Operating Instructions
Contents
1. ce co o N e e 325 Dimensions HiCube 80 Eco HiCube 80 Eco HiCube 80 Eco Flange in DN 63 ISO K DN 63 CF F DN 40 ISO KF A 347 mm 349 5 mm 352 5 mm B 159 mm 165 mm 168 mm PFEIFFER VACUUM 29 Signatures Berliner Stra e 43 4 35614 Asslar Germany l N Q9 M Bender Managing Director Declaration of conformity according to the EC directive e Machinery 2006 42 EC Annex Il no 1 A We hereby declare that the product cited below satisfies all relevant provisions of EC directive Machinery 2006 42 EC In addition the product cited below satisfies all relevant provisions of EC directive Elec tromagnetic Compatibility 2004 108 EC The agent responsible for compiling the technical documentation is Mr J rg Stanzel Pfeiffer Vacuum GmbH Berliner Stra e 43 35614 Afilar HiCube HiCube 80 Eco Guidelines harmonised standards and national standards and specifications which have been applied DIN EN ISO 12100 1 2004 DIN EN 61000 3 2 2008 DIN EN ISO 12100 2 2004 DIN EN 61000 3 3 2006 DIN EN ISO 14121 1 2007 DIN EN 61010 1 2002 DIN EN 1012 2 1996 DIN EN 61326 1 2006 DIN EN 61010 1 2002 DIN EN 62061 2005 Semi F47 0200 Pfeiffer Vacuum GmbH Dr M Wiemer CE 2010 Managing Director gt PFEIFFER VACUUM2. Tightening torque for the fixing screws when mounted 10 Nm gt Take off the turbopump with the mounting plate from the casing The opening in the mounting plate makes it easy for customers to perform maintenance work on the turbopumpturbopump e g change the lubricant reservoir PFEIFFERE VACUUM 23 Maintenance replacement Removing the back ing pump 24 PFEIFFER E VACUUM 21 2 e Fig 9 Disassembly of the diaphragm pump from the pumping stand frame 1 1 Casing 11 2 Exhaust silencer 35 Cylinder screw 11 Baking pump 21 Casing screw 36 Clamping screw 11 1 Vacuum connection backing pump 28 Washer 2 Detach the fore vacuum line from the vacuum connection of the diaphragm pump and take it off Do not kink or damage the fore vacuum hose gt Unscrew and remove the casing screws and washers on the front and rear of the pumping stand frame gt Take off the casing with turbopump display and control unit and relay box from the pumping stand frame Observe the connection cables 2 Unscrew the exhaust silencer by hand from the backing pump gt Unscrew the two cylinder screws 35 allen head from the bottom plate of the pumping station so that the backing pump is loosened 2 Lift out the backing pump above the top of the pumping station frame Decommissioning 8 Decommissioning 8 1 Shutting down for longer periods 8 2 Re starting 8 3 Disposal Contamination of parts and o
3. wW gt A PASSION FOR PERFECTION You are looking for a perfect vacuum solution Please contact us Germany Pfeiffer Vacuum GmbH Headquarters Tel 49 0 6441 802 0 info pfeiffer vacuum de Benelux Pfeiffer Vacuum GmbH Sales amp Service Benelux Tel 800 pfeiffer benelux pfeiffer vacuum de China Pfeiffer Vacuum Shanghai Co Ltd Tel 86 21 3393 3940 info pfeiffer vacuum cn France Pfeiffer Vacuum France SAS Tel 33 169 30 92 82 info pfeiffer vacuum fr Great Britain Pfeiffer Vacuum Ltd Tel 44 1908 500600 sales pfeiffer vacuum co uk India Pfeiffer Vacuum India Ltd Tel 91 40 2775 0014 pfeiffer vsnl net Italy Pfeiffer Vacuum Italia S p A Tel 39 02 93 99 05 1 contact pfeiffer vacuum it Korea Pfeiffer Vacuum Korea Ltd Tel 82 31 266 0741 sales pfeiffer vacuum co kr wr Austria Pfeiffer Vacuum Austria GmbH Tel 43 1 894 17 04 office pfeiffer vacuum at Sweden Pfeiffer Vacuum Scandinavia AB Tel 46 8 590 748 10 sales pfeiffer vacuum se Switzerland Pfeiffer Vacuum Schweiz AG Tel 41 44 444 22 55 info pfeiffer vacuum ch United States Pfeiffer Vacuum Inc Tel 1 603 578 6500 contact pfeiffer vacuum com www pfeiffer vacuum com VACUUM
4. 2 Transportation lock The backing pump of the pumping station HiCube 80 Eco is secured against damage during transport see p 15 chap 5 6 2 Follow instructions concerning the installation location gt Before putting into operation loosen the backing pump s transportation lock device at the installation location 3 3 Storage gt Close the flange openings by using the original protective covers gt Close further connection ports by using the corresponding protective covers gt Only store the pumping station indoors at an ambient temperature between 5 C and 40 C 2 In rooms with moist or aggressive atmospheres the pumping station must be airproof shrink wrapped in a plastic bag together with a bag of dessicant 8 PFEIFFER E VACUUM Product description 4 Product description 4 1 Product identification Product features Feature HiCube 80 Eco Operating instructions High vacuum flange DN 63 ISO K DN 63 CF DN 40 ISO KF Flange material Aluminium Stainless steel Aluminium Turbopump HiPace 80 HiPace 80 HiPace 80 PT 0208 BN Electronic drive unit TC 110 TC 110 TC 110 PT 0204 BN Backig pump MVP 015 2 MVP 015 2 MVP 015 2 PU 0012 BN Power supply pack TPS 110 TPS 110 TPS 110 PT 0199 BN Display and control unit DCU 002 DCU 002 DCU 002 PT 0250 BN option Accessories Air cooling unit Air cooling unit Air cooling unit PT 0231 BN Order number without display and PM S03 550 PM S03 551 PM S03 552
