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Nanosurf easyScan 2 STM Operating Instructions

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1. The User Interface dialog is opened via the menu Options gt gt Config User Interface THE USER INTERFACE DIALOG Program Skin Select the look of the easyScan 2 software you are most comfortable with All screenshots in this manual were made with the Windows XP skin User Interface Mode Determines the number of parameters displayed in the various panels Easy level Only those parameters that are absolutely necessary to do a measurement Standard level The commonly useful parameters Advanced level All available parameters Options Save workspace on exit When active the workspace settings are saved to the system registry when the software is exited Section 12 5 4 Storing and retrieving measurement parameters page 110 Animated menu When active the opening of the menu is nicely animated 111 CHAPTER 12 THE CONTROL SOFTWARE USER INTERFACE 112 CHAPTER 13 Hardware related settings 114 CHAPTER 13 Hardware related settings During normal operation of the microscope changes have to be made to several hardware related settings in the easyScan 2 software for the microscope to function properly The Operating mode panel and the Z Controller panel are used for this task Other changes are generally only made when the hardware is changed The settings defining the hardware configuration are distributed over several dialogs that are reached via the Options menu All of the
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3. 145 146 CHAPTER 14 POSITIONING Video Options Video Options Illumination 100 Brightness 80 J J Contrast 70 The Video Options section determines how the video signal is displayed There are separate sets of options for the side and the top view Illumination The intensity of the sample illumination on the Scan Head Brightness The brightness of the video display Contrast The contrast of the video display CHAPTER 15 Imaging 148 CHAPTER 15 Imaging FF Imaging window mmx Start EJUp MDown Zoom D Move W Full Spec Litho ePhoto gt Imaging Panel lt Topography Scan forward Imaging Area E z E Image size 60pm Time Line 0 6 s Mean fit 166mm Points Line 256 20 de amp D Rotation 0 Imaging Options Slope 0 Topography range Y Slope 0 DEAD Oum Overscan 0 Opm x 60m Topography Scan forward 222nm Mean fit Topography range 86 8nm Figure 15 1 The imaging window Imaging measurements of the sample are controlled using the Imaging window The Imaging window can be opened by clicking AR in the navigator The Imaging window contains the Imaging bar with commands that control the imaging processes and the Imaging panel with parameters that determine how the imaging is done The Imaging window also contains a number of charts that display the data f
4. Name Manufacturer Spring constant Length Width Res freq air Qair Res freq liquid Q liquid A New Multi75M G BudgetSen 3N m 225m 28m 75Hz 500 OkHz 5 Multi75A1 G BudgetSen 3N m 225m 28m 75kHz 500 OkHz 5 Edt Tap150A G BudgetSen 5N m 125m 25um 150kHz 500 OkHz 5 Tap 190AI G BudgetSen 48 N m 225m 38m 190kHz 500 OkHz 5 Delete CONTR Nanosensors O0 2N m 450m 50m 13kHz 500 OkHz 5 ei CONTSCPt Nanosensors 0 2N m 225m 48m 23kHz 500 OkHz 5 3 EFMR Nanosensors 28N m 225um 28m 75kHz 500 OkHz 5 LFMR Nanosensors O0 2N m 225m 48m 23kHz 500 OkHz 5 MFMR Nanosensors 28N m _ 225m 28um 75kHz 500 OkHz 5 MRON L moo iiki 500 kS PPP FMR Nanosensors 5N m 225m 28m 80kHz 500 26kHz 5 mi Default Deflection signal unit Use meters based on head calibration Use newtons based on mounted cantilever s spring constant Qose CANTILEVER TYPES CONFIGURATION The cantilever browser dialog is opened via the menu Options gt gt Config Cantilever Types The cantilever browser allows creating editing and deleting of cantilever types Select the cantilever type to modify Select the cantilever type you wish to modify and click on any of the following buttons New Opens the Cantilever Editor dialog for a new cantilever type You can create new cantilever types that are not defined in the default configuration Edit Opens the Cantilever Editor dialog to modify the currently sele
5. Select Destination Folder and Select Start Menu Folder windows that sequentially appear accepting the default choices in all dialogs 23 24 CHAPTER 2 INSTALLING THE EASYSCAN 2 STM O When the Ready to install window appears click on the Install button The setup program now performs its tasks without any further user interaction Depending on the configuration of your computer a reboot may be required at the end of the software installation process If this is the case the setup program will inform you of this and will provide you with the opportunity to do so This completes the software installation procedure Proceed with Section 2 2 3 Hardware recognition to complete the setup process 2 2 3 Hardware recognition o initiate the automatic hardware recognition process for the devices present in To initiate the automatic hard t for thed t your controller O Logon to your computer with Administrator privileges O Power on the controller Connect the controller to the computer with the supplied USB cable Figure 1 1 Components page 13 item 4 A popup balloon appears in the Windows notification area stating that new hardware devices have been found and drivers are being installed Depending on the configuration of your controller and computer any of the following devices may show up during driver installation e Standard USB Hub e USB to Serial interface e Composite Device e USB
6. CHAPTER 3 Preparing for measurement 30 CHAPTER 3 Preparing for measurement Once the system has been set up see Chapter 2 Installing the easyScan 2 STM page 19 the instrument and the sample have to be prepared for measurement The preparation consists of three steps Initializing the easyScan 2 Controller Preparing and installing the STM tip and Installing the sample To initialize the easyScan 2 controller Make sure that the easyScan 2 controller is connected to the mains power and to the USB port of the control computer O Turn on the power of the easyScan 2 controller First all status lights on top of the controller briefly light up Then the Scan Head lights and the lights of the detected modules will start blinking and all other status lights turn off O Start the easyScan 2 software on the control computer The main program window appears and all status lights are turned off Now a Message Controller Startup in progress is displayed on the computer screen and the module lights are turned on one after the other When initialization is completed a Message Starting System is briefly displayed on the computer screen and the Probe Status light the Scan Head status light of the detected scan head and the Module lights of the detected modules will light up If no scan head is detected both Scan Head Status lights blink The STM tip can be prepared and installed by yourself This is the most d
7. Exit the easyScan 2 control software If you exit the program while still having some unsaved measurements you will be asked to save them O Turn off the power switch see Figure 1 4 The easyScan 2 controller page 17 for its location If you perform measurements regularly O Leave the instrument with the Magnifying cover over the scan head to protect it against dust If you do not operate the instrument for several weeks Store the instrument as is described in Section 7 3 Storing the instrument If you are not using the instrument for an extented period of time if you have to transport it or if you send it in for repairs put the instrument in the original packaging material or instrument case Turn off the instrument as described in Section 7 2 Turning off the instrument and remove all cables Remove the Sample and Sample Holder The tip can be left in the scanner Store the Sample Holder in its container O Pack all components in the original Nanosurf packaging material or instrument case as shown in Figure 7 1 Packing IMPORTANT Before transport always put the instrument in the original Nanosurf packaging material or instrument case Figure 7 1 Packing The easyScan 2 STM system packed in the Instrument Case 71 72 CHAPTER 7 FINISHING MEASUREMENTS CHAPTER 8 Maintenance 74 CHAPTER 8 Maintenance To ensure fault free operation of the microscope the following instruc
8. ine Default_EZ2 AFM c Default_EZ2 AFM r 10 04073 hed Standardlevel_ 4 Panel Status bar Figure 12 1 The main window e Several tool bars that are used to issue commands e Several control panels that are used to set measurement parameters e The Navigator that is used to quickly select between the most often used operating windows and panels The Status bar that displays the state of the instrument Operating windows are used to perform specific operations with the microscope These operations are controlled using specific panels and tool bars that are part of these windows The Operating windows are e Positioning window positioning the tip with respect to the sample with the aid of the optional optical microscope Chapter 14 Positioning page 141 105 106 CHAPTER 12 THE CONTROL SOFTWARE USER INTERFACE e Imaging window generating images of the sample Chapter 15 Imaging page 148 e Spectroscopy window measuring various A as a function of B curves at certain sample locations such as force distance curves or current voltage curves Chapter 16 Spectroscopy page 158 e Lithography window performing Lithography on the current scan area Chapter 17 Lithography page 166 The Measurement document windows visually represent previously made measurements They are created when you decide to keep the current measurement result The measurement documents are used for storing loadin
9. 170 CHAPTER 17 LITHOGRAPHY 2 Import vector Opens an Open File dialog to import a GDS II vector graphic file extension gds Other formats DXF OAS OASIS CIF can be converted to GDS II using the LayoutEditor IMPORTANT Since the Lithography software only supports a subset of the GDS H file format an error message will appear when a file containing non supported elements is selected To avoid this error message the vector graphics project should be fully flattened before saving it as a GDS II file LayoutEditor and most other CAD programs provide some form of flattening functionality Refer to the manual or online help of your CAD program for details For more information on the available import options after selecting a valid GDS II file refer to Section 17 2 1 The Vector Graphic Import dialog page 171 Import bitmap Opens a Open File dialog for importing a BMP DIB GIF TIFF PNG or JPEG pixel graphics file IMPORTANT Since the Lithography software only supports files with 256 pixels or less in width and height an error message will appear when a non supported file is selected To avoid this error message make sure to save all pixel graphics files with less than 256 pixels in width and height For more information on the available import options after selecting a valid pixel graphics file refer to Section 17 2 2 The Pixel Graphic Import dialog page 173 ta Photo Captur
10. Action to be performed when the measurement is aborted No range check will never abort the measurement The tip is not protected against damage due to too high tip sample interaction This is the default setting Abort modulation aborts the current modulation period and continues with the next modulation until the number of modulations in Averages is reached Abort current measurement aborts the spectroscopy measurement for the current point and continues with the next point of the line ifa i spectroscopy is being performed Abort measurement sequence aborts the entire spectroscopy measurement sequence cancels all Averages and points Max Min input value Standard Advanced The Minimum maximum value that the feedback signal is allowed to have THE SPECTROSCOPY PANEL Position Easy Standard Advanced Position Sequence Points 1 E X Pos from Om E YPosfiom Om f Posto 0n E Y Posto 0 5 E The Position parameters can be used to define a sequence of spectroscopy measurements on positions that are equally distributed over a line Sequence Points Easy Standard Advanced The number of Spectroscopy Measurements to be made in the sequence X Pos from Y Pos from Easy Standard Advanced The XyY coordinates of the measured point in a pont spectroscopy measurement Sets the XY coordinates of the starting point of the line ina tine spectroscopy measurement sequence X Pos to Y Pos to
11. Omm Omm ight Mode Date Time Feedback group Set point T Gain Tip voltage Error rani El Global Figure 18 4 The Data Info panel Display of measurement parameters 193 CHAPTER 18 VIEWING MEASUREMENTS 194 a D Ye E k ya CHAPTER 19 Quick evaluation tools 196 CHAPTER 19 Quick evaluation tools The easyScan 2 software has several tools that allow quick numerical evaluation of a measurement while it is being acquired or when the acquisition is finished This helps find optimal measurement settings For more elaborate evaluations the optional Nanosurf Analysis or the Nanosurf Report software package can be used Section 20 2 Creating a report page 214 To use a quick evaluation tool O Click the chart to evaluate to activate it Tools can be used in all chart types with the exception of the 3D View The number of available tools depends on the type of the chart Click on one of the buttons on the Tools bar or select a tool from the Tools menu The Tool Results Panel now becomes visible This panel displays the evaluation results Define the evaluation The procedure to define the evaluation differs between the tools refer to Section 19 2 The Tools bar page 199 for tool specific instructions To stop using a tool Select another tool or select the same tool a second time The Tool Results panel displays the evaluati
12. e Compress the script file to a zip archive and attach it to the e mail 85 86 CHAPTER 9 PROBLEMS AND SOLUTIONS CHAPTER 10 STM theory 88 CHAPTER 10 STM theory Microscopy is one of the most exciting scientific techniques The insight into small dimensions has led to a new understanding of the structure of materials and forms of life With the help of the scanning tunneling microscope STM it is possible to look into the fascinating world of the atoms This completely new microscopy technique works without focusing elements and features atomic resolution laterally and vertically The Scanning Tunneling Microscope was developed by Gerd Binnig and Heinrich Rohrer in the early 80 s at the IBM research laboratory in Riischlikon Switzerland For this revolutionary innovation Binnig and Rohrer were awarded the Nobel prize in Physics in 1986 In the STM a small sharp conducting tip is scanned across the sample s surface so close that the so called tunneling current can flow With the help of that current the tip surface distance can be controlled very precisely Therefore an enormous resolution is achieved so that the atomic arrangement of metallic surfaces can be probed To be able to get such excellent pictures of atomic resolution is almost incredible considering that the size of the atom in relation to the tip is that of a golf ball to a mountain SCANNING WITH THE EASYSCAN 2 STM
13. Finishing measurements turning off the instrument and or storing the instrument as described in Chapter 7 Finishing measurements page 70 53 54 CHAPTER 4 FIRST MEASUREMENTS CHAPTER 5 Improving measurement quality 56 CHAPTER 5 Improving measurement quality Interfering signals can be recognized because they have a fixed frequency usually a multiple of the local mains frequency 50 or 60 Hz throughout the image Thus they are manifested by straight lines that run throughout the entire image Possible interference sources are e Mechanical vibrations from machines or heavy transformers in direct vicinity e g pumps e Electrical interference in the electronics or in electrical forces of the tip sample interaction 5 1 1 Mechanical vibrations Measure the frequency of the vibrations to find out if the interference is due to mechanical vibrations Such vibrations have a frequency that is a multiple of the rotation frequency of the source This frequency is usually not a multiple of the local mains frequency and may change slightly over time Try the following to find out if the interfering signal is due to mechanical vibrations If possible turn off all rotating machines i e pumps in the room O Change the vibration isolation by putting the Scan Head directly on the table instead of on the Sample stage To reduce the influence of these vibrations either improve the isolation of these machi
14. The Browse button allows the selection of the directory where the templates are stored 216 CHAPTER 21 Automating measurement tasks 218 CHAPTER 21 Automating measurement tasks The easyScan 2 Scripting Interface is an optional component for automating measurement tasks It offers several possibilities to automate measurement tasks e Create scripts inside the easyScan 2 software e Create external software that controls the easyScan 2 software This chapter describes the user interface features that are related to creating scripts inside the easyScan 2 software After purchasing it the Scripting Interface must be activated using the Edit Access Codes dialog section Section 13 7 The Edit Access Codes dialog page 139 or follow the instructions on the Access code certificate delivered with the instrument For more information about the automating measurement tasks and the available script commands refer to the Programmers Manual This manual is available as an online help file that can be opened via the Windows Start menu Start gt gt Program Files gt gt Nanosurf gt gt Nanosurf easyScan 2 gt gt easyScan 2 Programmers Manual The scripting functions of the easyScan 2 software are reached via entries in the Script menu Script Editor Opens the Script Editor dialog Run From File On selecting this menu entry a file dialog appears that allows select
15. Input BNC Cantilever excitation mode Intemal source Extemal source Sync output mode Imaging High level from begin to end of line od Spectroscopy High level from begin to end of line E Cancel OK When the Signal Module A is installed the Signal Module Configuration dialog allows several parameters to be configured Tip Signal Mode The following settings are available Current measurement input Sets the tip signal to the input current measurement level Voltage source output Sets the tip signal to the measured output voltage 137 138 CHAPTER 13 HARDWARE RELATED SETTINGS Direct feedthrough with Tip Voltage Input BNC Establishes a direct connection between the Tip Voltage Input BNC connector and the cantilever All of these choices are described schematically in Figure 13 4 Tip Signal Mode schematic 3 Cable Cantilever Tip Voltage O from Controller Switch settings 1 Current measurement input 2 Voltage source output 3 Direct feedthrough with Tip Voltage Input BNC Figure 13 4 Tip Signal Mode schematic Describes the electronics behind the three Tip Signal modes available Cantilever Excitation Mode The following options are available Internal source Cantilever excitation is controlled by the easyScan 2 controller itself External source Cantilever excitation is controlled by an external source Sync
16. Lithography preview The preview panel displays all currently selected objects and layers of the objects and layers list as they would be executed on the sample surface THE LITHOGRAPHY TOPOGRAPHY MAP VIEW Topography Scan forward 25um Line fit 76 6nm Topography range Oum Oum xe 25m Lithography Topography map view The Lithography Topography map view displays the topography image of the sample surface to be used for lithography Before running a lithography sequence a box with the size of the selected lithography object is superimposed on top of the surface map When selecting the center of the box with a mouse the corresponding object can be moved around the scan area to reposition it The new object location X Pos and Y Pos is however only transferred to the objects properties as displayed in the Lithography Objects list and graphically shown in the Lithography Preview area when double clicking the box after repositioning Otherwise any changes made are not implemented While a lithography sequence is running the box disappears and the progress of the drawing process will be displayed live using superimposed black lines see image above After a lithography sequence has been completed the black lines will remain visible until a new lithography sequence is started 183 CHAPTER 17 LITHOGRAPHY 184 CHAPTER 18 Viewing measurements 186 CHAPTER 18 Viewing measurements Charts and
17. The apparent quality factor of the cantilever in air The quality factor of a resonance peak is a measure of peak width The higher the number the sharper the peak By default this number is 500 in air corresponding to a sharp peak The quality factor is used for calculation of the automatic resonance frequency search range Section 13 1 4 Dynamic Force mode page 118 Resonance frequency liquid The nominal resonance frequency of the cantilever type in liquid may vary depending on buffer composition but defaults roughly correspond to the cantilever behavior in water This frequency is used for calculation of the automatic resonance frequency search range Section 13 1 4 Dynamic Force mode page 118 131 132 CHAPTER 13 HARDWARE RELATED SETTINGS Q factor air The apparent quality factor of the cantilever in liquid The quality factor of a resonance peak is a measure of peak width The higher the number the sharper the peak By default this number is 5 in liquid corresponding to a wide peak The quality factor is used for calculation of the automatic resonance frequency search range Section 13 1 4 Dynamic Force mode page 118 The Scan Head configuration is used to store all calibration values specific to a certain Scan Head The configuration of each Scan Head is stored in a file with the extension hed This file is copied from the software installation CD on installation of the instrument When you change the Sca
18. Z Pos 166 6nm Length 1 447um Delta2 118 4nm Width 1 023um Height 1 024um 4 xe 10 41m The two points are defined by drawing a double arrow The first point is defined by the mouse cursor position where the left mouse button is clicked the second point by the position where the button is released When the mouse is not moved between clicking and releasing an arrow parallel to the X axis is drawn The direction of the arrow can be adjusted by dragging its end markers it can be moved by dragging the center marker The Tool status section of the Tool Results panel displays the calculated Length DeltaZ Width and Height The Data Info Panel of the measurement document stores these results as long as the tool is active For more information on the data in the Tool status section see The Tool status section page 197 199 200 CHAPTER 19 QUICK EVALUATION TOOLS Ti Measure Distance Calculates the distance between two parallel lines Topography Scan forward 60pm Tool Results Panel Cursor position Mean fit 166nm X Pos 29 77 um Y Pos 16 17 pm Z Pos 42 73nm Tool status Distance 10 49pm Topography range The parallel lines are defined by drawing them in the chart The first point of the first line is defined by the mouse cursor position where the left mouse button is clicked the second point by the position where the button is released
19. as a consequence the Probe Status light will blink green Instead the scanner scans along a straight line that should be parallel to the surface The slope of the line is defined by the X and Y Slope parameters in the Imaging Options section of the Imaging Panel These parameters should be set as described in Section 5 3 Adjusting the measurement plane page 57 The height of the line is determined at the start of each scan line First the Z Controller is turned on Once the tip position is stable the Z Controller is turned off and the tip is moved away from the sample by the distance set by the parameter Rel Tip Pos The Constant Height Imaging mode is mainly useful for EFM and MFM measurements For more information on how to do Magnetic Force Microscopy refer to technical note TN00031 Magnetic Force Microscopy which can be downloaded from the support section of the Nanosurf web site at www nanosurf com Rel Tip Pos The distance by which the Tip is moved towards the sample from the position that corresponds to the set point A negative setting will move the tip away from the sample Run Button Starts the currently loaded script If there is an error in the script a dialog box will appear 155 156 CHAPTER 15 IMAGING CHAPTER 16 Spectroscopy 158 CHAPTER 16 Spectroscopy E a xj W Spectroscopy window Start gt Point Line ta Photo ESpectroscopy Panel _ Topography Scan forward Deflec
20. measurement are the same as those for the Dynamic Force measurement 13 1 7 Spreading Resistance mode The operating mode panel for the Spreading Resistance mode is the same as that for Static Force operating mode THE OPERATING MODE PANEL 13 1 8 The Vibration Frequency Determination dialog Vibration Frequency Determination Amplitude Frequency sweep Photo Auto set Zoom g Sweep D 3 Full gt E 8 Ze 168kHz Frequency 170kHz Vibration frequency Status e 5j Sensor Amplitude 201mV Free vibration amplitude Excitation Amplitude 225mV 200mV E Config oK Cancel The Vibration Frequency Determination dialog is opened by clicking the vibration frequency Set button in the Mode Properties section of the Operating Mode Panel see Section 13 1 4 Dynamic Force mode page 118 and provides several ways to find and change the vibration frequency in any of the dynamic measurement modes When first opened an automatic frequency peak search is conducted using the parameters that are defined on basis of the cantilever type that is currently selected This automatic frequency peak search consists of two frequency sweeps one coarse and one fine sweep The results of the frequency sweeps are displayed sequentially inside the graphical area of the Vibration Frequency Determination dialog The vibration frequency that is selected is indicated by a vertical dashed line in the sweep chart A horiz
21. methods of the microscope can be practised 139 140 CHAPTER 13 HARDWARE RELATED SETTINGS About X Nanosurf Easyscan 2 Software Version v1 2 10 1 Electronics serial no 023 05 003 Firmware version 1 2 10 1 Installed Modules Name Version AFM Basic Module 1 AFM Dynamic Module 1 AFM Extension Module 1 Video Module Not installed Signal Module Not installed Nanosurf Report 4 Scripting Interface Not installed Copyright C 2005 by Nanosurf AG Grammetstr 14 4410 Liestal Switzerland E mail info nanosurf com Web www nanosurf com The About dialog displays information that may be useful for diagnostics when you have problems with your instrument To open the About dialog Select the menu entry gt gt About The about dialog contains the following information e The version number of the control software The serial number of the controller when the microscope simulation is active the serial number 000 00 000 is displayed The version number of the firmware that is running on the controller The version number of the built in modules Contact information for getting more support CHAPTER 14 Positioning 142 CHAPTER 14 Positioning ver Positioning window ex z iaren The Positioning window contains all the software tools for po
