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Agilent Technologies Agilent B2201A User's Manual

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1. B2200 Mnemonic Name CLS Clear Status ESE Standard Event Status Enable Command Query ESR Standard Event Status Register Query IDN Identification Query OPC Operation Complete Command Query RST Reset Command SRE Service Request Enable Command Query STB Read Status Byte Query TST Self Test Query WAI Wait to Continue Command 5 4 Agilent B2200 User s Guide Edition 2 Syntax Example Syntax Query response Semantics SCPI Command Reference CLS CLS This command clears the Status Byte Register the Standard Event Status Register and the Error Queue This command does not clear the enable registers See Status Reporting Structure on page 5 53 Also this command stops the monitoring of pending operations by the OPC command This command does not have query form CLS OUTPUT Agb2200 CLS ESE This command sets the bits of the Standard Event Status Enable Register 1 enables 0 masks ESE enable_number Parameter Explanation enable_number decimal integer that is the sum of the binary weighted values for the desired bits hexadecimal octal or binary value enable_number lt newline gt lt END gt enable_number is decimal integer value that is the sum of the binary weighted values of the Enable register bits The Standard Event Status Enable Register determines which bits of the Standard Event S
2. LCD Display Items Label Description 01 to 14 Port function assigned to the input ports 1 to 14 B bias port C couple port G ground port ground enabled port or blank no function Shift Shift key status indicator The triangle mark appears when the sub key is active Remote Remote status indicator The triangle mark appears when the Agilent B2200 is in the GPIB remote condition Lock Key status indicator The triangle mark appears when the front panel keys are locked by an external computer Error Error status indicator The triangle mark appears when any error has occurred Card Slot number of the switch module to be monitored Displays A when the channel configuration mode is Auto In the auto mode the modules installed in the mainframe from slot number continuously will be controlled as one module Or displays 1 to 4 when the channel configuration mode is Normal The module can be selected by the Card Selection key Bias Bias mode status indicator The triangle mark appears when the mode is ON Couple Couple mode status indicator The triangle mark appears when the mode is ON Gnd Ground mode status indicator The triangle mark appears when the mode is ON Rule Connection rule FREE plural route mode or SINGLE single route mode Sequence Connection sequence BBM Break Before Make MBBR Make Before Break or NO_SEQ No Sequence In the remote mode and the default setting
3. Table 5 2 Standard Event Status Register of B2200 Bit Definition Explanation 0 Operation Complete This event bit has meaning only if a request OPC to monitor is set by the OPC command See OPC on page 5 8 This bit is set to 1 if there are no pending operations 1 Not Used Always 0 2 Query Error QYE An attempt is being made to read data from the Output Queue when no data is present or pending e Data in the Output Queue has been lost 3 Device Dependent This event bit indicates that an error has Error DDE occurred which is not a Command Error a Query Error or an Execution Error 4 Execution Error EXE Syntax of command is correct but cannot be executed due to some condition of the B2200 5 Command Error A command syntax error has been detected CME 6 Not Used Always 0 7 Power On PON This event bit indicates that an off to on transition has occurred in instrument s power supply 8 to 15 Not used Always 0 Standard Event Status Enable Register The Standard Event Status Enable Register is an 8 bit register that can be used by the programmer to select which bits of Standard Event Status Register are enabled The status of the enabled bits are ORed together and result of OR will be reported to the ESB bit Bit5 of the Status Byte Register The 8 bits of this register correspond to the 8 bits of the Standard Event Status Register See Figure 5 4 Agilent B220
4. When the Bias Mode is ON you cannot directly control the Bias Port connections However they can be indirectly controlled when the connections of the other input port are controlled When the Bias Mode is OFF the input Bias Port is the same as the other input ports so relays can be controlled directly to connect to output ports ROUTe BIAS STATe card_number state ROUTe BIAS STATe card_number Parameter Explanation card_number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL ALL is not available for query state ON or 1 sets the Bias Mode ON OFF or 0 sets the Bias Mode OFF 0 or 1 lt newline gt lt END gt 0 OFF 1 ON OUTPUT Agb2200 ROUT BIAS STAT ALL ON OUTPUT Agb2200 ROUT BIAS STAT 4 ENTER Agb2200 A In this example A will be 1 Agilent B2200 User s Guide Edition 2 5 33 Syntax Query response Example Syntax Query response SCPI Command Reference ROUTe CLOSe CARD ROUTe CLOSe CARD This query command returns channel_list of all closed connected channels for the specified card ROUTe CLOSe CARD card_number Parameter Explanation card_number For Auto Config mode 0 For Normal Config mode 1 2 3 or 4 channel _list lt newline gt lt END gt OUTPUT Agb2200 ROUT OPEN CARD ALL OUTPUT Agb2200 ROUT CLOS 10101 10202 OUTPUT Agb2200 ROUT CLOS CARD 1 ENTER
5. CONN SEQ ALL BBM BIAS PORT 1 10 5 ROU ROUT BIAS CHAN ENAB CARD ALL TAT ALL ON t stress output vbOKOnly 16 gt PY Click OK to star the code for stress output WriteLine ROUT BIAS STAT ALL OFF WriteLine ROUT CLOS amp channels 19 Click OK to start measurement vbOKOnly WriteLine Measurement in progress Chr 10 the code for measurement WriteLine ROUT OPEN CARD ALL Close Click OK to stop the program vbOKOnly WriteLine Measurement completed amp Chr 10 127 le Line Description 8 Defines the channel list in the channels variable string 9 to 12 Resets the Agilent B2200 And sets the Auto configuration mode the Single connection rule and the Break_Before_Make connection sequence 13 to 15 Sets the bias port and the bias enabled output ports And turns the bias mode ON 16 to 17 Opens a message box to confirm the start of measurement And clicking OK on the message box displays a message on the console window Insert bias source control program code at the line 17 18 19 to 28 Turns the bias mode OFF Same as the code shown in the lines 13 to 22 of Table 4 3 Agilent B2200 User s Guide Edition 2 4 11 Figure 4 4 Setup Programming Programming Examples Using Ground Mode The following example uses the ground
6. Common Guard to DUT i l to Triaxial ae Coaxial cable DUT Triaxial Coaxial cable connector is p connector uar J Wire lt Insulator lt Plate lt Plate CAUTION Never connect the guard terminal to any output including circuit common chassis ground or the guard terminal of any other unit Doing so may result in an emergency condition For highly accurate current forcing and measurements while minimizing leakage surround all force and sense lines from SMU by a guard as far as possible and make cables stable by taping For reducing capacitance measurement error tape the cables to any grounded materials such as shielding box If you use probe card grounding the probe card also reduces capacitance measurement error 2 14 Agilent B2200 User s Guide Edition 2 Figure 2 3 WARNING Installation Output Connections To Make Interlock Circuit The interlock circuit is to prevent electric shock when touching measurement terminals You must install an interlock circuit on shielding box to prevent dangerous voltages when door of the shielding box is open Figure 2 3 shows the pin assignments of the interlock connector Interlock Connector Pin Assignments Interlock Switch on Plug side View Wiring Side View Dangerous voltages of up to the maximum voltage of SMUs may be present at force guard and sense terminals when the interlock terminals are shorted To Install Interlock Circuit
7. Agilent B2200 User s Guide Edition 2 Programming Capacitance Compensation To Create Compensation Data File This section explains how to create the compensation data file 1 Select one of the compensation data files template 20 files installed when the Agilent B2200 VXIplug amp play driver is installed To select the most appropriate template for your measurement environment see Table 4 9 that lists the file name and the measurement environment where the template targets Each template is a text file that contains the information as shown below Compensation data file for B2210A Probecard I F 3m triax cable MB Mother Board MH Matrix Path High Matrix Path Low El Agilent Triax Cable C2H Probe card I F or User Triax cable High C2L Probe card I F or User Triax cable Low C3H Probe card or User Coax cable High E3L Probe card or User Coax cable Low SHE SHE SHE SHE e de e SHE He SE SHE HE SE lt E format version 1 0 B2210A PCIF R Ohm L H C F ee DES a0 a a ARS a A a ARS a DR D0 A A AD R D AA ARS AR AES A R ORS ARS AAS D D ARS RS S a a aR Aa S S a a a MB 0 000000e 00 5 250000e 08 2 940000e 11 MH 2 430000e 00 6 310000e 07 1 930000e 10 ML 2 490000e 00 5 970000e 07 1 920000e 10 El 6 300000e 01 1 250000e 06 1 600000e 10 C2H 2 988000e 01 5 090000e 07 7 000000e 11 C25 2 988000e 01 5 090000e 07 7 000000e 11 C3H 0 000000e 00 8 000000e 08 1 500000e 13 C3L 0 000000e 00 8 000000e 08 1 500000e 13 The 15th line s
8. Install the interlock circuit as follows 1 Mount two mechanical switches on your shielding box so that the switches close when the door of the shielding box is closed and open when the door is opened For the recommended parts and the dimensions of the switch see Figure 2 4 and Figure 2 5 2 Use wire to connect the two switches in series between pin number 1 and 2 or 3 of the interlock connector See Figure 2 3 For example Agilent 4155 4156 is connected to the interlock circuit it cannot force more than 40 V when the door is open When door is closed it can force more than 40 V Agilent B2200 User s Guide Edition 2 2 15 Installation Output Connections Figure 2 4 Dimensions of Interlock Switch Agilent part number 3101 0302 m i k d e ejl Lan af 6 35 a H 59 4 A a1 28 5 gt o N eee o an fo 5 a ci Ce tyo E igi er O31 Y 222 27 8 10 Units mm 378 Figure 2 5 Dimensions of Interlock Switch Agilent part number 3101 3241 10 2 4 3 3 2 Switch off Switch on_ 2 0 Units mm UGI01012 85x60 To Install LED Circuit To install LED circuit on your shielding box do following 1 Mount LED on your shielding box For the recommended parts and the dimensions of the LED see Figure 2 6 2 Use wire to connect the LED between pin 4 and pin 5 or 6 of t
9. L is not available for query sequence NS BB MB EQ No Sequence mode M Break Before Make mode BR Make Before Break mode NSEQ or BBM or MBBR lt newline gt lt END gt OUTPUT Agb2200 ROUT CONN SEQ ALL MBBR OUTPUT Agb2200 ROUT CONN SEQ 0 ENTER Agb2200 A In this example AS will be MBBR 5 36 Agilent B2200 User s Guide Edition 2 NOTE Syntax Query response Example SCPI Command Reference ROUTe COUPle PORT ROUTe COUPle PORT If the input bias port and a couple port have been assigned to the same input port the bias mode and the couple mode cannot be used in parallel If the input ground port and a couple port have been assigned to the same input port the ground mode and the couple mode cannot be used in parallel If the ground enabled input port and a couple port have been assigned to the same input port the ground mode and the couple mode cannot be used in parallel This command is used to set up input couple ports which are used for the Kelvin connections The couple mode is set by ROUTe COUPle STATe For each card you can set up the same or different input couple ports This command overwrites the previous couple port setting The couple port setting will be cleared and updated by ROUTe COUPle PORT DETect The query returns the odd input port number of each coupled pair At RST no input ports are coupled ROUT
10. Parameters VXI plug amp play Driver Driver Functions agb220xa_close This function terminates the software connection to the instrument and deallocates system resources It is generally a good programming habit to close the instrument handle when the program is done using the instrument ViStatus VI FUNC agb220xa_close ViSession vi vi Instrument handle returned from agb220xa_init agb220xa_closeCard_Q This function will query the card for the channels closed of the specified card The parameter closechan_list contains the channel numbers returned by the instrument This will be an array of integers terminated by zero to identify the end of the list Array of enough length should be passed to the function ViStatus _ VI FUNC agb220xa_closeCard_Q ViSession vi Vilnt16 close_card Vilnt32_VI_FAR closechan_list vi Instrument handle returned from agb220xa_init close_card Card number card 1 2 card 2 3 card 3 or 4 card 4 in the normal configuration mode or 0 all card in the auto configuration mode For the configuration mode see agb220xa_func closechan list Channels closed of the specified card 6 10 Agilent B2200 User s Guide Edition 2 VXI plug amp play Driver Driver Functions agb220xa_closeList This function will connect the input ports to the output ports specified by the channel list The parameter closechan_list is an array of integers with each integer re
11. ROUT l AGND 1 AGND AGND STA AGND STAT PORT card_number ground_port PORT card_number T card_number state T card_number Specifies the input Ground Port for the specified card card_number 0 or ALL for Auto Config 1 2 3 4 or ALL for Normal Config ground port 1 to 14 or 1 Query returns the input Ground Port number for the specified card card_number Card to check 0 for Auto Config 1 2 3 or 4 for Normal Config Sets the ground mode for the specified card card_number 0 or ALL for Auto Config 1 2 3 4 or ALL for Normal Config state ON 1 mode ON or OFF 0 mode OFF Query returns the mode status of the specified card 0 OFF or 1 ON card_number Card to check 0 for Auto Config 1 2 3 or 4 for Normal Config 5 16 Agilent B2200 User s Guide Edition 2 SCPI Command Reference Command Summary Command Description ROUT AGND UNUSED card_number enable_port ROUT AGND UNUSED card_number Ground enables the specified input ports for the specified card card_number 0 or ALL for Auto Config 1 2 3 4 or ALL for Normal Config enable_port One or more input port numbers 1 to 8 Enclose by single quotation marks Separate multiple input port numbers by comma For example 1 5 Query returns the ground enabled input port numbers for the specified card card_number Card to check 0 for Auto Config
12. Register Output Queue In general the status reporting structure is used to request service via Service Request SRQ or to indicate a specific condition such as operation complete See the following figures for a model of the B2200 status reporting structure Agilent B2200 User s Guide Edition 2 5 53 Figure 5 1 SCPI Command Reference Status Reporting Structure Status Reporting Structure of B2200 Summary Message from Standard Event Queue Status Register Non empty utput i SRQ to Controller l Queue i A orcas e 4 Not Used Not Use Y AOON RQS is read by E Cra Serial Poll l Request pt 2 7 6 EsBMav 3 2 1 0 Status Byte Register Generation MSS i x MSS is read by a STB am O E 8 O y Service Request Enable Register e 7 514132 110 xsre XSRE PGO4001 120x120 The above figure shows Service Request Generation When a condition occurs that requires service the instrument sets Request Service bit RQS bit6 of Status Byte and sends a Service Request SRQ via GPIB bus to the controller So the controller can execute an interrupt service routine must be in the program that uses a Serial Poll to read Status Byte of each instrument to determine which instrument requested service See Status Byte Register on page 5 55
13. Saves a setup information into the internal memory or loads a setup information memory_number 1 to 8 Agilent B2200 User s Guide Edition 2 5 19 SCPI Command Reference Command Summary Command Description SYST MEMO COMM memory_number comment Memorizes the comment for the B2200 setup information SYST MEMO COMM memory_number specified by memory_number memory_number 1 to 8 SYST MEMO DEL memory_number Deletes the B2200 setup information and the comment specified by memory_number memory_number 1 to 8 SYST PEN state Enables disables the light pen state ON 1 enable or OFF 0 disable SYST VERS Returns SCPI version number for which the B2200 complies 5 20 Agilent B2200 User s Guide Edition 2 Syntax Example NOTE Syntax Query response Example SCPI Command Reference DIAGnostic TEST CARD CLEar DIAGnostic TEST CARD CLEar This command clears the relay test result pass fail result of the specified card DIAGnostic TEST CARD CLEar card_number Parameter Explanation card_number card number 1 2 3 4 or ALL OUTPUT Agb2200 DIAG TEST CARD CLE 1 DIAGnostic TEST CARD EXECute This command executes the relay test for specified card then returns the pass fail result Before starting the relay test open the input output terminals end of cable is OK Kelvin cable must be removed For more i
14. Switch Modules e Supplemental Information for B2200A B2210A e Supplemental Information for B2201A B2211A The specifications are the performance standards or limits against which these units have been tested The supplemental information is not warranted but provides useful information about functions and performance If not noted otherwise the conditions for specifications and supplemental information are as follows Temperature 23 C 5 C Humidity 5 to 60 R H 1 10 Agilent B2200 User s Guide Edition 2 Temperature range Humidity range Altitude Regulatory compliance Power requirement Number of slots Dimensions Weight Number of ports Introduction Specifications General Specifications Operating 5 C to 35 C Storage 20 C to 70 C Operating 5 to 70 R H non condensing Storage lt 80 R H at 35 C lt 60 R H at 65 C non condensing B2200A B2210A lt 80 R H at 65 C non condensing B2201A B2211A Operating 0 to 2 000 m 6 500 ft Storage 0 to 15 240 m 50 000 ft Safety CSA C22 2 No 1010 1 IEC 1010 1 EMC CISPR 11 Group 1 class A amp EN50082 1 90 to 264 V continuous 47 to 63 Hz 2 A 200 VA maximum 4 slots for 48 mm height switch module B2200A B2201A 430 mm W x 320 mm H x 600 mm D B2210A B2211A 395 mm W x 48 mm H x 500 mm D B2200A B2201A approximately 14 0 kg B2210A approximately 5 0 kg B2211A approxima
15. 1 2 3 or 4 for Normal Config Couple Mode Commands ROUT COUP PORT card_number couple_port ROUT COUP PORT card_number Specifies the input couple ports for the specified card card_number 0 or ALL for Auto Config 1 2 3 4 or ALL for Normal Config couple_port One or more input port numbers 1 3 5 7 9 11 or 13 Enclose by single quotation marks Separate multiple input port numbers by comma For example 1 5 Query returns the lower input port number of each couple pair for the specified card card_number Card to check 0 for Auto Config 1 2 3 or 4 for Normal Config ROUT COUP PORT DET Detects the input ports connected to Kelvin cable and assigns them as the input couple ports for the all cards ROUT COUP STAT card_number state ROUT COUP STAT card_number Sets the couple mode for the specified card card_number 0 or ALL for Auto Config 1 2 3 4 or ALL for Normal Config state ON 1 mode ON or OFF 0 mode OFF Query returns the mode status of the specified card 0 OFF or 1 ON card_number Card to check 0 for Auto Config 1 2 3 or 4 for Normal Config Agilent B2200 User s Guide Edition 2 5 17 DIAG subsystem SCPI Command Reference Command Summary DIAGnostic subsystem has commands for executing the self test function For more info see Selftest Menu on page 3 34 The DIAGnostic s
16. R H non condensing Altitude 0 m to 2 000 m Storage and Shipping Environment The Agilent B2200 should be stored or shipped in environments within the following limits e Temperature 20 C to 70 C e Humidity B2200A B2210A lt 80 R H at 35 C lt 60 R H at 65 C non condensing B2201A B2211A lt 80 R H at 65 C non condensing Altitude O m to 15 240 m When storing the Agilent B2200 Protect the Agilent B2200 from temperature extremes to prevent condensation from forming inside the Agilent B2200 If condensation occurs the Agilent B2200 may damage or may not satisfy the specifications If the Agilent B2200 was placed at the high temperature and high humidity environment long time the Agilent B2200 may degrade its performance When shipping the Agilent B2200 The Agilent B2200 must be packed in the certain packing materials for protection from damage when it is shipped Cover the Agilent B2200 by using the moisture proof and dehumidifying packing material furnished and pack it by using packing materials such as carton box and cushioning materials Agilent B2200 User s Guide Edition 2 2 5 CAUTION Installation Inspection Inspection Before Opening Packing Materials The Agilent B2200 contains the condensation sensitive electronic parts The condensation will have a negative impact on the Agilent B2200 to operate normally Do not open the packing materials and leave the Agil
17. agb220xa_biasState Sets the bias mode ON or OFF for the specified card agb220xa_biasChanList_Q Queries for the bias channel list Agilent B2200 User s Guide Edition 2 6 5 VXI plug amp play Driver Driver Functions Category Function Description Ground Mode agb220xa_groundPort Selects the input ground port of the specified card agb220xa_groundChanCard Ground enables all output ports of the specified card agb220xa_groundChanList Ground enables all output ports of the specified channel list agb220xa_unusedPort Ground enables the specified input ports of the specified card agb220xa_groundState Sets the ground mode ON or OFF for the specified card agb220xa_groundChanList_Q Queries for the ground channel list Route Control agb220xa_closeList agb220xa_openList Closes the channel list Opens the channel list agb220xa_openCard Opens all output on the card agb220xa_closeList_Q agb220xa_openList_Q Queries for the channel list status agb220xa_closeCard_Q Queries for the closed channel list on the card C G agb220xa_compenC Performs the compensation for the C G data measured by Compensation the Agilent 4284A agb220xa_selectCompenFile Selects the compensation data file used by the agb220xa_compenC function Diagnostics agb220xa_testExec_Q Performs diagnostics and returns the test result agb220xa_te
18. you can specify the same or different Bias Port At RST Bias Port is set to 10 The bias mode is set by ROUTe BIAS STATe The query returns the input Bias Port number for the specified card ROUTe BIAS PORT card_number bias_port ROUTe BIAS PORT card_number Parameter Explanation card_number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL ALL is not available for query bias_port Input port number 1 to 14 Or 1 to disable bias port port_number lt newline gt lt END gt port_number 1 to 14 or 1 Number set to bias_port OUTPUT Agb2200 ROUT BIAS PORT ALL 4 OUTPUT Agb2200 ROUT BIAS PORT 1 ENTER Agb2200 A 5 32 Agilent B2200 User s Guide Edition 2 NOTE Syntax Query response Example SCPI Command Reference ROUTe BIAS STATe In this example A will be 4 ROUTe BIAS STATe You cannot set the Bias Mode to ON when the Ground Mode is ON This command controls the Bias Mode for the specified card When the Bias Mode is ON the input Bias Port is connected to the all bias enabled output ports that have not been connected to any other input port At RST the Bias Mode is OFF The query returns the mode status of the specified card The input Bias Port is set by ROUTe BIAS PORT The bias enabled output ports channels are set by ROUTe BIAS CHANnel ENABle LIST or ROUTe BIAS CHANnel ENABle CARD
19. 3 a b c 4 a b 3 8 Change the ground enabled output ports Press the Shift key and the Open All key Move the cursor to SET then press the Enter key Move the cursor to ENABLE then press the Enter key The LCD displays one of the ground disabled output port numbers which can be changed to the ground enabled Or if there is no ground disabled output ports the LCD displays Channel No Channel Press the arrow key to select the output port to be changed to the ground enabled then press the Enter key Move the cursor to DISABLE then press the Enter key The LCD displays one of the ground enabled output port numbers which can be changed to the ground disabled Or if there is no ground enabled output port the LCD displays Channel No Channel Press the arrow key to select the port to be changed to the ground disabled then press the Enter key Repeat c and d until the ground enabled port setup is completed After that press the Exit key more than once to display the status and setup conditions Press the Shift key and the Couple Mode key to set the ground mode ON Performing this operation again sets the mode OFF Change the ground port default setting 12 When the ground mode is ON press the Port Function key The blink cursor appears on the first line of the LCD Press the right left arrow key to move the cursor on the input port number 01 to 14 that will be set to the input ground port Press the up down k
20. Agb2200 AS AS will be 10101 10202 For channel_list see Switch Control on page 4 5 ROUTe CLOSe LIST This command connects the input ports to the output ports channels as specified in channel list The query returns 0 or 1 for each channel specified by channel list in same order as specified by channel list For some modes such as Single Route Mode Couple Mode Ground Mode and Bias Mode more complex connections may occur ROUTe CLOSe LIST channel list ROUTe CLOSe LIST channel_list Parameter Explanation channel list Channels to close or to check For channel_list see Switch Control on page 4 5 close_status close_status lt newline gt lt END gt 1 closed 0 opened 5 34 Agilent B2200 User s Guide Edition 2 Example Syntax Query response Example SCPI Command Reference ROUTe CONNection RULE OUTPUT Agb2200 ROUT CLOS 10101 10202 OUTPUT Agb2200 ROUT CLOS 10101 10102 10201 10202 ENTER Agb2200 AS In this example AS willbe 1 0 0 1 ROUTe CONNection RULE This command sets the connection rule Free or Single Route for the specified card The query returns the connection rule of the specified card At RST all cards are set to FREE See Connection Rule on page 3 14 ROUTe CONNection RULE card_number rule ROUTe CONNection RULE card_number
21. C values of the C2x or C3x path by using the Agilent 4284A See To obtain compensation coefficients on page 4 26 After the measurements calculate the per meter value of the R L C and record them into the following table Compensation coefficients Explanation RQ L H C F C2H C2L C3H C3L 3 Open the template file selected at step 1 by using a text editor Exchange the R L C values of C2x C3x with the values recorded at step 2 And save the file as your compensation data file e g C temp my_env_1 txt Do not change any other lines Also do not change the value for the coefficients that should not be modified Agilent B2200 User s Guide Edition 2 4 25 Table 4 11 Figure 4 7 Programming Capacitance Compensation To obtain compensation coefficients Obtain the compensation coefficients as shown below 1 Select the measurement frequency Fmeas used for the capacitance measurement of a device under test DUT and set it to the Agilent 4284A The coefficients must be measured at the same frequency 2 Perform the Agilent 4284A open calibration at the measurement terminal Optionally perform short calibration if you want 3 See Table 4 11 and Figure 4 7 and set the Agilent 4284A 4 Connect the path cable corresponding to C3H shown in Figure 4 6 to the Agilent 4284A Then measure and record the R L and C values 5 Connect the path cable corresponding
22. COUPle PORT DETect OUTPUT Agb2200 ROUT COUP PORT DET 5 38 Agilent B2200 User s Guide Edition 2 Syntax Query response Example SCPI Command Reference ROUTe COUPle STATe ROUTe COUPle STATE This command controls the Couple Mode for the specified card The query returns the mode status of the specified card At RST the Couple Mode is OFF The input couple ports are set by ROUTe COUPle PORT DETect or ROUTe COUPle PORT If you specify a connection from a couple input port to an output port when the couple mode is ON the B2200 automatically controls relays to connect the input ports n 1 and n to the output ports m 1 and m respectively n an even number from 2 to 14 m an even number from 2 to 12 2 to 24 2 to 36 or 2 to 48 depends on the B2200 configuration See example below ROUTe COUPle STATe card_number state ROUTe COUPle STATe card_number Parameter Explanation card_number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL ALL is not available for query state ON or 1 sets the Couple Mode ON OFF or 0 sets the Couple Mode OFF state lt newline gt lt END gt 0 OFF 1 ON OUTPUT Agb2200 ROUT COUP STAT ALL ON OUTPUT Agb2200 ROUT COUP STAT 2 ENTER Agb2200 A In this example A will be 1 OUTPUT Agb2200 ROUT COUP PORT ALL 1 OUTPUT Agb2200 ROUT COUP STAT ALL ON OUTPUT Agb2
23. Parameter Explanation card_number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL ALL is not available for query rule FREE free route or SROUte single route In the free route multiple channel connections are available for all input ports In the single route only 1 channel connection is available for each input port FREE or SROU lt newline gt lt END gt OUTPUT Agb2200 ROUT CONN RULE ALL SROU OUTPUT Agb2200 ROUT CONN RULE 1 ENTER Agb2200 AS In this example AS will be SROU Agilent B2200 User s Guide Edition 2 5 35 Syntax Query response Example SCPI Command Reference ROUTe CONNection SEQuence ROUTe CONNection SEQuence This command specifies the connection sequence mode which is the open close sequence of the relays when connection route is changed from an existing connection to a new connection The query returns the connection sequence mode of the specified card At RST BBMake is selected See Connection Sequence on page 3 15 The connection sequence is used only for cards that have been set to SROUte connection rule Also see ROUTe CONNection RULE ROUTe CONNection SEQuence card_number sequence ROUTe CONNection SEQuence card_number Parameter card_number Explanation For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL AL
24. gport_cardno Card number card 1 2 card 2 3 card 3 4 card 4 or 5 all card in the normal configuration mode or 0 all card in the auto configuration mode For the configuration mode see agb220xa_func gnd_port Input port number to be set to the ground port 1 to 14 input port 1 to input port 14 The input ground port and a ground enabled input port cannot be assigned to the same input port If the ground input port and a couple port have been assigned to the same input port the ground mode and the couple mode cannot be used in parallel agb220xa_groundState This function controls the ground mode for the specified card When ground mode is ON the input ground port is connected to all ground enabled input ports and output ports that are not connected to any other input ports Ground disabled output ports are never connected to the input ground port when ground mode is ON The ground mode cannot be set to ON when the bias mode is ON ViStatus _ VI FUNC agb220xa_groundState ViSession vi Vilnt16 gstate_cardno Vilnt16 state vi Instrument handle returned from agb220xa_init gstate_cardno Card number card 1 2 card 2 3 card 3 4 card 4 or 5 all card in the normal configuration mode or 0 all card in the auto configuration mode For the configuration mode see agb220xa_func state Ground mode 0 OFF or 1 ON 6 26 Agilent B2200 User s Guide Edition 2 Syntax Parameters Syntax
25. milliseconds agb220xa_unusedPort This function ground enables the specified input ports of the specified card The parameter unused_port is an array of integers with each integer representing one port The last number of the unused_port should be 0 numeric zero to identify the end of the array The maximum number of ports that can be specified by the array is agb220xa UNUSEDPORT MAX ViStatus VI FUNC agb220xa_unusedPort ViSession vi Vilntl6 unused_cardno Vilnt32_VI_ FAR unused_port vi Instrument handle returned from agb220xa_init unused_cardno Card number 1 card 1 2 card 2 3 card 3 4 card 4 or 5 all card in the normal configuration mode or 0 all card in the auto configuration mode For the configuration mode see agb220xa_func unused_port Input ports to be ground enabled 1 to 9 are available Multiple port numbers can be set The input ground port and a ground enabled input port cannot be assigned to the same input port If the ground enabled input port and a couple port have been assigned to the same input port the ground mode and the couple mode cannot be used in parallel The ground enabled input ports are connected to the input ground port when the ground mode is ON So the ground enabled input connectors must be opened to prevent the instrument from damage Agilent B2200 User s Guide Edition 2 6 33 VXI plug amp play Driver Driver Functions 6 34 Agilent B2200
