Technical Note H811T00011
Contents
1. REZO NANO ROSITIONING Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws www pi ws SSS 2 sa Page 12 25 PI 2014 05 26 H811T0011 valid for H 811 S11 Command Descriptions for Digital I O DIO Set Digital Output Line Description Switches the specified digital output line s to specified state s Format DIO lt DIOID gt lt OutputOn gt Arguments lt DIOID gt is one digital output line of the controller see below for details lt OutputOn gt is the state of the digital output line see below for details Response none Notes Using the DIO command with the H 811 S11 Hexapod system you can activate deactivate digital output lines 1 to 8 which are located on the I O interface The lt DIOID gt identifiers to use for the lines are 1 to 8 If lt OutputOn gt 1 the line is set to HIGH ON if lt OutputOn gt 0 it is set to LOW OFF DIO Get Digital Input Lines Description Gets the states of the specified digital input lines Format DIO lt DIOID gt Arguments lt DIOID gt is the identifier of the digital input line see below for details Response lt DIOID gt lt InputOn gt LF where lt InputOn gt indicates the state of the digital input line see below for details Notes With the H 811 S11 Hexapod system you can use the DIO command to directly read digital input lines 1 to 8 which are located on the I O interface The lt2. individual output cycles of the waveform Keep in mind that wave generator output will continue even if the terminal or the program from which it was started is quit The 9 single character command p 13 can be used to query the current activation state of the wave generators The reply shows if a wave generator is running or not but does not contain any information about the wave generator start mode With WGO you can ask for the wave generator start modes WGO settings while the wave generator is active Format WGO lt WaveGenlD gt lt StartMode gt Arguments lt WaveGenID gt is the wave generator identifier lt StartMode gt is the start mode for the specified wave generator In the WGO command you supply the start mode in hex or decimal format More than one start mode can be set at a time as hexadecimal sum using a single WGO command When no bits are set lt StartMode gt 0 there is no wave generator output for all axes Physik Instrumente PI GmbH amp Co KG_Auf der Roemerstrasse 1_76228 Karlsruhe Germany PEZO NAND ROSITIONINS Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws www pi ws e a Se Page 19 25 PI 2014 05 26 H811T0011 valid for H 811 S11 Note that bit 3 cannot start the wave generator output by itself It simply specifies a certain start option and must always be combined with one of the start modes specified in bit O 0x1 or 1 or bit 1 0x2 or 2
3. info pi ws www pi ws a a Page 4 25 PI 2014 05 26 H811T0011 valid for H 811 S11 In Wave Generator Examples p 7 and Macro Examples for Wave Generator Operation p 10 you will learn how to use the wave generator and Wave Generator Related Commands and Parameters p 5 gives an overview Specific Wave Generator Details of H 811 S11 System When the wave generator output is active no move command and no macro containing a move command for any axis is allowed Note that when you address one wave generator using a WTR or WGC command all other wave generators are addressed simultaneously Since the motion of the moving platform always involves all axes of the Hexapod the WGO command always starts the output of all wave generators irrespective of the wave generator given in the command Wave generators which are not connected to a wave table will output the last valid target position Since the controller card can be working to full capacity when the wave generator is running we recommend not to use the data recorder simultaneously The frequency of the sinusoidal motion that can be performed by a Hexapod depends on the following items The axis to be moved Current pivot point coordinates Amplitude of the sinusoidal motion For example the following table contains recommended maximum frequencies for the V axis for pivot point coordinates 0 0 0 Amplitude pp Frequenc
4. provides several start modes e g Start wave generator output triggered by external signal WGO p 20 Get Wave Generator Start Stop Gets the start modes while the wave generator is active Mode WSL p 20 Set Connection Of Wave table Must be set before the wave generator can be started To Wave Generator WSL p 21 Get Connection Of Wave table To Wave Generator Set Wave Generator Table Rate Sets the value of the wave generator table rate in volatile memory determines the interpolation type for wave table rate values gt 1 WTR p 23 Get Wave Generator Table Gets the value of the wave generator table rate from volatile Rate memory and the current interpolation type WTR p 21 9 p 13 Get Wave Generator Status Gets the current activation status of the wave generator but not the current start modes use WGO instead For detailed command descriptions see Command Descriptions for Wave Generator p 13 For the identifiers of the items which can be addressed with the commands see Commandable Items p 4 Parameter ID Command Item Type Max No of Data Parameter Level Concerned Items Type Description 0x13000004 3 System 1 INT Max Wave Points This parameter can queried using the SPA command as it is described in the user manual of the C 887 Hexapod controller Physik Instrumente PI GmbH amp Co KG_Auf der Roemerstrasse 1_76228 Karlsruhe Germany REZO NANO ROSI
