HXP100-MECA User Manual
Contents
1. If the power cord or any attached cables are frayed or damaged in any way If the power plug is damaged in any way If the unit is exposed to rain excessive moisture or liquids are spilled on the unit If the unit has been dropped or the case is damaged f you suspect service or repair is required Whenever you clean the electronics unit CAUTION To protect the unit from damage be sure to Keep all air vents free of dirt and dust Keep all liquids away from the unit Do not expose the unit to excessive moisture 85 humidity Read this manual before using the unit for the first time WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can create an electric shock hazard If you are unable to insert the plug into your wall plug receptacle contact your electrician to perform the necessary alterations to ensure that the green green yellow wire is attached to earth ground WARNING This product operates with voltages that can be lethal Pushing objects of any kind into cabinet slots or holes or spilling any liquid on the product may touch hazardous voltage points or short out parts QD Newport EDH0239En1040 07 1 5 4 Experience Solutions HXP2. HXP100 MECA Hexapod 6 Axis Parallel Kinematic Positioning System RoHS Compliant GO USER S MANUAL Newport Experience Solutions Precision Motion Guaranteed HXP100 MECA 6 Axis Parallel Kinematic Positioning System Warranty EN A CAUTION Please return equipment in the original or equivalent packing You will be responsible for damage incurred from inadequate packaging if the original packaging is not used X A EDH0239En1040 07 15 Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument transportation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or misuse of any product or part CAUTION Warranty does not apply to damages resulting from Incorrect usage Load on the
3. 0 5 um 0 5 mdeg 0 5 mdeg 0 4 mdeg Max speed 2 5 mm s 2 mm s 1 mm s 1 8 s 1 7 s 3 s Stiffness 5 N um 5 N um 40 N um Centered load capacity 200 N 1 Travel ranges are interdependent The listed values are max travels per axis when all other axis in their centered position 2 With standard compensation with hysteresis compensation For allowable cantilevered loads refer to section 3 2 Max Cantilever Distance of the Load CAUTION To reach specifications stated stages must be fixed on a plane surface with a flatness of 5 pm 3 2 Max Cantilever Distance of the Load Load Position D 0 to 140 mm 0 to 200 mm 250 200 lt D 150 H Load 8 Y 3 100 50 0 0 20 40 60 80 100 120 140 Radial Distance D mm 3 3 Weight Weight Ib kg Hexapod without cables 15 9 7 2 Cables 2 2 1 0 QD Newport 3 EDH0239En1040 07 15 HXP100 MECA 6 Axis Parallel Kinematic Positioning System m Connection to the HXP100 ELEC Controllers 4 1 Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read the controller user s manual carefully before operating the instrument and pay attention to all written warnings and cautions WARNING Disconnect the power plug under the following circumstances
4. Fax Name Return authorization Please obtain prior to return of item Company Address Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems Newport Experience Solutions 9 EDH0239En1040 07 15 NNevvport Experience Solutions Visit Newport Online at www newport com North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois Sauvage 91055 Evry CEDEX France Sales amp Technical Support Tel 33 0 1 60 91 68 68 e mail france newport com Service amp Returns Tel 33 0 2 38 40 51 55
5. 0 MECA 6 Axis Hexapod is a parallel kinematic motion device that provides six degrees of freedom X Y Z pitch roll and yaw The HXP100 has long travel capability and is an effective solution to complex motion applications that demand high load capacity and accuracy in up to six independent axes Contrary to the image of being complex and highly priced the HXP100 hexapod is not only affordable but extremely easy to use The HXP100 design also includes two programmable pivot points enabling more flexibility to align a sample at a particular point or points of that sample The HXP100 Series also takes advantage of the low runout RightPath trajectory capability Available in the standard performance higher precision and vacuum versions Order with the corresponding HXP100 ELEC controller The HXP100 ELEC provides advanced features including instrument grade I O s hardware based input triggers event triggers high speed on the fly data acquisition fast TCP IP communication and integrated TCL programming language for on board processes All these features improve accuracy and throughput making the programmer s life much easier common requirement for many Hexapod motion applications is a virtual pivot point allowing the user to freely choose the point in space that is a pivot point for all rotations The Newport Hexapod can not only relocate the pivot point but through our advanced technology the entire coordinate system can be reloca