22. will have to prepare and install a new tip again green The approach has finished successfully the Z scanner is within the measuring range To prepare for the approach process Click in the Navigator The positioning window now opens APPROACHING THE SAMPLETO THE TIP in the Approach panel to bring the approach motor on the front most leveling screw of the FlexAFM scan head in its upper position This will ensure that the maximum motorized approach range is available during automatic final approach During the approach steps described in the following sections use the side view of the cantilever to judge the distance between tip and the sample surface Click gt side view in the Video panel of the Positioning window If the FlexAFM Video Module is installed click gt Side view in the Video panel of the Positioning window If you do not have the Video Module use the side view lens of the scan head to observe the sample instead Even if you do not have the Video Module you can still use the Top and Side view switches to quickly change the illumination to a predetermined level 4 3 1 Manual coarse approach In this step the sample surface is brought close enough to the tip by hand to allow further motorized approach afterwards To perform a manual coarse approach O Push the sample holder carefully to within 1 mm distance of the tip Figure 4 1 Manual Coarse
23. CONTR x Operating mode Static Force x Mounted cantilever Easy Standard Advanced The mounted cantilever type The mounted cantilever type is used to automatically determine the search range in the dynamic operating modes and to determine the correct calibration for the force set point in the static operating modes Operating mode Fasy Standard Advanced Changes the operating mode User Input Output Standard Advanced Enable User Input1 2 User Input Output O Enable Input 1 Config C Enable Input 2 Config User Output 1 ov E Contig User Output 2 ov E Contig When active the data from the User input Section 11 2 The Signal Modules page 97 is measured and stored Enabling the user inputs significantly increases the measurement file size THE OPERATING MODE PANEL User Output 1 2 The output value of the user output Config Opens the User Signal Editor dialog 13 1 3 The User Signal Editor User Signal Editor Signal Name User signal Unit Y Calibration 10 signal corresponds to 10V Sj 10 signal corresponds to 10V ha The User Signal Editor dialog is used for editing the calibration of the User Input Output signals It can be reached through the User Input Output section of the Operating Mode Panel The settings made in this dialog are stored in the Scan Head calibration file Signal Name The name of the user
24. Output Mode Allows configuration of the output that can be used to synchronize external equipment with the easyScan 2 controller Different settings can be applied to Imaging and Spectroscopy modes These features can also be controlled through the scripting interface For more information refer to the Script Programmers Manual topic Object Reference gt gt Class Scan gt gt SyncOutMode and Object Reference gt gt Class Spec gt gt SyncOutMode THE EDIT ACCESS CODES DIALOG Attention To change access codes you need windows administrator rights Available options Name Key Status Scripting FERRER not valid Lithography fff not valid Edit key for selected option Cancel The Edit Access Codes Dialog is used to enter the access code for software modules such as the Scripting Interface and the Lithography Option The dialog is accessed via the menu entry Options gt gt Config Access Codes Check or uncheck the menu item Options gt gt Simulate Microscope to enter or exit the simulation mode Once the simulation mode is active the first field in the status bar of the easyScan 2 software displays the text Simulation otherwise this field displays the text Online In the simulation many functions of the microscope are performed on a mathematically generated surface Thus the software functionality and working
25. Scantime 2 0 end if h Cint remaintime 60 0 60 0 0 5 m Clnt remaintime h 60 60 60 0 0 5 IP j Figure 21 1 The script editor Editor field In the editor field in the center of the dialog you can edit scripts 219 220 CHAPTER 21 AUTOMATING MEASUREMENT TASKS Run Button Starts the currently loaded script If there is an error in the script a dialog box will appear The Script Configuration Dialog allows you to set the search path for the scripts that are displayed in the Script menu The dialog is accessed via the menu entry Options gt gt Config script Script menu Display script files in the following directory Program FilesiNanosurfiNanosurf Mobile S Seripts Quick reference Quick reference Control Panels Approach Data Info Imaging Lithography ccceeeseeceeeeeeees Operating Mode ceeeeeeeeeeee Spectroscopy Tool Results ss eeeeeeceeeeeeeees Dialogs About Cantilever Browser eeseeeeee Chart Properties Color Palette ooccccononnccncnnocnonones Controller Configuration Edit Access Codes Layer Editor cocina Object Editor Pixel Graphic Import Report Generator Configuration Scan Axis Correction Scan Head Calibration Scan Head Selector Script Configuration Script Editor Signal Module Configuration User Interface 20 0 eeeeeeeceeeeees User Signal Editor ceeeeeeeee Vector Graphi
26. The 41 42 CHAPTER 4 FIRST MEASUREMENTS entered value is discarded upon pressing the Esc key The unit prefix can be changed by typing one of the following keyboard keys f femto space bar no prefix p pico k kilo n nano M shift m mega u micro G shift g giga m milli T shift t tera Examples if the basic unit is Volts type m to change to millivolts type 9 the space bar for volts type u for microvolts Sometimes the program will change an entered parameter value to a slightly different value This happens when the desired value is outside the digitization range of the easyScan 2 Controller for example due to resolution or timing limits In such cases the desired value is automatically changed to the nearest possible value To start measuring the sample must be very close to the tip to enable a tunneling current to flow Approaching the sample without touching the tip is a delicate operation carried out in three steps Manual coarse approach Manual approach using the approach motor and the Automatic final approach The color of the Status light on the controller shows the current status of the approach orange yellow Normal state during approach the Z scanner is fully extended toward the sample red The approach has gone too far the tip was driven into the sample and the Z scanner is fully retracted from the sample In this case the tip is probably damaged and you
27. The voltages are available on the same type of three pole Signal name THE SIGNAL MODULES Function X Axis X Position command of the Scanner Is affected by Image X Pos and the Imaging Area Rotation Y Axis Y Position command of the Scanner Is affected by Image X Pos and the Imaging Area Rotation Z Axis Z Position command of the Scanner Is affected by the Z Controller output Ref Z Plane X and Y Slope Tip Voltage The voltage applied to the tip Approach The voltage ramp that drives the approach motor Excitation No signal for AFM only Deflection The tip current see below Amplitude No signal for AFM only Phase No signal for AFM only Table 11 1 Monitor signals Signal name Sync Function An output that can be used to synchronize external equipment with the easyScan 2 controller This feature can be controlled with the scripting interface For more information refer to the Script Programmers Manual topic Object Reference gt gt Class Scan gt gt SyncOutMode and Object Reference gt gt Class Spec gt gt SyncOutMode User 1 Output An analog output that can be used to drive external instruments using the controller The User output can be used for special spectroscopy measurements User 2 Output An analog output that can be used to drive external instruments using the controller The User output can be us
28. above panels and dialogs are discussed in this chapter The operating mode panel allows you to select the operating mode that you wish to use and to set up several operating mode related parameters The operating mode determines which signals are measured and which signal is used to control the Z position To open the Operating mode panel click E in the navigator The number of available modes depends on the Scan head and on the modules built into the easyScan 2 controller The modules required to be able to use a certain operating mode are listed in Table 13 1 Operating modes and required modules The modes can be divided into the static operating modes that control the Z position using the Cantilever deflection the dynamic operating modes that control the Z position using the vibration amplitude and the STM mode that controls the Z position using the tunnelling current Operating mode Required modules STM STM scan head Static force AFM Basic Dynamic force AFM Basic AFM Dynamic Phase contrast AFM Basic AFM Dynamic AFM Mode Extension Force Modulation AFM Basic AFM Dynamic AFM Mode Extension Spreading Resistance AFM Basic AFM Mode Extension Table 13 1 Operating modes and required modules The signals measured with each of the operating modes are listed in Table 13 2 Operating modes and signals measured Note that the names of the signals can be changed in the Scan Head Calibration dialog T
29. already have been damaged Click withdraw in the Approach Panel If the light is still red after withdrawing prepare a new tip Section 3 2 Preparing and installing the STM tip page 30 Cl ick Approach XY Drift The scanner may have drifted close to a deformity in the sample s surface Try to find a different measurement position Increase the scan range O Zoom into a flat area Tip modification The tip may have picked up some particles or other material from the sample surface In this case follow the instructions given in Chapter 5 Improving measurement quality page 56 83 84 CHAPTER 9 PROBLEMS AND SOLUTIONS 9 3 1 Self help The fastest way to solve a problem is often to solve it yourself If the previously suggested actions did not help or the problem is not described here refer to the Nanosurf support pages O Open www nanosurf com O Click on Support O Enter the combination of serial number and the password that you received on registering O Select the easyScan 2 link O Ifthe problem is software related try to upgrade to the latest version and or read the What s new file to see if the problem was solved For the solution to other problems refer to the Frequently Asked Questions FAQ If your instrument has not been registered yet you will first have to register to receive a password 9 3 2 Assistance If the standard solutions
30. are transferred to measurement documents and displayed in new windows Amplitude Frequency sweep Amplitude Frequency sweep 358m 37Om Rawdata Rawdata Amplitude range A 53 153pV 133kHz EE 247kHz 168kHz RENEE 171kHz Figure 13 2 Cantilever resonance curve left coarse search right fine tuning search 119 120 CHAPTER 13 HARDWARE RELATED SETTINGS 13 1 5 Phase Contrast mode In addition to the parameters in the Dynamic Force operating mode the Reference Phase is available in the Standard and Advanced user interface modes Reference Phase Standard Advanced The reference phase for the detected cantilever vibration Changing the reference phase changes the offset of the phase signal The phase reference can be automatically set so that the phase signal is zero When Auto set is enabled the phase reference is automatically set after finishing the approach Clicking Tse starts the automatic setting immediately 13 1 6 Force Modulation mode In addition to the parameters in the Static Force operating mode two additional parameters are available Excitation amplitude The amplitude of the sensor excitation during a force modulation mode measurement Excitation frequency The frequency of the sensor excitation during a force modulation mode measurement Clicking se starts a measurement of the cantilever resonance curve that helps you to select the excitation frequency The settings for this
31. arrow can be adjusted by dragging its end markers it can be moved by dragging the center marker Mean fit 161nm Double clicking the graph or clicking the Cut out line button in the Tool Results panel creates a new measurement document that contains the line section The Tool chart section of the Tool Results panel displays preview chart of the selected line THE TOOLS BAR The Tool status section of the Tool Results panel displays the calculated Length and DeltaZ of the selected line For more information on the Tool status section see The Tool status section page 197 Cut Out Area Creates a new measurement document containing a subsection of an existing measurement Topography Scan forward Tool Results Panel x Cursor position E Mean ft 161nm X Pos 94 47 um Y Pos 138 5um Z Pos Opm Tool status ES Size 10 55um Cut out area One corner of the area is defined by the mouse cursor position where the left mouse button is clicked the opposite corner by the position where the button is released When the mouse is not moved between clicking and releasing an area is defined that has a size of 33 of the current measurement and is centered on the clicked location Once an area is defined it can be resized by dragging one of its corners and moved to the desired position by dragging its center point Pressing Shift key whil
32. axis is drawn After releasing the mouse button the end of the second line sticks to the mouse pointer The end is released by clicking its desired position The angle can be changed by dragging the line end point markers or the corner mark it can be moved by dragging the line center markers The Tool status section of the Tool Results panel displays the calculated angle The angle value only depends on the cursor positions it does not on depend the displayed data values The Data Info Panel of the measurement document stores the angle as long as the tool is active For more information on the Tool status section see The Tool status section page 197 201 202 CHAPTER 19 QUICK EVALUATION TOOLS t Create Cross Section Creates a new measurement document containing a line cross section of a Color map or Line View display Tool Results Panel x Cursor position O x Pos 703 3nm Y Pos 29 99pm Z Pos 40 89nm Topography Scan forward Tool status ES Length 42 75um DeltaZ 7 324nm Cut out line Tool chart ES The line is defined by drawing an arrow The arrow points toward the forward direction of the line The start of the arrow is defined by the mouse cursor position where the left mouse button is clicked the end of the arrow by the position where the button is released When the mouse is not moved between clicking and releasing an arrow ending in the center of the measurement is drawn The direction of the
33. determines the drawing speed during lithography Tip voltage determines the voltage set to the tip during oxidative Lithography 178 THE LITHOGRAPHY PANEL STM parameters Used to set the tunneling current Set point of the Z Controller during STM Lithography Static Force parameters Used to set the set point of a lithography sequence performed in Static Mode Dynamic Force parameters Used to set the Set point and Free vibration amplitude of a lithography sequence performed in Dynamic Mode Default The button Default may be pressed to recall the default lithography parameter values listed in Table 17 1 Default lithography parameter values below Section Parameter Default Value Ti d 4 um Common parameters ue ee Tip voltage 1V STM parameters Set point 10 nA Static Force parameters Set point 20 uN S i 209 Dynamic Force parameters se 7 sa Free vibration amplitude 1 V Table 17 1 Default lithography parameter values Lithography Objects Easy Standard Advanced Lithography Objects ES Object Width Height Pos Y Pos Y NSFLOGO 22 93m 4 34pm Opm Opm 179 180 CHAPTER 17 LITHOGRAPHY Object list Easy Standard Advanced List of all available objects Objects may be selected or deselected by checking or unchecking the checkbox If the object is unchecked it will not be used for a lithography session Edit Easy Standard Advanced Edit will open the Object E
34. driver page 25 to let Windows search for the necessary drivers on this CD INSTALLING THE HARDWARE When this process has finished disconnect the USB cable from the computer finish the remaining steps below and then go through the Software Installation procedure as described in Section 2 2 Installing the easyScan 2 Software page 22 Connect the easyScan 2 Controller to the mains power using the Mains Cable Figure 1 1 Components page 13 item 5 but do not turn on the controller yet Figure 2 1 Measurement setup Complete easyScan 2 STM system 2 1 2 Installing the Signal Module S To install the Signal Module S O Connect the Break out cable Figure 1 1 Components page 13 item 11 to the Signal Out connector on the Controller Figure 1 4 The easyScan 2 controller page 17 In case of an upgrade the Controller must be sent in to your local Nanosurf distributor for installing the Signal Module S electronics inside the Controller 2 1 3 Installing the Signal Module A and its Connector Box To install the Signal Module A O Connect one Signal Module cable Figure 1 1 Components page 13 item 13 to the Signal Out connector on the Controller and to the Output connector on the Signal Module A 21 22 CHAPTER 2 INSTALLING THE EASYSCAN 2 STM O Connect the other Signal Module cable to the Signal In connector on the Controller and to the Input connector on the Signal Module A In case of an upgrade
35. or multi color grayscale pixel graphics files BMP DIB GIF TIFE PNG JPEG A separate CAD program LayoutEditor http layout sourceforge net is included with the Nanosurf software to produce vector graphics files suitable for import Pixel graphics files can be created or edited in any pixel based image editor After import of a vector or pixel graphics file the pattern is referred to as a Lithography object in the Lithography window IMPORTANT e In the case of vector based objects multiple lithography objects may be present e g through sequential import and used for lithography In the case of pixel based objects only one pixel based object can be present at any given time other objects will be deleted upon import e As an alternative to designing the lithography pattern in a vector or pixel graphics file and then importing it into the lithography software a freehand drawing mode is available in the Lithography window 4 The imported object is positioned and scaled to fit the target area 5 The Lithography sequence is executed IMPORTANT As an alternative to step 3 5 a direct tip manipulation mode is available in the Lithography window 6 The sample surface is re imaged to view the Lithography results THE LITHOGRAPHY BAR For more details on the lithography process options and settings please read all of the following sections su 5 stat starts a lithography sequence and then changes
36. panel until the X axis of the scan line lies parallel to the X axis of the sample O Set Rotation to 90 to scan along the Y direction of the scanner O Ifthe scan line is not horizontal alter the value for Y slope until the Y axis of the scan lies parallel to the Y axis of the sample O Reset Rotation to 0 The Line graph shows the X slope again When all prerequisites for measurement are optimal the measurement quality mainly depends on the quality of the tip and of the tunneling contact A sharp tip and a good tunneling contact are necessary for high quality images of atomic resolution If during a good measurement the image quality diminished dramatically the tip has most probably picked up some particles or you are near a step in the surface Topography Scan forward Line ft 91 6pm Onm JUDGING TIP AND TUNNELING CONTACT QUALITY In this case Continue measuring for a while 4 5 images The tip may eventually lose the picked up material again If this does not help try to induce changes at the tip s end using one of the following procedures e While measuring increase the gap voltage in the Feedback Panel to 2 V and then reduce it to the old value again e Increase the tunneling current to 20 nA for a short period of time and then reduce it to its old value again e Retract the sample and then perform a new approach If no improvement can be seen after going th
37. resized to see all charts Em Delete Current Chart Removes the currently active chart 187 188 CHAPTER 18 VIEWING MEASUREMENTS El Chart type Topography Scan forward Topography Scan forward Topography Scan forward Rawdata 215nm Rawdata 215nm Rawdata 215nm Y vioi X 101um Topography Scan forward Topography Scan forward Topography range La E 5 E da E qe x TS 361nm 361nm Rawdeta Topography range Rawdata Topography range 147nm 1470m Opm x 101pm Opm x 10pm Figure 18 2 Chart types Data represented using different chart types The following chart types are available Line graph data is displayed as a plot Points outside the range of the scanner are displayed in red The displayed line is selected by dragging the Line selection arrow in a Color map or Shaded map chart Figure 18 1 Elements of a Chart page 186 Color map data is encoded in a color scale 3D view data is shown as a 3 dimensional representation in a parallel perspective see Section 18 2 2 Changing the appearance of the 3D view page 191 Shaded map creates an impression of the surface with lighting from the left This is achieved by combining the topography with its derivative Dual line graph both the Forward and the Backward data when available are displayed as in the Line graph The line of the data type s
38. small header at the beginning of the first data line contains the names of the channel and frame as well as X Y and Z ranges with their physical units Comma separated z values csv This format stores all the measured data in a chart as a matrix of floating point numbers in ASCII format separated by a comma and SPACE character This enables easy data exchange with commonly used spread sheet and database applications X Y Z Points csv This format stores the coordinates of all measured points in a chart as a list of floating point number pairs For Line graphs only X and Z points are exported 213 214 CHAPTER 20 STORING AND PROCESSING DATA amp Print Print preview Prints the currently selected measurement document together with the values shown in the Data Info panel YR Nanosurf Easyscan 2 overview nid Cu FSP Nek Page PrevPags Two Page Zoomin ZoomOu Close Nanosurf Image Document Fle CADocumerts and SetingsWanosurtWy Doouments MaruatMotile ande easyScer2 CommonimagestSouelA First Measuremertioveriov Topography Scan foward Topography Scan forward s i E 5 4 um y 60pm Parameter 17 11 19 Mobile S Phase Contrast NOLR 19 04 002hed fe Page 1 Sman Defeuk_E22 STM Default Ez25Tm 19 06 001 hed _ AdvancedLevel_ The Nanosurf Report software package offers a powerful and exten
39. standard user interface mode the number of Lines is always equal to the number of Points Line Time Line Easy Standard Advanced The time needed to acquire a data line The time needed for the entire image is approximately Image time Time Line Lines Frame 2 Rotation Easy Standard Advanced The angle between the X direction of the scanner and the X direction of the measurement Figure 15 2 Coordinate systems Imaging Options Standard Advanced Imaging Options ES XSlope 0 E Y Slope 0 E Image X Pos Om E Image Y Pos Om E Overscan 0 El Ref Z Plane Om G The reference plane for the image can be aligned to the surface of the sample using the slope parameters Figure 15 2 Coordinate systems X Slope Standard Advanced A positive value rotates the image plane around the Y axis counterclockwise Y Slope Standard Advanced A positive value rotates the image plane around the X axis counter clockwise The center position of the measured area can be changed by typing its position as well as by using the Move tool in the imaging bar The zero position is the center position of the scanner 153 154 CHAPTER 15 IMAGING Image X Pos Y Pos Advanced The center position of the measured area Overscan Standard Advanced The amount by which the scan range of each line is made larger than the measurement range relative to the image width Thus edge effects caused by the rever
40. the licensed Lithography Option Lithography is performed in the Lithography window This window can either be opened by clicking E in the navigator or by clicking atthe in the Imaging bar When the Lithography window is activated from the Imaging bar the currently measured image is transferred to the Spectroscopy window The Lithography window contains the Lithography bar with commands that control lithography related processes and the Spectroscopy panel with parameters that determine how the lithography is performed By default the Lithography window also contains the Lithography Preview panel see Section 17 4 The Lithography Preview panel page 182 and a Color map of the current Topography measurement The Lithography window can however display more charts should this be desirable For more information on adding and changing charts see Chapter 18 Viewing measurements page 185 167 CHAPTER 17 LITHOGRAPHY A typical lithography process is performed as follows 1 The sample surface is imaged to identify an area that is suitable for transfer of a pattern Suitable areas should preferentially be flat and dust free 2 The Lithography window is opened by clicking alto in the Imaging bar of the Imaging window see Chapter 15 The Imaging bar for details 3 A pattern that was previously designed is imported Suitable sources for patterns can either be multi layered vector graphics files GDS II DXF CIF OAS OASIS
41. to until the lithography sequence is finished Clicking aborts the sequence cu wstop mup starts a single measurement and then changes to gstop until a full image has been scanned Clicking stop aborts the measurement With mue the image is scanned from the bottom to top If a measurement has been started using mup the measurement stops automatically after one full image IMPORTANT When performing imaging from within the Lithography window be sure to set valid imaging parameters in the Imaging and Z Controller panels Y Manipulate Starts the manual manipulation mode It is now possible to control the movement of the tip by moving the mouse around the topography color map When the left mouse button is held down Lithography will be performed with the lithography operating mode set in Lithography panel and with the parameters set in Layer 0 the Tip speed setting is ignored When the left mouse button is released the tip will go to the inactive pen mode set in the Lithography panel and will not move until the left mouse button is pressed again Dragging the mouse slowly will produce smoother lines than dragging it fast Draw Starts the manual drawing mode A shape can now be drawn in the topography color map by clicking and holding the left mouse button A shape can only consist of a single line Repeating the above will erase the previous drawing Double clicking the drawing will save it to the Lithography Object list 169
42. windows menu Start gt gt Settings gt gt Control Panel The control panel now opens O Click Switch to classic view if you do not see an icon called System Double click the System icon The System properties dialog now opens O Select the tab Hardware O Click the Device Manager button The device manager now opens When the device manager opens and your controller is connected to your computer you may see the drivers shown in Figure 9 1 Device manager information may vary depending on the configuration of your system e Generic USB Hub all systems e USB Serial converter USB Serial port all systems 79 CHAPTER 9 PROBLEMS AND SOLUTIONS File Action View Help e se g ZA NANOSURF 2 Computer 49 Disk drives 2 Display adapters D DYD CD ROM drives y Human Interface Devices 43 HID compliant device Nanosurf Analysis SPIP dongle 43 USB Human Interface Device 43 USB Human Interface Device 43 USB Human Interface Device 2 IDE ATAJATAPI controllers 3 Imaging devices Framemaker grabber driver gt Keyboards for Video Module v1 5 Mice and other pointing devices 3 Monitors BB Network adapters Y Ports COM amp LPT USB to Serial converter part 1 Processors O Sound video and game controllers Audio Codecs Legacy Audio Drivers O Legacy Video Capture Devices O Media Control Devices SigmaTel High Definition Audio CODEC O USB 2821 Dev