5. the command is sent for wave generator 1 all wave generators are stopped Command String to Send Action Performed WAV 1X PNT 110 Set the first point in wave table 1 to target position 0 see WAV description for details WAV 1 amp sin_p 20 0 05 0 025 20 5 10 Define a sine waveform for wave table 1 will be concatenated to the first point 1 which was written before see WAV description for details WSL 3 1 Connect the wave generator 3 Z axis to wave table 1 WGC 3 100 Limit the number of output cycles for wave generator 3 to 100 cycles The setting will be valid for all wave generators WGO 3 1 Start wave generator output immediately synchronized by servo cycles Although the command is sent for wave generator 3 all wave generators are started All wave generator output automatically stops after 100 cycles Physik Instrumente PI GmbH amp Co KG_Auf der Roemerstrasse 1_76228 Karlsruhe Germany HEZO NANO ROSITIONING Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws www pi ws SS a Page 7 25 PI 2014 05 26 H811T0011 valid for H 811 S11 Wave Generator Examples Defining Wave Forms Examples for how to define waveform segments for the wave tables based on predefined curve shapes each WAV command defines a waveform segment which either replaces or is appended to the waveform in the specified wave table Sine curves WAV command Comments Wavef
6. wave table 2 the segment length and hence the number of points in the wave table is 2000 WTR Ask for the current wave table rate WTR value and interpolation settings default is wave table rate 1 i e each wave table point will be output for a duration of one servo cycle The duration of one wave generator output cycle will be Servo Cycle Time in s WTR value Number of Points Output Duration in s 0 0006 s 1 2000 1 2 s WTR131 Set the wave table rate to 3 tripling the duration of one wave generator output cycle with linear interpolation each wave table point will now occupy 3 servo cycles but with linear interpolation of the output value applied to smoothen the output Duration of one output cycle will now be 0 0006 s 3 2000 3 6 s Note that WTR specifies the wave table rate for all wave generators in the system irrespective of the wave generator ID given in the command 1 in this example Trigger Output Synchronized with Wave Generator Trigger output on digital output line 1 is generated as a sequence of pulses The trigger output starts when the first point of the waveform is output by the wave generator and runs as long as a wave generator is running The pulse width is one servo cycle and the time between pulses is also one servo cycle i e the output line toggles between HIGH and LOW synchronized with the servo cycles An example for how to generate trigger pulses synchroni
7. 8 HexapOd c 2ccicctecteieessdivtievtets viet enced 25 Physik Instrumente PI GmbH amp Co KG_Auf der Roemerstrasse 1_76228 Karlsruhe Germany Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws www pi ws PIEZO NANO POSITIONING Page 2 25 PI 2014 05 26 H811T0011 valid for H 811 S11 System Description The H 811 S11 Hexapod system consists of the following items H811B0018 Hexapod C887B0026 Hexapod controller The H811B0018 Hexapod is based on the H 811 D1 Hexapod as it is described in the MS199E user manual The delivered C887B0026 controller is based on the C 887 11 controller as it is described in the MS204E user manual The delivered Hexapod system differs from the standard Hexapod and standard controller in featuring the following items Servo cycle time of 0 6 ms The servo cycle time of the H 811 S11 Hexapod system s firmware allows to update position values in intervals of 0 6 ms An interface for digital I O lines and the related commands DIO and DIO p 2 A firmware that provides the wave generator functionality with several related commands p 3 p 5 Minimum incremental motion of 1 um of the Hexapod axes p 25 Digital I O Lines The digital I O lines of the Hexapod controller are available on the I O interface See Pin Assignment of I O Interface of Hexapod Controller p 24 for the lines and pinout You can set the states of output line 1 to output line 8 TTL act
8. DIOID gt identifiers to use for the lines are 1 to 8 If lt InputOn gt 1 the digital input is LOW OFF if lt InpbutOn gt 0 the digital input is HIGH ON Physik Instrumente PI GmbH amp Co KG_Auf der Roemerstrasse 1_76228 Karlsruhe Germany REZO NANO ROSITIONING Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws www pi ws a a Page 13 25 PI 2014 05 26 H811T0011 valid for H 811 S11 Command Descriptions for Wave Generator 9 Get Wave Generator Status Description Requests the status of the wave generator s The 9 single character command can be used to query the current activation state of the wave generators The reply shows if a wave generator is running or not but does not contain any information about the wave generator start mode With WGO you can ask for the current wave generator start modes while the wave generator is active WGO settings p 18 Format 9 single ASCII character number 9 Arguments none Response The answer lt uint gt is bit mapped and returned as the hexadecimal sum of the following codes 1 Wave Generator 1 is running 2 Wave Generator 2 is running 4 Wave Generator 3 is running etc Examples 0 indicates that no wave generator is running 5 indicates that wave generators 1 and 3 are running GWD Get Wave Table Data Description Query waveform shape for given wave table Depending on the waveform definitio
