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Sierra 830 Marine Sanitation System User Manual

1. 14 7 460 32 Q 10 0 9 28 sIm 14 7 460 70 The flow rate referenced to 0 C will be approximately 7 lower than when referenced to standard conditions of 21 C Example 2 Finding the Actual Flow Rate If the flow rate and calibrated standard conditions are as given in Example 1 and you wish to find the actual flow rate at 100 F and 30 psig then you would use Equation 1 as follows A 1 Appendix A Series 830 840 860 Instruction Manual 14 7 460 100 Q 10 00 3 47 lm 14 7 30 460 70 A 2 IM 83 84 86 H Series 830 840 860 Instruction Manual Appendix A Calculating For a Single Gas The following tables provide K factors and thermodynamic prop erties of gases commonly used with mass flow meters and control lers The purpose of these tables is two fold 1 Calibrating an actual gas with a reference gas This is par ticularly useful if the actual gas is not a common gas or if it is toxic flammable corrosive etc 2 Interpreting the reading of a flow meter or flow controller which has been calibrated with a gas other than the actual gas In applying the tables the following fundamental relationship is used Q Q K K 1 Where Q The volumetric flow rate of the gas referenced to standard conditions of 0 C and 760 mm Hg sccm or slm K The K factor defined in equation 6 Refers to the actual gas and Refers to the reference gas The K factor is de
2. IM 83 84 86 H Appendix A Conversion Formulas and Gas Tables Conversion of Flow Rate to Other T and P Conditions The flow rate of your transducer is referenced to certain standard conditions of temperature and pressure Unless otherwise specified in your order these standard conditions are 21 C 70 F and 760 mm of mercury 1 atmosphere If you wish to convert to other stan dard conditions or to find the actual conditions in the pipe where your instrument is installed use the following relationship P T Q Q 1 P T The standard conditions under which your instrument was calibrated 2 The new standard conditions or the actual temperature and pressure conditions in the pipe Q The gas mass flow rate referenced to the calibrated standard conditions sccm or slm The gas mass flow rate referenced to the new standard or 2 actual conditions sccm or slm S means standard accm or alm A means actual P Absolute pressure kg cm or psia and T Absolute temperature K or R K C 273 R F 460 Example 1 Changing Standard Conditions If your transducer has a flow rate reading of 10 00 slm and was cali brated at standard conditions of 70 F 21 C and 1 atmosphere 14 7 psia and if you wish to convert this reading to standard conditions of 32 F 0 C and 1 atmosphere then you would use Equation 1 as fol lows
3. tall the transducer j burrs or rims caused by cutting Compression Fittings 1 Position the transducer with the flow direction arrow pointing downstream in the direction of flow Nut Back Ferrule Front Ferrule i ra P Poy 2 Verify the position of the front and back ferrule as shown at right Insert the tubing into the fitting Make sure that the tubing rests firmly on the shoulder of the fitting and that the nut is finger tight Scribe the nut at the six o clock position 3 While holding the fitting body steady with a backup wrench tighten the nut 1 1 4 turns watching the scribe mark make one complete revolution and continue to the nine o clock position For 1 16 inch 1 8 inch and 3 16 inch 2 3 and 4 mm sizes tighten only 3 4 turn from finger tight Do not over tighten 4 Check the system s entire flow path thoroughly for leaks Do not use liquid leak detectors instead monitor pressure decay Over exposing the transducer to leak detector fluid may dam age the unit VCO Fittings 1 Position the transducer with the flow direction arrow pointing downstream in the direction of flow 2 Tighten the nut finger tight and then 1 4 turn tighter with a wrench Do not over tighten 3 Check the system s entire flow path thoroughly for leaks Do not use liquid leak detectors instead monitor pressure decay Over exposing the transducer to leak detector fluid may dam age the unit IM 83 84 8
4. 0 C O ring Valve Seat Methyl Mercaptan CH3SH 52 2459 2 146 KR Methyl Trichlorosilane CH3 SiCls 25 164 6 669 KR Molybdenum Hexafluoride MoFe 21 1373 9 366 KR Monoethylamine C2H5NH2 35 387 2 011 KR Monomethylamine CH3NH2 51 4343 1 386 KR Neon NE 1 46 245 900 Nitric Oxide NO 990 2328 1 339 Nitrogen No 1 000 2485 1 25 Nitrogen Dioxide NO2 14 1933 2 052 Nitrogen Trifluoride NF3 48 1797 3 168 KR Nitrosyl Chloride NOCI 61 1632 2 920 KR Nitrous Oxide N20 71 2088 1 964 Octafluorocyclobutane C4Fe 17 185 8 397 KR Freon C318 Oxygen Difluoride OF2 63 1917 2 406 Oxygen O2 1 000 2193 1 427 Ozone O3 446 3 2 144 Pentaborane BsHo 26 38 2 816 KR Pentane CsHle 21 398 3 219 KR Perchloryl Fluoride CIO3F 39 1514 4 571 KR Perfluoropropane C3Fs 174 197 8 388 KR Phosgene COCl2 44 1394 4 418 KR Phosphine PH3 1 070 2374 1 517 KR Phosphorous Oxychloride POCI 36 1324 6 843 KR Phosphorous Pentafluoride PHs 30 1610 5 620 KR Phosphorous Trichloride PCls 30 1250 6 127 KR Propane C3H8 36 3885 1 967 KR Propylene C3He 41 3541 1 877 KR Silane SiH4 60 3189 1 433 KR Silicon Tetrachloride SiCl4 28 1270 7 580 KR Silicon Tetrafluoride SiF4 35 1691 4 643 KR Sulfur Dioxide So2 69 1488 2 858 KR Sulfur Hexafluoride SFe 26 1592 6 516 KR Sulfuryl Fluoride SO2F2 39 1543 4 562 KR Teos 090 KR KR Tetrafluorahydrazine N2F4 32 182 4 64 KR Trichlorofluormethane CCI3F 33 1357 6 129 KR Freon 11 Trichlorisilane SiHCl3 33 1380 6 043 KR 1 1 2 Tr
5. 0 08 psi 0 006 bar or 6 cm of water differential max 300 400 and 500 slpm 2 psi 0 15 bar or 140 cm of water differential maximum 830 NPT uo 1 5 psi 0 20 bar or 1 5 cm of water differential maximum Differential Pressure Requirements 840 860C low 5 to 50 psi 1 0 to 3 4 bar differential standard 30 psi 2 1 bar differential optimum lower 10 Torr mini mum or higher 100 psi maximum AP available on special order 840 860C med 20 30 and 50 sipm 5 to 50 psi 1 0 to 3 4 bar differential 100 slpm 15 to 50 psi 1 0 to 2 8 bar differential standard 30 psi 2 1 bar differential optimum lower or higher AP available on special order 840 860C high 100 and 200 sipm 10 to 50 psi 1 0 to 3 4 bar differential 300 400 and 500 slpm 10 to 40 psi 0 7 to 2 8 bar differ ential standard 30 psi 2 1 bar differential optimum lower or higher AP available on special order 840 NPT 10 to 50 psi 0 7 to 3 4 bar differential standard 30 psi 2 1 bar differential optimum lower or higher AP available on special order Power Requirements 830 860M ee 15 VDC 80 mA 1 2 watts and 15 VDC 10 mA 0 15 watts 840 860C low 15 VDC 80 mA 1 2 watts and 15 VDC 175 mA 2 6 watts 840 860C med 15 VDC 220 mA 3 0 watts and 15 VDC 175 mA 2 6 watts B 1 Appendix B Specifications B 2 840 860C high VDC 840 NPT watts Series 830 840 860
6. Chlorine CLo 86 114 3 163 KR Chlorine Trifluoride CIF3 40 1650 4 125 KR Chlorodifluoromethane CHCIF2 46 1544 3 858 KR Freon 22 Chloroform CHCl3 39 1309 5 326 KR Chloropentafluoroethane C2CIFs 24 164 6 892 KR Freon 115 Chlorotrifluromethane CCIF3 38 153 4 660 KR Freon 13 Cyanogen C2N2 61 2613 2 322 KR Cyanogen Chloride CICN 61 1739 2 742 Cychlopropane C3H5 46 3177 1 877 KR Deuterium D2 1 00 1722 1 799 Diborane B2H6 44 508 1 235 KR Dibromodifluoromethane CBroF2 19 15 9 362 KR Dibromethane AT 075 7 76 KR Dichlorodifluoromethane CCloF2 35 1432 5 395 KR Freon 12 Dichlorofluoromethane CHClaF 42 140 4 952 KR Freon 21 IM 83 84 86 H A 7 Appendix A Series 830 840 860 Instruction Manual Chemical K factor Cp Density Elastomer Actual Gas Symbol Relative N2 Call N 0 C O ring Valve Seat Dichloromethylsilane CH3 2SiCl2 25 1882 5 758 KR Dichlorosilane SiH2Cl2 40 150 4 506 KR Dichlorotetrafluoroethane C2Cl2F4 22 1604 7 626 KR Freon 114 1 1 Difluoroethylene C2H2F2 A3 224 2 857 KR Freon 1132A Dimethylamine CH3 2NH 37 366 2 011 KR Dimethyl Ether CH3 20 39 3414 2 055 KR 2 2 Dimethylpropane C3H12 22 3914 3 219 KR Ethane C2H6 50 4097 1 342 Ethanol C2HeO 39 3395 2 055 KR EthylAcetylene C4He 32 3513 2 413 KR Ethyl Chloride C2HsCl 39 244 2 879 KR Ethylene C2H4 60 1365 1 251 Ethylene Oxide C2H4O 52 268 1 965 KR Fluorine F2 980 1873 1 695 KR Fluoroform
7. Instead consult the Operator s Manual for use of the Valve Off feature An ANNUAL factory evaluation and calibration is recom mended Email Technical Support Service sierrainstruments com Website Self Service www sierrainstruments com 2 1 Chapter 2 Installation 2 2 Series 830 840 860 Instruction Manual Installation Overview Side Trak and Auto Trak transducers are supplied with either compression VCO VCR or NPT process connections To ensure a successful installation inlet and outlet tubing should be in a clean state prior to plumbing the transducer into the system The ship ping caps covering the inlet outlet fittings should not be removed until immediately prior to installation Before installing the transducer verify the following 1 Make sure the installation site meets the specific operating pa rameters recorded on the transducer s nameplate Each trans ducer is factory configured for a specific gas and flow range pressure differential temperature range and mounting position Do not locate the transducer in areas subject to sudden tem perature changes moisture drafts or near equipment radiating significant amounts of heat Make sure to allow adequate space for cable connectors and wiring Make sure the location meets the minimum number of recom mended pipe diameters upstream and downstream of any NPT or 1 2 inch process connection A minimum of two inches is always recommend
8. complete leak check 1 Apply power Allow thirty minutes of warm up time When power is first applied the output signal from the transducer remains fixed at a much higher than normal level until the sen sor warms up to its normal operating temperature range 2 Turn on the gas supply Perform an initial zero output check only required for first time start ups Set flow to zero Connect a digital multimeter to V out 4 20 mA out and COM termi nals 3 Check the reading If it is not within 10 mV 0 10 mA of zero adjust the zero potentiometer to zero the transducer The zero pot is located behind the upper metal button on the side of the transducer or behind the swing out plastic door IM 83 84 86 H 3 1 Chapter 3 Operation Caution During operation the mass flow controller valve becomes hot 3 2 Series 830 840 860 Instruction Manual Mass Flow Controller Operation Electromagnetic Valve Controllers When the transducer is installed and the system has undergone a complete leak check 1 5 Make sure the set point is zero before applying power If the set point input is not connected to some type of control device set the valve on off switch in the off position No connection may cause the setpoint to float Note The valve opens mo mentarily when power is first applied Apply power Allow thirty minutes of warm up time When power is first applied the output signal from the transducer remains f