43. yellow in cycles see The Probe Status light page 16 When the approach has finished successfully the probe status light changes from a blinking state to a constant green and the message box Approach done appears e Click the OK button If the status light changes to red instead of green or if the approach has not finished after 10 20 seconds try to decrease the tip sample distance a little more using manual operation of the approach motor If the automatic final approach never works refer to Chapter 9 STM measurement problems page 81 for the next steps to take Now that the tunneling current defined by Set point is flowing between tip and sample you can start measuring To start and view the measurement Click al to open the Imaging window By default the instrument is set to automatically start measuring after the automatic approach If the preparation of tip and sample and the approach were successful images of the measurement will show a more or less straight line in the Line graph Figure 4 3 Starting image eft and a plane in the Color map Watch the displays for a while until the Color map image has been drawn about three times Topography Scan forward Topography Scan forward 100nm Topography range Rawdeta Topography range 100nm Onm xt Onm Figure 4 3 Starting image left a good Line graph right a nervous Line graph ACHIEVING ATOMIC RESOLUTIO
44. 00nm Drive resolution Z2 3 pm 3 pm 3 pm 3 pm Drive resolution XY 7 6 pm 15 pm 7 6 pm 15 pm Current set point 0 1 100 nA in 25 pA steps 0 02 20 nA in 5 pA steps 1 These are typical values the exact values are given on the calibration certificate that is delivered with the instrument 2 Calculated by dividing the maximum range by 16 bits atomic resolution on HOPG can be obtained with all STMs 11 1 3 Operating modes Constant Current Topography Constant Imaging modes Height Current Spectroscopy modes Current Voltage Current Distance Tip voltage 10 V in 5 mV steps tip sample approach Stick slip piezo motor Sample size max 10 mm diameter The Signal Modules consist of electronic modules that are built into the easyScan 2 controller as well as of a Break Out Connector that is externally attached to the controller The Signal Modules can be used for monitoring signals Signal Module S and for adding functionality to the easyScan 2 system Signal Module A Signal Module A includes all the monitoring functions of 97 98 CHAPTER 11 TECHNICAL DATA Signal Module S For information on installing the Signal Modules refer to Section 2 1 Installing the hardware page 20 11 2 1 Signal Module S Signal Module S can be used for monitoring signals from the AFM with external instruments such as Volt meters oscilloscopes or spectrum analyzers The signals are available on nine BNC connectors that are label
45. 47 48 CHAPTER 4 FIRST MEASUREMENTS 4 4 Zooming If no flat region is available refer to Chapter 5 Improving measurement quality page 56 for further instructions O Change the size of the new scan range to about 30 50 nm by clicking and dragging a corner of the square with the mouse cursor Topography Scan forward Raw data 7 64nm Tool status xe Figure 4 4 Zooming left Square drawn in the Color map right New scan range as displayed in the Tool Results Panel O Double click the chart when the scan new area is set as you want it You can abort the zoom function by clicking with the right mouse button The imaging settings are now set in such a manner that the new measurement will correspond to the area that was indicated by the square O Let the Topography reproduce stably again To achieve atomic resolution the image size should be decreased even further considering that one nanometer is the diameter of between four and eight atoms Atomic arrangements can normally be recognized at an image size of about 4 nm Therefore O Set the Image size in the Imaging panel to 4 nm Some parts of the scan head react to the slightest temperature changes As these thermal movements influence the measurements on the nanometer scale the sample has to be scanned as fast as possible Set the Time Line in the Imaging Panel to 0 06s for atomic resolution ACHIEVING ATOMIC RESOLUTION You may also tr
46. Easy Standard Advanced The XY coordinates of the end point of the line in a tine spectroscopy measurement sequence The from and to coordinates are more conveniently chosen using the Pont or Une tools in the Spectroscopy bar 163 CHAPTER 16 SPECTROSCOPY 164 CHAPTER 17 Lithography CHAPTER 17 Lithography t Lithography window Joes Start Up Y Manipulate Draw Import vector Import bitmap ca Photo S Lithography Panel lt Lithography Preview Panel Lithography Operating Mode A Lithography preview Lithography operating mode Static Force Inactive pen mode Lift up tip Lithography Layers E Val Si VOS NANOM Layer Name Tipspeed Tip voltage Set point Mo W Layero Tums 1V 25uN M1 Eae 1um s 1v 25N p Eck E e 25m Load 3j Save Topography Scan forward Lithography Objects Object Width Height X Pos Y Pos v NSFLOGO 22 93m 4 34pm Opm Oum Line fit 76 6nm Topography range Import a vector graphic file Figure 17 2 Lithography window Lithography in the context of Scanning Probe Microscopy SPM is the process of modifying a sample surface with the goal of creating a pattern on that surface with the SPM tip Depending on the operating mode and operating parameters used during the Lithography process these modifications fall into two
47. First measurements In this chapter step by step instructions are given to operate the microscope and to perform simple measurements More detailed explanations of the software and of the system can be found elsewhere in this manual The easyScan 2 software can be started without having the microscope connected to your computer in order to explore the easyScan 2 system measurements and software without danger of damaging the instrument or the STM tip In simulation mode most functions of the real microscope are emulated The sample is replaced by a mathematical description of a surface When the easyScan 2 software is started without a microscope connected to your computer the following dialog appears Nanosurf Easyscan 2 AN USB Port error Port not found Check if USB cable is connected Click OR The status bar will now display the text Simulation You can also switch to the simulation mode with the microscope connected Select the menu entry Options gt gt Simulate Microscope A check mark will now be displayed in front of the menu entry To exit the Microscope simulation mode Select the menu entry Options gt gt Simulate Microscope again The check mark in front of the menu entry is now removed and the status bar will now display the text Online PREPARING THE INSTRUMENT Prepare the instrument as follows see Chapter 3 Preparing fo
48. HE OPERATING MODE PANEL Operating mode Signals measured STM Topography Tip Current User Inputs 1 2 Static force Topography Cantilever deflection User Inputs 1 2 Dynamic force Topography Vibration amplitude User Inputs 1 2 Topography Vibration amplitude Vibration phase Phase contrast User Inputs 1 2 Topography Cantilever deflection Vibration Foree modulanion amplitude User Inputs 1 2 Topography Cantilever deflection Tip current User Spreading Resistance Inputs 1 2 Table 13 2 Operating modes and signals measured The User Inputs are only available when they are enabled and the Signal Module A is installed 13 1 1 STM mode This mode is only available when an STM head is connected to the controller In this case it is the only available mode setting Operating mode Easy Standard Advanced Operating Mode ES Mounted cantilever Operating mode STM v Mounted cantilever Easy Standard Advanced Not available this input is only used for AFM modes Operating mode Fasy Standard Advanced STM mode by default User Input Output Standard Advanced See the description under Static Force mode 115 116 CHAPTER 13 HARDWARE RELATED SETTINGS 13 1 2 Static Force mode In the static force mode the Operating Mode and User Input sections are available Operating Mode Easy Standard Advanced Operating Mode ES Mounted cantilever
49. In the easyScan 2 STM a platinum iridium tip is moved in three dimensions using piezo crystal translators that are driven with sub nanometer precision The sample to be examined approaches the tip within a distance of 1 nanometer 1 nm 1 1 000 000 000 m Classical physics would prohibit the appearance of electrons in the small gap between a tip and a sample but if a sharp tip and a conducting surface are put under a low voltage U 0 1V a very small tunneling current I 1nA may nevertheless flow between tip and sample This tunneling current is due to a quantum physics effect Sample holder Backward scan _ _ _ _ _ P Forward scan The strength of the tunneling current depends exponentially on the distance between the tip and the sample usually referred to as Z distance This extreme dependence on the Z distance makes it possible to measure the tip sample movement very precisely One of the three piezo crystals the Z piezo can now be used in a feedback loop that keeps the tunneling current constant by appropriately changing the Z distance 89 90 CHAPTER 10 STM THEORY I const S Figure 10 1 Feedback loop The feedback loop maintains a constant tunneling current between the tip and the sample during motion in the X direction by changing the Z direction viewed from top To obtain an image of the sample the tip is scanned using the X and Y piezo crystals The feedback loop will now let the t
50. M theory 10 1 What is STM ccccccccccccssccccccccccscccccccccssscssccscesecsssscesseeeeees 88 10 2 Scanning with the easyScan 2 STM ccccscsccsssscccsssccceessssceeees 89 CHAPTER 11 Technical data 11 1 Specifications and features cssccccsscsccsssscccsssccceesscsessees 94 11 1 1 The easyScan 2 Controller oooccooonnccnnnccnnnnnonncnnnnnnnnnnos 94 11 1 2 The easyScan 2 STM Scan Heads ccsseecccseecceeeeeeeeeeees 97 11 1 3 Operating MOdES ccooccccnoncncnnnncnnnnnocnnnnoncnonononrnnnncnnnnnnnos 97 11 2 The Signal MOdules csssccccsssrcssssccssscccssrssccenssccesscsoesscssees 97 TLZ I Signal Module S sessssccccsnsswasecccsesccnsseccedstenwasevedasweosaseacces 98 11 2 22 Signal Module Accord hiddesanesveneas 98 11 2 3 Using the User Inputs and Outputs seeeceeeeeeeeeeees 101 CHAPTER 12 The control software user interface 12 1 The main WiINdOW ccccssccccssseccsssscccsssccccescecccscscecesscoees 104 12 2 Operating windowS c scssccccsscscsssscccssscccccsssccccscscecesscoees 105 12 3 Measurement document windows cscsccccssccccsscssccscscoees 106 12 4 Tool bars ccscccccsccccsccccsccccccccccsccccccsscccccccsccscecessccscosceseess 106 12 4 1 Arranging tool bars oooocccccnncnnncnonnnnnnoncnnnacrnnnonanonnnos 106 12 53 Control panels seiciconaconocinaninesaracianocinanonacinnacccanaca cosa naniovinacinds 107 12 5 1 Arranging contr
51. N A nervous line in the Line graph indicates a bad tunneling contact Figure 4 3 Starting image right Usually this is caused by the tip being too blunt or instable This means that you should stop measuring and cut a new tip Click and follow the instructions of the Chapter 9 Problems and solutions page 78 If the line in the Line graph is calm and reproduces consistently you can continue with the next section 4 5 1 General instructions Once the Topography in the Line graph is reproducing stably the scan range has to be decreased in order to observe atomic structures IMPORTANT Measurements on the micrometer nanometer scale are very sensitive to environment influences Direct light or fast movements causing air flow and temperature variations near the Scan Head can influence and disturb the measurement It is best to let a promising measurement run for some time in order to stabilize thermally To decrease the Imaging area O Click the Color map chart to make it active A gray square is now drawn around the Color map chart O Click Azoom The mouse pointer becomes a pen when moving over the selected chart and and the Tool Results Panel opens Move the mouse cursor to a flat region similar color in the Color map and click on it The software will now draw a square that indicates the new scan range The size of the new scan range is displayed in the Tool Results Panel see Figure
52. NT Changes to these settings should be performed with great care False settings can lead to false interpretation of the data and incorrect operation of the controller Scan Axis Maximum scan ranges X Y Z Axis Range The calibration values of each of the scanner axes The calibration values are given as the maximum motion range of the scanner when Overscan is set to 0 Set Opens the scan axis correction dialog see next section 133 134 CHAPTER 13 HARDWARE RELATED SETTINGS Scan Axis Axis Orthogonality The X and Y Axes of the scanner are generally not perfectly orthogonal and their orientation with respect to the AFM housing may vary The easyScan 2 software corrects these errors by adding subtracting some of the X scanner command signal to the Y scanner command signal and vice versa X Y Angle The angle between then the X and Y axis of the scanner hardware The software uses this value to correct the scan command signals such that the scan axes are orthogonal Rotation The angle between the X axis of the scanner and the X axis of the microscope body Figure 10 3 Scanner coordinate system page 99 The software uses this value to correct the scan command signals in such a way that the scan axis is parallel to the X axis of the microscope body 1 0 Signals Maximum input signal values Deflection The calibration of the cantilever deflection signal Amplitude The calibration value of the cantilever v
53. REMENTS Figure 4 6 The graphite surface left Measurement right Lattice model This also causes the lattice constant between the bright hills to have the higher than normal value of 0 25 nm 4 5 3 Measuring Gold It is more difficult to obtain good images of gold Atomic structures are difficult to observe because the electrons on the surface are much more homogeneously distributed than in graphite But with some training the mono atomic gold steps can be observed Topography Scan forward Topography Scan forward 215nm 2 07nm line fit 1 35nm Mean fit 2 07nm Onm xt 215nm Topography range Onm Onm xe Since the gold sample cannot be cleaned by simple means it is possible that over time contaminants may prevent you from obtaining good results If you have STORING THE MEASUREMENT problems measuring the gold sample because of this issue please order a replacement from your local Nanosurf distributor Before performing any experiments with the gold sample it is necessary to practise on the graphite sample The graphite sample is also a good test sample to judge the quality of the installed STM tip To perform measurements on gold Proceed as describe for the graphite sample but with the following changes to the settings e Set the Tip voltage in the Z Controller panel to 0 5 V e Set the Time Line in the Imaging Panel to 0 3 s If you do not get stably reproduced sc
54. SB Connection Microscope Controller virtual serial port number COM3 Video signal Video driver name USB Video Adapter Video Capture Driver Properties Video Format Microscope Firmware Current software version v1 0 0 1 The Controller configuration dialog is opened via the menu Options gt gt Config Controller On a correctly configured system it should not be necessary to change the settings in this dialog except for the start up parameters and chart arrangement file configuration Start configuration The parameter and chart arrangement files that are loaded when the software starts Section 12 5 4 Storing and retrieving measurement parameters page 110 USB Connection The easyScan 2 controller uses a virtual serial port that is connected to the USB port The number of this virtual serial port should be the same as the one shown in your the windows device manager dialog THE SIGNAL MODULE CONFIGURATION DIALOG Video Signal Allows configuration of the internal video capture device of the easyScan 2 controller The default configuration should normally not be changed This feature is only available when the video camera is installed Microscope Firmware Click the Update button to install firmware updates that you receive from Nanosurf support Signal module configuration E Tip signal mode O Voltage source output O Direct feedtrough with Tip Voltage
55. Sa 1 N 1 N lax The Valley depth S S lowest value THE TOOLS BAR The Mean Value Sm The Root Mean Square S Sm F a x s Et m 2 x al atx ee ak Can BO The Peak Height S The Peak Valley Height S Sp highest value Sy Sp Sy The roughness values depend on the Data filter that is applied to the chart because they values are calculated from the filtered data More information on data filters is provided in Section 18 2 The Chart bar under Data filter page 189 Clicking the Store button in the Tool result section stores the roughness values in the Data Info Panel of the measurement document R Calculate Area Roughness Calculates several roughness parameters from the data points in a selected area Tool Results Panel x Cursor position 2 X Pos 9 621um Y Pos 23 34um Z Pos Oum Tool status ES Width 1 841um Oum Topography Scan Forward xt Height 1 875um Tool result ES Na Value Area 3 628pm 2 Sa 6 5nm Sq 8 2nm Sy 51nm Sp 20nm Sv 31nm 0 12nm Parabola fit 66 2nm Topography range wo 3 The area is selected in the same way as with the Cut out Area tool 205 206 CHAPTER 19 QUICK EVALUATION TOOLS The Tool status section of the Tool Results panel displays the calculated Size or Width and Height of the selected area For more information on the Tool status section see
56. Serial Port e USB Device Video Module e USB 2821 Device e USB EMP Audio Device On some computers the detection process can take quite some time 20 seconds or more Please be patient After successful automatic installation INSTALLING THE EASYSCAN 2 SOFTWARE the popup balloon indicates that the installation has finished and that the devices are now ready for use With some older controllers manual installation of the Video Adapter driver will be required This is indicated by the appearance of the Found new Hardware window during hardware recognition The procedure to install the driver manually differs slightly between Windows 2000 XP and Windows Vista and is detailed in Section 2 2 4 Manual installation of the USB Video Adapter driver On controllers where manual installation of the USB Video Adapter driver is required Hardware recognition and Manual installation of the USB Video Adapter driver should be repeated for each USB port in the computer It is recommended to do this now while you are logged on with Administrator privileges This completes the hardware recognition process and the entire setup process If you wish to use the Lithography features of the easyScan 2 software and want to design your own vector graphics for import into the lithography module you can opt to install the LayoutEditor software by clicking the Install CAD Program button in the CD Menu program This will launch the LayoutEditor installat
57. Stat vale 10V Z End value 10V E O Relative to current values Modulation time 1 s E C Keep Z Controller active Modulated output Easy Standard Advanced The number of available modulated outputs depends on the scan head and the number of installed modules Possible values are Z Axis Tip Potential and the names of the User Outputs Start value End value Easy Standard Advanced The range over which the Modulated output is changed The Spec Forward data is measured from the Start to the End value the Spec backward data is measured in the opposite direction The Spec forward data is always measured before the Spec backward data THE SPECTROSCOPY PANEL Relative to current value Standard Advanced When active the Start and the End values are added to the value the modulated output had before starting the modulation When the Tip Potential is modulated the current value is the Tip voltage set in the Z Controller panel When the Z Axis is modulated the current value is the sample surface height as measured using the Z Controller output Otherwise the measurement Z position is given by the value of the Ref Z Plane in the Imaging Panel Modulation time Easy Standard Advanced The time used to change the Modulated output from the Start to the End value Keep Z Controller active Advanced The Z Controller will continue to change the Z position so as to keep the tip samp
58. Static Force Set point e Dynamic Force Set point e Dynamic Force Amplitude Black White Used to enter the parameter values for black and white pixel values which form the basis for the interpolation of the in between color grayscale pixel values Example Setting the automatically adjusted Lithography parameter to Static Force Set point and Black layer 0 and White layer 3 to 25 uN and 10 pN respectively will result in e Layer 0 black pixel layer having a Static Force Set point of 25 yN e Layer 1 gray pixel layer 1 having a Static Force Set point of 20 uN e Layer 2 gray pixel layer 2 having a Static Force Set point of 15 uN e Layer 3 white pixel layer having a Static Force Set point of 10 uN 175 176 CHAPTER 17 LITHOGRAPHY Simplify to Select the number of layers the imported pixel graphics file should be simplified to Selecting the number of layers to be identical to the number of grayscale values in the pixel graphics file will results in no simplification taking place In all other cases simplifications are performed through binning of layers Lithography Operating Mode Easy Standard Advanced Lithography Operating Mode Inactive pen mode Lift up tip Lithography operating mode Easy Standard Advanced Used to select the operating mode during lithography operation The following options are available Static Force Dynamic Force STM STM only Inactive pen
59. The Tool status section page 197 The Tool result section displays the roughness values that are calculated from the data according to the following formulas The Roughness Average S The Mean Value S The Root Mean Square S M 1 N I 1 y y s 1 M 1 N I Sa 2 Xp5I1 Sm 2 Xps y1 tan CORTE IER kel MN 2 k gt Y1 q MN amp Y ke The Valley depth S The Peak Height S The Peak Valley Height S S lowest value Sp highest value Sy Sp Sy The roughness values depend on the Data filter that is applied to the chart because they values are calculated from the filtered data More information on data filters is provided in Section 18 2 The Chart bar under Data filter page 189 Clicking the Store button in the Tool result section stores the roughness values in the Data Info Panel of the measurement document The Area Roughness tool can be used to determine the mean height difference between two plateaus with more accuracy than with the Measure Distance tool To determine the mean height difference select an area on each plateau and calculate the difference between their Sm values Correct Background Removes the effect of a wrong scan plane when the average and plane Data filter options do not give satisfactory results This may occur when the scan lines in different parts of the measurement have a different average height An example of such a measurement is shown in Figure 19 1 Corre
60. When the mouse is not moved between clicking and releasing a line parallel to the X axis is drawn After releasing the mouse button a second parallel line sticks to the mouse cursor that is released by clicking its desired position The direction of the parallel lines can be adjusted by dragging their end markers they can be moved by dragging the center marker The Tool status section of the Tool Results panel displays the calculated distance The distance value only depends on the cursor positions it does not on depend the displayed data values The Data Info Panel of the measurement document stores the distance as long as the tool is active For more information on the Tool status section see The Tool status section page 197 THE TOOLS BAR 4 Measure Angle Calculates the angle between two lines In Line graph type displays this tool can only be used when the chart displays data that has the unit meters Topography Scan forward Tool Results Panel x Cursor position X Pos 24 85um Y Pos 12 89um Z Pos 46 39nm Mean ft 161nm Tool status Angle 91 19 The two lines are defined by drawing them in the chart The first point of the first line is defined by the mouse cursor position where the left mouse button is clicked the second point by the position where the button is released When the mouse is not moved between clicking and releasing a line parallel to the X
61. Windows cant verify the publisher of this driver software In the Windows Security window click the Install this driver software anyway button The Found New Hardware window now displays a USB Video Adapter and driver installation will take place When Windows has finished installing the Video driver software click the Close button Windows 2000 XP To manually install the USB Video Adapter driver When the Found New Hardware dialog displays the text Can Windows connect to Windows Update to search for software select No not this time and click the Next button In the next dialog select Install automatically recommended and click the Next button Windows now begins searching for the appropriate driver and since an unsigned driver is found a Warning window opens stating that The software that you are trying to install for this hardware USB Video Adapter has not passed Windows Logo testing for compatibility with Windows XP In the Warning window click the Continue anyway button Under some circumstances a Files Needed window may now pop up If this is the case INSTALLING THE EASYSCAN 2 SOFTWARE Browse to the Installation CD s DriverPAL folder and click the OK button O When Windows has finished installing the Video driver software click the Finish button 27 28 CHAPTER 2 INSTALLING THE EASYSCAN 2 STM
62. ace file Save as saves the current arrangement of the panels under another name Load loads a previously saved workspace CONTROL PANELS 12 5 3 Entering values in the control panels To change a parameter in any panel Activate the parameter by clicking it with the mouse pointer or by selecting it with the Tab key O Incase ofa drop down menu selection list e g Phase Contrast y change the selection using the mouse or the up and down arrows on the keyboard In case of a numerical value use one of the following methods Use the up and down arrow keys on the keyboard to increase or decrease its value The new value is automatically used after one second Click the arrow buttons next to the parameter s value with the mouse pointer The new value is automatically used after one second Enter the new value using the keyboard The entered value is applied upon pressing the Enter or Return key or by activating another input The entered value is discarded upon pressing the Esc key The unit prefix can be changed by typing one of the following keyboard keys f femto space bar no prefix p pico k kilo n nano M shift m mega u micro G shift g giga m milli T shift t tera 0 Examples if the basic unit is Volts type m to change to millivolts type the space bar for volts type u for microvolts Sometimes the program will change an entered