9. EZO NAND ROSITIONINGS Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws www pi ws SS sa Page 3 25 PI 2014 05 26 H811T0011 valid for H 811 S11 Wave Generator Basic Information Each axis can be controlled by a wave generator which outputs user specified patterns so called waveforms The wave generator functionality helps to avoid delays due to communication issues A waveform stored to the controller s volatile memory ensures that the time intervals are observed The waveforms to be output are stored in wave tables in the controller s volatile memory one waveform per wave table Waveforms can be created based on predefined curve shapes This can be a sinusoidal or an arbitrary user defined curve shape The Hexapod controller has 100 wave tables for creating and temporarily storing arbitrary waveforms identifiers are 1 to 100 A wave table can be filled with up to 1 000 000 data points A macro can be used to fill the wave tables see p 10 for an example and the MS204E user manual for macro handling The assignment of wave generators and axes to each other is fixed the wave generators 1 to 6 are assigned to the Hexapod axes as given in the table below Axis Wave generator ID lt c N lt x O o KR ow Pp The available wave tables can be flexibly assigned to the wave generators and hence to the axes using the WSL command p 20 A wave tab
10. See the examples below The start mode values in detail 0 decimal format no bits are set there is no wave generator output for the associated axis and any Hexapod motion due to a wave generator output is stopped bit O 0x1 hex format or 1 decimal format start wave generator output synchronized by servo cycle bit 1 0x2 hex format or 2 decimal format start wave generator output triggered by digital input line 1 synchronized by servo cycle NOTE the external signal must have a width of more than 1 ms The wave generator output starts only with the first rising edge which is detected on this input line When a trigger pulse is sent while the wave generator is running the pulse is ignored bit 3 0x3 hex format or 8 decimal format start trigger output on digital output line 1 start option Trigger output on digital output line 1 is generated as a sequence of pulses The trigger output starts when the first point of the waveform is output by the wave generator and runs as long as a wave generator is running The pulse width is one servo cycle and the time between pulses is also one servo cycle i e the output line toggles between HIGH and LOW synchronized with the servo cycles Example Start options bit 1 and bit 3 are set simultaneously Output of wave generators 3 is started triggered by digital input line 1 All other wave generators are started simultaneously In addition a sequence of pulses is output o
11. TIONINGS Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws www pi ws F Page 6 25 PI 2014 05 26 H811T0011 valid for H 811 S11 Basic Operation 1 Define the waveform segment by segment using the WAV command The waveform will be written to the selected wave table 2 Connect the wave generator to the wave table using the WSL command 3 Optional Set the number of output cycles for the wave generator using the WGC command 4 Start the wave generator output and hence the motion of the axis using the WGO command You can choose several start modes e g start by external trigger see the description of the WGO command p 18 for more information 5 Stop the wave generator output with WGO or 24 or STP If the number of output cycles was limited with WGC the output will stop automatically after the given number of cycles Simple examples for your first steps using the command entry facilities of PIMikroMove or PlTerminal Command String to Send Action Performed WAV 4 X SIN_P 2000 20 10 2000 0 1000 Define a sine waveform for wave table 4 see WAV description for details WSL 1 4 Connect the wave generator 1 X axis to wave table 4 WGO 1 1 Start wave generator output immediately synchronized by servo cycles Although the command is sent for wave generator 1 all wave generators are started WGO 1 0 Stop wave generator output and hence the corresponding Hexapod motion Although
12. Technical Note PI KSch 2014 05 26 H811T0011 valid for H 811 S11 H 811 S11 Hexapod System with Wave Generator Functionality Contents System Description cores sazettcereventsleauausitra akee aa a Ea A A RENEE ENEE aaa E aa e esc A PENANTE ERa 2 Digitall O LMG GS sia coal ee E Ee AEE E e E a REE EE EA 2 Wave Generator smeed ae se ee ete ee eee eee ees 3 Basie Informia ti ri se rea eaa e aa E aE a E ee ee ee ee 3 Specific Wave Generator Details of H 811 S11 System sssssssessseessesenrrnneneseerenrrnnnnnserrrrnrnnne 4 Commandable MEMS scunencrsincorsdsienontsataverstemusant e a sukawatehs toners e Ea TAEA ERAGE REA E SENERE 4 Wave Generator Related Commands and Parameters ssessseseeernreeesserentrrnrrsssrrrnnrnnnernnneseet 5 Basic Op ratiO Ms serden eee rp er era r eee a eee eee 6 Wave Generator Examples cccxtiesccat aa Oras eerccat nee cre cds antenna etn endettdendnadten a etran eee ee Grnsceaumeat oes 7 Macro Examples for Wave Generator Operation ccccceeeeeceeceeeeeeeeeeeeeeeeeaeeeeeeeeeeeeeeteaeaaaees 10 Command Descriptions for Digital YO ssaciccedsascectsvudcstecnotgectdnaidundluoteendsaanexiaveryadiebidneieemaaeecnieebacts 12 Command Descriptions for Wave Generator cccceeeeeeeeeeeneeeeeeeeeeeeeeeceaaeeeeeeeeeeeeeeeeaeaaaaeeeeeeees 13 Pin Assignment of I O Interface of Hexapod Controller ccccccceeceeeeeeeeeeeeeeeeenneeeeeeeeeeeeeeenneaaees 24 Technical Data of H811B001