6. 100 MECA 6 Axis Parallel Kinematic Positioning System 4 2 Connection WARNING Always turn the controller s power OFF before connecting to a strut Struts must be connected to the rear panel motor connectors labeled Motor any time prior to power up with the supplied cable assemblies WARNING Each Hexapod strut is labeled that corresponds to the axis number of the HXP100 ELEC controller This label is also indicated on the connector of the strut 4 3 Cables Each Hexapod is equipped with cables terminated with SUB D25M connectors and can be directly connected to the HXP100 ELEC controller WARNING These cables are shielded correctly For a correct operation make sure to lock connectors ground continuity provided by the cable WARNING Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk GO Newport Experience Solutions 5 EDH0239En1040 07 15 HXP100 MECA 6 Axis Parallel Kinematic Positioning System NOTE On each strut connector a sticker indicates the backlash resolution and home preset These parameters have to be set into the HXP100 ELEC controller for each strut This is done at our factory when the HXP100 MECA Hexapod is ordered with the HXP100 ELEC controller The Backlash compensation however is not automatically enabled by the HXP100 ELEC controller Newport recommends the use of Backlash compensation for most ap
7. Hexapod greater than maximum specified load Carriage speed higher than specified speed Improper grounding 5 Connectors must be properly secured 5 When the load on the Hexapod represents an electrical risk it must be connected to ground Excessive or improper cantilever loads Modification of the Hexapod or any part thereof This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual has been provided for information only and product specifications are subject to change without notice Any changes will be reflected in future printings Newport ii Experience Solutions HXP100 MECA 6 Axis Parallel Kinematic Positioning System Table of Contents aes ah canta He Ordres ii EC Declaration Of IM Definitions and 5 1 16 ease vi GS Sn vii viii 1 0 Introduction 1 1 15 ci eene 1 2 0 DescrIDIOB conipeoies dread lion on elders 2 3 0 Characteristics eee 3 3 1 Mechanical Speci
8. fications eese eene 3 3 2 Max Cantilever Distance of the Load eee 3 Bid Jd METRE es 3 4 0 Connection to the HXP100 ELEC Controllers 4 Warnings on Controllers i efe rennen 4 42 COBBeCHOD o 5 5 5 0 Dimensions trente 1 6 0 Maintenance T 1 eene 8 6 L Maint n li e andern 8 6 2 T nere re I e HET err Ras 8 Service tec creatam 9 QD Newport Experience Solutions iii EDH0239En1040 07 15 HXP100 MECA 6 Axis Parallel Kinematic Positioning System QD Newport EDH0239En1040 07 1 5 iv Experience Solutions HXP100 MECA 6 Axis Parallel Kinematic Positioning System EC Declaration of Conformity SOLO VOOM OL TS v SAM que que qua qua qua du Or KDR NC PA NA NC NA NDA NA Ue SS HXP100 MECA QU M AO Declaration of Conformity S following Annex 60 x of Directive 2006 42 EC on machinery Lo ae A MS 00 P The manufacturer MICRO CONTROLE Spectra Physics D ZN A gt 9 rue du bois sauvage Gr GO F 91055 Evry FRANCE A SUN Hereby declares that the machinery M we 0 Description HXP100 MECA x Function 6 Axis Kinematic Positioning System P Models HXP100 MECA Me OND PN Ie the technical file
9. o appear on the product where safety related issues occur N The exclamation symbol may appear in warning and caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible General Warning or Caution The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety and preservation of the equipment or important tips WARNING Warning indicates a potentially dangerous situation which can result in bodily harm or death CAUTION Caution indicates a potentially hazardous situation which can result in damage to product or equipment NOTE Note indicates additional information that must be considered by the user or operator European Union CE Mark The presence of the CE Mark on Newport Corporation equipment means that it has been designed tested and certified as complying with all applicable European Union CE regulations and recommendations Warnings and Cautions ATTENTION This stage is a Class A device In a residential environment this device can cause electromagnetic interference In this case suitable measures must be taken by the user QD Newport EDH0239En1040 07 1 5 vi Experience Solutions HXP100 MECA 6 Axis Parallel Kinematic Positioning System Warnings WARNING The motion of objects of all types carries poten