63. ace will be explained first then the actual functions of the software will be discussed in more detail The workspace of the easyScan 2 Software consists of the following parts 1 The main window Operating windows Measurement document windows 2 3 4 Tool bars 5 Control panels The main window is opened as soon as the easyScan 2 software starts It gives access to the whole functionality of the easyScan 2 software and contains all other windows e The Main menu e Operating windows that are used to perform specific operations with the microscope e Measurement document windows that are used to evaluate previously performed measurements OPERATING WINDOWS Navigator Main menu Operating window Tool bar G surf Easyscan 2 n file fiew Tools Report Script Options Window 2 SEA ms 2 Controller Panel x DF line graph 57 Meanfit Topography gt Lt LA PA o ak Zoom Move Full Spec ePhoto _ rama Set point 20N Topography Scan forward KID PGain 10000 1Gain 1500 Ko Image size 10 01m E Time Line 1 lt Ry 9 Line fit 12 9um Tip Properties Tip voltage 0 Y El Topography range Om Topography Scan forward 10 5um Mean fit Topography range i Om 10m Operating Mod
64. alculated size manually If the width is changed manually the height is recalculated to keep the aspect ratio If the height is changed manually the width is not recalculated Origin X Offset Y Offset By default the origin is in the center of the pixel graphic By manually changing X Offset and Y Offset the origin may be moved to a different position Parameters This area allows selection of the lithography parameter that will be automatically varied based on the different grayscale values of the imported pixel graphics file The parameter values for the black and white pixels of the imported pixel graphic can be set after which the parameter values corresponding to any in between grayscale values are interpolated THE LITHOGRAPHY BAR IMPORTANT Since it is only possible to select one automatically adjusted lithography parameter per import the other parameters must be set elsewhere This is achieved by setting the Layer 0 parameters before import The values entered here will be used as default values for all imported layers except for the parameter that was explicitly selected in the Pixel Graphics Import dialog All values and settings in the parameters section are stored when the dialog is closed They will be automatically used the next time the dialog is opened From the drop down list box one of the following parameters may be selected for automatic calculation e Tip speed e Tip voltage e STM Set point e
65. along a user defined line in the XY plane A point measurement is made if the number of points is one The measurement sequence is carried out as follows 1 Move the tip to the start of the line with active Z control 2 Switch off the Z Controller THE SPECTROSCOPY BAR 3 Record a spectroscopic measurement 4 Turn on the Z Controller again 5 Move the tip to the next point on the line in the XY plane Steps 2 5 are repeated for all points on the line Spectroscopic measurement sequences are controlled using the Spectroscopy window The Spectroscopy window can either be opened by clicking in the navigator or by clicking spec in the Imaging bar When the Spectroscopy window is activated from the Imaging bar the currently measured image is transferred to the Spectroscopy window The Spectroscopy window contains the Spectroscopy bar with commands that control the spectroscopy processes and the Spectroscopy panel with parameters that determine how the spectroscopy measurement is done The Spectroscopy window also contains a number of charts that display the data from a previous imaging measurement and the data from the ongoing spectroscopic measurement The Spectroscopy window can display as many charts as the size of the window can accommodate It is recommended to display at least two charts one a Color map of a previous Topography measurement of the area where the spectroscopy measurement is performed and one a Dual Line gra
66. an forward Topography Scan forward 4 09um 4 09um Line ft 4 51nm Line ft 4 61nm Topography range Topography range Oum Oum Oum i xt 44pm Oum x i 44pm Figure 19 4 Noise Filter left unfiltered image of AFM measurement on HOPG right filtered image The Noise filter removes high frequency noise from the image but applying the filter will also decrease the resolution of the image The Noise Filter is implemented as a convolution with a 3x3 pixel Gaussian kernel function To apply the filter activate the color map chart that is to be filtered then click the Noise Filter button in the Tools bar A new measurement document with the filtered data is created e Filters are especially useful for improving the appearance of 3D views Applying filters may changes the result of the other tools This may result in incorrect results when evaluating sample roughness 209 CHAPTER 19 QUICK EVALUATION TOOLS 210 ed 4 gt Se CHAPTER 20 i Storing and processing data 212 CHAPTER 20 Storing and processing data Storing and Printing of measurement documents can be performed using the File menu The functions Open Save and Print are also available via the File bar Menu item File contains the items for opening 2 closing saving W and printing the measurement documents and for exiting the program In the following only the special functions are mention
67. an lines try to re approach Press withdraw followed by Approach If that does not change much retract the sample holder rotate it a little by hand and repeat the approach If the image reproduces stably O Select an Image size between 200 and 300 nm and evaluate your measurements in the same way as you did with the graphite images When you are satisfied with your image and would like to keep it you can take a snapshot of it by clicking o The behavior of this button depends on whether a measurement is in progress or not e When a measurement is in progress and is activated a copy of the measurement is made to a measurement document after the measurement is finished e When the measurement is not in progress and is activated a copy is made immediately 51 52 CHAPTER 4 FIRST MEASUREMENTS If you want to save the new measurement document to your hard disk drive for example for loading it into the Nanosurf Report software later 1 Activate the measurement document b clickin in its window or b y 8 y selecting it in the e Windows menu O Select the menu File gt gt Save as and select the folder and name where you would like to store the measurement The stored measurements can now be loaded with the easyScan 2 STM software or the optional Nanosurf Report and Nanosurf Analysis software packages for later viewing analysis and printing A brief introduction on how to create a basic re
68. and retrieving the chart arrangement The chart arrangement of the Imaging and Spectroscopy windows is stored in a configuration file with the extension chart When the easyScan 2 software is started a default arrangement is loaded from a file that is selected in the Controller Configuration dialog Section 13 5 The Controller Configuration dialog page 136 Functions for storing and retrieving the chart arrangement are accessed via the menu File gt gt Chart Arrangement Save saves the chart arrangement to the currently selected chart file The name of this file is indicated in the status bar at the bottom of the main window Save as saves the chart arrangement under a new file name Load loads a previously saved chart file IMPORTANT When you have not loaded another file Save will overwrite the original default chart arrangement file with the current settings The properties of the charts are set using the Chart bar The settings displayed in the Chart bar refer to the currently active chart This chart is indicated by a gray line around the chart A Chart is activated by clicking it with the mouse cursor The following buttons control the creation and modification of the charts E Create new Chart Creates a copy of the currently active chart and adds it as the last chart in the active window Charts are first ordered top to bottom then left to right The window may have to be
69. approach 43 44 CHAPTER 4 FIRST MEASUREMENTS If the tip is pointing toward a rough area of the sample try turning the sample holder around its axis so that the tip points towards a flat mirror like area of the sample O Put the magnifying cover Figure 1 1 Components page 13 item 3 over the scan head without touching the sample holder O Place the magnifier in such a way that you can see the mirror image of the tip in the sample The cover reduces air flow around the scan head and reduces thermal drift in measurements at atomic scale 4 3 2 Manual approach using the approach motor In this step the sample surface is brought as close to the tip as possible without touching it The closer the two are together the less time the automatic final approach takes O Watch the distance between tip and sample with help of the magnifier O Click y Advance in the Approach Panel to move the sample to within a fraction of a millimeter of tip You should only just be able to see the gap between the tip and its mirror image Figure 4 2 tip sample position The smallest visible gap depends on the observation angle of the magnifier and the illumination of the sample Figure 4 2 tip sample position Position at the end of the Manual approach with the approach motor APPROACHING THE SAMPLETO THE TIP Ifyou cannot see the motor moving clean the sample holder guide bars and the surfaces of the approach motor following t
70. are not sufficient contact your local distributor for help In order to resolve the problem as fast as possible please provide as much information as possible such as e A detailed description of what happened before the problem occurred For example When I click the Approach button then quickly click abort the controller will not react to anything I do anymore This only happens when measuring in Dynamic Force Mode e If an error message was displayed The exact text of the message or at least the start of the message The serial number of your Scan Head and or controller NANOSURF SUPPORT e A description of the computer hardware and software on which the control software is running computer brand type laptop or desktop operating system software version etc e Original Nanosurf image data nid files that show the problem rather than bitmap screen shots because these files contain all the settings that were used to make them e Parameter par files with the instrument settings that were used when the problem occurred e Script files if the problem occurs during the operation of a script IMPORANT Sending vbs scripts by e mail often does not work because these files are usually blocked as a security measure To successfully e mail a script you may either e Add the script text to the body of the e mail e Change the extension of the script file to txt and attach it to the e mail
71. c Import Vibr Freq Search Parameters Vibration Freq Determination 222 Menu items File Chart Arrangement 187 A EXPONE ssecccsastiasacteedassiaevecawens 212 OPEN snoren saanen an 212 Parameters cccsssssceeesseeee 110 A ES 214 Print Preview cocccocccccnconnnos 214 Print SOt UP sercnciecdesioMisandeaddeasies O 212 aV ASis seseacecssseieecsasencatee 212 Workspace sesssssssssssssssssssse 108 Options Config Access Codes 139 Config Cantilever Types 129 Config Color Palette 192 Config Controller 136 Config Report ceceeeeeee 216 Config Scan Head 046 132 Config script ceeeeceeeeeee 220 Config User Interface 110 Simulate Microscope 139 Report Add Measurement 215 Apply Template 0 215 New Report eeceeeeece seen 215 Script Run From File eseeeeeeee 218 Script Editor oocccoooosmm o 218 Tools Calculate Area Roughness 205 Calculate Line Roughness 204 Correct Background 206 Correct scan line levels 207 Create Cross Section 202 Cut Out Area oocooccnccnccnncnmo o 203 Glitch Filter ooooccooom omoo o 207 Measure Angle occcocnccccnnocc 201 Measure Distance 0006 200 Measure Length 00 199 Noise Filter ccceeeseeee
72. cedure ccoomosmmmmmossrm m gt oo 23 2 2 3 Hardware recognition ssscccssseecceesececeeeceeeseeceeesees 24 2 2 4 Manual installation of the USB Video Adapter driver 25 CHAPTER 3 Preparing for measurement Initializing the easyScan 2 Controller cccccsccccccssscccsscooes 30 Preparing and installing the STM tip ccscscccssssscccressceceeees 30 Installing the Sample sccccccscsccsssccccssccccsssssccsssscesssscoees 34 3 3 1 Preparing the sample cccssssecccessccceeseeceeeeeceeeeeceees 34 3 3 2 Nanosur Samples vcccsccwscsvcceccesessccscbencsentnccedeataseeacceaveces 34 3 3 3 Mounting a Sample oooccccccccnononcnnnnnnonannnncnnnnnnancnnnnnnnnns 36 CHAPTER 4 First measurements Running the microscope simulation ccsecsccccsssceeccccccscccee 40 Preparing the instrument cccccsccccccssecssssscccssscccscscccseceee 41 4 2 1 Entering values in the control panels csseecceeeseceeees 41 Approaching the sampleto the tip cccccssssccccsssscccsssones 42 4 3 1 Manual coarse approach cccceeseeeceesseceesssceeeseeeeeees 43 4 3 2 Manual approach using the approach motor sscceee 44 4 3 3 Automatic final approach ccoooncnccononncncnonnnnnoccnnnnannnnnos 45 4 4 Starting a measurement cccccscccccsscccccsscccccsscccccsssccsssscooes 46 12 20 30 40 4 5 Achieving atomic resolution
73. ct Background To use the tool select three points that should be on the same height This is done in the same way as with the angle tool The selected points are the end points of the two connected lines THE TOOLS BAR Figure 19 1 Correct Background left uncorrected image the end points of the lines have been moved to points that should have the same height right corrected image Topography Scan forward Topography Scan forward 10 14m 10 14m Rawdata 215nm E E 5 A 5 amp GC a ao Topography range Oum Oum 10 41m Oum Oum xe 10 4pm xe After clicking the Execute button in the Tool Results Panel the plane that is defined by the three points is subtracted from the measurement To get useful results the Data filter option for the display in which you draw the line should generally be Raw data Correct scan line levels Removes the effect of drift when the average and plane Data filter options do not give satisfactory results This may occur when the scan lines in different parts of the measurement have a different average height An example of such a measurement is shown in Figure 19 2 Correct scan line levels To use the tool draw a line through points that should have the same height in the same way as with the Measure Length tool After clicking the Execute button in the Tool Results Panel the average level of each scan line is adju
74. cted cantilever type Delete Deletes the currently selected cantilever type Default Sets all cantilevers types back to their default factory settings All changes will be lost Deflection signal unit Two cantilever deflection unit styles are available for all static force operating modes Use meters based on head calibration The deflection of the cantilever is displayed in meters in all charts This is the default setting Use Newtons based on mounted cantilever s spring constant The deflection of the cantilever is displayed in Newtons in all charts This is particularly useful for recording Force Distance curves with the Spectroscopy Window 129 130 CHAPTER 13 HARDWARE RELATED SETTINGS 13 3 2 The Cantilever Editor dialog Cantilever Editor Cantilever Name NCLR Manufacturer Nanosensors Properties Spring constant 48 N m El Cantilever length 225um E Cantilever width 38m El Resonance frequency air 190kHz E Qfactor air 500 El Resonance frequency liquid 80kHz E Qfactorliquid 5 El OK Cancel Allows the creation of new cantilever types that are not defined in the default configuration and editing of existing cantilever types Please note that the easyScan 2 Scan Head can only be used with cantilevers possessing the following cantilever properties e The sensor chip must have grooves that fit onto the alignment chip e The cantilever should have a nominal length of 225 jm o
75. d PDF files of all manuals not shown 8 A calibration certificate for each easyScan 2 STM Scan Head not shown 9 This easyScan 2 STM Operating Instructions manual not shown 10 Vibration isolation platform option 11 Break out cable comes with Signal Module S 12 Connector box comes with Signal Module A 13 Signal Module cables 2x come with Signal Module A 14 Scripting Interface certificate of purchase with Activation key printed on it comes with Scripting Interface not shown 15 Lithography Option certificate of purchase with Activation key printed on it comes with the Lithography Option not shown 16 Instrument Case not shown The package may also contain easyScan 2 AFM head s and modules for the AFM which are described in the easyScan 2 AFM Operating Instructions Please keep the original packaging material at least until the end of the warranty period so that it may be used for transport at a later date if necessary For information on how to store transport or send in the instrument for repairs see Section 7 3 Storing the instrument page 71 1 1 1 Contents of the Tool Set The content of the Tool set depends on the modules and options included in your order It may contain any of the following items CONNECTORS INDICATORS AND CONTROLS TT foes HE PO Ps 6 7 E gt Figure 1 2 Contents of the Tool set 1 Wire cutters Flat Nose Pliers Pointed tw
76. d the Approach speed changes the Step size of the approach motor the step frequency is determined by the speed of the feedback loop If the approach is too fast the tip or the sample surface can be damaged On the other hand the motor will not move when Appr speed is too small THE VIDEO PANEL max Withdraw Standard Advanced The maximum withdraw duration after clicking Withdraw max Approach Advanced The maximum approach duration after clicking approach Auto start imaging Standard Advanced When selected the system automatically starts imaging after a successful approach Scanning automatically stops the approach motor is moved Auto reload settings Advanced When selected the software reloads the default startup parameter file for each approach Section 13 5 The Controller Configuration dialog page 136 The video panel controls the video display in the Positioning window only for AFM systems Changing these settings only has an effect when a Video camera is fitted on your system Video source Video Source A Top view ES Side view Save Image as The video source section determines which video signal is currently displayed A Top view Switches the video display to the top view gt Side view Switches the video to the side view Save Image as Saves the currently displayed image to a JPEG file that is selected using a Save file as dialog
77. data points Scan image rotation Sample tilt compensation Spectroscopy modes Spectroscopy data points Spectroscopy measurement averaging 470x120x80 mm 2 4 kg 90 240 V AC 50 60 Hz 30 W USB 2 0 Appr controller serial number 23 06 030 and higher 2 Ports 100 mA max 16 bit D A converter for all axes 10 V no high voltage Up to 60 ms line at 128 data points line 16 bit A D converters up to five signals depending on mode Individual width height up to 2048x2048 points 0 360 Hardware X Y slope compensation Single point measurement or multiple measurements along a vector Up to 2048 Up to 1024 times easyScan 2 Software Simultaneous display of data in charts types User profiles online processing functions Quick evaluation functions Data export SPECIFICATIONS AND FEATURES Line graph Color map 3D view Customizable display and parameter settings Mean fit Polynomial fit Derived data distance angle cross section roughness TIFE PNG BMP ASCII CSV Nanosurf easyScan 2 Scripting Interface Applications Included control software Remote control by Computer requirements Operating system Required hardware Recommended hardware Automating measurement tasks lithography custom evaluation functions using third party measurement equipment Windows Scripting Host Visual Basic Script Java Script COM compatible languages LabV
78. des With an STM the sample surface can be scanned in two different ways by using Constant Current mode or by using Constant Height mode Read the following sections for details In Constant Current mode the tunneling current is kept constant by the Z Controller The output of the Z Controller thus corresponds to the height of the sample surface This output is recorded as a function of X and Y position and is displayed as the Topography signal In Constant Height mode on the other hand the tip does not follow a surface of constant tip current Instead the variation of the tunneling current is directly recorded as a function of the X and Y position in plane parallel to the sample surface The easyScan 2 STM is normally configured to measure in the Constant current mode To switch to the Constant height mode you could theoretically just turn off the Z Controller However several problems arise e The tip would crash into the slightest unevenness of the surface e The scan plane of the scanner must be very well adjusted to the plane of the sample e The thermal drift in the Z Direction will cause the tip to rapidly move away from the sample or even worse to crash into it Fora large part these problems can be avoided by setting the Loop gain to a very low value Thus the feedback loop can follow the slow movement of the sample caused by thermal drift and the sample plane but not the fast height changes due to the presence of th
79. distinct categories 1 Mechanical surface modification through scratching or indenting Static Force mode or through hammering Dynamic Force mode This type of modification require higher tip sample interactions then normally 166 PERFORMING LITHOGRAPHY used during imaging to mechanically transfer the desired pattern into the sample surface The width an depth of the scratches or indentations made depend mainly on the force exerted on the SPM tip and on its shape 2 Electrochemical surface modification through voltage dependent surface reactions This type of modification requires a voltage difference between sample and tip and will add molecules to the surface e g through oxidation The width and height of the oxidative surface modifications depend on the relative humidity of the ambient air on the strength of the electric field and on the tip speed Lithography can be performed as of version 2 0 of the easyScan 2 control software provided that suitable samples tips and lithography parameters are used Lithography of objects drawn by hand and direct manipulation of the SPM tip is available for free via the Lithography window of the control software Issuing of lithography commands through the Scripting Interface which has been extended to include these commands requires a license for the Scripting Interface Import of vector or pixel graphics files to be used as patterns in the lithography process requires
80. ditor dialog to edit the selected object Copy Easy Standard Advanced Copy will open the Object Editor dialog to edit the selected object before copying it Delete Easy Standard Advanced Delete will delete the selected object A warning dialog will appear for confirmation of this action THE LITHOGRAPHY PANEL 17 3 2 The Object Editor dialog Object Editor Preview Yee nanoSurf Object Name NSFLOGO Size Position Width 22 925um Pos Opm El Height 4 338um Y Pos Opm E Scale factor 1 E Move to Center DK Cancel Preview The red cross if visible indicates the origin position of the object Object Name The name that is used to describe the object Default names are generated during import based on the GDS II object names or on the pixel graphic filename but may be edited here afterwards Width Height Displays the width and the height of the object 181 CHAPTER 17 LITHOGRAPHY Scale factor The factor by which the object can be scaled If the scale factor changes the width and the height will be automatically recalculated Scale factor 1 represents the original state Position X Pos Y Pos The X Pos and the Y Pos may be used to move the object within the space of the topography map Move to Center Moves the origin on the selected object back to the center of the topography map Lithography Preview Panel ye Lithography preview 4 eC nanoSurf 25um
81. e asked if you want to save the unsaved measurement documents The imaging settings use two coordinate systems The Scanner coordinate system and the Measurement image coordinate system To separate the two systems the image axes are denoted by an asterisk i e X Y The relation between the two coordinate systems is determined by various parameters in the imaging panel The effect of these parameters is illustrated in Figure 15 2 Coordinate systems 151 CHAPTER 15 IMAGING Rotation pas Measurement plane Y Slope Vr ye X angle Image area E aiii p Slope angle Scanner XY plane Figure 15 2 Coordinate systems Imaging Area Easy Standard Advanced Imaging rea ES Image width 60m f Height 7 E Time Line 0 6 s E Points Line 256 El Lines 2 E Rotation 0 El Image size Easy Standard The image size in both the X and Y direction The size is doubled or halved when using Image width Advanced The image size in X direction Height Advanced The image size in Y direction When the Check box is active the image Height is always identical to the Image width Points Line Easy Standard Advanced The number of measured data points per line 152 THE IMAGING PANEL Lines Advanced The number of measured data lines in an image When the Check box is active the number of Lines is always equal to the number of Points Line In the easy and
82. e atoms To measure in Constant height mode Find a flat area of the sample by imaging it in Constant current mode and zoom in on this area CONSTANT HEIGHT MODE O Open the User Interface configuration dialog using the menu Options gt gt Config User Interface O Click 6 Eh Set the User Interface Mode to Standard level or Advanced level to open the Z Controller Panel Set I Gain to 4 Set P Gain to 0 To visualize the current Click on a Color map chart in the Imaging Window O Set the Input channel to Tip Current in the chart bar The bar next to Color map should now display the text Tip Current and should have the units pA or nA instead of nm 67 68 CHAPTER 6 OPERATING MODES CHAPTER 7 Finishing measurements 70 CHAPTER 7 Finishing measurements Once you are done measuring Click to stop measuring Retract the sample holder first by using withdraw then 4 Retract Remove the magnifying cover from the scan head Remove the sample holder with one hand Remove the sample from the sample holder and store it in its case with the other hand Store the sample holder in its container To turn off the instrument Finish as described in Section 7 1 Finishing scanning O Verify that you have saved all measurements that you would like to keep see Section 4 6 Storing the measurement page 51
83. e error signal but also amplifies high frequency noise Z Controller Mode Advanced 2 Controller Mode ES Z Feedback mode Free Running v Z Feedback algorithm Standard PID x Error range 20 Y E THE Z CONTROLLER PANEL Z Feedback Mode The following modes are available Free Running The Z Controller is active Freeze Position The Z Controller is not active the scanner remains in its current Z position Stop and Clear The Z Controller is not active the scanner is moved to the Ref Z Plane set in the Imaging Panel The Probe Status Light see Figure 1 4 The easyScan 2 controller page 17 will blink green as long as the Z Controller is deactivated IMPORTANT The tip may be damaged when the Z Controller is not active during scanning This will happen when Ref Z Plane is much lower than the current position of the tip or when the scan range contains large height differences Z Feedback algorithm The following algorithms are available Standard PID A standard PID controller is used for Z Feedback Adaptive PID A standard PID controller is used for Z feedback In addition the bandwidth of the Topography measurement is adapted to the number of measured points per second The adaptive PID controller reduces noise in the measurement However topography changes that happen faster than the time between two measured points are also lost This makes it more difficult to detect