13. The defined segment will be appended to the existing wave table contents WAV 3 X SIN_P 4000 20 0 4000 0 3100 lt Wave tablelD gt 3 lt AppendWave gt X asymmetric curve Q lt WaveType gt SIN_P lt SegLength gt 4000 lt Amp gt 20 amp lt Offset gt 0 lt WaveLength gt 4000 lt StartPoint gt 0 lt CurveCenterPoint gt 3100 WAV 2 X SIN_P 1000 30 45 1000 0 500 lt Wave tablelD gt 2 lt AppendWave gt X lt WaveType gt SIN_P lt SegLength gt 1000 lt Amp gt 30 lt Offset gt 45 lt WaveLength gt 1000 lt StartPoint gt 0 lt CurveCenterPoint gt 500 The previous contents of the wave table are overwritten by the new segment The previous contents of the wave table are overwritten by the new segment negative amplitude curve symmetric curve Amplitude Segment length Wave length Curve center point Segment length Wave length Physik Instrumente PI GmbH amp Co KG_Auf der Roemerstrasse 1_76228 Karlsruhe Germany Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws www pi ws PIEZO NANO POSITIONING Page 9 25 PI 2014 05 26 H811T0011 valid for H 811 S11 Modifying the Wave Generator Table Rate An example for how to modify the duration of the wave generator output using the wave table rate Command String to Send Action Performed WAV 2 X SIN_P 2000 20 10 2000 0 1000 Define a sine waveform for
14. e memory The WTR value is always valid for the whole system and cannot be set separately for individual wave generators The WTR value can be read with the WTR command p 23 WTR also sets the type of interpolation to use for the wave generator output If the WTR value is larger than 1 interpolation helps to avoid sudden position jumps of an axis controlled by the wave generator NOTE Interpolation is applied during the wave generator output not inside of the wave tables Without interpolation the value of one wave table point will be output for the number of servo cycles determined with WTR This may cause position jumps especially with larger output durations of the individual wave table points With interpolation the value of one wave table point will be adapted during the output to avoid position jumps Physik Instrumente PI GmbH amp Co KG_Auf der Roemerstrasse 1_76228 Karlsruhe Germany PEZO NAND POSITIONING Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws www pi ws e a l Page 22 25 Pp I 2014 05 26 H811T0011 valid for H 811 S11 For more information see Wave Generator p 3 An application example can be found in Modifying the Wave Generator Table Rate p 9 Format WTR lt WaveGenID gt lt Wave tableRate gt lt InterpolationType gt Arguments lt WaveGenlID gt is the wave generator identifier When you select one wave generator using WTR all other wave gene
15. ere Servo Cycle Time 0 6 ms WTR value i e wave table rate gives the number of servo cycles the output of a waveform point lasts default is 1 Number of Points is the length of the wave table which is the sum of the lengths of all segments in this table For more information see Wave Generator p 3 Format WAV lt Wave tablelD gt lt AppendWave gt lt WaveType gt lt WaveTypeParameters gt Arguments lt Wave tablelD gt is the wave table identifier lt AppendWave gt This can be X or amp X clears the wave table and starts writing with the first point in the table amp appends the defined segment to the already existing wave table contents i e concatenates a segment to lengthen the waveform lt WaveType gt The type of curve used to define the segment This can be one of PNT user defined curve or SIN_P inverted cosine curve lt WaveTypeParameters gt stands for the parameters of the curve and can be as follows For PNT lt WaveStartPoint gt lt WaveLength gt lt WavePoint gt lt WaveStartPoint gt The index of the starting point Must be 1 lt WaveLength gt The number of curve points which will be written to the wave table segment length lt WavePoint gt The value of one single point Physik Instrumente PI GmbH amp Co KG_Auf der Roemerstrasse 1_76228 Karlsruhe Germany REZO NAND ROSITIONINGS Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail
16. hone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws www pi ws PIEZO NANO POSITIONING Page 17 25 PI 2014 05 26 H811T0011 valid for H 811 S11 Arguments lt Wave tablelD gt is the wave table identifier lt WaveParameterID gt is the wave parameter ID 1 current wave table length in number of points Response lt Wave tablelD gt lt WaveParameterlD gt lt float gt LF where lt float gt depends on the lt WaveParameter ID gt gives the current number of waveform points in the wave table for lt WaveParameterID gt 1 Troubleshooting Invalid wave table identifier WGC Set Number Of Wave Generator Cycles Description Sets the number of output cycles for the given wave generator the output itself is started with WGO p 18 The generator will be stopped when the number of cycles given by WGC are completed irrespective of any further trigger pulses With the Hexapod system you address all wave generators simultaneously when you address any single wave generator For more information see Wave Generator p 3 Format WGC lt WaveGenlD gt lt Cycles gt Arguments lt WaveGenID gt is the wave generator identifier lt Cycles gt is the number of wave generator output cycles If cycles 0 then the waveform is output without period limitation until it is stopped by WGO p 18 or 24 or STP see user manual of the C 887 Hexapod controller