9. Connector Note Typically controllers for 10 slpm or below will be equipped with a 15 volt valve circuit while those above 10 slpm with a 30 volt cir cuit Consult Technical Support if necessary IM 83 84 86 H 2 9 Chapter 2 Installation Series 830 840 860 Instruction Manual SET 2 con 3 con 4 TEST B 15 T ry RABE B RABE 40 OFF PIN WIRECOLOR nO Bese BeDM BSOC 1 Shaki Shaki 2 Violet Violet 3 Write Write 4 Red Red 5 8 T EB a Write Write 10 Gmy _ A Brown Brown B Baaok Bor c Bua D man Gran E 6 peg pa H Gmy I Bua d Yalow Yalow Figure 2 8 20 Pin Connector Pin Designations Note Prior to 2001 sierra supplied separate cables for controllers and meters These are now combined into one style for 830 840 devices and one style for 860M C 2 10 IM 83 84 86 H Series 830 840 860 Instruction Manual Chapter 2 Installation Wiring Transducers with 15 Pin D Connectors Input Power Connections Figured 2 9 Input Power 15 Pin D Connector Note Use separate dedicated wires for pins 9 and 10 to the power supply com mon on meters and pins 9 10 and 3 on controllers Output Signal Connections Standard output for all transducers is a 0 5 VDC signal which di rectly corresponds to the 0 to 100 mass flow full scale range Output signals are linear and require a minimum load resistance of 1000 Ohms 4 20 mA output 600 Ohm
10. D Connector Note Use 15 VDC maximum to produce a 4 20 mA setpoint signal 2 12 IM 83 84 86 H Series 830 840 860 Instruction Manual Chapter 2 Installation Valve Purge and Valve Off Connections Controllers Only Depending on the valve voltage connect as shown below 15 Volt Valve Valve Off _ _ __ On llect er bulb X off Purge E On a Off Figure 2 13 Valve Purge and Valve Off 15 Pin D Connector 30 Volt Valve o le On collector output Off Purge On 15V oN Figure 2 14 Valve Purge and Valve Off 15 Pin D Connector Note Typically controllers for 10 slpm or less will be equipped with a 15 volt valve circuit while those above 10 slpm with a 30 volt circuit Con sult Technical Support if necessary IM 83 84 86 H 2 13 Chapter 2 Installation Series 830 840 860 Instruction Manual Figure 2 15 15 Pin D Connector Pin Assignments Note Prior to 2001 Sierra supplied separate cables for controllers and meters These are now combined into one style for 830 840 devices and one style for 860M C 2 14 IM 83 84 86 H Series 830 840 860 Instruction Manual Chapter 2 Installation Motor Operated Valve Circular 10 Pin Connector Pin Ma Description Shere Gate Goor 2 Common power A Baek 000 f TIE VOC power Green OOOO sar neue 009 Pome ANTAN beer Wide Lied ieee 2 Chae ED A CEM TL Bete Lede As eT Erid AL Ee n tee
11. Instruction Manual 100 and 200 sim 15 VDC 80 mA 1 2 watts and 15 760 mA 11 4 watts 300 400 and 500 slm 15 VDC 830 mA 12 5 watts and 15 VDC 760 mA 11 4 watts 15 VDC 230 mA 3 5 watts and 15 VDC 170 mA 2 6 IM 83 84 86 H Series 830 840 860 Instruction Manual Control Range Command Signal Output Signal Model 860 RS 485 Communication Model 860 Auto Balance Circuitry Appendix B Specifications 840 860C ee 2 to 100 of full scale valve shuts when flow drops below 2 840 NPT cae 10 to 100 of full scale 0 5 VDC 20 megaohms minimum input impedance 4 20 mA 250 Ohms maximum input impedance optional RS 485 digi tal signal standard on Model 860C Linear 0 5 VDC 1000 Ohms minimum load resistance Linear 4 20 mA 500 Ohms maximum loop resistance Output signal command signal continuous K factor span change discrete Auto Balance change RS 485 address complete calibration data and accumulated hours since last calibration change PID re sponse valve off and many other functions including cloning of two MFCs for perfectly matched performance Automatic adjustment manual or auto mode of bridge resistors to re tain zero occurs when valve is shut maintains correct zero value if power is interrupted Performance Specifications Accuracy Repeatability Temperature Coefficient Pressure Coefficient Response Time 1 of full scale including linearity over 15 to 2
12. action Check for adequate pressure differential and that set point command voltage is present at the motor operator connector Chapter 3 Operation Series 830 840 860 Instruction Manual Mass Flow Controller Features Over Range and Cold Sensor Lockout Circuit Side Trak Models incorporate an over range circuit which disables the output signal when the sensor is heating to its normal operating range or if an over flow condition exists The operation of this cir cuit can be verified by observing the 5 VDC 20 mA output signal during power up The cold sensor lockout safety circuit automatically closes the valve if a fault condition is detected that could result in uncon trolled flow valve wide open The circuit operates by monitoring the temperature of the sensor elements If the temperature falls be low a preset limit the circuit forces the output signal to a fixed high level which disables the output signal The cold sensor lockout cir cuit is enabled during initial start up This feature is not available if liquid is present in the flow path There are several conditions which could trigger the cold sensor lockout circuit 1 Operation at a temperature below the instrument s rating 2 Power failure while running at or near full scale Upon resump tion of power the valve will remain closed until the minimum operating temperature is again reached 3 Sensor failure If needed the cold sensor lockout circuit and or over
13. also obtain this number via e mail by contacting service sierrainstruments com 2 Once you have obtained an RMA number complete the form If you require service beyond calibration but do not know which service s will be required describe the symptoms as accurately as possible on the RMA form Submit electronically or by fax to 831 373 2414 3 Pack your instrument carefully bubble wrap or molded foam sug gested NOT PEANUTS and include a copy of the RMA form complete with Sierra supplied RMA number with the unit s Ship the unit s to the following address Caution Always fully neutralize any toxic gas trapped in side the istrument before IM 83 84 86 H removing it from the gas line Series 830 840 860 Instruction Manual Chapter 5 Troubleshooting IM 83 84 86 H RETURN ADDRESS Sierra Instruments Inc Attention Factory Service Center 5 Harris Court Building L Monterey CA 93940 USA CUSTOMER SERVICE AND SUPPORT INFORMATION Email Technical Support service sierrainstruments com Email Sales sales sierrainstruments com FACTORY USA recommended TOLL FREE 800 866 0200 PHONE 831 373 0200 FAX 831 373 4402 EMAIL service sierrainstruments com European Sales amp Service Center PHONE 31 72 5071400 FAX 31 72 5071401 EMAIL service sierra instruments nl Asia Sales amp Service Center PHONE 86 203435 4870 FAX 86 203435 4872 5 5 Series 830 840 860 Instruction Manual Appendix A
14. are in good condition shooting procedures 3 Verify that the power supply is of the correct polarity and voltage and properly connected to the transducer 4 For controllers check for adequate pressure differential across the controller Check the valve voltage 5 Double check connector pin outs when replacing another manufacturer s transducer After verifying the factors above follow the troubleshooting proce dures outlined on the next page IM 83 84 86 H 5 1 Chapter 5 Troubleshooting Series 830 840 860 Instruction Manual Flow Meters and Flow Controllers with Electromagnetic Valves Problem No output Unit will not zero Controller does not respond to set point Flow does not match set point Reads full scale with no flow or with valve shut Out of calibration Possible Cause Clogged sensor PCB defective Inlet filter screen clogged Gas leak Application requires high pressure and non horizontal mounting PCB defective Low or no gas pressure Faulty cable or connector Set point is below 2 of full scale No gas pressure Inlet filter screen clogged Out of adjustment Defective sensor Gas leak Dirty or clogged sensor Change in composition of gas Gas leak PCB defective LFE dirty Inlet filter screen clogged Incorrect inlet conditions high flow and NPT models Solution Clean or replace sensor Repair or replace PCB Clean or replace screen Find and correct leaks Re zero tran
15. be calibrated erra s Cal Bench Automated Primary Calibration System is the only by qualified personnel preferred method of calibration and is used at the factory for all calibrations from 10 sccm up to 5600 slpm Sierra Instruments maintains a fully equipped calibration labora tory All measuring and test equipment used in the calibration of Sierra transducers are traceable to NIST standards Sierra is ISO 9001 registered and conforms to the requirements of ANSI NCSL Z540 and ISO IEC Guide 25 If the flow body or electronics have been damaged or you simply want to have the transducer re calibrated contact the factory for return shipping instructions IM 83 84 86 H 4 15 Series 830 840 860 Instruction Manual Chapter 5 Troubleshooting Chapter 5 Troubleshooting This chapter is provided to help locate the cause of a transducer failure It is not intended to be an all inclusive repair manual In A the case of major repairs the unit should be returned to the fac tory for service Contact Sierra Customer Service for return Warning pane Ser Aieten meh powert shipping instructions page 5 4 before disassembling the transducer When you suspect that the transducer is not operating correctly there are a few simple checks that can be made before dismantling the unit A 1 Make certain that there are no leaks in the line Caution Only qualified personnel Me should perform trouble 2 Check that all cables are connected and
16. cover Cut the yellow calibration sticker Remove the silver zero and or span plugs on the right side of the enclo sure or turn the plastic access hole doors to the vertical posi tion Pull the cover up and off Re connect the cable apply gas pressure and apply power to the controller Connect a voltmeter to the two wires on the back PCA that are routed to the solenoid and set the scale for 30 volts or higher 2 Determine if this controller has a 15 volt control circuit or a 30 volt control circuit Don t confuse this with the setpoint or output signals this is an internal voltage that energizes the valve coil to raise the valve seat and open the internal orifice M and H instruments are ALWAYS 30 volt circuits while L instruments can be either one based mainly on their flow rates Units scaled for below 10 slpm are typically set up for 15 volts while those 10 slpm or over are set up for 30 vdc Note this voltage is typically listed on the calibration certificate in the Comment section If there is any question contact the fac tory for clarification 3 Apply a 100 set point and monitor this valve voltage allow ing at least three minutes for stabilization The voltage win dow for a 100 setpoint is 13 18 volts for the 30 volt circuit and 9 11 volts for the 15 volt circuit If the voltage is out of this specification loosen the lock nut and adjust the center ad justment screw Clockwise downward will increase
17. line Caution Only qualified personnel should perform transducer service calibration or troubleshooting procedures Caution Printed circuit boards are sensitive to electrostatic discharge To avoid damag ing the board follow these precautions to minimize the risk of damage e before handling the assembly discharge your body by touching a grounded metal object e handle all cards by their edges unless otherwise required e when possible use grounded electrostatic discharge wrist straps when handling sensitive components IM 83 84 86 H 0 7 Series 830 840 860 Instruction Manual Chapter 1 Introduction IM 83 84 86 H Chapter 1 Introduction Sierra s Side Trak and Auto Trak mass flow meters and con trollers are designed to accurately measure and control flows of process gases This instruction manual covers the installation op eration and maintenance of the entire Side Trak and Auto Trak product lines which include the following Sierra models e 830 Side Trak Mass Flow Meter e 840 Side Trak Mass Flow Controller e 860M Auto Trak Mass Flow Meter with RS 485 interface e 860C Auto Trak Mass Flow Controller with RS 485 interface Sierra s mass flow meters and controllers offer a broad range of sizes control electronics process connections cables and connectors for flexibility and versatility The meter s patented straight sensor tube with access ports permits easy cleaning and reduces maintenance down time