5. case the declaration of conformity will become invalid gt Switch off the pumping station at the master switch 2 Disconnect the mains plug 2 Pull out the mains cable from the relay box gt Pull out the mains supply cable x2 for components from the relay box gt Take off the connector from the electronic drive unit TC 110 2 Detach the accessory control lines from the connector and remove them Dismantling of the turbopump Maintenance replacement Note the factory settings The accessory connections on the turbopump have been preconfigured at the factory Interchanging the control leads on the connector cause the pumping station to malfunc tion or fail 2 Do not interchange the control leads gt Accessory connections can be configured for operation with the DCU For more information refer to the operating instructions for the electronic drive unit of the turbopump Connection to X3 Preset accessory acc A1 Air cooling unit acc B1 Venting valve acc DO1 Backing pump Overview of factory preconfigured accessory connections on the HiCube 80 Eco Housing Mounting plate Turbopump Fore vacuum connection elbow union Spring washer Allen head screw Fig 8 Disassembly of the turbopump 2 Detach the fore vacuum line from the turbopump and take it off Do not kink or damage the fore vacuum hose gt Unscrew and remove all Allen head screws 95 7x from the mounting plate
6. casing seal gt Detach the connection cable from the DCU and remove from the pumping station frame 18 PFEIFFER E VACUUM Operation PM 061 270 X gt Attach the connetion cable 19 delivery as an extension with coupling PM 061 270 X accessory to the connection RS485 of the display and control unit gt Option Swap the connecting cable 19 between the display and control unit and the electronic drive unit for a longer connection cable Other lengths on request 6 4 Operation with gas ballast valve Steam or moisture from pumped media can condense in the backing pump and hence impair the suction performance Letting in gas ballast improves the discharge of condensate and the pump achieves the specified final vacuum more quickly The gas ballast valve can be replaced with a flush ing gas connection if necessary Fig 7 Gas ballast valve of the backing pump 11 Backing pump MVP 015 2 11 40 Gas ballast valve 11 43 Sleeve gt Open gas ballast valve for this push down the sleeve of the gas ballast valve PFEIFFERE vacUUM 19 Operation 6 5 Monitoring of the operation conditions Operating mode dis LEDs in the front panel of the electronic drive unit show basic operating conditions of the play via LED turbopump A differentiated malfunction and warning display is possible only for opera tion with DCU or HPU LED Symbol Steady OFF Flashing Blinking Steady ON 1 12 s acti
7. drive unit gt Contact Pfeiffer Vacuum Service Pump not achieving the required final pressure e Condensate in the backing pump gt Open the gas ballast valve at the backing pump e Gas ballast valve open gt Close the gas ballast valve at the backing pump 26 PFEIFFER E VACUUM 10 Service Service Pfeiffer Vacuum offers first class service e Operating fluid and bearing change on the spot by Pfeiffer Vacuum FieldService e Maintenance repair in the nearby ServiceCenter or ServicePoint e Fast replacement with exchange products in mint condition e Advice on the most cost efficient and quickest solution Detailed information addresses and forms at www pfeiffer vacuum com Service Maintenance and repair in the Pfeiffer Vacuum ServiceCenter The following steps are necessary to ensure a fast smooth servicing process 2 Download the forms Service Request and Declaration on Contamination gt Fill out the Service Request form and send it by fax or e mail to your gt Pfeiffer Vacuum service address 2 Include the confirmation on the service request from Pfeiffer Vacuum with your ship ment 2 Fill out the declaration on contamination and include it in the shipment required gt Dismantle all accessories 2 Drain the operating fluid applies for turbopumps with pumping speed gt 700 I s gt Leave electronic drive on the pump gt Close the flange openings by using the origina
8. loads slipping and falling down 2 Carry small and mid size vacuum pumps two handed gt Carry vacuum pumps gt 20 kg by a suitable lifting device gt Wear safety shoes with steel toe cap according to directive EN 347 Risk of injury through hot surfaces Vacuum pumps can become hot during operation 2 Allow the pump to cool before maintenance and repairs gt If necessary wear protective gloves according to directive EN 420 Risk of injury through sharp edges Rotor and stator disks of turbopumps have very sharp edges 2 Before any working wait for the complete standstill of the pump 2 Do not reach in the high vacuum flange gt If necessary wear protective gloves according directive EN 420 Safety 2 3 Proper use CE conformity The manufacturer s declaration of conformity becomes invalid if the operator modifies the original product or installs additional components 2 Following installation into a plant and before commissioning the operator must check the entire system for compliance with the valid EU directives and reassess it accord ingly e Only use the pumping station for creating vacuum e Only operate the pumping station as an entire unit e Only use the pumping station for evacuation of dry and inert gases other applications only after consultation with Pfeiffer Vacuum 2 4 Improper use Improper use will cause all claims for liability and warranties to be forfeited Improper use is deemed
9. of the operator 2 Do not independently modify or change the pump and electrical equipment 2 Make sure that the system is integrated in an emergency off safety circuit 2 Consult Pfeiffer Vacuum for special requirements Automatic start After connecting the supply voltage and switching on the main switch pumping stations without display and control unit will run up immediately gt Switch the mains switch to position 0 before plugging in the mains cable 2 Switch on the mains supply immediately before operation Fig 5 Connecting the mains supply 10 Relay box 2 Order the mains cable separately see accessories 2 Plug the mains cable into the the mains connection of the relay box gt Connect the mains cable to the mains gt Always ensure a safe connection to the protective earthing conductor PE protection class l Operation 6 Operation 6 1 Commissioning The following important settings are programmed in the electronic drive unit ex factory Parameter P 027 Gas mode 0 heavy gases Parameter P 700 Set value max run up time monitoring 8 min Parameter P 701 Rotation speed switchpoint 8096 of the nominal roation speed Parameter P 707 Set value rotation speed setting mode 65 96 of the nominal rota tion speed e Parameter P 708 Set value power consumption 60 96 may be only reduced e Parameter P 720 Venting rotation speed at delayed venting 5096 of the nominal ro tation speed e P