17. ible to apply start signals for the wave generator output An example for how to start the wave generator by external trigger signals Command String to Send Action Performed WAV 2 X SIN_P 2000 20 10 2000 0 1000 Define a sine waveform for wave table 2 the segment length and hence the number of points in the wave table is 2000 WSL 1 2 Connect wave generator 1 X axis to wave table 2 WGO 1 2 Start output of wave generator 1 triggered by external signal To provide an external signal the digital input line 1 can be used Although the command is sent for wave generator 1 all wave generators will be started by the trigger WGO 1 0 Stop output of wave generator 1 any further trigger pulses will be ignored and any Hexapod motion due to a wave generator output You can also use 24 or STP Although the command is sent for wave generator 1 all wave generators are stopped Macro Examples for Wave Generator Operation Macro uvdata Macro uvdata defines waveforms for wave tables 1 and 2 The waveforms are intended to be used for axes U and V see macro start INFORMATION For clarity only a single position is defined per command line in the example given below However to allow for quicker processing of the macro we recommend to define several positions per command line 6 positions with 6 decimal places per command line are possible Physik Instrumente PI GmbH amp Co KG_Auf der Roemers
18. info pi ws www pi ws a Page 16 25 Pp I 2014 05 26 H811T0011 valid for H 811 S11 For SIN_P lt SegLength gt lt Amp gt lt Offset gt lt WaveLength gt lt StartPoint gt lt CurveCenterPoint gt lt SegLength gt The length of the wave table segment in points Only the number of points given by lt SegLength gt will be written to the wave table lt Amp gt The amplitude of the sine curve lt Offset gt The offset of the sine curve lt WaveLength gt The length of the sine curve in points lt StartPoint gt The index of the starting point of the sine curve in the segment Gives the phase shift Lowest possible value is 0 lt CurveCenterPoint gt The index of the center point of the sine curve Determines if the curve is symmetrical or not Lowest possible value is 0 Example for more examples see Defining Wave Forms p 7 v pej 2 E lt Segment length Wave length Response None Troubleshooting Invalid wave table identifier The total number of points for the waveform which may consist of several segments exceeds the available number of memory points WAV Get Waveform Definition Description Get the value of a wave parameter for a given wave table For more information see Wave Generator p 3 Format WAV lt Wave tablelD gt lt WaveParameterID gt Physik Instrumente PI GmbH amp Co KG_Auf der Roemerstrasse 1_76228 Karlsruhe Germany P
19. ive high using the DIO command p 12 e g to trigger other devices The lines can be set individually or all at once according to a bit pattern The states of input line 1 to input line 8 TTL active low can be queried with the DIO command p 12 These lines can be used to stop macros and to trigger certain actions in macros via the MEX command or the WAC command respectively see user manual of the C 887 Hexapod controller For more information refer to Controller Macros in the user manual of the controller Digital I O lines can also be used in conjunction with the wave generator WGO command p 18 Digital input line 1 of the Hexapod controller can be used to start the controller s integrated wave generator Digital output line 1 can be used to output pulses as long as a wave generator is running The output line toggles between HIGH and LOW synchronized with the servo cycles See Trigger Output Synchronized with Wave Generator p 9 and Wave Generator Started by Trigger Input p 10 for application examples INFORMATION To use the digital I O lines to stop the wave generator you can use a macro that performs the following steps Querying the state of the digital input line 1 with DIO Setting the condition that if the digital input line 1 is set high a WGO command is sent to switch off the wave generator Physik Instrumente PI GmbH amp Co KG_Auf der Roemerstrasse 1_76228 Karlsruhe Germany R
20. le can be used by multiple wave generators at the same time A certain amount of the controller s memory space is reserved for the waveform data ask with the SPA command parameter ID 0x13000004 The Hexapod controller provides 1 000 000 data points for waveform definition This memory space is temporarily allocated to the individual wave tables during the waveform definition The interval between two data points equals the product of servo cycle time 0 6 ms and the wave table rate value set by the WTR command p 21 A maximum wave table rate value of 1 000 is possible resulting in a duration of 0 6 s for output of a single waveform point At present the same wave table rate value must be set for all wave generators When the wave generator is started it outputs the waveform repeatedly until it is stopped Using the WGC command p 17 you can set how often a waveform is output Programmable digital input line 1 and output line 1 facilitate synchronization of external events For start mode settings see WGO command description p 18 After you sent the waveform definition to the wave table with WAV it is always a good idea to check it by reading back the waveform sequence from the controller before actually outputting it This can be done by the GWD command p 13 Physik Instrumente PI GmbH amp Co KG_Auf der Roemerstrasse 1_76228 Karlsruhe Germany REZO NAND FOSITIONINS Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail
