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XPMPro 2.0 User's Manual - Organic Semiconductor Group Dr. Trixler

1. define SET LINE FLAGS 0x105 u32 flags define SET LINE FLAGS LEN 0x02 define SET TRIGNUM 0x106 u32 TRIGNUM float TRIG PERIOD define SET TRIGNUM LEN 0x03 define SET MOTION MODE 0x107 u32 motion mode define SET MOTION MODE LEN 0x02 SET MOTION MODE codes define C SPEED 0 no speed variations along the lines no nonlinearity tables define SINE SCAN 0x1 vary the speed with a cosine function rA define NL LOOKUP 0x2 use nonlinearity lookup tables define SET FIRST INTS AD 0x108 u32 first Ints AD define SET FIRST INTS AD LEN 0x02 define SET OTHER INTS AD 0x109 u32 other Ints AD define SET OTHER INTS AD LEN 0x02 define PEN UP 0x10a void define PEN_UP_LEN 0x01 define PEN_DOWN 0x10b void define PEN_DOWN_LEN 0x01 define ROTATE ABSOLUTE 0x10c float angle define ROTATE ABSOLUTE LEN 0x02 define ROTATE RELATIVE 0x10d float angle change define ROTATE RELATIVE LEN 0x02 define SET SPEED 0x10e float speed in Matrix units s define SET_SPEED_LEN 0x02 define SET MATRIX O0x10f float X Piezo sens Y Piezo sens V phys unit float HV Gain X HV Gain Y define SET MATRIX LEN 0x05 define SET OFFSET 0x110 float Xoffs Yoffs define SET OFFSET LEN 0x03 define SET SPEC WAIT TIME 0x111 float spectro wait time define SET SPEC WAIT TIME L
2. Scan Size 40 82 nr Cursor Mode None 16 7 nm 10 4 nm 190 nm 105 65 Active View Original Image em bed Fourier View Parameters Filter Point Notch A Filter Type Suppress small features v Hi 10 0nm E There are three tabs included here The Filter tab Faa Geot a uo 100m can be used to apply a low pass high pass or bandpass filter A fourth option is to apply no filter at all which is chosen by setting the Filter Type parameter to No Filter As the cutoff dimension is Tz changed the third pane will display the result An ooo __Ih example of suppressing small features is shown in Figure 101 The smaller features will be at larger Figure 100 spatial frequency values which in Fourier space are farthest away from the origin center of the image All values above the cutoff have been set to zero which is represented by the dark color in the outer region The abrupt difference illustrated here is due to the choice of Ideal for the Filter Cutoff parameter This is similar to a step EN Ik RHK Technology 104 Troy MI USA XPMPro User s Manual Data Analysis and Image Processing function whereby all values outside the cutoff are multiplied by O and everything inside is set to 1 Other filter shapes that can be chosen are 2 order 4 order and 6 order These roll off at a specific decay shape so the values outside the
3. XPMPro User s Manual Appendices define SPEC NO MODE 0x214 void define SPEC NO MODE LEN 0x01 define N LINREP 0x215 only in litho files returns line repetition there define N LINREP LEN 0x01 lithography stuff CKCKCKCKCKCkCkCK Ck kCkCk kCkCk k kk k kc k Ck kc k Ck kCkCk A define WRITE LITHO BUF 0x301 instructions 5 the length is not checked define RESET LITHO BUF 0x302 void define RESET LITHO BUF LEN 0x01 next instructions get written to the begin of the buffer define JUMP BUF 0x303 i32 position define JUMP BUF LEN 0x02 executes the litho buffer define DO LITHO 0x304 void define DO LITHO LEN 0x01 puts data onto the litho stack define PUSH FLOAT 0x305 float parameter to push define PUSH FLOAT LEN 0x02 define PUSH INT 0x306 u32 parameter to push define PUSH INT LEN 0x02 define PLUS 0x307 u32 ul u2 define PLUS LEN 0x03 define JNZ 0x308 132 where u32 counter define JNZ LEN 0x03 define USER CMD1 0x0401 u32 parameter define USER CMD1 LEN 0x02 the command itselve and the parameter Planefit commands define SET PLANEFIT MODE 0x0500 define SET PLANEFIT MODE LEN 0x02 defin GET PLANEFIT MODE 0x0501 define GET PLANEFIT MODE LEN 0x01 define WRITE PLANEFIT PAR 0x0502 RHK Technology 193 Troy MI USA XPMPro User s Manual Appendices
4. u32 circ per trace sample define SETUP_TRACKING LEN 0x0b mode contains the number of circles to run in the bits 0 15 all bits zero mean circle until told to stop define MOVE OFFSETS 0x10 How to track a feature 1 gt use scan offsets 0 gt use tip position define PC_SPEED CTLR 0x11 Speed treatment after Ft 1 gt just restore speed 0 gt restore speed from knobs define PUSH SCALE 0x11b float scaling value define PUSH SCALE LEN 0x2 define SCALE STACK DEPTH 0x10 RHK Technology 189 Troy MI USA XPMPro User s Manual Appendices define POP SCALE Oxllc void defin POP SCALE LEN 0x1 define SWEEP_Z ABSOLUTE Oxlld float destination define SWEEP Z ABSOLUTE LEN 0x2 define DUMP SCALE STACK Oxlle void define DUMP SCALE STACK LEN 0x1 define SET_OFFSET_RE 0x11f float dX dY define SET OFFSET REL LEN 0x3 define GET TRACKING DATA 0x120 u32 how many samples define GET TRACKING DATA LEN 0x02 define SET REPLAY MODE 0x121 u32 on define SET REPLAY MODE LEN 0x02 define LS LITHO MODE 0x122 u32 on define LS
5. define WRITE PLANEFIT PAR LEN 0x03 defin READ PLANEFIT PAR 0x0503 define READ PLANEFIT PAR LEN 0x01 define SET Z OFFSET 0x0504 define SET Z OFFSET LEN 0x02 define GET Z OFFSET 0x0505 define GET Z OFFSET LEN 0x01 RHK Technology 194 Troy MI USA
6. During motion there can be no conditions changed one condition changed or two conditions changed Additionally the two conditions can be pre programmed and saved so enabling or disabling them is as simple as checking a box instead of needing to set the levels back to zero to disable them which is inconvenient The lower section of the Move tab serves two purposes the condition can be turned on or off during motion and the signal level applied during the motion can be defined here To have a defined condition apply during a motion place a check in Enable box and enter the Move Level or Drag Level so the condition is active during that motion For example to have the bias modulated at two different levels during the move and drag operation both check boxes in the column would be marked and the levels then defined underneath each box To have the bias modulated only during a drag the enable box for the move action would be left unchecked and only the drag checkbox marked The output channels can have meaningful labels and units given by entering the desired parameters in the Define tab shown in Figure 137 The two outputs can have names given so it is easier to understand what signal the DAC will be changing during the motion The appropriate label is determined by the connection between the DAC and the equipment In the example shown in the figure the first DAC is connected to a SPM100 rear panel bias modulation input and the second
7. gt iOO hg Speed box and checking that radio button The second Any time the tip has to relocate from one part of the surface to another the speed at which it current value of the scan speed by checking Image Speed or a fixed value can be chosen by entering a value in the Tip choice has an advantage by avoiding the situation where the Figure 43 scan size is rather small and the line time is slow which RHK Technology 58 Troy MI USA XPMPro User s Manual Initial Acquisition means the real tip velocity is very slow In this case the amount of time it can take for the tip to move from one point to another can be long and the user might mistakenly interpret the lack of anything happening as the software has developed a problem when this is not the case Once the scan size and speed have been set scanning and data acquisition are started by pressing the Start button on the acquisition window toolbar Most of the parameters can be changed during the image and the new settings will take effect at the beginning of the next scan line XY Graph window If acquiring image data the image will be formed in each RTAW on a line by line basis Also each line scan can be viewed on an XY plot by opening the Image Line window by using the menu item View Image Line It will appear as shown in Figure 44 By default the first channel turned on in the Input tab Figure 11 will be displayed in the window It is possible to
8. data inside the defined box A window Figure Image Average 85 will open that determines what type of averaging to perform For Local Maxima and Local Minima LocalMin Max Range 1 each pixel of the line scan is searched on each side the number of pixels specified in the Local XY Average Mode Local Maxima v Min Max Range entry box and the point is only i 7 considered the minimum maximum if no point on al either side is lower higher than it There is little Figure 85 point to specifying the value 1 as this will consider every point a local minimum maximum If a value of three is entered then the lowest highest point within seven pixels 3 on the right and 3 on the left will be found and averaged with all other lowest highest points on successive lines to create one plot where the lowest points along each line are averaged together to reduce noise fluctuations This is very useful to see the average amount of minimum or maximum friction that builds up if stick slip motion is occurring during a contact AFM scan An example is illustrated in Figure 86 where three consecutive line scans from a simulated friction image have been offset for clarity With a wide enough range the peaks in the lines will be correctly correlated as shown and then averaged together to find the average value that the maximum friction force E Ww ae reached If All Points is chosen for the mode then Ea E H UE E the value at each pixel alo
9. SPM Status button will remain depressed until it is clicked again This can be useful for diagnostics or troubleshooting purposes Figure 33 as well as placing the tip far from the surface temporarily while some process takes place Note RHK Technology 46 Troy MI USA XPMPro User s Manual Coarse Approach the motor that brings the tip and sample together is not used Only the z piezo is fully contracted To disable the analog feedback loop in the SPM100 and hold the tip at a fixed height above the surface click the Loop Hold button The status of that button will change to ON and the appearance will be depressed until clicked again Be careful to not leave the feedback loop off for an excessive amount of time or thermal drift effects could cause unwanted tip sample contact The amount of time that it is safe to leave the loop deactivated is totally determined by the scan head characteristics and the ambient environment which will cause motion of the tip and sample relative to each other Either of these buttons can be pressed and scanning can be started under these conditions but keep in mind there will be no meaningful topography data collected due to the lack of an active feedback loop To immediately output a voltage pulse from one of the DACs usually used to Pulse Setup clean a STM tip press the Pulse 1 or Lithography Control n ue Mises SO 1t 1S easy Pulse Type 1 Pulse Type 2 to pulse t e tip uring a
10. x number The Y and Z offset are similar Z is the acquired data X and Y are the image coordinates for 3D data 2D data is plotted as X Z The Y coordinate is just an index For an I V curve for example if 4 curves are acquired X is in Volts Z in Amps and Y is 0 1 2 or3 In a force image X and Y are meters and Z is Newton Period Data type float Bytes used 4 Bytes The time to acquire each data point Bias Data type float Bytes used 4 Bytes The sample bias in volts not relevant for most AFM data Current Data type float Bytes used 4 Bytes The absolute value of the sample current in amps not relevant for most AFM data Angle Data type float Bytes used 4 Bytes The angle by which the image is rotated Normally 0 ColorInfoList Count Data type int Bytes used 4 Bytes Stores the number of color info Grid X Size Data type int Bytes used 4 Bytes Spectral grid X size Grid Y Size Data type int Bytes used 4 Bytes Spectral grid Y size RHK Technology 144 Troy MI USA XPMPro User s Manual Appendices Object list count Stores the count of Objects stored after the Page Header Reserved 16 16 4 bytes 64 Reserved for future use Object list Stores the Page header objects Currently we are storing String Data Image Drift header Image Drift Data Spec Drift Header Spectral Data Color Info Tip track Info Header Tip track Data po el vc pass TEXT STRINGS StringCnt gives you the numb
11. directly When a number is entered directly it will kia be rounded to the closest multiple of the resolution 77 os een ues ny for that measurement Press the Calculate button to Figure 82 create a histogram plot in a separate window This can remain on the screen and the binning changed to compare the appearance using a variety of bin sizes An example of a histogram plot is presented in Figure 84 Note the histogram exhibits a definite quantization in the z heights due to the image having two large terraces Histogram which leads to a clustering of z values into the range occupied by the two terraces Since the page has been ADC Range D 63 pm a properly background subtracted to produce very flat regions almost all of the data in a single terrace is at the same z value This produces sharp peaks in the histogram Pone 83 because there is a large percentage of the pixels at the values given by the vertical separation of the atomic height steps and very few pixels at other heights This illustrates an important point about the histograms many times to extract the desired data the background subtraction must be able to produce a page with almost no residual slope or the histogram will show smeared out features because of the gradual change in z values across the slope The figure also contains a second plot based on a bin size a factor of 100 higher than the bin for the first plot The overall shape is similar but the
12. The third button is used to select the smoothing applied to the data before i i o M displayed in the RTAW The 1 Hue and Saturation Value cole smoothing is applied to each End Color line scan along the fast scan direction only Choices range from no smoothing up to a 25 point smooth As with the processing step the raw data is stored in the file the data is smoothed for display purposes Start Color only HSY Parameter Start Color End Color Hue 2 53 Image manipulation and l ble dial Sat 0 95769 090137 re 3 color table dialo The small button next to the smooth button opens the ducam n 2 Clock Wise image manipulation dialog cas box which is shown in Figure 37 It is a very powerful feature of XPMPro and allows a user to customize the color es table to optimally match the Figure 37 HSV tab screen shot data representation Also the mapping of physical ADC values into pixel color is determined in the HSV tab Each color table in XPMPro is represented by a Hue the wavelength of the light e Color Saturation the amount of color and Value darkness The endpoints of the color table are chosen and the rest of the table filled in using an interpolation through the HSV color space One of the X on the circle represents the start color and the other represents the end color Each can be dragged to vary the Hue and Saturation When an appropriate location is reached the Value can be alt
13. This can be a tremendous advantage if months d nidi after the data was taken it was realized the images were processed using a faulty series reee d Step Flatten of steps That data can be thrown away and the unprocess ta used as a starting point oe eddata 8P Step Flatten Threshold 0 9 to redo the correct sequence of steps x The simplest data processing step is the Step Flatten Smooth no smooth v Plane Subtract A linear plane is fit to the Processing Sequence data using a least squares algorithm and Sequential O Original then subtracted from the data The equation Cancel RHK Technology Figure 95 XPMPro User s Manual Data Analysis and Image Processing used is ax by c It only makes sense to perform this one time on any piece of data A slightly better routine for some data is found using the Parabola Subtract where a two dimensional hyperboloid is fit to the data and then subtracted This can help eliminate effects present when scanning large distance using tube scanners due to the curved surface the scan plane follows The equation used is ax2 bxy cy2 dx ey f This step also only makes sense to be performed once To open the window shown in Figure 94 right click on an image and choose Process Background Parabola Subtract When the window first opens the coefficients are all equal to zero To have the software automatically subtract the best fit plane or best fit parabola click the appropriate button At any time
14. C spmdata experimental parameters that are Default Comment relevant to interpreting the data correctly but would not be something the software measures from the Root Index SPM100 data 0001 When Save Autoname is checked the dataSAFE files are named automatically when the 1 dataSAFE Folder Path C Program Files RH Select save button is pressed during an image A useful feature of the Backup File XPMPro naming method is the use of Enable Keep Last 100 images a root and an index to automatically image Line generate unique names for each piece Enable Save Every lines of data The root is the first part of the name and can be any arbitrary length since Windows XP and 2000 can understand long filenames The index is then incremented after each file For each character of the index that is a number it starts at zero and increments up to nine For each character that is a letter it will start at A and increment up to Z The number of characters entered in the index Figure 10 Screen shot of image save tab determines the number of unique filenames possible For example if the index was entered as 0 there would only be 10 possible names If the index as entered as 00 there would only be 100 possible names If the index was entered as A there would only be 26 possible filenames For the example shown in the figure the possible names are 234 000 10x10x10x9x26 The first one would be OUT0001A SM4 and
15. OxFFFFFFFF means pen down 15 float X piezo sensitivity as set by SET MATRIX 16 float Y piezo sensitivity as set by SET MATRIX 17 float X HV gain as set by SET MATRIX 18 float Y HV gain as set by SET MATRIX 19 u32 line draw errors This shows an error value of 1 when a line draw went off the DAC grid GET STATUS resets this to zero after reading it An error code of 2 means that one of the SET MATRIX parameters was zero and thus the SET MATRIX has been ignored 20 float spectroscopy wait time RHK Technology 158 Troy MI USA XPMPro User s Manual Appendices 21 22 23 24 25 26 27 28 29 30 31 32 33 0 means the board is waiting for a SCAN UNTIL to continue positive values make the board continue after that many seconds negative values cause FLAG A lt gt FLAG B handshaking u32 internal flags They are defined as follows BITO SC ON scan enable 1 Yes 0 No BITI QPD Lithography pen down 1 Yes 0 No BIT2 POSPREP Is the line next to the one currently drawing prepared 12 Yes 0 No BIT3 SPEC HERE Is this scan line on the spectro grid 1 2 Yes 0 No BIT4 POS FB ON Is positioning feedback switched on 1 Yes 0 No BIT5 YSCN enable Y scan 12Yes0 No BIT6 NOADC Lock ADC triggers 1 Yes0 NO0 BIT7 SINE_LINE Cosine speed line mode for the next line BITS NL_LOOKUP_LINE use nonlinearity table for this line BIT9 IGNORE USR SPD ignore speed switch settings 1
16. used with a UHV STM and the PPC150 when HEEE xi used with the UHV AFM STM The advantage rm of this equipment is eliminating the manual knob t needed to switch the direction of motion when E LE li Ems operating Besocke scan heads The computer can um ee automatically switch the voltage dividers inside Ege rae the unit to properly apply the kinetic waveform to the three outer legs An additional advantage Close when used with the UHV STM AFM is the unit is automatically switched to X mode before Figure 40 image scanning is started so the head properly scans the tip in an XY Cartesian plane If a PPC200 is present and the scan head in use is either a UHV300 or UHV 700 then choose PPC200 STM Mode for Approach System If a UHV 350 or UHV750 is in use then choose PPC200 AFM Mode for the Approach System In order to take coarse steps in any direction the XYZ Control window should be opened as shown in Figure 30 There are a few differences in the sequence of events when operating the UHV STM or the UHV STM AFM If the STM is in use when a direction button is pressed the PPC200 is switched to the correct mode the sawtooth waveform is output from the SPM100 to the PPC and a step is taken After completion the PPC200 is switched back to ground mode Steps can be taken even during data acquisition without stopping the scan The software will temporarily pause the scan and after the step is finished the scan will start again
17. CHDOG Ll 0x4 de PCHDOG 0x17 void returns float lo float hi pen bit de TCHDOG_LEN 0x1 def E ADC BUF 0x18 m param 1 param m m d 0x19 void returns float X Offset Gain float X Scan Gain float Y Offset Gain float Y Scan Gain float Z Offset Gain float Z Scan Gain def T GAINS LEN 0x1 def l RATE Oxla def RATE LE 0x3 float Xdrift Ydrift line draw operation commands CKCKCKCKCKCkCk KCk k kCk kCkCk k kk k kc k Ck kc k Ck kc k Ck kckck kck ck kckck ck k ck ckokck ck ckck ck ke e x f define POSITION ABSOLUTE 0x101 float X float Y define POSITION ABSOLUTE 0x03 define POSITION RELATIVE 0x102 float X float Y RHK Technology Troy MI USA XPMPro User s Manual Appendices defin POSITION RELATIVE LEN 0x03 define POSITION ABS EXTD 0x103 float X Y speed wait time u32 flags TRIGNUM other Ints AD firstspec MotionMode first In coordinate line in seconds and whether A D t each A D position seconds NL LOOKUP many scanner upda between all A D trigger posit stop don t remainder of prev float X float Y fl fl oat oal speed wait_time u32 flags riggers on this line Bi Bit7 ADC u32 TRIGNUM in case of ADtrig set float TRIG PERIOD u32 MotionMode In u32 first tes u32 other Ints AD other A D positions along the line 132 firs
18. Note the tip does not have to be elim a E located within the search area The feature to be EET l gt MM 9 E Route px 0 00 nm EAS 2 88 um s studied may be offset from the search feature and AA e Lm e RE after locating it each time the tip is moved to the Se same relative position with respect to the located spectocation feature so it is placed over the correct feature In Spec Location piter Open cea effect as long as the two items drift reference Se Topos El I feature and spectroscopy feature do not move with respect to each other as one drifts the other mana contar drifts the same amount However if the spectroscopy feature has a unique appearance it Figure 116 is recommended to use it for the drift feature also for simplicity and a reduction in tip movement RHK Technology 116 Troy MI USA XPMPro User s Manual Data Acquisition Techniques When the spectroscopy start button is pressed the first action is to acquire the small image defined by the cyan box Then the stored feature inside the green box is fit to each location inside the just acquired image and the best fit is interpreted to be the feature location If this is offset from its original location the search frame is shifted The tip is then moved to the new feature position the loop is opened and spectroscopy data acquisition starts Either one curve
19. Number of parameters to send 0 Notes This command returns an array of debugging information This array can be filled with debugging information If unused all elements are zero Command code TRIGGER SERIES Command name in Litho files trs Number of parameters to send 2 Parameters float GROUP PERIOD float TRIG PERIOD u32 NGROUP u32 TRIG NUM Examples trs 100e 6 10e 6 6 3 This will generate 6 trigger groups each containing 3 trigger pulses 1 ms apart The trigger pulse groups will have a period of 100 ms Notes This command generates a sequence of trigger groups GROUP PERIOD defines the period time of the trigger groups NGROUP defines the number of groups If this is zero triggers will be generated until told to stop by STOP SCAN 2 TR NUM is the number of triggers in each group TRIG PERIOD is the trigger period inside the group Command code DRAW ARC Command name in Litho files arc Number of parameters to send 3 Parameters float X0 float YO float angle Notes This command draws an arc starting from the current position around the center point X0 YO The length is determined by the given angle Negative angle means clockwise Command code DRAW ARC REL Command name in Litho files arcr Number of parameters to send 3 RHK Technology 170 Troy MI USA XPMPro User s Manual Appendices Parameters float X0 float YO float angle Notes This command draws an arc starting from the current position ar
20. Unitsmonitor vok 1 00 Y ES drifting absolute z value the total Monitor minimum 500V Monitor units V extent of z signal the ADC will see can be decreased to 0 1 nm because the primary feedback loop will only be following the atomic corrugation and not the slow drift due to thermal effects Therefore the effective resolution can be increased by a factor of 2000 Figure 129 The second loop is activated in the bottom of the NAV window by checking the box Enable Aux Feedback To configure the action of the loop open the Settings dialog shown in Figure 129 The most common use of the loop is to null out the z drift as described above In that case the mode should be set to Z Offset Control and the calibration parameters will be filled in automatically based on the z piezo factors The important parameter is the polarity of the feedback If the loop is activated and the analog feedback meter does not move to the center of its range to indicate the loop has moved the feedback output to the middle of its range then the polarity is probably wrong In that case change the checkbox Aux Feedback Z Offset Invert For the RHK series of UHV microscopes the correct setting of this parameter is to have the box checked as shown in the Figure 129 If the mode is changed to User Defined then the scale factors should be entered in the two parameters Units Input volt and Units Output Volt This determined how much the output signal for change fo
21. allows the user to specify if the Wave2 polarity should also be reversed when Tip Retract is chosen These two signals will be output on different DAC channels and can be then be summed into different piezo segments depending on what BNC the DAC output is applied to All of the settings for Wavel are present for Wave2 along with the additional parameter to introduce a phase shift between the two signals Offset from primary XPMPro allows five different waveforms to be used for different scan head systems Choose the correct shape for the head in use in the Waveform entry A UHV300 STM or UHV350 AFM RHK Technology 35 Troy MI USA XPMPro User s Manual Coarse Approach from RHK requires the Sawtooth form The ramp height is determined by the distance of the rapid piezo jerk during kinetic approach retraction For horizontal motions no gravity effects approach and retract parameters may be identical while for vertical motions different advance and retract parameters may give better results due to the effects of gravity The distance to move each step while in automatic approach mode is set by the Approach amplitude This setting is usually configured to be less than 1 8th the range of the Z scan piezo and certainly should not be more than the range of the z scan piezo The Retract amplitude is used when the Retract button in the Navigation window is pressed Small steps are usually made because large steps
22. and since the cantilever acts as a spring a larger deflection also means a larger force exerted on the surface The bias should then be considered as how hard is the probe pushing on the surface similar to what the setpoint would represent When first learning to use the SPM1000 system with an AFM the Bias knob should be set to zero as well as the setpoint This is the simplest mode and is analogous to typical operating conditions suggested by commercial suppliers of AFM heads who recommend starting with an out of contact output signal of 1 5 V to 2 V and using 0 as the setpoint After acquiring an initial F z curve the actual setpoint force can then be adjusted Adhesion and other forces can be studied when using an AFM by obtaining force distance curves These are obtained by interrupting the feedback loop and moving the z piezo a known distance to alternately contact the surface and break the tip sample contact while recording the output of the photodiode This Voyt can then be converted into a force given the spring constant of the cantilever To acquire the data a spectroscopy measurement must be setup Use the menu item Settings Spectroscopy to open the tab used to setup an F z curve A BNC cable should be connected from one of the DAC Output channels to the Z Position Modulation Input 1 It is most important to see the flat region at large z which indicates that the tip has pulled off the surface XPMPro considers a negative valu
23. features on the surface can change the local work function and this can be measured with a STM A direct correlation between the topographic structure and the work function can then be obtained The best method to acquire this type of data is to apply a small oscillation to the z piezo so the tip sample distance oscillates a small amount If the modulation frequency is high enough that the feedback loop cannot compensate for it then there will be an oscillatory signal superimposed on the tunneling current at the same frequency This can be monitored by a lock in amplifier and the signal from the lock in would then be proportional to the local work function If an image is formed of this signal along with a topographic image common features in both images can be correlated Some additional cables are required to connect the lock in amplifier properly The oscillation signal out of the lock in amplifier should be connected to Z modulation input 2 and the current monitor output on the rear panel of the SPM 100 should be connected to the input of the lock in The amplitude output of the lock in should then be connected to one of the rear panel auxiliary inputs To simultaneously acquire the topographic image along with the output of the lock in the auxiliary channel connected to the lock in output should be turned ON in the nput tab contained in the Settings Scan window For a more meaningful display of the barrier height image the label of the auxilia
24. i Pre sample value to the biped Sweep rate Delay next one as M shown in Spectrum Pre sample Figure 55 The EMT ree output is always stepped using Figure 53 Time spectroscopy output the full 16 bit resolution of the ADC if possible but a smaller value here means it takes longer to go from the current value to the next voltage step It can be used to decrease the transient induced on the current signal when performing I V measurements It can also be used to decrease the piezo nonlinear effects due to rapidly changing the piezo length Setup rate determines the rate to change the voltage from zero to the first value from the final value back to zero before turning the feedback loop back on and from the final value to the initial value if multiple curves are to be acquired and alternating slow scan is off A large value here can adversely effect the first few points of the first curve due to undesired transients induced in the signal from a rapid change in value Pre sample delay is the amount of time to wait after each voltage step is reached before starting to acquire readings on the desired channels It can be used to provide time for a lock in amplifier to reach a new equilibrium that reflects the new output value or it can be used to provide time for transients on the current signal that are induced from a dV dt rate of change of the tunneling bias due to tip sample capacitive coupling The overall acquisition time will be increased by an am
25. scale factors of 1 0 Command code DUMP SCALING STACK Command name in Litho files dumps Number of parameters to send 0 Notes This command returns the contents of the scaling stack RHK Technology 173 Troy MI USA XPMPro User s Manual Appendices Command code SET REPLAY MODE Command name in Litho files srm Number of parameters to send Parameters u32 on off Notes This command enables on off lt gt 0 or disables on off 0 the replay mode In replay mode the line draw subsystem outputs a data stream out of the A D buffers on the Z DAC while scanning This can be used for raster lithography along scan lines The data can be placed into the A D buffers with the wade command The buffer gets read one reading per A D trigger that is generated by the line draw Command code SET REPLAY FACTOR Command name in Litho files srf Number of parameters to send Parameters float replay factor Notes This command sets the scale factor that gets multiplied into the ZDAC output signal in Replay Mode Command code SET DT TRIG PWIDTH Command name in Litho files sdtpw Number of parameters to send 1 Parameters pulse length Notes This command sets the length in seconds of the trigger pulses that get sent to the DT data acquisition board in the PC Please note that the maximum trigger period that can be set in prepscan page 29 or sctnum page 31 is twice the number given in pulse length Command co
26. the individual controls can be changed to have manual control over the subtracted background Of course if the second order terms are all set yo zero then a plane will be defined and subtracted from the image If other derived data is present on the screen sections histograms 3D renderings etc as the background subtraction coefficients are altered manually the other data representations of the image will also update in real time Often it is easier to decide the best subtraction by looking at a section or the histogram particularly when the image has steps in it by using this other data When the line section shows flat terraces and when the histogram shows distinct peaks the image will accurately represent the real surface with terraces separated by the correct value based on the know crystallography Instead of manually adjusting the background of a terraced surface the built in Step Flatten routine can be used to get an image with flat terraces from an area of the surface containing steps This routine fits a parabola to the flat terraces only When the dialog box Figure 95 is opened for this process it is recommended to leave the Original button checked so the calculation is performed on the raw data each time as the settings are tweaked for optimal results instead of flattening an image that has already been flattened After changing either or both parameters click the Calculate button to perform the function and view the new res
27. the last one would be OUT9999Z SM4 The files automatically get the extension SM4 which is the file format XPMPro is using to store data This format is a superset of the SM2 file format SPM32 used to employ If Comment Question is checked then as each file is saved a dialog box to type in a comment for this particular file will be presented This provides the opportunity to enter unique comments RHK Technology 21 Troy MI USA XPMPro 2 0 User s Manual Initial Setup for each file when desirable Be careful about having this checked though because saving will be halted until the dialog is filled in Do not activate this and expect to automatically save data in an unattended manner It is possible to automatically save every scan acquired without user intervention Placing a check mark in the Scan Autosave box will save each file to the hard drive with the proper name as determined by the root and index This feature allows a long series of related images to be saved in unattended fashion At the end of each image scan the color mapping of z values to colors can be adjusted to best fit the data Activate this feature by checking Autoscale Image Occasionally this may cause the color map to be worse than before if a single spike is present in the data that skews the maximum z value far from the rest of the data If this is unchecked then the remapping will only occur when manually requested via the F5 button or the Autoscale bu
28. the min and max are set to be x standard deviaitons away from the mean value where x is specificed by Z Include Sigma Values of 1 5 2 will almost unversally give a good color distribution for all data sets If using the physical mode the High Z Limit sets the ADC value that color 256 should correspond to Similarly Low Z Limit sets the ADC value that color zero should correspond to The center of the color map is chosen by the Z reference mode Center sets a the midpoint of the minimum to maximum data s WETS values to color 128 Mean sets the average of the data to the middle of the color scale Median uses the ADC value at the center of the histogram as the middle of the color range Mode uses the most common ADC value the peak of the histogram as color 128 dl demo5 09 1 Topography Bow 292 pm 268 6 Active View Original Image Piot Controi Topview oE Color Map Parameters Color Map Mode If light shade is chosen for the data mode then Light Tilt sets the angle of elevation for the light source Moving this around can help emphasize certain features like step edges and isolated tall structures Light Rotate sets the azimuthal angle of the light source in a 3 D rendering Both of these can be changed interactively using the ina v ZReeeneMode 4 Z Exclude Interactive Light E Shading a G Light Tit 0 Scan Smooth Parameters Scan Smoothing Z Include Sigma 01
29. 121 Changing the setpoint force using the bias KnOb oooonncnnnncnnocinoccnoncccnonacononananononos 122 A PE 123 Eateral drift A n c teca metet ebat t A deu 124 Vemnical Ono e rti eR DR T anatlehategans oa wiaady sata ahs tessa a E aS 126 Tip tracking of a aii 128 RHK Technology 3 Troy MI USA XPMPro 2 0 User s Manual Table of Contents Forming a panorama view in the NAV window sss 129 Manipulation and Exbograplrys A AA aad RAS 129 ADPENOICES S 133 SM4 Date dd 134 DSP Scan Board Commands siio terere tpe ii AA 149 RHK Technology 4 Troy MI USA XPMPro 2 0 User s Manual Introduction Introduction RHK Technology 5 Troy MI USA XPMPro 2 0 User s Manual Introduction XPMPro 2 0 is a new version of RHK SPM control software Commonly it is used to control SPM100 electronics from RHK Technology It features advanced acquisition capabilities sophisticated data processing algorithms and superior manipulation and lithography controls This software includes all of the feature gained through 13 years of development on SPM32 and several years of the development on XPMPro Compare with the XPMPro it has the following improvements and enhancements Look and Feel XPMPro 2 0 has had a face lift and reorganized controls to make the operation more intuitive enabling even beginning users to access and utilize the advanced functionality that has made X
30. 168 10 1 then 192 168 10 2 could be entered here The first three sets of numbers have to be the same for the PC and SPM100 to communicate but the last number must be different The Debug Status can be set to Normal The other choices should only be used if instructed to do so by RHK as a diagnostic step If Extended Debugging to file 1s chosen and the software is left running for a long time enough messages can be written to the hard drive to completely consume all free space If a hard drive ever gets filled up for no apparent reason check this setting to see if it is set incorrectly The file written when debugging is turned on is called RHKDEBUG TXT and it will be in the same directory as XPMPro is RHK Technology 12 Troy MI USA XPMPro 2 0 User s Manual Initial Setup installed The Serial Number should be left at 0 unless multiple SPM100s are installed in the lab and they are all located on the same LAN instead of using a second network board in the computer as recommended If a second board is not used then all SPM100s will be reachable by all computers If more than one is started at the same time the computer may assign its designated IP address to the wrong SPM100 which will create problems since the ADC board is not connected to that SPM100 The computer can be guaranteed to always connect to the correct SPM100 by entering its serial number here In this case the computer will only assign the IP address when the SPM100 with th
31. A move is performed by placing the mouse cursor in the NAV window and clicking The tip will move in a straight line directly to the clicked location at a predetermined speed Conditions can be changed during motion which can be used to induce a feature on the surface if desired A move is usually used to pick the pen up and start drawing a new line without inducing a feature on the surface that would connect them It is also used during manipulation to place the tip over the next atom to be dragged into position A drag is performed by placing the mouse cursor over the tip icon and clicking the left mouse button to grab the tip As long as the mouse button remains pressed the tip will follow the mouse cursor at a predetermined speed Unless the mouse cursor is moved rather slowly the tip will probably fall behind the cursor location since moving the tip too fast can crash it into the surface due to the relatively slow response of a feedback loop The software periodically reads the mouse cursor location and send the location to the DSP board When this occurs the tip will change direction and start moving towards the new point This means the tip will not exactly follow the path the mouse cursor follows unless the mouse is moved quite slowly to make sure the tip stays with it An example of this behavior is Figure 133 illustrated in Figure 133 The drag speed was set to a relatively slow value The purple line re
32. Also if the step is taken in the X or Y direction the scan frame will automatically be centered within the maximum scan frame represented by the red box in the NAV window A running count of steps taken in each direction is displayed in the Steps section of the window This can help return to a known location if the steps are reasonably reproducible in opposite directions which is usually RHK Technology 45 Troy MI USA XPMPro User s Manual Coarse Approach the case To reset any of the counters to zero click the Reset button next to each counter Starting an approach Once the motor has been configured a coarse approach is initiated by clicking the Approach button in the NAV window Depending on the type of motor in use there may be other buttons also available for coarse steps One button always present is the Retract button Clicking this will move the tip and sample away from each other by the number of steps entered in the approach control window as described previously For a kinetic slip stick motor there will also be Fast In and Fast Out buttons Clicking this will activate the motor until stopped by using the Stop button To take a fixed number of steps forward the button should be clicked and to take the same number of steps back use the button The actual number of steps taken each time the button is clicked is set by the Adjust Steps parameter described above Both of these buttons remain active during a sca
33. Standby voltage 00v amp unusual mode split page D A STM bias mode O Output DAC DAC 24 M mode the scan proceeds with gt Dynamic Lithography a normal slow raster but Dutput Mode partway through the image the conditions are changed so the lower section of the image is not acquired under the same conditions as the top part Output Multiplier 1 00 The channels recorded during Figure 65 Multi Parameter Image setting rescan are the same ones recorded during the first scan which are all channels turned on in the Settings Scan Input tab The first parameter sets the number of times to scan over the same line before incrementing along the slow scan direction This can be set to either 2 3 or 4 It does not make sense to set this parameter to one since this would be the same as conventional imaging At the end of the reverse line scan the conditions are changed and before the next line is started the SPM100 pauses for a length of time specified by the Voltage change delay This is usually necessary in order for the feedback loop to adjust to the new imaging conditions The amount of time will be dependent on the bandwidth of the feedback loop The next four parameters are the voltage levels to output for each scan over the surface The first voltage is usually set to zero when not doing STM or set to the nominal bias voltage determined by the SPM100 knob when performing STM Note the n
34. Time 1 00ms fS within an image because the exact pixel of the acquired curve k known and it can be assured that the data was acquired over a particular Figure 50 Point spectroscopy setting data input tab feature of interest If the data is acquired by locating the tip over a feature and thermal drift effects are substantial then by the time the spectroscopy data is acquired the tip may no longer be over the feature of interest The tip can be located anywhere on the surface using the NAV window and spectra acquired using the spectroscopy window start button and the data appears in the realtime spectroscopy window Many curves can be acquired and averaged together to reduce noise or the same measurement repeated over and over to record the change in a signal as some other physical phenomenon occurs that will change the nature of the recorded response Whether acquired during a scan at predetermined locations or acquired immediately using the realtime window the same setup window is used to enter all relevant parameters The configuration window is accessed by choosing Settings Spectroscopy and is shown in Figure 52 There can be four distinct sets of spectroscopy parameters stored in the parameter file RHK Technology 63 Troy MI USA XPMPro User s Manual Initial Acquisition By default they are named Spectrum1 Spectrum2 Spectrum3 and Spectrum4 but the names can be changed to meaningful labels Each of the four sets has f
35. To convert all files click the gt gt button and the listing will appear on the right side To convert only certain files choose each one and click the gt button to have it listed on the right side By default the SMA files will be placed in the same directory as the source folder To choose a separate folder click the second Select button and browse to the desired folder When the files for conversion have been chosen and the source folder is selected click the Convert to SM4 button at the bottom of the window The amount of time it will require to convert the files depends on the speed of the computer the amount of data in each file and the number of files After this step is complete return to the browser and click on the destination directory and a collection of thumbnails should appear in the display area of the window This indicates successful conversion of the old data Early versions of XPMPro had a different SM3 format When upgrading to newer versions of the SM2 file Converter software it is recommended to run SM2 to SM4 Source Folder again to properly convert the old data to the most Peeran recent SM4 for mat SM2 files in source folder SM2 files to convert For customers upgrading from a previous version of the program any data that is opened in version 2 0 will be automatically converted to the SM4 file format for forward compatibility Loading an image into the DAW for processing requires a simple double click on
36. UA A IRR EM aU EE appear at certain A ES DEAN voltages these could be missed if they change their appearance over a narrow range of voltages Figure 120 Force setpoint when using a commercial AFM The versatility of the SPM 100 allows for the control of commercial AFMs such as the Nanoscope Multimode or Dimension 3000 from Digital Instruments or the PicoSPM available from Molecular Imaging These scan heads all require an extra unit to interface the coarse approach mechanism to XPMPro A common source of confusion is how to use the current and bias settings on the SPM 100 along with XPMPro to determine the appropriate setpoint for feedback conditions As discussed in the AIM MI manual the feedback signal out of either of these AFM heads is a voltage RHK Technology 122 Troy MI USA XPMPro User s Manual Data Acquisition Techniques proportional to the deviation of the laser spot from the center of the photodiode detector The bias signal is used as a control signal inside the head by comparing the output of the photo diode to this input signal The feedback signal out of the head is then the difference between the position of the laser spot on the PSD and the bias voltage which would be equal to a different location of the spot Therefore the bias can be adjusted to move the deflection of the laser to any location on the PSD As the laser spot is moved the amount the cantilever is deflected is changed
37. Z modulation inputs which will retract the tip when using this mode This method should be used to pull the tip a controlled distance off the surface instead of pulling it back the full z range as will occur when using TTL Feedback It can also be used if the TTL Feedback method has a problem retracting the tip which can happen under certain circumstances As the tip is retracted the output of the detector circuit could become a large negative value This value when summed with the 12 V signal could cause the net sum into the feedback loop to be close to zero which could then put the SPM100 into feedback the input signal appears to Approach Motors Ax be equal to the setpoint value and the tip would not be Approach 2 Motors Kinetics retracted further If gt Step this occurs the Inch software measures the walker Tip Control RHK PMC B tip as not fully MSCU Tip back in motion Tip retract mode TTL Feedbac al retracted and assumes Hr Tip back after approach Tip retract delay 100 us 2 something has failed Attocube piezo Tip restore delay 100 us An error message is ai es Secondary then produced which Tip Ramp indicates the tip retract was not successful When the tip is E retracted delays can be introduced between the time the tip is pulled back and when the coarse step is taken as well as between the time the step is finished before the tip starts to ramp forward again The first one i
38. adding or subtracting an offset to the neg Zvales _ Zvsluss eC zero toad level actual voltage out of the PSD circuitry Both are equally valid means of selecting the working force and each user may have an individual preference as to which method is advantageous in various situations setpoint pos Z values zero load level Figure 124 Handshaking One of the most versatile techniques included in the SPM 1000 system is the ability to perform simple data acquisition by utilizing the TTL input and output available on the DT3016 board This is achieved by using the Handshake menu option in the spectroscopy mode that is configured The following discussion gives more details on the technique and provides some specific examples of the sort of experiments that can be done The external equipment to be used must have two characteristics First it must provide an external input that will start data acquisition when a TTL input is set to a specific state A simple case is some spectrometers that can be turned on when a TTL input is moved to the HIGH 5 V position It must also provide a status line that it can change state that the XPMPro TTL Input can detect A TTL line that the device places HIGH while acquiring data then changes back to LOW when the measurement is complete is sufficient T Figure 125 represents a simple TTL handshaking scheme At some time prior to E t t point t the tip has been m
39. avoided by changing the Scan Type to sinusoidal instead of inear Now the scan head decelerates as it approaches the end of the line and accelerates gently after turnaround This avoids transients in the scan head which could cause it to ring after abruptly stopping and turning around to move in the other direction To reduce noise multiple ADC readings can be averaged together and the result then be considered the value for that pixel To activate this feature click the Oversampling checkbox in the window The slower the line time the more averages that can be acquired before the next pixel location is reached As the Line Time or Scan Speed is changed the number of samples RHK Technology 20 Troy MI USA XPMPro 2 0 User s Manual Initial Setup will be automatically updated in the information box A maximum of 1024 readings can be averaged together Once this value is reached slowing the scan down more does not reduce the noise further Save Tab Figure 10 is a screen shot save tab A Default Saved Path is chosen using Scan Settings the Se ect button and browsing to the directory where all data should be stored A default comment can be Options Save Input entered by clicking on the Comment ScanAutoSave Save Auto Name button and typing in a string of up to Comment Question C 256 characters This can be used to record conditions related to sample preparation or various other Default Saved Path
40. box is outlined while an included region is surrounded by a green A e Sl can Size 19 8 nm Cursor Mode None 365 pm 102 342 Active View Or box as shown in Figure 98 To start over Figure 98 again with region selection click the Erase all Regions button to remove all boxes and then outline new regions using the same method as above When all region selection is finished click the arrow cursor icon to return the mouse cursor to normal mode Then select Processing Define Back to perform the background subtraction with the fit only performed to the included regions and then extended to the entire image area The routines used are identical to the ones described above that are used for the entire data page Figure 97 Use Smooth Image to eliminate noise spikes by simply replacing each pixel with a value RHK Technology 103 Troy MI USA XPMPro User s Manual Data Analysis and Image Processing calculated using a two dimensional weighted average of the nearest neighbor pixels This procedure will be performed on the preceding result each time the Calculate button is pressed Pressing multiple times will lead to progressively smoother and smoother images If Fast Scan Smooth is selected the image is smoothed by performing the routine only along individual scan lines in the fast scan direction This can be preferable to the routine described above if the experiment involves successive scan lines being considered pseudo independent
41. but have the array confined to the pixels within the drawn box An example of this is shown in Figure 60 The box is drawn and XPMPro then displays the array of points that can fit inside the box with a regular spacing interval To alter the density of the spectroscopy pixels within the region change the Spacing parameter This is defined as the ratio of spectroscopy pixels compared to image pixels The example shown is 1 8 which means every 8 pixel along a line will have a spectroscopy pixel and they will be contained on every eighth line This is analogous to the grid parameter that could be defined for the entire image as defined above but in this instance they are only contained inside this small region The box can be resized by dragging the corners and can be rotated using the same rotation tool like before Similar to the behavior when drawing a line the Scan Size Rotation angle X Offset and Y Offset will display the size of the spectroscopy location region and not the image scan size until the Mouse Action is changed back to Modify Scan Area In all cases of interactive spectroscopy locations whether defined by clicking points drawing a line or defining a region the total number of locations cannot exceed 256 due to packet size limitations for the network communication It is important to understand this limit only applies when defining arbitrary locations and does not apply when performing spectroscopy sweeps at regularly spaced arrays over
42. by Ine iw becomes a record of the A a i Ramp high limit 1 00V 4 Ramp low limit 0 V s 5 Image S signals as the output D En le 000v 4 Image count 4 voltage changes Automati A ge zi eral Y Du canoe 7430 ms ES Dp ey 205 mv s ES ssuming no latera l E drift the same area of Handshake Output label voltage Dutput DAC DAC2A v the surface is scanned Output units y Handshaking C repeatedly so all l variations from lins to units output volt 1 00 V offset OV 2 line within the image STH bies Mode 0 are due to the change created by the voltage There is also an option 4 gt a di dicil V image instead of every line This creates a series of related images taken under slightly different conditions that can be compared When autosave is turned on this allows a large sequence of images to be acquired and saved when the microscope is unattended so complete experiments can be performed overnight when no user is present Delays can be introduced that will allow phenomenon to occur on their own time scale and the imaging will not start until after the new equilibrium has been reached An incredible array of automated experiments are possible with this mode that can all occur with no user interaction Figure 66 Automatic parameters control tab The main tab to setup this measurement is the Control tab shown in Figure 66 There are three modes possible nput only Output only and Input Output The fir
43. can be formed by scanning on either side of the entire path the tip followed Wherever it was dropped it will appear in the acquired image Then the tip can be relocated to this position and the atom picked up again and dragged to the intended position To activate this automatic image acquisition during tip Figure 135 move drag operations mark the Atomic Manipulation check box directly below the Move Drag radio button in the Mouse action section The acquired image is overlaid in the NAV window image area An example of manipulation demonstration is shown in Figure 136 Figure 136 Atomic manipulation RHK Technology 135 Troy MI USA XPMPro User s Manual S Manipulation Tip Move Move Atomic M anipulation Label Bias modulate Setpoint modulate Units V A Units output volt 1 00 V i 10 0n e Offset 0v EDA Output channel NO CONNECT v NO CONNECT v C Use STM bias Figure 137 Appendices RHK Technology 136 Troy MI USA XPMPro User s Manual Appendices SMA Data File Format This is the SM4 file format as of March 18 2008 You can convert sm2 files having file header starting with STiMage 3 1 to SMA files using the converter given in the DAW menu The SMA file starts with a File Header which contains general information about the file format version and offsets to the beginning of each page array as wel