26. parameter is an array of integers containing the return values of the query The gnd_status array returned will correspond one to one with endchan_list parameter ViStatus VI FUNC agb220xa_groundChanList_Q ViSession vi Vilnt16 gnd disen Vilnt32_VI_FAR gndchan_list Vilnt32_VI_FAR gnd status vi Instrument handle returned from agb220xa_init gnd_disen Query type 0 checks if the port is the ground enabled 1 checks if the port is the ground disabled gndchan_list Channel numbers to check the status 5 digits integer ABCDE where A card number BC input port number DE output port number Top zero s can be ignored For example if A 0 BC 01 and DE 01 channel number should be 101 instead of 00101 end _status Status of the channels given in the gndchan_list Returned value depends on the setting of gnd_disen as shown below when gnd_disen 0 0 means ground disabled 1 means enabled when gnd_disen 1 0 means ground enabled 1 means disabled Agilent B2200 User s Guide Edition 2 6 25 Syntax Parameters Syntax Parameters VXI plug amp play Driver Driver Functions agb220xa_groundPort This function will select which input port is the ground port on the specified card For each card you can specify the same or different ground port ViStatus VI FUNC agb220xa_groundPort ViSession vi Vilntl6 gport_cardno Vilnt16 gnd_port vi Instrument handle returned from agb220xa_init
27. the bias mode and the couple mode cannot be used in parallel Agilent B2200 User s Guide Edition 2 3 17 NOTE Front Panel Operation Switch Control Functions Ground Mode Ground mode operation is similar to the bias mode operation The ground mode is useful for connecting the same input to multiple channels output ports and the unused input ports simultaneously And the connections will be kept until the other input port connection will be changed The ground mode is especially useful for settling the potential of the unused input output paths If you assign the input port 12 AUX Input 12 as the ground port open the input port 12 This ground port will be internally connected to the ground when the ground mode is set to ON When the ground mode is ON the input ground port is connected to all ground enabled input ports unused ports and the ground enabled output ports that are not connected to any other input ports You cannot directly control which output ports are connected to the input ground port e Ifanother input port is disconnected from a ground enabled output port the output port is automatically connected to the input ground port Ifanother input port is connected to a ground enabled output port the output port is automatically disconnected from the input ground port Ground disabled output ports are never connected to the input ground port when the ground mode is ON e You can independently set the ground
28. 0 5 mS Change freq data_c data_g values for your measurement results 22 to 24 Displays the compensation result data on the console window Record the values as Clr and Glr or C2r and G2r 4 28 Agilent B2200 User s Guide Edition 2 SCPI Command Reference SCPI Command Reference This chapter describes the following for Agilent B2200 SCPI commands available to control the B2200 via GPIB interface SCPI is a universal programming language for electronic test and measurement instruments and is based on IEEE 488 1 and IEEE 488 2 SCPI commands are divided into two types common commands and subsystem commands Common commands are generally not measurement related but are used to manage status registers data storage and so on Common commands are defined by IEEE 488 2 All common commands begin with an asterisk such as RST Subsystem commands are mostly measurement related and some are general purpose Subsystem commands have a hierarchical structure that uses a colon between mnemonics keywords such as DIAG TEST CARD CLE Commands for the following subsystems are available for the B2200 DIAGnostic commands for performing self test ROUTe commands for signal routing SYSTem commands for controlling other functions that are not related to instrument performance Commands are listed in alphabetical order in this chapter Status reporting structure These are IEEE 488 2 status str
29. 1 enable portii Couple port by the input ports 11 and 12 0 disable or 1 enable Agilent B2200 User s Guide Edition 2 6 19 Syntax Parameters Syntax Parameters Syntax VXI plug amp play Driver Driver Functions port13 Couple port by the input ports 13 and 14 0 disable or 1 enable agb220xa_coupleState This function controls the couple mode for the specified card ViStatus VI FUNC agb220xa_coupleState ViSession vi Vilntl6 cstate_cardno Vilnt16 couple_state vi Instrument handle returned from agb220xa_init estate_cardno Card number 1 card 1 2 card 2 3 card 3 4 card 4 or 5 all card in the normal configuration mode or 0 all card in the auto configuration mode For the configuration mode see agb220xa_func couple_state Couple mode 0 OFF or 1 ON agb220xa_dcl This function sends a device clear DCL to the instrument A device clear will abort the present operation and enable the instrument to accept a new command or query This is particularly useful in situations where it is not possible to determine the instrument state In this case it is customary to send a device clear before issuing a new instrument driver function The device clear ensures that the instrument will be able to begin processing the new commands ViStatus VI FUNC agb220xa_dcl ViSession vi vi Instrument handle returned from agb220xa_init agb220xa_detectCouplePort This function detects
30. 1 2 13 3 25 OUTPUT Agb2200 SYST MEMO COMM 1 ENTER Agb2200 A In this example A will be 1 1 2 13 3 25 SYSTem MEMOry DELete This command deletes the B2200 setup information and the comment specified by memory_number SYSTem MEMOry DELete memory_number memory_number memory number 1 to 8 OUTPUT Agb2200 SYST MEMO DEL 1 5 50 Agilent B2200 User s Guide Edition 2 Syntax Example Syntax Example SCPI Command Reference SYSTem MEMOry LOAD SYSTem MEMOry LOAD This command restores the B2200 setup information specified by memory_number It must be already saved by SYSTem MEMOry SAVE SYSTem MEMOry LOAD memory_number Parameter Explanation memory_number memory number 1 to 8 OUTPUT Agb2200 SYST MEMO SAVE 1 OUTPUT Agb2200 SYST MEMO LOAD 1 SYSTem MEMOry SAVE This command saves the present setup information of the B2200 into the internal memory specified by memory_number The previous setup will be deleted To memorize the comment for the setup information use SYSTem MEMOry COMMent The following setup information will be saved e Configuration mode e Connection rule connection sequence e Bias mode status bias ports bias enabled channels e Couple mode status couple ports Ground mode status ground ports ground enabled channels ground enabled ports e Connection statu
31. ALL for Auto Config 1 2 3 4 or ALL for Normal Config state ON 1 mode ON or OFF 0 mode OFF Query returns the mode status of the specified card 0 OFF or 1 ON card_number Card to check 0 for Auto Config 1 2 3 or 4 for Normal Config Agilent B2200 User s Guide Edition 2 5 15 SCPI Command Reference Command Summary Command Description Ground Mode Commands ROUT AGND CHAN DIS CARD card_number Ground disables the specified card card_number 0 or ALL for Auto Config 1 2 3 4 or ALL for Normal Config ROU ROUT T AGND lT AGND CHAN CHAN DIS LIS1 DIS LIS1 T channel_list channel_list Ground disables the specified channels channel _list Channels to ground disable Query returns the status of the specified channels 1 disabled or 0 enabled channel _list Channels to check ROUT AGND ROU ROU T AGND T AGND CHAN CHAN CHAN ENAB ENAB JS JS ENAB CARD card_number T Gchanmnel list T Gchannel list Ground enables the specified card card_number 0 or ALL for Auto Config 1 2 3 4 or ALL for Normal Config Ground enables the specified channels channel _list Channels to ground enable Query returns the status of the specified channels 1 enabled or 0 disabled channel _list Channels to check ROUT ROUT ROUT
32. Functions agb220xa_cmdReal This function passes the cmd_str string to the instrument This entry point passes the string in cmd_str followed by a space and then the real in value Note that either an Real32 or 64 can be passed as the Real32 will be promoted ViStatus VI FUNC agb220xa_cmdReal ViSession vi ViString cmd str ViReal64 value vi Instrument handle returned from agb220xa_init cmd_str Instrument command cannot exceed 256 bytes in length value Parameter for command 1E 300 to 1E 300 agb220xa_cmdReal64Arr_Q This function passes the cmd_str string to the instrument This command expects a response that is a definite arbitrary block of 64 bit real You specify the cmd_str and size parameters and get result and count ViStatus VI FUNC agb220xa_cmdReal64Arr_Q ViSession vi ViString cmd_str Vilnt32 size ViReal64_VI_FAR result ViPInt32 count vi Instrument handle returned from agb220xa_init cmd_str Instrument command cannot exceed 256 bytes in length size Size of result number of items in the array 1 to 2147483647 result Response from instrument count Count of valid items in result 6 16 Agilent B2200 User s Guide Edition 2 Syntax Parameters Syntax Parameters VXI plug amp play Driver Driver Functions agb220xa_cmdReal64 _Q This function passes the cmd_str string to the instrument This command expects a response that can be returned as a 64 bit real ViStatus V
33. Multiple connection is available for the bias port e Connection sequence Break Before Make e Used module All switch modules installed in the mainframe e Bias port AUX Input 10 Bias enabled output port All output ports e Connection paths connected when the bias mode is ON from bias port to all bias enabled output ports e Connection paths connected by the ROUT CLOS command The following output ports will be disconnected from the bias port and the following input output connections will be made from SMU1 to Output 1 channel list 00101 from SMU2 to Output 2 channel list 00202 from SMU3 to Output 3 channel list 00303 from SMU4 to Output 4 channel list 00404 4 10 Agilent B2200 User s Guide Edition 2 Table 4 4 Programming Programming Examples Bias Mode Example Imports Imports Imports Imports Module Modulel Sub Mai Dim B2 Dim ch B2200 B2200 B2200 B2200 B2200 B2200 B2200 MsgBox insert B2200 B2200 MsgBox Consol insert B2200 B2200 MsgBox Consol End Sub End Modu WriteLine WriteLine WriteLine T WriteLine ROUT WriteLine T WriteLine T WriteLine ROUT BIAS ta EXL T3 Agilent TMFramework Agilent TMFramework DataAnalysis Agilent TMFramework DataVisualization Agilent TMFramework InstrumentIO n 200 As New DirectIO GPIB0O 22 INSTR annels As String 101 202 303 404 18 RST ROUT FUNC ACON LO ROUT CONN RULE ALL SROU
34. Parameters VXI plug amp play Driver Driver Functions agb220xa_init This function initializes the software connection to the instrument and optionally verifies that instrument is in the system In addition it may perform any necessary actions to place the instrument in its reset state If the agb220xa_init function encounters an error then the value of the vi output parameter will be VI NULL ViStatus _ VI FUNC agb220xa_init ViRsrc InstrDesc ViBoolean id_query ViBoolean do_reset ViPSession vi InstrDesc Instrument description Examples GPIBO 1 INSTR id_query VI_TRUE to perform In System Verification or VI_FALSE do not perform In System Verification do_reset VI_TRUE to perform reset operation or VI_FALSE do not perform reset operation vi Instrument handle This is VI_NULL if an error occurred during the initialization agb220xa_opc_Q This function does the OPC common command ViStatus VI FUNC agb220xa_opc_Q ViSession vi ViPBoolean result vi Instrument handle returned from agb220xa_init result VI_TRUE Operation complete or VI_FALSE Operation is pending Agilent B2200 User s Guide Edition 2 6 27 Syntax Parameters Syntax Parameters VXI plug amp play Driver Driver Functions agb220xa_openCard This function will disconnect all input ports from all output ports for the specified card If bias mode is ON the input bias port is connected to all bias enabled output ports I
35. SCPI Command Reference Status Byte Register In general use serial polling not STB inside interrupt service routines Use STB in other cases not in interrupt service routine when you want to know the value of Status Byte Status Byte Register of B2200 Bit Definition Explanation 0 Not Used Always zero 1 Not Used Always zero 2 Not Used Always zero 3 Not Used Always zero 4 Message Available Indicates whether Output Queue is empty If MAV Queue Summary unread message exists this bit is set to 1 Message Otherwise this bit is set to 0 See Output Queue on page 5 60 5 Standard Event Status Indicates whether one or more of the enabled Bit ESB Summary Standard Events Status Register bits is set Message 6 Request Service RQS Indicates whether a SRQ Service Request Message has occurred Read by Serial Poll Master Summary Status Indicates that the instrument has at least one MSS Summary reason for requesting service Read by Message STB 7 Not Used Always zero 5 56 Agilent B2200 User s Guide Edition 2 SCPI Command Reference Service Request Enable Register Service Request Enable Register The Service Request Enable Register is an 8 bit register that can be used by the programmer to select which summary messages in the Status Byte Register may cause service requests See Figure 5 3 Fig
36. SMU input 1 When the voltage applied to all input output paths is 0 V 2 Measured by the Agilent 4156C with the integration time setting 100 PLC When the voltage applied to all other input output paths is 0 V 3 The time until the measurement value settles to within 300 fA of the final value When the applied voltage is 10 V 4 When four modules have been installed in the mainframe And when only one input output path is made 5 For the measurement less than 1000 pF at the frequency 1 kHz to 1 MHz using the Agilent 4284A with 3 m cable After the compensation using the capacitance compensation algorithm a function of VXIplug amp play driver 1 14 Agilent B2200 User s Guide Edition 2 Introduction Accessories and Options Accessories and Options Agilent B2200 is furnished with the following accessories Power cable 1 ea e Operation summary sheet 1 ea Manual CD ROM ea Software CD ROM 1 ea Stores the Agilent B2200 VXIplug amp play driver The Agilent B2200 VXIplug amp play driver supports Windows XP Professional Windows 2000 Windows NT 4 0 Windows 98 and Windows 95 e Moisture proof and dehumidifying packing kit 1 set Table 1 2 lists the options and accessories available for the Agilent B2200 Agilent B2200 User s Guide Edition 2 1 15 Table 1 2 Introduction Accessories and Options Options and Accessories
37. ViPInt32 error_number ViChar_VI_FAR error_messagel vi Instrument handle returned from agb220xa_init error_number Instrument s error code error_message Instrument s error message This is limited to 256 characters Agilent B2200 User s Guide Edition 2 6 21 VXI plug amp play Driver Driver Functions agb220xa_errorQueryDetect This function enables or disables automatic instrument error checking If automatic error checking is enabled then the driver will query the instrument for an error at the end of each function call Syntax ViStatus VI FUNC agb220xa_errorQueryDetect ViSession vi ViBoolean errorQuery Detect Parameters vi Instrument handle returned from agb220xa_init errorQueryDetect Error checking enable VI TRUE or disable VIL_ FALSE agb220xa_errorQueryDetect_Q This function indicates if automatic instrument error detection is enabled or disabled Syntax ViStatus VI FUNC agb220xa_errorQueryDetect_Q ViSession vi ViPBoolean pErrDetect Parameters vi Instrument handle returned from agb220xa_init pErrDetect Error checking enable VI_ TRUE or disable VI_ FALSE 6 22 Agilent B2200 User s Guide Edition 2 Syntax Parameters Syntax Parameters VXI plug amp play Driver Driver Functions agb220xa_esr_Q This function returns the contents of the ESR register The driver returns the equivalent messages see Parameters ViStatus VI FUNC agb220xa_esr_Q ViSession vi ViChar_VI_FAR
38. agb220xa_cmdReal64Arr Q 1 teen ene 6 16 agb220xa_cmdReal64 Q o oooooocooocorr eens 6 17 agb220xa cmdString Qorasi pose es ase eset A 6 17 agb220xa compenC occiso eed veiw eee ees 6 18 agb220xa_connRuleSeq 00 cece eee enn ees 6 18 agb220xa_couplePort 0 cette ences 6 19 agb220xa_coupleState 0 cect nen eens 6 20 agb220xaiidel orne Sus RD 6 20 agb220xa_detectCouplePort 20 0 0 cece eee 6 20 agb220xa_error_Message 1 0 ee eee e eens 6 21 agb220xa_error_qQUCTY 16 eee teen en eens 6 21 agb220xa_errorQueryDetect 0 cece enn eee 6 22 agb220xa errorQueryDetect Q 0 cece tenes 6 22 agb220xa esr ii ee Ae ye ca oe Ra EEA ee Ae ea Hee HE 6 23 agb220xKa FUNC ssw ote Bok eae ae eee ee ae eRe IE ae 6 23 agb220xa_groundChanCard 0 0 cece eee eens 6 24 agb220xa_groundChanList 0 000 e eee eee es 6 24 agb220xa_groundChanList Q ccc cette 6 25 agb220xa_groundPort 0 ce cece cette tenets 6 26 agb220xa sroundState n5406esaveheexenredeie tage idan eee eas 6 26 agb220xa Mit iia dde aii tae laa 6 27 agb220xa 0pC O nieve ta ia 6 27 agb220xa_openCard 0 cect e eens 6 28 agb220xa OpenStereo 6 28 agb220xa_openList Q cece cnet e ene n eens 6 29 Agilent B2200 User s Guide Edition 2 Contents agb220xa_readStatusByte Q 0 eee ete 6 29 agb220Ka TESE aces cet i 6 30 agb220xa_revision_qUCTY ss etr enue ror ee
39. bit to 1 Ifthere are any pending operations sets the OPC bit to 0 The bit will be set to 1 again when all pending operations are completed So OPC command is required to enable the OPC bit To stop monitoring pending operations disable OPC bit execute the CLS command For details about the Standard Event Status Register see Standard Event Status Register on page 5 58 Also see WAI command OPC 1 lt newline gt lt END gt OPC places ASCII character 1 into the Output Queue when all pending operations are completed For details see Output Queue on page 5 60 OUTPUT Agb2200 OPC The following example is for query OUTPUT Agb2200 OPC ENTER Agb2200 A 5 8 Agilent B2200 User s Guide Edition 2 Syntax Example NOTE RST SCPI Command Reference RST This command performs an instrument reset Status after RST is shown below Channel Configuration Auto configuration mode Connection Rule Free Connection Sequence Break Before Make Bias Mode Off Bias Input Port 10 Bias enabled Channels All channels output ports are bias enabled Couple Mode Off Couple Input Port Cleared Ground Mode Off Ground Input Port 12 Ground enabled Channels Cleared Ground enabled Ports Cleared Card Channel Status All relays are opened Self Test Result Not changed Input Port Symbol String Cleared Output Port Symbol String Cleared Beeper On LCD in r
40. card as you may need it to configure the interface in step 3 Install VISA I O library Follow the instructions in the I O library s setup program Configure and check the GPIB interface See the I O library manual Install the programming software Follow the setup program instructions If you use Microsoft Visual Basic NET install the Agilent T amp M Programmers Toolkit Install the VXIp ug amp play driver as shown below a Insert the Agilent B2200 Plug amp Play Driver Disk into the flexible disk drive connected to your PC b Execute the SETUP EXE program on the diskette The program automatically installs the following files Directory Program Files VISA winxx agb220xa xx depends on OS e agb220xa bas e agb220xa c e agb220xa def e agb220xa fp e agb220xa GID e agb220xa h e agb220xa hlp e readme txt e DelsLl isu Agilent B2200 User s Guide Edition 2 Table 6 1 Category Miscellaneous VXI plug amp play Driver Driver Functions Driver Functions Table 6 1 lists all the functions for the Agilent B2200 You will see a brief description of the functions in the table For the description syntax and parameters of the function refer to the reference section following this table The driver functions in the reference section will appear in the alphabetical order Agilent B2200 Driver Function Lists Function agb220xa_init Description Initializes the B2200 agb220xa_close Clo
41. change the GPIB address detect the couple port automatically and so on Hardware Configuration CONFIG SCAN ERROR RMT DSPL BEEP gt Hardware Configuration lt SCAN ERROR RMT DSPL BEEP PEN Press the arrow key to move the cursor to the desired function name Then press the Enter key The setup message or the sub menu will be displayed To return to the previous menu press the Exit key 3 30 Agilent B2200 User s Guide Edition 2 Function Tree Front Panel Operation Setup Menus The setup menu provides the following functions CONFIG e ADDRESS Sets the GPIB address REVISION Displays the firmware revision UNIT Displays the module information of each slot SCAN Detects and sets the input couple ports automatically ERROR DISPLAY Displays the error code and error message e CLEAR Clears the error buffer RMT DSPL LCD Selects on or off for the LCD display in the remote mode LED Selects on or off for the LED matrix in the remote mode BEEP Selects on or off for the beeper PEN Enables or disables the light pen Agilent B2200 User s Guide Edition 2 3 31 CONFIG SCAN Front Panel Operation Setup Menus Displays the sub menu that provides the following functions ADDRESS Displays the following message GPIB Address Address Press the arrow key to set the desired GPIB address Then press the Ente
42. channels open given in the openchan_list The parameter openchan_list is an array of integers with each integer representing one channel The last number of the openchan_list should be 0 numeric zero to identify the end of the list The maximum number of channels that can be specified by the list is 100 The open_status parameter is an array of integers containing the return values of the query The open_status array returned will correspond one to one with openchan_list parameter ViStatus _ VI FUNC agb220xa_openList_Q ViSession vi Vilnt32_VI_FAR openchan_list Vilnt32_VI_FAR open_status vi Instrument handle returned from agb220xa_init openchan_list Channel numbers to know the open status 5 digits integer ABCDE where A card number BC input port number DE output port number Top zero s can be ignored For example if A 0 BC 01 and DE 01 channel number should be 101 instead of 00101 open_status Status of the channels given in the openchan_list 1 opened or 0 closed agb220xa_readStatusByte_Q This function returns the contents of the status byte register ViStatus VI FUNC agb220xa_readStatusByte_Q ViSession vi ViPInt16 statusByte vi Instrument handle returned from agb220xa_init statusByte The contents of the status byte are returned in this parameter Agilent B2200 User s Guide Edition 2 6 29 Syntax Parameters Syntax Parameters S
43. configuration mode or 0 all card in the auto configuration mode For the configuration mode see agb220xa_func agb220xa_biasChanList This function bias enables or disables all the output ports specified by the biaschan_list The parameter biaschan_list is an array of integers with each integer representing one channel The last number of the biaschan_list should be 0 numeric zero to identify the end of the list The maximum number of channels that can be specified by the list is 100 ViStatus _VI FUNC agb220xa_biasChanList ViSession vi Vilnt16 biaschan_disen Vilnt32_VI_FAR biaschan_list vi Instrument handle returned from agb220xa_init biaschan_disen Status of the port bias enabled or bias disabled 0 sets bias enabled port 1 sets bias disabled port biaschan_list Channel numbers 5 digits integer ABCDE where A card number BC input port number DE output port number Top zero s can be ignored For example if A 0 BC 01 and DE 01 channel number should be 101 instead of 00101 Agilent B2200 User s Guide Edition 2 6 7 Syntax Parameters VXI plug amp play Driver Driver Functions agb220xa_biasChanList_Q This function will query the instrument for the status bias enabled or bias disabled for the channels given in the list The parameter biaschan_ list is an array of integers with each integer representing one channel The last number of the biaschan_list should b
44. de OU eins oe Aas 5 6 NA E O ee 5 7 A E O da 5 8 ARS a dis bh IESDA 5 9 ESRE a a act E 5 10 ITB g Tebe na ER e E E CUNO 5 11 PTGS TARA N E AE E E E EEE 5 12 FWAD at a e EEEE EE T E atada 5 12 Subsystem Commands nease es aeea a ee t teens 5 13 Command Summary coo 5 13 DIAGnostic TEST CARD CLEar 1 0 0 0 000 ccc ene 5 21 DIAGnostic TEST CARD EXECute 2 0 00 0 0 ccc cee eee 5 21 DIAGnostic TEST CARD STATe 1 00 00 ccc ccc eee nee 5 22 DIAGnostic TEST FRAMe CLEar 000 5 22 DIAGnostic TEST FRAMe EXECute 2 0 0 0 00 0c ce eee eee 5 23 DIAGnostic TEST FRAMe STATe 0000 00 cc eee 5 24 ROUTe AGND CHANnel DISable CARD 0 00 cc cee eee 5 24 Agilent B2200 User s Guide Edition 2 Contents ROUTe AGND CHANnel DISable LIST 0 0 0 00 0 ee eee 5 25 ROUTe AGND CHANnel ENABle CARD 0 000000 5 25 ROUTe AGND CHANnel ENABle LIST 00 0005 5 26 ROUTe AGND PORT 0 0 5 27 ROUTe AGND STATe 0 00 cece teens 5 28 ROUTe AGND UNUSED 00 0 2 ees 5 29 ROUTe BIAS CHANnel DISable CARD 0 00 000 cee ees 5 30 ROUTe BIAS CHANnel DISable LIST 00 0000 00 5 30 ROUTe BIAS CHANnel ENABle CARD 0 00002 eee eee 5 31 ROUTe BIAS CHANnel ENABle LIST 00 0002 ee eee 5 31 sROUTe BIAS PORT 0 0 00 c cece teenies 5 32 ROUTe BIAS ESTATE 0000
45. default data is used 6 30 Agilent B2200 User s Guide Edition 2 Syntax Parameters Syntax Parameters VXI plug amp play Driver Driver Functions agb220xa_self_test This function causes the instrument to perform a self test and returns the result of that self test This is used to verify that an instrument is operating properly A failure may indicate a potential hardware problem ViStatus VI FUNC agb220xa_self test ViSession vi ViPInt16 test_result ViChar_VI_FAR test_message vi Instrument handle returned from agb220xa_init test_result Numeric result from self test operation 0 No error test_messagel Self test status message This is limited to 256 characters agb220xa_testClear This function clears the test result of the specified diagnostics item ViStatus VI FUNC agb220xa_testClear ViSession vi Vilnt16 framecard_clear vi Instrument handle returned from agb220xa_init framecard_clear Test result to clear 0 to 10 See below 0 Test result of all test items he Card 1 relay test result Card 2 relay test result Card 3 relay test result Card 4 relay test result Relay test result of all cards Controller test result 2 3 4 5 6 Front panel key test result 7 8 Light pen test result 9 LED matrix test result 10 Beeper test result Agilent B2200 User s Guide Edition 2 6 31 Syntax Parameters Syntax Parameters VXI plug amp play Driver Driver
46. ee eee asa getter 5 33 ROUTe CLOSe CARD 1 1 0 0 00 5 34 EROUPe CLOSe LIST vc td didas 5 34 ROUTe CONNection RULE o oooocoococcnooco rere 5 35 ROUTe CONNection SEQuence o ooooocoooo 5 36 ROUTe COUPle PORT cuca aaa 5 37 ROUTe COUPle PORT DETect 2 0 0 0 cece eens 5 38 ROUTe COUPle STATe 0 02 ccc cette 5 39 ROUTe FUNCtion 2 0 0 0 cette teen eens 5 40 ROUTe OPEN CARD ir a a He wa ere ee ee 5 40 ROUTe OREN LIST ssn2scey a 5 41 ROUTe SYMBol CHANnel 0 0 0 0 00 eee eens 5 42 ROUTe SYMBol PORT 00 0 0 ccc cette tenes 5 43 SY S Tem BEEP lll oh uals bale 5 44 SY STem CCONNG hae ic ges Sede 5 44 SYSTem CDEScription Wear A a 5 45 SYSTem CPON ini a dia diia 5 46 SYS ECT Y PEA TA Mewes REO Sa as 5 47 SY STenm DISPlay LCD ic 2s eo aw tn gael a 5 47 SY STem DISPlay LED setae foe be dae 5 48 SYSTem DISPlay STRing 0 0 cece cette nee 5 48 Agilent B2200 User s Guide Edition 2 Contents SY STem ERRO T soe st og eck Sneha Ar St ti e E 5 49 SSYSTEMRLG cai hve dates tl ae ee eh ee ee 5 49 SYSTem MEMOry COMMent 0 cece eee eens 5 50 SYSTem MEMOry DELete 0 0 0 ec een eee 5 50 SYSTE MEMON LOAD A Ba ee 5 51 2 5 TemiMEMON S AVE tati a lito 5 51 SYSTEM PEN umi di 5 52 SYS Tem VERSION it a A A eed ela tds 5 52 Status Reporting Structure 2 0 00 ce eee ene 5 53 Status Reporting Structure 0 0 eee eens 5 53 S
47. in a string parameter This error is reported if the B2200 cannot determine a more specific error 151 and 158 151 Invalid string data An invalid string parameter data was received for example an END message was received before the terminal quote character 158 String data not allowed A string parameter data was received but was not allowed at this point 160 Block data error An error was detected in a block data This error is reported if the B2200 cannot determine more specific errors 161 and 168 161 Invalid block data An invalid block data was received for example an END message was received before the length was satisfied 168 Block data not allowed A legal block data was received but was not allowed at this point 170 Expression error An error was detected in an expression This error is reported if the B2200 cannot determine more specific errors 171 and 178 171 Invalid expression The expression was invalid for example unmatched parentheses or an illegal character 178 Expression data not allowed An expression was received but was not allowed at this point 7 6 Agilent B2200 User s Guide Edition 2 Error Messages Standard SCPI Error Messages Execution Error If syntax of a SCPI command header and parameter is valid but the command cannot be executed due to some condition of the B2200 a 2XX error occurs The error number and message are placed in the error queue and bit4 of the Standard Event Sta
48. input bias port will be connected to the bias enabled channels that are not connected to other input port And LEDs will be turned red to show the bias port connections Sets the channel configuration mode AUTO or NORMAL Changing the mode will reset the Agilent B2200 settings Sets the couple mode ON or OFF When the couple mode is set to ON the LCD shows which input ports are the couple port Sets the ground mode ON or OFF When the ground mode is set to ON the LCD shows which input port is the ground port and the input ground port will be connected to the ground enabled channels that are not connected to other input port And LEDs will be turned red to show the ground port connections The ground enabled input ports are also connected to the input ground port Nothing must be connected to the ground enabled input ports Displays the following message Selects the connection rule FREE plural route connections or SINGLE single route connection FREE Displays the following message Selects the connection sequence Break Before Make Make Before Break or No Sequence Break Before Make Displays the following message Used to select the Agilent B2200 setup data stored in the internal memory and loads the data Settings 01 Displays the following message Used to select the internal memory to store the Agilent B2200 setup data and stores the data Up to eight setup data can be saved Settings 01 Displays
49. kelvin 3m data 16494C 002 lt path gt B2211A pcif kelvin 4m data 16494C 005 lt path gt B2211A cable triax l_5m data 16494A 001 16495F G C2H C2L lt path gt B2211 A cable triax 3m data 16494A 002 ence lt path gt B2211A cable triax 4m data 16494A 005 lt path gt B2211A cable kelvin _5m data 16494B 001 lt path gt B2211A cable kelvin 3m data 16494B 002 lt path gt B2211A cable kelvin 4m data 16494C 005 a lt path gt driver_install_folder AGB220XA ccdata e g C temp AGB220XA ccdata b Model number of the cable connected between the switch module and the DUT interface c Agilent B2220A probe card interface or Agilent 16495F G connector plate 4 24 Agilent B2200 User s Guide Edition 2 Programming Capacitance Compensation Table 4 10 Compensation Coefficients and Modifications Copaan ion Modifications of data file coefficients C2H For the Agilent B2220A probe card interface do not modify COL the lines For the connector plate change the R L C values in the lines The value must be changed to the R L C values of the C2x path triaxial cable with connector plate shown in Figure 4 6 C3H Change the R L C values in the lines The value must be C3L changed to the R L C values of the C3x path For the Agilent B2220A probe card interface probe card will be used for the C3x path For the connector plate coaxial cable with positioner will be used for the C3x path 2 Measure the R L
50. kiaz Option Item Description B2200A fA Leakage Switch Mainframe B2200A UK6 Commercial cal certificate w test data B2200A ABA Manual set English B2200A ABJ Manual set Japanese B2201A 14ch Low Leakage Switch Mainframe B2201A UK6 Commercial cal certificate w test data B2201A ABA Manual set English B2201A ABJ Manual set Japanese B2210A fA Leakage Switch Module for B2200A B2211A 14ch Low Leakage Switch Module for B2201A 16443A Light pen 16493H GNDU cable between 41501 4142 and 16495F G 16493H 001 1 5 m length 16493H 002 3 m length 164933 Interlock cable between E5260 E5270 4155 4156 and 16495F G 16493J 001 1 5 m length 16493J 002 3 m length 16493J 003 5 m length 16493K Kelvin triaxial cable between B2200 inputs and E5260 E5270 4156 41501 16493K 001 1 5 m length 16493K 002 3 m length 16493L GNDU cable between E5260 E5270 and 16495F G 16493L 001 1 5 m length 16493L 002 3 m length 16493L 003 5 m length 16493N GNDU cable for Kelvin connection between B2200 inputs and E5260 E5270 41501 4142 1 16 Agilent B2200 User s Guide Edition 2 Introduction Accessories and Options Biau Option Item Description 16494A Triaxial cable 16494A 001 1 5 m length 16494A 002 3 m length 16494A 003 80 cm length 16494A 005 4 m length 16494B Kelvin triaxial cable between B2200 inputs and 4142B between B2210 B2211 outputs and 16495F G 16494B 001 1 5 m length
