Teledyne TV Video Accessories IGE 3000 User's Manual
Contents
1. WI ee de AV ie ae J a Figure 5 Output Graph MEAN FULL SCALE oak m Lad i T IGE3000 m m 8 EE ST O A A A r r Se Se F D PIO EPI FIS i ESE ESE E 1 E 10 1 E 09 1 E 08 TUNE TN 1 E 07 1 E 06 1 E 05 1 E 04 CALIBRATED STANDARD 169 082010_Ion Gauge 3000 Page 14 of 21 6 1 ADVANCE SETUP GUIDE The IGE 3000 has several setup and control commands which can be accessed by using the ADJUST rotary encoder and SELECT push button while viewing the display Note that most of the commands which are described below can be accessed using equivalent RS232 485 Commands The advanced setup is accessed from NO MODE the default run mode Each click of the ADJUST rotary encoder in the clockwise direction will advance the display through each command Once arriving at the desired command the user can change the parameter or initiate command by slowly pressing the SELECT push button If the user wishes to save any changes simply go to the Save EE prom mode press select When finished with the advanced setup the user may return to the normal NO MODE by turning the ADJUST counterclockwise until the pressure is once again displayed Note that turning the ADJUST clockwise indefinitely will continuously cycle through all the commands The commands are Normal Run RS485 Address Baud Rate Data bits Pari2. 723 6531 TOLL FREE 1 800 950 2468 FAX 757 723 3925 E MAIL hastings_instruments teledyne com INTERNET ADDRESS http www teledyne hi com Repair Forms may be obtained from the Information Request section of the Hastings Instruments web site 169 082010_Ion Gauge 3000 Page 20 of 21 amp Schematics 10 Drawings DISP ROTARY ENCODER RS232 485 STATUS BAR LAY AAA High Low H F P f Emis DGas SP K Fil PUSHBUTTON RS485 ONLY D CONNECTOR POWER SUPPLY al 3 1 U N ON TELEDYNE FZ HASTINGS 2 50 IONIZ gt GAU 5 27 s Y EXTERNAL NS NV HOUSING gt 1 ae A 169 082010_Ion Gauge 3000 Page 21 of 21
3. B TUBEINSTALINNDON G a do a a de 9 3 7 MOUNTING B A TUBE TO IGE 3000 ELECTRONICS MODULE aaiaaaaaanaaaasasaasassasassasasasasasdadadadadadauaudadadadaddddadadakadaaaaa 9 3 8 ENVIRONMENTAL r aa a Dos 9 4 OPERA N O 1 E E PE A aka aa E E N ETE eRe sa sasa RR ETE Ree ne 10 4 1 SO E EARE II b n A II b II r as d 10 A PRONT PAA OVER VLE Wa a a r r siovsies 10 4 3 OPERATING MODE sols s a nl ant net ee 11 4 4 REMOTE FILAMENTCON TRO a eat aa 12 S THEOKY OFOPERATION a aaa 14 6 SELUP GUIDE carita bn a t a d 15 6 1 ADVANCESETUP OUID biasa arb Vela aaa a 15 6 2 R ADD a a EE E TO EA e e al o da la do 15 6 3 BATDORATE in l sh 15 6 4 DATA BITS PARIT Y BUS STOP BITS vala a R a aswel Via 16 6 5 TURNAROUND DELAT aoee extensors sce des 16 6 6 A v ON 16 6 7 RESTORE EE PRO M 12 Sala e ee 16 7 SS IS o ha a A S A N E a T NER AE EEEE a a 17 7 1 RSS AS a a n O o a a ts a a as l O an 17 8 DEVICES S s ss sa ETRE 18 8 1 ION GAUGE DEVICE STATUS 4 DIGIT OCTAL WORD aaaiaaaaaaaaaanaaaaaaaaaaaaaaanaaaaaaaaaadadadadadadaada a aaaadaaaaaaa 18 8 2 COMMAND VIN A o nou ete dos iS 18 8 3 INTERROGATION COMMANDS cccsscecceccscescsceccscescescescssescescescescscescescscscescescscsscesescescescssescescescescscescescescesessescescueces 19 8 4 PARAMETER MODIFICATION COMMANDS cccsceccececcececcscccececcecscescececsceecscesescusesceseecscescecscscescscesescusescesescesesencass 19 9 WARRANTY narnia 20 9 1 WARRANTY REPAIR POL
4. E TELEDYNE HASTINGS INSTRUMENTS INSTRUCTION MANUAL IGE 3000 ION GAUGE HASTINGS AA TELEDYNE R HASTINGS INSTRUMENTS C c ISO 9001 CERTIFIED Manual Print History The print history shown below lists the printing dates of all revisions and addenda created for this manual The revision level letter increases alphabetically as the manual undergoes subsequent updates Addenda which are released between revisions contain important change information that the user should incorporate immediately into the manual Addenda are numbered sequentially When a new revision 1s created all addenda associated with the previous revision of the manual are incorporated into the new revision of the manual Each new revision includes a revised copy of this print history page Revision A Document Number 169 032006 aiana avauzaaassasa sasansassnaansannnannannnnnnnnnnnnnnnnnnnnnnnnannni March 2006 Revision B Document Number 169 082006 iiaaaaaiaaaaaaaasaesasassnssanannnnnnannnnnnnnnsnnnnnnnnnnnnnnnnnnnnnini August 2006 Revision Document Number 169 10 200 7 ninia nns E October 2007 Revision D Document Number 169 062008 aaaaaaaaaaaaavasvav ssanasnannnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnannaa June 2008 Revision E Document Number 169 082010 oocccccnncnnccnccnnconconoconcnnccnncononnncnncnncnnnconcnnnrnncnnonos August 2010 us Visit www teledyne hi com for WEEE disposal guidance CAUTION If equip
