10 - Brooks Instrument
Contents
1. 325 4 460 9 S110Z286 Fo Po Materials BMT 316 Stainless Steel ACLFE only CVA Hastelloy C ACLFE and Sintered DCA Monel R ACLFE and Sintered BMA Sintered 316 Stainless Steel Wire Mesh and Sintered NOTE For flow rates less than 8 sccm use the low flow plug P N 618 K 020 BMT in place of a restrictor assembly 4 12 Section 4 Maintenance Brooks Model 5860 THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Installation and Operation Manual Section 5 Parts List X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Brooks Model 5860 5 1 General When ordering parts please specify Brooks Serial Number Model Number Part Description Part Number Quantity Refer to Figure 5 1 and Tables 5 1 and 5 2 5 1 Section 5 Parts List Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG Brooks Model 58601 November 2008 5 2 Figure 5 1 Model 5860i Parts Drawing Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Table 5 1 Model 5860i Replacement Parts List Description Section 5 Parts List Brooks Model 5860 Part Number Flowmeter Body PC Board Assembly D Connector Sensor Assembly O ring Sensor Size 004 Backup Ring Sensor Screw Sensor Body Lock Washer Sensor 092Z2. E U OUTPUT VOLTAGE CVOLTS gt OUTPUT VOLTAGE VOLTS OUTPUT VOLTAGE VOLTS 2 i 8 1 2 I I DO e o FV ve G nm 9 4 Figure 3 4 Fast Response Adjustment Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Section 3 Operation Brooks Model 5860 Example What is the percent of full scale error when full scale is equal to 100 sccm Measured flow rate 50 0 sccm Indicated flow rate 48 5 sccm 48 5 50 Full Scale Error 100 1 5 h Calculate the TP2 correction voltage error recorded in step g x 0 450 volts Example Error 1 5 TP2 correction voltage 1 5 x 0 450 0 675 volts New TP2 voltage 0 volts 0 675 0 675 volts i Flow rate for a flow signal output of 100 5 000V Connect the DVM positive lead to TP2 and the negative lead to TP4 j Adjust the linearity potentiometer for an output equal to the new calculated TP2 voltage k Repeat steps d e f and g 1 If the error recorded in step g is less than 0 5 then the calibration procedure is complete 2 If the error is greater than 0 5 set the flow rate for a flow signal output of 100 5 000V Connect the DVM positive lead to TP2 linearity voltage and the negative lead to TP4 circuit common Calculate a new TP2 voltage as follows New Error Measured TP2 Recorded x 0 450V TP2 Voltage in step K Voltage Example Sensor error 0 7 Measured TP2 voltage
3. 0 567 volts TP2 correction 0 7 x 0 450 0 315 volts New TP2 correction 0 315 0 567 0 252 volts Adjust the linearity potentiometer for an output equal to the new TP2 voltage and then repeat steps f g and h Note The voltage at TP2 can range from 10 to 3 volts however it is recommended that this voltage stay between 2 5 and 2 5 volts for proper operation If the recommended voltage range is exceeded the desired accuracy and or signal stability may not be achieved If one of the limits is reached check the restrictor sizing Refer to Section 4 6 3 5 Section 3 Operation Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG Brooks Model 5860 November 2008 TEST POINTS SUBA INTATURE TP4 CIRCUIT COMMON TP3 VALVE VOLTAGE DATY S CONNECTOR TP LINEARITY VOLT TPI SENSOR VOLTAGE CLOCKWISE SPAN d DECR FLOW LINEARITY d INCR TP2 VOL ANTICIPATE INCR OVERSHOOT ZERO i DECR OUTPUT SENSOR wn e re CONNECTOR VALVE CONNECTOR Des N SS JUMPERS J3 amp J4 BLUE J3 J3 4 2 mA 2 mA DUTPU OUTPUT Not used for a 5860i 3 6 Figure 3 5 PC Board Jumper Location and Function Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 3 5 Response Flow Output Signal Section 3 Operation Brooks Model 5860 To achieve the proper response characteristics the response compensation circuit must be adjuste
4. Meters of 25mm or 1 inch or smaller are Sound Engineering Practice SEP ESD Electrostatic Discharge ACAUTION This instrument contains electronic components that are susceptible to damage by static electricity Proper handling procedures must be observed during the removal installation or other handling of circuit boards or devices Handling Procedure 1 Power to unit must be removed 2 Personnel must be grounded via a wrist strap or other safe suitable means before any printed circuit card or other internal device is installed removed or adjusted 3 Printed circuit cards must be transported in a conductive container Boards must not be removed from protective enclosure until immediately before installation Removed boards must immediately be placed in protective container for transport storage or return to factory Comments This instrument is not unique in its content of ESD electrostatic discharge sensitive components Most modern electronic designs contain components that utilize metal oxide technology NMOS SMOS etc Experience has proven that even small amounts of static electricity can damage or destroy these devices Damaged components even though they appear to function properly exhibit early failure Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Brooks Model 58601 Dear Customer We appreciate this opportunity to service your flow measurement and c
5. 2008 Italiano Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Oggetto Addendum al manuale di istruzioni Riferimento Certificazione CE dei misuratori termici di portata in massa Data E Gennaio 1996 Questa strumentazione elettrica ed elettronica prodotta da Brooks Instrument soggetta a marcatura CE ha superato con successo le prove richieste dalla direttiva per la Compatibilit Elettomagnetica Direttiva EMC 89 336 EEC E richiesta comunque una speciale attenzione nella scelta dei cavi di segnale da usarsi con la strumentazione soggetta a marchio CE Qualit dei cavi di segnale e dei relativi connettori Brooks fornisce cavi di elevata qualit che soddisfano le specifiche richieste dalla certificazione CE Se l utente intende usare propri cavi questi devono possedere una schermatura del 100 Iconnettori sia di tipo D che circolari devono possedere un guscio metallico Se esiste un passacavo esso deve essere metallico e fornito di fissaggio per lo schermo del cavo Loschermo del cavo deve essere collegato al guscio metallico in modo da schermarlo a 360 e questo vale per entrambe le estemit Lo schermo deve essere collegato ad un terminale di terra I connettori Card Edge sono normalmente non metallici Il cavo impiegato deve comunque avere una schermatura del 100 per soddisfare la certificazione CE Lo schermo deve essere collegato ad un terminale di terra Per il corretto cablaggio de
6. Butene CIS 2 Butene Trans 2 Butene Carbon Dioxide Carbon Disulfide Carbon Monoxide Carbon Tetrachloride Carbon Tetrafluoride f 14 Carbonyl Fluoride Carbonyl Sulfide Chlorine Chlorine Dioxide Chlorine Trifluoride 2 Chlorobutane Chlorodifluoromethane f 22 Chloroform Trichloromethane Chloropentafluoroethane f 115 C C hlorotrifluoroethylene hlorotrifluoromethane f 13 Cyanogen Cyanogen Chloride Cyclobutane Cyclopropane Deuterium Diborane Diboromodifluoromethane f 12B2 2 Dibromotetrafluoroethane f 114B2 Dichlorodifluoromethane f 12 Dichlorofluoromethane f 21 Dichlorosilane 2 Dichloroethane 2 Dichlorotetrafluoroethane f 114 2 2 Dichloro 1 Difluoro 1 Chloroethane 1 Difluoroethane 1 Difluoroethylene Diethylsilane Difluoromethane f 32 Dimethylamine Dimethylether 2 2 Dimethylpropane Disilane Ethane Ethanol Ethylacetylene Ethyl Chloride Ethylene Ethylene Oxide Fluorine Germane Germanium Tetrachloride Halothane R 123B1 G HBICIF Helium He Hexafluoroacetone F CCOCF Hexaflorobenzine C F Hexafluoroethane f 116 CF Hexafuoropropylene HFP C F Hexamethyldisilane HMDS CH Si Hexane C H 6 14 4 8 Section 4 Maintenance Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG Brooks Model 5860 November 2008 Table 4 3 Conversion Factors Nitrogen Base Continued AAA ee ON FACTOR FACTOR kg m Hydrogen Hydrogen Bromide
7. Remove the backup rings 5 and the sensor assembly O rings 4 from the flowmeter body 1 Using the Brooks O ring removal tool will help prevent scratching the sealing surface 5 Remove the adapter fittings 15 from the flowmeter body 1 6 Remove the restrictor assembly 9 from the inlet side of the flowmeter body 1 using the restrictor tool part of service tool kit listed in Section 5 Table 5 2 B Assembly ACAUTION Do not get Fomblin lubricant on the restrictor element 9 or hands This is a special inert lubricant which is not easily removed Note lt is recommended that all O rings be replaced during meter assembly All O rings should be lightly lubricated with Fomblin lubricant part of O ring kit Section 5 prior to their installation 1 Examine all parts for signs of wear or damage replace as necessary 2 Place the restrictor O ring on the restrictor assembly Screw the restrictor assembly 9 into the inlet side of the flowmeter body using the restrictor tool hand tighten snug 44 CAUTION The following steps must be performed as written Placing the O rings on the sensor before it is installed will result in damage to the O rings causing a leak 3 Press the lubricated sensor O rings 4 into the flowmeter body 1 Press the back up rings 5 into the O ring cavity above the O rings Be sure that the O rings are seated squarely and the backup rings are below the surface of the body The bac