18. on the gas supply Verify that no flow exists Perform an initial zero output check only required for first time start ups Set flow to zero Connect a digital multimeter to V out 4 20 mA out and COM terminals 4 Check the reading If it is not within 10 mV 0 10 mA of zero adjust the zero potentiometer to zero the transducer The zero pot is located behind the upper metal button on the side of the transducer or behind the swing out plastic door 5 Adjust the controller set point to the desired flow rate All motor operated rotary valves seek a deadband where the flow is identical to the set point within specified tolerances Keep this in mind when checking the instrument s performance For in stance a 100 scfm flow controller may have a set point of 2 500 volts 50 scfm and a flow indication of 2 550 volts 51 scfm This controller is working correctly since the difference between the flow and the set point is within 1 scfm which is the specified accu racy of 1 of full scale 0 01 x 100 scfm 1 scfm The width of the deadband varies with the valve size and range of each control ler During operation the motor runs only when it needs to If the pres sure differential across the valve is insufficient to obtain set point the valve will open fully and the motor will cease to run Con versely if the set point is zero the valve will close and the motor will cease to run In either case there will be no control
19. or control ler We get this by combining equations 1 and 5 Q Q K K N P C N2 P2Cp2 6 Please note that the constant b cancels out Equation 6 is the funda mental relationship used in the accompanying tables For conven ience the tables give relative K factors which are the ratios K K instead of the K factors themselves In the tables the relative K factor is Kcua KN where the reference gas is the commonly used gas nitrogen N The remaining columns give Cp and p enabling you to calculate K K directly using Equation 6 In some instances K K from the tables may be different from that which you calculate directly The value from the tables is preferred because in many cases it was ob tained by experiment Sierra calibrates every transducer with primary standards using the actual gas or a molecular equivalent reference gas The calibration certificate accompanying the transducer cites the refer ence gas used Example 1 A transducer is calibrated for nitrogen N and the flow rate is 1000 sccm for a 5 000 VDC output signal The flow rate for car bon dioxide at a 5 000 VDC output is Qeo2 Qn2 Keo2 K no or Qcoz 0 74 1 000 1000 740 sccm Example 2 A transducer is calibrated for hydrogen H and the flow rate is 100 sccm for a 5 000 VDC output signal The flow rate for nitrous oxide N O is found as follows Qn20 Que K y20 K yp oF Q wo 0 71 1 01 100 70 3 sccm No
20. range indicator can be disabled by removing CR1 from the main 830 circuit board Controller Auto Shut Off Feature All flow controllers are normally provided with an Auto Shut Off feature that closes the valve at a command signal level of approxi mately 2 of full scale or less All electromagnetic valves fail normally closed On 840 controllers this value can be reduced Contact the factory for details on this option 3 4 IM 83 84 86 H Series 830 840 860 Instruction Manual Chapter 3 Operation JN Caution Do not use the manual valve off feature when RS 485 is active IM 83 84 86 H On Off Control and Soft Start Option On off control is provided for all models equipped with an elec tromagnetic valve This feature is available by connecting a man ual on off switch to the transducer connector as shown in Chapter 2 Certain processes cannot tolerate the normally fast response of Si erra mass flow controllers In these cases a soft start circuit slows the mass flow controller s valve response characteristics to avoid any bursts of flow that could disrupt a delicate process or perhaps stir up particulate The standard soft start time constant is 1 5 seconds providing a 7 5 second response time to within 2 percent of final value The time constant is factory set to fit your exact requirements Command signal 7 seconds 5 seconds 2 N 5 iL Standard response 25 to 75 F S 6041
21. rodding out the sensor with the Sensor Cleaning Stylette part number CK available from Caution Sierra for this purpose A 0 020 inch to 0 028 inch diameter piano wire may also be used To access the sensor for inspection or Remove the unit from the system Remove the two socket head ac cess port plugs with a 1 4 inch Allen wrench E 0 028 TO 0 030 DIA ACCESS PORTS CLEANING ROD Visually inspect the sensing ports and sensor Use a hemostat or tweezers to push the cleaning wire into the downstream opening of the sensor tube Do not force the clean ing wire move it back and forth DO NOT TWIST OR ROTATE Flush the sensor tube with a non residuous solvent In cases where solids are deposited in sensor units should be returned to factory for complete cleaning and re calibration Blow dry all parts with dry nitrogen and re assemble When the transducer is re installed in the system leak test the connection When using toxic or cor rosive gases purge the unit thoroughly with inert cleaning dry gas before discon necting from the gas line 1 2 3 4 5 6 7 8 Check transducer calibration 4 6 IM 83 84 86 H Series 830 840 860 Instruction Manual Chapter 4 Maintenance Sensor Electrical Test To check the electrical integrity of the sensor windings AN 1 Remove the unit from the system Caution Important note Removal 2 Remove the two 4 40 Phillips head screws locat
22. the valve voltage while counterclockwise will decrease it Adjust IM 83 84 86 H 4 13 Chapter 4 Maintenance Series 830 840 860 Instruction Manual slowly 1 8 turn at a time and observe until the desired voltage is obtained 4 Now apply a5 setpoint signal and confirm that the voltage does not drop below 11 volts on the 30 volt circuit or 6 volts on the 15 volt circuit Go back and forth between these set tings and make sure that the voltages stay within these bounda ries When this voltage window is obtained the symptoms should disappear and the lock nut can be re tightened 5 Re install the electronics cover by powering down the control ler removing the cable putting the cover back on and replac ing the access door plugs Reconnect the cable and apply the power A final check for leak by with a zero set point and proper flow with various control signals should be conducted Notes Adjusting the valve voltage does not change the calibration of the controller If these adjustments do not obtain the desired operation contact Sierra directly 4 14 IM 83 84 86 H Series 830 840 860 Instruction Manual Chapter 4 Maintenance Transducer Calibration Calibration of Sierra s flow meters and controllers requires a cali bration standard of at least equal accuracy and preferably an order aap of magnitude of at least four times better than the transducer Si t is important that this i itarisducer
23. 11 NW ALVS Adj stment ree a ana e een 4 12 Transducer Calibration ssacssis s c cetageiivatacnistasachsiws aoedehass 4 15 Chapter 5 Troubleshooting Troubleshooting Procedures 2 iccgscscadassndvedspscensfarcnavee Gieneesteranes 5 1 Frequently Asked Questions icecicc stare ss heeeeadedenrscane eeleeceqncdes 5 4 Returning Equipment to the Factory eeeeeeeeeeeeneeeeeeeeees 5 7 Appendix A Conversion Formulas and Gas Tables Appendix B Production Specifications List of Figures 1 1 Flow Paths through the Transducer ccceccceeeeeeeeees 1 3 1 2 Flow Measuring Principle ceeeeesssneeeeeeeeeeeeeees 1 3 1 3 Sensor Temperature Distribution cceceeeceeeeeeeeee 1 4 1 4 Linear Range of the Transducer s Output Signal 1 4 2 1 Piping Requirements for NPT amp 1 2 inch Connections 2 3 2 2 Input Power Connections 20 Pin Connector 2 5 2 3 Output Signal Connections 20 Pin Connector 2 5 2 4 Local Command Set Point 20 Pin Connector 2 6 2 5 External Command Set Point 20 Pin Connector 2 6 2 6 15 Volt Valve Purge and Off 20 Pin Connector 2 7 2 7 30 Volt Valve Purge and Off 20 Pin Connector 2 7 2 8 Input Power 15 Pin D Connector ee eeeeeeeeeeeeee 2 8 2 9 Output Signal 15 Pin D Connector 2 8 2 10 Local Command Set Point 15 Pin D Connector 2 9 2 11 External Command Set Point 15 P
24. 2 3 4 5 6 7 8 9 10 Time in seconds Figure 3 1 Soft Start Response Times The Model 860 provides valve on off and soft start control with ei ther the manual hardware option or with digital software control via RS 485 For more information refer to the Series 860 Auto Net Software Addendum 3 5 Chapter 3 Operation Series 830 840 860 Instruction Manual Valve Purge Function A Caution Do not use the man ual purge function when RS 485 is ac tive Electromagnetic valves are driven with either 15 or 30 volts de pending on the range and pressure In general units below 10 slpm have the 15 volt valve When the purge function occurs electro magnetic valves are driven fully open regardless of the set point input Furthermore the purge function will override any valve off function This option is not available on motor operated rotary valves Motor operated valves are purged by setting the command signal to full scale There is no equivalent monitor function The Model 860 allows valve monitoring and the purge function to be utilized in either analog or digital RS 485 mode If both hard ware and software control options are used simultaneously on an 860 conflicts may occur that can produce undesired results For 15 Volt Valve Controllers The valve purge function is acti vated when the Valve Test Point Purge connection is connected to ground The maximum valve voltage is indicated in the comments
25. 4 86 H Series 830 840 860 Instruction Manual Chapter 2 Installation Wiring the Transducer A Side Trak and Auto Trak transducers require a 15 0 15 VDC power Warning supply and a readout device Additionally controllers require a set Follow National Electric point input 0 5 VDC standard 4 20 mA optional Transducers are Code or your local code connected to the power supply output signal and set point control safety practices when wir through either a ing or connecting this unit 8 to a power source Only 20 pin card edge connector or 15 pin D connector Motor operated ro qualified personnel should tary valves use a 10 pin circular connector Wiring instructions are Mee Rescue given for each type of connector on the following pages If you are re placing another manufacturer s transducer with a Sierra product see the factory supplied wiring supplement for instructions specific to your in stallation Recommended Wire Gauges Using the correct wire gauge for cabling runs to transducers en hances system reliability For cable runs over 150 feet 46 m con sider using a local power supply Model 830 860M all ranges Distance in feet Recommended Min Wire Gauge 25 34 50 32 100 28 200 26 300 24 500 22 COM amp 15 VDC Pins Model 840 860C Low amp Medium Flow 30 Volt Valve COM amp 15 VDC Pins Model 840 860C High Flow 30 Volt Valve Model 840 860C Motor Operated Rotary Valve IM 83 84 86 H 2 on Cha