10. then a device for draining condensation water must be provided at the lowest point 5 5 Connecting accessories Installation and operation of accessories Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories The in stallation operation and maintenance of connected devices are described in detail in the operating instructions of the individual components 2 For information on order numbers of components see Accessories gt Use original accessory parts only Note the factory settings The accessory connections on the turbopump have been preconfigured at the factory Interchanging the control leads on the connector cause the pumping station to malfunc tion or fail 2 Do not interchange the control leads gt Accessory connections can be configured for operation with the DCU For more information refer to the operating instructions for the electronic drive unit of the turbopump Accessory connection on the TC 110 The connection of Pfeiffer Vacuum accessory units to the electronic drive unit TC 110 is only possible by using respective connecting cables or rather adapters 2 Configurate the preferred accessory output via RS485 using a Pfeiffer Vacuum dis play and control unit or a PC 2 Consider the operating instructions Electronic Drive Unit TC 110 The pumping station is equipped with air cooling as a standard accessory 14 PFEIFFER E VACUUM Installation 5 6 Transportation lock Tu
11. to be all use for purposes deviating from those mentioned above especially Pumping of corrosive or explosive media Pumping of condensing vapors Pumping of liquids Pumping of dusts Operation with improper high gas throughput Operation with improper high fore vacuum pressures Operation with improper gas mode Operation with improper high levels of insulated heat input Venting with improper high venting rates Use of the pumping station to generate pressure The operation of the devices in potentially radioactive areas The operation of the devices in systems where the turbopumps are subjected to im pact like stress and vibrations or the effect of periodically occurring forces The connection to a power supply with earthing of a direct voltage pole e The use of accessories or spare parts which are not named in this manual warranty seal PFEIFFER E VACUUM Closure seal The product is sealed at the factory Damaging or removal of a closure seal leads to the loss of liability and warranty entitlements 2 Do not open the product within its warranty period 2 For process related shorter maintenance intervals please contact the Pfeiffer Vacu um Service PFEIFFER VACUUM 7 Transport and storage 3 Transport and storage 3 1 Transport gt Only transport the pumping station by hand gt Always transport the pumping station uprightly and as even as possible gt Keep the original protective covers 3
12. Tighten the claw clamps crosswise in three steps 2 Tightening torque 5 15 25 2 Nm 12 PFEIFFER E VACUUM Installation Installation of ISO K flange with ISO F Installation of CF For the installation of the flange connections the following components are available e The valid mounting kit of the Pfeiffer Vacuum accessories programme e A protection screen or splinter shield can optionally be used 2 Mind that the sealing surfaces are not damaged 2 Connect the flanges according to the drawing and with the component parts of the mounting kit gt Use the required number of 4 claw grips gt Tighten the claw grips crosswise in three steps 2 Tightening torque 3 10 16 1 Nm Preservation of sealing capacity Observe the following to preserve sealing capacity gt Touch seals only with gloves gt Make sure sealing lips are undamaged The connection types for installation of CF to CF flange are stud screw and blind hole as well as hex screw and through hole The following elements are required e The valid mounting kit of the Pfeiffer Vacuum accessories programme e A copper seal e A protection screen or splinter shield can optionally be used Stud screw and blind hole 23 If used Insert protective screen or splinter shield with the clamping lugs downward into the high vacuum flange of the turbopump gt Place the seal exactly in the hollow 2 Connect the flange usin
13. Translation of the original instructions PT 0263 BEN D 1108 A PASSION FOR PERFECTION M E HiCube 80 Eco Turbo pumping station M w VACUUM Table of contents Table of contents 1 About this manual 000 0 e eee nnn nnn 3 1 4 Validity sez beoe BORA Boe ae Been a Beene ds 3 1 2 Conventions 020000 c cee 3 2 Saf ty ssis s acii ei ee eee 5 2 1 Safety precautions nanena aeaaee 5 2 2 Protective equipment 0 ee ee 6 2 3 Properuse kapanan aa e lh nh 7 2 4 Improper uSe 2 RR nh 7 3 Transportandstorage seseeeeeeeeee nnn 8 3 4 Transport siii oe ll ee ER Et E ee EE de Regn 8 3 2 Transportation lock llle 8 3 39 StOrage onse ls bob Ge ae ER e eee O Gade Gee 8 4 Product descriptions 2 oleo reme R nre nnnm nnn 9 4 1 Product identification auaa uaaa 9 4 2 FUNGON cose eee cee Spe e masc eden MEE RC GE Udo mous 9 4 3 Range of application saanane naa 10 5 doctum au a a a a a E eee 11 SA STUN rere s aus nter ue E E cater E dns E E A E E E 11 5 2 Preparatory work 0 00 eee eee 11 5 3 Connecting the high vacuum side 200200 0c e eee 11 5 4 Connecting the exhaust side 00 000 0c e eee eee 14 5 5 Connecting accessories 2 000 e eee eee eee 14 5 6 Transportation lock 1 0 2 2 0 00 ee 15 5 7 Voltage range of the backing pump llle 15 5 8 Conne