44. can be specified To hide a curve p remove the check mark from the box in the far left column Curves that were hidden can be retrieved to be displayed again by placing a check mark in the box To display the average of only the selected curves pick selected ave data or selected ave only in the Display Settings dialog Figure 81 A group of spectroscopy curves from different images can be averaged together by combining all of the I V curves into one plot This is done using the Add plot function in the direct access menu All other graphs should be shown on the screen and then clicking on each window will draw all plots from the selected window in the current graph After the different graphs have been combined all normal functions available for a single plot window are available show hide curves average curves write to file etc Data Analysis Many different analysis routines exist in XPMPro These can be conveniently accessed using the Analyze submenu in the shortcut menu available from any image Most of the routines can be performed on an entire image or a portion of an image The concept of region selection is important to introduce at this point in time To explicitly define a region within an image click the Draw Rectangular Region icon in the toolbar left side of Figure 81 and then draw a box in the image Small black squares will appear on the box as shown in Figure 82 which can be dragged to increase decrease the s
45. can set off resonances in the head and make the tip crash before the sample has retracted far from the sample The number of steps to take when the button is pressed is Approach Motors Approach Approach Control Tip Control Motors Kineti Primary Waveform Wave Waveform Sawtooth x Period 10 00 ms Nano z s 2 3 View Waveform polarity Normal w Filter period 000s E is Dutput channel DAC 1 v Assymmetry 000 i nc Walker Approach amplitude 100 nm 4 Adjust amplitude 140nm f RHK PMC MSCU Retract amplitude 100nm Motion per D A volt 22 00 nm f Slide Phi Fast approach 200nm 2 Cycle Delay 15 00 ms DC Fast retract 200nm 4 Signal test O Attocube piezo Advanced Secondary Tip Ramp gt Figure 21 Kinetics Wave 1 control tab Approach Motors Approach Approach Control Tip Control Motors Kinetics Secondary Waveform B Waveform Sawtooth x Period 10 00 ms Nano z 1 5 A Vi Waveform polarity Normal v Filter period 0 00 s 2 lew J ae Output channel NO CONNEC Assymmetry 0 00 de nci lt Walker Approach amplitude 100nm 4 Adjust amplitude 100nm e RHK PMC MSCU Retract amplitude 100nm Motion per D A vot 100nm f Slide i Phi Fast approach 200nm f Offset from primary 0 00 s DC Fast retract 200nm Altocube piezo Advanced Secondary Tip Ramp gt Figure 22 Kinetic wave2 control tab entered in the Approach co
46. channels Any arbitrary string can be used for the feedback signal if User is chosen The channel will then carry the label entered in the User entry box below The units and appropriate calibration can also be entered here so the acquired data has the correct label as well as meaningful units An example of this mode would be non contact AFM in vacuum where the change in frequency between the free oscillation and when interacting with the surface is the feedback signal In this case delta F could be entered as the label with the units set as Hz and the units input volt depending on the settings of the external electronics that converts the frequency shift into a voltage Figure 8 Screen shot of operating mode setting If extra channels are going to be acquired during imaging or spectroscopy they should be applied to one of the SPM100 rear panel auxiliary channels The label of the channel can be any arbitrary string and the units and calibration can also be entered here Examples of signals to acquire are Lateral Force in contact AFM Conductance in STM Barrier Height in STM Dissipation non contact AFM Phase non contact AFM etc DAC Locks tab Due to the multifunction of our SPM electronics the DAC output can be used in many functions In this tab the DAC out can be lock to some certain function to avoid the cross talk between different measurements The DAC can be selected to lock to special channel in the Locked IO
47. curve itself has fewer points to plot so each segment is more noticeable Also note carefully the y axis label in the first one compared to the second one The units in the first graph are m which means millipercentage There are tens of thousands of pixels in the image and the bit noise is so low that any given bin when taken at LSB resolution has very few pixels with that exact value This leads to a small population density in any individual bin and when dividing by the huge number of pixels the relative population of each bin is far below 0 1 so XPMPro displays the y axis in milli percent In the second graph the bin size has been increased to such an extent many of the values have a large number of pixels at that z value and therefore the y axis units are percent RHK Technology 96 Troy MI USA XPMPro User s Manual Data Analysis and Image Processing Averaging together individual lines of an image can reduce noise and help some features be 4 demo 12 Tepogra m zi Lj Imago Histogram image Histogram Pixel Fraquonze e Pw Frequency 34 30 25 20 46 40 95 TOO oerte red Scar See 13 X m Curr Mode None Figure 84 easier to recognize The menu option named Image X Average and Image Y average will perform the calculation either along the x axis or the y axis If no region is defined the calculation is done on the entire image if a region has been selected then the calculation is done on the pg
48. data are configured in this dialog box demo5 11 Topographic image The New Plot menu selection creates a new data window with the same data representation as the original window The amp second set of data can be used to change the color lookup Fi 107 table the mapping of height to color background subtraction Lcd processes etc and the result compared to the original appearance still present on the screen An interesting way to represent the data can be achieved by utilizing the 3D Dual choice After this is chosen the cursor changes shape and the user should click on the first image which will be used to form the shape of the 3D rendering However the color representation will come from the second image chosen This is a nice way to overlay one type of data with another to look for correlations For example a topographic image could be used to form a shape and the friction image used for color and the brightest colors should also appear exactly at the step edges when the cantilever deflection is maximum Exporting data Any image formed by an SMA file can be exported in a common graphics format for importing RHK Technology 107 Troy MI USA XPMPro User s Manual Data Analysis and Image Processing into other programs The valid graphics formats are bitmap encapsulated postscript PCX TIFF JPG and PNG In addition there are also options for exporting the actual data in integer format RAW and ASCII whi
49. display pane and a menu appears with options to change the scan size box the maximum scan size box the background of the image area the color of the text in the controls the path of E ES the tip when it is drawn and a Q a M the path the tip should follow when moved via the mouse t hen certain functions ar i W en ce unctions are S NN C Move Tip taking place a text message ole O Add Spec Location Move Scan Area Mouse Action Size 400 00 nm ES Modify Scan Area Offset E Tip appears in the message box Nr x oos gel CO DregMoveTip Scan Speed gt and the color of the box 2 y Q y 0 00 nm amp Line Time 138ms f changes as a visual indication These colors can also be Aux Feedback y configured from the same Spec Location y menu Tip Approach Y Tip Track Y The DSP scan board allows the manual control y scan voltage to vary over any SPM Status y range of values Since the output is in series with the Figure 40 Screen shot of Navigation window SPM100 front panel scan range knob the actual scan area is determined by both of these For a fixed scan board DAC RHK Technology 54 Troy MI USA XPMPro User s Manual Initial Acquisition output if the range knob is increased the scan size will increase Also if a front panel offset knob is moved the tip will physically move across the surface The scan DACs can also provide an offset to move the scan orig
50. error number The demo5 23 sm3 2 Forward Y Scan Topographic Data average and standard dev numbers are Analysis of 8658 points from 96 17 to 169 133 Area 42 0 nm x 68 8 nm 53 7 nm absolute rms of the data ie unrelated to the slope d2 4x 77 3 umjm zj y 34 2 um m rms error 184 pm fit plane The standard deviation can be Maximum 372 pm at 118 116 Minimum 0 63 nm at 168 30 s i Si Average 19 6 pm standard deviation 181 pm considered the typical RMS roughness Integral 5 67E 026m m m volume above plane 7 92E 026m m m that other SPM software provides This value will give a non zero RMS for an absolutely flat but sloped plane which can be considered misleading For a flat but tilted surface the rms error is closer to the real roughness because it is relative to the first order plane which should not be considered a factor in roughness For a non flat or stepped surface the fit plane parameters are not really useful A user can be convinced of this through a simple test calculate the 2 FFT Parameters image statistics of an image with substantial slope Now perform a plane subtraction to the image and again calculate the image statistics This time the rms error and the standard oer Eri deviation will be the same value and also be the same value min feature size OO P as the standard deviation from the previous image before the plane fit occurred Since the standard deviation is based on the data after a plane f
51. feedback signal while the software monitors the Z position If the software senses the Z piezo has extended to the Approach Threshold value it sends a signal to retract the tip and the process is repeated The amount of time it takes for the tip to be ramped forward to the threshold t4 and to be retracted from the threshold level t5 will also depend on the Gain and Time Constant settings If the tip does not reach the threshold by the time interval tg then it is assumed the surface has been detected and the SPM 100 is maintaining a constant feedback signal The amount of time to wait is specified by Feedback Delay There are two possible situations that can happen as the tip is ramped forward and their order will be determined by the Gain and Time Constant settings The first one is illustrated in the figure the second possibility is the feedback delay will occur before the threshold while the tip is still ramping forward This can happen if the feedback bandwidth is so small that the tip is ramped forward very slowly Then it will take a longer time t to reach the threshold and the feedback delay t may elapse before the threshold is reached In this case XPMPro will erroneously conclude the feedback signal has been detected and stop the approach This will give a false engage and probably occur after only one step is taken It is important to have the feedback bandwidth large enough such that the time to reach the requested threshold t is
52. location of the original feature r Drift Settings Elx Pixels Incr in Pixels If the surface is evolving over time and the feature is changing its shape it is better to compare the feature appearance to the previous image rather than the image when first turned on This can be more accurate as Reference radus O the tracked feature changes from image to Search range 1552nm f n image To use this algorithm instead of Is ieee always comparing the feature at t 0 check Vector Dm the box named Previous Reference Image O Send Offset Drift Send Offset and Vector XPMPro contains two types of drift correction and the best mo for the situation will depend on the scan head and Z the environment If a small shift should be Figure 127 applied after each image to recenter the feature in the scan frame then choose Send Offset for the type of correction If the drift is significant enough to skew the unit cell of a surface given the time it takes to acquire an image then Send Offset and Vector should be chosen This will calculate the location of the feature compared to the original location and divide the offset by the time to acquire an image and form a vector with an x and y component These vector components will be sent to the SPM100 scan board and during the next frame the raster will be modified to adjust its output on a line by line basis in an attempt to keep up with the surface drifting below the tip In an ide
53. maximum rate of the DT3016 board However if the signal changes very slowly over time it makes little sense to sample at a high rate The Sampling Time RHK Technology 67 Troy MI USA XPMPro User s Manual Initial Acquisition can be used to spread out the samples so averaging of the readings makes more sense If using a lockin amplifier with a time constant longer than 5 microseconds it is desirable to read the data at a rate slower than the time constant setting and this can be accomplished by altering the Sampling Time Keep in mind when slowing down the ADC subsystem to spread out the readings the DAC subsystem is also slowed down to maintain synchronization This means for a given sweep rate the DAC may have to produce steps larger than the LSB in order to reach the next voltage level within the time interval defined by the sweep rate When Alternate scan direction is checked the first curve is swept from the initial value to the final value and the second curve is acquired while being swept from the final value back to the initial value This is the required method to obtain force distance curves in AFM and can also be used to measure the amount of capacitive coupling between the tip and sample when the tunneling bias is swept When this is on the Spectra to acquire will always be entered as an even number to obtain pairs of curves To automatically have every set of curves written to the disk when using the realtime spectroscopy windo
54. mm have a logarithm computed unexpected results bue eee ord Grid may occur of the data contains negative values mm EM The most common application for a logarithmic n x axis is FFT data to display the relationship in 2 EM the data The two most common applications of 3 m logarithmic y axis display are FFT data and 4 TF spectroscopic data so measured data that varies Zoom of a few orders of magnitude can be seen on a DER AS EN single graph Instead of manually adjusting the x ue 3 O and y axis to view only a small part of the data RIPE XM MUI the faster method is to use the magnifying glass icon in the graph toolbar window and drawing a box to represent the are that should fill the entire graph window If the x axis has been zoomed to 3 E show only a small section of the data the graph 4 A n Auto can be panned to view other pieces Either use the scroll bar at the bottom of the window or click the pan icon in the toolbar to grab the graph and drag the viewable window 1 lt gt gt 2M O 2 gt e N o o 3 Figure 45 layout tab Curves tab The next configuration tab is shown in Figure 46 The new XY graph window can have up to four graphs in separate panes and each plot can display two separate channels one on the primary axis and one on the secondary axis A second channel can be added to the first plot by choosing the desired channel from the list of active channels for this acquisiti
55. ms Number of parameters to send 0 Notes This moves the tip position to the scan area corner defined in SCANNER FLAGS from where the scan is supposed to start The motion along this line will be the speed of the scan as set by LineTime Use the SCAN UNTIL command then to start a scan Internally this function gets called by PREPARE SCAN after all other parameters have been set A MOVE TO SCAN START command can be issued at any time It will then use the configurations of the last PREPARE SCAN When a scan is running a MOVE TO SCAN START command will stop the current scan at the end of the next prepared line and then move to the start corner Please note that the scan generator works in the background of the line draws that it has ordered Any line that got ordered will be drawn This means that when you issue a MOVE TO SCAN START command the scanner might actually draw another line after the current one before it responds Command code SCAN UNTIL Command name in Litho files su Number of parameters to send Parameters u32 image_ pixels Examples stpsc 1 ms su 0 stops the old and starts a new continuous scan Notes SCAN UNTIL is the command to use when the scanner should move further along the scan lines The value in Zimage pixels will tell when the scan gets stopped again A value of 0 means continuous scanning When the scan is stopped the high word of the machine state word in the GET STATUS reply is set to Oxffff The low
56. obtained by averaging a large area over the normal surface far from any defects Input Output line by line imaging A particularly useful feature of XPMPro is the in out image spectroscopy mode Imaging conditions can be changed on an image by image or line by line basis There are a plethora of experiments that can be performed using this capability The main use for this is to measure friction forces using an AFM The normal force can be changed every line and the slow scan axis is disabled so the same area of the surface is scanned repeatedly If lateral force data is acquired then the acquired image will be a record of the lateral force as the normal force increases However there are many other potentially useful experiments that can be done One example is RHK Technology 121 Troy MI USA XPMPro User s Manual Data Acquisition Techniques to use the output voltage to interface with a temperature controller As the output voltage is increased decreased the sample temperature can change accordingly and an image then acquired that records the change in surface character as a function of temperature With the ability to introduce an arbitrary time delay after the voltage change the sample can have time to reach a new equilibrium temperature before data is acquired Another example is to use this in STM to quickly explore a large sample space of imaging conditions Figure 120 is an image where the DAC voltage is summed into the bias a
57. of dots will be placed over the image at each calculated u PU demo5_09 2 Topography E lattice position Correct Length and Angle as seen in Figure i CoredAlengh 155m fa 81 The color of TEES Correct B length 1 7 3 nm amp the dots is chosen using the color picker next Correct Anglein 65 9153 e Rescale all related pages O to the button AUR al Multiple periods rte m al can be placed on e the same image by changing the color picker reorienting the axes in another section of the data entering the correct number of spacings along A and B and then clicking the Lattice Period button again A second set of dots will be drawn and this allows the relative registry of the two lattices to be ascertained when an overlayer is present in one section of the image Scan Size 19 9 nm Cursor Mode Angle Lattice A 15 6 nm B 17 3 nm 6 65 9 Active View Parameters Figure 79 If spectroscopy data is acquired during a scan the Spectra view menu item can be used to display the image as shown in Figure 80 If the grid button is clicked a square will be drawn at every pixel where the feedback loop was interrupted and spectroscopy data was taken like the example shown An example where data was acquired at every other pixel is shown in the figure The cursor can be moved close to any dot and then upon selecting the spectra button a plot will be drawn showing the family of curves taken at t
58. of the scan as set by LineTime When the tip position arrives in the start corner the scanner waits for wait time at start position seconds before further line draws can be done Use the SCAN UNTIL command then to start a scan Please note that the speed of all line draws is set to the speed that corresponds to LineTime A Linetime of 0 0 will be ignored The old scan speed will remain unchanged Command code SET REPETITIONS Command name in Litho files srep Number of parameters to send RHK Technology 175 Troy MI USA XPMPro User s Manual Appendices Parameters u32 rept Notes Internally this function gets called by PREPARE SCAN It is intended mostly for testing Command code SET BASE Command name in Litho files sbas Number of parameters to send 2 Parameters float base length float base width Notes Internally this function gets called by PREPARE SCAN It is intended mostly for testing The values base length and base width give the size of the scan area in physunits Command code SET LINETIME Command name in Litho files slt Number of parameters to send Parameters float Line time Notes Internally this function gets called by PREPARE SCAN It sets the scan line time The scan line time is the time that just the forward scan line would take not a forth and back scan When other parameters change the system tries to conserve the line time Command code SET FWD WAIT TIME Command name in Litho files sf
59. one is connected to the SPM100 rear panel Set point input However the DACs can change any signal during the motion so the arbitrary name should be changed to reflect the signal to be affected For example if the DAC is tied to a magnetic field controller to alter the RHK Technology 134 Troy MI USA XPMPro User s Manual Data Acquisition Techniques field while the tip moves the name could be B field Whatever physical signal is changing the correct units should also be entered so the signal level can be specified in meaningful units A calibration factor also needs to be entered in order for the software to properly output the correct voltage level that will have the requested end effect on the signal to be modified An offset can also be applied to the signal different from the specified move and drag level in the previous tab The output channel should be selected with the next parameter any of the four DACs can be used However keep in mind that the A and B pair of outputs are multiplexed Therefore if two signals are to be changed simultaneously during motion one of the outputs will need to be either 1A or 1B and the other one must be 2A or 2B If one of the signals is going to alter the STM bias between the tip and the sample then STM Bias Mode should be checked so the software will measure the bias due to the knob and output a DAC voltage necessary to reach the requested tip sample bias When moving atoms around the surface it
60. only 10 nA When this is spread over a 16 bit ADC the LSB is then 0 305 pA but no increase in dynamic range is realized since the maximum current has been decreased by a factor of 10 in order to gain a factor of 10 increase in the smallest detectable current This limitation can however be surmounted by taking advantage of the exponential dependence of the current on the width of the tunneling gap For a typical vacuum barrier under clean conditions the current will increase by about an order of magnitude for every 1 decrease in the tip sample separation This means that if the feedback loop is opened and the tip moved towards the sample as the bias is lowered the minimum detectable current will effectively be increased The maximum current would still be 10 nA at any particular time however since the current gets very small as the bias is decreased the tip can be moved towards the surface This will lead to an increase in the tip towards surface measured current After the data has been acquired it can then be tip away from surface renormalized to represent a set acquired at a single gap width by dividing the measured readings by a number related to the amount the tip was moved towards the sample at each voltage step Since this number will be larger than 1 the current readings at the low voltages will decrease in value Because of the exponential relationship moving the tip 2 towards the surface will mean the current
61. over the image and measure how well it fits A new interactive AutoCorrelate image page is created which shows the degree of fit across the image Figure 91 All of the locations of the adsorbate are marked with a small blue circle and cross This location is determined by any place where the correlation was above 40 since this was defined as the Threshold value in the window If there are obvious places where a cross is located and should not be there increase the threshold of the cutoff and recalculate If the fit falls below the cutoff value then the dot will be removed from the plot as the kernel is no longer considered to be at that location This can be used to provide a visual overview of all adsorbate sites Theses can be exported in pixel coordinates to be used for external calculations such as mean spacing distribution coverage etc Note on the lower terrace the atomic rows are visible in the correlation function This is because Thresold 40 pd Figure 91 RHK Technology 99 Troy MI USA XPMPro User s Manual Data Analysis and Image Processing the area enclosed by the box also encloses a few atomic sites and as the box is shifted over the image when it moves one atomic spacing the correlation will increase because of the better overlap of the atomic sites in the image and the atomic sites within the kernel Also the correlation is very low at the step edges because the overlap is poor since the ad
62. popup that displays the filename channel scan direction and imaging conditions for that piece of data A user can quickly scan a large directory of data and locate the interesting images that need to be loaded into memory for further processing and analysis RHK Technology 86 Troy MI USA XPMPro User s Manual Data Analysis and Image Processing SMA file format Version 2 0 of XPMPro introduces a new file format with dramatic improvements in capabilities Many new features have been added to the software and new acquisition modes have prompted a change in the format to accommodate new forms of data that can be acquired Speed improvements in browsing loading data will also be seen due to the format change It demo5 03 sm3 Topographic Topographic Topographic Topography Topographic Data demo5 04 sm3 image image image 3 Topographic Data demo5_05 sm3 demo5_06 sm3 demo5_07 sm3 demoS_08 sm3 Topographic Lateral Force NSOM AFM HRP1 FTIC Topography 2 control data demoS 09 5m3 image topography fluorescence fluorescence demoS 10 sm3 demo5 11 sm3 3 Topographic image demoS 12 sm3 Z contro data Z control data Topography Topography Topography Topographic 3 2 control data image 3 2 control data demoS5 13 sm3 demo5 14 sm3 3 Topographic Data demo5_15 sm3 Z control data Z control data Current Current T V spectrum Current Topographic Data demoS5 16 sm3 demo5 17 sm3
63. quantity then the Output units can be entered here so the values are entered displayed and stored in the meaningful unit instead of volts The conversion of the DAC output into the meaningful quantity is entered in the parameter named Output units per D A volt Whenever the voltage is changed from one value to the next enter a speed that it should be changed using the Ramp speed parameter This can be used to reduce or even eliminate transients that could be induced in the system by a sudden change in voltage level The Output DAC is the channel that should produce the voltage A BNC cable must be connected from this channel to the appropriate input for the desired change in imaging conditions to occur Dynamic lithography has many uses for new and exciting data acquisition and should be carefully considered The implementation allows a signal to be recorded by the DSP board and as it rescans the same line over it can output the data recorded at the corresponding pixel during the initial trip across the surface Additionally with a future implementation the user will have the opportunity to download a shape into the DSP board and have it output this as the tip scans As long as the number of points in the shape equals the number of pixels in the line scan the system will work By recording a signal such as topography or other channel during the first scan the replay is assured of having the equal number of pixels as the rescan line The line ca
64. readings acquired at that separation need Figure 114 to be divided by a factor 100 to Bias Voltage RHK Technology 114 Troy MI USA XPMPro User s Manual Data Acquisition Techniques be compared to the values acquired at the nominal tip sample separation under feedback conditions If the current readings are around 0 5 pA still above 1 LSB the normalized current will actually be equal to 0 005 pA or 5 fA When the entire data set is combined into one curve the data can easily range from the maximum near 10 nA down to a few femtoamps or lower This represents a total dynamic range of 6 or 7 orders of magnitude which would normally require an ADC with about 22 bits The voltage applied to the z piezo as the bias voltage is ramped is shown in Figure 114 The lower graph is the bias ramp and the upper curve is the voltage added to the z piezo with the convention that a positive voltage pushes the tip towards the sample The magnitude of the voltage applied to the Z piezo is determined by the Z change per bias volt This in effect determines the overall slope of the upper graph A large number will push the tip towards the surface very quickly as the voltage is lowered whereas a small number changes the gap very little as the voltage approaches zero There is a delicate balance that requires some experimentation to determine the best settings for any particular situation If the number is too large the current will increase too rapidl
65. s Manual Data Analysis and Image Processing display it in the original window For a simple calculation like plane fit once the background has been subtracted there is no point in performing a second plane fit because nothing will happen The second instance is where a subsequent process will produce different data smoothing etc in this case the dialog box will be different When this occurs it is important to understand the difference between performing the process in a sequential manner or on the original data The dialog box for these processes will have three buttons The first will Cancel the calculation and also should be used to close the window when the calculation is complete The second button will Undo the previous result the third will Calculate the result There will also be two radio buttons labeled Original and Sequential When sequential is selected each time the Calculate button is pressed the data in the window will have the process applied again In this manner a single image could be smoothed numerous consecutive times resulting in the noise being progressively reduced until the visual appearance is satisfactory At any time during the process the Undo button can be pressed and the series of n steps reverses by one step so the displayed image is the result of n steps If the data has been changed so much that a single step undo is not sufficient then the Original radio button should be eu siz pressed so the next ca
66. shorter than the feedback delay setting Alternatively the approach threshold can be set to a more negative value so the tip does not get extended as far before XPMPro stops the extend cycle and instructs the SPM 100 to retract the tip since it wants to take another coarse step The final option is to increase the feedback delay to allow sufficient time for the tip to extend to the threshold each cycle Approach Motors Approach Approach Control Tip Control Motors Kinetics Step Inch Walker RHK PMC MSCU Secondary Approach Test Slide Channel Secondary Max 1 s Phi x Attocube piezo Secondary Condition Disabled v Secondary Min 0 Ea Advanced Secondary Tip Ramp gt Figure 18 Screen shot of secondary tab The new Tip Retract Signal mode uses the same general timing diagram but instead of monitoring the Z Feedback signal it will look at the feedback signal itself and if the threshold is RHK Technology 32 Troy MI USA XPMPro User s Manual Coarse Approach surpassed then the approach is stopped This means the Gain can be turned up quite a bit higher and the approach retract ramps from the feedback controller will be much faster This leads to faster approaches compared to conventional Tip Retract Advanced approach settings The secondary tab as shown in Figure 18 contains the settings that allow a second channel to be monitored during approach For some systems there ar
67. should be present on the output file Examples of this are the lines in an image that represent extracted data sections the array of dots added during lattice correction cursor mode the scale bar and spectroscopy locations drawn in spectroscopy mode cursor view To have RHK Technology 108 Troy MI USA XPMPro User s Manual Data Analysis and Image Processing purely the image pixels only leave this box unchecked RHK Technology 109 Troy MI USA XPMPro User s Manual Data Acquisition Techniques Advanced Techniques RHK Technology 110 Troy MI USA XPMPro User s Manual Data Acquisition Techniques In this chapter a discussion of various data acquisition methods are presented Many of these procedures are covered very explicitly in publications and books on SPM Only an overview that describes how to take the data with RHK equipment is presented here For in depth details of certain experiments other references should be explored One of the fundamental techniques used to investigate surface electronic structure is to acquire I V spectroscopy This is accomplished by interrupting the feedback loop and ramping the applied bias while recording the tunneling current The resulting behavior of the junction can provide insight into the surface density of states as well as other interesting phenomena related to the tunneling process itself There are some important precautionary steps that must be taken to ins
68. signal is detected instead of taking another coarse step the offset piezo is extended a fixed amount and the feedback signal checked again This is repeated until the offset piezo is fully extended and if there is still no signal then a coarse step is taken A timing diagram if Z Offset Step Mode used with Tip Retract is shown in Figure 20 A coarse step is taken after both piezo s are retracted and then the next coarse step is not taken until the end of the diagram when both signals are again in the fully retracted position Since the offset piezo overlaps the range of the coarse step it is safe to step forward again and be assured the z scan element will not be fully saturated in the contracted position Offset step mode should be ON to utilize this offset stepwise mode and Z offset piezo should be checked when the DAC is controlling a separate z piezo element instead the one controlled by the analog feedback loop However be sure to fully understand how the head performs and what the advantages are before turning this on as a tip crash can occur if the software is misconfigured The Z Control DAC selects which output DAC on the rear panel of the SPM 100 is connected to the input that controls the offset piezo In most cases this is the Z Offset External Control The voltage ramp to move the piezo is applied to this channel It is strongly recommended to use this mode when operating the Unisoku low temperature microscopes The z piezo range is quite l
69. such as diffusion experiments where the lines are a time dependent snapshot of the local surface This avoids mixing pixels in the y direction where there should not be expected to be any relationship The number of pixels to average together is chosen in the dialog window that opens The routine can be performed sequentially or on the original data using the radio buttons To enhance some features like steps or abrupt transformations the Sharpen Image routine should be used It will enhance edges by adding an amount equal to the local slope calculated using a Laplacian routine to each pixel Single pixel noise spikes in the data are best eliminated using the Median Filter selection DI data0197 5 Topography Processing images in Fourier space When periodic features are to be suppressed noise removal or accentuated atomic scale lattice reconstruction 1t is advantageous to calculate the FFT of the system and then apply filters in Fourier space This can be accomplished using the Fourier tool in XPMPro Right clicking on an image and choosing Fourier View will open a four panel window as shown in Figure 99 The original image is displayed in the upper left panel and its 2D FFT is shown in the upper right The lower right panel is the 2D FFT with the Figure 99 filtering applied and the lower left quadrant displays the final result with all processing applied A control window is also opened as shown in Figure 100
70. the Step Technical Parameters steps and the Inch MSCU control mode SerialInterfac x COM port 1 2 Walker motor will move RHK PMC Invert approach motion Approach Channel 1 that amount and i MSCU connected O Steps per click 10 then reset the step count back Legacy Parameters to zero when Pitocune piezo MSCU control channel NO CONNEC v Single step time 105 ms Advanced done Secondary Tip Ramp The third method of controlling the MSC U is to use one of the two DACs of the adapter box as a pseudo TTL output The signal Approach Motors can be changed between zero and a prono five volts to stimulate motion If aa using the method the DAC is Motors Kinetics selected by the MSCU control pee ave channel parameter and the pulse Nano Microside im Control View nm width of the pseudo TTL is set by Step pu dece um Ld Z tip approach v gt gt Ss i Figure 24 Omicro MSCU control tab Inch the Single step time parameter Walker RHK PMC Slider step time 5 00ms Direction switch time 75 00 ms f Omicron 3 channel microslide controller The original Omicron microslide M i controller could operate 3 motors Parum using a handset XPMPro can ll gt simulate the operation of the C handset using the DT335 board An adapter box should be present that converts the 50 pin ribbon cable output of the computer board into the DB15 connect
71. the entire image or performing spectroscopy at every pixel The total number of defined points is displayed at the top of the NAV window When using a region the spacing is not allowed to be denser than what would cause the defined locations to exceed 256 If the spacing is chosen too dense XPMPro automatically changes it to the densest value RHK Technology 74 Troy MI USA XPMPro User s Manual Initial Acquisition that keeps the points below 256 If the image pixel density is increased to the point where the defined region will contain more than 256 points the region is replaced with a box including a red x to provide a visual indication that spectroscopy within a region cannot be achieved without changing some condition Each of the four spectroscopy routines have their own display window They can each be opened by choosing the correct one from the drop down list in the main toolbar of the ACQ window The list will be populated by the meaningful names assigned to the routines through the Input tab The tabs contained in the window are the same as the Image Line window covered earlier with the addition of a save tab to configure the saving options for spectroscopy taken outside of an image scan and a drift correction tab explained later The saving options as Figure 62 shown are very similar to the image options from earlier It is X Spectroscopy Spectrum 1 g x Q Present Position v PE q w M 32 E x Spectrosco E
72. the only source of noise in the spectra RHK Technology 71 Troy MI USA XPMPro User s Manual Initial Acquisition should be electrical problems due to ground loops capacitive coupling improper shielding etc It is usually a good idea to take some spectra and change the cabling or disconnect various parts of the circuit to see if the FFT changes This can help narrow down where the electrical noise is coming from and then appropriate corrective measures taken Once the tip and sample are within feedback range the spectra will be a combination of electrical sources and vibrational sources The Noise power data display window with integrated controls is opened by clicking the FFT icon in the main toolbar The parameters used to setup the acquisition are contained in the Noise Power tab as shown in Figure 63 Choose the appropriate signal to be measured using the Data Source parameter The Control Status determines if the feedback loop is on or off while the data is sampled This has a critical effect on the interpretation of the spectrum so be sure it is set properly so the data is interpreted correctly Spectrum delay can be used to introduce a delay after the feedback loop is turned off before data sampling starts If many spectra are to be acquired and averaged together and the feedback loop is off it may be a good idea to reestablish feedback between pairs of curves to avoid excessive tip sample drift To activate this feature change the S
73. the output is swept from point to point in any order and importantly the response signal is also measured during the sweep With typical spectroscopy the response is only measured at the voltage values that correspond to predefined increments The exact voltage value and time when something occurs will be missed if it happens during the voltage ramp from one step to the next Using an arbitrary waveform and recording the voltage at a predetermined time interval instead of voltage interval provides high resolution both time and voltage measurements to capture dynamic responses If the waveform is programmed to rest at specific voltage levels for a fixed amount of time the probability of inducing a change can then be statistically measured through the repetition of the conditions An additional benefit of this implementation is realized by tying it to point spectroscopy This RHK Technology 70 Troy MI USA XPMPro User s Manual Initial Acquisition opens the full spectrum of choices for Spectroscopy where to perform the measurement It gp Pant Specosocpy Spectrum Output can be acquired within an image at any e deca EE Metros El E predefined points it can be acquired at ee cs TE S Gren Pee the tips present position by parking the ES owe pav G E 163s 8 60m tip over a specific features and it also dle Qup43 148v 8 e 74m 8 53m s can be acquired in a point to point mode y E e AA E by choosing an arbitr
74. the thumbnail image The data page will appear in a separate window as shown in Figure 73 In the title bar of the window is the name of the file as well as the displayed channel There are also two small icons to indicate the fast scan direction and slow scan direction when the image was acquired The small triangle points along the fast scan direction and an elongated arrow is used to indicate the slow scan direction top to bottom or bottom to top Along the bottom of the window is a status bar that displays the scan size the current display mode the pixel location of the mouse along with the z value of the data and whether any processing has been performed on the image Figure 72 Performing a right mouse button click when the cursor is in the window displays the shortcut menu This can be used to change the cursor mode of the image change the settings of how the data is represented change the color table of the image and access a large variety of analysis and image processing routines When 2D Plot Settings is chosen the window shown in Figure 74 appears Use this to change the appearance of the data contained in the window The Color map mode designates how the physical data height current force etc should be mapped into color values The definition of the color mode have been introduced at realtime acquisition page 52 Here we give out more explanation for the convenience of user In the linear mode the display scale runs fro
75. to zoom in or zoom out the total area covered by the map If the user wants to move the scan frame a very precise amount on an atomic scale to scan a specific feature it would be best to zoom in quite a bit so the map area is rather small and the scan frame outline will be controlled very accurately with respect to the image loaded into the map When zoomed in any level except maximum range the Navigation window is centered on the yellow box This also means as the scan frame is shifted the yellow box appears stationary since it remains centered and the red box shifts opposite of the direction clicked making the net effect of moving the yellow box the desired direction If the view is zoomed out as far as possible the view switches to centering on scanner zero The magnifying glass with a white appearance next to the and buttons can be used to immediately return the zoom range to the maximum reachable scan area like the scan range knob was turned all the way to 10 This can be useful to get a bird s eye view of the entire relative scan area if the red box and yellow box are both zoomed in quite a bit relative to the RHK Technology 56 Troy MI USA XPMPro User s Manual Initial Acquisition maximum scan area reachable by the head As discussed above if the maximum area is 100 micron and the range knob was turned to 1 such that the red box was 10 micron in size clicking the white magnifying glass would immediately change the Navigati
76. values and the y axis on the left side is the number of pixels Wherever the graph has a high value this means there are many pixels in the image that have that particular data value The color map graph contained inside the yellow rectangle shows the linear mapping of z values with color It has no relation to the histogram other than sharing a common x axis z value Reset D inver Linear CLUT OceanBlue iv New J Delete J Save Underneath the histogram is the color mapping of the image To adjust the color value of the maximum z value grab the white slider on the right side and drag it to the left This causes the maximum color of the image to move to lower z values and everything above this z value will be set uniformly to color 256 To change the z value for the minimum color grab the black slider on the left side and drag it to the right All values below the minimum position will be set to RHK Technology 90 Troy MI USA XPMPro User s Manual Data Analysis and Image Processing color zero of the current CLUT Once there are gaps in the color mapping additional color scales can be added These can be done for artistic purposes or to help emphasize certain features in the image that may be easier to notice with sharper contrast between z values To add a new color scale choose alone from the CLUT drop down box and then click the Add button Move the cursor up to the color scal
77. where in the buffer that happened 38 float user gain setting from front panel switch 39 float user line time setting from front panel switch These contain the front panel switch settings When the user changes the switches these variables will be updated The line time shown here is a user wish When the scan program starts it will try its best fulfilling this wish The resulting line time and scan motion speed can be taken from parameter 2 and 3 of this message Sending IGNORE SWITCH 1 SET SPEED SET LINE TIME or PREPARE SCAN command will uncouple the actual line speed from the front panel switch An IGNORE SPEED 0 will make the board use the switches again While the speed settings from the switches are ignored the OVERRIDE LED will light 40 u32 Chassis serial number 41 u32 scan board hardware revision number 42 u32 Altera firmware revision number 43 u32 Kernel revision number 44 u32 Scan software revision number Command code GET DAQ MODE Command name in Litho files gdm Number of parameters to send 0 Notes This makes the scan board send back its data acquisition mode word This word contains parameters for data acquisition for the on board ADCs The format of the returned word is the same as described in Command code SET DAQ MODE Command name in Litho files sdm Number of parameters to send 0 Notes This makes the scan board send back its data acquisition mode word This w
78. window as shown Figure 119 PLLPro Control in Figure 119 In the lockin mode we set the driving frequencies and the amplitude to modulate the bias Set the amplitude setpoint as the offset of lockin amplitude and amplitude with proper scaling to make the output fit to be digitized by the stm100 We set the amplitude output through DAC2 and we also can set the phase setpoint amplitude and scaling as in the same way then we set the output through DAC3 Aux 1 and AUX 2 input will be automatically named as amplitude and phase in XPMPro 2 0 Then we can take Conductance measurements data through image scanning or spectroscopy Barrier height measurements using I z spectroscopy The quantum mechanical nature of the tunneling phenomenon results in an exponential relationship between the tunneling current and the gap width This is usually expressed as 2kz I e RHK Technology 118 Troy MI USA XPMPro User s Manual Data Acquisition Techniques where k is a constant that depends on some physical constants as well as the mean barrier height of the gap and z is the tunneling gap distance The value of k and hence the barrier height itself can be determined by obtaining spectroscopy data In this routine the feedback loop is opened and the tip is moved away from the surface while recording the current at each step This data will exhibit an exponential decay equal to 2k This data usually does not have the transient signals
79. 1 LowZLimt Z Include Sigma HighZ Limit Z Reference Auto Scale None O Line by Line O Image by Image Is v Set As Default In the Color Map Parameters sub panel the mapping function Figure 38 Color map tab between colors and signals is chosen The following options are avaialable RHK Technology Troy MI USA XPMPro User s Manual Initial Acquisition limit and High Z limit Z reference defines the reference point Software supports 7 reference modes absolute Center Mean median mode minimum maximum The low Z limit and high Z limit defines the lower and upper range relative to the reference point Topography S 2 2 913 0 8 Color Mapping Plot Orientation HSV Defaut Reset EN A o A CN r U h A A E M Pre Processing DataMode fraw Scan Smoothing r Smooth Mode fis Points E High Pass Range 2 15 3 Color Map Parameter Color Map Made standard devia z Z Reference Mode izo zEwude TS owi po 3 Z Include Sigma po HighZ Limit pre AUG Scale Z Reference pom 3f Auto Scale C None Line by Line C Image by Image DET ME 16 Fit 13835 00 dX 137 1281 4 0 00 Figure 39 The effect of the double color table on a image e Logarithmic mode means the color is proportional to the logarithm of the data e Standard deviation mode requires specification of a parameter Z include S
80. 10 of the period is taken on the falling edge and 9095 is on the rising section The Cycle delay is used when fast motion is taking place With no feedback checking between steps the ramps can be as close together as requested Use Cycle delay to allow some time to elapse between each coarse step in order for transients introduced in the head by the jerking motion to decay The D A output channel on the rear panel used to drive the coarse approach is chosen using the Output channel setting A BNC BNC JUMPER MUST BE ATTACHED BETWEEN THIS OUTPUT CHANNEL AND THE APPROPRIATE INPUT ON THE REAR PANEL OF THE SPM 100 The ramp is usually produced from 0 up to 10 volts Since the DAC can actually range from 10 V to 10 V larger steps are possible if needed When Waveform polarity is set to Normal the ramp will always be positive If the step size requested is larger than can be produced by ramping from 0 V to 10 V then the user has the choice of ramping around zero symmetrically symmetric bipolar or to use the full positive value and use as large of a negative voltage needed to reach the requested step size If the ratio between Approach amplitude and Motion per D A volt is 16 the DAC will ramp from 8 V to 8 V is this is set to symmetric bipolar or it will ramp from 6 V to 10 V if bipolar allowed is chosen FAQ Tip approach and retract is not working Solution Step 1 make sure that scan head manipulator does not touch the scan head RHK
81. 8 Troy MI USA XPMPro User s Manual Data Acquisition Techniques large that multiple features that are very similar in appearance are contained within the search area Also increasing the search area will also increase the amount of time required to complete the search For a search area of approximately 40 pixels the algorithm usually takes less than a second to complete on a 1 Ghz Pentium 4 computer After each fit a bright blue square is drawn on the real time acquisition window RTAW where the selected feature was found Figure 128 In this particular test with a gold on mica sample a small protrusion from the terrace edge was selected and subsequently tracked Since this feature was supposed to be located where the aquamarine box is drawn offsets are applied to the X and Y scan signals to shift the frame the amount of separation between the aquamarine and bright blue squares This can be visualized in the Scan Area window as the yellow J Topography scan area box will move a small amount and the next image will start In the subsequent frame the two may not perfectly overlie because additional drift has occurred during the scan frame in the time it takes to complete the scan frame and perform the calculation An information bar is added to the RTAW that provides the number of images acquired since tracking was activated 1 as well as the total distance shifted along the X 18 7 angstroms and Y 81 angstroms axes The tot
82. Bias Modulation Input and the output will be adjusted so the values entered produce the tip sample bias taking into account the value set by the bias knob on the front panel of the SPM100 If this is not checked then any arbitrary string can be entered for the Spectrum unit to permit entering the values in physically meaningful units In order to ensure proper output scaling the correct calibration also needs to be entered in the Output Units per DAC Volt box The next important parameter to set is the Sampling Rate Since the output is configured to ramp to various values and then hold for a specified time the response signal should be measured at a fixed sampling rate instead of at predetermined voltage levels The faster the sampling rate the better the time resolution of the experiment but also the larger the acquired data set will be for a fixed duration of experiment The final part of the configuration is to define the waveform output This is done by deciding how many distinct voltage levels are desired how long to rest at each level and how quickly to move between levels Up to ten different voltage values can be programmed into the waveform The waveform will start at zero volts and move to the first voltage using the Move to Voltagel defined time After this the defined level is held for the defined time and the voltage moves to the next level over the Move Time parameter To picture the waveform in your mind read the first time then the vo
83. DE LED BIT defin SCAN LEFT RIGHT define SCAN LEFT RIGHT BIT defin PEN DOWN LINE define PEN DOWN LINE BIT defin TRIGGER ADC define TRIGGER ADC LEN define READ ADC BUF define READ ADC BUF LEN defin GET STATUS define GET STATUS LEN defin GET DAQ MODE define GET DAQ MODE LEN defin SET DAQ MODE channel definitions define ADC1 0x00 RHK Technology 184 Troy MI USA XPMPro User s Manual Appendices d DC2 0x01 mode word definitions d EXTBUF 0x00 0 Buffer in internal memory 1 gt external buffer de D AUTOTRIG 0x01 0 needs triggering 1 gt trigger generated in ADC isr d D AVERAGE 0x02 0 value for each trigger 1 gt ave lues until read d _ INTEGR 0x03 Use scan positioning nonlinearity 1 feedback algorithm 0 gt no 1 gt yes Z Sweep Flags de ER FB 0x04 Do fiber piezo feedback routine 0 gt no 1 yes de D BUF FULL 0x10 0 gt still space in buffer 1 gt buffer full d D CONVERTING 0x11 0 not converting I ADCs busy d DAQ MODE LE 0x04 d POS FB 0x0a u32 mode d POS FB 0x0 de INTEGRATOR 0x1 de PO
84. E Ww Curves Layout Cursor Mode File Save Drift Correction Spectrum Auto Save Save Auto Name M Comment Question Save Drift Image O Default Saved Path C spmdata Default Comment Root Index Spec 0001 O O pee Current 4 5 Voltage V Spectra Count Figure 62 spectroscopy window File saving options important to keep in mind these save options only apply to point spectroscopy data acquired when no scanning takes place The distinction is pretty straightforward if the start button contained in the spectroscopy window is pressed to commence acquisition the saving of files is determined by the settings in the tab of that window Spectrum Autosave will save every family of curves when a group have been acquired The number acquired before saving is determined by the Spectra to Acquire parameter in the configuration window Each group will go into a separate SMA file The name can be formed automatically by choosing Save Autoname A dialog to edit the comment associated with the file can be opened 1f Comment Question is on otherwise the Default Comment is used The parameter Save Drift Image will be explained in the advanced technique section The path to save the spectroscopy files can be defined separate from the image data This provides the chance to keep point spectroscopy data away from image data if desired but they can also be intermixed if the two directories are defined as th