84. e motor will move the approach stage so that the Z Position of the tip becomes equal to the set Z Position When a high resolution 2 pm Z Range scanner is used the Tip Position before the approach is set to 500 nm 143 144 CHAPTER 14 POSITIONING Advanced by default This compensates for the residual motion of the approach stage that occurs after the approach motor has stopped Changing the Z Position when the tip is approached to the sample may cause tip damage when using high resolution scanners This can be due to play in the approach stage which is caused by a change in the initial load of the approach stage bearings Contact your local Nanosurf representative if this seems to be the case The Tip Position setting can for example be useful when a sample is mainly a large flat surface with some deep holes in it In this case proceed as follows Ideally first make sure that the center position of the Scan range is outside a hole When the Scanner is idle such as during approach the tip is always brought to the center position of the scan range Set Tip Position to about 80 of the maximum value Click Approach The Tip Position setting cannot be used with STM scan heads which is due to the different approach motor used in the STM Stop button Stop the adjustment of the height Appr speed Standard Advanced The speed of the motor during the automatic approach and withdraw When an STM scan head is use
85. ed Open Opens a dialog for opening Nanosurf nid or ezd easyScan 1 files The same dialog is opened using the menu File gt gt Open It is possible to select more than one file at the same time by using the Shift and Ctrl keys E Save and Save as Save a measurement document in Nanosurf image data format file extension nid The same dialog is opened using the menu File gt gt Save and File gt gt Save as Export Current Chart as Current document as Exports either the active chart or the whole active measurement document for use in other programs or image processing software Available data types for documents are tagged image file format tif portable network graphics png Windows bitmap bmp 16 bit data file dat and plot file plt For Charts additional available data types are comma separated z values csv and X Y Z points csv When the data is exported using the function Export gt gt Current document as every Chart in the measurement document is stored in the export file consecutively In the binary format the blocks of data from each Chart are stored directly one behind the other In the ASCII text format the blocks of data for each Chart are separated by two empty lines STORING AND PRINTING MEASUREMENTS Tagged image file format tif portable network graphics png and Wind
86. ed Clicking has the same effect as clicking the Optimize Chart range button Chart size Size The size of the chart in pixels Show Axis When active the labels in charts and the color bar in Color map window are displayed 18 2 2 Changing the appearance of the 3D view Always click and hold the left mouse button on the 3D view chart while changing the 3D view The surface is reduced in feature complexity as long as the left mouse button is pressed Press the following additional keys buttons to determine what chart property is changed Surface rotation mouse left right Surface tilt mouse up down Size displayed surface Ctrl key mouse up down Surface position Shift key mouse up down left right Z scale magnification left mouse button right mouse button mouse up down Light source direction 360 Shift Ctrl key mouse left right Light source height 0 90 Shift Ctrl key mouse up down The lowest height of 0 corresponds to sunset lighting the highest height corresponds to mid day lighting at the equator The Chart Properties Span and Center can be used to cut off high and or low features of the surface 191 192 CHAPTER 18 VIEWING MEASUREMENTS To create good looking 3D images you can use any of the following features e Use the Tools Correct Scan Line Level Glitch and Noise reduction fil
87. ed for special spectroscopy measurements X Axis Input The Input voltage is added to the X Position command of the scanner Table 11 2 Custom operating mode signals 100 CHAPTER 11 TECHNICAL DATA Signal name Function The Input voltage is added to the Y Position command of Y Axis Input the scanner The Input voltage is added to the Z Position command of the scanner If the Z Controller is turned on it will try to Z Axis Input l compensate this voltage as a result of which the Input voltage will be added to the topography measurement E The input voltage is added to the Tip voltage set in the software Excitation Input No function for AFM only User 1 Input An analog input that can be used to record the signal from external instruments in Imaging and Spectroscopy measurements User 2 Input An analog input that can be used to record the signal from external instruments in Imaging and Spectroscopy measurements A connector that can be used for accessing signals that are Aux 1 not otherwise available Contact your local distributor if you need to use this connector A connector that can be used for accessing signals that are Aux 2 not otherwise available Contact your local distributor if you need to use this connector Table 11 2 Custom operating mode signals mini DIN connector that is used in the Signal Module S The pin out of t
88. ed with Most control panels dock to the Main window some dock to a task specific window The control panels give access to specific functions of the easyScan 2 STM The control panels contain one or more function sections that can be collapsed and opened by clicking on the section header Title bar Operating Mode Panel S Section header Operating Mode R 7 Mounted cantilever Section Nore w Operating mode Parameter D ynamic Force Iv Mode Properties ES Free vibration amplitude 200m El Label Operating Mod Z Controller Panel Figure 12 2 A stack of panels The number of visible sections and the number of visible parameters depends on the user interface mode selected in the User Interface Configuration dialog Section 12 6 The User Interface dialog page 110 To see in which user interface mode a certain parameter is available look at the title of the manual section in which it is described 107 108 CHAPTER 12 THE CONTROL SOFTWARE USER INTERFACE 12 5 1 Arranging control panels The control panels have several features that allow you to arrange them in a way that is most efficient for your application A control panel associated with the main window is opened and brought on top of the other windows by clicking on its icon in the navigator Any control panel can be opened and brought on top of the other windows by selecting the window it is associated with a
89. eezers 00D SA Rounded tweezers 2A SA SL Sample holder comes as an option with the AFM Pt Ir wire 0 25mm 30cm for making STM tips option STM Basic Sample Kit option with HOPG graphite gold thin film and four spare sample supports ol GN OM BS Da US 8 USB dongle for Nanosurf Report or Nanosurf Analysis software option Use this section to find the location of the parts of the easyScan 2 STM that are referred to in this manual 15 16 CHAPTER 1 THE EASYSCAN 2 STM 1 2 1 The easyScan 2 STM Scan Head Two types of easyScan 2 STM Scan Heads exist that have different approach stages In type one stages the Sample Holder slides on guide bars In type two stages the Sample Holder slides on a point support see Figure 1 3 Parts of the Scan Head Tip holder with clamp Sample holder point supports Approach motor with sample holder fixing magnet Figure 1 3 Parts of the Scan Head left Type one Scan Head right Type two Scan Head 1 2 2 The easyScan 2 Controller Status lights All status lights on top of the controller will light up for one second when the power is turned on The Probe Status light Indicates the status of the Z feedback loop The Probe Status light can be in any of the following states red The scanner is in its upper limit position This occurs when the tip sample interaction is stronger than the set point for some time There is danger of damaging the tip due to a
90. elected in Signal is black the line of the reverse direction data is gray y Data filter Topography Scan forward x Topography Scan forward Opm x 101pm 101pm THE CHART BAR Topography Scan forward Topography Scan forward Line ft 215nm y Topography range Topography range 10m um x Topography Scan forward pa 101pm Topography Scan forward Parabola ft 215nm Polynomial ft 21 nm Derived data 14 6nm y y Topography range Oum Topography range 101pm Opm y 101pm 5 xe Figure 18 3 Data filter types The same measurement data displayed with different filters The easyScan 2 software can process filter measured data before displaying it without modifying the original measurement data The available data filters are Raw data Mean fit Line fit Derived data Parabola fit Polynomial fit no data processing calculates the mean value of each line of data points and subtracts the mean value from the raw measurement data of that line calculates the best fit line mean value and slope for each line of data points and subtracts the best fit from the raw measurement data of that line calculates the difference between two successive data points derivative calculates the best fit parabola for each line of data points is calculated and subtracts the b
91. ent are automatically set to suitable values for the currently selected cantilever type based on the resonance frequency and Q factor listed in the Cantilever Browser dialog see Section 13 3 1 The Cantilever Browser dialog page 128 for details Amplitude reduction Standard Advanced Indirectly determines the Vibration Frequency in the Auto set mode The computer adjusts the Vibration frequency so that the cantilever vibration amplitude is Amplitude reduction percent smaller than the vibration amplitude at the resonance frequency THE Z CONTROLLER PANEL Use upper sideband Advanced When active the vibration frequency is set to a frequency higher than the resonance frequency Otherwise the vibration frequency is set lower The tip sample interaction is normally kept constant using the Z Controller The Z Controller is a PI D controller as is shown in Figure 13 3 Z Controller The settings of this controller are set in the Z Controller panel To open the Z Controller panel click ly in the Navigator P Gain Control Signal Tip Current Deflection Topography Amplitude Set point Figure 13 3 Z Controller Z Controller Easy Standard Advanced 2 Controller Set point 60 El P Gain 12000 El Gain 1200 E D Gain 0 E Set point Easy Standard Advanced The working point for the Z Controller Depending on the operating mode this i
92. es 209 WIN O Wisin Operating windows IMAGING ooccccnnccnnnnoonnnnnnonnnnnns 148 Lithography ooocccooocncnonocnnnonncnos 166 POSITIONING ooocccnnocccnononnnnnoncnns 142 Report orreitan nisor 214 Spectroscopy oocccocconocnnocnononnnonnns 158 QUICK REFERENCE 223
93. es the measurement currently displayed in the Lithography window in a measurement document and displays it in a separate window If Photo is clicked during a measurement a copy is generated as soon as the measurement in progress is finished The capture process is cancelled by clicking photo a second time Measurement documents are automatically labeled with increasing THE LITHOGRAPHY BAR numbers i e Imagel Image2 When exiting the easyScan 2 software you will be asked to save any unsaved measurement documents 17 2 1 The Vector Graphic Import dialog Vector Graphic Import Preview Yee nanoSurf Size Origin Width 91 7um X D fset Oum Height 17 35um Y Offset Oum Scale factor 1 E Set origin to center DK Cancel The Vector Graphic Import dialog appears after clicking the 1mport vector button and selecting a valid GDS II file and can be used to select the object cell of the GDS II file to import Size and origin of the resulting lithography object can be set during import using the Size and Origin fields see description below or after import using the Object Editor see Section 17 3 2 The Object Editor dialog page 181 for details Available objects cells A list with all the valid objects cells of the selected GDS II file Selecting an object will results in the respective object being displayed in the preview area of the Vector Graphic Import dialog and will cause the
94. escribed here The other parameters are described in the section that describes the tool 197 198 CHAPTER 19 QUICK EVALUATION TOOLS Topography Scan forward Tool Results Panel x Cursor position X Pos 4 21um Y Pos 4 765um Z Pos 166 6nm Rawdata 215nm Tool status gt Length 1 447um DeltaZ 118 4nm Width 1 0234m Height 1 024um Height Width Length The length of the arrow in the plane of the chart It is related to the evaluation results Width and Length according to the formula Length Width Height Example In a Color map chart length is calculated in the XY Plane In a Line graph chart length is calculated in the XZ Plane Width Height The width and height of the arrow in the chart calculated in the plane of the chart DeltaZ The difference between the Z Pos values at the start and the end of the arrow IMPORTANT Ina Color map chart DeltaZ is the difference in the filtered sample height between the start and the end point e The calculated values of Length Width and Height only depend on the cursor positions they do not on depend the displayed data values THE TOOLS BAR The Tools bar is for activating one of the following tools Measure Length Calculates the distance and signal difference between two points Topography Scan forward rsor position Raw data 215nm XPos 4 21pm Y Pos 4 765 m
95. est fit from the raw measurement data of that line calculates the best fit fourth order polynomial for each line of data points is calculated and subtracts the best fit from the raw measurement data of that line 189 190 CHAPTER 18 VIEWING MEASUREMENTS gt Signal The input channel that is displayed The available signals depend on the operating mode the status of the User input Section 13 1 The Operating Mode panel page 114 and the operating mode Section 15 2 The Imaging panel page 151 Lt Optimize Chart range Adjust the chart scale so that it optimally fits the displayed data us Decrease Chart range Halves the chart scale thereby increasing feature contrast height t3 Increase Chart range Doubles the chart scale thereby decreasing feature contrast height T Chart properties dialog Opens the chart properties dialog 18 2 1 The Chart Properties dialog Chart range Chart Properties Chart range Span 215mm E Center 253 758nm E Auto set Chart size Size 256 pixel f Show Axis Span The signal span that corresponds to the full chart scale Increasing Span decreases the feature contrast The current Span is also displayed next to the color bar axis in the chart THE CHART BAR Center The signal that corresponds to the center of the chart scale Auto set When active the chart scale is automatically set to optimally fit the displayed data as it is being acquir
96. f these drivers or a wrong driver is installed you can try the following to fix it O Double click on the driver Properties dialog for the device now opens O Select the Driver tab Click the Update Driver button Windows will now ask you were to look for the driver O Tell windows to take the driver from the Installation CD 9 2 1 Manual approach is too slow stops sometimes If the manual approach using the approach motor buttons y advance and 4 reat is affected Clean the sample holder guide bars and the surfaces of the approach motor following the procedure described in Chapter 8 Maintenance page 74 9 2 2 Automatic final approach is too slow stops sometimes Even if the manual approach works the automatic final approach button Approach may not work O Clean the sample holder guide bars and the surfaces following the procedure described in Chapter 8 Maintenance page 74 81 82 CHAPTER 9 PROBLEMS AND SOLUTIONS If cleaning does not help the step size may be too small To solve this problem Open the User Interface configuration dialog using the menu Options gt gt Config User Interface Set the User Interface Mode to Standard level or Advanced level Increase the value of Appr Speed in the Approach Options section of the Approach Panel by a few percent until the approach works Now the motor moves the sample holder with larger steps d
97. g printing and evaluating measurements The measurement document is described in more detail in the Chapter 18 Viewing measurements page 185 and Chapter 20 Storing and processing data page 211 The tool bars can either be free floating windows Figure below left or they can be docked to the top or the sides of the window they are associated with Figure below right Most tool bars dock to the Main window some dock to a task specific window oh amp sus 12 4 1 Arranging tool bars The tool bars have several features that allow you to arrange them in a way that is most efficient for your application e To display a tool bar that is invisible select the window it is associated with and tick the tool bar name in the View menu e To dock a tool bar to the sides of its associated window or to the side of or CONTROL PANELS below another tool bar that is already docked to this window drag its title bar using the mouse cursor e To move a docked tool bar use the mouse cursor to drag its handle on the left side of the tool bar When the mouse cursor is over the handle the cursor changes to a four pointed arrow e To un dock a docked tool bar double click its handle or drag the handle outside the area reserved for tool bars on the sides of its associated window Just like the tool bars control panels can be either be free floating windows or they can be docked to the sides of the window they are associat
98. g 4 import bitmap and selecting a supported pixel graphics file and can be used to specify how such a file is converted to a lithography object All images are first converted to an 8 bit grayscale 256 levels Each set of pixels with the same grayscale value will correspond to a separate layer in the resulting lithography object Layers will only be generated for those grayscale values that are actually occupied In addition the number of layers can be reduced upon import see Simplify to page 176 For each layer individual lithography parameters can be set One of these lithography parameters can be automatically varied upon import by using the 173 174 CHAPTER 17 LITHOGRAPHY grayscale values of the imported pixel graphics file to define the selected parameter s range see Parameters below All parameters can of course always be modified manually after import see Section 17 3 1 The Layer Editor dialog page 178 Preview Graphical area that displays the selected pixel graphics file Size Width Height The width and the height of the lithography object resulting from the Pixel Graphic import The default settings for width and height are taken from the dimensions of the current color topography map of the Lithography window The pixel graphic is automatically resized to fit into the area defined by these dimensions while maintain its aspect ratio It is at this point however possible to change the automatically c
99. ging its end markers It can be moved by dragging the center marker The image is moved by double clicking or clicking the Move button in the Tool Results panel The move function can be aborted by clicking mmove again W Full Returns the parameters Scan range to the largest possible values and X Offset and Y Offset to zero Spec Transfers the currently measured data to the spectroscopy window If a measurement is in progress it is interrupted It is advisable to use Finish to first complete the measurement before starting the spectroscopy measurement 150 THE IMAGING PANEL A Litho Transfers the currently measured data to the lithography window If a measurement is in progress it is interrupted It is advisable to use Finish to first complete the measurement before starting the spectroscopy measurement ta Photo Captures the measurement currently displayed in the Imaging window in a measurement document If caphoto is clicked when a scan is in progress a new measurement document is generated each time a measurement is finished The capture process is cancelled by clicking espro a second time To capture an image without waiting for the scan to be completed stop the scanning by clicking stop The image can then be captured immediately by clicking caphoto The measurement documents are labelled automatically with increasing numbers i e Imagel Image2 When leaving the program you will b
100. he Lithography Dbar ssccsssrccsssrccsssrccssersssssracccssssesseaes 169 17 2 1 The Vector Graphic Import dialog oooocomoorcmmmmmss r o 171 17 2 2 The Pixel Graphic Import dialog ceccssseeceeeeeeeeeees 173 17 3 The Lithography panel cssssccssssrcsssrcessereescerscccsssssessenes 176 17 3 1 The Layer Editor dialog oooocccoooonnnoooncninocnnnononnnnnoss 178 17 3 2 The Object Editor dialog oooocooooconnnnonnnnnnccccnonononnns 181 17 4 The Lithography Preview panel cccssscccsssccccsscseccssscoees 182 17 5 The Lithography Topography map View oocccconocccnonononococcnnss 183 CHAPTER 18 Viewing measurements 18 1 Charts occoncacononancccnoncconenccnasionecconaccnnnacccaranccoonaconcacanccannccnnnas 186 18 1 1 Storing and retrieving the chart arrangement oo ooc 187 18 2 The Chart bar sccsssscssssssscenssccsssccccssscccsensccsssscscsssssscssness 187 18 2 1 The Chart Properties dialog ooooccccooocnnnnoncnnnnnnnncnnos 190 18 2 2 Changing the appearance of the 3D view 191 18 2 3 The Color Palette dialog oooccooooccnnonononnnocrnnnnncnnnnnos 192 18 3 The Data Info panel sccccsssecssssscccssscccesscccccscssccssccoees 193 CHAPTER 19 Quick evaluation tools 19 1 The Tool Results panel cccsssccsssscccsssccccsssecccsscscecssceoees 196 19 2 The Tools bar ccscccccccrccccscccccccccscsccccccccccsssccesssccsc
101. he instrument scccccsssccsssssccsssccccssscccsseees 70 7 3 Storing the instrument cccccssscccccssscsssscccssscccecssscccecscees 71 CHAPTER 8 Maintenance 8 1 Scan Head cccscccccrcccsscccccccccccssccccccccsssccccsscccsssccessscccsscees 74 8 1 1 Protecting the sample holder against corrosion o 74 8 1 2 Cleaning parts of the approach motor ccccooccnccoccnnnnno 74 8 2 Scan electronics cccccccccccrccsscccccccccccsscceccccccsssccecsscccecece 75 CHAPTER 9 Problems and solutions 9 1 Software and driver problems sccccccsscccssscccccssscccsssooes 78 9 1 1 No connection to MiCrOSCOPE occoooccccnnnonnnnonannnnnonnnnnonnnns 78 9 12 USB Port CITO cocociconcocaonicacaio daacicosnnconigin ca acensciaidacisadrcan 78 9 1 3 3 Driver problems ccdccsscenccicssiiises cocdeuersdesceccdeassencedaceassieaes 79 56 66 70 74 78 9 2 STM measurement problems cssccccsscccccssscccsscscccsscccooees 81 9 2 1 Manual approach is too slow stops sometimes 81 9 2 2 Automatic final approach is too slow stops sometimes 81 9 2 3 Automatic final approach crashes the tip into the sample 82 9 2 4 Image quality suddenly deteriorates cccseseeeeeeeeeees 83 9 3 Nanosurf SUPport cccccccsccssssccccsscccccssscccscsccssscosessceseeees 84 9 316 Self elisa ici 84 0 3 20 ASSISTANCE viaria isos 84 CHAPTER 10 ST
102. he procedure described in Chapter 8 Maintenance page 74 4 3 3 Automatic final approach In this last step the sample automatically approaches the tip until a given set point is reached First check that the set point and the feedback speed are set properly To do this O Click EN in the Navigator to open the Z Controller Panel 2 Controller Panel 2 Controller Set point 1n E Loop gain 1000 E Tip Properties ES Tip voltage 0 05 Y E O Set Set point tunneling current to 1 00 nA O Set Loop gain the speed of the feedback loop to 2000 for normal heads or to 400 for LC heads O Set Tip voltage tip sample voltage to 50 mV Now that the setpoint and feedback settings are correct the automatic final approach can be started O Switch to the Positioning window by clicking E in the Navigator O Click Approach in the Approach panel of the Positioning window The sample holder is now moved towards the tip by the approach motor After each step the Z scanner is fully retracted from the sample and released to move towards the sample The approach is finished if the current determined by Set point is detected before reaching the maximum extension of the Z scanner otherwise the approach motor will continue with the next 45 46 CHAPTER 4 FIRST MEASUREMENTS step Due to the motion of the Z scanner the Probe Status light will blink red green orange
103. his connector is shown in Figure 11 1 Voltage source connector 1 15V O O 2 GND O 3 15V Figure 11 1 Voltage source connector Connector as seen from outside THE SIGNAL MODULES 11 2 3 Using the User Inputs and Outputs The User Inputs and Outputs can be accessed through the Operating mode panel Each signal can be calibrated with the User Signal Editor that is accessed by clicking on the corresponding Config button This Section is only available in the Advanced user interface level Refer to Section 13 1 3 The User Signal Editor page 117 for a more detailed explanation Various other User Input and Output settings can be configured in the Signal Module Configuration dialog Refer to Section 13 6 The Signal Module Configuration dialog page 137 for details on how to change them 101 CHAPTER 11 TECHNICAL DATA 102 CHAPTER 12 The control software user interface 104 CHAPTER 12 The control software user interface This chapter explains the general concepts of the user interface of the easyScan 2 software These functions are e Setting up the Nanosurf easyScan 2 Controller e Moving toward the measurement position e Performing measurements e Displaying the measurement results e Evaluating the measurements e Permanently storing measurements and instrument These functions can be accessed via the easyScan 2 Software which is called workspace In the following the worksp
104. hould therefore be adjusted electronically using the parameters X Slope and Y Slope ADJUSTING THE MEASUREMENT PLANE Rotation angle Measurement plane Image area Slope angle Scanner XY plane Figure 5 3 Sample and measurement orientation before slope adjustment o Gog Stop Finish Up Down Zoom Move Full Spec ePhoto _ neding Panel x Topography Scan forward Imaging Area i E E E Image size 0 5pm E 8 Time Line 02s BY 3 Points Line h28 Sl E Rotation 0 E s amp Imaging Options 5 liz Xslope 1830m E MW E He Y Slope 4575m H G D 0 s W L Esas 5 Onm x 500nm E Topography Scan forward E 8 a E c E E a mE E 2 E a Figure 5 4 Adjusted slope Measurement with properly set X slope To determine the correct values use the following procedure O Open the User interface dialog via the menu Options Config user interface and select one of these modes The slope correction is only available with the Standard and the Advanced level user interface mode 59 60 CHAPTER 5 IMPROVING MEASUREMENT QUALITY O Measure the slope in the Line graph using the angle tool as detailed in Section 19 2 The Tools bar under Measure Angle page 201 Use a single click to measure the angle relative to the X Axis O Alter the value of X Slope in the Imaging options of the Imaging
105. ibration amplitude signal Phase The calibration value of the cantilever vibration phase shift signal Tip current The calibration value of the internal Tip current measurement 1 0 Signals Maximum output signal values Tip Potential The calibration value of the Tip voltage setting Drive Amplitude The calibration value of the Amplitude of the signal that is used to excite the cantilever The Drive Amplitude signal is only displayed in the Data Info Panel SCAN HEAD CONFIGURATION 13 4 3 The Scan Axis Correction dialog Scan Axis Correction Info The correction coefficient is the result of the recalibration calculation based on the formula coeff reference distance measurend distance Typical values are in range 0 8 to 1 2 Scan axis correction Correction coefficient h z This dialog can be used to multiply the scan axis calibration factor by a correction coefficient that has been determined by evaluating the measurement of a calibration grid for example using SPIP Nanosurf Analysis Scan axis correction The Scan range is multiplied with this number when the Set Button is clicked 135 136 CHAPTER 13 HARDWARE RELATED SETTINGS Z Controller configuration E Start configuration Default parameters at startup surf Nanosurf Mobile S Config Default_MobileS par Default chart arrangement at startup Nanosurf Nanosurf Mobile S Default_MobileS chart U
