setup values function f Lit when event 2 output is ON setup values and details of alarms Zoe Rp 2 Digital SP lamp Mass Flow L lamp i i Lit when the flow rate Controller Lit when the totalized flow is displayed setpoint is displayed PV lamp Lit when the instantaneous flow rate is displayed Blinks when the cumulative flow event occurs L min lamp Lit when the instantaneous flow rate or flow set value is displayed DISP key Use this key to switch the details displayed on the 7 segment display ENT key Use this key to fix and store the set value to memory Also use it to reset the cumulative flow and to reset alarm and move to the function setup mode Akey Use this key to increment the setting value Additionally this key is used to change to the device information display mode wkey Use this key to decrement the setting value Also use it to move to the function setup mode qkey Use this key to move to a desired digit when changing setting value Also use it to move to the parameter setup mode RUN key Use this key to change the operating mode Note Technical terms used in this manual are defined as follows e SP setpoint The flow set value or flow rate set point e PV process variable Instantaneous flow rate or controlled flow rate e Opera
93. tandard 5 00 L min standard 10 00 L min standard Gas types Hydrogen H Helium He Gas must be dry and not contain corrosive components chlorine sulfur acid The gas must also be clean not containing dust or oil mist Pressure characteristics 0 2 FS max per 100kPa Required differential pressure Hydrogen 20kPa Hydrogen 80kPa 3 Helium 40kPa Helium 150kPa Control 1 to 100 FS see Gas type and control range table page 7 8 Response Within 0 3s at setting 2 FS typ at standard differential Control starts from the fully closed status or the setting is changed pressure during control Accuracy 1 2 0 FS 80 FS lt Q lt 100 FS at standard temperature 2 1 0 FS 40 FS lt Q lt 80 FS and differential pressure 3 0 5 FS O FS lt Q lt 40 FS Q flow rate Repeatability 1 0 5 FS 40 FS lt Q lt 100 FS Q flow rate 2 0 25 FS O FS lt Q lt 40 FS 0 Pressure resistance 1MPa gauge allowable inlet pressure Pressure Operating differential 300kPa max pressure range 4 2 Standard differential pressure 200kPa Inlet pressure 200kPa gauge outlet pressure OkPa 2 gauge Temperature Standard operating 23 C temperature Allowable operating 10 to 60 C temperature range Allowable storage 20 to 70 C temperature range Allowable operating humidity 10 to 90 RH condensation not allowed range External Helium leak rate Within 1 x 108 Pa
94. the lt key o Handling Precautions e When an alarm occurs the alarm code and the totalized flow value are displayed alternately Resetting the totalized flow count The totalized flow value is reset to zero by holding down the ENT key for two seconds or more while the totalized flow value is displayed Note Advanced operation e Totalized flow event output function When 1 Totalized flow rate count up ON is selected as the event output type for function setup 7 or 8 the event output turns ON when the totalized flow value reaches the totalized flow event setting This threshold value for the totalized flow event is set in the parameter setup mode e Totalized flow event automatic valve shut off function When 1 Function enabled is set for the automatic valve shut off function in function setup 3 the valve will be automatically closed fully if the total ized flow value reaches the preset value The threshold value for the totalized flow event is set in the parameter setup mode For details on function setup and parameter setup see Chapter 5 ADVANCED OPERATION Chapter 4 BASIC OPERATION Valve amperage display If DISP key is pressed while the totalized flow is displayed the PV SP L and L min lamps go out and the electrical current to the valve 4 4 to iu indicated on the 7 segment display o Handling Precautions e The valve amperage can vary greatly according to the differential pressure even at the
95. ting mode One of 3 modes valve fully closed valve control valve fully open The L lamp is labeled m3 on the MQV0200 0500 1000 2 1 Chapter 2 NAMES AND FUNCTIONS OF PARTS Body MQV9500 0005 0010 0050 0200 Connector port This is used for I O signals Use cable with dedicated connector Jack for AC adapter Connect dedicated adapter here Model No 81446957 001 24Vdc 650mA Pipe connection port outlet This is the port from which gas is discharged Pipe connection port inlet This is the port through which Jack for PC loader connection gas enters Body MQV0500 1000 Connector for separate display This is used for connecting the separate display unit Connector port This is used for I O signals Use cable with dedicated connector Jack for AC adapter Connect dedicated adapter here Model No 81446957 001 24Vdc 650mA Pipe connection port outlet This is the port from which gas is discharged Jack for PC loader connection Pipe connection port inlet This is the port through which gas enters o Handling Precautions e The former AC adapter model No 81446682 001 15Vdc 350mA can not be used with CMQ V Chapter 3 MOUNTING AND WIRING A WARNING Never allow gases that are within explosion limits in particular mixed gases within explosion limits that contain hydrogen to pass through this device Doing so might result in