8. e Kort kantkontakter er normalt utf rt i kunststoff De tilh rende flatkabler ma v re utf rt med fullstendig 100 skjer ming som kobles til elektrisk jord p riktig pinne i pluggen for m te CE sertifiseringskrav For tilkobling av medleverte plugger vennligst se h ndboken som h rer til utstyret Vennlig hilsen Portugu s Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Assunto Adenda ao Manual de Instruc es Refer ncia Certificac o CE do Equipamento de Fluxo de Massa Data Janeiro de 1996 O equipamento el ctrico electr nico Brooks com a marca CE foi testado com xito nos termos do regulamento da Compatibilidade Electromagn tica directiva CEM 89 336 EEC Todavia ao seleccionar se o cabo de sinal a utilizar com equipamento contendo a marca CE ser necess rio ter uma atenc o especial Qualidade do cabo de sinal buchas de cabo e conectores A Brooks fornece cabo s de qualidade superior que cumprem os requesitos da certificac o CE Se fornecerem o vosso pr prio cabo de sinal devem utilizar um cabo que na sua totalidade seja isolado com uma blindagem de 100 Os conectores tipo D ou Circulares devem ser blindados com uma blindagem met lica Se tal for necess rio deve utilizar se buchas met licas de cabo para o isolamento do aperto do cabo O isolamento do cabo deve ser ligado blindagem ou bucha met lica em ambas as extremidades em 360 A blindagem deve termin
9. pe TOLE Ka vovisuobc mg H ektpo Mayunruis ZuuBarotnyrag EMC vrpskrifa 89 336 EEC Ommodhnore gpei leros s apocox kor T V emioyh Tov xeXoSiov perapopac TOU a uarag TO oro o kaAd to ap xercol va gpnoporendei pe pyava zou pepovy TO Y ua CE Hoi rgzo rov amp aAm iov opze rev srumoduatav KQ TOY cov cpav H Brooks katd kav ver zpoumBeda vymAns zott KORS Ta oroin xAnpo v TIC Tpodiaypap s yu motoros CE Eav y emo vov kakmdiov cfpuroc yivel and cuc MP REL va ypreipoxow cere KaAddto To oxoio va p pet efmrepikd mjpeg A n Km ve map yer mpdk on 109 Ot a v eopot t nov D Kvdukoi cov kaAm tav apene ve Bepaxifovral ue petan dop xica E v siva epapu cipo mp met va XPTGLOAOLEDVIAL Mea rel ommobiintes kaloiov zov va BiaB rouv arpod ktn obv eong cov rA yuatos vou Ka OU To zhfypa rou kakw iou ap zel va ouv err oto perodduc epiPlaua otov ervmobkizm kar va Dopaxiferas ka cta Bt rpa kor 360 poipeg H Oupaxion apne va rode oc KO oKpod kty yeimons Or c v ccuor kapr w eivar ur UETTIAIKOL Ta obra zov JPNSYLORGOLYTA pine va p povy m yuo 6op xionc 100 ya vi vrakobouv omy meronoinen CE H Oop kicn AP TEL va Kato yet oe k xcoto akpOSEKTN elen Dia env Gt ra n t v axpoderr v Maparado us avapepdeire oto sGMK EISTO Eyzepidwo O nysv A 3 Section A CE Certifiction Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG Brooks Model 5860 November
10. period shall be in warranty for the remainder of the original warranty period or ninety 90 days whichever is longer This limited warranty is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application along with outstanding service and support to back it up We operate first class repair facilities located around the world to provide rapid response and support Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards Visit www BrooksInstrument com to locate the service location nearest to you START UP SERVICE AND IN SITU CALIBRATION Brooks Instrument can provide start up service prior to operation when required For some process applications where ISO 9001 Quality Certification is important it is mandatory to verify and or re calibrate the products periodically In many cases this service can be provided under in situ conditions and the results will be traceable to the relevant international quality standards CUSTOMER SEMINARS AND TRAINING Brooks Instrument can provide customer seminars and dedicated training to engineers end users and maintenance persons P
11. to Pin 2 White to black Depending on temperature and Pin 4 to Pin 3 ohmmeter current Blue to yellow Pin 5 m Pin 1 Nominal 1200 ohm reading Note Remove the sensor connector from the PC Board for this procedure Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Section 4 Maintenance Brooks Model 5860 voltmeter recommended pins 2 and 10 Refer to Figure 2 2 Apply power and allow the flowmeter to warm up for 45 minutes Do not connect to a gas source at this time Observe the output signal and if necessary perform the zero adjustment procedure Section 3 3 If the output signal will not zero properly refer to the sensor troubleshooting section and check the sensor If the sensor is electrically functional the printed circuit board is defective and will require replacement 2 Connect the flowmeter to a source of the gas on which it was originally calibrated Increase the flow until 10096 indication 5 00Vdc is achieved Vary the flow rate over the 2 to 100 range and verify that the output signal follows the flow rate If possible connect a flow measurement device in series with the mass flowmeter to observe the actual flow behavior and verify the accuracy of the mass flowmeter If the mass flowmeter functions as described above it is functioning properly and the problem may lie elsewhere Table 4 1 lists possible malfunctions which may be encountered dur
12. 0 1 4 Tube VCR 4 18 106 2 3 8 Compression 4 44 Fitting 112 8 Figure 2 1 Model 5860i Dimensions EEN Set Point Return Volt Signal Output Q e000 ooo a 3 Not Used sd 0000004 Current Signal Output 9 3 15 to 28 Vdc Supply 6 Not Used Current Setpoint Input Wht Blk NOTE 8 Voltage Setpoint Input Red BIk 1 Cable shield tied to chassis ground Supply Common Gm Bk I meter el dee a Supply Common Grn Blk connection on customer end 9 re M EN ed y EYO SSSA NEUE Noted MAN NO ed These connections are used for the 5850 and 5851 Mass Flow Controllers Make no connections to these pins 2 4 Figure 2 2 D Type Connector Pin Arrangement Installation and Operation Manual Section 2 Installation X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Brooks Model 5860 2 6 In Line Filter AAA EEN It is recommended that an in line filter be installed upstream from the flowmeter to prevent the possibility of any foreign material entering the flow sensor The filtering element should be replaced periodically or ultrasonically cleaned Table 2 1 Recommended Filter Size Maximum Flow Rate Recommended Filter Size 100 sccm 1 micron 500 sccm 2 microns 1 to 5 sipm 7 microns 10 to 30 slpm 15 microns Note The above lists the maximum recommended porosity for each flow range It is recommended that the minimum micron porosity that does not limit the full scale flowrate b
13. 0 861 0 802 0 804 1385 2180 SS Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 4 6 Restrictor Sizing Section 4 Maintenance Brooks Model 5860 It is generally accepted that the mass flow rate derived from this equation is only accurate to 5 The sensor conversion factors given in Table 4 3 are calculated based on a gas temperature of 21 C and a pressure of one atmosphere The specific heat of most gases is not strongly pressure and temperature dependent however gas conditions that vary widely from these reference conditions may cause an additional error due to the change in specific heat due to temperature and or pressure The restrictor assembly is a ranging device for the sensor portion of the flowmeter It creates a pressure drop which is linear with flow rate This diverts a sample quantity of the process gas flow through the sensor Each restrictor maintains the ratio of sensor flow to restrictor flow however the total flow through each restrictor is different Different restrictors micron porosity and active area have different pressure drops and produce meters with different full scale flow rates For a discussion of the interaction of the various parts of the meter you are urged to review Section 3 1 Theory of Operation If the restrictor assembly has been contaminated with foreign matter the pressure drop vs flow characteristics will be altered and it must be cleaned o
14. 6 EEC Cependant la plus grande attention doit tre apport e en ce qui concerne la s lection du c ble utilis pour v hiculer le signal d un appareil portant le label CE Qualit du c ble des presse toupes et des connecteurs Brooks fournit des c bles de haute qualit r pondant aux sp cifications de la certification CE Si vous approvisionnez vous m me ce c ble vous devez utiliser un c ble blind 100 Les connecteurs D ou de type circulaire doivent tre reli s la terre Si des presse toupes sont n cessaires ceux ci doivent tre m talliques avec mise la terre Le blindage doit tre raccord aux connecteurs m talliques ou aux presse toupes sur le pourtour complet du c ble et chacune de ses extr mit s Tous les blindages doivent tre reli s la terre Les connecteurs de type card edge sont non m talliques Les c bles utilis s doivent tre blind s 10046 pour satisfaire la r glementation CE Tous les blindages doivent tre reli s la terre Se r f rer au manuel d instruction pour le raccordement des contacts Greek Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A O na Ipoathikn cro Eyzeepi ro O nyu v Exerw Hhororoinon CE rov Opr vav M rpnenc Hapoxijg Matas Hyuspounvis lavov pios 1996 1996 Kupisc vm Kane Ta pyava n ektpikd n artpovik mg Brooks ta oroin p pouv To opa CE youv EmmUy c tevy8ei GULPMVA