5. LED s F1 or F2 will be illuminated indicating which filament is selected and that it is turned on a STATUS BAR D gt P LAY AR 22 3 A High lw OH I N _ 24 Vdc POWER INPUT Y gt N SET POINT _ LOW y POWER E N RETURN dE Emis DGas SP K Fil PUSHBUTTON INT A DY gt kil s DU gt E lee f F lod d goa ENCODER NII lb SET POINT _ o 10 N ADJUST SELECT HIGH 5 VS M N J di de DIGITAL lt REMOT GROUND START ONLY IGE 3000 FRONT PANEL D CONNECTOR 169 082010_Ion Gauge 3000 Page 5 of 21 2 General Information 2 1 GENERAL INFORMATION The Teledyne Hastings Instruments IGE 3000 is a small fully self contained ion gauge electronics module The mini Bayard Alpert style 10n gauge tube is attached to the electronics module by a 12 pin circular connector The IGE 3000 is designed for quick easy installation and will provide the user with long lasting trouble free reliable vacuum measurement 2 2 IGE 3000 Mini Bayard Alpert B A Tube The IGE 3000 mini B A tube is all metal construction with the primary enclosure fabricated of 304 stainless steel It is UHV compatible and utilizes a fine wire collector located in the center of the grid The duel Yttria
6. by wiring relay contacts or a transistor switch across pins 8 and 9 refer to section 2 5 Figure 1 and Figure 3 below Pin 8 is digital ground and pin 9 is the filament control line The IGE filament will turn on when pin 9 is pulled low or grounded This may be accomplished either by relay contacts or by utilizing a transistor switch A contact closure connected across D connector pin 8 and pin 9 must be such that it closes when the IGE 3000 is to be turned on The transistor circuit connected across D connector pin 8 and pin 9 should be such that it conducts and provides a ground path when the IGE 3000 is to be turned on FIGURE 3 REMOTE FILAMENT CONTROL CONTROLLING VACUUM IGE 3000 GAUGE D POWER CONNECTOR REMOTE START RELAY INTERFACE CONTROLLING GAUGE D POWER CONNECTOR REMOTE START TRANSISTOR INTERFACE NOTE Manual operation is unaffected by using remote control 1 e Filament can be turned off manually 1f turned on via remote control and filament can be turned on manually after being turned off via remote control 169 082010_lon Gauge 3000 Page 13 of 21 of Operation The functional parts of a typical ionization gauge tube are the filament cathode the grid anode and the ion collector refer to Figure 4 below The IGE 3000 control circuit maintains the grid voltage is maintained at 30 VDC the grid voltage is maintained at 180 VDC and the collector is 0 VDC relative to ground curr
7. coated filaments are individually supported to provide uniform output over variations in temperature and normal ageing The typical user should experience a filament lifetime of approximately 10 000 hours Its physical size is much smaller than the traditional glass type B A tube Since there is no glass envelope the traditional safety concerns associated with glass type B A tubes is eliminated 2 3 Specifications ETESSUTO ASS aa a us due tal aaa Sanda b a V a L cade eels emt kanta Hn 1x10 2 to 1x10 10 Torr FOI a E n ai 15 of reading for the range 1x10 2 to 1x10 8 Torr A o y o O S teesetaeseotiatessinacatieneass 564 5W e beam BSS UA red coia l 0 01 0 1 1 mA or Auto Flament Dias Poten tal ricota 30 V 0 3 Ea A PP A 180 V 0 3 DDE CPS T a E 0 50 C Doa GOMUL ENT it RS232 485 CONTE TO TT H Io 15 pin subminiature D Bake ont Ac 8 povas E 200 C with electronics removed Electrical Noise IMMUNI Va sra ENC 61010 Class A and IEC 61326 1 Section 6 2 Input Voltage Operating Range aaaaaaaaaaaasaasisasassasassass sasstsanaanansansnnansnnnnannnnaana 11 5 VDC to 30 VDC VINE PON E aan 24 VDC 350 mA Normal Operation PP A SEA A N TEIT N E 24 VDC 850 mA During Degas Power Interface MA A des 15 pin subminiature PROCESS CONO errata dro ais 2 independent TTL set point outputs O ina 1 5 Ibs max ANS UICC MOUNTE lala a tesis Any position Remote COICO a a a a a a a k r S a r BII II a a A a E A IGE 3000