14. al data and dimensions 12 1 General 12 2 Technical data 100 Basic principles for the Technical Data of Pfeiffer Vacuum Turbopumps e Recommendations of PNEUROP committee PN5 e SO 21360 2007 Vacuum technology Standard methods for measuring vacuum pump performance General description e SO 5302 2003 Vacuum technology Turbomolecular pumps Measurement of per formance characteristics Ultimate pressure using a test dome and a 48 hrs period of baking out Gas throughput water cooling backing pump rotary vane pump 10 m h Cooling water consumption at max gas throughput cooling water temp 25 C Integral leack rate using a Helium concentration of 100 period 10 s Sound pressure level Distance 1 m to the pump Parameter HiCube 80 Eco HiCube 80 Eco HiCube 80 Eco Flange in DN 63 ISO K DN 63 CF F DN 40 ISO KF Pumping speed for N2 67 I s 67 I s 35 I s Pumping speed backing pump at 50 Hz 0 9 m h 0 9 m h 0 9 m3 h Ultimate pressure 1 107 mbar 1 107 mbar 1 107 mbar Mains requirement 110 V 50 60 Hz 230 V 50 60 Hz 110 V 50 60 Hz 230 V 50 60 Hz 110 V 50 60 Hz 230 V 50 60 Hz Mains requirement power consumption 230 V AC 230 V AC 230 V AC Weight 17 kg 17 kg 17 kg 301 79
15. ance to side walls or adjacent devices at least 50 cm Distance to possible edges of tables at least 10 cm When using a casing heating and a water cooling unit the temperature of the connect ed flange of the vacuum chamber must not exceed 120 C e t is not allowed to operate the device in systems where impact like stresses and vi brations or periodically forces occur 5 2 Preparatory work gt Ensure sufficient cooling for the pumping station 2 Where magnetic fields gt 3 mT are involved a suitable shielding must be used Check installation location and consult Pfeiffer Vacuum if needed gt The maximum permissible rotor temperature for the turbopump is 90 C If high tem peratures arise for process reasons the radiated heat input must not exceed 3 W In stall suitable screening sheets if necessary design information on request 5 3 Connecting the high vacuum side The assembly of superstructure on the pumping station HiCube 80 Eco is in the opera tor s responsibility The load capacity of the high vacuum flange is specific for the used turbopump The gross weight of superstructure on the pumping station HiCube 80 Eco may not exceed 50 kg gt Observe barycentric shifting by using high or lateral protruding superstructure e g vacuum chamber Danger of tilting gt Install the high vacuum flange in accordance with the instructions in the operating manual of the turbopump gt Ensure the greatest possible
16. arameter P 721 Venting time 3600 s gt When water cooling is used Open cooling water supply and check the flow gt When sealing gas is used Open the sealing gas supply and check the flow Comply run up time Pump throughput can be impaired by condensate or remainig moisture in the fore vac uum area This can lead to exceeding the maximum run up time 2 Recommendation When switching on open the gas ballast valve for about 5 min see p 19 chap 6 4 Danger of the pump being destroyed Pumping of gases with a higher molecular mass in the wrong gas mode can lead to de struction of the pump 2 Ensure the gas mode is correctly set 2 Contact Pfeiffer Vacuum before using gases with a greater molecular mass gt 80 6 2 Operation modes The following operation modes are available e Operation without operating unit e Operation via RS485 and Pfeiffer Vacuum display and control units or PC 6 3 Function description Danger due to open high vacuum flange The rotor of the turbopump turns at high speed If the high vacuum flange is open there is a danger of cut injuries and that the pump can be destroyed by objects falling into it 2 Never operate the pump with an open high vacuum flange PFEIFFERE VACUUM 17 Operation Operation without op erating unit Automatic start After connecting the supply voltage and switching on the main switch pumping stations without display and control unit will run up imm
17. ation about properties the disregarding of which may result in damage to the product PFEIFFERE VACUUM 3 About this manual Pictograph definitions Instructions in the text Abbreviations used Symbols used 4 PFEIFFER E VACUUM Prohibition of an action or activity in connection with a source Q of danger the disregarding of which may result in serious ac y cidents Warning of a displayed source of danger in connection with operation of the unit or equipment Command to perform an action or task associated with a bh source of danger the disregarding of which may result in se y rious accidents gt Work instruction here you have to do something DCU Display and operating unit HPU Handheld programming unit TC Electronic drive unit for turbopump TPS Mains pack The following symbels are used consistently throughout the diagrams Q High vacuum flange Fore vacuum connection Electric connection Air cooling unit Q Venting connection Sealing gas connection Exhaust connection Safety 2 Safety 2 1 Safety precautions gt P amp O O Duty to inform Each person involved in the installation operation or maintenance of the vacuum pump must read and observe the safety related parts of these operating instructions 2 The operator is obligated to make operating personnel aware of dangers originating from the vacuum pump the pumped medium and the entire system Installation a
