4200_SCS-PK3 Quick Start Guide
Contents
1. 9 Model 4200 TRX Ultra Low re avial to anal cablesthat 1 The Project Navigator should be displayed when KITE starts Noise PreAmp Triaxial connects 4200 PA to a test If the Project Navigator is not displayed open the View menu Cable fixture and select Project Navigator 3 Model 4200 MTRX 1 Ultra low noise SMU 2 Double click vds id located under 4terminal n fet to display triaxial cable mini triaxial the Definition tab in the KITE Workspace connects 4200 SMUs to a test fixture Project Tree M default VHE 4terminal n fet VIE vde id E vtlin a JE subvt 4 TG 439 nMOSFET DUT 1 Plug into the test socket that is labeled DC ONLY 5 Model 8101 PIV 1 Component Test Fixture Model 4200 PA Remote 1 PreAmp Model 4200 SMU module l V test The Definition tab shown here is where you define the test Definition Sheet Graph Status Test Notes Fonda Tome Erlen Dev Speed Nowa Mat Gate SMU1 v FORCE MEASURE Step V Master Measure NO Measure V YES Stop SV Range V Best Fixed Step IV Compt 0 14 Points 4 dtemmnalntet JF vdedt1 1 Source GNDU v FORCE MEASURE Common OV Measure NA Measure V NA To define the test I To change the setup for GNDU or a SMU click FORCE MEASURE to display a Settings dialog box Settings should be SMUI Provide a voltage step function for four different gate voltages 2 V 3 V 4 V and 5 V2. 440 248 6168 e 1 888 KEITHLEY e www keithley com BELGIUM Sin Pieters Leeuw Ph 02 3630040 Fax 02 3630064 info keithley nl www keithley nl ITALY Peschiera Borromeo Mi Ph 02 553842 1 Fax 02 55384228 info keithley it www keithley it SINGAPORE Singapore Ph 65 6747 9077 Fax 65 6747 2991 SEA keithley com www keithley com CHINA Beijing Ph 86 10 8447 5556 Fax 86 10 8225 5018 China keithley com www keithley com cn JAPAN Tokyo Ph 81 3 5733 7555 Fax 81 3 5733 7556 info jp keithley com www keithley jp SWITZERLAND Z rich Ph 044 8219444 Fax 044 8203081 info keithley ch www keithley ch Copyright 2012 Keithley Instruments Inc FRANCE Saint Aubin Ph 01 64532020 Fax 01 60117726 info keithley fr www keithley fr KOREA Seoul Ph 82 2 574 7778 Fax 82 2 574 7838 keithley keithley co kr www keithley co kr TAIWAN Hsinchu Ph 886 3 572 9077 Fax 886 3 572 9031 info_tw keithley com www keithley com tw Printed in U S A GERMANY Germering Ph 089 84930740 Fax 089 84930734 info keithley de www keithley de MALAYSIA Penang Ph 60 4 643 9679 Fax 60 4 643 3794 SEA keithley com www keithley com UNITED KINGDOM Theale Ph 0118 9297500 Fax 0118 9297519 info keithley co uk www keithley co uk INDIA Bangalore Ph 080 26771071 72 73 Fax 080 26771076 support_india keithley de www keithley com NETHERLANDS Gorinchem Ph 0183 635333 Fax 0183 630821 in
3. On the toolbar click P While the test is running the Run Test button turns gray and the Abort Test button turns red In addition the Measuring indicator on the lower right corner of the front panel is on 3 When the test is complete the Run Test button turns green View results of the vds id test To view data from the vds id test you can use the data sheets which are similar to Microsoft Excel spreadsheets To view the results of the vds id test 1 Click the Sheet tab for the test Data Displays the data Calc Provides data manipulation and graphing tools similar to Microsoft Excel Settings Information about the last test that was executed Definition Sheet Graph Status Test Notes 0 31719E3 E00 00E 3000 4 87596 3 E00 000E 3 Some see ome Some Same 3 Tome ee DS RE SSBISNRARSORUSSSRS RTOS IS eenevnewnae 0 6276763 200E 0 6 3I0IE3 270E 0 3ano0e 0 Noames 27umE S 000E 0 _11 8245E 3 2 8000E 0 Das DANNE gt Data Aes Attias J Se Somminaletet JE vdridti Print the results of the vds id test You can print the Data Calc or Settings sheet To ptint one ora tew sheets 1 Select the sheet You can also press Ctrl and select multiple sheets to print 2 Select File then Print 3 Choose Selected Sheets 4 Click OK To print the all sheets 1 Select File then Print 2 Choose Entire Workbook 3 Click OK To export the information 1 2 3 A
4. SMU2 Perform a 51 point sweep of drain voltage 0 V to 5 V at each gate voltage A current measurement is performed at each voltage sweep point Change the settings as needed Click Save All on the toolbar above the Definition tab Run the vds id test KITE can run a single test or a sequence of tests To run a single test check the test and click it The test should be highlighted When you click only that k will run For example in the following graphic when you click only the vds id test will run E za default a se subsite a MEE dterminal n fet OJE vasid Se WIE igvg OJE cv nmostet ME pulse vds id 0 OJE wareform meas d 1 3teminal npr bit OJE vee ic RSS ace ok os Introduction To run a sequence of tests check the tests you want to run then check and click the device subsite or project item that contains the tests For example in the following graphic when you click gt all the checked tests under 4terminal n fet will run MEZ InitializationSteps M E proberinit ME Subsite o ME vds id 1x i e vK 3terminal npn bjt i ae connect Connect RASE l Next steps In the following example only one test is run 2 Select the tab below the data for the type of information you would like to view To run the vds id test 1 In the navigator double click the vds id test to highlight it and display the data sheets for the test 2