106. ice Framemaker grabber driver 0 USB EMP Audio Device for Video Module v2 part 1 Video Codecs System devices Universal Serial Bus controllers E Aladdin HASP Key Nanosurf Report dongle Ge Aladdin USB Ke Generic USB Hub G amp Generic USB Hub 18 Generic USB Hub USB Hub amp amp Intel R 82801G ICH Family USB Universal Host Controller 27C8 Intel R 828016 ICH Family USB Universal Host Controller 27C9 Intel R 828016 ICH Family USB Universal Host Controller 27C4 Intel R 828016 ICH Family USB Universal Host Controller 27CB 2 Intel R 828016 ICH Family USB2 Enhanced Host Controller 27CC 2 USB Composite Device Framemaker grabber driver 69 USB Root Hub for Video Module v2 part 2 USB Root Hub USB Root Hub USB Root Hub USB Root Hub USB Serial Converter ____ USB to Serial converter part 2 Figure 9 1 Device manager The drivers that may be installed on your system when your controller is connected to the computer STM MEASUREMENT PROBLEMS e USB Video Adapter Video Module version 1 e USB Composite device USB 2821 Device USB 2 0 A V Converter USB EMP Audio Device Video Module version 2 e HID compliant device USB Human Interface Device Nanosurf Analysis SPIP e Aladdin HASP key Aladdin USB key Nanosurf Report If there are problems with any o
107. iew MathLab Visual Basic Delphi C Windows 2000 XP Vista USB 2 0 connector Pentium 4 M or AMD Athlon or better 256 MB RAM True color gt 1024x786 resolution video card Hardware Open GL accelerator Computer not included with system 95 96 CHAPTER 11 TECHNICAL DATA Nanosurf easyScan 2 Signal Module S Available output signals Full scale corresponds to Power supply output X Axis Y Axis Z Axis Approach Tip Voltage STM Current or AFM Deflection Excitation Amplitude Phase 10 V Excitation 5 V GND 15 V 15 V Nanosurf easyScan 2 Signal Module A Output signals Additional analog user outputs Synchronization output Additional signal modulation inputs Free connectors Modulation range Additional analog user inputs Additional modes All output signals of Signal Module S 2 x 16 bit D A converters 10 V 1 x TTL start end point sync X Axis Y Axis Z Axis Tip Voltage Excitation 2 x Aux connection made on user request 10 V Excitation 5 V 2 x 16 bit A D converters 10 V Almost unlimited User inputs can optionally be measured in all Imaging and Spectroscopy modes User outputs can be modulated in Spectroscopy measurements THE SIGNAL MODULES 11 1 2 The easyScan 2 STM Scan Heads STM Scan Head 500 nm 1 pm 500 nm LC 1pmLC Maximum Scan 1 500 nm 1 0 pm 500 nm 1 0 pm range Maximum Z range 200 nm 200 nm 200nm 2
108. ifficult part of your preparations It usually needs patience and some practise to get the first good tip Only an accurately cut tip enables optimal measurements Therefore cutting and installing should be carried out with great care On delivery the tip with which the STM was calibrated in the factory is installed in the head This tip should give atomic resolution so you may wish to try to use this tip before preparing your own PREPARING AND INSTALLING THE STM TIP Before cutting the tip O Clean the cutting part of the wire cutters Figure 1 2 Contents of the Tool set page 15 item 1 the Flat nose pliers item 2 and the pointed tweezers item 3 with ethanol Only touch the Pt Ir wire item 6 with these tools Remove the old tip from the instrument using the pointed tweezers If the tip wire is still long enough you may try to cut the same wire again otherwise cut the Pt Ir wire To prepare the tip Hold the end of the wire firmly with the pliers Holding the wire with the pliers move the cutters at a length of approximately 4 mm as obliquely as possible Figure 3 1 Cutting the STM tip Pt Ir wire N pulling direction am Flat nose pliers wire cutter Figure 3 1 Cutting the STM tip Close the cutters until you can feel the wire but do not cut the wire O Pull in the direction shown in Figure 3 1 Cutting the STM tip The tip needs to be torn off rather than cleanly cut through in order to ob
109. in the Freq Peak Search section amplitude reduction vibration amplitude frequency free resonance vibration frequency frequency Figure 13 1 Determination of the vibration frequency THE OPERATING MODE PANEL Mode Properties Easy Standard Advanced Mode Properties ES Free vibration amplitude 200m H Vibration frequency OOOO Auto set Set C Display sweep chart Free vibration amplitude Easy Standard Advanced The desired reference amplitude of the cantilever vibration The cantilever vibrates at this amplitude when it is far away from the sample The excitation strength is adjusted so that this vibration amplitude is reached Vibration frequency Standard Advanced The frequency at which the cantilever vibrates during the measurement This frequency can be set automatically as described at the start of this section When Auto set is enabled the Vibration frequency is automatically set each time an approach is started When Auto set is disabled the frequency can be set manually either by directly changing its value in the control box or by using the Vibration Frequency Determination dialog see Section 13 1 8 The Vibration Frequency Determination dialog page 121 for details The Vibration Frequency Determination dialog is opened by clicking se Display sweep chart Standard Advanced When active the results of the vibration frequency search measurements
110. ing a script file by browsing When the script is error free the script will start executing on clicking the Load button Otherwise and error message with an error description will appear THE SCRIPT EDITOR Other entries All scripts in the Scripts directory located in the easyScan 2 Software installation directory are displayed alphabetically below the Run From File menu entry Selecting one of these entries starts the corresponding script Scripts can be organized in subdirectories inside the Scripts directory which are displayed as submenus in the software These submenus are displayed before individual scripts in the Script menu The easyScan 2 software has an simple integrated Script Editor that allows editing running loading and saving scripts The can be used in parallel with other application windows so you can work with other parts of the application while editing a script The Script Editor is accessed via the menu Script gt gt Script Editor Script Editor oj Enter Script here VBScript example Display the remaining time until image is finished v1 0 Nanosurf AG connect to objects Dim objApp Set obj4pp CreateObject MobileS Application dim objScan Set objScan objApp Scan do while objScan lsScanning if objScan GetFrameDir 1 then remaintime objScan Lines objScan Currentline objScan Scantime 2 else remaintime objScan Currentline objScan
111. ion program which will guide you through the CAD program setup Otherwise you may exit now by clicking the Exit button 2 2 4 Manual installation of the USB Video Adapter driver If required for your controller follow the operating system specific instructions below for manual installation of the Video Adapter driver If Hardware recognition was completed automatically this section can be skipped Windows Vista To manually install the USB Video Adapter driver O In the Found New Hardware dialog for an Unknown Device click the Locate and install driver software recommended button The User Account Control UAC dialog may pop up after pressing this button displaying the text Windows needs your permission to continue for a Device driver software installation If this is the case Click the Continue button 25 26 CHAPTER 2 INSTALLING THE EASYSCAN 2 STM In the next dialog which states Windows couldn t find driver software for your device click the Browse my computer for driver software advanced button In the next dialog Browse to your CD drive usually D or manually type D or the corresponding drive letter into the Path field Make sure include subfolders is checked Then click the Next button Windows begins searching the specified path and since an unsigned driver is found a Windows Security window opens stating that
112. ip follow the structure of the sample s surface A height image can now be made by recording the position of the Z feedback loop as a function of the XY piezo position This landscape or topography of the atomic surface is then drawn line by line on the computer screen Topography Scan forward E a oO oO N E i 8 a So a D G de 58 5 El E 294pm Onm xt 4 37nm 4 37nm Figure 10 2 STM image of graphite SCANNING WITH THE EASYSCAN 2 STM The sample can also be scanned in a second mode When the feedback loop is slowed down very much the tip scans at a fixed distance from the sample constant height mode This time the variations in the tunneling current are measured and drawn line by line on the computer screen However this mode only works when the sample is atomically flat because the tip would otherwise crash into the sample 91 92 CHAPTER 10 STM THEORY CHAPTER 11 Technical data CHAPTER 11 Technical data The specifications given here are typical values of the Nanosurf easyScan 2 STM system The exact specifications vary somewhat from instrument to instrument and are given on the calibration certificate delivered with the instrument 11 1 1 The easyScan 2 Controller Electronics Controller size weight Power supply Computer interface Integrated USB hub Scan generator Scan drive signals Scan speed Measurement channels Scan area and
113. ipting Interface software for automating measurements Refer to Chapter 21 Automating measurement tasks page 217 and the Programmers Manual for more details Lithography Option software for professional lithography applications Refer to Chapter 17 Lithography page 166 for more information COMPONENTS OF THE SYSTEM e The TS 150 Active Vibration Isolation Table an active vibration isolation solution This section describes the parts that may be delivered with an easyScan 2 STM system The contents of delivery can vary from system to system depending on which parts were ordered To find out which parts are included in your system refer to the delivery note shipped with your system Some of the modules listed in the delivery note are built into the Controller Their presence is indicated by the status lights on the top surface of the Controller when it is turned on see Section 1 2 2 The easyScan 2 Controller page 16 Figure 1 1 Components The easyScan 2 STM system l easyScan 2 Controller with built in optional Signal Module A or Signal Module S electronics and other modules used for AFM operation 2 easyScan 2 STM Scan Head 3 Magnifying cover with 10x magnifier 13 14 CHAPTER 1 THE EASYSCAN 2 STM 4 USB cable 5 Mains cable 6 STM Tool set option The contents of the STM Tool set are described in the next section 7 The easyScan 2 Installation CD Contains software calibration files an
114. king and releasing an area is defined that has a size of 33 of the current measurement and centered on the clicked location Once an area is defined it can be resized by dragging one of its corners and moved to the desired position by dragging its center point A double click with the left mouse button in the chart or clicking the Zoom button in the Tool Results panel modifies the parameters Scan range X Y 149 CHAPTER 15 IMAGING Offset in the Imaging window accordingly When the zoom function is active it can be aborted by clicking Fu again D Move Moves the position of the imaged area An interesting corner can thus be moved to the center of the measurement The Tool Results panel numerically displays the change in position Topography Scan forward 10 41m Tool Results Panel gt Cursor position X Pos 4 843pm Y Pos 1 992um Z Pos 32 96nm i ra E N 5 ho hu a oe Tool status E Length 2 016um Oum Move 10 14pm Oum Kt The change in the position is indicated by an arrow The start of the arrow is defined by the mouse cursor position where the left mouse button is clicked the end of the arrow by the position where the button is released When the mouse is not moved between clicking and releasing an arrow ending in the center of the measurement is drawn The direction of the arrow can be adjusted by drag
115. le interaction constant This option is not available when the Modulated output is set to the Z Axis This setting can for example be used to measure tip current as a function of applied voltage whilst keeping the tip sample force constant Measurement Easy Standard Advanced Measurement 3 Data points 128 El Averages 1 E Input range check Abort action Abort modulation Max Deflection Sum E Min Deflection Bum E Data points Easy Standard Advanced The number of data points in one spectroscopic measurement The data points are equally distributed over the modulation range 161 162 CHAPTER 16 SPECTROSCOPY Averages Easy Standard Advanced The number of times the modulation is repeated to obtain an averaged spectroscopic measurement The measurement results of aborted modulations are discarded during averaging Input range check Standard Advanced In order to prevent tip damage due to too high tip sample interaction the settings below Input range check define a safe range of tip sample interaction When the interaction signal Deflection in static modes Amplitude in dynamic modes Current in STM mode leaves this safe range the measurement is aborted When a spectroscopy measurement has been aborted a warning dialog is displayed The number of aborts that occurred in a measurement is reported in Data Info panel as ModAborted lt number of aborts gt Abort action Standard Advanced
116. led with their signal names The signal names and their function are listed in the table Table 11 1 Monitor signals page 99 The calibration of the monitor signals can be found by looking up the signal calibration in the Scan Head Calibration Dialog reached via the menu Options gt gt Config Scan Head The magnitude of the physical signal can be calculated from the Monitor Signal voltage using the formula _ MonitorSignalVoltage 10 V In addition to the monitor voltages 15V and 15V voltage sources are available for driving small home made electronics The voltages are available on a three pole mini DIN connector The pin out of this connector is shown in Figure 11 1 Voltage source connector page 100 PhysicalSignal Unit Maximum Offset 11 2 2 Signal Module A Signal Module A can be used to add functionality custom operating modes to the easyScan 2 system in addition to the applications of Signal Module S The signals are available on twenty one BNC connectors that are labelled with their signal names The signal names and their function are listed in Table 11 1 Monitor signals and Table 11 2 Custom operating mode signals The sum of the modulation inputs and the output value for example of X Axis should not exceed the 10V to 10V range The Excitation signal should not exceed the 5V to 5V range In addition 15V and 15V voltage sources are available for driving small home made electronics
117. lever Editor dialog ccecsssseecceesceeeeseeeeeees 13 4 Scan Head configuration csccccccssccssssccccsscccccscsccccssscees 13 4 1 The Scan Head Selector dialog ooooomommmmossmmmmms oo 13 4 2 The Scan Head Calibration Editor dialog omo o 13 4 3 The Scan Axis Correction dial0g coooomocmmmmssmmmms sr o 13 5 The Controller Configuration dialog ccssccccsssssccsssscees 13 6 The Signal Module Configuration dialog cccccscscscssseoees 13 7 The Edit Access Codes dialog cssssccccssscccssscccccscssccssccooes 13 8 Simulate Microscope cscccccsscccccssscccssscccesscccccesescccsscooes 13 9 The About dialog ccsssccccssssccccscscccssccccenscccccecssccssssoees CHAPTER 14 Positioning 14 1 The Approach panel oooccccnocccnnonocnnonoccnonoccnnonocccnnnoncnnanoccnss AAA sousunu ss anesini CHAPTER 15 Imaging 15 1 The Imaging bar sccccssccssssssccsssscccsssccccsscsccccssccsssscess 15 2 The Imaging panel ssccccssssccssscscccssscccesscccccsscccsscsoees CHAPTER 16 Spectroscopy 16 1 The Spectroscopy bar ssccccsssccscssscccsssccccssccccccscecssssoees 16 2 The Spectroscopy pamel ccccccsccccsscccccssccccsscccccscscccssscooes 114 142 148 158 CHAPTER 17 Lithography 17 1 Performing lithography ssccccccsssccssssccccsscccccscsscccsscoees 167 17 2 T
118. m reaching the scan head Ideally the sample surface and the XY plane of the scanner run parallel to each other In most cases however the sample plane is tilted with respect to the XY plane of the scanner In this case the sample cross section in the X measurement 57 58 CHAPTER 5 IMPROVING MEASUREMENT QUALITY direction has a certain slope The Line graph chart in Figure 5 2 Maladjusted slope is an example vez Imaging window Joes Stop Finish JUp EjDown Zoom 0 Move W Full Spec caPhoto imaging Panel x Topography Scan forward E E Image size 05m E E ed z Time Line 02s E Points Line 128 E E Rotation 0 E XSlope 0 E Y Slope 0 E E 0 e Cees El Onm x 500nm Topography Scan forward Si97nm Mean fit 10 2nm Onm x 500mm Figure 5 2 Maladjusted slope Measurement with improperly set X slope This slope depends on the direction of the X direction and therefore on the rotation of the measurement as shown in Figure 5 3 Sample and measurement orientation before slope adjustment This slope is undesirable for several reasons e It makes it difficult to see small details on the sample surface because the Average Plane fit or higher order filters cannot be used properly e The Z Controller functions less accurately because it continuously has to compensate for the sample slope During measurement the measurement plane s
119. ministrator privileges IMPORTANT Do not run any other programs while installing the easyScan 2 software 2 2 2 Initiating the installation procedure To initiate the installation procedure Insert the easyScan 2 Installation CD into the CD drive of the computer In most cases the Autorun CD Menu program will open automatically Depending on your Autoplay settings however it is also possible that the Autoplay window opens or that nothing happens at all In these cases Click Run CD_Start exe in the Autoplay window or manually open the easyScan 2 Installation CD and start the program CD_Start exe IMPORTANT The easyScan 2 Installation CD contains calibration information hed files specific to your instrument Therefore always store a backup copy of the CD delivered with the instrument in a safe place O Click the Install easyScan 2 Software button The CD Menu program now launches the software setup program which will start installation of all components required to run the Nanosurf easyScan 2 software In Windows Vista the User Account Control UAC dialog may pop up after clicking the Install easyScan 2 Software button displaying the text An unidentified program wants access to your computer If the name of the program being displayed is Setup exe Click the Allow button After the software setup program has started O Click Next in the Welcome
120. mode Easy Standard Advanced Action to be performed when the tip is moving from one end point to a new start point in case the end point and start point are not the same The following options are available Lift up tip Only lift the tip upper position of the Z actuator of the scan head No feedback will be performed by the Z Controller during travel to the new start point Standard operating mode Switch the Z Controller operating mode back to the one selected in the Operating Mode Panel during imaging All values such as Tip speed Tip voltage Set point etc will temporarily chance back to the values used for imaging The Z Controller will be active during travel to the new start point THE LITHOGRAPHY PANEL Lithography Layers Easy Standard Advanced Lithography Layers ES Layer Name Tipspeed Tip voltage Set point o W aeo Tums 1V 25N 1 Mae 1um s Vv 25uN Edt Copy Delete Load Save Layer list Easy Standard Advanced Lists all layers that are present in the objects shown in the Lithography Objects list Layer 0 is always present even if no lithography objects exists and may be used to set the default Lithography parameter values see Parameters page 174 in Section 17 2 2 The Pixel Graphic Import dialog for details Edit Easy Standard Advanced Edit will open the Layer Editor dialog to edit the selected layer Copy Easy Standard Advanced Copy
121. n interaction that is too strong orange yellow The scanner is in its lower limit position This occurs when the tip sample interaction is weaker than the set point for some time The tip is probably not in contact with the sample surface CONNECTORS INDICATORS AND CONTROLS Module lights Scan Head lights Probe Status light Y Video Out connector Video In optional connector optional Signal Out connector Signal In Scan head optional connector cable connector optional Controller Serial number USB outputs to dongle USB power light Mains power USB input USB active connector from PC light Figure 1 4 The easyScan 2 controller green The scanner is not in a limit position and the feedback loop can measure the sample surface blinking green The feedback loop has been turned off in the software The Scan Head lights Indicate the Scan Head type that is connected to the instrument The Scan Head lights blink when no Scan Head can be detected or when the controller has not been initialized yet The Module lights Indicate the modules that are built in into the controller The module lights blink when the controller has not been initialized yet During initialization the module lights are turned on one after the other 17 18 CHAPTER 1 THE EASYSCAN 2 STM CHAPTER 2 Installing the easyScan 2 STM 20 CHAPTER 2 Installing the easyScan 2 STM The f
122. n Head you should also load the correct configuration file 13 4 1 The Scan Head Selector dialog The Scan Head selector dialog is opened via the menu Options gt gt Config Scan Head Load Loads a different Scan Head configuration file Save as Saves the current Scan Head configuration under another name Edit Edit the currently loaded Scan Head configuration using the Scan Head calibration dialog Always save a backup of the Scan Head configuration by clicking Save As SCAN HEAD CONFIGURATION 13 4 2 The Scan Head Calibration Editor dialog Scan head calibration editor Scan head calibration editor El Calibration file 19 04 001 hed Calibration file 19 04 001 hed Scan Axis N I O Signals 1 p e Scan Axis Y 10 Signals 1 p m Maximum scan ranges Maximum input signal values X Axis Range 9 4um E Set Deflection 5 416um El Y Axis Range 9 58pm El Set Amplitude 10V E Z Axis Range 1 727um El Set Phase 90 El Axis Orthogonality Tip current 1004 E XY Angle 95 El Maximum output signal values Rotation 3 E Tip Potential 10V E 7 y Drive Amplitude 1V E In this window the calibration of all standard Inputs and Outputs can be configured individually for a particular Scan Head The configuration of the User inputs and outputs is located in a different dialog Section 13 1 3 The User Signal Editor page 117 IMPORTA
123. ncy Config Used to open the Vibration Frequency Search Parameters dialog In this dialog the parameter defining the automatic vibration frequency search can be changed see Section 13 1 9 The Vibration Frequency Search Parameters dialog for details OK Accept the results of the automatic vibration frequency determination or the changes made to it manually Cancel Rejects the results of the automatic vibration frequency determination or the changes made to it manually THE OPERATING MODE PANEL Photo Takes a snapshot of the currently displayed sweep chart and displays it in a new measurement window Auto set Performs an automatic vibration frequency determination according to the parameters set in the Vibration Frequency Search Parameters dialog This procedure is identical to the one performed upon opening of the Vibration Frequency Determination dialog but you may choose to run it again if you moved the vibration frequency manually if you changed the vibration frequency search parameters after pressing the Config button or if you changed the magnification of the sweep chart by using the Zoom or Full buttons Zoom Zooms in on the current vibration frequency position determined by the automatic vibration frequency determination or changed manually A new frequency sweep with a smaller frequency range is performed to display the results No new vibration frequency is determined Zoom can be p
124. nd ticking the panel name in the View menu Control panels can be stacked to save display space When panels are stacked labels are displayed on the bottom of the control panel stack To put a control panel on top of the stack click its label To add a control panel to a stack drag either its title bar or its label to either the title bar or labels of the stack To remove a panel from a stack drag its label away from the stack To dock a stack of panel s to the side of its associated window or to the side of below another panel that is already docked to this window drag its title bar to the desired position using the mouse cursor It is possible to scroll the content of a control panel up and down when it is too small to display all the parameters it contains To do this move the mouse cursor over an area where it changes to a four pointed arrow Then drag the content up and down with the mouse cursor 12 5 2 Storing and retrieving the workspace When panels are opened they appear at predefined places in the main window This arrangement of the workspace is stored in the configuration file Default EZ2 AFM gui or Default EZ2 STM gui by default The location of the configuration files on the hard disk depends on the operating system you use Functions for storing and retrieving the workspace are accessed via the menu File gt gt Workspace Save saves the workspace to the currently selected worksp
125. nes or improve the isolation of the instrument by using a vibration isolation table e g the optional TS 150 active vibration isolation table 5 1 2 Electrical interference Electrical interference may be caused by interference in the electronics or by electrostatic forces acting between the tip and the sample Try the following in order to reduce the influence of electrical interference O Connect the instrument to the mains power supply using sockets with line filters and surge protection DECREASING THERMAL DRIFT Remove interfering electromagnetic field sources such cathode ray tube displays loudspeakers Temperature variations cause so called thermal drift This will cause images to be distorted This effect is present when the observed upward scan is very different from the downward scan for example showing two differently distorted lattices Topography Scan forward Topography Scan forward 2 13nm Line fit 296pm Line fit 296pm Topography range Topography range Onm x 2 13nm 2 13nm Figure 5 1 Consecutive upward and downward scan showing thermal drift Thermal drift is very clearly visible on an atomic scale Variations of 0 1 C already cause variations of several nanometers in length of for example the steel sample holder To decrease thermal drift keep the measurement running for some time to let the system stabilize up to about one hour and prevent air currents in the room fro
