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PZ217E User Manual E-545 PInano® Piezo Controller Release: 1.2

1. m Macro Programming The E 545 multi channel piezo controller was designed to operate Plnano amp XY and XYZ stages with piezoresistive or capacitive sensors Motion can be controlled via analog signals or using three digital PC interfaces USB TCP IP and RS 232 Alternatively stand alone operation is possible by uploading macro command sequences to the internal non volatile memory Wave Generator The integrated wave generator can output periodic motion profiles In addition to sine and triangle waves arbitrary user defined motion profiles can be created and stored Data Recorder The flexibly configurable data recorder enables simultaneous recording and read out of up to 3 input and output signals such as for positions or control values This makes possible the later association of events with saved data points Extensive Software Support The controllers are delivered with operating software Comprehensive libraries and LabVIEW drivers are available for automated control 1 1 www pi ws Flow to Use the Documentation E 545 User Manual this document This User Manual enables you to put your Plnano piezo stage with the E 545 into operation for the first time Furthermore it gives an overview of the E 545 functions and specifications E 545 PZ217E Release 1 2 2 Page 3 Introduction www pi ws Piezo Nano Positioning PI m Always keep this User Manual next to the E 545 If the User Manual is lost or damaged
2. 5 00000000 amp 1 Defsuk vokage 0 1 mo7o003c0T 100000000e 100000000 4 Userongn 0 1 007010200 0 00000000e 0 o00000000e40 Enable Sw On Target Signs 0 1 07010600 Enabed Sf Enadied Axis servo mode selection 3 1 mo7000 00 Hardware Harduxe In the Device Parameter Configuration window of PIMikroMove proceed as follows to load back the content of a parameter file with the extension pam 1 Use the File Load and select menu sequence The loaded parameter values are written in the corresponding Edit Mask fields 2 You can copy the loaded parameter values from the Edit Mask fields to the RAM volatile memory or non volatile memory of your controller using the three Write selected edit values buttons in the top right hand corner of the window Note that depending on the controller changing parameters may require a certain command control level CCL You can switch to command level 1 and change level 1 parameters see CCL column while command levels gt 1 are reserved for service personnel In the dialog which pops up automatically when you try to copy the values of protected parameters from the Edit Mask column to the controller enter the password advanced to switch to command level 1 See the PIMikroMove Manual for further information 3 1 3 Quick Start The following instructions illustrate the first steps with the E 545 in ONLINE mode using PIMikroMove becau
3. Description p 12 and manuals as PDF files for the E 517 digital operation module which is included in the E 545 E 545 User Manual in printed form PZ217E this document E500T0011 Technical Note for GCS LabVIEW driver set With E 545 3RD only E 808 90 sensor monitor cable with solderable end With E 545 3CD only D 893 32 sensor monitor cable LEMO 3 x BNC Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact PI immediately Save all packing materials in case the product need be shipped again www pi ws E 545 PZ217E Release 1 2 2 Page 10 Introduction Piezo Nano Positioning PI 1 5 Additional Components Contact your PI Sales Engineer or write info pi ws if you need one of the following options accessories modules E 500 ACD CD with LabVIEW analog driver set available free of charge upon request Each axis of the mechanics connected to the E 545 can be controlled via an analog signal on the corresponding CONTROL INPUT BNC socket This analog signal can for example be generated using a D A board in a PC PI offers a LabVIEW driver set which can be used with certain D A boards It is compatible with the PI General Command Set GCS LabVIEW driver set available for all newer controllers from PI The PI LabVIEW drivers support all D A converter boards from National Instruments that are compatible with DAQmx8 3 LabVIEW compatibility is given from version 7 1 upwards
4. See Control Modes p 19 for more information E 545 PZ217E Release 1 2 2 Page 16 Operation www pi ws PI Piezo Nano Positioning Name Function PIEZO amp SENSOR Sub D 25 pin f socket for the piezo stage carries the 20 120 V voltage lines for three piezo actuators and the signals of With E 545 3RD only CH1 CH2 CH3 With E 545 3CD only SENSOR MONITOR Zero CH1 to CH3 three piezoresistive sensors in the mechanics See Piezo and Sensor Socket on E 545 3RD p 88 for pinout Sub D Mix socket for the piezo stage carries the voltage lines for three piezo actuators and the signals of three capacitive sensors in the mechanics See CH1 CH2 Ch3 Socket on E 545 3CD p 89 for pinout Lemo socket for the signals from all three sensor channels connect the sensor monitor cable which comes with the E 545 to split up the sensor monitor output for the three channels See Sensor Monitor Socket on E 545 3RD p 90 or Sensor Monitor Socket on E 545 3CD p 90 for details Potentiometers for zero point adjustment which ensure that the full output voltage swing of the amplifiers can be used without reaching the output voltage limits of the amplifiers and causing overflow conditions overflow LEDs are on the front panel See Zero Point Adjustment p 28 for details CAUTION The travel range has been set at the factory Moving the zero point may cause the stage to touch a
5. WWW pi WS 7 2 Prescribed Use Based on their design and realization E 545 Piezo Controllers are intended to drive capacitive loads in the present case piezoceramic actuators E 545s must not be used for applications other than stated in this manual especially not for driving ohmic resistive or inductive loads Observe the safety precautions given in this User Manual Depending on the model type E 545s can be operated in closed loop mode using piezoresistive or capacitive sensors Appropriate sensors provided by PI are integrated in the mechanics according to the mechanics product specifications The E 545 may only be used for applications suitable according to the device specifications Operation other than instructed in this User Manual may affect the safeguards provided The E 545 is a laboratory apparatus as defined by DIN EN 61010 It meets the following minimum specifications for safe operation any more stringent specifications in the technical data table p 81 are of course also met www pi ws E 545 PZ217E Release 1 2 2 Page 5 Introduction Piezo Nano Positioning PI Indoor use only Altitude up to 2000 m Temperature range 5 C to 40 C Max relative humidity 80 for temperatures up to 31 C decreasing linearly to 50 relative humidity at 40 C Line voltage fluctuations not greater than 10 of the line voltage W Transient overvoltages as typical for public power supply Note The nominal lev
6. but due to the calibration settings of the system the axis position can differ from 0 by about 20 of the axis travel range You can also use the and buttons to decrement increment the commanded value by the value given in the Step size field 1 0 V in the figure below Arrow buttons causing motion ET l xj ZP MikroMove TM 2 2 5 42 Connections E 517 172 17 128 86 Jools flow Hep S eoe nnu NSR hh TOO c Coffroller macros Target Openloop Value gt Stepsize Position HALT State Velocity Servo Usesoftlimts 7 11 000000p gt Y sl 1 000000 16 624900 ON 1 000000 F1 bib p UNKNOWN STAGE de 0 000000 0 000000 fs S 1 000000 11 481000 1 000000 ex p UNKNOWN STAGE EJ 0 000000 0 000000 j 1 000000 1 506200 EE 10 000000 m Sensor channels gt g Piezo channels 11 475900 1 495900 If open loop operation is successful you can switch to closed loop operation by checking the Servo boxes on the Axes tab card see figure below In closed loop operation target positions for the www pi ws E 545 PZ217E Release 1 2 2 Page 37 Remote Control ONLINE Mode Piezo Nano Positioning PI axes are commanded Enter the target position in the Target field and press Enter on your keyboard or use the arrow buttons to decrement increment the target position by the Step size value The axis position Position field should correspond to the commanded value EiPIMikroMo
7. contact your Physik Instrumente Sales Engineer or write info pi ws mailto info pi ws m Add all information given by the manufacturer to the User Manual for example supplements or Technical Notes m If you pass the E 545 on to other users also turn over this User Manual as well as all other relevant information provided by the manufacturer m Only use the device on the basis of the complete User Manual Missing information due to an incomplete User Manual can lead to injury as well as property damage m Only install and operate the E 545 after having read and understood this User Manual E 517 User Manual E 517 User PZ214Exxx pdf provided on the E 517 CD Remote control via computer interface ONLINE mode as well as working with macros and wave generators makes use of the E 517 digital operation module which is integrated in the E 545 For detailed instructions descriptions and examples regarding those tasks refer to the E 517 User Manual Among other detailed information the E 517 User Manual also provides m Complete description of the PI General Command Set GCS used in ONLINE mode Note that a list of the available E 517 GCS commands is provided by the E 545 User Manual in E 517 GCS Commands Alphabetically Survey p 62 In a terminal you get a list of available commands and their syntax by typing HLP W Overview of the parameters which give the configuration of the E 517 digital operation module Note In a t
8. physical limit at zero or full travel position Adjustments to the zero point should not exceed 5 of the stage travel in the case of the PInanoG that would be 10 um RS 232 Serial connection to host PC See RS 232 Socket p 92 for pinout od Network connection over TCP IP See TCP IP Connection p 43 for more information Universal Serial Bus USB B socket for connection to host PC See USB Connection p 50 for more information Digital In Out MDR14 socket for digital input and output lines of the integrated E 517 digital operation module can be used to trigger external devices and to send start and sync signals to the wave generator s See Digital In Out Socket p 90 for the availability of the lines and for pinout E 545 PZ217E Release 1 2 2 Page 17 Operation Piezo Nano Positioning PI 2 2 AC Power Connection www pi ws Connect the AC power cord of the E 545 to the wall socket 100 to 120 VAC or 220 to 240 VAC Use the AC power cord that came with the E 545 Use another AC power cord only when its rating is suitable for the E 545 New line power fuses are required when changing the supply voltage See AC Power and Line Power Fuses p 69 for how to replace the line power fuses To disconnect the system from the supply voltage completely remove the power plug from the wall socket Install the system near the AC outlet and such that the AC power plu
9. r RW ST Pull 4 Remove the top cover If you disconnect the protective earth conductor from the top cover make sure to reconnect it before closing the case ZN 7 Y uN Protective Earth 4 Conductor To close the E 545 case make sure that the top cover is connected to the protective earth conductor and perform the above steps accordingly www pi ws E 545 PZ217E Release 1 2 2 Page 72 Troubleshooting Piezo Nano Positioning PI 5 Troubleshooting www pi ws Stage does not move Cable not connected properly Check the connecting cable s Stage or stage cable is defective If a working stage of the same type is available exchange the defective stage to test a new combination of E 545 and stage Since stage and E 545 always form a calibrated system the performance with the new stage will probably be lower than with the original stage If the new stage is to be used permanently and in normal operation a new calibration is required Contact your Physik Instrumente Sales Engineer Incorrect control mode of the piezo channel The applicable control sources for the axis motion depend on the current control mode of a piezo channel OFFLINE or ONLINE mode see Control Modes p 19 for details In OFFLINE mode move commands received via interface or from a running macro and wave generator output are ignored and may provoke an error message In ONLINE mode the axis motion can be commanded by mult
10. 10 2000 0 1000 Define a inverted cosine waveform for Wave Table 1 belongs to the first axis see WAV description for details WGO 1 1 Start output of Wave Generator 1 belongs to the first axis immediately and synchronized by servo cycles WGO 10 Stop output of Wave Generator 1 NOTE PIMikroMove provides the P Wave Generator Tool with which you can create waveforms and start the wave generator output without the need to learn the corresponding commands See the PIMikroMove manual for more information 3 7 Working with Controller Macros The macro feature allows defining command sequences and storing them permanently in non volatile memory of the E 517 digital operation module Each defined macro can be called up by its own user defined name In addition it is possible to define a macro that will be executed automatically every time the E 545 is started or the E 517 is rebooted making possible stand alone operation without a host computer See the subsections below and the MAC command description for more details and examples For further examples see also Scanning Examples with Wave Generator and Macros in the E 517 User Manual PZ214E on the E 517 CD NOTES PIMikroMove offers a comfortable macro editor on the Controller macros tab card Furthermore PIMikroMove offers the Host macro feature which makes it possible to save macros on the host PC With the Host macro feature you can also program conditions an
11. 545 is power cycled or the E 517 digital operation module is rebooted The connection must then be closed and reopened E 545 PZ217E Release 1 2 2 Page 43 PI Remote Control ONLINE Mode Piezo Nano Positioning NOTES Make sure that your network administrator has not set the network to forbid unknown devices like the E 517 digital operation module from logging on Only one TCP IP connection is allowed at any one time Presently only one port 50000 is available at the E 517 so that only one application at a time can use the TCP IP connection The default port setting can not be changed 3 3 3 1 Network with DHCP Server NOTES For successful connection the E 517 startup behaviour for IP address configuration must be set to Use DHCP to obtain IP address IPSTART 1 default selection You can check the IPSTART settings with the IFS command power on default setting and the IFC command current setting If the IPSTART setting is Use IP address defined with IPADR IPSTART 0 send IFS 100 IPSTART 1 The change becomes active with the next power on or reboot First make sure that the proper startup behaviour is set see Note above Then if a network with DHCP server is available connect the controller to a network access point and power cycle it newer switches accept both cross over and straight through network cables The controller will automatically obtain an IP address over DHCP www pi ws E 545 PZ21
12. In OFFLINE mode the E 517 digital operation module in the E 545 accepts all commands just as in ONLINE mode The only difference between the modes is the control source selection of the channel In ONLINE mode the SERVO switches of all channels must be set to OFF on the piezo control electronics 2 3 2 Servo Mode CON OFF The current servo mode determines if a motion axis is driven in open loop servo OFF or closed loop servo ON operation m Closed loop operation Any control input control input voltage input from the integrated E 517 digital operation module like move commands and wave generator output is interpreted as target position Based on this target position and on the position feedback of the corresponding sensor channel a servo loop generates the control value for the piezo channel The servo loop thus maintains the axis position by applying a proportional integral P I servo controller a notch filter and a slew rate limiter The slew rate can also be influenced by the Servo Loop Slew Rate parameter ID 0x07000200 of the E 517 module m Open loop operation Any control input is interpreted as piezo voltage target The control input directly controls the output voltage of the piezo channel Although open loop operation omits the proportional integral P 1 servo controller notch filter and a slew rate limiter remain active and the slew rate can also be influenced by the E 517 parameter ID 0x07000200 The serv