5. test cables or any other instruments while power is applied to the circuit under test ALWAYS remove power from the entire test system and discharge any capacitors before connecting or disconnecting cables or jumpers installing or removing switching cards or making internal changes such as installing or removing jumpers Do not touch any object that could provide a current path to the common side of the circuit under test or power line earth ground Always make measurements with dry hands while standing on a dry insulated surface capable of withstanding the voltage being measured The instrument and accessories must be used in accordance with its specifications and operating instructions or the safety of the equipment may be impaired Do not exceed the maximum signal levels of the instruments and accessories as defined in the specifications and operating information and as shown on the instrument or test fixture panels or switching card When fuses are used in a product replace with the same type and rating for continued protection against fire hazard Chassis connections must only be used as shield connections for measuring circuits NOT as safety earth ground connections If you are using a test fixture keep the lid closed while power 1s applied to the device under test Safe operation requires the use of a lid interlock oee gt If a screw is present connect it to safety earth ground using the wire recommended in th
6. 5 Open the worksheet that contains the data to be exported Select Save As in the upper right corner Choose Entire Workbook Click OK From the Save As dialog box specify a file name and path The default directory path for exporting data is C S4200 kiuser expott Click Save View the graph for the vds id test To display the graph for the vds id test click the Graph tab for the test A sample graph is shown below In this example there are four I V curves one for each gate voltage Customizing the graph The graph was customized to include the Legend box and use different colors for the graph series These options are available through the Graph Settings button To customize a gtaph 1 Right click the graph The Graph Settings menu is displayed You can also select the Tools menu and select Graph Settings 2 To include a Legend and Title select those options from the Graph Settings menu nye Data Variables 1 Data Variables 2 w Legend lt Test Conditions v Title 3 To use different colors for the graph series select Graph Properties then select Series The Data Series Properties dialog box is displayed Data Variables 2 w Legend Test Conditions v Tite Graph Properties p Comment Data Varieties 1 ae Data Variables 2 nay Graph Area Synchronize Graphs ra Mone Serres Repet Test Conditions 4 Select the colors for each series Data Se
7. for example setting the line voltage or replacing consumable materials Maintenance procedures are described in the user documentation The procedures explicitly state if the operator may perform them Otherwise they should be performed only by service personnel Service personnel are trained to work on live circutts perform safe installations and repair products Only properly trained service personnel may perform installation and service procedures Keithley Instruments products are designed for use with electrical signals that are rated Measurement Category I and Measurement Category II as described in the International Electrotechnical Commission TEC Standard IEC 60664 Most measurement control and data I O signals are Measurement Category I and must not be directly connected to mains voltage or to voltage sources with high transient overvoltages Measurement Category II connections require protection for high transient overvoltages often associated with local AC mains connections Assume all measurement control and data I O connections are for connection to Category I sources unless otherwise marked or described in the user documentation Main supply voltage fluctuations not to exceed 10 of the nominal voltage Exercise extreme caution when a shock hazard is present Lethal voltage may be present on cable connector jacks or test fixtures The American National Standards Institute ANSI states that a shock hazard exists when voltage