51. or 16494A triaxial cable MPSMU SMU1 to 8 16494A triaxial cable PGU AUXI to 6 BNC cable GNDU SMUI to 8 16493N GNDU Kelvin cable 16493H GNDU cable for direct connection to connector plate 4142B SMU SMU1 to 8 16494B Kelvin triaxial cable or 16494A triaxial cable VSU AUXI to 6 BNC cable VMU AUXI to 6 BNC cable GNDU SMUI to 8 16493HN GNDU Kelvin cable 16493H GNDU cable for direct connection to connector plate Intlk 16435A interlock cable adapter and 16493J interlock cable for direct connection to Connector Plate Agilent B2200 User s Guide Edition 2 2 21 Installation Input Connections Instrument B2200 Application Agilent Output Input Cable Required Model No Connector Connector DC E5260 SMU SMU1 to 8 16493K Kelvin triaxial cable or Measurement E5270 16494A triaxial cable GNDU SMUI to 8 16493N GNDU Kelvin cable 16493H GNDU cable for direct connection to connector plate Interlock 16493J interlock cable for direct connection to connector plate C C Meter High Low CMH CML 16494F CMU cable for 4 terminal pairs Measurement Pulse Input Pulse Output AUXI to6 BNC cable Generator Bias Input Power Output AUXI to6 BNC cable Supply In the table above e CMH CML connectors are a pair of the AUX inputs The Agilent B2200 does not have the interlock connector Connect directly from instrument to the connector plat
52. output cables See Table 2 4 NOTE Low Noise Coaxial Cable For the extended measurement paths over the connector plate use low noise coaxial cable Agilent part number 8121 1191 This cable can maximize the guard effects and minimize the impression of the external noise Figure 2 2 shows the cutting example of this cable Key point is the isolation between the conductive layer and the center conductor So cut and trim the end of the cable as shown in this figure by using a cutter and so on Figure 2 2 Coaxial Cable Cutting Example Cover here using sleeve Insulator black min 2 mm Center conductor 7 x for Force Sense signal S approx 10 to 15 mm Outer conductor Insulator clear 205 lt gt Sse gt SS SS SS e Se K ese for Guard signal Conductive layer black Agilent B2200 User s Guide Edition 2 2 13 Installation Output Connections Table 2 4 Connection to the DUT Interface Kelvin connections non Kelvin connections This connection is available only for the Following connection is for the Kelvin Kelvin connectors connectors For the triaxial connectors This connection can cancel effects of cable resistance by connect sense line and force line as close as possible to DUT terminal ignore SENSE terminal and make connection only for FORCE terminal Measurement data will include residual resistance from the connection cable
53. phew bees 3 25 Function key group 22 0 ccc e teen ene 3 26 Edit Key group 20s 12h A ee Ee N 3 29 Setup Menus A Gey See awe 3 30 Setup Mente secede sie A a Da ane teen betas 3 30 SelftestMenu usas ias ood abs 3 34 Programming Programming Basics roca a wees pedal eek 4 3 SCPI Command Hierarchy 0 cece eects 4 3 Fundamental Commands 00 0 cece cece teen enna 4 4 Switch Control ise E ng hae A i weed acta Ian 4 5 Programming Examples 00 cece eee cect teen ene eens 4 7 Connecting Input Output Paths 2 0 0 eee eee 4 8 Using Bias Mode 0 0c cece ccc n teen teens 4 10 Using Ground Mode viii ii ee eR eS SES 4 12 Agilent B2200 User s Guide Edition 2 Contents Using Couple Mode 0 0 cece tenet t nnn 4 14 Saving Input Output Labels 0 2 0 eens 4 16 Defining Comment for Internal Memory 00 00 e ee eee eee 4 18 Capacitance Compensation 00 cece cence ete eee ene 4 20 Capacitance Compensation Function 0 c ce eee eee eee eee 4 20 Required Conditions ri sire nena E e aa E a E Be aN Sas oe 4 21 To Create Compensation Data File ununun eee eee eee 4 23 To Perform Measurement and Compensation noone saaana 4 27 5 SCPI Command Reference Common Commands srs gesse ro AAA ere ee ee Gd heer ee ees 5 4 Commands Summary ooo 5 4 FOLS RS 5 5 A seine so Set Sod ie eta cS org Salen Se nel ca 5 5 ESR oS A
54. port and control the ground mode for each module when the configuration mode is normal When the ground mode is OFF the input ground port is the same as the other input ports so relays can be controlled directly to connect to output ports Connection rule cannot be specified for the input ground port which can always be connected to multiple output ports Connection sequence to connect input ground port to output ports is always Break Before Make Ground mode cannot be set to ON when the bias mode is ON The input ground port and a ground enabled input port cannot be assigned to the same input port If the ground input port and a couple port have been assigned to the same input port the ground mode and the couple mode cannot be used in parallel If a ground enabled input port and a couple port have been assigned to the same input port the ground mode and the couple mode cannot be used in parallel 3 18 Agilent B2200 User s Guide Edition 2 CAUTION Front Panel Operation Switch Control Functions Opening the ground enabled input ports Open the ground enabled input ports unused input ports If any equipment is connected to the ground enabled input ports turning the ground mode ON may cause damage in the equipment Agilent B2200 User s Guide Edition 2 3 19 Table 3 2 NOTE Front Panel Operation Switch Control Functions Couple Mode Couple mode is useful for making the Kelvin connections When the couple
55. previous menu Displays the sub menu that provides the following functions EXECUTE Starts the beeper test and displays the following message DIAG BEEP Is beeper making 2 sounds Press the Enter key if the beeper works correctly The test result will be recorded as PASS If you find any problem press the Exit key The test result will be recorded as FAIL Finally press the Exit key to return to the previous menu RESULT Displays the test result Press the Exit key to return to the previous menu 3 36 Agilent B2200 User s Guide Edition 2 Front Panel Operation Setup Menus LED Displays the sub menu that provides the following functions EXECUTE Starts the LED matrix test and displays the following message DIAG LED All LED in Orange Press the Enter key if the all LEDs are lighted in orange The test result will be recorded as PASS If you find any problem press the Exit key The test result will be recorded as FAIL Finally press the Exit key to return to the previous menu RESULT Displays the test result Press the Exit key to return to the previous menu PEN Displays the sub menu that provides the following functions Before starting the light pen test connect the light pen to the Agilent B2200 EXECUTE Starts the light pen test and displays the following message DIAG PEN Point any cross point Point the light pen
56. the Ground Port The input ground port and a ground enabled input port cannot be assigned to the same input port If the input ground port and a couple port have been assigned to the same input port the ground mode and the couple mode cannot be used in parallel 0 V output voltage source should be connected to the input Ground Port Or set ground_port to 12 and open the input port 12 that is the default ground port If you assign the input 12 as the ground port this ground port will be internally connected to the ground when the ground mode is set to ON ROUTe AGND PORT card_number ground_port ROUTe AGND PORT card_number Parameter Explanation card_number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL ALL is not available for query ground _port Input port number 1 to 14 Or 1 to disable ground port port_number lt newline gt lt END gt port_number 1 to 14 or 1 Number set to ground port OUTPUT QAgb2200 ROUT AGND PORT 0 13 OUTPUT Agb2200 ROUT AGND PORT 0 ENTER Agb2200 A In this example A will be 13 Agilent B2200 User s Guide Edition 2 5 27 NOTE Syntax Query response Example SCPI Command Reference ROUTe AGND STATe ROUTe AGND STATe You cannot set the Ground Mode to ON when the Bias Mode is ON This command controls the Ground Mode for the specified card When the Ground Mode is ON the input Ground Por
57. the connection rule for the specified card 1 2 3 4 or ALL for Normal Config rule FREE free or SROUte single Query returns the connection rule of the specified card FREE or SROU card_number Card to check 0 for Auto Config 1 2 3 or 4 for Normal Config ROUT r ROUT CONN SEQ card_number sequence Specifies the connection sequence mode for the CONN SEQ card_number specified card card_number 0 or ALL for Auto Config 1 2 3 4 or ALL for Normal Config sequence NSEQ No Sequence mode BBM Break Before Make mode MBBR Make Before Break mode Query returns the connections sequence mode of the specified card NSEQ BBM or MBBR card_number Card to check 0 for Auto Config 1 2 3 or 4 for Normal Config Agilent B2200 User s Guide Edition 2 5 13 SCPI Command Reference Command Summary Command Description ROUT ROUT l SYMB CHAN card_number channel string l SYMB CHAN card_number channel Defines a string for the specified channel card_number 0 or ALL for Auto Config 1 2 3 4 or ALL for Normal Config channel channel number 1 to 48 for Auto 1 to 12 for Normal Query returns the symbol string set to the specified channel ROUT ROUT SYMB PORI port string SYMB PORI l port Defines a string for the specified input port port input p
58. the cursor to REVISION then press the Enter key The firmware revision is displayed To Display Module Information Press the Menu key The setup menu will be displayed on the LCD Move the cursor to CONFIG then press the Enter key Move the cursor to UNIT then press the Enter key The module information is displayed Press the arrow keys to display another module information item Agilent B2200 User s Guide Edition 2 3 9 Front Panel Operation Operation To Read Error Message 1 p IN Press the Menu key The setup menu will be displayed on the LCD Move the cursor to ERROR then press the Enter key Move the cursor to DISPLAY then press the Enter key to display the message Press the arrow keys to read another error message A maximum of four error messages can be stored To clear error buffer ER gt Press the Menu key The setup menu will be displayed on the LCD Move the cursor to ERROR then press the Enter key Move the cursor to CLEAR then press the Enter key The LCD displays NO Press the arrow key to display YES then press the Enter key to clear the error buffer or press the Exit key to cancel operation To Set Beeper ER P N Press the Menu key The setup menu will be displayed on the LCD Move the cursor to BEEP then press the Enter key Press the arrow keys to select the beep ON or OFF Press the Enter key to make the setup effective or press the Exit key to cancel changing
59. the input port disable_status disable_status lt newline gt lt END gt 1 ground disabled 0 ground enabled OUTPUT Agb2200 ROUT AGND CHAN DIS 10101 OUTPUT Agb2200 ROUT AGND CHAN DIS 10101 10102 10201 ENTER Agb2200 A This example ground disables the output port 1 on the card 1 In this example A willbe 1 0 1 ROUTe AGND CHANnel ENABle CARD This command ground enables the all output ports channels for the specified card When the Ground Mode is ON the ground enabled output ports that have not been comnected to any other input port are connected to the input Ground Port This command is available only for the specified card At RST no channel is ground enabled The ground mode is set by ROUTe AGND STATe Agilent B2200 User s Guide Edition 2 5 25 Syntax Example Syntax Query response Example SCPI Command Reference ROUTe AGND CHANnel ENABle LIST ROUTe AGND CHANnel ENABle CARD card_number Parameter Explanation card_number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL OUTPUT Agb2200 ROUT AGND CHAN ENAB CARD ALL ROUTe AGND CHANnel ENABle LIST This command specifies the ground enabled output ports channels When the Ground Mode is ON the ground enabled output ports that have not been connected to any other input port are connected to the input Ground Port Then the input Ground
60. the setup To Set GPIB Address A E E Press the Menu key The setup menu will be displayed on the LCD Move the cursor to CONFIG then press the Enter key Move the cursor to ADDRESS then press the Enter key Press the arrow keys to set the GPIB address Press the Enter key to make the setup effective or press the Exit key to cancel changing the setup To be effective the new address reboot the Agilent B2200 3 10 Agilent B2200 User s Guide Edition 2 Front Panel Operation Operation To Set Remote Display Mode This instruction enables or disables the data display in the GPIB remote condition See RMT_DSPL on page 3 33 LCD 1 E A OO Press the Menu key The setup menu will be displayed on the LCD Move the cursor to RMT_DSPL then press the Enter key Move the cursor to LCD then press the Enter key Press the arrow keys to set the remote display mode ON or OFF Press the Enter key to make the setup effective or press the Exit key to cancel changing the setup LED matrix j i ay ve RD Press the Menu key The setup menu will be displayed on the LCD Move the cursor to RMT_DSPL then press the Enter key Move the cursor to LED then press the Enter key Press the arrow keys to set the remote display mode ON or OFF Press the Enter key to make the setup effective or press the Exit key to cancel changing the setup To Return to Local Mode Press the Local key If the front panel keys a
61. to C3L to the Agilent 4284A Then measure and record the R L and C values 6 Ifyou use the connector plate perform the following procedure a Connect the path cable corresponding to C2H to the Agilent 4284A Then measure and record the R L and C values b Connect the path cable corresponding to C2L to the Agilent 4284A Then measure and record the R L and C values R L C Measurement Conditions Parameter Frequency Function Terminals R 1 kHz to 1 MHz se A and B L SERIES see note C PARALLEL Aand C a Select 1 point Do not change while measurements of all coefficients b For triaxial cable connect B to F directly and measure L between A and E For coaxial cable connect B to D directly and measure L between A and C Ignore E and F Measurement Terminals of C2H C2L C3H C3L Path GUARD C GROUND E GROUND F GUARD D Insulator Triaxial Cable FORCE or SENSE A FORCE or SENSE B 4 26 Agilent B2200 User s Guide Edition 2 Table 4 12 Programming Capacitance Compensation To Perform Measurement and Compensation Perform the capacitance measurement and compensation as shown below 1 Set the Agilent 4284A measurement condition Then the frequency must be the value Fmeas used when the compensation coefficients are measured Before contacting the device under test DUT perform the Cp G measurement in the open condition at the end of the measureme
62. to the point you desire and confirm the LCD display For example if you point the input 5 to output 10 cross point of the Agilent B2200 in the auto configuration mode the following message must be displayed SLOT 0 INPUT 5 OUTPUT 10 Continue this for all cross points After that press the Enter key for the normal operation The test result will be recorded as PASS If you find any wrong response press the Exit key The test result will be recorded as FAIL Finally press the Exit key to return to the previous menu RESULT Displays the test result Press the Exit key to return to the previous menu Agilent B2200 User s Guide Edition 2 3 37 Front Panel Operation Setup Menus GPIB Displays the sub menu that provides the following functions EXECUTE Displays the following message Open GPIB then press Enter Disconnect the cable from the GPIB connector on the rear panel and open it Press the Enter key to start the GPIB test and wait until PASS or FAIL is displayed Then press the Exit key to return to the previous menu e RESULT Displays the test result Press the Exit key to return to the previous menu 3 38 Agilent B2200 User s Guide Edition 2 Programming Programming This chapter describes the automatic control programming of the Agilent B2200 e Programming Basics Explains the commands for the fundamental switch control of the Agilent B2200 e Program
63. to the same input port the ground mode and the couple mode cannot be used in parallel If a ground enabled input port and a couple port have been assigned to the same input port the ground mode and the couple mode cannot be used in parallel 3 20 Agilent B2200 User s Guide Edition 2 Front Panel Operation Switch Control Functions NOTE Couple Port Detection Function The Agilent B2200 provides the function to detect the input ports that connect the Kelvin triaxial cable and set the ports as the couple port automatically See SCAN on page 3 32 Agilent B2200 User s Guide Edition 2 3 21 Table 3 3 Table 3 4 Front Panel Operation Display Functions Display Functions The Agilent B2200 provides LED matrix LCD and 18 front panel keys for front panel operation This section explains the display of the LED matrix and the LCD e LED Matrix m LCD LED Matrix Agilent B2200 has four blocks of 14 x 12 LED matrix They display the switch condition of the switch modules installed in the slot 1 to slot 4 See Table 3 3 Also LEDs labeled Card 1 to Card 4 are located above the LED matrices They indicate the status of the module installed in the slot 1 to 4 respectively See Table 3 4 LED Matrix LED color Explanation Green The switch has been closed to connect the output channel to the input port Red The switch has been closed to connect the output channel to the input bias port or the inpu
64. used and the Agilent B2200 to an electric ground safety ground e If you need to touch the force and guard terminals of the output connector turn off the Agilent B2200 and discharge any capacitors whenever possible e Warn workers around the B2200 about dangerous conditions 2 2 Agilent B2200 User s Guide Edition 2 CAUTION Installation Requirements Requirements This section describes the following requirements for the Agilent B2200 e Power Requirements Power Cable e Operating Environment e Storage and Shipping Environment Power Requirements Before applying ac line power to the Agilent B2200 ensure that the correct power cable is used The Agilent B2200 can operate from any single phase ac power source supplying 90 to 264 V in the frequency range from 47 to 63 Hz The maximum power consumption is 2 A 200 VA Power Cable In accordance with international safety standards this instrument is equipped with a three wire power cable When connected to an appropriate ac power outlet this cable grounds the instrument frame The type of power cable shipped with each instrument depends on the country of destination See Table 2 1 for the part numbers of the power cables available If the plug on the cable does not fit the power outlet or the cable is to be attached to a terminal block cut the cable at the plug end and re wire it This work should be performed by a qualified electrician all l
65. 0 User s Guide Edition 2 5 59 SCPI Command Reference Output Queue Output Queue The Output Queue stores response messages until they are read If an unread message exists Bit4 Message Available MAV of the Status Byte Register is set to 1 So Bit4 is used to synchronize information exchange with the controller See Figure 5 5 Figure 5 5 Output Queue of B2200 a 46 Last Data Byte to be read Queue Non Empty Next Data P Byte Entered ea First Data Byte to be read Output Queue Summary Message to Message Available MAV Bit 4 of Status Byte Register pg04005 120x100 The Response Formatter places Data Byte Messages and END messages into the Output Queue in response to query commands These messages are removed from the Output Queue as they are read by the controller As long as the Output Queue contains an unread message MAV is 1 5 60 Agilent B2200 User s Guide Edition 2 VXI plug amp play Driver VXI plug amp play Driver This chapter introduces the VXI plug amp play driver available for Agilent B2200 and consists of the following sections e System Requirements e Installing VXIplug amp play Driver e Driver Functions 6 2 Agilent B2200 User s Guide Edition 2 VXI plug amp play Driver System Requirements System Requirements The following system environments are required Operating System Microsoft Windows XP Professional Windows 20
66. 00 Windows NT 4 0 or Windows 95 It must be supported by the application development environment Application Development Environment programming environment Microsoft Visual Basic Microsoft Visual C Borland C Builder National Instruments LabWindows or LabVIEW or Agilent VEE Agilent T amp M Programmers Toolkit for Visual Studio NET Agilent W1140A or equivalent Needed for Visual Basic NET users GPIB IEEE 488 Interface and 32 bit VISA I O Library Agilent 82357A USB GPIB interface E5810A LAN GPIB gateway 82350B GPIB interface or equivalent These models include Agilent VISA and SICL 1 O libraries Computer and peripherals Required specifications depend on the application development environment See manual of the application development environment The flexible disk drive is required to install the VXIp ug amp play driver The CD ROM drive is required to install the software needed to use driver Minimum disk space 1 MB for the Agilent B2200 VXIplug amp play driver Agilent B2200 User s Guide Edition 2 6 3 VXI plug amp play Driver Installing VXIplug8play Driver In stalling VXIplug amp play Driver The installation flow is shown below If you have already installed the GPIB inte rface card VISA I O library and programming software on your PC skip steps 1 through 5 1 6 4 Install the GPIB interface card into your PC See the interface card manual Note the model number of the interface
67. 01 130 pF Cable from Connector Plate to DUT 8121 1191 1 m 130 pF Probe Card Guard Capacitance approximately 10 pF example In this environment the total guard capacitance Cg total is as follows Cg total 145 8x3 75 130 130 10 pF 514 pF lt 900 pF Even if you use other instruments you can use the table for reference about the measurement cable length and capacitance Agilent B2200 User s Guide Edition 2 2 23 Installation Measurement Cable Length Table 2 8 Guard Capacitances of B2200 Measurement Environment Typical Cable Guard Connection Agilent Model Part No Length Capacitance from SMU to B2200 16494A 003 for non Kelvin 80 cm 75 pF inputs i 16494A 001 for non Kelvin 1 5m 130 pF 16494B 003 for Kelvin 4142B 80 cm 90 pF 16493K 001 for Kelvin 1 5m 150 pF mainframe and B2210A only card is installed 145 pF modules B2210A more card 8 pF extra card B2211A only 1 card is installed 145 pF B2211A more 1 card 8 pF extra card from B2200 outputs 16494A 001 for non Kelvin 1 5m 130 pF to connector plate or A probe card interface 16494A 002 for non Kelvin 3m 240 pF 16494A 003 for non Kelvin 4m 340 pF 16494B C 001 for Kelvin 1 5m 140 pF 16494B C 002 for Kelvin 3m 260 pF 16494C 003 for Kelvin 4m 340 pF from connector Agilent Part No 8121 1191 Xm 130 pF per m plate to DUT probe card interface B2220A 70 pF 2 24
68. 012 Bad bias port number For Input Port No for Bias Port only 1 to 10 are allowed 3013 Cannot connect multiple channels in SROUTe mode For the single connection rule an input port can be connected to only one output port and an output port can be connected to only one input port 3014 Cannot directly specify Bias Port channel Relays on the input bias port cannot be controlled directly when the bias mode is ON 7 12 Agilent B2200 User s Guide Edition 2 Error Messages B2200 Specific Error Messages Error Number Error Message and Description 3017 Too many relays closed Max 52 relays card Too many relays have been closed To close new relays open some relays Maximum 52 relays can be closed for each module 3018 Can t change to ACONfig mode Check card config The present card configuration of the B2200 does not allow the auto configuration mode Change the module configuration 3019 Cannot use same port for Couple and Bias The couple mode and the bias mode cannot be used in parallel when a couple port and the input bias port have been assigned to the same input port 3020 3021 Bad auto ground port number Specify the output ports effective for the input ground port The port number must be 1 to 14 Bad unused port number Specify the input ports effective for the ground enabled input port unused port The port number must be to 9 3022 Cannot directly specify auto ground por
69. 16494B 002 3 m length 16494B 003 80 cm length 16494C Kelvin triaxial cable between B2210 B2211 outputs and B2220A 16494C 001 1 5 m length 16494C 002 3 m length 16494C 005 4 m length 16494F CMU Input cable 2 m between B2200 CMH CML and 4 terminal pairs connectors 16495E Half size blank plate 16495F Half size connector plate with 12xtriaxial intlk GNDU 16495F 001 Bulkhead feedthrough connectors female to female 16495F 002 Connectors to contacts for soldering 16495G Full size connector plate with 24xtriaxial intlk GNDU 16495G 001 Bulkhead feedthrough connectors female to female 16495G 002 Connectors to contacts for soldering Agilent B2200 User s Guide Edition 2 Introduction Accessories and Options 1 18 Agilent B2200 User s Guide Edition 2 Installation Installation This chapter describes requirements to install Agilent B2200 and the tasks for installation and is organized into the following three sections e Requirements e Inspection e Installing the B2200 Self Test Output Connections Input Connections e Measurement Cable Length e Maintenance WARNING The maximum input voltage of the Agilent B2200 is 200 V And dangerous voltages may be present at the output terminals To prevent electric shock you must observe the following safety precautions when using the Agilent B2200 e Use a three conductor ac power cable to connect cabinet if
70. 2 5 Table 2 6 Installation Output Connections Recommended Parts Description Agilent Part No Interlock Connector 6 pin female 1252 1419C Switch 3101 0302 or 3101 3241 LED V 2 1 V Ip 10 mA 1450 0641 Wire 8150 5680 Triaxial Connector female 1250 2457 Low Noise Coaxial Cable 8121 1191 Dimensions of Connector Holes Triaxial Connector in mm Interlock Connector in mm 111 3 18 Z gt Ley Kelvin Triaxial Connector in mm 10 3 14 11 11 14 lt T a T 55 O a ne Agilent B2200 User s Guide Edition 2 2 19 WARNING CAUTION Installation Input Connections Input Connections This section explains how to connect instruments to the Agilent B2200 Turn off all instruments that will be connected to the Agilent B2200 And do not turn them on until the connection described in this section is completed If you ignore this warning you may be exposed to dangerous voltage The Agilent B2200 input connector has eight SMU input connectors and six AUX input connectors Table 2 7 shows cables used to connect the instrument for typical applications using the Agilent B2200 You can make the Kelvin connections when using the E5260 E5270 4142 4156 SMU or 41501 HPSMU Then use cables as follows e Agilent 16493K Kelvin triaxial cable for Agilent E5260 E5270 4156 41501 Agilent 16494B Kelvin triaxial cable for Agilent 4142B To connect the Kelvi
71. 200 ROUT CLOS 10103 U U This example controls the card 1 relays and connects the inputs 1 and 2 to the outputs 3 and 4 respectively ROUT CLOS 10104 will make the same result Agilent B2200 User s Guide Edition 2 5 39 Syntax Query response Example Syntax Example SCPI Command Reference ROUTe FUNCtion ROUTe FUNCtion This command sets the channel configuration which determines how you specify the channel list or card_number in other commands The query returns the present channel configuration At RST this parameter is set to ACONf ig See Channel Configuration Mode on page 3 13 When configuration is changed by this command all channels are opened disconnected and become same status as after S YSTem CPON ALL execution ROUTe FUNCtion channel_config ROUTe FUNCtion Parameter Explanation channel_config ACONfig Auto Config Mode NCONf ig Normal Config Mode ACON or NCON lt newline gt lt END gt OUTPUT Agb2200 ROUT FUNC ACON OUTPUT RAgb2200 ROUT FUNC ENTER Agb2200 A In this example AS will be ACON ROUTe OPEN CARD This command disconnects all input ports from all output ports for the specified card For some modes such as Single Route Mode Couple Mode Ground Mode and Bias Mode more complex disconnections may occur ROUTe OPEN CARD card_number Parameter Explanation card_num
72. 2200 User s Guide Edition 2 5 29 Syntax Example Syntax Query response SCPI Command Reference ROUTe BIAS CHANnel DISable CARD ROUTe BIAS CHANnel DISable CARD This command bias disables the all output ports channels for the specified card When the Bias Mode is ON the bias disabled output ports are disconnected from the input Bias Port At RST all cards are bias enabled The bias mode is set by ROUTe BIAS STATe ROUTe BIAS CHANnel DISable CARD card_number Parameter Explanation card_number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL OUTPUT Agb2200 ROUT BIAS CHAN DIS CARD ALL ROUTe BIAS CHANnel DISable LIST This command specifies the bias disabled output ports channels When the Bias Mode is ON the bias disabled output ports are disconnected from the input Bias Port At RST all channels are bias enabled The bias mode is set by T ROUTe BIAS STATe The query returns whether the specified channels are bias disabled or not ROUTe BIAS CHANnel DISable LIST channel_list ROUTe BIAS CHANnel DISable LIST channel list Parameter Explanation channel list Channels to bias disable or to check For channel list see Switch Control on page 4 5 Input port is always the input Bias Port So the input ports in channel _list are ignored However you cannot abbreviate the input port dis
73. 3 5 5 19 B2200 WriteLine SYST MEMO COMM 4 1 1 2 2 5 7 7 21 B2200 WriteLine SYST MEMO COMM 5 1 1 2 2 5 9 7 23 B2200 WriteLine SYST MEMO COMM 6 10 BIAS bw B2200 WriteLine SYST MEMO COMM 7 12 GROUND har B2200 WriteLine SYST MEMO COMM 8 CMH 10 CML 11 wt 19 B2200 WriteLine SYST DISP STR Memory comment was updated B2200 Close Console WriteLine Labeling completed amp Chr 10 End Sub 23 End Module Line Description 8 Resets the Agilent B2200 9 Sets the channel configuration mode to Auto 12to 19 Defines the comments for the internal memory 1 to 8 Agilent B2200 User s Guide Edition 2 4 19 NOTE Programming Capacitance Compensation Capacitance Compensation When the capacitance conductance measurement is performed through the Agilent B2200 LCR meter measures the capacitance conductance of the path including a device under test DUT matrix switches extension cables and so on So the data measured by the LCR meter is far from the DUT s capacitance conductance The Agilent B2200 VXIplug amp play driver provides the functions used to compensate the capacitance conductance measured by the Agilent 4284A LCR meter in the measurement environments described in Required Conditions on page 4 21 This section explains how to use the capacitance compensation function e Capacitance Compensation Function e Required Conditions e To Create Compensation Data File e
74. 5 11 Syntax Query response Example Syntax Example SCPI Command Reference TST TST This query command executes an internal self test then returns the result After this command execution the B2200 becomes same status as after RST command execution TST test_result lt newline gt lt END gt test_result Explanation 0 pass 1 fail OUTPUT Agb2200 TST ENTER Agb2200 A WAI This command stops execution of any commands until the Operation Complete OPC bit is set to 1 which means there is no pending operation See OPC command WAI OUTPUT Agb2200 WAI 5 12 Agilent B2200 User s Guide Edition 2 SCPI Command Reference Command Summary Subsystem Commands Command Summary ROUT subsystem ROUTe subsystem has commands for controlling the signal routing Open a channel opens relays to disconnect the channel that is disconnects input port from output port Close a channel closes relays to connect the channel that is connects input port to output port Command Description ROUT r ROUT 0 FUNC channel_config Sets the channel configuration mode FUNC channel_config ACON Auto Config Mode NCON Normal Config Mode Query returns the present channel configuration ACON or NCON ROUT ROUT CONN RULE card_number rule CONN RULE card_number card_number 0 or ALL for Auto Config Sets