26. 5 C and 10 to 60 psia 0 7 to 4 bara 2 of full scale including linearity over O to 50 C and 5 to 50 psia 0 3 to 10 bara 1 of full scale accuracy at a specific tem perature and pressure is available with special calibration For the mod els 840 NPT the accuracies above are 1 5 3 and 1 5 re spectively 0 15 of full scale 0 5 of full scale for 840 NPT 0 027 of full scale per F 0 05 of full scale per C or better 0 01 of full scale per psi 0 15 of full scale per bar or better 830 all 300 ms time constant 2 seconds typical to within 2 of set point over 20 to 100 of full scale 840 low med 300 ms time constant 2 seconds typical to within 2 of set point over 20 to 100 of full scale 840 high n se 600 ms time constant 4 seconds typical to within 2 of set point over 20 to 100 of full scale 840 NPT 800 ms time constant 4 seconds typical to within 5 of set point over 20 to 100 of full scale 860 all c eee 0 6 to 1 second to within 2 of set point over 20 to 100 of full scale Physical Specifications Wetted Materials 830 All cecceeeeeeeeeees 316 stainless steel Viton O rings standard Neoprene and 4079 Kal Rez or equivalent optional others on special or der 840 860 low med high 316 stainless steel 430F stainless steel Viton O rings IM 83 84 86 H B 3 Appendix B Specifications Series 830 840 860 Instructi
27. 6 H 2 3 Chapter 2 Installation Series 830 840 860 Instruction Manual VCR Fittings 1 Position the transducer with the flow direction arrow pointing downstream in the direction of flow 2 Install new washers compatible with the gas to be used Do not mix or interchange parts of tube fittings made by different manufacturers 3 Tighten the nut finger tight and then 1 4 turn tighter with a wrench Do not over tighten 4 Check the system s entire flow path thoroughly for leaks Do not use liquid leak detectors instead monitor pressure decay Over exposing the transducer to leak detector fluid may dam age the unit NPT Fittings and 1 2 Inch Connections All Types 1 Install a section of straight pipe at least five pipe diameters in length upstream of the transducer For flow meters only also allow at least two pipe diameters downstream for accurate op eration DO NOT use reducers Position the transducer with the flow direction arrow pointing downstream in the direction of flow Tighten fittings until leak tight refer to published standards for specific recommendations Check the system s entire flow path thoroughly for leaks Do not use liquid leak detectors instead monitor pressure decay Over exposing the transducer to leak detector fluid may dam age the unit Piping Requirements Meters and Meters controllers Figure 2 1 Piping Requirements for NPT and 1 2 Inch Process Connections IM 83 8
28. 86 H Series 830 840 860 Instruction Manual Chapter 1 Introduction IM 83 84 86 H Safety Information Caution and warning statements are used throughout this book to draw your attention to important information A Warning A Caution This statement appears with information that This statement appears with information that is is important to protect people and equipment important for protecting your equipment and from damage Pay very close attention to all performance Read and follow all cautions that warnings that apply to your application apply to your application Receipt of System Components When receiving a Sierra transducer carefully check the outside packing carton for damage incurred in shipment If the carton is damaged notify the local carrier and submit a report to the factory or distributor Remove the packing slip and check that all ordered components are present and match your specifications as ordered Make sure any spare parts or accessories are not discarded with the packing material Do not return any equipment to the factory with out first contacting Sierra Customer Service Technical Assistance If you encounter a problem with your transducer review the configuration information for each step of the installation operation and set up procedures Verify that your settings and adjustments are consistent with factory recommendations Refer to Chapter 5 Trou bleshooting for specific information and recommend
29. A TD O rie Figure 2 16 Motor Operated Rotary Valve Connector 10 Pin Connector 1 Both pin 2 and 4 should be connected to the power supply common via separate dedicated wires to assure no ground loops 2 4 20 mA output signal is ground referenced non isolated Warning Do not apply any external voltage to this loop 3 4 20 mA setpoint signal Use 15 VDC maximum to produce IM 83 84 86 H 2 15 Series 830 840 860 Instruction Manual Chapter 3 Operation Chapter 3 Operation This chapter covers transducer operation and controller features available on Sierra s Side Trak and Auto Trak models For more information on the advanced digital RS 485 commands available on Auto Trak transducers refer to the Series 860 Auto Net Software Addendum included with this manual Standard output for all transducers is a linear 0 5 VDC output signal directly corresponding to 0 to 100 of the mass flow full scale range For mass flow controllers an input signal of 0 5 VDC 4 20 mA optional allows set point flow control to any desired value within the range of the model The input signal is a direct linear rep resentation of 0 to 100 of the mass flow full scale value A 0 VDC or 4 mA set point will cause a condition of 0 flow to occur and a 5 00 VDC 20 mA set point will cause a flow condition equivalent to 100 of flow to occur Mass Flow Meter Operation When the transducer is installed and the system has undergone a
30. Freon 23 CHF3 50 176 3 127 KR Freon 11 CCIF 33 1357 6 129 KR Freon 12 CClaF2 35 1432 5 395 KR Freon 13 CCIF3 38 153 4 660 KR Freon 13 B1 CFrF3 7 1113 6 644 KR Freon 14 CF4 42 1654 3 926 Freon 21 CHCloF 42 140 4 952 KR Freon 22 CHCIF2 A6 1544 3 858 KR Freon 113 CCloFCCIF2 20 161 8 360 KR Freon 114 C2CloF4 22 160 7 626 KR Freon 115 C2CIFs 24 164 6 892 KR Freon C318 C4F6 17 185 8 397 KR Germane GeH 57 1404 3 418 Germanium Tetrachloride GeCL4 27 1071 9 565 KR Helium He 1 454 1 241 1786 Hexafluoroethane C2F6 24 1834 6 157 KR Freon 116 Hexane CeH14 18 3968 3 845 KR Hydrogen H2 1 01 3 419 0899 Hydrogen Bromide HBr 1 000 0861 3 610 KR Hydrogen Chloride HCI 1 000 1912 1 627 KR KR Hydrogen Cyanide HCN 1 070 3171 1 206 KR Hydrogen Fluoride HF 1 000 3479 893 KR KR Hydrogen lodide HI 1 000 0545 5 707 KR Hydrogen Selenide H2Se 19 1025 3 613 KR Hydrogen Sulfide H2S 80 2397 1 520 KR lodine Pentafluoride IF5 25 1108 9 90 KR Isobutane CH CHs 3 27 3872 3 593 KR lsobutylene C4Hs 29 3701 2 503 KR Krypton Kr 1 453 0593 3 739 Methane CH4 12 5328 715 Methanol CH30H 58 3274 1 429 Methyl Acetylene C3H4 A3 3547 1 787 KR Methyl Bromide CH2Br 58 63 1106 4 236 Methyl Chloride CH3Cl 1926 2 253 KR Methyl Fluoride CH3F 68 3221 1 518 KR A 8 IM 83 84 86 H Series 830 840 860 Instruction Manual Appendix A Chemical K factor Cp Density Elastomer Actual Gas Symbol Relative N2 Cal
31. Sierra Series 830 840 860 Side Trak and Auto Trak Mass Flow Meters and Controllers Instruction Manual Part Number IM 83 84 86 Revision G 1 2 06 INSTRUMENITS INC THE MASS FLOW COMPANY 5 Harris Court Building L Monterey CA 93940 831 373 0200 800 866 0200 Fax 831 373 4402 http www sierrainstruments com Sierra Instruments b v Bolstoen 30A 1046 AV Amsterdam The Netherlands 31 0 20 6145810 Fax 31 0 20 6145815 Customer Notice Sierra Instruments Inc is not liable for any damage or personal injury whatso ever resulting from the use of Sierra Instruments standard mass flow meters or controllers for oxygen gas You are responsible for determining if this mass flow meter or controller is appropriate for your oxygen application You are responsible for cleaning the mass flow meter or controller to the degree required for your oxy gen flow application COPYRIGHT SIERRA INSTRUMENTS 1994 No part of this publication may be copied or distributed transmitted transcribed stored in a retrieval system or translated into any human or computer language in any form or by any means electronic mechanical manual or otherwise or disclosed to third parties without the express written permission of Sierra Instruments The information contained in this manual is subject to change without notice TRADEMARKS Side Trak Auto Trak and Cal Bench are trademarks of Sierra Instruments Inc Other product and c
32. The platinum sensor eliminates zero drift and ensures long term repeatability The primary standard calibration ensures starting point accuracy and NIST traceability All wetted surfaces are constructed of 316 stainless steel with Viton seals standard Control lers incorporate either an electromagnetic valve up to 500 slpm or a motor operated rotary valve 100 slpm to 200 scfm The Auto Trak 860 digital microprocessor features automatic bridge balancing cir cuitry and provides simultaneous analog and digital RS 485 commu nication Using This Manual This manual is organized into five chapters e Chapter 1 includes the introduction and theory of operation e Chapter 2 provides installation and wiring instructions e Chapter 3 describes system operation and controller features e Chapter 4 covers maintenance and calibration procedures e Chapter 5 provides troubleshooting advice Gas tables and conversion formulas are found in Appendix A The product specifications and dimensional drawings are found in Ap pendix B The Model 860 Auto Trak RS 485 communications program in cludes an Auto Net Software Addendum as a supplement to this manual Please refer to this addendum for all RS 485 operating in structions Chapter 1 Introduction Series 830 840 860 Instruction Manual Throughout this manual we use the word transducer as a ge neric term to represent all Side Trak and Auto Trak mass flow meters and controllers 1 2 IM 83 84
33. art Replace with same type part Increase pressure or reduce set point Chapter 5 Troubleshooting Series 830 840 860 Instruction Manual Returning Equipment to the Factory Factory Calibration All Models Sierra Instruments maintains a fully equipped calibration laboratory All measuring and test equipment used in the calibration of Sierra transducers are traceable to NIST Standards Sierra is ISO 9001 registered and con forms to the requirements of ANSI NCSL Z540 and ISO IEC Guide 25 Instructions for Returning Your Instrument for Service The following information will help you return your instrument to Sierra Instruments Factory Service Center and will ensure that your order is processed promptly We will assign an RMA Return Materials Authoriza tion number prior to the unit s return and send you an estimate of charges within 24 hours of receiving your unit Prices may vary depending on the flow range type of gas and operating pressure of your unit To request de tailed pricing contact your local Sierra Instruments distributor or contact one of our offices directly Our expedite fees are three day turnaround 25 two day turnaround 40 Please follow these easy steps to return your instrument for fac tory service 1 Obtain a Return Materials Authorization RMA number from Si erra Instruments You may obtain this from the factory by calling 800 866 0200 between 8 00 a m and 5 00 p m PST Monday through Friday You may
34. ations If the problem persists after following the troubleshooting proce dures outlined in Chapter 5 contact Sierra Instruments by fax or by E mail see inside front cover For urgent phone support you may call 800 866 0200 or 831 373 0200 between 8 00 a m and 5 00 p m PST In Europe contact Sierra Instruments bv at 31 20 6145810 When contacting Technical Support make sure to include this information e the flow range serial number and Sierra order number and model number all marked on the transducer nameplate e the problem you are encountering and any correc tive action taken e application information gas pressure temperature and piping configuration Chapter 1 Introduction Series 830 840 860 Instruction Manual The Series 800 Flow Sensing Principle The operating principle of Sierra s Side Trak and Auto Trak flow meters and controllers is based on heat transfer and the first law of thermodynamics During operation process gas enters the instru ment s flow body and divides into two flow paths one through the sensor tube the other through the laminar flow element bypass The laminar flow element bypass generates a pressure drop P P forcing a small fraction of the total flow to pass through the sensor tube m which is then monitored Two coils ee Sensor tube Laminar flow bypass m m m m m 1 m2 m km Figure 1 1 Flow Paths through the Transducer Two resistance temperat