8. housing 3 8 Environmental Indoor use Operating temperature range from 0 to 40 C Maximum relative humidity 80 for temperatures up to 31 C decreasing linearly to 50 Relative humidity at 40 C 169 082010_Ion Gauge 3000 Page 9 of 21 4 Operation 4 1 Operation 4 1 1 Apply Power Apply 24 VDC Power to the D connector pin 3 and 4 Refer to Section 2 5 Figure 1 for the D connector pin out information After power is applied the IGE 3000 will go through self test CPU initialization and LED test The individual LED s will sequentially illuminate then the IGE 3000 enters the No Mode and is operational 4 1 2 Operate Tube shut off feature that will not allow filament turn on at pressures above 1x10 Torr The shut off feature will also automatically turn off the filament if it is turned on below 1x10 Torr and pressure rises above 1x10 A Before operating tube ensure vacuum is below 1x10 Torr The IGE 3000 has an automatic To turn on the tube s filaments DOUBLE CLICK the select button Note Double clicking the SELECT button while the filament is already On will turn it OFF Initially dashes will remain on the display However as the tube heats up and starts operating within seconds the pressure will be displayed LED s F1 or F2 will be illuminated indicating which filament is selected and that it is turned on NOTE Although rare difficulties turn
9. is calibrated with and matched to the B A tube at the factory Changing or swapping the B A tube with a B A tube one other than the one originally shipped with the unit may effect the calibration Accuracy specification is with the B A tube originally shipped with the IGE 3000 The Complies with IEC 61010 1 Safety requirements for measurement control and laboratory use 169 082010_Ion Gauge 3000 Page 6 of 21 2 4 Materials exposed to Vacuum e Yttia coated Iridium e Nickel e 304 Stainless Steel e Glass e Tungsten e Platinum Clad Molybdenum 169 082010_Ion Gauge 3000 Page 7 of 21 3 Installation 3 1 INSTALLATION 3 2 Receiving Inspection Your instrument has been manufactured calibrated and carefully packed so that upon receiving your order it is ready for operation However when you unpack please inspect all items for any obvious signs of damage due to shipment Immediately advise Teledyne Hastings and the carrier if any damage is suspected Use the packing slip as a check list and insure all parts are present including any optional equipment and that the options are correct 1 e output range gas pin out If a return is necessary obtain an RMA Return Material Authorization number from our Customer Service Department at 1 800 950 2468 3 3 Mounting The IGE 3000 is an indoor use only instrument The IGE 3000 can be mounted in any attitude or position Reasonable care should be taken to ins
10. F2 illuminate when the respective filaments are turned on The error LED 1s located in the middle of the top row and 1s not labeled It 1s illuminated 1f the filament 1s not turned on or the filament is turned on and indicated pressure s out of range 4 2 4 MODE BAR GREEN LED s The Mode bar indicates in which mode the IGE 3000 1s currently operating A particular LED when lit indicates that particular mode has been entered The Available modes are Emis emission Dgas Sp set point K K factor and Fil filament Refer to Section 3 3 for detailed explanations of the modes 4 3 Operating Modes 4 3 1 No Mode Normal Mode NO MODE 1s the default normal operating mode of the IGE 3000 During NO MODE the numeric display indicates BA tube out put pressure measurement value Dashes displayed on the numeric display indicate that the filament is not turned on not operating properly or that the readings are out of range The filament will automatically turn off if indicated pressure is above 1x10 7 NO MODE is automatically entered when there are no modes selected or the current selected mode has timed out Time out occurs if no operator action is initiated after 15 seconds NOTE Dashes displayed on the numeric display with the Filament 1 or Filament 2 LED s illuminated is an indication that the B A tube 1s not operating properly 4 3 2 Emis emission Mode The Emis mode is entered by scrolling to the Emis position by
11. O Vans oia 20 9 2 NON WARRANTY REPAIR POLE e oe al A LN 20 10 DRAWINGS amp SCHEMA TICS unida ies 21 169 082010_Ion Gauge 3000 Page 3 of 21 DANGER HIGH VOLTAGE High voltages capable of causing injury or death are present within the IGE 3000 Avoid touching the connector sockets tube pins and all internal circuitry within the IGE 3000 SERVICE MUST ONLY BE PERFORMED BY QUALIFIED TELEDYNE INSTRUMENTS PERSONNEL DANGER Do not turn on the IGE 3000 if there is any danger of explosion from explosive or combustible gasses or gas mixtures Ionization gauge tube filaments operate at a temperature sufficiently high enough to be considered an ignition source DANGER Safe operation of ion producing equipment including the IGE 3000 requires grounding