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500, 600, 700 Digital SERIES GAS MASS FLOWMETER

1. eeseeeneeeenn nennen 34 System Troubleshooting ssssssssssssesseeeeeee nnne nens 34 Return 94 System Troubleshooting Chart Table 5 1 La 35 CALIBRATION FIELD CHECKS iraniana aiina nenret a adii aiat aiaa 36 enc TEE 36 Equipment Required uussssnnssnnnennnnannnnnnnannennnnannnnnnnannnnnnnannnnnnnannnnnnnnnnnnnn nen 36 Calibration Field Checks nanna ann ran 36 INPUT OUTPUT I O DESIGNATIONS AND ELECTRICAL SPECIFICATIONS 37 I O Designations Electrical Connections nanna 37 I O Electrical Specifications nanna 38 Simple Valve Override SIM VO nanna anna tran anna stat 41 Digital Interfacing i ai 41 POLICIES AND CERTIFICATE OF WARRANTY sese 42 PVCS EE 42 nV arp 42 Sete a 42 eruitur c 42 Changes of Order rn 42 pic 42 Certificate of Warranty teorie iret etis a 42 EXPLODED VIEW OF PORTER DIGITAL SERIES MASS FLOW CONTROLLER SECTION 1 INTRODUCTION System Description Porter Mass Flow products reflect almost four decades of experience in the design and manufacture of precision instruments for the measurement and control of gas flow Porter Mass Flow products incorporate design principles that are simple and straightforward yet flexible enough to operate under a wide variety of process parameters The result is mass flowmeters MFM s mass flow controllers MFC s and m
2. Flow signal to setpoint is offset Gas leak MFM Check downstream gas connections Check O ring seals in MFM and valve Flow signal oscillates is at low value or no signal Insufficient pressure drop Increase supply pressure Excessive pressure drop Lower supply pressure Jumpy supply pressure Replace upstream pressure regulator Flow indication pegged saturated up or down scale PCB assembly or sensor assembly failure e g sensor open Return to factory for repair Flow indication appears to be erroneous Digital display Check digital display against digital voltmeter at pin 2 of the 9 pin D connector to signal common e g full scale display should equal 5 0 Vdc on voltmeter Change in composition of metered gas Check gas supply Gas leaks MFM Check downstream connections Drift or shift in PCB assembly Replace PCB assembly Recalibration required 35 SECTION 6 CALIBRATION FIELD CHECKS General Porter Instrument s Digital Series MFM s and MFC s are shipped calibrated to the customer s operating conditions within the tolerances given in the specifications specified in Section 2 If service is required including replacement of the PCB assembly recalibration at Porter may be required This user s manual calibration section is general in nature in describing field checks Porter factory calibration includes Precise
3. Reset module soft reset Note To make sure the parameter is accepted send a 0 first Init reset key parameter Init and reset security key command for network parameter settings Make 64 to enable changing of secured parameters Make 0 again to reset Default setting is 82 Note When an instrument powers up this value will be reset to 82 always automatically Wink Unsigned char in range 0 9 enables master to let the instrument connected to that channel wink for several seconds for tracing the physical location Type of winking depends on instrument This will be either with red and green LED turn by turn or with special characters on an LCD Default setting 0 CONTROLLER PARAMETERS Controller The controlling algorithm for the valve handled by the micro controller consists of several parameters which can be set via the BUS RS232 separate manual Although many parameters could be accessed via BUS RS232 Porter advises not to change these parameters because during manufacturing they have got optimal values for their purposes Controller parameters are classified as setting parameters Changing of controller settings should be performed by or under supervision from trained service personnel only Main parameter settings for controller adjustment are listed below 11 RespOpenO Controller response when starting up from 096 when valve opens Value 128 is default and means no correction Otherwise controller speed will be adj
4. 0 5 sec off 0 5 sec off When value zero is wanted press switch shortly and release it again within 1 sec Note 2 Before each action of flash counting the LED s to be used for counting will flash in a high frequency Pattern 0 1 sec on 0 1 sec off As soon as the switch is pressed down this LED or both LEDs will be off and the counting sequence will start 20 JUMPER SETTINGS BUS INSTRUMENTS Bus instruments consist of 4 jumpers or a DIPswitch on the pc board In normal operation it is not necessary to change the jumpersetting see table 8 If it is Flatconductor inevitable the jumpers can only be reached cable when the uppercase of the housing is opened Opening the uppercase should be f man RO Soar done with great care because the connection of the fieldbus and main p c board is accomplished by a small flatconductor cable Each jumper or switch can be used to make a certain setting by placing a link between a set of pins or by switching one of the DIPswitches as shown fieldbus below interface with DIPswitch off 4 3 2 1 MBC II J1 UK 175 S4 S3 S2 S1 J2 J3 04 201 21 Table 8 Jumper settings digital pc board Switch Jumper When placed on When not placed off Remarks S2 J1 Default settings from Settings loaded from Normally not placed EPROM loaded at non volatile memory at power up power up 53 J2 Analog input used as Digital bus input used Setting depends o
5. fsetpoint capacity0 capacity capacity0 32000 Note Reading back actual values of fsetpoint is also possible When a value has been send to proc1 par1 integer setpoint then this will be converted to the float setpoint for direct reading in the right capacity and unit Capunit Capacity unit is a pointer to select an actual readout unit see list below For BUS instruments all capacity units are available for direct reading Other fieldbusses eg DeviceNet are limited in options for direct reading facilities Overview of capacity unit strings in digital instruments Sensor 1 2 3 4 5 7 E 0 5 X ps KPa cmH20 cmHg atm kgf cem2 unused unused 6 hour minute seconds unused Unused unused unused unused unused unused fg my ug Unused unused unused unused unused unused 9 or k gms Unused unused unused unused unused unused Name Description sensortype Indicator for type of sensor in instrument in relation with a list of units for direct capunit ee wanted capacity unit for direct reading in list of available units Example If you want to readout your instrument in In min then make sure parameter sensortype has value 3 and parameter capunit has value 0 By means of parameter capunitstr the unit string can read back as a 7 character string Capacity unit string Parameter capunitstr consisting of 7 characters st
6. Ambient temperature should not exceed the specified operating range of 10 70 C 14 158 F The MFM s MFC s are attitude insensitive therefore may be mounted in any position Users may specify factory calibration in the exact attitude of the installation Users must specify process gas flow range inlet pressure outlet pressure for Series MFC s operating temperature and calibration standard at the time of ordering When supplying a MFC Porter will computer calculate the appropriate valve orifice for the application based on the user specified operating parameters Gas Connections Each MFM MFC has two 2 threaded process connection ports one 1 located at each end of the base block One 1 serves as the gas inlet while the other is the gas outlet For compression fittings make certain the tubing which mates to the fitting is correctly sized clean and is seated against the shoulder in the body of the compression fitting prior to tightening the connection Tighten the fitting s hex nut sufficiently to prevent leakage For face seal fittings exercise caution so as not to damage the face seal sealing surfaces Whether using compression or face seal fittings refer to the applicable fitting manufacturer s data for specific recommendations regarding installation and tightening Test joints for leaks The inlet connection contains a 325 mesh 44 micron filler screen which prevents foreign matter from entering the instrument Ref
7. and required This connection keeps the high current related to the control valve independent of the more sensitive low level processing circuitry thus avoiding potential noise problems and or ground loops For models having a voltage flow signal output Figure 3 1 also illustrates the circuit arrangement for a typical user provided setpoint control As an alternative to provide this function Porter offers Models CM2 CM4 and PCIMA Interface Modules to use with the Series 200 MFC s having a 0 5 Vdc flow signal output Refer to Section 7 Input Output I O Designations Electrical Connections amp I O Electrical Specifications for more details of the individual pin functions for the 9 pin D connector See Section 8 Current Loop Specifications for details on current loop operation Figure Simplified External Electrical Connections for Digital Series MFM s and MFC s PROCESS FLOW PUSH Digital Display 39 STIPT Flowmeteror gt a gt Ponercommen 0v amp vave voutace Flow Controller 5 gt VLVIST 9 SHIELD No connection required for MFM 15 24 Vdc Power Supply 24 Resistor values 9 1K 15Vdc 19K 24 Vdc power supply Note Voltage flow signal output models may be connected into existing installations having dual power supply voltages of 15 Vdc with no modification to the installation SECTION 4 Figure External Electr