13. PC settings you can open the nternet Protocol TCP IP Properties window as described above To change the IP mask subnet mask send IFS 100 IPMASK mask mask must be identical to the Subnet mask setting of the PC To change the IP address send IFS 100 IPADR address At least the last portion of the IP address must be different from that of the PC and any other device in the same network the applicable address settings depend on the IP mask setting If for example the PC has the IP address 172 21 0 1 send IFS 100 IPADR 172 21 0 2 50000 WWW pi ws E 545 PZ217E Release 1 2 2 Page 48 Remote Control ONLINE Mode Piezo Nano Positioning PI Do not use 255 and do not change the port setting must always be 50000 3 Close the connection 4 Connect the E 517 to the Ethernet card in the PC using the included special cross over cable point to point connection If you connect the E 517 to a free access point e g to a hub on a network to which the PC is connected use the straight through network cable 5 Power cycle the E 545 6 Use the Search for controllers functionality described in Network with DHCP Server p 44 to establish the connection between PC and the E 517 3 3 4 RS 232 Serial Connection The serial communications port of the E 517 digital operation module is accessed via the sub D 9m RS 232 connector p 92 on the rear panel of the E 545 Use the included null modem cable to connect th
14. Release 1 2 2 Page 27 Operation Piezo Nano Positioning PI 2 7 Calibration Procedures 2 7 1 Zero Point Adjustment CAUTION The travel range has been set at the factory Moving the zero point may cause the stage to touch a physical limit at zero or full travel position Adjustments to the zero point should not exceed 5 of the stage travel in the case of the Plnano that would be 10 um Zero point calibration has the following goals m Make the full travel range available If the electrical zero point is adjusted properly the full output voltage range of the amplifier can be used This prevents overflow conditions from occurring W Preserve the piezo actuators in the mechanics The point of zero sensor readout should correspond to zero or a small negative output voltage This technique can reduce the average applied voltage without loss of displacement and thereby increase piezo lifetime There might be some small deviation of the electrical zero point caused by thermal drift or changes in mechanical loading Let the system warm up for several minutes before setting the zero point Before starting install the PInanoQ stage with the same load and in the same position as it will have in your application If you perform the zero point adjustment in OFFLINE mode i e without PC connection as described below you will need a voltmeter Proceed as follows to adjust the zero point for one sensor channel 1 Setup for open lo
15. User Manual PZ150E is available for download at www pi ws See Opening the Case p 70 for how to remove the top cover of the E 545 housing to get access to the internal submodules www pi ws E 545 PZ217E Release 1 2 2 Page 55 Remote Control ONLINE Mode Piezo Nano Positioning PI 3 5 Using Trigger Input and Output It is possible to trigger external devices and to send start stop signals to the wave generators with the digital I O lines of the E 517 digital operation module See Digital In Out Socket p 90 for the lines and pinout With the E 517 the assignment of axes to digital output and input lines is fixed as follows m X axis belongs to output and input channel 1 m Y axis belongs to output and input channel 2 m Z axis belongs to output and input channel 3 You can ask for the available lines with the TIO command You can program the DIO O1 to DIO O3 output lines TTL active high to trigger other devices Programming can be done using the CTO command If the trigger output is to be synchronized with the wave generator output you can use CTO in combination with m TWS which defines trigger action for certain waveform points W Certain WGO options which start the wave generator and the corresponding trigger output See Configuring Trigger Output and Trigger Output Synchronized with Wave Generator in the E 517 User Manual PZ214E on the E 517 CD for examples The DIO 11 to DIO 13 input lines TTL acti
16. after consultation with Pl Otherwise preset data will be lost CAUTION The travel range has been set at the factory Moving the zero point may cause the stage to touch a physical limit at zero or full travel position Adjustments to the zero point should not exceed 5 of the stage travel in the case of the PInanoG that would be 10 um CAUTION You can define a start up macro which runs on power on or reboot see Working with Controller Macros p 58 for more information Be careful with the start up macro since there is no way to skip it with the E 545 In particular do not use the RBT command in the start up macro www pi ws E 545 PZ217E Release 1 2 2 Page 9 Introduction Piezo Nano Positioning PI 1 4 Unpacking Unpack the E 545 Piezo Controller with care Compare the contents against the items covered by the contract and against the packing list The following components are included E 545 Piezo Controller as covered by the contract 3763 power cord C 815 34 RS 232 cable for connecting E 545 and host PC null modem cable C 815 563 special cross over network cable can be used to connect the E 545 to a network access point or to a PC with Ethernet socket 000011448 USB cable USB A USB B for connecting E 545 and host PC MDR connector for Digital In Out socket consisting of 4347 MDR connector 14 pol RM 1 27 4348 MDR cover 14 pol E 517 CD Distribution CD containing host software see Software
17. frequency and the proportional P and integral 1 term on the E 802 55 servo control submodule Note that re calibration should only be done by adequate trained personnel and after consultation with PI Adjustment of notch filter frequency and P and I term is described in the E 802 55 User Manual PZ150E This manual is available for download at WWNW pi WS All calibration procedures to be done on the E 802 55 submodules require opening the case see Opening the Case p 70 for details Recommended before notch filter adjustment you can identify the resonant frequencies of your system using the data recorder of the E 517 digital operation module See Application Example Frequency Response Measurements p 53 for details WWW pi ws E 545 PZ217E Release 1 2 2 Page 29 PI Remote Control ONLINE Mode Piezo Nano Positioning 3 Remote Control CONLINE Mode Remote control via computer interface ONLINE mode as well as working with macros and wave generators makes use of the E 517 digital operation module which is integrated in the E 545 During remote control the E 545 is always identified as E 517 Use the host software provided on the included E 517 CD All commands mentioned in the subsections below are PI General Command Set GCS commands in the E 517 syntax provided by the E 517 firmware This E 545 User Manual contains a list of the available commands in E 517 GCS Commands Alphabetically Survey p 62 In
18. is suitable for the E 545 New line power fuses are required when changing the supply voltage See AC Power and Line Power Fuses p 69 for how to replace the line power fuses To disconnect the system from the supply voltage completely remove the power plug from the wall socket Install the system near the AC outlet and such that the AC power plug can be reached easily Procedures which require opening the case should be carried out by authorized qualified personnel only Disconnect the E 545 from power when opening the case and when resetting internal switches or jumpers When the E 545 must be operated with the case open voltages of up to 120 V can be exposed Do not touch internal conductors CAUTION Both fuses are active and have to be checked if there is a fault CAUTION The boards inside the E 545 are ESD sensitive electrostatic discharge sensitive devices Observe all precautions against static charge buildup before handling these devices Avoid touching circuit components pins and PCB traces Discharge any static electricity you may have on your body by briefly touching a conductive grounded object before you touch any electronic assembly Make sure that no conductive particles of any kind metallic dust or shavings broken pencil leads loose screws contact the device circuitry www pi ws E 545 PZ217E Release 1 2 2 Page 7 Introduction Piezo Nano Positioning PI CAUTION Place the system in a l
19. multiple times call it with MAC NSTART macroname n where n gives the number of times the macro is to be run Macro execution will be stopped if there is an error in the macro either syntax error or illegal command If the piezo channels of the E 545 are in OFFLINE mode move commands from a running macro are not allowed they provoke an error message See Control Modes p 19 for details A macro can be started when the wave generator is running but move commands from the macro are not executed and provoke an error message Commands sent when a macro is running will be executed not until the macro is finished or stopped The only exceptions are 5 6 7 8 9 and 24 which are executed immediately Simultaneous execution of multiple macros is not possible Only one macro can be executed at a time Macro execution can be stopped from the command line with 24 The STP command stops macro execution only when it is part of the macro E 545 PZ217E Release 1 2 2 Page 60 Remote Control ONLINE Mode Piezo Nano Positioning PI A running macro may not be deleted You can query with 8 if a macro is currently running on the controller 3 7 3 Start Up Macro CAUTION a Be careful with the start up macro since there is no way to skip it with the E 545 In particular do not use the RBT command in the start up macro With MAC DEF lt macronames it is possible to set the specified macro as start up macro This ma
20. operation IMP and STE for both servo modes see Command Examples for ONLINE Mode p 38 for examples and Servo Modes p 20 for more information E 545 PZ217E Release 1 2 2 Page 24 Operation www pi ws Piezo Nano Positioning PI m Wave generator output for periodic motion see How to Work with the Wave Generator p 56 and Wave Generator in the E 517 User Manual for more information and examples Move commands are not accepted when the wave generator is running for the axis The macro feature allows defining command sequences and storing them permanently in non volatile memory in the E 517 Macros can run in OFFLINE and ONLINE mode but move commands from macros are only accepted in ONLINE mode and only when the wave generator is not running See Working with Controller Macros p 58 for more information The E 517 has a real time data recorder It is able to record several input and output signals from different data sources during the axis motion Data recording is triggered automatically with four commands STE step response measurement m MP impulse response measurement m WGO wave generator start and m WGR restarts recording when the wave generator is running Recording always takes place for all data recorder tables and ends when the data recorder tables are completely filled See Data Recording p 52 for more information It is possible to trigger external devices during the axis motion
21. shavings broken pencil leads loose screws contact the device circuitry The following submodules are integrated in the E 545 m One E 517 digital operation module 3 channel m Three E 802 55 servo control submodules m With E 545 3RD only three E 801 30 sensor processing submodules www pi ws E 545 PZ217E Release 1 2 2 Page 70 Maintenance Piezo Nano Positioning PI For normal operation of the E 545 you do not need to open the case because all relevant operating elements are accessible on the front and rear panels Opening the case is only required if the E 545 must be re calibrated e g to readjust the notch filter frequency and the proportional P and integral 1 term of the servo control submodule in case of load changes Note that your system will be fully calibrated before being shipped Re calibration should only be done by adequate trained personnel and after consultation with PI Proceed as follows to open the case 1 Onthe E 545 rear panel use a T8 screwdriver to remove the Torx screws which affix the two plastic feet two screws on each foot Torx T use T8 PENG 2 Shift the top cover of the housing in the direction of the rear panel by about 1 6 inches ca 4 cm as shown in the figure below Shifting may take some effort www pi ws E 545 PZ217E Release 1 2 2 Page 71 Maintenance Piezo Nano Positioning PI 3 Pullthe top cover on one side outwards and upwards as shown below NN m Ww pum
22. software components are available for Linux PCs See Software Description p 12 for more information 1 7 Software Description Operating system details m Windows stands for 2000 XP and Vista m Linux stands for kernel 2 6 GTK 2 0 glibc 2 4 During remote control via computer interface the E 545 is always identified as E 517 Use the host software and the corresponding software documentation provided on the E 517 product CD The table below lists the appropriate host software components with application recommendations Supported Software e Tool Operating Short Description Recommended for System Allows program access to the E 545 from languages like e PRE tuncions i pie Recommended for customers inary aloes oa oi ihe Tl who want to use a library for General Command Set GCS en gh y GCS Library Windows Windows operating systems Tre dynamic version of the ary Linux PI GCS2 DLL y library is needed by the LabVIEW driver set and by PIMikroMove Linux operating systems libpi pi gcs2 so x x x and libpi pi gcs2 x x x a where X X X gives the version of the library LabVIEW is a software tool available separately from National Instruments for data acquisition and process control The E 545 LabVIEW software consists of a LabVIEW Windows collection of virtual instrument drivers Linux VI drivers for the E 545 controller This driver set supports the PI General Command Set GCS Included
23. stage travel in the case of the PInanoG that would be 10 um 3 2 Command Examples for ONLINE Mode The following examples can be used in a terminal e g in the Command Entry window of PIMikroMove or in the PI Terminal Example 1 This example moves the X axis default identifier A in open loop operation The output voltage is varied to see the influence of the voltage limits for the corresponding piezo channel hardware limits are given by www pi ws E 545 PZ217E Release 1 2 2 Page 38 Remote Control ONLINE Mode Piezo Nano Positioning PI parameters 0x0B000007 and 0x0B000008 and cannot be changed soft limits can be set with VMA and VMI In this example the output voltage will be limited to the range of 10 to 90 volts Command Response Action Performed String to Send ONL 1 1 Switch piezo channel 1 identifiers 1 to ONLINE mode so that axis motion can be caused by move commands received via interface or from a running macro or wave generator output SVO A A 0 Check current servo mode for axis A The axis is in open loop operation response 0 i e there is no correction of drift or other effects SVA A 80 Move axis A by setting the corresponding output voltage to 80 volts VOL 1 1 0079 9742 Query the current output voltage of piezo channel 1 which drives axis A SVA A 150 Attempt to set the output voltage for axis A to 150 volts VOL 1 1 0079 972
24. the E 517 Releasenews xxxxx pdf on the E 517 CD and click on Login Click on the E Piezo Drivers amp Nanopositioning controllers category Click on E 517 E 545 PZ217E Release 1 2 2 Page 66 Remote Control ONLINE Mode Piezo Nano Positioning PI 6 Click on Software if you click on Documents you will get the latest manuals 7 Click on the latest CD Mirror includes the manual versions that were with the release or on the latest update zip file 3 9 2 Firmware Updates The overall firmware revision of the E 517 digital operation module in your E 545 controller can be identified in the answer of the IDN command For the revisions of the individual firmware units ask with the VER command In the E 517 digital operation module there are the following individual firmware units which can be updated separately Firmware Unit Filename DSP E 517 DSP Firmware HW xxxxx FW xxxxx hex FPGA E 517 FPGA Firmware HW xxxxx FW xxxxx hex MCU MCU Firmware HW xxxxx FW xxxxx hex All firmware updates can be made by running the Firmware Update Wizard on the host computer using the same communication interfaces as for normal operation The Firmware Update Wizard is available on the E 517 CD and can be installed as follows 1 WInsertthe E 517 CD in your host PC 2 If the Setup Wizard does not open automatically start it from the root directory of the CD with the E icon 3 Follow the on screen instructions select custom inst