18. cleanliness when installing any high vacuum parts Un clean components prolong the pump down time In the case the rotor suddenly blocks the torques arising from the system and the high vacuum flange must be absorbed Only the components listed in the following can be used to fasten the turbopumps to the high vacuum flange The components for installing the turbopumps are special designs of Pfeiffer Vacuum Observe the minimum strength of 170 N mm for the flange material Observe shape tolerances for the counter flange Unevennesses of the customer supplied counter flange can lead to warping of the pump casing despite proper fastening Leakiness and negative running characteristics can be the result 2 Do not exceed an evenness of max 0 05 mm for the whole surface PFEIFFER vacUUM 11 Installation Mounting of ISO flanges If the rotor suddenly blocks the connection of high vacuum flanges of types ISO KF or ISO K can lead to twisting despite proper installation e The tightness of the high vacuum flange is not at risk thereby Use of a splinter The installation of a Pfeiffer Vacuum centering ring with splinter shield or protection shield or protection screen in the high vacuum flange protects the turbopump against foreign bodies coming Screen from the chamber The volume flow rate is reduced Reduced volume flow rate in H2 He N2 Ar Splinter shield DN 40 6 9 17 18 Splinter shield DN 63 3 6 15 16 Protection
19. control and monitor the pumping station The DCU can be detached from the pumping station and used together with an connection cable M12 accessory as a remote control e Air cooling e Water cooling optional In the case of excess temperature the electronic drive unit reduces the drive power au tomatically Electronic drive unit of the turbopump 4 3 Range of application 10 PFEIFFER E VACUUM The pumping station HiCube 80 Eco must be installed and operated in the following am bient conditions Installation location weather protected indoors Protection category IP 20 Protection class l Temperature 5 C to 30 C with convection cooling without gas throughput 5 C to 35 C with air cooling 5 C to 40 C with water cooling Relative humidity max 80 at T lt 31 C up to max 50 at T lt 40 C Atmospheric pressure 75 kPa 106 kPa Installation altitude 2000 m max Degree of pollution 2 Permissible surr magnetic field lt 3 mT Overvoltage category ll Connection voltage TC 24 VDC 5 5 Installation 5 1 Set up Installation The installation location is to be chosen so that components that need servicing are free ly accessible at all times No special foundations or base are necessary for installation The unit must not be used outdoors Conditions are The ambient conditions specified for the area of use a level vibration free surface Dist
20. control unit Order number with display and PM S03 555 PM S03 556 PM S03 557 control unit Scope of delivery 4 2 Function To correctly identify the product when communicating with Pfeiffer Vacuum always have the information from the rating plate available PFEIFFER E VACUUM D 35614 Asslar B Mod HiPace 300 Oll C DN 100 ISO K 3P S N 260 l s M No PM P03 900 nf 60000 1 min 1000 Hz Ser No Weight 6 7 kg TIENE I I Madein Germany C Fig 1 Example for a rating plate HiCube 80 Eco Protective cover for the high vacuum flange Connection cable M12 3 m length Operating manuals for pumping station and individual components Turbo pumping stations are fully automatic pump units which are ready for connection A turbo pumping station consists of a portable or mobile vacuum pumping unit with a tur bopump and a specially matched backing pump Fig 2 Views of HiCube 80 Eco 1 14 Casing 9 Display and control unit 12 Air cooling unit 7 Turbopump HiPace 80 DCU 002 option 20 Fore vacuum connecton 7 9 Electronic drive unit TC 110 8 Power supply pack TPS 110 10 Relay box 10 1 Main switch 11 Backing pump MVP 015 2 37 Hexagon nut transporta tion lock PFEIFFERE VACUUM 9 Product description Cooling Drive The turbo pumping station HiCube 80 Eco is available with or without a display and con trol unit The display and control unit DCU 002 is used to
21. cting to the mains power supply 20 005 16 6 Operation ovuu e y as Wawa a 17 6 1 Commissioning llis nes 17 6 2 Operation modes nsus aaan 17 6 3 Function description 0 0 ee 17 6 4 Operation with gas ballast valve 02000 eee eee 19 6 5 Monitoring of the operation conditions sasssa saaana 20 6 6 Switching off and venting llli 21 7 Maintenance replacement else 22 7 1 Maintenance intervals and responsibilities 0 22 7 2 Removal of components for their maintenance 22 8 Decommissioning eese II 25 8 1 Shutting down for longer periods 02000e eee eee 25 8 2 Re starting ce e 25 9 3 Disposal sie pee o ec pb Ae eee se Ai 25 9 MalfUnctiOn 2 22 lem rmm numen niece tomm numum inn wu em RS nU 26 9 1 Rectifying malfunctions llllillsllssllllll lese 26 10 SOP MNCS usn saaa aiaa e iste e eisa a Jae en e ren ee ed ea ia ads 27 11 Spare parts HiCube 80 Eco 00 eee 28 12 Technical data and dimensions 0 200 eee eee eee eee 29 12 1 GOMSRAl is so cise idea tion donee ok E isa shee tase a on Ro Pipl Systane oe 29 12 2 Technical data 0 0 0 eee ee 29 Declaration of conformity selle 30 2 PFEIFFER E VACUUM About this manual 1 About this manual 1 1 Validity Applicable docu ments 1 2 Conventions Safety instructio
22. ediately 2 Switch the mains switch to position 0 before plugging in the mains cable 2 Switch on the mains supply immediately before operation gt Switch on the pumping station at the master switch After switching on the main switch the electronic drive unit of the turbopump performs a self test to check the supply voltage Once the self test has been successfully completed the turbopump and the backing pump begin to operate Operation with DCU gt Consider the following manuals for the operation via Pfeiffer Vacuum display and con trol units e Operating instructions DCU e Operating instructions Electronic drive unit 9 gt Switch on the mains supply via the main switch gt Switch on the pumping station via button ON OFF on the DCU 002 gt Settings are possible via the RS485 by using DCU HPU or PC Use of the DCU as a remote control The display and control unit can be removed from the pumping station and used as a remote control Fig 6 Setting up the DCU for use as a remote control 9 Display and control unit 26 Fixing screw 18 Connection cable TC DCU 27 Washer 19 Connection cable M12 PM 061 270 X Coupling M12 gt Switch off the pumping station at the master switch 2 Disconnect the mains plug gt Unscrew and remove the 4 fastening screws with washers from the front panel of the display and control unit gt Lift out the display and control unit from the casing Be careful of the