8. details PROFIBUS DP Initialization Abort state or mode Initialization Secured params mode can be changed Secured params can be changed normal flash 0 2 sec on 0 2 sec off Special function mode Instrument is busy performing any special function E g auto zero or self test long flash 2 sec on 0 1 sec off Special mode see specific fieldbus for more details PROFIBUS DP fnotused Idle state slow wink 0 2 sec on 0 2 sec off Wink mode mg By a command sent via BUS the instrument can wink with LED s to indicate its position in a large system normal wink Alarm indication minimum alarm limit maximum alarm Power up alarm or limit exceeded or batch reached Note wink green red green red turn by turn 15 Table 2 Red LED indication modes for digital instrument no switch used Red LED Tm A Indication O Continuously short flash 0 1 sec on 2 sec off Bus communication warning Instrument functions o k See specific fieldbus for more details PROFIBUS DP roe No data exchange Minor between master communication and slave error Automatic recovery normal flash 0 2 sec on 0 2 sec off Warning message An error occurred of minor importance It would be wise to investigate the cause of this You are still able to work with your instrument See specific fieldbus for more details PROFIBUS DP long flash 2 sec on 0 1 sec off See specific fieldbus for more details PROFIBUS DP For special
9. flow OutpitGurrett er 4 mAdc nominal External load resistance reference to signal common 2k minimum for 0 5 Vdc flow signal 3k minimum for 0 10 Vdc flow signal Common reference as tees ct adr areis tae nen tau di e As edis Signal common Digital SERIES MASS FLOW CONTROLLER Note Values typical unless otherwise noted 15 24 Vdc Voltage limits on sent uro Yon im EE 27 6 Vdc Eg EE EE aa det c s 14 0 Vdc UND REE UC A 250 mAdc Flow Signal Output voltage ta sest ee 0 5 0 10 Vdc for 0 100 flow Output AAS 4 mAdc nominal External load resistance reference to signal common 2k ohm minimum for 0 5 Vdc flow signal 3k ohm minimum for 0 10 Vdc flow signal Common reference Signal common Setpoint Input voltage for 0 100 flow control Notmal ha 0 45 0 10 Vdc Nj 2 5 11 Vdc Input Current REE ERE lt 10 microamp for 0 5 Vdc lt 15 microamp for 0 10 Vdc Input Lag CE i i 215k ohm Common reference eos te e E Di TREE ek deben tg nee Signal common I O Electrical Specifications CURRENT LOOP OUTPUT Note Values typical unless otherwise noted Power Supply Voltage limits MIT EEE 27 6 Vdc MID E t o tnt cte ee 14 25 Vdc Current consumption Series MEM Sun nel lt 45 mAdc Series MFO S funne duett dl lt 250 mAdc Flow Signal Output
10. for bus address MAC ID 20 the green LED will flash 2 times and the red LED will flash 0 times for bus address MAC ID 3 the green LED will flash 0 times and the red LED will flash 3 times for bus address 126 the green LED will flash 12 times and the red LED will flash 6 times Rotary Switch Addresses may be set using an optional rotary switch on the side of the instrument 19 Change bus address MAC ID and baudrate First instrument needs to be forced into remote manual install mode Within the time out period of 60 sec it is possible to start changing the bus address MAC ID of the instrument For certain fieldbus systems it is necessary to select the baudrate also Other fieldbus systems only have one baudrate or the baudrate setting will adapt to the setting of the master automatically In these cases baudrate selection is not needed and will be skipped Table 7 Procedure for changing bus address MAC ID and baudrate Force instrument into both LEDs 12 16 sec Press switch during power up and release remote manual flashing normal after when both LEDs indicate normal flash install mode 0 2 sec on 0 2 power up sec Set tens of bus green LED time out Press switch and count green flashes for tens address MAC ID flashes 0 1 sec 60 sec of bus address MAC ID Release when desired on 0 1 sec off amount has been counted count flashes Counts up to max 12 and than starts at 0 start when switch again When counting fails keep
11. number Fluid number is a pointer to the set of calibration parameters For each fluid gas several parameters get values in order to store the calibration for a specific fluid This increases accuracy Fluid number is an unsigned char parameter ucFluidnr in a range of 0 7 where 0 fluid1 and 7 fluid8 Up to 8 fluids can be stored in one instrument Default value O fluid 1 Fluid name Fluid name consists of the name of the fluid of the actual selected fluid number Up to 10 characters are available for storage of this name Parameter is secured and read only for normal users During calibration of the instrument this parameter will get its value Default value is Air Valve output This parameter is the signal coming out of the controller going to the DAC for driving the valve 0 16777215 corresponds with approximately 0 265mAdc for a 60 Ohm valve coil Maximum output voltage is approximately 14V Note that on the Model 701 flow controller maximum output voltage to the valve results in the valve being fully closed DIRECT READING PARAMETERS Sensor type Unsigned char used to select proper set of units for certain sensor together with Counter unit Default settings is 3 Controller Sensor liquid gas mass Controller 130 liquid gas mass Sensor tt e Capacity 10056 Capacity is the maximum value span at 10096 for direct reading in sensor base units The base unit will be determined by sensor typ
12. off See also table 4 for more details When the switch is released instrument will get the default installation address This will be different for each fieldbus system Instrument may be switched off now or will return into normal running operation mode automatically after 60 sec Baudrate setting will not be changed by this action Readout bus address MAC ID and baudrate Pressing the switch 3x briefly with intervals of max 1 second in normal running operation mode will trigger the instrument to show its bus address MAC ID and baudrate For indication the bus address MAC ID the green LED will flash the amount of tens and the red LED the amount of units in the number For indication of baudrate setting both LEDs will flash The flashes are called count flashes and have a pattern of 0 5 sec on 0 5 sec off 18 Table 5 LED indications for bus address MAC ID and baudrate Green LED Red LED Time indication 0 amount of count ff 0 12 sec Tens in bus address MAC ID for flashes instrument 0 12 Maximum off amount of count flashes 0 9 sec Units in bus address MAC ID for instrument 0 9 Maximum m orgaun amount of count flashes 0 10 sec Baudrate setting for instrument 0 10 0 10 Maximum Note Value zero will be indicated by a period of 1 sec off 0 5 sec off 0 5 sec off E g for bus address MAC ID 35 the green LED will flash 3 times and the red LED will flash 5 times
13. off when instrument is normally powered Note short flash 0 1 sec on 2 sec off off 4 8 sec Reset instrument Instrument program will be restarted and all warning and error messages will be cleared During new start up instrument will perform a new self test 17 Table 4 LED indications using micro switch at power up situation of an instrument Green LED RedLED Time Indication I off off 0 4 sec No action Pressing a switch shortly by accident will not cause unwanted reactions of the instrument NM di flash 4 8 sec Restore parameters All parameter settings except fieldbus settings will be restored to situation of final test at Porter production normal E 12 sec See See specific fieldbus for more details fieldbus for more details IPmonsus pP Disse PROFIBUS DP ORT normal flash normal flash 12 16 sec Remote manual install Instrument will get a default address This can be changed by means of micro switch and LEDs See description below for description of this procedure See MEE fieldbus for default installation address PROFIBUS DP Station address MAC ID 63 126 Readout change bus address MAC ID and baudrate Set instrument to default installation address MAC ID First instrument needs to be forced into remote manual install mode The switch needs to be pressed down during power up and released when both LEDs indicate normal flash pattern 0 2 sec on 0 2 sec
14. service Serious purpose only communication error manual intervention needed on Continuously Critical error message A serious error occurred in the instrument Instrument needs service before further use Note If using a digital meter or controller without digital bus hardware i e analog l O only the red LED may flash continuously This is normal with some versions of the device firmware and is simply a warning that no bus hardware is present This is not an indication of any malfunction or abnormality 16 Table 3 LED indications using micro switch at normal running mode of an instrument RedLED Time Indication S O off off 0 1 sec Pressing a switch shortly by accident will not cause unwanted reactions of instrument Pressing the switch 3x briefly with intervals of max 1 sec will force instrument to indicate its bus address MAC ID and evt baudrate See paragraph below for more details 1 4 sec In case of min max alarm or counter batch reached Reset alarm only if reset by keyboard has been enabled See specific fieldbus for more details PROFIBUS DP IDevicenet m off 8 12 sec Auto zero Instrument will be re adjusted for measurement of zero flow NOTE First make sure there is no flow and instrument is connected to power for at least 30 minutes on 12 16 sec Prepare instrument for FLASH mode At next power up FLASH mode will be active This mode will be indicated by both LED s
15. the valve voltage driving the opening and closing of the proportional control valve during closed loop control When pin 5 is instead connected to the power IN power IN pin 7 the SIM VO simple valve override function is activated and the proportional control valve is driven full open When using mechanical switches to provide the SIMVO action momentary push button switches are preferable Iftoggle switches are used they should have a second set of contacts connected to a power source and a VALVE STATUS indicator When operating the VALVE STATUS indicator will remind the operator the valve override switch must be turned to Automatic control operation Mechanical switch contacts should be of atype appropriate for use in dry circuit applications These contacts are usually gold or gold plated 26 Digital Interfacing When digital logic IC s such as TTL or CMOS gates or drivers etc are used to interface an external computer controller with the Series MFG it is important to observe the logic level values required for proper and reliable operation See details under Section 7 Simple Valve Override SIM VO Low Setpoint Command When the setpoint command is less than 2 096 of full scale internally a zero setpoint is commanded to the controller and there will be zero flow The flow signal however is active below 2 0 of full scale and will indicate low leakage levels The typical zero flow voltage readout toler