25. the E 545 is powered on a message will appear saying that new hardware has been detected Follow the on screen instructions and insert the E 517 CD The required FTDI hardware drivers are found in the NUSB Serial Driver directory www pi ws E 545 PZ217E Release 1 2 2 Page 50 PI Remote Control ONLINE Mode Piezo Nano Positioning In the host software e g PIMikroMove PITerminal or LabView drivers you see all E 517 digital operation modules i e all E 545s which are connected to the USB sockets of the host PC In the Start up controller window of PIMikroMove for example the present devices are listed on the FTDI USB tab card see figure below Click on the E 517 to which you want to connect Then press the Connect button to establish the connection Start up controller 2 Select connected stages ET 3 Start up axes Figure 11 The connection dialog in PIMikroMove NOTE With TCP IP and USB connections communication cannot be maintained after the E 545 is power cycled or the E 517 digital operation module is rebooted The connection must then be closed and reopened www pi ws E 545 PZ217E Release 1 2 2 Page 51 Remote Control ONLINE Mode Piezo Nano Positioning PI 3 4 Data Recording 3 4 1 How to Use the Data Recorder www pi ws The E 517 digital operation module in the E 545 includes a real time data recorder It is able to record several input and output signals e g current position con
26. 5 The last commanded voltage value lay beyond the allowed range and the SVA command therefore was ignored SVA A A 0080 0000 Query the commanded output voltage It resulted from the last valid SVA command VMA A A 0120 0000 Get voltage output high limit for the axis VMA A 90 Set voltage output high limit for the axis to 90 volts VMI A 10 Set voltage output low limit for the axis to 10 volts SVA A 85 Set the output voltage for axis A to 85 volts VOL 1 1 0085 4611 Query the current output voltage of piezo channel 1 SVA A 100 Set the output voltage for axis A to 100 volts VOL 1 1 0085 4606 Query the current output voltage of piezo channel 1 SVA A A 0085 0000 Query the commanded output voltage It resulted from the last valid SVA command ERR 302 Get error code of the last occurred error The error error 302 code is cleared by the ERR command Voltage out of limits ERR 0 error No error occurred since the last ERR query 0 NO error VMA A 100 Set voltage output high limit for the axis to 100 volts SVA A 100 Set the output voltage for axis A to 100 volts SVA A A 0100 0000 Query the commanded output voltage It resulted from the last valid SVA command VOL 1 1 0099 3135 Query the current output voltage of piezo channel 1 www pi ws E 545 PZ217E Release 1 2 2 Page 39 Remote Control ONLINE Mode PI Piezo Nano Positioning Co
27. 62 39 LIPO ASS PU E 66 391 Software Updates sess nnne 66 392 Firmware Updates ernnnnnonnnnrnrnvnnonnnannnnrnrrnnnnnnnnnnnnnnnnennenennnnnnnnnnennen 67 Maintenance 69 41 AGING une 69 42 AC Power and Line Power FUSES ssssessessesseeseseeesesseeeseeees 69 43 Opening the Gasb ose eo emitte Reda RR eec e RR nn 70 Troubleshooting 73 Customer Service 79 Old Equipment Disposal 80 Technical Data 81 8 1 Specifications us etae aeter tad e ee a 81 82 Block DIagrams Loop E rere testen eot deae iu Re eder tee 83 83 Operating LAMM ss too EIE ED tT aaa rete et E re Sir stata t Meese 86 84 PirrAssignmo rts o tgo e ete Rubr ipu tu Suns 88 841 Piezo and Sensor Socket on E 545 3RD sss 88 842 CH1 CH2 CH3 Socket on E 545 3CD sse 89 843 Sensor Monitor Socket on E 545 3RD sssssssseeeeee 90 844 Sensor Monitor Socket on E 545 3CD rvrrrrnavvvrrrnnvverrrnsrverrrnsrrerrrnnnn 90 945 Digital In Out SOCKet cire ite eminet neers 91 846 RS232 SOCKEN iucunde eet E rere ee futsal 92 Introduction Piezo Nano Positioning PI 1 Introduction m For Plnano XY and XYZ Piezo Stages with Highly Sensitive Piezoresistive or Capacitive Sensors m Closed Loop Control for High Repeatability and Accuracy m Analog Control or Remote Control via 24 Bit USB TCP IP and RS 232 Interfaces m Wave Generator with Programmable Trigger In and Output
28. 7E Release 1 2 2 Page 44 Remote Control ONLINE Mode Piezo Nano Positioning PI In the host software e g PIMikroMove PlTerminal or LabView drivers you can use the Search for controllers functionality in the connection dialog to see all available E 517 digital operation modules i e E 545 controllers with their IP address and port settings In PIMikroMove you have for example to press the Search for controllers button in the Start up controller window see figure below In the resulting list click on the controller to which you want to connect Check that the IP address and port number were correctly transferred to the Hostname and Port fields Then press the Connect button to establish the connection Start up controller E 517 Controller 1 Connect controller RS 232 IEEE 488 FTOI USB TCP IP Hostname TCP IP Address 172 17 126 86 Port 50000 2 Select connected stages gt 3 Start up axes Figure 8 The connection dialog in PIMikroMove NOTE In the controller selection list you can also identify the controllers which already have a TCP IP connection open If you try to connect to such a controller an error message will be generated as no multiple TCP IP connections are possible 3 3 3 2 PC with Ethernet Card The IP address and IP mask settings of PC and E 517 digital operation module must be compatible with each other in the following cases because otherwise
29. Derivat 1 Current position of axis iv L 2 B Current position of ax tv g 3 L C Current position of axis iv El re sd Read al Read none Read auto select The settings configured here wil apply to the next recording They wil not affect akeady displayed data d Cencel Click OK to close the dialog 6 Configure the measurement in the bottom line of the Data Recorder window Select the axis to be measured in the leftmost field A in this example Deselect the Servo checkbox since the measurement must be done in open loop operation Enter the amplitude of the impulse in V in the field between the start buttons for step and impulse response measurements and press Enter on your keyboard A w foomm a 7 The Record Rate value should be 1 7 Startthe impulse response measurement by clicking on the button right beside the amplitude field An impulse move is commanded with the IMP command and the recorded position is displayed in the graphics pane of the Data Recorder window 8 To analyze the recorded data and display it as a Bode frequency response diagram click on the FFT button in the icon bar above the graphics display 9 Optionally you can configure the display properties and activate cursors using the buttons in the icon bar above the graphics www pi ws E 545 PZ217E Release 1 2 2 Page 54 Remote Control ONLINE Mode Piezo Nano Positioning PI display see the PIMikroMove manual for deta
30. E 500 HCD Access to HyperBit Functionality for Enhanced System Resolution Supports Certain D A Boards PI s patented Hyperbit technology for providing position resolution higher than that of the D A board is in the E 500 ACD driver set Activating Hyperbit requires purchase of the password which can be obtained from PI under Order No E 500 HCD 1 6 Motion System Requirements To start working with the E 545 multi channel piezo controller your motion system must also include the following components m The mechanics piezo stage with which the E 545 was calibrated compare serial numbers m For remote operation via computer interface A PC with Windows operating system 2000 XP Vista or Linux operating system kernel 2 6 GTK 2 0 glibc 2 4 Communications interface to the PC and the appropriate cable Possible interfaces on the PC are COM port USB port or an Ethernet card The connection between E 545 and PC can furthermore be made via a free access point on a network to which the PC is connected To command the E 545 at least a terminal emulator must be installed on the PC For convenient operation without the need to learn any commands it is recommended to install PIMikroMove from the E 517 CD This graphical user interface is included in the typical www pi ws E 545 PZ217E Release 1 2 2 Page 11 Introduction Piezo Nano Positioning PI installation which requires about 50 MB free disk space Note that not all
31. MONITOR output for the three channels See Sensor Monitor Socket on E 545 3RD p 90 or Sensor Monitor Socket on E 545 3CD p 90 for details Connection to host PC Required for remote control via computer interface ONLINE mode or if the state of the system i e positions voltages modes is to be queried by a PC Connect the E 517 digital operation module in the E 545 either to the same TCP IP network as the host PC or to the host PC directly m Use anormal network cable if connecting to a network access point Note that many network administrators have set their networks to forbid unknown devices like the E 517 digital operation module to log on m To connect directly to the host PC use a cross over network cable or a USB A USB B cable or a null modem RS 232 cable E 545 PZ217E Release 1 2 2 Page 22 Operation Piezo Nano Positioning PI See Communication p 41 for more information Digital signals Only relevant for remote control via computer interface ONLINE mode If you want to use the digital I O lines of the E 517 digital operation module to trigger external devices and or to send start stop signals to the integrated wave generators connect these devices signals to the Digital In Out Socket p 90 on the rear panel of the E 545 See Using Trigger Input and Output p 56 for more information 2 5 Power On Reboot Sequence www pi ws CAUTION Thermally stable systems have the best p
32. Piezo Nano Positioning PI PZ217E User Manual E 545 PiInano Piezo Controller Release 1 2 2 Date 28 11 2012 This document describes the following product E E 545 3RD PInanoG Piezo Controller for Piezoresistive Sensors 3 Channels TCP IP USB RS 232 Interfaces m E 545 3CD PInanoG Piezo Controller for Capacitive Sensors 3 Channels TCP IP USB RS 232 Interfaces 2 Q PI nano Piezo Stage Controller Segment length Wave length Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Moving the NanoWorld www pi ws Tel 49 721 4846 0 Fax 49 721 4846 1019 Tm info pi ws www pi ws PI Declaration of Conformity according to DIN EN ISO IEC 17050 1 Manufacturer Physik Instrumente PI GmbH amp Co KG Manufacturer s Auf der RoemerstraGe 1 Address D 76228 Karlsruhe ee L L Germany The manufacturer hereby declares that the product Product Name PInano Piezo Controller Model Number E 545 Product Options all complies with the following European directives 2006 95 EC Low Voltage Directive LVD 2004 108 EC EMC Directive The applied standards certifying the conformity are listed below Electromagnetic Emission EN 61000 6 3 EN 55011 Electromagnetic Immunity EN 61000 6 1 Safety Low Voltage Directive EN 61010 1 August 15 2011 P Sere Karisruhe Germany Dr Spanner President Physik Instrumente PI GmbH a
33. ST WEISE SIO DS ST 30 31 1 Installing the Software on the Host PC 30 312 Creating Backup File for Controller Parameters 31 ALS QUICK SEITE 2e t adr fuge ta tera tree eene aae n a tee vata 32 32 Command Examples for ONLINE Mode eeeseeeeeese 38 33 Communication seeen eee 41 3341 Interfaces Available 2 0 0 0 cececcccecce cece eeeecneaeceeeeeeeseeeacaeeeeeeeeeeennanaeess 41 332 Default and Current Settings sse 42 3383 TGP IP Gonnection iini tini i a ced ead re dsp d code ehe ds 43 334 RS 232 Serial Connection ssssssssseeeeeene 49 335 USB GotnectiOn tierce rto due cp e rea nna HR nerd n 50 34 Data Decordinge sodes didum t e pM itae ti tas iu 52 341 How to Use the Data Recorder eese 52 342 Application Example Frequency Response Measurements 53 3 5 Using Trigger Input and Oulpul ct cte eite 56 36 How to Work with the Wave Generator sssseeeeeeeeees 56 35 17 Basic Data Lue ENN 57 362 Basic Operation ssssssssssseseeneneeeen enne 57 3 7 Working with Controller Macros eeeeen 58 374 Defining Macr s un irm PE Etape Pies 59 372 Starting Macro Execution ssssssssseeeeeen nene 60 373 Start Up Macro nic Pre et e no sc i rena PE ERR debo 61 38 E 517 GCS Commands Alphabetical Survey
34. a terminal you get a list of available commands and their syntax by typing HLP For a list of available controller parameters type HPA For detailed instructions and examples as well as for detailed command descriptions refer to the E 517 User Manual which is on the E 517 CD The CD also provides the software documentation 3 1 First Steps 3 1 1 Installing the Software on the Host PC Windows operating systems 1 WInsertthe E 517 CD in your host PC 2 If the Setup Wizard does not open automatically start it from the root directory of the CD with the EY icon 3 Follow the on screen instructions and select the typical installation Typical components are LabView drivers GCS DLL PIMikroMove Linux operating systems 1 Insertthe E 517 CD in the host PC 2 Open a terminal and go to the linux directory on the E 517 CD 3 Login as superuser root www pi ws E 545 PZ217E Release 1 2 2 Page 30 Remote Control ONLINE Mode Piezo Nano Positioning PI 4 Start the install script with INSTALL Keep in mind the case sensitivity of Linux when typing the command 5 Follow the on screen instructions You can choose the individual components to install For an overview over the host software provided see Software Description p 12 3 1 2 Creating Backup File for Controller Parameters It is strongly recommended to save the parameter values of the E 517 digital operation module to a file on the host PC before you make
35. al temperature falls below 60 C the high voltage output is reactivated automatically www pi ws E 545 PZ217E Release 1 2 2 Page 8 Introduction Piezo Nano Positioning PI CAUTION Incorrect parameter values may lead to improper operation or damage to your hardware Be careful when changing parameters It is strongly recommended to save the parameter values of the E 517 digital operation module to a file on the host PC before you make any changes This way the original settings can be restored if the new parameter settings will not prove satisfactory To save the parameter values and to load them back to the E 517 digital operation module use the Device Parameter Configuration window of PIMikroMove See Create Backup File for Controller Parameters p 31 for more information CAUTION If the piezo stage starts oscillating humming noise In closed loop operation switch off the servo immediately The load and or the dynamics of operation probably differ too much from the setup for which the system was calibrated In open loop operation stop the motion immediately Do not operate the piezo stage at its resonant frequency because the notch filter s may be deactivated in open loop operation You can measure the resonant frequency using PIMikroMove see Data Recorder p 52 for more information Otherwise the piezo stage could be irreparable damaged Re calibration should only be done by adequate trained personnel and
36. allation and then select the Firmware Update Wizard www pi ws E 545 PZ217E Release 1 2 2 Page 67 PI Remote Control ONLINE Mode Piezo Nano Positioning lie A Figure 12 The Firmware Update Wizard Start Screen In the Select PI controller window select Auto detection and press the Connect button The Firmware Update Wizard guides you through the firmware update of the E 517 digital operation module in your E 545 Mi Select PI controller Figure 13 Select controller to be connected to Firmware Update Wizard www pi ws E 545 PZ217E Release 1 2 2 Page 68 Piezo Nano Positioning PI Maintenance e Maintenance Remove the power plug from the wall socket to disconnect the system from the power supply completely if you want to clean the E 545 open the door of the fuse carrier or open the E 545 case 4 1 Cleaning The outside surface of the case can be cleaned using mild detergents or disinfectant solutions Organic solvents must not be used 4 2 AC Power and Line Power Fuses Unless otherwise requested the unit will be set up for the power predominant in your country New line power fuses are required when changing the supply voltage CAUTION Both fuses are active and have to be checked if there is a fault Figure 15 Fuse carrier Figure 14 Location of fuse carrier one of two fuses visible To access the line power fuses proceed as follows 1 Switch off the E 545 and remove th
37. and to send start stop signals to the wave generators with the digital I O lines of the E 517 digital operation module See Using Trigger Input and Output p 56 and External Triggering Signaling in the E 517 User Manual for more information and examples and Digital In Out Socket p 90 for the lines and pinout E 545 PZ217E Release 1 2 2 Page 25 Operation Piezo Nano Positioning PI 2 6 2 How to Command Motion in OFFLINE Mode CAUTION If the piezo stage starts oscillating humming noise In closed loop operation switch off the servo immediately The load and or the dynamics of operation probably differ too much from the setup for which the system was calibrated In open loop operation stop the motion immediately Do not operate the piezo stage at its resonant frequency because the notch filter s may be deactivated in open loop operation You can measure the resonant frequency using PIMikroMove see Data Recorder p 52 for more information Otherwise the piezo stage could be irreparable damaged Re calibration should only be done by adequate trained personnel and after consultation with Pl Otherwise preset data will be lost On power on all channels of the E 545 are in OFFLINE mode unless a start up macro is used to switch them to ONLINE mode In OFFLINE mode the axis motion is commanded by the voltage applied to the CONTROL INPUT socket of the corresponding channel exemplified using the X axis in the i