85. EH When the file is saved the raw unaltered data is saved regardless of the display mode Only Topography y Nons v the display has the smoothing applied 3 m Hy RI Ei E The second button under each channel selection determines the background Topography v None v subtraction to apply before displaying the 4 0 data This display mode can be changed to EH Ei Bs Bi DC AC AC Slope or High Pass DC Mode will show the data with no processing applied AC mode will set the average z value for the data to zero This will allow small variations to be visible if a large DC offset is present in the data AC Slope will subtract the best fit line for each individual linescan to remove extra slope not eliminated using the front panel slope compensation knobs Keep in mind the front panel slope knobs should always be used as the first correction to optimize the dynamic range of the data AC High Pass will remove the DC offset from the data and also any small curvature in the data due to non linear piezo effects The data processing can be set for each channel independently To change the color of the displayed line click the Curves button under the correct channel label and a window as shown in Figure 47 will open Since the imaging channel has a forward and reverse piece of data there are two active line display settings to choose The two directions can have different colors and also different line styles and thicknesses This can be
86. EN 0x02 define GET TEST 0x112 void RHK Technology 188 Troy MI USA XPMPro User s Manual Appendices define GET TEST LEN 0x0 define TEST ARRAY LEN 0x4 define TRIGGER_SERIES 0x1 u32 NGROUP TRIG_NUM defin TRIGGER SERIES LEN 0x0 defin DRAW ARC 0x11 define DRAW ARC LEN 0x0 defin SET ANGLE INCREMENT 0x11 define SET ANGLE INCREMENT LEN 0x0 defin POSITION PURE 0x11 define POSITION PURE LEN 0x0 defin SHAKE HAND 0x11 define SHAKE HAND LEN 0x0 modes defin FLAG HS MODE 0x0 define ENET HS MODE 0x01 define ENET HS ACK 0x0 define DRAW ARC REL 0x1 define DRAW ARC REL LEN 0x0 define TRACK FEATURE 0x1 defin TRACK FEATURE LEN 0x0 ON OFF define FT ON 0x1 define FT OFF 0x0 defin SETUP TRACKING 0x1 1 13 5 4 2 3 3 0 2 18 4 19 2 la float GROUP PERIOD TRIG PERIOD float X0 YO angle float angle increment Float X Y u32 mode float time float dX0 dYO angle u32 ON OFF u32 mode nconv float Circle Radius Circle Freg TimeConstant ConeHeight PhaseOffset Wait Time no trace touc h
87. Figure 101 Dr 1ta0197 5 Topography Bow If there are obvious noise features in the image but also important features with approximately the same spacing the filters may remove the noise but also remove the important parts of the image In this case the tools available in the Point tab may prove more useful These can be thought of as an eraser to remove isolated peaks in the Fourier plane which will then remove the periodic noise in the final image The angle of isolated peaks with respect to the x axis can be thought of as the phase of the noise which is related to the angle of the features with respect to the image axes The sample image used up until now can provide a nice example of this powerful tool The two bright peaks in quadrants 2 and 4 are obviously the a periodic rows seen angling from the lower left of Figure 102 the image to the upper right This structure was created by vibrations in the instrument producing a modulation of the tip sample junction that the feedback loop was trying to null out RHK Technology 105 Troy MI USA XPMPro User s Manual Data Analysis and Image Processing Ideal 2 order DU ata019715 Topography OS 4th order gh order Scan Size 40 82 nm Cursor Mode None 16 7 nm 10 4 nm 190 nm 105 65 Active View Power Image Figure 103 Figure 104 Blotting out these two peaks will tot
88. Ith example file in the C utilities for an example of this RHK Technology 183 Troy MI USA XPMPro User s Manual Appendices Commands h file to interpret the command into the 32 bit integer that must be sent to the DSP board I tatus commands 0x01 0x02 0x0 0x02 0x2 0x03 0x02 0x04 0x02 0x0001 0x0002 0x0004 0x0008 0x0010 4 0x0020 5 0x0040 6 0x0080 7 0x0100 8 0x05 0x01 0x06 0x02 0x07 0x01 0x08 0x01 0x09 t does not understand the ASCII string u32 which float output voltage u32 bit pattern to be set u32 bit pattern to be cleared void u32 how many samples void void u32 buflen channels mode Global settings and st E AA defin IGNORE SWITCH define IGNORE SWITCH LEN define IGN SPEED define WRITE Z DAC define WRITE Z DAC LEN define BSET DIO define BSET DIO LEN define BCLR DIO n define BCLR DIO LEN DIO bit definitions define DIO PAGE defin DIO LOOP INVERT define DIO Z RETRACT define DIO HOLD INT defin SCANNING LED define SCANNING LED BIT define ADC CONV START define ADC CONV START BIT define OVERRIDE LED define OVERRI
89. LITHO MODE LEN 0x02 define SET REPLAY FACT 0x123 float factor define SET REPLAY FACT LEN 0x02 define SET DT TRIG PWIDTH 0x124 float pulse width define SET DT TRIG PWIDTH LEN 0x02 define SET MATRIX5 0x125 float XYAngle X Piezo sens Y Piezo sens V phys unit float defin SET MATRIX5 LEN 0x06 Scan layer commands CKCKCKCKCKCkCkCk Ck kCk Ck kCkCk k kk k kc k Ck kc k Ck kc k ck k ck ck kck ck ck ck ck ckokckckokck sk ke e ke kx define PREPARE SCAN 0x201 float baselen basewidth LineTime fwd wait tm rev wait tm u32 npix nlin motionmode rept where AD SCANNER FLAGS TRIGNUM float TRIG PERIOD wait time at start position Float baselen length of a scan line in physical units Float basewidth gt height of the scan area in Y in physunits Float LineTime Time to draw one scan line one way float fwd wait tm wait time at the end of a forward scan line RHK Technology 190 Troy MI USA XPMPro User s Manual Appendices reverse scan line on each line NL LOOKUP line line repetitions backward upper gt left alternate A D position in seconds defin defin define SEJ define SET_BASE EPETIT PREPARE SCAN LEN TIONS EPETIT TIONS T LINETI INETI xy a fwd line s VD WAIT TI VD WAIT TIMI float rev_wait_tm gt wa
90. N V maximum setpoint QR ADP SS minimum setpoint The subsequent F z curve is shown in the bottom part of Figure 123 Since all F z curves are taken relative to the z Figure 123 position when the feedback loop was opened the setpoint value will intersect the z 0 axis as always The X was reproduced on the second plot to illustrate the intersection of the new setpoint value with the F z curve and to easily visualize the effect of changing the setpoint The F z curve itself is merely shifted left and right as the setpoint knob is changed because the feedback loop will move the z piezo in order to maintain the new desired feedback value Changing the setpoint force using the bias knob Due to the restricted range of possible voltages that can be used for the setpoint the Bias knob is necessary to select force set points outside the original region If the initial out of contact voltage is set to 2 0 V as usual a force setpoint in the attractive regime cannot be reached solely by using the setpoint knob Turning the bias knob to change the setpoint will have a slightly different effect Since the actual signal from the AFM head is effected by both the position of the laser spot on the PSD and the bias voltage see AIM MI manual as the bias is increased made more positive the laser spot will move across the PSD such that the voltage result from the calculation circuitry decreases spot moves down As the bias is decreased made more negativ
91. PMPro the favorite of advanced researchers Dynamic Data Oversampling When enabled acquisition boards will run at their maximum sampling rate and average all readings between pixels At present XPMPro only takes one reading per pixel Oversampling will yield better S N especially when scanning slowly Spectroscopic Drift Correction When enabled the software will automatically correct for drift in all three axis between multiple spectroscopy curves taken at the same location At present XPMPro can correct for drift between curves only in the Z axis Exact location of spectroscopic measurement will be stored with each curve Workspace Sessions This function will save all open windows in the DAW and store them in one file called a session When you reopen that session all windows will return to their original position so you can start where you left off processing and analysis This session file can also be emailed to collaborators Oscilloscope The maximum number of samples increased from 256k to 1 MS Data can be acquired while utilizing Drag Move Tip functions and during Pulse operation Also settings for using this option have been moved to the oscilloscope window for easier operation Time Spec UI implementation This new spectroscopy acquisition mode allows the user to program an experiment where any two parameters such as Z position and bias voltage can be ramped between end points at any predefined rate stay at the end point for a pre
92. Parameters float X float Y Examples pa 20 0 20 0 Notes For this to work in physical units the sensitivities using SET MATRIX must be set Command code POSITION RELATIVE Command name in Litho files pr Number of parameters to send 2 Parameters float X float Y Examples pr 20 0 20 0 Notes For this to work in physical units the sensitivities using SET MATRIX must be set Command code POSITION PURE Command name in Litho files pp Number of parameters to send 2 Parameters float X float Y Examples pp 20 0 20 0 RHK Technology 164 Troy MI USA XPMPro User s Manual Appendices Notes This moves the scanner to the position X Y on the unrotated and un offset coordinate system It is mainly used by SPM32 for range checking X and Y are given in physical units Command code POSITION ABS EXTD Command name in Litho files pae Number of parameters to send 11 Parameters float X float Y float speed float wait time Wait time at line end u32 flags Bitl PU PD 0 PU PD Bit7 ADC 0 YES NO Bitl1 SCAN LEFT DIO 0 LOW 1 HI u32 TRIGNUM AD triggers at each position float TR PERIOD trigger period in seconds a pretty small number u32 MotionMode C SPEED SINE SCAN or NL LOOKUP u32 first Ints AD where first AD u32 other Ints AD AD trig separation i32 firstspec first spectro stop after how many A D position updates 0 never stop don t use remainder of previous line
93. Pro User s Manual Appendices entry 1 has repetition entr in Hi word and position X difference in lo word entry 2 has repetition cntr in Hi word and position X difference in lo word entry 3 has repetition cntr in Hi word and position X difference in lo word entry n has repetition cntr in Hi word and position X difference in lo word line number has 0x0000 in the high word entry 1 has repetition entr in Hi word and position X difference in lo word entry 2 has repetition cntr in Hi word and position X difference in lo word Example 0x0 0x00030001 0x05 0x00020003 0x00010004 0x0c 0x00030003 0x00020001 will place spectro stops on line 0 at positions 0 1 and 2 line 5 at A D positions 2 5 9 and line 12 at A D position 2 5 8 9 10 The pixel numbers start with 0 and are in decimal notation here Command code SPEC NO MODE Command name in Litho files snm Number of parameters to send 0 Notes This shuts off automatic spectroscopy SCAN UNTIL will still do manual spectro positioning Command code N LINREP Command name in Litho files linrep Number of parameters to send 0 Notes This command puts the number of the line repetition of the scan generator onto the Lithography parameter stack It can be used to make decisions in lithography files that get started at the beginning of multi line images RHK Technology 181 Troy MI USA XPMPro User s Manual Appendices Lithography commands Command
94. Pro User s Manual Initial Acquisition in the Advanced Techniques section The column to the right of the data section will contain a blue line which represents the range of the ADC values in the current image The top of the left column is the highest possible ADC value and the bottom of the column is the lowest possible ADC value If the blue line reaches the top of the column this means the signal has saturated the ADC If the blue line reaches the bottom of the column this means the signal to the ADC is below its lower limit If either of these happen the ADC range should be adjusted or the input signal changed to avoid ADC saturation or underflow In the case of the topography channel the Z Position ADC Gain knob on the front panel of the SPM100 should be changed For the other channels the ADC limits of the DT3016 board can be adjusted Figure 11 If the blue line is very short the gain should be increased because the range of data values do not cover much of the ADC so a large number of bits are not being used and the gain should be increased to increase sensitivity Navigation window One of the most important z windows in XPMPro is the navigation window Figure 40 p gt A ut XE A um 09 09 nm OO DI Range which was briefly introduced earlier when configuring the coarse approach system The Ref Image colors used to display various parts of the window are user configurable Right click anywhere in the
95. S FB LEN 0x02 d POS FB TC 0x0b float TimeConstant de POS FB TC LEN 0x02 d DETECTOR CHAR 0x0c floak X Ap X By AO XD XXE Y A Gr X DX ESL de DETECTOR CHAR LEN 0x0b de D DETECTOR CHAR 0x0d void returns X A X B X C X D X E B YC Y Y E d D DETECTOR CHAR L 0x01 d E DIO 0x0e u32 BIT PATTERN a 1 means SHARC controls the line See DIO bit definitions above ES de E DIO LEN 0x02 d ET Z SCALE OxOf float Z Scale de ET Z SCALE LEN 0x2 de ET SPEED 0x10 float Z Sweep Speed de ET SPEED LEN 0x2 de UP Z SWEEP 0x11 u32 Z Sweep Flags Sample groups samples per group ThresholdMode AD Channels float Z Sweep Speed PreSampleDelay TimePerSampl UpperThresholdValue LowerThresholdValue RHK Technology Troy MI USA XPMPro User s Manual Appendices d 0x0 not implemented yet de 0x1 d VEEP LEN Oxb d VEEP 0x12 void d VEEP LEN Ose d ER FB 0x13 float setpoint float TimeConstant float Interferom calib de ER FB L 0x4 de FIBER FB 0x14 FLAG 0 gt off everything else gt d BER FB LE 0x2 d HANS 0x15 u32 channels de HANS LEN 0x2 d CHDOG 0x16 float lo float hi u32 use defin
96. T3016 card instead of the feedback loop the amount of time to extend contract the z piezo between coarse steps is much shorter and the total approach time is much less compared to using the feedback loop of the SPM100 to extend contract An output ramp voltage is generated by the ADC card and applied to the appropriate rear panel DAC output of the SPM 100 This BNC is attached to Z position modulation input 1 and the waveform is then amplified and applied directly to the z piezo The ramp speeds and motion limits are set in the Advanced Tip Ramp tab discussed below The rest of the parameters in this tab set the level when an approach should be considered done as well as the timing and speed The Approach Threshold is used during a Tip Retract or Feedback Detect approach The probe is advanced until the control loop stabilizes above the threshold value The range is 100 to 100 where 100 is fully extended and 100 is fully retracted A value of 0 would mean the probe advances until it is just past the midpoint of the feedback range Initially this value should be set to something conservative like 50 After measuring the step size of the coarse approach relative to the total range of the Z piezo this can be set to something close to 0 to avoid manual adjustment via the and buttons after coarse approach in order to center the z piezo within its range The smaller the coarse step size relative to the total z piezo range the close
97. Technology 37 Troy MI USA XPMPro User s Manual Coarse Approach 2 Check ratio between the Approach amplitude and Motion per D A volt Generally the ration is above 5 3 Check the connection at the back panel of STM 100 If the output channel of the motor control is set for DAC 1A the DACI A should be connected to inertial input for STM scan head and x position for AFM scan head 4 Check the DAC output with oscilloscope the output should consistent with our design form 5 Check the high voltage out for the approach with attenuation to 196 probe the output should consistent to the DAC output The edge of the output may be rounded Stepper motor A stepper motor is a common approach Approach Motors mechanism for Approach ambient Seid lal microscopes They Motors provide good dis i control when used Wave2 with a fine pitch al Stepper Motor screw and can also aza CW tip approach Steptime 20 00 ms f have smaller motion Use half steps Control line 4 Nor used vl due to a lever ae p 2 Phase motor O Controlline 5 Motused v reduction scheme MSE Coil energized at rest Most motors have Er four coils and if DC voltage is applied in oS ee sequence one full Secondary rotation of the motor Tener is produced The J 2 stepper motor interface requires a second board to be installed in the computer the DT335 model This has multiple TTL lines which are sent to the AIM MI st
98. The proper operating mode that the SPM100 will be in is important in order to have the feedback signal labeled properly and to preset certain other conditions in the software The mode is selected by choosing Settings Operating Modes to open the window shown in Figure 8 Two important modes integrate the PLLPro into XPMPro When using the PLLPro under typical conditions the best choice is PLLPro Master Once this is selected it will automatically start the standalone PLLPro control program and setup a communication process so the software can exchange information with the PLLPro program If the PLLPro software is already running it should be exited to allow XPMPro to call the PLLPro program This insures the proper interprocess communication system is setup It is important to have the PLLPro properly connected to the SPM100 so the correct channels are measured and associated with the correct signals The window provides a hint for connecting the two together since it grays out certain channels in this mode It does this by querying the PLLPro for the channel labels units and conversion factor for the DAC outputs on the PLLPro rear panel It is important to have the PLLPro DACI connected to the Feedback Input connection on the SPM100 back panel The other three connections should be DAC2 to AUX4 DAC3 to AUXS and DAC4 to AUX6 Once this is done it will not have to be changed in the future and even if the PLLPro operating mode changes the PLLPro will
99. This can be very useful to investigate the system response at very specific voltages without acquiring many voltage steps in between that could contain data of no interest The mode named Time provides the ability to define an arbitrary waveform output and record the system response at a fixed time resolution including the Spectroscopy la Point Spectroscopy Spectrum 1 Control Data Input Adv Modes Time Spec Spectrum 2 Spectrum 3 Spectrum 4 Scope Image Spectroscopy Multi Parameter Im Automatic Parame Control Channels Handshake Spectroscopy Type Ramp ODiscrete O Time Ramp Initial Value Final Value 469 mV 469 mV Output Increment 28 7 mV Points spectrum Dutput Channel Output DAC Output DAC Z Output units per D A volt Spectrum units Standby output STM Bias Mode Dac 2a v DAC 1A 1 00 0 00 V Iv Spectrum Output lt gt ox Y Y Discrete Primary Secondary Dutput1 11 004 e gt Dutput2 1 00 H 2 Dutput3 1 00V Dutput4 1 00v e a Dutput5 1 00 e Dutput6 1 00 H 5 Output 7 1 00v 3 Outputs 1 00V H e Dutput9 1 00V 2 Output 10 1 00V H a 1 Dutput Count Figure 51 Point spectroscopy setting output tab acquisition of data when moving from voltage level to voltage level instead of a fixed voltage step resolution This mode is far better suited to induce and
100. Troy MI USA XPMPro User s Manual Initial Acquisition To view the images as they are acquired a real time acquisition window RTAW needs to be open and configured to display the correct channel In the main acquisition window Figure 2 select View Scan Window and a submenu will appear with all channels listed that are to be acquired during scanning Figure 11 along with choices for forward and reverse direction unless Record one scan direction is checked As each channel is chosen a new window appears with that channel in the title bar These can be arranged and resized to any arbitrary shape as long as they stay within the acquisition window Up to ten RTAW can be open within the acquisition window at one time An example of a RTAW is shown in Figure 36 In the title bar is the name of the channel along with two symbols to indicate the scan direction The triangle displays the fast scan direction and the arrow shows the slow scan direction For the example shown this is a topography channel taken in the Topography forward direction from the top of the scan Te ASIS gt frame to the bottom RTAW toolbar The first button in the toolbar is used to select the data for this window After the window has been opened the channel to display can be changed from its original selection A menu of all channels and directions currently being acquired is shown This can be useful to display the same channel and direction in more than one window wi
101. Windows OS RHK Technology T Troy MI USA XPMPro 2 0 User s Manual Installation Installation RHK Technology 8 Troy MI USA XPMPro 2 0 User s Manual Installation Please see the Installation Guide Video screenshot show below on the RHK website for instructions on all aspects of installing your new XPMPro 2 0 software http www rhk tech com xpmpro 2 0 php a Installation Guide RHK Technology 9 Troy MI USA XPMPro 2 0 User s Manual Initial Setup Initial Setup RHK Technology 10 Troy MI USA XPMPro 2 0 User s Manual Initial Setup When the program is started it will check for the presence of the sentinel key on the parallel port of the computer This is the same protection key used to authorize SPM32 For existing users an upgrade password will be required to activate the key for XPMPro If the key has been activated for XPMPro the program will try to connect to the SPM100 This will fail because the IP address of the SPM100 has not been igure 1 Screen shot of XPMPro main window entered into the software yet The screen will then display the main tool bar as shown in Figure 1 Options The OPT menu can also be used to unlock additional features of the software that require an extra password At this time the only additional module is the high speed scanning option provided by the Data Translation DT9832 USB adapter This menu is also used to access some universal parameters that
102. XPMPro 2 0 User s Manual Document version 1 0 0 Last modified 11 05 2008 XPMPro 2 0 User s Manual Table of Contents Table of Contents XPM Pro User s Maita is 1 PvE OUCH OU en P sse 5 IA a 7 Upgrade from SPMESJ iii lia 10 Image processing on additional computo ds 10 A O 11 Optiofigu cui ies onec verae ql cod aen ba duele don dena eser dues e dh eec na ab Ec dU RI n 12 Stored parameter TICS Cs o esed adc sce tn pe vee cus reu Rd tat n 12 Scale barand coll Stet a etes vvv ei ee Eae ee eo ree 12 Default SIEgo uoa A ES desde reise dete aS RR CERE UE 13 Graph SettfigS stadt ri te ded quse b vele o Ae hires dur dads 13 O SE 13 ACO Wind W bebe eate A A Me cttm a f tune c at fado us 14 DEPT SAA AAA aa ase 14 CAS A A A tu ER eL 16 A A PR 17 Closed Ioop Ca ai aia rd 17 MPS ACI Mod o Ad ga Sede Se uae a Ras 19 DetinedtdD s ceste arae O 20 Scan CUETO Seis ee teo sa Alcs ettet qi E IR UR Qu Pen a ir eate Ia e De der UD Ene ADRIAN Rd 21 datas E A A A ARAS 22 Tnput PAD A Eo qim oa aed alt UE CLA Lea ca Acum 22 A PO Liste US eg 23 ZW status balneae A etes 25 Coars ADDLOAC T H 26 Navigation MIO WA Op OI steep o A CONGU RE erede 27 Aux Feedback assess avevo idend id eio aspera ii Ue odd du era a as 27 Spc Locations E 28 O EE 28 Tip control tabike a Cede e bets necdum to A 31 Advanced approach BSettlnps 25 acres ias 34 Configuring approach MOONS sd egeta ens
103. Yes 0 No BIT10 QSL Status of the SCAN LEFT RIGHT line during line draw BIT11 SPD TOO HI speed limited by the scan board due to ADC conditions BIT12 LINE WAITING waiting at a line BIT13 PC SET SPD Who set the actual speed setting 0 front panel knob 1 PC BIT14 INFINIT_TRIG infinite number of trigger groups for TRIGGER_SERIES BITIS MOVING set whenever the scanning LED is on BIT16 PENDING TRIG Flag Wait ISR needs to generate the first trigger along the line BIT17 FIBER FB RUNS Fiber fb is running float scan line length in physunits scan Y length in physunits u32 Number of pixels u32 Number of lines u32 number of repetitions for each scan line draw u32 On which scan line repetitions do AD triggers see SET WHERE AD u32 SCANNER FLAGS see SET SCANNER FLAGS u32 number of triggers at each image pixel position float trigger period at each image pixel position in seconds float wait time at the end of a forward scan line s float wait time at the end of reverse scan line s u32 actual line repetition number RHK Technology 159 Troy MI USA XPMPro User s Manual Appendices 34 scanner errors Currently this is always 0 This will give a clue about scan generator errors 35 u32 Lithography instruction pointer value 36 u32 Lithography error number 37 u32 The last decoded Litho command In case of a bad command the code will be shown here and 28 shows
104. a Z linear motion per piezo volt 1 50 nm analog offset per piezo volt 20 00 nm K gt gt KP KP X KD separate one for offset then this Y analog offset per piezo volt 20 00 nm should be unchecked and the correct Z analog offset per piezo volt 1 50 nm calibration values entered for the Carec Anges offset piezo element Offsets summed with scan An accurate calibration of the scan head will only be possible once images of a known standard are obtained However if an approximate value is known ahead of time it is worthwhile to enter it when starting Figure 5 Screen shot of scanner tab so the scan size is close to the correct value Confusion can occur if the calibration is not changed and the scan head has a dramatically different scan calibration than the defaults Interpreting an image supposedly taken over an area of 10 nm when it is actually covering an area of 200 nm can cause the user to miss small features that are expected to be visible Closed loop scanning The outputs from position sensors capacitance laser interferometers etc can be connected to the rear panel DSP ADCs and the scan output voltages are then continuously adjusted to maintain an exact position This insures that the displacements are truly linear and no piezo nonlinearities or thermal drift are present in the data For example as the stage shifts due to thermal effects the output of the position sensors will change
105. ack loop active releases the probe allowing it to approach the sample The software monitors the Z axis motion to determine if it stabilized above the threshold value defined as the percentage of full range the tip has been retracted Depending on the settings of the feedback loop s gain and time constants each cycle typically takes about 0 1 second The tip retract mode is the preferred mode for STM operation to assure no tip sample contact occurs when approaching It is nearly impossible to have tip sample contact using this mode because the tip ramps forward only as fast as the feedback loop knows it can stop before contact occurs Tip sample contact can occur after approach is finished if the feedback loop gain is too high and the head goes into a loop oscillation however this behavior is independent of selecting Tip Retract If oscillation occurs the tip and sample can contact because the oscillation has a large enough amplitude that the z piezo extends larger then the nominal gap Feedback detect mode monitors the position of the feedback loop while the probe approaches the sample In this case instead of extending and retracting the tip after each step the tip is always extended and the feedback loop is constantly monitored for a reaction to the surface The motion automatically stops when the Z position has been retracted past the threshold setting This mode is recommended for contact mode AFM where the tip will normally contact the sa
106. al amount of time that tracking has been active 1 minute 48 seconds is also displayed This last piece of information along with the total shift in the x and y direction allows the actual lateral drift rate to be calculated If vector drift is active two additional items are added to the status bar which are the components of the vector currently in effect for the scan e B 77 9 Ed is 53 Range 5 09 nm 1 Fit 1 00 dx 1 87 nm dY 8 10 nm 1 48 Figure 128 When either drift correction algorithm is active a log of the drift corrections is created in the XPMPro folder This file will begin with the string DriftLog and then have the rest of the name formed by a uniquely generated string based on the date and time the drift correction was turned on Vertical drift correction The auxiliary feedback loop provided by the DSP board can be used with a long time constant as a supplemental correction signal operating in parallel with the analog feedback loop provided by the SPM 100 The DSP board can sample the topographic signal and output a voltage to maintain a constant z value usually zero This can correct for slow drift effects due to thermal expansion contraction during variable temperature experiments Connect a BNC from Z Position monitor output to the DSP ADC 1 When activated the signal is output from the DSP DAC and summed into either Z Scan or Z Offset depending on which rear panel BNC is connected If a RHK Technolo
107. al is bigger than owerlimit or smaller than upperlimit In other words one way it tests whether the signal is within the range and the other way it tests whether the signal is outside the range When the test fails and use pen line is not zero the pen bit on the DB15 connector goes HI The algorithm resets the pen bit when the signal gets back into range Also the scanner errors field field 34 ofthe GET STATUS reply will show a 1 Reading the status resets this error field Command code SHOW WATCHDOG Command name in Litho files showwd Number of parameters to send 0 Notes This command displays the upper and lower limit of the signal watchdog algorithm This will return float lower limit float upper limit BOOLEAN use pen line Command code SET DRIFT RATE RHK Technology 163 Troy MI USA XPMPro User s Manual Appendices Command name in Litho files sdr Number of parameters to send 2 Parameters float Xrate float Yrate Examples 0 01 0 01 sdr Notes This command starts the automatic drift correction algorithm The digital offsets of the scan board are moved at the specified rates given in physical units If both Xrate and Yrate are zero then the drift correction algorithm is switched off The offsets can be returned using the SET OFFSET command even while the drift correction is active Line draw operation commands Command code POSITION ABSOLUTE Command name in Litho files pa Number of parameters to send 2
108. al world with consistent drift over a lengthy time period every subsequent scan will find the feature exactly in its original location since the scan frame is adjusted to move at the same velocity as the feature However in practical terms this is rarely the case If there is an offset between the feature location and the original location in the next frame a new vector is calculated and this is then placed in effect for the next frame This continues until the drift correction is deactivated If at some point the correction is large enough that the scan frame bumps into the border of the maximum reachable scan area red box in the NAV window then the vector correction is disabled and only an offset correction is applied between scan frames When the tracking is turned on the user will be asked to click on the area of the image where the relevant feature is located A small dark green box will then be drawn that represents the feature to be searched for each time The z values of this region are stored in memory The larger bright green box represents the area of the image that will be searched to locate the desired feature If the drift is so large that the feature moves outside the search box during the scan the algorithm will do its best to find the closest match and adjust the offsets accordingly Care must be exercised to make the search area large enough to assure the object will be found but not so RHK Technology 12
109. ale Low Z Limit High Z Limit Z Reference Light Shade Light Rotate Others 1 00 ur Display Rotate mouse by choosing Ineractive Light Shading from the popup menu of the image However to Smooth Mode 03 Points v Pht nde 0 display a set of images with identical light source EN ag Y High Pass Range settings it is easier to type the values in the entry box so their appearance can be compared directly The data along the fast scan direction can be Figure 74 processed before display Note this does not change the actual data it only applies a processing function before displaying it in the window To smooth the data check the Scan Smoothing box and then choose the number of points to smooth over The Data mode is used to perform other processing before displaying the data Raw will form an image of the stored data values with no processing Line dZ subtract will set the average value of each individual line to the same height This helps eliminate effects due to RHK Technology 89 Troy MI USA XPMPro User s Manual Data Analysis and Image Processing piezo creep and thermal drift in the z direction Line slope subtract calculates a best fit line to each individual linescan and subtracts this and also sets the average value of z the same for all lines High pass will filter the data using a high pass filter with a bandwidth determined by high pass range setting The Disp
110. ale linearly with increasing this number If it only tests every ten coarse steps the approach should be ten times faster compared to testing after every step Similarly Adjust Steps is equal to the number of steps that will be made each time the or buttons in the navigation window are clicked A typical value would be one but larger motion can be initiated for each button press by using a larger number When ready to move the tip and sample far apart for sample change tip change etc pressing the Retract button will cause the motor to move the number of steps specified by the Retract steps parameter Tip control tab Helpful choices for tip behavior are contained in the Tip Control tab of the same window Figure 16 Tip back in motion is the option that determines if the probe should be automatically retracted whenever the software is about to move the probe in any direction using a coarse step This option should always be set to YES when used with an STM as an extra precaution when trying to avoid tip damage If the system is used with an AFM that can only move in the Z direction under software control this parameter can be safely set to NO as long as each approach step will not cause damage to the probe if the feedback loop is slow to respond If each step in the z direction is large enough and rapid enough that a brittle cantilever could snap the tip should also be pulled back before taking the step If motion can be taken la
111. ally remove the rows from the image and leave only the underlying gold terraces visible The first step is to change to the Point tab and choose a shape to draw on to the FFT The Circle shape works very well for most applications since the peaks are usually circular is shape in Fourier space Once the shape has been chosen place the mouse cursor in the upper right panel and click and drag the mouse to draw a light blue circle in the image After it has been sized correctly using the small handles it can also be moved by clicking anywhere inside the box and dragging it to a new position Figure 106 Is an example of removing four peaks to clean up the image The most prominent noise is removed using the largest circle Secondary noise peaks very close to the y axis were subsequently removed to erase some higher frequency noise apparent after the initial removal The end result is shown in the lower right quadrant and is a much improved image For noise peaks with a varied shape in Fourier space two other tools are available the ellipse and the rectangle The ellipse is similar to the circle tool but it useful of the peak is elongated in one of the two coordinates of Fourier space The rectangle can erase a wide range of power at 3D Plot Settings between specific x and y spacing values given the 2D FFT is also graphed on an orthogonal 3D menea JM coordinate plane heta 25 Phi 80 Z 1 09 Z Left Z Right Interactive 3D Exit Left Mouse Doubl
112. an attempt is made to set a value less than this the software automatically changes it to the fastest allowable time For a given set of conditions scan size line time knob value the actual setting of the knob will be shown in the Line Time box and the calculated tip velocity across the surface will be shown in the Scan Speed box A second method is using the software Line Time value When this is checked as shown in Figure 44 the Line Time entry box in the Navigation window becomes a data entry window where a value can be typed or the scroll buttons used to change the value This is the case illustrated in Figure 42 When the entry box is changed the setting will immediately take effect at the end of the scan line that is taking place when the value changes Any value is permitted here so this has an advantage over the knob setting in that finer control of exact line time is possible for example 145 ms line can be used instead of being limited to either 100 ms line or 200 ms line when using the knobs Both of these methods have the disadvantage that the actual tip speed across the surface changes as the scan size is altered To complete a scan in the same amount of time the tip has to move faster as the scan size is increased The SPM100 can also operate in constant tip velocity mode by checking the Scan Speed button Then the Scan Speed entry box of the NAV window will be usable and the Line Time box will be grayed out In this case as the scan
113. an interferometer reference channel This can drive the reference mirror or the fiber piezo of an interferometer that s used as AFM detector The signal from the interferometer preamp needs to be on ADCI of the scan board The fiber piezo drive signal will come out of the ZDAC The Interferom conv is just a RHK Technology 162 Troy MI USA XPMPro User s Manual Appendices configuration parameter that gets stored on the scan board It is not used in any internal calculations but output in the GET STATUS reply so that SPM32 can have access to this number Command code START FIBER FB Command name in Litho files strtfib Number of parameters to send Parameters u32 flag Notes This command starts or stops the fiber feedback algorithm with the parameters set up in SETUP FIBER FB A value of zero in the parameter FLAG will stop the feedback Everything else starts the feedback Command code SETUP WATCHDOG Command name in Litho files setwd Number of parameters to send 3 Parameters float lowerlimit float upperlimit BOOLEAN use pen line Notes This command sets the lower and upper limits for a signal watchdog that checks the DSP ADC2 while the fiber feedback runs The unit for these parameters is Volts When owerlimit is smaller than upperlimit the watchdog checks whether the signal on DSP ADC2 is bigger than owerlimit and smaller than upperlimit When lowerlimit is bigger than upperlimit the algorithm checks whether the sign
114. and the DSP board can then change the scan output voltages to maintain the correct position Also as an image is scanned if the next pixel is supposed to be 2 33 nm away and the voltage returned from the stage indicates it moved 2 37 nm the DSP board will reduce the output voltage to the appropriate amount until the displacement is exactly 2 33 nm This type of system relies on feedback so a bandwidth must be selected in order to insure proper operation The location must not be sampled too frequently or the feedback system will try to correct the displacement too often and an unstable feedback loop will be present When scanning an image the bandwidth of the closed loop circuit should be at least a factor of 10 larger than the scan speed Otherwise the DSP board will not have ample opportunity to make small corrections before the image data 1s acquired and the tip is moved to the next pixel This factor would provide the scan board the chance to apply about 10 corrections to the displacement as the image data is acquired The bandwidth must also be below the resonant frequency of the scan RHK Technology 15 Troy MI USA XPMPro 2 0 User s Manual Initial Setup stage or oscillations will occur Most stages have a fundamental mode of less than a kHz or so Therefore many users will have to reduce the image scan speed to take advantage of the closed loop capabilities The calibration of the closed loop sensors must be carried out and the ap
115. andidate to perform the bias eeey modification and pick up the modified the signal It PTS I RE Heb integrated function generator and lock in amplifier to one O s gt sooner a uml unit and the controlling software is integrated in XPMPro recta Index 0 Use This Peak 2 0 This electronic controller will introduced in detail in the Peak Frequency Toed Signal Drive Ratio 0 0e 3 section of AFM In the experiment we connect the D A Factor output channel 2 channel 3 and channel 4 of PLLPro to Static Mode Lockin Mode Self Oscilation Mode PLL Mode AUX input channel channel 2 and channel 3 of stm100 Lockin Mode respectively The Probe drive out of PLLPro should be icken HET pisco in Peak List connected to the bias modulation in stm100 We can use Dive Amplitude BER nena XPMPro inset package to control the PLLPro Here we only pai i Amplitude Setpoint 0 0 Wims Scaling introduce the related part we need here Detail instruction of ee rums VER pati the PLLPro can be found in the PLLPro manual and the AFM Phase Setpoint 0 0 deg manual Phase 123456789 0e10 18 deg Y DAC2 li Lockin 123456789 0e10 0 1 Vrms V Lockin Q 123456789 0e10 0 1 Vrms V First we click the setting gt operating mode XPMPro 2 0 will homo Foco EEN 33V pop out a window as Figure 118 shown We PLLPro Master Lateral Force 8B0N at SPM acquisition mode and close it Then we click on gt view gt PLLPro status XPMPro pops out a
116. aph can be thought of as z values along the x axis and color 0 to color 256 along the y axis When all of the changes are satisfactory return the window to its normal image display state by un checking Image Manipulation in the popup menu A nice feature of this window is all other processing and analysis choices are still valid even when the window is in image manipulation mode This means the image can be smoothed background subtracted etc and the histogram immediately updates along with the color mapping Interactive light shading When choosing this menu option the mouse cursor turns into a shining light bulb which can be moved around to represent the orientation of the source As the icon is moved up and down along the y axis of the window the Theta angle angle from the surface plane to the light changes If the mouse is moved along the x axis the phi angle angle between the x axis and the light source changes At any time the angle can be read from the status bar at the bottom of the window To exit this mode use a quick double click of the mouse button to freeze the light to its present position To return to a normal top view of the data open the shortcut menu using a right click and un check Interactive Light Shading on the menu Cursor Modes To extract quantitative information from SPM data there are a variety of modes that can take simple measurements or form plots of data from the image itself These are accessed using t
117. apply to both the acquisition window and the analysis and processing menu Stored parameter files Click the OPT button to open a menu where different parameter files can be opened The PRM files store all of the settings in the program The ability to switch PRM files allows multiple systems to be operated from a single installation Piezo calibrations stored spectroscopy experiments etc are kept in the PRM file and can be individually maintained Since the new SMA file format contains the complete PRM file inside its file header an experiment can be recreated from the stored data file by choosing to read the parameters out of the stored data file This is accomplished by choosing Read PRM from SMA file Note this is only possible from an SM4 file saved with XPMPro 2 0 and above An SM4 file converted from an existing SM3 file will not have the parameters stored in it since that feature was not available as part of the SM3 format specification After choosing this menu option click on the desired SM4 file in the file browser An alternative method of importing settings from a saved file is to choose the menu item DAW Page and then click on an open data window in a the DAW This will retrieve the PRM file from the saved SMA file associated with this data The third option for changing parameter files is the traditional way of directly browsing for a different PRM file using the standard file browser We also can store the working parameter to a prm f
118. are is called which effects the same DAC The DAC cannot be switched to its other output A to B or B to A unless the current output value is zero An attempt to do this will produce an error message Return the value to zero before trying to use the other output The information boxes to the right of each control display the last function performed by this DAC This serves as a reminder of the connection Figure 34 Pulse setup panel RHK Technology 47 Troy MI USA XPMPro User s Manual Coarse Approach The settings are identical for each pulse and will be discussed generically Output channel is the rear AT panel DAC to produce the voltage pulses A BNC DAC BNC jumper must be placed between this output 0 es channel and the appropriate modulation input in most DACZA Output 0V ej None cases Bias modulation or setpoint Image DACI B Output DV None spectroscopy pulse selects which of the two DAC2B Output 0V 5 None predefined pulses should be applied when DACI Ramp Rate 20 00 V S 2 Lithography is chosen as the Spectroscopy type wile DAC2 Ramp Rate 2000V s 5 imaging This allows the scan to be stopped and a pulse applied at predefined locations within the scan frame Use bias volt should be checked if the voltage levels defined for the pulse need to be adjusted to take Figure 35 into account the setting of the tunneling bias using the front panel knob of the SPM100 This should
119. ary line grid of meee o N io aa points or randomly distributed locations a ME Channels A particularly interesting experiment Handshake Output 8 would be acquiring an image scan and ee stopping over a feature and performing a gt 491149 14 gt Y a Y Y Y 4911491149 14 471149 40 49 Dutput 10 gt Output DAC DAC 24 wv this measurement hopefully inducing a OupuUnis Uy Samping Rate 500 kHz er D A volt T change When the image scan resumes Bands Total Time 3815 No of Points 680330 the subsequent line scans would display Standby output 0V the after picture of the surface whereas cT the portion of the image leading up to the OK tc Anew stop would capture the before picture Figure 56 Spectroscopy setting Time spectrum tab Ideally the change wold be captured by the appearance of a split feature that shows a different structure before the stop and after the stop This provides a very convincing argument that the structural change was indeed induced by the Time Spectrum sweep that took place The parameters used to define this mode are presented in Figure 56 Most are familiar since they are used in conventional ramp spectroscopy An Output DAC must be selected Be sure to have a cable from this DAC output to the correct input so the desired voltage is controlled If STM Bias Mode is checked then the cable must be connected to a rear panel
120. at the same conditions If the drift rate 1s significant over the time it takes to acquire all curves then the separation during the first curve will not be the same separation during the last curve and the differences in the data may be misinterpreted Check Stabilize Eod feedback to have the Spectroscopy loop re enabled Point Spectroscopy between every curve 2 Spectrum 1 Advanced Modes when alternate scan bs Handshaking L Suppress inline graphics updates E ata Input ELE PR direction is off or j Stabilize feedback Stabilization interval 116 20 ms every pair of curves e when alternate scan Spectrum 2 Monitor Mode a Spectrum 3 Monitor response Stopspectr Monitor warning message direction is on The B Spectrum 4 A amount of time to FFT Monitor test Safe betwee w Monitormax 000v f enable the feedback is i Scope Monitor channel Current Monitormin 0 00V gt set by the Image Spectroscopy e Multi E Stabilization interval In Out Variable Gap Mode i i Control dr sie di x Channels Z offset before spectrum O 00nm u E s Handshake Z change per bias volt 200pm t given the bandwidth of Y the feedback loop and Z change per D A volt 100nm f the amount of drift that takes place during a scan Usually 100 milliseconds is plenty of time unless the feedback bandwidth is very low A good check for t
121. b If this is not the case a warning message will occur providing the opportunity to either raise the setpoint or lower the threshold Tip Retract Signal acts like the Tip Retract mode discussed above in that it pulls the tip back and RHK Technology 28 Troy MI USA XPMPro User s Manual Coarse Approach ramps the tip forward using the feedback loop of the SPM100 but instead of monitoring the Z position level it monitors the feedback channel and stops the approach if the level gets above a threshold It uses the same Signal Threshold parameter as the Signal Detect method Open Loop Ramp takes advantage of the fact that the bandwidth of most preamplifiers is larger than the bandwidth of the feedback loop Therefore decreased approach times can be achieved with this method The feedback electronics of the SPM 100 is bypassed and the tip is ramped towards the sample through direct control using the DT3016 card The z piezo is ramped forward very quickly between coarse motion steps and the feedback channel is monitored for a non zero signal The response time will depend on the bandwidth of the signal circuit For STM the response can easily be as fast as 20 ms 50 kHz bandwidth setting of the IVP PGA When the signal goes over a preset threshold indicating a response to the surface has been detected the ramp is stopped The tip is then retracted and reapproached at a decreased speed to establish feedback Since the tip is ramped using the D
122. back If mechanical constraints require the tip not get pulled back its maximum retraction use this value to limit how far the tip moves from its fully retracted position Motion per D A volt will depend on the vertical calibration of the Z piezo and the BNC the DAC ramp is applied to This value must be known relatively accurately or tip crashes can occur If using the Open loop ramp approach mode to improve the speed of tip sample approach then the second group of parameters are used to determine settings specific to this mode The Approach test ramp speed is the rate to advance the tip after each coarse step This can be quite high since the feedback signal will be detected very quickly with the loop open The maximum speed will depend on the total distance that can be traveled between the height where a signal can be detected and a tip crash The current depends exponentially on the distance above the surface in STM so a reasonable value may be 1 nm If the tip is more than 1 nm above the surface the current will be zero If the height reaches zero the tip is crashed Therefore the speed cannot be greater than traveling this 1 nm distance in less than the 20 ms response of a typical current to voltage circuit This means the speed should be less than 1 nm 20 ms which is 50 mm s For NSOM or AFM where the interactions are longer ranged maybe 2 nm but the signal circuit is also usually slower time constant of a lock in amplifier of 3 ms a ramp
123. be checked when controlling a STM For example if the Bias knob on the SPM 100 is set to 1 0 Volt and the pulse height selected for the pulse is 3 3 V then the DAC voltage will be set to 2 3 V such that the final voltage applied to the sample is 3 3 V The voltage level to be applied is entered in the Lithography On volt box When no lithography is taking place the DAC will be set to the Lithography Off voltage This should normally be set to zero The width of the applied pulse is set by the Voltage on parameter A time delay from when the lithography pulse is selected until the time it is actually applied can be entered in the Delay box To have more than one pulse applied for each click of the button or at each spectroscopy location within an image increase the value of the Repeat Count The feedback loop can be on or off while the pulse is applied Select the appropriate condition using the Control loop parameter SPM Status The bottom pane in the window displays the readings of all analog channels as well as the two pulse counting channels It also displays the current scan offset feedback setpoint and scan area These values are updated about 3 times per second when no data acquisition is taking place Multiple readings of each channel are acquired and averaged to reduce the variations in the displayed values RHK Technology 48 Troy MI USA XPMPro User s Manual Initial Acquisition Initial Acquisition RHK Technology 49
124. ber reflects the number of curves plotted in the graph RHK Technology 76 Troy MI USA XPMPro User s Manual Initial Acquisition The final button is a toggle button used to show or hide the control tabs on the right side If no changes are to be made the panel can be hidden to allow the graph to fill more of the window size Once the acquisition is ready to go use the start button to being acquiring data To stop the sweep right away and re enable the feedback loop if it is off during acquisition use the Stop Immediately button To stop acquisition at the end of this group of curves when Spectra to Acquire has been fulfilled use the Stop at end of Group button Spectrum Analyzer A very powerful way to search for noise sources is to utilize the Fast Fourier Transform FFT feature of the program It has the same general capabilities of a spectrum analyzer as it will sample any analog signal at a specified rate and then numerically compute the FFT when completed Any peaks in the spectrum indicate periodic noise in the signal and the source of this noise should be investigated To properly interpret the data a few points must be kept in mind particularly with respect to the feedback loop of the SPM100 1 If the feedback loop is active the feedback signal should show no variations below the bandwidth cutoff since the loop is supposed to maintain a constant signal by varying the z piezo signal This means low frequency noise will no
125. called by PREPARE SCAN It is intended mostly for testing In where AD each bit allows AD trigger generation on a certain line repetition number Bit 0 means first fwd line bit 1 means 1st rev line etc A value of where AD of 2 means only generate A D trigger sequences at the first backward scan The bits in here are only considered when the line is drawn That has to be set using SET REPETITIONS Command code SET SCANNER FLAGS Command name in Litho files ssf Number of parameters to send Parameters u32 SCANNER FLAGS Notes Internally this function gets called by PREPARE SCAN It is intended mostly for testing The scanner flags describe Start corner Bit 0 1 lower 0 upper Bit 1 1 right 0 left Slow scan direction Bit 2 1 keep 0 alternate RHK Technology 177 Troy MI USA XPMPro User s Manual Appendices Command code SET SC TRIGNUM Command name in Litho files sctnum Number of parameters to send 2 Parameters u32 TRIGNUM float TRIG PERIOD Notes Internally this function gets called by PREPARE SCAN It is intended mostly for testing It sets the number of A D triggers generated at each A D position Note that this is the value used by the scan generator If you set TRIGNUM by using SET TRIGNUM this will be overwritten by the SET SC TRIGNUM value at the begin of the next scan TRIG PERIOD is the time between trigger events in seconds Command code MOVE TO SCAN START Command name in Litho files
126. capture dynamic phenomena The DAC should be chosen in the Output DAC box For the correct result a cable must be connected from the selected DAC output to the desired input For typical I V curves the selected channel should be connected to one of the bias modulation inputs on the rear panel of the SPM100 However the flexibility of the SPM100 allows the voltage sweep to be connected to any equipment that can accept a voltage input and change an output for the desired response RHK Technology 64 Troy MI USA XPMPro User s Manual Initial Acquisition within the system When STM Bias Mode is checked the DAC output is adjusted to take into account the value of the SPM100 bias knob Since the tunneling bias will be the sum of the knob and any DAC voltage when applied to a bias modulation input the DAC limits will not be the limits entered for the sweep For example if the upper limit is entered as 1 0 V and the bias knob is set to 0 25 V the upper limit of the actual DAC output will be 0 75 V If this parameter is OFF then the values entered for the sweep limits will be the entered values and the setting of the bias knob will be ignored Output units per ADC volt is used to specify the overall gain of the DAC output for the desired effect Whatever physical signal is being swept the DAC voltage will be converted into a physically meaningful value by this conversion factor For example if performing a force distance measurement