of its power supply and the vacuum chamber LETHAL VOLTAGES may be established under some operating conditions unless grounding is provided DANGER Ion producing equipment such as the IGE 3000 from any manufacturer may under some conditions provide sufficient conduction via plasma to couple a high voltage electrode to the vacuum chamber If conductive parts of the chamber are not grounded they may attain a potential near that of the high voltage electrodes during this coupling Potentially fatal electrical shock could then occur because of the high voltage between these vacuum chamber parts and ground Grounding though simple is imperative Ensure that the ground circuits are correctly utiliz
12. Pin 5 R Pin 6 n a Pin 6 R Page 17 of 21 8 Device Status 8 1 ION GAUGE DEVICE STATUS 4 DIGIT OCTAL WORD When requested to transmit its status the IGE 3000 responds with a 4 digit octal word FIGURE 7 1 DIGIT OCTAL WORD e bit 11 Serial Receiver Overload e bit 10 Main Board EEPROM Error e bit 9 Communication Syntax Error e bit 7 Emission Setting e bit 8 Emission Setting e bit 6 Filament Selection O filament 1 1 filament 2 FIGURE 8 BITS 7 amp 8 EMISSION CODE BITS 788 BIT 7 NOEMISSIONS o 00 001Ma_ o 1 oim 1 S o e bit 5 Filament Status 0O non operating 1 operating e bit 4 Degas O degas off 1 degas on e bit 3 Pressure less than 0 1e 9 Torr Set if true e bit 2 Pressure Greater than 1 0e 3 Torr set if true e bit 1 High Set point Alarm Set if pressure is greater than the high set point e bit 0 Low Set point Alarm Set if pressure is less than the low set point 8 2 Command Syntax In the following examples of syntax codes the special characters are explained e The characters in square brackets represents a command string either upper or lower case command characters accepted All characters must follow each other in the string with no spaces or other characters e The characters within wavy brackets contain choices for the appropriate command e The characters within the symbols lt gt are
13. Pin outs The figure below indicates all pin outs FIGURE 1 IGE 3000 D CONNECTOR __ 24 Vdc POWER INPUT SET POINT LOW A POWER HIGH 11 4 a ws 15 b S NZ DIGITAL 2 EMO ROUJ START NOTE Set Point High Set Point Low and Remote Start use Digital ground Pin 3 as signal return path 3 6 B A Tube Installation The Bayard Alpert B A tube may be installed in any orientation Although the transducer tube is rugged and will perform well in many harsh environments the tube should be installed in a clean and careful manner The B A tube is configured with the vacuum fitting requested MN S The electronics unit is calibrated when married to the B A tube Avoid interchanging B A tubes with different electronics modules since this may affect accuracy and will void calibration 3 7 Mounting B A tube to IGE 3000 Electronics Module The B A tube plugs into the IGE 3000 via the 12 pin circular connector located inside the lower base housing of the IGE 3000 electronics module The B A tube is keyed to ensure proper connections Slightly rotate the electronics unit until the keyway of the connector aligns with the key on the B A tube and then snugly plug the electronics module to the B A tube Tighten the set screw located on the base housing to the B A tube The set screw secures the tube to the electronics module and also ensures proper grounding of the B A tube to the IGE 3000 base
14. UTTON ROTAR pl WA J JAS DIN 7 OT RY A ENCODER NII 7 ADJUST y x SELECT WAS HL Z V J o ff o az gt 2X 0n 0tt N Q A F NR T yi 20000 la A J qp coo o a O tf t 4 r SN AV R S 2 3 2 A 8 5 zL K 5 5 sie O N LY x f A ra gt YN OO FOA Y E FRONT PANEL 169 082010_Ion Gauge 3000 Page 10 of 21 4 2 1 SELECT SELECT is a push button Pressing it will scroll through the different available operating modes Rapidly double clicking SELECT will either turn the selected filament on Gf unit is off or off if the unit is on Note Ensure vacuum 1s below 1x10 2 Torr The IGE 3000 has an automatic shutoff feature that will not allow filament turn on at pressures above 1x10 2 Torr The shutoff feature will also automatically turn off the filament if it is on below 1x10 2 Torr and pressure rises above 1x10 2 4 2 2 ADJUST ADJUST is a rotary encoder Rotating ADJUST will select desired parameters within the different modes 4 2 3 STATUS BAR RED LED s The status bar displays information about the condition of the IGE 3000 A particular LED when lit indicates that particular condition has been met High and Low will illuminate when respective TTL set point 1s activated high 5 VDC F1 and