38. any changes This way the original settings can be restored if the new parameter settings will not prove satisfactory To save the parameter values and to load them back to the E 517 use the Device Parameter Configuration window of PIMikroMove See Installing the Software on the Host PC p 30 for how to install the program Proceed as follows to create a parameter file 1 Power on the system Find details in a dedicated section p 23 2 Start PIMikroMove on the host PC and establish a connection to the E 517 digital operation module as described in Quick Start p 32 3 Inthe PIMikroMove main window open the Device Parameter Configuration window using the E 517 Parameter Configuration menu sequence 4 Inthe Device Parameter Configuration window save the controller parameters to a file Use the Save or Save As buttons in the top left hand corner of the window or use the File Save Edit Values or File Save Edit Values As menu sequences In fact the values from the Edit Mask column are saved WWW pi ws E 545 PZ217E Release 1 2 2 Page 31 Remote Control ONLINE Mode Piezo Nano Positioning PI Deve Parameter Configuration e 9 99 8 urnad Hie Edt Tools Yew Hep g gbeni JJra ivxnes Lo trrk Farrer varaa OF r Parameters Location Current Setting Edit Mask COLChan Parm ID RAM Values Servo loop slew rate axis unt ms 0 1 007000200 2 co000000e 0 20000000060 Tolerance 0 1 007000900
39. are Vis for GCS commands and high level Vis for various tasks Users who want to use LabVIEW for programming their applications based on the GCS See the GCS LabVIEW manual of your controller for more information www pi ws E 545 PZ217E Release 1 2 2 Page 12 Introduction Piezo Nano Positioning PI Supported Software i Tool Operating Short Description Recommended for System PIMikroMove permits you to start your motion system host PC controller and stage s immediately without the need to write customized software It ijsarewho want to testthe offers motion control displays and festes that in man equipment before or instead y of programming an cases make it unnecessary to licati h deal with ASCII format ui ken ang i WANE TS PIMikroMove Windows commands It also has a Garn now to Use the commands For motor complete command input facility which represents an o noier PD y pr offers an easy way to easy way to experiment with ee various commands optimize we Servo PIMikroMove uses the GCS parameters DLL described above to command the controller Note that the program offers comprehensive online support PITerminal is a Windows GUI which can be used as a simple PETE who want 10 send ihe PITerminal Windows commands of the PI General terminal with almost all PI controllers Command Set GCS directly The Firmware Update Wizard Firmware i guides you ireug the upd
40. ase 1 2 2 www pi ws Technical Data Piezo Nano Positioning 8 4 Pin Assignments 8 4 1 Piezo and Sensor Socket on E 545 3RD www pi ws Connector type Sub D 25 pin f Pin Pin Signal Function 1 input DMS 3 B1 14 input DMS 3 B2 2 output DMS 3 Ref 15 GND DMS 3 GND 3 input DMS 2 B1 16 input DMS 2 B2 4 output DMS 2 Ref 17 GND DMS 2 GND 5 input DMS 1 B1 18 input DMS 1 B2 6 output DMS 1 Ref 19 GND DMS 1 GND 7 nc not connected 20 nc not connected 8 nc not connected 21 nc not connected 9 nc not connected 22 nc not connected 10 GND GND 23 GND PZT GND 11 output PZT 1 OUT 24 GND PZT GND 12 output PZT 2 OUT 25 GND PZT GND 13 output PZT 3 OUT E 545 PZ217E Release 1 2 2 Page 88 Technical Data 8 42 CH1 CH2 CHS Socket on E 545 3CD www pi ws Piezo Nano Positioning PI Connector type Sub D Mix connector for 3 coax lines and 22 single pins Pin Signal Function Coax inner lines A1 input Sensor Probe Ch 2 A2 input Sensor Probe Ch 3 A3 input Sensor Probe Ch 1 Standard pins 1 output Sensor Target Ch 2 output Sensor Target Ch 3 Reserved Reserved Reserved Reserved Reserved output PZT Ch 3 output PZT Ch2 output PZT Ch 1 output Sensor Target Ch 1 GND Sensor Target Ch 2 shield GND Sensor Target Ch 3 shield n
41. ate Set Current Axis Identifiers Get List Of Current Axis Identifiers Set Nonvolatile Memory Parameters Get Nonvolatile Memory Parameters Set Temporary Memory Parameters Get Temporary Memory Parameters Get Device Serial Number Start Step And Response Measurement Get STE Settings Stop All Motion Set Open Loop Axis Value Get Open Loop Axis Value Set Servo State Open Loop Closed Loop Operation Get Servo State Open Loop Closed Loop Operation Set Relative Open Loop Axis Value Get ADC Value Of Input Signal Tell Digital I O Lines E 545 PZ217E Release 1 2 2 Page 64 Remote Control ONLINE Mode Piezo Nano Positioning PI www pi ws TMN TMX TNR TPC TSC TSP TVI TWC TWG TWS TWS VCO VCO VEL VEL VER VMA VMA VMI VMI VOL WAV WAV WCL WGC Get Minimum Commandable Position Get Maximum Commandable Position Get Number Of Record Tables Get Number Of Output Signal Channels Get Number Of Input Signal Channels Get Input Signal Position Value Tell Valid Character Set For Axis Identifiers Clear All Wave Related Triggers Get Number Of Wave Generators Set TriggerLine Action To Waveform Point Get TriggerLine Action At Waveform Point Set Velocity Control Mode Get Velocity Control Mode Set Velocity Get Velocity Get Versions Of Firmware And Drivers Set Voltage Output High Limit Get Voltage Output High Limit Set Voltage Output Low Limit Get Voltage Output Low Limit Get Voltage O
42. ate Users who want to update the Windows of the firmware for the Update Wizard firmware hardware modules of your E 545 system www pi ws E 545 PZ217E Release 1 2 2 Page 13 Operation Piezo Nano Positioning Operation PI 2 1 2 1 1 Front and Rear Panel Elements Front Panel Elements PI nano Piezo Stage Controller www pi ws Figure 1 E 545 3RD front panel E 545 CH3 OVERFLOW OFF G M A SERVO CONTROL 9 ON ON PI nano Piezo Stage Controller Figure 2 Front panel details Name Function OVERFLOW LEDs Overflow LEDs for channels 1 to 3 yellow p 28 for more information operation control over the servo mode settings E 545 PZ217E Release 1 2 2 If an LED lights up the output of the corresponding amplifier is being clipped at one of its limits and the current displacement of the piezo actuator no longer complies with the control signal can only happen in closed loop operation See Zero Point Adjustment SERVO CONTROL Toggle switches for servo mode selection of channels 1 to ON OFF 3 ON closed loop operation OFF open loop Note for remote control via computer interface In ONLINE mode the SERVO switches of all channels must be set to OFF on the piezo control electronics This gives the integrated E 517 digital operation module complete Page 14 Piezo Nano Positioning PI Operation Name Funct
43. c not connected nc not connected Reserved Reserved Reserved GND PZT GND GND PZT GND GND PZT GND GND Sensor Target Ch 1 shield E 545 PZ217E Release 1 2 2 Page 89 Technical Data Piezo Nano Positioning PI 8 4 3 Sensor Monitor Socket on E 545 3RD Connector type 3 pin Lemo LEMO ERA 0S 303 CLL The SENSOR MONITOR socket on the E 545 3RD rear panel carries the signals from all three sensor channels Use this socket with the E 808 90 sensor monitor cable which comes with the E 545 3RD The purpose of this cable is simply to split up the SENSOR MONITOR output for the three channels It features solderable ends with color coding as stated below Vire color Functiot White Sensor channel 1 Brown Sensor channel 2 Shield GND Green Sensor channel 3 8 4 4 Sensor Monitor Socket on E 545 3CD WWW pi ws Connector type 6 pin Lemo EZG 0B 306 CLNZ The SENSOR MONITOR socket on the E 545 3CD rear panel carries the signals from all three sensor channels Use this socket with the D 893 32 sensor monitor cable which comes with the E 545 3CD The purpose of this cable is simply to split up the SENSOR MONITOR output for the three channels onto three separate BNC connectors The BNC connectors are each labeled with the channel number 1 output Chi 29 2 output Ch1 cai 3 output Ch2 4 output Ch2 D output Ch3 6 output Ch3 E 545 PZ217E Release 1 2 2 Page 90 Technical Data Piez
44. ce refer to the individual operating limit graphs in the figure below Note that the operating limits of a given piezo amplifier depends on the amplifier power the amplifier design and of course the capacitance of the piezo actuator The capacitance of piezo ceramics changes significantly with amplitude temperature and load up to approximately 200 of the unloaded small signal capacitance at room temperature The following equations describe the relationship between reactive drive power actuator capacitance operating frequency and drive voltage The average power that a piezo amplifier has to be able to provide for sinusoidal operation is given by Pa C Umax Up p f Peak power for sinusoidal operation is Pmax T C Umax Up p f Where Pa average power W Pmax peak power W C PZT actuator capacitance farad As v f operating frequency Hz Umax nominal voltage of the amplifier V Up p peak peak drive voltage V www pi ws E 545 PZ217E Release 1 2 2 Page 86 PI Piezo Nano Positioning Technical Data t t 4 1 1 T 1 1 1 1 100 90 a LI 1 1 4 sammen dam BO banaas T mB 4 4 B44d 60 50 40 Nepnydu L2 4 4 t4J d4 10E 30 meee Figure 19 E 545 operating limits with various piezo loads open loop Capacitance values in uF Page 87 E 545 PZ217E Rele
45. cro will be automatically executed with the next power on of the E 545 or reboot of the E 517 digital operation module Example QPRPRPR This macro sets the E 545 up for ONLINE mode and closed loop operation enables velocity control mode and drift compensation mode and sets the velocity to 20 um s To ask for the current start up macro setting send MAC DEF To undo the current start up macro selection send MAC DEF i e omit lt macroname gt Deleting the current start up macro with MAC DEL lt macroname gt also deletes the start up macro selection www pi ws E 545 PZ217E Release 1 2 2 Page 61 Remote Control ONLINE Mode Piezo Nano Positioning PI 3 8 E 517 GCS Commands Alphabetical Survey WWW pi ws 5 6 7 8 9 24 IDN ATC ATC ATS CCL CCL CSV CSV CTO CTO DCO DCO DEL DFH DFH DIO DRC Request Motion Status Query If Position Has Changed Since Last POS Command Request Controller Ready Status Query If Macro Is Running Get Wave Generator Status Stop All Motion Get Device Identification Start Auto Calibration Get Auto Calibration Settings Get Auto Calibration Status Set Command Level Get Command Level Set GCS Syntax Version Get Current Syntax Version Set Configuration Of Trigger Output Get Configuration Of Trigger Output Set Drift Compensation Mode Get Drift Compensation Mode Delay The Command Interpreter Define Current Position As Axis Home Position Get Home Posi
46. d The IEEE 488 tab card shown in the figure above will not be present with the E 545 5 Give the E 517 digital operation module control over the output voltage channels of the E 545 by switching them to ONLINE mode This can be done in the Start up controller window which should www pi ws E 545 PZ217E Release 1 2 2 Page 34 Remote Control ONLINE Mode Piezo Nano Positioning PI open automatically with the Start up E 517 step see figure below A channel is in ONLINE mode when its check box is checked otherwise it is in OFFLINE mode When the mode selection is finished press the OK button The PIMikroMove main window will open You can reopen the window for ONLINE OFFLINE selection at any time via the E 517 Start up axes menu sequence from the PIMikroMove main window Online state of the piezo channel s IV Channel I Channel 2 M Channel 3 2 Start up E 517 set next time on new connection OK Notes In ONLINE mode the SERVO switches of all channels must be set to OFF on the piezo control electronics This gives the E 517 digital operation module complete control over the servo mode settings Channels which are in OFFLINE mode cannot be commanded by the E 517 and hence not by the host PC but only via voltages applied to the CONTROL INPUT BNC sockets on the E 545 rear panel see How to Command Motion in OFFLINE Mode p 26 for details Find details in Modes of Operation p 19
47. d Note that the default identifiers to be used for the X Y and Z axis are A B C MAC BEG macrol Start recording macro macro1 ONL 112131 Switch all piezo channels to ONLINE mode SVOA1B1C1 Enable servo control mode for all axes VCOA1B1C1 Enable velocity control mode and drift compensation DCOA1B1C1 mode The E 517 digital operation module now keeps track of proper motion 108 100 8 298 6 Set velocity to 100 um s Mov A 10 B 10 C 10 Move all axes to position 10 um This moves take 0 1 s DEL 1000 Delay of approx 1000 ms MOV SB 00 0 Move all axes to its home pau 2800 This delay only matters if the macro is run several times in a loop une END Exit the macro recording mode The macro now is complete E 545 PZ217E Release 1 2 2 Page 59 Remote Control ONLINE Mode Piezo Nano Positioning PI Example 2 Macro1 now is splitted in two separate macros macro2 and macro3 because it in not necessary to set up the E 545 every time motion in ONLINE mode is to be performed When you start macro3 this implicates that macro2 is executed 10 times Write macro2 MAC BEG macro2 MOV A 10 B 10 C 10 DEL 1000 MOV AOBOCO DEL 1000 MAC END Write macro3 BpPHH VEL A 100 B 100 C 100 MAC NSTART macro2 10 MAC END 3 7 2 Starting Macro Execution www pi ws A defined macro can be run by the command MAC START lt macroname gt where macroname is the name that was given to the macro to be run To run a macro
48. d loops in macros which is not directly supported by the E 517 digital operation module See the PIMikroMove manual for more information regarding Host macros www pi ws E 545 PZ217E Release 1 2 2 Page 58 Remote Control ONLINE Mode Piezo Nano Positioning PI 3 7 1 Defining Macros www pi ws To define a macro command sequence first activate macro recording mode with the command MAC BEG lt macroname gt where macroname is a user settable name with a maximum of 8 characters While in macro recording mode commands are not executed but stored in macro storage Recording mode is exited by the MAC END command The maximum number of macros to be stored on the E 517 digital operation module is 60 A macro is immediately written to non volatile memory No additional storage procedure is required Note that saving a macro to non volatile memory typically takes about 1 s A macro can start another macro without any nesting level limitation A macro can call itself to form an infinite loop During macro recording no macro execution is allowed A macro can be overwritten by a macro with the same name Macros can be recorded when the wave generator is running A running macro sends no responses to any interface This means questioning commands are allowed in macros but not answered and therefore useless Example 1 This simple macro sets the E 545 up for ONLINE mode and closed loop operation and performs a move forward and backwar
49. e E 517 to the host PC if the PC has only one COM port it is probably COM 1 The serial port of the E 517 digital operation module is preset to the following parameters 115 200 baud 8 bits no parity RTS CTS In the connection dialog of the host software e g PIMikroMove PITerminal or LabView drivers you make the settings on the host PC side Select the correct PC COM port and make sure that the baud rate and other settings in the dialog match those of the E 517 digital operation module Otherwise no communication can be established www pi ws E 545 PZ217E Release 1 2 2 Page 49 Remote Control ONLINE Mode Piezo Nano Positioning PI Start up controller Baudrate f115200 j Figure 10 RS 232 configuration of the host PC side in PIMikroMove If you have established a connection and want to change the currently active baud rate proceed as follows 1 Use the IFC command in the command entry facility of the program e g by sending IFC RSBAUD 57600 2 Close the connection 3 Open the connection again with the baud rate you just set with IFC in the example 57600 3 3 5 USB Connection The USB interface of the E 517 digital operation module is available on the rear panel of the E 545 via the type B USB socket Use the included USB cable USB A USB B to connect the E 517 to the host PC The first time you connect over the USB interface be sure you are logged on the PC as a user having administrator rights After