35. e used in applications that require a better than 5 to 10 accuracy It should also be noted that certain gases in similar families will work exceptionally well with K factors however those instances are only true when similar thermal properties of the gas are pre sent IM 83 84 86 H Series 830 840 860 Instruction Manual Appendix A Gas Tables and K factors Chemical K factor Cp Density Elastomer Actual Gas Symbol Relative N2 Cal Ml 0 C O ring Valve Seat Acetylene C2H2 58 4036 1 162 Air 1 00 240 1 293 Allene Propadiene C3H4 43 352 1 787 KR Ammonia NH3 13 492 760 NEO NEO Argon Ar 1 45 1244 1 782 Arsine AsH3 67 1167 3 478 KR Boron Trichloride BCls 41 1279 5 227 KR KR Boron Trifluoride BF3 51 1778 3 025 KR Bromine Bro 81 0539 7 130 Boron Tribromide Br3 38 0647 11 18 KR Bromine Pentafluoride BrFs 26 1369 7 803 KR Bromine Trifluoride BrF3 38 1161 6 108 KR Bromotrifloromethane CBrF3 37 1113 6 644 Freon 13 B1 1 3 Butadiene C4He 32 3514 2 413 Butane C4H10 26 4007 2 593 NEO KR 1 Butane C4Hsg 30 3648 2 503 NEO KR 2 Butane C4Hs CIS 324 336 2 503 NEO KR 2 Butane C4Hs TRANS 291 374 2 503 Carbon Dioxide CO2 14 2016 1 964 Carbon Disulfide CS2 60 1428 3 397 Carbon Monoxide CO 1 00 2488 1 250 Carbon Tetrachloride CCl 31 1655 6 860 KR Carbon Tetrafluoride CF4 42 1654 3 926 KR Freon 14 Carbonyl Fluoride COF2 54 1710 2 945 Carbonyl Sulfide COS 66 1651 2 680
36. ed If the gas contains any particulate matter install an in line fil ter prior to the transducer Recommended filter size 15 mi cron for flows of 10 to 30 slpm 30 micron for above 30 slpm If the transducer is mounted in any position other than horizontal and it was not calibrated specifically for that position contact Si erra s Customer Service Department for instructions For meters if a potential over flow condition exists insert a valve or critical orifice in the line to limit flow to approxi mately 25 percent above the full scale range of the meter For controllers use a properly sized pressure controller and verify the controller orifice size is the smallest in the system There can be no restrictions such as valves tubing or piping internal diameters reducers etc upstream or downstream of the controller less than the valve orifice diameter Confirm that the transducer o ring material is compatible with the gas to be measured IM 83 84 86 H Series 830 840 860 Instruction Manual Chapter 2 Installation Installing the Transducer Follow the installation instructions that are applicable to your trans A ducer s process connection For all NPT and 1 2 inch size fittings Caution see the piping recommendations given on page 2 3 Before use all Only qualified plumbing should be checked carefully for leaks and the transducer personnel should in purged with dry nitrogen Make sure that the tubing is free from
37. ed on top of of the sensor cover and dis the electronics enclosure and slide the enclosure up and off turbance of sensor insulation Use a nut driver to remove the two standoffs supporting the blanket that is inside will alter printed circuit boards Tilt the boards to access the three sensor the sensors performance wires as shown below will necessitate a re calibation and may break 3 Locate the black red and white wires connecting the sensor to the sensor micro weldings a g the main circuit board 4 Connect one lead of an Ohm meter to the white wire and meas ure the resistance between the red and white wires Next measure the resistance between the black and white wires These readings should each be approximately 50 Ohms Low or zero Ohm readings on either indicates a short circuit High or infinite Ohms readings indicate an open circuit 5 Next measure the resistance between the case metal part of the flow body and any one of the sensor wires This reading should be 2 Megohms or greater Incorrect readings require sensor replacement and re calibration 6 When the transducer is re installed in the system leak test the connection Check transducer calibration See instructions be ginning on page 4 13 Tilt PC board to access wires Figure 4 5 Sensor Wire Access IM 83 84 86 H 4 7 Chapter 4 Maintenance Series 830 840 860 Instruction Manual Valve Maintenance Electromagnetic valves may require spring te
38. edium or high flow units con trol the flow with a proportional electromagnetic valve that is set up for certain process conditions Variables which affect their op eration include orifice size spring selection and adjustment input and output pressures and gas flow orientation horizontal or verti cal If operating conditions change it may be necessary to make a valve spring adjustment An adjustment may also become neces sary due to a valve seat depression or spring sag both of which can cause a change in the internal tension of the valve spring and electrical current An incorrectly adjusted valve can be detected by OSCILLATION UNSTABLE OUTPUT NOT OBTAINING MAXIMUM FLOW OR LEAKAGE AT A ZERO SET POINT LEAK BY The following valve adjustment procedure may correct the above conditions Equipment needed L and M 1 16 hex wrench 5 16 nut driver H Standard screwdriver 3 8 nut driver Quick fix for leak by If your unit is experiencing leak by first confirm that this condition is mechanical in nature rather than elec trical by shutting down the power If leak by stops check for downstream flow the problem is electrical in nature and the in strument may require factory repair If leak by continues the problem is mechanical and may be fixed by an adjustment Re move the small cover that is on top of the silver solenoid to the right of the rectangular electronic enclosure On some 840L units this may require remov
39. ews on top of the enclo sure Remove the enclosure by sliding it up and off Remove the metal cap on top of the valve by inserting a flat tip screw driver into the slots provided and prying upward 3 Use a 5 8 inch nut driver to loosen and remove the 5 8 inch nut at the top of the valve Remove the coil coil enclosure and warp washer IM 83 84 86 H Series 830 840 860 Instruction Manual Chapter 4 Maintenance 4 The small circuit board may be separated from the main board to ease removal of the coil To separate first remove the plastic 4 mounting screw located in the center of the main circuit board and carefully pull the two boards apart Remove the four 4 40 socket head cap screws at the base of the valve Separate the valve from the flow body 5 There are three O rings sealing the valve assembly one be tween the base and the flow body one under the valve seat orifice and one on the top adjusting screw inside the valve Inspect the O rings for damage and replace as necessary You should replace all O rings whenever the valve is disassembled 6 Inspect the valve seat and plug for corrosion or roughness and replace as necessary 7 Re assemble components Note the 5 8 inch nut must not be tightened with more than 10 in lb of torque 8 When the controller is re installed in the system leak test the connection 9 Adjust the valve for proper operation as given in the controller valve adjustment procedure E
40. field of the calibration certificate Units with ranges below 10 slpm For 30 Volt Valve Controllers The valve purge function is acti vated when the Valve Test Point Purge connection is connected to 15 VDC The maximum valve voltage is indicated in the com ments field of the calibration certificate A Sierra controller intended as a replacement for another manufac turer s controller may have Pin D and other pins disconnected Some options may not be available Purging Non Reactive Gases Purge the transducer with clean dry nitrogen for a minimum of two hours Purging Reactive Gases A Caution Always fully neutralize any toxic gas trapped inside the transducer before removing from the gas line 3 6 One of the following methods may be used e Cycle purge This is done by alternately evacuating and purg ing the transducer for two to four hours with clean dry nitro gen e Purge the transducer with clean dry nitrogen for eight to twenty four hours e Evacuate the transducer for eight to twenty four hours When toxic or corrosive gases are used purge unit thoroughly with inert dry gas before disconnecting from the gas line If a transducer used with a toxic or corrosive gas is returned to the factory a Ma IM 83 84 86 H Series 830 840 860 Instruction Manual Chapter 3 Operation terial Safety Data Sheet must be enclosed with the unit upon its re turn IM 83 84 86 H 3 7 Series 830 840 860 Inst
41. g with a suitable solvent Air dry thoroughly Inspect the honeycomb element for damage and replace if nec essary Replacement of the LFE or inlet screen requires trans ducer re calibration Re assemble components When the transducer is re installed in the system leak test the connection Check transducer calibration IM 83 84 86 H Chapter 4 Maintenance Series 830 840 860 Instruction Manual RANGING HONE YCOMB LFE RANGING WASHER WASHER 3 148 INCH LONG 6 32 NUT 6 32 SCREW INLET FILTER SPACER FLOW Figure 4 3 High Flow Transducer LFE Cleaning High Flow Transducers The high flow LFE is similar to the honeycomb element used in the medium flow body but larger in diameter The high flow body con sists of four parts inlet tube inlet cap main flow body and end cap The inlet tube is only removed to inspect and replace the sealing O ring between the inlet tube and inlet cap To access the components 1 2 Remove the unit from the system To remove the inlet screen remove the four 1 4 28 socket head cap screws on the inlet side of the flow body and separate the inlet cap from the main flow body Inspect the inlet screen for damage and corrosion and replace if neces sary Light to medium particulate contamination can be cleaned by back washing with a suitable solvent Air dry thoroughly Inspect the sealing O ring for damage and replace if necessary The inlet screen is mounted with t
42. he fine mesh side facing the inlet To remove the LFE loosen and remove the four threaded rods hold ing the end cap to the main flow body Separate the end cap from the main flow body and remove the LFE assembly The LFE assembly consists of 6 32 x 31 8 inch long screw a 6 washer two ranging washers honeycomb LFE spacer inlet filter and 6 32 nut Inspect the honeycomb element for damage and replace if necessary Replacement of the LFE or inlet screen requires transducer re calibration Re assemble components When the transducer is re installed in the system leak test the connection Check transducer calibration 4 4 IM 83 84 86 H Series 830 840 860 Instruction Manual Chapter 4 Maintenance Caution Removing or re positioning the LFE may alter the calibration e 16 NUTS e WASHERS INLET CAP FILTER SCREEN ASSEMBLY a SEALING O RING TIE RODS LFE RETAINING SCREW 1 OF 4 SIDE TRAK TRANSDUCER Figure 4 4 NPT Transducer LFE Cleaning NPT Type Transducers The NPT flow body is comprised of a stainless steel pipe termi nated on either end by an end cap sealed with an O ring The end caps are held in place by four tie rods which run the length of the flow meter and are fastened with eight 3 8 16 nuts and washers The inlet screen is mounted to the inside of the inlet end cap on three standoffs The LFE is a cylindrical honeycomb element lo cated in the flow body between t