16. 0 mAdc current loop mode The on board current driver is not isolated and is electrically referenced to the power supply common of the MFM MFC The current driver is usable as a current source and recommended connections are illustrated in Figure 8 As a protection in the event of a loop fault the current driver limits output current When the MFC s PCB assembly is configured for a 4 20 mAdc setpoint input the PCB assembly is also configured as a sourcing current driver Setpoint Input Flow Signal Output Current Driver Mode Power Supply Display Load Reference Reference 4 20 mAdc 4 20 mAdc Sourcing To common To common Figure 8 Recommended Electrical Connections For Sourcing Current Driver FLOW SIGNAL Note Loop supply M FM is Flow CURRENT LOOP Instrument MFC V Supply GAS OUT T 415 424 Vdc COM Sourcing Driver 40 Simple Valve Override SIM VO To Actuate Connect VLVTST to V supply rail Resistance Rsm vo to internal valve driver 0 ohms refer to note 1 Current from V supply rail to VLVTST pin 5 refer to note 1 Non Actuate Defeat after Actuation Disconnect VEVTST refer to note 3 Notes 1 Rsm vo represents a resistance connected between the VLVTST signal connection and the valve driver The valve driver sources current and is limited to approximately 350 ma into a short circuit load 2 Current to from the VLVTST pi
17. ATING DIAGHAM AMPLIFIER HEATER DOWNSTREAM TEMPERATURE S UPSTREAM TEMPERATURE SENSOR Figure Block Diagram of Sensor Assembly 27 Constant power heat input to the heater is supplied by a precision power supply on the PCB assembly Heat from the heater spreads uniformly from the center of the sensor tube At a no i e zero flow condition the temperature at both the upstream and downstream temperature sensor is equal As gas flows through the sensing tube heat is displaced to the downstream temperature sensor creating a temperature differential between the upstream and downstream temperature sensors The upstream and downstream temperature sensors form two 2 legs of a bridge network at the sensor assembly inputs to the PCB assembly The resulting temperature differential is amplified on the PCB assembly to a userspecified 0 5 Vdc 0 10 Vdc or 4 20 mAdc output signals directly proportional to gas mass flow rate Three 3 important factors have been noted thus far specific heat heat input and temperature differential These three 3 factors help define a precise relationship to the mass flow Therefore if the specific heat amp heat input are known and in an acceptable range accurate temperature measurement will produce an accurate indication of flow rate for a particular gas To ensure an accurate flow measurement flow disturbances must be eliminated or greatly reduced Accordingly both the sensor tube and
18. Contact Porter if valve voltage range is beyond values and controller operation difficulty is experienced 2 2 2 3 2 4 2 5 SECTION 7 INPUT OUTPUT I O DESIGNATIONS AND ELECTRICAL SPECIFICATIONS I O Designations Electrical Connections Digital SERIES MASS FLOWMETER D CONNECTOR NAME FUNCTION INPUT COMMENTS PIN OUTPUT 1 TX RS232 Calibration digital data line 2 FSIG Output Flow signal 3 No connection 4 POWER COMMON Input Power common separate wire 0 VDC 5 No connection 6 RX RS232 Calibration digital data line 7 15 24 VDC Input Power in 8 SIGNAL COMMON Input Signal common separate wire 9 SHIELD Input Cable shield Digital SERIES MASS FLOW CONTROLLER D CONNECTOR NAME FUNCTION INPUT COMMENTS PIN OUTPUT 1 TX RS232 Calibration digital data line 2 FSIG Output Flow signal 3 STPT Input Setpoint 4 POWER COMMON Input Power common separate wire 0 VDC 5 VLVTST Output Valve voltage monitor or Simple Valve Input Override SIM VO open 6 RX RS232 Calibration digital data line 7 15 24 VDC Input Power in 8 SIGNAL COMMON Input Signal common separate wire 9 SHIELD Input Cable shield 37 I O Electrical Specifications Digital SERIES MASS FLOWMETER Note Values typical unless otherwise noted 15 24 Vdc Voltage limits 27 6 Vdc MINIMUM een 14 Vdc Current nein 45 mAdc Flow Signal O tp t voltade s eats tee et ta aE E 0 5 0 10 Vdc for 0 100
19. Detailed explanation of operational theory is described in Section 4 Theory of Operation System Features Single Power Supply Operation Voltage output models operate from nominal power supply voltages of 15 45 0 5 Vdc 0 10 Vdc flow signal outputs only to 24 41090 Vdc Current loop models operate from nominal power supply voltages of 15 4539 to 24 11596 Vdc The voltage output models may be directly connected into existing installations having dual power supply voltages of 15 Vdc with no change in performance and no modification to the installation 4 20 mAdc Operation 4 20 mAdc current loop model is available for a sourcing current loop current flow Fast Response Digital Control circuitry significantly reduces dead time when ramping from zero flow conditions and improves MFC response time Internal Voltage Regulation and Temperature Compensation Circuits Stabilizes flow signal output flow signal accuracy and closed loop control during transitional conditions regardless of power supply and temperature fluctuations Attitude Insensitivity MFM s and MFC s may be mounted in any position and are able to maintain tight accuracy specifications with stable control Laminar Flow Element Package Computer determined for each specific application based on flow rate and the physical properties of the process gas Valve Override SIM VO The automatic closed loop control may be temporarily def
20. Porter 500 600 700 Digital SERIES GAS MASS FLOWMETER AND GAS MASS FLOW CONTROLLER TECHNICAL AND USER S MANUAL 015570A FM 1114 Rev A 9 09 TABLE OF CONTENTS EXPLODED VIEW OF PORTER DIGITAL SERIES MASS FLOW CONTROLLER Section 1 INFRODUG TON cie e a ie B E vate e teh 1 System Description nanna enne nnns sinn nennen 1 System Features eod a 1 Section 2 SPEGIFIGATIONS i ter ct aet capo Ue ud m A EL e die idee 2 Specifications for Digital Series Mass Flowmeters and Mass Flow Controllers 2 Digital Series Detailed Features na 3 General PEERS 3 ZEIOING er p 3 Manual Operation amp Bus Digital Operation see 4 PARAMETERS AND PROPERTIES sss eee 5 Normal operation parameters ss near nanna nr nanna nt enne 6 Dual interface operation nanna nanna nanna nnne nene 8 Master slave ratio control 8 DIRECT READING PARAMETERS sese nanna ann enne enne 9 IDENTIFICATION PARAMETERS rna nn nennen nennen nnne 10 SPECIAL PARAMETERS ata e eed en 11 GONTROLLER PARAMETERS Acca thee ede e e tr e Rea 11 SPECIAL INSTRUMENT FEATURES sess eene nennen nnne nenas 13 MANUAL INTERFACE micro switch and LED S nanna 14 Readout change bus address MAC ID and baud rate sse sseenmnnnzennnenzonnnenzzznani 18 JUMPER SETTINGS BUS INSTRUMENTS sse 21 Section 3 INSTALLATION AND OPERATING PROCEDURES senes 23 Gen
21. adjustment and verification of response times includes a test protocol sequence of multiple cycles and corresponding measurement of flow signal and pressure proportional to actual flow measurements Digital parameters are selected to achieve response times 31 Control of the Proportional Control Valve Closed loop control of the proportional control valve requires circuitry for the MFC not required for the MFM The additional circuitry includes a digital PID flow contro algorithm that has as inputs digitized set point and flow signal Flow calibration entered data includes proportional integral and derivative coefficients and constants and valve control span scaling information The output of the digital controller is an analog voltage derived from a D A converter and used to drive the proportional valve The flow signal output approaches and theoretically equals the setpoint signal stabilizing the valve s power drive signal holding the valve in a stable controlled position The 600 Series Mass Flow Controllers contain a normally closed proportional valve and the Model 701 Mass Flow Controllers contain a proportional control valve that is normally open 32 SECTION 5 MAINTENANCE General Successful maintenance and troubleshooting depends upon the ability of the operator or technician to associate a given symptom with the source of problem The more familiar one is with the workings of the MFM or MFC the easier it is to m
22. ake this association Carefully reading Section 4 Theory of Operation is recommended to gain this familiarity Also this knowledge will help in formulating troubleshooting procedures for less common problems The potential problems described in this section are more general in nature Should further assistance be required contact the factory Preliminary Checks When no specific cause of trouble is apparent a good preliminary check is to make a visual inspection of the MFM or MFC in the following areas Q Check interconnecting cable assemblies for loose or broken wires Q Inspect interconnecting cable assemblies for loose fit Q Test fuse in the power supply for continuity Q Remove the housing enclosing the PC board assembly and inspect for discolored or charred components Control Valve Disassembly Major maintenance procedures of cleaning and total MFC disassembly and recalibration are typically done at the factory However for simple maintenance the following steps explain how to disassemble the control valve for cleaning or service refer to exploded view of Series MFC amp Troubleshooting amp Repair Tools list a If the valve is integral with the controller disconnect the electrical connector b Remove the hex nut from the top of the valve assembly and carefully remove the cover coil assembly c Unscrew the valve stem and remove the valve stem and valve stem O ring d Remove the internal valve ass