75. 5 54 Agilent B2200 User s Guide Edition 2 Figure 5 2 SCPI Command Reference Status Byte Register Status Byte Register The B2200 Status Byte Register contains bits ESB and MAV for status summary messages from other registers The status of these bits depends on the condition of the Standard Event Status Register and the Output Queue If service request occurs Bit6 RQS of Status Byte Register is set See Figure 5 2 and Table 5 1 for the B2200 Status Byte Register Status Byte Register of B2200 STATUS MMARY MESSAGES from ce Not Used pe RQS is read by Serial Poll Status Byte Register MSS e MSS is read by STB Not Used RQS 6 pe WI Standard Event Output Queue lt x MT MN 0 ae Eh GO NO O PG04002 120x80 The Status Byte Register can be read with either a serial poll or the STB common query command see Common Commands on page 5 4 Serial poll is a low level GPIB command that can be executed by SPOLL in HP BASIC such as the following Status SPOLL Agb2200 Both serial poll and STB read the Status Byte Register identically but have following difference SPOLL returns RQS for bit6 e STB returns MSS for bit6 RQS and MSS are always the same value so returned Status Byte value is always the same for these two methods Agilent B2200 User s Guide Edition 2 5 55 Table 5 1
76. 7 B2200 Close MsgBox Click OK to stop the program vbOKOnly Console WriteLine Measurement completed Chr 10 End Sub 21 End Module Line Description 1 to6 The above example is for the B2200 of the GPIB address 22 on the interface GPIBO GPIBO is the VISA name Confirm your GPIB settings and set them properly 7 Defines the channel list in the channels variable string 8 to 12 Resets the Agilent B2200 sets the Normal configuration mode the Single connection rule and the Break Before Make connection sequence And displays the string on the LCD 13 Closes switches to connect the input output paths specified by channels 14to 16 Opens a message box to confirm the start of measurement And clicking OK on the message box displays a message on the console window Insert measurement control program code at the line 16 17 Opens all relays on the all modules installed in the Agilent B2200 18 to 22 Disables the software connection with the Agilent B2200 and opens a message box to confirm the end of the program Finally clicking OK on the message box displays a message on the console window Agilent B2200 User s Guide Edition 2 4 9 Figure 4 3 Setup Programming Programming Examples Using Bias Mode The following example uses the bias mode Bias Mode Example a 1 to 20 Instrument e 3 al 4 Gate Substrate Source e Channel configuration mode Auto e Connection rule Single
77. AGND CHANnel DISable CARD This command ground disables the all output ports channels for the specified card When the Ground Mode is ON the ground disabled output ports are disconnected from the input Ground Port At RST no channel is ground enabled The ground mode is set by ROUTe AGND STATe ROUTe AGND CHANnel DISable CARD card_number Parameter Explanation card_number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL OUTPUT Agb2200 ROUT AGND CHAN DIS CARD ALL 5 24 Agilent B2200 User s Guide Edition 2 Syntax Query response Example SCPI Command Reference ROUTe AGND CHANnel DISable LIST ROUTe AGND CHANnel DISable LIST This command specifies the ground disabled output ports channels When the Ground Mode is ON the ground disabled output ports are disconnected from the input Ground Port At RST no channel is ground enabled The ground mode is set by ROUTe AGND STATe The query returns whether the specified channels are ground disabled or not ROUTe AGND CHANnel DISable LIST channel_list ROUTe AGND CHANnel DISable LIST channel list Parameter Explanation channel _list Channels to ground disable or to check For channel_list see Switch Control on page 4 5 Input port is always the input Ground Port So the input ports in channel_list are ignored However you cannot abbreviate
78. AGND UNUSED This command specifies the ground enabled input ports for the specified card When the Ground Mode is ON the ground enabled input ports that have not been connected to any other port are connected to the input Ground Port At RST no input port is ground enabled The ground mode is set by ROUTe AGND STATEe The query returns which input ports are ground enabled The input ground port and a ground enabled input port cannot be assigned to the same input port If the ground enabled input port and a couple port have been assigned to the same input port the ground mode and the couple mode cannot be used in parallel Open the input ports set to this command If any equipment is connected to the ground enabled input ports turning the Ground Mode ON may cause damage in the equipment ROUTe AGND UNUSED card_number port_number ROUTe AGND UNUSED card_number Parameter Explanation card_number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL ALL is not available for query port_number Input port number 1 to 8 Enclose by single quotation marks Separate multiple input port numbers by comma For example 1 5 port_numberf port_number lt newline gt lt END gt port_number 1 to 8 OUTPUT Agb2200 ROUT AGND UNUSED 0 5 6 7 8 OUTPUT Agb2200 ROUT AGND UNUSED 0 ENTER Agb2200 AS In this example AS willbe 5 6 7 8 Agilent B
79. Agilent B2200 User s Guide Edition 2 Installation Maintenance Maintenance Maintenance should be performed periodically to keep the B2200 in good condition Calibration Calibration must be performed periodically so that the instruments satisfy the specifications and keep a good condition It is recommended to perform a calibration once a year at least For calibration contact your nearest Agilent Technologies Service Center Trained service personnel will perform calibration performance verification Cleaning Before performing cleaning turn off the instrument and disconnect power cable from the rear panel Use a dry cloth to clean the external case parts To prevent electrical shock do not perform cleaning when the instrument is turned on and do not use a wet cloth Agilent B2200 User s Guide Edition 2 2 25 Installation Maintenance 2 26 Agilent B2200 User s Guide Edition 2 Front Panel Operation Front Panel Operation This chapter explains the front panel operation and the switch control functions of the Agilent B2200 also provides the reference information of the front panel keys and display e Operation e Switch Control Functions e Display Functions e Front Panel Keys Setup Menus 3 2 Agilent B2200 User s Guide Edition 2 NOTE Front Panel Operation Operation Operation This section describes operations of the Agilent B2200 To Initial
80. Agilent B2200A Femto Leakage Switch Mainframe Agilent B2201A 14ch Low Leakage Switch Mainframe User s Guide eS Agilent Technologies Notices Agilent Technologies 2004 2005 No part of this manual may be reproduced in any form or by any means including elec tronic storage and retrieval or translation into a foreign language without prior agree ment and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number B2200 90001 Edition Edition 1 October 2004 Edition 2 July 2005 Agilent Technologies Inc 395 Page Mill Road Palo Alto CA 94303 USA Warranty The material contained in this docu ment is provided as is and is sub ject to being changed without notice in future editions Further to the max imum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability and fitness for a par ticular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connec tion with the furnishing use or per formance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the wa
81. EU market after Sep 24 2004 ie 5 AY Date Toshiyuki Kawaj i QA Manager Agilent Technologie s NOTE Herstellerbescheinigung GEAUSCHEMISSION Lpa lt 70 dB am Arbeitsplatz normaler Betrieb nach DIN 45635 T 19 e Manufacturer s Declaration ACOUSTIC NOISE EMISSION Lpa lt 70 dB operator position normal operation per ISO 7779 This ISM device complies with Canadian ICES 001 Cet appareil ISM est conforme Hla norme NMB 001 du Canada This product complies with the WEEE Directive 2002 96 EC marking requirements The affixed label indicates that you must not discard this electrical electronic product in domestic household waste Product Category With reference to the equipment types in the WEEE Directive Annex I this product is classed as a Monitoring and Control instrumentation product Do not dispose in domestic household waste To return unwanted products contact your local Agilent office or see www agilent com environment product for more information Microsoft Windows Windows NT Visual C and Visual Basic are registered trademarks of Microsoft Corporation Borland C Builder is registered trademark of International Inc LabWindows and LabVIEW are registered trademarks of National Instruments Corporation All other trademarks are the property of their respective owners NOTE Safety Summary The following general safety precautions must be observed during all phases of operatio
82. Example SCPI Command Reference SYSTem BEEP SYSTem BEEP This command enables disables the beeper SYSTem BEEP state Parameter Explanation state ON or 1 enables the beeper OFF or 0 disables the beeper OUTPUT Agb2200 SYST BEEP ON SYSTem CCONfig This query command is just to keep compatibility with the Agilent ES250A Low Leakage Switch Mainframe This query command returns the card configuration information SYSTem CCONfig card_number Parameter Explanation card_number card number 1 2 3 or 4 card_configuration lt newline gt lt END gt Always returns 10 OUTPUT Agb2200 SYST CCON 1 ENTER fAgb2200 A PRINT Card configuration AS 5 44 Agilent B2200 User s Guide Edition 2 Syntax Query response Example SCPI Command Reference SYSTem CDEScription SYSTem CDEScription This query command returns a description of the specified card SYSTem CDEScription card_number Parameter Explanation card_number For Auto Config mode 0 For Normal Config mode 1 2 3 or 4 card_description lt newline gt lt END gt If the designated card is not installed or initialize failed this command returns No Card For B2200A Inthe Auto Config mode card description response is one of following e B2210A 14x12 e B2210A 14x24 e B2210A 14x36 e B2210A 14x48 Inthe Nor
83. Figure 1 3 and Figure 1 4 Switch Module Output Terminals KE Agilent B2210A ito Leakage Switch Module s200v 17 TA Mex LA A WARNING NOTE Do not touch the force and guard terminals of the output connectors while the Agilent B2200 is turned on Dangerous voltages up to the maximum input voltage may be present at the output connectors Mixed configuration of the switch modules is not supported 1 8 Agilent B2200 User s Guide Edition 2 Introduction Switch Modules Figure 1 4 Switch Module Block Diagram Output 1 2 3 4 ZN O SY ch chy chy 5 a eN d P q gt o Se P p Sy p p P P y 5 g P N d a ad As h c c d D gt p gt P gt gt O q p p P D p lt p P P gt p p q D D D P pD D D D p ne 5 p Q 5 ch cb dy 5 A S A gt q q gt P P Y P D P gt q O g aN la la d ch la la 9 O p gt D D 10 A d a dy S 5 A F S t Pp D WV J2 7 A P y 11 A A d dy A K K h d WZ J7 Y K q7 q l 12 A A y c a N O gt g gt Pj 13 CMH A d d 5 d d A Ay S US 7 ja 14 CML y h ay chy Ay A de c E gt D G Agilent B2200 User s Guide Edition 2 1 9 Introduction Specifications Specifications This section lists specifications and supplemental information for the Agilent B2200 series e General Specifications
84. Functions agb220xa_testExec_Q This function performs the diagnostics and returns the test result For details of each test see Selftest Menu on page 3 34 ViStatus VI FUNC agb220xa_testExec_Q ViSession vi Vilnt16 framecard_exec ViPInt16 exec_result vi Instrument handle returned from agb220xa_init framecard_exec Test item to perform 1 to 10 See below Card 1 relay test Card 2 relay test Card 3 relay test Card 4 relay test 2 3 4 5 Relay test of all cards 6 Front panel key test 7 Controller test 8 Light pen test 9 LED matrix test 10 Beeper test exec_result Test result 0 pass 1 fail agb220xa_timeOut This function sets a minimum timeout value for driver I O transactions in milliseconds The default timeout period is 2 seconds ViStatus VI FUNC agb220xa_timeOut ViSession vi Vilnt32 timeOut vi Instrument handle returned from agb220xa_init timeOut T O timeout value for all functions in the driver in milliseconds 0 to 2147483647 6 32 Agilent B2200 User s Guide Edition 2 Syntax Parameters Syntax Parameters NOTE VXI plug amp play Driver Driver Functions agb220xa_timeOut_Q This function returns the timeout value for driver I O transactions in milliseconds ViStatus VI_FUNC agb220xa_timeOut_Q ViSession vi ViPInt32 pTimeOut vi Instrument handle returned from agb220xa_init pTimeOut Minimum timeout period that the driver can be set to in
85. I FUNC agb220xa_cmdReal64_Q ViSession vi ViString cmd_str ViPReal64 result vi Instrument handle returned from agb220xa_init cmd_str Instrument command cannot exceed 256 bytes in length result Response from instrument agb220xa_cmdString Q This function passes the cmd_str string to the instrument This entry point will wait for a response which must be a string character data You specify the cmd_str and size parameters and get result ViStatus _ VI FUNC agb220xa_cmdString Q ViSession vi ViString cmd_str Vilnt32 size ViChar_VI_FAR result vi Instrument handle returned from agb220xa_init cmd_str Instrument command cannot exceed 256 bytes in length size Length of result in bytes 2 to 32767 result Response from instrument Agilent B2200 User s Guide Edition 2 6 17 Syntax Parameters Syntax Parameters VXI plug amp play Driver Driver Functions agb220xa_compenC This function compensates capacitance conductance data measured by the Agilent 4284A LCR meter and returns compensation results Before this function is executed a compensation data file must be specified by using the agb220xa_selectCompenFile function The file must contain the appropriate compensation coefficients for your measurement environment For obtaining the compensation coefficients for your environment and creating the compensation data file see Capacitance Compensation on page 4 20 agb220xa_compenC ViSession
86. Port will not be connected to the output ports that have been connected to any other input port At RST no channel is ground enabled The ground mode is set by ROUTe AGND STATe The query returns whether the specified channels are ground enabled or not ROUTe AGND CHANnel ENABle LIST channel_list ROUTe AGND CHANnel ENABle LIST channel_list Parameter Explanation channel list Channels to ground enable or to check For channel list see Switch Control on page 4 5 Input port is always the input Ground Port So the input ports in channel_list are ignored However you cannot abbreviate the input port number enable_status enable_status lt newline gt lt END gt 1 ground enabled 0 ground disabled OUTPUT Agb2200 ROUT AGND CHAN ENAB 10101 OUTPUT Agb2200 ROUT AGND CHAN ENAB 10101 10102 10201 ENTER Agb2200 A This example ground enables the output port 1 on the card 1 In this example AS will be 1 0 1 5 26 Agilent B2200 User s Guide Edition 2 NOTE Syntax Query response Example SCPI Command Reference ROUTe AGND PORT ROUTe AGND PORT This command specifies the input Ground Port for the specified card For each card you can specify the same or different Ground Port At RST the Ground Port is 12 The ground mode is set by ROUTe AGND STATe The query returns the input port number of
87. Query response Example SCPI Command Reference DIAGnostic TEST FRAMe EXE Cute DIAGnostic TEST FRAMe EXECute This command executes the specified B2200 test then returns the test result See Selftest Menu on page 3 34 to perform the test After the controller test the B2200 status becomes same as after RST command execution DIAGnostic TEST FRAMe EXECute CONTroller FPANel LED PEN BEEPer Parameter Explanation CONTroller Controller test FPANel Front panel interface test LED LED matrix test PEN Light pen test BEEPer Beeper test test_result lt newline gt lt END gt 1 fail 0 pass OUTPUT Agb2200 DIAG TEST FRAM CONT Agilent B2200 User s Guide Edition 2 5 23 Syntax Query response Example Syntax Example SCPI Command Reference DIAGnostic TEST FRAMe STATe DIAGnostic TEST FRA Me STATe This command returns the most recent test result pass fail of the specified test DIAGnostic TEST FRAMe STATe CONTroller FPANel LED PEN BEEPer Parameter Explanation CONTroller Controller test FPANel Front panel interface test LED LED matrix test PEN Light pen test BEEPer Beeper test test_result lt newline gt lt END gt 1 fail 0 pass 1 not tested OUTPUT Agb2200 DIAG TEST FRAM STAT CONT ENTER Agb2200 A ROUTe
88. SABLE then press the Enter key The LCD displays one of the bias enabled output port numbers which can be changed to the bias disabled Or if there is no bias enabled output port the LCD displays Channel No Channel Press the arrow key to select the output port to be changed to the bias disabled then press the Enter key Move the cursor to ENABLE then press the Enter key The LCD displays one of the bias disabled output port numbers which can be changed to the bias enabled Or if there is no bias disabled output ports the LCD displays Channel No Channel Press the arrow key to select the output port to be changed to the bias enabled then press the Enter key Repeat c and d until the bias enabled port setup is completed After that press the Exit key more than once to display the status and setup conditions Press the Bias Mode key to set the bias mode ON Pressing the key again sets the mode OFF Change the bias port default setting 10 a When the bias mode is ON press the Port Function key The blink cursor appears on the first line of the LCD Press the right left arrow key to move the cursor on the input port number 01 to 14 that will be set to the input bias port Press the up down key to display B then press the Enter key Agilent B2200 User s Guide Edition 2 3 7 Front Panel Operation Operation To Use Ground Mode Ground mode cannot be set to ON when the bias mode is ON 1 a b c d e 2
89. The following four lines enable the same bits bit 4 and 5 OUTPUT Agb2200 SRE 48 using decimal numeric OUTPUT Agb2200 SRE B110000 using binary numeric OUTPUT Agb2200 SRE 060 using octal numeric OUTPUT Agb2200 SRE H30 using hexadecimal numeric 5 10 Agilent B2200 User s Guide Edition 2 Syntax Query response Semantics Example SCPI Command Reference The following is example for query OUTPUT Agb2200 SRE ENTER Agb2200 A STB STB This query command reads the Status Byte Register reads Master Summary Status bit not Request for Service Message For bit6 this command reads MSS not Request for Service RQS See Status Reporting Structure on page 5 53 STB register lt newline gt lt END gt Parameter Explanation register decimal integer value that is the sum of the binary weighted values for the set bits The following table shows the bits of the Status Byte Register and the binary weighted decimal value of each bit bit binary weight description 0 1 not used always 0 1 2 not used always 0 2 4 not used always 0 3 8 not used always 0 4 16 MAV Message Available summary message 5 32 ESB Event Status Bit 6 64 MSS Master Summary Status dl 128 not used always 0 OUTPUT Agb2200 STB ENTER Agb2200 A Agilent B2200 User s Guide Edition 2
90. To Perform Measurement and Compensation Capacitance Compensation Function Driver functions used for the capacitance compensation are listed below e agb220xa_selectCompenFile function e agb220xa_compenC function Corrected data by the function is not guaranteed But typical data supplemental data is as follows Capacitance measurement accuracy typical 1 0 5 pF This typical data is for the following measurement conditions Measurement frequency 1 kHz to 1 MHz Measurement range Maximum 1000 pF Measurement terminal At the end of the Agilent 16494A B C cable connected to the switch module output terminals The typical data does not apply to anything extended from the 16494A B C cable The conditions described in Required Conditions on page 4 21 must be satisfied 4 20 Agilent B2200 User s Guide Edition 2 Programming Capacitance Compensation Required Conditions The following conditions must be satisfied to use the capacitance compensation function For the instrument connections see Figure 4 6 Setting of the 4284A Option required 4284A 006 e Range of the measurement frequency 1 kHz to 1 MHz e Measurement function Cp G e Connection to Agilent B2200 Use the Agilent 16494F CMU cable or the Agilent 16048D E test leads to connect between the Agilent 4284A and the Agilent B2200 inputs If the 16048D E is used the BNC T adapters 2 ea Agilent part number 1250 2405 for each are req
91. User s Guide Edition 2 Error Messages Error Messages This chapter lists and describes the error messages for Agilent B2200 An error message consists of an error number and message There are two types of error messages e Standard SCPI Error Messages Negative error numbers Command Error Execution Error Device Dependent Error and Query Error are standard SCPI errors e B2200 Specific Error Messages Positive error numbers are the B2200 specific errors Error messages are classified by error number as listed in the following table Error Range Error Category 0 No error 100 to 199 Command Error 200 to 299 Execution Error 300 to 399 Device Dependent Error 400 to 499 Query Error 100 to 32767 B2200 Specific Error When an error occurs the corresponding bit is set in the Standard Event Status Register see Chapter 5 Error Category Standard Event Status Register Bit Command Error bit5 Execution Error bit4 Device Dependent Error bit3 Query Error bit2 B2200 Specific Error bit3 Also the error number and message are placed in the error queue which can be read by the SYSTem ERRor query command The error queue is cleared by the common command CLS and when power is turned on For these commands see Chapter 5 7 2 Agilent B2200 User s Guide Edition 2 Error Messages Standard SCPI Error Messages Standard SCPI Error Messages Standa
92. VI FAR close_status vi Instrument handle returned from agb220xa_init closechan_list Channel numbers to know the close status 5 digits integer ABCDE where A card number BC input port number DE output port number Top zero s can be ignored For example if A 0 BC 01 and DE 01 channel number should be 101 instead of 00101 close_status Status of the channels given in the closechan list 0 opened or 1 closed agb220xa_cmd This function passes the cmd_str string to the instrument Must be a NULL terminated C string ViStatus VI FUNC agb220xa_cmd ViSession vi ViString cmd_str vi Instrument handle returned from agb220xa_init emd_str Instrument command cannot exceed 256 bytes in length 6 12 Agilent B2200 User s Guide Edition 2 Syntax Parameters Syntax Parameters VXI plug amp play Driver Driver Functions agb220xa_cmdData_Q This function passes the cmd_str string to the instrument This entry point will wait for a response which may be any data You specify the cmd_str and size parameters and get result ViStatus VI FUNC agb220xa_cmdData_Q ViSession vi ViString cmd_str Vilnt32 size ViChar_VI_FAR result vi Instrument handle returned from agb220xa_init cmd_str Instrument command cannot exceed 256 bytes in length size Length of result in bytes 2 to 32767 result Response from instrument agb220xa_cmdInt This function passes the cmd_str string to the i
93. When Kelvin cables are connected to Outputs For the Kelvin outputs the input output paths must be controlled as shown below For the input couple port Control the switches to connect the input couple port to the Kelvin output For the single input port Control the switches to connect the input port to two ports of the Kelvin output If you do not comply with this note leakage current between the Kelvin paths will cause measurement error 4 6 Agilent B2200 User s Guide Edition 2 NOTE NOTE Programming Programming Examples Programming Examples This section provides examples of control programs for the Agilent B2200 e Connecting Input Output Paths e Using Bias Mode e Using Ground Mode e Using Couple Mode e Saving Input Output Labels e Defining Comment for Internal Memory Executing the program Example programs use the Microsoft Visual Basic NET and the Agilent T amp M Programmers Toolkit The program examples do not include instrument control routines so to make a measurement you need to add the desired routines Input port 12 AUX Input 12 If you assign the input port 12 to the ground port the input port 12 will be connected to the ground internally when the ground mode is ON In this case leave open the input port 12 Agilent B2200 User s Guide Edition 2 4 7 Figure 4 2 Setup Programming Programming Examples Connecting Input Output Paths The follo
94. WriteLine ROU Agilent TMFramework Agilent TMFramework DataAnalysis Agilent TMFramework DataVisualization Agilent TMFramework InstrumentIO n 200 As New DirectIO GPIBO 22 INSTR annels As String 101 202 303 505 8 WARS IT ROUT FUNC ACON 10 T CONN RULE ALL SROU ROUT CONN SEQ ALL BBM ROUT COUP PORT ALL 3 5 TLS T T AG ROUT COUP STAT ALL ON CLOS amp channels VES Click OK to start measurement vbOKOnly WriteLine Measurement in progress amp Chr 10 the code for measurement WriteLine ROUT COUP STAT A WriteLine ROUT OPEN CARD A Close Click OK to stop the program vbOKOnly WriteLine Measurement completed amp Chr 10 y OFE 119 it 124 le Line Description 8 Defines the channel list in the channels variable string 9 to 12 13 to 14 Resets the Agilent B2200 And sets the Auto configuration mode the Single connection rule and the Break_Before_Make connection sequence Sets the couple ports and turns the couple mode ON 15 Closes switches to connect the input output paths specified by channels 15 to 25 Almost same as the code shown in the lines 13 to 22 of Table 4 3 The command used to turn the couple mode OFF has been inserted to the line 19 Agilent B2200 User s Guide Edition 2 4 15 Programming Programming Exam
95. able _statusf disable_status lt newline gt lt END gt 1 bias disabled 0 bias enabled 5 30 Agilent B2200 User s Guide Edition 2 Example Syntax Example Syntax SCPI Command Reference ROUTe BIAS CHANnel ENABle CARD OUTPUT Agb2200 ROUT BIAS CHAN ENAB CARD ALL OUTPUT Agb2200 ROUT BIAS CHAN DIS 10101 OUTPUT Agb2200 ROUT BIAS CHAN DIS 10101 10102 10201 ENTER Agb2200 A This example bias disables the output port 1 on the card 1 In this example A will be 1 0 1 ROUTe BIAS CHANnel ENABle CARD This command bias enables the all output ports channels for the specified card When the Bias Mode is ON the bias enabled output ports that have not been comnected to any other input port are connected to the input Bias Port This command is available only for the specified card At RST all cards are bias enabled The bias mode is set by ROUTe BIAS STATe ROUTe BIAS CHANnel ENABle CARD card_number Parameter Explanation card_number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL OUTPUT Agb2200 ROUT BIAS CHAN ENAB CARD ALL ROUTe BIAS CHANnel ENA Ble LIST This command specifies the bias enabled output ports channels When the Bias Mode is ON the bias enabled output ports that have not been connected to any other input port are connected to the input Bias Port Then the input Bias Port will not be conn
96. ad of 10 In this example A will be GATE 5 42 Agilent B2200 User s Guide Edition 2 Syntax Query response Example SCPI Command Reference ROUTe SYMBol PORT ROUTe SYMBol PORT In the GPIB local mode the B2200 uses 01 to 14 two digits numbers to specify the input ports 1 to 14 respectively This command specifies a symbol string and lets the B2200 use the specified string instead of the two digits number The query returns the symbol string Reboot and RST clear the symbol strings After that the initial symbol string two digits numbers 01 to 14 will be set SYSTem CPON does not clear the symbol strings ROUTe SYMBol PORT port_number symbol_string ROUTe SYMBol PORT port_number Parameter Explanation port_number Input port number 1 to 14 symbol_string Symbol string set to the specified input port Maximum 6 characters Numeric characters alphabetic characters upper case and lower case space and the following symbols are available I amp gt lt gt UA symbol string lt newline gt lt END gt OUTPUT Agb2200 ROUT SYMB PORT 1 SMU1 OUTPUT Agb2200 ROUT SYMB PORT 1 ENTER Agb2200 AS This example assigns the string SMU1 to the input port 1 After that SMU1 is used instead of 01 In this example AS will be SMU1 Agilent B2200 User s Guide Edition 2 5 43 Syntax Example Syntax Query response
97. ber For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL OUTPUT Agb2200 ROUT OPEN CARD ALL 5 40 Agilent B2200 User s Guide Edition 2 Syntax Query response Example SCPI Command Reference ROUTe OPEN LIST ROUTe OPEN LIST This command disconnects the input ports from output ports as specified in channel list The query returns 0 or 1 for each channel specified by channel_list in same order as specified by channel _list For some modes such as Single Route Mode Couple Mode Ground Mode and Bias Mode more complex disconnections may occur ROUTe OPEN LIST Ochannel list ROUTe OPEN LIST channel_list channel list Channels to open disconnect or to check For channel list see Switch Control on page 4 5 open_status open_status lt newline gt lt END gt 1 opened 0 closed OUTPUT Agb2200 ROUT OPEN CARD ALL OUTPUT Agb2200 ROUT CLOS 10101 10202 OUTPUT Agb2200 ROUT OPEN 10101 10102 10201 10202 ENTER Agb2200 AS In this example AS will be 0 1 1 0 Agilent B2200 User s Guide Edition 2 5 41 Syntax Query response Example SCPI Command Reference ROUTe SYMBol CHANnel ROUTe SYMBol CHANnel In the GPIB local mode the B2200 uses 01 to 48 two digits numbers to specify the output ports channels 1 to 48 respectively This command specifies a symbol string and l
98. both the left and right edges of a blank panel or a module attached to the slot you want to install a new module 3 Remove the blank panel or the module 4 Align the new module with the left and right slot guide rails Then the component side should be facing up 5 Push the module into the slot until you feel it seat firmly into the connector at the back of the slot 6 Screw in the screws on the left and right edges of the module 7 Execute the self test and the relay test See Self Test on page 2 10 To Install the Blank Panel To prevent thermal damage to the module be sure that blank panels are installed in all unused slots If the blank panel is not installed to cover an unused slot install the blank panel as follows 1 Align the blank panel over the unused slot 2 Screw in the screws on the left and right edges of the blank panel Agilent B2200 User s Guide Edition 2 2 9 NOTE Installation Self Test Self Test To confirm the specifications The self test and diagnostics checks the operation of the mainframe and the modules However they cannot confirm if the Agilent B2200 satisfies its specifications For verifying the specifications contact your nearest Agilent Technologies Service Center Trained service personnel will perform calibration performance verification It is recommended to perform calibration once a year at least The following procedure performs the self test and diagnostic
99. cally disconnected from the input bias port Bias disabled output ports are never connected to the input bias port when the bias mode is ON e You can independently set the bias port and control the bias mode for each module when the configuration mode is normal When the bias mode is OFF the input bias port is the same as the other input ports so relays can be controlled directly to connect to output ports Figure 3 1 shows an example Input 2 is the input bias port When the bias mode is turned ON all bias enabled output ports that are not connected to other input ports are connected to the input bias port So the output ports that are connected to input port and 3 are not connected to the input bias port DA Bias port Input 02 Y Example of Bias Mode Input 01 Input 03 Input 14 Output port O O A i A O Open i Connects to bias port Connects to input 01 Close Connects to input 03 3 16 Agilent B2200 User s Guide Edition 2 NOTE Front Panel Operation Switch Control Functions Connection rule cannot be specified for the input bias port which can always be connected to multiple output ports Connection sequence to connect input bias port to output ports is always Break Before Make Bias mode cannot be set to ON when the ground mode is ON If the bias input port and a couple port have been assigned to the same input port
100. ches to connect the input output paths specified by channels 17 to 27 Almost same as the code shown in the lines 13 to 22 of Table 4 3 The command used to turn the ground mode OFF has been inserted to the line 21 Agilent B2200 User s Guide Edition 2 4 13 Figure 4 5 Setup Programming Programming Examples Using Couple Mode The following Couple Mode to _ Instrument example uses the couple mode Example Source e Channel configuration mode Auto e Connection rule Single e Connection sequence Break Before Make e Used module All switch modules installed in the mainframe e Couple port SMU Input 3 4 and 5 6 e Connection paths from SMU1 to Output 1 channel list 00101 from SMU 2 to Output 2 channel list 00202 from SMU3 to Output 3 channel list 00303 from SMU 4 to Output 4 coupled with the channel list 00303 from SMUS to Output 5 channel list 00505 from SMU 4 14 6 to Output 6 coupled with the channel list 00505 Agilent B2200 User s Guide Edition 2 Table 4 6 Programming Programming Examples Couple Mode Example Imports Imports Imports Imports Module Modulel Sub Mai Dim B2 Dim ch B2200 B2200 B2200 B2200 B2200 B2200 B2200 MsgBox Consol insert B2200 B2200 B2200 MsgBox Consol End Sub End Modu WriteLine WriteLine WriteLine ROU WriteLine WriteLine WriteLine