43. he two sensing ports In most cases the LFE can be cleaned without removing it from the flow body If it cannot be cleaned by back washing return for factory service To access the components 1 Remove the unit from the system 2 To remove the inlet filter screen stand the flow body on end with the inlet facing up and remove the four 3 8 16 nuts on the ends of the tie rods Carefully lift the end cap and filter screen assembly up and off the meter 3 Inspect the inlet screen for damage and corrosion and replace if necessary Light to medium particulate contamination can be cleaned by back washing with a suitable solvent Air dry thor oughly before re assembly Mount the inlet screen with the fine mesh side facing the inlet 4 Inspect the sealing O ring for damage and replace if necessary 5 Re assemble components When the transducer is re installed in the system leak test the connection 6 Check transducer calibration IM 83 84 86 H Chapter 4 Maintenance Series 830 840 860 Instruction Manual Sensor Maintenance The sensor tube is straight and has a relatively large 0 031 inch A N ID which makes inspection and cleaning easy Sensor mainte Caution nance consists of Do not remove the sen sor cover this could shift transducer calibration ba inspecting and cleaning the sensor flow path checking the sensor for proper electrical function Sensor Cleaning and Inspection Cleaning is accomplished by simply
44. ichloro 1 2 2 CClaFCCIF2 20 161 8 360 KR Trifluorethane Freon 113 Trisobutyl Aluminum C4Ho Al 061 508 8 848 KR Titanium Tetrachloride TiCl4 27 120 8 465 KR Trichloro Ethylene C2HCl3 32 163 5 95 KR Trimethylamine CH3 3N 28 3710 2 639 KR Tungsten Hexasfuoride WFe 25 0810 13 28 KR Teflon Uranium Hexafluoride UF6e 20 0888 15 70 KR Vinyl Bromide CH2CHBr 46 1241 4 772 KR Vinyl Chloride CH2CHCI 48 12054 2 788 KR Xenon Xe 1 44 0378 5 858 IM 83 84 86 H A 9 Series 830 840 860 Instruction Manual Appendix B Specifications IM 83 84 86 H Appendix B Product Specifications Operating Specifications Gases All clean gases specify when ordering Mass Flow Rates 0 to 10 sccm to 0 to 5600 slpm flow ranges specified are for an equiva lent flow of nitrogen at 760 mm Hg and 21 C 70 F other ranges in other units are available e g scfh or nm h Gas Pressure 1000 psig 68 9 barg maximum for low flow bodies only 500 psig 34 barg maximum 30 psig 2 barg optimum Gas amp Ambient Temperature 32 to 122 F 0 to 50 C higher available on special order Leak Integrity 5 X 10 atm cc sec of helium maximum Pressure Drop 830 860M low 0 08 psi 0 006 bar or 6 cm of water differential max 15 slpm 1 5 psi 0 20 bar or 1 5 cm of water differential max 830 860M med 0 08 psi 0 006 bar or 6 cm of water differential max 100 slpm 1 5 psi 0 20 bar or 1 5 cm of water differential max 830 860M high
45. igh efficiency Fast Trak Electromagnetic Valve is used The normally closed Fast Trak valve is similar to an on off solenoid valve except that the current to the valve coil and hence the magnetic field is modu lated so that the ferromagnetic valve armature or valve plug as sumes the exact height above the valve s orifice required to main tain the valve s command flow The result is nearly infinite resolu tion All controllers with the Fast Trak valves are available with a Soft Start option for those processes that require it For higher flows of 50 to 200 scfm controllers are equipped with Si erra s microprocessor controlled motor operated rotary valve While the rotary valve does not provide a completely positive shut off it does offer accurate control for higher flow installations Series 830 840 860 Instruction Manual Chapter 2 Installation IM 83 84 86 H Chapter 2 Installation Quick Installation Instructions For 830 840 L M and H Meters And Controllers NEVER TEST FOR LEAKS WITH LIQUID LEAK DETECTOR If liquid seeps into the electronics or the sensor compartment below the instrument may be damaged Use a pressure decay test in stead Install an appropriate in line filter upstream if the gas contains any particulate matter or condensed moisture A 15 micron par ticulate filter for full scale flows up to 30 liters minute is recom mended 30 micron for flows above 30 Mount with a horizontal gas flow Th
46. in D Connector 2 9 2 12 15 Volt Valve Purge and Off 15 Pin D Connector 2 10 2 13 30 Volt Valve Purge and Off 15 Pin D Connector 2 10 2 14 Motor Operated Valve Circular 10 Pin Connector 2 11 3 1 Soft Start Response Times scan nwianvcts nausieledatianss 3 5 4 1 Low Flow Transducer LFE Cleaning eee 4 2 4 2 Medium Flow Transducer LFE Cleaning 04 4 3 4 3 High Flow Transducer LFE Cleaning eee 4 4 4 4 NPT Transducer LFE Cleaning eeeeeeeseeeeeeeeeeeeeee 4 5 BD Sensor Wire ACCESS eet cl acct Nncs E lea ae teases ton 4 7 4 6 Transducer Potentiometers Used for Calibration 4 12 0 5 Table of Contents Series 830 840 860 Instruction Manual List of Tables 2 1 Recommended Wire Gauges cicicccccstecsesccesedeceseetastececnieses 2 4 0 6 IM 83 84 86 H Series 830 840 860 Instruction Manual Table of Contents Warnings and Cautions Warning Follow National Electric Code or your local code safety practices when wiring or connecting this unit to a power source Only qualified personnel should install and wire the transducer Warning Always remove main power before disassembling the transducer Caution During operation the mass flow controller valve becomes hot Caution Do not use the manual purge function when RS 485 is active Model 860 only Caution Always fully neutralize any toxic gas trapped inside the transducer before re moving from the gas
47. ing the plastic electronic enclosure to ex pose the valve coil With the power off apply the appropriate in let pressure to the controller per the inlet outlet operating pres sures listed on your label and apply a zero setpoint Loosen the lock nut Adjust the center adjustment screw slowly clockwise increasing the spring tension 1 4 turn at a time until this leak by subsides Putting your finger over the outlet fitting can confirm 4 12 IM 83 84 86 H Series 830 840 860 Instruction Manual Chapter 4 Maintenance the no leak condition Now adjust this screw clockwise one quar ter turn past this point tighten the locknut and replace the cap Apply power and test the controller for proper operation Quick fix for oscillation If your unit is experiencing oscillations at lower flows apply power apply the desired setpoint and adjust the valve spring adjustment screw 4 turn at a time clockwise in creasing the spring tension see procedure above during flow un til the symptoms disappear Adjust 4 turn further and tighten the locknut If your unit is experiencing other symptoms listed above you may require this more involved adjustment method Obtain a voltmeter and prepare to monitor the voltage found on pins 4 to 6 on a D connector or D to F on a card edge connector Or if these pins are inaccessible turn off the power and remove the cable 1 Remove the screws and or nuts on the top of the controller electronics
48. is orientation is preferable unless the factory calibration was specifically performed for a ver tical flow Consult your calibration certificate Horizontal flow is assumed unless vertical flow upward or downward is specified DO NOT APPLY POWER TO THE OUTPUT LOOP on units equipped and calibrated for a 4 20 mA output signal This is NOT a loop powered device Damage will occur Wire the instrument per the diagrams on the back of this card or the Operators Manual Chapter 2 Controllers require a separate ground wire for the Valve Return signal as well as a Setpoint sig nal no wire connected to the setpoint may cause the valve to float open Apply the gas listed on the label to the inlet at the recommended inlet pressure as listed on the calibration certificate On a meter obtain this pressure by blocking off the flow downstream Ona controller confirm that there is no gas flowing through it with a zero setpoint If there is a flow consult the Valve Adjustment Procedure in the manual Apply power and verify or adjust the zero setting after allowing a 15 minute warm up period The zero adjustment potentiometer is accessed through the upper hole in the side of the electronics cover See the Operator s Manual Chapter 3 DO NOT LEAVE A SETPOINT APPLIED TO A CONTROLLER WHEN NO GAS IS AVAILABLE TO THE INLET FITTING The control circuit will apply the maximum voltage to the valve coil re sulting in eventual overheating Damage may occur
49. ixed at a much higher than normal level until the sen sor warms up to its normal operating temperature range Turn on the gas supply Perform an initial zero output check only required for first time start ups Set flow to zero Connect a digital multimeter to V out 4 20 mA out and COM termi nals Check the reading If it is not within 50 mV 0 16 mA of zero adjust the zero potentiometer to zero the transducer The zero pot is located behind the upper metal button on the side of the transducer or behind the swing out plastic door Adjust the controller set point to the desired flow rate Caution Never leave the controller with no gas supply while supplying a setpoint The valve will open to its maximum position and eventually overheat causing possible damage to the control circuit If it is desired to interrupt the gas flow for an extended period consider utilizing the Valve Off circuit IM 83 84 86 H Series 830 840 860 Instruction Manual Chapter 3 Operation IM 83 84 86 H Motor Operated Rotary Valve Controllers When the transducer is installed and the system has undergone a complete leak check 1 Make sure the valve set point is zero before applying power 2 Apply power Allow thirty minutes of warm up time When power is first applied the output signal from the transducer remains fixed at a much higher than normal level until the sen sor warms up to its normal operating temperature range 3 Turn
50. king care not to lose any small parts There are three O rings sealing the valve assembly one be tween the base and the flow body one under the valve seat orifice and one on the top adjusting screw inside the valve Inspect the O rings for damage and replace as necessary You should replace all O rings whenever the valve is disassembled Inspect the valve seat and plug for corrosion or roughness and replace as necessary Re assemble the components When the controller is installed in the system leak test the connection Adjust the valve for proper operation as given in the controller valve adjustment procedure 4 10 IM 83 84 86 H Series 830 840 860 Instruction Manual Chapter 4 Maintenance Motor Operated Rotary Valves The electronic components in the Model 840 motorized valve flow controllers require no maintenance with the exception of the motor which requires replacement when its service life has ended This will be evidenced by hunting or the inability to maintain set point without a constant motion back and forth or outright failure The motor normally has a long service life typically more than five years and all other possibilities should be explored before considering replacement To disassemble the motor operated rotary valve 1 To allow for component removal set the valve to the fully ion aga E cautions open position before removing power When using toxic or cor rosive gases pu