21. lt WaveGenID gt is the wave generator identifier Response None Example WGC configures the wave generator 3 and thus all other wave generators simultaneously to output its waveform twice WGC 32 Physik Instrumente PI GmbH amp Co KG_Auf der Roemerstrasse 1_76228 Karlsruhe Germany REZO NANO ROSITIONING Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws www pi ws SSS 2 sa Page 18 25 PI 2014 05 26 H811T0011 valid for H 811 S11 WGC Get Number Of Wave Generator Cycles Description Gets the number of output cycles set for the given wave generator For more information see Wave Generator p 3 Format WGC lt WaveGenID gt Arguments lt WaveGenID gt is the wave generator identifier Response lt WaveGenlD gt lt Cycles gt LF where lt Cycles gt is the number of wave generator output cycles set with WGC p 17 WGO Set Wave Generator Start Stop Mode Description Start and stop all wave generators in the given mode Since the motion of the moving platform always involves all axes of the Hexapod the WGO command always starts the output of all wave generators irrespective of the wave generator given in the command Wave generators which are not connected to a wave table will output the last valid target position The number of output cycles can be limited by WGC p 17 Using the WTR command p 21 you can lengthen the
22. n digital output line 1 as long as the wave generator is running WGO 3 10 Response None Troubleshooting Invalid wave generator identifier There is no wave table connected to any wave generator Use WSL p 20 to connect a wave table Wave generator output and move commands When the wave generator output is active no move command and no macro containing a move comand for any axis is allowed Notes All waveform output is synchronized because there is a common pulse generator used by all wave generators For that reason wave tables which are supposed to run at the same time each with one wave generator must have the same length Otherwise the wave generator cannot be started Physik Instrumente PI GmbH amp Co KG_Auf der Roemerstrasse 1_76228 Karlsruhe Germany MEZO NANO POSITIONING Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws www pi ws SSS l Page 20 25 pP I 2014 05 26 H811T0011 valid for H 811 S11 WGO Get Wave Generator Start Stop Mode Description Gets the start modes of the given wave generator while the wave generator is active WGO settings p 18 Note that when the wave generator output is finished or when it was stopped by 24 or STP see user manual of the C 887 Hexapod controller the response to WGO is 0 The 9 single character command p 13 can be used to query the current activation state of the wave generators The reply shows if a wa
23. n with WAV p 14 the wave tables may have different lengths Due to the GCS array response format definition it is not possible to read from tables of different lengths with one command line Format If the length of the wave tables differs only tables with identical length can be read with the same command GWD lt StartPoint gt lt NumberOfPoints gt lt WaveTablelD gt If all wave tables have the same length arguments are optional as follows GWD lt StartPoint gt lt NumberOfPoints gt lt WaveTablelD gt Arguments lt StartPoint gt is the start point in the wave table starts with index 1 lt NumberOfPoints gt is the number of points to be read per table lt WaveTablelD gt is one wave table of the controller Response The wave table contents waveform in GCS array format see the separate manual for the GCS array SM 146E and the example below Example wav 1 x pnt 1512345 Physik Instrumente PI GmbH amp Co KG_Auf der Roemerstrasse 1_76228 Karlsruhe Germany REZO NANO ROSITIONING Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws www pi ws e a a a Page 14 25 PI 2014 05 26 H811T0011 valid for H 811 S11 gwd TYPE 1 SEPARATOR 32 DI I SAMPLE_RATE 0 006000 NDATA 5 NAMEO Wave table 1 END_HEADER OW as GW Ny 4 WAV Set Waveform Defini
24. orm Segment WAV 2 X SIN_P 2000 20 10 2000 0 1000 lt Wave tablelD gt 2 lt AppendWave gt X lt WaveType gt SIN_P lt SegLength gt 2000 lt Amp gt 20 lt Offset gt 10 lt WaveLength gt 2000 lt StartPoint gt 0 lt CurveCenterPoint gt 1000 The previous contents of the wave table are overwritten by the new segment waveform offset 10 symmetric curve Amplitude WAV 2 X SIN_P 2000 30 0 2000 499 1000 lt Wave tablelD gt 2 lt AppendWave gt X lt WaveType gt SIN_P lt SegLength gt 2000 lt Amp gt 30 lt Offset gt 0 lt WaveLength gt 2000 lt StartPoint gt 499 lt CurveCenterPoint gt 1000 Physik Instrumente PI GmbH amp Co KG_Auf der Roemerstrasse 1_76228 Karlsruhe Germany The previous contents of the wave table are overwritten by the new segment symmetric curve Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws www pi ws center point Amplitude Start point Segment length Wave length PIEZO NANO POSITIONING Page 8 25 Pp I 2014 05 26 H811T0011 valid for H 811 S11 WAV command Comments Waveform Segment WAV 2 amp SIN_P 2000 25 0 1800 100 900 lt Wave tablelD gt 2 lt AppendWave gt amp symmetric curve v lt WaveType gt SIN_P lt SegLength gt 2000 lt Amp gt 25 lt Offset gt 0 lt WaveLength gt 1800 lt StartPoint gt 100 lt CurveCenterPoint gt 900
25. r Table Rate Description Gets the current wave generator table rate i e the number of servo loop cycles used by the wave generator to output one waveform point Gets also the interpolation type used with table rate values gt 1 For more information see Wave Generator p 3 An application example can be found in Modifying the Wave Generator Table Rate p 9 Format WTR lt WaveGenID gt Arguments lt WaveGenlID gt is the wave generator identifier Note that all wave generators use the same wave table rate Response lt WaveGenlD gt lt Wave tableRate gt lt InterpolationT ype gt LF where lt Wave tableRate gt is the table rate used for wave generator output unit number of servo loop cycles lt InterpolationType gt interpolation type applied to outputs between wave table points when a wave generator table rate higher than 1 is set 0 no interpolation 1 straight line Physik Instrumente PI GmbH amp Co KG_Auf der Roemerstrasse 1_76228 Karlsruhe Germany REZO NANO ROSITIONINGS Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws www pi ws e a Se Page 24 25 pP I 2014 05 26 H811T0011 valid for H 811 S11 Pin Assignment of I O Interface of Hexapod Controller p 5 A e HEXAPOD a sf o lt f w lt n w gt z gt 2x 24VDC POWER OUT Figure 1 Rear view of the Hexapod controller 13 1 a desesee