101. ction Sequence 1 Press the Shift key and the Rule key The LCD displays the present setting Break Before Make Make Before Break or No Sequence 2 Press the arrow key to select the connection sequence then press the Enter key Or press the Exit key to cancel this operation To Control Switch Condition If you use the light pen you do not need the following instruction to control the switch condition 1 Ifyou are NOT watching the orange blink LED on the LED matrix press the Open Close key The blink LED will appear 2 Press the arrow keys to move the blink point 3 Press the Open Close key to open close the switch specified by the blink LED The green LEDs indicate the switches that are closed now 4 Repeat 2 and 3 until the switch setup is completed Blinking of LED will be stopped by pressing the front panel key other than the Open Close Fast or arrow keys When Kelvin cables are connected to Outputs For the Kelvin outputs the input output paths must be controlled as shown below For the input couple port Control the switches to connect the input couple port to the Kelvin output For the single input port Control the switches to connect the input port to two ports of the Kelvin output If you do not comply with this note leakage current between the Kelvin paths will cause measurement error Agilent B2200 User s Guide Edition 2 3 5 NOTE Front Panel Operation Operation To Open All Switches 1 Pres
102. d card_number 0 or ALL for Auto Config 1 2 3 4 or ALL for Normal Config ROUT BIAS ROUT BIAS CHAN CHAN DIS LIST channel_list DIS LIST channel_list Bias disables the specified channels channel _list Channels to bias disable Query returns the status of the specified channels 1 disabled or 0 enabled channel _list Channels to check ROUT BIAS ROUT BIAS Bias enables the specified channels ROUT BIAS CHAN CHAN CHAN ENAB CARD card_number ENAB LIST channel_list ENAB LIST channel_list Bias enables the specified card card_number 0 or ALL for Auto Config 1 2 3 4 or ALL for Normal Config channel _list Channels to bias enable Query returns the status of the specified channels 1 enabled or 0 disabled channel _list Channels to check ROUT BIAS ROUT BIAS PORT PORT card_number bias_port 2 card_number Specifies the input Bias Port for the specified card card_number 0 or ALL for Auto Config 1 2 3 4 or ALL for Normal Config bias_port 1 to 14 or 1 Query returns the input Bias Port number for the specified card card_number Card to check 0 for Auto Config 1 2 3 or 4 for Normal Config ROUT BIAS ROUT BIAS TAT mn un 1 card_number state TAT 1 card_number Sets the bias mode for the specified card card_number 0 or
103. d you may setup the same or different couple ports This command overwrites the previous couple port setting for the card The couple mode is controlled by the agb220xa_coupleState function If the bias input port and a couple port have been assigned to the same input port the bias mode and the couple mode cannot be used in parallel If the ground input port and a couple port have been assigned to the same input port the ground mode and the couple mode cannot be used in parallel If a ground enabled input port and a couple port have been assigned to the same input port the ground mode and the couple mode cannot be used in parallel ViStatus VI FUNC agb220xa_couplePort ViSession vi Vilnt16 cport_cardno Vilnt16 port1 ViInt16 port3 ViIntl6 port5 ViInt16 port7 Vilnt16 port9 Vilnt16 port11 ViInt16 port13 vi Instrument handle returned from agb220xa_init cport_cardno Card number card 1 2 card 2 3 card 3 4 card 4 or 5 all card in the normal configuration mode or 0 all card in the auto configuration mode For the configuration mode see agb220xa_func portl Couple port by the input ports 1 and 2 0 disable or 1 enable port3 Couple port by the input ports 3 and 4 0 disable or 1 enable port5 Couple port by the input ports 5 and 6 0 disable or 1 enable port7 Couple port by the input ports 7 and 8 0 disable or 1 enable port9 Couple port by the input ports 9 and 10 0 disable or
104. d enables or disables all the output ports specified by the gndchan_ list The parameter gndchan list is an array of integers with each integer representing one channel The last number of the gndchan_list should be 0 numeric zero to identify the end of the list The maximum number of channels that can be specified by the list is 100 ViStatus _ VI FUNC agb220xa_groundChanList ViSession vi Vilnt16 gndchan_disen Vilnt32_ VI FAR gndchan _list vi Instrument handle returned from agb220xa_init gndchan_disen Status of the port ground enabled or ground disabled 0 sets ground enabled port 1 sets ground disabled port gndchan_list Channel numbers 5 digits integer ABCDE where A card number BC input port number DE output port number Top zero s can be ignored For example if A 0 BC 01 and DE 01 channel number should be 101 instead of 00101 6 24 Agilent B2200 User s Guide Edition 2 Syntax Parameters VXI plug amp play Driver Driver Functions agb220xa_groundChanList_Q This function will query the instrument for the status ground enabled or disabled for the channels given in the list The parameter gndchan_ list is an array of integers with each integer representing one channel The last number of the gndchan_list should be 0 numeric zero to identify the end of the list The maximum number of channels that can be specified by the list is 100 The gnd_ status
105. dling procedures to prevent electrostatic discharge damage to component Protective conductor terminal For protection against electrical shock in case of a fault Used with field wiring terminals to indicate the terminal which must be connected to ground before operating equipment Frame or chassis terminal A connection to the frame chassis of the equipment which normally includes all exposed metal structures Indicates earth ground terminal Alternating current Direct current ON Supply OFF Supply STANDBY Supply Means INSTALLATION CATEGORY I Measurement terminals on the rear panel comply with INSTALLATION CATEGORY I The warning sign denotes a hazard It calls attention to a procedure practice condition or the like which if not correctly performed or adhered to could result in injury or death to personal The caution sign denotes a hazard It calls attention to an operating procedure practice condition or the like which if not correctly performed or adhered to could result in damage to or destruction of part or all of the product In This Manual This manual is a user s guide for Agilent B2200A B2201A Switch Mainframe and consists of the following chapters Introduction Describes an overview and specifications of the Agilent B2200 series Installation Describes how to install the Agilent B2200 and how to setup the input output Front Panel Operation Explains the front panel operation and the
106. e 0 numeric zero to identify the end of the list The maximum number of channels that can be specified by the list is 100 The bias_ status parameter is an array of integers containing the return values of the query The bias_status array returned will correspond one to one with biaschan_list parameter ViStatus _ VI FUNC agb220xa_biasChanList_Q ViSession vi Vilnt16 bias_disen Vilnt32_VI_FAR biaschan_list Vilnt32_VI_FAR bias_status vi Instrument handle returned from agb220xa_init bias_ disen Query type 0 checks if the port is the bias enabled 1 checks if the port is the bias disabled biaschan_list Channel numbers to check the status 5 digits integer ABCDE where A card number BC input port number DE output port number Top zero s can be ignored For example if A 0 BC 01 and DE 01 channel number should be 101 instead of 00101 bias_status Status of the channels given in the biaschan list Returned value depends on the setting of bias_disen as shown below when bias disen 0 0 means bias disabled 1 means enabled when bias_disen 1 0 means bias enabled 1 means disabled 6 8 Agilent B2200 User s Guide Edition 2 Syntax Parameters Syntax Parameters VXI plug amp play Driver Driver Functions agb220xa_biasPort This function will select which input port is the bias port on the specified card For each card you can specify the same or different bias port V
107. e COUPle PORT card_number couple _port ROUTe COUPle PORT card_number Parameter Explanation card_number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL ALL is not available for query couple_port One or more input port numbers 1 3 5 7 9 11 or 13 Enclose by single quotation marks Separate multiple input port numbers by comma For example 1 5 port_number port_number lt newline gt lt END gt port_number 1 or 3 or 5 or 7 or 9 or 11 or 13 OUTPUT Agb2200 ROUT COUP PORT ALL 1 3 OUTPUT Agb2200 ROUT COUP PORT 1 ENTER Agb2200 AS In this example A will be 1 3 Agilent B2200 User s Guide Edition 2 5 37 Syntax Example SCPI Command Reference ROUTe COUPle PORT DE Tect ROUTe COUPle PORT DETect This command detects the input ports connected to the Kelvin cable and assigns them as the input couple ports that will be used for the Kelvin connection The input couple port setting is effective for the all cards This command overwrites the previous couple port setting The couple mode is set by ROUTe COUPle STATe The couple port setting will be cleared and updated by ROUTe COUPle PORT The input port numbers of the couple ports can be got by ROUTe COUPle PORT After this command is executed the all relay settings will be the same as after the ROUT OPEN CARD ALL command execution ROUTe
108. e Starts labeling amp Chr 10 B2200 WriteLine SYST DISP STR Updating memory 1 data B2200 WriteLine ROUT SYMB PORT 1 SMU1 rar O B2200 WriteLine ROUT SYMB PORT 2 SMU2 ruw B2200 WriteLine ROUT SYMB PORT 3 SMU3 rr B2200 WriteLine ROUT SYMB PORT 4 UNUSED B2200 WriteLine ROUT SYMB PORT 5 SMU4 F B2200 WriteLine ROUT SYMB PORT 6 SMU4 S B2200 WriteLine ROUT SYMB PORT 7 SMU5 F B2200 WriteLine ROUT SYMB PORT 8 SMU5 S B2200 WriteLine ROUT SYMB PORT 9 OPEN B2200 WriteLine ROUT SYMB PORT 10 BIAS pw B2200 WriteLine ROUT SYMB PORT 11 OPE HJ B2200 WriteLine ROUT SYMB PORT 12 GROUND B2200 WriteLine ROUT SYMB PORT 13 CMU H B2200 WriteLine ROUT SYMB PORT 14 CMU L B2200 WriteLine ROUT SYMB CHAN ALL 1 BULK em B2200 WriteLine ROUT SYMB CHAN ALL 2 SOURCE B2200 WriteLine ROUT SYMB CHAN ALL 3 GATE re B2200 WriteLine ROUT SYMB CHAN ALL 4 DRAIN B2200 WriteLine ROUT SYMB CHAN ALL 5 GROUND 28 B2200 WriteLine SYST MEMO SAVE 1 B2200 WriteLine SYST MEMO COMM 1 Port label info B2200 WriteLine SYST DISP STR Memory 1 data was updated B2200 Close Console WriteLine Labeling completed amp Chr 10 End Sub 34 End Module Line Description 9 31 Displays message on the LCD 10 to 28 Defines labels for the inputs 1 to 14 and the outputs 1 to 5 29 Saves the switch module setup including the labels into the in
109. e eee aee Rpt 6 30 agb220xa_selectCompenFile 0 0 eens 6 30 agb220 xa self teste wes eye Ae OR AN da 6 31 agb220xa testGlear 0 4h Vo aS ag ae Se IN GNA eee 6 31 agb220xa testExec Oia ts 6 32 agb220xa timeOut e siae eia rr 6 32 agb220xa timeOut Q ler 6 33 agb220xa nusedPort ereere A ore eee OET O es kd 6 33 7 Error Messages Standard SCPI Error Messages nuun unnan une 7 3 Command Error sso eee i kee a AERA i 7 3 Execution EMOT n A A a A DA 7 7 Device Dependent Errors 0 cece ete tenes 7 8 Query ETT es eve Pad ene A See haere ide ieee Sead awe ee 7 9 B2200 Specific Error Messages 0 00sec eee c eee eeeeeees 7 10 B2200 Channel Related Errors 0 0 c ccc eee eee 7 11 B2200 Card Mode Port Related Errors o0ooooooooooooomooo 7 12 Agilent B2200 User s Guide Edition 2 Introduction Introduction This chapter describes the basic functions and features of the Agilent B2200A B2201A Agilent B2200 series and consists of the following sections 1 2 Agilent B2200 Series Front Panel Rear Panel Switch Modules Specifications Accessories and Options Agilent B2200 User s Guide Edition 2 NOTE Introduction Agilent B2200 Series Agilent B2200 Series Agilent B2200 series is a switching matrix designed for semiconductor de characteristics measurement applications The Agilent B2200 series has 14 input ports a
110. e which has an interlock connector The Agilent 41422A 41423A HCU HVU of the Agilent 4142B cannot be used with the Agilent B2200 To connect instrument output that uses banana plug to the AUX connector use the dual banana plug to BNC adapter Agilent part number 1251 2277 2 22 Agilent B2200 User s Guide Edition 2 Installation Measurement Cable Length Measurement Cable Length This section describes how to calculate the total guard capacitance when using an SMU source monitor unit When using an SMU the length of measurement cables is limited by the guard capacitance of the cables The guard capacitance means the capacitance between the signal line Force or Sense and the Guard line Table 2 8 lists the guard capacitance for each element of the Agilent B2200 s measurement environment When using the 4155 4156 4142B E5260 E5270 the maximum limit of the guard capacitance is approximately 900 pF So you add the following and total must be less than 900 pF e Guard capacitance of cable from SMU to B2200 inputs e Guard capacitance of mainframe and modules e Guard capacitance of cable from B2200 outputs e Guard capacitance of cable from connector plate to DUT e Other capacitances such as for probe card The following is an example to calculate the guard capacitance of a measurement environment Installed Plug in cards Four B2210As 145 pF 8 pF x 3 Input Cable 16494A 003 75 pF Output Cable 16494A 0
111. ecimal integer value that is the sum of the binary weighted values for the set bits 5 6 Agilent B2200 User s Guide Edition 2 Semantics Example Syntax Query response Example SCPI Command Reference IDN The following table shows the bits of the Standard Event Status Register and the binary weighted decimal value of each bit bit binary weight description 0 1 OPC Operation Complete 1 2 not used always 0 2 4 QYE Query ERROR 3 8 DDE Device Dependent ERROR 4 16 EXE Execution ERROR 5 32 CME Command ERROR 6 64 not used always 0 7 128 PON Power on OUTPUT Agb2200 E ENTER Agb2200 A IDN SR This query command returns the ID of your B2200 IDN AGILENT model 0 revision lt newline gt lt END gt Response Type Explanation model character model number B2200A or B2201A revision character revision number A 01 00 or later DIM A 50 PRINT AS OUTPUT Agb2200 IDN ENTER Agb2200 AS An example result of above program is AGILENT B2200A 0 A 01 00 Agilent B2200 User s Guide Edition 2 5 7 Syntax Query response Example SCPI Command Reference OPC OPC This command starts to monitor pending operations and sets clears the Operation Complete OPC bit in the Standard Event Status Register as follows e Ifthere is no pending operation sets the OPC
112. ected to the output ports that have been connected to any other input port At RST all channels are bias enabled The bias mode is set by ROUTe BIAS STATe The query returns whether the specified channels are bias enabled or not ROUTe BIAS CHANnel ENABle LIST channel_list ROUTe BIAS CHANnel ENABle LIST channel_list Parameter Explanation channel list Channels to bias enable or to check For channel_list see Switch Control on page 4 5 Agilent B2200 User s Guide Edition 2 5 31 Query response Example NOTE Syntax Query response Example SCPI Command Reference ROUTe BIAS PORT Input port is always the input Bias Port So the input ports in channel _list are ignored However you cannot abbreviate the input port enable_status enable_status lt newline gt lt END gt 1 bias enabled 0 bias disabled OUTPUT Agb2200 ROUT BIAS CHAN DIS CARD ALL OUTPUT Agb2200 ROUT BIAS CHAN ENAB 10101 OUTPUT Agb2200 ROUT BIAS CHAN ENAB 10101 10102 10201 ENTER Agb2200 A This example bias enables the output port 1 on the card 1 In this example AS will be 1 0 1 ROUTe BIAS PORT If the input bias port and a couple port have been assigned to the same input port the bias mode and the couple mode cannot be used in parallel This command specifies the input Bias Port for the specified card For each card
113. emote mode Off LED in remote mode On Light Pen Enabled RST OUTPUT Agb2200 RST This command does not change the self test result For the power on settings see SYSTem CPON Agilent B2200 User s Guide Edition 2 5 9 Syntax Query response Semantics Example SCPI Command Reference SRE SRE This command sets the Service Request Enable Register bits 1 enables 0 masks SRE enable_number Parameter Explanation enable_number decimal integer that is the sum of the binary weighted values for the desired bits hexadecimal octal or binary value enable_number lt newline gt lt END gt The Service Request Enable Register consists of 8 bits Bit0 to Bit7 Bit6 is not defined and is always 0 The Service Request Enable Register determines which bits of the Status Byte Register are enabled The status of the enabled bits are ORed together and the result of OR is output to bit6 Master Summary Status bit of Status Byte Register For details see Status Reporting Structure on page 5 53 The following table shows the bits of the Status Byte Register and the binary weighted decimal value of each bit bit binary weight description 0 1 not used 1 2 not used 2 4 not used 3 8 not used 4 16 MAV Message Available summary message 5 32 ESB Event Status Bit 6 64 MSS Master Summary Status 7 128 not used
114. ent B2200 to acclimate it to the installation environment temperature and humidity If it is opened without enough acclimation the Agilent B2200 may damage When you open the box that contains the Agilent B2200 check the following 1 Before unpacking any components inspect all boxes for any signs of damage that might have occurred during shipment such as Dents Scratches Cuts Water marks When you open the boxes that contain the Agilent B2200 check the components against the contents lists that are attached to the boxes If anything is wrong notify your local Agilent Technologies sales office 2 6 Agilent B2200 User s Guide Edition 2 NOTE Installation Installing the B2200 Installing the B2200 This section describes how to install the Agilent B2200 1 OV A AA See Requirements on page 2 3 and determine the installation location Unpack the Agilent B2200 and place it at the installation site Plug the power cable into the Line input receptacle at the rear panel Plug the power cable into the power receptacle Perform the self test See Self Test on page 2 10 If you control the Agilent B2200 by using an external computer Set the GPIB address See To Set the GPIB Address on page 2 8 and To Connect the GPIB Cable on page 2 8 If you have to add or replace the switch module Turn the Agilent B2200 off remove the power cable and install the switch module See T
115. ent TMFramework InstrumentDriverInterop Imports Agilent TMFramework InstrumentDriverInterop Design Imports Agilent TMFramework InstrumentDriverInterop VxipnpWrappers Module Modulel Sub Main 9 Dim Agb2200 As Agb220xa New Agb220xa GPIBO 22 INSTR True True Agb2200 Reset Dim f com as String C temp my env_1 txt 112 Agb2200 SelectCompenFile f com Imports Agilent Imports Agilent m a Dim freq As Double 1000000 measurement frequency 1 MHz 15 Dim data_c As Double 0 0000000001 C measured by 4284A 100 pF Dim data_g As Double 0 0005 G measured by 4284A 0 5 mS Dim res Cc As Double Dim res gy As Double Agb2200 CompenC freq data Cc data gy res C res 9 20 Dim result As String C amp res_c 1000000000000 0 amp pF 22 result result amp Chr 10 amp G amp res g 1000 mS amp Chr 10 Console WriteLine result Agb2200 Close End Sub End Module Line Description 1 to 11 The above example is for the B2200 of the GPIB address 22 on the interface GPIBO GPIBO is the VISA name Confirm your GPIB settings and set them properly 12to 13 The lines specify the compensation data file The file name must specify your compensation data file 15 to 20 Compensates the data measured by the Agilent 4284A In this example the measurement frequency is 1 MHz the capacitance data is 100 pF and the conductance data is
116. er Wrong channel number is specified in the channel list Confirm the channel number the card configuration and the configuration mode of the B2200 2002 Unsupported Module 2003 Unsupported Configuration 2006 Command not supported on this card Command was used that is not supported by the card 2009 Too many channels in channel list Too many channels are specified in the channel list maximum 120 2011 Empty channel list No channel list is specified 2012 Invalid channel range Wrong channel list is defined Confirm the syntax of the channel list the card configuration and the configuration mode of the B2200 Agilent B2200 User s Guide Edition 2 7 11 Error Messages B2200 Specific Error Messages B2200 Card Mode Port Related Errors sane Error Message and Description 3000 Card0 initialization fail The B2200 may be defective Contact your nearest Agilent Technologies service center 3001 Card1 initialization fail The B2200 or card installed in slot 1 of the B2200 may be defective 3002 Card initialization fail The B2200 or card installed in slot 2 of the B2200 may be defective 3003 Card3 initialization fail The B2200 or card installed in slot 3 of the B2200 may be defective 3004 Card4 initialization fail The B2200 or card installed in slot 4 of the B2200 may be defective 3011 Bad couple port number For the Input Port No for the couple port only 1 3 5 7 or 9 are allowed 3
117. error queue and bit3 of the Standard Event Status Register is set Error Bae Number Error Message and Description 300 Device specific error Generic device dependent error for the B2200 that cannot be determined more specifically 311 Memory error An error was detected in the B2200 s memory 350 Queue overflow If error queue is full this code is entered into the error queue instead of the code that caused the error This code indicates that there was no room in the error queue so an error occurred but was not recorded 7 8 Agilent B2200 User s Guide Edition 2 Error Messages Standard SCPI Error Messages Query Errors If the output queue control of the B2200 detects one of following problems a 4XX error OCCUIS An attempt was made to read data from the output queue when no output data is present or pending Data in the output queue has been lost If this type of error occurs the error number and message are placed in the error queue and bit2 of the Standard Event Status Register is set Error Number Error Message and Description 400 Query error Generic query error for the B2200 that cannot be determined more specifically 410 Query INTERRUPTED A condition causing an INTERRUPTED query error occurred for example a query followed by DAB or GET before a response was completely sent 420 Query UNTERMINATED A condition causing an UNTERMINATED query e
118. errstr vi Instrument handle returned from agb220xa_init errstr Response from instrument Bit Value Message 1 ESR_ OPC 2 ESR _RQL 4 ESR _QYE ERROR 8 ESR DEVICE DEPENDENT ERROR 16 ESR EXECUTION ERROR 32 ESR COMMAND ERROR 64 ESR _URQ 128 ESR PON OTHERS ESR MULTI EVENT agb220xa_func This function is used to set the channel configuration to the auto configuration mode or the normal configuration mode ViStatus VI FUNC agb220xa_func ViSession vi Vilnt16 channel config vi Instrument handle returned from agb220xa_init channel_config Configuration mode 0 auto or 1 normal Agilent B2200 User s Guide Edition 2 6 23 Syntax Parameters Syntax Parameters VXI plug amp play Driver Driver Functions agb220xa_groundChanCard This function ground enables or disables all the output ports of the specified card ViStatus VI FUNC agb220xa_groundChanCard ViSession vi Vilnt16 disable enable Vilnt16 gnd_cardno vi Instrument handle returned from agb220xa_init disable_enable Status of the card ground enabled or ground disabled 0 sets ground enabled card 1 sets ground disabled card gnd_cardno Card number 1 card 1 2 card 2 3 card 3 4 card 4 or 5 all card in the normal configuration mode or 0 all card in the auto configuration mode For the configuration mode see agb220xa_func agb220xa_groundChanList This function groun
119. ets the B2200 use the specified string instead of the two digits number The query returns the symbol string Maximum value of the two digits number depends on the B2200 configuration It is 12 for the normal configuration mode or the auto configuration mode with one matrix card 24 for the auto configuration mode with two matrix cards 36 for the auto configuration mode with three matrix cards or 48 for the auto configuration mode with four matrix cards Reboot RST and SYSTem CPON clear the symbol strings After that the initial symbol string two digits numbers 01 to 48 will be set ROUTe SYMBol CHANnel card_number channel_number string ROUTe SYMBol CHANnel card_number channel_number Parameter Explanation card_number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL ALL is not available for query channel_number Output port number 1 to 48 for Auto 1 to 12 for Normal string Symbol string set to the specified output port channel Maximum 6 characters Numeric characters alphabetic characters upper case and lower case space and the following symbols are available I amp gt lt gt L string lt newline gt lt END gt OUTPUT Agb2200 ROUT SYMB CHAN 0 10 GATE OUTPUT Agb2200 ROUT SYMB CHAN 0 10 ENTER Agb2200 AS This example assigns the string GATE to the output port 10 After that GATE is used inste
120. ey Function Tree This menu provides the following functions SELFTEST Executes the controller test or displays test result e RELAY TEST Executes the relay test or displays test result KEY Executes the front panel interface test or displays test result BEEPER Executes the beeper test or displays test result LED Executes the LED matrix test or displays test result PEN Executes the light pen test or displays test result GPIB Executes the GPIB test or displays test result 3 34 Agilent B2200 User s Guide Edition 2 SELF_TEST RELAY_TEST Front Panel Operation Setup Menus Displays the sub menu that provides the following functions EXECUTE Starts the controller test Wait until PASS or FAIL is displayed Then press the Exit key to return to the previous menu RESULT Displays the test result Press the Exit key to return to the previous menu Displays the sub menu that provides the following functions Before starting the relay test disconnect cables from the input connectors And open the outputs end of cable is OK For the Kelvin cable disconnect it from the output connectors EXECUTE Displays the following message Slotl Press the up or down arrow key to select the module to be tested Then press the Enter key to start the relay test or press the Exit key to cancel this operation Number of modules is 2 or more the relay te
121. ey to display G Change the ground enabled input ports multiple ports can be set Repeat a and b for the all ground enabled input ports then press the Enter key Press the right left arrow key to move the cursor on the input port number 01 to 08 that will be set to the ground enabled input port Press the up down key to display Open the ground enabled input ports to prevent the instrument from damage Agilent B2200 User s Guide Edition 2 Front Panel Operation Operation To Use Couple Mode 1 Press the Couple Mode key to set the couple mode ON Pressing the key again sets the mode OFF Perform the input couple port detection a Press the Menu key The setup menu will be displayed on the LCD b Move the cursor to SCAN then press the Enter key The LCD displays NO c Press the arrow key to display YES then press the Enter key d Press the Exit key Change the couple ports multiple ports can be set a When the couple mode is ON press the Port Function key The blink cursor appears on the first line of the LCD b Press the right left arrow key to move the cursor on the input port number 01 to 14 that will be set to the input couple port c Press the up down key to display C d Repeat b and c for the all couple ports then press the Enter key To Display Firmware Revision Press the Menu key The setup menu will be displayed on the LCD Move the cursor to CONFIG then press the Enter key Move
122. f ground mode is ON the input ground port is connected to all ground enabled input ports and output ports ViStatus VI FUNC agb220xa_openCard ViSession vi Vilnt16 open_cardno vi Instrument handle returned from agb220xa_init open_cardno Card number card 1 2 card 2 3 card 3 4 card 4 or 5 all card in the normal configuration mode or 0 all card in the auto configuration mode For the configuration mode see agb220xa_func agb220xa_openList This function will disconnect the input ports from the output ports specified by the channel list The parameter openchan_list is an array of integers with each integer representing one channel The last number of the openchan_list should be 0 numeric zero to identify the end of the list The maximum number of channels that can be specified by the list is 100 ViStatus VI FUNC agb220xa_openList ViSession vi Vilnt32_VI_FAR openchan_list vi Instrument handle returned from agb220xa_init openchan_list Channel numbers to disconnect 5 digits integer ABCDE where A card number BC input port number DE output port number Top zero s can be ignored For example if A 0 BC 01 and DE 01 channel number should be 101 instead of 00101 6 28 Agilent B2200 User s Guide Edition 2 Syntax Parameters Syntax Parameters VXI plug amp play Driver Driver Functions agb220xa_openList_Q This function will query the instrument for the
123. face is used obtain the coefficients for C3x and create your compensation data file In this case probe card will be used for the C3x path When the connector plate is used obtain the coefficients for C2x and C3x and create your compensation data file In this case triaxial cable with connector plate will be used for the C2x path And coaxial cable with positioner will be used for the C3x path For obtaining the compensation coefficients and creating the compensation data file see To Create Compensation Data File on page 4 23 Figure 4 6 ES 4284A with option 006 Extension Cables and Compensation Coefficients Perform open calibration at this plane Short calibration is optional Agilent 16494F or 16048D E High Case 1 Probe card interface 1 Probe card interface to cu jo CMH Agilent 16494A C C1 fixed Case 2 Connector plate Agilent B2200A with B2210A or Agilent B2201A with B2211A B2210A outputs or B2211A outputs 4 22 C2H C3H for CMH path C2L C3L for CML path Agilent B2220A C2H C2L fixed gt Probe card etc C3H C3L need update oO Oo Ie Ie ao O 0 L A 2 e E Agilent 16494A B Cl fixed L2229999 E esla coaxial cables and positioners C3H C3L need update par 16495F G Extended triaxial cables with connector plate C2H C2L need update
124. he interlock connector See Figure 2 3 2 16 Agilent B2200 User s Guide Edition 2 Figure 2 6 Installation Output Connections The 4155 4156 semiconductor parameter analyzer s Intlk connector provides the interlock signal and a LED drive signal If a LED is connected between pin 4 and pin 5 or 6 of the interlock connector the LED lights to indicate high voltage output when more than 40 V is forced from an SMU in the 4155 4156 Dimensions of LED Agilent part number 1450 0641 D6 A Cathode Cc 2 a 3 3 To Connect Interlock Circuit to Instrument Before beginning the measurement connect the interlock circuit to the instrument s interlock connector as follows e For the instruments which has a BNC Type interlock connector 1 Get the following parts e Agilent 16493J Interlock cable 1 ea e Agilent 16435A Interlock cable adapter 1 ea 2 Connect the 16493J interlock cable between the interlock circuit and the 16435A adapter 3 Connect the BNC cable furnished with the adapter between the adapter and the instrument s interlock connector For Agilent 4155 4156 E5260 E5270 Connect the 16493J interlock cable between the interlock circuit and the instrument s interlock connector You can connect it directly without using any adapter Agilent B2200 User s Guide Edition 2 2 17 NOTE Installation Output Connections To Check Interlock Circuit If you use the 4155 4156 you ca
125. iStatus _ VI FUNC agb220xa_biasPort ViSession vi Vilntl6 bport_cardno Vilnt16 bias_port vi Instrument handle returned from agb220xa_init bport_cardno Card number card 1 2 card 2 3 card 3 4 card 4 or 5 all card in the normal configuration mode or 0 all card in the auto configuration mode For the configuration mode see agb220xa_func bias_port Input port number to be set to the bias port 1 to 14 input port 1 to input port 14 If the bias input port and a couple port have been assigned to the same input port the bias mode and the couple mode cannot be used in parallel agb220xa_biasState This function controls the bias mode for the specified card When bias mode is ON the input bias port is connected to all bias enabled output ports that are not connected to any other input ports Bias disabled output ports are never connected to the input bias port when bias mode is ON The bias mode cannot be set to ON when the ground mode is ON ViStatus VI FUNC agb220xa_biasState ViSession vi Vilnt16 bstate_cardno Vilnt16 state vi Instrument handle returned from agb220xa_init bstate_cardno Card number card 1 2 card 2 3 card 3 4 card 4 or 5 all card in the normal configuration mode or 0 all card in the auto configuration mode For the configuration mode see agb220xa_func state Bias mode 0 OFF or 1 ON Agilent B2200 User s Guide Edition 2 6 9 Syntax Parameters Syntax