126. of the controller are off To fix this problem Check the connections and the power switch 9 1 2 USB Port error Nanosurf Easyscan 2 D USB Port error Port not found Check if USB cable is connected The USB serial converter is not available The USB cable is not properly connected In this case the USB power light on the easyScan 2 controller rear panel does not light up Figure 1 4 The easyScan 2 controller page 17 To fix this problem Check if the a second copy of the easyScan 2 is already running and occupying the USB port SOFTWARE AND DRIVER PROBLEMS O Check that the USB cable is properly connected If this does not solve the problem check if there is a driver problem with the USB Serial port USB Serial converter drivers as described in the next section 9 1 3 Driver problems If you have trouble connecting to the controller or if the video image in the positioning window is not available it is possible that one of the drivers of your instrument is causing problems for example because the installation did not work or the installation of some other hardware is in conflict with the drivers of the easyScan 2 In order to solve driver problems Check for driver updates on the Nanosurf Support web site O Insert the installation CD for your instrument Log in with Administrator priviliges The device manager can then be opened to view and correct any driver problems Open the
127. ol panels oooccccoocccnnnoccnnnnncnnnnnonnnnnnos 108 12 5 2 Storing and retrieving the workspace ssseceeeeeeeeeees 108 12 5 3 Entering values in the control panels ccccseseeeeeees 109 12 5 4 Storing and retrieving measurement parameters 110 12 6 The User Interface dialog scsesssscsssrcesserecsserccssssseessenee 110 88 94 104 CHAPTER 13 Hardware related settings 13 1 The Operating Mode patel cccccscscssssscccssccccsssssccssssoees 13 0 1 STM MOE csesasvccesssestevanesesssoensvandeesssshvssccedssdeveauaresves 13 1 2 Static Force MOde oocccccoonnnccnnnnnnonoccnnnnnnonononrnnnnnnnnnnnss 13 1 3 The User Signal Editor oooooccnnonocnnnnocnnnnnorrnnnncnnnnnnos 13 1 4 Dynamic Force mode ccesscccseeeeeceeeeeceeesececeneeeeeeees 13 1 5 Phase Contrast mode cccooonccnnnnnononocononnnonononnnnnannnnnnnnos 13 1 6 Force Modulation Mode ooocccccononcccnnnnninononnnnnnnnnninonos 13 1 7 Spreading Resistance MOdE ccccsseeeeceeeececeeeeeeeeees 13 1 8 The Vibration Frequency Determination dialog 13 1 9 The Vibration Frequency Search Parameters dialog 13 2 The Z Controller panel cccsscccssssscccsssccccsscccccssssccssssoees 13 3 Cantilever types CONFIGUIatTION ccccccssccrcssccccsscsecccscsoees 13 3 1 The Cantilever Browser dialog cssssecceeseceeeseeeeeees 13 3 2 The Canti
128. ollowing sections describe the installation of the easyScan 2 STM IMPORTANT To allow measurements with atomic resolution to be made the following precautions must be taken to keep the equipment dust and grease free e Never let your fingers touch either the wire for tips Figure 1 2 Contents of the Tool set page 15 item 6 the sample Figure 1 2 Contents of the Tool set page 15 item 7 nor the parts of the STM scan head indicated in Figure 1 3 Parts of the Scan Head page 16 e Only touch the Sample Holder Figure 1 2 Contents of the Tool set page 15 item 5 at the black plastic end IMPORTANT e Make sure that the mains power connection is protected against excess voltage surges e Place the instrument on a stable support in a location that has a low level of building vibrations acoustic noise electrical fields and air currents 2 1 1 Installing the easyScan 2 controller O Connect the USB Cable Figure 1 1 Components page 13 item 4 to the easyScan 2 Controller but do not connect it to the computer yet If you have inadvertently done this anyway Windows will attempt to install drivers for the newly found hardware When this happens O Do NOT break off the installation Insert the Software Installation CD if the Software Installation program should start choose Exit first and follow the steps described for the USB Video Adapter in Section 2 2 4 Manual installation of the USB Video Adapter
129. on results of the currently active tool The panel becomes visible when a tool is selected When the panel is not visible click amp in the navigator The contents of the tool results panel depend on the tool that is active The panel always contains a Cursor position and usually a Tool status section The Tool Results panel may also contain a Tool result and a Tool chart section THE TOOL RESULTS PANEL The Cursor position section Displays the coordinates of the mouse cursor when the cursor is inside the currently active chart Cursor position ES X Pos 4 21um Y Pos 4 765um Z Pos 166 6nm X Y Pos The X and Y measurement position Z Pos The displayed value depends on the chart type Color map and Shaded map charts Z Pos is the data value at the cursor position When evaluating these charts the displayed Z Pos value depends on the data filter of the chart because the Z Pos is taken from the filtered data More information on data filters is provided in Section 18 2 The Chart bar under Data filter page 189 Dual line graph charts Z Pos is the cursor position When evaluating these charts the displayed value only depends on the cursor position The value is independent of the data so the Data filter has no effect The Tool status section Displays the evaluation result of the currently active tool The tools that require drawing an arrow to define the evaluation have some common parameters that are d
130. ontal dashed line indicates the sensor amplitude corresponding to the currently selected vibration frequency 121 122 CHAPTER 13 HARDWARE RELATED SETTINGS Vibration frequency Shows the frequency that will be used as vibration frequency The value of this frequency can be changed manually by typing in the desired value by using the arrow keys beside the parameter field or by dragging the vibration frequency line dotted vertical line in the sweep chart area of the dialog box to a different location The latter can be done by clicking and holding the line s handle small black box in the center of the line and moving it around Any changes to the vibration frequency immediately update the measured sensor amplitude and corresponding horizontal dashed line in the sweep chart To use the currently shown frequency as the new vibration frequency leave the dialog with the OK button Free vibration amplitude While in the Vibration Frequency Determination dialog the free vibration amplitude normally set in the corresponding field inside the Operating Mode panel can be changed via this field When changed a new sweep is immediately performed and its results displayed Status This area shows the measured free vibration amplitude as measured by the photodiode sensor in mV and the excitation amplitude voltage of the shaker piezo input signal required to obtain the selected free vibration amplitude at the current vibration freque
131. ows bitmap bmp All of these image file formats are suitable for inclusion in electronic documents e g of word or image processing software The exact image as seen on the computer screen will be saved in the file screen shot Data file 16Bit dat A binary data file can be processed in image processing software This binary data format contains only the measured data The data is stored consecutively line by line upwards as 16 bit values 32768 to 32767 The data is first processed using the settings chosen in the Data filter setting of the Chart bar Plotfile ASCII plt This is an ASCII text format which contains the measured data as well as a small header with a description of the scan The data is stored using the setting Data filter in the Chart bar A measurement as a plotfile can be used for detailed data analysis by various mathematical software packages such as MathLab or plotted by GnuPlot If Line graph is selected as Display in the Chart bar only the visualized lines will be stored Each data point is stored as a pair of floating point numbers on a separate line The number pairs are separated by a blank character SPACE If any other chart type is selected all measured values are stored All values in a data line are stored on a separate line in the text file An empty line is inserted after every data line The data lines are stored from the bottom to the top A
132. parameter value to a slightly different value This happens when the desired value is outside the digitization range of the easyScan 2 Controller for example due to resolution or timing limits In such cases the desired value is automatically changed to the nearest possible value 109 110 CHAPTER 12 THE CONTROL SOFTWARE USER INTERFACE 12 5 4 Storing and retrieving measurement parameters All measurement parameters are stored in a configuration file with the extension par When the easyScan 2 software is started default values are loaded from a file that is selected in the Controller Configuration Dialog Section 13 5 The Controller Configuration dialog page 136 Functions for storing and retrieving parameters are accessed via the menu File gt gt Parameters Save saves the parameters to the currently selected parameter file The name of this file is indicated in the status bar at the bottom of the main window Save as saves the parameters under a new file name Load loads a previously saved parameter file IMPORTANT When you have not loaded another file Save will overwrite the original default parameter file with you current settings User Interface Programm Skin A O Microsoft Office 2003 O Microsoft Office 2000 User Interface Mode Easy level O Standard level O Advanced level Options M Save workspace on exit C Animated menu
133. parts dry before operating the motor again If the approach motor still does not move Take a cotton swab if necessary lightly moistened with alcohol Figure 8 2 Cleaning the sample holder guide bars O Clean the sample holder guide bars Figure 8 2 Cleaning the sample holder guide bars Clean the surfaces of the approach motor that touch the sample holder O Clean the tip holder remove the tip when doing this O Let the parts dry before operating the motor again To clean the case and the controls of the scan electronics Use a soft cloth lightly moistened with a mild detergent solution Do not use any abrasive pads or solvents like alcohol or spirits 75 76 CHAPTER 8 MAINTENANCE CHAPTER 9 Problems and solutions 78 CHAPTER 9 Problems and solutions The problems described here can occur during normal operation of the microscope If the suggested course of action does not solve the problem or the problem is not described here refer to Section 9 3 Nanosurf support page 84 9 1 1 No connection to microscope Nanosurf Easyscan 2 A No connection to microscope Check power supply and cable connection Start Simulation F Tagan This error message appears when the easyScan 2 software is waiting for an answer from the controller Most likely the easyScan 2 controller is not connected to the mains power or it is not turned on In this case the status lights on the top
134. ph of the current spectroscopy measurement For more information on adding and changing charts Chapter 18 Viewing measurements page 185 Start Stop Sat starts a spectroscopy measurement sequence and then changes to __ stop until the measurement sequence is finished Clicking stp aborts the measurement sequence as soon as the current modulation period is finished Point Line Starts the selection of the XY measurement position s in a topography Color map chart using the mouse cursor These positions are automatically transferred to the appropriate entries in the Position section of the Spectroscopy panel When selecting a line clicking the chart once creates a line from the clicked position to the center of the image 159 160 CHAPTER 16 SPECTROSCOPY eE Photo Captures the measurement currently displayed in the Spectroscopy window ina measurement document and displays it in a separate window If corners is clicked during the measurement a copy is generated when the measurement in progress is finished During the measurement the button remains pressed The capture process is cancelled by clicking photo a second time The measurement documents are labelled automatically with increasing numbers i e Imagel Image2 When leaving the program you will be asked if you want to save the unsaved measurement documents Modulation Easy Standard Advanced Modulation Q Modulated output Tip Potential
135. port using the Report software is given in the next section For more detailed information on starting and using the Report software see Section 20 2 Creating a report page 214 or refer to the Nanosurf Report online help The optional Nanosurf Report software can be used to evaluating the measurement and to create visually appealing reports Here we will just start the software and create a basic report To start the Report software O Click The Report software will now start open the currently selected measurement and evaluate it using the default template in the Navigator IMPORTANT After a fresh installation of the Report software the Report software has to be run at least once before it can be automatically started from within the easyScan 2 software To run the Report software for the first time select it from the Microsoft Windows Start menu Erom this point on there are several things that can be done Please refer to the respective chapters for detailed instructions FURTHER OPTIONS Performing a new measurement on another sample by repeating the instructions given in Chapter 3 Preparing for measurement and Chapter 4 First measurements with the new sample Improving measurement quality as described in Chapter 5 Improving measurement quality page 56 Performing a different type of measurement by choosing a different operating mode as described in Chapter 6 Operating modes page 66
136. r measurement page 29 for more detailed instructions Prepare and install a Pt Ir tip Install the HOPG sample To make sure that the configuration is correct do the following O Open the User interface dialog via the menu Options gt gt Config User Interface O Select the Easy level user interface mode Open the menu item File gt gt Parameters gt gt Load and load the file Default_EZ2 STM par from the directory that holds the default easyScan 2 configurations Usually this is C Program Files Nanosurf Nansurf easyScan 2 software Config 4 2 1 Entering values in the control panels To change a parameter in any panel Activate the parameter by clicking it with the mouse pointer or by selecting it with the Tab key O Incase ofa drop down menu selection list e g Phase Contrast v change the selection using the mouse or the up and down arrows on the keyboard In case of a numerical value use one of the following methods e Use the up and down arrow keys on the keyboard to increase or decrease its value The new value is automatically used after one second e Click the arrow buttons next to the parameter s value with the mouse pointer The new value is automatically used after one second Enter the new value using the keyboard The entered value is applied upon pressing the Enter or Return key or by activating another input
137. r more and a top width of 40 um or more please distinguish between mean width specified by most manufacturers and the actual top width of trapezoid shaped cantilevers e The back of the cantilever must have a coating that reflects infrared light Uncoated cantilevers transmit much of the infrared light of the cantilever deflection detection system In the Cantilever Editor dialog the following properties of a cantilever type can be entered CANTILEVER TYPES CONFIGURATION Name of cantilever The name of the cantilever type This name appears in the cantilever browser and the Cantilever type drop down menu in the Operating Mode Panel Manufacturer The name of the cantilever manufacturer This name appears in the cantilever browser and the Cantilever type drop down menu in the Operating Mode Panel Spring constant The nominal spring constant of this cantilever type This value is used to calculate the correct force Set point in the operating modes that use the static force for Z Control Section 13 1 2 Static Force mode page 116 Cantilever length The nominal length of this cantilever type currently not used Cantilever width The mean width of this cantilever type currently not used Resonance frequency air The nominal resonance frequency of the cantilever type in air This frequency is used for calculation of the automatic resonance frequency search range Section 13 1 4 Dynamic Force mode page 118 Q factor air
138. ressed several times to reach higher zoom levels Sweep Repeats the last frequency sweep the one that is currently displayed in the graphical area of the Vibration Frequency Determination dialog so that you may check resonance peak stability No new vibration frequency is determined Full Performs a frequency sweep over the full frequency range as set by the vibration frequency search parameters No new vibration frequency is determined 123 124 CHAPTER 13 HARDWARE RELATED SETTINGS 13 1 9 The Vibration Frequency Search Parameters dialog Vibration Frequency Search Parameters Peak search Frequency adjustment Start frequency Amplitude reduction El 20 El End frequency E ap Step frequency El OK Cancel The parameters for the automatic vibration frequency search are set here Start frequency Standard Advanced The start frequency for the coarse search End frequency Standard Advanced The end frequency for the coarse search Step frequency Standard Advanced The difference between two frequency points at which the cantilever vibration amplitude is measured during the coarse search If the increment is small the peak search is very accurate but takes more time If the increment is large the search takes less time When it is too large however there is a risk that the resonance frequency will not be found Auto set Standard Advanced When active the range and frequency increm
139. rf Report online help 20 2 1 The Report Menu New Report An empty report is opened Add Measurement The currently active measurement is added to the currently opened report Apply Template Opens a dialog that allows you to select a template that is applied to the currently active measurement Template list The template list is a list of the templates that are stored in the template directory see Section 20 2 2 The Report Generator Configuration dialog Selecting a template applies this template to the currently active measurement 215 CHAPTER 20 STORING AND PROCESSING DATA 20 2 2 The Report Generator Configuration dialog The Report generator configuration dialog is used to configure the behavior of the Navigator Icon and the Report menu It is opened using the menu Options gt gt Config Report Report generator configuration Navigation bar Apply the following template C Program Files Nanosurf Nanosurf Mobile SY Report menu Display templates in the following directory C Program Files Nanosurf Nanosurf Mobile S T err Navigation bar Determines what happens when the icon is clicked The check box determines whether the active measurement is evaluated using a template The Browse button is used to select the template that is used when the icon is clicked Report menu Determines which templates are displayed in the lower part of the Report menu
140. rom the ongoing measurement The imaging window can display as many charts as the size of the window can accommodate By default two charts are displayed a Line graph and a Color map of the sample Topography For more information on adding and changing charts Chapter 18 Viewing measurements page 185 start stop stat starts a measurement and then changes to s Clicking stop aborts the measurement as soon as the current scan line is finished THE IMAGING BAR Finish After clicking Fish the measurement stops when the current measurement has finished Up Bown Starts a single measurement or changes the scanning direction of the measurement in progress With mup the image is scanned from the bottom to top with mom it is scanned from the top to the bottom If a measurement has been started using up or mown the measurement stops automatically after one full image JP Zoom Selects an area that is to be measured in more detail The size and area of the area is displayed in the Tool Results panel Topography Scan forward Tool Results Panel x Cursor position 3 Line ft 200nm X Pos 4 922um Y Pos 5 391um Z Pos 305 2pm Tool status gt Size 10 08um One corner of the zoomed area is defined by the mouse cursor position where the left mouse button is clicked the opposite corner by the position where the button is released When the mouse is not moved between clic
141. rough these procedures you have to prepare a new tip O Follow the instructions in Section 7 1 Finishing scanning page 70 O Follow the instructions in section Section 3 2 Preparing and installing the STM tip page 30 Examples of images made with unusable tips Prepare a new tip when your image looks like one of the examples below Topography Scan forward 16 6nm Line ft 1 18nm Mean fit Topography range 16 6nm Onm xt 499nm Topography range Figure 5 5 The color map image consists of uncorrelated lines 62 CHAPTER 5 IMPROVING MEASUREMENT QUALITY Topography Scan forward 3 98nm E E g E 5 Onm t 3 97nm Mean ft 487pm 542pm Topography Scan forward 3 97nm Figure 5 6 The image is smeared out on one border here on the left border Line ft 903pm Mean fit Topography range Figure 5 7 Each image looks different 932pm 1 13nm Topography Scan forward Kt 3 91nm Topography range Topography range JUDGING TIP AND TUNNELING CONTACT QUALITY Topography Scan forward Topography Scan forward 8 29nm Line fit 25nm Mean fit Topography range 8 3nm Onm xt 498nm Topography range Onm t Figure 5 8 The scan lines in Line graph are unstable and the image in the Color map is blurred 63 64 CHAPTER 5 IMPROVING MEASUREMENT QUALITY CHAPTER 6 Operating modes 66 CHAPTER 6 Operating mo
142. rt Operating Instructions easyScan 2 STM Version 2 1 NANOSURF AND THE NANOSURF LOGO ARE TRADEMARKS OF NANOSURF AG REGISTERED AND OR OTHERWISE PROTECTED IN VARIOUS COUNTRIES COPYRIGHT APRIL 2009 NANOSURF AG SWITZERLAND PROD NR BTO2090 VERSION 2 1 REVISION 2 Table of contents Table of contents CHAPTER 1 The easyScan 2 STM 1 1 1 2 2 1 2 2 3 1 3 2 3 3 4 1 4 2 4 3 Components of the system ooooccccnooccnnnnocnnnnocccnnocccnnnnoconononess 13 1 1 1 Contents of the Tool Set oocccccnononccnnnnnnonononnnnnnnonononens 14 Connectors indicators and CONtKOLS ccccccccccccccsssccscceesees 15 1 2 1 The easyScan 2 STM Scan Head occcconccnncnccnnnnnoncncnnonnnnnoss 16 1 2 2 The easyScan 2 Controller occccoonnnccnnnnnnnnononnnnnnnnnnnnnnns 16 CHAPTER 2 Installing the easyScan 2 STM Installing the hardware cccccccccccssscccssssccccssscccssssccsssscoees 20 2 1 1 Installing the easyScan 2 controller cc seeeceeeeeeeeeeees 20 2 1 2 Installing the Signal Module S ooocccncoccncnnnonocconcnnnnnos 21 2 1 3 Installing the Signal Module A and its Connector Box 21 2 1 4 Installing the easyScan 2 STM Scan Head eeeeeeeeeeeee 22 Installing the easyScan 2 Software ccccscccccsssccccsssscccsssoes 22 2 2 1 Preparations before installing c ssseeccssseceeeseeeeeeeees 22 2 2 2 Initiating the installation pro
143. s Figure 1 2 Contents of the Tool set page 15 item 7 The supports are made of a magnetic steel that is galvanically coated with nickel Use conducting glue to attach the sample to the sample support Contact your Nanosurf distributor if you have difficulties obtaining such a glue 35 36 CHAPTER 3 PREPARING FOR MEASUREMENT 3 3 3 Mounting a sample To mount a sample onto the Sample Holder Unpack the Sample Holder Figure 1 2 Contents of the Tool set page 15 item 5 touching only its black plastic handle IMPORTANT Always store the Sample Holder in its package in order to prevent corrosion see Chapter 8 Maintenance page 74 O Put the prepared sample onto the magnetic end of the Sample Holder using a pair of tweezers Figure 3 6 Putting the sample on the Sample Holder Figure 3 6 Putting the sample on the Sample Holder Place the Sample Holder carefully in the scan head so that it doesn t touch the tip and in such a way that the sample is not pulled from the Sample Holder by the magnet that holds the Sample Holder in place Figure 3 7 Placing the Sample Holder in the Scan Head O Put the Sample Holder down on to the Sample Holder guide bars first and release it gently on to the approach motor s support Figure 3 7 Placing the Sample Holder in the Scan Head INSTALLING THE SAMPLE 37 38 CHAPTER 3 PREPARING FOR MEASUREMENT CHAPTER 4 First measurements 40 CHAPTER 4
144. s the tunneling current STM mode cantilever deflection static force 125 126 CHAPTER 13 HARDWARE RELATED SETTINGS mode or relative cantilever vibration amplitude dynamic force mode In the latter case the set amplitude is relative to the operating amplitude set in the Operating mode panel For example when a set point of 70 is used the Z Controller will move the tip closer to the sample until the vibration amplitude has decreased to 70 of the vibration amplitude far away from the sample Loop Gain Easy The speed of the Z Controller If the gain is too low the Z Controller will not follow the surface fast enough Thus the image will not be as sharp as it could be If the gain is too high the Z Controller will overshoot and may start to oscillate Thus the image will contain many measurement artifacts P Gain Standard Advanced The strength of the Z Controller reaction that is proportional to the error signal Increasing the P Gain decreases the error signal I Gain Standard Advanced The strength of the Z Controller reaction that is proportional to the integral of the error signal Increasing the I Gain decreases the error signal over time It is the least sensitive to noise and usually the dominant contributor to the topography measurement D Gain Advanced The strength of the Z Controller reaction that is proportional to the derivative of the error signal Increasing the D Gain decreases fast changes in th
145. sal of the scanning motion are not displayed in the measurement Disadvantages of using Overscan are that the maximum scan range is reduced the tip moves slightly faster over the sample with the same Time Line setting and the tip may hit large features outside the measured image The value of Overscan determines how much the scan range is increased relative to the Image width Ref Z Plane Advanced The height of the reference plane This height reference is used when the Z Controller output is cleared and when the Z position is not modulated relative to the current surface position during spectroscopy measurements Imaging Modes Advanced Imaging Modes ES Scan mode Continuous x Measurement mode Scan Forward lv C Const Height mode Rel lip Pos 100nm Scan mode The Y direction in which the data is acquired and displayed Continuous the acquisition direction is reversed after each scan from bottom to top and vice versa Cont Up from bottom to top Cont Down from top to bottom Operating mode The X direction in which the data is acquired and stored Forward during forward scan only left to right in the image THE IMAGING PANEL Backward during backward scan only right to left in the image Forw amp Backw during both forward and backward scan Const Height mode When the Constant Height Imaging mode is enabled the Z Controller is turned off during the scan
146. sceees 199 CHAPTER 20 Storing and processing data 20 1 Storing and printing measurements ooooocccnonocnnnnoccnnnoccnosos 212 20 23 Creating a report csisciconocccanioninacanacavanaciniacdacanios sovsecsncuesaveevss 214 20 2 1 The Report MenU oocccccnnnncccnnnnnnnnnnocnnnnnnnnononnnnnnnnnonaneos 215 20 2 2 The Report Generator Configuration dialog 216 CHAPTER 21 Automating measurement tasks 21 1 The Script Men ccceesccscsssoccsvessccseerceesesssenectsccodessoenseacosessvesess 218 21 2 The Script EqUtOl cicsscsessiccuesssccssesdccssecccanssescsecescstsecssecessauaees 219 21 3 The Script Configuration Dialog scccccsssscssssscccsssccoeees 220 Quick reference 166 186 196 212 218 222 About this Manual This manual is divided into two parts The first part provides instructions on how to set up and use your Nanosurf easyScan 2 STM system The second part is a reference for the software that comes with the easyScan 2 STM system It applies to Nanosurf easyScan 2 software version 2 1 If you are using newer software versions download the latest manual from the Nanosurf support pages or refer to the What s new in this version pdf file that is installed in the Manuals subdirectory of the directory where the easyScan 2 software is installed The first part of the manual starts with Chapter 1 The easyScan 2 STM page 12 which provides an introduction to the easyScan 2 STM sys