15. ed both on your IGE 3000 power supplies and your vacuum chambers regardless of the manufacturer for this phenomenon is not peculiar to the IGE 3000 CAUTION Ensure that BA tube filaments are not turned on unless vacuum IS LESS THAN 10 Torr TURNING ON filaments at atmosphere MAY result in damage to the BA tube CAUTION Before initiating Degas vacuum must be 107 Torr or less Performing Degas at Higher Pressures Could Damage the B A Tube 169 082010_lon Gauge 3000 Page 4 of 21 1 Quick Start Information e Apply Power e Apply 24 VDC Power to the D connector Pin 3 and 4 e After power is applied the IGE 3000 will go through self test CPU initialization and LED test The individual LEDs will sequentially illuminate then the IGE 3000 enters the No Mode and is Operational e Operate Tube Before operating tube ensure vacuum is below 1x10 2 Torr The IGE 3000 has an automatic shutoff feature that will not allow filament turn on at pressures above 1x10 2 Torr The shutoff feature will also automatically turn off the filament if it is turned on below 1x10 2 Torr and pressure rises above 1x10 2 TO TURN ON THE TUBE S FILAMENTS e DOUBLE CLICK the select button note Double clicking the SELECT button while the filament is already On will turn it OFF Initially dashes will remain on the display However as the tube heats up and starts operating within seconds the pressure will be displayed
16. ent passed through the filament causes it to heat up sufficiently enough to cause electron emission The IGE 3000 control circuit controls the filament current to maintain a constant electron emission The difference of potential between the filament and the grid causes these emitted electrons to accelerate toward the grid While most of the electrons collide directly with the grid many of these electrons traverse the region inside the grid When an electron collides with a gas molecule electrons may become disassociated from the gas molecules leaving a positively charged ion These ions accelerate to the collector The rate of the electron molecule collisions is proportional to the density of gas molecules Therefore ion current is proportional to the density 1 e pressure of the gas The collector s ion current is fed into a precision electrometer where it is converted to a DC voltage This DC voltage is then processed through a precision analog to digital converter and the data is passed to the IGE 3000 CPU The CPU will then process this data a pressure reading 1s displayed The B A tube sensitivity is expressed by the term K factor and is dependant on the physical design of the tube The definition of K ion current emission current x pressure The K factor for the IGE 3000 is 10 for nitrogen or air If needed the K factor can be modified via the K Mode Figure 4 Bayard Alpert B A Tube COLLECTOR T HY
17. es not apply to any instrument which has had a tamper seal removed or broken This warranty is in lieu of all other warranties expressed or implied including any implied warranty as to fitness for a particular use Hastings Instruments shall not be liable for any indirect or consequential damages Hastings Instruments will at its option repair replace or refund the selling price of the product if Hastings Instruments determines in good faith that it is defective in materials or workmanship during the warranty period Defective instruments should be returned to Hastings Instruments shipment prepaid together with a written statement of the problem and a Return Material Authorization RMA number Please consult the factory for your RMA number before returning any product for repair Collect freight will not be accepted Non Warranty Repair Policy Any product returned for a non warranty repair must be accompanied by a purchase order RMA form and a written description of the problem with the instrument If the repair cost is higher you will be contacted for authorization before we proceed with any repairs If you then choose not to have the product repaired a minimum will be charged to cover the processing and inspection Please consult the factory for your RMA number before returning any product repair TELEDYNE HASTINGS INSTRUMENTS 804 NEWCOMBE AVENUE HAMPTON VIRGINIA 23609 U S A ATTENTION REPAIR DEPARTMENT TELEPHONE 757