127. ch Kinetics Step Inch Approach Control Walker Approach system RHK PMC 100 Piezo Motor Contro v RHK PMC MSCU Approach mode Feedback Dete w Test delay 10 00 ms Slid Pis x Approach threshold 29 1 Adjust steps 1 Attocube piezo Feedback delay 100s 2 Retract steps 1000 2 Advanced Secondary Signalthreshold 100n f Approach steps 1 Tip Ramp gt Figure 15 screen shot of motor set up RHK Technology 27 Troy MI USA XPMPro User s Manual Coarse Approach the tip and sample together The settings that determine how the chosen motor moves is configured in the Motors tab described below Many of the motor interfaces require a separate electronics unit from RHK that XPMPro communicates with either through a network connection or a TTL interface using a separate TTL board It is also possible for the software to interface to a few types of electronics supplied by a third party There are five different modes of synchronizing the SPM100 with the coarse steps All of these use the software as the master synchronization controller The choice of what to use depends on many factors such as delicacy of probe and the patience of operator In most cases the slower the approach the less likely to cause undesirable tip sample contact once they get close to each other Tip Retract mode is the safest and slowest method The program fully retracts the probe makes a motion cycle then with the feedb
128. ch as friction and topography or tunnel current and conductance or left and right scans Scan Size 1 72 nm Cursor Mode None 0 00 nm 24 1 Figure 92 Two images can be subtracted to look for differences between them using the Image Scaled Sum selection After choosing the two images a window will appear where the relative scaling between the two images c is entered Then each pixel of the first image is added to the same pixel of the second image using the formula Zimagea C Zimages The two images must have the same units both topography both current etc as well as identical pixel resolution you cannot subtract a 256x256 image from a 512x512 image This can be very useful to notice the change in the surface as a function of time or to subtract the left and right scans from each other when acquiring friction data to visualize the different cantilever response in going from region 1 to region 2 instead of region 2 to region 1 To subtract two images use a value of 1 for the coefficient Image Processing When any image processing procedure is selected the type of window that appears depends on the process that is chosen For a calculation that has no user selectable parameters the dialog box will describe the calculation and contain two buttons The first one will Cancel the calculation and leave the original data intact The second one will Calculate the result and then RHK Technology 100 Troy MI USA XPMPro User
129. ch is most commonly used for exporting XY graphs in column format To export data use the toolbar button shown in Figure 108 The arrow can be clicked to open the dropdown list used to choose the graphics format The cursor now changes appearance and clicking on a window will open a file dialog to provide the filename and location of the exported image or graph XY plots two dimensional images and three dimensional images can all be exported in graphics mode If ASCII is chosen the most likely choice is to click on an XY plot Now the data used to form the plot will be written to a file in columns with Figure 108 the x axis in the first column and all displayed plots in additional columns This is done so the data can be imported into a separate graphing package for display or additional processing analysis If a plot is selected and the export mode is NOT ASCII then the display of the plot as composed in XPMPro will be written to a file To exit export mode click the button which will make it appear unchecked again The same function can be accessed using the File Export function and choosing a format In this case the Escape key can be pressed to exit export mode If choosing a graphics format a file save dialog is presented as shown in Figure 109 The destination directory is selected in the top section and a filename is suggested based on the source file This can be changed if desired The bottom section
130. channels panel The functions that set the DAC as the output channel can be read in the DAC RHK Technology 18 Troy MI USA XPMPro 2 0 User s Manual Initial Setup assignment panel Count tab and AFM tab Some of user may use the counter to count the photon or electron for the measurement The setting of the counter can be set at count tab The main parameters are the count interval and some display parameters When we use AFM mode AFM detector parameters are set here They are vertical force spring constant deflection sensitivity lateral force constant lateral deflection sensitivity laser current Scan Settings gain laser photocurrent gain PSD thresh hold or some external signal ptions Save Input parameters given the typical value PERS D m can Count of these parameters Move Scan Delay 100ms Scan Settings Ves Normal O The main parameters that effect Tests XScen jj data acquisition are accessed from cA EAE end rob d Alternating slow scan Slow scan disabled file naming convention is entered in Advanced the Save Display tab Figure 9 Standby Action limage stat The Scan Count is the number of images to acquire before stopping Scan Type linear ba the data acquisition A value of zero means free scanning which will verS ample continue until stopped manually verSample O Place a value here to scan a 85 predetermined number of images if it is unde
131. code SET MATRIXS Command name in Litho files sm5 Number of parameters to send 5 Parameters float SkewAngle float X Piezo sens float Y Piezo sens float HV Gain X float HV Gain Y Examples 13 0 13 0 300 0 300 0 90 sm5 Notes This defines the meaning of physunits to the board The piezo sensitivities are given in physunits V the HV Gains are dimensionless All other operations are based on physunits so probably this is one of the first instructions given to the board The parameter SkewAngle specifies the angle between the X and Y piezo motion in degrees In normal microscopes this angle should be close to 90 degrees Command code SET MATRIX Command name in Litho files sm Number of parameters to send 4 Parameters float X Piezo sens float Y Piezo sens float HV Gain X RHK Technology 168 Troy MI USA XPMPro User s Manual Appendices float HV Gain Y Examples sm 300 0 300 0 13 0 13 0 Notes This defines the meaning of physunits to the board The piezo sensitivities are given in physunits V the HV Gains are dimensionless All other operations are based on physunits so this should be one of the first instructions given to the board Command code SET OFFSET Command name in Litho files so Number of parameters to send 2 Parameters float Xoffs float Y offs Examples so 20 0 30 0 Notes This moves the offset of the scan board The offset coordinates are given in the unrotated coordinate system offset moves the c
132. code WRITE LITHO BUF Command name in Litho files wlb Number of parameters to send variable Parameters Instructions to be put into litho buffer Notes This command can not be put into the lithography buffer That does not make sense This is the only command with a variable length The user has to make sure that the sent packet size does not exceed the ethernet packet size Otherwise the packet will be split up by the IP layer of the control computer and then ignored by the scan board IP routine Longer instruction sequences can be downloaded by subsequent WRITE LITHO BUF instructions After the download has succeeded the lithography pointer points to the first free memory cell after the downloaded commands This allows multiple WRITE LITHO BUF commands to write more instructions than what fits into one ethernet buffer The WRITE LITHO BUF instruction returns the following data structure to the IP address and UDP port number that issued the command 0 WRITE LITHO BUF code 1 number of written instructions 2 remaining free spaces in litho buffer This is mainly used to confirm that the packet arrived and got processed It might get lost in UDP Command code RESET LITHO BUF Command name in Litho files rlb Number of parameters to send 0 Notes This is used to stop a running lithography sequence and to set the lithography pointer back to the begin of the buffer Please note that the lithography buffer controls both where instru
133. contact B via various attraction mechanisms so the deflection of the cantilever is down from its equilibrium position As z continues to decrease the cantilever starts to deflect upwards C and the relationship between z motion and detector voltage is recorded This slope is the critical information needed to convert the photo diode voltage into a z height As z then reaches its minimum value and starts to increase the deflection starts to decrease D but the tip maintains contact with the surface for a larger z because of capillary forces between tip and sample The tip eventually breaks contact E and snaps back to its equilibrium position As the z increases to a large value the tip and sample are again separated by such a large amount that the cantilever remains at its equilibrium position F Note the slope of the large separation part of the curve is shown flat in this idealized picture however in reality there may be either an upwards or downwards trend to it as z decreases due to longer range forces acting between tip and sample along with oscillations due to laser interference with light scattered from the sample First go to Settings Operating Modes AFM and input the spring constant of the lever then set the deflection sensitivity to 0 V m The slope of the linear section of the curve C or D can then be used to determine the force setpoint The slope will be Deflection Z and since the force constant of the cantilever is known i
134. croslide motors from Omicron as well Approach Motors 2 x E Approach Approach Control Tip Control E Motors E Kinetics Step Inch Walker RHK PMC RHK PMC RHK PMC 100 Motor Control installed T as the low temperature motor s PMC 100MotorContoleriP 192 168 10 65 popularized by S H Pan are p Step Time rooms Attocube piezo El Advanced Secondary Tip Ramp two examples of this construction The motor is driven by a parabolic waveform which drops from the positive voltage extreme to the negative voltage extreme in less than a microsecond which Cancel is enough to exceed the static friction and create motion Figure 26 RHK PMC controller tab The preferred way to interface with the PMC100 is through a network connection XPMPro can send commands over the network to produce motion of an approach motor It synchronizes the commands with tip extension contraction and subsequent testing for feedback The tab to configure the interface to the PMC100 is shown in Figure 26 The IP address of the PMC100 must be entered in the configuration tab PMC100 Motor Controller IP so XPMPro can communicate with it XPMPro cannot assign an IP address to the PMC100 The PMC100 control program should be used to assign a default IP address to the unit The steps needed to perform this are described in the PMC100 User s Manual If the PMC100 was purchased with an SPM1000 and XPMPro order the comput
135. cted as PLLPro master or PLLPro user Page Header Sequential Data Page The sequential data page is generic page in which the page data is a m n array Where m is the number of parameters in the array and n is the array count The array elements will be all float type The parameter info is stored in the page header Sequential Data Header If the PageDataType is Sequential data then Page header contains the following parameters Data Type Data Type int Bytes used 4 Bytes Type of the Data stored in the page The defined types are 1 Spec Drift Stores the SSpecInfo structure as the Data Param Count gives the number of float data in this structure 2 Image Drift Stores the SImageDrift structure as the Data Param Count gives the number of float data in this structure 3 Tip Track Stores the StipTrackInfo structure as the Data Param Count gives the number of float data in this structure Data Length Data Type int Bytes used 4 Bytes Stores the Array Size Param Count Data Type int Bytes used 4 Bytes Number of parameters float data in an array element Object List Count Data Type unsigned int Bytes used 4 Bytes Count of objects stored after the header Data Info Size Data Type unsigned int Bytes used 4 Bytes Size of the SXdatalnfo structure excluding the string Data Info String Count Data Type unsigned int Bytes used 4 Bytes Number of strings in the SXdatalInfo structure Objec
136. ction The Tip Tracking pane can be used to configure a lateral dither of the tip over a feature using the X and Y scan raster DACs The DSP board will then monitor the fluctuations of a signal and by measuring the local gradient it can adjust the center position of the tip to stay above a feature on the surface This is particularly useful to track diffusion of adsorbates or defects on the surface as well as provide a measure of drift as a function of time The final pane is a display of all analog signal levels in the SPM100 as well as the two pulse counting channels This is updated at a rate of approximately three times per second A large number f readings are measured and averaged together to reduce the jitter in the readings Spec Location Spec Location will be explained in great detail in a later section It is used to select pixels within an image to stop the scan and acquire spectroscopic data Tip Approach To control and configure the approach open the Tip Approach Tip Approach A D Status pane shown in Figure 14 eR E 5 The approach mode and motor Speech Kinelic Waveform settings are accessed by clicking m on the Motor Setup button in the Tip Track Y approach pane It will open the window shown in Figure 15 The first parameter is the Approach system which is determined by the physical motor used to bring Figure 14 Screen shot of tip approach Approach Motors Approa
137. ctions get written to by WRITE LITHO BUF and where they are read from during execution Command code JUMP BUF Command name in Litho files jlb Number of parameters to send Parameters u32 position Examples jlb 0 jumps back to the begin and continues Notes This command simply changes the lithography pointer This way loops are possible Conditional jumps are not supported in this version Command code DO LITHO RHK Technology 182 Troy MI USA XPMPro User s Manual Appendices Command name in Litho files dl Number of parameters to send 0 Notes This executes the commands in the lithography buffer starting at where the lithography pointer points to During lithography execution the lower word of the machine state word is set to LITHO Command code PLUS Command name in Litho files Number of parameters to send 0 Notes This command adds the two topmost entries on the Lithography stack It can only be run from inside a Litho file Command code JNZ Command name in Litho files jnz Number of parameters to send 0 Notes This command will execute a relative jump inside the lithography buffer The top of the parameter stack is the offset of the jump counted from one position behind the jnz instruction Underneath is the counter parameter When the counter parameter is zero it gets removed from the stack and no jump is executed Otherwise the instruction does the relative jump Please look at the looptest
138. cutoff are multiplied by decreasing values until the factor does eventually become zero and provide a smoother transition in the resulting FFT so the inverse FFT is less likely to have artifacts introduced due to the finite size of the two dimensional array Compare the shape of the four different cutoff shapes displayed in Figure 105 Note the second order filter has a very slow decay and the FFT shows only a slightly darkened area near the middle The 8 order has a more abrupt drop so there is a more substantial region in the middle where all the power has been removed A nice example showing the effect of suppressing large features is illustrated in Figure 102 Here Suppress Large Features was chosen and a small circular region near the origin is set to zero This removes the large terraces from the original image leaving only the periodic noise due to vibrations in the image as seen in the lower left image There are a variety of applications where this could be very useful Removing a long wavelength background from the image removing a long wavelength charge density wave while leaving the true atomic locations etc The opposite procedure also can be useful that is removing short wavelength features to leave other structure visible such as removing atomic scale variations to better highlight long wavelength structure such as charge density waves periodic steps heterostructure topography due to electronic effects etc
139. data from file gives you the acquired data If the Line Type is Gdatalog Gechem Givnorm Gfft power Gautocorr Goutspec Gdiscspec data Ghistogram Gx ave Gy ave OR if the Page Data Type is Sequential data then the data is of type float otherwise data type is long int SPECTRAL DATA If Type is line spectral data and the Page Type is either image interactive spectra type 16 or ramp spectroscopy type 38 or image discrete spectroscopy type 37 or discrete spectroscopy type 39 then Spec Drift header and an array SSpecInfo is stored after the page data The data offset and the size of structure SSpecDriftHeader and SspecInfo is stored in the Spec Drift Header and Spectral Data Object respectively in the Page header object list m nHeight in the Page header gives the array size If spectroscopy drift correction is disabled then the drift info is filled with default values Struct SSpecDriftHeader 1 FILETIME m ftStartTime Start time int m nDriftOption 0 disabled 1 each spectra 2 each location unsigned int m unStringCount number of string parameter in this structure rhk string m szChannel drift channel name j Struct SSpecDrift 1 float m fTime float m fXCoord float m fYCoord float m fdX float m fdY float m fCumulativedX float m fCumulativedY j READING COLOR INFO If the Page Type is image data then the next short value gives you the total size of the fields you have to read for color information Ot
140. de LS LITHO MODE Command name in Litho files 1slm Number of parameters to send 1 Parameters u32 on off Notes This command enables on off lt gt 0 or disables on off 0 the line start lithography mode In this mode the lithography buffer is executed at the beginning of a line draw when a wait time lt gt 0 is defined RHK Technology 174 Troy MI USA XPMPro User s Manual Appendices Scan layer commands Command code PREPARE SCAN Command name in Litho files prepscan Number of parameters to send 13 Parameters float baselen scan line length in physunits float basewidth scan area height in physunits float LineTime scan line draw time one way float fwd wait tm stop time after end of fwd line float rev wait tm stop time after end of rev line u32 npix number of image pixels on each line u32 nlin number of lines in the scan u32 motionmode C SPEED SINE SCAN NL LOOKUP u32 rept of repetitions for each scan line u32 where AD A D triggers on which repetitions u32 SCANNER FLAGS see commands h for coding u32 TRIGNUM of triggers at each A D position float TRIG PERIOD trigger period in seconds Example prepscan 12 12 0 002 0 0200 20001341 7e 6 Notes This command sets the parameters for a scan It then moves the tip position to the scan area corner defined in SCANNER FLAGS from where the scan is supposed to start The motion along this line will be the speed
141. defined period dwell time and then continue to the next set of end points all the while collecting data on any number of input channels Ten steps in this process can be programmed to be automatically acquired at any number of points in an image Spectrum Analyzer Settings controls attached with window and the maximum number of readings has been increased to 8 192k providing 50 mHz resolution with a bandwidth of 125 kHz Optional acquisition module provides up to 2 MHz sampling It displays the average spectrum in real time which provides higher speed and resolution Furthermore all settings have been moved to the Power Spectrum window for ease of operation Feature Tracking and display When using the feature tracking capability the position of the feature on the surface is recorded as a function of time A new display mode allows this position to be shown as a function of time or displayed overlaid on the image where it was acquired Improved Atomic Manipulation Dropped atomic features during manipulation routines are no longer a problem RHK has improved upon its previously released design The updated atomic manipulation routine improves productivity by up to 100 fold by quickly and automatically locating lost features RHK Technology 6 Troy MI USA XPMPro 2 0 User s Manual Installation e High Speed acquisition module A new optional module allows acquisition to be acquired at up to 2 MHz on each of two channels In additiona
142. demo5_18 sm3 Le Current FFT le Current FFT Topogra Topograph Current Data Topograph Current Current FFT Current FFT 6 E demos_19 sm3 pography pography ography I mif HF i 0 0 0 60 0 0 E A mA Cn Co i wis Tu D m amp E i mA mA a gt p Pages 51 ps Figure 70 should also be easier to write import utilities to call the data into third party programs for custom analysis and processing routines not found in XPMPro For customers upgrading from SPM32 the old data will have to be converted to the new SM4 format in order for XPMPro to access the data A builtin utility has been developed for this purpose It can be opened using Options SM2 to SM4 Converter or clicking the toolbar button shown in Figure 71 This will open a dialog box to locate a directory for file conversion The existing SM2 files are not overwritten An SM4 file will be created and can be located in the same directory or a separate directory This allows parallel data analysis in that SPM32 sad and XPMPro will both have access to the same raw data files The conversion dialog box is shown in Figure 72 Figure 71 The directory where the SM2 files are located is chosen via the first Select button When this has been done a listing of SM2 files found in that directory RHK Technology 87 Troy MI USA XPMPro User s Manual Data Analysis and Image Processing will be seen in the lower left panel
143. der corrections to Configure Hardware Settings ve the closed loop scan algorithm If an pere em automatic calibration is performed DSP Ady Fostioning Fesdback the extracted characteristics will be TON et Dg automatically entered here The tab 5 e amp detector sensitivity 10 00 umA is shown in Figure 7 If the position sensor does not read exactly zero when there is no physical displacement enter the voltage offset Y detector offset 0 00 V Y Y detector sensitivity 10 00 umA Detector Cross Coupling in The voltage output from the Mota MUS sensor as a function of displacement A cioe UE 0 00 mV i is specified by X Y detector offset Detector Nonlinear Corrections X Y detector sensitivity Ideally the detector square sensitivity 0 00 m V2 position sensors are perpendicular and independent of each other however in real systems many times there is crosstalk between the two Y detector cube sensitivity 0 00 m3 directions a displacement precisely along the X axis also changes the voltage output of the Y sensor a small amount and the relative crosstalk is determined by the Detector cross coupling parameter Nonlinear terms in the sensor output voltages can be specified with the XY square amp cube sensitivity settings Y detector square sensitivity 0 00 m 2 X detector cube sensitivity 0 00 m V 3 gt Figure 7 Screen shot of advance feed back tab Operating Modes
144. direction is subtracted and then shown A third choice is Line slope subtract which means a first order fit is performed to each line of data and then subtracted before the image is displayed If High pass is selected each line of data is filtered to remove large features such as piezo creep or nonlinearities due to scanning a large distance The final choice is derivative where the local derivative is calculated along the fast scan direction before display Thumbnail size determines how large to make each image in the display panel Larger thumbnails allow more details of each image to be seen without loading it into memory but fewer images will be visible at any time Thumb Nail Mode line delta Z subtract When a directory is chosen in the tree view it will be scanned for SM4 files and the names will be listed in the panel A thumbnail for each page of data will then be displayed on the right side Figure 70 To show only a particular file click the file name and then only the data pages contained in that file will be displayed The small symbol next to each file name can be clicked which will show the complete listing of data pages contained in that file An individual page can be shown in the display by clicking the desired channel shown in the listing Each thumbnail is shown with the channel listed below it To find details of a particular page place the mouse cursor over the image and after a short time a window will
145. e region of the histogram graph and when its appearance changes to a symbol it can be clicked and the new color scale fills in this gap After adding it a new set of sliders will be added to the x axis region and the mapping of this CLUT to z values can be changed by dragging them To remove a color scale first click the mouse cursor in the region that contains the one to remove which turns that overlaid graph yellow to indicate it is the active one Once this is done click the Delete button The CLUT disappears and all z values previously mapped to it return to the value determined by the remaining sets of sliders To edit the active CLUT use the color wheel in the lower corner in the same manner as described previously Move the start color and end color endpoints of the line The image appearance will change as the endpoints are dragged to provide immediate visual feedback of the changes Color lookup tables can be changed created or deleted from this window similar to the functions presented in the color wheel dialog from the realtime acquisition windows To change the color mapping from a simple linear mode to non linear graphs select the correction mode from the dropdown just below the color scale The three choices are Linear Gamma and Double Gamma Once the mode is changed to one of the gamma selections the overlaid graph is changed by using the vertical slider on the right side of the histogram graph Keep in mind the axes for the gr
146. e the voltage from the PSD will increase spot moves up The effect of this would be to shift the F z curve up and down relative to its original position as much as 10 V or 10 V when the bias range knob is placed in the 10V position However since the feedback loop is active as the bias knob is changed the F z curve will not shift directly up or down because the setpoint and current z position would no longer intersect at 0 0 as marked by RHK Technology 125 Troy MI USA XPMPro User s Manual Data Acquisition Techniques the X As the F z curve shifts up or down it will also shift laterally such that the F z curve always goes through the origin of the plot since setpoint 0 and z 0 always corresponds to the setpoint force A subsequent F z curve after the adjustment will appear as the bottom part of Figure 124 where the X was left on the graph to indicate the original force setpoint The entire curve has moved up and over as the bias is moved In summary the setpoint knob changes the working force by altering the desired setpoint voltage This results in a different cantilever deflection in order to have the reflected laser spot fall on a different section of the PSD and since 9 4values the cantilever constant is the same the total force changes with the change in deflection The bias knob changes the working force by altering how much force the setpoint voltage of 0 V actually corresponds to It does so by
147. e 004 002 1 where STiMage 004 002 gives you the version and and right most value 1 indicates that file is in Unicode format For non Unicode files it will be zero String Count Data type short Bytes used 2 Bytes This variable gives you the number of strings in the page Type Data type int Bytes used 4 Bytes The type of data stored with the page Six types are supported 0 image data 1 line spectral data 2 xy data 3 annotated line spectral data 4 text data 5 text annotate Page type Data type int Bytes used 4 Bytes Identifies what kind of data an image page represents The possible types are 0 undefined 1 topographic image 2 current image 3 aux image 4 force image 5 signal image 6 image FFT transform RHK Technology 140 Troy MI USA XPMPro User s Manual Appendices 7 noise power spectrum 8 line test 9 oscilloscope 10 IV spectra 11 image IV 4x4 12 image IV 8x8 13 image IV 16x16 14 image IV 32x32 15 image IV center 16 image interactive spectra 17 autocorrelation page 18 IZ spectra 19 4 gain topography 20 8 gain topography 2 4 gain current 22 8 gain current 23 image IV 64x64 24 autocorrelation spectrum 25 counter data usually NSOM 26 multichannel analyzer data usually NSOM 27 AFM data using RHK AFM 100 28 CITS 29 GPIB not used at present 30 Video channel Ivideo not
148. e Click Three dimensional rendering XPMPro can display any image page as a three dimensional rendering combined with the proper lookup table relating height to color This provides a nice view of relative feature size as well as shape To produce a 3D rendering Figui choose Plot 3 D view from the shortcut menu A window will open with the image rendered from a point of view determined by the default parameters RHK Technology 106 Figure 106 XPMPro User s Manual Data Analysis and Image Processing in the 3D Settings window opened from any 3D plot The 3D Tilt is the angle from the horizontal plane A value can be entered directly or the scrollbar controls may be used The 3D Rotate is the angle the x axis forms from the bottom edge of the window frame Z Scale is a factor that can be used to accentuate vertical heights in the image Values greater than 1 will make all features look taller than reality and values less than 1 will make all of them smaller than reality Line Skip is used to render the images faster on slower machines Instead of forming the image from every scan line every n line can be used which reduces the image processing calculation needed to render more lines of data Most modern computers can easily handle the requirements such that the value can be left at 1 Mode determines the type of rendering to draw Fill will create a solid surface X Line will draw the data with lines following the x ax
149. e MN eR Tti RR 36 Kinetic approach SYSTEMS es eee ee aes ded eto Eo dn e PIU VEN beni eeu M dee eR POM 36 ires d T da 38 Omicron s channel MSCUs ibd te remi ec re Vd dec wa Hier rena 39 Omicron 3 channel microslide controller sse 41 RHK PMCIOO aclaradas 41 Taclisvortmo WC FT tab ion 42 o ao oe racsde ene Rea t hin dh etuer E mte E RN a Us 43 PPC200 USB controlled piezo positioning controllers sssss 43 Starting am apprOodclr e eee e AA dete E Po a Rec ee id 44 Tips EEAC Lu secta terc thv e boda gere ob uote dx du uve aeu dus AR 45 A COTTE usos ceste E E 45 RHK Technology 2 Troy MI USA XPMPro 2 0 User s Manual Table of Contents SENI Stas dne Genre ee ee ete pdt ecd eer a ies en accent sd tss ace e 46 TALA Usas 47 BLA ena a ne al ee do 48 Image manipulation and color table dialog EA AA 49 Navigation WIndOWs ta A AAA AA Ad AA AAA 50 XY Graph SVIBOOW A abend eq ii a hene A AN 56 Layout abo euo oie hod ou p seal it tut M Ud 57 CULVESdal essetis mesi eee ue LN D EE 58 Point SDeCIEOSCODYV issnin r aE soi 60 COUPE E ade gists tase aeons cares ses Da AA 61 Ramp subsection ood aris E ted Lad 62 Control Pa cR aI 63 Advanced modes TD A A as 65 Time SCC A A ya E EN etude 67 Point spectroscopy IOC ALOIS d oce e aestu troi tede rne dea dat n Que oV NIRE 69 Spectrum Amaly2et a adco via ier pls dra iae aoc ii datei e ersten iai d ai a pedo 74 MDG UML SOO pe oett A aae A ee e
150. e a fixed amount by setting Z offset before spectrum This can be combined with motion of the tip in proportion to the applied bias To have the tip move asa function of the bias and reach the minimum separation as the bias crosses zero set Z change per bias volt to a nonzero value The optimal value here will take some experimentation Too small of a value and the tip will not move paciens oa dd far enough as the voltage decreases and sensitivity will not be increased enough The Z change per D A volt depends on the piezo calibration and the rear panel z modulation input in use Z offset before spectrum 0 Z change per bias volt 0 This data acquisition technique is not limited to only variable gap I V curves in STM Because of the flexibility of the SPM100 and XPMPro any measurement technique where two voltages should be changed simultaneously and the response recorded can ea be achieved using general dual output mode l The initial and final values for each ramp are set independently The voltage sweeps are broken into an equal number of steps and both voltages are changed simultaneously to the next step and then data is acquired Figure 55 Z offseted I V curve measurement Time Spectrum tab Many interesting phenomena can be investigated by producing an arbitrary waveform and watching the response of the system Instead of monotonically increasing or decreasing the voltage sweep as in conventional spectroscopy
151. e acquired from the bottom of the image to the top Place a check in Alternating Slow Scan to use this feature To obtain a series of scans over the exact same part of the surface ignoring thermal drift effects Slow scan disabled should be checked This can be useful to acquire data for comparison within the same image while changing some external parameter such as AFM load or to use as a diagnostic when first setting up image acquisition while optimizing the feedback conditions The Standby Action is used to select what the scan head should do when image acquisition is not taking place The options are to be at rest in the upper right corner of the scan frame to be at rest at the center of the scan frame to be at rest at the center of the piezo range continuous scanning of the first line or continuous scanning of the entire frame Piezo creep can be minimized if the scan piezo is always in motion repeatedly scanning over the same part of the surface since there is no time when it is at rest and therefore relaxes Choosing scanner zero can be helpful with the RHK UHV350 AFM since the PPC150 can be switched from one direction to another with no adverse effects If the voltage to the scan head legs is zero and they have no deflection there will be no abrupt jerk of the head when the PPC150 is switched If a scan head is in use that has a resonant frequency which gets excited by the harmonics of the conventional triangular waveform this can be
152. e and not the image scan size until the mouse action is changed back to Modify Scan Area Navigation Window Jeg Navigation Window ax Tip P osition 2 32 um X 2 62 um Tip Position 1 92 um X 2 55 um Range Range Ref Image Ref Image Load pad Clear Clear e Clear All Clear All Scan Settings Scan Settings Manipulaton Maripulation J Action Action Relative Points Relative Points Zoom Zoom Move Line Spectra Mouse Action Move Region Spectra Mouse Action t Size 266um 4 O Modify Scan Area t Size 912 23 nm amp O Modify Scan Area e gt Rotate 137 03 De Rotate 0 00 Deg Offse Cibeles y Add Spec Location s ip Offset 7 Tip rs Drag Move Ti EE x 28m 83 C Deo Scan Speed s Bass x 065um gy O D eg Move Tip Scan Speed gt amp o Qo Y 4551n E LineTime 139ms f e amp l l ol v 167nm LineTime 139ms 2 Aux Feedback v Aux Feedback Spec Location R Spec Location A Spee Location Line vw Spec Location Regon x Open Car Locations 82 Spacing f Tip Approach y Tip Approach Tip Track Tip Track v MIRI TR y Manual Control y SPM Status y SPM Status v Figure 61 Figure 60 The final choice that can be used to define an array of points is to draw a box within the scan frame and then define a regularly spaced grid of points as spectroscopy locations
153. e are also tooltips that popup when the mouse cursor is held over each button for a short duration Point spectroscopy One of the most common measurement techniques other than standard imaging is to acquire spectroscopic information In most cases the feedback loop is opened and a voltage changed while recording other channels at each voltage step In STM the most common method is to sweep the tunneling bias while recording the change in current to study the density of states near the Fermi surface of the sample material A second common technique is to sweep the z piezo voltage and record the exponential change in current as a function of tip sample Spectroscopy separation For AFM the most Spectrum Input common technique is to sweep Spectrum 1 the z piezo voltage and record Bao edd I pem the cantilever deflection to e i D gather information on the amp Spectrum 2 Current 7 A DRange 1010 10 Vots v elasticity and adhesion of the Ei Auri O ADRange 1010 10Vots v surface FFT Aux2 O A D Range 10to 10 Vols 8 ree LENS a O AREE E 10to 10 Volts v XPMPro can acquire Muli Aux4 O A D Range 10to 10Volts v spectroscopy data within an Td Aux 5 CAD Range 10t 10Voks image or without a raster scan Channels Aux 6 ADRenge 10 to 10Voks There is a tremendous Handshake Al rate O Counter Time 1 00ms f advantage to taking the data A2 rate L1 Counter2
154. e is little point in continuing with the acquisition The total C ames SEE accumulated drift during the duration of the ENEE spectroscopy is also displayed below the pair of images i ixi Conductance measurements By applying a small modulation on the tunneling bias the change in current as a function of change in voltage can be c K acquired The simplest way to do this is to use a lockin amplifier and apply the excitation signal to one of the rear panel bias modulation inputs Then the output of the rear panel preamp monitor BNC is connected to input of the lockin and the output of the lockin that is proportional to the amplitude of the current modulation is attached to one of the rear panel auxiliary channels Figure 117 Conductance maps of the surface can be acquired by measuring the output of the lockin at each pixel The scan speed has to be slowed down enough to give the lockin amplifier adequate time to reach its new equilibrium at each pixel The amount of time to spend at each pixel in the image should therefore be 2 3 times the value of the Time Constant setting of the lockin amplifier Conductance curves as a function of voltage can be acquired by reading the output of the lockin at each point along the voltage sweep as the current is also recorded For this the current and auxiliary channel should be checked in the
155. e same RHK Technology 75 Troy MI USA XPMPro User s Manual Initial Acquisition location A separate comment can also be entered for spectroscopy data compared to the image data If autonaming the files the scheme used to form the name is determined by the root and index entered in this tab This provides a nice facility to name spectroscopy files with a different name compared to image files After any changes are made be sure to click the Apply button so the changes take effect This window has some new controls and useful features related to spectroscopy All of the graph windows in XPMPro have a common set of controls but also some buttons and tabs that are specific to the window The first unique items noticed in this window are the start stop buttons present in the main ACQ toolbar If spectroscopy is to be acquired outside of an image scan the controls to start and stop it are the ones in this window As discussed above there are four choices for the spectroscopy to be acquired Use the dropdown list to choose what mode to perform when the acquisition is started The four choices are Present Position Relative Point Defined Line and Defined Region The manner of defining these was discussed above and they serve the same purpose The only difference between using the spectroscopy window to acquire the data and the image window is during this mode the tip moves directly from point to point and only acquires spectroscopy data It doe
156. e scan resumes the upper 2 Wm 59 v ov and lower parts of the image can form a before and after image of the surface If an image is expected to be loaded into the Navigation window for ease in locating the scan frame it is recommended that the Stop at End of Scan button be pressed in order to allow the frame to finish so a complete image is loaded If the stop immediately button is pressed and the scan halted then the image that is loaded into the Navigation Enter Curve numbers window will only be a partial frame For e g 1 4 6 12 The next set of buttons are used to change the scan direction from the x axis to the y axis C Average immediately scale the color mapping of each RTAW and saving an image These buttons are shown in Figure 49 The scan direction change will take effect at the start of the next scan frame if pressed while scanning is taking place If pressed po before the scan is started it will take effect and be seen on the first scan The button will appear depressed when scanning is along the y axis and appear raised when scanning is along the x axis The scan can also be switched by using the F7 shortcut key The scaling of all RTAW is like pressing the scale button on each individual RTAW but instead resets the mapping for all windows This will be the mapping in effect until the button is pressed again unless Autoscale Image in Figure 38 is checked In that case at the end of each scan frame all RTAWs wi
157. e sent to an external control unit like RHK s IWC100 or the ARIS 950 from Burleigh Each clock pulse triggers a single step so the rate of pulses will determine the velocity of the motor The parameters that effect this motor are displayed in Figure 28 The pulse width is the length of time the TTL trigger pulse is HI during an approach or retract step If this is too short the controller will miss it and not produce a step as the time increases the velocity of the motor will decrease The fast pulse width is the length of time the TTL trigger pulse is HI during fast in or fast out motion If this is too short the controller will miss it and not produce a step as the time increases the velocity of the motor will decrease Reverse direction should be changed if the motion during a computer approach is in the wrong direction and the tip is moving Approach Motors ax backwards Preset aaach direction can be Approach Control used to set the s conyo s s N Motors direction line high Kinetics before starting a mm series of pulses Walker Inchworm tm TTL Control otherwise the RHK PMC Pulse width 100us f MSCU direction line and Slide Fast pulse width 1000us first pulse will occur Phe Reverse direction Attocube piezo P RS re set direction O simultaneously Use this setting if a homebuilt TTL pulse controller is in use and there is a delay between the time the direction is set and when motion can start The s
158. e time the feedback loop is off or the delay times are not long enough and an artifact related to the addition of the transient signals as shown in Figure 112 is present If the voltage step is not sufficiently long to allow the transient to decay at each step the recorded data will have this accumulated error at each sweep value The three time parameters shown in Figure 110 should be adjusted in the window The first delay t is determined by the Spectrum delay setting The delay at each individual voltage step t2 is set using the Pre sample delay and the amount of time to spend averaging the current reading at each step t3 is determined by Samples point and Sampling time Figure 112 RHK Technology 112 Troy MI USA XPMPro User s Manual Data Acquisition Techniques A particularly useful feature is the ability to examine the individual I V curves acquired at each pixel Occasionally a large current spike may appear in a single curve because of some anomalous event This curve should therefore be eliminated from the rest of the acquired curves that are selected to average Many times the reading at a single voltage step along a single curve is so large that averaging the rest of the curves together still does not completely eliminate the effect but simply throwing that curve out and using the rest of the data to average away random noise can dramatically improve the signal noise ratio and the quality of the data Inc
159. e to be decreasing the tip sample separation and a positive value to pull the two apart When taking an F z curve if it is desired to push the tip in first while remaining in contact use a negative value for tip initial height If it is desirable to pull the tip off the surface before data acquisition commences then use a Deflection V positive value for tip initial height If the far distance region is still not flat continue to increase the positive limit value Repulsion until it is sufficiently flat After taking a few curves the initial and final values can be adjusted so the dynamic range of the Attraction curve allows the relevant features of the coupling decoupling to be seen Be careful not to push the tip into the surface by too large ofa value a limit that has a Z large negative value or Figure 121 the cantilever and surface Equilibrium RHK Technology 123 Troy MI USA XPMPro User s Manual Data Acquisition Techniques can be damaged by applying too much force Input a large enough value for the final height though so a large linear region is visible This is the most critical part of the curve that is needed An idealized F Z curve is shown in Figure 121 and can be understood as follows After the feedback loop is opened the tip is pulled back a large amount so it starts at large positive z A with no tip sample contact As z is decreased the tip suddenly is pulled towards the surface and makes
160. e tunneling current will only decrease as the tip is pulled away from the surface On the other side we also can increase the bias slope resolution by attenuating the bias at a place near the scan head For example our interesting area of the bias is only in a range of 0 1 V to 0 1V we can attenuate the bias to 1 at a place near the scan head Then input sample bias per monitor volt at Figure 4 and output units per D A volt at Figure 51 are set to 0 01 V These will increase the output accuracy Variable gap spectroscopy One of the main problems associated with acquiring I V spectroscopy particularly when studying semiconductors is sensitivity to very small currents In the case of semiconductors the current will approach zero as the bias nears either edge of the bandgap while for other materials the current will be small near zero bias This sensitivity limit can hinder the detection of features near the band edges or in the bandgap and even the precise location of the band edges themselves For example if the maximum detectable current is 100 nA a typical figure for most microscopes for a 16 bit ADC the least significant bit LSB will be equal to a value of 3 05 pA One way to increase the lowest detectable current is to increase the gain in the first stage amplifier which can be accomplished using the IVP 300 preamplifier from RHK This leads to an increased gain in the circuit but the maximum detectable current would then be equal to
161. e two signals that may change and if either one shifts dramatically the approach should stop An example is non contact AFM where the frequency can shift out of resonance spontaneously and the amplitude can decrease Since the feedback loop can only monitor one of these this feature provides a second level of tip protection A second signal can be sent to an Aux channel and be checked after each step A safe range can be designated and if the signal goes outside these boundaries the approach will Approach Motors Approach Dee Tip Retract and amp pproach ip Contro Motors Advance ramp speed 1 00 um s Offset piezo O oe Retract ramp speed 1 00 um s Zeontrol DAC NO CONNEC v ep t ba Inch Tip retract position D 00nm Walker RHK PMC Tip standby position 0 00 nm MSCU t A Slide Motion per D A volt 100nm 2 Phi Attocube piezo Open Loop Approach Advanced Approach test ramp speed 100 um s Use distance limits Secondary Tip i Retract limit 1 00um Advance limit 0 00 rm fS Z Offset Options Offset step mode O Offset step count 2 e gt Figure 19 screen shot of tip ramp tab be stopped and manual adjustments made sweep frequency again etc to return the monitored signal to its normal condition Select the signal to be monitored using the Channel entry box The output of the signal should be connected to this rear panel BNC on the SPM 100 Choose the type of Secondary conditi
162. ectral data see note below 4 text data 5 text annotate 6 Sequential data Page Source Type Identifies the page source type The defined types are given below 0 raw page processed page 2 calculated page 3 imported page Object List Count Stores the count of Objects stored after each the Page Index Minor Version 4 bytes stores the minor version of the file minor version 0 j Object List Stores the Page Index objects Currently we are storing Page Header Page Data Thumbnail Thumbnail header mcm After this begins a page of data Here is a simple diagram that outlines the layout of each page of RHK Technology 139 Troy MI USA XPMPro User s Manual Appendices data Page Header The description about the parameters bytes used and data type are given below Field Size Data type short Bytes used 2 Bytes Total size of page parameters excluding strings and Field Count itself FIELD SIZE 170 as of this version Each page starts with a variable of type short which gives you the size of the page structure Decrease the size by 2 and by reading that much byte from the file gives you the following parameters about that page Signature Data type WCHAR Bytes used 36 Bytes Signature is used to identify the version of the page Version format is as shown below To store version eighteen characters are used including null character and characters are in the Unicode format STiMag
163. ectro chemistry Gechem Not used at present 22 Discrete Spectroscopy Gdiscspec data X Y Coordinates Width and Height Data type structure RECT SIZE Bytes used 16 Bytes typedef struct tagRECT SIZE int m nX X corner int m nY Y corner int m nWidth Width int m nHeight Height RECT SIZE m nWidth The number of pixels or points in the X direction for an image page or the number of points per spectra line for line pages m nHeight The number of pixels or points in the Y direction for an image page or the number of spectra stored in the page Source Type Data type int Bytes used 4 Bytes Identifies the page source type The recognized types are given below 0 raw page processed page RHK Technology 142 Troy MI USA XPMPro User s Manual Appendices 2 calculated page 3 imported page Image Type Data type int Bytes used 4 Bytes Identifies what kind of data 1s represented by an image 0 normal image autocorrelation image Scan Data type int Bytes used 4 Bytes The scan direction direction of data acquisition in an image It is not meaningful for an I V curve for example On the computer screen X is horizontal and Y is vertical 0 right left 2 up 3 down Group ID Data type int Bytes used 4 Bytes An Integer value to identify the pages acquired during an acquisition All the pages acquired during an acquisition will get the same group id Page Data Size Data t
164. ed j Image Drift The following are the structure elements SImageDrift 1 float m fTime float m fdX float m fdY float m fCumulativedX float m fCumulativedY float m fXRate Vector drift X Rate float m fYRate Vector Drift Y Rate j Tip track Data Tip Track header and Tip Track data During Tip Track the track details are stored into the loaded image in NAV An array of StipTrackInfo structure is stored as the track data STipTrackInfoHeader m_unTipTrackInfoCount gives the number of elements in the STipTrackInfo array For structure details STipTrackInfoHeader and STipTrackInfo The offset and size is of the structures is saved in the Page Header Objects Tip Track Header and Tip Track Data respectively PRM Data PRM Data used for the current acquisition is stored into the SM4 in compressed format PRM header and PRM data are written after writing all of the page data The PRM header contains the following members We are using Zlib for the data compression SPRMHeader 1 int m nCompressionFlag 0 Not compressed 1 Compressed long m IDataSize Original Data size Before compression used for decompression long m ICompressionSize Compressed buffer size j The user has the option to select the PRM data stored in the SM4 file While selecting the RHK Technology 150 Troy MI USA XPMPro User s Manual Appendices PRM data from SM4 it will be saved into the application path with the SM4 file
165. ensional image of temperature because it varies so slowly the same value would be recorded at nearly every pixel The voltage can later be displayed using the Page Info command discussed in a later chapter The pixel resolution is also selected here The Ganged button can be Scan Settings checked to acquire images with an T equal amount of pixels and lines In Options Save Input this case only the Points per line Record One can be selected and Lines per necord Une S ga Frame is automatically set to the Points Per Line 256 Ganged equal value If separate is checked Lines Per Frame Separate then the Points per Line and Lines per Frame can be chosen Image Status independently Both values are Topography A D Range 10 to 10 Volt v restricted to numbers that are a Cist O 0 AanDRange 0to 10 Volts w power of two and range from 8x8 to 13 8192x8192 Aux O C A D Range 10 to 10 Voli v Aux2 O C A D Range 10 to 10 Volt vl Record one scan direction should poem aiae be checked if the data is only pu F Fl AD Range 10 to 10 Vo needed during the forward scan Aux 4 O O AMD Range 10to 10Volts w across the surface This can save Aux 5 O EF AD Range 10 to 10Vok time and file size by eliminating data pages and also the amount of Aux 6 Cl L A D Range 10 to 10 Volts time it requires to take data while Al rate O E Counterl Time 100ms moving across
166. enter of rotation Please note changing the offset also changes the offset for the current position The result will be a line draw to the current position at the new offset This line draw will be done using the current line parameters Command code SET OFFSET REL Command name in Litho files sor Number of parameters to send 2 Parameters float deltaXoffs float deltaY offs Examples 30 0 20 0 so Notes This moves the offset of the line draw coordinate system in respect to the piezo coordinate system The offset coordinates are given in the unrotated coordinate system offset moves the center of rotation relative to the current offset position Please note changing the offset also changes the offset for the current position The result will be a line draw to the current position at the new offset This line draw will be done using the current line parameters Command code SET SPEC WAIT TIME Command name in Litho files sswt Number of parameters to send Parameters float spectro wait time Notes This determines the wait time at each spectro position in table as well as in array mode At a RHK Technology 169 Troy MI USA XPMPro User s Manual Appendices spectro position FLAG A is set When the time expires FLAG A is cleared automatically for positive wait times For negative wait times FLAG B has to be put high in order to make the scanner continue Command code GET TEST Command name in Litho files debug
167. epper motor driver unit built by RHK Each TTL line controls one of the coils in the motor A stepper motor can also be controlled by a customer built stepper motor driver interface identical to the AIM MI A separate high current drive module is required for each coil and it must accept a TTL pulse input to trigger the current flow through the coil Alternatively the stepper motor can be driven using a standard stepper motor control chip which accepts pulse and direction TTL inputs In this case the approach is configured using a different selection and the parameters are set using a different tab discussed below Figure 23 Step motor control tab The standard stepper motor control when interfaced to an AIM MI or equivalent is shown in Figure 23 Some microscopes use a clockwise rotation for approach and others use a counterclockwise rotation Use CW Tip Approach to match the individual scan head to the proper rotation for approach To take smaller steps during any motion check the box Use half steps which will mean there are 8 steps taken for one rotation instead of only 4 A second type of RHK Technology 38 Troy MI USA XPMPro User s Manual Coarse Approach stepper motor is considered 2 phase because it requires two coils to be energized simultaneously for the motor to turn properly This motor is used in conjunction with an AIM NSOM from RHK when connected to a Nanonics NSOM head and an AIM DI when operating a Bioscope In this case
168. er not touch trace is set to a value different from zero this command will not configure and thus not reset the tracking trace buffer in external memory This allows to re configure the feature tracking without having to pick up the data of a previous run Using an unconfigured tracking buffer means crashing the DSP board Command code GET TRACKING DATA Command name in Litho files gtd Number of parameters to send Parameters u32how many Notes This command reads the feature tracking trace out of the scan board external memory It works exactly the same as READ ADC BUFFER except that the data that is sent back is in 32 bits IEEE float format Command code PUSH SCALE Command name in Litho files pushs Number of parameters to send Parameters float new scale factor Notes This command scales the subsequent offset and drawing operations using new scale factor The factor new scale factor also gets put onto a 16 entries deep stack that stores the 15 previous pushs scaling factors When more than 16 pushs operations are done without clearing the stack the first factor will get lost first Command code POP SCALE Command name in Litho files pops Number of parameters to send 0 Notes This command pops the scaling stack puts the second entry into the first position etc This way the scaling of a previous pushs can be restored At initialization the scaling factor is 1 0 When the stack gets underflown it will produce