23. g 8 stud screws M8 with washers and nuts and tighten cir cularly with a torque of 22 2 Nm After this check the torque since flowing of the sealing material may make it necessary to tighten the screws Hexagon screw and through hole 23 If used Insert protective screen or splinter shield with the clamping lugs downward into the high vacuum flange of the turbopump 2 Place the seal exactly in the hollow gt Connect the flange using 8 hex screws M8 with washers and nuts and tighten circu larly with a torque of 22 2 Nm After this check the torque since flowing of the sealing material may make it necessary to tighten the screws PFEIFFERE VACUUM 13 Installation 5 4 Connecting the exhaust side High pressure in the exhaust line Danger of damage to the seals and danger of the pump bursting 2 Install the line without shut off valves on the exhaust side 2 Pumpe nicht mit berdruck am Einlass betreiben max zul ssige Dr cke und Druck differenzen beachten gt Choose the cross section of the exhaust line to be at least the size of the nominal con nection diameter of the vacuum pump s exhaust connection 2 Piping to the pump must be suspended or supported Physical forces from the piping system must not be allowed to act on vacuum pumps 2 Lay piping from the pump sloping downward so that no condensate can flow back into the pump otherwise fit a condensate separator lfanairtrap is created in the system
24. l protective covers gt If possible send pump or unit in the original packaging Sending of contaminated pumps or devices No units will be accepted if they are contaminated with micro biological explosive or ra dioactive substances Hazardous substances are substances and compounds in ac cordance with the hazardous goods directive current version If pumps are contaminat ed or the declaration on contamination is missing Pfeiffer Vacuum performs decontamination at the shipper s expense 2 Neutralise the pump by flushing it with nitrogen or dry air gt Close all openings airtight gt Seal the pump or unit in suitable protective film 2 Return the pump unit only in a suitable and sturdy transport container and send it in while following applicable transport conditions Exchange unit The factory operating parameters are always preset with exchange units If you use changed parameters for your application you have to set these again Service orders All service orders are carried out exclusively according to our repair conditions for vacu um units and components 1 Forms under www pfeiffer vacuum com PFEIFFERE VACUUM 27 Spare parts HiCube 80 Eco 11 Spare parts HiCube 80 Eco Please also specify model number of the the rating plate when ordering accessories or spare parts Refer to the operating manuals for the individual components 28 PFEIFFER VACUUM Technical data and dimensions 12 Technic
25. nd operation of accessories Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories The in stallation operation and maintenance of connected devices are described in detail in the operating instructions of the individual components 2 For information on order numbers of components see Accessories gt Use original accessory parts only Checking the safety system against excess rotation speed To provide the functioning of the integrated safety system for avoiding excess rotation speed the pump must run up from the standstill at least once a year 2 Switch off the pump and await the complete standstill rotation speed 0 Hz 2 Run up the pump according to this operating instructions Danger Electrical installation Safe operation after installation is the responsibility of the operator 2 Do not independently modify or change the pump and electrical equipment gt Make sure that the system is integrated in an emergency off safety circuit gt Consult Pfeiffer Vacuum for special requirements Danger of electric shock In case of defect the parts connected to the mains supply are under voltage gt Always keep the mains connection freely accessible so you can disconnect it at any time Do not expose any body parts to the vacuum Observe all safety and accident prevention regulations Regularly check the proper observance off all safety measures Always ensure a safe connection to the protective ear
26. nical and electrical components operating fluids etc may cause environmental burden gt Safely dispose of the materials according to the locally applicable regulations PFEIFFERE VACUUM 25 Malfunctions 9 Malfunctions Malfunctions on the pumping station are usually caused by faults on individual compo nents Faults are indicated by the LEDs at the electronic drive unit of the tur bopump Al ternatively a fault code can also be output at the display and control unit DCU e Please refer to the relevant operating manual for information about troubleshooting in dividual pump components e f no display and control unit is available please contact the Pfeiffer Vacuum Service 9 1 Rectifying malfunctions Problem Pumping station will not start none of the integrated LEDs on the electronic drive unit of the turbopump light up Possible causes e Electrical supply interrupted Remedy gt Check the plug contacts at the relay box and the power supply unit gt Check the supply lines of the pumping station gt Check the output voltage 24 VDC at the DC out terminal of the power supply unit gt Check the plug contacts on the power supply unit e Incorrect operating voltage gt Apply correct operating voltage gt Observe the ratings on the type plate e No operating voltage applied gt Apply the correct operating voltage e Electronic drive unit defective gt Replace the electronic