18. hese outputs are available via the 15 pin connector Refer to Section 2 4 Figure 1 To view the High set point place the IGE 3000 in the High mode by slowly pressing the SELECT button until the SP led and High led are flashing The display then indicates the high set point value To change set point values rotate ADJUST CW to increase or CCW to decrease There is no hysteresis dead band During normal operation the alarm light will trigger and the TTL output pin 1 will go high 5V if the pressure exceeds the set point Similarly to view the Low set point place the IGE 3000 in the Low mode by slowly pressing the SELECT button again until the Low led and the SP led are flashing The display then shows the low set point value To change set point values rotate ADJUST CW to increase or CCW to decrease During normal operation the alarm light will trigger and the TTL output pin 2 will go high 5V if the pressure becomes less than the set point 4 4 REMOTE FILAMENT CONTROL Broad range pressure monitoring 1 e atmosphere to 1X 10 19 can be realized when using the IGE 3000 s Remote Control feature in conjunction with higher range gauges such as the Hastings HPM 2002 Hastings HPM 2002 OBE Hastings DV 6 CVT or similar instruments Refer to Section 2 4 Figure 1 and Figure 3 below for wiring information 169 082010_lon Gauge 3000 Page 12 of 21 The IGE 3000 s filament may be controlled remotely via the D power supply connector
19. ing on the filament can be experienced if the BIA tube is new or has been turned off for an extended period of time and the monitored vacuum chamber s base pressure 1s too close to the upper pressure limit of 1X10 2 Filament turn on difficulties are usually related to the time it takes for the filament to initially turn on heat up cause electron emissions and for the IGE 3000 to properly sense B A tube output pressure As a safety feature and to prevent damage to the BIA tube the IGE 3000 1s designed to shut off the filament if in range pressure is not sensed within a pre programmed period of time The start up time for a new tube or one that has been off for extended periods of time could be beyond these programmed time limits when operating in the higher base pressure ranges If the filament does prematurely shut off during initial operation or after being turned off for an extended period simply change the Emission setting to the 0 01 mA range refer to Section 3 3 2 and then turn on filament again Once the filament is on and the IGE 3000 1s indicating pressure the emission setting can then be changed to the desired setting After the B A tube s filament has been in operation for a short period of time any filament start up difficulties should disappear 4 2 Front Panel Overview yo STATUS BAR S F DISPLAY a High Low Fi F2 Pos fan N A gt N f Ne WA sie if Emis DGas SP K Fil PUSHB
20. ment is not used in the manner specified by this manual protection provided by the equipment may be impaired Read sections marked with this symbol with care DANGER Paragraphs marked by this symbol in this document indicates that a potential hazard to your personal safety exists from a high voltage source Hastings Instruments reserves the right to change or modify the design of 1ts equipment without any obligation to provide notification of change or intent to change 169 082010_lon Gauge 3000 Page 2 of 21 Table of Contents 1 OUD1ICK STAKLINFORMA TION coxis rrr et aie 5 Zi GENERAL INFORMATION a a oca 6 2 1 GENERAL INFORMATION aaaaaaaaaaaaaaaaaaaasasasasasasaaaaadadadaduduauada adadadadadadudududdadadadadadadadadadudududdada a adadadadaaaaaaaaaaa 6 22 IGE 3000 MINI BAYARD ALPERT B A TUBE uaaaaaaaaaaaaaaaaaaaaasaaaasasanusnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnsnnnnnsnnnnnisnna 6 2 SPECIRICA TON Sii R R 6 DA MATERIALS EXPOSED TO VACUUM cccscoscecceccsccecescesceccscesceecescecescescescsecscesceecescsseecesceecescssescescescesessescesceseesessescesceees 7 3 INSTALLATION ut dd 8 Sl UNS TALLA a Jo remem EE Per rca nN ale e ENE iO o o ias 8 3 2 RECEN INC UNS PE CTO Jas a WOE TEC EST OCR RU MSN TI SITE TION EREE A Olea casa 8 3 3 MOUNNN ener eee E oP TEE ET SILI WN ORE r Uo STE HN TO PRT SNOT eT 8 3 4 LAI E E a lata aaa 8 3 5 TMP CONNECTOR ELECTRICARPINOU 18 K SAO e L a TN E E 9 3 6