169. er A Sie 25h le O Modi Scan Ares laa the ones acquired over a uniform section of LO meme the surface The downside to this method 1s Bias X 000m taking data at every pixel can be very slow elojo m and the image is susceptible to effects from ARS af Add Spec Location T t m Q Drag Move Tip a i Scan Speed e e kb Line Time 139 ms E Spec Location thermal drift in the microscope It also D produces a large file with data that will not be Save analyzed IM Tip Track Y To optimize the data without spending sucus v excessive amount of time acquiring curves at Figure 59 Point spectroscopy location every pixel the interactive choice can be used The specific locations should be manually defined using the NAV window and during scanning when the tip reaches one of the predefined locations the motion is stopped and the curves are acquired The tool used for this 1s the Spec Location tab There is a drop down list for the five options and as soon as one is selected the mouse action changes to Add Spec Location An example of how to use this feature is illustrated in Figure 59 Imagine there is an image loaded into the window that has an interesting feature in the upper left corner The Mouse Action needs to be changed to Add Spec Location if it is already not selected and whenever the mouse button is clicked inside the window the location is stored and a sma
170. er incrementing RHK Technology 83 Troy MI USA XPMPro User s Manual Data Analysis and Image Processing Analysis and Processing RHK Technology 84 Troy MI USA XPMPro User s Manual Data Analysis and Image Processing The third major component of XPMPro is the Data Analysis window which can be opened by clicking on the DAW button of the main launcher Multiple DAWs can be open at the same time to allow a large amount of data to be displayed and analyzed simultaneously Each time a DAW is clicked another window will open Each individual window will be titled Data Analysis where is a wildcard character representing a number When the window is first opened it will be blank A Browser window can be opened by clicking the first button in the toolbar or choosing File Browse The browser window will have a tree view of all known drives on the left side and a data viewer on the right as displayed in Figure 68 The tree view has three predefined directories that are accessible with a single click The first one is the Browser Path which should be set to the directory which contains all subdirectories Data Analysis 1 JE E File Edit View Options Window He E 28 E E Browser Path C Documents and Settir B Save Path C TEMP 3 My Computer A El e C 3D Be Pages 0 Figure 68 of data For example one organizational structure would be to create a directory
171. er of strings in the current page Each string is written to file by first writing the string length then the string So when you read first read a short value which gives you the string length then read that much bytes which represents the string strLabel String that goes on the top of the plot window like Current Image strSystemText A comment describing the data strSessionText General session comments strUserText User comments strPath Path and name of the SM4 file which holds the page strDate Stores the date at which data is acquired strTime Stores the time at which data is acquired strXUnits Physical units of that axis like m or A strY Units Physical units of that axis strZUnits Physical units of that axis strXLabel strY Label strStatusChannelText Status channel text strCompletedLineCount Completed line count info This string contains the last saved line count for an image data page For all other pages this value will be zero StrOverSamplingCount This string contains the Oversampling count for image data pages For all other pages this value will be zero StrSlicedVoltage The voltage at which the sliced image is created from the spectra RHK Technology 145 Troy MI USA XPMPro User s Manual Appendices page This string will be empty for pages other than sliced image pages StrPLLProStatus This string contains the PLLPro status text if the operating mode is sele
172. er will be configured with the IP address assigned to the PMC100 at RHK The most likely address will be somewhere between 192 168 10 1 and 192 168 10 254 For proper synchronization the amount of time needed for one step to be taken by the PMC100 should be entered in the Step Time box The actual time depends on the characteristics of the motor and the settings for the Sweep Period in the external control program A typical time is 1 millisecond RHK Technology 41 Troy MI USA XPMPro User s Manual Coarse Approach PMC Configuration Settings 21x Direction Amplitude Sweep Time Steps per Time between Invert Motori Display on Control Dialog Iv i MER Motoa Display on Control Dialog v j Motors Display on Control Dialog Iv Approach Channel 21 7 Close Figure 27 PMC configure setting panel To configure the output voltages or which buttons to display in the window choose the Config Settings button An additional window as shown in Figure 27 will open This can be used as a substitute for the standalone PMC100 program delivered with the electronics when trying to label channels or alter their output parameters After changing the parameters write them to the PMC100 EEPROM by clicking the Apply button This can also be used to change the appearance of the window shown in Figure31 by showing more groups of bu
173. ered by dragging the slider in the column to the right of the circle All the way to the bottom makes the color as bright as possible and to the top makes the color black As each endpoint is dragged the Value column changes in real time as well as the actual color table shown on the right side of the window To move through color space in the opposite direction check the rotation radio button Clockwise Anticlockwise To enter specific values from a table known ahead of time type the HSV coefficients directly into the entry boxes for the start and end color Once the table to the right looks ideal each color table can be named and saved by clicking the Save As New Table button to save the table with a new name and a dialog will then popup to enter a name for the color table Which color table to be used for image display is determined at the Color Mapping tab Figure 45 Three kinds of the correspondence between the color table and data value are design in our software Linear Gamma and Double gamma The X axis of the gray area represents the color value which is shown below it The Y axis represents the display values The yellow line in the gray area represents the corresponding between the color table and the display value When we RHK Technology 51 Troy MI USA XPMPro User s Manual Initial Acquisition select the Gamma or double Gamma as the display mode we can move the gray slide at the right of this area to change the c
174. es are related The discussion here is referring more to alignment and orientation of atomic scale features when the drift rate is more than the feature size over the time it takes to acquire the two images RHK Technology 79 Troy MI USA XPMPro User s Manual Initial Acquisition XPMPro allows the same area of the surface to be scanned up to four times under different conditions In this imaging mode eight individual images would be acquired four sets of conditions 2 scan directions and stored in a single file The tab to configure this mode is contained in the Settings Spectroscopy window and is named Multi as shown in Figure 65 To activate this data acquisition routine during scanning the 7 Spectroscopy Ax Multi Volt toolbar box Multi Parameter Imaging S Point Specti Figure 58 should be breui Control changed from MPI Off to the od wee desired mode The two most a Fags Vokes common choices would be Time Spec First 100v Disable Feedback 5 Spectrum d E i either multi page or dynamic Spectrum 3 e LIN 7 lith h x b th th Spectrum 4 Third 052V e CI During Third Voltage l ograp 1y in DO Cases d Scope Fourth 059v 4 C During Fourth Voltage same section of the surface is Td scanned repeated times as Voltage Count 4 4 Voltage change delay 200ms f s Control Pra j described above In an Teneli Output units y Output units per D A volt 1 00v fe n Handshake Ramp Speed 0y s 4
175. even QOMm Cl pal x Image Line i g Curves Layout Cursor Mode O i OE rn o E P IDEE zs Pane Show Primary gt ph ON JI un Topography y E La if CASU SN 1 Ww 0 ee ici T RN 3 te SUPE ESSE Sere a E Cuves 2 t VN i l z i e 4 2 lv ial Topography None y T _ H Cuves L m Topography 4 a us Cuves 5 i 3 o 200 150 100 5 distance nm Line Number 84 a Figure 44 XY graph window display the same channel more than once in the window In the status bar at the bottom is the information of the current line number of the image that is displayed This will increment from 0 up to the last line in the image 256 512 etc and then reset to 0 when the scan frame starts over again A separate section of the status bar will display a message that updates periodically if the line time exceeds 2 5 seconds because the time to acquire the forward and reverse line will trigger the behavior of all graph windows Any time the window date update is longer then 5 seconds a message is produced to provide the user feedback that the program is busy The width of each status bar section can also be changed by dragging the vertical separator bar between sections RHK Technology 59 Troy MI USA XPMPro User s Manual Initial Acquisition Layout tab General prese
176. f desired To have a section taken from both the forward and reverse scan directions and plotted on the same graph check the box labeled Dual Scan Cross Sections A label can be added to the endpoint of the line by typing in the label box and pressing enter Multiple sections can be taken from the image and each displayed with a different color and label by making the appropriate changes to the label box and color picker before pressing the Section button to create the XY plot To clear all labels and section lines from the image press the Clear button RHK Technology 92 Troy MI USA XPMPro User s Manual Data Analysis and Image Processing When the line is drawn across the image to extract the profile it has three handles attached The endpoints can be dragged to change the length while the orientation of the line does not change The center handle can be grabbed to move the location of the line without changing the length or angle A great benefit of this anis is after ihe 1 a 2 p om ups d Section button is clicked the handle can be 1 2 1 Divide by 6 to grabbed and the line moved to another location to 0 1 0 e ps extract a second profile The line will be exactly 3 4 3 9 point array parallel and the same length as the previous Divide by 36 to section so taking sections in parallel rows of 4 8 4 mommalizo atoms is simple 3 4 3 There are three different choices for line 1 1211 orientation and this is chosen by checkin
177. f the ACQ window contains a status bar with a great deal of information The appearance of this bar can be altered to each user s taste Various panes can be hidden or they can be highlighted by changing the colors used within that pane Each one can also be resized to fit the amount of text contained in that part To customize the colors right click on the bar and choose Customize to open the window displayed in Figure 12 To hide any panel un check the box on the left side next to the name The text Customize Status Bar and background colors can be adjusted to E highlight specific panes The DSP HM E Offline Online is pre configured to O IAS change background as a specific example F Ju E LL of visually displaying the status using a El Loop Hold State ame d color clue for knowing with a glance if I OFF Boss or communication is working Individual L DN Bb MN imaging modes are also colored DSP State differently so it is simple to realize what i Offline beaut MMM acquisition is taking place without ni a Bout D specifically reading the real text 7 Memory Usage contained in the status bar Normal Wi Default Default Instead of opening the main window a o a each pane can be individually hidden and Y ACO Time E Defaut Default configured by right clicking in that Iv Data Size W Default Default particular pane and choosing to hide set A oiu cus Wi Default Delia E the text color or set the background mao a A ia A c
178. f the magnitude of the bias After the current is sampled for a fixed amount of time the bias is changed to the next point on the ramp The current is read samples point times after the initial pre sample delay t2 has passed The small AV at each voltage step induces a smaller but still significant transient signal on the current Making the sweep rate slower will decrease the amplitude of the transient present at each voltage step but every point along the voltage ramp will have this small unavoidable transient signal After the current has been read at the last voltage step another usually large AV is applied to return the bias to the feedback condition which in turn induces a large transient The loop is then turned on again and the tip moved to the next pixel location RHK Technology 111 Troy MI USA XPMPro User s Manual Data Acquisition Techniques Because of these undesirable transient signals present in the current sensing circuit a series of fixed delay times are entered into the control window used to setup peoa the I V parameters This window is reproduced in Figure 111 It is very important to carefully study the Point Spectroscopy General Control Control loop Feedback off Monitor Test Data Input response of the current signal to the Output None Adv Modes E voltage changes in order to make db O Variable Gap I Mode sure the delay times are long E Spectrum 3 O General Dual Du
179. for autonaming save path automatic saving etc can be set independently of the image data This provides a nice way to organize data by type in separate folders instead of a mix of images spectroscopy FFT oscilloscope traces contained in one directory However if a user prefers to have all data in Curves Laon Cursor Mode Nis Pot Fie Save one location this can still be achieved by setting all of the E save directories to the same location After any file tab tommee detn E changes have been made be sure to click the Apply button SO they take effect us sdb SS Note that there can only be one Noise Power spectrum TES visible at any time in the acquisition window Therefore FFT por the curve display control is grayed out and both values are peu equal to one Oscilloscope Many times it is advantageous to look at signals in the time domain instead of the frequency domain A better feel for the amplitude of the signal as well as quicker viewing of the data an FFT cannot be displayed until the full length of data has been acquired are two reasons worth considering XPMPro can acquire and display data Figure 64 Saving tab of Noise power jn the time domain Most of the time this will be done as a diagnostic to check signal levels but there are also a number of experiments where recording a signal as a function of time either as a response to a stimulus or to have a permanent record of the syste
180. for the same feature If alternating slow scan is ON the pattern is matched every other scan frame only for the images taken from top to bottom Small offsets are then applied by the DSP board in order to maintain the same relative position within the scan frame This means the feature will not appear to move over the surface because the scan frame is shifted between each image The size of the feature and also the size of the search area can both be set to any value as long as the area does not fall outside the current scan area using the window accessed via the Drift window Figure 127 in the Settings menu For RHK Technology 127 Troy MI USA XPMPro User s Manual Data Acquisition Techniques example if the search area is defined to be 35 pixels then the center of the area cannot be within 18 pixels of any edge Tracking is activated by clicking on the tracking icon within the acquisition window The search area and feature size are both square in shape so the term radius is a bit of a misnomer but the size specified in the window is doubled to create the real feature size The value can be specified in physical units or pixels by utilizing the Incr in Pixels check box The Reference Radius is used to store the core feature which is ten compared to subsequent scans The Search Range is the section of the image where the stored feature is fit to each part and a quality of fit calculated The highest value is then determined to be the
181. formation to the scan board if the IP address of the board is known Auxiliary programs to ease this will be included in future software distributions Here are the list of valid commands that the scan board can interpret at this time float means 32 bit floating point 432 means 32 bit unsigned integer Do not do any big little endian conversion the network chips take care of that Command code IGNORE SWITCH Command name in Litho files is Number of parameters to send Parameters u32 which Examples ignore speed front panel switch is 1 consider speed front panel switch is 0 Notes As soon as the speed gets set once by the control computer the front panel line time and line time multiplier switch no longer control the scan motion speed However the switch settings can be read at any time by the control computer using the GET STATUS command Command code WRITE Z DAC Command name in Litho files wzdac Number of parameters to send Parameters float output voltage Notes This command sets the output voltage of the Z DAC on the scan board The parameter output voltage is clipped at 10 V Command code SET Z SCALE Command name in Litho files szs Number of parameters to send Parameters float Z Sensitivity Notes This command define the meaning of the physical units for the parameter of WRITE Z DAC and for the Z sweep function s Z sensitivity is a sensitivity with the unit PhyUnit DAC output Volt RHK Technolo
182. g the 1343 1 25 point array appropriate radio button When XY is clicked the 4 g 4 5 Divide by 56 to line can be drawn at any angle and any orientation normalize When Horizontal is checked the line is exactly 1343 1 along the x axis of the image and by default across the width of the scan This is useful to Figure 77 extract the data along the fast scan direction so individual line scans can be plotted The length can be changed by grabbing the endpoints just like the XY line If Vertical is checked the line is locked to be exactly along the y axis If the scan took place along the y axis this is used to extract individual line scans The horizontal and vertical choices could also be used to extract data across the fast scan direction demo5 10 2 Topography a Image Cross v Dual scan Related page section points L Y cross sections Cleese sections Ol Section Label v mmm O Horizontal O Vertical OxY Scan Size 19 96 nm Cursor Mode Section View d 22 77 nm z 76 73 pm 142 1 Active View Original Image Figure 78 The next selection is angle lattice An image can be analyzed to obtain the unit cell dimensions and also visualize how much drift and creep are in the image by using this selection A small set of axes are placed in the center of the image and the two endpoints can be moved until they are located directly on top of a relevant crystallographic feature Figure 79 The origi
183. ges of the 2D FFT The FFT provides a spatial power spectrum of the data and therefore provides information on the spacing of the lattice in atomic resolution images Additionally this can show the presence Figure 89 RHK Technology 98 Troy MI USA XPMPro User s Manual Data Analysis and Image Processing of any non linear effects in the data since the orientation of the peaks in the 2D FFT will also reflect the shape of the unit cell For example an image of highly oriented pyrolytic graphite HOPG has a hexagonal unit cell and the FFT peaks should also be hexagonal in shape and centered around zero with no distortion The unit cell of a 2x1 reconstruction of S1 001 will be rectangular so the FFT of this data would also show a rectangular array of peaks The local slope of the surface in the x or y direction can be calculated using Image X slope and Image Y Slope and Image Gradient The calculation is also performed on the entire image regardless of whether a smaller region has been selected or not A one dimensional local Savitzky Golay algorithm is used for the calculation The pixel width to use when calculating the local slope is determined by Image Slope Points entered in the window shown in Figure 89 The Calculate button can be pressed and the result will be displayed in a separate window To compare results using different widths change the value and press calculate again and both results will be visible in sepa
184. gether is chosen using the Approach channel setting In most cases this will be channel 3 which is the first z channel Refer to the MSCU manual to find out which channel is connected to the z coarse motor If the approach moves in the wrong direction change the setting of the Invert approach motion check box To move any of the 8 motors interactively click on Open XYZ Control in the main NAV window to open the control window which contains a set of buttons for all motor channels The number of steps moved each time one of the buttons is clicked is set using the Steps per click parameter To have XPMPro initialize the MSCU when the program starts check the MSCU connected box so serial communication is established when XPMPro starts RHK Technology 39 Troy MI USA XPMPro User s Manual Coarse Approach If using the serial communication then the voltage value for the channel can be set by the Step voltage box Larger steps will occur when this voltage is increased The Step rate is used to determine the number of steps to take per second A larger number will mean faster motion The Move channel and Move steps Approach Motors can be used to fi d Approach move a txe Approach Control number of steps Tip Control diatel Motors Dmicron MSCU Control carate y Kinetics Step Voltage 400 v Move channel 1 4 Choose the Wavel channel and Wave2 Step Rate 1000 steps Move steps 0 4 Nano enter a nonzero View value for
185. gy 129 Troy MI USA XPMPro User s Manual Data Acquisition Techniques separate piezo element is used for Z Scan and Z Offset then usually it is advantageous to sum the output of the auxiliary loop into Z Offset to allow more of the maximum output voltage available to the z scan signal itself The advantage to utilizing the second feedback loop is increased resolution because the correction is applied in hardware before the topography signal is sampled The same argument outlined in the SPM 100 manual concerning hardware slope compensation is applicable here If the drift is quite large then to keep from saturating the ADC during the course of a single scan the ADC gain must be decreased which effectively decreases the Aux Feedback Config resolution If the vertical surface features are only 0 1 nm in extent but Aux Feedback Mode nn m the total z drift is 200 nm during a single image for example while Aux Feedback Configuration heating or co oling the sample the p gri ARER Invert Units Input Volt 1 00m ADC gain must be adjusted so the 22220 During Imaging CJ Unis outputVok 500 nm dynamic range of the topographic Reenable aux feedback 7 Feedback Unke signal does not exceed 200 nm which a 7 ux Monitor leads to a least significant bit of 0 03 osos Disabled y Pen up down output C angstroms However with the second dE feedback loop slowly correcting for the Monitormaximum 500V 23
186. gy 152 Troy MI USA XPMPro User s Manual Appendices Command code Z SET SPEED Command name in Litho files zss Number of parameters to send Parameters float Z Sweep Speed Notes This command sets the sweep speed for Z DAC sweeps The unit of Z Speed is Physunits per second Command code ABORT Z SWEEP Command name in Litho files abortz Number of parameters to send 0 Notes This command aborts a running Z sweep Command code SWEEP Z ABSOLUTE Command name in Litho files sza Number of parameters to send Parameters float Z Destination Notes This command sweeps the ZDAC output to the Z Destination value The sweep parameters are defined by the SETUP Z SWEEP command The Z Destination value has to be given in Physical Units as they were defined by the SET Z SCALE command Command code SETUP Z SWEEP Command name in Litho files setupz Number of parameters to send 10 Parameters u32 Z Sweep Flags u32 HSample_ groups u32 samples_ per group u32 ThresholdMode u32 AD_Channels float Z Sweep Speed float PreSampleDelay float TimePerSample float UpperThresholdV alue float LowerThresholdValue Notes This command sets the control parameters for all subsequent Z sweeps It also initializes the A D subsystem on the scan board to take data if any channels are set up in the 4D_Channels parameter The parameters mean RHK Technology 153 Troy MI USA XPMPro User s Manual Appendices Z Sweep Flags T
187. hake timeout 1000s e On a Revision 8 5 SPM100 the TTL connections are pin 9 input and pin 15 output on the rear panel DIO connector When using an adapter box k gt with any SPM100 prior to version 8 5 Lok com Lae the TTL In and TTL Out are explicitly labeled Figure 126 Handshaking is configured using the window shown in Figure 126 The handshaking channel needs to be chosen for both the input signal and output signal Unless the DT335 TTL board is present the only option that can be used is User TTL Out and User TTL In for each parameter If the DT335 board is present this adds extra TTL channels and one of them can be configured as the handshaking line if desired These are the ones designated Line A or B The flexibility in the software allows one to define the start signal sent to the equipment as either TTL HI or TTL LO This is accomplished by using the Active High and Active Low radio buttons contained in both the input and output sections To prevent a completely stuck acquisition it is a good idea to configure a timeout so the software does not wait forever for a TTL signal that is not going to be returned This is entered in the Hardware Timeout parameter Lateral drift correction XPMPro can automatically track a feature on the surface and correct for any drift due to thermal or piezoelectric effects A distinctive feature on the surface should be selected and after each image acquisition an area of the scan is searched
188. hat location In the example shown the voltage ramp was repeated 16 times at each pixel location and 16 separate curves were then acquired and stored at each spectroscopy location RHK Technology 94 Troy MI USA XPMPro User s Manual Data Analysis and Image Processing To gather all curves acquired over a feature or in a region of the surface a box can be drawn on the image using the standard drawing tool that encloses a region of spectroscopy locations By clicking the By Rect button all curves inside this region are plotted on a separate x y graph anem window They can then be averaged together for analysis AL PSPHMATTIA Toperaphy Woks With a plot on the screen displaying spectroscopy data individual curves can be removed by using the Select lines menu option If for example one curve in a family of 24 curves had a single anomalous current spike the dataset should be eliminated so the average is not skewed at the one voltage value from the isolated large current reading As the left Tues c REM igure 80 and right arrow toolbar buttons are clicked a different curve is highlighted with a thicker line and the curve number is displayed at the bottom of the window Individual curves can then be hidden from view by opening the XY Line Format dialog box clicking on the channel button to open the line draw dialog box This is where colors can be changed and line thicknesses
189. he Cursor Mode submenu found in the shortcut menu Each individual image can be in any cursor mode at the same time However when an image is in one of the cursor modes some analysis and processing functions become disabled This is easily recognizable by noting the menu options become grayed out and non selectable RHK Technology 9 Troy MI USA XPMPro User s Manual Data Analysis and Image Processing The first cursor mode choice is Single yj demos 10 1 Topography wow Point This can be used to get a quick reading of which pixel a particular feature is located at and also what its height is As the cursor is moved over the image the status bar at the bottom of the window frame displays the pixel value and the height A fixed location can be placed on the image by clicking the mouse and a cross will appear there As the mouse is moved in the image the distance between the cross and the current location is displayed in the status bar accompanied by the angle of the line between the two points relative to the x axis The vertical height between the two points is also shown The second selection Point line is used to obtain measurements of lateral features When the mouse is clicked in the image a line appears with two Scan Size 20 0 nm Cursor Mode Point Line d 19 6 nm dz 83 1 pm 6 157 3 Activ endpoints Each can be moved Figure 76 individually and as this is done the length angle and vertical height between
190. he reliability of the spectroscopic data is to always make sure the nominal feedback conditions are part of the sweep Thus the feedback signal channel if acquired should always be equal to the setpoint when the bias equals the tunneling bias in I V curves or when z 0 since this is the height over the surface when the feedback loop is opened If data is acquired that does not agree with this expectation then the feedback loop is not active long enough and the data has not been acquired with the tip at its nominal position while taking images Figure 54 Spectroscopy setting advance tab While taking data there are times that the voltage sweep may cause a large increase in a signal which can adversely damage the tip and or the sample XPMPro can monitor any channel and take necessary action if the channel satisfies a test condition If monitor mode is activated in the control tab the test condition to satisfy is chosen in the Monitor response parameter Valid choices for the test condition are Safe between limits Safe outside limits Safe below maximum and Safe above minimum The action to take when the test condition is triggered is chosen in the Monitor response parameter Valid choices are Stop spectrum ramp which means the current voltage ramp is halted the remaining points in the spectrum are set to zero and the output returns to zero The next curve in the set is then acquired Stop spectrum group performs all the steps described previousl
191. hen every file is written to the current save path using the filename formed by the root and index parameters and will never be overwritten by XPMPro If Scan Autosave is not on but the image dataSAFE check box is marked then the complete scan will still be saved to the temp path and can be recovered until overwritten By using the DAW file browser any file can be transferred to the save directory by right clicking on the name and choosing Move File This will be covered in more detail later Input tab To select which channels should be acquired during a scan across the surface the Input tab Figure 11 is used Any channel that has a check mark in the Image column will be sampled at each pixel to form an image Note that the names of the channels will be whatever was entered in the Operating Modes Define tab discussed above If an experiment is taking place where it is desirable to record a signal that does not vary any during the time scale of the scan then the check box in the Status column should be checked When this is done the channel is measured once at the end of the scan frame and the data is stored in the file header for a permanent record of the signal level during the image The most common example of this would be to record the RHK Technology 22 Troy MI USA XPMPro 2 0 User s Manual Initial Setup analog output of a temperature meter so the actual temperature is recorded for that data set There is no need to form a a two dim
192. herwise it is the start of the next page If the PageType is image data then the next short value gives you the size of structure SColorInfo Display related data and we have to read that structure that is used for display related things ColorInfoList Count gives the size of ColorInfo list The Structure is given below RHK Technology 148 Troy MI USA XPMPro User s Manual Appendices typedef struct tagsColorInfo short m_nStructSize sHSVColor m sHSVsStart sHSVColor m HSVEnd int m nClrDirection int m nNumEntries float m fStartSlidePos float m fEndSlidePos SColorTransform m sTranform SColorInfo typedef struct tagsHS V Color float m fH float m fS float m fV sHSV Color struct SColorTransform 1 FLOAT m fGamma FLOAT m fAlpha FLOAT m fXStart FLOAT m fXStop FLOAT m fYStart FLOAT m fYStop INT m nMappingMode BOOL m binvert j Drift Data If the Page Data Type is image_data then the image drift header and image drift is stored after the color info list If the drift is disabled then this structure will be filled with default values The offset and structure size is stored in the Image drift header and Image Drift data objects respectively Image Drift header Struct SimageDriftHeader RHK Technology Troy MI USA XPMPro User s Manual Appendices FILETIME m ftStartTime Image start time int m nDriftOption 0 disbled 1 enabled 2 vector drift enabl
193. his is a set of flags that affect the operation of the Z sweep and the way the Z sweep setup works The meaning of the bits is Bit 0 DSP Opens Feedback 0 No 1 Yes Bit 1 Reconfig DSP ADC 0 No 1 Yes The DSP Opens Feedback is not implemented in versions lt 0x2c and requires a Revision 3 DSP scan board The Reconfig DSP ADC tells whether this command should reset and re configure the DSP A D buffers If set the data buffers will be emptied If cleared previous data is held in the buffers Note that AD Channels can still be changed from previous data acquisitions without this bit set Sample groups This tells at how many positions along the line samples will be taken Please note that the begin and the end positions of the sweep are sample positions If you don t want A D conversions taken during Z sweeps set this parameter to zero Zero is the default value for this u32 samples per group This tells how many triggers get issued to the SPM1000 data acquisition board at each sample position This trigger is also available on pin 3 of the DBI5 connector of the STM100 VSCAN 100 In order to use these triggers to take samples on the two ADCs on the board you need to connect this pin 3 to pin 6 of the same connector u32 ThresholdMode A value different from 0 in this parameter will cause the sweep to stop when the A D on the selected scan board A D channels exceeds one of the values specified in the ThresholdValue parameter When bit 0 of th
194. ic section presents various measures of performance and may provide valuable troubleshooting information if the program halts intermittently or other problems appear The values should be recorded before contacting technical support as they can help diagnose the problems If communication problems appear that don t seem to make any sense after double checking the cables and IP Addresses try checking the Use Reduced Packet Size box Certain Virtual Private Network VPN and secure communications software automatically split TCP IP packets into smaller pieces in order to encrypt them Since the SPM100 and XPMPro are expecting to communicate in packets of a fixed size the smaller packets will not work between the two If this gets checked and works the only trade off is the number of arbitrarily defined spectroscopy points that can be used within any single image is reduced RHK Technology 13 Troy MI USA XPMPro 2 0 User s Manual Initial Setup Gains tab The preamp gain and high voltage amplifier gains are set in the Gains tab Figure 4 Internally the signals are all limited to 10 V To properly calibrate and record all settings XPMPro must know the physical signal with respect to the internal voltage The proper conversion factor is entered here For a high voltage unit where the maximum output is 215 V the gains should all be set to 21 5 For a low voltage unit the gains are equal to 13 Other factors are possible Conf
195. igma In this mode a statistic calculation on the data is performed and the standard deviation and median are calculated The displayed data are in the range of Z include Sigma standard deviation value chosen above The next function is the autoscale There is a short cut button to this function on the toolbar which is next to the image manipulation dialog button When autoscale is checked Color 0 will be set to the lowest ADC value and color 256 will be set to the highest ADC value Here we have 3 choice of autoscale None means that we do nothing on autoscale Line by line means software will autoscale the display after it obtain every line mage by image means that the software will autoscale after it obtain the whole image If we use the short cut button it means that the autoscaling of the image will occur at the time of the mouse click To automatically rescale all open RTAWs press the F5 key or use the ruler button in the toolbar of the main ACQ window There are another two tabs on this window Plot orientation and default At the Plot orientation tab the light source direction can be defined when the light shade color map mode is selected At the default the default scan window parameters are defined for example the size of the image display window scale bar color scale and etc The last two buttons on the toolbar are for autodrift correction We will talk discuss this function RHK Technology 53 Troy MI USA XPM
196. igure Hardware Settings ax depending on the setup of the TEREE head Whatever voltage is DSP applied to the head compared to Gains the internal 10 V signal needs to ahead ERA b tered here Two other Scanner X scan volts monitor volt 13 00 4 FEMME d Feedback common situations are using the Adv Feedback seanvols montorvok 1300 ES SPM100 with the RHK HVA900 Z scan volts monitor volt 13 00 Y 2 which has a maximum output of 450 V In this case the gains are 45 The second is if the optional 0 10 V board is installed which is Y offset volts monitor volt 13 00 Y used to drive a closed loop stage from a third party the correct value here is 0 5 Newer SPM100s have the gain of the high voltage outputs X offset volts monitor volt 13 00 Y gt gt Z offset volts monitor volt 13 00 Y gt Sample bias per monitor volt 1 00 V gt STM current per monitor volt 10 00 n gt i x programmed into the EEPROM of Pre amp gain Volt Current 1e 008 Y the unit If no modifications have been performed to the unit since it left the factory the Use values stored in SPM100 can be checked This prevents the gain Figure 4 Screen shot of Gain tab values from being changed accidentally which would subsequently change the scan head calibration Unless the sample bias output from the SPM100 is externally amplified or attenuated the gain of the bias should always be
197. ile at the folder that we want Explore folders Shortcuts to the working folder and support folders are added to the options The install folder of XPMPro 2 0 can be easily found by these shortcuts Also the electronic version of the supporting files also can be easily found by these shortcut RHK Technology 11 Troy MI USA XPMPro 2 0 User s Manual Initial Setup ACQ window Ele View Acquire Settings Windows Help gt UO isis z axe gt me or far on mS S Tip Retract c EGGpIHGIdION GSEIOMUINE PrmiName Kens AcqTime 3mins DataSize 4 01 1 Scansize 242 nm Scan Count Figure 2 Screen shot of real time acquisition window Open the acquisition window by clicking on the ACQ button The window will appear as shown in Figure 2 The first important step is to enter information about the scan head and the SPM100 which is located at setting gt configure hardware At hardware tab selects experimental hardware Other tabs are detail introduced in the following text DSP tab The IP address of the SPM100 needs to be changed so the PC and SPM100 can communicate correctly The address is entered by choosing the menu item Settings Configure Hardware to popup the hardware settings window which is shown in Figure 3 Enter the appropriate SPM 100 IP address in the box so the SPM100 is in the same subnet as the PC For example if the PC address was assigned as 192
198. imited in these microscopes in order to achieve high z sensitivity and the step size usually covered by the coarse motor is larger than this z range Configuring approach motors XPMPro can operate an incredibly diverse set of motors typically used on SPM heads Some of them require an additional TTL card DT335 to produce pulses and some of them use the TTL line included on the DT3016 board The use of the PMC100 from RHK will require an additional network connection for communication between XPMPro and the unit Other approach methods use one or two of the rear panel DACs to produce waveforms that will be amplified by the high voltage amplifiers and applied to a piezo element Kinetic approach systems Kinetic approach systems also called inertial or slip stick approach systems utilize a sawtooth shaped or other shaped waveform to drive a piezo tube shear mode piezo stack or walker type SPM s By slowly expanding and then quickly contracting their length they can produce translations along the axes Two parameter windows are used to define the necessary functions for kinetic approach heads After selecting the Kinetic Waveform option for approach mode select the Wavel tab as shown as Figure 21 and then enter the parameters appropriate for the scan head in use If the Dual kinetic waveform is selected then the same set of parameters can be specified in the Wave2 tab Additionally an extra parameter in the Wave2 tab as shown as Figure 22
199. implest to understand is the Hardware Speed Figure 42 Navigation setting tab choice In this case the two entries in the Tip Speed Scan size increment 5 Actual Speed change if the X or Y Offset knobs in the front panel are Speed turned O Hardware Speed eves O Scan Speed Data acquisition time O Line Time When acquiring images the amount of time it requires mE 1 gt to complete one scan line can be determined by one of Rotation Increment 7 a three methods The user can decide which feels most Scan shift increment 5 z Cancel RHK Technology 57 Troy MI USA XPMPro User s Manual Initial Acquisition setting of Figure 42 are grayed out and the line time is always set by the front panel knobs of the SPM100 Each line of data forward or reverse will be taken in the amount of time determined by the product of the milliseconds line knob and the multiplier value The slowest possible time is 9 seconds line The fastest possible time is determined by the number of channels to acquire and the pixel density In all cases the data acquisition rate cannot exceed the operating speed of the DT3016 board which is 250 kHz As the line time is decreased the user will eventually notice no decrease in time to acquire an image because the software automatically overrides the setting and takes data at the minimum possible time for the given conditions For a 128x128 image the line time cannot be below 1 ms line If
200. in to another location on the surface and the scan would no longer be centered about 0 V The significant advantage to this is the complete range of scan can be covered without concerns of digitization problem when scanning a small area For example if a single 16 bit DAC is used to control the scan voltages this provides 65536 distinct steps to cover the entire scan area If a large area scan head is in use with a 100 micron range the smallest step possible will be 100 micron 65536 or 1 5 nm so the resolution will never be better than this figure When using the SPM100 if higher resolution is desired it can be achieved by simply reducing the scan range knob Now the 65536 steps will be spread over a smaller maximum scan range which means higher resolution scans are possible Moving the scan frame around the surface This added flexibility has made the Navigation window Figure 40 critical for locating the scan frame and understanding how to operate the SPM100 For any given position of the front panel Range and Offset knobs the reachable area is displayed as a red box by default The maximum reachable scan area is always displayed in red letters at the top of the window The Scan Area as well as the X Offset and Y Offset parameters in the lower part of the panel can be changed to move the yellow box within the region of the red box The yellow box will represent the actual area of the sample that will be imaged at any time The tail of the green arro
201. input tab of the spectroscopy setup window Also a presample delay will have to be set for this experiment in order to allow the lockin to reach its equilibrium value This delay should be about 2 3 times the Time Constant set for the lockin RHK Technology 117 Troy MI USA XPMPro User s Manual Data Acquisition Techniques Taking images can be tricky because the amplitude of the lockin output depends somewhat on the oscillation frequency The chosen frequency has to be above the bandwidth of the feedback loop so the Berti eet modulation of the tunneling current due to the modulation m of the bias is not corrected by the feedback loop Typical 4 7 oo eo E I values would be a frequency from 5 kHz to as large as 20 AM Lab Unis Uria kHz or so The Time Constant of the lockin should be long La LN Y enough to span at least a few complete oscillations of the MEL signal For example a 5 kHz frequency has a period of 0 2 ms so the Time Constant of the lockin should be at least Ass hai OV G 0 5 ms or more For imaging this means the scan speed EH lxv g should be slow enough that at least 1 ms is spent at each uto e un pixel For a 256 pixel image this would mean a scan speed lower then 200 ms line is required If acquiring a dl dV curve then the pre sample delay should be at least 1 ms before readings of the lockin output commence USB Figure 118 operation mode define tab RHK PLLPro is an excellent c
202. ip Track Y double arrow control Each Manual Control v v SPM Status panel can be opened or closed by double clicking on the title bar or single clicking the Figure 13 Screen shot of navigation window double arrow There are six panes but only three can be opened at a time due to limitations in the screen space Whenever a fourth pane is opened one of the other three will automatically close Each pane is used for controlling a particular feature of XPMPro or to simply display information The panes are named Aux Feedback Spec Location Tip Approach Tip Track Manual Control and SPM Status When using the dual monitor setup recommended by RHK this window works nicely if placed on monitor number 2 for easy access while imaging Data acquisition can take place on one monitor while the other one is used for navigation and scan control Aux Feedback The AUX Feedback function will be covered in more detail in a later section but it is usually used to null out drift in the z direction due to thermal fluctuations All of the settings as well as the buttons used to produce coarse steps are contained in the Approach Control pane If point spectroscopy is to be acquired either within an image or by moving the tip directly from point to RHK Technology 26 Troy MI USA XPMPro User s Manual Coarse Approach point the locations can be defined using the Spec Location tab This tool will be described in more detail in a later se
203. is Y Line will draw the data with lines following the y axis and Mesh will render the data with lines in both directions to form a grid of points on the image Use the Apply to radio button to choose whether all 3D plots on the screen should be changed to show the same viewpoint of if only the currently selected one should use the new settings Instead of using the dialog box to determine the optimal settings the values can be chosen interactively by selecting the Interactive 3D menu choice from the shortcut The window will change appearance and as the mouse cursor is moved vertically the tilt angle O changes As the mouse is moved horizontally the rotation angle D changes The current readings are displayed at the top of the window as illustrated in Figure 106 To increase the z scaling factor hold down the left mouse button and release when the scaling looks good To decrease the scaling make flatter hold down the right mouse button When the angle and scaling looks correct double click the mouse button to return to a normal 3D window view The Chart Wire View selection will change the image so each line scan is offset from the previous one to form an image This is reminiscent of the early days when STM data was acquired using a chart recorder An example is shown in Figure 107 The Chart Settings dialog box can be opened by right clicking on the image The z scaling factor and whether scan lines should be skipped when rendering the chart
204. is acquired or a group of curves are acquired and then the loop is closed and the tip scans the surface to acquire another image The pattern matching algorithm again matches the original feature location to the present feature location and any necessary shift is applied This sequence of steps continues until stopped Whether to correct for lateral drift between each curve or after set of curves are acquired is determined by the Each Spectra Each Location radio button If Present Position is the selected mode a set of curves is specified by the Curves to Acquire parameter in the spectroscopy setup window If the drift rate is small and there are not too many curves specified it is safe to only correct between a group of curves If the Save button is pressed during the acquisition or Autosave is active and the group of curves are to be saved in an SMA file the small image acquired before the curves is also stored with the file so at a later time a high degree of confidence can be assured that the data was taken with tip over the feature While the acquisition is taking place the last tab of the spectroscopy graph window can be used to view the original image and the feature determined to be the best fit side by side Figure 117 This can help decide if the acquisition should be stopped If the most recently acquired image no longer appears to match the original image very well the tip is most likely not directly over the feature of interest and ther
205. is parameter is set channel ADCI will be used to compare to the threshold values When bit 1 is set channel ADC2 will be used The channels will only be used when data is taken on them during Z sweeps When bits 0 and 1 are both set and data is measured on both channels only channel ADC 1 is used Besides that bit 4 of this value tells whether the ADC values decrease bit 4 is TRUE or increase bit 4 is FALSE with increasing DAC output voltage u32 AD Channels RHK Technology 154 Troy MI USA XPMPro User s Manual Appendices This parameter tells which A D channels on the DSP scan should get sampled during all subsequent Z sweeps A 1 means only A D1 a 2 means only channel A D2 and a three means both channels float Z Sweep Speed This sets the Z sweep speed in Physunits s The PhysUnit is defined by the SET Z SCALE command The speed gets internally adjusted to match other internal parameters like resolution and maximum DAC update speed The DSP scan board also takes care that the time between sample positions is bigger than TimePerSample in order to prevent A D conversion errors float PreSampleDelay This number defines a delay time that the DSP scanner waits at each sample position before the trigger sequence is started The time is given in seconds float TimePerSample This parameter gives the time separation between two samples in the trigger group at each sample position The user has to make sure that this time is n
206. is advantageous to acquire a small image scan after dropping the atom in its desired position The image will immediately show if the object is in the correct place If the image shows no feature then it was accidentally dropped somewhere along the way The capability to acquire a small image is present in XPMPro The image is defined in the Atomic Manipulation tab as shown in Figure 135 The size of the small image should be defined and the channel to acquire For better sensitivity the ADC Range can also be changed similar to the gain specified in the Scan Input tab but keep in mind this gain is applicable only for the small image taken when an atom is dropped after a Drag operation The speed of the scan can be defined in the next section By default it is acquired with the same conditions of the last image acquired which means the feedback loop will reliably follow the surface and not damage the tip If an independent speed is desired use the other radio button and then enter an appropriate speed Be careful to not make this too fast for the feedback loop settings or tip damage may occur Atomic Manipulation n s HER a Tip Move When the image is acquired it is in the Move region of the tip location when motion DM 2 ends If the feature is not there usually the Channel Topography v operator will back track the path and LS acquire images along the way looking for the atom Instead of forming small images a rectangular image
207. is quite useful for those images If Y Offset Subtract is chosen the mean value of each line is subtracted on a line by line basis for all data along the y axis and this can be used to reduce low frequency noise in the data The average value of the entire data page is kept constant though since there are cases where this value has physical meaning This is most commonly used to remove offset in an image due to an instantaneous tip change where the z piezo adjusts up or down a significant amount because the overall length of the tip has changed when scanning along the y axis To remove the slope of each line of data along the y axis use Y Slope Subtract However it is far superior to use the hardware slope compensation to remove as much slope as possible along the fast scan direction RHK Technology 102 Troy MI USA XPMPro User s Manual Data Analysis and Image Processing before the ADC when imaging the topography channel To remove features that are large in extent creep nonlinear scan plane from a piezo tube etc use the High Pass Subtract routine All features longer than the distance entered in the parameter window Figure 96 are removed from the image This is another process where it is recommended HighPass Subtract to set the sequence radio button to Original High Pass Smooth Z 5 Use the Background Zero function to set the value of the Mrs Socio center mean median or mode of the image ADC range to Sequen
208. is serial number requests an address All other requests will be ignored When set to zero any IP address request will be answered but if there is only one SPM100 that will ever reach this PC it can be left at zero for simplicity The SPM 100 Scan Code is the software downloaded to the DSP board when it is initialized by the program The board itself only has enough code in its Configure Hardware Settings JE ROM to boot and then Hardware DSP Scan Board receive the actual operating e DSP i Serial Number D code from XPMPro This Gains makes upgrading the boards Head 000 000 c gt in the field quite simple sai SPM 100 IP Address 192 168 10 144 New features can be added Adv Feedback Debug Status Extended Debuaginc to the board and they will be Use educad Racketsta I contained in the code If an TAREE upgrade is sent from RHK Test Range at Startup the COF file should be Set Range Tip Retract placed in the installation directory and the new name entered here DSP Hardware DSP Software Hardware Diagnostics DSP Hardware and DSP GetStatus Count 0 GetStatus Fail 0 Software are status displays that are read from the SPM100 This allows an easy and convenient place to MEM d nne the COF EUR and hardware kernel version of the SPM100 DSP board Figure 3 Screen shot of DSP tab Buffer Underrun 0 DT Timeouts 0 Buffer Overrun 0 The hardware diagnost
209. it has been performed if the plane fit Figure 88 was done before e the statistics calculated the plane subtraction done while calculating the statistics has no effect on the answer Be careful of quoting an rms error value because the figure could be dominated by background slope effects and have no relationship to the relative corrugation of the data Figure 87 FFT Window Logihmic v A two dimensional Fast Fourier Transform can be calculated from any data page by choosing Image 2D FFT It will always be calculated on the entire image even if a region has been defined by the box There are z two choices that can be made when this menu item is selected o as shown in Figure 88 The first one will usually be kept on Slope Image points 3 a logarithmic because this provides the best dynamic range of See E peaks visible in the result but the spectrum can be shown in L Cem one of the other topview plot modes if desired The Power display min feature size can be adjusted to not show any data smaller than the specified size Since the FFT has long wavelength peaks in the center of the map and short wavelength peaks at the edge the value provides the cutoff distance that the edge of the spectrum map will not go past since no meaningful data will be contained at those frequencies anyway It is a simple method to zoom in on the peaks of interest and not display the result for the data near the outer ed
210. it time at u32 npix u32 nlin u32 moti u32 rept u32 wher number of scan onmode e AD u32 SCANNER FLAGS u32 TRIGNUM float TR LEN El REV WAIT TI E I C SP how many the end of a trigger positions number of scan lines ED SINE SCAN times repeat each scan create A D triggers on which Bit 0 1st forward Bit 1 1st backward Bit 2 2nd forward Bit 3 2nd backward Bit31 16th gt Start corner Bit 0 gt lower 0 Bit gt right 0 Slow scan direction Bit 2 1 gt keep 0 number of A D triggers at each trigger sequence IG PERIOD gt period of each 0x0e 0x202 0x02 0x203 0x03 0x204 0x02 0x205 0x02 0x206 u32 rept loat float float base length base width LineTime wait time at the end of float wait time at the end of a RHK Technology 191 Troy MI USA XPMPro User s Manual Appendices rev line s define SET REV WAIT TIME LEN 0x02 define SET NPIX NLIN 0x207 032 npix nlin defi