50. e line cord 2 Wait a minute to be sure that any residual voltage has dissipated 3 Pry open the door that covers the fuse carrier and pry out the fuse carrier see figures above www pi ws E 545 PZ217E Release 1 2 2 Page 69 Maintenance Piezo Nano Positioning PI 4 Be sure to replace both fuses with fuses of the type appropriate for the new voltage IEC standard 220 VAC to 240 VAC 2 x 1 0 AT slow blow 100 VAC to 120 VAC 2 x 2 0 AT slow blow 5 Rotate the fuse carrier so that the valid voltage setting 115 V or 230 V will show through the window when the door is closed 6 Reinstall the carrier and close the door 4 3 Opening the Case Procedures which require opening the case should be carried out by authorized qualified personnel only Disconnect the E 545 from power when opening the case and when resetting internal switches or jumpers When the E 545 must be operated with the case open voltages of up to 120 V can be exposed Do not touch internal conductors CAUTION The boards inside the E 545 are ESD sensitive electrostatic discharge sensitive devices Observe all precautions against static charge buildup before handling these devices Avoid touching circuit components pins and PCB traces Discharge any static electricity you may have on your body by briefly touching a conductive grounded object before you touch any electronic assembly Make sure that no conductive particles of any kind metallic dust or
51. ed 1 Make sure the mechanics is mounted and connected to the piezo control electronics in exactly the same way as in the application The load on the mechanics is especially important 2 Start PIMikroMove on a host PC connected to the E 517 digital operation module see the PIMikroMove software manual on the E 517 CD for details 3 Inthe Command Entry window of PIMikroMove deactivate the digital filtering of the sensor signal for the sensor channel which belongs to the measured axis This is recommended to achieve more reliable results In this example you have to do this for the first channel Send SPA 1 0x05000000 to query the current filter type setting response should be 2 FIR filter default setting of the Digital Filter Type parameter Send SPA 1 0x05000000 0 to deactivate the digital filter Close the Command Entry window 4 Open the Data Recorder window via the E 517 Show Hide data recorder menu entry E 545 PZ217E Release 1 2 2 Page 53 Remote Control ONLINE Mode Piezo Nano Positioning PI 5 Configure recording Press the Configure button in the down right corner of the Data Recorder window In the Configure Data Recorder dialog which opens check the box in the Head column and select Current position of axis in the Option column for the axis to be measured In the example shown in the figure below the current position of axis A will be recorded and read afterwards x Read Source Option
52. ee Default and Current Settings p 42 for the default E 517 settings Note that the following steps may vary in some details depending on the version of your Windows operating system 1 Follow the menu sequence Start Settings Control Panel Network and Dial up Connections Local Area Connection 2 Inthe Local Area Network LAN status window click Properties 3 Inthe Properties window of the LAN connection click on Internet Protocol TCP IP 4 Inthe Internet Protocol TCP IP Properties window activate Use the following IP address Make a note of the current P address and Subnet mask settings if any in case they need to be restored E 545 PZ217E Release 1 2 2 Page 46 Remote Control ONLINE Mode Piezo Nano Positioning PI www pi ws later Then adapt the P address and Subnet mask settings to make them compatible with the settings of your E 517 Set the first three portions of P address identical to those of the IP address of the E 517 while the last portion must be different One possible P address setting would be for example 192 168 168 2 the default IP address of the E 517 is 192 168 168 10 Do not use 255 for the last portion Set Subnet mask to 255 255 255 0 if the IP mask of the E 517 is 255 255 255 0 Confirm with OK An example is shown in the figure below Connect the E 517 to the Ethernet card in the PC using the included special cross over cable point to point connection If a
53. el of the transient overvoltage is the standing surge voltage according to the overvoltage category II IEC 60364 4 443 m Degree of pollution 2 1 3 Safety Precautions WARNING READ INSTRUCTIONS www pi ws Install and operate the E 545 Piezo Controller only when you have read the operating instructions Keep the instructions readily available close to the device in a safe place When the instructions are lost or have become unusable ask the manufacturer for a new copy Add all information given by the manufacturer to the instructions e g supplements or Technical Notes The amplifier s used by the E 545 are high voltage amplifiers capable of generating high output currents They may cause serious or even lethal injury if used improperly Working with high voltage amplifiers requires adequately trained operating personnel Strictly observe the following Do not touch the pins of the sub D connector which carry the piezo output voltage and the sensor signals The high voltage output may be active whenever the controller is turned on The output value depends on the last control value Voltages between 20 V and 120 V can be present on the sub D connector E 545 PZ217E Release 1 2 2 Page 6 A Introduction Piezo Nano Positioning PI N Connect the AC power cord of the E 545 to the wall socket 100 to 120 VAC or 220 to 240 VAC Use the AC power cord that came with the E 545 Use another AC power cord only when its rating
54. epends on the voltage applied to the CONTROL INPUT socket of the channel Unless your stage has a custom calibration the signal should always be in the range of 0 to 10 V excursions to 2 or 12 V may cause overflow especially with servo on and reduce actuator lifetime Move commands received via interface or from a running macro and wave generator output are ignored and may provoke an error message m ONLINE mode The E 517 digital operation module in the E 545 controls the generation of the output voltage Target values for the axis motion can be given by move commands received via interface or from a running macro and wave generator output The control input voltage is ignored Operation in ONLINE mode is also referred to as remote control via computer interface in this User Manual See Control Value Generation in the E 517 User Manual PZ214E on the E 517 CD for details Switching between ONLINE and OFFLINE mode can be done by channel specific ONL commands sent over the communications interface or received from a macro running on the E 517 digital operation module Using E 545 PZ217E Release 1 2 2 Page 19 Operation Piezo Nano Positioning PI the ONL command you can check the current control mode on a per channel basis NOTES Upon power on or reboot all piezo channels of the system are by default in OFFLINE mode You can switch them to ONLINE mode using a start up macro see Start Up Macro for details
55. erformance For a thermally stable system power up the E 545 at least one hour before you start working with it To power up the E 545 switch it on using the rocker switch on the front panel The POWER LED glows permanently as long as the E 545 is powered on Remote Control Operation via Computer Interface On power on or reboot with the RBT command the control mode is reset to OFFLINE and the servo mode selection in the integrated E 517 digital operation module is reset to open loop operation Furthermore the E 517 copies information from non volatile memory to volatile memory TCP IP communication If no DHCP server is available on the network or if a point to point connection between host PC and controller is being used after power on or reboot it might take a period of about 30 seconds before communication is possible CAUTION You can define a start up macro which runs on power on or reboot see Working with Controller Macros p 58 for more information Be careful with the start up macro since there is no way to skip it with the E 545 In particular do not use the RBT command in the start up macro E 545 PZ217E Release 1 2 2 Page 23 Operation Piezo Nano Positioning PI 2 6 How to Command Axis Motion 2 6 1 Applicable Control Sources www pi ws For successful operation it is important to know which axis is driven by which piezo channel and measured by which sensor channel With the E 545 the axis to cha
56. ermanent glow of the OVERFLOW LED in spite of zero point adjustment may indicate hardware failure Contact your Physik Instrumente Sales Engineer Custom software accessing PI drivers does not run Wrong combination of driver routines VIs Check if system runs with Terminal program If yes read the software manual and compare sample code from the E 517 CD to check the necessary driver routines E 545 PZ217E Release 1 2 2 Page 78 Customer Service Piezo Nano Positioning PI 6 Customer Service Call your PI representative or write to info pi ws please have the following information about your system ready m Product codes and serial numbers of all products in the system m Firmware version of the controller if present m Version of drivers and or host software if present m Operating system on host PC if present www pi ws E 545 PZ217E Release 1 2 2 Page 79 Piezo Nano Positioning PI Old Equipment Disposal 7 Old Equipment Disposal In accordance with EU directive 2002 96 EC WEEE as of 13 August 2005 electrical and electronic equipment may not be disposed of in the member states of the EU mixed with other wastes To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH amp Co KG will ensure environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have such old equipmen
57. erminal you get a list of available parameters by typing HPA m Trigger output details and examples With the E 517 version included in the E 545 display trackball and GPIB IEEE 488 interface are omitted Ignore all information in the E 517 User Manual regarding display trackball and GPIB interface Furthermore ignore the customization information given there your system comes ready for operation E 545 PZ217E Release 1 2 2 Page 4 Piezo Nano Positioning PI Introduction Software Manuals provided on the E 517 CD During remote control via computer interface the E 545 is always identified as E 517 Use the host software and the corresponding software documentation provided on the E 517 CD E 802 User Manual PZ150E and E 801 User Manual PZ117E available for download at www pi ws In addition to the E 517 digital operation module the following submodules are integrated in the E 545 m E 802 55 servo control submodules m With E 545 3RD models only E 801 30 sensor processing submodules The information given in the User Manuals of those submodules is only relevant if you should ever need to re calibrate your system For normal operation of the E 545 you do not need those manuals because your system will be fully calibrated before being shipped Note that re calibration should only be done by adequate trained personnel and after consultation with PI Updated releases of all documents are available for download at
58. et p 89 If your system was calibrated by PI controller and stage are not interchangeable The serial numbers of the corresponding stage should be marked on a calibration label on the E 545 www pi ws E 545 PZ217E Release 1 2 2 Page 21 Operation www pi ws Piezo Nano Positioning PI Control input signals Required for channels which are to be controlled by a voltage applied to the corresponding CONTROL INPUT socket OFFLINE mode Connect control signal sources to the CONTROL INPUT BNC sockets on the rear panel of the E 545 Unless your stage has a custom calibration the signals should always be in the range of 0 to 10 V excursions to 2 or 12 V may cause overflow especially with servo on and reduce actuator lifetime The control signals can be generated by a DAQ board in a PC running LabVIEW and using Pl s LabVIEW Analog Driver Set That driver set can be downloaded from www pi ws See the included E500T0011 Technical Note for detailed download instructions and the driver documentation for installation and operation The control input is ignored in ONLINE mode i e during remote control via PC interface AC power connection See AC Power Connection p 18 for details Sensor monitor If you want to read out the monitor signals for the sensors in the mechanics use the SENSOR MONITOR socket with the sensor monitor cable which comes with the E 545 The purpose of this cable is simply to split up the SENSOR
59. f Output Signal Channel Set Waveform Definition Get Waveform Definition Clear Wave Table Data Set Number Of Wave Generator Cycles E 545 PZ217E Release 1 2 2 Page 65 Remote Control ONLINE Mode Piezo Nano Positioning PI WGC WGO WGO WGR WMS WOS WOS WPA WTR WTR Get Number Of Wave Generator Cycles Set Wave Generator Start Stop Mode Get Wave Generator Start Stop Mode Starts Recording In Sync With Wave Generator Get Maximum Number Of Wave Table Points Set Wave Generator Output Offset Get Wave Generator Output Offset Save Parameters To Nonvolatile Memory Set Wave Generator Table Rate Get Wave Generator Table Rate Detailed descriptions of the PI General Command Set GCS commands in the E 517 syntax are provided by the E 517 User Manual PZ214E which is on the E 517 CD 3 9 Updates 3 9 1 Software Updates www pi ws Updated releases of software and manuals are available for download at www pi ws You need a password for the download This password is provided on the E 517 CD in the E 517 Releasenews PDF file in the Manuals directory To download the latest software from the PI Website proceed as follows 1 On the www pi ws front page move the cursor to Manuals Software ISO Statements in the Service section on the left Select Software amp Manuals on PI Support Server from the list that pops up On the P Download Server page enter the Username and the Password which are provided in
60. g can be reached easily The power connection and line fuses are located on the rear panel of the chassis Unless you request otherwise upon delivery the E 545 will be set up for the voltage predominant in your country The maximum power consumption of the E 545 is 75 W Figure 7 AC power cord socket with integrated line fuse carrier E 545 PZ217E Release 1 2 2 Page 18 Operation Piezo Nano Positioning PI e 3 Modes of Operation Control mode The piezo channels amplifiers of the E 545 can be operated in either ONLINE or OFFLINE control mode The active mode determines the applicable control sources for the output voltage See Control Modes p 19 for more information Servo mode The current servo mode determines if a motion axis is driven in open loop servo OFF or closed loop servo ON operation In closed loop operation a servo loop participates in the generation of the control value for the piezo channel The servo loop thus maintains the current axis position based on a given target position and the position feedback of the corresponding sensor channel See Servo Modes p 20 and Control Value Generation for more information The individual control and servo modes can be combined arbitrarily 2 3 1 Control Modes www pi ws The current control mode of a piezo channel determines the applicable control sources for the output voltage and hence for the axis motion mH OFFLINE mode The output voltage d
61. g the wave generator it is recommended to reduce the frequency and or the amplitude and or the output duration to avoid overheating See Wave Generator in the E 517 User Manual for more information www pi ws E 545 PZ217E Release 1 2 2 Page 75 Troubleshooting Piezo Nano Positioning PI www pi ws Communication with controller does not work Communication cable is wrong or defective Check cable Does it work properly with another device For RS 232 a null modem cable must be used For TCP IP connections Connect the controller to an Ethernet connector in the PC using the included cross over network cable When connecting to a network hub or router it might be necessary to use a straight through network cable Communications has not been established yet TCP IP communication If no DHCP server is available on the network or if a point to point connection between host PC and controller is being used after power on or reboot it might take a period of about 30 seconds before communication is possible The interface is not configured correctly With the RS 232 interface check port and baud rate With the TCP IP connection connect the controller to a network access point before you power it on Check IP address and IP mask the settings of the devices in the network must be compatible e g the IP address of each device must be unique Make sure that your network administrator has not set the network to forbid unkno