51. lectromagnetic Valves High Flow Controllers The high flow electromagnetic valve is similar in design to the low flow valve As with the low flow valve cleaning can often be ac complished by opening the valve using the purge function and flushing in both directions Alternatively the valve may be manu ally opened by loosening the 6 32 lock nut on top of the valve and turning the adjustment screw fully counterclockwise A N To disassemble the high flow valve Caution When using toxic or cor 1 Remove the unit from the system rosive gases purge the unit thoroughly with inert ese dry gas before discon 2 Remove the two 4 40 Phillips head screws from the top of the necting from the gas line enclosure Remove the enclosure by sliding it up and off Re move the metal cap on top of the valve by inserting a flat tip screwdriver between the two parts and lifting upward IM 83 84 86 H 4 9 Chapter 4 Maintenance Series 830 840 860 Instruction Manual Unscrew the coil cover with a 11 16 inch wrench Remove the coil and coil enclosure Note the location of any washers or spacers for re assembly The small circuit board may be separated from the main board to ease removal of the coil To separate first remove the mounting screw located in the center of the main circuit board and carefully pull the two boards apart Remove the four 1 4 28 socket head cap screws at the base of the valve Separate the valve from the flow body ta
52. m H2 8 25 209 6 inches mm 48 HEL Model 840 NPT Side View Model 840 NPT Bottom View z Fee Model 840 NPT Outlet View B 10 IM 83 84 86 H Series 830 840 860 Instruction Manual Appendix B Specifications IM 83 84 86 H B 11
53. nc ecsuacesaeicdaeetasedes 2 5 Wiring Transducers with 20 Pin Card Edge Connectors 2 6 Wiring Transducers with 15 Pin D Connectotrs 2 10 Motor Operated Valve Circular 10 Pin Connector 2 14 Chapter 3 Operation Mass Flow Meter Operation etc ane a a eenes 3 1 Mass Flow Controller Operation eeesseeneeceeeeeeeeeeeeneeeees 3 2 Electromagnetic Valve Controllers cccccccceeeeeeeeeeeneeees 3 2 Motor Operated Rotary Valve Controllers 3 3 Mass Flow Controller Features eeeeesssneeceeeeeeeeeeseneneees 3 4 Over Range and Cold Sensor Lockout Circuit 0 3 4 Controller Auto Shut Off Feature cccccccceeeeeeeeeeneeeees 3 4 On Off Control and Soft Start Option ee eeeeeeeeees 3 5 Valve Purge Function cresen anne a cccdee 3 6 Chapter 4 Maintenance Flow Path Maintenance cccccccccccsssesseeccceseeeaaeessseeeceseeeees 4 1 Changing the Laminar Flow Element cceeeeeeeeeees 4 Sensor Maintenance eaen onie a E N 4 6 Sensor Cleaning and Inspection c cccccceeeseesestneeeeeeeees 4 6 Sensor Electrical Testerenin inen ia i inai 4 7 Valve Maintenance sers a a a a 4 8 0 4 IM 83 84 86 H Series 830 840 860 Instruction Manual Table of Contents IM 83 84 86 H Electromagnetic Valves Low and Medium Flow 4 8 Electromagnetic Valves High FloW 4 9 Motor Operated Rotary Valves 00 0 eeeeseeeeeeeesneeeeeeeeees 4
54. nsion adjustments for various reasons See Valve Adjust Procedure No maintenance is required under normal operating conditions other than an occa sional cleaning Use of certain corrosive gases may require fre quent replacement of the valve plug and O rings This indicates a need for a different elastomer Viton is standard with Neoprene Kal Rez or equivalent and PFA Teflon offered as options Do not attempt any valve adjustments while the meter is on line with any dangerous gas All controllers should be thoroughly leak tested following any valve adjustment For the Model 860 Auto Trak refer to Piston Tube Calibration Procedure for instructions on how to re adjust the electromagnetic valve for proper operation Electromagnetic Valves Low and Medium Flow Controllers AA Caution When using toxic or cor rosive gases purge the unit thoroughly with inert dry gas before discon necting from the gas line Controllers with a low or medium flow body use the same valve high flow models use a larger version Cleaning can often be ac complished by opening the valve using the purge function and flushing in both directions Alternatively the valve may be manu ally opened by loosening the 6 32 lock nut on top of the valve and turning the adjustment screw fully counterclockwise To disassemble the low and medium flow valve for inspection 1 Remove the unit from the system 2 Remove the two 4 40 Phillips head scr
55. oded or damaged Light to medium particulate contamination can be cleaned by back washing with a suitable solvent Air dry thoroughly Inspect the LFE for damage and replace if necessary Replace ment of the LFE or inlet screen requires transducer re calibration Re assemble components When the transducer is re installed in the system leak test the connection Check transducer calibration IM 83 84 86 H Series 830 840 860 Instruction Manual Chapter 4 Maintenance HONEYCOMB LFE 4 40 NUT 21 4 LONG 4 40 SCREW RANGING WASHERS INLET SCREEN 0 63 LONG STANDOFF SE FLOW Figure 4 2 Medium Flow Transducer LFE Cleaning Medium Flow Transducers In the medium flow body the LFE assembly consists of the honey comb laminar flow element inlet screen 0 63 inch long standoff two ranging washers 2 1 4 inch long 4 40 screw and 4 40 nut Range changes in the honeycomb element are made with various diameter ranging washers To access the components 7 8 10 11 12 Remove the unit from the system Access the LFE by unscrewing the four 10 32 socket head cap screws from the inlet side of the flow body and remove the in let end cap Remove the LFE assembly taking care not to bend the inlet screen Inspect the sealing O ring and replace if necessary In spect the inlet screen and replace if corroded or damaged Light to medium particulate contamination can be cleaned by back washin
56. ompany names listed in this manual are trademarks or trade names of their respective manufacturers IM 83 84 86 H Series 830 840 860 Instruction Manual Table of Contents Revision F changes Add wiring designations for 15 pin and 20 pin connectors Correct units on page A 1 Example 1 IM 83 84 86 H 0 3 Table of Contents Series 830 840 860 Instruction Manual Table of Contents Chapter 1 Introduction IntrodUChHON 223 esses itainrs e a a a es 1 1 Using this A earn al cies Stns v2 Sh rae sa Shaver Shana an Shtase at ieaatasa sh caseece 1 1 Satety Informat ns ner e r he cea deta tte ha ueuees 1 2 Receipt of System Components cssseccecceeeeeeeeeennneees 1 2 Technical Assistante serna a E E ae 1 2 The Series 800 Flow Sensing Principle sseeesssesseeesseesssssseee 1 3 Chapter 2 Installation Quick Installation Guide ccccccccccccsssseeeececceeeessseeeeeeeceeeeeees 2 1 Installation Overview 32 Sec 0e cease Saeed 2 2 Installing the Transducer sic cscscsvscanssntvcseestavcageantwiswceraseassaatesnneene 2 3 Compression Fittings 5i 5 5 assvanwsssea cesaesvessidosadeawese qavoareedess 2 3 VCO Fittings is cissstesaacievsis enetisnensenanisneninawivuae 2 3 VER PUSHING S eoet eoero e arra eE E aa en E aat 2 4 NPT and 1 2 inch Fittings seseeeeeeeeeeessssseeerreesssssseerrreee 2 4 Wiring the Tran SUMCET crsticececstsanca ba secenattecnse sacha cneaseeeseiesecaeaas 2 5 Recommended Ware Gaul pes c
57. on Manual B 4 Control Valve Type and valve plug standard Neoprene 4079 Kal Rez or equivalent and other elastomers available on special order PFA Teflon valve lug available 840 NPT eeeeeeees 316 stainless steel Teflon valve set Viton O rings standard Neoprene 4079 Kal Rez or equivalent optional others on special order 840 860C low med high Electromagnetic 840 NPT cece eee Rotary plug valve IM 83 84 86 H Series 830 840 860 Instruction Manual Appendix B Specifications Transducer Mounting Dimensions All dimensions are inches millimeters are in parentheses Certified drawings are avail able on request Shaded portion of dimensional drawings indicates controller models Low Flow Body Flow Range 0 10 sccm to 0 15 slpm 562 18 Thread on Flow Body Compression 125 or VCO male VCR male 25 25 25 4 84 or 5 0 4 60 4 90 122 9 or 127 0 116 8 124 5 Metric fittings are available consult factory Models 830 840 and 860 Outlet View IM 83 84 86 H B 5 Appendix B Specifications Series 830 840 860 Instruction Manual Medium Flow Body Flow Range slpm 25 or 375 25 or 375 25 or 375 6 4 or 9 5 6 4 or 6 4 or 9 5 9 5 562 18 Thread on Flow Body Compression VCO male VCR male 25 or 375 25 or 375 25 or 375 6 27 or 6 39 5 81 or 6 25 6 13 or 6 43 159 3 or 147 6 or 155 7 or 163 3 162 3 158 8 Metric fittings are available consult fact
58. ory Models 830 840 and 860 Side View Models 830 840 and 860 Bottom View Models 830 840 and 860 Outlet View B 6 IM 83 84 86 H Series 830 840 860 Instruction Manual Appendix B Specifications High Flow Body Flow Range slpm 0 100 0 200 0 300 0 400 375 or 50 375 or 50 50 50 9 5 or 9 5 or 12 7 12 7 12 7 12 7 75 16 Thread on Flow Body Compression VCO male 375 or 50 375 11 90 or 12 10 11 80 302 3 or 307 3 299 7 14 10 or 14 30 14 00 358 1 or 363 2 355 6 Models 830 840 and 860 Side View Models 830 840 and 860 Bottom View Models 830 840 and 860 Outlet View IM 83 84 86 H B 7 Appendix B Specifications Series 830 840 860 Instruction Manual B 8 IM 83 84 86 H Series 830 840 860 Instruction Manual Appendix B Specifications NPT Flow Body 830 Flow Range slpm Outlet 1 inch 1 5 inch 2 inch FNPT Dim D 4 95 5 95 7 95 125 7 151 1 201 9 Dim H 10 72 11 72 13 78 272 3 297 7 350 0 Dim H2 8 25 8 75 9 81 209 6 222 3 249 2 Dim L 10 10 12 10 16 10 256 5 307 3 408 9 inches mm gay I He H F d r Model 830 NPT Side View Model 830 NPT Bottom View Model 830 NPT Outlet View IM 83 84 86 H B 9 Appendix B Specifications Series 830 840 860 Instruction Manual NPT Flow Body 840 Flow Range slpm Outlet 3 4 inch 3 4 inch 1 5 inch FNPT 2 92 74 2 4 30 109 2 6 64 168 7 1 0 25 4 1 88 47 8 2 87 72 9 Di
59. pter 2 Installation Series 830 840 860 Instruction Manual Table 2 1 Recommended Wire Gauges 2 6 IM 83 84 86 H Series 830 840 860 Instruction Manual Chapter 2 Installation Wiring Transducers with 20 Pin Card Edge Connectors Input Power Connections Figure 2 2 Input Power Connections 20 Pin Connector Output Signal Connections Standard output for all transducers is a 0 5 VDC signal which di rectly corresponds to the 0 to 100 mass flow full scale range Output signals are linear and require a minimum load resistance of 1000 Ohms 4 20 mA output 600 Ohms maximum loop resis tance The Auto Trak 860 allows transmission of all available input output signals to your computer s RS 485 communications port connection details are given below For additional information refer to the Auto Net Software Addendum included with this manual V or mA Panel Meter PLC or Recording Device r COM 1 Computer RS 485 Communications Model 860 ONLY Figure 2 3 Output Signal Connections 20 Pin Connector Notes 1 Controllers require a separate dedicated ground wire between pin 2 and the power supply common to carry the valve coil current 2 4 20 mA output signal is ground referenced non isolated Warning Do NOT apply any external voltage to this loop IM 83 84 86 H 2 7 Chapter 2 Installation Series 830 840 860 Instruction Manual Input Signal Connections Controlle