211. ividual onces LS Y Figure 131 can be deleted by clicking on the image and choosing Clear The selected image to be cleared is indicated by a dashed line around the image perimeter To remove all images use the Clear All button An example of a large view is presented in Figure 131 The large view can be permanently saved in a graphics format by clicking the Export button in the window A file dialog will be opened prompting for a name and format type The entire visible region in the NAV window is exported and blank areas are filled in with a white color The exported bitmap for the example shown is displayed in Figure 132 Manipulation and Lithography XPMPro contains powerful lithography and atomic manipulation tools The tip can be moved to arbitrary locations and an atom grabbed by altering the conditions and then the tip can be moved to a new location and the Figure 132 RHK Technology 132 Troy MI USA XPMPro User s Manual Data Acquisition Techniques atom dropped This allows the building of complicated structures one atom at a time When completed the area of the surface can then be imaged using the same tip in order to study the electronics effects of the small structure on the surrounding region To understand the principle of the manipulation and lithography routines it is important to understand the meaning of the two terms used within the software The two types of tip motion are called drag and move
212. ize and location of the box within the image When any routine is selected it will only be calculated using the data inside the defined region To erase the box from the data and return to analyzing the entire image click the Erase All Regions icon shown RHK Technology 95 Troy MI USA XPMPro User s Manual Data Analysis and Image Processing on the right side of Figure 81 Selecting Image Histogram will create a plot that presents the distribution of heights in an image This can be helpful for visualizing the distribution of terrace sizes or the homogeneity of an array of features in an image It also allows the direct calculation of coverage in an image because features such as adsorbates etc will have a characteristic height and produce a local peak in the 4I demos 2372 topographie Data Jc distribution The relative percentage of this peak compared to the total pixel density would provide an overall coverage in an image When the histogram is selected a window Figure 83 will appear to choose the bin size of the calculation By default it is set to the least significant bit with the appropriate units depending on the channel when the data was acquired which is determined by the gain on the ADC board and the z position ADC gain knob on the front panel of the SPM100 in the case of topography data If the data can be grouped more coarsely than this increasing the binning can be done using the stroller buttons or typing a value
213. ke Al rate o Counter Time 1 00 ms is shown in Figure 113 The A2 rate O Counter Time 100ms e maximum voltage range to read for any channel can be changed by setting the appropriate range parameter as shown in the window Valid choices for any channel are 10 V 5 V 22 5 V 1 25 V If the signal will be changing over a reduced range then it is advantageous to increase the gain in the measurement by changing this setting during the I V acquisition If the range is changed to the smallest setting of 1 25 V and an overall gain of 108 is in use the LSB will be changed from 3 pA to 0 38 pA because the 16 bit resolution will now range over readings from 12 5 nA to 12 5 nA Figure 113 As long as the maximum current will not exceed these values and saturate the ADC then the increased resolution makes it well worth changing the parameter Even if a large tunneling current is used high resolution spectroscopic data can be acquired by using a voltage sweep where the maximum value is below the bias voltage used when imaging Very high resolution I z data can also be acquired using this functionality and this can be very important given the exponential dependence of the current on the distance the tip is moved The tip can be retracted from the sample and the decay of the current accurately recorded since it is known a priori that RHK Technology 113 Troy MI USA XPMPro User s Manual Data Acquisition Techniques th
214. l as the PRM file and the image thumbnails File Header File Header Size Stores the size of structure SfileHeader This size could be used to read the SfileHeader structure so in the future 1f any new fields are added to this structure it will not affect the existing file Struct SfileHeader Signature STiMage 005 000 1 Major version 005 Minor version 000 Unicode 1 Total Page count 4 bytes Stores the total pages saved in the file Object list count 4 bytes Stores the count of Object stored in file header Object field size 4 bytes size of SrhkObject structure 12 Reserved 2 8 bytes 2 fields reserved for future use Object List Stores the file header objects Currently we are storing 1 Page Index Header 2 PRM Data 3 PRM Header Any objects can be added to this list in future An Object contains the Object ID the data offset and its size Using the data offset and size we can read the corresponding object data RHK Technology 137 Troy MI USA XPMPro User s Manual Appendices Struct SObject Object ID 4 bytes Type of data stored Offset 4 bytes Data offset Size 4 bytes size of the data Defined Object Ids Undefined 0 Page Index Header 1 Page Index Array 2 Page Header 3 Page Data 4 Image Drift Header 5 Image Drift 6 Spec Drift Header 7 Spec Drift Data with X Y coordinates 8 Color Info 9 String data 10 Tip Track Header 11 Tip Track Da
215. l has been connected to the DSP ADC 1 input should selected in the Tracking Channel box Once this is done the other parameters are then displayed in the proper units Object height specifies the expected change in the feature size if the tip moves away from it Negative values would indicate a hole that would cause the actual monitored value to increase when coming out of the hole Object width is used to set the orbiting radius and the period of the oscillation is set by orbit rate The bandwidth of the DSP loop monitoring the channel and applying corrections is set by the tracking time constant If there is a phase lag between the tip location and the change in the signal this should be entered in the correct place to the DSP board knows to apply the corrections with respect to the real tip location based on the known delay between measuring the difference and the tip position RHK Technology 131 Troy MI USA XPMPro User s Manual Data Acquisition Techniques Once the parameters are entered the feature is configured and ready to use Before activating it an image must be loaded into the NAV window from a saved SMA file This is required so a history of the local surface topography is saved as well as an image of the feature where the tip is placed To activate the function click the Enable Tip Track box in the pane Then click the location to place the tip over a unique feature in the NAV window The tip will move to this position and start
216. l loop il feature Monitor Time Spec aniclicep Feedback off w Monitor Test C Spectrum 2 Test should be Specii 3 O Single DAC Output checked Details of Spectrum 4 O Variable Gap LV Mode s a Scope this will be Image Spectroscopy configured using the Multi Parameter Im Timing Automatic Parame Samples point Pe advanced tab The Control 2x ee voltage levels are Channels Spectrum delay 12 70 m e Pre sample delay 0 00s f Handshake Primary Secondary defined in the Sweep rate 3 17 V s Time spectrum advanced mode tab Setup rate 234V s Sampling Time 500 us f covered below This mode requires the overall data acquisition rate to be slowed down When this 1s activated the lt gt Time Spectrum value will change to a slower value given identical conditions with the test disabled If studying semiconductors where the current rapidly falls to zero as the edges of the bandgap are approached often better dynamic resolution can be achieved by activating the Variable Gap I V Mode In this case the tip can be moved closer to the surface a fixed amount before the voltage is swept the tip can be moved closer to the surface a distance in proportion to the bias voltage or both conditions can be applied The user also has the option of returning the bias to the tunneling value and then set the z piezo back to its nominal height or setting the z piezo back to its nominal height and then returning the bias to the
217. l to allowing faster imaging the higher bandwidth can also be utilized by the oscilloscope and spectrum analyzer functions This module can be added to any existing SPM1000 system running XPMPro Version 2 0 e Increased scan speeds The software has been optimized to allow much faster data acquisition For example up to twelve images of 128x128 resolution can now be acquired per second six images in each scan direction e Average spectroscopy curves in real time This function displays the running average of all curves taken at each point in real time in additional to the display of each individual spectroscopy curve e Real time processing and display of spectroscopic data In addition to showing the raw data for each curve real time display of calculated derivative and or second derivative can also be shown e Redesigned Analysis and Processing software The analysis and processing sections of the software have been upgraded to provide much faster and efficient processing and visualization e Integration of PLLPro into XPMPro Tight integration of the PLLpro into XPMPro greatly improves ease of use e PMC100 integration into XPMPro All configuration functions of PMC100 are now set inside of XPMPro instead of through separate application Customers upgrading from SPM32 and XPMPro will recognize most of the features and enjoy an easier to use interface through a reorganization of controls as well as a polished GUI made possible by the
218. lacement of the cone center with respect to the circle center That X and Y displacement is then used to re position the circle center on top of the cone using an integrator with the time constant TimeConstant The cone height can be negative In that case the algorithm tracks a depression in the surface The mode word contains the number of circles to be drawn in the lower 16 bits If this number is zero the algorithm circles until told to stop by a TRACK FEATURE command Bit 16 of the mode word determines whether SET OFFSET bit 16 1 or the POSITION ABSOLUTE bit 16 0 commands are used to re position the circle center on top of the feature The nconv word contains the number of A D conversions taken along each circle This number has to be gt 3 otherwise it will get coerced to 3 by the scan board processor The Circle Radius is given in physical units as defined using SET MATRIX Circle Freq is the number of circles drawn per second The TimeConstant 1s the Feedback integrator time constant given in seconds For a stable feedback the relation TimeConstant gt l Circle Freq should be maintained PhaseShift gives the phase shift between reference and detected signal This way for fast RHK Technology 172 Troy MI USA XPMPro User s Manual Appendices tracking the phase shift that is induced by the scanner mechanics can be compensated for Wait Time defines a wait time in seconds before each circle gets drawn When the paramet
219. lation between the software control and output electronic signal of inchworm controller Here x represents that its status can be either high or low v means we check this selection in the control panel Attocube motor The small inertial motor made by Attocube can be operated via a serial interface to their controller The configuration tab for this motor is displayed in Figure 29 The serial port connected to the drive unit is selected using the COM Port parameter Some controllers have multiple modules to operate more than one motor axis The module connected to the motor used to bring the tip and sample close together should be chosen with the Approach Axis setting For a single axis controller leave the parameter set to its default of 1 If the motion during approach is opposite of what is expected change the setting of Invert Approach Motion so clicking Approach will actually bring the sample and tip closer RHK Technology 44 Troy MI USA XPMPro User s Manual Coarse Approach Approach Motors AR Approach Approach Control Tip Control Motors Kinetics Wavel Wave2 Nano 3 View Auttocube Piezo Motor Step Invert Approach Motion Inch Walker COM Port 3 RHK PMC o MSCU Approach Axis 1 x Advanced Secondary Tip Ramp Figure 29 Attocube control panel PPC200 USB controlled piezo positioning controllers The PPC200 replaces both the PPC100 when
220. lay rotate box can be checked if the image is to be shown rotated to the same angle as the scan frame when acquired This can help orient features among various images all taken at various frame rotation angles The images can be rotated to any arbitrary angle using the Plot angle box directly below the check box By default the data is displayed at the same angle it was acquired at but it can be rotated to other angles using this parameter To have a group of settings apply to all top view image plots in the future click the Set as default button before closing the window Any parameter can be changed on an image by image basis but the settings can also be changed universally using any plot settings window if this button is clicked i 4 demo5_22 1 Topography og E z Interactive histogram 5 H equalization t Once an image has been saved and subsequently opened in the DAW the power and control over color maps and adjustment of z value vs color increases dramatically When nares C SERIA 6 Fai selecting Image Em Manipulation from the i sa 099769 0s0137 menu the image EM i window expands as is d shown in Figure 75 Sus The histogram of pixel rus QUIS values is displayed in iem Size 19 81 nm Cursor Mode None 74 pm 1 80 nm 0 92 nm 2 46 Active View Original Image the upper right corner sure 79 with a color map graph overlaid The x axis of the histogram is the z
221. lculation that takes place will Qj be the dataset when the process was first chosen and the displayed image will be the result of only Figure 93 one process If the Original button remains checked then subsequent clicking of the calculate button will not change the data because it is always the result of a single process To return to processing the data sequentially click the sequential button and press Calculate to increase the number of times the process has been applied to the data Note that the Original button returns to the data when the process was chosen which means if other steps had already been done by other routines the Original button does not go all the way back to the raw data it only goes back to the dataset when the menu item was chosen There is a method to return to the original unprocessed data regardless of all steps that had been performed up until that point This uses the icon shown on the far right side of Parabola Fit Message Parabolic Fit amp hyperboloid is fit to a 2 D image and then the toolbar in Figure 93 Af data has been E ERE ciis Wl esie for large changed due to any process this icon will be O E shown in color and it can be clicked to return to the raw data Even if processed data has MS GLO S GL La been saved in the SM3 file the originally o BA AO s acquired data is still saved in the file part of i the new SM3 file format so it is never lost
222. like a hand is used to pan the graph The mouse cursor changes to a hand shape click the mouse to grab the plot and drag it in any direction to shift the field of view a desired amount The next control is useful to handle plots that can have a large number of curves If Spectra to Acquire is very large hundreds or thousands the plot may become confusing with so many lines drawn on it The active entry box 32 in the figure can be changed to determine the maximum number of plots displayed at one time If this is smaller then the Spectra to Acquire value as a new curve is acquired the oldest curve is dropped Keep in mind the full set of curves will be saved in an SMA file if the data is written to the hard drive but they all do not have to be visible at once This will be very beneficial in the DAW when analyzing data at a later time If a measurement was taken that acquired tens of thousands of curves it is not beneficial to try to look at them all at the same time because the plot will be too crowded A reasonable number can be typed in this box so only a fixed number will be shown at any one time For example picking 1024 would mean the first 1024 of a file will be read and displayed To browse another group the double arrow buttons can be clicked This loads the next group 1025 to 2048 or a previous group depending on which is clicked The first box changes its value to reflect the curve number of the first one being displayed The second num
223. line within the image The regularly spaced array of pixels is straightforward to understand For example if 64x64 is selected and a 256x256 image is scanned then every 4 lines within the image the tip will stop at 64 locations during that scan line and acquire the spectroscopy data The 64 locations will be every fourth pixel in the line If the image pixel density was 1024x1024 then the spectroscopy will be acquired every 16 lines The software will not allow a spectroscopy pixel density higher than the currently selected image pixel density RHK Technology 72 Troy MI USA XPMPro User s Manual Initial Acquisition Choosing a regularly spaced array of points is ideal when the surface is homogeneous and the curves will be averaged together later to improve the signal to noise ratio of the data atan Window ax Since the curves should be equivalent Poiret at x 0370 y 0547 Ec aJ regardless of location they can all be averaged together Many times though it is far more S interesting to compare spectroscopy data over a specific feature on the surface with curves acquired over another location When this type of experiment is to be performed there are other options that can used The most straightforward method is to acquire pM spectroscopy at every pixel and then also za average together the ones acquired over the BIBI bl xb 1 Move Scan rea Mouse Action feature of interest and then average togeth
224. ll be remapped based on the range of data acquired in that scan frame The icon that looks like a floppy disk should be pressed if the Figure 48 image currently being acquired should be saved to disk when pressed it will change appearance to indicate the presently occurring scan is going to be saved A user can decide on a scan by scan basis if the image is worth saving Alternatively Autosave Image in Figure 10 can be activated and then it is unnecessary to press the disk icon each time as the data will always be saved to disk and the icon will be grayed out If x the scan is interrupted using the Stop Immediately button y wills tal the partial image can be saved to the disk by pressing the save icon on the toolbar A file will be written with the Figure 49 acquired data and the rest of the image filled with null data Figure 47 RHK Technology 62 Troy MI USA XPMPro User s Manual Initial Acquisition On the toolbar there are three separate bars that can be rearranged and stacked instead of laying out in a linear fashion This may be appealing to some users depending on screen resolution and the aspect ratio of the acquisition window Additional buttons on the toolbar can be used to open the navigation window open a data analysis window open the oscilloscope etc All of these buttons have equivalent menu entries so there are two choices to gain access to certain features and windows Ther
225. ll blue dot appears In the example shown many locations were defined in the upper left corner where the feature is present and then some locations were selected within the region but away from the feature to have a measure of the nominal spectroscopy data acquired over uniform parts of the surface After the data is acquired perhaps every spec location near the feature will not be exactly over it but it is a simple matter to use the tools built in to XPMPro to only select the curves acquired directly over the feature of interest If this method is to be used then Interactive Point should be selected in the toolbar shown in Figure 58 Another method to define an array of spectroscopy locations is to define a line in the NAV window An example of this is shown in Figure 61 A line is drawn and then the Locations parameter is selected to choose how many segments to break the line into when defining spectroscopy locations Valid choices are from 2 to 256 When requesting the points to lie along an arbitrary line within the image as shown the Spec Location setting should be changed to Defined Line After defining the line the endpoints can be dragged to change the length of the line and the rotation buttons can be used to rotate the line Note that if the Mouse Action is set to Add Spec Location the Scan Area and the Rotation angle display the length of the line and RHK Technology 73 Troy MI USA XPMPro User s Manual Initial Acquisition angl
226. ltage level then the hold time then the move time and then drop to the next line and read the next voltage level Repeat this method to build up the output waveform as a function of time Once the waveform has been defined it is a good idea to double check the total time for the experiment as calculated by XPMPro and also to check the number of points that will be acquired As always be careful to not leave the feedback loop open for an excessive amount of time if drift is a concern RHK Technology 71 Troy MI USA XPMPro User s Manual Initial Acquisition Another nice feature is the ability to output two voltages at once By carefully alternating the definition of the voltage level and the hold time and move time it is possible to have two conditions change and watch the response as one condition is held constant and the other condition changes If this type of experiment is desired in effect 5 different set of conditions can be defined if one wants to hold an output constant gt 99 20M G De Spectroscopy Layout Curves Cursor Mode File Save Drift Correction Tie Spectroscopy ent label Votage Font Y Label Colors and change the other To activate this feature check the DAC Enable button at the top of the second column If the defined level from step n to n is different for both outputs they will ramp simultaneously If one voltage level is the same for n and n 1 then this creates a condition where
227. m at a specific time can be beneficial The integrated digital oscilloscope is opened by clicking on the scope button in the toolbar The parameters that affect acquisition are contained in the Oscilloscope tab Alternative Imaging Modes Exciting materials properties can be investigated using special imaging techniques where conditions are changed during the image and the effect on the images recorded This allows a more direct comparison of features because there is less separation in time which translates into more confidence of no tip artifacts etc creeping into the data Multiple parameter imaging MPI An interesting and oftentimes beneficial imaging mode is to scan the surface at one set of imaging conditions and then before incrementing the voltage to move the tip along the slow scan direction change the conditions and scan the sample again Since the same area of the surface is imaged multiple times direct comparisons of features taken under different conditions can be done Because of unavoidable drift it is always a difficult task to try and correlate features in one image with features in an image taken after the first one under different conditions since the two images were not taken over precisely the same location Of course part of this argument is based on the length scale of the features and the overall drift rate If the features are large and the drift rate relatively slow then clearly the two features in separate imag
228. m plenty of time to reach a new equilibrium or have some slow process occur while capturing a before and after image Movie mode simply takes the data as rapidly as possible with no stopping between lines to update parameters etc It also prevents stopping the scan in the middle of a line to perform spectroscopy measurements It is most useful if an experiment requires the maximum possible data acquisition rate in order to capture dynamic processes occurring on a short time scale There is also no pause at the end of the frame to update the entire screen instead data acquisition keeps going in the background and the data will be displayed when the computer is ready to update the screen for the next image The overall difference in acquisition rate can be dramatic If scanning a 128x128 pixel image at 1 ms line normal mode could acquire about 2 frames second Movie mode on the other hand could acquire closer to 7 frames second The Direction is used to choose whether scanning occurs along the x axis or y axis This can also be changed using either the F7 key or pressing the toolbar button on the acquisition window An alternative method to prevent creep from distorting the first few lines of an image after the tip is rapidly returned to the upper right corner of the scan frame is to start the next frame from the end point of the last frame This means an image will be acquired from the top of the frame to the bottom and the next frame will b
229. m setpoint W selected setpoint SSN minimum setpoint zero load level noncontact voltage RHK Technology 124 Troy MI USA XPMPro User s Manual Data Acquisition Techniques relative z displacement from the piezo position when the feedback loop was opened This should be zero nm if the feedback is properly maintaining the setpoint which is zero Volts to begin with as discussed above Since the SPM100 setpoint knob is restricted to a voltage between 1 0 V and 1 0 V the range of possible setpoint forces is denoted by the hatched region If a different setpoint force is desired while in feedback the setpoint knob neg Z values can be turned The top part of Figure 123 shows the setpoint moving down towards the attractive regime Since the knob will be turned while in feedback the z piezo will adjust to maintain the changing feedback level The F z curve zero load level itself is like an isogram showing the value of z for a given setpoint and the X on the plot is meant to illustrate the neg Z values intersection of the desired setpoint with the known F z characteristics which then determines the new z value After the knob reaches the new value the new z position relative to the former position is indicated in the figure by zero load level the vertical dashed line pos Z values NNN maximum setpoint SS minimum setpoint selected setpoint pos Z values R U
230. m the minimum to the maximum pixel value If there are a few spurious noise spikes in the image these can use up a good portion of the dynamic range of the color scale A solution to this is using the limited mode where a few pixels with extreme values can be rejected In equalized mode the display scale is non linear so that there is an approximately equal amount of each color in the image In light shade mode the brightness of each pixel depends on the angle of each part of the image surface relative to the light source In physical a specified range of Z values are mapped This is good for comparing groups of images by having identical color scales for the entire group In logarithmic the color is proportional to the log of RHK Technology 88 Troy MI USA XPMPro User s Manual Data Analysis and Image Processing the Z value This is good for Fourier power spectrum images If standard deviation is chosen the min and max color values are automatically determined by the distribution of the histogram itself The rest of the settings in this group are only active 1f the appropriate mapping mode has been chosen Otherwise they are greyed out and cannot be changed If limited mode has been selected then the percentage of values to exclude from the color range is set by the Z Exclude parameter Adjust this to concentrate the dynamic range of the color map to a range where most of the data is contained When using the standard deviation mode
231. make sure 2 phase motor is checked Most stepper motors require a large current to produce rotation When no motion is taking place the voltages to each coil should be set to zero so no current flow is occurring The current will dramatically heat up the motor and subsequently the entire scan head which will cause significant thermal drift problems However some scan head designs will require the coil to be energized in order to resist motion of the motor due to gravity If the motor holds precise position without voltage on the coils Coil energized at rest can remain unchecked The pulse width of the TTL signals will determine the speed of motion However do not set the pulse width too short or no motion can occur because the coil will not be energized long enough to turn the shaft Change the Step time setting until the approach velocity is adequate For most motors a few milliseconds is sufficiently long to produce rotation When using an AIM NSOM there are separate lines required to remove the current flow from the two phase motor in use In this case adjust the Control line 4 and Control line 5 settings until motion occurs If an AIM MI is in use these can be left at Not used Omicron 8 channel MSCU The eight channel MSCU features 8 output channels that can be controlled via a handset the serial connection or using the rear panel SYNC connection The recommended method is to use the serial connection between an RS232 port on the host PC and
232. meter delta pix gives the separation of the spectro positions along the line in A D conversion steps The parameter firstlin gives the first scan line that contains spectro stops counted from the begin of the scan The parameter deltalin gives the separation of spectro scan lines along the image When firstlin deltalin the spectro positions of a downward scan and the following upward scan lie exactly on top of each other array spectro parameters are first pix goes O npix 1 delta pix minimum 1 firstlin goes O nlin 1 deltalin minimum 1 Command code SPEC TABLE MODE Command name in Litho files stm Number of parameters to send depends on table length Parameters spectro position table Notes This command switches on table spectroscopy mode This allows the placement of spectroscopy positions on any A D trigger position on the image The table contains line numbers which have 0x0000 in the high word and position markers for the spectro position on that line The position markers are compressed The Hi word contains a repetition counter and the lower word the position difference to the previous position or to the line start Note that there is a position difference of 1 needed to reach position 0 on the line A position difference of zero will shut off spectroscopy for the rest of the line The table is coded like this line number has 0x0000 in the high word RHK Technology 180 Troy MI USA XPM
233. mple and no damage will be done to the cantilever due to its flexibility This mode is also appropriate for techniques that have long range surface interactions such as NSOM However tip sample contact may occur using this mode To avoid contact the speed at which the tip approaches the sample during a coarse step must be slower than the speed the tip can be pulled back by the feedback loop and this condition is rarely met in practical scan heads Signal detect mode is similar to the feedback detect mode except the software monitors the input signal channel current force error etc rather than the Z axis motion The danger of the probe crashing is less than for Feedback Detect since the signal circuit responds faster than the feedback loop An STM preamp usually has a bandwidth of tens of KHz whereas a feedback loop will typically only have a bandwidth of a few kHz However if avoiding a probe crash is of prime importance the Tip Retract mode is recommended It is important to have the Signal Threshold set below the setpoint knob value or a crash will occur because the approach will continue even after the SPM100 is in feedback since the signal will still not exceed the threshold until the z piezo is fully retracted and a crash occurs The software monitors the position of the Setpoint knob and given the calibration of the feedback signal in physical units it will check to make sure the threshold has been set to a value less than the setpoint kno
234. n be continued afterward As on any spectro stop position the high word of the machine state variable is set to Oxffff while the scan is interrupted Command code STOP Y SCAN Command name in Litho files stopy Number of parameters to send Parameters u32 YES NO STOP Y 1 RUNY 0 Notes This sets or clears a scan generator flag which tells whether the Y line position should be changed during scanning This allows to scan a whole image along one line This might be interesting for testing the SPM imaging conditions Command code SET WHERE SPEC Command name in Litho files sws RHK Technology 179 Troy MI USA XPMPro User s Manual Appendices Number of parameters to send Parameters u32 where spectro Notes Each bit in where spectro represents a line repetition during scanning When the bit is set automatic spectroscopy is allowed on that scan repetition Command code SPEC ARRAY MODE Command name in Litho files sam Number of parameters to send 4 Parameters u32 first pix u32 delta pix u32 firstlin u32 deltalin Notes This switches on array mode automatic spectroscopy during the scan line repetitions set by SET WHERE SPEC Please note that spectroscopy is only possible at points where A D conversions are taken Disabling A D conversions along a line automatically also disables spectroscopy The parameter first pix gives the pixel position of the first spectroscopy position from the line start point The para
235. n can be moved by clicking the mouse cursor on it and dragging Better results can be achieved by stretching the lines as long as possible and centering them over the atomic sites The length of RHK Technology 93 Troy MI USA XPMPro User s Manual Data Analysis and Image Processing each line and the angle between them is displayed in the information box on the right side of the image The small letters indicate which axis is considered the A axis and which is the B axis Piezo calibration can be checked by stretching the lines over a fixed number of lattice periods and checking the length of the measured line presented in the entry boxes on the right side If the values are incorrect the proper values based on the known crystallography should be entered into the boxes for the A and B length as well as the angle between the lines Then the Rescale button should be pressed An information box is presented that shows the correction factor for the X and Y axes These should be recorded and then the X Motion per piezo volt and Y motion per piezo volt settings of Figure 11 changed by the same correction factor To correct all pages of data taken during this scan check the Rescale all related pages box An easy method to check for non linear effects such as drift and piezo hysteresis is to enter the number of atomic periods that should be along the A axis and how many should be along the B axis and then click the Lattice Period button An array
236. n so a step can be taken without interrupting the image acquisition As mentioned above the PMC100 and the Omicron MSCU have separate control panels Figure 31 and Figure 32 with many buttons for producing motion using the selected motor and along the desired direction These panels can be opened by clicking the Open XYZ Control button in the main NAV panel If some other motor has been configured for approach that button will be grayed out Tip Track This technique will be covered in more detail in a later section of the manual It can be used to record atomic scale diffusion as a function of time or try to measure the drift of the system though the pattern matching algorithm discussed later on is a superior method compared to the tracking algorithm Manual control RHK PMC 100 Control Motor mmu jx pw AX i Approach Retract Approach Retract Motor3 SES x x x a Y d Y Approach Retract Figure 31 PMC 100 XYZ control panel MSCU Control ax Yl xl Z1 Figure 32 XYZ control panel There is a pane in the NAV window labeled Manual Control and is shown Manual Control Retract Loop Hold in Figure 33 To force the tip to be T Tip Retract jo FF User Notification Loop Hold DFF pulled back the maximum range of the z piezo click the Tip Retract button The status will change to ON and the
237. n terms of N m the amount of force exerted on the surface as a function of z after contact can also be calculated The selected voltage will then serve as the setpoint for pushing on the surface so the Bias should be set to the value in V on the y axis where the user wishes to operate the AFM For example if the D region in Figure 121 ranges from 500 C to 150 C and from 50 mV to 700 mV This gives a slope of 1 mV C displayed as 10 MV m in the software for the detector sensitivity and if the cantilever spring constant is 0 1 N m then the probe will exert a force of 10nN for every 1 Volt change in the setpoint Keep in mind these numbers are for illustration purposes only and may not closely represent any particular microscope design or specific cantilever If the calculated value for the slope is now entered into the deflection sensitivity setting in the window described above any F z curves acquired after this will display the values as nN vs nm Changing the setpoint force using the setpoint knob Once an F z curve is acquired and calibrated the actual setpoint can be changed and the different feedback conditions will be apparent in a neg Z values subsequent F z curve Figure 122 SN illustrates an idealized F z curve and the NINOS flat region is at the level set before the approach 2 V normally Note the curve goes through the 0 0 point as Fieure 122 expected The horizontal axis is the pos Z values NANS maximu
238. n the acquired data increase the Points to Sum until the displayed interval is satisfactory The time to acquire a single spectrum is calculated by the sampling rate and the number of points to acquire when this is multiplied by the total number of spectra to average together the Total Time for acquisition will be displayed After each spectrum is acquired the average will be displayed in real time which gives a great indication as the baseline noise reduces but also can display changes if peaks grow and shrink as changes are made that effect the noise characteristics If using an accelerometer to measure the vibration environment the spectra can be scaled to display the displacement by checking the Scale Spectrum by Angular Frequency Squared box Since the conversion from acceleration to displacement is achieved by dividing the measured voltage at each frequency by the square of the angular frequency the peaks are then in the proper proportion of displacement instead of acceleration Checking the Autocorrelate box will acquire an autocorrelation spectrum instead of a frequency spectrum During long data acquisition the status bar of the window will display a countdown of remaining time until a new spectrum is acquired This provides feedback to be sure the program is doing something RHK Technology 78 Troy MI USA XPMPro User s Manual Initial Acquisition The noise power window has its own save tab as shown in Figure 64 So the settings
239. n then be rescanned up to three more times with conditions changed to acquire a set of images at the same time that show the topography and other signals acquired over the same area of the surface to permit correlation The changed voltage can be applied to any input internal or external to achieve any desired result It could change a magnetic field the tunneling bias temperature a z piezo to pull the tip off the surface or push the tip into the surface or a lockin amplifier to apply an oscillation to some signal The loop can also be disabled in the case of applying the replay voltage to a z piezo this would be required Otherwise the loop would simply counteract the applied voltage and not change the relative tip height above the sample Since the only mode currently available is to record a signal and play it back on rescans the correct cabling is imperative to properly interpret the result Whatever signal is to be recorded should be connected to DSP ADC 1 on the SPM100 rear panel The output signal on scans 2 3 and 4 will appear on DSP DAC An additional connector is also require so the DSP board properly records the signal The rear panel Digital IO connector needs to have pins 3 and 6 shorted together The simplest method to achieve this is to obtain a mating connector and solder a single wire between the two pins and then attach it to the rear panel If the output is to be scaled from the recorded signal use the Output Multiplier parame
240. name Thumbnail Header and Thumbnail Data In a DAW instead of reading the entire page data to display the thumbnail we are storing the reduced page data as thumbnail data for each page in SMA file The thumbnail data size is stored in the thumbnail header The offset and size of the thumbnail header and data is stored in the Page index objects Thumbnail header page type 17 and Thumbnail page type 15 respectively Using this offset we can locate the thumbnail data in Sm4 For an image page if the scan resolution X or Y is more than 128 then the page data 1s averaged and reduced to Min 128 X Size and Min 128 Y Size pixels and is stored as thumbnail data For a graph page the curve average is stored as the thumbnail data The Width X Size and Height Y Size is stored inside the thumbnail header SThumbnailHeader 1 int m nWidth Points per line int m nHeight Lines per frame int m nFormat 0 Raw data j The format represents the thumbnail data format Currently we are supporting only raw data In DAW if the thumbnail data is present then it reads the thumbnail data and display Page data will not be read in this case If thumbnail data is not present then it reads page data and display RHK Technology 151 Troy MI USA XPMPro User s Manual Appendices DSP Scan Board Commands The DSP based scan board can be controlled without the use of SPM32 Any computer on the network can send and receive in
241. named c SPMDATA and under this create a series of directories labeled by user or by sample etc Now experimental data can be differentiated and easily categorized but is not buried multiple levels deep on a hard drive The second default path is the Save Path which is the directory where data will be saved as it is acquired This is defined in the Settings Scan window shown in Figure 10 The third one is the temp path for the dataSAFE files RHK Technology 85 Troy MI USA XPMPro User s Manual Data Analysis and Image Processing The parameters that effect the appearance of the Browser window are accessed using the tool icon in the browser toolbar The window is shown in Figure 69 At the top of the window is the File Preferences Browser Path which can be changed by either typing in a Browser Path george Local Settings Templ directory in the entry box or clicking Select and navigating to a Thumb Nails in color particular directory The next option is Thumbnails in color to meat determine if the images in the data Thumb Nail size small y display panel on the right side of the browser should be shown in the Figure 69 default color lookup table or in gray scale mode The parameter Thumbnail mode determines what preprocessing to apply to the small images before they are displayed The data can be shown in Raw mode so no change is made or Line delta z subtract so the average value of each line of data in the fast scan
242. nd the measurement was setup to change the bias every 16 lines With the 512x512 pixel image this means the voltage was changed in 32 steps from OV to 2 0 V The initial bias controlled via the front panel knob was 1 27 V so the top part of the image was taken at 1 27 V and the bottom section was acquired at 3 27 V Notice the change in the appearance of the faulted and unfaulted sections of an individual 7x7 unit cell At the lower bias voltages nearer the Fermi level the contrast is more dramatic and as the bias voltage increases the contrast all but disappears This can be a great time saver as a single image can be used to quickly search for bias dependent features on the surface that otherwise might take V 127 VOD E v NINE NOR CNN D et AA Ox a much longer time if PE ESOS A E NN CN i uM SO ES 2 changing the bias SS o SUNG NON using only the front A SENS Y NN NINE CNN A panel knob Once an NOSE CANO e GUESS gt ANO image like Figure os EN Ore SETS SECA TRS We RATA PEA vel se OR A res 120 is acquired then SATA es RAE eos the bias knob can be ES NENA E NENNEN NN T adjusted to the e AS desired value to acquire entire images that highlight the desired voltage dependence Another good example of this would be to search for adsorbates and defects present on M Re E a PANNE NI A EN Se pe ar FE ae Par epee E T t the surface that only Sees ae E p M ESE t certai Vew 3 27 V ENSE TRE
243. ne SET NPIX NLIN LEN 0x03 define SET SC MOTMOD 0x208 u32 scan line motion mode define SET SC MOTMOD LEN 0x2 define SET WHERE AD 0x209 u32 where AD define SET WHERE AD LEN 0x02 define SET SCANNER FLAGS 0x20a u32 SCANNER FLAGS xl define SET SCANNER FLAGS LEN 0x02 define SET SC TRIGNUM 0x20b u32 TRIGNUM float TRIG_PERIOD define SET SC TRIGNUM LEN 0x03 define MOVE TO SCAN START 0x20c void define MOVE TO SCAN START LEN 0x01 define SCAN UNTIL 0x20d u32 image pixels when zero continuous scan define SCAN UNTIL LEN 0x02 define STOP SCAN 0x20e u32 WHERE define STOP SCAN LEN 0x02 note a scan stopped NOW cannot be continued WHERE can be define EOSCAN 0x0 define EOLN 0x1 define STOP_NOW 0x2 define INTERRUPT_SCAN 0x20f void define INTERRUPT_SCAN_LEN 0x01 define STOP Y SCAN 0x210 u32 YES NO STOP IT 1 RUN IT 0 define STOP Y SCAN LEN 0x02 define SET WHERE SPEC 0x211 u32 where spectro define SET WHERE SPEC LEN 0x02 define SPEC ARRAY MODE 0x212 u32 first pix delta pix firstlin deltalin define SPEC ARRAY MODE LEN 0x05 define SPEC TABLE MODE 0x213 u32 spectro table length not checked RHK Technology 192 Troy MI USA
244. ng the x or y axis is e quu uc averaged for all lines in the image to get the zd m ou A average value for that pixel in the image This can prove useful to help see atomic resolution features if there is still quite a bit of noise in each line scan Figure 86 The averaging will help reduce the random noise fluctuations and make the atomic scale repeatable features stand out Note this is only useful if the features of interest lie exactly along the y axis in the image Otherwise the averaging will either smear them out laterally or average them away completely If the slow scan has been disabled then it can be a very powerful technique for getting a better signal to noise ratio for some quantitative values to present in a single XY plot RHK Technology 97 Troy MI USA XPMPro User s Manual Data Analysis and Image Processing Another quantitative tool is accessed by the Image Statistics menu item The overall slope of the region or entire image is calculated along with the maximum and minimum z values Additional information involving the deviation of the z values and the effective volume above a standard plane is also shown An example of the statistics box produced from the subregion defined in Figure 82 is shown in Figure 87 The routine subtracts a plane from the whole image then in the selected subregion it finds min max and mean also the plane slope and the RMS error RELATIVE TO the fit plane XPMPro This is the rms
245. ns might be bad for your scanner be careful with this Command code SET DETECTOR CHAR Command name in Litho files sdx Number of parameters to send 10 Parameters float X A float X B float X C float X D float X E float Y A float Y B float Y C RHK Technology 161 Troy MI USA XPMPro User s Manual Appendices float Y D float Y E Notes Most positioning detectors are not linear This command offers the opportunity to linearize and decouple the detector using a 3rd order polynomial The coefficients starting with X are for the X detector the coefficients starting with Y are for the Y detector The equations from the viewpoint of the scan board are and Physunits are the physical units that you run the scan board in set by SET MATRIX ADC has Volt units the range 10V 10V and means the corresponding detector voltage of that position Command code READ DETECTOR CHAR Command name in Litho files rdx Number of parameters to send 0 Returns float X A float X B float X C float X D float X E float Y A float Y B float Y C float Y D float Y E Notes This command is used to verify the XY positioning feedback characteristics that gets sent to the scan board using SET DETECTOR CHAR Command code SETUP FIBER FB Command name in Litho files setfib Number of parameters to send 3 Parameters float Setpoint float TimeConstant float Interferom conv Notes This command sets the setpoint and time constant for
246. ntation parameters are contained in the Layout tab as shown in Figure 45 Each graph window in the new version of XPMPro has a set of configuration panes to the right of the graph area To close these panes and have the data graph fill the entire window area click the x button in the upper right corner of the window If the panes have been closed they can be reopened by using the toolbar button of the window Any title can be typed into the entry box and the font can be changed by clicking the Set Font button The x and y axes can also be labeled and their fonts chosen using the Set Font next to that box The colors are chosen in the next group The grid axes and graph background color can each be set individually Click on the color rectangle to popup a standard color picker A user can also define his own colors using the same standard interface Some parts of the window can be eliminated by unchecking the correct radio button in the next group The axes scale controls are also in this tab Both the x and y axis can be autoscaled or manually adjusted to show a section of the data When the x axis is manually changed and the y axis is set to autoscale the scale is adjusted to only take into account the visible parts of data Both axes can also be changed to logarithmic mode instead x Curves Layout Cursor Mode of linear mode Be careful using this setting for ie some types of data Since negative values cannot E
247. ntial can be expanded via Taylor s series to be Io I 1 2k zcos cot A lock in amplifier operates by taking the input signal and detecting the portion of it that is at the same frequency as the output frequency which in this case is being used to modulate the height Most lock in amplifiers will output a signal that is equal to the rms value of the cos term For this situation the amplitude of the signal is Iy 2k z This rms introduces an additional square root of 2 into the expression so the output signal will be related to the modulated current detected by the lock in amplifier by E Ea V2 Solving for k gives the expression ed lockin 1 8z 1N2 From a quantum mechanical derivation of tunneling k will involve some constants related to the electron and the mean barrier height which becomes 2K 1 025 V substituting this expression into the derivation of k above yields RHK Technology 120 Troy MI USA XPMPro User s Manual Data Acquisition Techniques p LN 1 6 21 025 When the modulation is set on most lock in amplifiers the voltage selected is actually the rms voltage applied to the z modulation and this means the z amplitude can be expressed as the rms value of the modulation which is Zz E z lockin V2 If we substitute this into the above expression the rather confusing square roots cancel and the final expression is p rms 2 lockin 1 2 1 025 Measuremen
248. ntrol tab described above The tip and sample can be moved close together when viewing the separation by using Tip Fast In and Tip Fast Out in the Navigation window This is usually done to lower the approach time when using the automatic approach method The tip sample distance should be viewed using an optical microscope or video camera to make sure the motion is stopped before contact occurs since there are no delays and no RHK Technology 36 Troy MI USA XPMPro User s Manual Coarse Approach checking of threshold levels The amount of travel in each step when fast motion takes place is entered in the Fast Approach and Fast retract step size box For horizontal motions no effects of gravity approach and retract parameters may be identical while for vertical motions different advance and retract parameters may give better results To take a single step in a direction the and buttons on the Navigation window should be clicked The Adjust amplitude sets the distance moved each time a button is pressed This is normally used when the scan head is already within imaging range of the surface but the user wants to make small steps to better center the z piezo extension about its equilibrium position or to move the tip sample laterally to image a different part of the surface The distance is normally small typically no more than 5 10 of the Z scan range All of these motions are calibrated with respect to the Motion per D A volt se
249. o offset values to zero Another option for moving the scan area laterally is to place the mouse where the scan are should be centered and click the right mouse button A menu will appear and one choice is Move Scan Area Here The scan area box will immediately move to this new position When the mouse action is set to Modify Scan Area moving the mouse cursor anywhere inside the maximum scan area red box default color will also display the location of the mouse at the top of the window This is a quick method to record the physical coordinates of features in the window Anytime the scan area is changed when imaging is not taking place the user has the option to have the tip follow the scan frame or leave the tip stationary and not move until imaging is started again The second option avoids unnecessary tip motion but the first option provides a simple method of moving the tip position small amounts across the surface if it always remains at a fixed position within the scan frame To choose the first behavior tip moves when box moves make sure the Tip Motion box below the Modify Scan Area is checked The colors for the scan area frame maximum scan area frame background of the navigation area and text color of the scan area controls can all be changed to fit a user s preference Each of these choices is accessed by right clicking anywhere in the navigation area and selecting the appropriate menu item The Load button in the Ref Image section all
250. of the window allows the size of the graphics file to be controlled The number of pixels in the graphics file can be determined via three methods It can be set to an arbitrary size selected by the user using the Image Dimension setting An advantage of this method is every file exported will have the exact same size to easily combine them into a movie regardless of the image acquisition conditions or the size of the Save As ax lt Save in CJ output Q pem File name 37081508 ipg Save as type JPEG Files jpg Width 500 Height Image Dimension 500 O Pixel Dimension O Window Size x Cines Overlay window on the screen The second choice igure 109 is Pixel Dimension and this will create a graphics file with a one to one correlation between an image acquisition pixel and graphics output pixel As the example shows a 512x512 image is going to be exported so the entry box is already filled in with that value in case the user decides to select it The final selection is Window Size which creates a graphics file precisely the same pixel size as the image window currently occupies on the screen This may be useful to prepare images for presentations and desire to know the physical space on the screen they will occupy when imported into other programs for page composition The overlay checkbox should be selected if various annotations that have been added to the image
251. olor Once a pane is hidden to display it al idu again the main configuration window a be opened and check box placed next to the appropriate field Figure 12 customize status bar RHK Technology 24 Troy MI USA XPMPro User s Manual Coarse Approach Coarse Approach RHK Technology 25 Troy MI USA XPMPro User s Manual Coarse Approach Navigation window ffs Window ax The next step to data Area 5 20 um X 5 20 um Offset 0 00 nm 0 00 nm Hane acquisition is the requirement to bring the probe and sample close enough to create an RE interaction for feedback This can be a tunneling current a cantilever deflection a frequency shift etc In most cases some separate mechanism or motor is used to take large steps while the software checks for tip sample interaction in between Action each step Zoom Pan The approach system is al M configured through the Move Scan rea Mouse Action Navigation window which is t Size 400 00 nm E Modify Scan rea opened by clicking on the e a n e Cl Move Tip NAV button in the main 3 en O Add Spec Location launcher bar When the as x ooo dej ODreg MoveTip Scan Speed ES window is first opened 1t will 5 S y 0 00 nm ES Line Time 139 ms 2 appear as shown in Figure 13 Aux Feedback Y At the bottom of this window spec Location 3 is a set of panels that each WIE anor v contain a title bar and a T