15. 773BM S097Y901AAA S774Z607AAA 375B004 962A027NZA 751Z107AA0 926D006AWA Screw Sensor PC Board Cover 753L056AWZ UN OND zk ch Restrictor Assembly and Components Refer to Section 4 7 for sizing O ring Restrictor Size 109 Electronics Cover Can D Connector Cover Plate PC Board Mounting Bracket Pot Hole Plug 375B109 219Z430EA 852Z213EA 079Z135EAA 620Z434SXA Fittings 1 4 Compression Swagelok 1 4 Male VCR Cajon 1 4 Male VCO Cajon 320B136BMA 315Z036BMA 315Z035BMA O ring Fitting Size 906 O ring VCO Gland Size 010 375B906 375B010 Interconnecting Cables Length D type Connector on one end with no termination on other end 5 Feet 10 Feet 25 Feet 50 Feet S124Z361AAA S124Z362AAA S124Z363AAA S124Z435AAA Connector on one end with Connector for Model 5870 Series Secondary Electronics on other end 5 Feet 10 Feet 25 Feet 50 Feet S124Z576AAA S124Z577AAA Not Recommended Not Recommended 8 32 Mounting Screw QTA Viton SUA Buna TTA Kalrez AR As Required NS Not Shown Table 5 2 Tool and Spare Part Kits for Model 5860i Model 5850 5860 Service Tool Kit P N S778D017AAA Permits the complete disassembly of the Model 5860 for servicing Contains 1 O ring Removal Tool 1 Potentiometer Adjustment Tool 1 Ball Point Allen Wrench 1 Phillips Screw Driver 1 Nut Driver for Orifice 1 Restric
16. Hydrogen Chloride Hydrogen Cyanide Hydrogen Fluoride Hydrogen lodide Hydrogen Selenide Hydrogen Sulfide lodine Pentafluoride Isobutane Isobutene Isopentane Methane Methylacetylene Methyl Bromide CH Br 3 Methyl 1 butene CH Methyl Chloride CH CL Methyl Fluoride CHE Methyl Mercaptan CH S Methyl Silane CH Si Methyl Trichlorosilane MTS CH CI Si Methyl Vinyl Ether C H O Monoethanolamine C H NO Monoethylamine C HH NH Monomethylamine Neon Nickel Carbonyl Nitric Oxide Nitrogen Nitrogen Dioxide Nitrogen Trifluoride Nitrogen Trioxide Nitrosyl Chloride Nitrous Oxide Octofluorocyclobutane Oxygen Oxygen Difluoride Pentafluorethane f 125 Pentane n Pentane Perchloryl Fluoride Perfluorobutane Perfluoro 2 Butene Perfluoromethyl vinylether Perfluoropropane Pentane n Pentane Phosgene Phosphine Phosphorous Pentafluoride Phosphorous Trifluoride Propane same as CH CH CH Propylene Propene Silane Silicon Tetrachloride Silicon Tetrafluoride Sulfur Dioxide Sulfur Hexafluoride Sulfur Tetrafluoride Sulfur Trioxide Sulfuryl Fluoride Tetrachloromethane Tetrafluoroethylene TFE Tetrafluorohydrazine Trichlorofluoromethane f 11 CCL F Trichlorosilane SiHCL Trimethyloxyborane TMB B OCH 1 1 2 Trichloro 1 1 2 Triflouroet f 113 Trimethylamine Tungsten Hexatluoride Vinyl Bromide 1 985 4 772 Vinyl Chloride 0 542 1 492 2 788 Vinyl Fluoride 0 576 1 281 2 046 Water Vapor
17. Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Model 5860 Mass Flow Meter BROOKS www BrooksInstrument com INSTRUMENT Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG Brooks Model 5860 November 2008 Essential Instructions Read this page before proceeding Brooks Instrument designs manufactures and tests its products to meet many national and international standards Because these instruments are sophisticated technical products you must properly install use and maintain them to ensure they continue to operate within their normal specifications The following instructions must be adhered to and integrated into your safety program when installing using and maintaining Brooks Products Read all instructions prior to installing operating and servicing the product If this instruction manual is not the correct manual please see back cover for local sales office contact information Save this instruction manual for future reference If you do not understand any of the instructions contact your Brooks Instrument representative for clarification Follow all warnings cautions and instructions marked on and supplied with the product Inform and educate your personnel in the proper installation operation and maintenance of the product Install your equipment as specified in the installation instructions of the appropriate instruction manual and per app
18. Mounting Attitude Sensitivity 10 596 maximum full scale deviation after re zeroing Leak Integrity 1 x 10 Atm scc sec Helium Usable Range 50 to 1 Mechanical Connection Compatible with most popular mass flow equipment Refer to Figure 2 1 Electrical Connection D type 15 pin connector DA 15P Standard temperature and pressure in accordance with SEMI Semiconductor Equipment and Materials International standard 0 C and 101 3 kPa 760 Torr The mass flowmeter can be calibrated to other reference standard conditions Specify at time of ordering Section 1 Introduction Brooks Model 5860 THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Installation and Operation Manual Section 2 Installation X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Brooks Model 5860 2 1 Receipt of Equipment ZZ VEERE EE AS When the equipment is received the outside packing case should be checked for damage incurred during shipment If the packing case is damaged the local carrier should be notified at once regarding his liability A report should be submitted to the Product Service Department Brooks Instrument Hatfield Pennsylvania 19440 0903 Remove the envelope containing the packing list Carefully remove the equipment from the packing case Make sure spare parts are not discarded with the packing materials Inspect for damage
19. Specifications minimas ras 1 2 Section 2 Installation 2 1 Receipt of Equipment 2 1 2 2 Recommended Storage Practice 2 1 2 3 Return Shipment rimmen nnn nen 2 3 2 4 Gas Connections seeesseeeeeiseetterirtesirterrtserintsrinnesrrsne 2 4 2 5 Installation uanstrengt 2 4 2 6 In Line Filter EE 2 5 2 7 Electrical Interfacing sorsoran 2 5 2 8 Configuring PC Board nnen ennnereennner vennen 2 6 Section 3 Operation 3 1 Theory of Operation nnnn ennen veneneerennneereennnen 3 1 3 2 Operating Procedure nnen vis benostsassnesssisensnes 3 2 3 3 Zero TS 3 2 3 4 Calibration Procedure 3 3 3 5 Response Flow Output Signal nnen eenen 3 7 Section 4 Maintenance 4 1 General 4 1 4 2 Troubleshooting ue en 4 1 4 3 Sensor Tube sse 4 4 4 4 Disassembly and Assembly nnen oenen 4 4 4 5 Use of the Conversion Tables nnen 4 6 4 6 Restrictor Sizing soccer 4 9 Section 5 Parts List 5 1 General incio a kinnene 5 1 Section A CE Certification CE Certification of Mass Flow Equipment A 1 Contents Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG Brooks Model 58601 November 2008 Figures Figure Page Number Number 1 1 Typical Response to Flow Step Changes 1 2 2 1 Model 5860 Dimensions 2 2 2 2 D Type Connector Pin Arrangement seenen 2 2 2 3 Maximum A
20. ar com a ligag o massa Os conectores Card Edge nao s o em geral met licos e os cabos utilizados devem ter um isolamento com blindagem a 100 nos termos da Certifica o CE A blindagem deve terminar com liga o massa Relativamente configura o da cavilha queiram consultar o Manual de Instru es A 5 A 6 Section A CE Certifiction Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG Brooks Model 58601 November 2008 Suomi Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Asia Lis ys K ytt ohjeisiin Viite Massam r mittareiden CE sertifiointi P iv m r Tammikuu 1996 Brooksin CE merkill varustetut s hk iset laitteet ovat l p issyt EMC testit direktiivi 89 336 EEC Erityist huomiota on kuitenkin kiinnitett v signaalikaapelin valintaan Signaalikaapelin kaapelin l piviennin ja liittimen laatu Brooks toimittaa korkealaatuisia kaapeleita jotka t ytt v t CE sertifikaatin vaatimukset Hankkiessaan signaalikaapelin itse olisi hankittava 100 sti suojattu kaapeli D tai Circular tyyppisen liitimen tulisi olla varustettu metallisuojalla Mik li mahdollista tulisi k ytt metallisia kaapeliliittimi kiinnitett ess suojaa Kaapelin suoja tulisi olla liitetty metallisuojaan tai liittimeen molemmissa p iss 360 n matkalta Suojan tulisi olla maadoitettu Card Edge Connector it ovat standarditoimi
21. bindungsstecker sollten eine Abschirmung aus Metall besitzen Wenn m glich sollten Kabeldurchf hrungen mit Anschlu m glichkeiten f r die Kabelabschrimung verwendet werden Die Abschirmung des Kabels ist auf beiden Seiten des Steckers oder der Kabeldurchf hrungen ber den vollen Umfang von 360 anzuschlie en Die Abschirmung ist mit dem Erdpotential zu verbinden Platinen Steckverbindunger sind standardm ige keine metallgeschirmten Verbindungen Um die Anforderungen der CE Zertifizierung zu erf llen sind Kabel mit einer 100 igen Schirmababdeckung zu verwenden Die Abschirmung ist mit dem Erdpotential zu verbinden Die Belegung der Anschlu pins k nnen Sie dem beigelegten Bedienungshandbuch entnehmen A 1 A 2 Section A CE Certifiction Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG Brooks Model 5860 November 2008 English Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Addendum to the Instruction Manual Reference CE certification of Mass Flow Equipment Date S January 1996 The Brooks electric electronic equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility EMC directive 89 336 EEC Special attention however is required when selecting the signal cable to be used with CE marked equipment Quality of the signal cable cable glands and connectors Brooks supplies high quality cable
22. compliance with the EMC Directive 89 336 EEC Recommended installation procedures a The Model 5860 should be located in a clean dry atmosphere relatively free from shock and vibration b Leave sufficient room for access to the electrical components c Install in such a manner that permits easy removal if the instrument requires cleaning ACAUTION When used with a reactive sometimes toxic gas contamination or corrosion may occur as a result of plumbing leaks or improper purging Plumbing should be checked carefully for leaks and the controller purged with dry Nitrogen before use d The Model 5860 Mass Flowmeter can be installed in any position However mounting orientations other than the original factory calibration see data sheet will result in a 0 5 maximum full scale shift after re zeroing e When installing flowmeters with full scale flow rates of 10 slpm or greater be aware that sharp abrupt angles in the system piping directly upstream of the meter may cause a small shift in accuracy If possible have at least 10 pipe diameters of straight tubing up stream of the Model 5860 Mass Flowmeter 2 3 Section 2 Installation Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG Brooks Model 58601 November 2008 Span amp Zero Adjustments INCHES MILLIMETERS 9 16 18 UNF Both Ends Outlet Connection T gel 1 4 Compression 4 32 Fitting 109 7 1 4 Tube VCO 3 86 98