147. selected object to be imported when the OK button is clicked Objects can only be imported one at a time Clicking the Cancel button will abort the import process 171 172 CHAPTER 17 LITHOGRAPHY Preview Graphical area that displays the selected object in the available objects list see above The red cross if visible indicates the position of the object s origin Size Width Height Displays width and height of the selected object cell Scale factor The factor by which the selected object cell will be scaled A scale factor of 1 corresponds to the original object size If the scale factor is changed manually the object s width and height will be recalculated and displayed automatically Origin X Offset Y Offset The X Offset and the Y Offset of the origin of the selected object cell Set origin to center When enabled the origin of the object cell will be set to the center of the rectangle that encloses the object When disabled the origin will remain at the position that is defined in the object THE LITHOGRAPHY BAR 17 2 2 The Pixel Graphic Import dialog Pixel Graphic Import Yo Preview nanoSurf 81 x 66 pixels 256 layers Size Drigin Width 25pm E X D fset Oum El Height 20 37pm E Y Offset Opm El Parameters ike Simplify to 256 Layers X Black 0 204N E White 255 104N E DK Cancel The Pixel Graphic Import dialog appears after clickin
148. signal This name is used throughout the software Unit The base unit of the physical signal without prefix i e m not nm or um Calibration The physical signal values that correspond to the maximum and minimum signal voltages should be entered here Prefixes can be used here 117 118 CHAPTER 13 HARDWARE RELATED SETTINGS 13 1 4 Dynamic Force mode In addition to the same Operating mode and the User Input section as in the static operating mode two sections of parameters may be available depending on the user interface mode The dynamic force mode parameters can either be set manually or determined using an automatic search procedure The automatic search starts with a coarse measurement of a cantilever resonance curve Figure 13 1 Determination of the vibration frequency Throughout this measurement the cantilever is excited with a fixed amplitude while the excitation frequency is varied The resonance curve contains a measurement of the resulting cantilever vibration as a function of the excitation frequency When the search is successful the resonance curve contains a single peak at the free resonance frequency of the cantilever Afterward a second fine tuning search is performed in a 3 kHz frequency range around the resonance frequency detected in the coarse search The computer adjusts the value of Vibration frequency so that the cantilever vibration amplitude is reduced by the amount set in Amplitude reduction
149. sitioning the tip with respect to the sample The Approach panel e The Video panel only for AFM systems with Video Module e The Video display only for AFM systems with Video Module Click E in the Navigator to open the Positioning window The motor for the tip sample approach is operated using the Approach Panel Approach Easy Standard Advanced Approach Ready Retract Withdraw Y Advance Approach THE APPROACH PANEL Status Displays the current status of the approach stage Retract Increases the tip sample distance at maximum speed until the button is released Y Advance Decreases the tip sample distance at maximum speed until the button is released Withdraw Increases the tip sample distance with the settings given in the Approach Options Approach Starts the automatic approach During the automatic approach the tip sample distance is decreased until the Set point set in the Z Controller panel is reached or until the maximum approach time is reached Approach Options Standard Advanced Approach Options ES Tip Position 0 m F z J Le Retr Adv Appr speed 10 Sl Max Withdraw 500 El Max Approach 65000 E Auto start imaging J Auto reload settings Tip Position Advanced Determines the Z Position of the scanner when the approach motor stops When the Tip Position is changed when the tip is already approached to the sample th
150. sive set of analysis functions Complex analyses can be created interactively and then displayed and printed in visually appealing reports These reports can then be used as templates to apply the same analysis to another measurement The Report software is started from the easyScan 2 software by either clicking or using the Report menu When a measurement is opened by the report software it will import all measurement channels that are displayed in the current measurement document IMPORTANT e After a fresh installation of the Report software the Report software has to have run at least one time before you can automatically start it from the easyScan 2 software To run the Report software for the first time select it from the MS Windows Start menu CREATING A REPORT IMPORTANT e If you do not save the measurement in the easyScan 2 software but only save the report the data in measurement channels that were not displayed is lost e A measurement document should only display those channels that are used in a template When a template is applied to a measurement document that displays different or a different number of measurement channels than the template uses the results may not be correct The Report generator configuration dialog is used to configure the behavior of the Navigator Icon and the Report menu For an in depth introduction to the Nanosurf Report software refer to the Introduction section of the Nanosu
151. st dragging a corner defines a rectangular i e non square area Double clicking the graph or clicking the Cut out area button in the Tool Results panel creates a new measurement document that contains the selected area The Tool status section of the Tool Results panel displays the calculated Size or Width and Height of the selected area For more information on the Tool status section see The Tool status section page 197 203 CHAPTER 19 QUICK EVALUATION TOOLS tz Calculate Line Roughness Calculates several roughness parameters from the data at points along a selected line Tool Results Panel Cursor position Pos 33 24um Y Pos 18 94um Z Pos Opm Tool status Length 11 08um DeltaZ 3 342nm Tool result Name Value Length 11 08um Ra 8 3nm Topography Scan Forward Ra 11nm o Ry 57nm sN NN NS ab N R al Rp 27nm ka R Y S Ry 30nm Na NE a Rm 0 37nm oO E i T a Topography range Tool chart The line is selected in the same way as with the Cut out Line tool The Tool status section of the Tool Results panel displays the calculated Length and DeltaZ of the selected area For more information on the Tool status section see The Tool status section page 197 The Tool result section displays the roughness values that are calculated from the data according to the following formulas 204 The Roughness Average S
152. sted so that all points along the drawn line have the same height To get useful results the Data filter option for the display in which you draw the line should generally be Raw data or Mean fit Glitch Filter The Glitch Filter removes the effect of small defects in the image such as single short glitches in the scan Compared to the Noise Filter it has the advantage of 207 CHAPTER 19 QUICK EVALUATION TOOLS Topography Scan forward Topography Scan forward 10 1pm 10 14pm Mean fit 151nm EE Rawdata 151nm Topography range Oum Oum xt 10 1pm Oum xt 10 4pm Figure 19 2 Correct scan line levels left uncorrected image with a line through points that should be at the same height right corrected image not reducing resolution on step edges The glitch filter is implemented as a Median filter on a 3x3 pixel matrix To apply the filter activate the color map chart that is to be filtered then click the Glitch Filter button in the Tools bar A new Measurement document with the filtered data is created Figure 19 3 Glitch Filter left unfiltered image with some glitches where the tip lost contact with the sample right corrected image Topography Scan forward Topography Scan forward 20m 20m Parabola fit 59 8nm Parabola ft 59 8nm Topography range Oum Oum 20m Oum KE 20m Oum KE 208 THE TOOLS BAR sw Noise Filter Topography Sc
153. tain the required tip sharpness 31 32 CHAPTER 3 PREPARING FOR MEASUREMENT Figure 3 2 STM tip Scanning Electron Microscope images of an STM tip O Use the pointed tweezers to hold the tip wire with just behind the tip O Release the flat pliers IMPORTANT e Never touch the end of the tip with anything Ensure that the tip wire is straight e Do not twist the tip clamp in any way nor lift it too high The procedure for mounting the tip under the tip clamp depends on the type of clamp on your scan head single or double clamp Single clamp A B L4 2 Figure 3 3 Mounting the tip under the single clamp In case of a single clamp scan head proceed as follows Put the tip wire on the tip holder parallel to the groove in the tip holder so that it crosses below the tip clamp Figure 3 3 Mounting the tip under the single clamp A PREPARING AND INSTALLING THE STM TIP O Move the tip wire sideways until it is in the groove in the tip holder Figure 3 3 Mounting the tip under the single clamp B The freshly cut tip should be securely held under the clamp and extend about 2 3 mm beyond the tip holder The tip is now installed Double clamp A B C i Y aaf Figure 3 4 Mounting the tip under the double clamp a Always use the following procedure for mounting the tip under the double clamp as using a different procedure may cause a gradual deterioration of the measurement quali
154. tains its own sample description All samples should be stored in their respective box This way it should not be necessary to clean them Cleaning of the samples is generally not advisable unless indicated below because their surfaces are often rather delicate Gold thin film Cleaning the sample is neither possible nor necessary Never touch the sample with your fingers or put it upside down anywhere this will only make it unusable faster Graphite HOPG on sample support This sample can be used for STM as well as AFM measurements In STM measurements atomic resolution can be obtained on this sample INSTALLING THE SAMPLE Sample specifications Size 5mm x 5 mm Material Highly Oriented Pyrolytic Graphite HOPG Sample support Magnetic Steel disc galvanized with Nickel The surface of the graphite sample can be cleaned when it is very dirty or uneven Due to the layered structure of graphite this can easily be done using a piece of adhesive tape Figure 3 5 Cleaving graphite Y Figure 3 5 Cleaving graphite O Put the sample on the table using a pair of tweezers O Stick a piece of adhesive tape gently to the graphite and then pull it off again The topmost layer of the sample should stick to the tape O Remove any loose flakes with the tweezers The graphite sample is now ready for use and should not be touched anymore Other samples You can mount other samples on the spare disc shaped sample support
155. tem and with Chapter 2 Installing the easyScan 2 STM page 19 which should be read when installing your system Chapter 3 Preparing for measurement page 29 and Chapter 4 First measurements page 39 should be read by all users because they contain useful instructions for everyday measurements The other chapters provide more information for advanced or interested users The second part of the manual can be used as a reference for the Nanosurf easyScan 2 software that controls the STM It starts with Chapter 12 The control software user interface page 103 and ends with Chapter 21 Automating measurement tasks page 218 This part describes the functions of all buttons inputs dialogs and control panels of the easyScan 2 software The final chapter of this manual Quick reference page 222 contains an index to the software reference part of the manual for quick retrieval of the relevant information locations For more information on the scripting interface of the software packages refer to the online help file easyScan 2 Script Programmers Manual that is installed together with the easyScan 2 software For more information on the optional Nanosurf Report software refer to the online help included with the Nanosurf Report software t s DM Ye 2 h 1 A CHAPTER 1 The easyScan 2 STM 12 CHAPTER 1 The easyScan 2 STM The Nanosurf easyScan 2 STM system was designed to allow people without training as a physicist
156. ters to remove unwanted measurement artefacts e Set the light source direction to 90 parallel to the scan lines e Click E once or twice until no clipping of high features is visible or adjust the Span and Center Properties 18 2 3 The Color Palette dialog Color Palette Palette preview Palette type O Black amp White ote Ey A O Look Up Table The color palette dialog is reached via the menu item Options gt gt Config Color palette The color palette is used to map the display range of the measured values to a color Three different palette types are available Black amp White The color map is a linear gray scale Color The color selection uses the HSB color model where the color H is set in value The color is selected by entering a number or by clicking a color in the color bar Look Up Table A user definable palette with max 256 color entries can be selected This palette is stored in a lut file that contains an ASCII table with RGB color values A different look up table can be selected by clicking the Browse button THE DATA INFO PANEL The Data Info panel can be opened by clicking in the navigator and displays detailed information about the measurement such as the current tool results the measurement date and time the measurement parameters and the hardware that was used CAN EJ B Scan group 0 1mm Om Omm
157. the Controller must be sent in to your local Nanosurf distributor for installing the Signal Module A electronics in the Controller 2 1 4 Installing the easyScan 2 STM Scan Head To mount the Scan Head Attach the Scan Head cable to the easyScan 2 Controller O Place the Scan Head onto the vibration isolation platform Figure 1 1 Components page 13 item 10 O Fix the scan head cable under the strain relief clip on the platform If the vibration isolation of your table is insufficient for your measurement purposes use an active vibration isolation table such as the TS 150 Refer to the respective manuals for installation instructions 2 2 1 Preparations before installing Before installation the following steps need to be performed O Make sure the computer to be used meets the minimal computer requirements as described in Chapter 11 Technical data under Computer requirements page 95 O When the easyScan 2 controller is connected to the computer via the USB cable disconnect it by unplugging the USB cable from the computer The easyScan 2 controller should only be connected to the computer when the software and driver installation is complete Ifyou are running Windows Vista disconnect from the internet This step is necessary to prohibit Windows Vista from obtaining an improper driver from the Internet O Turn on the computer and start Windows INSTALLING THE EASYSCAN 2 SOFTWARE O Log on to your computer with Ad
158. the Data Info panel together display all measurement information Charts display the measured data Charts occur in Measurement document windows the Imaging window and the Spectroscopy window The Data Info panel displays information about the measurement most importantly measurement settings A Chart consists of a graphical representation of the measured data and additional elements that give information about the chart itself Figure 18 1 Elements of a Chart Topography Scan forward Signal 10 1pm Chart range Data filter Rawdata 215nm Color scale Data range indicator Topography range G E e E Line selection arrow Oum xt 10 4pm Figure 18 1 Elements of a Chart These additional elements show the displayed Signal Chart type the type of Filtering applied to the data and the Color scale used to display the data The Color scale shows which measured signal level is mapped to which color The color mapping can be changed using the Color Palette dialog described further on in this section The Data range indicator shows the range of possible measurement values that is occupied by the measured data The Chart bar is used to create new charts and to modify their properties The chart configuration of the Imaging and Spectroscopy window can be saved to a THE CHART BAR file The chart configuration of the measurement documents is saved together with the document 18 1 1 Storing
159. tion Spec forward Modulation ES Modulated output Ziri 5 Start value 0 45um End value 0 01pm Modulation time 0 5 s E 5 a 3 3 e Ed El 2 olaaa Measurement Data points 128 Deflection range Averages 1 aD Z Axis i Position Deflection Spec forward 3370m Sequence Points 64 XPos from 5 36pm Y Pos from 5 47pm Rawdata XPos to 0 82pm Y Pos to 2134m DDD pw S 450nm Taxis nm Figure 16 1 Spectroscopy window In a spectroscopic measurement the input channels are measured as a function of a modulated parameter This modulated parameter can be the Z distance to the sample the tip voltage or a User output channel when Signal Module A is installed Note that you must electrically connect the sample to the ground connector on the easyScan 2 STM Scan Head to apply a tip sample voltage difference The measured parameter can be any available input channel Examples of a spectroscopic measurements are force distance curves in the AFM static force mode amplitude voltage curves in the AFM dynamic mode or current voltage curves with the STM The accuracy of the spectroscopic measurements can be increased by averaging the measurement results of several consecutive modulations A spectroscopic measurement sequence consists of a number of spectroscopic measurements of the same type measured
160. tions for maintenance have to be followed It is very important to keep the Sample Holder and the open parts of the scanner clean Ifexposed to moisture high humidity corrosion will occur 8 1 1 Protecting the sample holder against corrosion The sample holder is made of magnetic steel and therefore suffers from corrosion in a humid environment The approach motor will not run well if the sample holder is dirty or corroded To reduce corrosion and increase life expectancy the sample holder must be stored in its container together with the moisture absorbing silica container The container is waterproof but not airtight The silica contains a blue indicator which turns pink when saturated mo ce Al o Em Ye M Ri N ee Figure 8 1 STM Sample Holder Container from left to right Screw cap Sample holder Silica container Sample Holder Container To regenerate the silica Heat the silica container at 100 C for at least two hours until it turns completely blue again 8 1 2 Cleaning parts of the approach motor If you have touched the metal part of the sample holder or it has otherwise become dirty or if the approach motor does not move the Sample Holder should be cleaned To do this Take a soft cloth if necessary moistened with alcohol SCAN ELECTRONICS Clean the sample holder by moving the cloth along the sample holder in the axial direction Do not move it around its circumference O Let the
161. to do experiments in the world of atoms Its design is compact simple and comfortable to operate With the easyScan 2 STM it is possible to do all STM experiments that can be carried out in air The tip sample approach stage allows simple handling of samples and tips while at the same time providing maximum stability of the tip sample distance All functions can be carried out using a computer and the easyScan 2 software The easyScan 2 STM system is a modular scanning probe system that can be upgraded to obtain more measurement capabilities The main parts of the basic system are the easyScan 2 STM Scan Head the Vibration Isolation Platform the easyScan 2 Controller and the easyScan 2 software The content of the system and the function of its major components are described in this chapter Detailed technical specifications and features can be found in Chapter 11 Technical data page 94 Several other Nanosurf products can be used in conjunction with the easyScan 2 STM e STM Scan Head makes atomic scale measurements Refer to the easyScan 2 STM Operating Instructions for more details e Signal Modules allow monitoring signals Module S and creating custom operating modes Module A Refer to Section 11 2 The Signal Modules page 97 for more details e Nanosurf Report software for simple automatic evaluation and reporting of SPM measurements e Nanosurf Analysis software for detailed analysis of SPM measurements e Scr
162. ty due to loosening of the clamp Hold the tip wire at a slight angle and move it along the groove against the first clamp so that the end of the wire is under the clamp Figure 3 4 Mounting the tip under the double clamp A O Lower the wire so that it lifts the first clamp Figure 3 4 Mounting the tip under the double clamp B Push the wire in until it touches the second clamp Lift the wire Push the end of the wire below the second clamp Lower the wire so that it lifts the second clamp Figure 3 4 Mounting the tip under the double clamp C Push the wire under the second clamp The freshly cut tip should be securely held under the clamp and extend about 2 3 mm beyond the tip holder The tip is now installed 33 34 CHAPTER 3 PREPARING FOR MEASUREMENT 3 3 1 Preparing the sample IMPORTANT Never touch the sample surface once it is prepared The STM can be used to examine electrically conductive materials In practice however the choice of material is more limited because the surface of the sample must be totally clean and mirror like to obtain useful results and it must be in a non oxidized state to be conductive Because of this some samples need special preparation 3 3 2 Nanosurf samples Nanosurf delivers various optional samples which are usually packed in the STM Tool Set These samples are briefly described here Further samples are available in the STM Extended Sample Kit which con
163. uring automatic approach Save the new value of Appr Speed using the menu File gt gt Parameters gt gt Save 9 2 3 Automatic final approach crashes the tip into the sample In this case the motor moves the sample holder towards the tip with too large steps Open the User Interface configuration dialog using the menu Options gt gt Config User Interface Set the User Interface Mode to Standard level or Advanced level Decrease the value of Appr Speed in the Approach Options section of the Approach Panel by 10 O Repeat the approach with a new tip If the approach fails again reduce Appr Speed further O Save the best Appr Speed value using the menu File gt gt Parameters gt gt Save STM MEASUREMENT PROBLEMS 9 2 4 Image quality suddenly deteriorates There are several possible causes for this phenomenon Z Drift The tip drifted outside the Z range of the scanner In this case the Probe Status light see Figure 1 4 The easyScan 2 controller page 17 will either light up orange yellow or red If the light is orange yellow the tip has lost contact with the sample Click Approach in the Approach Panel then repeat the steps in Chapter 4 First measurements page 40 If the light is red the tip has drifted into the sample You can try to move the sample surface within the Z range of the scanner although the tip may
164. vibrations due to instability of the feedback loop These vibrations remain visible in the Current Amplitude or Deflection signal Therefore always monitor these signals when optimizing Z Controller settings especially when using the Adaptive PID Error Range Advanced The range of the error signal used to control the Z Position The error signal is the difference between the signal used for topography feedback and the current set point When the value of Error Range is reduced the resolution of the error signal is increased 127 128 CHAPTER 13 HARDWARE RELATED SETTINGS Tip Properties Standard Advanced Tip Properties Tip voltage OmV E Tip Voltage Standard Advanced The potential to be applied to the tip The voltage that can be used lies between 10V and 10V In the STM the sample is automatically connected to the ground of the instrument In the AFM the sample has to be electrically connected to the instrument chassis ground for accurate measurements The cantilever types that you can select from in the Operating Mode Panel are configured using two dialogs The cantilever browser and the cantilever editor dialog The cantilever types configuration is stored in a file called cantilever ini located in the Local Settings directory of the user logged on to the computer 13 3 1 The Cantilever Browser dialog Cantilever Browser Select the cantilever type to modify
165. will open the Layer Editor dialog see Section 17 3 1 The Layer Editor dialog to edit the selected layer before copying it When changes have been made if any and the OK button is clicked a new layer is generated IMPORTANT Upon creation of a new layer the layer number will be incremented to the next available layer number If a total of 256 layers is reached no more layers can be added Delete Easy Standard Advanced Used to delete a layer Delete will open a warning dialog to confirm the deletion of the selected layer IMPORTANT Only layers currently not assigned to any object can be deleted 177 CHAPTER 17 LITHOGRAPHY Load Easy Standard Advanced Load a predefined layer list lld Layers that are needed to display the current objects that are not part of the loaded list will be created Save Easy Standard Advanced Save all the layers to a layer list file ld 17 3 1 The Layer Editor dialog Layer Editor Layer Layer Name Layer Color a Common parameters Tip speed 9 4ym s El Tip voltage 1Y El STM parameters Set point 10n4 El Static Force parameters Set point 204N El Dynamic Force parameters Set point 20 El Free vibration amplitude 1 E Default OK Cancel The Layer Editor is used to set the controller parameter values to be used during lithography Common parameters Used to set the common parameters Tip speed and Tip voltage Tip speed
166. y to decrease noise by decreasing the Loop gain of the Z Controller Try varying all of the above parameters to get a good image such as the one in Figure 4 5 A successful graphite measurement Topography Scan forward Topography Scan forward 233pm a N e K E o El Mean fit Topography range 294pm Onm xt 4 37nm xt 4 37nm Figure 4 5 A successful graphite measurement When youre satisfied with the image quality obtained you may want to save the measurement Refer to Section 4 6 Storing the measurement page 51 for details on how to do this 4 5 2 The graphite surface In a good color map chart of graphite you will see a pattern consisting of bright intermediate and dark spots It looks like a three dimensional image of balls lying next to each other but be careful these are not the single atoms To interpret the image correctly you must first be aware that bright spots show high points and dark spots low ones In the lattice model of graphite Figure 4 6 The graphite surface page 50 one can see that there are two different positions of the carbon atoms in the graphite crystal lattice one with a neighboring atom in the plane below gray and one without a neighbor in the lattice below white As a consequence the electrical conductivity of the graphite surface slightly varies locally so that the atoms without neighbors appear higher than the others 49 50 CHAPTER 4 FIRST MEASU

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