23. al is not stable zeroing will take long and the nearest point to zero is accepted The procedure will take approx 10 sec So make sure that there is no flow through the instrument when performing the zeroing procedure Ready When indication is showing 0 signal and the green indication LED is burning continuously again then zero has been performed well Zeroing with digital communication The following parameters must be used for zeroing an instrument Initreset Cntrlmode CalMode Set process conditions Warm up pressure up the system and fill the instrument according to the process conditions Stop flow Make sure no flow is going through the instrument by closing valves near the instrument Send parameters Send the following values to the parameters in this sequence Initreset 64 Cntrimode 9 Calmode 255 Calmode 0 Calmode 9 Zeroing The zeroing procedure will start at that moment and the green LED will blink fast The zeroing procedure waits for a stable signal and saves the zero If the signal is not stable zeroing will take long and the nearest point to zero is accepted The procedure will take approx 10 sec So make sure that there is no flow through the instrument when performing the zeroing procedure Ready When indication is showing 0 signal and the green indication LED is burning continuously again then zero has been performed well Also parameter Cntrlmode goes back t
24. ance is 0 000 0 006 Vac Therefore flow signal readings above 0 006 Vdc indicate a possible leak SECTION 4 THEORY OF OPERATION Porter s Series Mass Flowmeters MFM s amp Series Mass Flow Controllers MFC s incorporate an operating principle based on the thermodynamic properties of the process gas being monitored Mass flow measurement relates to the amount of heat absorbed by the process gas The amount of heat the gas absorbs is determined by the gas molecular structure Specific heat the amount of heat required to raise the temperature of one 1 gram of a particular gas one degree centigrade 1 C quantitatively describes this thermal absorbency Mass flow measurement consists of a bypass sensing tube with a heater wound around the center of the sensing tube and precision resistance type temperature sensors located equidistant upstream and downstream of the heater A laminar flow element package located in the main flowstream acts as an appropriate restriction creating a pressure drop forcing a fixed percentage of the total flow approximately 10 SCOM through the bypass sensing tube for temperature differential detection For example if a MFM is calibrated for a 1000 SCCM maximum flow 10 SCCM would flow through the sensor assembly and 990 SCCM would flow through the laminar flow element assembly in the main flowstream Figure 4 1 illustrates the sensor assembly as a block diagram FLOW SENSOR OPER
25. ange of actual gas flow the flow signal voltage from the sensor exhibits a relatively slow time constant in the range of 3to 4 seconds The flow signal time response is then enhanced by differentiating the actual flow step related signal changes and summing with the DC component of the flow signal The result is a new refined and faster flow signal that matches the actual gas flow step change wave shape The enhanced flow signal is very effectively used within the flow control loop by the digital controller section of the MFC optimizing the control and speed of response of actual fluid Digital parameter selections appropriately shape all step change responses in terms of both overshoot and or undershoot Figure Block Diagram of Digital Series MFM s and MFC s amp Differentiation Time Constant Adj Offset Adj Temp ACTIVATE LOW FREQUENCY DIFFERENTIATOR Offset Correction amp SIGNAL DC SUMMER Adj Scaling Scale Analog SIGNAL COND Flow Signal AMPLIFICATION 8 DIFFERENTIATOR AD CONV DC PATH Valve driver MICROCONTROLLER AND MEMORY D A Valve Jump Value Proportional Adj area Integral Adj Ad PID ALGORITHM Derivative Adj Scale Analog Setpoint TEMPCO CORRECTION FLOW SIGNAL Upstream Downstream Temp Sense Temp Sense VOLTAGE HEATER Valve ser actuator RESTRICTION 30 Figure Response Cu
26. ass flow control valves MFCV s that are accurate reliable and cost effective solutions for many mass flow applications Porter Series MFM s and Series MFC s accurately measure and control flow rates of a wide variety of gases from 5 standard cubic centimeters per minute SCCM to 1000 standard liters per minute SLPM full scale nitrogen flow for operating pressures up to 3000 PSIG The MFM s and MFC s provide a linear flow signal output proportional to a calibrated flow rate This output signal can be used to drive a digital display such as the digital display included on Porter s Model CM2 CM4 and PCIMA Interface Modules or other customer supplied data acquisition equipment The Series MFM s amp Series MFC s incorporate an operating principle based on the thermodynamic properties of the process gas being monitored Both the Series MFM s amp Series MFC s employ a sensor assembly that includes a heater and two precision resistance type temperature sensors The integral printed circuit board PCB assembly performs amplification and linearization of the sensor assembly output signal and provides the flow signal output Patented restrictive laminar flow elements condition the main channel of gas flow while thermal measurement occurs in the gas flowing through the bypass sensor assembly The Series MFC s additionally incorporate an integral proportional control valve and digital closed loop control circuitry on the PCB assembly
27. asuring value So it is adapting to the measuring input If a step is seen on the measuring signal the exponential filter is decreased so a fast response is possible If only noise is seen the exponential filter is increased to its set value to suppress noise Possible values 0 0 gt Exponential smoothing filter behaves as an standard exponential smoothing filter 1 0 gt Exponential smoothing filter behaves as an adaptive exponential smoothing filter 12 SPECIAL INSTRUMENT FEATURES Zero mass flow instruments only The zero procedure is able to remove zero offset signals on the sensor signal automatically This automatic procedure can be started through the BUS RS232 or by means of the micro switch on top of the instrument Zeroing with the Micro switch Set process conditions Warm up pressure up the system and fill the instrument according to the process conditions Stop flow Make sure no flow is going through the instrument by closing valves near the instrument Press and hold until With no flow use the push button switch on the outside of the instrument to start the zero adjustment procedure Press the push button and hold it after a short time the red LED will go ON and OFF then the green LED will go ON At that moment release the push button Zeroing The zeroing procedure will start at that moment and the green LED will blink fast The zeroing procedure waits for a stable signal and saves the zero If the sign
28. cable specifications and with appropriate maintenance for one 1 year from date of delivery to the customer unless otherwise specified in writing Equipment which malfunctions may be returned shipment prepaid to Porter Instrument for test and evaluation Equipment determined to be defective and in warranty will be repaired or replaced at no charge to the customer Equipment out of warranty will be evaluated and if the equipment does not meet original specifications and calibration the customer will be notified of the costs before proceeding with repair or replacement Repaired equipment will be warranted ninety 90 days from date of delivery to the customer or for the balance of the original warranty whichever is longer Failures due to shipping damage accident misuse improper mechanical or electrical installation or operation or internal clogging or corrosion due to use of contaminated fluids or inadequate system purging are excluded from warranty coverage Porter Instrument obligation for breach of this warranty or for negligence or otherwise shall be strictly and exclusively limited to the repair or replacement of the equipment This warranty shall be void as to any equipment on which the serial number if applicable has been altered defaced or removed Porter Instrument shall under no circumstances be liable for incidental or consequential damages No other promise or statement about the equipment by any representative or authori
29. cts of God or any other causes which are beyond Porter Instrument control Specifications and dimensions subject to change Certificate of Warranty Cancellations No cancellations will be accepted on non standard or special merchandise except by payment of full purchase price If buyer requests cancellation of any order or part thereof and is agreed to by Porter Instrument in writing buyer will be subject to cancellation charges to cover the cost of material and or fabrication incurred by Porter Instrument to date of cancellation Changes of Order A minimum of 90 days notice is required on all changes to orders and will be subject to rescheduling as a new order at Porter Instrument discretion Returns No returns will be accepted unless authorized in writing by Porter Instrument and accompanied by a properly completed Returned Goods Authorization All returns are subject to restocking and possible rework charges to be determined by Porter Instrument THIS WARRANTY IS GIVEN IN PLACE OF ALL OTHER WARRANTIES EXPRESS OR IMPLIED OF MERCHANTABILITY FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE NO PROMISE OR STATEMENT MADE BY ANY REPRESENTATIVE OR AUTHORIZED DEALER OF PORTER INSTRUMENT SHALL CONSTITUTE A WARRANTY BY PORTER INSTRUMENT PORTER INSTRUMENT ASSUMES NO LIABILITY FOR USE OF THIS EQUIPMENT Porter Instrument warrants this equipment to be free from defects in workmanship and materials when used in accordance with appli