60. reset amount of flow through the sensor tube The LFE is made of precision machined 316 stainless steel The particular LFE used depends on the gas and flow range of the instrument and is identified by the number on the transducer nameplate Should the LFE require cleaning or inspection due to deposition use the appropriate cleaning procedure given on the following pages CAUTION REMOVING THE LFE WILL SHIFT THE CALIBRATION OF THE INSTRUMENT DO NOT REMOVE THE LFE UNLESS YOU PLAN ON RE CALIBRATING THE TRANSDUCER IM 83 84 86 H 4 1 Chapter 4 Maintenance Series 830 840 860 Instruction Manual INLET FITTING COMPRESSION FITTING SHOWN INLET FILTER SCREEN Figure 4 1 Low Flow Transducer LFE Cleaning Low Flow Transducers The LFE is accessed by unscrewing the main inlet fitting and re moving it from the flow body The LFE is screwed into the inlet fitting which has been specially machined for this purpose To ac cess the components Caution 1 Removing or re positioning the LFE may alter the calibration 2 Remove the unit from the system The inlet filter screen is held in place in the inlet fitting by the LFE Disassemble by holding the fitting steady with a wrench and unscrewing the LFE with a medium flat tipped screw driver Remove the LFE assembly taking care not to bend the inlet screen Inspect the sealing O ring and replace if necessary In spect the inlet screen and replace if corr
61. rge the unit thoroughly with inert 2 Remove the unit from the system dry gas before discon necting from the gas line S 3 If desired remove the valve from the flow body to make disas sembly easier Unplug the connector and remove the four bolts holding the valve assembly to the flow body Inspect the sealing O ring and replace as necessary 4 Unscrew the six 4 40 Phillips head screws from the valve mo tor enclosure and remove the lid Loosen the lower set screws in the motor shaft coupling there are two set screws in each location to prevent loosening during operation Inspect the valve rotor shaft and coupling for scoring and replace if neces sary 5 Remove the three 8 32 screws holding the valve to the enclo sure and separate the valve body from the enclosure 6 Unscrew the four 6 32 x 7 8 inch flat head screws from the top of the valve and remove the valve base plate and spacer Re move the valve bonnet rotor and Teflon washers Inspect the valve rotor and body for wear and replace the O ring and seal in the valve bonnet 7 Inspect and replace the Teflon valve leaves and upper and lower Teflon washers if they are worn or damaged 8 Re assemble the components When the controller is re installed in the system leak test the connection IM 83 84 86 H 4 11 Chapter 4 Maintenance Series 830 840 860 Instruction Manual 840 L M and H series Valve Adjustment Procedure The Sierra 840 L M and H low m
62. rived from the first law of thermodynamics ap plied to the sensor tube as described in Chapter 1 H N IM 83 84 86 H A 3 Appendix A Series 830 840 860 Instruction Manual Where H m The mass flow rate of the gas gm min The constant amount of heat applied to the sensor tube Co The coefficient of specific heat of the gas Cal gm Cp is given in the Table at 0 C AT The temperature difference between the downstream and upstream coils and N A correction factor for the molecular structure of the gas given by the following table Number of Atoms in the Gas Molecule N Monatomic 1 040 Diatomic 1 000 Triatomic 0 941 Polyatomic 0 880 The mass flow rate m can also be written as e 3 a 3 Where p The gas mass density at standard conditions g l p is given in the tables at 0 C 760 mm Hg Furthermore the temperature difference AT is proportional to the output voltage E of the mass flow meter or AT aE 4 where a A constant If we combine equations 3 and 4 insert them into equation 2 and solve for Q we get Q bN pC 5 where b H aE a constant if the output voltage is constant IM 83 84 86 H Series 830 840 860 Instruction Manual Appendix A IM 83 84 86 H For our purposes we want the ratio of the flow rate Q for an ac tual gas to the flow rate of a reference gas Q which will produce the same output voltage in a particular mass flow meter
63. rs Only The 0 5 VDC 4 20 mA optional set point command input signal allows you to set the flow to any desired value within the range of the controller The set point input signal is a direct linear represen tation of 0 to 100 percent of the controller s mass flow full scale value For 0 5 VDC set point control connect a manual adjust potentiome ter as shown below Any potentiometer value between 5K and 100K may be used but is limited to a VDC input signal only For 4 20 mA set point control use a 4 20 mA generator If the set point input is not connected to some type of control device the valve on off switch must be activated in the off position If no set point command is present on the controller when powered up and the valve is not switched off the valve will drift wide open Figure 2 4 Local Command Set Point Potentiometer 20 Pin Connector Figure 2 5 External Command Set Point Source 20 Pin Connector Note Use 15 volt maximum to produce a 4 20 mA setpoint signal 2 8 IM 83 84 86 H Series 830 840 860 Instruction Manual Chapter 2 Installation Valve Purge and Valve Off Connections Controllers Only Depending on the valve voltage connect as shown below 15 Volt Valve COM B D EE Figure 2 6 Valve Purge and Valve Off 20 Pin Connector 30 Volt Valve On lt z Off 15V _ E On Off Figure 2 7 Valve Purge and Valve Off 20 Pin
64. ruction Manual Chapter 4 Maintenance Chapter 4 Maintenance Side Trak and Auto Trak transducers essentially require no scheduled maintenance other than periodic flow path cleaning if the gas is dirty If an in line filter is used the filtering element Caution It is important that this should be periodically be replaced or ultrasonically cleaned In transducer be serviced cluded in this chapter are general instructions for only by qualified personnel e Flow Path Maintenance page 4 1 e Sensor Maintenance 00 page 4 6 e Valve Maintenance page 4 8 e Valve Adjustment eee page 4 12 e Transducer Calibration page 4 15 Flow Path Maintenance A The transducer flow path is 316 stainless steel wetted magnetic Caution parts of the solenoid valve are 430F stainless steel with Viton Always fully neutralize Neoprene or Kal Rez or equivalent seals depending on the any toxic gas trapped in ae side the transducer gas used The flow path should be periodically inspected and before removing from cleaned as required the gas line When toxic or corrosive gases are used purge unit thoroughly with inert dry gas before disconnecting from the gas line A transducer used with toxic or corrosive gas must NOT be returned to the fac tory Contact Technical Support for details Cleaning the Laminar Flow Element The laminar flow element LFE is a precision flow divider which diverts a p
65. s maximum loop resis tance Panel Meter PLC or Recording Device Figure 2 10 Output Signal 15 Pin D Connector Notes 1 Panel meter or read out device should be wired to be at the same ground potential as the power supply 2 4 20 mA output signal is ground referenced non isolated Warning Do not apply any external voltage to this loop IM 83 84 86 H 2 11 Chapter 2 Installation Series 830 840 860 Instruction Manual Input Signal Connections Controllers Only A 0 5 VDC 4 20 mA optional set point command input signal al lows you to set the flow to any desired value within the range of the controller The set point input signal is a direct linear represen tation of 0 to 100 percent of the controller s mass flow full scale value For 0 5 VDC set point control connect a manual adjust potentiome ter as shown below Any potentiometer value between 5K and 100K may be used but is limited to a VDC input signal only For 4 20 mA or 0 5 VDC set point control use a PLC or other digital device If the set point input is not connected to some type of control device the valve on off switch must be activated in the off position If no set point command is present on the controller when powered up and the valve is not switched off the valve will drift wide open Figure 2 11 Local Command Set Point Potentiometer 15 Pin D Connector Figure 2 12 External Command Set Point Source 15 Pin
66. sducer Repair or replace PCB Set correct gas pressure Correct or replace Increase set point or disable auto shut off circuit Set correct gas pressure Clean or replace Adjust R22 balance on 840 models consult factory for others Return to factory for replacement Find and correct leaks Clean or replace sensor See K factory tables Find and correct leaks Repair or replace PCB Clean LFE Clean or replace screen Re plumb transducer correctly IM 83 84 86 H Series 830 840 860 Instruction Manual Chapter 5 Troubleshooting Flow Controllers with Motor operated Rotary Valves Problem Valve hunts back and forth continuously Valve rotates continuously Valve does not rotate Flow reading is erratic Reads full scale with no flow or with valve shut Flow does not match set point within specifications IM 83 84 86 H Possible Cause Pressure differential too great Motor coupling set screws loose Valve motor failure Limit switch out of adjustment or bro ken Microprocessor failed Contaminant blocking valve Motor fuse blown Inlet filter screen clogged Defective sensor Q1 shorted U10 failed Insufficient pressure differential Solution Reduce pressure Tighten set screws Replace motor Adjust or replace switch Replace microprocessor Remove blockage Replace 1 amp fast blow fuse on motor valve board Clean or replace screen Return to factory for replacement Replace with same type p
67. te that the K factors relative to nitrogen must be used in each case Example 3 We want a transducer to be calibrated for use with dichlorosilane SiH Cl1 at a 100 sccm full scale flow We wish to use the pre ferred reference gas Freon 14 CF What flow of CF must we generate to do the calibration Qsinzc2 Qcr4 K SiH2CL2 K CF4 100 Q cr 0 869 Qo 100 0 869 115 sccm A 5 Appendix A A 6 Series 830 840 860 Instruction Manual Calculating Dual Gas Mixtures Equation 6 is used for gas mixtures but we must calculate N pC for the mixture The equivalent values of p C and N for a dual gas mixture are given as follows The equivalent gas density is P thy thy P thy thp P gt Where e Mr m m Total mass flow rate gm min Refers to gas 1 and Refers to gas 2 The equivalent specific heat is C F C F C Where F m P m7P and F m P myzP The equivalent value of N is N m mp N m mp N gt The equivalency relationships for p C and N for mixtures of more than two gases have a form similar to the dual gas relation ship given above IMPORTANT NOTE ABOUT K FACTORS Please note that if you have a transducer calibrated for a gas such as methane and wish to use the K factors to measure a gas such as air that the inaccuracy of the measurement can range from 5 to 10 The use of K factors is at best only a rough approximation and should not b
68. ure detector RTD coils around the sensor tube direct a constant amount of heat H into the gas stream In ac tual operation the gas mass flow carries heat from the upstream coil to the downstream coil The resulting temperature difference AT is detected by the RTD coils Tube Ho L Constant Heat H pen First Law of Thermodynamics Heat IN Heat OUT H m Cp T2 T1 Ho _H Hy m CAT Figure 1 2 Flow Measuring Principle 1 4 IM 83 84 86 H Series 830 840 860 Instruction Manual Chapter 1 Introduction IM 83 84 86 H Wy Ta ZN Sensor Tube Figure 1 3 Sensor Temperature Distribution Figures 1 2 and 1 3 show the mass flow through the sensor tube as inversely proportional to the temperature difference of the coils The coils are legs of a bridge circuit with an output voltage in direct pro portion to the difference in the coils resistance the result is the tem perature difference AT Two other parameters heat input H and coefficient of specific heat Cp are both constant The resulting out put is nearly linear over the transducer s normal operating range Linear range AT 0 me oo Figure 1 4 Linear Range of the Transducer s Output Signal For mass flow controllers once the gas flows through the monitor ing section it is then controlled by the built in servo control valve For flows up to 500 slpm Sierra s proprietary h

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