8. levels greater than 30 V RMS 42 4 V peak or 60 V DC ate present A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring Operators of this product must be protected from electric shock at all times The responsible body must ensure that operators ate prevented access and or insulated from every connection point In some cases connections must be exposed to potential human contact Product operators in these circumstances must be trained to protect themselves from the risk of electric shock If the circuit is capable of operating at or above 1000 V no conductive part of the circuit may be exposed Do not connect switching cards directly to unlimited power circuits They ate intended to be used with impedance limited sources NEVER connect switching cards directly to AC mains When connecting sources to switching cards install protective devices to limit fault current and voltage to the card Before operating an instrument ensure that the line cord is connected to a properly grounded power receptacle Inspect the connecting cables test leads and jumpers for possible wear cracks or breaks before each use When installing equipment where access to the main power cord is restricted such as rack mounting a separate main input power disconnect device must be provided in close proximity to the equipment and within easy reach of the operator For maximum safety do not touch the product
9. MU and preamp terminals is not hazardous Connections for testing To connect the intetlock cable 1 a on ee er If you are testing discrete devices you need a test fixture that is ines aes oa RER ee aa followin equipped with 3 lug triaxial connectors The Model 8101 PIV test 8 fixture that is included with the Model 4200 SCS PK1 allows the graphic Model 4200 SCS to be connected to a discrete device For connections to a probe station for on wafer testing see the Model 4200 SCS Reference Manual NOTE The outer shield of the triaxial cables connects the Model 8101 PIV to the Model 4200 chassis which connects to common 2 Connect the other end of the connector to the test fixture Connect Make keyboard and printer connections 1 Connect the printer connection to the USB port or the parallel port as needed for your printer 2 Connect the keyboard to the USB port or to the mouse and keyboard connector on the rear panel You can also connect an external monitor user supplied to the Model 4200 SCS Connect the test fixture and DUT to the 4200 SCS To connect the test fixture and DUTs for the I V test see the I V Test section graphic Make connections for the I V test Power up the instrument The 4200 SCS operates from a line voltage of 100 V to 240 V ata frequency of 50 Hz or 60 Hz Make sure the operating voltage in your area is compatible A WARNING The power cord supplied with the Mod
10. RE INVENTING TEST amp MEASUREMENT THROUGH SPEED AND SIMPLICITY 2200 505 TERIEATICN SYSTEM A GREATER MEASURE OF CONFIDENCE Safety precautions Observe the following safety precautions before using this product and any associated instrumentation Although some instruments and accessories would normally be used with nonhazardous voltages there are situations where hazardous conditions may be present This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury Read and follow all installation operation and maintenance information carefully before using the product Refer to the user documentation for complete product specifications If the product is used in a manner not specified the protection provided by the product watranty may be impaired The types of product users are Responsible body is the individual or group responsible for use and maintenance of equipment for ensuring that the equipment is operated within its specifications and operating limits and for ensuring that operators are adequately trained Operators use the product for its intended function They must be trained in electrical safety procedures and proper use of the instrument They must be protected from electric shock and contact with hazardous live circuits Maintenance personnel perform routine procedures on the product to keep it operating properly
11. appropriate output off state and source and compliance levels before connecting the instrument to a device that can deliver energy Failure to consider the output off state and source and compliance levels may result in damage to the instrument or to the device under test Introduction The easy to use Model 4200 SCS Semiconductor Characterization System performs lab grade DC and pulse device characterization real time plotting and analysis with high precision and sub femtoamp resolution The 4200 SCS offers the most advanced capabilities available in a fully integrated characterization system including a complete embedded computer with a Microsoft Windows operating system and mass storage Its self documenting point and click interface speeds and simplifies the process of taking data so users can begin analyzing their results sooner CD ROM contents The CD ROM that is included with your instrument contains Installation files for KITE These can only be installed on the Model 4200 SCS Introduction Manuals amp Specs PDFs of the User Manual Reference Manual Technical Data and Quick Start Guide documents Release Notes The latest software release notes and license agreement Application Notes Application notes that demonstrate specific applications Technical Notes Specific technical information White Papers General discussions of testing Data Sheets Data sheets for the 4200 SCS and related