26. rators are addressed simultaneously lt Wave tableRate gt is the table rate to be used for wave generator output unit number of servo loop cycles must be an integer value larger than zero lt InterpolationType gt When a wave generator table rate higher than 1 is set this option can be used to apply interpolation to the wave generator output between wave table points The following interpolation types can be selected 0 no interpolation 1 straight line default Examples Interpolation type straight line default The wave table rate of wave generator 5 is set to 3 and thus for all other wave generators applying interpolation type 1 WTR531 Wave generator Xn value of wave table point n output n interpolated value for x 2 wave table point n Wave table rate here 3 Servo cycles Physik Instrumente PI GmbH amp Co KG_Auf der Roemerstrasse 1_76228 Karlsruhe Germany MEZD NANO ROSITIONING Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws www pi ws 2 sa Page 23 25 Pp I 2014 05 26 H811T0011 valid for H 811 S11 Interpolation type no interpolation The wave table rate of wave generator 5 is set to 3 and thus for all other wave generators without interpolation WTR530 Wave generator Xn value of wave table point n output Wave table rate here 3 Servo cycles Response None WTR Get Wave Generato
27. scescs O POCOCOOCOOCGCOG 25 14 Figure 2 Sub D25 socket at Hexapod controller Pn Fonon C e ome ep C Physik Instrumente PI GmbH amp Co KG_Auf der Roemerstrasse 1_76228 Karlsruhe Germany REZO NAND ROSITIONINS Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws www pi ws SSS 2 Se Page 25 25 Pp I 2014 05 26 H811T0011 valid for H 811 S11 po p wfo Co Input 3 m monte C a Not connected 2 owwe oma Output 7 Not connected Technical Data of H811B0018 Hexapod The H811B0018 differs from the standard Hexapod in the following technical data H811B0018 Unit Tolerance Active axes X Y Z Ox By z Motion and positioning Single actuator design resolution 80 nm Min incremental motion X Y 1 um typ Min incremental motion Z 0 5 um typ Min incremental motion Ox Oy z A urad typ Backlash X Y 2 um typ Backlash Z 0 5 um typ Backlash Ox 8y 20 urad typ Backlash 8z 30 urad typ Max velocity X Y Z 25 mm s Max velocity Ox y z 625 mrad s Typ velocity X Y Z 10 mm s Typ velocity Ox y z 250 mrad s Max actuator strut velocity X Y Z 25 mm s Mechanical properties Load base plate horizontal any orientation 3 1 kg max Physik Instrumente PI GmbH amp Co KG_Auf der Roemerstrasse 1_76228 Karlsruhe Germany MEZD NANO ROSITIONING Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws www pi ws SSS 2
28. tion Description Define waveform of given type for given wave table To allow for flexible definition a waveform wave table contents can be built up by adding segments Each segment is defined with a separate WAV command To add a segment the lt AppendWave gt argument see below is used to concatenate the new segment to the existing wave table contents To change individual segments later or to modify their order the complete waveform must be recreated segment by segment A segment can be based on predefined curve shapes see the lt WaveType gt argument below Waveforms cannot be changed while they are being output by a wave generator If you want to modify a waveform with WAV first stop any wave generator output from the associated wave table The waveform values are absolute values Physik Instrumente PI GmbH amp Co KG_Auf der Roemerstrasse 1_76228 Karlsruhe Germany REZO NANO ROSITIONING Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws www pi ws a a Page 15 25 PI 2014 05 26 H811T0011 valid for H 811 S11 The frequency of the wave generator output depends among other factors on the wave table length When you create waveforms keep in mind that the usable frequency is limited by the capability of the Hexapod mechanics The duration of one output cycle for the waveform can be calculated as follows Output Duration Servo Cycle Time WTR value Number of Points wh
29. trasse 1_76228 Karlsruhe Germany REZO NAND FOSITIONING Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws www pi ws a F Page 11 25 PI 2014 05 26 H811T0011 valid for H 811 S11 Command lines WAV 1X PNT 110 WAV 1 amp PNT 1 1 5 65462531935645E 06 WAV 1 amp PNT 1 1 3 09100495175123E 05 WAV 1 amp PNT 1 1 0 000148233661 92662 WAV 2 X PNT 1 10 WAV 2 amp PNT 1 1 4 74244418938712E 06 WAV 2 amp PNT 1 1 3 02735241470474E 05 WAV 2 amp PNT 1 1 0 000257643502699756 Macro start Macro start performs the following steps 1 Macro start starts macro uvdata which is used for defining waveforms for wave tables 1 and 2 2 Connects wave tables 1 and 2 with wave generator 4 for U axis and wave generator 5 for V axis using the WSL command 3 Sets the output duration of one wave table point to 5 x 0 6 ms using the WTR command Defines that the waveforms are output a 100 times using the WGC command Starts all wave generators using the WGO command Command lines MAC START uvdata WSL 4152 WTR 151 WGC 1 100 WGO 1 1 INFORMATION If macro start is to be used as start up macro it has to start the reference move of the Hexapod before the wave generator output is started In this case the following lines must also be part of macro start FRF X WAC FRF X 1 Physik Instrumente PI GmbH amp Co KG_Auf der Roemerstrasse 1_76228 Karlsruhe Germany