10. of which was compiled by QU e Mr Dominique DEVIDAL Quality Director V MICRO CONTROLE Spectra Physics Zone Industrielle B P 29 oF we F 45340 Beaune La Rolande France C SN complies with all the relevant provisions of the Directive 2006 42 EC on machinery complies with all the relevant provisions of the Directive 2014 30 EU relating to electro A im compatibility g ONG ne a iy x X was designed and built in accordance with the following harmonised standards NA NF EN 61326 1 2013 Electrical equi f l and A 1 Electrical equipment for measurement control an Y NS laboratory use EMC requirements Part 1 General requirements WA e G E NF EN 55011 2010 A1 2011 Class A OAS was designed and built in accordance with the following other standards oe NF EN 61000 4 2 NF EN 61000 4 3 9 NF EN 61000 4 4 SN NF EN 61000 4 5 Cd NF EN 61000 4 6 0 6 oD OS ORIGINAL DECLARATION 0 6 gt nt Done in Beaune La Rolande on 26 June 2015 mi S SN Dominique DEVIDAL En P 7 A W Quality Director 6s ONG A 4 ee gg 5 SLI OA Newport Experience Solutions EDH0239En1040 07 15 HXP100 MECA 6 Axis Parallel Kinematic Positioning System Definitions and Symbols The following terms and symbols are used in this documentation and als
11. ped or the case has been damaged switch off struts power and then disconnect the HXP controller from power supply Contact your Newport service facility and request repairs WARNING Do not attempt to modify this Hexapod this may cause an electric shock or downgrade its performance WARNING Do not exceed the usable depth indicated on the mounting holes see section Dimensions Longer screws can damage the mechanics or cause a short circuit Newport tiefe Solone vii EDH0239En1040 07 15 HXP100 MECA 6 Axis Parallel Kinematic Positioning System Cautions CAUTION Do not place this Hexapod in a hostile environment such as X Rays hard UV orin any vacuum environment CAUTION Do not use the top plate for handling This may cause it to malfunction CAUTION Do not manipulate struts This may cause it to malfunction CAUTION Do not use the Hexapod neither up side down nor horizontally CAUTION Do not place this Hexapod in a location affected by dust oil fumes steam or high humidity This may cause an electric shock CAUTION Do not leave this Hexapod in places subject to extremely high temperatures or low temperatures This may cause an electric shock Operating temperature 10 to 35 C Storage temperature 10 to 40 C in its original packaging CAUTION Do not move this Hexapod if struts power is on Make sure that the cable to the electronics is disconnected befo
12. plications Please see HXP100 ELEC manual for further instructions on how to enable the backlash compensation WARNING A grounding threaded hole must be connected to ground to avoid electrical disturbances generated by ground loops Newport EDH0239En1040 07 15 6 Experience Solutions HXP100 MECA 6 Axis Parallel Kinematic Positioning System mn Dimensions 1 HOLE 9 394 o 6 HOLES M6 THD EQUIDISTANT AT 60 ON 96 9 175 4 HOLES M6 THD ON SQR 1 97 50 006 9 109 DEPTH 31 8 TOP VIEW 4 CLR SLOTS FOR 1 4 SCREW ON 4 0x8 0 101 6 x 203 2 OR M6 SCREW ON 3 97 9 100x200 N 6 CLR HOLES FOR M6 SCREW EQUIDISTANT AT 60 ON 97 9 200 2 CLR HOLES 394 197 100 50 FOR 1 4 SCREW 8 0 203 2 SPACING i 1 HOLE M6 THD DEPTH 20 5 12 HOLES M6 THD 1 97 6 HOLES M6 THD lt 50 gt 3 CLR HOLES FOR M6 SCREW EQUIDISTANT AT 60 EQUIDISTANT AT 120 ON 04 9 125 a 3 94 100 gt ON 911 0 280 DEPTH 39 10 MODEL SHOWN HXP100 MECA DIMENSIONS IN INCHES AND MILLIMETERS CARRIAGE 9 200 gt A l TOP PLATE 8 23 55 209 HEXAPOD AT MIDDLE POSITION BASE pure d Denice wane Moan BASE PLATE NOTE Top and base plates of the HXP100 MECA Hexapod a
13. re moving the Hexapod Failure to do so may damage the cable and cause an electrical shock CAUTION Be careful that the Hexapod is not bumped when it is being carried This may cause it to malfunction CAUTION When handling this Hexapod always unplug the equipment from the power source for safety CAUTION Contact your Newport service facility to request cleaning and specification control every year QD Newport EDH0239En1040 07 15 viii Experience Solutions HXP100 MECA 6 Axis Parallel Kinematic Positioning System 6 Axis Parallel Kinematic Positioning System HXP100 MECA Hexapod 1 0 Introduction This manual provides operating instructions for the Hexapod that you have purchased CAUTION Do not use the top plate for handling CAUTION Do not manually turn struts CAUTION Please read chapters 3 3 and 5 0 carefully before operating your Hexapod CAUTION Do not use the HXP100 MECA Hexapod neither up side down nor horizontally NOTE This product complies with the RoHS directive Restriction of Hazardous Substances GO Newport Experience Solutions 1 EDH0239En1040 07 15 HXP100 MECA 6 Axis Parallel Kinematic Positioning System 20 Description As a standard feature the HXP100 ELEC controller allows the user to choose a virtual pivot point in space for all rotations EDH0239En1040 07 15 The HXP10