12. cking list for additional items that might have shipped with your instrument O ON A a fk WN e Introduction Connect the instrument Important test system safety information This system contains instruments that can produce hazardous voltages It is the responsibility of the test system installer maintenance personnel and service personnel to make sure the system is safe during use and is operating properly You must also realize that in many test systems a single fault such as a software error may output hazardous signal levels even when the system indicates that there is no hazard present It is important that you consider the following factors in your system design and use The international safety standard IEC 61010 1 defines voltages as hazardous if they exceed 30 V RMS and 42 4 V peak or 60 V DC for equipment rated for dry locations Keithley Instruments Inc products are only rated for dry locations Read and comply with the specifications of all instruments in the system The overall allowed signal levels may be constrained by the lowest rated instrument in the system For example if you are using a 500 V power supply with a 300 V DC rated switch the maximum allowed voltage in the system is 300 V DC Make sure any test fixture connected to the system protects the operator from contact with hazardous voltages hot surfaces and sharp objects Use shields barriers insulation and safety interlocks to accomp
13. e user documentation This symbol on an instrument means caution risk of danger The user should refer to the operating instructions located in the user documentation in all cases where the symbol is marked on the instrument This symbol on an instrument means caution risk of electric shock Use standard safety precautions to avoid personal contact with these voltages This symbol on an instrument shows that the surface may be hot Avoid personal contact to prevent burns This symbol indicates a connection terminal to the equipment frame If the mercury symbol is on a product it indicates that mercury is present in the display lamp Please note that the lamp must be properly disposed of according to federal state and local laws WARNING This heading in the user documentation explains dangers that might result in personal injury or death Always read the associated information very carefully before performing the indicated procedure CAUTION This heading in the user documentation explains hazards that could damage the instrument Such damage may invalidate the warranty Instrumentation and accessories shall not be connected to humans Before performing any maintenance disconnect the line cord and all test cables To maintain protection from electric shock and fire replacement components in mains circuits including the power transformer test leads and input jacks must be purchased from Keithley Instruments Standard fuses w
14. ed In this case you must update the system configuration Run KCON from the Tools menu select Upgrade PreAmp and RPM Configuration Note that PreAmps are SMU specific For example a PreAmp that is configured for SMU1 cannot be connected to SMU2 Next steps See the Model 4200 SCS Complete Reference which is preinstalled on your system To access the Complete Reference click Help in the KITE menu You can also press F1 The Model 4200 SCS Complete Reference includes the following documents Model 4200 SCS User Manual Contains basic information about using the system plus application based examples that will help familiarize you with the instrument Model 4200 SCS Reference Manual Provides detailed information about all features of the instrument Application notes Detailed applications that demonstrate specific applications Data sheets Technical data regarding the 4200 SCS and related accessories Keithley Instruments website y See www keithley com for support and additional information about the instrument FAQs Next steps A GREATER Specifications are subject to change without notice All Keithley trademarks and trade names are the property of Keithley Instruments Inc All other trademarks and trade names are the property of their respective companies KEITHLEY MEAS URE O F CONFIDENCE KEITHLEY INSTRUMENTS INC e 28775 AURORA RD e CLEVELAND OH 44139 1891 e 440 248 0400 e Fax