30. ve generator is running or not For more information see Wave Generator p 3 Format WGO lt WaveGenID gt Arguments lt WaveGenID gt is the wave generator identifier Response lt WaveGenlD gt lt StartMode gt LF where lt StartMode gt is the current start mode of the wave generator while the wave generator is active in decimal format The value may be the sum of several start modes See the WGO command description for details WSL Set Connection Of Wave table To Wave Generator Description Wave table selection connects a wave table to a wave generator or disconnects the selected generator from any wave table Two or more wave generators can be connected to the same wave table but a generator cannot be connected to more than one wave table As long as a wave generator is running it is not possible to change its wave table connection For more information see Wave Generator p 3 Format WSL lt WaveGenlD gt lt Wave tablelD gt Arguments lt WaveGenID gt is the wave generator identifier The wave generators are correlated to the axes 1 X 2 Y 6 W lt Wave tablelD gt is the wave table identifier If lt Wave tablelID gt 0 the selected generator is disconnected from any wave table Response None Physik Instrumente PI GmbH amp Co KG_Auf der Roemerstrasse 1_76228 Karlsruhe Germany REZO NANO ROSITIONING Phone 49 721 4846 0 Fa
31. x 49 721 4846 1019 E mail info pi ws www pi ws a a Page 21 25 PI 2014 05 26 H811T0011 valid for H 811 S11 WSL Get Connection Of Wave table To Wave Generator Description Get current wave table connection settings for the specified wave generator For more information see Wave Generator p 3 Format WSL lt WaveGenID gt Arguments lt WaveGenlID gt is the wave generator identifier Response lt WaveGenlD gt lt Wave tablelD gt LF where lt Wave tablelD gt is the wave table identifier If lt Wave tablelD gt 0 no wave table is connected to the wave generator WTR Set Wave Generator Table Rate Description Set wave generator table rate and interpolation type Using the WTR command you can lengthen the individual output cycles of the waveform The duration of one output cycle for the waveform can be calculated as follows Output Duration Servo Cycle Time WTR value Number of Points where Servo Cycle Time is 0 6 ms WTR value i e wave table rate gives the number of servo cycles the output of a waveform point lasts default and minimum value is 1 Maximum value is 1000 Number of Points is the length of the waveform i e the length of the wave table Maximum value is 1000000 Thus a maximum duration of one waveform cycle equals 0 6 ms x 1000 WTR value x 1000000 data points WTR sets the value of the wave generator table rate in volatil
32. y Hz 4 3 3 2 6 5 1 12 0 5 18 Motion which is started by the wave generator can be performed with a velocity which is higher than set by VLS but with a maximum velocity of 25 mm s for X Y Z Commandable Items Description Wave 1to6 Each wave generator is dedicated to one axis for axis assignment refer to generator Basic Information on p 3 Wave 100 1 to 100 The wave tables contain the data points of the waveform to be output The table controller has 100 wave tables with max 1 000 000 data points per table Physik Instrumente PI GmbH amp Co KG_Auf der Roemerstrasse 1_76228 Karlsruhe Germany REZO NANO ROSITIONING Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws www pi ws a a Page 5 25 PI 2014 05 26 H811T0011 valid for H 811 S11 Wave Generator Related Commands and Parameters eomma pm AO GWD p 13 Get Wave Table Data Should be used to check the waveform before the wave generator output is started WAV p 14 Set Waveform Definition A waveform must be defined before the wave generator output can be started WAV p 16 Get Waveform Definition Reads the current wave table length WGC p 17 Set Number Of Wave Generator If WGC is not used the wave generator must be stopped Cycles with WGO 24 or STP WGC p 18 Get Number Of Wave Generator Cycles WGO p 18 Set Wave Generator Start Stop The WGO command starts the wave generator output It
33. zed with the wave generator Command String to Send Action Performed WAV 2 X SIN_P 2000 20 10 2000 0 1000 Define a sine waveform for wave table 2 the segment length and hence the number of points in the wave table is 2000 WSL 1 2 Connect wave generator 1 X axis to wave table 2 WTR131 Set wave table rate value for wave generator 1 and thus for all wave generators to 3 Use straigth line as interpolation type WGO 1 9 Start mode 1 decimal format and start option 8 decimal format are combined in one command Start wave generator output immediately synchronized by servo cycle and start also the output of pulses on digital output line 1 synchronized by servo cycle Although the command is sent for wave generator 1 all wave generators are started Physik Instrumente PI GmbH amp Co KG_Auf der Roemerstrasse 1_76228 Karlsruhe Germany REZO NANO ROSITIONING Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws www pi ws e a Se Page 10 25 PI 2014 05 26 H811T0011 valid for H 811 S11 Command String to Send Action Performed WGO 1 0 Stop wave generator output and hence also the trigger output and any Hexapod motion due to a wave generator output You can also use 24 or STP Although the command is sent for wave generator 1 all wave generators are stopped Wave Generator Started by Trigger Input Using digital input line 1 of the Hexapod controller it is poss
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