23. d This adjustment is performed by observing the output signal of the meter when the flow is suddenly stopped Place a metering valve upstream of the Model 5860 to control the flow rate A Brooks NRS precision metering valve is well suited for this application Also place a fast acting shut off valve immediately downstream of the flowmeter A solenoid valve is ideal for this but a manual toggle valve will do Keep the length of interconnecting tubing as short as possible between the valves and the Model 5860 since the tubing can have a dampening effect on the flow and the gas may not stop flowing the instant the downstream valve is closed as desired Adjustment of the fast response circuit will not alter the steady state accuracy of the flowmeter as adjusted in Section 3 4 Note This procedure requires an oscilloscope chart recorder or a DVM with a sample speed three samples per second or greater to monitor the rate of change of the output signal during the test Monitor the output signal at pin 2 of D Connector TP4 may be used for ground a With the shut off valve open adjust the metering valve so that the output voltage of the Model 5860 is 5 000 Vdc Allow the output to become stable at this setting b Close the shut off valve to stop the flow Observe the output signal as it decays c The behavior of the output signal during the transition between 10096 and 0 flow indicates the adjustment required of the anticipate potentiome
24. d or missing parts Brooks Instrument 407 W Vine Street P O Box 903 Hatfield PA 19440 USA Toll Free 888 554 FLOW 3569 Tel 215 362 3700 Fax 215 362 3745 E mail BrooksAm Brooksinstrument com www BrooksInstrument com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Netherlands Tokyo 136 0073 Japan P O Box 428 Tel 011 81 3 5633 7100 6710 BK Ede Netherlands Fax 011 81 3 5633 7101 Tel 31 318 549 300 Email BrooksAs Brooksinstrument com Fax 31 318 549 309 E mail BrooksEu Brooksinstrument com 2 2 Recommended Storage Practice LEA AI AA AIDA o o tp ai If intermediate or long term storage is required for equipment as supplied by Brooks Instrument it is recommended that said equipment be stored in accordance with the following a Within the original shipping container b Store in a sheltered area with the following conditions 1 Ambient temperature 21 C 70 F nominal 2 Relative humidity 45 nominal 60 maximum 25 minimum Upon removal from storage a visual inspection should be conducted to verify its condition is as received If the equipment has been in storage for an excess of ten 10 months or in conditions in excess of those recommended all pressure boundary seals should be replaced and the device subjected to a pneumatic pressure test in accordance with applicable vessel codes 2 1 X TMF 5860i MFM eng Part Number 541B110AAG November 2008 I
25. e used 2 7 Electrical Interfacing a To insure proper operation the Model 5860 must be connected per Figures 2 2 2 3 and 2 4 and configured according to section 2 7 The following minimum electrical connections must be made for new installations Chassis Ground Signal Output Return Voltage or Current Signal Output 15 28 Vdc Supply Supply Common Electrical Hook Up Signal Output The flow signal output can be measured as a voltage and a current simultaneously on two different pins of the D connector Pin 2 indicates the flow rate with a 0 5 Vdc signal proportional to the mass flow rate Pin 4 indicates the flow rate with either a 0 20mAdc or 4 20mAdc current signal as determined by jumpers on the printed circuit board refer to Section 2 7 for jumper positions Both the current and voltage signals are returned on Pin 10 of the D connector Supply The power for the mass flow meter is connected to Pin 5 15 to 28 Vdc and Pin 9 supply common of the D connector Refer to Section 1 3 for the power requirements NOTE The length of wire for the power supply connections Pins 5 amp 9 must be kept as short as possible to insure the minimum voltage 15 is available at the mass flow meter Chassis Ground Connect earth ground to Pin 14 of the D connector 2 5 2 6 Section 2 Installation Brooks Model 5860 2 8 Configuring the PC Board Installation and Operation Manual X TMF 5860i MFM eng Part Numb
26. ed in the field by the user for cleaning re ranging or servicing Disassemble and assemble the meter as follows NOTE The 5860 Mass Flowmeter should be disassembled and assembled in a clean environment to prevent particulate contamination A Disassembly The numbers in referto the spare parts exploded view in Figure 5 1 A WARNING Do not attempt to disassemble the mass flow controller until pressure has been removed and purging has been performed Hazardous gas may be trapped which could resultin explosion fire or serious injury Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Section 4 Maintenance Brooks Model 5860 1 Remove the three screws 8 attaching the electronics cover and loosen the upper jack post on the D Connector Remove the electronics cover 11 ACAUTION Be careful not to stress the sensor lead wire to sensor assembly junction when removing the sensor connector from the PC Board If the sensor lead wires are stressed an opening in the sensor wiring could result 2 Unplug the sensor connector from the PC Board Remove the two screws securing the bracket 13 and PC Board 2 Remove the bracket and PC Board 3 Remove the two screws 6 and washers 7 securing the sensor assembly 3 Remove the sensor assembly Note Do not attempt to disassemble the sensor assembly ACAUTION Do not scratch the O ring sealing service 4
27. er 541B110AAG November 2008 NOTE To obtain access to the jumpers the electronics cover must be removed Disconnect the power to the mass flow meter and cables to the D connector Remove the three screws at the base of the can and remove the top jack post of the D connector Remove the can The can must be replaced before returning the unit to service Refer to Section 2 6 for the proper electrical hook up Refer to Figure 3 5 for printed circuit board jumper locations and functions Signal Output A 0 5 Vdc flow signal is always available The current signal output is jumper selectable for either 0 20 mAdc or 4 20 mAdc Jumpers J3 and J4 blue must be in the upper position for 0 20 mAdc output and in the lower position for 4 20 mAdc output NOTE Both J3 and J4 must be in the same position Jumpers J3 and J4 do not affect the voltage output 900Q0000 Power Supply 9 15 15 28 Vdo 0000000 Current Output E Indicator or y Recelver Current Signal Output Power Supply 15 28 Vdc NOTES Voltage Output Hei Indicator or Recelver Voltage Signal Output 1 Tie cable shields to ground at one end only 2 Current and voltage outputs may be used simultaneously Figure 2 4 Common Electrical Hook Ups Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 3 1 Theory of Operation Section 3 Operation Brooks Model 5860 The thermal mass flow sensing technique u
28. er to the re zeroing procedure in Section 3 3 d Adjust for the desired flow and assume normal operation 3 3 Zero Adjustment Each Model 58601 is factory adjusted to provide a 0 10mVdc or a 4 mAdc 0 05 mA signal at zero flow The adjustment is made in our calibration laboratory which is temperature controlled to 21 1 C 70 F 2 F After initial installation and warm up in the gas system the zero flow indication may be other than the factory setting This is primarily caused by changes in temperature between our calibration laboratory and the final installation The zero flow reading can also be affected to a small degree by changes in line pressure and mounting attitude To check zero always mount the meter in its final configuration and allow a minimum of 20 minutes for the temperature of the meter and its environment to stabilize Using a suitable voltmeter check the meter output signal If it differs from the factory setting adjust it by removing the lower pot hole plug which is located closest to the meter body Adjust the zero Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 3 4 Calibration Procedure Section 3 Operation Brooks Model 5860 potentiometer refer to Figure 3 3 until the desired output signal is obtained NOTE 1 Calibration of the Model 5860 mass flowmeter requires the use of a digital voltmeter DVM a flow control valve or mass flow controller to set the f