15. el 4200 SCS contains a separate ground wire for use with grounded outlets When proper connections are made the instrument chassis is connected to power line ground through the ground wire in the power cord Failure to use a grounded outlet may result in personal injury or death due to electric shock A CAUTION Operating the instrument on an incorrect line voltage may cause damage to the instrument possibly voiding the warranty To connect line power 1 Make sure the front panel power switch is in the off 0 position 2 Connect the socket of the supplied power cord to the power module on the rear panel Power line cord Connect the plug of the power cord to a grounded AC outlet Turn on the instrument by pressing the front panel POWER switch to the ON position The instrument starts up and loads the Microsoft Windows operating system and the Keithley Interactive Test Environment KITE software 4200 SCS in ACTERIZATION SYSTEM INTERLOCK HARD DISK NOTE The first time you start the KTE Interactive software tool the license agreement is displayed You must answer Yes to use the tool Connect Make connections for the I V test If you are using the supplied test fixture connect the MOSFET and test fixture as shown in this diagram OOOO OOOO OOS OBO OAR A OOOO OA AOS Perform an l V test on a MOSFET Item Description Qty Notes 1 Model 4200 SCS system 1 Tostarta test
16. equipment This also includes brochures and other information For additional support information see http www keithley com support Unpack and inspect the instrument To unpack and inspect the instrument 1 Inspect the box for damage 2 Open the top of the box 3 Remove the bag that contains the documentation standard accessories CD ROMs and optional accessories such as rack mount hardware 4 Remove the packaging insert 5 Remove the 4200 SCS from the bottom Do not lift the 4200 SCS from the front bezel Lifting the instrument by the front bezel can cause instrument damage 6 Inspect the instrument for any obvious signs of physical damage Report any damage to the shipping agent immediately In the 4200 SCS PK1 bundle you should have received the Model 4200 SCS Semiconductor Characterization System with Model 4200 SMU medium power SMUs two Model 4200 SCS KTE Interactive CD Power line cord Also included should have been the accessories in the photograph Model 4200 SCS PK1 Quick Start Guide this document Model 8101 PIV component test fixture with sample devices Model 4200 RPC 2 remote PreAmp cables one Model 4200 MTRX ultra low noise SMU triaxial cables two Model 236 ILC 3 safety interlock cable Model 4200 PA remote PreAmp Model 4200 TRX 2 ultra low noise triaxial cables two CAP 31 protective caps with triaxial connectors two Model 4200 SCS User s Manual Refer to the pa
17. fo keithley nl www keithley nl 4200 SCS PK 1 903 01 Rev A June 2012
18. he interlock A WARNING The Model 4200 SCS is provided with an interlock circuit that must be positively activated for the high voltage output to be enabled The interlock facilitates safe operation of the equipment in a test system Bypassing the interlock could expose the operator to hazardous voltages that could result in personal injury or death Asserting the interlock allows the SMU and preamp terminals to become hazardous SMU and preamp terminals should be considered hazardous even if the outputs are programmed to be low voltage Precautions must be taken to prevent a shock hazard by surrounding the test device and any unprotected leads wiring with double insulation for 250 volts Category l See EN61010 1 safety standards for details Connect If you need voltages greater than 40 volts for testing you must add an interlock switch to the fixture This ensures that hazardous voltages are not present when the exterior enclosure of the fixture is open It also enables the Model 4200 SCS to output higher voltages when the exterior enclosure of the fixture is closed When the safety interlock signal is asserted the switch is closed and the signal is connected to 12 V all the voltage ranges of the SMUs are functional When the safety interlock signal is not asserted the switch is open the 200 V range on the SMUs is disabled limiting the nominal output to 40 V If you need voltages greater than 40 volts you must als
19. ith applicable national safety approvals may be used if the rating and type are the same Other components that are not safety related may be purchased from other suppliers as long as they ate equivalent to the original component note that selected parts should be purchased only through Keithley Instruments to maintain accuracy and functionality of the product If you are unsure about the applicability of a replacement component call a Keithley Instruments office for information To clean an instrument remove power from the instrument Use a damp cloth or mild water based cleaner Clean the exterior of the instrument only Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument Products that consist of a circuit board with no case or chassis e g a data acquisition board for installation into a computer should never require cleaning if handled according to instructions If the board becomes contaminated and operation is affected the board should be returned to the factory for proper cleaning and servicing Power and environmental specifications For indoor use only Power supply 100 V to 240 V AC 50 Hz to 60 Hz 1000 VA Operating altitude Maximum 2000 m above sea level Operating 10 C to 40 C 5 to 80 relative humidity non condensing temperature Storage 15 C to 60 C 5 to 90 relative humidity temperature non condensing A CAUTION Carefully consider and configure the