27. no liability for personal injury or material damage losses or op erating malfunctions due to improperly performed maintenance The liability and war ranty entitlement expires Risk of electric shock The pumping station is only free of voltages when the mains plug has been disconnect ed gt Switch off the master switch and disconnect the mains plug before all work 2 Secure against unintentional restarting 7 1 Maintenance intervals and responsibilities e Clean the pumping station externally with a lint free cloth and little industrial alcohol e Carry out the required maintenance on the components of the pumping station in ac cordance with the instructions in the individual operating manuals e Clarify shorter maintenance intervals for extreme loads or impure processes with Pfei ffer Vacuum Service e For all other cleaning maintenance or repair work please contact your Pfeiffer Vacu um service location 7 2 Removal of components for their maintenance Dismantling connec tions 22 PFEIFFER E VACUUM In some cases components may need to be dismantled from the pumping station so that customers can carry out necessary maintenance work on them they should then be re assembled in reverse order Refer to the notes on Proper Use of the unit The pumping station must only be operated as a complete unit Disassembly and oper ation of individual pumping station components is deemed to be improper use e In this
28. ns This operating manual is for customers of Pfeiffer Vacuum It describes the functioning ofthe designated product and provides the most important information for safe use of the unit The description follows applicable EU guidelines All information provided in this op erating manual refer to the current state of the product s development The documenta tion remains valid as long as the customer does not make any changes to the product Up to date operating instructions can also be downloaded from www pfeiffer vacu um com HiCube 80 Eco Operating instructions Declaration of Conformity Part of this document Operating instructions for components see product description also available via www pfeiffer vacuum net For information about other certifications if applicable please see the signet on the prod uct or e www tuvdotcom com e TUVdotCOM ID 0000021320 The safety instructions in Pfeiffer Vacuum operating manuals are the result of risk eval uations and hazard analyses and are oriented on international certification standards as specified by UL CSA ANSI Z 535 SEMI S1 ISO 3864 and DIN 4844 In this document the following hazard levels and information are considered DANGER Immediate danger Death or very severe injuries can occur Possible danger Injuries or severe property damages can occur Possible danger Injuries or property damages can occur Command or note Command to perform an action or inform
29. perating fluid by pumped media is possible Poisoning hazard through contact with materials that damage health 2 In the case of contamination carry out appropriate safety precautions in order to pre vent danger to health through dangerous substances 2 Decontaminate affected parts before carrying out maintenance work If the pumping station should be shut down for longer than a year 2 Remove the pumping station from the system if necessary gt Change the operating fluid reservoir of the turbopump gt Only store the pumping station indoors at an ambient temperature between 5 C and 40 C gt In rooms with moist or aggressive atmospheres the pumping station must be airproof shrink wrapped in a plastic bag together with a bag of dessicant Re starting The serviceability of the operating fluid of the turbopump without operation is a maxi mum of 4 years Before restarting after a shut down of 4 years or longer carry out the following work 2 Replace the operating fluid reservoir 2 Replace bearings 2 Follow the maintenance instructions and inform Pfeiffer Vacuum gt Check pumping station for contamination and moisture gt Clean the pumping station externally with a lint free cloth and little industrial alcohol gt If necessary have Pfeiffer Vacuum Service clean the pumping station completely 2 Installation and commissioning in accordance with the operating instructions Products or parts thereof mecha
30. rbo pumping stations of the HiCube 80 Eco line are equipped with a transportation lock for the backing pumps see label The backing pump is diagonally fixed with cylinder head screws with nuts via two spring loaded rails at the bottom plate of the pumping sta tion Fig 3 Transport protection for HiCube 80 Eco 37 Transport protection gt Loosen the hexagon nut 37 of the transportation lock 2 Similarly loosen the transportation lock on the opposite side 2 Remove PE foam padding above the backing pump from the casing 5 7 Voltage range of the backing pump The backing pump is driven by single phase extended voltage range motors with revers ible voltage ranges Overvoltage An incorrect voltage range setting can damage the motor gt Always check the voltage range before switching on the pumping station 2 Disconnect the mains supply before changing the voltage range of the backing pump e 180 254 V 50 60 Hz e 90 126 V 50 60 Hz 2 Set the desired voltage range on the voltage selector switch using a suitable screw driver PFEIFFER VACUUM 15 Installation Switch position 115 230 Voltage ranges 90 126 V 50 60 Hz 180 254 V 50 60 Hz Fig 4 Switch position for the voltage range at the backing pump 5 8 Connecting to the mains power supply 16 PFEIFFER E VACUUM Danger Electrical installation Safe operation after installation is the responsibility