29. ertificaci n CE Si usted adquiere su propio cable de se al deber a usar un cable que est completamente protegido en su conjunto con un apantallamiento del 100 Cuando utilice conectores del tipo D 6 Circular deber an estar protegidos con una pantalla met lica Cuando sea posible se deber n utilizar prensaestopas met licos provistos de abrazadera para la pantalla del cable La pantalla del cable deber ser conectada al casquillo met lico prensa y protegida en ambos extremos completamente en los 360 Grados La pantalla deber conectarse a tierra Los conectores estandar de tipo tarjeta Card Edge no son met licos los cables utilizados deber n ser protegidos con un apantallamiento del 100 para cumplir con la certificaci n CE La pantalla deber conectarse a tierra Para ver la configuraci n de los pines Por favor consultar Manual de Instrucciones adjunto Installation and Operation Manual Section A CE Certifiction X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Brooks Model 58601 Francais Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Sujet Annexe au Manuel d Instructions R f rence Certification CE des D bitm tres Massiques Effet Thermique Date Janvier 1996 Messieurs Les quipements Brooks lectriques lectroniques portant le label CE ont t test s avec succ s selon les r gles de la Compatibilit Electromagn tique directive CEM 89 33
30. es the output voltage of the sensor This voltage can range from 1 2 to 12 volts however it is recommended that this voltage stay between 2 0 and 9 0 volts for proper operation If the recommended voltage range exceeds this then the desired accuracy and or signal stability may not be achieved If one of the limits is reached check the restrictor sizing procedures Refer to Section 4 6 f Shut off the flow Connect the DVM positive lead to flow signal output pin 2 and the negative lead to TP4 Readjust the zero potentiometer for an output of OmV 2mV as necessary g Increase the flow rate for a flow signal output of 50 2 500V and measure the flow rate Calculate the error as a percentage of full scale indicated measured flow rate flow rate full scale error 100 full scale flow rate Section 3 Operation Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG Brooks Model 5860 November 2008 D TYPE amp g 990006 COMPONENT SIDE OF PC BOARD o o o o o o o PIN OUT TOP VIEW Figure 3 2 Model 5860i Calibration Connections BROOKS MASS FLOW SENSOR 5960 SERIES Test Points TP4 Circuit Common TP3 Valve Vottage TP2 Lin Voltage TP Sensor Voltage X 100 Span Sensor Linearity Connector Anticipate Figure 3 3 Adjustment Potentiometer Location ADJUST CLOCKHISE ADJUSTMENT CORRECT 5 ADJUST COUNTER CLOCKWISE w E U D E a
31. i terminali occorre fare riferimento agli schemi del manuale di istruzioni dello strumento Nederlands Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Onderwerp Addendum voor Instructie Handboek Referentie CE certificering voor Mass Flow Meters amp Controllers Datum Januari 1996 Dames en heren Alle CE gemarkeerde elektrische en elektronische produkten van Brooks Instrument zijn met succes getest en voldoen aan de wetgeving voor Electro Magnetische Compatibiliteit EMC wetgeving volgens 89 336 EEC Speciale aandacht is echter vereist wanneer de signaalkabel gekozen wordt voor gebruik met CE gemarkeerde produkten Kwaliteit van de signaalkabel en kabelaansluitingen e Brooks levert standaard kabels met een hoge kwaliteit welke voldoen aan de specificaties voor CE certificering Indien men voorziet in een eigen signaalkabel moet er gebruik gemaakt worden van een kabel die volledig is afgeschermd met een bedekkingsgraad van 100 e D of ronde kabelconnectoren moeten afgeschermd zijn met een metalen connector kap Indien kabelwartels worden toegepast moeten metalen kabelwartels worden gebruikt die het mogelijk maken het kabelscherm in te klemmen Het kabelscherm moet aan beide zijden over 360 met de metalen connectorkap of wartel verbonden worden Het scherm moet worden verbonden met aarde e Card edge connectors zijn standaard niet metallisch De gebruikte kabels moeten volledig afgeschermd z
32. ijn met een bedekkingsgraad van 100 om te voldoen aan de CE certificering Het scherm moet worden verbonden met aarde Voor pin configuraties a u b verwijzen wij naar het bijgesloten instruktie handboek A 4 Hoogachtend Installation and Operation Manual Section A CE Certifiction X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Brooks Model 58601 Norsk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Vedr rende Vedlegg til h ndbok Referanse i CE sertifisering av utstyr for massestr msm ling og regulering Dato S Januar 1996 Til den det ang r Brooks Instrument elektrisk og elektronisk utstyr p f rt CE merket har gjennomg tt og best tt pr ver som beskrevet i EMC forskrift om elektromagnetisk immunitet direktiv 89 336 EEC For opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det m letekniske utstyret Utf relse av signalkabel og tilh rende plugger e Brooks Instrument tilbyr levert med utstyret egnet kabel som m ter de krav som stilles til CE sertifisering e Dersom kunden selv velger kabel m kabel med fullstendig 100 skjerming av lederene benyttes D type og runde plugger og forbindelser m v re utf rt med kappe i metall og kabelnipler m v re utf rt i metall for jordet innfesting av skjermen Skjermen i kabelen m tilknyttes metallet i pluggen eller nippelen i begge ender over 360 tilkoblet elektrisk jord
33. ing bench troubleshooting C Sensor Troubleshooting If itis believed the sensor coils are either open or shorted troubleshoot using Table 4 2 If any of the steps do not produce the expected results the sensor assembly is defective and must be replaced Refer to Section 4 4 for the disassembly and assembly procedures to use when replacing the sensor Note Do not attempt to disassemble the sensor D Cleaning Procedures Should the Model 5860 Mass Flow Meter require cleaning due to deposition use the following procedures 1 Remove the unit from the system 2 Refer to Section 4 4 to disassemble the meter 44 CAUTION Do not soak the sensor assembly in a cleaning solution If solvent seeps into the sensor assembly it will probably damage the sensor or at least significantly alter its operating characteristics 3 Use a hemostat or tweezers to push a 0 007 dia piano wire through the flow sensor tube to remove any contamination For best results push the wire into the downstream opening of the sensor tube The sensor tube can be flushed with a non residuous solvent Freon TF recommended A hypodermic needle filled with solvent is a convenient means to accomplish this 4 3 4 4 Section 4 Maintenance Brooks Model 5860 4 3 Sensor Tube 4 4 Disassembly and Assembly Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 An alternate method for flushing out the sens
34. ion 2 Installation Section 3 Operation Section 4 Maintenance Section 5 Replacement Parts It is recommended that this manual be read in its entirety before attempting to operate or repair the Model 58601 The Brooks Model 5860 Mass Flow Meter is widely used where manual electronic or computer controlled gas handling occurs The Model 58601 consists of two basic units a flow sensor and an integral electronic signal conditioner This combination produces a stable gas flow indication which eliminates the need to continuously monitor and compensate for changing gas pressures and temperatures Standard features include Fast Response rapidly indicates changes in actual mass flow rate Refer to Figure 1 1 Removable Cleanable Sensor permits the user to clean or replace the sensor Refer to Section 4 4 Output Limiting prevents possible damage to delicate data acquisition devices by limiting the output to 6 8 Vdc and 7 Vdc on the voltage signal output and 0 to 26 mA on the current output Section 1 Introduction Brooks Model 5860 PERCENT OF FULL SCALE i 12 16 TIME S Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 COMMAND STEP CHANGES SOFT START DISABLED 1 SLPM NITROGEN INLET PRESSURE 25 PSIG COMMAND ACTUAL FLOW MFM OUTPUT 24 28 32 ECONDS Figure 1 1 Typical Response to Flow Step Changes AWARNING Do not operate this instrument in exce
35. ired gas to the gas factor for the calibration gas Actual gas Output x factor of the new gas flow rate reading factor of the calibrated gas Example The flowmeter is calibrated for Nitrogen The desired gas is Carbon Dioxide The output reading is 75 sccm when Carbon Dioxide is flowing Then 75 x 0 778 58 35 sccm In order to calculate the conversion factor for a gas mixture the following formula should be used 100 Sensor Conversion P1 P2 Pn Factor Mixture Sensor Sensor Sensor Conversion Conversion Conversion Factor 1 Factor 2 Factor n Where P1 percentage of gas 1 by volume P2 percentage of gas 2 by volume Pn percentage of gas n by volume Example The desired gas is 20 Helium He and 80 Chlorine CI by volume The desired full scale flow rate of the mixture is 20 slpm Sensor conversion factor for the mixture is 1700 gt Mixture 20 80 901 Factor 1 387 828 CS Nitrogen equivalent flow 20 901 22 20 slpm Nitrogen Installation and Operation Manual Section 4 Maintenance X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Brooks Model 5860 Table 4 3 Conversion Factors Nitrogen Base FACTOR FACTOR kg m Acetylene C H Air Mixture Allene CH Ammonia NH Argon Arsine Boron Trichloride Boron Trifluoride Bromine Pentafluoride Bromine Trifluoride Bromotrifluoroethylene Bromotrifluoromethane f 13B1 1 3 Butadiene Butane 1