252. ominal imaging conditions are not used for any of the scans unless specifically configured to do so The feedback loop can also be disabled during the subsequent rescans if desired If performing conventional imaging of recording the channels under various conditions the loop would remain on during these rescans If an advanced mode such as dynamic lithography is performed then the loop may need to be disabled during the rescans When multi volt imaging is turned off the output is set to the Standby voltage which in almost all cases should be zero Otherwise the conventional imaging acquired after the mode has been turned off will not be the same as before because the additional voltage applied will effect the imaging conditions in some manner and may be unaccounted for when interpreting the images later If the four voltages specified are meant to change the tunneling bias during STM then RHK Technology 80 Troy MI USA XPMPro User s Manual Initial Acquisition STM Bias Mode should be on The actual DAC output will be adjusted such that the sum of it and the bias knob setting is equal to the requested value If the parameter is off then the DAC output will be exactly equal to the value entered in the window If zero is entered for one of the voltage values and STM Bias Mode is on the DAC will counteract the bias knob resulting in a tunneling bias of zero which will cause a tip crash If the output voltage is affecting some other physical
253. on from the drop down menu under the Secondary column It is important to understand channels to be measured are not done here this is done in the channel selection tab for each acquisition Only the display RHK Technology 60 Troy MI USA XPMPro User s Manual Initial Acquisition is affected by adding or removing channels Alternatively a second graph can be added by checking the Show box in the second row When this occurs the window is split into two equally sized graphs one below the other In either case the label entry box in the layout tab will now be activated providing the user full control over all of the text and labeling for each individual graph pane Each channel can have preprocessing applied to the data before display The action to take is determined by the first menu under each channel name Valid choices are Raw Smoothed Derivative Second Derivative Integral and Density of States For smoothing or derivative x modes a Savitzky Golay algorithm is used Curves Layout Cursor Mode for the calculation The number of points to Bus Sas ama ERES use for the algorithm is determined in the Topography y None y submenu for each choice As the cursor is 1 ES msn scrolled over each choice the data updates in E Iz Caves H Hi realtime so a reasonable choice can be made z Topography h None x by deciding on a nice looking graph without smoothing away important information o m E Ld
254. on to test Valid selections are Safe between limits safe outside limits safe below maximum and safe above minimum or Disabled to have the approach only depend on the primary channel topography for tip retract and feedback detect feedback signal for all others Secondary Max is the upper boundary of the secondary signal Secondary Min is the lower boundary of the secondary signal RHK Technology 33 Troy MI USA XPMPro User s Manual Coarse Approach The tab that controls the open loop ramp and the z offset step mode is shown in Figure 22 Most users will not have to set any parameters in this tab unless Open Loop Ramp is in use as the approach mode or Analog Ramp has been selected for tip control instead of the TTL Feedback default The first set of parameters are used to configure the analog ramp when TTL Feedback has not been chosen as tip control mode The Advance ramp speed sets the speed that the tip is moved towards the surface The speed should be slow enough to ensure the change in feedback signal is detected before the tip moves far enough to create unwanted contact This speed is usually determined by the bandwidth of the detector circuit The Retract ramp speed sets the speed that the tip is retracted if no response was detected during the tip ramp It can be set to a higher value than approach since no monitoring is necessary and a faster approach cycle can be achieved The Tip retract distance determines how far to pull the tip
255. on window to include the entire 100 micron range and the red box would occupy 1 10 of the space When zoomed back to maximum range view clicking the white icon again will return the view to the previous zoom level If the user wants to move to a different region of the surface the Range button in the upper right corner of the window should be clicked The tip is retracted from the surface and it moves to the upper right corner of the red box As the front panel range knob is now turned the size of the red box will change If the X and Y Offset knobs are moved the location of the red box will shift When the knob adjustments are done click the Range button again to return to imaging mode This is the only time the front panel knobs should be used to shift the imaging area when a DSP scan board is in use If the Range button has not been clicked and the knobs are moved then the Navigation window will no longer be accurate as the software will not realize the knobs have been changed If a very small scan area is desired that covers less than 5 of the area of the red box the size of the red box must be decreased using the Range knob to improve the data acquisition The adverse effect exists because of how the 16 bit DSP board creates the scan raster The scan output is 10 V using a 16 bit DAC and this signal is then amplified by the high voltage gain If the scan is limited to less than the 10 V limits then fewer DAC bits are used If the scan
256. one If the bias out put is externally amplified or attenuated here should be amplification number or attenuated fraction The STM Current per monitor volt depends on the overall preamplifier gain A gain of 10 would mean 10 nA volt A gain of 10 would mean 1 nA volt If this value is entered wrong then all recorded currents tunneling conditions spectroscopy readings etc will be incorrect but can easily be scaled later if the value entered here when the data was acquired is known If it is easier to think of the current calibration factor in terms of a gain factor the correct value can also be used in the Preamp gain entry box This will be the inverse of the setting directly above it and changing one automatically changes the other RHK Technology 14 Troy MI USA XPMPro 2 0 User s Manual Initial Setup Scanner tab The actual calibration values for the particular scan head in use are entered in the scanner tab shown in Figure 5 nagwag A text description for the scan head can be entered in the Scan Head z Description The amount of motion Configure Hardware Settings 3canner Scan head description Feedback per piezo volt for each direction is An Feedback RHK UHV STM ented B the correct box If there is X motion per piezo volt 20 00 nm i Ad aisi s provides pon Y motion per piezo volt 20 00 nm offset and scan then Offsets summed with scan should be checked If one piezo element is used for scan and
257. one voltage is held constant and the other ramps Presssure V Pane Y Min Y Max Auto Log Spectra Count 2 Figure 57 Time spectrum output An example of a defined output waveform is presented in Figure 57 The different slopes seen when moving from level to level are a result of varying the Move Time parameter and clearly demonstrates the ability to acquire data while the output level is changing Point spectroscopy locations Once a specific set of sweep parameters has been entered the next step is to decide where to Spec on CE NL Really m acquire the spectroscopy data at The simplest case is to acquire data Figure 58 by performing the defined spectroscopy sweep at the tip s current location A second very common scenario is to scan the surface and stop at predefined locations and perform the spectroscopy acquisition at those pixels To activate this feature change the spectroscopy mode tool bar Figure 58 dropdown box from Spec Off to whichever of the four defined spectral modes is to be executed during the scan XPMPro contains a vast array of options for defining the locations of the spectroscopy pixels These include arbitrarily defined pixels a regular grid of pixels spread out over the entire image anything from 4x4 to 1024x1024 a regularly spaced array of pixels in a defined region of the surface or all pixels lying along a defined
258. or that on the rear panel of the Omicron unit Figure 25 Omicron 3 Channel microslide controller tab The first parameter in the Slide tab as show in is Use debounce mode This is a legacy RHK Technology 40 Troy MI USA XPMPro User s Manual Coarse Approach parameter that should be turned off unless specifically told to activate by RHK Technology support personnel After starting an approach if the observation is made that the tip is moving backwards change the setting of Z tip approach For any microscope construction one setting will be correct and one will be wrong Once this is determined it should not have to be changed again Slider step time determines the width of the TTL pulse to produce one step Be careful to not set this too long or the microslide unit will interpret this as a held button on the controller and switch into continuous motion mode The value of this parameter needs to be wide enough to produce a step but not so wide that multiple steps are taken After motion stops a relay inside the unit is opened and there must be a short delay when switching directions in order to allow the one relay to open and the relay tied to the second channel to close The amount of time to wait is set using the Direction switch time parameter RHK PMC100 RHK also manufactures a unit to drive stick slip motors which have sufficiently high friction that the conventional kinetic waveform cannot overcome The mi
259. or this is 100 pA As mentioned above ALWAYS make sure this value is BELOW the set point knob value or the approach will continue until the tip is fully retracted and then a crash occurs Be careful not to set it too low or RHK Technology 29 Troy MI USA XPMPro User s Manual Coarse Approach noise in the signal may be large enough to cross the threshold which would cause the approach to stop prematurely Since the software can read the value of the setpoint knob on the front panel of the SPM100 a warning message will be produced if the threshold is set above the knob value For Signal test or Feedback detect modes the Test delay is used to allow a specified amount of time to elapse in case the head is ringing due to transients introduced by taking a coarse step The feedback signal may have large spikes above the threshold which would cause a false engage if the signal was read before the spike decayed For approach types that use discrete steps such as stepper motors kinetic slip stick inchworm etc Approach steps determines the number of steps between in range tests An in range test should be made between a series of steps that cover between 10 30 of the range of the z piezo motion If you have a motor that makes very small steps you can significantly decrease the approach time by increasing this number since there is no need to test for tip sample interaction between each minuscule step Theoretically the approach time will sc
260. ord contains parameters for data acquisition for the on board ADCs The format of the returned word is the same as described in Command code SET DAQ CHANS Command name in Litho files sdc Number of parameters to send RHK Technology 160 Troy MI USA XPMPro User s Manual Appendices Parameters u32 channels Notes This command allows to set the data acquisition channels without having to re configure the data acquisition The channels parameter has the same encoding as in Command code SET POS FB Command name in Litho files spf Number of parameters to send Parameters u32 mode Notes This command sets the positioning feedback The modes are NO POS FB 0x0 This is the default The scan board directly outputs to the DACs FB INTEGRATOR 0x1 This is an I feedback algorithm that runs in the background of the scanning It controls the positioning at any time not just during scanning The FB time constant can be set using SET POS FB TC Using this algorithm you should not try to scan faster than 100 ms line Command code SET POS FB TC Command name in Litho files stc Number of parameters to send Parameters float gain Notes This sets the feedback time constant for the positioning feedback in FB INTEGRATOR mode The default value that is used on the scan board is 0 02857 s or 1 35Hz This value works for a NANONICS scanner For everything else it has to be experimentally determined Please note FB oscillatio
261. orresponding curve The displaying color map can be changed by select another color map at the right of the gray area then click on the replace button By moving the white filled triangle under color table we can control the range of the data that corresponding to it The corresponding data range is the proportional to the position of the X axis Another color table can be selected to display the left out data range by selecting the color table at right side clicking on add button then click on vacancy area Figure shows the effect on the double color table The low part of the image have the display of double color table Repeat the similar procedures will add more color tables At the situation of multicolor table is used when a color table area is selected click on remove button will remove the color table to display data values The color table used to view the image when it was saved will also be written into the SMA file format On the tab the preprocessing selection are the same as the section and third button We can view the buttons on the tools bar as the short cut of these selections Though we will introduce these definition in chapter Analysis and Processing Color Mapping Plot Orientation HSV _ Default I RO PT en b A Pre Processing Data Mode Smooth Mode High Pass Range 4 Color Map Parameters Color Map Mode linear y Z Reference Mode ZExclude 2
262. ose to the edge of a fringe then the tip can be retracted to realign the feedback system to ensure the tip is not damaged if the detector hops from one fringe to the next Once the loop is active the response time can be changed using the Time Constant parameter in the NAV panel Also for user defined mode the digital setpoint can be entered here and the loop will output a correction signal necessary to maintain the input at ADC 1 to the requested setpoint value Tip tracking of a feature Brian Swartzentruber pioneered a very nice Tip Track R technique where the tip is Enable Tip Track O oscillated in a circle while Tracking Channel Topography v ObiectHeight 1 00 nm monitoring an input Ten Time 20 0 ms Object Width 1 00 nm 2 channel The gradient of Phase Lag 0 Deg 4 Orbit Rate 500 Hz s the input is calculated as the tip orbits and small Figure 130 offsets are applied to the tip position to keep the location at the top of a maximum or the lowest point of a minimum XPMPro is capable of the same technique because of the DSP board The x and y output voltages have small oscillations digitally added to them while an input signal is measured using the DSP ADC 1 To activate this feature connect the channel to be monitored to the input and configure the parameters appropriately for the system under study The parameter window is accessed through the Tip Tracking pane of the NAV window Whatever output channe
263. ot smaller than the conversion time of the A D converters used float UpperThresholdValue This gives the upper Threshold Value for the ThresholdMode When the ADC specified in AD Channels reads a value that exceeds this the Z sweep output will not be increased beyond that DAC value Please note that for this to work bit 4 in the AD Channels parameter of this command has to be set correctly float LowerThresholdValue This gives the Threshold Value for the ThresholdMode for up sweeps Command code BSET DIO Command name in Litho files dioset Number of parameters to send Parameters 432 bit pattern to be set Notes All bits that are ONE in bit pattern to be set will be set in the DIO port of the scan board The bits are RHK Technology 155 Troy MI USA XPMPro User s Manual Appendices DIO PAGE PAGE signal for SPM100 electronics not connected at this moment DIO LOOP INVERT LOOP INVERT signal for the SPM100 electronics not connected at this moment DIO Z RETRACT Z RETRACT signal for the SPM100 electronics not connected at this moment DIO HOLD INT HOLD INT signal for the SPM100 electronics not connected at this moment SCANNING LED Scanning LED on the front of the SPM100 ADC CONV START This starts the conversion of the 2 scan board ADCs OVERRIDE LED Override LED on front of the unit The coding of these values is defined in commands h Command code BCLR DIO Command name in Litho file
264. ound the center point X dX0 Y dY0 The coordinates of the center point are given relative to the current position The length is determined by the given angle Negative angle means clockwise Command code SET ANGLE INCREMENT Command name in Litho files sai Number of parameters to send Parameters float angle increment Notes This allows to set the angle that the arc command connects with a straight line The default value is 1 degree Decreasing the value makes arcs smoother but a little slower Command code SHAKE HAND Command name in Litho files sh Number of parameters to send 2 Parameters u32 mode float wait_time Notes This allows to put wait times and handshake events into lithography files For mode 0 or mode a positive wait time will be interpreted as a wait time For mode 2 the wait time is ignored A negative wait time will cause handshaking The handshaking depends on the mode that has been set mode 0 FLAG A FLAG B handshake TTL lines mode 1 the command suspends until a SHAKE HAND command with mode 2 gets sent mode 2 The line draw gets continued Combined with the positive or negative values that are allowed for wait_time there are six possible circumstances that can be executed They are Mode 0 and positive wait time wait for wait_time Mode 0 and negative wait_time Use FlagA FlagB method Mode 1 and positive wait time wait for wait time Mode 1 and negative wait time ethernet handshake wai
265. ount equal to pre sample delay points spectrum since the delay will occur at each step of the output sweep Spectrum delay is a delay to wait after the output reaches the initial value before reading the first point This is only applied once per sweep at the initial voltage step Since the first point often requires a large voltage change it is often a good idea to wait extra time only at the first point since the transient induced there is larger than the transient induced moving from step to step while acquiring the data Using the this value avoids making the pre sample delay large enough to accommodate the first point only which would add unnecessary waiting time at each subsequent voltage value Time spectrum is provided for information purposes It takes into account the delays the sweep rate setup rate and the sampling time and should be used as a guide to insure the feedback loop is not turned off for too long of a time as undesired tip sample contact could occur If the drift rate is relatively large the tip sample separation may not be constant during the duration of the voltage sweep which is an essential assumption when interpreting the acquired data Try to avoid leaving the feedback loop off for a length of time comparable to the amount of time it would take the tip and sample separation to change a significant amount By default the data is acquired at the
266. our parameter sheets to enter the settings for this measurement Input tab The Input section is used to select which channels should be acquired at each voltage step All channels with the check box filled in will be sampled at each voltage step The gain of the ADC board can be changed before reading each signal to increase resolution If the signal will be limited to a small range of values the gain can be changed so all 16 bits of the board are limited to a voltage range less than 10 V Valid choices here are 10 V 5 V 2 5 V and 1 25 V To acquire photon counts as a function of voltage turn on one or both of the photon counting channels and enter an appropriate pulse counting time in the box next to it A meaningful label can be provided for all of the stored spectral routines by entering a new name in this tab Once the label is changed here all other references to this mode will use this name Output tab The output sweep is configured in the tab shown in Figure 51 There are 3 modes of point spectroscopy in XPMPro 2 0 The mode named Ramp will output a voltage from an initial value to a final value with equal spacing between voltage steps This is the conventional mode that most users employ A second mode is named Discrete and it allows a fixed number a minimum of one and a maximum of ten of voltages to be output with arbitrary values The steps do not have to be equally spaced or even in sequential order
267. output from the DAC is 1V instead of having 65536 steps there will only be 6 553 steps that can be taken If the scan range is reduced more so that output is only 100 mV now the DSP board can only have 655 different steps When trying to acquire an image with a pixel density of 1 024 or larger the DSP board can not take distinct steps for each pixel when there are only 655 possible values All controllers that lack a separate gain stage that can reduce the scan voltages in front of the high voltage stage will have this problem The SPM100 solves this issue through the use of the front panel Range knob If the scan range requires a 1V raster before the high voltage gains stage instead of utilizing only 6 553 bits of the DAC it is far better to continue to have the DAC have 65 536 steps available to scan from 10 V range and then reduce the raster voltage before the high voltage amplifiers by using an attenuator like Navigation Setting the Scan Range knob When the red box is shifted using the front panel knobs the yellow box moves with it as it stays in the same location relative to the red box Therefore the section of the surface to be imaged will Tip Navigation Speed O Image Speed Tip Speed 381um s 2 comfortable for a particular scan head and experiment The choice of selecting scan speed is made in the Settings window shown in Figure 42 One of the three radio buttons in the Speed section should be chosen The s
268. oved to the proper pixel and all input channels to be imaged have Towel RHK Technology 126 Troy MI USA XPMPro User s Manual Data Acquisition Techniques been read by the ADC board The TTL output channel is then changed to the HI level The external equipment recognizes the voltage applied to its input has changed and interprets this as the trigger to commence data acquisition At some time later the delay between A and B depends on the equipment being used For example a laser may need some warmup time The equipment changes its output voltage dotted line to a HI value point t which XPMPro reads on the TTL input channel and interprets this to hold the tip position because the external equipment is in the process of taking data When the external data acquisition is over the status line on the equipment Spectroscopy es is changed to its original value point P Point Spectoscopy lig duce t3 XPMPro reads this on the TTL ae input channel and interprets this that MM odes the external acquisition is finished ee Qu soral gt F Z long range Handshake Output Line UserTTLOut v The control electronics then will move te HN ME CTETUR the tip to the next pixel and all T r alipoona HM channels will be read to form images E iu a The external acquisition routine is then HERE ientedoresi e Cert ll repeated at every pixel Handshake Threshold State S Active High O Active Low Hands
269. ows the user to place any image in the scan area window for reference purposes When clicking on this button the cursor will change shape and a RTAW could be clicked or an image currently displayed in a data analysis window can be loaded A large image can be acquired and then placed in the Navigation window in order to accurately reduce the scan frame to focus on a small object visible in the larger scan frame The image is loaded as soon as a real time display window is selected if the image is not completed a partial image is loaded and the rest of the image is filled in with null values To ensure a complete image is loaded either stop the scan at the end of the frame and then load the image or use the Load at End button This selection will automatically load the selected image when it is completed and then the next frame acquisition will start The horizontal and vertical lines in the NAV window represent the center of the possible tip scan area no piezo deflection and are used as a reference to track how much tip motion there is when the front panel offset knobs are turned When an image is loaded the black lines indicate the center of the reference image More than one image can be loaded at the same time and a panoramic view provided by many images combined together can be exported from the NAV window Details for this function are described in the Advanced Techniques chapter The Zoom In and Zoom Out buttons magnifying glass icon are used
270. present compared to the I V data because there 1s little reason for coupling between the current and the z piezo position given a good scan head design where the two signals are isolated from each other It is usually a good idea to still use a small pre sample delay in the spectroscopy window to allow the piezo tube to settle for a small amount of time after the tip has moved but large peaks as seen in the I V section above are rarely seen The slope of an I z curve when plotted on a linear z logarithmic I scale can be determined by a simple fitting routine and this would be used to calculate the barrier height Once the slope m is known the barrier height is calculated using this equation m 2 023 Various features on the surface such as contamination or defects can create a local variation in the barrier height and this can be seen by acquiring I z curves in two distinct regions and comparing the value of derived from the two sets of data Additionally as described above this data is also used to determine the attenuation length that is needed for proper normalization of variable gap I V spectroscopy data The correct value can be ascertained by simply looking at a plot of the I z data and noting the ratio of two current readings that are separated by a given distance Select any current value and then find the value that is e times smaller Barrier height measurements using a lockin amplifier As discussed in the previous section
271. presents the mouse cursor path and the light blue line represents the actual tip path The most dramatic difference is when drawing the circle in the lower left corner The first half of the circle was drawn while slowly moving the mouse so the tip kept up to the location The second half of the circle was drawn very quickly such that the next time the software measured the mouse location and sent the destination to the DSP board the circle was done but the tip had not moved far Therefore the tip was instructed to move directly to the end of the circle and it took the shortest possible path and went straight across the inside of the circle to the endpoint of the mouse path Also as mentioned earlier the color of these lines can be redefined by right clicking in the window and choosing the Drawing Colors submenu As can be seen from the diagram very complex shapes can be drawn and the tip will trace out the shape as long as the mouse cursor is moved slowly and the tip is permitted time to catch up to the mouse as the path is drawn Actual lithography takes place when some condition is changed during tip motion This condition induces a feature to be created under the tip Examples include a brute force method of RHK Technology 133 Troy MI USA XPMPro User s Manual Data Acquisition Techniques pushing an AFM tip into a self assembled monolayer to plow the material out of the way or applying a bias to a coated cantileve
272. propriate scale factors then entered into the software A known grating should be scanned and after the features are measured the known dimensions are compared to the output voltages from the displacement sensors to provide a distance voltage calibration The second way to calibrate the position sensors is with the automatic calibration feature The DSP scan board performs a series of scans with specified dimensions and the output of the sensors measured with the ADCI and ADC2 Since a known distance was scanned the sensor output per distance can be calculated and the calibration factors will be automatically entered into the software in the advanced feedback tab Note that when XPMPro sets up the measurement series it relies on knowing the position of the front panel X Scan Range knob in order to specify the scan size to the DSP board The sensor calibration factors are therefore dependent on the X Scan Range knob position If the range knob is turned to increase or decrease the available scan area the automatic calibration routine MUST be performed again Feedback tab The parameters that determine the performance of closed loop scanning Configure Hardware Settings ax are entered in the feedback tab as Hardware shown in Figure 6 Turn On Enable cd a positioning feedback for scanning to Head a dT proceed under closed loop control All Ric Ps cem dd e piezo nonlinearities and drift should be de ANNO stone EE eliminated Do not ac
273. r a given change in the input signal The units can be changed when in user defined mode by entering the appropriate value in the Feedback Units box This can help entering meaningful values for the calibration factors Under certain conditions the auxiliary feedback loop can actually distort the topography data and cancel out real differences in height on the surface To avoid this situation the loop can be disabled during imaging by checking the appropriate box If it is important to always have the auxiliary loop active an interferometer feedback system is an example then the loop can RHK Technology 130 Troy MI USA XPMPro User s Manual Data Acquisition Techniques automatically be activated as soon as the program starts Keep in mind once the loop is activated it will remain active inside the SPM100 unless the controller is turned off So the software can be halted but the auxiliary loop as well as the main analog feedback loop will both continue working Any other signal can be monitored while the auxiliary loop is active and corrective action taken if a threshold condition is met One action that can be taken is the rear panel Digital IO Pen UP Pen Down line can be switched high to notify the user the threshold has been exceeded This line can also be connected to something external so a safeguard action is produced in case exceeding the threshold will cause an undesirable action If an interferometer feedback system is getting cl
274. r on a silicon surface in the presence of a water meniscus The conditions are defined using the window opened from the Manipulation button on the right side of the main area There are two tabs in the window related to manipulation and Manipulation lithography The first one is used to 6 ih 3 Tip Move determine the conditions during Move Ip Mave Tp Drag motion and the second one sets the iP LIRE scale factors and physical units of the d 1 00 mms Sg 1 00 uns E applied conditions for ease of use Delay 10 00us oos 4 Different speeds can be specified for the two motions Be careful to not use bicis Segurutik an excessive setting for a given Enable n ni feedback bandwidth or the tip may x Move Level Y Y not follow the surface and could be s Enable O O damaged by tip sample contact Also O z z rag Level 2 Y what may be appropriate one day may not work well on another day due to the changing feedback settings that often are required When changing conditions to induce features onthe Figure 134 surface it is important to use a velocity that allows time for the reaction to take place so the feature is drawn When dragging an atom to another location a high speed could cause the tip to lose the atom and leave it behind Some experimentation will be required to determine optimal conditions A delay can also be entered to allow the system time to equilibrate before actually commencing motion E Cancel
275. r this can be used to automatically center the z piezo in its range when an approach is finished If the coarse step size is close to the total z range then this should be set to a large negative number to avoid taking one extra step which would cause tip sample contact if the z piezo has run out of range after that step When using Feedback detect or Tip Retract mode Feedback delay sets the amount of time to test if the position of the z piezo is above the threshold value If the signal remains above the threshold after this amount of time the controller stops the approach and assumes it is complete As the feedback loop response time is lowered this value should be set higher since the SPM 100 will require more time to extend the tip past the threshold while probing for the surface if Tip Retract is used Values as high as 5 sec may be needed when the feedback loop is set very low as typically used in NSOM If the approach stops after a single step but the SPM100 still shows no feedback signal then this value needs to be increased in order to give the feedback loop a longer time to extend the z piezo past the threshold When Signal detect is chosen the approach continues until the feedback signal is above the Signal Threshold The parameter can be set to any value within the input range of the feedback signal When using a STM preamplifier with a gain of 100mV nA the maximum value that the feedback current can be set to is 10 nA A typical value f
276. rate windows This provides a simple way to understand the effect of various pixel widths on the result The wider the pixel value the smoother the derivative will be but a loss in detail will also take place The derivative of each line of data in the correct direction is calculated and an image formed by combining the differentiated lines When Image Gradient is chosen the slope in the X and Y directions are both calculated on a pixel by pixel basis and the image is a representation of the two slopes combined This is particularly useful in AFM friction measurements to see the boundary 41 07062171 Topography Wow Scan Size 40 1 nm Cursor Mode None Figure 90 2 24 nm 293 30 Active View Original Image between regions of local variations in the frictional coefficient If an image contains a repeatable pattern of some sort Image Correlate can be used to find all the locations of the repeatable pattern as well as the AutoCorrelate E Correlate Points O Add Points Remove Points O Expand lt gt Don t Expand average appearance of the pattern Use the Define Regions icon to draw a box around the feature to use as the kernel A good illustration to explain the concept is the image shown in Figure 90 A small region is picked that has an isolated adsorbate on the surface and then the calculation takes place The routine will move this sub region
277. rature pressure etc as the experiment continues without unnecessarily recording them at each pixel during an image Any input checked in the Channels tab Figure 67 will be measured at the beginning of each line and stored with the images If a record of the voltage output should also be recorded then Record Output should also be checked and for a long sequence of images taken with delays in between it can be helpful to record the time the image was acquired In this case Spectroscopy CES Point Spectroscopy Spectrum 1 Control Data Input Output Adv Modes Time Spec Spectrum 2 Spectrum 3 Spectrum 4 Scope Image Spectroscopy Multi Parameter Im Automatic Parame Control Handshake Automatic Parameter Incrementing Channels Topography Current Aux Aux2 Aux Aux 4 Aux 5 Aux 6 Record output Record time Al rate Al tate DD D G DD E B o K E RI A D Range A D Range A D Range A D Range A D Range A D Range A D Range A D Range A D Range A D Range Counter Time Counter2 Time AD to 10 Volts w 10 to 10 Volt 10 to 10 Volt 10 to 10 Volt lt 10 to 10 Volt 10 to 10 Volt Es Es 40 to 10 Vol 10 to 10 Volt lt 10 to 10 Volts Ix 10 to 10 Volt v Record time should be checked Figure 67 Channel setting for Automatic paramet
278. re era a id appear on the screen Use the dr Mode NENNEN eem mouse to select each box and as Interval 3537 ms fj EschLocation O TEPE Uem apriopuiaebr Te ird cmm green box should be placed hindi Paame oo PR co around the feature of interest and uu dem EN ERE E the cyan box should be large venue enough to make sure the feature Z offset before specum 0 00 nm i does not drift outside this region E vs between rescans The larger the ii Um e search area the higher the likelihood of finding the feature but the longer the scan will take lee Aj XPMPro will determine the number of pixels included in the cyan box given the currently Figure 115 loaded image s pixel density As the boxes are resized and moved the Scan Area X Offset and Y Offset entry boxes display the x Point 1 at x 1 201 y 0 626 values for the spectroscopy box instead of the normal imaging box Once the Spec Location is changed to any value other than Drift Ref the entry boxes return to displaying the normal scan area parameters It can then calculate the required time to obtain an image this size at the presently configured scan speed An example of a selected feature and a scan area box is shown in Figure 116 After defining the feature and the search area place the tip in the location containing the feature Move p Drift Size 400 00 nr Mouse Action O ify Scan Area to be studied
279. reasing resolution The SPM 1000 system uses a 16 bit A D board to read the data and this limits the dynamic range of any measurement However the resolution of any single measurement can be increased if the data will vary over only a small range The overall gain of the tunneling current system is determined by the first and second stage preamplifiers used to convert the tunneling current to a voltage The largest voltage range that can be input to the electronics is 10 V The preamplifier gain and this voltage together determine the maximum current that can be detected For an Spectroscopy Spectrum Input overall gain of 108 the maximum current is 100 nA and if the gain of the ADC board is B Point Spectroscopy amp Spectrum 1 Control Type Name Spectrum 1 Input not increased the least significant race Topography O A D Range 10to 10 Volis v bit LSB when acquiring I V Eie Current ea A D Range 10to 10 Vols w t pln data would be 3 05 pA The pany Aus O A D Range 10to 10 Volis v resolution of a measurement can id Aus2 O A D Range 10 to 10 Volts M E cope j p be increased by changing the gain amp Image Spectoscopp CIA Hange 10 to 10 Vols ag i A DR a of the ADC board for the channel T pn A i Pis M ux ange 10 to 10 Volt to be measured Control a Channels Aux B O A D Range 10to 10 Volts The window controlling the gains Handsha
280. rical characteristics there is a never ending struggle between getting high quality data and staying over the feature of interest The more readings acquired and the slower the voltage is ramped the better the data However this also takes more time Since all microscopes exhibit some relative motion between the tip and sample over time the longer the acquisition takes the confidence in staying over the feature for the duration of the experiment decreases This delicate balancing act has a new weapon to combat the effect In version 2 0 of XPMPro it is now possible to stop the spectroscopy sweeps rescan a small area of the surface locate the feature of interest and apply a correction voltage to insure the tip remains over the feature sweep after sweep after sweep Note this only makes sense if the spectroscopy is one of the point modes and not within an image scan To activate the algorithm choose XYZ Stabilize in the Advanced Modes tab for the active spectral mode as shown in Figure 115 RHK Technology 115 Troy MI USA XPMPro User s Manual Data Acquisition Techniques After configuring the spectral mode the next step is to acquire an image and load it into the NAV window to know where the feature 1s located Next the Spec Location pane should be opened EXT and the Spec Location parameter a changed to Drift Ref A cyan box Breeds with a small green box inside will
281. ry channel being used could be renamed to something more descriptive like barrier height or amplitude This is done in the Settings Operating modes Define tab While the tip is scanned the two input channels will each be sampled for an equal amount of RHK Technology 119 Troy MI USA XPMPro User s Manual Data Acquisition Techniques time before the tip is moved to the next pixel Both the topography and lock in signal should also be saved in the data files The signal stored from the lock in output then has to be converted from Vout of the lock in into eV of mean barrier height The derivation of this scaling factor is presented below From basic tunneling theory we know the current is an exponential function with the form I e ok where k is constant that includes the barrier height and z is the tunneling gap distance A typical value gives a decay of about an order of magnitude in current for every 1 Angstrom change in the gap distance If we modulate the gap distance by a small amount 6z using a sinusoidal function then the gap width will have the form z z 0zcos w t and the tunneling current then has this form I ace 2k 20 8zcos ws which can be rewritten as 2k z 2k zcos ct Ixe e If the modulation frequency is well above the bandwidth of the feedback loop the first part of the expression is simply the normal feedback tunneling current lo If the modulation amplitude is small then the expone
282. s dioclr Number of parameters to send Parameters 432 bit pattern to be cleared Notes All bits that are ONE in bit pattern to be cleared will be cleared in the DIO port See description of BSET DIO for the bit functions Command code TAKE DIO Command name in Litho files diotake Number of parameters to send 1 Parameters 432 bit pattern to be taken Notes All bits that are ONE in bit pattern to be taken will be made output bits so that the scan board can control them Either the scan board or SPM32 can control the bits Please remember to set the control back to SPM32 for all bits Otherwise SPM32 will not work correctly This function requires a revision number of 3 and a kernel revision number of 1 4 to work Please contact support rhk tech com for details of a scan board upgrade Command code TRIGGER ADC Command name in Litho files trigadc Number of parameters to send 0 Notes This triggers an A D conversion on the two ADCs on the board Use READ ADC BUF to get the values 15 data pairs of the two ADCS can be stored in a buffer on the board RHK Technology 156 Troy MI USA XPMPro User s Manual Appendices Command code READ ADC BUF Command name in Litho files gadc Number of parameters to send 0 Notes This command reads the on board A D conversion buffers The A D conversions can be triggered via the external trigger input as well as via TRIGGER ADC command The data for the first 15 trigger e
283. s Tip retract delay Figure 16 Screen shot of tip control and the second one is Tip restore delay dd Io ddl II ully i t A Both of these can be set to zero if no retracted fil IN if M transients are introduced into a scan head idi iN IN by sharp motion of the z piezo or sharp EE motion of a coarse stepping mechanism nhac T E T E m 3 The basic timing of a Tip Retract mode TENE o dI EN approach is illustrated in Figure 17 The N I dI tip begins fully extended and the E TT quens software sends a signal to the SPM 100 S aU L El i to retract the tip The time it takes to I I Repo e 1 fully retract the tip t is determined by t4 t2 t3 t4 t5 te the Gain and Time Constant of the feedback loop When the software Figure 17 Basic timing of a tip retract mode approach RHK Technology 31 Troy MI USA XPMPro User s Manual Coarse Approach detects the tip is fully retracted it waits time t the Tip Retract Delay Then the software performs whatever is necessary to take the requested number of coarse steps Approach Steps The amount of time needed here will vary widely depending on the setup for the selected approach method Kinetic stepper motor etc After the final step is taken the software will wait for a delay t3 specified by Tip Restore Delay and then send a signal to the SPM 100 to start ramping the tip forward to search for a
284. s not scan over a square region of the surface acquiring image data at pixel locations and also stop at these locations to acquire spectroscopy When multiple curves are present on the plot Spectra to Acquire greater than 1 there is need to select an active curve both for highlighting and to place the cursors on a specific curve This is done using the left and right arrow buttons Each time one is clicked the active curve increases or decreases by one The active curve number is displayed in the gray box in the middle of the window Additionally when looking at stored data the status bar of the graph window will display the location of the tip when the highlighted curve was acquired Next to the active curve selection buttons is a magnifying glass icon this is used to zoom the plot The mouse cursor changes shape when this is active Click and drag to form a box that determines the new visible part of the curve This method is usually more convenient than trying to manually adjust the x and y axis minimal and maximal to have only part of the curve visible After zooming to the approximate region of interest using the axis adjustment controls can be convenient for small adjustments The next icon is for the cursors There will be two placed on the plot and they can each be dragged around to take measurements from the plot To see the values of the two locations use the Cursor tab on the right side of the window The final icon in the group that looks
285. scan and observe Use Bias Volt O O the change in tip quality by comparing the section of the image taken before the Handshake O pulse with the section of the image taken Litho ON Vot gov after the pulse It is possible to predefine two different pulses and choose the Litho OFF Volt oy 0v appropriate one for the particular effect Voltage ON 1 00 ms 1 00 ms that is desired The pulses are defined in z the window Figure 34 opened using the Delay 0 50 ms 0 50 ms Pulse Setup button Repeat Count 1 1 The DAC outputs can also be manually Control Loop PA ESA OR set to a specified voltage and held there by DAC ERA clicking the DAC Control button in the T DAC 24 DAC 24 pane This window is shown in Figure 35 Output Units Per 4 pov 100v To place a known output voltage on either D Vok of the DACs available on the DT3016 Bie Gage uv M board enter the value in the box or use the scroll buttons The output voltage will be changed immediately at the rate specified by the Ramp Rate parameters If the rates are set to zero then the voltage will jump to the new value at the maximum DAC output rate of the ADC board 250 kHz Be careful changing the output voltage since undesirable effects could occur depending on what the outputs are connected to on the rear panel of the SPM100 or some external piece of equipment The value will be present on the DAC until changed again using the same entry box or if some other routine in the softw
286. scanning until stopped or the specified number of images are acquired and then the scanning automatically stops Advanced modes tab In the last tab some of the sophisticated features of the spectroscopy routine can be configured The parameters in the Monitor Mode and Variable Gap Mode sections will be ignored unless specifically activated for the routine If the spectroscopy routine needs to be synchronized with external equipment of some sort the Handshaking routine can be called during each sweep The conditions of the handshake are configured in the handshake tab in this same window as shown in Figure 54 It will be covered in detail later While data is being acquired the realtime spectroscopy window will be present on the screen and the curves will be drawn on the graph as they are acquired The graphics overhead for this capability may slow down the actual acquisition rate in some cases To make sure the data is acquired as quickly as possible the Suppress inline graphics updates box can be checked Then the curve will be drawn after the sweep has reached the final spectroscopy value and all data for that sweep has been read RHK Technology 68 Troy MI USA XPMPro User s Manual Initial Acquisition If a large number of curves are going to be acquired then is usually a good idea to reestablish feedback between curves to make sure no drift has caused the tip sample separation to change and all curves can be considered to be taken
287. sirable to continue scanning after some unattended experiment has completed If for example Scan Autosave was on to write all images to disk but it was desired to only take data for a few hours instead of a long period of time a number can be used here to stop acquiring data after this number of scans has been taken There are two imaging modes in XPMPro The first one is called Normal and it is identical to the manner in which SPM32 acquired data Each set of data acquired during one trip across the surface and back is displayed after that line is finished Any changes in parameters tip location scan speed etc are sent to the SPM100 after that line and take effect immediately This is also the mode required to stop at predetermined pixels and acquire spectroscopic data If this mode is chosen then a Scan Delay Avg value Figure 9 Screen shot of scan setting RHK Technology 19 Troy MI USA XPMPro 2 0 User s Manual Initial Setup will occur at the end of the frame before the next frame starts If the tip needs to quickly return from the bottom of the frame to the top of the frame this delay allows piezo creep to decay so the first few lines of the subsequent frame do not show distortion Another useful feature of this delay is when acquiring an automated series of images in unattended mode The delay can be used to allow a large amount of time to elapse before the next image is acquired in order to give the syste
288. size is changed the time to complete one scan line is adjusted to maintain a constant velocity over the surface The line time required to maintain this velocity will be displayed in the Line Time box for informational purposes To acquire data over a rectangular area of the surface the Image Aspect Ratio can be changed A value greater than one makes the x axis larger than the y axis A value smaller than one makes the x axis shorter than the y axis Note when this is done the pixel spacing along the x and y axis will be different values The Rotation Increment determines how much the scan frame should be rotated each time the rotate button in the NAV window is clicked The unit for the entry is degrees The Scan shift increment is the percentage change relative to the current scan size of the X and Y Offset values for each click of the lateral shift buttons in the NAV window For example if the scan size is 100 nm and the parameter is 5 one click of the left button will change the X Offset by 5 nm Scan shift increment is the percentage of the actual scan size that the area should be increased decreased for each time the increase decrease button is clicked If the scan size is 100 nm and the increment is 5 clicking the decrease button once will make the scan size be 95 nm another click will make the scan size be 91 25 nm moves can be determined two different ways It can use the
289. sorbate is on a terrace and the pixels at a step edge show large variations in z This is responsible for the dark regions running along each step edge in the image To view the correlation map without the crosses click the Clear button Also all the regions with a correlation above a threshold set in the correlation window are averaged together to produce an optimized kernel Figure 92 Since all of the features that matched the defined kernel are averaged together signal to noise ratio is greatly reduced and a more idealized or averaged appearance of the interesting feature can be seen To manually remove one of the locations from the averaging calculation make sure the Remove Points radio Wok button is checked and click on the cross to remove that location 41 070621 1 Correlation Average A cross distribution of any two images of the same size can be calculated using the 2D Histogram menu item When chosen the cursor changes shape and two images should be selected The Z values of the first data page are plotted along the X axis and the Z values of the second image are plotted along the Y axis The Z values of the result correspond to the number of pixels having the corresponding pair of Z values in the original images All the points in the 2D correlation of an image with itself will lie on the diagonal indicating perfect correlation This tool is most useful for correlating contrast between multiple images of the same area su
290. speed of 0 33 mm s is possible To avoid ramping the z piezo over its full range turn ON Use distance limits This may be useful if there are resonances present in the scan head design which are excited when the Z piezo is near full extension or full retraction Also if the z piezo is modulated to excite a cantilever when the piezo is fully extended or contracted the excitation will not be correct since the motion gets clipped at its endpoints In this case the range can be centered about zero volts or the piezo element s equilibrium length Min my and Max limits are used retracted oe z A D to restrict the range of retracted motion The Z calibration of the piezo element must Approach E D NM A be reasonably accurate or threshold the actual distance will differ from the entered PT MEER AN MARCO dad values The z 0 distance 5 ee uae ue ended is the value when the z fully piezo is at its equilibrium 9Xtended length Figure 20 Timing diagram with Z Offset Step Mode and Tip Retract There are some scan RHK Technology 34 Troy MI USA XPMPro User s Manual Coarse Approach heads in existence where the coarse step size cannot be made smaller than the z piezo range In these models it is necessary to add a separate piezo element for z offset which must be extended stepwise between each coarse step to fill in the motion taken by large coarse steps The piezo starts out fully contracted and if no feedback
291. st one records a series of images with a delay between each image but does not change any voltage value during the image or between images The second one would only change a voltage without recording images and the third one is the most common method A voltage is changed after a sequence of events and the images recorded All of the channels turned on in the Settings Scan Input tab Figure 11 are acquired during the scan just like conventional imaging The difference from conventional imaging is the possibility to alter a voltage every few lines or to setup an experiment where a voltage is changed after each image and all acquisition continues automatically without user intervention The Ramp type determines how the voltage should change It can proceed ow to high high to low low to high to low and high to low to high The Ramp mode selects if the voltage should RHK Technology 82 Troy MI USA XPMPro User s Manual Initial Acquisition change within a single image line by line or after each image before the next one starts image by image The limits of the voltage are entered in the next two parameters and the Ramp standby value specifies the voltage level the DAC is set to when no acquisition is occurring The Image count is used to specify how many consecutive images should be acquired for the complete experiment when using image by image mode In this case the amount the voltage changes between each image is simply the total
292. t List List of object stored after the sequential data header Currently we are storing RHK Technology 146 Troy MI USA XPMPro User s Manual Appendices 1 Image Drift Header 2 Spec Drift Header 3 Tip Track header struct StipTrackInfoHeader 1 FILETIME m ftStartTime float m fFeatureHeight float m fFeatureWidth float m fTimeConstant float m fCycleRate float m fPhaseLag unsigned int m unStringCount unsigned int m unTipTrackInfoCount Stores the array size of the StipTrackInfo rhk string m szChannel STipTrackInfoHeader struct StipTrackInfo Array of this structure will be stored in the tip track data 1 float m fCumulativeTime float m fTime float m fdX float m fdY STipTrackInfo Data Info An array of Data Info is stored after the page header object list It contains the information about each parameter stored in the page data The following are the parameters in this structure 1 Param gain Data Type float Bytes used 4 bytes 2 StrLabel Data Type string the string size will be written before the string 2 bytes Name of the parameter 3 strUnit Data Type string Unit of the Parameter The above details will be repeated for n time where n is the Param Count PAGE DATA Page Data size and file Offset can be obtained from the Page data Object Stored in the RHK Technology 147 Troy MI USA XPMPro User s Manual Appendices Page Index array Reading that much
293. t appear in the input signal it will only be present in the topography channel 2 Similarly high frequency noise will not appear in the topography signal since the feedback loop will ignore any signal on the input above the bandwidth cutoff and all spectra above this frequency will be essentially flat 3 When the feedback loop is off then all noise sources will usually appear in the input signal channel since the variations of the tip sample separation will not be corrected by the loop This is usually the preferred method of looking for noise sources Measuring the input signal with the feedback loop deactivated while in range can provide the full spectrum of noise peaks to be concerned with Wh Noise Power E A eee E _ E EE gt 002 om zl pel Power Spectrum a 1 0 Curves Layout Cursor Mode Noise Power File Save Data Source faxt l Control Status Feedback off 7 osd Spectrum Delay s i Stabilization Interval s g Data Range 12515 1 25 Volts y 2 us Points to Aquire Sr A gt Spectra to Acquire e wg E Sampling Rate 250 00kKHz 4 3 E Bandwidth 25 00 Hz Interval 85357 mH2 70 Total Time ems ee oT rsen 024 Auto Correlate L Help 4 5 Frequency Hz Spectra Count 0 ZA Figure 63 FFT spectroscopy window Another important point to bear in mind is the interpretation of the spectra when out of feedback range and when in feedback range When out of range