126. ie 2 3 Operating Environment ooo ooo 2 5 Storage and Shipping Environment 0 0 cece eee eee ee eee 2 5 Inspection ag eire tae Hie ence oa Penns a Bape a E eet eS 2 6 Installing the B2200 ereere tepee e a a a a a ene 2 7 To Set the GPIB Address overe a be ea E ee We Y 2 8 To Connect the GPIB Cable sc Seca kes a o aaa dae 2 8 To Install the Switch Module 2 0 0 0 0 cece tenes 2 9 EASE LAE An ie RDO Re RET E E EEN PORE EAU Ee MADR RNE ROR 2 9 To Install the Blank Panel 2 0 0 cee ccc teens 2 9 Agilent B2200 User s Guide Edition 2 Contents Sel MESt te ot lth A ek fe Sea ete ANS a Bh tg ah ad EU LEA 2 10 Output Connections 0 t nent e ees 2 11 Output Connectors i ecane is EE Ae cals IA 2 11 Connector Plates lt A E A E A E TATAE E 2 12 To Make Connections to DUT Interface 0 00 00 0000 ee 2 13 To Make Interlock CIU cB tis ey BRE SY Be IER Oe 2 15 To Mount Connectors copii he ass oe sete dl vows Seles EGG 2 18 Input Connections id ios 2 20 Measurement Cable Length ooooooooooooroorrrrr ene 2 23 Maldtenince 1 A A DA de A 2 25 Calibration ese A al Slee Us ew ieee ene 2 25 CLEAN OEEO 2 25 Front Panel Operation Operation ios ar a ae de phos 3 3 To Initialize Agilent B2200 0 2 2 eects 3 4 To Enable Light Pen oreas seiner ee Ae EE PAE 3 4 To Change Channel Configuration Mode 0 0 cee eee eee ee 3 4 To Change Connection Rule o oo
127. ize Agilent B2200 To Enable Light Pen e To Change Channel Configuration Mode e To Change Connection Rule e To Change Connection Sequence e To Control Switch Condition To Open All Switches e To Save Load Setup Data To Use Bias Mode To Use Ground Mode e To Use Couple Mode e To Display Firmware Revision e To Display Module Information To Read Error Message To Set Beeper e To Set GPIB Address To Set Remote Display Mode To Return to Local Mode About moving cursor selecting value and changing display Use the right left arrow key to move the cursor to the desired function name Use the up down arrow key to select the value for the setup item The Enter key makes the setup effective and returns the display to the previous menu or display The Exit key returns the display to the previous menu or display without making the setup effective Agilent B2200 User s Guide Edition 2 3 3 NOTE Front Panel Operation Operation To Initialize Agilent B2200 1 Press the Shift key and the Local key Then the LCD will display NO 2 Press the arrow key to displays YES then press the Enter key to initialize the Agilent B2200 or press the Exit key to cancel initialization To Enable Light Pen Turn the Agilent B2200 off and connect the light pen to the Light Pen connector at the right down corner of
128. keys Fast key Exit key and Enter key are available Other keys will work to exit this mode In this mode move cursor right or left to specify the input port and press the up or down arrow key to select the port function B bias port C couple port G ground port or ground enable port The port function can be selected when the corresponding port operation mode bias mode couple mode or ground mode is set to ON The bias mode and the ground mode cannot be set to ON simultaneously Displays the following menu SET VIEW SET displays the following menu The following functions are used to set the bias enabled or bias disabled channel output port ENABLE DISABLE The function displays the following message for example And then press Enter to bias enable or bias disable the channel Channel 01 If there is no enabled or disabled channel the following message will appear Channel No Channel VIEW displays the following message for example and is used to see the bias status of the channel Channel 01 ENABLED 3 26 Agilent B2200 User s Guide Edition 2 Bias Mode Ch Mode Shift Bias Mode Couple Mode Gnd Mode Shift Couple Mode Rule Sequence Shift Rule Load Memory Save Memory Shift Load Memory Open All Front Panel Operation Front Panel Keys Sets the bias mode ON or OFF When the bias mode is set to ON the LCD shows which input port is the bias port and the
129. leted If you ignore this warning you may be exposed to dangerous voltage Output Connectors The Agilent B2200 output connectors are the triaxial BNC connector The input signals appears at the output as shown in Figure 2 1 when input output switching path is made Figure 2 1 shows signals appear on the output connectors with non Kelvin connection If you make Kelvin connection the signal of the even output connectors is Sense not Force Output Connector and Output Signal Signal force Signal force GUARD GND GND a When SMU is connected b When AUX is connected Agilent B2200 User s Guide Edition 2 2 11 Table 2 2 Installation Output Connections Connector Plates Connector plates Table 2 2 are used for the connection between the Agilent B2200 outputs and the DUT interface prober and so on To connect to the connector plate use the cable shown in Table 2 3 Connector Plate Agilent Model No Description 16495F Half size connector plate 16495F 001 has 12 triaxial through connectors female to female an Intlk connector and a GNDU connector triaxial through female to female The back of the Intlk connector is designed for soldering 16495F 002 has 12 triaxial connectors an Intlk connector and a GNDU connector The back of each connector is designed for soldering 16495G Full size connector plate 16495G 001 has 24 triaxial through connectors female to female an Intlk connect
130. mal Config mode Femto Leakage Switch Module Femto Leakage Switch Module Femto Leakage Switch Module Femto Leakage Switch Module B2210A 14x12 Femto Leakage Switch Module For B2201A Inthe Auto Config mode card_description response is one of following e B2211A 14x12 e B2211A 14x24 OW eakage Switch Module OW eakage Switch Module e B2211A 14x36 e B2211A 14x48 Inthe Normal Config mode OW eakage Switch Module OW icakage Switch Module B2211A 14x12 Low Leakage Switch Module OUTPUT Agb2200 SYST CDES 1 ENTER Agb2200 AS Agilent B2200 User s Guide Edition 2 5 45 Syntax Example SCPI Command Reference SYSTem CPON SYSTem CPON This command resets the specified card Status after this command is shown below Channel Configuration Not changed Connection Rule Free Connection Sequence Break Before Make Bias Mode Off Bias Input Port 10 Bias enabled Channels All channels output ports are bias enabled Couple Mode Off Couple Input Port Cleared Ground Mode Off Ground Input Port 12 Ground enabled Channels Cleared Ground enabled Ports Cleared Card Channel Status All relays are opened Self Test Result Not changed Input Port Symbol String Not changed Output Port Symbol String Cleared For the device reset state see RST SYSTem CPON card_number card_number For A
131. ming Examples Provides some examples of the programming e Capacitance Compensation Explains how to use the capacitance compensation routine The routine is a function of the Agilent B2200 VXIplug amp play driver For the details about SCPI commands see Chapter 5 For the details about VXIplug amp play driver see Chapter 6 4 2 Agilent B2200 User s Guide Edition 2 Programming Programming Basics Programming Basics This section explains the commands used for the fundamental switch control of the Agilent B2200 SCPI Command Hierarchy Fundamental Commands e Switch Control SCPI Command Hierarchy The SCPI commands use a hierarchical structure for subsystem commands similar to a file system For example in ROUT CONN RULE command the hierarchy is as follows ROUT root CONN sub level 1 RULE sub level 2 The colon at the beginning of the command means root The colons between two command keywords means moving down to a lower level A semicolon enables two commands to be sent on the same line For example ROUT CONN RULE ALL FREE SEQ ALL BBM is the same as the following two commands ROUT CONN RULE ALL FREE ROUT CONN SEQ ALL BBM So using a semicolon reduces typing and simplifies the program A command terminator such as carriage return resets the path to root Agilent B2200 User s Guide Edition 2 4 3 Programming Programming Basic
132. mode Ground Mode Example a 1 to 2 Instrument 3 14 Substrate Source e Channel configuration mode Auto e Connection rule Single Multiple connection is available for the ground port e Connection sequence Break Before Make e Used module All switch modules installed in the mainframe Ground port AUX Input 12 Ground enabled input port SMU Input 5 to 8 Ground enabled output port All output ports e Connection paths connected when the ground mode is ON from ground port to all ground enabled input output ports e Connection paths connected by the ROUT CLOS command The following output ports will be disconnected from the ground port and the following input output connections will be made from SMU1 to Output 1 channel list 00101 from SMU2 to Output 2 channel list 00202 from SMU3 to Output 3 channel list 00303 from SMU4 to Output 4 channel list 00404 4 12 Agilent B2200 User s Guide Edition 2 Table 4 5 Ground Mode Example Programming Programming Examples Imports Agilent Imports Agilent Imports Agilent Imports Agilent Module Modulel Sub Mai Dim B2200 As New DirectIO GPIBO 22 n TMFramework TMFramework DataAnalysis TMFramework DataVisualization TMFramework InstrumentIO INSTR Dim channels As String 101 202 303 404 xRST B2200 B2200 B2200 B2200 B2200 B2200 B2200 B2200 B2200 Write Write Write Write Write Write Write W
133. mode is ON the input couple ports will be connected to the output couple ports For the available couple ports see Table 3 2 e For the couple port connections the odd even number of the input port will be connected to the odd even number of the output port respectively Then the even number is always the odd number plus 1 e You can independently specify the same or different couple ports and control the couple mode for each module when the configuration mode is normal Input Couple Port Numbers and Output Couple Port Numbers Available input couple port No Input ports Available output couple port No 1 SMU 1 2 land 2 3 and 4 11 and 12 3 SMU 3 4 for normal configuration mode 1 and 2 3 and4 47 and 48 5 SMU 5 6 for auto configuration mode 7 SMU 7 8 9 AUX 9 10 11 AUX 11 12 13 AUX 13 14 CMH CML For example if you specify the SMU input 1 for the couple port and set the couple mode ON the input 1 will be connected to an odd number of the output port and the input 2 will connected to the next number of the output port And if you specify to connect the input 1 to the output 10 the input 1 will be connected to the output 9 and the input 2 will be connected to the output 10 If the bias input port and a couple port have been assigned to the same input port the bias mode and the couple mode cannot be used in parallel If the ground input port and a couple port have been assigned
134. n service and repair of this instrument Failure to comply with these precautions or with specific warnings elsewhere in this manual may impair the protections provided by the equipment In addition it violates safety standards of design manufacture and intended use of the instrument Agilent Technologies Inc assumes no liability for customer s failure to comply with these requirements Agilent B2200 complies with INSTALLATION CATEGORY II for mains input and INSTALLATION CATEGORY I for measurement input terminals and POLLUTION DEGREE 2 defined in IEC 1010 1 Agilent B2200 is INDOOR USE products GROUND THE INSTRUMENT This is Safety Class I instrument To minimize shock hazard the instrument chassis and cabinet must be connected to an electrical ground The power terminal and the power cable must meet International Electrotechnical Commission IEC safety standards DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE Do not operate the instrument in the presence of flammable gases or fumes Operation of any electrical instrument in such an environment constitutes a definite safety hazard KEEP AWAY FROM LIVE CIRCUITS Operation personnel must not remove instrument covers Component replacement and internal adjustments must be made by qualified maintenance personnel Do not replace components with power cable connected Under certain conditions dangerous voltages may exist even with the power cable removed To avoid injuries always disco
135. n with the light pen SMU Input Inputs for the source monitor unit SMU Eight input ports Up to four kelvin inputs are available Triaxial BNC connector AUX Input Multipurpose inputs Six input ports Coaxial BNC connector CMH and CML terminals are the input ports for the capacitance measurement The input port 12 AUX Input 12 is the default ground input port If you assign the port as the ground input port this ground port will be internally connected to the ground when the ground mode is set to ON In this case open this connector Light Pen Connector for the Agilent 16443A Light pen Used to set the matrix connection with the LED matrix display For the SMU Input terminals the maximum measurement voltage current voltage between terminals are 200 V 1 A 300 V respectively And for the AUX Input terminals they are 100 V 0 5 A 100 V Do not apply an input signal over these limits to the input terminals If you do the Agilent B2200 will be damaged If you use a bias source that has current limit capability set the bias source current limit 1 4 Agilent B2200 User s Guide Edition 2 Figure 1 1 Front Panel View CE Agilent Technologies 222014 A T ch Low Leakage Switch Malatrame Introduction Front Panel 7 seedi A e ee peels 20 29 20 31 32 23 34 26 30 Agilent B2200 User s Guide Edi
136. n easily check the interlock circuit as follows 1 2 aT oy oy ee pa Connect the Intlk connector of the 4155 4156 to your interlock circuit Press System front panel key then select CALIB DIAG primary softkey to display the SYSTEM SELF CALIBRATION DIAGNOSTICS page In the CALIB DIAG field select DIAG secondary softkey In the CATEGORY field select I O PERIPH secondary softkey Move pointer to the 403 INT Interlock LED field Select EXECUTE secondary softkey Confirm the following LED turns on within 1 sec from when interlock circuit is shorted LED turns off within 1 sec from when interlock circuit is open To stop the interlock test select STOP secondary softkey To Mount Connectors This section provides the information needed to mount connectors for the Agilent B2200 output cable connections on the shielding panel See this section if you do not use the connector plate 1 2 Get the appropriate parts for your situation Refer to Table 2 5 Make holes and mount the connectors Refer to Table 2 6 For kelvin connections use the Kelvin cables The Kelvin cable requires the kelvin triaxial connector which has two connector holes and three screw holes Make an interlock circuit as shown in To Make Interlock Circuit on page 2 15 Make cable connections to the DUT interface Refer to To Make Connections to DUT Interface on page 2 13 2 18 Agilent B2200 User s Guide Edition 2 Table
137. n sequence specifies the open close sequence of the relays when changing from an existing connection to a new connection You can select one of the three connection sequences shown in Table 3 1 for each module installed in the Agilent B2200 When an existing connection is changed to a new connection the relays are opened closed as follows Connection Sequence Connection A Relay Operation Sequence Break Before Make 1 Disconnect previous route 2 Wait for relays to open 3 Connect new route Make Before Break 1 Connect new route 2 Wait for relays to close 3 Disconnect previous route No Sequence 1 Disconnect previous route 2 Connect new route Agilent B2200 User s Guide Edition 2 Figure 3 1 Front Panel Operation Switch Control Functions Bias Mode Bias mode is useful for connecting the same input to multiple channels output ports simultaneously And the connections will be kept until the other input port connection will be changed When the bias mode is ON the input bias port is connected to all bias enabled output ports that are not connected to any other input ports You cannot directly control which output ports are connected to the input bias port e Ifanother input port is disconnected from a bias enabled output port the output port is automatically connected to the input bias port Ifanother input port is connected to a bias enabled output port the output port is automati
138. n triaxial cable to the Agilent B2200 input use pairs couple ports of the SMU input connectors 1 amp 2 3 amp 4 5 amp 6 or 7 amp 8 The input signal for each Kelvin input is as follows Odd input port number Force Even input port number Sense Ground Unit GNDU can sink over 1 A For the measurement over 1 A connect the GNDU to the connector plate directly by using the Agilent 16493H GNDU cable If you never perform the measurement over 1 A you can connect the GNDU to the Agilent B2200 inputs Then use the Agilent 16493N GNDU cable This cable requires the Kelvin connection Make sure current to the GNDU is less than 1 A if you connect GNDU to the Agilent B2200 inputs The maximum input current of the Agilent B2200 is 1A 2 20 Agilent B2200 User s Guide Edition 2 Installation Input Connections Table 2 7 B2200 Input Connections Instrument B2200 Application Agilent Output Input Cable Required Model No Connector Connector DC 4155 MPSMU SMU1 to 8 16494A triaxial cable Measurement VSU AUXI to 6 BNC cable VMU AUXI to 6 BNC cable Intlk 16493J interlock cable for direct connection to connector plate 4156 HRSMU SMU1 to 8 16493K Kelvin triaxial cable or 16494A triaxial cable VSU AUXI to6 BNC cable VMU AUXI to6 BNC cable Intlk 16493J interlock cable for direct connection to connector plate 41501 HPSMU SMU1 to 8 16493K Kelvin triaxial cable
139. nal memory number for the setup data must be 1 to 8 3033 EEPROM programming failure Cannot change the GPIB address or update internal memory data Contact your nearest Agilent Technologies service center 3034 EEPROM reading failure Cannot read the GPIB address or internal memory data Contact your nearest Agilent Technologies service center 3035 Setting memory data is invalid Cannot read the setup data in the internal memory The data has been broken Delete the data 3036 Cannot load this setting data in this configuration Cannot read the setup data in the internal memory due to the configuration mismatch Delete the data or leave it until restoring the module configuration 7 14 Agilent B2200 User s Guide Edition 2
140. nd four card slots for the switch modules plug in cards and can configure a 12 24 36 or 48 outputs switching matrix The Agilent B2200A B2201A supports the following dedicated switch module e Agilent B2210A fA Leakage Switch Module Dedicated for the Agilent B2200A mainframe e Agilent B2211A 14ch Low Leakage Switch Module Dedicated for the Agilent B2201A mainframe Mixed configuration of the switch modules is not supported Basic functions of the Agilent B2200 series are listed below SMU inputs for source monitor units 8 ports AUX inputs multipurpose inputs 6 ports Outputs 12 24 36 or 48 ports e Connection setup and status monitor on the front panel e Status display on the LED matrix display e Connection setup by the Light pen e Automatic control through GPIB interface e Auto ground function e Self test relay function test e Relay cleaning Agilent B2200 User s Guide Edition 2 1 3 CAUTION Introduction Front Panel Front Panel The Agilent B2200 series provides the front panel keys the LCD and the LED matrix display for the status monitor and connection setup Line switch Used to turn the Agilent B2200 on or off LCD Used to monitor the status and set the connection See Chapter 3 for the details Front panel keys Used to set the Agilent B2200 See Chapter 3 for the details LED matrix display Displays the status of the matrix switches Also used to set the matrix connectio
141. nformation see RELAY TEST on page 3 35 This command changes all settings of card to same state as after executing SYST CPON command DIAGnostic TEST CARD EXECute card_number Parameter Explanation card_number card number 1 2 3 4 or ALL test_result lt newline gt lt END gt 1 failure card exists 0 pass OUTPUT Agb2200 DIAG TEST CARD ALL Agilent B2200 User s Guide Edition 2 5 21 Syntax Query response Example Syntax Example SCPI Command Reference DIAGnostic TEST CARD STATe DIAGnostic TEST CARD STATe This command returns the most recent relay test result for the specified card DIAGnostic T EST CARD STATe card_number Parameter Explanation card_number card number 1 2 3 4 test_result lt newline gt lt END gt 1 fail 0 pass 1 not tested OUTPUT Agb2200 DIAG TEST CARD STAT 1 ENTER Agb2200 A DIAGnostic TEST FRAMe CLEar This command clears test result of the specified B2200 test DIAGnostic TEST FRAMe CLEar CONTroller FPANel LED PEN BEEPer Parameter Explanation CONTroller Controller test FPANel Front panel interface test LED LED matrix test PEN Light pen test BEEPer Beeper test OUTPUT Agb2200 DIAG TEST FRAM CLE CONT 5 22 Agilent B2200 User s Guide Edition 2 Syntax
142. nnect power and discharge circuits before touching them DO NOT SERVICE OR ADJUST ALONE Do not attempt internal service or adjustment unless another person capable of rendering first aid and resuscitation is present e DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Because of the danger of introducing additional hazards do not install substitute parts or perform any unauthorized modification to the instrument Return the instrument to a Agilent Technologies Sales and Service Office for services and repair to ensure that safety features are maintained e DANGEROUS PROCEDURE WARNINGS Warnings such as example below precede potentially dangerous procedures throughout this manual Instructions contained in the warnings must be followed WARNING Dangerous Voltage capable of causing death are present in this instrument Use extreme caution when handling testing and adjusting WARNING CAUTION C26 Q gt 4 Rebs OP E B Safety Symbols The general definitions of safety symbols used on equipment or in manuals are listed below Instruction manual symbol the product will be marked with this symbol when it is necessary for the user to refer to the instruction manual in order to protect against damage to the instrument Indicates dangerous voltage and potential for electrical shock Do not touch terminals that have this symbol when insrument is on Affixed to product containing static sensitive devices use anti static han
143. nstrument This entry point passes the string in cmd_str followed by a space and then the integer in value Note that either an Int16 or 32 can be passed as the Int16 will be promoted ViStatus VI FUNC agb220xa_cmdInt ViSession vi ViString cmd_str Vilnt32 value vi Instrument handle returned from agb220xa_init emd_str Instrument command cannot exceed 256 bytes in length value Parameter for command 2147483647 to 2147483647 Agilent B2200 User s Guide Edition 2 6 13 Syntax Parameters Syntax Parameters VXI plug amp play Driver Driver Functions agb220xa_cmdInt16Arr_Q This function passes the cmd _str string to the instrument This command expects a response that is a definite arbitrary block of 16 bit integers You specify the cmd_str and size parameters and get result and count ViStatus VI FUNC agb220xa_cmdIntl6Arr Q ViSession vi ViString cmd_str Vilnt32 size Vilntl6_VI_FAR result ViPInt32 count vi Instrument handle returned from agb220xa_init cmd_str Instrument command cannot exceed 256 bytes in length size Size of result number of items in the array 1 to 2147483647 result Response from instrument count Count of valid items in result agb220xa_cmdInt16_Q This function passes the cmd_str string to the instrument This command expects a response that can be returned as a 16 bit integer ViStatus VI FUNC agb220xa_cmdInt16_Q ViSession vi ViString cmd_str ViPInt16 resul
144. nt path including positioner or probe card and record the measurement data C1 and G1 See Table 4 12 Perform the compensation by using the capacitance compensation function and record the result data Clr and Glr See Table 4 13 for the example to use the capacitance compensation function This example uses Microsoft Visual Basic NET and Agilent T amp M Programmers Toolkit And the Agilent B2200 controlled by the program is defined as AGB2200 at the 10th line So the function names are changed as shown below agb220xa_selectCompenFile gt Agb2200 SelectCompenFile agb220xa_compenC gt Agb2200 CompenC Also agb220xa_reset and agb220xa_close have been changed Contact the DUT perform the Cp G measurement and record the measurement data C2 and G2 Perform the compensation and record the result data C2r and G2r Perform the following calculation and record it as the capacitance value C C2r Clr Recording Measurement Compensation Data Measurement Compensation Data step C E G 2 measured Cl Gl 3 compensated Clr Glr 4 measured C2 G2 5 compensated C2r G2r 6 calculated Agilent B2200 User s Guide Edition 2 4 27 Programming Capacitance Compensation Table 4 13 Capacitance Compensation Program Example m MFramework MFramework DataAnalysis Imports Agilent TMFramework DataVisualization Imports Agilent TMFramework InstrumentIO Imports Agil
145. o Connect the GPIB Cable To connect the instrument with a computer or peripheral device via GPIB IEEE Std 488 connect an GPIB cable between the GPIB connector on the instrument rear panel and the GPIB connector on the peripheral device Including the controller a total of 15 GPIB interfaces can be connected on the same GPIB bus The following are rules for connecting GPIB interfaces If total number of interfaces lt 10 Max total cable length number of interfaces x 2 m Iftotal number of interfaces gt 10 Max total cable length 20 m e Maximum cable length between interfaces is 4 m e Star connection and cascade connection are allowed Loop connection is not allowed 2 8 Agilent B2200 User s Guide Edition 2 WARNING CAUTION CAUTION A Installation Installing the B2200 To Install the Switch Module To prevent electrical shock turn off the mainframe and remove the power cable before starting the instruction Be careful about the module pins used for internal connection to the Agilent B2200 The pins can be damaged easily Use clean handling and anti static procedures when removing configuring and installing the switch modules The modules contain components that can be damaged by static electricity The following procedure explains the module installation and removal 1 Turn off the Agilent B2200 then wait at least 10 seconds before you remove or install a module 2 Loosen the screws on
146. o Install the Switch Module on page 2 9 and To Install the Blank Panel on page 2 9 Plug in module is shipped from the factory after the specifications are confirmed Agilent can guarantee that the modules will function and that the module performance is designed to meet its specifications However if you have any trouble contact your nearest Agilent Technologies service center If you require that the modules be guaranteed to their specifications for ISO compliance etc then you must perform a calibration on the instrument modules and mainframe together For calibration contact your nearest Agilent Technologies service center Agilent B2200 User s Guide Edition 2 2 7 Installation Installing the B2200 To Set the GPIB Address Every device on the GPIB bus must have a unique address If you need to change the GPIB address turn the Agilent B2200 on and perform the following procedure The new GPIB address is recognized only at power on The Agilent B2200 leaves the factory with the GPIB address set to 22 1 Press the Menu key 2 Move the cursor to CONFIG then press the Enter key 3 Move the cursor to ADDRESS then press the Enter key The following message will appear on the LCD XX will be 0 to 30 GPIB Address XX 4 Press the arrow key up or down to specify the desired GPIB address then press the Enter key 5 Press the Enter key twice 6 Turn the Agilent B2200 off and then turn it on again T
147. ocal electrical codes being strictly observed The color coding used in the cable will depend on the cable supplied If a new plug is to be connected it must meet local safety requirements and include the following features e Adequate load carrying capacity e Ground connection e Cable clamp Agilent B2200 User s Guide Edition 2 2 3 Table 2 1 Installation Requirements Power Cable e Plug BS 1363 A 250 V 10 A e Cable 8120 1351 Plug NEMA 5 15P 125V 10A e Cable 8120 1378 Plug AS 3112 250 V 10A Cable 8120 1369 Plug NEMA 6 15P 250 V 6 A Cable 8120 0698 Plug CEE 7 Standard Sheet VII 250 V 10 A Cable 8120 1689 Plug SEV Type 12 250 V 10 A Cable 8120 2104 e Plug SR 107 2 D 250 V 10 A e Cable 8120 2956 Plug IEC 83 B1 250 V 10 A Cable 8120 4211 Plug JIS C 8303 125 V 12 A Cable 8120 4753 Plug Argentine Resolution 63 Annex IV 250 V 10 A e Cable 8120 6870 Plug CEI 23 16 250 V 10A Cable 8120 6978 Plug GB 1002 250 V 10A Cable 8120 8376 2 4 Agilent B2200 User s Guide Edition 2 WARNING CAUTION NOTE Installation Requirements For protection from electrical shock the power cable ground must not be defeated Operating Environment The Agilent B2200 must be operated within the following environmental conditions e Temperature 5 C to 35 C e Humidity 5 to 70
148. only the Remote Lock and Error indicators are available To display all information set the RMT_DSPL function ON Refer to RMT _DSPL on page 3 33 3 24 Agilent B2200 User s Guide Edition 2 Front Panel Operation Front Panel Keys a Front Panel Keys The Agilent B2200 provides LED matrix LCD and 18 front panel keys for front panel operation The front panel keys are used to change the instrument settings the switch conditions and so on Function Reset Bias Ch Gnd Mode Save Memory Selftest Ch Mode Sequence Gnd Ch Menu bles Rule Open Local Sets the Agilent B2200 to the local condition Reset Used to reset the Agilent B2200 Shift Local a Displays the following message Press the arrow key to set YES and then press the Enter key to reset the instrument NO Menu Displays the setup menu See Setup Menu on page 3 30 Selftest Displays the selftest menu See Selftest Menu on page 3 34 Shift Menu Agilent B2200 User s Guide Edition 2 3 25 Port Function Bias Ch Shift Port Function Front Panel Operation Front Panel Keys Function key group The Function key group is used to change the input ports and modes Function Reset Bias Ch Gnd Mode Save Memory Local Port Couple Load Card Function Mode Memory Selection Selftest Ch Mode Sequence Gnd Ch Menu Bias Rule Open Shift Enter Mode All Enters into the port function selection mode In this mode the arrow
149. ontrol Functions Connection Rule Connection rule is used to specify if an input or output port can have multiple connections For each module installed in the mainframe for auto configuration mode installed modules are treated as one module you can specify one of the following connection rules Single Each input port can be connected to only one output port and each output port can be connected to only one input port So existing connection to a port will be disconnected when a new connection is made If normal configuration mode is set to the Agilent B2200 with multiple modules an input output path is effective for each module For example if normal configuration mode is set to the Agilent B2200 with two modules and single rule is set to both modules the following connection is possible 14 O O O 3 i e Close Pon O Open Module 1 Output Module 2 Output Free Each input port can be connected to multiple output ports and each output port can be connected to multiple input ports CAUTION If the Free connection rule has been specified ensure multiple input ports are not connected to the same output port Such configurations can cause damage 3 14 Agilent B2200 User s Guide Edition 2 NOTE Table 3 1 Connection Sequence This is only for modules that are set to the single connection rule Refer to Connection Rule on page 3 14 Front Panel Operation Switch Control Functions Connectio
150. ooooooocoorrror tenes 3 5 To Change Connection Sequence 0 0 ce eee cee cette eens 3 5 To Control Switch Condition 0 2 0 2 0c eee cece tee eee 3 5 To Open All Switches cocos re iia 3 6 To Save Load Setup Data 0 00 cece teens 3 6 To Use Blas Modes oia ieee iat Ree Le bon ee 3 7 To Use Ground Mode 0 cece cect ene ene ag 3 8 To Use Couple Mode tie nck eis Se ee einen oi eee he 3 9 To Display Firmware Revision 0 00 cee cece eect eeeee eens 3 9 To Display Module Information 0 00 cece eee 3 9 To Read Error Message 00 ce cee cece teen eee tees 3 10 TO Se BEST Re E o 3 10 Agilent B2200 User s Guide Edition 2 Contents To Set GPIB Address 0 eect cette e 3 10 To Set Remote Display Mode 00 0 cece eet e ee eee 3 11 To Return to Local Mode 1 2 ect nen 3 11 Switch Control Functions oooooooooooorrrrr tenes 3 12 Channel Configuration Mode 0 0 cee cece eee eee 3 13 Connection Rule a ey a een am ee es 3 14 Connection Sequence a elcid sie es eee ales 3 15 Bias Modistas tease dated le AR ADA gS Tae ach 3 16 Ground Mode c 03 i 22st A el dd ea 3 18 Couple Mode it te ena ea aes Aeon dat sateen 3 20 Display Functions phere A De es 3 22 LED Matix gier eenia AA digas bag R A T th dearer aecanae keen 3 22 LCD ies bite eae Mie eka ob ent ad eek an eee ead evi 3 23 Front Panel Keys peen yeni es clone ef ote en PRE bp wale eke eee