62. gs made with IFC are lost if they were not saved with WPA To read all current active communication parameters use the IFC command NOTE The IFS IFS IFC and IFC commands affect the controller side only It is also possible to change the default settings with SEP and to read them with the SEP command If you use RPA to activate the changed settings it may be necessary to close the current connection and re open it with the new settings The appropriate parameter IDs are given below The factory defaults of the communication settings stored in the E 517 digital operation module are as follows response to IFS m RSBAUD gives the baud rate to be used for RS 232 communication default is 115200 also accessible as Uart Baudrate parameter ID 0x11000400 m IPADR the first four portions specify the default IP address for TCP IP communication the last portion specifies the default port to be used default is 192 168 168 10 50000 also accessible as IP Address parameter ID 0x11000600 Note While the IP address can be changed the port must always be 50000 m IPSTART defines the startup behavior for configuration of the IP address for TCP IP communication default is 1 use DHCP to obtain IP address also accessible as IP Configuration parameter ID 0x11000800 E 545 PZ217E Release 1 2 2 Page 42 Remote Control ONLINE Mode Piezo Nano Positioning PI m IPMASK gives the IP mask to be used for TCP IP communication defaul
63. hub is used to allow for connection of several devices to the PC connect the E 517 to the hub using the straight through network cable Power on the E 545 Use the Search for controllers functionality described in Network with DHCP Server p 44 to establish the connection between PC and the E 517 NOTE If the connection fails change the last portion of the P address setting on the PC and try again to connect via Search for controllers E 545 PZ217E Release 1 2 2 Page 47 Remote Control ONLINE Mode Piezo Nano Positioning PI Inter net Protocol TCP IP Properties Genera You can get IP settings assigned automatically d your network supports thes Capatelty Otherwise you need to ask your network admnstrator hor the appropriate IP seling Adapt P address and Subnet mask do not change the Default gateway setting Use the folowing DNS server addresses Prefered DNS server Press OK Figure 9 Internet Protocol TCP IP Properties window the settings shown are only examples maybe they does not match that of your controller If you want to change the IP address and IP mask settings of the E 517 digital operation module 1 Establish a serial connection between PC and E 517 as described in RS 232 Serial Connection p 49 2 Use the IFS command in the command entry facility of the program to adapt the IP address and IP mask settings of the E 517 to those of the PC to check the
64. ication I O ports for digital operation module Miscellaneous Operating voltage Operating temperature range Overheat protection Mass Dimensions E 545 PZ217E Release 1 2 2 PI Piezo Nano Positioning E 545 3RD E 545 3CD Lab VIEW drivers Libraries for Windows DLL and Linux Wave generator data recorder macro programming Sub D 25 connector Sub D Mix connector for all three channels Sub D 25 connector Sub D Mix connector for all three channels BNC one per channel Lemo ERA 0S 303 CLL EZG 0B 306 CLNZ 2 V to 12 V USB FTDI USB 1 1 compatible with USB 2 0 Ethernet TCP IP RS 232 3 trigger inputs 3 trigger outputs 5 V MDR14 connector 100 120 V AC 60 Hz 89 VA 2 x 2 0 A slow blow or 220 240 V AC 50 Hz 89 VA 2 x 1 0 A slow blow 5 C to 40 C Deactivation of high voltage output at 75 C 7 9 kg 450 x 88 x 343 mm mounting brackets Page 82 Technical Data Piezo Nano Positioning PI 8 2 Block Diagrams Piezores Sensor CH 3 MONITOR 3 Channel SENSOR T o 20 oo S E or o SERVO ON OFF Host PC E 545 3RD CONTROL IN CH2 CONTROL IN CH3 CONTROL IN CH1 Figure 16 E 545 3RD block diagram ONLINE OFFLINE switch shown for channel 3 only www pi ws E 545 PZ217E Release 1 2 2 Page 83 Technical Data Piezo Nano Positioning PI 2 2 ul 0 MONITOR 3 Channel CH1 to CH3 SERVO ON OFF Swi
65. ils This helps to identify the resonance peak on the Bode plot For example you can place a cursor on the peak and read out the cursor value which is displayed beside the graph see figure below the resonant frequency is about 824 Hz note that the resonant frequency of PInano systems typically ranges from 200 to 300 Hz Data Recorder E 517 USB SN 0000000002 NO o x 3a s eg mg e OW E Cursor Y Record Channel Cursor 1 X 623 97461 Y 58 85050 Cursor 2 x 6 10352 Y 56 73965 D f Cur 1 Cur 2 dX 817 87109 dy 2 11085 dy dx 0 00258 Amplitude dB 100 Frequency Hz Read offser 1 H of data points 3006 Read al Record now Configure axis A Servo AL ar 10000000 Al sj Move back after step Record Rate 1 a Physik Instrumente E 517 107020627 V01 060 10 When the measurement is finished open the Command Entry window again and set the Digital Filter Type parameter back to its initial value See step 3 NOTE If the resonant frequency should not be damped well enough the measured resonance peak is higher than the highest amplitude value for lower frequencies then the notch filter center frequency damping of the servo control circuit can be adjusted as described in the User manual of the E 802 submodule Please note that re calibration should only be done by adequate trained personnel and after consultation with PI The E 802
66. ion POWER LED Power on indicator Glows permanently as long as the E green 545 is powered on Note for remote control via computer interface Depending on the communication interface used after power on it might take a period of about 30 seconds before communication can be established Unlabeled rocker Switch power on off switch 2 1 2 Rear Panel Elements Figure 3 E 545 3RD rear panel CONTROL CONTROL CONTROL INPUT CH1 INPUT CH2 INPUT CH3 AA AG 9 9 SENSOR MONITOR Figure 4 E 545 3RD Rear panel details www pi ws E 545 PZ217E Release 1 2 2 Page 15 Operation www pi ws u Figure 5 E 545 3CD rear panel Piezo Nano Positioning PI CONTROL CONTROL CONTROL INPUT CH1 INPUT CH2 INPUT CH3 9 Digital In Out Figure 6 E 545 3CD Rear panel details Name Function AC power cord socket with integrated line fuse carrier New line power fuses are required when changing the supply voltage See AC Power and Line Power Fuses p 69 for how to replace the line power fuses CONTROL INPUT CH1 to CH3 BNC sockets for control input voltage connect control signal sources Used to control the axis motion in OFFLINE mode the input is ignored in ONLINE mode i e during remote control via PC interface The signals should always be in the range of 0 to 10 V excursions to 2 or 12 V may cause overflow especially with servo on and reduce actuator lifetime
67. iple sources see Control Value Generation in the E 517 User Manual for details move commands received via interface or from a running macro SVA SVR MOV MVR GOH IMP STE and wave generator output Check the current control mode using the ONL command No control signal applied or signal out of range If not switched to ONLINE mode by a start up macro on power on or reboot all E 545 channels are in OFFLINE mode and can only be commanded by analog control signals Apply an analog control signal to the CONTROL INPUT BNC socket of the corresponding channel to command E 545 PZ217E Release 1 2 2 Page 73 Troubleshooting Piezo Nano Positioning PI WWW pi ws the axis motion Unless your stage has a custom calibration the signal should always be in the range of 0 to 10 V excursions to 2 or 12 V may cause overflow especially with servo on and reduce actuator lifetime If you generate the analog signal with a DAQ board in a PC running LabVIEW and using PI s LabVIEW Analog Driver Set check the driver and the DAQ board for proper operation Move commands macros or wave generator commands provoke errors and are ignored Check if the piezo channels are in OFFLINE mode using the ONL command In OFFLINE mode move commands received via interface or from a running macro and wave generator output are ignored and may provoke an error message In ONLINE mode the axis motion can be commanded by multiple sources see Cont
68. mmand Response Action Performed String to Send POS A A 0206 1647 Query the current position axis A The nominal travel range 0 to 100 V is 200 um witha tolerance of 20 SVR A 20 Move axis A relative by subtracting 20 volts from the current output voltage VOL 1 1 0080 4106 Query the current output voltage of piezo channel 1 POS A A 0193 9297 Query the current position axis A Example 2 This example moves X Y and Z axis in closed loop operation default identifiers are A B C Afterwards the current position is queried Command String to Response Action Performed Send ONL 112131 Switch all piezo channels identifiers 1 2 3 to ONLINE mode so that axis motion can be caused by move commands received via interface or from a running macro or wave generator output SVOA1I1B1CI Set servo control on closed loop operation for all axes this also writes the current axis position to the target register to avoid jumps of the mechanics DCOA1BI1CI Activate drift compensation for the axes to avoid an unwanted change in displacement over time See Drift Compensation in the E 517 User Manual for details OV A 30 5 Move axis A to the given absolute position of 30 5 um POS A A 0030 4804 Query the current position axis A OV B 80 Move axis B to the given absolute position of 80 um POS B B 0080 8775 Query the current position axis B MOV B 0 C 30 5 Move axis B to the give
69. mp Co KG Auf der Roemerstralta 1 76228 Karlsruhe Germany PIEZO NANO fPOSITIONING Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws www pi ws RENEE EN Physik Instrumente PI GmbH amp Co KG is the owner of the following company names and trademarks PIG PIC PICMA PILine amp PIFOC PiezoWalk amp NEXACT NEXLINE NanoCube NanoAutomation The following designations are protected company names or registered trademarks of third parties Microsoft Windows LabView The products described in this manual are in part protected by the following patents US Patent No 6 950 050 Copyright 1999 2012 by Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual enjoy copyright protection With regard thereto Physik Instrumente PI GmbH amp Co KG reserves all rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source First printing 28 11 2012 Document Number PZ217E BRo Release 1 2 2 E 545 User PZ217E doc Subject to change without notice This manual is superseded by any new release The newest release is available for download at www pi ws http www pi ws About This Document Users of This Manual This manual is designed to help the reader to install and operate the E 545 Plnano Piezo Controller It assumes that the reader has a fundamental understanding of basic servo systems as well as m
70. n absolute position of 0 um and axis C to 30 5 um POS A 0030 4806 Query the current positions of all axes B 0000 8773 C 0030 5080 VR A 2 B 3 C 5 Move axes A B and C relative by the given position values POS A 0028 4797 Query the current positions of all axes B 0003 8769 C 0035 5079 www pi ws E 545 PZ217E Release 1 2 2 Page 40 Remote Control ONLINE Mode Piezo Nano Positioning PI 3 3 Communication 3 3 1 Interfaces Available The E 517 digital operation module in the E 545 can be controlled from a host computer not included with ASCII commands sent via m TCP IP m RS 232 serial connection m USB connection FTDI USB 1 1 compatible with USB 2 0 All interfaces can be active simultaneously The commands from the interfaces are queued in the order the completed command lines are received NOTES During remote control via computer interface the E 545 is always identified as E 517 With the E 517 version included in the E 545 the GPIB IEEE 488 interface is omitted Ignore all E 517 settings and all information in the E 517 User Manual regarding the GPIB interface TCP IP communication If no DHCP server is available on the network or if a point to point connection between host PC and controller is being used after power on or reboot it might take a period of about 30 seconds before communication is possible It is not possible to connect multiple TCP IP command streams to
71. nal Gompofnegnis pee bee ro ERR Drehen Mie sake 11 16 Motion System Requirements eesseeeeeeeeeseeeeen 11 17 Software Description eeeeseseeesseeeeenenennenneennnnnnn 12 Operation 14 21 Front and Rear Panel Element ccccccccccccccccecccceeeeeeeeeeeeeeees 14 21 1 Front Panel Elements ssssssssseseseseeeeenenenennns 14 212 Rear Panel Elements sese 15 22 AC Power COnne ction ccccccccccccccceceeeeeeeeeeeeececeeeeeeeeeeeeeeeeeeeaeeees 18 23 Modss or OperaliOh cer te Let ttt oie dot e e IR eee ETE 19 234 Control Modes iei io ihe oe be dn o Rena ce PAY abate Geaaebicdens 19 232 Servo Mode ON OFF sse nennen 20 24 How to Interconnect the System ssssseeeeee 21 25 Power On Reboot Sequence essen 23 26 How to Command Axis Motion eeseeeeeeeeeeeeeeeeeeeeeeeeeeee 24 261 Applicable Control Sources arnrnnannvnnrrrrnnnrrvnnnrnnnnnnnrnrrenrnrrrnnnenrnnennn 24 262 How to Command Motion in OFFLINE Mode seeeeee 26 263 Dynamic Operation ssssseseeseeeeeeennn nennen 27 2f Calibration Procedures uscire Dp EUR d gated btomaiemnde Prada pce 28 27 1 Zero Point Adjustment sssseeeeenee 28 272 Servo Controller Dynamic Calibration esses 29 Remote Control ONLINE Mode 30
72. nnel assignment is fixed as follows m X axis belongs to piezo channel 1 and sensor channel 1 m Y axis belongs to piezo channel 2 and sensor channel 2 m Z axis belongs to piezo channel 3 and sensor channel 3 Note that during remote control via computer interface the default axis identifiers to be used with commands are A for the X axis B for Y and C for Z You can change those default settings using the SAl command See the User Manual of the E 517 digital operation module for more information The applicable control sources for the axis motion depend on the current control mode of a piezo channel OFFLINE or ONLINE mode see Control Modes p 19 for how to select the mode OFFLINE Mode In OFFLINE mode the axis motion is commanded by the voltage applied to the CONTROL INPUT socket of the corresponding channel Unless your stage has a custom calibration the signal should always be in the range of 0 to 10 V excursions to 2 or 12 V may cause overflow especially with servo on and reduce actuator lifetime The voltage gain is 10 ONLINE Mode Remote Control via Computer Interface In ONLINE mode the E 517 digital operation module in the E 545 controls the axis motion which can be commanded by multiple sources see Control Value Generation in the E 517 User Manual PZ214E for details m Move commands received via interface or from a running macro SVA and SVR in open loop operation MOV MVR and GOH in closed loop
73. no connection can be established www pi ws E 545 PZ217E Release 1 2 2 Page 45 Remote Control ONLINE Mode Piezo Nano Positioning PI www pi ws m The E 517 is directly connected to an Ethernet connection of the PC m E 517 and host PC both are connected to the same network where no DHCP server is available in this case the settings must also be compatible with those of any other devices in the network You can configure either the PC or the E 517 settings to be compatible If you have a network with multiple E 517s the settings of the individual devices must be changed to have unique IP addresses for all devices in the network See below for how to proceed NOTES For successful connection the E 517 startup behaviour for IP address configuration must be set to Use IP address defined with IPADR IPSTART 0 You can check the IPSTART settings with the IFS command power on default setting and the IFC command current setting If the IPSTART setting is Use DHCP to obtain IP address IPSTART 1 default send IFS 100 IPSTART 0 The change becomes active with the next power on or reboot After power on of the E 545 or reboot of the E 517 digital operation module you have to wait for a period of about 30 seconds before communication is possible If you want to change the IP address and IP mask settings of the PC Configure the connection on the PC according to the IP address and IP mask settings of the E 517 s
74. nstruction below 1 Select the servo mode you want to use The selection is made via the SERVO CONTROL CH 1 toggle switch on the E 545 front panel as follows Open loop operation switch OFF Closed loop operation switch ON Note The servo must be on closed loop operation when you want to work with a computer generated analog signal e g from a DAQ board and the analog LabVIEW driver set from PI see below See Servo Mode ON OFF p 20 for more information 2 Apply an analog control signal to the CONTROL INPUT CH1 BNC socket to command the X axis motion Unless your stage has a custom calibration the signal should always be in the range of 0 to 10 V excursions to 2 or 12 V may cause overflow especially with servo on and reduce actuator lifetime You can generate the analog signal with a DAQ board in a PC running LabVIEW and using PI s LabVIEW Analog Driver Set This driver set can be downloaded from www pi ws See the included www pi ws E 545 PZ217E Release 1 2 2 Page 26 Operation Piezo Nano Positioning PI E500T0011 Technical Note for detailed download instructions and the driver documentation for installation and operation 3 Watch the yellow OVERFLOW CH1 LED on the E 545 front panel If it lights up the output of the amplifier is being clipped at one of its limits and the current displacement of the piezo actuator no longer complies with the control signal In this case try to adjust the sensor reading wind