294. t for SHAKE HAND with mode 2 Mode 2 and positive wait time continue drawing Mode 2 and negative wait time continue drawing For mode 1 and a negative wait time no UDP packet gets sent If that is required a GET STATUS command needs to be placed in front of this instruction in the litho file RHK Technology 171 Troy MI USA XPMPro User s Manual Appendices Command code TRACK FEATURE Command name in Litho files tf Number of parameters to send Parameters u32 ON OFF Notes This starts or stops a feature tracking as set up with SETUP TRACKING The word ON OFF can have these values 0 gt shut off feature tracking 1 gt start feature tracking Command code SETUP TRACKING Command name in Litho files sft Number of parameters to send 10 Parameters u32 mode u32 nconv float Circle Radius float Circle Freq float TimeConstant float ConeHeight float PhaseShift float Wait Time u32 circles trace sample u32 not touch trace Notes This command sets up the feature tracking In order to start feature tracking mode use the command TRACK FEATURE The feature tracking algorithm draws a circle of radius Circle Radius around the current position and calculates the slope in X and in Y direction using nconv A D conversions along the circle circumference Assuming that the feature is a cone of height ConeHeight and that the circle radius is chosen in way that the circle is at half the cone height it calculates an X and Y disp
295. t parameters For some starting numbers set the modulation voltage on the lock in to 100 mV which should correspond to shaking the tip a tenth of an angstrom As the signal is increased some ripple on the tunneling current should appear when displayed on an oscilloscope A frequency of a few kHz is a good starting point When the oscillation amplitude is increased the output signal of the lock in amplifier should also increase since the amplitude of the current modulation also increases It is a good idea to make a quick calculation while not scanning to see if the value for the barrier height makes sense given the tunneling conditions The conversion from the output voltage of the lock in amplifier into tunneling current should be whatever gain is in the system If an IVP 200 1s used which provides 108 gain and the IVP PGA is set to x10 the overall gain is 109 V A so 1 V output from the lock in corresponds to 1 nA current If the output signal from the lock in amplifier is 10 mV for example then the resulting modulation on the current due to the z dither is 10 pA 0 01 V 1 V nA is 0 01 nA which is 10 pA To calculate the local change over certain features average the voltage output from the lock in at pixels that are over the feature to obtain one value Then convert this to equivalent current as described previously and this can then be converted to the mean barrier height using the final equation above This should be compared to the value
296. ta 12 PRM 13 Thumbnail 14 Not implemented PRM Header 15 Thumbnail Header 16 The basic unit in a file is a page A page can be a single image a single spectrum or a group of spectra One file may have many pages including combinations of image and spectral data Each page starts with a header to provide the information about the page layout within the file as well as an array to point to each page Page Index Header The page index header stores the details of page index array which contains the array of page offsets and other info Using the Index array we can locate the required page data thumbnail data for the respective page etc without reading the entire SMA file Page count Data type long Bytes used 8 bytes Stores the number of pages in the page index array Object List Count Stores the count of objects stored after page index header RHK Technology 138 Troy MI USA XPMPro User s Manual Appendices Reserved 2 8 bytes Two fields reserved for future use Object List Stores the Index header objects Currently we are storing one object 1 Page Index Array Page Index Array Based on the page count an array of SPagelndex structure will be stored after the Page Index header Struct SPagelndex 1 Page ID Unique ID for each Page Page Data Type The type of data stored with the page Defined types are 0 image data 1 line spectral data 2 xy data 3 annotated line sp
297. tabilization Interval to any non zero value The length of time to ensure the proper feedback conditions have been reestablished will depend on the bandwidth of the loop which is set by the gain of the feedback signal detector as well as the Gain and Time Constant knobs on the front of the SPM100 If a small signal is read the sensitivity can be increased by changing the gain of the ADC board The Data Range can be decreased such that all 16 bits of the resolution are now spaced over a smaller range which will mean better sensitivity to low level signals Points to Acquire determines how long the acquisition will take More points takes longer but means a smaller frequency interval so a peak can be more accurately located A maximum of 8192 thousand points can now be acquired per spectrum Spectra to acquire is used to select how many time series of data to acquire and average together for the final FFT More averaging leads to less noise in the spectra and therefore a lower baseline but takes longer time To avoid anti aliasing as much as possible the data is now always acquired at the maximum rate 250 kHz for DT3016 channels 2 MHz for the DT9832 USB option and the measured bandwidth of the signal will be half of this value These are displayed for informational purposes only and cannot be changed Based on the Points to Sum setting and the bandwidth the frequency bin size of the FFT will also be calculated and displayed To produce finer resolution i
298. take care of automatically sending the appropriate signals out the correct DAC and also relay the labels and units to XPMPro so the data channels have meaningful names as assigned inside the PLLPro software RHK Technology 17 Troy MI USA XPMPro 2 0 User s Manual Initial Setup The other entry named PLLPro User will not gray out any of the entries and is intended to be used by advanced users who have setup the PLLPro to operate in a mode that is not straightforward and requires manually entering the channel labels and units XPMPro will still gather status data and measure the signals from the PLLPro but the physical interpretation and connections between the two units have to be configured manually Define tab Choose the acquisition Operating Modes Settings JE mode at the top of the box 10 Define Inputs Selecting STM will set the Define feedback signal label to i ide d SPM scquaton modo STM xj Current If set to AFM100 Count then the feedback signal is AFM Label Units Units Input volt Force Error Additionally ee E Aux4 is changed to Normal Aux 1 Aux V 100v i Force and Aux 5 is changed Aux 2 Aux2 V 10v i to Lateral Force Aux 6 is m co 0 10v e labeled AFM Status and Su p needs to be connected to the MUX output of the Aux 5 Aux 5 V 100v i AFM100 In order for the AURE Aux 6 v 100v i AFM100 to be used USB properly the cables from gt the rear panel outputs gt MUST be connected to these input
299. tandard control is done assuming TTL HI 5 V is the active Advanced Secondary Tip Ramp HI enable LO stop hold Figure 28 Inchworm control tab RHK Technology Troy MI USA XPMPro User s Manual Coarse Approach value and TTL LO is at rest If the controller in use is designed to use TTL LO as the active state then HI enable LO stop hold should be checked For most controllers this should be turned on If the IWC100 is in use it can sense when a clamp unclamp sequence is about to occur Also it can take a few steps backwards after the motion is complete to reduce the probability of backlash occurring in the motor To use this feature and go back a fixed number of steps after motion is complete turn on Reverse reposition and enter the desired number of backwards steps in Back off step count Pin 5 and 7 of DT335 board is responsible for the communication between Inchworm controller and computer The output of this two pins and software setting are give in Reverse Pre select Hi enable Pin Stop Approach retract direction direction Lo enable 5 X high low 7 high low low v 5 x low high 7 high low low v 5 x high low 7 high low low v v 5 Xx low high 7 high low low Y 5 x high low 7 low high high v v 5 Xx low high 7 low high high v v 5 Xx high low 7 low high high v v v 5 Xx low high 7 low high high Table 1 The re
300. ter An example of this is when the Z Position monitor output is connected to ADC 1 to record topography Since this output has the front panel ADC gain applied the recorded voltage is larger than the actual variations To reduce the voltage applied to the z piezo when the DSP DAC is connected to Z Position 1 modulation input to properly replay the topographic variations the inverse of the ADC gain will be automatically corrected when Z monitor is selected as the output mode If the Z monitor is selected to be the output mode the front panel ADC gain knob is not allowed to adjust when the tip is scanning Otherwise the tip RHK Technology 81 Troy MI USA XPMPro User s Manual Initial Acquisition may be put into a situation of being crashed into the sample If the other mode is selected the ration between DSP output signal and the record signal must be entered here Automatic parameter incrementing API Another very powerful imaging technique is named API Here a voltage can be changed after every line or every fixed number of lines as Spectroscopy ax the slow scan raster is Point Spectroscopy Automatic Parameter Incrementing Control 3 5 1 incremented When the iia slow scan direction is Pede utpul disabled and the same lc Data mode input output iv Update after 8 iv line scanned over and pri 2 creer M mes over again the image Spectrum 3 Ent low to high iv amp mode Ine
301. terally than it would be a good idea to pull the tip back before making a large sideways step After an approach has finished the tip can be left at its fully retracted position as an extra precaution against tip damage through accidental tip surface contact Many times an approach can take a very long time and will be performed unattended However once the approach is done the tip is in range and very close to the surface Accidental contact could occur if an isolation table is bumped or someone is unaware an experiment is taking place By checking Tip back after approach when the coarse approach is finished the final part of the sequence will be to fully retract the tip the maximum allowed z range and hold this position until it is released by the user through the software This can be done right away when dismissing the approach done dialog or at a later time by unchecking Withdraw Tip in the Manual Control section described later RHK Technology 30 Troy MI USA XPMPro User s Manual Coarse Approach Tip retract mode determines what method is used to retract the tip 77L Feedback will apply a 12 V signal into the feedback circuit to simulate a large signal This will cause the feedback loop to fully retract the tip in an attempt to reduce the signal TTL Feedback is the most commonly used control mode however for very specific cases Analog ramp may be better The feedback loop is disabled and a DAC output is applied to one of the
302. ters to send 0 Notes This will activate the PEN TTL output Note that this does not happen until the beginning of the next line draw Command code ROTATE ABSOLUTE Command name in Litho files ra Number of parameters to send Parameters float angle Examples ra 32 3 rotation angle 32 31 degree Notes This sets the rotation angle of the image coordinate system with respect to the piezo coordinate system A positive angle means image rotation counterclockwise The angle is given in degree This applies to all subsequent line draw actions including scanning Command code ROTATE RELATIVE Command name in Litho files rr Number of parameters to send RHK Technology 167 Troy MI USA XPMPro User s Manual Appendices Parameters float angle change Examples rr 0 2 rotate drawing ccw an additonal 0 2 degree Notes This modifies the rotation angle of the image coordinate system with respect to the piezo coordinate system A positive angle means image rotation counterclockwise The angle is given in degree This applies to all subsequent line draw actions including scanning Command code SET SPEED Command name in Litho files ss Number of parameters to send Parameters float speed in physunits s Notes Internally this function gets called by POSITION ABS EXTD Speed changes apply to all subsequent line draws Note that giving a line time in PREPARE SCAN will overwrite the speed setting Command
303. th different background subtraction preprocessing or different amounts of smoothing It is also preferable to change the displayed data this way instead of closing a RTAW and opening a new one The second button sets the preprocessing to be applied to the data before it is displayed This does not effect the underlying raw data that will be saved to the file it only effects the appearance in the RTAW Each line of data can be filtered before it is displayed by using the bandpass function The icon in the toolbar updates when the selection is changed so the user knows at a glance what processing has been applied The following are the explanation of different setting options Figure 36 Image display panel e Raw setting means the raw data is displayed in each line e Line delta z subtract means the average value of each line is set to zero This can help eliminate drift and slope in the slow scan direction from the image displayed in this window and also remove artifacts due to tip changes e Line slope subtract will subtract the best fit line from each scanned line and set the average value to zero e High pass applies a high pass filter to each line scan which will eliminate DC offset as well as any small curvature the scan may possess due to piezo nonlinearities e Derivative will calculate the derivative of each line scan and display this in the RTAW RHK Technology 50 Troy MI USA XPMPro User s Manual Initial Acquisition
304. the DAC should be connected to Z Modulation 1 and the value entered here should be the calibration of the z piezo multiplied by 13 for a low voltage SPM100 or 21 5 for a high voltage SPM100 since each DAC volt will be multiplied by the gain of the high voltage amplifiers before being applied to the z piezo element The sign of the value entered here is significant If any curves appear backwards or do not reflect physical reality then change the sign of this setting The Spectrum units should be entered so all values related to the sweep can be in the meaningful units Use V for volts m for meters etc such that XPMPro can apply the correct scientific unit prefix in all cases Never enter nm for nanometers as this will lead to strange values such as k nm instead of micrometers If STM Bias Mode is turned on the units are automatically V for volts and cannot be changed Ramp subsection When Ramp spectroscopy is acquired the specific features of the output ramp are set in the ramp subsection The Initial Value and Final Value are the upper and lower limits of the sweep When moving the z piezo the values should be entered using the convention that z 0 is the position of the piezo when the feedback loop is opened The units of the values entered here will be the meaningful units entered as Spectrum units described above If a value is entered that is too large given the 10 V limits of the DAC output it will be rounded to the largest possible
305. the IP address and port number where the command originated In detail the structure looks like this 0 432 the GET STATUS command code 1 432 machine state an FFFF in the HI word means arrived at spectro stop and waiting The lower word is coded like this IDLE idle LITHO lithography running SCAN scan generator running PREPSCAN scan preparation in progress SNGLESCN stop scanning after this frame is done 2 float scan speed in physunits second 3 float line time in seconds 4 u32 the next line draw motion mode C SPEED constant speed SINE SCAN sine wave speed NL LOOKUP nonlinearity table lookup 5 float scan rotation angle in deg 6 loat X scanner position in physunits 7 float Y scanner position in physunits 8 float X scanner position in Volts 9 float Y scanner position in Volts 10 float X scanner position offset in physunits 11 float Y scanner position offset in physunits The previous two items are offsets in the scan signal This has nothing to do with the SPM1000 front panel offset knobs They are separate channels 12 u32 actual image pixel number on the line 13 u32 actual scan line number The previous two items are calculated back from the tip position When the tip is outside the region defined by SET BASE these numbers might be negative or bigger than the number of pixels lines defined by SET NPIX NLIN 14 u32 state of the PEN bit right now 0 means up
306. the MSCU The configuration window is shown in Figure 24 The MSCU Control Mode can be set set to TTL control serial interface or analog DAC control If using the TTL option a BNC cable should connect TTL OUT on the DT3016 adapter box to the rear panel SYNC connector If using a version 8 5 SPM100 the TTL output is located on pin 15 of the rear panel Digital IO connector Use the handset to place the MSCU in external mode so the steps are synchronized with the SPM100 feedback test Refer to the MSCU manual for the steps of placing the Z channel to be controlled by the SYNC connection When the approach is initiated a message will appear to remind the user to place the MSCU external mode in Z channel After the approach is finished the handset can be used to return the MSCU to internal mode to avoid accidental motion of the motor or can be left in external in case additional forward steps under computer control are desired If backwards steps are requested the window will appear asking to change the MSCU external mode to the Z channel so each TTL pulse produces reverse motion The preferred method is to use the serial connection This allows any channel to be controlled and the parameters of the motion step time voltage level etc can all be changed via commands When this option is chosen enter the serial port the MSCU is connected to in COM port entry box The channel to be used when a coarse approach should move the tip and sample close to
307. the endpoints is shown in the status bar This can be used to place a line on the image to screen capture for a publication An example of this feature is shown in Figure 76 The third choice Section view can be used to extract sections of data from the image The window expands to include a small plot to the right of the image When the mouse cursor is clicked within the image a beginning point is picked and as the line is moved around the image the section is displayed in realtime in the plot Figure 78 When the appropriate cut has been selected pressing the Section button in the window writes the two dimensional data to a new data page that can then be manipulated To smooth the section as it is converted to a data page choose the number of points in the Image Cross Section Points entry box Valid choices are 1 no smoothing 5 9 and 25 the number determines how many nearest neighbors are involved in the weighted average to determine the section value at that pixel The coefficients used in each case are displayed in Figure 77 To have a section taken from all of the data pages stored in the same file and taken during the same scan check the Related Page Cross Sections box This ensures that a section taken from the Current channel for example can be directly compared to the related feature in the Topography section since the graphs all have the same endpoints Each channel will produce a separate XY plot but they can be overlaid later i
308. the surface in some A rate O E Ceute2Time 100ms i circumstances USB The ADC gain is set for each channel in software The DT3016 board has programmable gain that can acquire 16 bit resolution data 0 54 ms and have it spread over a 20 volt range 0 305 mV LSB or as small as 2 5 volt 0 0381 mV LSB When the range is turned down this increases total sensitivity to provide effectively 19 bits of resolution for all channels except Topography Figure 11 Screen shot of input tab for scan setting The total sensitivity for that channel has additional gain from the SPM100 Z Position Gain knob which amplifies the signal before it is sent to the DT3016 board If the Z Position Gain knob is at 128 and the signal is still very small increased sensitivity to small corrugation can be obtained by increasing the gain on the ADC board through software using this panel 0 54 ms To obtain better resolution on the other channels the gain should be increased until it reaches a point where the signal would saturate the ADC For example if a tunneling current of 100 pA is in use this corresponds to 100 mV signal assuming 10 gain Since the signal will rarely exceed even 1 volt 1 nA the range of the current channel could be changed to 1 25 V so it is RHK Technology 23 Troy MI USA XPMPro 2 0 User s Manual Initial Setup possible to detect variations in current with better resolution ACQ status bar The lower part o
309. this for setting the number of triggers for the next scan Use SET SC TRIGNUM instead Internally this function gets called by POSITION ABS EXTD TRIG PERIOD is the time between trigger events in seconds Command code SET MOTION MODE Command name in Litho files smmod Number of parameters to send 1 Parameters u32 motion mode Notes Internally this function gets called by POSITION ABS EXTD It sets the motion mode for the next line to be drawn Command code SET FIRST INTS AD Command name in Litho files sfiad Number of parameters to send 1 RHK Technology 166 Troy MI USA XPMPro User s Manual Appendices Parameters u32 first Ints AD Notes This function sets the number of scanner position updates along the line before the first A D trigger sequence is generated Internally this function gets called by POSITION ABS EXTD Command code SET OTHER INTS AD Command name in Litho files soiad Number of parameters to send Parameters u32 other Ints AD Notes This function sets the number of scanner position updates along the line between all other A D trigger positions Internally this function gets called by POSITION ABS EXTD Command code PEN UP Command name in Litho files pu Number of parameters to send 0 Notes This will deactivate the PEN TTL output Note that this does not happen until the beginning of the next line draw Command code PEN DOWN Command name in Litho files pd Number of parame
310. tial O Original zero The zero mode is set in the control window discussed below A selected region can also be defined E for the zero function This function is useful for Figure 96 comparing image heights in cross sections setting a particular terrace to zero subtracting a background in NSOM images removing offsets in friction images etc It should not be used on images where the absolute value of Z Tat is significant for example STM current images p T Instead of performing the fit and subsequent subtraction to the entire dataset a small region of the data page can be chosen for the fit The coefficients are then used to calculate the fit for the entire data region and the subtraction is then performed This can be bl damas 727 Topography ao useful if noisy regions are present in the data that severely effect the quality of the fit when the whole image is used and can also improve the fit to the data if there are a large number of terraces in the image and the Step Flatten routine above does not give satisfactory results The first step in this process is to define regions to include or exclude from the fit Click either the Include Region or Exclude Region button at Far right of Figure 97 and draw a box As more boxes are drawn each region will be defined by the button that is currently highlighted The box changes color to indicate if it is to be included or excluded If the area is to be excluded then a white
311. tivate this feature 2n Bandwidth 40 00 Hz unless the position sensors are properly connected and the full concept of Calibration closed loop scanning is completely Calibrate with Reference Image Re Calibrate understood as impr oper usage can Automatic Sensor Calibration result in scan head damage After X image true size ratio 1 00 connecting the outputs of the sensors to the rear panel ADC inputs turn on Position sensors connected Be sure to use DSP ADCZ1 for the X axis and DSP ADC 2 for the Y axis The Time constant Bandwidth parameter should be adjusted to set the performance of the closed loop sensor circuit Since there is an inverse relationship between the two setting either of them determines the other The user can set whichever one is more comfortable to think about Click the Calibrate button to perform the automatic calibration routine If at a later time the calibration should be checked simply click Recalibrate If a manual calibration was performed by scanning a known reference and measuring the nonlinearities they can be entered in the next three parameter X Y size ratio and XY Angle correction Y image true size ratio 1 00 xY angle correction 0 00 lt gt xb X Figure 6 Screen shot of feedback tab RHK Technology 16 Troy MI USA XPMPro 2 0 User s Manual Initial Setup Advanced Feedback tab Increased precision can be gained by applying higher or
312. to orbit the location The tip should follow the path of the tracked feature until tracking is disabled again at a later time When the tracking is turned off the SMA file is automatically saved again with the X Y positions as a function of time added to the _ Navigation Window file To visualize this data on the image GTI UE IU RE EE Range open the file in the DAW and right click on the image A new menu item will be present named Show Tip Track By clicking on this lines will be overlaid on the image showing the tip path as a function of time If multiple data pages are in the image only the one that was loaded into the NAV window before tip tracking is activated will be able to have the path overlaid Ref Image Load at End Clear Clear All Export Manipulation Action Load Image Forming a panorama view in the al SISI N AV window Move Scan Area Mouse Action e Size 963 74 nm 4 Modify Scan Area When a new image is loaded in the NAV mE Potae aT Des loo Add Spec Location Offset window the old images are not erased This X usum 8 OPDMOveTP Sean spend 12a E permits the overlaying of multiple images to ALIS v Line Time a create a larger picture of the surface The A entire red box could be filled with images Spec Location v each one taken over a small region and then Pee z combined together After loading the Manual Control v window with many images ind
313. tput E Spectrum 4 FER enough to let all transients decay to FET aia pom TE E amples point pectra to acquire s zero before sampling the data If the 5 A 1 E Image Spectroscopy Spectrum delay 12 70 m Pre sample delay 0 00s f transients do not comp etely decay T a AS away not only will the data have an n Control Sweep rate 317 V s e 4 Time spectrum extra offset at each voltage step but a Setup rate 2340V Sampling Time 5 00 us andshake potentially the offset could change Altemate scan direction at each step as the transients slowly Scan Mode Data Single Continuous Spectrum autosave add up more and more as the ramp progresses This situation is lustrated in Figure 112 The dotted line indicates the nominal current Figure 111 that should be present for a given tip sample bias but the solid line represents the actual data Notice how the signal level deviates by a progressively larger amount at each voltage step since the equilibrium condition is not met at each ramp value and the next transient is added to whatever value the signal has decayed to instead of the baseline equilibrium value The acquired curve should be checked to see whether the tunneling current when the voltage value is near the tunneling bias is close to the feedback setpoint If this is not the case the two most likely causes are either there is significant drift in the z direction during th
314. tspec ions change remainder of previous line ious line position of defin PAE X 0x0 define PAE Y 0x1 defin PAE SPEED 0x2 define PAE WAIT TIME 0x3 define PAE FLAGS 0x4 defin PAE TRIGNUM 0x5 defin PAE TRIG PERIOD 0x6 define PAE MOTIONMODE 0x7 defin PAE FIAD 0x8 define PAE OIAD 0x9 define PAE FIRSTSPEC Oxa define POSITION ABS EXTD LEN 0x0c defin SET WAIT TIME 0x104 define SET WAIT TIME LEN 0x02 tl PU PD ts AD ts AD destination posit drawing speed of Wait time at the flags 0 0 gt PU YES ia tion X and Y this line end of this saying whether pen up 1 1 gt PD gt NO number of trigger pulses at gt trigger sequenc period time in gt motion mode C_SP T ED SINE SCAN ra gt How many scanner gt stop for spectro firstspec firstspec First A D trigger after how updates after how many 0 never 1 gt use the parameters for the scanner to call this function float wait time RHK Technology 187 Troy MI USA XPMPro User s Manual Appendices
315. tting The low voltage ramp before the high voltage amplifiers is always the ratio between the amplitude entered above and this value If the Adjust amplitude is 100 nm and the Motion per D A volt is 20 nm a 5 V signal is produced just like if the Adjust amplitude is 500 nm and the Motion per D A volt is 100 nm The sign is significant so if a tip approach actually moves the tip and sample further apart set this parameter to a negative number if it was originally positive The amount of time it should take to complete one waveform cycle is set by the Period The waveform output can be high pass filtered in order to reduce the sharpness of some edges This can be necessary for certain microscope head designs that have high resonance frequencies The high frequency components of the waveforms can be filtered out to avoid unnecessary shaking of the head that can lead to tip crashes and other undesirable results when approaching This filtering capability can provide the same functionality as the Inertial Filter knob on the front panel of the SPM 100 The width of the filter is determined by the Filter Period A value of zero seconds means no filtering is applied and the waveform will be generated at the maximum possible rate of 250 kHz when using the DT3016 board Use the Asymmetry setting to determine the variation from an ideal sawtooth waveform A value of 0 means the shape is a perfect sawtooth with an instantaneous drop to 0 while a setting of 10 means
316. tton on the toolbar In customary GUI standards the Apply button will save the parameters to the PRM file and have them take effect but leave the window open The OK button will save the parameters to the PRM file and have them take effect while also closing the window dataSAFE A revolutionary new feature of XPMPro is the ability to periodically save a scan during the acquisition to prevent loss of important data in case of a power outage The user can choose where to store the temporary files with the Temp Folder Path parameter To recover a partial scan the data analysis window can be opened and the temp folder browsed to locate the temp files Each one is saved with a unique name generated by the date time and extra numerical string All valid data will be displayed as normal and the values for the region of the scan not completed yet are set to zero so that part of the image will look completely flat The periodic saving is active under two conditions If the Enable check box in the Line section is checked and if the total acquisition time for the scan exceeds five minutes The frequency to save data is entered next to the check box by specifying how many lines of data to acquire before writing the file This is great protection from power failures after all a partial piece of important data is better than losing the entire scan Be sure to understand the difference between the ring buffer and Scan Autosave If the second one is checked t
317. ttons or fewer As we change the name of control channels the corresponding label at Figure 31 will be changed to be consisted with Any of the motor groups checked at its title bar will appear in the control window Adding more buttons that will never be used during microscope operation makes the control window itself unnecessarily large Refer to the PMC100 manual for more details on the RHK Technology 42 Troy MI USA XPMPro User s Manual Coarse Approach meaning and operation of the motor parameters The motor that should be activated when coarse approach is taking place is chosen by the Approach Channel parameter Usually this is the z motor in one of the three groups If the motion produced when Tip Approach is chosen is backwards tip sample separation increases then check the box labeled Invert Approach Motion XPMPro can also send a command to the PMC100 to immediately move a specified number of steps in a given direction The active motor is set by the Move Channel and the number of steps to take is entered in the Move Steps entry box When the control box is opened the number of steps to take each time the button is pressed is set by the Steps per Click box To open the XYZ button window that is analogous to the PMC100 handset click the XYZ Control button on the NAV window below the Tip Fast In and Tip Fast Out buttons Inchworm TM TTL The DT335 card is required for this approach A direction line is set and clock pulses ar
318. tunneling value This is selected in the Return to Standby section which is only active if variable gap spectroscopy has been chosen If conventional variable gap is performed there is a choice to make whether the tip position should be ramped closer and then change the bias voltage to the first step of the sweep or should the bias be ramped to the first step of the sweep and then the tip position be moved closer to the surface Alternate scan direction Scan Mode Sinale O Continuous Figure 52 Point spectroscopy setting control tab If the experiment requires two voltages to be changed at the same time but there is no relationship between the two and they should be set independently then General Dual Output is the better choice The second voltage sweep now is not scaled with respect to the first one RHK Technology 66 Troy MI USA XPMPro User s Manual Initial Acquisition Samples point is used to select how many readings should be acquired at each voltage step that are averaged together to obtain the recorded value A higher value will improve the quality of the data since noise in the signal will be averaged away the maximum value is 1024 To record multiple curves at each pixel increase the value named Spectra to acquire The Sweep rate is the rate V the voltage is o na V E changed when 1 E moving from V 7 i V Pre sample one output Setup rate CN i M Delay
319. ult in the original window The Step Flatten Threshold determines how flat a flat terrace must be in order to contribute to the calculation Too small of a value here will result in an unstable calculation but too large will not achieve the desired result For images with broad terraces and few steps try a value greater than one Step Flatten Smooth determines the number of pixels to use to determine if a region of the surface is smooth or lies at a step The smaller the number the longer the calculation time This algorithm was graciously provided by Dr James C Dunphy If X Offset Subtract is chosen the mean value of each line is subtracted on a line by line basis for all data along the x axis and this can be used to reduce low frequency noise in the data The average value of the entire data page is kept constant though since there are cases where this value has physical meaning This is most commonly used to remove offset in an image due to an instantaneous tip change where the z piezo adjusts up or down a significant amount because the overall length of the tip has changed when scanning along the x axis To remove the slope of each line of data along the x axis use X Slope Subtract However it is far superior to use the hardware slope compensation to remove as much slope as possible along the fast scan direction before the ADC when acquiring topographic data Since this is not possible for any other data channel the image processing step
320. ure that the data does not contain any artifacts introduced by the acquisition routine itself Because of unavoidable capacitive coupling between the bias and the tunneling current whenever the bias is changed the rate of change dV dt will induce a transient current in the system The typical behavior is depicted in Figure 110 This graph is a display of the bias voltage as a function of time The small voltage steps used to move between voltage increments are not Figure 110 shown for clarity but the voltage does not jump from one value to the next when using XPMPro Instead the voltage is stepped at the 16 bit resolution of the board in order to decrease the effective dV dt rate that would occur if the voltage changed in one step from one plateau to the next The large constant value at the far left is the voltage while the feedback loop is on and the topographic data is acquired The feedback loop is then opened and the bias changed to the first value of the ramp This can sometimes be a large AV in a short At so the transient has a large magnitude Decreasing the setup rate can reduce the magnitude of the transient because the voltage will be changed to the initial value at a slower rate instead of one immediate jump It is a good idea to make the first voltage step as close as possible to the feedback bias so the initial transient signal is minimized After this decays away the current reaches its equilibrium value that is solely a function o
321. use remainder of counts from previous line Examples pae 20 0 20 0 120000 0 0 01 129 3 0 000001 0 350 Notes This function is called by the scan generator It is the general interface of the line draw section of the program Using this an external scan generator could take over the control of the board Please note that the X and Y are in internal scan grid units here Command code SET WAIT TIME Command name in Litho files swt RHK Technology 165 Troy MI USA XPMPro User s Manual Appendices Number of parameters to send 1 Parameters float wait time Examples swt 0 2 gt 200ms wait at line draw ends swt 0 0 gt no additional wait at line ends Notes Internally this function gets called by POSITION ABS EXTD A negative wait time results in FLAG A being set at the end of each line Drawing continues when FLAG B is set Note that the scanner sets this parameter internally Use SET FORWARD WAIT TIME and SET REVERSE WAIT TIME when scanning Command code SET LINE FLAGS Command name in Litho files slf Number of parameters to send 1 Parameters u32 flags Notes Internally this function gets called by POSITION ABS EXTD See the POSITION ABS EXTD description for more details on the flags Command code SET TRIGNUM Command name in Litho files stnum Number of parameters to send 1 Parameters u32 TRIGNUM float TRIG PERIOD Notes This sets the number of triggers at each A D position along the next lines Do not use
322. used at present 3 Image out spectra Ioutspec 32 Idatalog not used at present 33 I Ecset not used at present 34 I Ecdata not used at present 35 I DSP AD DSP channel not used at present 36 Discrete Spectroscopy Present Position struct member IdiscSpecData 37 Image Discrete Spectroscopy struct member IimageDiscSpecData 38 Ramp Spectroscopy Relative points struct member IivpointSpecCoord 39 Discrete Spectroscopy Relative points struct member IivDiscSpecDataSpecCoord Data Sub Source Data type int Bytes used 4 Bytes This parameter provides additional information on the stored data page Line Type Data type int Bytes used 4 Bytes Identifies what kind of data 1s represented by a line or spectral page The recognized types are given below 0 not a line histogram RHK Technology 141 Troy MI USA XPMPro User s Manual Appendices 2 cross section 3 line test 4 oscilloscope 5 reserved 6 noise power spectrum 7 1 V spectrum 8 I Z spectrum 9 image X average 10 image Y average 11 noise autocorrelation spectrum 12 multichannel analyzer data 13 renormalized IV data from variable gap IV 14 image histogram spectra 15 image cross section 16 image average 17 Image Cross Section Gsection fdata 18 Image Out Spectra Goutspec 19 Datalog Spectrum Gdatalog Not used at present 20 Gxy Not used at present 2 El
323. used to highlight various features and easily distinguish between separate pieces of data when they are all very closely spaced together in a plot Any time there are more than one curve possible on a graph the average can also be displayed by checking the Show check box in the first row Note for most imaging channels this would have little use An exception is an image of friction loops where displaying the average of the forward and reverse lines can have some physical meaning and provide useful feedback in real time Other XY plot windows that can contain many lines will have more rows in the window The most obvious example is point spectroscopy with multiple curves per acquisition Extra features related to this instance will be discussed in that section Figure 46 curve tab RHK Technology 61 Troy MI USA XPMPro User s Manual Initial Acquisition While image acquisition is taking place the tip motion can be paused by clicking the corresponding toolbar icon The scan can be stopped immediately by clicking the next button and it can be stopped at the end of the current frame by choosing the third button in Figure 48 Topography When the scan is paused the tip remains at its No Show Color Style Weight present location until resumed again This can be a ao C sod le 1 y good method for halting a scan partway through a the image and then performing some other i m E Y ul technique and when th
324. value The Output increment specifies the resolution of the measurement It cannot be entered as a value smaller than the minimum DAC step Points spectrum is a calculated value that depends on the initial and final values as well as the resolution It is presented for information purposes only Discrete subsection When Discrete is selected the number of voltage steps to take is determined by the Output Count As many as ten different values can be chosen The voltage values to use are then entered in the ten entry boxes All values entered that are higher than the Output Count are ignored and do not have to be set to zero The units displayed in this set of entry boxes will also match the Spectrum units entered previously RHK Technology 65 Troy MI USA XPMPro User s Manual Initial Acquisition Control tab If the feedback loop should be off during the measurement for I v or F z then the Control Loop should be set to Feedback Off otherwise set it to Feedback On if the loop should remain active while the voltage is swept and the other channels recorded as a function of voltage Many times the conditions of the sweep could cause inadvertent damage to the probe or sample A channel can be monitored and if the signal satisfies a preset test condition Spectroscopy CES Point Spectroscopy then appropriate 3 Spectrum 1 Control action can be taken Data Input To activate this a is General Control Contro
325. vents after a READ ADC BUF are stored in the buffer This command uploads the data in the buffer and then empties it Command code WRITE ADC BUF Command name in Litho files wadc Number of parameters to send variable Notes This command writes how many data points into the on board A D conversion buffers as if they were written by the Data Acquisition The first u32 word in the reply is the number of A D samples that get sent down to the board This command is intended for testing and for writing the output data for the replay mode Command code GET GAINS Command name in Litho files gg Number of parameters to send 0 Note This command returns a table that contains the high voltage gain parameters that are burned into the chassis EEPROM of the SPM100 units Please note that a reading of 6553 5 indicates that the EEPROM does not contain the correct header revision In this case the information might be in the modifications field of the EEPROM header The data structure returned by the GET GAINS command looks like this 0 u32 the GET GAINS command code 1 float X Offset Gain 2 float X Scan Gain 3 float Y Offset Gain 4 float Y Scan Gain 5 float Z Offset Gain 6 float Z Scan Gain Command code GET STATUS Command name in Litho files gs Number of parameters to send 0 Parameters none Notes RHK Technology 157 Troy MI USA XPMPro User s Manual Appendices gs returns a block of status information to
326. voltage change required for the series divided by the number of images to be acquired After each voltage change an Output change delay may be needed to allow the feedback loop to equilibrate or to provide the system time to reach a new equilibrium if for example a temperature was changed before the next piece of data is imaged The speed of the voltage change from one value to the next is specified by Output ramp speed The physical quantity that is being changed can have a useful label attached to it by entering it in the text string Output label The DAC that should be used is selected with the Output DAC parameter A cable must be connected from this DAC to the correct input for the proper effect to be achieved The units of the output signal can be entered in the units entry box and the calibration of the output signal is entered in the Output units per D A volt box This ensures the proper voltage level is output by the DAC to create the necessary change in the phenomenon being studied If an offset of the driving signal is desired it can be entered in the Offset box If the experiment also required handshaking with an external piece of equipment than the Handshaking box should be checked If Input or Input Output mode is selected then in addition to the channels that will be acquired at every pixel an independent set of channels can be read at the beginning of each line or image This provides a measurement of the system response tempe
327. w turn on Spectrum Autosave The files will be named according to the autonaming convention specified in the Settings Scan Save tab If autosave is off then any set of curves that are acquired when using the spectroscopy start button are lost unless the Save button is pressed during the sweep or after the sweep if it is stopped When acquiring spectra within an image they are saved in the same manner that applies to saving image files and this parameter is ignored Scan mode determines if the specified acquisition occurs only once and stopped if the spectral acquisition is repeated over and over until manually stopped with the toolbar button This only applies when acquiring spectroscopy using the realtime spectroscopy window and the spectroscopy start button When acquiring spectra within an image the acquisition setup is only run once per pixel location Two acquisition modes can be used if acquiring instantaneous spectral data NOT during an image scan Either Single can be chosen which means the the number of curves specified by Spectra to Acquire are measured and then the sweep stops or Continuous can be chosen which means the measurement is performed Spectra to Acquire number of times and then that data either saved or thrown away and the routine started again This will continue indefinitely until stopped by user interaction The two modes are analogous to image acquisition where the Scan Count parameter in Figure 9 can be set to zero for free
328. w designates the origin of the scan and the arrow points along the direction of the first scanned line If the colors are difficult to see right clicking anywhere inside the sample representation area produces a menu which allows the colors of the maximum scan area red by default the actual scan area yellow by default and the text used in the entry boxes yellow by default to be changed to suit an particular requirement The scan area can be changed using two methods The first way is to use the entry boxes by typing in numbers or using the scroll buttons If the Mouse Action radio button is set to Modify Scan Area clicking on the yellow box will produce handles which can be dragged to resize the scan area or relocate it The key pad also can be used to make these changes in real time while an image is being scanned similar to turning the knobs when using an older electronics Press the appropriate key as illustrated in Figure 41 The offset shifts should be immediately visible in the RTAW as features will be split and offset laterally between subsequent line scans Lastly the yellow box can be shifted laterally and rotated by clicking on the arrow buttons in the window The button with the small square amidst the four direction buttons can be used to return the yellow box to Figure 41 RHK Technology 55 Troy MI USA XPMPro User s Manual Initial Acquisition the center of the red box which will set the tw
329. word still stays at SCAN SCAN UNTIL is the command to use for spectroscopy SCAN UNTIL is also used to get a scan running after the RHK Technology 178 Troy MI USA XPMPro User s Manual Appendices MOVE TO START command When a SCAN UNTIL is applied to a running line draw it sets the number of A D conversions from the moment the command came in to the next spectro stop Command code STOP SCAN Command name in Litho files stpsc Number of parameters to send Parameters u32 WHERE Notes This command is used to stop the scan in a defined way The parameter WHERE says where to abort the scan The coding is EOSCAN stops at the end of a scan frame Note that this sets the machine state to SNGLESCN for the rest of the frame EOLN stops the scan at the end of this scan line STOP NOW stops the scan immediately aborting the current line draw After the STOP SCAN command the tip position does NOT move to the start corner You have to use MOVE TO SCAN START for that Scans stopped at EOSCAN or EOLN can be continued using SCAN UNTIL For a scan stopped at STOP NOW this will give unpredictable results Use INTERRUPT SCAN if you want to stop at a previously unknown position along a scan line and then want to continue scanning Command code INTERRUPT SCAN Command name in Litho files intsc Number of parameters to send 0 Notes This command forces a spectroscopy stop at the position of the scanner Using SCAN UNTIL the scan ca
330. wt Number of parameters to send Parameters float wait time at the end of a fwd line s Notes Internally this function gets called by PREPARE SCAN It is intended mostly for testing The time is given in seconds Negative wait time results in FLAG 4A being set at the end of each fwd line Scanning continues when FLAG B is set Command code SET REV WAIT TIME Command name in Litho files srwt Number of parameters to send Parameters float wait time at the end of a rev line s Notes Internally this function gets called by PREPARE SCAN It is intended mostly for testing The time is given in seconds Negative wait time results in FLAG 4A being set at the end of each rev line Scanning continues when FLAG B is set RHK Technology 176 Troy MI USA XPMPro User s Manual Appendices Command code SET NPIX NLIN Command name in Litho files snp Number of parameters to send 2 Parameters u32 npix u32 nlin Notes Internally this function gets called by PREPARE SCAN It is intended mostly for testing Command code SET SC MOTMOD Command name in Litho files smm Number of parameters to send Parameters u32 motion mode Notes This function sets the motion for the scan lines of all following scans The connection lines will be constant speed lines Command code SET WHERE AD Command name in Litho files swad Number of parameters to send Parameters u32 where AD Notes Internally this function gets
331. y as the tip approaches the sample and there is a danger of damaging the tip and or sample by creating too large of a current density Potentially the current could also be above the ADC maximum which will lead to useless data since the readings will saturate If the number is too small the current will continue to decrease towards the LSB and an insufficient gain in sensitivity may be achieved A good rule of thumb would be to start with a slope such that the difference between the feedback bias and the voltage where the current will be near zero the band edge for a semiconductor zero for other conductors produces about 2 3 of motion towards the surface For example if the tunneling bias on a Silicon surface is 1 5 V to produce a 3 angstrom decrease in the gap width would require the Z change per bias volt be set to 2 The proper series of steps to perform when setting up spectroscopy data acquisition would be to acquire some I z spectroscopy curves to measure the attenuation length of the current tip sample combination Then obtain some I V data with a fixed tip sample distance over the entire voltage range and finally acquire the variable gap data and compare it to the first set of I V curves to check for close agreement between the current readings at large values of the applied bias the beginning and end of the voltage sweep Stabilize Drift When parking the tip over a feature and acquiring spectroscopic data to investigate the elect
332. y but does not attempt to acquire the next sweep if multiple curves are to be acquired End all acquisition performs all of the previous steps but also stops the image acquisition if the spectroscopy was being acquired within an image A warning message is produced when the test condition is met if Monitor warning message is checked The analog channel to monitor is selected in the Monitor channel parameter Any of the channels can be RHK Technology 69 Troy MI USA XPMPro User s Manual Initial Acquisition selected it does not have to be one of the channels turned on in the Input output tab The Monitor maximum and Monitor minimum are used to set the limits that are used in the test If variable gap I V mode is activated the parameters used to control the tip motion as the bias is ramped are presented in the variable gap mode section When studying semiconductors it is often required to move the tip closer to the surface in order to increase the sensitivity of the measurement since the tunneling current increases about an order of magnitude for every Angstrom the tip moves closer to the surface When performing this acquisition the primary DAC the one chosen as the Output DAC in the Input Output tab should be connected to one of the bias modulation inputs and the second DAC should be connected to Z modulation 2 Before the primary ramp is started the second DAC can be set to a non zero voltage in order to move the tip closer to the surfac
333. yea id t eee qd 76 pultermative maging Modes cca enata ute eret teet Dos ims OS dt cue De 76 Multiple parameter imaging MPI sese 76 Automatic parameter incrementing APT 79 Analysis and Processing ss 5 iie etre eio rh tee epi ree e MED LEDR e YE EE ee COUPE Co EE RE NEP ERR asst URS Se anno RLT IS Sn EOS osa pa dub 82 A TOPIC ooh itt Sot deter eins us de eem esq va eii tute m Rub ag IRS I 85 Interactive histogram equalization A A A quia ed mnes E RR Maus 88 Cursor VN he m CM 90 I3 ATTA SIS S DoD ded O aaa e SA Os 93 PROCES SUNS Se in pastas tai ns dee as opel tu cech top ee Moe 98 Processing images in Fourier Pale iuis ee tret rito rone ae re a E Ra pat Edd 101 Three dimensional tendering 3 is 103 EXPO A aste ci ate es eat vs Ense cae es dah Samo neo e sa ada 105 Advanced Te clinlqUes ia eieipece epe O ON 107 INCREASING PES ONO ete e etes eld medius tu eal Ve hi v eU de eT d UE 110 Variable pap Speetros Copy 25 oes ee d ed en Ue te A 111 SAID M 112 Conductance Tries UCT CTS da a pa US da 114 Barrier height measurements using I z spectroscopy ssssssee 115 Barrier height measurements using a lockin amplifier 116 Measurement parditelers pisse Ga drastic ER a ORA title gatas pias 117 Input Output line by line imaging sess ener nennen 118 Force setpoint when using a commercial AFM sse 119 Changing the setpoint force using the setpoint knob sss
334. ype unsigned long Bytes used 4 Bytes The total number of data bytes in the data section It is equal to m nWidth m nHeight sizeof long int For Float data it should be m nWidth m nHeight sizeof float In case of Disc Spectroscopy the datasize m nWidth m nHeight m nWidth size of float Additional size of width is to store the user enterd voltage values for a page Page will have float data if the Line Type is any one of the following Gdatalog Gechem Givnorm Gfft power Gautocorr Goutspec Gdiscspec data Ghistogram Gx ave Gy ave All image data is stored as 32 bit signed integers Most spectral data is either 32 bit signed integers or floating point such as power spectra and autocorrelation spectra point Minimum Z Value Data type Unsigned long Bytes used 4 Bytes Stores the minimum Z Value Maximum Z Value Data type Unsigned long Bytes used 4 Bytes Stores the Maximum Z Value X Scale Y Scale Z Scale Data type float Bytes used 4 Bytes each RHK Technology 143 Troy MI USA XPMPro User s Manual Appendices The X Y Z physical units per pixel or bit X Y Scale Data type float Bytes used 4 Bytes This is the change in X in physical units per Y line This is used for drift Correction and is 0 for newly acquired images X Offset Y Offset Z Offset Data type float Bytes used 4 Bytes each The origin of the X value or the X coord of the image center The physical unit is XOffset XScale

XPMPro 2.0 User's Manual - Organic Semiconductor Group Dr. Trixler

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