21. n the BA tube reach equilibrium During Degas the emission current is increased to 10 mA and the grid voltage is raised to 500 VDC This action causes the temperature of the grid to be raised sufficiently enough to burn off most unwanted contaminants 4 3 4 K factor Mode K factor mode is entered by scrolling to the K factor position by slowly pressing the SELECT push button The K factor can be set by turning the ADJUST encoder to the desired setting The default normal K factor for the IGE 3000 B A tube is 10 If required the K factor can be adjusted from 1 to 99 The K factor is associated with tube sensitivity and is a function of the physical tube design 4 3 5 Fil filament Mode Fil mode is entered by scrolling to the Fil position by slowly pressing the SELECT push button The desired filament is then selected once in the Fil mode by turning the ADJUST encoder to the desired setting The IGE 3000 incorporates two separate identical filaments to dramatically increase B A tube life Either filament can be selected at any time 4 3 6 SP set point Mode SP mode is entered by scrolling to the SP position HI or LOW by slowly pressing the SELECT push button The set point values can then be selected by turning the ADJUST encoder to the desired setting SP alarms are indicated by the HIGH LOW LED s on the status bar In addition the IGE 3000 has two corresponding TTL outputs HI and LOW for process control T
22. onds to an increase in the delay time of approximately 8 ms Note Equivalent RS232 485 command aa T dd lt CR gt Save EEPROM S_EE EEW lt CR gt This command stores setting data to EPROM memory Note There 1s no equivalent RS232 485 command Restore EEPROM r EE EER lt CR gt Note There is no equivalent RS232 485 command 169 082010_lon Gauge 3000 Page 16 of 21 7 Tels RS 232 RS 485 RS232 RS485 The IGE 3000 is designed to communicate with external devices by either RS232 or RS485 via the two RJ 11 connectors Refer to section 3 2 Figure 2 for connector locations RS232 via the left connector on and the RS485 is via either connector Software capable of communicating with the IGE 3000 is available upon request Refer to Figure 7 below for pin out and wiring information 169 082010_Ion Gauge 3000 7 1 1 Wiring for IGE 3000 RS232 485 TR Carrier Detect O 6 Y Received Data O 6 Transmitted Data O a Clear to iad Send 1 Data Terminal Ready O p Signal Ground r J C A RJ 11 Connector y p 9 Pin Female D Connector 2 L M E i 7 1 2 Wiring for RS232 485 RS 485 half duplex RS 485 full duplex Pin 1 T R Pin 1 T Pin 2 T R Pin 2 T Pin 3 GND Pin 3 GND Pin 4 GND Pin 4 GND Pin 5 n a
23. pressing the SELECT push button The desired B A tube emission current is then selected by rotating the ADJUST encoder to the desired emission range Available settings are 0 01 mA 0 1 mA 1 mA or AUTO ranging In most situations the optimum setting for the IGE 3000 is AUTO ranging In AUTO ranging the IGE 3000 s CPU automatically determines and sets the optimum emission current range as determined by the CPU and is based on the pressure measurement When operating in other than AUTO ranging the following settings are recommended for the pressure ranges above 1x10 Torr use 0 01 mA for the pressure ranges 1x10 to 1x10 Torr use 0 1 mA and for the pressures below 1x10 Torr use 1 mA 169 082010_Ion Gauge 3000 Page II of 21 4 3 3 DGas Mode A CAUTION BEFORE INITIATING DEGAS VACUUM MUST BE AT OR BELOW 1x10 7 EXCESSIVE DEGASSING AT ANY TIME CAN DISTORT THE GAUGE ELECTRODES AND CAN RESULT IN A MISLEADING TRANSIENT DECREASE IN PRESSURE INDICATION Degas mode is used to Degas or clean the inside areas of the BA tube of impurities Degassing the tube can improve readings and accuracy Degassing is not effective at pressures above 1x 107 Degassing is only recommended if the gauge is heavily contaminated or after exposure to surface active gasses such as O As is typical of all B A type gauges pressure readings will be unstable for a several hours until the chemical composition and absorbed layers on the newly cleaned surfaces i
24. rr lt CR gt Transmit Software Version V lt CR gt IGE 3000 Vxxxx Transmit Filament F lt CR gt f1 lt CR gt Transmit Emission Setting I lt CR gt Emission 0 01 mA lt CR gt note Filament must be on Transmit Degas Time D lt CR gt Remaining Degas Time 54 Command Description Parameter Modification Commands Format minutes lt CR gt Sample Response Modify High Setpoint Modify Low Setpoint Modify RS 485 Address Modify Turnaround Delay H m dd E e lt CR gt 1 00000e 9 to 9 99999e 9 L m dd E e lt CR gt 1 00000e 9 to 9 99999e 9 faatA f aal lt CR gt 1 To DF Hexadecimal faa T dd lt CR gt 0 To 255 Decimal Modify Emission E m d E e lt CR gt must be exact Modify Degas Time R dd lt CR gt 0 To 5 Decimal Turn Gauge Filament on Fl or F2 FI lt CR gt NA Turn Gauge Filament off FO lt CR gt NA Escape lt Esc gt Reset Command Buffer ignore prior Input 169 082010_lon Gauge 3000 Page 19 of 21 9 WARRANTY Dolo 9 2 Warranty Repair Policy Hastings Instruments warrants this product for a period of one year from the date of shipment to be free from defects in material and workmanship This warranty does not apply to defects or failures resulting from unauthorized modification misuse or mishandling of the product This warranty does not apply to batteries or other expendable parts or to damage caused by leaking batteries or any similar occurrence This warranty do