75. o Nano Positioning 8 4 5 Digital In Out Socket Connector type MDR14 PI 1 GND GND 2 nc not connected 3 output DIO_O3 TTL this digital output line can be configured with the CTO TWS and WGO commands for triggering tasks identifier is 3 4 output DIO_O2 TTL this digital output line can be configured with CTO TWS and WGO for triggering tasks identifier is 2 5 output DIO_O1 TTL this digital output line can be configured with CTO TWS and WGO for triggering tasks identifier is 1 6 nc not connected 7 nc not connected 8 reserved reserved 2 9 reserved reserved 1 10 nc not connected 11 input DIO 13 TTL digital input line 3 for start and synchronization of wave generator 3 see WGO command 12 input DIO I2 TTL digital input line 2 for start and synchronization of wave generator 2 see WGO 13 input DIO 11 TTL digital input line 1 for start and synchronization of wave generator 1 see WGO 14 reserved reserved The signal state of the DIO I1 to DIO 13 input lines can be queried with the DIO command www pi ws E 545 PZ217E Release 1 2 2 Page 91 Technical Data Piezo Nano Positioning PI 8 4 6 RS 232 Socket Connector type Sub D 9 pin m nc RTS Hardware handshake output 8 CTS Hardware handshake input FE www pi ws E 545 PZ217E Release 1 2 2 Page 92
76. o mode can be set by m The SERVO CONTROL ON OFF toggle switches on the E 545 front panel www pi ws E 545 PZ217E Release 1 2 2 Page 20 Piezo Nano Positioning PI Operation m Axis specific SVO commands sent over the communications interface or received from a macro running on the E 517 digital operation module in the E 545 Using the SVO command you can check the current servo mode ona per axis basis NOTE In ONLINE mode the SERVO switches of all channels must be set to OFF on the piezo control electronics This gives the integrated E 517 digital operation module complete control over the servo mode settings Using a start up macro you can set up the device to start with closed loop operation The example below illustrates the interpretation of the control input as piezo voltage target or target position depending on the current servo mode The E 545 is in OFFLINE mode in this example i e the control input is given by the voltage on the CONTROL INPUT BNC socket The control input voltage remains unchanged while switching from open loop to closed loop operation The voltages and positions are read out by the VOL and POS commands over the computer interface Closed loop Open loop operation operation servo ON servo OFF voltage 100 um 2 4 How to Interconnect the System Piezo stage Connect the piezo stage to the E 545 m E 545 3RD Piezo and Sensor socket p 88 m E 545 3CD CH1 CH2 CH3 sock
77. ocation with adequate ventilation to prevent internal heat build up Allow at least 10 cm 4 inches clearance from the top and the rear of the unit and 5 cm 2 inches from each side On the top side and on the rear panel of the E 545 there are ventilation openings Never cover the ventilation openings as this will impede ventilation CAUTION Your system will be fully calibrated before being shipped If you have informed PI about your application calibration is done with the corresponding setup otherwise with a default setup It is usually not necessary for you to do anything more than adjust the zero point s before operating the system Do not interchange piezo control electronics or piezo stages of a calibrated system Respect the assignment of piezo stages to the electronics channels The assignment is shown by the serial numbers on the device labels With multi axis stages also respect the channel axis assignment given by the cable labeling Re calibration should only be done by adequate trained personnel and after consultation with Pl Otherwise preset data will be lost CAUTION Thermally stable systems have the best performance For a thermally stable system power up the E 545 at least one hour before you start working with it CAUTION If the internal temperature goes out of range 75 C or higher the high voltage output of the E 545 will be deactivated In that case the mechanics will no longer move When the intern
78. op operation SERVO CONTROL toggle switch must be OFF 2 Power up the E 545 3 Exercise the corresponding axis over its nominal travel range by applying an analog signal from 0 to 10 V to the CONTROL INPUT BNC socket 4 Set the axis to 0 by applying 0 V to the CONTROL INPUT BNC socket 5 Read the corresponding sensor monitor line with a voltmeter connected to the SENSOR MONITOR socket on the rear panel use the included sensor monitor cable to split up the signals www pi ws E 545 PZ217E Release 1 2 2 Page 28 Operation Piezo Nano Positioning PI 6 Adjust the corresponding Zero potentiometer on the rear panel so that the sensor monitor signal is 0 V After successful zero point adjustment the OVERFLOW LED should no longer glow Permanent glow of this LED in spite of zero point adjustment may indicate hardware failure You can perform the zero point adjustment also in ONLINE mode via computer interface In this case use the SVO command to set the servo mode the SVA command to exercise the axis and the TSP command to read the sensor value You do not need the voltmeter then See the E 517 User Manual for command syntax and descriptions 2 7 2 Servo Controller Dynamic Calibration Your system will be fully calibrated before being shipped But due to load changes in the application some calibration settings may no longer be suitable For the axes affected by decreased performance it can be necessary to readjust the notch filter
79. or Z You can change those default settings using the SAI command See the User Manual of the E 517 digital operation module for more information Each line on the tab cards belongs to one axis or one channel of the system respectively www pi ws E 545 PZ217E Release 1 2 2 Page 36 Remote Control ONLINE Mode Piezo Nano Positioning PI 7 Make some test moves with the individual axes using the controls on the Axes tab card The first moves should be made in open loop operation Servo boxes must be unchecked With the E 517 digital operation module open loop commanding means to give the desired output voltage values for the axes Command an output voltage of 0 V by entering 0 in the Openloop Value field of an axis and pressing Enter on your keyboard Then enter a new value of about 10 of the axis voltage range and press Enter Increment the Openloop Value this way by steps of a suitable size up to the upper voltage limit of the axis see datasheet or measurement protocol of the mechanics and then reduce it in an analogous manner to the lower voltage range limit of the axis In doing so observe the position display for the axis in the Position field and the current output voltage for the corresponding piezo actuator in the stage in the Voltage field of the Piezo channels tab card The output voltage values should follow the commanded values At 0 V output voltage the current position value of the axis should be approximately 0 um
80. otion control concepts and applicable safety procedures Furthermore the manual describes the physical specifications and dimensions of the E 545 PInano amp Piezo Controller Conventions The notes and symbols used in this manual have the following meanings Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death Indicates the presence of hazardous voltage 50 V Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death CAUTION Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in damage to equipment NOTE Provides additional information or application hints Related Documents The electronics the mechanics and the software tools which might be mentioned in this document are described in their own manuals All documents are available as PDF files Updated releases are available for download at www pi ws http www pi ws or via email contact your Physik Instrumente Sales Engineer or write info pi ws mailto info pi ws Contents Introduction 3 11 How to Use the Documentation rrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrnnnnnnn 3 L2 Prescribed USB uto essor plages p Spo eo PL eB booa E eod AR 5 1 3 Safety Precaultions eoo e Re eee een apr FR end Rats 6 14 Patent be 10 15 Additio
81. ow for sensor channel 1 as described in Zero Point Adjustment p 28 a small deviation of the electrical zero point may be caused by thermal drift or changes in mechanical loading CAUTION The travel range has been set at the factory Moving the zero point may cause the stage to touch a physical limit at zero or full travel position Adjustments to the zero point should not exceed 5 of the stage travel in the case of the Plnano that would be 10 um 2 6 3 Dynamic Operation The following points should be taken into consideration in dynamic operation of the stage W The linearity of the stage may be decreased and compensating for piezo hysteresis and creep effects as well as maintaining correct phase response is more difficult W The stage and the E 545 may heat up Stage The maximum operating temperature may limit the piezo actuator dynamics E 545 If the internal temperature goes out of range 75 C or higher the high voltage output of the E 545 will be deactivated In that case the mechanics will no longer move When the internal temperature falls below 60 C the high voltage output is reactivated automatically See Troubleshooting p 75 for more information m The motion amplitude may be reduced depending on the operating limits of the amplifier See Operating Limits p 86 for more information See the Piezoelectrics in Positioning Chapter in the PI catalog for detailed information www pi ws E 545 PZ217E
82. r and are executed only after the LF is received Unsatisfactory system performance The sensor values are not reliable and the whole system is instable Only thermally stable systems can have the best performance For a thermally stable system power on the E 545 at least one hour before you start working with it The stage starts to oscillate or shows nonsatisfying settling behaviour Your system will be fully calibrated before being shipped But due to load changes in the application some calibration settings may no longer be suitable See Servo Controller Dynamic Calibration p 29 for details www pi ws E 545 PZ217E Release 1 2 2 Page 77 Troubleshooting Piezo Nano Positioning PI www pi ws Overflow LED glows The output of the amplifier is being clipped at one of its limits Try to adjust the sensor reading window for the corresponding sensor channel as described in Zero Point Adjustment p 28 a small deviation of the electrical zero point may be caused by thermal drift or changes in mechanical loading CAUTION The travel range has been set at the factory Moving the zero point may cause the stage to touch a physical limit at zero or full travel position Adjustments to the zero point should not exceed 5 of the stage travel in the case of the Plnano that would be 10 um After successful zero point adjustment the OVERFLOW LED should no longer glow in closed loop operation P
83. rol Value Generation in the E 517 User Manual for details move commands received via interface or from a running macro SVA SVR MOV MVR GOH IMP STE and wave generator output Respect the prioritization of the individual sources Move commands are not accepted when the wave generator is running for the axis Macros can run in OFFLINE and ONLINE mode but move commands from macros are only accepted in ONLINE mode and only when the wave generator is not running When the corresponding piezo channel is in OFFLINE mode the wave generator output can not be started If the wave generator output was started in ONLINE mode it remains active when switching to OFFLINE mode but it is not used as control value This means that it will not cause axis motion until switching back to ONLINE mode Wrong command or wrong syntax Check the error code with the ERR command Error Codes in the E 517 User Manual gives the complete error reference Wrong axis commanded Check if the correct axis identifier is used and if the commanded axis is that of the desired stage axis identifier also required with single axis systems E 545 PZ217E Release 1 2 2 Page 74 Troubleshooting Piezo Nano Positioning PI Incorrect configuration Check the parameter settings on the E 517 digital operation module with the SPA and SEP commands Incorrect GCS syntax version Check the current GCS syntax version of the E 517 digital operation mod
84. s per table There is a fixed one to one assignment of axes to wave generators and wave tables m X axis belongs to wave generator 1 and wave table 1 m Y axis belongs to wave generator 2 and wave table 2 m Z axis belongs to wave generator 3 and wave table 3 To ask for the number of wave generators use the TWG command The maximum number of wave tables is given by the Number of Waves Tables parameter ID 0x1300010A The maximum number of points per table can be queried with the WMS command or via the Max Wave Points of table i parameter ID 0x13000201 Use the SPA command to ask for the parameter values 3 6 2 Basic Operation 1 Define the waveform segment by segment using the WAV command The waveform will be written to the selected wave table 2 Start the wave generator output and hence the motion of the axis using the WGO command You can choose several start options e g start stop by external trigger see the description of the WGO command for more information When starting the wave generator data recording is started automatically 3 Stop the wave generator output with WGO or 24 or STP The simple example below shows how to start periodic motion of the first axis A by default using the command entry facilities of PIMikroMove or PITerminal www pi ws E 545 PZ217E Release 1 2 2 Page 57 Remote Control ONLINE Mode Piezo Nano Positioning PI Command String to Send Action Performed WAV 1 X SIN P 2000 20
85. se that software offers a convenient user interface for operating the system See the PIMikroMove Manual for the complete more detailed software description and Installing the Software on the Host PC p 30 for how to install the program In the example below an X Y Z stage is used www pi ws E 545 PZ217E Release 1 2 2 Page 32 PI Remote Control ONLINE Mode Piezo Nano Positioning CAUTION Thermally stable systems have the best performance For a thermally stable system power up the E 545 at least one hour before you start working with it CAUTION If the piezo stage starts oscillating humming noise In closed loop operation switch off the servo immediately The load and or the dynamics of operation probably differ too much from the setup for which the system was calibrated In open loop operation stop the motion immediately Do not operate the piezo stage at its resonant frequency because the notch filter s may be deactivated in open loop operation You can measure the resonant frequency using PIMikroMove see Data Recorder p 52 for more information Otherwise the piezo stage could be irreparable damaged Re calibration should only be done by adequate trained personnel and after consultation with Pl Otherwise preset data will be lost 1 Interconnect your system as described in a dedicated section p 21 Find further details in Communication p 41 and Using Trigger Input and Output 2 Power on
86. t from PI you can send it to the following address postage free Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany www pi ws E 545 PZ217E Release 1 2 2 Page 80 PI Technical Data Piezo Nano Positioning 8 Technical Data lt 5ms Current limitation Voltage gain Input impedance Sensor Servo characteristics Sensor type Sensor channels Sensor bandwidth Sensor monitor output Digital operation module Module type Processor Sampling rate sensor Resolution Command set User software E 545 PZ217E Release 1 2 2 8 1 Specifications E 545 3RD E 545 3CD Function Multi Channel Piezo Controller with High Speed Digital Interface Amplifier Output voltage 20 to 120 V Amplifier channels 3 Average current per channel 60 mA gt 5ms Peak current per channel 140 mA short circuit proof 10 0 1 100 kn 1nF Analog proportional integral P l algorithm with notch filter Piezoresistive sensors capacitive sensors 3 gt 1kHz 0 to 10 V 2 to 12 V max E 517 3 channels without display and trackball DSP 60 MHz 25 kHz 8 times oversampling DAC 24 bit 12 V ADC 18 bit sampling PI General Command Set GCS PIMikroMove Page 81 Technical Data Software drivers Supported functionality Interfaces and Operation PZT output socket Sensor socket Control input sockets Sensor monitor socket Control input voltage Interfaces for commun