151. or and a GNDU connector triaxial through female to female The back of the Intlk connector is designed for soldering 16495G 002 has 24 triaxial connectors an Intlk connector and a GNDU connector The back of each connector is designed for soldering 16495E Blank plate This plate is used to cover openings when you made too big openings for mounting the connector plate You will use this plate to cover openings if you mount the half size connector plate in openings made for the full size connector plate Table 2 3 Agilent Model No 16494A Output Cable Description Triaxial cable for non Kelvin connection 16494B Kelvin Triaxial cable for Kelvin connection NOTE Installing Connector Plate To install the connector plate refer to Agilent 16495 Installation Guide 2 12 Agilent B2200 User s Guide Edition 2 Installation Output Connections For Kelvin connection use Kelvin triaxial cable listed in Table 2 3 To make a Kelvin output port 1 3 5 7 9 and 11 couple two E5252A output ports as follows Kelvin Output Port Output Port Number 1 1 Force and 2 Sense 3 3 Force and 4 Sense 5 5 Force and 6 Sense 7 7 Force and 8 Sense 9 9 Force and 10 Sense 11 11 Force and 12 Sense To Make Connections to DUT Interface This section describes for the connections between the DUT interface and the connectors connected to the Agilent B2200
152. ort number 1 to 14 Query returns the symbol string set to the specified input port Relay Control Commands ROUT OP EN CARD card_number Disconnects all input ports from all output ports for the specified card card_number 0 or ALL for Auto Config 1 2 3 4 or ALL for Normal Config ROUT ROUT IS IS T channel_list T channel_list Disconnects the input ports from output ports as specified in channel_list channel list Channels to open Query returns the status of the specified channels 0 closed or 1 opened channel _list Channels to check ROUT CLOS CARD card_number Returns channel _list of all closed channels for the specified card closed channel means an input port connected to an output port card_number Card to check 0 for Auto Config 1 2 3 or 4 for Normal Config ROUT ROUT OS eS aQ OS IS IS T channel_list T Gchannel list Connects the input ports to the output ports as specified in channel_list channel_list Channels to close Query returns the status of the specified channels 1 closed or 0 opened channel_list Channels to check 5 14 Agilent B2200 User s Guide Edition 2 SCPI Command Reference Command Summary Command Description Bias Mode Commands ROUT BIAS CHAN DIS CARD card_number Bias disables the specified car
153. ot number card number when the Card Selection key is pressed This key is not effective when the Card indicator shows A auto configuration mode Enables the sub key function The sub key label has been printed on the front panel above the key The label color is blue Returns the display to the previous menu or display without making the setup effective Makes the setup effective and returns the display to the previous menu or display Used with the arrow key Pressing the Fast key and an arrow key speeds up changing the setting value Moves the cursor on the display displays another selection for a setup message or changes the value of the digit specified by the cursor For the LED matrix moves the blink LED When no blink LED is on the LED matrix enters into the LED matrix based switch control mode The blink LED will appear In this mode the arrow keys and Fast key are available Other keys will work to exit this mode When the blink LED is on the LED matrix changes the condition open or close of the switch specified by the blink LED Agilent B2200 User s Guide Edition 2 3 29 Front Panel Operation Setup Menus Setup Menus This section explains the following setup menus displayed by pressing the Menu key or Selftest key Setup Menu Selftest Menu Setup Menu Press the Menu key The setup menu will be displayed on the LCD as shown in the following example The setup menu is used to
154. pecifies the used switch module B2210A or B2211A The 16th line specifies the DUT interface PCIF or CABLE PCIF indicates that the Agilent B2220A probe card interface is used CABLE indicates that the connector plate is used The lines C2H to C3L should be modified for each measurement environment See Table 4 9 and Table 4 10 Do not modify the other lines Agilent B2200 User s Guide Edition 2 4 23 Programming Capacitance Compensation Table 4 9 Template Compensation Data Files Measurement environment that template targets File name Switch a DUT Coefficients to module Cable interface be modified lt path gt B2210A pcif triax 3m data B2210A 16494A 002 B2220A C3H and C3L lt path gt B2210A pcif triax 4m data 16494A 005 lt path gt B2210A pcif kelvin 3m data 16494C 002 lt path gt B2210A pcif kelvin 4m data 16494C 005 lt path gt B2210A cable triax 1_5m data 16494A 001 16495F G C2H C2L lt path gt B2210A cable triax 3m data 16494A 002 IAS lt path gt B2210A cable triax 4m data 16494A 005 lt path gt B2210A cable kelvin l_5m data 16494B 001 lt path gt B2210A cable kelvin 3m data 16494B 002 lt path gt B2210A cable kelvin 4m data 16494C 005 lt path gt B2211A pcif triax 3m data B2211A 16494A 002 B2220A C3H and C3L lt path gt B2211A pcif triax 4m data 16494A 005 lt path gt B2211A pcif
155. ples Saving Input Output Labels You can define labels to use for the input output ports when you control the switch in the GPIB local mode The labels are cleared by RST So it is recommended to save the labels into the internal memory and define a comment for the memory data You can see the comment when you load save the memory data in the GPIB local mode Setup e Channel configuration mode Auto Label for input 1 SMU1 e Label for input 2 SMU2 Label for input 3 SMU3 Label for input 4 UNUSED e Label for input 5 SMU4 F e Label for input 6 SMU4 S Label for input 7 SMUS F e Label for input 8 SMU5 S Label for input 9 OPEN Label for input 10 BIAS Label for input 11 OPEN Label for input 12 GROUND Label for input 13 CMU H Label for input 14 CMU L Label for output 1 BULK Label for output 2 SOURCE Label for output 3 GATE Label for output 4 DRAIN Label for output 5 GROUND Comment for memory 1 Port label info 4 16 Agilent B2200 User s Guide Edition 2 Table 4 7 Programming Programming Examples Label Definition and Data Save Example Imports Agilent TMFramework Imports Agilent TMFramework InstrumentlO Module Modulel Sub Mai n Dim B2200 As New DirectIO GPIB0O 22 INSTR B2200 WriteLine RST B2200 WriteLine ROUT FUNC ACON Console WriteLin
156. presenting one channel The last number of the closechan_list should be 0 numeric zero to identify the end of the list The maximum number of channels that can be specified by the list is 100 Syntax ViStatus VI FUNC agb220xa_closeList ViSession vi Vilnt32_VI_FAR closechan_list Parameters vi Instrument handle returned from agb220xa_init closechan list Channel numbers to connect 5 digits integer ABCDE where A card number BC input port number DE output port number Top zero s can be ignored For example if A 0 BC 01 and DE 01 channel number should be 101 instead of 00101 Agilent B2200 User s Guide Edition 2 6 11 Syntax Parameters Syntax Parameters VXI plug amp play Driver Driver Functions agb220xa_closeList_Q This function will query the instrument for the channels closed given in the closechan_list The parameter closechan_list is an array of integers with each integer representing one channel The last number of the closechan list should be 0 numeric zero to identify the end of the list The maximum number of channels that can be specified by the list is 100 The close_status parameter is an array of integers containing the return values of the query The close_status array returned will correspond one to one with closechan_list parameter ViStatus VI_FUNC agb220xa_closeList_Q ViSession vi Vilnt32_VI_FAR closechan list Vilnt32_
157. r Message and Description 103 Invalid separator An illegal character was received when a separator was expected for example the semicolon was omitted between multiple commands in a program message 104 Data type error An improper data type was received for example numeric data was expected but string data was received 105 GET not allowed A group execute trigger was received within a program message 108 109 Parameter not allowed Too many parameters for the command were received Missing parameter Fewer parameters were received than required for the command 110 Command header error An error was detected in the header This error message is reported 1f the B2200 cannot determine the more specific header errors 111 through 114 111 112 Header separator error An illegal character for a header separator was received for example no white space between the command header and parameter Program mnemonic too long A keyword in the command header contains more than twelve characters 113 Undefined header An undefined command header was received for example XYZ or ROUT OPEN COOD 7 4 Agilent B2200 User s Guide Edition 2 Error Messages Standard SCPI Error Messages oe Error Message and Description 120 Numeric data error An error was detected in a numeric parameter including the non decimal n
158. r OFF displays Remote Lock and Error only Then press the Enter key to make the setup effective or press the Exit key to cancel changing the setup OFF or ON LED Displays the following message Press the arrow key to set ON enables LED matrix in the GPIB remote mode or OFF disables it Then press the Enter key to make the setup effective or press the Exit key to cancel changing the setup ON or OFF Displays the following message Press the arrow key to set the beeper ON or OFF Then press the Enter key to make the setup effective or press the Exit key to cancel changing the setup ON or OFF Displays the following message Press the arrow key to enable or disable the light pen Then press the Enter key to make the setup effective or press the Exit key to cancel changing the setup DISABLE or ENABLE Agilent B2200 User s Guide Edition 2 3 33 Front Panel Operation Setup Menus Selftest Menu Press the Shift key and the Menu key The selftest menu is displayed The menu is used to execute the selftest and diagnostics Execute Diagnostics SELF TEST RELAY TEST KEY BEEPER gt Execute Diagnostics lt KEY BEEPER LED PEN GPIB Press the arrow key to move the cursor to the desired function name Then press the Enter key The setup message or the sub menu will be displayed To return to the previous menu press the Exit k
159. r key to make the setup effective or press the Exit key to cancel changing the setup REVISION Displays the following message XXX XX where X XX XX shows the firmware revision To return to the previous menu press the Exit key UNIT Displays the following message Slot model X where is 1 2 3 or 4 model is the model number of the module X is the revision of the module To display another message press the arrow key To return to the previous menu press the Exit key Displays the following message NO Press the arrow key to set YES Then press the Enter key to detect and set the input couple ports automatically or press the Exit key to cancel this operation The input couple ports will be the input ports the Kelvin cable is connected 3 32 Agilent B2200 User s Guide Edition 2 ERROR RMT_DSPL BEEP PEN Front Panel Operation Setup Menus Displays the sub menu that provides the following functions DISPLAY Displays the error code and error message or No Error To return to the previous menu press the Exit key e CLEAR Displays the following message Press the arrow key to set YES Then press the Enter key to clear the error buffer or press the Exit key to cancel this operation NO Displays the sub menu that provides the following functions LCD Displays the following message Press the arrow key to set ON displays all status information in the GPIB remote mode o
160. rd SCPI error messages have negative error numbers The following are the standard SCPI error messages for the B2200 Command Error If syntax of SCPI command is not valid a 1XX error occurs The error number and message are placed in the error queue and bit5 of the Standard Event Status Register is set A SCPI command consists of a command header and zero or more parameters The following are example SCPI commands e Subsystem command ROUT OPEN CARD 1 ROUT OPEN CARD is the command header and 1 is the parameter A subsystem command header consists of mnemonics keywords separated by colons Query commands have a question mark at end of last mnemonic e Common command SRE 48 SRE is the command header and 48 is the parameter A common command header consists of an asterisk followed by 3 characters Query commands have a question mark at end of header canes Error Message and Description 100 Command error Generic syntax error that cannot be determined more specifically 101 Invalid character A syntax element contains a character that is invalid for that type of element for example a header containing an ampersand 102 Syntax error An unrecognized command or data type was received for example a string was received when the B2200 does not accept strings Agilent B2200 User s Guide Edition 2 7 3 Error Messages Standard SCPI Error Messages Error Number Erro
161. re locked send the SYST KLC command from an external computer then press the Local key Agilent B2200 User s Guide Edition 2 3 11 Front Panel Operation Switch Control Functions Switch Control Functions This section introduces the switch control functions of the Agilent B2200 e Channel Configuration Mode e Connection Rule e Connection Sequence Bias Mode e Ground Mode Couple Mode 3 12 Agilent B2200 User s Guide Edition 2 Front Panel Operation Switch Control Functions Channel Configuration Mode The Agilent B2200 provides the two channel configuration modes Normal and Auto The configuration mode defines the way to control multiple switch modules installed in the mainframe Normal Auto Each module is considered independently So each module is always a 12 output switching matrix The switch control functions need to be defined for each module Default mode at Power On or RST command To use this mode the same type of module must be installed in the mainframe from slot number 1 continuously slots 1 to 2 or slots 1 to 3 or slots 1 to 4 The installed modules are treated as one switching matrix For example if the modules are installed in slots 1 to 3 the Agilent B2200 works as a 36 output switching matrix The switch control functions are available for the switching matrix Agilent B2200 User s Guide Edition 2 3 13 Front Panel Operation Switch C
162. rite Write Line Line Line Line Line Line Line Line Line RO TERO RO MRO RO TERO TERO USRO U U U U U U U T FUN CON CO AG AGN AGN AGND STAT ALL ON CLOS amp channels ACON ULE A EQ A CJ 1 SROU BBM L 12 2 4 OOo Ga a 3 NUS E AG WN y Sm yo H up H HHRH HHAH H ALL 5 6 7 8 HAN ENAB CARD ALL MsgBox Click OK to start measurement vbOKOnly Consol insert B2200 Writel B2200 Writel B2200 Writ Lin M the Close code for m Line ROU Line ROU asurement in progress easurement T AGND STAT A T OPEN CARD A OFF 5 amp Chr 10 MsgBox Click OK to stop the program vbOKOnly Measurement completed Consol End Sub End Modu Writ le Lin amp Chr 10 8 10 13 117 21 26 Line Description 8 Defines the channel list in the channels variable string 9 to 12 Resets the Agilent B2200 And sets the Auto configuration mode the Single connection rule and the Break Before Make connection sequence 13 to 16 Sets the ground port and the ground enabled input output ports And turns the ground mode ON Open the ground enabled input ports to prevent the instruments from damage 17 Closes swit
163. ror from the queue 2OY STem ERRor SCPI Command Reference SYSTem ERRor err_no message lt newline gt lt END gt err_no is numeric response data and message is string response data If there has been no error error queue is empty the response to this query is as follows 0 No error OUT ENT ER Agb2200 A B SYSTem KLC This command locks unlocks the front panel keys SYSTem KLC state PUT Agb2200 SYST ERR Parameter Explanation State ON or 1 lock OFF or 0 unlock OUTPUT Agb2200 SYST KLC ON Agilent B2200 User s Guide Edition 2 5 49 Syntax Example Syntax Example SCPI Command Reference SYSTem MEMOry COMMent SYSTem MEMOry COMMent This command memorizes the comment for the B2200 setup information specified by memory_number The previous comment will be deleted The query returns the comment for the specified setup SYSTem MEMOr y COMMent memory_number comment SYSTem MEMOr y COMMent memory_number Parameter Explanation memory_number memory number to 8 comment Comment Maximum 16 characters If this command is entered with empty comment the comment will be cleared Numeric characters alphabetic characters upper case and lower case space and the following symbols are available I amp gt lt gt 1 L OUTPUT Agb2200 SYST MEMO COMM 1 1
164. rranty terms in the sep arate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accor dance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcon tract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer soft ware as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclo sure of Software is subject to Agilent Tech nologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data A DECLARATION OF CONFORMITY i Agilent Technologies According to ISO IEC Guide 22 and CEN CENELEC EN 45014 C Manufacturer s Name Agilent Technologies International sarl Manufacturer s Address Rue de la Gare 29 Supplier s Address CH 1110 Morges Switzerland Declares under sole respon
165. rror occurred for example the B2200 was addressed to talk and an incomplete program message was received 430 Query DEADLOCKED A condition causing a DEADLOCKED query error occurred for example both input buffer and output buffer are full and the B2200 cannot continue 440 Query UNTERMINATED after indefinite response A query was received in the same program message after a query requesting an indefinite length response was executed Agilent B2200 User s Guide Edition 2 7 9 Error Messages B2200 Specific Error Messages B2200 Specific Error Messages These are the B2200 specific errors that are not defined by SCPI These errors indicate that an B2200 operation did not properly complete due to card channel port or mode errors For the SCPI defined device dependent codes see Device Dependent Errors on page 7 8 For these errors an error number and message are placed in the error queue and bit3 of the Standard Event Status Register is set The B2200 specific error messages have positive error numbers 7 10 Agilent B2200 User s Guide Edition 2 Error Messages B2200 Specific Error Messages B2200 Channel Related Errors Error Peer Number Error Message and Description 2000 Invalid card number Wrong card number is specified in card number or channel list parameter Make sure card is properly installed in the correct B2200 slot 2001 Invalid channel numb
166. s 1 Turn on the Agilent B2200 The controller test will be performed If the Agilent B2200 fails the test contact your nearest Agilent Technologies Service Center 2 Press the Shift key and the Menu key in this order Self test menu will appear on the LCD SELF_TEST Controller test RELAY_TEST Relay test KEY Front panel interface test BEEPER Beeper test LED LED matrix test PEN Light pen test GPIB GPIB test 3 Move the cursor to the test item to perform then press Enter key 4 To start the test move the cursor to EXECUTE then press Enter key To display the previous test result move the cursor to RESULT then press Enter key For the details of each test see Selftest Menu on page 3 34 2 10 Agilent B2200 User s Guide Edition 2 NOTE WARNING Figure 2 1 Installation Output Connections Output Connections This section describes how to connect the Agilent B2200 outputs to prober connector plate test fixture and so on DUT interface e Output Connectors e Connector Plates To Make Connections to DUT Interface e To Make Interlock Circuit To Mount Connectors Output Connections If you do not use the connector plate for the connection between the output and the DUT interface see To Mount Connectors on page 2 18 Turn off the Agilent B2200 and all instruments connected And do not turn them on until the connection described in this section is comp
167. s Fundamental Commands The following commands are used to set the fundamental switch control functions of the Agilent B2200 The commands should be entered before performing the open close operation For the functions see Switch Control Functions on page 3 12 Table 4 1 Fundamental Commands Functions Commands Sets the channel configuration ROUT FUNC NCON mode ROUT FUNC ACON Sets the connection rule ROUT CONN RULE card_no FREE ROUT CONN RULE card_no SROU Sets the connection sequence ROUT CONN SEQ card_no NSEQ ROUT CONN SEQ card_no BBM ROUT CONN SEQ card_no MBBR 4 4 Agilent B2200 User s Guide Edition 2 Programming Programming Basics Switch Control The following commands are used to control open close of the specified switch Table 4 2 Switch Control Commands Functions Commands Closes the relays specified by channel_list ROUT CLOS channel list Opens the relays specified by channel_list ROUT OPEN channel list Opens the all relays on the card specified ROUT OPEN CARD card_no by card_no The channel_list is the parameter which determines the input output cross points to open close Figure 4 1 shows the basic syntax of the channel_list parameter In the channel_list you can specify one or more channels Each specified channel consists of five digits Card No One digit 0 when
168. s command enables disables the front panel Light Emitting Diodes matrix when the B2200 is in the GPIB remote mode The front panel LED matrix will be automatically set to ON by the mode transition from GPIB remote to GPIB local SYSTem DISPlay LED state Parameter Explanation state ON or 1 enables the LEDs initial setting OFF or 0 disables the LEDs OUTPUT Agb2200 SYST DISP LED 1 SYSTem DISPlay STRing When the B2200 is in the GPIB remote mode you can display a string maximum 39 characters on the front panel LCD This command specifies the string and displays it on the LCD The specified string data is only displayed on the front panel LCD It is not memorized So a display change operation will clear and delete the string data SYSTem DISPlay STRing string Parameter Explanation string String to be displayed on the front panel LCD Maximum 38 characters Numeric characters alphabetic characters upper case and lower case space and the following symbols are available 1 amp gt lt gt A OUTPUT Agb2200 SYST DISP STR E SMU1 B SMU2 C SMU3 This example displays E SMU1 B SMU2 C SMU3 on the front panel LCD 5 48 Agilent B2200 User s Guide Edition 2 Syntax Query response Example Syntax Example SYSTem ERRor This query command reads the error from the head of the error queue and removes that er
169. s of all switches Symbol string of all input ports and output ports SYSTem MEMOr y SAV Parameter Explanation memory_number E memory_number memory number 1 to 8 OUTPUT Agb2200 SYST MEMO SAVE 1 Agilent B2200 User s Guide Edition 2 5 51 SCPI Command Reference SYSTem PEN SYSTem PEN This command enables disables the light pen Syntax SYSTem PEN state Parameter Explanation state ON or 1 enables the light pen OFF or 0 disables the light pen Example OUTPUT Agb2200 SYST PEN ON SYSTem VERSion This query command returns the SCPI version number for which the B2200 complies Syntax SYSTem VERSion Query response YYYY V lt newline gt lt END gt YYYY is the year for example 2004 V is the approved revision number for that year Example OUTPUT Agb2200 SYST VERS ENTER Agb2200 A 5 52 Agilent B2200 User s Guide Edition 2 SCPI Command Reference Status Reporting Structure Status Reporting Structure This section describes the status reporting structure used in the B2200 These are IEEE 488 2 status structures that can be set and read by the SCPI Common Commands as described in Common Commands on page 5 4 Status Reporting Structure The status reporting structure consists of the following Status Byte Register Service Request Enable Register Standard Event Status Register Standard Event Status Enable
170. s the Open All key 2 Press the arrow key to display YES then press the Enter key Status after this operation When the bias mode is ON the bias enabled output ports will be connected to the input bias port When the ground mode is ON the ground enabled input output ports will be connected to the input ground port To Save Load Setup Data The Agilent B2200 provides the internal memory used to save the setup condition Eight setup conditions can be saved into the memory To save the setup 1 Press the Shift key and the Load Memory key 2 Press the arrow key to select the internal memory 01 to 08 3 Press the Enter key to save the setup Or press the Exit key to cancel this operation Wait until the save operation is completed Then the LCD displays the status and setup conditions To load the setup 1 Press the Load Memory key 2 Press the arrow key to select the internal memory 01 to 08 3 Press the Enter key to load the setup Or press the Exit key to cancel this operation Wait until the load operation is completed Then the LCD displays the status and setup conditions 3 6 Agilent B2200 User s Guide Edition 2 Front Panel Operation Operation To Use Bias Mode Bias mode cannot be set to ON when the ground mode is ON 1 Change the bias enabled output ports a b c Press the Shift key and the Port Function key Move the cursor to SET then press the Enter key Move the cursor to DI
171. sables the beeper state ON 1 enable or OFF 0 disable SYST CCON card_number Returns the card configuration information This command is just to keep compatibility with the Agilent E5250A card_number 1 2 3 or 4 ISYST CDES card_number Returns a description of the specified card model number and input output port information card_number Card to check 0 for Auto Config 1 2 3 or 4 for Normal Config SYST CPON card_number Resets the specified card to the power on state card_number 0 or ALL for Auto Config 1 2 3 4 or ALL for Normal Config SYST CTYP card_number Returns ID of the specified card model number and revision card_number Card to check 0 for Auto Config 1 2 3 or 4 for Normal Config So Lo Ls DISP LCD state Enables disables the front panel LCD when the B2200 is in the GPIB remote mode state ON 1 enable or OFF 0 disable SYST DISP LED state Enables disables the front panel LED state ON 1 enable or OFF 0 disable SYST DISP STR string Specifies a string displayed on the LCD in the GPIB remote mode SYST 1 ERR Reads error from head of error queue and removes it from the queue SYST AN LC state Locks unlocks the front panel keys state ON 1 lock or OFF 0 unlock SYST SYST EMO SAVE memory_number EMO LOA D memory_number
172. ses the connection with the B2200 agb220xa_reset agb220xa_ self test Executes the B2200 reset Executes the B2200 self test agb220xa_error_query Queries for the B2200 error code message agb220xa_error_message Queries for the driver error agb220xa_revision_query Queries for the B2200 firmware driver revisions agb220xa_timeOut Sets the timeout agb220xa_timeOut_Q Queries for the timeout setting agb220xa_errorQueryDetect Sets the automatic error checking agb220xa_errorQueryDetect_Q Queries for the automatic error checking setting agb220xa_dcl Sends the Device Clear agb220xa_esr_Q Queries for the ESR status agb220xa_readStatusByte_Q Reads the B2200 status byte agb220xa_opc_Q Checks the B2200 operation completion status Mode Control Couple Mode Bias Mode agb220xa_func Sets the configuration mode agb220xa_connRuleSeq agb220xa_couplePort Sets the connection rule sequence Selects the couple ports of the specified card agb220xa_coupleState Sets the couple mode ON or OFF for the specified card agb220xa_detectCouplePort agb220xa_biasPort Detects and sets the couple ports for all cards Selects the input bias port of the specified card agb220xa_biasChanCard Bias enables all output ports of the specified card agb220xa_biasChanList Bias enables all output ports of the specified channel list
173. sibility that the product as originally delivere d Product Name Femto Leakage Switch Mainframe Femto Leakage Switch Module 14ch Low Leakag e Switch Mainfram e 14ch Low Leakage Switch Module Model Number Agilent B2200A Agilent B2210A Agilent B2201A Agilent B2211A Product Options This declaration covers all options of the above product s complies with the essential requirements of the following applicable European Directives and carries the CE marking according y Low Voltage Directive 73 23 EEC amended by 93 68 EEC EMC Directive 89 336 EEC amended by 93 68 EEC and conforms with the following product standard s EMC Standard Limit IEC 61326 2002 EN 61326 02 CISPR 11 1999 A2 EN 55011 1998 A 1 Group 1 Class A IEC 61000 4 2 2001 EN 61000 4 2 1995 A1 A2 4kV CD 8 kV AD IEC 61000 4 3 2002 EN 61000 4 3 1996 A1 A2 3 V m 80 1000 MHz IEC 61000 4 4 1995 A1 A2 EN 61000 4 4 1995 A1 0 5 kV signal lines 1 kV power lines IEC 61000 4 5 2001 EN 61000 4 5 1995 A1 0 5 kV line line 1 kV line ground IEC 61000 4 6 2001 EN 61000 4 6 1996 A1 3V 0 1580 MHz IEC 61000 4 11 2001 EN 61000 4 11 1994 A1 1 cycle 100 Canada ICES 001 1998 Australia New Zealand AS NZS 2064 1 The product was tested in a typical configuration with Agilent Technologies test systems Safety IEC 61010 1 2001 EN 61010 1 2001 Canada CSA C22 2 No 1010 1 1992 NRTL C Supplementary Information This DoC applies to above listed products placed on the
174. st will be automatically completed However if the only one module is installed the following message will appear Connect IV1 and 2 Press Enter Then connect a cable between the input 1 and 2 and press Enter key After that change the cable connection as shown in the displayed message and repeat this for the other input connections input 3 and 4 5 and 6 7 and 8 9 and 10 11 and 12 13 and 14 Do not forget to open the connectors other than the specified pair RESULT Displays the following message example Press the up or down arrow key to display the test result for each module Press the Exit key to return to the previous menu Slot1 Not performed yet Agilent B2200 User s Guide Edition 2 3 35 KEY BEEPER Front Panel Operation Setup Menus Displays the sub menu that provides the following functions EXECUTE Displays the following message DIAG KEY Press any key Press any front panel key and confirm the LCD display For example if you press the Port Function key the following message must be displayed DIAG KEY Port Function Continue this for all keys After that press the Enter key twice for the normal operation The test result will be PASS If you find any wrong response press the Exit key twice The test result will be FAIL Finally press the Exit key to return to the previous menu RESULT Displays the test result Press the Exit key to return to the
175. stClear Clears the specified test result Passthrough agb220xa_cmd Sends a command Functions agb220xa_cmdInt Sends a command with an integer parameter agb220xa_cmdReal Sends a command with a real parameter agb220xa_cmdData_Q Sends a command to read any data agb220xa_cmdString Q Sends a command to read string response agb220xa_cmdIntl6 Q Sends a command to read 16 bit integer response agb220xa_cmdintl6Arr_Q Sends a command to read 16 bit integer array response agb220xa_cmdInt32_Q Sends a command to read 32 bit integer response agb220xa_cmdInt32Arr_Q agb220xa_cmdReal64 Q Sends a command to read 32 bit integer array response Sends a command to read 64 bit real response agb220xa_cmdReal64Arr_Q Sends a command to read 64 bit real array response 6 6 Agilent B2200 User s Guide Edition 2 Syntax Parameters Syntax Parameters VXI plug amp play Driver Driver Functions agb220xa_biasChanCard This function bias enables or disables all the output ports of the specified card ViStatus _ VI FUNC agb220xa_biasChanCard ViSession vi Vilnt16 disable enable Vilnt16 bias_cardno vi Instrument handle returned from agb220xa_init disable_enable Status of the card bias enabled or bias disabled 0 sets bias enabled card 1 sets bias disabled card bias_cardno Card number 1 card 1 2 card 2 3 card 3 4 card 4 or 5 all card in the normal