30. current eeaeee 4 20 mAdc for 0 100 flow Over range capabilitv ena 10 Output current limit lt 30 mAdc Output current maximum for input signal fault 26 mAdc Output protection continuOUS esee 30 Vdc maximum External load 8 voltage 200 750 ohm for 15 30 Vdc loop supply voltage Loop driver voltage compliance 5 5 30 Vdc with appropriate driver power dissipation limiting Zero signal reference 4 Power common sourcing current driver Setpoint applicable to Series MFC s only Input current for 0 100 flow control Normal 2 3 5 pen 4 20 mAdc Limits 4 20 mAdc setpoint Maximum in 27 mAdc MINIMUM eb 4 mAdc 1 5 Vdc setpoint Maximum oa e cha dta eese a ane A Ea ERN 11 Vdc MINIMUM dreiet A aaa aaa a a a A aaa 2 5 Vdc Output voltage maximum for current loop input signal Fault gt 20 mAdc but 40 lt 15 Vdc Output protection continuOUS 30 Vdc maximum Input current 4110 microamp Input impedance 4 20 mAdc setpoint nn 215 ohm Common reference ueneenneeennesnnnnnnnnnnnnennneennnnnnneennnnann Power common 39 CURRENT LOOP SPECIFICATIONS The Series MFM s and Series MFC s have available PCB assemblies which can be configured to provide flow signal output in a 4 2
31. d red LED is used for mode indication on digital instruments See table 1 and 2 When the switch is pressed down both LED s will be switched off for function selection As long as the switch will be pressed down there will be a change in indication by the 2 LED s after each 4 seconds The moment the user recognizes the indication LED pattern for the function he wants he must release the switch Now he has triggered the wanted function In table 3 is described what the indications are for the function to be performed at normal situation This is when the switch will be pressed down during normal operation of the instrument In table 4 is described what the indications are for the functions to be performed at power up situation of an instrument This can be realized by pressing the switch first and while pressing connecting the power These actions have a more initializing character for the instrument In paragraph 10 2 is described how bus address and baudrate can be set for an instrument Using this 1 switch and 2 LED s this way offers the user a maximum of possibilities even if this instrument is only operated by an analog interface 14 Table 1 Green LED indication modes for digital instrument no switch used Green LED Time Indicaton O Continuously Power off or program not running Continuously Normal running operation mode n short flash 0 1 sec on 2 sec off Special mode see specific fieldbus for more
32. e For each fluid number capacity will be stored separately Capacity 0 This is the capacity zero point offset for direct reading in sensor base units The base unit will be determined by sensor type This capacity 0 is the same for all stored fluid number s Fmeasure Floating point version of variable measure The users will read out the measured value in the capacity and capacity unit for which the instrument has been calibrated These settings depend on variables capacity capunit sensortype and capacity0 Fmeasure is a read only float on BUS proc 33 par 0 Value is calculated as follows proc33 par0 proc1 par 0 proc1 par13 proc33 par 22 proc33 par22 fmeasure measure 32000 capacity capacity0 capacityO The value is in units as described in parameter capunitstr proc 1 par 31 Fsetpoint With the use of parameter fmeasure also fsetpoint is often needed This parameter is R W as variable in BUS proc33 par3 Setpoint can be operated via 2 parameters at the same time One parameter is setpoint a short integer The other one is fsetpoint a float in the capacity in which the instrument was calibrated see also fmeasure Last received setpoint by the instrument will be valid It is not advised to use setpoint and fsetpoint at the same time Choose either one or the other Relation between setpoint and fsetpoint is calculated as follows proc1 pari proc33 par3 proc33 par22 proc1 par13 proc33 par22 Setpoint
33. eated to force the control valve fully open during system or process diagnostics LED Operation Indicators After power up illuminated green LED coupled with unlit red LED confirms proper operation of digital control circuitry SECTION 2 Digital Series SPECIFICATIONS Specifications for Digital Series Mass Flowmeters and Mass Flow Controllers Response Time per SEMI E17 91 Settling Time 1 to 2 seconds Accuracy and Linearity 1 of reading from 100 to 20 flow 0 2 FS below 20 1 596 FS High Flow Models Repeatability Within 0 2 of rate at any constant temperature within operating temperature range Rangeability Control Range 50 1 2 100 full scale accuracy and control Ambient and Operating Temperature Range 10 to 70 C 14 to 158 Temperature Coefficient per SEMI E18 91 Zero Effect and Span Effect 0 05 full scale C of zero 0 05 of reading C of span Pressure Coefficient per SEMI E28 92 Total Calibration Effect 0 1 atmosphere typical using Nitrogen Nz Setpoint Input Flow Signal Output 0 5 2K ohm min load resistance for flow signal output 0 10 Vdc 3k ohm min load resistance 4 20 mAdc refer to load resistance values below Load resistance values for 4 20 mAdc flow signal output 200 750 ohm for 15 30 Vdc loop supply voltage Power Supply Requirements Current Consumption lt 250 mAdc Voltage output models 15 10 Vdc Current loop model
34. embly Do not change any shim positions 33 e Unscrew the orifice and remove the orifice and orifice O ring f Parts may be cleaned ultrasonically in a suitable solvent The valve stem and orifice O rings should be replaced prior to reassembly Replacement O rings are available from Porter g Reassemble parts in reverse order h Test MFC performance for smooth opening flows and stable control at setpoint NOTE The normally open valve on the Model 701 Flow Controller is a tested module It should not be field disassembled If necessary the entire module may be replaced Troubleshooting and Repair Tool Diagnostic kit breakout board P N 4 01 077 is available for troubleshooting purposes This diagnostic kit is placed between the MFM s or MFC s external 9 pin D type electrical connector and the mating interconnecting cable assembly to allow the user to monitor voltage readings System Troubleshooting The system troubleshooting table shown on the following page in Table 5 1 indicates the steps to follow after a physical check is completed This table offers a cause and effect procedure aimed at localizing the trouble to a particular section or system component Return Shipments Contact Porter Instrument Company for a return authorization RA forms if an MFM or MFC is to be returned for any reason The RA form along with a Declaration of Contamination form and a Material Safety Data Sheet must accompany all return
35. er to System Purging for additional recommendations System Purging To eliminate contamination from foreign materials start up cleaning is highly recommended prior to MFM MFC installation Start up cleaning must remove weld debris tube scale and any loose particulate generated during system fabrication 23 If corrosive gases or reactive gases are to be used the complete gas handling system must be purged to remove all air before introducing process gas into the system Purging can be accomplished with dry nitrogen or other suitable inert gases Also if it becomes necessary to break any gas connection exposing the gas handling system to air all traces of corrosive or reactive gas must be purged from the system before breaking the connection Never allowing a corrosive or reactive process to mix with air reduces the chance of particulate or precipitate formation in the gas handling system External Electrical Connector 9 Pin D Connector Please note the two 2 common references noted in the text SIGNAL COMMON pin 8 is a zero current return reference for all functional circuit modules POWER COMMON 0 VDC pin 4 is the separate return for the proportional control valve operating current and all other circuit currents Figures diagram the external electrical connections to be made to the Series MFM s and Series MFC s A separate control valve common wire connected to POWER COMMON O VDC pin 4 is illustrated
36. eral Information t ute errqesin c 23 System Purging 4 e detta e etae eb pet e if res 23 External Electrical Connector 9 Pin D Connector ena 23 Simplified External Electrical Connections for Series MFM s amp MFOS FIgufes x idco ee afe ete e ent cens 24 Basic Operating Procedures to Establish a Controlled Flow Rate 26 Valve Override SIM VO for Series MFC s ners 26 Low Setpoint Command sse enne ener sete EAtAKANZAAnnEEnz en 26 Section 4 THEORY OF OPERBAT ON este t EE EE Ere era fee 27 Block Diagram of Sensor Assembly Figure L sese 27 Sensor Assembly PCB Figure L nanna nr arana 28 Laminar Flow Elements Figure L senem 28 Digital Series MFM and MFC Electronics nn 28 LEIMC ARIZ ation astra 29 Fast RESPONSE punt aene cnr enda tee kamera sed 29 Block Diagram of Series MFM s MFC s Figure nanna 30 Response Curves Factory Calibration Comparison of Flow Signal and Actual Flow EE se 31 Control of the Proportional Control Valve erssnsessseennnnnennnnnnnnnnnnnnnnnnnnnnnnnnnnnn 32 Section 5 Section 6 Section 7 Section 8 MAINTENANGE muntert ra ERE LITERE Qs ded 33 General a a A fu 33 Preliminary Checks fee ee de errato d rep Bo Pene e EE MER E Fie 33 Control Valve Disassemblv ann nanna nannti an neret nennen nsn nnne nes 33 Troubleshooting and Repair Tool
37. hen gas flow does occur the downstream temperature sensor increases its resistance in response to a higher temperature with respect to the upstream temperature sensor A differential voltage is developed which is directiv proportional to the mass flow rate of the gas This differential voltage signal tvpicallv about 30 millivolts mV maximum is applied to the input of a precision instrument amplifier The amplified signal is then fed to a tempco correction circuit which corrects the temperature sensor bridge network excitation voltage The degree of correction is small with a subtle temperature related sensitivity effect accommodated as the flow controller and gas temperatures vary The amplified signal is fed to an A D converter Digital offset span linearization and time of response adjustments are performed on the digitized sensor signal values Linearization During initial flow calibration flow inaccuracy is measured The initial flow characterization data is used to calculate a polynomial The polynomial coefficients are stored in memory for permanent use After calibration the stored polynomial coefficients become correction factors applied to real time sensor flow data The corrected flow signal values are used by the controller algorithm and output as analog flow signal 29 Fast Response Fast response is achieved with a combination of analog circuitry and digital control parameter selections For a step ch