87. t is 255 255 255 0 also accessible as IP Mask parameter ID Ox11000700 m MACADR is the unique address of the network hardware in the E 545 read only example 0 d0 c9 a7 1f 86 also accessible as MAC Address parameter ID Ox11000B00 NOTES With the E 517 version included in the E 545 the GPIB IEEE 488 interface is omitted Ignore all E 517 settings and all information in the E 517 User Manual regarding the GPIB interface A TCP IP connection will fail if no DCHP server is present but the startup behavior for IP address configuration is set to use DHCP to obtain IP address if this fails use IPADR IPSTART 1 The E 517 digital operation module will use the address given by IPADR only if IPSTART 0 If the IP address for the current TCP IP connection was obtained from a DHCP server this address is not reflected in the response to the IFC command 3 3 3 TCP IP Connection www pi ws The TCP IP connection of the E 517 digital operation module is available on the E 545 rear panel via the RJ 45 socket with the network icon The access differs depending on the network availability which can be as follows m Network with DHCP server m PC equipped with an Ethernet connection or network without DHCP server For the default IP address IP mask and startup behaviour settings of the TCP IP interface see Default and Current Settings CAUTION With TCP IP and USB connections communication can not be maintained after the E
88. tables can be changed with DRC and the current configuration can be read with DRC Upon delivery the data E 545 PZ217E Release 1 2 2 Page 52 Remote Control ONLINE Mode Piezo Nano Positioning PI recorder is preset to record the current positions of the axes The data recorder sampling period can be read with the RTR command The answer gives the value of the Data Recorder Table Rate parameter ID 0x16000000 whose default value is one servo cycle You can cover longer periods by increasing this value Use the RTR command or change the parameter value directly The current data recorder configuration made with DRC and RTR is saved with the WPA command in addition to the current parameter values of the E 517 and other settings see the WPA description for details When the controller is powered down the contents of the data recorder tables and all settings which were not saved with WPA are lost 3 4 2 Application Example Frequency Response www pi ws Measurements Mechanical resonances of the system may exaggerate the response to certain frequencies in the control signal To determine the resonant frequencies of the mechanics use the data recorder of the E 517 digital operation module to observe the system response to an impulse in open loop operation Proceed as follows for the axis whose resonant frequency is to be measured In this example the resonant frequency of the X axis default identifier A is to be measur
89. tches E 545 3CD CONTROL IN CH1 Figure 17 E 545 3CD block diagram ONLINE OFFLINE switch shown for channel 3 only www pi ws E 545 PZ217E Release 1 2 2 Page 84 PI Piezo Nano Positioning Technical Data 1Q u revbig 3ndino 40381 BUS BALM OEY JO adepa y t xen SIKy 0 105UES ainpo uonejedo jey6ig LT5 3 SpS 3 4 ui 3ueseud eue sejnpouiqns jeuueu ejBuis z08 3 au pue uo AYE SHS 3 YM T08 3 IYI eju saap jeuueup aaJu ale Jeyiidue ayy pue ejnpou uoneJedo ej6Ip LTS AY 1e BION MON ebejs eui jo sxe ejburs euo eAup 0 paujnbau Indntrouno unns jeuueup aus swous weep xpoq SIYL SUOSUBS BANSISBIOZAld 10 JejJouju0 Ozeld HE SpS 3 184205 H ZH THD JO HOSN3S 8OZ3ld uo A OZT 01 OZ 9be1JoA Ozetd uongee doo1 pasoj5 401 uo VWMS uado uonpejas IOYLNOD OASIS 3NI143O SPON oues Dvd 101402 3NTINO tapo 186381 UO I Ad HOLINON NOSN3S 01897 Figure 18 Detailed block diagram for both E 545 models for one single channel axis Page 85 E 545 PZ217E Release 1 2 2 www pi ws Technical Data Piezo Nano Positioning PI 8 3 Operating Limits In order to achieve minimum distortion of the output waveform it is important to ensure that the amplitude of higher frequency control input is reduced in proportion to the fall off of the output voltage at these frequencies For exact information on maximum operating frequency with a given piezo load capacitan
90. the E 517 digital operation module via TCP IP only one TCP IP connection is possible at any one time When using the USB interface for the first time two FTDI USB drivers must be installed on the host PC These drivers are provided on the E 517 CD in the USB_Serial_Driver directory With TCP IP and USB connections communication cannot be maintained after the E 545 is power cycled or the E 517 digital operation module is rebooted The connection must then be closed and reopened Using multiple interfaces simultaneously may cause problems with the host software With PIMikroMove it is possible to connect to multiple controllers in one program instance With PITerminal you need a new program instance for each E 545 you want to connect to www pi ws E 545 PZ217E Release 1 2 2 Page 41 Remote Control ONLINE Mode Piezo Nano Positioning PI 3 3 2 Default and Current Settings www pi ws The default communication parameters are stored in the E 517 digital operation module You can read the default settings using the IFS command and change them with IFS Changes become active with the next power on or reboot when the default values are loaded into the E 517s volatile memory RAM The current active interface settings can be temporarily changed with IFC The new settings become active immediately and the host PC interface configuration may need to be changed to maintain communication When the E 545 is powered down the settin
91. the system Find details in a dedicated section p 23 3 Start PIMikroMove on the host PC It opens with the Start up controller window www pi ws E 545 PZ217E Release 1 2 2 Page 33 PI Remote Control ONLINE Mode Piezo Nano Positioning Start up controller n E 321 xj E 517 Controller 1 Connect controller RS 232 IEEE 488 rroruse TCP IP Hostname TCP IP Address 172 17 128 86 Port 50000 2 Select connected stages 3 Start up axes 4 Establish a connection to the E 517 from PIMikroMove This can be done via the TCP IP FTDI USB or RS 232 interface using the corresponding tab card in the Start up controller window tab card selection depends on the current hardware connection See Communication p 41 for details Notes When using the USB interface for the first time two FTDI USB drivers must be installed on the host PC These drivers are provided on the E 517 CD in the USB Serial Driver directory TCP IP communication If no DHCP server is available on the network or if a point to point connection between host PC and controller is being used after power on or reboot it might take a period of about 30 seconds before communication is possible Use the Search for controllers button select your controller in the resulting list and press Connect If the controller is already connected to your or another host PC via TCP IP a second TCP IP session cannot be establishe
92. tion Definition Get Digital Input Lines Set Data Recorder Configuration E 545 PZ217E Release 1 2 2 Page 62 Remote Control ONLINE Mode Piezo Nano Positioning PI www pi ws DRC DRR ERR GOH GWD HDR HLP HLT HPA IFC IFC IFS IFS IMP IMP MAC MAC MOV MOV MVR NLM NLM ONL ONL ONT Get Data Recorder Configuration Get Recorded Data Values Get Error Number Go To Home Position Get Wave Table Data Get All Data Recorder Options Get List of Available Commands Halt Motion Smoothly Get List of Available Parameters Set Interface Parameters Temporary Get Current Interface Parameters Set Interface Parameters As Default Values Get Interface Parameters As Default Values Start Impulse And Response Measurement Get IMP Settings Call Macro Function List Macros Set Target Position Get Target Position Set Target Relative To Current Position Set Low Position Soft Limit Get Low Position Soft Limit Set Control Mode Get Control Mode Get On Target State E 545 PZ217E Release 1 2 2 Page 63 Remote Control ONLINE Mode Piezo Nano Positioning PI www pi ws OVF PLM PLM POS RBT RPA RTR RTR SAI SAI SEP SEP SPA SPA SSN STE STE STP SVA SVA SVO SVO SVR TAD TIO Get Overflow State Set High Position Soft Limit Get High Position Soft Limit Get Real Position Reboot System Reset Volatile Memory Parameters Set Record Table Rate Get Record Table R
93. trol voltage from different data sources e g axes or output channels The gathered data is stored temporarily in data recorder tables each table contains the signal from one data source You can configure the data recorder flexibly e g select the type of data and the data source The E 517 provides 3 data recorder tables can be read with TNR with 8192 points per table Start Recording Data recording is triggered automatically with four commands STE step response measurement m IMP impulse response measurement m WGO wave generator start and m WGR restarts recording when the wave generator is running Recording always takes place for all data recorder tables and ends when the data recorder tables are completely filled Read Data The last recorded data can be read with the DRR command The data is reported in GCS array format For details regarding GCS array see the separate manual SM146E which is provided on the E 517 CD Reading out recorded data can take some time depending on the number of points to be read It is possible to read the data while recording is still in progress Configure Recording For general information regarding the data recording you can send HDR which lists available record options and gives information about additional parameters and commands concerned with data recording The data recorder configuration i e the assignment of data sources and record options to the recorder
94. ule using the CSV command The current GCS syntax version must be 2 0 E 517 GCS syntax version It determines the applicable GCS commands and software tools With the wrong syntax version i e 1 0 which stands for the E 516 GCS syntax the software on the E 517 CD can not be used See Select Command Set Version in the E 517 User Manual for details The high voltage output of the E 545 is deactivated f the internal temperature goes out of range 75 C or higher the high voltage output of the E 545 will be deactivated In that case the mechanics will no longer move When the internal temperature falls below 60 C the high voltage output is reactivated automatically Note that the wave generator output will continue even if the high voltage output is deactivated i e if a certain number of output cycles was set they may have already finished when the high voltage output is reactivated How to avoid overheating Keep the ambient temperature at a noncritical value Note that the difference between ambient temperature and internal temperature of the E 545 normally is about 20 Centigrade 36 Fahrenheit degrees Place the system in a location with adequate ventilation Allow at least 10 cm 4 inches clearance from the top and the rear of the unit and 5 cm 2 inches from each side If this is not possible keep the ambient temperature low Never cover the ventilation openings of the E 545 as this will impede ventilation When usin
95. ve TM 2 2 5 42 ERU 15 xi Connections E 517 172 17 128 86 Jools Wew Help gt B E bJ EI Rl El ese I 2 S L axes a Host macros Controler macros Stage I lt lt Target Openloop Value gt gt Stepsize Position HALT State Velocity Servo Use soft limits m aa p UNKNOWN STAGE j lt 0 000000 11 000000 gt gt 1 000000 0 529200 RRM on target 000000 7 F1 bib p UNKNOWN STAGE x 2020000 0 000000 5j 1 000000 11 521600 1 000000 7 e ec p UNKNONNSTAGE lt 0 000000 0 000000 gt 1 000000 1 499500 10 000000 7 El Sensor channels gt El Piezo channels gt Voltage Online 1 1721076 11 522500 2 9 951200 1791289 1 501200 3 10 571700 v During closed loop operation watch the yellow OVERFLOW LEDs on the E 545 front panel If an LED lights up the output of the corresponding amplifier is being clipped at one of its limits and the current displacement of the piezo actuator no longer complies with the control signal In this case try to adjust the sensor reading window for the corresponding sensor channel as described in Zero Point Adjustment p 28 a small deviation of the electrical zero point may be caused by thermal drift or changes in mechanical loading CAUTION The travel range has been set at the factory Moving the zero point may cause the stage to touch a physical limit at zero or full travel position Adjustments to the zero point should not exceed 5 of the
96. ve high can be used in conjunction with the WGO command to start and synchronize the wave generator output See Wave Generator Started by Trigger Input in the E 517 User Manual for an example 3 6 Flow to Work with the Wave Generator www pi ws Each axis can be controlled by a wave generator which outputs user specified patterns so called waveforms This feature is especially important in dynamic applications which require periodic synchronous motion of the axes The waveforms to be output are stored in wave tables in the volatile memory of the E 517 digital operation module one waveform per wave table Waveforms can be created based on predefined curve shapes This can be sine ramp polynomial tangent and single scan line curves Additionally you can freely define curve shapes E 545 PZ217E Release 1 2 2 Page 56 Remote Control ONLINE Mode Piezo Nano Positioning PI Programmable trigger inputs and outputs facilitate synchronization of external events During the wave generator output data is recorded in record tables on the E 517 digital operation module See Data Recording p 52 for more information The following subsections describe the basics of the wave generator handling For detailed information and examples refer to the E 517 User Manual PZ214E which is on the E 517 CD 3 6 1 Basic Data The E 517 digital operation module provides three wave generators and three wave tables with 8192 point
97. wn devices like the E 517 digital operation module to log on Note that if the controller is already connected to your or another host PC via TCP IP a second TCP IP session cannot be established Presently only one port 50000 is available on the E 517 so that only one application at a time can use the TCP IP connection The first time you connect over the USB interface be sure you are logged on the PC as auser having administrator rights After the E 545 is powered on a message will appear on the PC screen saying that new hardware has been detected Follow the on screen instructions and insert the E 517 CD The required FTDI hardware drivers are found in the USB Serial Driver directory E 545 PZ217E Release 1 2 2 Page 76 Troubleshooting Piezo Nano Positioning PI Controller was power cycled or rebooted With TCP IP and USB connections communication can not be maintained after the E 545 is power cycled or the E 517 digital operation module is rebooted The connection must then be closed and reopened Another program is using the interface Close the other program Specific software has problems See if the system works with some other software e g a terminal or development environment You can for example test the communication by simply starting a terminal program e g PI Terminal and entering commands like IDN or HLP Note that multi character commands are transferred as terminated by a LF line feed characte
98. www pi ws E 545 PZ217E Release 1 2 2 Page 35 Remote Control ONLINE Mode Piezo Nano Positioning PI 6 Optionally Configure the PIMikroMove main window It is recommended to see the tab cards for axes sensor and piezo channels see figure below You can arrange them by dragging them with the left mouse button pressed so that they become docked e g to the bottom border of the window On the Axes tab card you can start axis motion see step 7 below The channel tab cards show the current sensor and output voltage values Axes Connections E 51 172 17 128 86 Jools View I lt lt Target Openloop Value gt gt Step size Position HALT State Velocity Servo Use soft limits m am P UMNOWN STAGE j lt 0 000000 0 000000 sj 1 000000 9 173600 100000 F1 bib UNKNOWN STAGE de x 0 000000 0 000000 j 1 000000 11 544400 EE 1 000000 cc p UNKNOWN STAGE 0 000000 0000000 j 1 000000 1 505100 10 000000 7 T sensor channels _ Piezo channels 1790414 1 506200 Sensor channels Piezo channels Note With the E 545 the axis to channel assignment is fixed as follows X axis belongs to piezo channel 1 and sensor channel 1 Y axis belongs to piezo channel 2 and sensor channel 2 Z axis belongs to piezo channel 3 and sensor channel 3 Note that during remote control via computer interface the default axis identifiers to be used with commands are A for the X axis B for Y and C f

PZ217E User Manual E-545 PInano® Piezo Controller Release: 1.2

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PZ217E User Manual E-545 PInano&reg; Piezo Controller Release: 1.2

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PZ217E User Manual E-545 PInano® Piezo Controller Release: 1.2