36. k end of the O ring removal tool is useful to press the backup rings all the way into the body 4 5 Section 4 Maintenance Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG Brooks Model 5860 November 2008 4 Install the sensor assembly 3 as shown in Figure 5 1 and secure with the two socket head cap screws 6 and washers 7 Tighten the screws to 28 in lbs 5 Install the printed circuit board 2 secure with bracket 13 and two screws 8 Plug the connector from the sensor assembly 3 onto the PC Board The flow arrow on the connector should be pointing in the direction of the flow 6 Install the electronics cover 11 on the meter and secure with three screws 8 Tighten the upper jack post on the D Connector 7 Prior to installation leak and pressure test the assembled flowmeter to any applicable pressure vessel codes 4 5 Use of the Conversion Tables AAA ne KANN u If a mass flowmeter is operated on a gas other than the gas it was calibrated with a scale shift will occur in the relationship between the output signal and the mass flow rate This is due to the difference in heat capacities between the two gases This scale shift can be approximated by using the ratio of the molar specific heat of the two gases or sensor conversion factor A list of sensor conversion factors is given in Table 4 3 To change to a new gas multiply the output reading by the ratio of the gas factor for the des
37. lease contact your nearest sales representative for more details HELP DESK In case you need technical assistance Americas B 1 888 554 FLOW Europe B 31 318 549 290 Within Netherlands 0318 549 290 Asia B 011 81 3 5633 7100 Due to Brooks Instrument s commitment to continuous improvement of our products all specifications are subject to change without notice C TRADEMARKS BROOKS idein Ha fla Brooks Instrument LLC Kalrez n DuPont Dow Elastomers wolle rnm Ausimont NRS Brooks Instrument LLC ROOM o cech E 1 DuPont deNemours amp Cok VOO citri eren e esa CERE E HO RO DEF Co E Cajon Company FIASTOIOY eee eee eterne Haynes International VOR iuit ee teoria Cajon Company MITO c DuPont Performance Elastomers Brooks Instrument Brooks Instrument Brooks Instrument 407 West Vine Street Neonstraat 3 1 4 4 Kitasuna Koto Ku P O Box 903 6718 WX Ede Netherlands Tokyo 136 0073 Japan Hatfield PA 19440 0903 USA T 31 318 549 300 T 011 81 3 5633 7100 T 215 362 3700 F 31 318 549 309 F 011 81 3 5633 7101 F 215 362 3745 E Mail BrooksEu BrooksInstrument com E Mail BrooksAs Brooksinstrument com E Mail BrooksAm Brooksinstrument com www Brooksinstrument com BROOKS Copyright 2008 Brooks Instrument LLC All rights reserved Printed in U S A INSTRUMENT
38. licable local and national codes Connect all products to the proper electrical and pressure sources To ensure proper performance use qualified personnel to install operate update program and maintain the product When replacement parts are required ensure that qualified people use replacement parts specified by Brooks Instrument Unauthorized parts and procedures can affect the product s performance and place the safe operation of your process at risk Look alike substitutions may result in fire electrical hazards or improper operation Ensure that all equipment doors are closed and protective covers are in place except when maintenance is being performed by qualified persons to prevent electrical shock and personal injury All pressure equipment with an internal pressure greater than 0 5 bar g and a size larger than 25mm or 1 inch falls under the Pressure Equipment Directive PED The Directive is applicable within the European Economic Area EU plus Norway Iceland and Liechtenstein Pressure equipment can be traded freely within this area once the PED has been complied with Section 1 of this manual contains important safety and operating instructions related to the PED directive Meters described in this manual are in compliance with EN directive 97 23 EC module H Conformity Assessment All Brooks Instrument Flowmeters fall under fluid group 1 Meters larger than 25mm or 1 inch are in compliance with category II Ill of PED
39. llowable Loop Resistance 2 3 2 4 Common Electrical HOOK UPS nnee eenen 2 6 3 1 Flow Sensor Operational Diagram sssss 3 2 3 2 Model 5860 Calibration Connections 3 4 3 3 Adjustment Potentiometer Location 3 4 3 4 Fast Response Adjustment 3 4 3 5 PC Board Jumper Location and Function 3 6 5 1 Model 5860 Parts Drawing nennen eenen 5 2 Tables Table Page 2 1 Recommended Filter Size AAA 2 5 4 1 Bench Troubleshooting nnee eeen 4 2 4 2 Sensor Troubleshooting issi 4 2 4 3 Conversion Factors Nitrogen Base 4 7 4 4 Restrictor Selection Guide 4 11 5 1 Model 5860 Replacement Parts List 5 3 5 2 Tool and Spare Part Kits for 58607 annen 5 3 Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 1 1 Purpose 1 2 Description 1 3 Specifications Section 1 Introduction Brooks Model 5860 The Brooks Model 5860 Flow Meter is a mass flow measurement device designed for accurately measuring flows of gases This instruction manual is intended to provide the user with all the information necessary to install operate and maintain the Brooks 5860 Mass Flow Meter This manual is organized into five sections Section 1 Introduction Sect
40. low rate and a precision flow standard calibrator such as the Brooks Vol U Meter It is recommended that the calibration be performed only by trained and qualified service personnel NOTE 2 If the mass flow meter is to be used on a gas other than the calibration gas apply the appropriate sensor conversion factor Refer to Section 4 5 a Adjust the anticipate potentiometer fully clockwise 20 turns Then adjust the anticipate potentiometer 10 turns counterclockwise to center the potentiometer This will provide a rough adjustment of this circuit and make the flow signal stable for calibration b Connect the DVM positive lead to the 0 5V signal output pin 2 and the negative lead to signal common TP4 Adjust the zero potentiometer for an output of OmV 2mV c Increase the flow rate until the flow signal output equals 5 000V Connect the DVM positive lead to the TP2 linearity voltage and the negative lead to TP4 signal common Adjust the linearity potentiometer for an output of 0 0V zero volts d Connect the DVM positive lead to the 0 5V signal output pin 2 and the negative lead to TP4 circuit common Measure the flow rate using suitable volumetric calibration equipment Adjust the flow rate to the proper full scale flow Flow signal voltage measured flow rate x 5 000 full scale flow rate Adjust the span potentiometer until the voltage at pin 2 is 5 000V e Measure the voltage at TP1 The voltage at TPI is 100 tim
41. make the following system checks before removing a suspected defective mass flow meter for bench troubleshooting or return especially if the system is new 1 Verify low resistance power supply connections and that the correct power supply voltage and signals are reaching and leaving the meter The breakout board P N S273Z668AAA listed in Section 5 will make this job much easier 2 Verify that the process gas connections have been correctly terminated and leak checked 3 Verify that all user selectable jumpers are in their desired positions Refer to Figure 3 5 WARNING If is becomes necessary to remove the flowmeter from the system after exposure to toxic pyrophoric flammable or corrosive gas purge the flowmeter thoroughly with a dry inert gas such as nitrogen before disconnecting the gas connections Failure to correctly purge the flowmeter could result in fire explosion or death Corrosion or contamination of the mass flowmeter upon exposure to air may also occur B Bench Troubleshooting 1 Properly connect the mass flow meter to a 15 to 28 Vdc power supply and connect an output signal readout device 4 1 2 digit 4 1 Section 4 Maintenance Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG Brooks Model 5860 November 2008 Table 4 1 Bench Troubleshooting Possible Cause Check Corrective Action Output stays at O Volts Clogged Sensor Clean sensor Refer to cleaning
42. n adjustment in the electronics affects the fine adjustment of the meter s full scale flow The Model 5860 has the following features incorporated in the integral signaling conditioning circuit Fast Response adjusted by the anticipate potentiometer This circuit when properly adjusted allows the high frequency information contained in the sensor signal to be amplified to provide a faster responding flow signal for remote indication Removable cleanable sensor permits the user to clean or replace the sensor Refer to Section 4 4 Output Limiting prevents possible damage to delicate data acquisition devices by limiting the output to 6 8 Vdc and 7 Vdc on the voltage signal output and 0 26 mA on the current signal output 3 1 3 2 Section 3 Operation Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG Brooks Model 5860 November 2008 To Power Supply Ti T2 Upstream Downstream Temperature Temperature Sensor ypass Sensor Tube Flow A Approx 10 sccm Max Flow B Full Scale Less 10 sccm RESTRICTOR Figure 3 1 Flow Sensor Operational Diagram 3 2 Operating Procedure a Apply power to the flowmeter and allow approximately 45 minutes for the instrument to warm up and stabilize its temperature b Turn on the gas supply c Shut off flow to the meter and observe the flowmeter s output signal If the output is not OmVde 10mVdc check for leaks and if none are found ref
43. n begin processing the equipment Copies of the form can be obtained at the Also completion of Form RPR003 1 Brooks Instrument Decontamination location above E mail BrooksEu Brooksinstrument com 2 2 Installation and Operation Manual Section 2 Installation X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Brooks Model 5860 2 4 Gas Connections A a P rP q Standard inlet and outlet connections supplied on the Model 5860 are 1 4 compression fittings for flow rates up to 10 slpm and 3 8 compression fittings for higher flow rates Optional 1 8 compression VCO and VCR connections are available upon request Prior to installation make certain all piping is clean and free of obstructions Install the piping in such a manner that permits easy removal if the instrument is to be removed for cleaning or test bench troubleshooting 2 5 Installation Refer to Figures 2 1 through 2 2 ACAUTION When installing the flowmeter care should be taken that no foreign materials enter the inlet or outlet of the instrument Do not remove the protective end caps until time of installation ACAUTION Any Brooks Instrument mass flowmeter or flow controller with a 15 pin D Connector PC Board bearing the CE Mark must use a 100 shielded cable and metal shell mating connectors The shield is tied over 360 degrees to the shell at both ends This is mandatory to be in