14. re made of anodized aluminum GO Newport Experience Solutions EDH0239En1040 07 15 HXP100 MECA 6 Axis Parallel Kinematic Positioning System m Maintenance 6 1 6 2 EDH0239En1040 07 15 RECOMMENDATION It is recommended to contact our After Sales Service which will know to define the appropriate maintenance for your application Maintenance The Hexapod requires no particular maintenance Nevertheless this is a precision mechanical device that must be kept and operated with caution PRECAUTIONS The Hexapod must be used or stocked in a clean environment without dust humidity solvents or other substances RECOMMENDATION It is recommended to return your Hexapod to Newport s After Sales Service after every 2000 hours of use for lubrication If your Hexapod is mounted on a workstation and cannot be easily removed please contact Newport s After Sales Service for further instructions Repair CAUTION Never attempt to disassemble a component of the Hexapod that has not been covered in this manual To disassemble a non specified component can cause a malfunction of the stage If you observe a malfunction in your Hexapod please contact us immediately to arrange for a repair CAUTION Any attempt to disassemble or repair a Hexapod without prior authorization will void your warranty Newport 8 Experience Solutions Service Form Your Local Representative Tel
15. ted In addition two user definable coordinate systems are provided called tool moves with the Hexapod and work stationary coordinate systems Incremental displacements are possible in either one of these systems in user friendly Cartesian coordinates and positions can be easily calculated from one system to the other by a function call without the need for complex external coordinate transformations A TOOL WORK u CARRIAGE Absolute moves and positions are i defined in the work coordinate system Incremental moves can 3 BASE be done in the tool or in the work WORLD ps onto Sees see LL coordinate systems gt Hexapod Trajectory Standard Motion H RightPath Z Motion mm RightPath Trajectory Control enables minimal runout in linear and arc trajectories 30 20 10 0 10 20 30 X Motion mm Newport 2 Experience Solutions HXP100 MECA 6 Axis Parallel Kinematic Positioning System m Characteristics 3 1 Mechanical Specifications X Y 2 z Travel range 27 5mm 25 mm 14 11 5 10 5 19 MIM Minimum incremental motion 0 5 um 0 5 um 0 25 um 0 25 mdeg 0 25 mdeg 0 5 mdeg Uni directional repeatability typical 0 5 um 0 5 um 0 25 um 0 25 mdeg 0 25 mdeg 0 5 mdeg Bi directional repeatability typical 4 um 4 um 2 um 2 mdeg 2 mdeg 4 mdeg 1 um 1 um
16. tial risks for operators Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved WARNING Do not use this Hexapod when struts are emitting smoke or is unusually hot to the touch or are emitting any unusual odor or noise or is in any other abnormal state Stop using the Hexapod immediately switch off struts power and then disconnect the HXP controller from power supply After checking that smoke is no longer being emitted contact your Newport service facility and request repairs Never attempt to repair the Hexapod yourself as this can be dangerous WARNING Make sure that this Hexapod is not exposed to moisture and that liquid does not get into the Hexapod Nevertheless if any liquid has entered the Hexapod switch off struts power and then disconnect the HXP controller from power supply Contact your Newport service facility and request repairs WARNING Do not insert or drop objects into this Hexapod this may cause an electric shock or lock the drive Do not use this Hexapod if any foreign objects have entered the Hexapod Switch off struts power and then disconnect the HXP controller from power supply Contact your Newport service facility for repairs WARNING Do not place this Hexapod in unstable locations such as on a wobbly table or sloping surface where it may fall or tip over and cause injury If this Hexapod has been drop
Download Pdf Manuals
Related Search