38. ial cable on 38400 Baud Analog and RS232 are always present on Digital Series instruments Modbus interface is a standard option An interface to any available fieldbus is a special optional Operation via analog interface RS232 interface and an optional fieldbus can be performed at the same time A special parameter called control mode indicates to which setpoint the controller should listen analog or digital via fieldbus or RS232 The RS232 interface behaves like a bus interface When using more interfaces at the same time reading can be done simultaneously without problems When changing a parameter value the last value sent by an interface will be valid Also the micro push button switch and the LED s on top of the instrument can be used for manual operation of some options The green LED will indicate in what mode the instrument is active The red LED will indicate error warning situations Zeroing In general the zero point of each instrument is factory adjusted If so required the zero point of the instrument may be re adjusted After warm up with no gas flow use the micro push button switch on top of the instrument to start the automatic zero adjustment procedure if required For flow controllers setpoint must be zero Be sure there is no gas flow For information on how to start the automatic zero procedure by means of the micro push button switch see special features below It is also possible to start the aut
39. ical Connections for Series MFM s and Series MFC s Sourcing Current Loop Flow Signal Output Models Power In Loop amp MFC G Voltage Source T itt ransmitter Flow Signal FSIG Setpoint STPT To Driver Power Supply Power Common 0 Vdc 4 20 mA Transmitter 25 Basic Operating Procedures to Establish a Controlled Flow Rate Introduce power to the system allowing a ten 10 minute warm up period prior to operation For Series MFC s adjust SETPOINT to zero flow rate Turn on the supply of gas to be monitored controlled Using the circuit illustrated in Figure 3 1 to operate the MFC at a desired flow rate press the push button switch shown to allow indication of the SETPOINT The digital display will now indicate the flow rate as determined by the SETPOINT Adjust the SETPOINT until the digital display indicates the desired flow Releasing the push button switch will cause the digital display to indicate the process flow rate It is recommended this switch be labeled PROCESS SETPOINT or FLOW SIGNAL SETPOINT Additional Features Connections and Operation Valve Override SIM VO for Series MFC s Pin 5 of the 9 pin D connector is designated VLVTST and has dual functions both of them accessible by employing a diagnostic kit breakout board function refer to Section 5 Maintenance for available troubleshooting amp repair tools When connected to a digital voltmeter pin 5 provides measurement of
40. laminar flow element package are designed for laminar flow Actual gas or gas factors are used in calibration to account for the specific heat of the monitored gas The upstream temperature sensor downstream temperature sensor and heater are connected to the PCB assembly via a miniature flexible interconnecting cable These components are shown in Figure 4 2 Figure Sensor Assembly and Electronic Printed Circuit Board As previously mentioned the laminar flow element package acting as a flow restriction creating the required pressure drop is located in the main flowstream The laminar flow element package in addition to forcing a fixed percentage of the total flow through the bypass sensing tube also determines the MFM s MFC s maximum flow for which the unit may be calibrated Disc like individual flow elements comprise the laminar flow element package Each flow element has chemically etched precision channels to restrict flow The MFM s MFC s maximum flow rate determines both the size and quantity of flow elements used As few as one 1 and as many as three hundred 300 flow elements may be required Figure 4 3 illustrates three 3 of the five 5 available sizes of the laminar flow elements The smallest flow element shown has only one 1 chemically etched precision flow channel and would be used as part of a laminar flow element package in a low flow range MFM MFC In comparison the largest flow element shown contain
41. n 5 is variable and a function of Rsm vo and VLVTST voltage and the resistance connected between pin 5 and the 15 V supply rail or power common 3 Logic level driven devices may be used to actuate the SIM VO function as long as the ACTUATE and NON ACTUATE DEFEAT voltage and current conditions are satisfied Note when SIM VO is not actuated voltage at VLVTST under normal operation can range from 1 13 5 Vdc Logic driven devices connected to VLVTST must be capable of withstanding this range of voltages Digital Interfacing When logic IC s such as TTL or CMOS gates or drivers etc are used to interface an external computer controller with the Digital Series LFC it is important to observe the logic level values required for proper and reliable operation See details above 41 SECTION 8 POLICIES AND CERTIFICATE OF WARRANTY Policies Prices All prices are F O B Hatfield PA and subject to change without notice All merchandise will be invoiced at prices in effect at time of shipment Prices do not include insurance freight taxes or special handling These charges if applicable will be shown separately on invoice Minimum order 30 00 Payment Terms Net 30 days after invoice date All invoices past due are subject to a finance charge of 17 per month 18 annual rate Shipments Shipment of merchandise shall at times be subject to credit approval and will be contingent upon fires accidents emergencies a
42. n how instrument was standard setpoint for as standard setpoint for ordered Setting can be changed during controller at power controller at power up normal operation using parameter up ControlMode so take over of setpoint control by RS232 or fieldbus is possible At next power up however controller will read jumper first for actual setpoint source S4 38 reseved J4 reserved Notalways present S1 J5 Normal RS232 Instrument in FLASH FLASH mode can also be selected using communication mode RS232 used for the micro switch on top of the instrument TESTING AND DIAGNOSTICS download of new All digital instruments have facilities to run self test procedures for diagnostics Most of the instrument functions will be tested automatically during start up or normal running mode of the instrument All results of testing or malfunctioning will be stored in special diagnostics registers in the non volatile memory of the instrument These registers will contain actual information about the functioning of the instrument The red LED on top of the instrument is used to indicate if there is something wrong The longer the LED is burning blinking red the more is wrong with the instrument firmware 22 SECTION 3 INSTALLATION AND OPERATING PROCEDURES General Information Porter Series MFM s and Series MFC s must be installed in a clean dry area with adequate space surrounding the MFM MFC for ease of maintenance
43. o its original value As last send 0 to parameter Initreset This action will be performed already during production at Porter but may be repeated at wish on site 13 Restore parameter settings All parameter value settings in the instruments are stored in non volatile memory so each time at power up these settings are known However several settings can be changed afterwards in the field by a user if needed Sometimes it may be necessary to get back all original settings Therefore a backup of all settings at production final test will be stored in non volatile memory also Because of this it will be possible to restore these original factory settings at any moment Of course this will only function as long as there is no memory failure Restoring original factory settings can be achieved by means of the micro switch on top of the instrument or through a command via BUS RS232 See instructions for manual operation with switch and LED s for details MANUAL INTERFACE micro switch and LED s General The micro switch on top of the digital instrument can be used to start a certain function at the instrument When the switch is pressed down both LED s will start indicating different patterns in a loop The switch has to be pressed down until the 2 LED s are indicating the right pattern Then the switch has to be released and the choice has been made Normally when the switch is not pressed the green an
44. omatic zero adjustment procedure through the software program on a PC connected to a bus interface module Manual operation By means of manual operation of the micro push button switch some important actions for the instrument can be selected started These options are available in both analog and BUS digital operation mode These functions are reset instrument firmware program reset auto zeroing remove zero drift offset in sensor bridge restore factory settings in case of accidentally changing of the settings BUS Digital operation Operation via fieldbus reduces the amount of cables to build a system of several instruments and offers more parameter values to be monitored changed by the user Operation by means of a fieldbus adds many extra features compared to analog operation to the instruments Such as setpoint slope ramp function on setpoint for smooth control 8 selectable fluids calibration settings for high accuracy direct reading at readout control module or host computer testing and self diagnosis response alarm setpoint measure too high for too long time several control setpoint modes e g purge close valve master slave modes for ratio control identification serial number model number device type user tag adjustable minimal and maximal alarm limits batch counter adjustable response time for controller when opening from zero adjustable response time for normal con