44. ning Forbindelses stikket type D eller cirkul re skal v re sk rmet med metalhus og eventuelle PG forskruninger skal enten v re af metal eller metal sk rmet Sk rmen skal forbindes i begge ender til stikkets metalhus eller PG forskruningen og have forbindelse over 360 grader Sk rmen b r v re forbundet til jord Card Edge stik er standard ikke af metal der skal derfor ligeledes benyttes et sk rmet kabel med hel sk rm med 100 d kning Sk rmen b r v re forbundet til jord Forbindelse af stikket venligst referer til vedlagte instruktions manual Med venlig hilsen Deutsch Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Nachtrag zur Bedienungsanleitung Referenz CE Zertifizierung f r Massedurchflu ger te Datum Januar 1996 Nach erfolgreichen Tests enstprechend den Vorschiften der Elektromagnetischen Vertr glichkeit EMC Richtlinie 89 336 EEC erhalten die Brooks Ger te elektrische elektronische Komponenten das CE Zeichen Bei der Auswahl der Verbindungskabel fir CE zertifizierte Ger te sind spezielle Anforderungen zu beachten Qualit t der Verbindungskabel Anschlu stecker und der Kabeldurchf hrungen Die hochwertigen Qualit tskabel von Brooks entsprechen der Spezifikation der CE Zertifizierung Bei Verwendung eigener Verbindungskabel sollten Sie darauf achten da eine 100 igenSchirmababdeckung des Kabels gew hrleistet ist D oder Rund Ver
45. nstallation and Operation Manual Section 2 Installation Brooks Model 5860 Va Va VE Va Va VA Va Va EVA Va VA VA VA VA TE VA VA TA ANS OS II PR RG RR RR V ROCK RI ROS S Ed RIA A NNN RR O RS 25 ONRI II SRRI IR KG NNN NNN RI Ss RSS RR OR 209 4299 02000 RR OOOO OO OSORIO ETA RR RR En OR 30UDIS I Say 22 23 24 25 25 27 28 Volts Suppiy Voltage 19 20 21 18 Power 17 Product Service Department 407 West Vine Street Hatfield PA 19440 0903 or call toll free 1 888 554 FLOW 3569 16 15 14 Prior to returning any Brooks equipment to the factory contact the factory for a Return Materials Authorization Number RMA This can be obtained E mail BrooksAm Brooksinstrument com Toll Free 888 554 FLOW 3569 www BrooksInstrument com at Brooks Instrument Tel 215 362 3700 Brooks Instrument 407 W Vine Street Hatfield PA 19440 USA Fax 215 362 3745 Figure 2 3 Maximum Allowable Loop Resistance P O Box 903 2 3 Return Shipment Email BrooksAs Brooksinstrument com Tokyo 136 0073 Japan Tel 011 81 3 5633 7100 Brooks Instrument 1 4 4 Kitasuna Koto Ku Fax 011 81 3 5633 7101 6718 WX Ede Netherlands Netherlands 318 549 300 Fax 31 318 549 309 P O Box 428 Brooks Instrument 6710 BK Ede Neonstraat 3 Tel 31 Statement as well as a Material Safety Data Sheet MSDS for the fluid s used in the meter is required before any Brooks Personnel ca
46. ontrol requirements with a Brooks Instrument device Every day flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low flow applications Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals oil and gas fuel cell research and chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior performance reliability and value to the user It is designed with the ever changing process conditions accuracy requirements and hostile process environments in mind to provide you with a lifetime of dependable service We recommend that you read this manual in its entirety Should you require any additional information concerning Brooks products and services please contact your local Brooks Sales and Service Office listed on the back cover of this manual or visit www BrooksInstrument com Yours sincerely Brooks Instrument Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG Brooks Model 5860 November 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual Contents X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Brooks Model 58601 Section 1 Introduction Paragraph Page Number Number 1 1 Purp se EE 1 1 1 2 Description kee 1 1 1 3
47. or is to replace the restrictor element with a low flow plug restrictor This plug forces all the flow through the sensor and may dislodge any obstructions Subject the flow meter to a high differential pressure Pressurizing the outlet of the flowmeter higher than the inlet may help force the obstruction upstream and out of the sensor tube 4 Deposits of silicon dioxide may be removed by soaking the internal parts in solution of 596 hydrofluoric acid 5 parts hydrofluoric acid HF 95 parts water H O followed by Freon TF 5 Wire mesh and A C L F E type restrictor elements can be cleaned in an ultrasonic bath Refer to Section 4 7 for the correct restrictor to use 6 Blow all parts dry with dry nitrogen and reassemble Refer to Section 4 4b assembly 7 Purge the assembled controller with dry nitrogen 8 Perform the calibration procedure in Section 3 4 9 When the flowmeter is reinstalled in the system the connections should be leak tested and the system should be purged with dry nitrogen for 30 minutes prior to start up to prevent the formation of deposits The sensor tube is part of a calibrated flow divider that is designed to operate within a preset gas flow range The sensor assembly may be removed or replaced by referring to Section 4 4 Disassembly and Assembly If the sensor assembly is cleaned and reinstalled a calibration check should be performed Refer to Section 3 4 The Model 5860 Mass Flowmeter may be disassembl
48. ple The desired gas is Silane SiH The desired full scale flow rate is 200 sccm Sensor conversion factor is 0 679 from Table 4 3 Air equivalent flow 200 0 679 294 5 sccm Nitrogen In the example above a size P restrictor would be selected NOTE If the calculated flow rate is such that two different size restrictors could be used always select the larger size If a mixture of two or more gases is being used the restrictor selection must be based on the nitrogen equivalent flow rate of the mixture Example The desired gas is 20 Helium He and 80 Chlorine Cl by volume The desired full scale flow rate of the mixture is 20 slpm Sensor conversion factor for the mixture is gt GE Mixture 20 80 901 Factor 1 387 828 Nitrogen equivalent flow 20 901 22 20 slpm Nitrogen In this example a size 4 wire mesh assembly would be selected Installation and Operation Manual Section 4 Maintenance X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Brooks Model 5860 Table 4 4 Model 5860i Standard Restrictors Range Part Number sccm Air Equivalent Flow Low High Wire Mesh N 638 0 903 4 S110Z288 893 2 1265 S110Z289 455 7 645 3 5110Z287 En br o uoo ESO p bh E A MER Eg p p i Lb po p ee S110Z224 4804 6802 6724 9528 LI 9388 18882 19176 18667 4 18457 30000 O PEA el
49. procedure Section 4 2 regardless of flow Output signal stays at 6 8V Defective PC Board Replace PC Board Refer to Section 4 4 and there is no flow through the meter Defective Sensor Replace Sensor Assembly Refer to Section 4 4 Meter grossly out of calibration Partially clogged sensor Clean sensor refer to the cleaning procedure Section 4 2 Flow is higher than indicated Meter grossly out of calibration Partially clogged restrictor Replace restrictor Refer to Section 4 4 Flow is lower than indicated Meter output oscillates Anticipate potentiometer out of adjustment Adjust anticipate potentiometer Refer to Section 3 4 Check regulator output Replace PC Board Refer to Section 4 4 Table 4 2 Sensor Troubleshooting SENSOR SCHEMATIC ee ee WIRE Sensor COLOR FUNCTION Connector White H Sensor common ns Yellow Heater Blue Heater common Upstream H Red temperature gt sensor Su Su Downstream Black temperature sensor Sd Note Sensors manufactured before 9 88 used a wire Flex Circuit Wire Numbers harness interconnect newer sensors use a Flex cable OHMMETER CONNECTION RESULT IF ELECTRICALLY FUNCTIONAL Yellow and white to body Open circuit on ohmmeter If either ground heater yellow or sensor common Pin 1 or 4 to body white are shorted an ohmmeter reading will be obtained White to red Nomina 1100 ohms reading Pin 4
50. r replaced It may also be necessary to replace the restrictor assembly when the mass flowmeter is to be calibrated to a new flow rate Restrictor assembly replacement should be performed only by trained personnel The tools required for the removal replacement procedure are as follows Appropriate size wrench for the removal of the inlet process connection Restrictor removal tool contained in service tool kit P N S778D017AAA Restrictor O ring refer to the spare parts Section 5 for the correct part number Restrictors The Model 5860 Series Mass Flowmeters use two types of restrictor assemblies depending on full scale flowrate 1 Sintered wire mesh for Nitrogen equivalent flow rates above 3 4 slpm These restrictor assemblies are made from a cylinder of sintered wire mesh and are easily cleaned if they become contaminated in service 2 Anti Clog Laminar Flow Element ACLFE This type of restrictor assembly is used for Nitrogen equivalent flow rates less than 3 4 slpm Sizing All Model 5860 Series Restrictor Assemblies are factory adjusted to provide a 115 mm water column pressure drop for a specific flow rate This corresponds to the desired full scale flow rate A list of restrictor assemblies used in the Model 5860 Series Mass Flowmeters is shown in Table 4 4 4 9 Section 4 Maintenance 4 10 Brooks Model 5860 Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Exam