25. tall the IGE 3000 where it will be protected from physical damage To facilitate ease of reading the LED readout the connector keyway of the B A tube should be mounted at the 3 o clock position 3 4 Grounding For safety reasons the case of the IGE 3000 must be grounded to the vacuum chamber This is normally accomplished mechanically through the vacuum chamber base flange via the B A tube physical connection The electronics module is grounded through a pin in the connector plug once the IGE 3000 module is plugged into the B A tube To ensure the best grounding possible ensure that the tube to base set screw is fully tightened once the IGE 3000 is installed DANGER Ion producing equipment such as the IGE 3000 from any manufacturer may under some conditions provide sufficient conduction via plasma to couple a high voltage electrode to the vacuum chamber If conductive parts of the chamber are not grounded they may attain a potential near that of the high voltage electrodes during this coupling Potentially fatal electrical shock could then occur because of the high voltage between these vacuum chamber parts and ground Grounding though simple is imperative Ensure that the ground circuits are correctly utilized both on your IGE 3000 power supplies and your vacuum chambers regardless of the manufacturer for this phenomenon 1s not peculiar to the IGE 3000 169 082010_Ion Gauge 3000 Page 8 of 21 3 5 D Connector Electrical
26. the common abbreviations for the one digit ASCII control codes which they represent e g lt CR gt represents carriage return 169 082010_Ion Gauge 3000 Page 18 of 21 e When entering more than one command in the same data string they must be separated by a comma e All command strings must be followed by the terminator character carriage return lt CR gt also known as ENTER e When a lower case character is present in an example it represents an option e Character Description Valid Inputs a RS 485 Address hexadecimal 0 9 A F 01 DF m Most Significant Digit Of Mantissa 1 9 d Decimal Digit 0 9 e Exponent 0 5 u Unit Of Pressure T M or P Command Separator comma N A lt CR gt Command Terminator carriage return N A 8 3 Interrogation Commands 8 4 Command Description Format Sample Response Transmit K Factor K lt CR gt K Factor 1 0000 01 Transmit Electrometer Output W lt CR gt V1 Ave 1 2765e 00 Transmit Fil Status F lt CR gt Filament 1 on High Voltage on Transmit Averaged Pressure P lt CR gt Pa 1 23456e 0 Torr lt CR gt Transmit RS 485 Address A lt CR gt Multidrop Address 01 lt CR gt Transmit High Set point H lt CR gt Hi 1 00000e 1 Torr lt CR gt Transmit Low Set point L lt CR gt Lo 1 00000e 2 Torr lt CR gt Transmit Device Status S lt CR gt 00044 lt CR gt Transmit Turnaround Delay T lt CR gt Comm Delay 6 lt CR gt Transmit Selected Units U lt CR gt To
27. ty Bits Stop Bits Turn Around Delay Save EE Prom Restore EE Prom The following list gives a description of each of the commands listed above along with the syntax for the equivalent RS232 485 command NOTE To access the following commands rotate the ADFUST pot Counterclockwise 6 2 RS485 Address A 01 The RS485 address is the address of the IGE 3000 If the unit is configured for RS232 then this parameter should not be adjusted A_01 A_02 A FE A_FF Valid range 01 to DF Equivalent RS232 485 command aa A aa lt CR gt 6 3 Baud Rate B_9 6 The baud rate is given in kbaud For example B_9 6 corresponds to a 9600 baud Note There is no equivalent RS232 485 command 169 082010_Ion Gauge 3000 Page 15 of 21 6 4 6 5 6 6 6 7 Data Bits Parity Bits Stop Bits P8n1 The first character 8 corresponds to the number of data bits e g 7 or 8 Second character n corresponds to the parity bit 1 e n no parity E even parity o odd parity 0 space 1 mark The last character 1 corresponds to the number of stop bits e g 1 or 2 g n1 8n2 702 7E1 7E2 701 702 701 702 711 712 Note There 1s no equivalent RS232 485 command Turnaround Delay dt06 dt00 dt01 dt FE dtFF The turnaround delay is unique to multipoint communications It is the delay between receipt of an incoming command to transmission of the response Each increase in the hex value corresp
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