45. ring with selected unit out of table Can only be written when sensortype 4 usertype userunit string of 7 chars can be send IDENTIFICATION PARAMETERS Serialnumber This parameter consists of a maximum 20 byte string with instrument serial number for identification Example M0202123A Modelnumber Porter instrument model number information string Firmware version Revision number of firmware Eg V6 01 Usertag User definable alias string Maximum 13 characters allow the user to give the instrument its own tagname It is advised here to limit the name up to 7 characters Eg Room1s6 10 Manufacturer config Digital instrument manufacturing configuration information string This string can be used by Porter to add extra information to the model number information Identnumber Porter digital device instrument identification number pointer See list below DMFC digital mass flow controller 8 DMFM digital mass flow meter Device type Devicetype information string String value in max 6 chars of descriptions in table above ALARM STATUS PARAMETERS See description in separate Bus manual COUNTER PARAMETERS See description in separate Bus manual SPECIAL PARAMETERS Reset Parameter to reset program counter or alarms Default value 0 Value Description 0 no reset reset counter value no mode change or common reset reset alarm restart batch counter reset counter value counter off
46. rves Factory Calibration Comparison of Flow Signal and Actual Gas Flow file Edit Operate Tools Browse Window Help n se Setup Real Time Chart Sequence Graphs House Keeping of Tup Tdn Fine Tune Valve Cycles 3 of repeats On Time P scale BX fis Hs Ho Save Data pe 4 00 1 00 10 00 5 915164 Jj v EB Ji 2 00 Tolerance F5 y v A AGE Setpt 0 00 PIDK PD PDKd O Save PDF amp Data Setpont Setpt Incr Off Time Pscaleaxn2 Flow sig 4 97 gs Jo 12 Jo 155 50 25 00 1 51073 Valve volts Open From O Save Data ONLY Pressure sig Zero Normal Step Stabile Situation Serial Nu tal 0 00 100 145 11155 tol 5 10 TdValveUp Viv Open Curr Valve Type Analog Analog or Digital 2 4 90 En 110 107 a2 Full Path Name to Data File 2 3 Values Writ x 2 5 10 jalues Written 5 7 ord Values Read and read HA 14 90 2 Accept 9 Response Times Flow Press Flow2 Press 2 aj 30 420 39 980 30 420 139 980 0 000 0 000 0 000 0 000 0000 0 000 0 000 10 000 0 000 0 000 0 000 Setpt Flow Sig 0 D 1 1 D T T D T T D 1 D 1 T D D T D D D xj 0 00 2 00 94 00 6 00 8 00 10 00 12 00 14 00 16 00 18 00 20 00 22 00 24 00 26 00 28 00 30 00 32 00 34 00 36 00 38 00 40 00 jal El Time f r Screen Captures Screen Captu Autocal Microsoft Vi 1 B LabVIEW ja 24 JAN 08 vi Factory
47. s 15 5 or 24 15 Warm up Time 10 minutes External Electrical Connector Nine 9 pin D connector Mounting Orientation Attitude insensitive Digital Series Detailed Features General A Porter digital instrument is a Mass Flow Meter Controller which is equipped with a digital electronic bus PCB These electronics consist of a micro controller with peripheral circuitry for measuring controlling and communication The flow signal is measured and digitized directly at the sensor and processed by means of the internal software firmware Measured and processed values can be output through the analog interface or through the digital communication line RS232 or optional fieldbus interface For controllers the setting for the actuator is calculated by the firmware Setpoint can be given through the analog interface or through the digital communication line Digital instruments have many parameters for settings for signal processing controlling and many extra features and therefore they have a wide range in use Reading and changing of these settings is only possible through fieldbus or RS232 except for measured flow signal value setpoint and valve output which is also possible through the analog interface Depending on parameter setting Digital instruments can be operated by 1 Analog interface 0 5Vdc 0 10Vdc 4 20mA 2 Modbus protocol with RS485 connections 3 RS232 interface connected to COM port by means of spec
48. s 0 32000 0 100 This input can be used to give setpoint or slave factor depending on the value of control mode Setpoint control modes For switching between different functions in use within a digital meter or controller several modes are available Output signals sensor signal on both analog and fieldbus interface are available at the same time Table 1 Overview setpoint control modes Nr Instrument action Setpoint source Master Slave factor source source 0 BUS RS232 Controlling BUS RS232 external input Controlling analog input NEN BUS controlling as slave Master slave BUS BUS RS232 slave from other instrument process RS232 on bus 4 controller idle stand by on BUS RS232 5 test mode testing enabled Porter only tuning mode tuning enabled Porter only setpoint 10096 controlling on 100 10096 IN 8 vavepuge pugevave LE calibration mode calibration enabled EE mmm emn 10 ext input slave controlling as slave Master slave analog input BUS from other instrument process RS232 on analog input Mil od setpoint 0 controlingon0 10 13 BUS controlling as slave Master slave BUS analog input slave external from other instrument process input on bus slavefactor is set with signal on analog input 52 Controling am 1 Note analog input external input pin 3 on DB 9 connector BUS any available fieldbus Dual interface operation When opera
49. s numerous flow channels Varying the number of flow elements in the flow element package using flow elements having more flow channels combinations of similarly sized flow elements or a physically larger flow element size would be used for the various available flow ranges For example a flow element package containing multiple flow elements provides a 28 large number of parallel paths for gas flow thereby obtaining a higher flow rate e Figure 4 3 Laminar Flow Elements Digital Series MFM and MFC Electronics As briefly noted in Section 1 the PCB assembly performs three 3 general flowmeter functions amplification linearization and flow signal output Additionally for an LFC the required control circuitry to regulate a proportional control valve is included on the PCB Refer to Figure 4 2 for the block diagram of the Digital Series MFM s and MFC s A micro controller coordinates A D and D A converters and performs data computation manipulation and storage The micro controller also is involved in the initial factory calibration and setup via its digital I O For a condition of no gas flow both the upstream and downstream temperature sensors are heated equallv giving both sensors the same temperatures and resistance values Therefore the bridge network is balanced and the difference in voltage between each sensing leg of the bridge network is zero With no flow the instrument s flow signal output is also zero W
50. ses running simultaneously for Measuring sensor value Reading analog input signal Digital signal processing Driving valve Setting analog output signal Communication with outside world Memory handling Each process needs its own specific parameters in order to function correctly Most parameter values are accessible through the available interface s to influence the process behavior Many parameters may be controlled by end users for more flexible use of the instruments End users are also free to use their own software RS232 interface Protocol description for instructions with ASCII or Binary HEX telegrams Each parameter has its own properties like data type size reading writing allowance security In general all parameters used for operation of instruments are free to be used by end users Eg measure setpoint control mode slope fluid number alarm and counter all parameter for settings of instruments are meant for Porter service personnel only Eg calibration settings controller settings identification network fieldbus settings Parameters for settings are secured They can be read out but can not be changed without knowledge of special key parameters and knowledge of the instrument Normal operation parameters Measured value measure Measured value flow signal indicates the amount of mass flow metered by the instrument Sensor signals at digital instruments will be digitized at the sensor bridge by means of highl
51. shipments If the MFM or MFC was used with corrosive and or toxic gases the customer is responsible for removing all traces of hazardous materials prior to shipment Detail the conditions of purging used Porter is to be notified about application conditions before any MFM or MFC will be serviced Items must be properly packed and shipped prepaid Part Number Description 4 01 077 Diagnostic kit breakout board A 3034 000 Valve stem spanner wrench for Models 001 003A 601 602A 603A amp 604A A 3033 000 Valve stem spanner wrench for Models 002 amp 602 A 3048 001 Orifice removal socket for use with drive for Models 001 003A 601 602A 603A amp 604A On Models 003A 602A 603A amp 604A this socket will remove the bypass orifice A 3048 000 Orifice removal socket for use with v4 drive for Models 002 amp 602 34 Table 5 1 System Troubleshooting Chart Symptom Possible Cause Corrective Action Check power supply with cable assembly connected for No output No power input required power supply voltage at pin 7 of the 9 pin D connector Check power supply line fuse Signal offset at zero flow Displayed flow signal shifted upscale Check by shorting input to digital display to pin 4 SIGNAL COM with pin 2 of the 9 pin D connector open or by depressing PROCESS SETPOINT switch with SETPOINT control at zero MFM MFC out of calibration Refer to Section 6 Calibration