51. s which meets the specifications for CE certification If you provide your own signal cable you should use a cable which is overall completely screened with a 100 shield D or Circular type connectors used should be shielded with a metal shield If applicable metal cable glands must be used providing cable screen clamping The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees The shield should be terminated to a earth ground Card Edge Connectors are standard non metallic The cables used must be screened with 100 shield to comply with CE certification The shield should be terminated to a earth ground For pin configuration Please refer to the enclosed Instruction Manual Espa ol Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Asunto Addendum al Manual de Instrucciones Referencia Certificaci n CE de los Equipos de Caudal M sico Fecha Enero 1996 Los equipos de Brooks el ctricos electr nicos en relaci n con la marca CE han pasado satisfactoriamente las pruebas referentes a las regulaciones de Compatibilidad Electro magn tica EMC directiva 89 336 EEC Sin embargo se requiere una atenci n especial en el momento de seleccionar el cable de se al cuando se va a utilizar un equipo con marca CE Calidad del cable de se al prensaestopas y conectores Brooks suministra cable s de alta calidad que cumple las especificaciones de la c
52. sed in the 5860 works as follows A precision power supply provides a constant power heat input P at the heater which is located at the midpoint of the sensor tube Refer to Figure 3 1 At zero or no flow conditions the heat reaching each temperature sensor one upstream and one downstream of the heater is equal Therefore the temperatures T1 and T2 are equal When gas flows through the tube the upstream sensor is cooled and the downstream sensor is heated producing a temperature difference The temperature difference T2 T1 is directly proportional to the gas mass flow The equation is AT A P C m Where AT temperature difference T2 T1 K C specific heat of the gas at constant pressure KJ kg 9K P heater power kJ s m mass flow kg s A constant of proportionality S K kJ A bridge circuit interprets the temperature difference and a differential amplifier generates a linear 0 5 Vdc signal directly proportional to the gas mass flow rate The flow restrictor shown in Figure 3 1 performs a ranging function similar to a shunt resistor in an electrical ammeter The restrictor provides a pressure drop that is linear with flow rate The sensor tube has the same linear pressure drop flow relationship The ratio of the restrictor flow to the sensor tube flow remains constant over the range of the meter Different restrictors have different pressure drops and produce meters with different full scale flow rates The spa
53. ss of the specifications listed below Failure to heed this warning can result in serious personal injury and or damage to the equipment Standard Ranges Any full scale flowrate from 3 sccm to 30 slpm Nitrogen equivalent Standard temperature and pressure in accordance with SEMI Semiconductor Equipment and Materials International standard 0 C and 101 3 kPa 760 Torr Accuracy 1 full scale including linearity at calibration conditions 1 5 full scale including linearity for flow ranges greater than 20 slpm Repeatability 0 25 of rate Response Time Flow Output Signal Less than 6 seconds response to within 2 of full scale final value with a O to 100 flow step Power Requirements 15 to 28 Vdc amp 90 mA Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Section 1 Introduction Brooks Model 5860 Ambient Temperature Limits Operating 5 to 65 C 40 to 150 F Non Operating 25 to 100 C 13 to 212 F Working Pressure 4500 psi 31 03 MPa maximum Output Signal 0 5 Vdc into 2000 ohms or greater Maximum ripple 3 mV Jumper selectable 4 20 mAdc or 0 20 mAdc Refer to Figure 2 3 for maximum total loop resistance Temperature Sensitivity Zero Less than 0 075 F S per degree C Span Less than 1 0 F S shift over 10 50 C range Pressure Sensitivity 0 03 per PSI up to 200 PSIG Power Supply Sensitivity Negligible over the allowable voltage range
54. tas med en jordf rbindelse F r elektrisk anslutning till kontaktstiften h nvisas till medf ljande instruktionsmanual Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Brooks Model 5860 THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG Brooks Model 5860 November 2008 LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve 12 months from the date of initial installation or eighteen 18 months from the date of shipment by Seller Products purchased by Seller from a third party for resale to Buyer Resale Products shall carry only the warranty extended by the original manufacturer All replacements or repairs necessitated by inadequate preventive maintenance or by normal wear and usage or by fault of Buyer or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions or by abuse accident alteration misuse improper installation modification repair storage or handling or any other cause not the fault of Seller are not covered by this limited warranty and shall be at Buyer s expense Goods repaired and parts replaced during the warranty
55. ter Refer to Figure 3 4 1 If the flow signal decays to 0 05 to 0 5V then rises to 0 0V the anticipate potentiometer is properly adjusted 2 If the flow signal decays rapidly and goes below 0 5V before rising to 0 0V the anticipate potentiometer must be adjusted clockwise and steps a and b repeated 3 If the flow signal decays slowly and does not go below 0 05V the anticipate potentiometer must be adjusted counterclockwise and steps a and b repeated 3 7 3 8 Section 3 Operation Brooks Model 5860 THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Installation and Operation Manual Section 4 Maintenance X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Brooks Model 5860 4 1 General No routine maintenance is required on the Model 5860 other than an occasional cleaning If an in line filter is used the filtering element should periodically be replaced or ultrasonically cleaned 4 2 Troubleshooting el ACAUTION It is important that this flowmeter be serviced only by properly trained and qualified personnel A System Checks The Model 5860 is generally used as a component in gas handling systems which can be quite complex This can make the task of isolating a malfunction in the system a difficult one An incorrectly diagnosed malfunction can cause many hours of unnecessary downtime If possible
56. tor Removal Tool 1 Common Screw Driver Additional publications available MFC Contamination Control Customer Supplied Model 5850 5860 Break Out Board Assembly P N S273Z668AAA Installs directly between mass flow sensor controller and interconnecting cable Allows convenient access to all signals for easy troubleshooting of system Contains 1 Break Out PC Board 1 5 foot Extension Cable 1 Terminal PC Board 5 3 5 4 Section 5 Parts List Brooks Model 5860 THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Installation and Operation Manual Section A CE Certifiction X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Brooks Model 58601 Dansk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Emne Till g til instruktions manual Reference CE m rkning af Masse Flow udstyr Dato Januar 1996 Brooks Instrument har gennemf rt CE m rkning af elektronisk udstyr med succes i henhold til regulativet om elektrisk st j EMC direktivet 89 336 EEC Der skal dog g res opm rksom p benyttelsen af signalkabler i forbindelse med CE m rkede udstyr Kvaliteten af signal kabler og stik Brooks lever kabler af h j kvalitet der im dekommer specifikationerne til CE m rkning Hvis der anvendes andre kabel typer skal der benyttes et sk rmet kabel med hel sk rm med 100 d k
57. tuksina ei metallisia Kaapeleiden t ytyy olla 100 sesti suojattuja jotta ne olisivat CE sertifikaatin mukaisia Suoja on oltava maadoitettu Nastojen liitt minen katso liitteen oleva manuaali Yst v llisin terveisin Svensk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Addendum to the Instruction Manual Reference CE certification of Mass Flow Equipment Date January 1996 Brooks elektriska elektronik utrustning som r CE m rkt har testats och godk nts enligt g llande regler f r elektromagnetisk kompabilitet EMC direktiv 89 336 EEC Speciell h nsyn m ste emellertid tas vid val av signalkabel som ska anv ndas tillsammans med CE m rkt utrustning Kvalitet p signalkabel och anslutningskontakter Brooks levererar som standard kablar av h g kvalitet som motsvarar de krav som st lls f r CE godk nnande Om man anv nder en annan signalkabel ska kabeln i sin helhet vara sk rmad till 100 D eller runda typer av anslutningskontakter ska vara sk rmade Kabelgenomf ringar ska vara av metall alternativt med metalliserad sk rmning Kabelns sk rm ska i bada ndar vara ansluten till kontakternas metallk por eller genomf ringar med 360 graders sk rmning Sk rmen ska avslutas med en jordf rbindelse Kortkontakter r som standard ej metalliserade kablar som anv nds m ste vara 100 skarmade f r att verensst mma med CE certifieringen Sk rmen ska avslu
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