20. lish this Cover the device under test DUT to protect the operator from flying debris in the event of a system or DUT failure Double insulate all electrical connections that an operator can touch Double insulation ensures the operator is still protected even if one insulation layer fails Refer to IEC 61010 1 for specific requirements Make sure all connections are behind a locked cabinet door or other barrier This protects the system operator from accidentally removing a connection by hand and exposing hazardous voltages Use high reliability fail safe interlock switches to disconnect power sources when a test fixture cover is opened Where possible use automatic handlers so operators are not required to access the DUT or other potentially hazardous areas Provide training to all users of the system so they understand all potential hazards and know how to protect themselves from injury In many systems during power up the outputs may be in an unknown state until they are properly initialized Make sure the design can tolerate this situation without causing operator injury ot hardware damage NOTE To keep users safe always read and follow all safety warnings provided with each of the instruments in your system Install the instrument The Model 4200 SCS can be used on a bench or in a rack Please see the instructions that came with your rack mount kit if you are installing the Model 4200 SCS in a rack Wiring t
21. o connect the exterior of the test fixture enclosure to protective earth safety eround Take care to ensure that the wiring FORCE GUARD and SENSE in the fixture does not electrically contact the exterior enclosure There are low voltage and high voltage test fixtures for the Model 4200 SCS Low voltage fixtures such as the Model 8101 PIV that is included with this bundle are intended for applications that are less than 40 volts For these applications an interlock is not needed High voltage test fixtures such as the Keithley Instruments LR8028 can be used with applications that are greater than 40 volts The test fixture has a safety interlock switch connected to its lid When the lid is closed the interlock circuit is closed asserted and SMU 200 V ranges are enabled Conversely the interlock circuit is open de assetted when the lid is open and the SMU 200 V ranges are disabled High voltage test fixtures require extra precaution to ensure there are no shock hazards For correct operation with the Model 4200 SCS the test fixture should have a normally open switch that is used for the interlock An open interlock condition occures when the switch is open NOTE For the examples shown in this quick start guide you do not need to use an interlock The Model 4200 SCS functions on all current ranges and up to 40 volts without asserting the interlock When the interlock is not asserted the maximum voltage on the S
22. ries Properties Senes Data Draini 1 na Col eS e Lo DstaDrainl 1 DataDranl 2 D ji Draini 3 Data Drainl 4 z 5 3 5 Click OK The series and color information is displayed FAQs Next steps Introduction Connect V test FAQs My data looks odd or is wrong What should I do Verify the connections from the instrument to the test fixture Also check the connections from the DUT to the test fixture socket The Run Test button is not green You cannot run the selected test if the Run Test button P is not green This can occur Ifa test is still running The check box for the test is cleared Changes to the test setup were made but not saved If a selected test will still not run click the Status tab for the test The tab provides status information for the test I cannot unplug the mini triaxial cable Model 4200 MTRX from the SMU The mini triaxial connector is a locking connector To remove it pull the knurled part of the connector back A configuration error has been detected and I cannot launch KITE This occurs when the physical configuration does not match the KCON defined configuration or when there are communication problems between instruments and the Model 4200 SCS Run KCON from the Tools menu select Validate Configuration to verify the system configuration This can also occur if the PreAmp or RPM is removed or reconnect
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