176. switch control functions of the Agilent B2200 also provides the reference information of the front panel keys and display Programming Explains the programming examples that control the Agilent B2200 SCPI Command Reference Describes the all commands of the Agilent B2200 SCPI commands VXIplug amp play Driver Describes the all functions of the Agilent B2200 VXIplug amp play driver Error Messages Lists and describes the error messages for the Agilent B2200 Text Conventions The following text conventions are used in this manual Screen Text Represents text that appears on screen of the controller Italic Refers to a related document or is used for emphasis Contents 1 Introduction Agilent B2200 SerieS ooooooooccoororccnnn ete eee e eee n ees 1 3 Front Panel gigerien r e epee eb a 1 4 A A ae ce aa aise ads oy 1 4 Rear Panel vii tie ead A Aito hae 1 6 Switch Modul s cc e tesei ea ees eines es 1 8 A tas yde reo e rola bdo 1 8 Ni en Si in ae rk rae Garin otek 1 10 General Specifications se ciep Ae ccc tenes 1 11 Switch Modules 000 ee ee Ae ee teal Slag 1 12 Supplemental Information for B2200A B2210A 0 00 e eee 1 13 Supplemental Information for B2201A B2211A 00 0000 1 14 Accessories and Options 0 0 cece cece ete n teens 1 15 2 Installation Requirements ii 66248 Seka nd Cae ae eh E E es eee 2 3 Power Requirements o ee i oeeo Oh a EO eb es 2 3 Power Cablen cecinere able
177. t vi Instrument handle returned from agb220xa_init cmd_str Instrument command cannot exceed 256 bytes in length result Response from instrument 6 14 Agilent B2200 User s Guide Edition 2 Syntax Parameters Syntax Parameters VXI plug amp play Driver Driver Functions agb220xa_cmdInt32Arr_Q This function passes the cmd_str string to the instrument This command expects a response that is a definite arbitrary block of 32 bit integers You specify the cmd_str and size parameters and get result and count ViStatus VI FUNC agb220xa_cmdInt32Arr_Q ViSession vi ViString cmd_str Vilnt32 size Vilnt32_VI_FAR result ViPInt32 count vi Instrument handle returned from agb220xa_init cmd_str Instrument command cannot exceed 256 bytes in length size Size of result number of items in the array 1 to 2147483647 result Response from instrument count Count of valid items in result agb220xa_cmdInt32_Q This function passes the cmd_str string to the instrument This command expects a response that can be returned as a 32 bit integer ViStatus VI FUNC agb220xa_cmdInt32_Q ViSession vi ViString cmd_str ViPInt32 result vi Instrument handle returned from agb220xa_init cmd_str Instrument command cannot exceed 256 bytes in length result Response from instrument Agilent B2200 User s Guide Edition 2 6 15 Syntax Parameters Syntax Parameters VXI plug amp play Driver Driver
178. t lt 3 pF channel AUX input Offset voltage lt 50 uV SMU input lt 80 uV AUX input Settling time gt 2 0 seconds Bandwidth at 3dB 30 MHz SMU input Guard capacitance 4 lt 145 pF SMU input Additional C measurement error gt lt 1 0 2 pF SMU input 1 When the voltage applied to all input output channels is 0 V 2 Measured by the Agilent 4156C with the integration time setting 100 PLC When the voltage applied to all other input output paths is 0 V 3 The time until the measurement value settles to within 50 fA of the final value When the applied voltage is 10 V 4 When four modules have been installed in the mainframe And when only one input output path is made 5 For the measurement less than 1000 pF at the frequency 1 kHz to 1 MHz using the Agilent 4284A with 3 m cable After the compensation using the capacitance compensation algorithm a function of VXIplug amp play driver Agilent B2200 User s Guide Edition 2 1 13 Introduction Specifications Supplemental Information for B2201A B2211A Offset current lt 50 fA SMU input IM noise RMS 5 fA SMU input Channel crosstalk capacitance lt 0 5 pF channel SMU input lt 3 pF channel AUX input Offset voltage lt 80 uV SMU input lt 100 uV AUX input Settling time 2 0 seconds Bandwidth at 3dB 30 MHz SMU input Guard capacitance lt 145 pF SMU input Additional C measurement error gt lt 1 0 2 pF
179. t channel Relays on the input ground port cannot be controlled directly when the ground mode is ON 3023 3024 Cannot directly specify unused port channel Relays on the ground enabled input port unused port cannot be controlled directly when the ground mode is ON Cannot use same port for Couple and Auto Ground The couple mode and the ground mode cannot be used in parallel when a couple port and the input ground port have been assigned to the same input port 3025 Cannot use same port for Unused and Auto Ground The input ground port and the ground enabled input port unused port cannot be assigned to the same input port Agilent B2200 User s Guide Edition 2 7 13 Error Messages B2200 Specific Error Messages Error ts Nimber Error Message and Description 3026 Cannot use same port for Unused and Couple The couple mode and the ground mode cannot be used in parallel when a couple port and the ground enabled input port unused port have been assigned to the same input port 3027 Cannot use Unused Port during Auto Ground Mode ON The ground enabled input port unused port must be opened during the ground mode is ON 3030 Bad input port number The input port number must be 1 to 14 3031 Bad output port number The output port number must be 1 to 12 24 36 or 48 Maximum number depends on the switch module configuration 3032 Bad setting memory number The inter
180. t ground port Orange The LED also blinks The switch condition can be changed by the Open Close key The LED lights out The switch has been opened Card 1 2 3 4 LED LED color Explanation Red The switch module has failed the selftest or the diagnostics Green The switch module has operated normally The LED lights out No switch module has been installed in this slot 3 22 Agilent B2200 User s Guide Edition 2 Figure 3 2 Front Panel Operation Display Functions LCD The LCD displays the setup information and the status information as shown in Table 3 5 Display example is shown in Figure 3 2 LCD Display Example o 02 Y 03 o fos f 06 07 Tos 09 J fm rn 1 CC G A VVFREE BBM Remote Lock Error Cardi Bias Couple Gnd Rute Sequence The first line shows the input port status couple port bias port ground port or ground enabled port The second line shows the instrument status and the mode status The example of Figure 3 2 notifies you the following information Input 5 and 6 are a couple port Input 12 is the input ground port Input 4 and 7 are the ground enabled input port Channel configuration mode is auto Couple mode is ON Ground mode is ON Connection rule is free Connection sequence is break before make Agilent B2200 User s Guide Edition 2 3 23 Table 3 5 NOTE Front Panel Operation Display Functions
181. t is connected to the all ground enabled input ports output ports that have not been connected to any other port At RST the Ground Mode is OFF The query returns the mode status The input Ground Port is set by ROUTe AGND PORT The ground enabled input ports are set by ROUTe AGND UNUSED And the ground enabled output ports are set by ROUTe AGND CHANnel ENABle LIST or ROUTe AGND CHANnel ENABle CARD When the Ground Mode is ON you cannot directly control the Ground Port connections However they can be indirectly controlled when the connections ofthe other input port are controlled When the Ground Mode is OFF the input Ground Port is the same as the other input ports so relays can be controlled directly to connect to output ports ROUTe AGND STATe card_number state ROUTe AGND STATe card_number Parameter Explanation card_number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL ALL is not available for query state ON or 1 sets the Ground Mode ON OFF or 0 sets the Ground Mode OFF state lt newline gt lt END gt 0 OFF or 1 ON OUTPUT Agb2200 ROUT AGND STAT 0 ON OUTPUT Agb2200 ROUT AGND STAT 0 ENTER Agb2200 A In this example A will be 1 5 28 Agilent B2200 User s Guide Edition 2 NOTE CAUTION Syntax Query response Example SCPI Command Reference ROUTe AGND UNUSED ROUTe
182. tatus Byte Register 2 00 eect tenet eens 5 55 Service Request Enable Register 00 0 cc eee cece eens 5 57 Standard Event Status Register nunnana cee cece eens 5 58 Standard Event Status Enable Register 2 0 0000 eee e eee eee 5 59 Output QUEUE evinced sh ei dle kde See pee aed ee ee at Cee 5 60 6 VXI plug amp play Driver System Requirements st Bante pee lye ee aa 6 3 Installing VXIplug amp play Driver 0 teens 6 4 Driver Functions cscs et aiden A api 6 5 agb220xa_biasChanCard 000s cece ccc eet e nee 6 7 agb220xa_biasChanList 0 0 0 6 7 agb220xa biasChanList Q 0 cect teens 6 8 agb220xa Bias POr asai so IA cop one eee ee eee eo a 6 9 agb220xa_ biasState s sisse sc4 0 eter ec late ver cee ihe eda Oe es 6 9 agb220x4 CLOSE fates cece A ace Phe RS 6 10 agb220xa_closeCard Q eee tenet n eens 6 10 agb220xa closeLists i240 oie eee te Re Le as 6 11 agb220xa closeList Qos ccna hae aoa exes bee eevee ewe tou 6 12 agb220 Ka cmd occ c 4 deb a ieee che Slee Hoe Ged E i Aedes aides elgg aks 6 12 Agilent B2200 User s Guide Edition 2 Contents agb220xa_cmdData_Q cece teen eens 6 13 agb220xa cid tang ii ai ia 6 13 agb220xa_cmdIntl6Arr Q ee etna 6 14 agb220xa_cmdIntl6 Q 1 1 cece tenet nes 6 14 agb220xa_cmdInt32Arr Q 1 eee eee enes 6 15 agb220xa_cmdInt32 Q 1 1 eran ena ea tent AE aS ERa 6 15 agb220xa_cmdReal ee eea a p e teen eee nT 6 16
183. tatus Register are enabled Enabled bits are ORed together and the result is reported to bit5 of the Status Byte Register The Standard Event Status Enable Register consists of 16 bits but only the lower 8 bits are used which correspond to the bits of the Standard Event Status Register For details see Standard Event Status Enable Register on page 5 59 Agilent B2200 User s Guide Edition 2 5 5 Example Syntax Query response SCPI Command Reference ESR The following table shows the bits of the Standard Event Status Register and binary weighted decimal value of each bit bit binary weight description 0 1 OPC Operation Complete 1 2 not used 2 4 QYE Query ERROR 3 8 DDE Device Dependent ERROR 4 16 EXE Execution ERROR 5 32 CME Command ERROR 6 64 not used 7 128 PON Power on The following four lines enable the same bit CME bit OUTPUT Agb2200 ESE 32 using decimal numeric OUTPUT Agb2200 ESE B100000 using binary numeric OUTPUT Agb2200 ESE 040 using octal numeric OUTPUT Agb2200 ESE H20 using hexadecimal numeric The following is example for query OUTPUT Agb2200 ESE ENTER Agb2200 A ESR This query command returns the present contents of the Standard Event Status Register ESR register lt newline gt lt END gt Parameter Explanation register d
184. tely 3 5 kg SMU input 8 triaxial ports with Guard AUX input 6 coaxial ports two ports for capacitance measurement Output 12 triaxial ports with Guard maximum 48 ports Agilent B2200 User s Guide Edition 2 1 11 Introduction Specifications Switch Modules Table 1 1 lists the specifications when the switch module is installed in the mainframe In the table the conditions are as follows Conditions 23 C 5 C 5 to 60 R H Table 1 1 Agilent B2210A B2211A Switch Module Specifications B2210A B2211A Max current rating A SMU input 1 0 1 0 AUX input 0 5 0 5 Max voltage rating V SMU input channel to common 200 200 SMU input channel to channel 300 300 AUX input channel to common 100 100 AUX input channel to channel 100 100 Closed channel residual resistance Q SMU input 0 6 0 6 AUX input 1 5 1 5 Channel isolation resistance Q SMU input 1014 5x 1013 AUX input 102 102 The Agilent B2200A mainframe supports the Agilent B2210A module The Agilent B2201A mainframe supports the Agilent B2211A module Mixed configuration of the switch modules is not supported 1 12 Agilent B2200 User s Guide Edition 2 Introduction Specifications Supplemental Information for B2200A B2210A Offset current lt 10 fA typical 3 fA SMU input IM noise RMS 2 0 6 fA SMU input Channel crosstalk capacitance lt 1 pF channel SMU inpu
185. ternal memory 1 30 Defines the comment Port label info for the memory 1 Agilent B2200 User s Guide Edition 2 4 17 Setup Programming Programming Examples Defining Comment for Internal Memory You can define comments for the internal memories You can see the comment when you load save the memory data in the GPIB local mode Channel configuration mode Auto Comment for memory 1 1 1 2 2 3 3 5 15 Comment for memory 2 1 1 2 2 3 4 5 17 Comment for memory 3 1 1 2 2 3 5 5 19 Comment for memory 4 1 1 2 2 3 7 5 21 Comment for memory 5 1 1 2 2 3 9 5 23 Comment for memory 6 10 BIAS Comment for memory 7 12 GROUND Comment for memory 8 CMH 10 CML 11 4 18 Agilent B2200 User s Guide Edition 2 Table 4 8 Programming Programming Examples Memory Comment Definition Example Imports Agilent Imports Agilent Imports Agilent Imports Agilent Module Modulel TMFramework TMFramework DataAnalysis TMFramework DataVisualization TMFramework InstrumentIO Sub Main Dim B2200 As New DirectlO GPIBO 22 INSTR B2200 WriteLine RST 18 B2200 WriteLine ROUT FUNC ACON Console WriteLine Starts labeling Chr 10 B2200 WriteLine SYST DISP STR Updating memory comment B2200 WriteLine SYST MEMO COMM 1 1 1 2 2 3 3 5 15 12 B2200 WriteLine SYST MEMO COMM 2 1 1 2 2 3 4 5 17 B2200 WriteLine SYST MEMO COMM 3 1 1 2 2
186. the channel configuration mode is AUTO Or the slot number 1 to 4 that installs the switch module when the mode is NORMAL Channel No First two digits specifies input port 01 to 14 Last two digits specifies output port 01 to 12 01 to 24 01 to 36 or 01 to 48 for the AUTO mode It depends on the number of modules installed in the mainframe from slot number 1 continuously Or 01 to 12 for the NORMAL mode See Figure 1 4 Figure 4 1 Syntax of channel_list Parameter Card No Channel No Card No Channel No 1digit 4 digits 1digit 4 digits Agilent B2200 User s Guide Edition 2 4 5 NOTE NOTE Programming Programming Basics In the channel _list you can specify multiple channels by using comma or colon as follows Comma use between each specified channel as in following examples e 10101 10102 10103 means 10101 10102 and 10103 e 10112 10202 means 10112 and 10202 e 11412 20102 means 11412 and 20102 Colon use to specify a range of channels as in following examples e 10101 10103 means 10101 10102 and 10103 e 10112 10202 means 10112 10201 and 10202 e 11412 20102 means 11412 20101 and 20102 As shown in last two examples you can specify a range across input ports and card slots Channel numbers for Auto configuration mode In the Auto Configuration mode you can omit any zeros at beginning of channel For example channel 00101 can be expressed by 101
187. the following message Press the arrow key to set YES and then press the Enter key to open all relays NO Agilent B2200 User s Guide Edition 2 3 27 Front Panel Operation Front Panel Keys Gnd Ch Displays the following menu Shift Open All eee ae e SET displays the following menu The following functions are used to set the ground enabled or ground disabled channel output port ENABLE DISABLE The function displays the following message for example And then press Enter to ground enable or ground disable the channel Channel 01 If there is no enabled or disabled channel the following message will appear Channel No Channel VIEW displays the following message for example and is used to see the ground status of the channel Channel 01 ENABLED 3 28 Agilent B2200 User s Guide Edition 2 Card Selection Shift Exit Enter Fast arrow keys Open Close Front Panel Operation Front Panel Keys Edit key group The Edit key group is used to select the switch module to be monitored move the cursor in the display make the setup value effective return to the previous menu or display and so on Function Reset Bias Ch Gnd Mode Save Memory Local Port Couple Load Function Mode Memory Selftest Ch Mode Sequence Gnd Ch Menu Bias Rule Open Mode All Card Exit Selection a Selects the switch module to be monitored on the LCD The Card status indicator will change the sl
188. the front panel After that perform the following procedure to enable the light pen 1 Press the Menu key The setup menu will be displayed on the LCD 2 Press the arrow key to move the cursor to PEN then press the Enter key 3 Press the arrow key to display ENABLE then press the Enter key to enable the light pen or press the Exit key to cancel changing the setup Light Pen You can control the Agilent B2200 functions and the switch connections by using the front panel keys And the Agilent B2200 allows you to use the Agilent 16443A Light Pen to control the switch connections Pointing a LED on the LED matrix by using the light pen controls the setting of the switch specified by the LED To Change Channel Configuration Mode 1 Press the Shift key and the Bias Mode key The LCD displays the present setting AUTO or NORMAL 2 Press the arrow key to select the mode then press the Enter key The LCD displays NO 3 Press the arrow key to display YES then press the Enter key Or press the Exit key to cancel this operation Changing the channel configuration mode resets the Agilent B2200 3 4 Agilent B2200 User s Guide Edition 2 NOTE Front Panel Operation Operation To Change Connection Rule 1 Press the Rule key The LCD displays the present setting FREE or SINGLE 2 Press the arrow key to select the connection rule then press the Enter key Or press the Exit key to cancel this operation To Change Conne
189. the input ports connected to the Kelvin cable and assigns them as the input couple ports that will be used for the Kelvin connection The input couple port setting is effective for the all cards This command overwrites the previous couple port setting ViStatus VI FUNC agb220xa_detectCouplePort ViSession vi 6 20 Agilent B2200 User s Guide Edition 2 Parameters Syntax Parameters Syntax Parameters VXI plug amp play Driver Driver Functions vi Instrument handle returned from agb220xa_init agb220xa_error_message This function translates the error return value from an instrument driver function to a readable string ViStatus _ VI FUNC agb220xa_error_message ViSession vi ViStatus error number ViChar VI FAR message vi Instrument handle returned from agb220xa_init error_number Error return value from the driver function message Error message string This is limited to 256 characters agb220xa_error_query This function returns the error numbers and corresponding error messages in the error queue of a instrument See Chapter 9 for a listing of the instrument error numbers and messages Instrument errors may occur when you places the instrument in a bad state such as sending an invalid sequence of coupled commands Instrument errors can be detected by polling Automatic polling can be accomplished by using the agb220xa_errorQueryDetect function ViStatus _VI_ FUNC agb220xa_error_query ViSession vi
190. tion 2 1 5 Introduction Rear Panel Rear Panel The Agilent B2200 series has four card slots for the switch modules the GPIB interface and so on e Card slots For the Agilent B2200A mainframe the Agilent B2210A cards are installed For the Agilent B2201A mainframe the Agilent B2211A cards are installed Mixed configuration of the switch modules is not supported e GPIB interface Use an Agilent 82357A USB GPIB interface or Agilent 10833A B C D GPIB cable to connect to an external computer or equipment Serial number You need this serial number when using the Agilent Technologies telephone assistance program LINE input receptacle AC power cable is connected to this receptacle 1 6 Agilent B2200 User s Guide Edition 2 Figure 1 2 Rear Panel View Sry earn serrate pr A a een GQ xcs mara cox a Agilent B2200 User s Guide Edition 2 Introduction Rear Panel nl 1 7 A Figure 1 3 Introduction Switch Modules Switch Modules The Agilent B2200A and B2201A support the dedicated switch module Agilent B2210A and B2211A respectively By installing the modules the module inputs will be connected internally to the front panel input connectors And 12 output connectors will face the rear panel The type of the output connectors is the triaxial BNC Up to six kelvin outputs are avallable Image of the output terminals and the block diagram of the switch module are shown in
191. tus Register is set Error Mave Number Error Message and Description 200 Execution error Generic execution error that cannot be determined more specifically 220 Parameter error The parameter value is valid but not executable due to some condition of the B2200 This error occurs if more specific errors 221 through 224 cannot be determined 222 Data out of range A valid parameter setting could not be executed because interpreted value was out of range as defined by the B2200 223 Too much data A valid parameter setting block expression or string type could not be executed because parameter contained more data than the B2200 could handle due to insufficient memory or other requirements 224 Illegal parameter value A valid parameter setting where exact value from list of possibles was expected could not be executed due to present B2200 state 260 Expression error An expression related error occurred Agilent B2200 User s Guide Edition 2 7 7 Error Messages Standard SCPI Error Messages Device Dependent Errors 3XX errors indicate that an B2200 operation did not properly complete possibly due to an abnormal hardware or firmware condition These negative codes are SCPI defined For the device dependent positive error codes see B2200 Specific Error Messages on page 7 10 The positive codes are not SCPI defined For these errors an error number and message are placed in the
192. ubsystem commands ignore the B2200 channel configuration mode For DIAG commands that require a card number you specify 1 2 3 4 or ALL Command Description DIAG TEST CARD CLE card_number Clears relay test result pass fail of the specified card card_number 1 2 3 4 or ALL DIAG TEST CARD EXEC card_number Executes relay test then returns result 1 fail card exists 0 pass card_number 1 2 3 4 or ALL DIAG TEST CARD STAT card_number Returns most recent relay test result 1 fail O pass 1 not tested card_number 1 2 3 4 DIAG TEST FRAM CLE item Clears specified test result item CONT controller test FPAN front panel interface test LED PEN or BEEP DIAG TEST FRAM EXEC item Executes specified test then returns test result 1 fail 0 pass item CONT controller test FPAN front panel interface test LED PEN or BEEP DIAG TEST FRAM STAT item Returns most recent test result of the specified test 1 fail 0 pass 1 not tested item CONT controller test FPAN front panel interface test LED PEN or BEEP Agilent B2200 User s Guide Edition 2 SCPI Command Reference Command Summary SYSTEM SYSTem subsystem is a collection of functions that are not related to instrument subsystem performance Command Description SYST BEEP state Enables di
193. uctures registers which can be set or read by the common commands 5 2 Agilent B2200 User s Guide Edition 2 SCPI Command Reference Textual Notation for Subsystem Commands CAPITAL LETTERS italic font G Capital letters are the minimally required letters of the command header Lowercase letters are the long form complete spelling which you can omit if desired For example for SY STem CCONfig you only need to specify SYST CCON Square brackets are used to enclose optional information not required for execution of the command sequence For example for the ROUTe BIAS PORT command you can execute ROUT BIAS PORT or BIAS PORT which are exactly the same Text you supply For example for card_number you enter an allowed card number Also used to represent response data Vertical bar can be read as or and is used to separate alternative parameter options Braces curly brackets are used to enclose one or more parameters that may be included zero or more times Angular brackets indicate that the word or words enclosed represent something other than themselves For example lt newline gt Agilent B2200 User s Guide Edition 2 5 3 SCPI Command Reference Commands Summary Common Commands This section describes common commands and queries which are commands defined by ZEEE 488 2 Commands Summary The following table shows some common commands that are supported for the
194. uired to connect between the Hc and Hp terminals and between the Lc and Lp terminals e Calibration Perform the 4284A open calibration at the end of the measurement paths in front of the B2200 inputs If you also perform the short calibration optional prepare the BNC thru adapter Agilent part number 1250 0080 1 ea e Total cable length of both Hc Hp side and Lc Lp side must be the same e Agilent B2200 input ports AUX Input 13 CMH for 4284A Hc Hp and 14 CML for 4284A Lc Lp e Connection from the Agilent B2200 outputs to the connector plate or the Agilent B2220A probe card interface Use the Agilent 16494A triaxial cable or Agilent 16494B C Kelvin triaxial cable e Ahead of the connector plate Recommended cable Agilent part number 8121 1191 Triaxial cable You can also use another type of triaxial cable coaxial cable or combination of these To approximate the capacitance conductance of the DUT you need to obtain the appropriate compensation coefficients for your measurement environment and create your compensation data file See Figure 4 6 Agilent B2200 User s Guide Edition 2 4 21 Programming Capacitance Compensation In Figure 4 6 C2H C2L C3H C3L are the compensation coefficients defined in the compensation data file where CxH is for the path connected to the Agilent 4284A Hc Hp terminal and CxL is for the path connected to the Agilent 4284A Lc Lp terminal When the Agilent B2220A probe card inter
195. umeric types This error message is reported when the B2200 cannot determine the more specific errors 121 through 128 121 Invalid character in number An invalid character for the parameter was received for example an alphacharacter was received when the parameter type was decimal numeric 123 Exponent too large The magnitude of the exponent for a numeric parameter was larger than 32000 124 Too many digits The mantissa of a decimal numeric parameter contained more than 255 digits excluding leading zeros 128 Numeric data not allowed Numeric data is not allowed in this position for this command 138 Suffix not allowed A suffix was received after a numeric parameter For the B2200 no parameters have suffix 140 Character data error An error was detected in a character parameter This error message is reported if the B2200 cannot determine the more specific errors 141 through 148 141 Invalid character data Either the character parameter contains an invalid character or the particular element received is not valid for the command 144 Character data too long The character parameter contains more than 12 characters Agilent B2200 User s Guide Edition 2 7 5 Error Messages Standard SCPI Error Messages o Error Message and Description 148 Character data not allowed A character parameter is not allowed for this position 150 String data error An error was detected
196. ure 5 3 Service Request Enable Register of B2200 STATUS SUMMARY SRQ to Controller MESSAGES A Be ot Use Not Used RQS is read by A Serial Poll Service Ros LA Status Byte Request pe 3 7 6 ESBMAY 3 2 110 Register Generatio MSS Eo MSS is read by STB Logical OR A os Service Request Enable Register ALITE 7 5141312 110 SRE SRE PGO4003 120x120 Agilent B2200 User s Guide Edition 2 5 57 SCPI Command Reference Standard Event Status Register Standard Event Status Register The Standard Event Status Register has specific events assigned to specific bits See Figure 5 4 and Table 5 2 Figure 5 4 Standard Event Status Register of B2200 o D cos 3 a o O y E E e o DS 5 a S ga T Z n gt i O T O o PD 3 2 E 38u gt gt F o 5 3 25 8 amp Z ODO Oz O PONUROLCMEEXEDDE oYERacoPC Standard Event 7 6 5 4 2 4 O Status Register Le 2 ESR Logical OR Standard Event amp Status Enable Register PONURQCMEEXE DDEIQYER QCIOPC ESE i flelsl4 21110 ESE o Summary Message Event Summary Bit ESB Bit 5 of Status Byte Register pg04004 100x100 5 58 Agilent B2200 User s Guide Edition 2 SCPI Command Reference Standard Event Status Enable Register
197. uto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL OUTPUT Agb2200 SYST CPON ALL 5 46 Agilent B2200 User s Guide Edition 2 Syntax Query response Example Syntax Example SCPI Command Reference SYSTem CTYPe SYSTem CTYPe This query command returns the ID of the specified card SYSTem CTYPe card_number Parameter Explanation card_number For Auto Config mode 0 For Normal Config mode 1 2 3 or 4 AGILENT TECHNOLOGIES model 0 revision lt newline gt lt END gt model B2210A or B2211A revision 1 or later version If designated card is not installed or initialize failed this command returns NONE NONE 0 O OUTPUT Agb2200 SYST CTYPE 1 ENTER Agb2200 AS SYSTem DISPlay LCD This command enables disables the front panel Liquid Crystal Display when the B2200 is in the GPIB remote mode The front panel LCD will be automatically set to ON by the mode transition from GPIB remote to GPIB local SYSTem DISPlay LCD state Parameter Explanation state ON or 1 enables the LCD OFF or 0 disables the LCD initial setting Even though state is OFF some status indicators on the LCD will be effective OUTPUT Agb2200 SYST DISP LCD 1 Agilent B2200 User s Guide Edition 2 5 47 Syntax Example Syntax Example SCPI Command Reference SYSTem DISPlay LED SYSTem DISPlay LED Thi
198. vi ViReal64 frequency ViReal64 raw_c ViReal64 raw_g ViPReal64 compen_c ViPReal64 compen _g vi Instrument handle returned from agb220xa_init frequency Measurement frequency in Hz 1E3 1 kHz to 1E6 1 MHz raw_c Capacitance in F measured by the 4284A raw_g Conductance in S measured by the 4284A compen_c Capacitance compensation result in F Returned value compen_g Conductance compensation result in S Returned value agb220xa_connRuleSeq The function sets connection rule and connection sequence for the specified card ViStatus VI FUNC agb220xa_connRuleSeq ViSession vi Vilnt16 cardno_ruleseq Vilnt16 rule Vilnt16 sequence vi Instrument handle returned from agb220xa_init cardno_ruleseq Card number card 1 2 card 2 3 card 3 4 card 4 or 5 all card in the normal configuration mode or 0 all card in the auto configuration mode For the configuration mode see agb220xa_func rule Connection rule 0 free route or 1 single route sequence Connection sequence 0 1 or 2 See below 0 no sequence 1 break before make 2 make before break 6 18 Agilent B2200 User s Guide Edition 2 Syntax Parameters VXI plug amp play Driver Driver Functions agb220xa_couplePort This function sets the couple ports which are used for making kelvin connections on the specified card The specified input port number will be coupled with the next input port and two output ports For each car
199. wing example connects instrument output to DUT as shown in Figure 4 2 Input Output Connection Example a 1 to 20 Instrument 9g 3 4 Gate Substrate Source e Channel configuration mode Normal e Connection rule Single e Connection sequence Break Before Make Display strings Connecting MOSFET AG002201 e Used module Switch module installed in the slot 1 e Connection paths from SMU1 to Output 1 channel list 10101 from SMU2 to Output 2 channel list 10202 from SMU3 to Output 3 channel list 10303 from SMU4 to Output 4 channel list 10404 4 8 Agilent B2200 User s Guide Edition 2 Table 4 3 Programming Programming Examples Input Output Connection Example Imports Imports Agilent TMFramework 1 Agilent TMFramework Instrumentlo Module Modulel Sub Main Dim B2200 As New DirectlO GPIBO 22 INSTR 6 Dim channels As String 10101 10202 10303 10404 B2200 WriteLine RST 8 B2200 WriteLine ROUT FUNC NCON B2200 WriteLine ROUT CONN RULE ALL SROU B2200 WriteLine ROUT CONN SEQ ALL BBM B2200 WriteLine SYST DISP STR Connecting MOSFET AG0O02201 B2200 WriteLine ROUT CLOS amp channels 13 MsgBox Click OK to start measurement vbOKOnly Console WriteLine Measurement in progress Chr 10 insert the code for measurement B2200 Writeline ROUT OPEN CARD ALL CE
200. yntax Parameters VXI plug amp play Driver Driver Functions agb220xa_reset This function places the instrument in a default state Before issuing this function it may be necessary to send a device clear to ensure that the instrument can execute a reset A device clear can be issued by invoking agb220xa_dcl function ViStatus VI FUNC agb220xa_reset ViSession vi vi Instrument handle returned from agb220xa_init agb220xa_revision_query This function returns the driver revision and the instrument firmware revision ViStatus _ VI FUNC agb220xa_revision query ViSession vi ViChar VI_FAR driver _rev ViChar_VI_FAR instr_rev vi Instrument handle returned from agb220xa_init driver_rev Instrument driver revision This is limited to 256 characters instr_rev Instrument firmware revision This is limited to 256 characters agb220xa_selectCompenFile This function specifies the compensation data file used by the agb220xa_compenC function The file must contain the appropriate compensation coefficients for your measurement environment For obtaining the compensation coefficients for your environment and creating the compensation data file see Capacitance Compensation on page 4 20 ViStatus VI FUNC agb220xa_selectCompenFile ViSession vi ViString file name vi Instrument handle returned from agb220xa_init file_ name Compensation data file name Use absolute path If the value is NULL string the

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