31. rew included in the venting connection of the turbopump about one turn Venting with Pfeiffer Vacuum Venting Valve gt Enable venting via the functions of the electronic drive unit gt Settings are possible via the RS485 by using DCU HPU or PC Venting rotation speed Mains power failure 50 of the nominal rotation Venting valve opens for 3600 s 1 h Venting valve opens for speed works setting 3600 s 1 h works setting When mains power is restored the venting procedure is aborted Basic information for the rapid venting Venting of the vacuum chamber in two steps Ask for details on individual solutions from Pfeiffer Vacuum gt Vent for 20 seconds at a rate of pressure rise of max 15 mbar s The valve cross section for the venting rate of 15 mbar s must be adapted to the size of the vacuum chamber For small vacuum chambers use the Pfeiffer Vacuum venting valve 2 Then vent with an additional venting valve of any desired size PFEIFFER VACUUM 21 Maintenance replacement 7 Maintenance replacement Contamination of parts and operating fluid by pumped media is possible Poisoning hazard through contact with materials that damage health 2 In the case of contamination carry out appropriate safety precautions in order to pre vent danger to health through dangerous substances 2 Decontaminate affected parts before carrying out maintenance work Disclaimer of liability Pfeiffer Vacuum accepts
32. screen DN 63 1 1 4 4 Vibration damper DANGER Danger from the turbopump and vibration dumper being torn off In case of sudden blocking of the rotor an applied vibration dumper cannot compensate any of the occurring forces There is a danger of the turbopump being torn off and there by resulting severest injuries and property damages Applicable safeguards must be taken to compensate possible occurring torques 2 Definetely consult with Pfeiffer Vacuum gt Do not exceed the max permissible temperature at the vibration dumper 100 C Installation of ISO KF flange with For the installation of the flange connections the following components are available ISO KF flange e The valid mounting kit of the Pfeiffer Vacuum accessories programme e A protection screen or splinter shield can optionally be used 2 Mind that the sealing surfaces are not damaged 2 Flange the turbopump with the clamping ring gt Tightening torque 3 7 Nm Installation of ISO K For the installation of the flange connections the following components are available flange with ISO K e The valid mounting kit of the Pfeiffer Vacuum accessories programme flange e A protection screen or splinter shield can optionally be used 2 Mind that the sealing surfaces are not damaged 2 Connect the flanges according to the drawing and with the component parts of the mounting kit gt Use the required number of 4 claw clamps gt
33. thing conductor PE protection class l Do not loosen any plug connection during operations Wait for the rotor to reach standstill before peforming work on the high vacuum flange Keep leads and cables well away from hot surfaces gt 70 C Never fill or operate turbopump with cleaning agent Do not operate the turbopump with open high vacuum flange Do not carry out any unauthorised modifications or conversions to the pumps PFEIFFER VACUUM 5 Safety e Theunithas been accredited with protection class IP 20 When installing into ambient conditions which afford other protection classes the necessary measures must be taken e Note the shipping instructions when returning the unit 2 2 Protective equipment D OP OP GPS 6 PFEIFFER E VACUUM Determined situations concerning the handling of vacuum pumps require wearing of per sonal protective equipment The owner respectively the employer are obligated to pro vide adequate equipment to any operating persons DANGER Danger to health by hazardous substances during maintenance or installation Depending on the process vacuum pumps components or operating fluids can be con taminated by toxic reactive or radioactive substances gt Wear adequate protective equipment during maintenance and repairs or in case of reinstallation Risk of injury through falling objects When transporting vacuum pumps by hand there is a danger through
34. ve 1 2 s active Green insufficient Pumping station OFF Pumping station OFF Pumping station power supply Rotation speed lt 1Hz Rotation speed gt 1 Hz ON Yellow i no warning Warning Red no malfunction Malfunction T Temperature monitor The drive power is reduced in case of impermissible motor temperature or impermissibly ing high housing temperature This can cause falling below the rotation speed switchpoint and so result in turning off the turbopump 20 PFEIFFER E VACUUM Operation 6 6 Switching off and venting Switching off Venting After the turbopump is switched off it must be vented to avoid contamination due to par ticles streaming back from the fore vacuum area Risk of electric shock The pumping station is only free of voltages when the mains plug has been disconnect ed gt Switch off the master switch and disconnect the mains plug before all work gt Secure against unintentional restarting Switching off without the DCU gt Switch off the pumping station at the master switch gt Venting possibilities see below gt For water cooling Shut off the water supply Switching off with the DCU gt Switch off the pumping station via the ON OFF button on the DCU 2 Switch off the pumping station at the master switch gt Venting possibilities see below gt For water cooling Shut off the water supply Manually Venting gt Open the venting sc
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