96. tup 1 10 to 99 10 to 99 of levels can be improved by Flow rate range standard range When reducing the flow rate range setup 2 calculating the range gt Page 5 17 for details reduction the value is If a value of 10 to 99 is set the cut off at the least signif value is cut off at the least icant digit significant digit when calculating 10 to 99 10 to 99 of the range reduction standard range When Example calculating the range Standard range 30 0L min reduction the value is and range setup 67 not cut off at the least Calculation formula significant digit 30 0 x 0 67 20 1 Since the value is cut off at the least significant digit the flow rate range becomes 20 0L min The range selected by 25 becomes active if 11 is selected for assignments t to X i external contact input function assignment and only when the objective contact is turned ON However the range selected by Z 24 becomes active otherwise D Gas type selection 2 0 Conversion factor for This setting determines the gas each gas type set by type when 10 gas type user changeover is selected for the 9 Hydrogen external contact input function 10 Helium assignment Z 1 0 16 or T i2 and when the relevant contact is ON For details see the remarks fort 0 0 4 8 ft and amp i 5 7 Chapter 5 ADVANCED OPERATION Display Item Item Description Setup Item and Factory Remarks Description Setting SP
97. ype 1 Lee 0 100 to 9 999 conversion factor 25 Kk rH Valve amperage upper ical 0 0 1 to 100 0 7 limit alarm D an ihe Valve amperage lower 0 0 0 0 to 99 9 7 limit alarm Event output 1 upper o o 0 to 100 FS lower limit flow rate setup 14 0 0 to 1 00 14 Event output 2 upper o 0 to 100 FS lower limit flow rate setup 0 0 14 0 0 to 1 00 14 SP ramp control MQV9500 slope 1 i 0 0 to 999 9 MQV0005 0 000 to 9 999 SP ramp control MQV0010 0050 MQV0010 0050 slope 2 0 00 0 00 to 99 99 MQV0200 0500 MQV0200 0500 0 0 0 0 to 999 9 MQV1000 MQV1000 0 0 to 9999 5 12 Unit L min standard Delay does not apply to totalizer pulse output ae the factory setting alarms are not detected gt Handling Precautions page 5 14 Unit L min standard Sets the flow rate change per second Flow rate unit L min standard mL min standard for the MQV9500 Ramp control does not function if the value stays at the factory setting slope zero The SP takes effect immediately after a change Chapter 5 ADVANCED OPERATION Display Description Factory Setting Setting Range Related Func Remarks tion setup 100 FS 10 to 100 FS Sets the flow rate correspond 1 00 14 0 10 to 1 00 14 ing to 100 of analog input output 5V Unit L min standard Totalized flow event 0 to 9999 The unit decimal point 4 1 setting last 4 digits position may vary depending on the model Total
98. ype is changed the unit is automatically changed to the display unit so that the range after change becomes the maximum resolution 1 A value less than 0 001 L min is not displayed PV instantaneous Decimal point position is The decimal point position of the flow rate display not changed SP display is not changed decimal point Decimal point position is 1 When the standard decimal change function shifted one digit left point position is the 4th digit Decimal point position is 0 xxx the function is invalid shifted one digit right even though this setting is selected If the flow rate exceeds the display range a dash is displayed for all digits When the standard flow rate display does not have a decimal point it is invalid even though this function is selected When 4 flow rate setting method switching is selected in the external contact inputs X 2 in the function setup switching according to external input takes precedence 5 According to the settings in 45 and 6 the analog input and output ranges are changed as shown in the table below Settings in function setup 45 0 to 5V internal reference input 0 to 5V external reference input 1 to 5V external reference input 0 to 5V instantaneous flow rate output 0 to 5V instantaneous flow rate output 0 to 5V instantaneous flow rate output 0 to 5V internal reference input 0 to 5V external reference input 1 to 5V external reference input

Digital Mass Flow Controller User's Manual

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