52. switch is pressed 0 5 pressed and restart counting for next attempt sec on 0 5 sec off Set units of bus red LED flashes time out Press switch and count red flashes for units of address MAC ID 0 1 sec on 0 1 60 sec Bus address MAC ID Release when desired sec off amount has been counted count flashes Counts up to max 9 and than starts at 0 again start when switch When counting fails keep switch pressed and is pressed 0 5 restart counting for next attempt sec on 0 5 sec off Set baudrate of both red and time out Press switch and count red and green flashes fieldbus green LED 60 sec for baudrate setting of the specific fieldbus communication Only flashes 0 1 sec Release when desired amount has been for specific types of on 0 1 sec off counted Counts up to max 10 and than starts fieldbusses e g count flashes at 0 again When counting fails keep switch DeviceNet This part start when switch pressed and restart counting for next attempt will be skipped if no is pressed 0 5 Note selection of 0 means No change baudrate needs to be sec on 0 5 sec selected off Instrument returns to normal running operation mode Changes are valid when they are made within the time out times Actual setting can be checked by pressing the switch 3x briefly with intervals of max 1 sec for readout the bus address MAC ID and baudrate see paragraph 10 2 2 for more details Note 1 Value zero will be indicated by a period of 1 sec off
53. ter slave control via the BUS The output value of any instrument connected to the BUS is automatically available to all other instruments without extra wiring When master slave control is wanted the instrument can be put in control mode 2 or 13 depending on how the slave factor should be set see table above Through BUS an instrument can be told that it should be a slave who should be its master and what should be the slave factor to follow the master with It is possible to have more masters and more slaves in one system A slave can also be a master itself for other instruments Notes These options are available for BUS or RS232 instruments only Output signals from master can be received via BUS only Slave factors can also be changed via RS232 Master slave is meant here for controlling purposes and has nothing to do with master and slave behavior on fieldbus networks Tuning test and calibration These are special modes to prepare the instrument for either a tuning test or calibration action These modes are used by Porter service personnel only and are not meant for customer use Putting the instrument in this mode will disable normal control The instrument will wait until 1 Control mode will change again 2 Instrument receives command secured parameter via bus which item should be tuned tested or calibrated When ready performing the wanted action the instrument will return to its previous control mode again Fluid
54. ting a controller reading measured value and sending setpoint for proper operation it is important that the controller gets its setpoint from the right source Setpoints may come from different sources analog input fieldbus interface or RS232 or may be overruled by close valve or open valve purge commands Therefore it is important to know what the setpoint source of the controller is This can be set by means of parameter controlmode parameter 12 In some cases it is possible that the setpoints may come from 2 sources at the same time The last sent setpoint will be valid and sent to the controller This is the case in controlmode 0 when setpoints may come through any fieldbus interface or RS232 However there could be situations where control over the instrument seems impossible This is the case when the instrument comes into a safe state e g when fieldbus communication is disturbed or disconnected Valve will be forced to a safe state automatically In case you want to get control back via RS232 operation you have to change the controlmode When controlmode gets value 18 safe state will be overruled and sending setpoints via RS232 interface will have effect on the controller again Master slave ratio control In master slave or ratio control the setpoint of an instrument is related to the output signal of another instrument Setpoint slave Output signal master slave factor 100 Digital instruments offer possibilities for mas
55. trol adjustable response time for stable control setpoint measure lt 2 Note Special RS232 cable consists of a T part with 1 male and 1 female sub D 9 connector on one instrument side and a normal female sub D 9 connector on the side of the computer See hook up diagram for the correct RS232 cable which should be used By means of this cable it is possible to offer RS232 communication and still be able to connect power supply and analog interface through the analog sub D 9 connector RS232 communication is only possible with a baud rate of 38 4 KBaud and can be used for Uploading new firmware by means of a special program for trained Porter service personnel only O Servicing your instrument using Porter service programs for trained Porter service personnel only Operating your instrument using RS232 ASCII protocol end user Digital instruments are capable of storing 8 different fluid calibrations Parameters for these calibrations are stored inside the instrument and can be changed through the fieldbus or the RS232 connection by means of a PC program Factory calibration parameters are secured and can not be changed unless you have special rights to do this Selection of another fluid is part of operation and therefore not secured Digital instruments will need at least 1 fluidset of calibration parameters for operation PARAMETERS AND PROPERTIES Digital instruments consist of a microcontroller with several proces
56. usted as follows 128 RespOpenO New response old response 1 05 ContrResp Controller response during normal control at setpoint step 128 ContrResp New response old response 1 05 RespStable Controller response when controller is stable within band of 2 96 128 RespStable New response old response 1 05 PIDKp PID controller response proportional action multiplication factor PIDTi PID controller response integration action in seconds PIDTd PID controller response differentiation action in seconds TdsUp Sensor signal differentiation time in seconds needed to speed up sensor signals going upwards TdsDn Sensor signal differentiation time in seconds needed to speed up sensor signals going downwards ExpSmooCon This factor is used for filtering the signal coming from the sensor circuitry before it is further processed It filters according the following formula out in ExpSmooCon 1 ExpSmooCon out only in case of much noise on the sensor this value will have another value than 1 0 Advise Do not give a value much lower than 0 8 otherwise it would slow down sensor response too much Best setting here 1 0 Factor setting Normal Very fast 0 5 1 0 not advised This filter is in the control loop so it affects the response time ExpSmooAd This parameter is used in combination with the ExpSmooCon It changes the rate of filtering for the exponential filter depending on the change of the me
57. valve shut off adjustment electrical zero setting digital parameter and polynomial adjustment to establish required flow signal accuracy valve voltage range verification and adjustment digital dynamic response adjustment of an initial jump valve voltage and a stability and response digital parameter adjustment for optimized closed loop control Further details are available from Porter describing the calibration activities in our qualified calibration facility Equipment Required To verify or establish specified flow rates accurate calibration equipment and metrology technique is required Do not use equipment whose accuracy is not sufficient for calibration of a Digital Series MFM or MFC Factory equipment includes specialized calibration adjustment software for digital parameters I ATTENTION Observe precautions for handling electrostatic sensitive devices 36 Calibration Field Checks 1 Check zero setting 1 1 Confirm gas supply is off and allow a minimum of five 5 minutes to stabilize 1 2 Verify ZERO pin 2 FSIG to 0 000 006 Vdc 2 Valve voltage range check 2 1 Connect DVM to pin 5 VLVTST and DVM to pin 4 POWER COMMON Introduce gas flow Command a low flow setpoint Wait 60 seconds and verify DVM reads less than 8 50 Vdc Command a 102 3 setpoint Wait 60 seconds and verify DVM reads less than 12 5 Vdc Individual controllers may operate well even when beyond the above values
58. y accurate AD converters using at least 16 bits Digitized signals will be internally processed by the microcontroller using floating point notation The sensor signal will be differentiated linearized and filtered At the digital output measured values will be presented as an unsigned integer in the range of 0 65535 Setpoint Setpoint is used to tell the controller of an instrument what the wanted amount of mass flow is Signals are in the same range as the measured value only setpoint is limited between 0 and 100 Setpoint can be given either via optional fieldbus or RS232 or via analog interface Parameter control mode selects the active setpoint for the controller See that paragraph for more detailed information Setpoint slope Digital instruments can establish 8 smooth setpoint control using the setpoint slope time The setpoint will be linear increased in time from old setpoint to new setpoint value A value between 0 and 3000 seconds with a resolution of 0 1 seconds can be given to set the time for the integrator on the setpoint signal Setpoint will reach its end value after newsp oldsp Slope seconds 100 Example When slope 10 seconds how long will it take to go from 20 to 80 ET 1026 seconds 100 Analog input Depending on the parameter value of analog mode this signal converts either 0 5Vdc 0 10Vdc 4 20mA Analog input signals digitized are in the same range as measured value
59. zed dealer of Porter Instrument shall constitute a warranty by Porter Instrument or give rise to any liability or obligation of Porter Instrument Parker Hannifin Corporation Porter Instrument Division 245 Township Line Rd Porter P O Box 907 Hatfield PA 19440 0907 USA 215 723 4000 fax 215 723 2199

500, 600, 700 Digital SERIES GAS MASS FLOWMETER

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